Conveying mechanism and sheet expanding device

Abstract

The present invention provides a conveying mechanism and a sheet expanding device that restore the orientation of the bottom surface of the suction pad after suction is released. The conveying mechanism sucks and holds an object and conveys it. The conveying mechanism includes: a suction portion having a suction pad that sucks and holds the object using the suction pad; a bracket connected to the suction portion via a swingable joint; an elastic member having one end fixed to the suction portion and the other end fixed to the bracket; a negative pressure control unit having a valve disposed in a predetermined flow path connected to the suction portion, the negative pressure control unit controlling the generation of negative pressure in the suction portion; and a moving unit that moves the bracket. The elastic member allows the suction portion to swing according to the inclination or deformation of the sucked and held object, and when the suction and holding of the object are released, the orientation of the suction pad is restored to a predetermined orientation when the suction pad does not suck and hold the object.

Description

Technical Field

[0001] The present invention relates to a conveying mechanism for attracting and holding an object and conveying the object, and a sheet expanding device for expanding a sheet adhered to a plate-like object. Background Art

[0002] There is known a conveying mechanism for attracting and conveying a flexible and stretchable sheet-like object. For example, the conveying mechanism has a metal bracket having a substantially H shape in a plan view. A plurality of suction units are provided on the bracket. Each suction unit has: a suction portion having a suction pad; and a joint disposed between the suction portion and the bracket.

[0003] When the conveying mechanism attracts and holds an object, the object sometimes deforms or tilts. In contrast, there is known a technique in which, by configuring the joint to be swingable (i.e., capable of oscillating), even if the object is deformed, tilted, etc., the orientation of the bottom surface of the suction pad follows the surface of the object, so that the object is appropriately held (for example, refer to Patent Document 1).

[0004] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2014-194991

[0005] However, in the case where the orientation of the bottom surface of the suction pad follows the surface of the object, even when the suction is released after conveyance and the object is released from the suction pad, the orientation of the bottom surface of the suction pad does not return to the orientation during conveyance, and sometimes it is impossible to attract and hold the next object. Summary of the Invention

[0006] The present invention has been made in view of the above problems, and an object thereof is to provide a conveying mechanism in which the orientation of the bottom surface of the suction pad is restored after the suction is released.

[0007] According to one aspect of the present invention, there is provided a conveying mechanism for attracting and holding an object and conveying the object, the conveying mechanism including: a suction portion having a suction pad for attracting and holding the object; a bracket connected to the suction portion by a swingable joint; an elastic member having one end fixed to the suction portion and the other end fixed to the bracket; a negative pressure control unit having a valve disposed in a predetermined flow path connected to the suction portion, the negative pressure control unit controlling the generation of negative pressure in the suction portion; and a moving unit for moving the bracket, the elastic member allowing the suction portion to swing according to the tilt or deformation of the attracted and held object, and when the attraction and holding of the object is released, restoring the orientation of the suction pad to a predetermined orientation when the suction pad does not attract and hold the object.

[0008] Preferably, the elastic member is a rubber sheet, a resin sheet, an elastomer sheet, or a spring.

[0009] According to another aspect of the present invention, there is provided a sheet expanding device that expands a sheet adhered to a plate-like object. The sheet expanding device includes: an expanding unit that expands the rectangular sheet adhered to the plate-like object in a predetermined planar direction; a frame arranging unit that has a first suction pad for sucking a ring-shaped frame and arranges the ring-shaped frame on one surface side of the sheet expanded by the expanding unit so as to surround the periphery of the plate-like object. The ring-shaped frame has an opening with a diameter larger than the size of one surface of the plate-like object; a cutting unit that has a cutting edge for cutting the outside of the opening in the sheet to which the plate-like object and the ring-shaped frame are adhered; and a conveying mechanism that sucks and holds the outer peripheral portion of the hole formed by cutting the sheet with the cutting edge and conveys the sheet to a waste box. The conveying mechanism includes: a suction unit that has a second suction pad for sucking and holding the sheet; a bracket that is connected to the suction unit by a swingable joint; an elastic member whose one end is fixed to the suction unit and the other end is fixed to the bracket; a negative pressure control unit that has a valve disposed in a predetermined flow path connected to the suction unit and controls the generation of negative pressure in the suction unit; and a moving unit that moves the bracket. The elastic member allows the suction unit to swing according to the inclination or deformation of the sheet sucked and held, and when the suction and holding of the sheet are released, the orientation of the second suction pad is restored to a predetermined orientation when the second suction pad does not suck and hold the sheet.

[0010] Preferably, after pressing and adhering the sheet sucked and held by the suction unit to one surface of the sheet previously stored in the waste box, the suction of the sheet is released, so that the pressed and adhered sheet is stacked on the sheet previously stored in the waste box.

[0011] The conveying mechanism according to one aspect of the present invention has an elastic member whose one end is fixed to the suction unit and the other end is fixed to the bracket. The elastic member allows the suction unit to swing according to the inclination or deformation of the object sucked and held. In addition, when the suction and holding of the object are released, the external force acting on the suction unit from the object disappears, so that the orientation of the bottom surface of the suction pad naturally returns to the original orientation due to the restoring force of the elastic member. Therefore, it has the advantage of not interfering with the operation when sucking the next object to be sucked. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is a perspective view of the sheet expanding device.

[0013] Figure 2 is a perspective view of the transfer unit.

[0014] Figure 3 It is a top view of the expansion unit.

[0015] Figure 4 (A) of is a perspective view of a Z-axis direction moving mechanism etc. Figure 4 (B) of is a perspective view of the conveying mechanism.

[0016] Figure 5 (A) of is a partial sectional side view of a suction part etc. Figure 5 (B) of is an enlarged view of a suction part etc. when the orientation of the bottom surface of the suction pad has changed.

[0017] Figure 6 It is a figure showing the sheet expansion step.

[0018] Figure 7 It is a figure showing the frame configuration step and the cutting step.

[0019] Figure 8 It is a figure showing the device chip unit separation step.

[0020] Figure 9 It is a figure showing the sheet suction step.

[0021] Figure 10 It is a figure showing the clamping unit retraction step.

[0022] Figure 11 It is a figure showing the sheet waste step.

[0023] Figure 12 It is a flowchart showing the sheet processing method.

[0024] Figure 13 It is a figure showing the sheet waste step of a modified example.

[0025] Figure 14 It is a partial enlarged view of the conveying mechanism of the second embodiment.

[0026] Figure 15 It is a figure showing the positional relationship between the suction pad and the corrugated suction pad.

