Probe card and probe module

Abstract

The present invention provides a probe card and a probe module thereof. The probe card comprises a first reinforcement plate, a fixed frame, a probe module and a sliding frame. The first reinforcement plate comprises an upper surface, a lower surface and a mounting hole, and the inner wall of the mounting hole has an inner flange. The fixed frame is arranged on the upper surface of the first reinforcement plate and surrounds the mounting hole. The probe module is arranged in the mounting hole, and comprises an upper surface, a lower surface and an outer flange located between the upper surface and the lower surface. The outer flange comprises a solid area and a plurality of notch areas, and the solid area of ​​the outer flange abuts against the inner flange of the first reinforcement plate. The sliding frame is arranged on the inner wall of the fixed frame and can slide between a release position and a fixed position along an axial direction. The inner wall of the sliding frame is provided with a plurality of pressing parts, and when the sliding frame is located at the release position, each pressing part corresponds to each notch area of ​​the outer flange of the probe module respectively, and when the sliding frame is located at the fixed position, each pressing part presses the solid area of ​​the outer flange of the probe module.

Description

Technical Field

[0001] The invention relates to a probe card suitable for semiconductor testing and a probe module thereof. Background Art

[0002] In the current wafer-level semiconductor testing methods, probing is a common method, and in the test device used to perform probing, the probe card is the most critical main component. For example, Patent No. I425218 of Taiwan Province of China, the probe card assembly provided in the patent mainly includes a circuit substrate, a reinforcement plate fixed on the circuit substrate, an adjustment plate arranged on the reinforcement plate, and a probe head assembly fixed under the adjustment plate. The probe head assembly passes through the central through hole of the circuit substrate and the central through hole of the reinforcement plate. The probe head assembly mainly includes a probe insert with a plurality of probes, and an insert support that carries the probe insert and is locked by screws. The plurality of probes are located below the circuit substrate to touch the object to be tested, and are electrically connected to the connector on the circuit substrate through a plurality of conductive guide pins and wires, and then electrically connected to a test machine through the connector.

[0003] The probe head module is fixed to the adjustment plate by a plurality of bolts and nuts, and the adjustment plate is fixed to the reinforcement plate by a plurality of locking screws, and a plurality of adjusting screws pass through the adjustment plate and abut against the reinforcement plate. When the locking screws do not press the adjustment plate against the reinforcement plate, so that there is a gap between the adjustment plate and the reinforcement plate, each of the adjusting screws can be rotated by the user to make the adjustment plate portion approach or move away from the reinforcement plate, so as to adjust the orientation of the reinforcement plate relative to the circuit substrate in a time-consuming manner, thereby correcting the orientation of each of the probes relative to the object to be measured, so that the needle tips of the plurality of probes have an acceptable flatness relative to the object to be measured.

[0004] However, the above-mentioned probe card is time-consuming to assemble and difficult to disassemble due to its complex structure, which causes considerable inconvenience to semiconductor testers. Summary of the invention

[0005] The present invention proposes a probe card, comprising a first reinforcement plate, a fixed frame, a probe module and a sliding frame. The first reinforcement plate comprises an upper surface, a lower surface and a mounting hole, and the inner wall of the mounting hole has an inner flange. The fixed frame is arranged on the upper surface of the first reinforcement plate and surrounds the mounting hole. The probe module is arranged in the mounting hole, and comprises an upper surface, a lower surface and an outer flange located between the upper surface and the lower surface. The outer flange comprises a solid area and a plurality of notch areas, and the solid area of ​​the outer flange abuts against the inner flange of the first reinforcement plate. The probe module also comprises a circuit substrate, the lower surface of the probe module is the lower surface of the circuit substrate, and the lower surface of the circuit substrate is provided with a plurality of spring pins and a plurality of probes. The sliding frame is arranged on the inner wall of the fixed frame and can slide along an axial direction between a release position and a fixed position. The inner wall of the sliding frame is provided with a plurality of pressing parts. When the sliding frame is located at the release position, each pressing part corresponds to each notch area of ​​the outer flange of the probe module respectively. When the sliding frame is located at the fixed position, each pressing part presses the solid area of ​​the outer flange of the probe module. The test circuit board includes an upper surface, a lower surface, a through hole and a plurality of electrical contacts. The plurality of electrical contacts are located on the upper surface of the test circuit board and around the through hole. The upper surface of the test circuit board is fixedly connected to the lower surface of the first reinforcement plate. The through hole of the test circuit board is opposite to the mounting hole of the first reinforcement plate. The plurality of spring pins of the probe module are respectively electrically connected to the plurality of electrical contacts of the test circuit board and the circuit substrate, and the plurality of probes of the probe module protrude from the lower surface of the test circuit board.