[0027] Reference numeral description

[0028] 2: Sheet expanding device; 4: Base; 8: Sheet providing unit; 10: Pasting unit; 12: Support portion; 14: Shaft portion; 16: Base portion; 18: Cylinder; 20: Chuck table; 20a: Upper surface; 22: Rectangular plate; 22a: Through opening; 24: Cutting edge portion; 26: Heater; 28: X-axis moving mechanism; 30: Guide rail; 32: Moving plate; 34: Ball screw; 36: Rotary drive source; 40: Handover unit; 42: Moving plate; 44: Rotary drive source; 46: Disc; 48: Cylinder; 48a: Cylinder barrel; 48b: Piston rod; 50: Chuck table; 50a: Holding surface; 52: Clamping mechanism; 54: Support pillar; 56: Roller portion; 58: Cutting unit; 58a: Cutting edge; 60: X-axis moving mechanism; 62: Guide rail; 64: Ball screw; 70: Peeling mechanism; 72: Expanding unit; 74A: First clamping unit; 74B: Second clamping unit; 74C: Third clamping unit; 74D: Fourth clamping unit; 76a: Lower clamping portion; 76a1: Roller; 76b: Upper clamping portion; 76b1: Roller; 78: Upper arm; 80: Upper movable plate; 82: Guide rail; 84: Rotary drive source; 86: X-axis moving mechanism; 88: Ball screw; 90: Rotary drive source; 92: Bearing; 94: Upper clamping portion; 96: Upper arm; 98: Upper movable plate; 100: Guide rail; 102: Rotary drive source; 104: Y-axis moving mechanism; 106: Ball screw; 108: Rotary drive source; 110: Frame configuration unit; 112: Base portion; 112a: Suction pad; 114a: Support column; 114b: Connection portion; 114c: Moving plate; 116: Z-axis direction moving mechanism; 118: Moving plate; 120: Guide rail; 122: Ball screw; 124: Rotary drive source; 126: Moving block; 128: Guide rail; 130: Ball screw; 132: Rotary drive source; 134: Y-axis moving mechanism; 136: Moving unit; 138: Cylinder; 138a: Cylinder barrel; 138b: Piston; 140: Conveying mechanism; 142: Bracket; 142a: Linear portion; 142b: Connecting portion; 142c: Cylindrical portion; 142d: Column; 142e: Horizontal plate; 144: Elastic member; 144a: Upper end portion; 144b: Lower end portion; 146: Suction portion; 146a: Flow path; 146b: Suction pad; 148: Connector; 148a: Flow path; 148b: Spherical portion; 148c: Cylindrical portion; 150: Flow path; 152: Suction source; 154: Valve; 156: Negative pressure control unit; 158: Waste box; 160: Wrinkled suction pad; 11: Workpiece; 11a: Front surface; 11b: Back surface; 13: Division predetermined line; 15: Device; 17: Protection component; 19: Sheet; 19a: One surface; 19b: Hole; 19c: Outer peripheral portion; 21: Workpiece unit; 23: Ring frame; 23a: Through opening; 25: Device chip; 27: Device chip unit; A1, A2: Orientations. Detailed implementation mode

[0029] An implementation mode of one aspect of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a perspective view of the sheet expanding device 2 of the first implementation mode. The sheet expanding device 2 is a device for expanding a sheet (object) 19 which is a stretchable expanding tape after being pasted on a plate-shaped workpiece (plate) 11 (refer to Figure 2 etc.).

[0030] First, refer to Figure 2 The workpiece 11 etc. will be described. The workpiece 11 of the present implementation mode is a disk-shaped wafer formed of a semiconductor material such as silicon. A plurality of dividing predetermined lines 13 intersecting each other are set on the front surface 11a side of the workpiece 11.

[0031] Devices 15 such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area divided by the dividing predetermined lines 13. In addition, a protective member 17 made of resin and having substantially the same diameter as the workpiece 11 is pasted on the front surface 11a side.

[0032] In the workpiece 11 of the present implementation mode, a plurality of modified layers are formed at different depth positions of the workpiece 11 along each dividing predetermined line 13. The modified layers are formed using a laser processing device (not shown).

[0033] For example, the condensing point of a laser beam having a wavelength that can pass through the workpiece 11 is positioned at a predetermined depth inside the workpiece 11, and the condensing point is moved along the dividing predetermined line 13 to form one modified layer.

[0034] In Figure 2 In the workpiece 11 shown, after forming a plurality of modified layers on each dividing predetermined line 13, by applying an external force to the workpiece 11, the workpiece 11 is in a state before being divided into a plurality of device chips 25 starting from the modified layers (refer to Figure 6 etc.). In addition, the workpiece 11 is not limited to the state before being divided, and may also be a state in which it has been ground, cut, etc. and divided into a plurality of device chips 25.

[0035] However, the material, shape, structure, size, etc. of the workpiece 11 are not particularly limited. For example, a substrate made of a semiconductor material other than silicon may also be used as the workpiece 11. In addition, the type, number, shape, structure, size, arrangement, etc. of the devices 15 are also not limited.

[0036] Here, return Figure 1, the structural elements of the sheet expanding device 2 will be described. Figure 1 The X-axis direction, Y-axis direction, and Z-axis direction shown are perpendicular to each other. The sheet expanding device 2 has a flat base 4.

[0037] At the corner of the base 4 on one end side in the X-axis direction, a sheet supply unit 8 for supplying the sheet 19 to the workpiece 11 is arranged. Additionally, in Figure 1 , the sheet supply unit 8 is simplified and shown as a rectangular parallelepiped.

[0038] In the sheet supply unit 8, a roll body (not shown) obtained by winding the sheet 19 with a release film is arranged. The sheet 19 is composed of a base material layer and an adhesive layer (paste layer) provided on one surface side of the base material layer.

[0039] The base material layer is formed of a resin such as a polyolefin resin. Additionally, the adhesive layer is formed of a resin such as an ultraviolet curable resin, and the above-mentioned release film is pasted on the adhesive layer.

[0040] The sheet supply unit 8 has: a feed roll (not shown) that feeds the sheet 19 with a release film from the roll body; and a peeling plate (not shown) that peels the release film from the sheet 19 with a release film.

[0041] Furthermore, the sheet supply unit 8 has: a take-up roll (not shown) that takes up the peeled release film; and a pasting roll (not shown) that supports the base material layer side of the sheet 19 from which the release film has been peeled.

[0042] Above the sheet supply unit 8, a pasting unit 10 is arranged. The pasting unit 10 presses the workpiece 11 against the adhesive layer side of the sheet 19 while attracting and holding the workpiece 11. The pasting unit 10 has a support portion 12, and the support portion 12 includes a pair of arm portions, and the long sides of the pair of arm portions are respectively arranged substantially parallel to the Y-axis direction.

[0043] The ends of the pair of arm portions are connected by a connecting portion arranged substantially parallel to the X-axis direction. Additionally, between the pair of arm portions, a cylindrical shaft portion 14 with a height direction substantially parallel to the X-axis direction is arranged. A rotary drive source such as a motor (not shown) is connected to one end of the shaft portion 14.

[0044] Between one end and the other end of the shaft portion 14, a flat base portion 16 is fixed to the shaft portion 14. On one surface of the base portion 16, a disk-shaped chuck table 20 is fixed.

[0045] The chuck table 20 has a disk-shaped porous plate which is connected to a suction source such as an ejector via a prescribed flow path. The upper surface 20a of the porous plate is exposed on the surface of the chuck table 20, and when the suction source is operated, a negative pressure is generated on the upper surface 20a (holding surface).

[0046] In the connecting portion of the support portion 12, a cylinder 18 for moving the support portion 12 in the Z-axis direction is disposed on the side surface located on the side opposite to the base portion 16. The cylinder 18 has a cylinder barrel and a piston rod, and the above-described support portion 12 is fixed to the upper end portion of the piston rod.

[0047] A rectangular plate 22 is fixed to the lower portion of the cylinder 18. The rectangular plate 22 is located directly below the chuck table 20 and has a through-opening 22a having a diameter larger than the outer diameter of the chuck table 20.

[0048] A cutting edge portion 24 having a cutting edge for cutting the sheet 19 and a heater 26 for heating the cutting edge are disposed on the side surface of the rectangular plate 22 on one side in the X-axis direction. The cutting edge portion 24 can be moved in the Y-axis direction by a moving mechanism (not shown) provided on the rectangular plate 22.

[0049] A ball screw type X-axis moving mechanism 28 for moving the pasting unit 10 in the X-axis direction is provided at an end portion of the rectangular plate 22 on one side in the Y-axis direction. The X-axis moving mechanism 28 has a pair of guide rails 30 disposed in a manner substantially parallel to the X-axis direction and overlapping in the Z-axis direction.

[0050] A moving plate 32 is mounted on each of the guide rails 30 so as to be movable in the X-axis direction. A nut portion (not shown) is provided on the back side of the moving plate 32, and a ball screw 34 substantially parallel to the X-axis direction is rotatably connected to the nut portion. A rotary drive source 36 such as a motor is connected to one end portion of the ball screw 34.

[0051] Here, the procedure for pasting the sheet 19 on the back surface 11b side of the workpiece 11 will be briefly described. First, the pasting unit 10 is disposed above the sheet supply unit 8. Then, with the upper surface 20a of the chuck table 20 facing upward, the front surface 11a side of the workpiece 11 is sucked and held by the upper surface 20a.

[0052] Then, the shaft portion 14 is rotated to turn the upper surface 20a downward. Then, by operating the cylinder 18, the upper surface 20a is moved downward, and the adhesive layer of the sheet 19 is pasted on the entire back surface 11b side of the workpiece 11.

[0053] Next, after cutting the sheet 19 by moving the cutting edge portion 24 in the Y-axis direction, the pasting unit 10 is moved to the other side in the X-axis direction. Thus, the sheet 19 is cut into a substantially square (rectangular) shape, and the protective member 17 and the workpiece 11 are integrated with the sheet 19 (see Figure 2 ).

[0054] The workpiece 11 with the sheet 19 pasted thereon is transferred to a transfer unit 40 disposed below the pasting unit 10. Figure 2 is a perspective view of the transfer unit 40. The transfer unit 40 has a rectangular moving plate 42.

[0055] A rotary drive source 44 such as a motor is provided on the moving plate 42. The output shaft (not shown) of the rotary drive source 44 is disposed substantially parallel to the Z-axis direction, and the central portion of the lower surface of a disk 46 is fixed to the output shaft.

[0056] A cylinder 48 is provided at the central portion of the upper surface of the disk 46. The cylinder 48 has a cylindrical cylinder 48a disposed substantially parallel to the Z-axis direction. The lower portion of a piston rod 48b is disposed inside the cylinder 48a.

[0057] The upper end portion of the piston rod 48b is fixed to the lower portion of a chuck table 50. The structure of the chuck table 50 is substantially the same as that of the above-described chuck table 20. A holding surface 50a that generates negative pressure is exposed on the upper surface of the chuck table 50.

[0058] On the side surface of the chuck table 50, clamp mechanisms 52 for clamping the four corners of the sheet 19 are respectively provided at four different positions in the circumferential direction of the chuck table 50. In the circumferential direction of the chuck table 50, a rectangular pillar 54 is provided between the clamp mechanisms 52.

[0059] The lower end portion of the pillar 54 is fixed to the upper surface of the disk 46. Two roller portions 56 are provided at the upper end portion of the pillar 54. Each roller portion 56 is used when pasting an annular frame 23 described later onto the sheet 19.

[0060] A cylinder (not shown) is provided below each roller portion 56, and the height of each roller portion 56 is adjusted by the cylinder. A cutting unit 58 having an annular cutting edge 58a is provided between the two roller portions 56.

[0061] A cylinder (not shown) is also provided below the cutting unit 58. The height of the upper end of the cutting edge 58a is adjusted by the cylinder. As Figure 1 shown, an X-axis moving mechanism 60 is connected to the lower portion of the moving plate 42 of the transfer unit 40.

[0062] The X-axis moving mechanism 60 has a pair of guide rails 62 arranged substantially parallel to the X-axis direction. A moving plate 42 is mounted on the guide rails 62 so as to be movable in the X-axis direction. A nut portion (not shown) is provided on the back side of the moving plate 42.

[0063] A ball screw 64 substantially parallel to the X-axis direction is rotatably connected to the nut portion. A rotary drive source such as a motor (not shown) is connected to one end of the ball screw 64. In addition, a peeling mechanism 70 is provided at a position above the transfer unit 40. The peeling mechanism 70 peels the protective member 17 adhered to the front surface 11a side of the workpiece 11.

[0064] After the sheet 19 is adhered to the back surface 11b side, when the protective member 17 on the front surface 11a side is peeled by the peeling mechanism 70, a workpiece unit 21 composed of the workpiece 11 and the sheet 19 is formed (refer to Figure 3 etc.).

[0065] As Figure 1 shown, an expansion unit 72 is provided on the other side of the peeling mechanism 70 in the X-axis direction and above the transfer unit 40. The expansion unit 72 expands the sheet 19 of the workpiece unit 21 held by the transfer unit 40 in the XY plane direction (a specified plane direction).

[0066] Mainly refer to Figure 3 to describe the expansion unit 72. Figure 3 is a top view of the expansion unit 72. The expansion unit 72 has a first clamping unit 74A for clamping the sheet 19. The first clamping unit 74A has a lower clamping portion 76a (refer to Figure 6 ) and an upper clamping portion 76b. The lower clamping portion 76a and the upper clamping portion 76b each have a long side portion along the Y-axis direction.

[0067] A plurality of rollers 76a1 are arranged along the Y-axis direction on the upper surface side of the lower clamping portion 76a (refer to Figure 6 ). Each roller 76a1 can rotate about a rotation axis substantially parallel to the X-axis direction, and substantially half of the radial direction protrudes upward from the upper surface of the lower clamping portion 76a.

[0068] Similarly, a plurality of rollers 76b1 are arranged along the Y-axis direction on the lower surface side of the upper clamping portion 76b (refer to Figure 6 ). Each roller 76b1 can rotate about a rotation axis substantially parallel to the X-axis direction, and substantially half of the radial direction protrudes downward from the lower surface of the upper clamping portion 76b.

[0069] A lower arm that is substantially L-shaped when viewed from below is connected to the substantially central portion of the lower clamping portion 76a (in Figure 3One end (not shown in the figure) is shown. Similarly, one end of the upper arm 78, which is substantially L-shaped when viewed from above, is connected to the substantially central portion of the upper clamping portion 76b.

[0070] The other end of the lower arm is connected to a lower movable plate (not shown in the figure), and Figure 3 the other end of the upper arm 78 is connected to an upper movable plate 80. The lower movable plate and the upper movable plate 80 are mounted on a guide rail 82 arranged substantially parallel to the Z-axis direction so as to be movable along the Z-axis direction.

[0071] A nut portion is provided on the side (back side) of the lower movable plate opposite to the lower arm, and a nut portion is also provided on the side (back side) of the upper movable plate 80 opposite to the upper arm 78 (both not shown in the figure). Figure 3 in the figure).

[0072] A ball screw substantially parallel to the Z-axis direction is rotatably connected to the nut portion of the lower movable plate (not shown in the figure), and a rotary drive source such as a motor is connected to the lower end portion of the ball screw (not shown in the figure). Figure 3 in the figure). Figure 3 in the figure).

[0073] Similarly, a ball screw substantially parallel to the Z-axis direction is rotatably connected to the nut portion of the upper movable plate 80 (not shown in the figure), and a rotary drive source 84 such as a motor is connected to the upper end portion of the ball screw. Figure 3 in the figure).

[0074] If the lower arm is raised by operating the rotary drive source and the upper arm 78 is lowered by operating the rotary drive source 84, the sheet 19 can be clamped by the plurality of rollers 76a1 of the lower clamping portion 76a and the plurality of rollers 76b1 of the upper clamping portion 76b.

[0075] The guide rail 82 is fixed to one surface of a rectangular parallelepiped-shaped base portion, and an X-axis moving mechanism 86 for moving the first clamping unit 74A along the X-axis direction is provided at the lower portion of the base portion.

[0076] The X-axis moving mechanism 86 includes: a nut portion (not shown) provided at the lower portion of the base portion; and a ball screw 88 rotatably connected to the nut portion and substantially parallel to the X-axis direction. A rotary drive source 90 such as a motor is connected to one end portion of the ball screw 88.

[0077] In addition, a bearing 92 is connected to the other end portion of the ball screw 88. When the sheet 19 is clamped by the lower clamping portion 76a and the upper clamping portion 76b, if the first clamping unit 74A is moved to one side in the X-axis direction, the sheet 19 is pulled to one side in the X-axis direction.

[0078] When looking down at the extension unit 72, the second clamping unit 74B is arranged on the opposite side of the first clamping unit 74A with respect to a straight line (the first line symmetry axis) that passes through the center of the extension unit 72 in the X-axis direction and is parallel to the Y-axis direction.

[0079] The structure of the second clamping unit 74B is basically the same as that of the first clamping unit 74A. However, the lower arm and the upper arm 78 of the second clamping unit 74B are arranged symmetrically with respect to the first line symmetry axis with the lower arm and the upper arm 78 of the first clamping unit 74A.

[0080] In a state where the sheet 19 is clamped by the lower clamping portion 76a and the upper clamping portion 76b of the second clamping unit 74B, if the second clamping unit 74B is moved to the other side in the X-axis direction by using the X-axis moving mechanism 86 for the second clamping unit 74B, the sheet 19 is pulled to the other side in the X-axis direction.

[0081] Between the first clamping unit 74A and the second clamping unit 74B, a third clamping unit 74C is arranged at a position further on the other side than the end on the other side in the Y-axis direction of the upper clamping portion 76b. The third clamping unit 74C has a lower clamping portion (not shown in Figure 3 which has a long side portion along the X-axis direction) and an upper clamping portion 94.

[0082] A plurality of rollers (not shown in Figure 3 ) are arranged along the X-axis direction on the upper surface side of the lower clamping portion. Each roller can rotate about a rotation axis substantially parallel to the Y-axis direction, and substantially half of the radial direction protrudes upward from the upper surface of the lower clamping portion.

[0083] Similarly, a plurality of rollers (not shown) are arranged along the X-axis direction on the lower surface side of the upper clamping portion 94. Each roller can rotate about a rotation axis substantially parallel to the Y-axis direction, and substantially half of the radial direction protrudes downward from the lower surface of the upper clamping portion 94.

[0084] One end of a straight lower arm (not shown) is connected to the substantially central portion of the lower clamping portion so as to extend to the other side in the Y-axis direction, and one end of a straight upper arm 96 is also connected to the substantially central portion of the upper clamping portion 94 so as to extend to the other side in the Y-axis direction.

[0085] A lower movable plate (not shown) is connected to the other end of the lower arm, and an upper movable plate 98 is connected to the other end of the upper arm 96. The lower movable plate and the upper movable plate 98 are mounted on a guide rail 100 arranged substantially parallel to the Z-axis direction so as to be movable in the Z-axis direction.

[0086] A nut portion is provided on the side of the lower movable plate opposite to the lower arm (the back side), and a nut portion (both not shown) is also provided on the side of the upper movable plate 98 opposite to the upper arm 96 (the back side).

[0087] A ball screw (not shown) substantially parallel to the Z-axis direction is rotatably connected to the nut portion of the lower movable plate, and a rotary drive source such as a motor (not shown) is connected to the lower end portion of the ball screw.

[0088] Similarly, a ball screw (not shown) substantially parallel to the Z-axis direction is rotatably connected to the nut portion of the upper movable plate 98, and a rotary drive source 102 such as a motor is connected to the upper end portion of the ball screw.

[0089] If the lower arm is raised by operating the rotary drive source for the lower clamping portion and the upper arm 96 is lowered by operating the rotary drive source 102, the sheet 19 can be clamped by the rollers of the lower clamping portion and the rollers of the upper clamping portion 94.

[0090] The guide rail 100 is fixed to one surface of the rectangular parallelepiped-shaped base portion, and a Y-axis moving mechanism 104 for moving the third clamping unit 74C in the Y-axis direction is provided at the lower portion of the base portion.

[0091] The Y-axis moving mechanism 104 has: a nut portion (not shown) provided at the lower portion of the base portion; and a ball screw 106 rotatably connected to the nut portion and parallel to the Y-axis direction. A rotary drive source 108 such as a motor is connected to one end portion of the ball screw 106.

[0092] A bearing is connected to the other end portion of the ball screw 106. In a state where the sheet 19 is clamped by the lower clamping portion and the upper clamping portion 94, if the third clamping unit 74C is moved to the other side in the Y-axis direction, the sheet 19 is pulled to the other side in the Y-axis direction.

[0093] A fourth clamping unit 74D is arranged on the side opposite to the third clamping unit 74C with respect to the lower clamping portion 76a and the upper clamping portion 76b of the first clamping unit 74A. The structure of the fourth clamping unit 74D is substantially the same as that of the third clamping unit 74C.

[0094] However, one end portion of a straight lower arm (not shown) is connected to the lower clamping portion so as to extend to one side in the Y-axis direction, and one end portion of a straight upper arm 96 is also connected to the upper clamping portion 94 so as to extend to one side in the Y-axis direction.

[0095] In a state where the sheet 19 is held by the lower clamping portion and the upper clamping portion 94 of the fourth clamping unit 74D, if the fourth clamping unit 74D is moved to one side in the Y-axis direction, the sheet 19 is pulled to one side in the Y-axis direction.

[0096] Return again Figure 1 , other structural elements of the sheet expanding device 2 will be described. On one side in the Y-axis direction of the expanding unit 72, there is a frame storage area (not shown) where metal ring-shaped frames 23 (refer to Figure 7 ) are overlapped and arranged in the Z-axis direction.

[0097] In addition, the ring-shaped frame 23 is a ring-shaped thin plate and has a through-opening (opening) 23a, and the through-opening (opening) 23a has a diameter larger than the diameter (size) of the front surface 11a or the back surface 11b (i.e., one surface) of the workpiece 11 (refer to Figure 7 ).

[0098] Above the base 4, there is a frame arranging unit 110 which conveys one ring-shaped frame 23 while attracting and holding it, and arranges the ring-shaped frame 23 on one surface 19a of the sheet 19 expanded by the expanding unit 72 (that is, the surface on the adhesive layer side of the sheet 19. Refer to Figure 7 ).

[0099] The frame arranging unit 110 is disk-shaped when viewed from above and includes a metal base portion 112. Four suction pads (first suction pads) 112a are arranged on the lower surface side of the base portion 112 so as to be separated from each other along the circumferential direction of the base portion 112.

[0100] The suction pad 112a of the present embodiment is a pad used in a suction mechanism of a vacuum method, and the suction pad 112a is connected to the other end of a flow path (not shown) whose one end is connected to a suction source (not shown) such as a vacuum pump or an ejector.

[0101] A valve (not shown) such as a solenoid valve is arranged in this flow path. If the valve is in an open state, a negative pressure is generated on the bottom surface side of the suction pad 112a. In addition, the suction pad 112a is not limited to the vacuum method, and may also be a pad used in a suction mechanism of a Bernoulli method.

[0102] In the case of the Bernoulli method, a gas supply source for supplying a gas such as air is provided at one end of the flow path instead of the suction source. In addition, an annular suction pad may be provided on the lower surface side of the base portion 112 instead of the plurality of independent suction pads 112a.

[0103] The upper surface of the base portion 112 is connected to the lower end portion of a prismatic support column 114a having a long side portion in the Z-axis direction. The upper end portion of the support column 114a is connected to one end portion of a prismatic connecting portion 114b extending along the X-axis direction.

[0104] The other end portion of the connecting portion 114b is connected to one surface (front surface) of a rectangular moving plate 114c. A Z-axis direction moving mechanism 116 is provided on the other surface (back surface) side of the moving plate 114c. Figure 4 (A) of FIG. is a perspective view of the Z-axis direction moving mechanism 116 and the like.

[0105] The Z-axis direction moving mechanism 116 has a flat plate-shaped moving plate 118 whose long side portion is arranged along the Z-axis direction. A pair of guide rails 120 arranged along the Z-axis direction are fixed on one surface (front surface) of the moving plate 118.

[0106] The above-mentioned moving plate 114c is arranged on the pair of guide rails 120 so as to be movable along the Z-axis direction. A nut portion (not shown) is provided on the back surface side of the moving plate 114c, and a ball screw 122 arranged along the pair of guide rails 120 is rotatably connected to the nut portion.

[0107] A rotation drive source 124 such as a motor is arranged at the upper end portion of the ball screw 122. The moving plate 118, the guide rails 120, the ball screw 122, the rotation drive source 124, etc. constitute the Z-axis direction moving mechanism 116 that moves the support column 114a along the Z-axis direction.

[0108] One surface (front surface) side of a moving block 126 is fixed on the other surface (back surface) side of the moving plate 118. The moving block 126 is movably mounted on a pair of guide rails 128 arranged substantially parallel to the Y-axis direction and overlapping in the Z-axis direction.

[0109] A nut portion (not shown) is provided on the other surface (back surface) side of the moving block 126, and the nut portion is rotatably connected to a ball screw 130, and the ball screw 130 is arranged substantially parallel to the Y-axis direction between the pair of guide rails 128.

[0110] A rotation drive source 132 such as a motor is connected to one end portion of the ball screw 130. The moving block 126, the guide rails 128, the ball screw 130, the rotation drive source 132, etc. constitute a Y-axis moving mechanism 134 that moves the support column 114a and the like along the Y-axis direction.

[0111] As Figure 1As shown, a cylinder 138 is fixed to the side surface of the support column 114a. The cylinder 138 has a cylinder barrel 138a whose longitudinal direction is arranged along the Z-axis direction. The upper part of a piston 138b is arranged inside the cylinder barrel 138a.

[0112] A transfer mechanism 140 is fixed to the lower part of the piston 138b. The Z-axis direction moving mechanism 116, the Y-axis moving mechanism 134, and the cylinder 138 constitute a moving unit 136 (refer to Figure 4 (A) of FIG.

[0113] Figure 4 (B) of FIG. is a perspective view of the transfer mechanism 140 that attracts and holds the sheet 19 (object) and transfers it. In addition, in Figure 4 (B) of FIG., a part of the structural elements is simply shown by lines, functional blocks, etc. The transfer mechanism 140 includes a metal bracket 142 having a substantially H-shaped configuration in a plan view.

[0114] The bracket 142 includes a pair of linear portions 142a arranged substantially parallel to the X-axis direction. The middle portions in the longitudinal direction of the pair of linear portions 142a are connected by a connecting portion 142b arranged substantially parallel to the Y-axis direction.

[0115] Cylindrical portions 142c are formed at the lower ends of both ends of the linear portion 142a. In addition, the cylindrical portions 142c are part of the bracket 142. A flow path is formed in the cylindrical portions 142c, and the upper parts of the cylindrical portions 142c are connected to one ends of a hose, a pipe (both not shown) etc. constituting a flow path 150 (prescribed flow path).

[0116] The other end of the flow path 150 is connected to a suction source 152 such as a vacuum pump or an ejector. In addition, a valve 154 such as a solenoid valve controlled by a control unit described later is arranged on the flow path 150.

[0117] The upper end portion (the other end portion) 144a of an elastic member 144 is fixed to the outer peripheral side surface at the bottom side of the cylindrical portion 142c. The elastic member 144 in the present embodiment is an elastic sheet formed of an elastic material into a cylindrical shape.

[0118] As the elastic material, for example, rubber such as natural rubber and synthetic rubber, polyolefin resins such as polyethylene (PE), polypropylene (PP), and polystyrene (PS), polyester resins such as PET (polyethylene terephthalate), or elastomers are used.

[0119] In addition, the shape of the elastic member 144 is not limited to a cylindrical shape, and it may also be a strip shape. That is, the elastic member 144 may also be a rubber sheet, a resin sheet, an elastic body sheet, etc. in a cylindrical shape or a strip shape.

[0120] In the case where the elastic member 144 is in a strip shape, a plurality of strip-shaped pieces are discretely arranged in the circumferential direction of the cylindrical portion 142c. Further, the elastic member 144 may not be a cylindrical or strip-shaped piece, but a spring.

[0121] In the case where a spring is used as the elastic member 144, a plurality of springs are discretely arranged in the circumferential direction of the cylindrical portion 142c. As each spring, various springs such as a helical spring and a leaf spring can be used. Further, as long as the elastic member 144 can exert a restoring force in the XY plane direction, the material and shape are not limited to the above examples.

[0122] The outer peripheral side surface of the cylindrical attracting portion 146 is fixed to the lower end portion (one end portion) 144b of the elastic member 144. Figure 5 (A) of Figure 5 is a partial cross-sectional side view of the attracting portion 146 and the like. In Figure 5 (A) of Figure 5 , a part of the cylindrical portion 142c, the elastic member 144, and the attracting portion 146 are shown in cross section.

[0123] As shown in Figure 5 (A) of Figure 5 , a joint 148 is connected to the bottom of the cylindrical portion 142c so as to be swingable within a range of a specified solid angle, and the central portion of the upper part of the attracting portion 146 is fixed to the lower part of the joint 148.

[0124] A flow path 146a is formed in the attracting portion 146, and the flow path 146a is connected to an attracting pad (second attracting pad) 146b arranged such that the holding surface for generating a negative pressure faces downward. Further, in Figure 5 (A) of Figure 5 , the side surface of the attracting pad 146b is shown.

[0125] The attracting pad 146b itself is formed of rubber or the like, but the surface of the attracting pad 146b is covered with an anti-sticking agent such as polytetrafluoroethylene. Therefore, the attracting pad 146b can be easily separated from the sheet material 19 even after coming into contact with the adhesive layer of the sheet material 19.

[0126] The flow path 146a is connected to the other end portion of the flow path 150 in the bracket 142 via the flow path 148a of the joint 148. The generation of negative pressure of the attracting pad 146b is controlled by a negative pressure control unit 156 composed of a valve 154 or the like.

[0127] For example, if the valve 154 is in an open state, the attracting pad 146b communicates with the attracting source 152, and a negative pressure is generated on the attracting pad 146b. Further, if the valve 154 is in a closed state, the attracting pad 146b is blocked from the attracting source 152, and the transfer of negative pressure from the attracting source 152 to the attracting pad 146b is blocked.

[0128] The suction pad 146b of the present embodiment is a pad used in a suction mechanism of a vacuum method, but is not limited thereto, and may also be a pad used in a suction mechanism of a Bernoulli method. In the case of the Bernoulli method, a gas supply source for supplying a gas such as air is provided at one end of the flow path 150 instead of the suction source 152.

[0129] The gas supply source has, for example: a compressor that compresses air; a container that stores the compressed air; and a filter that removes water droplets and dust in the air. If the valve 154 is in an open state, gas is supplied from the gas supply source to the suction pad 146b.

[0130] When the suction pad 146b jets gas radially outward from the circular bottom surface or jets gas in a manner that generates a swirling flow below the bottom surface, according to Bernoulli's theorem, the pressure decreases and a negative pressure is generated near the central portion of the bottom surface of the suction pad 146b.

[0131] Next, the joint 148 will be described in more detail. The joint 148 has a metal spherical portion 148b. A cylindrical portion 148c is fixed to the lower portion of the spherical portion 148b. A flow path 148a having a diameter smaller than the diameter of the flow path 150 is formed through the spherical portion 148b and the cylindrical portion 148c.

[0132] The parallel movement of the spherical portion 148b in the X-axis, Y-axis, and Z-axis directions is restricted, but as long as the flow path 148a communicates with the flow path 150, the spherical portion 148b is held at the bottom of the cylindrical portion 142c so as to be rotatable in any direction.

[0133] A structure that enables the spherical portion 148b to rotate is described, for example, in the above-mentioned Patent Document 1. Along with the rotation of the spherical portion 148b, the joint 148 and the suction portion 146 can swing integrally (that is, swinging is allowed).

[0134] For example, when observing the joint 148 in an arbitrary direction perpendicular to the Z-axis direction, the joint 148 can swing within a range of +15 degrees to -15 degrees with respect to the Z-axis direction. Therefore, when the suction pad 146b sucks and holds the sheet 19, even if the sheet 19 is deformed or tilted, the orientation of the bottom surface of the suction pad 146b can follow the surface of the sheet 19 and change.

[0135] Figure 5 (B) is an enlarged view of the suction portion 146 etc. when the orientation of the bottom surface of the suction pad 146b changes from a specified orientation A1 parallel to the Z-axis direction to an orientation A2 different from the orientation A1. When the suction hold of the sheet 19 is released, the external force acting on the suction portion 146 from the sheet 19 disappears.

[0136] Therefore, due to the restoring force of the elastic member 144, the joint 148 and the attracting portion 146 swing, and the orientation of the bottom surface of the attracting pad 146b is restored to the original specified orientation A1 when the sheet 19 is not attracted and held (i.e., Figure 5 the state of (A)). Therefore, in the conveying mechanism 140 of the present embodiment, there is an advantage that it does not interfere with the operation when attracting the next sheet 19 to be attracted.

[0137] In addition, a control unit (not shown) for controlling the operations of the respective rotation drive sources, the respective suction sources, the valve 154, etc. is provided on the sheet expanding device 2. The control unit is constituted by, for example, a computer, and this computer includes processing devices such as a processor typified by a CPU (Central Processing Unit), main storage devices such as a DRAM (Dynamic Random Access Memory), an SRAM (Static Random Access Memory), and a ROM (Read Only Memory), and auxiliary storage devices such as a flash memory, a hard disk drive, and a solid state drive.

[0138] Software including a specified program is stored in the auxiliary storage device. By operating the processing device etc. according to this software, the functions of the control unit are realized. Next, the operation of the sheet expanding device 2 will be mainly described. In addition, Figures 6 to 12 is a flowchart showing a method for processing the sheet 19 using the sheet expanding device 2. Figure 12 is a flowchart showing a method for processing the sheet 19 using the sheet expanding device 2.

[0139] In a state where the four corners of the sheet 19 are clamped by the jig mechanism 52, the workpiece unit 21 is attracted and held by the transfer unit 40. First, the transfer unit 40 is moved downward to below the expansion unit 72.

[0140] Then, the chuck table 50 of the transfer unit 40 is raised by the cylinder 48, and the workpiece unit 21 is moved to approximately the same height as the first clamping unit 74A to the fourth clamping unit 74D.

[0141] After the four sides of the sheet 19 are clamped by the first clamping unit 74A to the fourth clamping unit 74D, the suction of the chuck table 50 is released, and the chuck table 50 is retracted downward. Next, the first clamping unit 74A to the fourth clamping unit 74D expand the sheet 19 in the XY plane direction.

[0142] As the sheet 19 expands, an external force is applied to the workpiece 11, and the workpiece 11 is divided into a plurality of device chips 25 starting from the modified layer (sheet expansion step S10).Figure 6 FIG. is a view showing the sheet expanding step S10.

[0143] Next, as Figure 7 shown, one surface side of the annular frame 23 is attracted and held by the suction pad 112a of the frame arranging unit 110 and conveyed, and the annular frame 23 is arranged on the adhesive layer side of the expanded sheet 19 (frame arranging step S20).

[0144] The annular frame 23 is arranged so as to surround the divided workpiece 11 (that is, the entire device chip 25). Further, after the two roller portions 56 of the transfer unit 40 are raised, the rotation drive source 44 is operated to rotate the support column 54 in a predetermined direction. Thereby, the annular frame 23 is reliably adhered to the sheet 19.

[0145] Then, the two roller portions 56 are lowered. Instead, the cutting unit 58 is raised, and the cutting blade 58a is inserted into the region of the sheet 19 that is located outside the through opening 23a and directly below the annular frame 23. Then, the support column 54 is rotated in a predetermined direction.

[0146] Thereby, the sheet 19 is cut into a circular shape along the locus of the upper end of the cutting blade 58a (cutting step S30). Figure 7 FIG. is a view showing the frame arranging step S20 and the cutting step S30. Further, in Figure 7 , the transfer mechanism 140 is omitted.

[0147] Through the cutting step S30, the circular sheet 19, the annular frame 23, and the plurality of device chips 25 are integrated into a device chip unit 27 (see Figure 8 ). Further, a hole 19b is formed in the sheet 19 accompanying the cutting step S30 (see Figure 8 ).

[0148] Next, the Z-axis direction moving mechanism 116 is operated to move the frame arranging unit 110 upward. Thereby, the device chip unit 27 is separated from the sheet 19 (device chip unit separating step S40).

[0149] Figure 8 FIG. is a view showing the device chip unit separating step S40. Further, in Figure 8 , the transfer mechanism 140 is also omitted. After the device chip unit separating step S40, the support column 114a is lowered by the Z-axis direction moving mechanism 116, and the piston 138b is extended downward to lower the transfer mechanism 140 toward the expanded sheet 19.

[0150] Then, the outer peripheral portion 19c of the sheet 19 located outside the Y-axis ends of the first clamping unit 74A and the second clamping unit 74B is sucked and held by the suction portion 146 of the transfer mechanism 140 (sheet suction step S50). Figure 9 FIG. is a diagram showing the sheet suction step S50. In addition, in Figure 9 the frame configuration unit 110 is omitted.

[0151] After holding the sheet 19 with the suction portion 146, the upper clamping portion and the lower clamping portion of each clamping unit are separated in the Z-axis direction to release the clamping of the sheet 19 by each clamping unit. Then, the first clamping unit 74A is moved to one side in the X-axis direction, and the second clamping unit 74B is moved to the other side in the X-axis direction.

[0152] In addition, the third clamping unit 74C is moved to the other side in the Y-axis direction, and the fourth clamping unit 74D is moved to one side in the Y-axis direction. In this way, each clamping unit is retracted from the sheet 19 (clamping unit retraction step S60).

[0153] Figure 10 FIG. is a diagram showing the clamping unit retraction step S60. In addition, in Figure 10 the frame configuration unit 110 is also omitted. In addition, in Figures 6 to 10 the third clamping unit 74C and the fourth clamping unit 74D are omitted.

[0154] In the clamping unit retraction step S60, the expanded sheet 19 contracts by releasing the external force. Therefore, the sheet 19 is deformed or the like. However, as described above, since the suction portion 146 and the joint 148 can swing integrally, the orientation of the bottom surface of the suction pad 146b can follow the change of the surface of the sheet 19.

[0155] After the clamping unit retraction step S60, the transfer mechanism 140 is moved to a sheet waste area (not shown) disposed on one side in the Y-axis direction of the expansion unit 72. A waste box 158 for disposing of the used sheet 19 is provided in the sheet waste area.

[0156] The waste box 158 has a rectangular opening at the upper part that is larger than the size of the bracket 142 in the XY plane direction when viewing the bracket 142 from above. The waste box 158 is a rectangular parallelepiped-shaped box body composed of four side plates and one bottom plate.

[0157] The transfer mechanism 140 releases the suction holding of the used sheet 19 above the waste box 158 and drops the sheet 19 downward (sheet waste step S70). Thereby, the used sheet 19 is conveyed to the waste box 158. Figure 11 FIG. is a diagram showing the sheet waste step S70. In addition, inFigure 11 In this case, the frame configuration unit 110 is omitted.

[0158] In the present embodiment, after the sheet waste disposal step S70, the joint 148 swings due to the restoring force of the elastic member 144, and the orientation of the bottom surface of the suction pad 146b returns to the original specified orientation. Therefore, there is an advantage that it does not interfere with the operation when the transfer mechanism 140 then sucks the sheet 19.

[0159] After S70, the frame configuration unit 110 moves above a transfer workbench (not shown), and the device chip unit 27 is transferred to the transfer workbench. Then, the device chip unit 27 is transferred to a specified area in the sheet expansion device 2 by the transfer workbench.

[0160] Next, a modification of the sheet waste disposal step S70 will be described. Figure 13 is a diagram showing the sheet waste disposal step S70 of the modification. In addition, in Figure 13 the frame configuration unit 110 is omitted.

[0161] In this modification, the transfer mechanism 140 transfers the carriage 142 into the waste box 158 while sucking and holding the sheet 19 by the suction portion 146. Then, after the carriage 142 is lowered until the other surface of the sheet 19 (the surface of the base material layer on the side opposite to the adhesive layer) contacts the upper surface of the bottom plate of the waste box 158, the suction of the sheet 19 is released.

[0162] Next, the carriage 142 is raised. In this way, the first sheet 19 is placed on the bottom plate of the waste box 158. In addition, after the second S10 to S60, similarly in the second sheet waste disposal step S70, the transfer mechanism 140 transfers the carriage 142 into the waste box 158 while sucking and holding the sheet 19.

[0163] Thereby, the second sheet 19 is pressed and adhered to one surface 19a of the first sheet 19 previously stored in the waste box 158. Then, the suction of the sheet 19 is released. In this way, the second and subsequent sheets 19 are arranged at substantially the same position in the XY plane direction on the sheet 19 previously stored in the waste box 158.

[0164] Therefore, since the used sheets 19 are stacked relatively neatly in the Z-axis direction, the height of the laminate formed by the multiple used sheets 19 can be suppressed compared to the case where the multiple sheets 19 are randomly stacked. Therefore, the transfer, disposal, etc. of this laminate become easy.

[0165] Next, the second embodiment will be described. Figure 14It is a partially enlarged view of the conveying mechanism 140 of the second embodiment. In the conveying mechanism 140 of the second embodiment, the upper parts of two plate-shaped columns 142d are fixed to the lower parts of both ends of the straight part 142a of the carriage 142.

[0166] The long side portions of the respective columns 142d are arranged substantially parallel to the Z-axis direction. A horizontally plate 142e having a right-angled triangle shape in plan view is fixed to the lower part of each column 142d. The above-mentioned cylindrical portions 142c are fixed to the right-angled portion and the two acute-angled portions of the horizontally plate 142e, respectively.

[0167] Hoses, pipes, etc. constituting the flow path 150 are connected to the upper parts of the respective cylindrical portions 142c, but in Figure 14 it, hoses, etc. are omitted. The upper end portion 144a of the above-mentioned elastic member 144 is fixed to the lower part of the cylindrical portion 142c arranged in the right-angled portion of the horizontally plate 142e.

[0168] In addition, the lower end portion 144b of the elastic member 144 is fixed to the upper part of the outer peripheral side surface of the suction portion 146. Further, similar to the first embodiment, the central portion of the upper part of the suction portion 146 is fixed to the lower part of the joint 148.

[0169] Corrugated suction pads 160 are fixed to the cylindrical portions 142c respectively arranged in the two acute-angled portions of the horizontally plate 142e. The front surface of the corrugated suction pad 160 is also covered with an anti-adhesive agent in the same manner as the suction pad 146b of the suction portion 146.

[0170] The corrugated suction pad 160 and the suction pad 146b of the suction portion 146 suck and hold one surface 19a of the sheet 19. Figure 15 It is a view showing the positional relationship between the suction pad 146b and the corrugated suction pad 160 in each horizontally plate 142e.

[0171] In the second embodiment, the sheet 19 is sucked and held by the suction pad 146b and the corrugated suction pad 160. Therefore, even if the sheet 19 is deformed or the like and the sheet 19 is separated from any one of the suction pad 146b and the corrugated suction pad 160, the sheet 19 can be sucked and held.

[0172] That is, compared with the first embodiment, the sheet 19 can be sucked and held more reliably. In addition, the structures, methods, etc. of the above-mentioned embodiments can be appropriately changed and implemented without departing from the object of the present invention.

Claims

1. A conveying mechanism that attracts and holds a sheet as an object and conveys it, characterized in that: The conveying mechanism has: A plurality of suction parts, each of which has a suction pad, and the object is attracted and held by the suction pad; A bracket that is connected to the plurality of suction parts by a swingable joint; A plurality of elastic members, one end parts of which are respectively fixed to different suction parts of the plurality of suction parts, and the other end parts are respectively fixed to the bracket; A plurality of corrugated suction pads; A negative pressure control unit that has a valve disposed on a predetermined flow path connected to the plurality of suction parts, and the negative pressure control unit controls the generation of negative pressure in the plurality of suction parts; And A moving unit that moves the bracket, The bracket includes: A pair of straight portions; A connecting portion that connects the pair of straight portions at an intermediate portion in the longitudinal direction of the pair of straight portions; and A horizontal plate that is fixed to the lower portions of both ends of each of the pair of straight portions, One suction part and two corrugated suction pads are arranged in a right-angled triangle shape on each of the horizontal plates. The one suction part is located at the right-angled portion, and the two corrugated suction pads are respectively located at the acute-angled portions. The one suction part is located on the end side of one of the two corrugated suction pads in the longitudinal direction of the pair of straight portions, and is located on the end side of the other of the two corrugated suction pads in the longitudinal direction of the connecting portion, The plurality of elastic members allow the plurality of suction parts to swing according to the inclination or deformation of the object attracted and held, and when the attraction and holding of the object are released, the orientation of the suction pad is restored to a predetermined orientation when the suction pad does not attract and hold the object.

2. The conveying mechanism according to claim 1, characterized in that: Each of the plurality of elastic members is an elastic sheet or a spring.

3. The conveying mechanism according to claim 2, characterized in that: Each of the plurality of elastic members is a rubber sheet or a resin sheet.

4. A sheet expanding device that expands a sheet adhered to a plate-like object, characterized in that: The sheet expanding device has: An expanding unit that expands the rectangular sheet adhered to the plate-like object in a predetermined planar direction; A frame arranging unit that has a first suction pad for attracting an annular frame, and arranges the annular frame on one surface side of the sheet expanded by the expanding unit so as to surround the periphery of the plate-like object. The annular frame is formed with an opening having a diameter larger than the size of one surface of the plate-like object; A cutting unit that has a cutting edge for cutting the outside of the opening in the sheet adhered with the plate-like object and the annular frame by the cutting edge; and A conveying mechanism that attracts and holds the outer periphery of the hole formed by cutting the sheet by the cutting edge and conveys the sheet to a waste box, The conveying mechanism has: A suction part that has a second suction pad and attracts and holds the sheet by the second suction pad; A bracket that is connected to the suction part by a swingable joint; An elastic member having one end fixed to the suction portion and the other end fixed to the carriage; A negative pressure control unit having a valve disposed in a predetermined flow path connected to the suction portion, the negative pressure control unit controlling the generation of negative pressure in the suction portion; and A moving unit that moves the carriage, The elastic member allows the suction portion to swing according to the inclination or deformation of the sheet attracted and held, and when the attraction and holding of the sheet is released, returns the orientation of the second suction pad to a predetermined orientation when the second suction pad is not attracting and holding the sheet.

5. The sheet expanding device according to claim 4, wherein After pressing and bonding the sheet attracted and held by the suction portion to one surface of the sheet previously stored in the waste box, the suction of the sheet is released, so that the pressed and bonded sheet is stacked on the sheet previously stored in the waste box.

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