[0006] The present invention also proposes a probe module, which can be arranged in a mounting hole of a first reinforcement plate, and the inner wall of the mounting hole has an inner flange. The probe module includes a second reinforcement plate and a circuit substrate. The second reinforcement plate has an outer flange, and the outer flange includes a solid area and a plurality of notch areas, and the solid area is used to abut against the inner flange of the mounting hole of the first reinforcement plate. The circuit substrate is arranged under the second reinforcement plate, and has a lower surface, and the lower surface is provided with a plurality of conductors and a plurality of probes, and at least one of the conductors is electrically connected to one of the probes.

[0007] The probe card of the present invention can easily complete the assembly and disassembly of the probe module by sliding the sliding frame relative to the fixed frame between the release position and the fixed position, effectively improving the problem of the probe module being difficult to assemble and disassemble in the prior art probe card. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1A It is a schematic diagram of component decomposition of a probe card according to a first embodiment of the present invention;

[0009] Figure 1BIt is a schematic diagram of the exploded components of the probe module of the first embodiment of the present invention;

[0010] Figure 2 A schematic diagram of the combination of a probe module and a reinforcing member according to a first embodiment of the present invention;

[0011] Figure 3 It is a schematic diagram of the probe module in the first embodiment of the present invention in a released state;

[0012] Figure 4 It is a schematic diagram of the probe module in a fixed state according to the first embodiment of the present invention;

[0013] Figure 5 A partial perspective view of a probe card according to a first embodiment of the present invention;

[0014] Figure 6 The pressing part of the first embodiment of the present invention is Figure 3 A schematic cross-sectional view of the AA section line;

[0015] Figure 7 The pressing part of the first embodiment of the present invention is Figure 4 A schematic cross-sectional view of the BB section line;

[0016] Fig. 8A is a schematic diagram of component decomposition of a probe card according to a second embodiment of the present invention;

[0017] Figure 8B It is a schematic diagram of the exploded components of a probe module according to a second embodiment of the present invention;

[0018] Fig. 9 A schematic diagram of the combination of a probe module and a reinforcing member according to a second embodiment of the present invention;

[0019] Fig.10 is a schematic diagram of a probe module in a released state according to a second embodiment of the present invention;

[0020] Fig.11 is a schematic diagram of a probe module in a fixed state according to a second embodiment of the present invention;

[0021] Fig.12 The pressing portion of the second embodiment of the present invention is Fig.10 A cross-sectional schematic diagram of the CC section line;

[0022] Fig.13 The pressing portion of the second embodiment of the present invention is Fig.11 A schematic cross-sectional view of the DD section line; and

[0023] Fig.14 FIG. 4 is a schematic diagram of the bottom of a probe module according to a second embodiment of the present invention.

[0024]

Explanation of symbols

[0025] 100, 200: Probe card assembly

[0026] 800, 900: Probe card

[0027] 11: First reinforcement plate

[0028] 11a: Upper surface

[0029] 11b: Lower surface

[0030] 11c: Mounting hole

[0031] 11d: Inner flange

[0032] 12:Fixed frame

[0033] 121:Piercing

[0034] 121a: first inner wall surface

[0035] 121b: Second inner wall surface

[0036] 125: Positioning beads

[0037] 13: Probe module

[0038] 13a: Upper surface

[0039] 13b: Lower surface

[0040] 13d: Outer flange

[0041] 13e: Entity Zone

[0042] 13f: Gap area

[0043] 13g: First side

[0044] 13h: Second side

[0045] 13s: Ramp structure

[0046] 131: Upper cover

[0047] 133: Second reinforcement plate

[0048] 134: Circuit board

[0049] 14: Sliding frame

[0050] 141: Suppression Department

[0051] 1411: Shell

[0052] 1411a: Opening

[0053] 1411b: End wall

[0054] 1412: Elastomer

[0055] 1413:Roller

[0056] 142: Handle

[0057] 145: Positioning hole

[0058] 21: First reinforcement plate

[0059] 21a: Upper surface

[0060] 21b: Lower surface

[0061] 21c: Mounting hole

[0062] 21d: Inner flange

[0063] 22:Fixed frame

[0064] 221: Notch

[0065] 23: Probe module

[0066] 23a: Upper surface

[0067] 23b: Lower surface

[0068] 23d: Outer flange

[0069] 23e: Entity Zone

[0070] 23f: Gap area

[0071] 23g: First side

[0072] 23h: Second side

[0073] 23s: Ramp structure

[0074] 231: Upper cover

[0075] 233: Second reinforcement plate

[0076] 234: Circuit board

[0077] 235: Elastic bump

[0078] 237: Spring pin

[0079] 238: Probe

[0080] 239:Handle

[0081] 24: Sliding frame

[0082] 242: handle

[0083] 242a: Positioning hole

[0084] 242b: Limiting flange

[0085] 241: Suppression Department

[0086] 2411: Shell

[0087] 2411a: Opening

[0088] 2413:Roller

[0089] 29: Stop mechanism

[0090] 291: base body

[0091] 292: Spring

[0092] 293: Stopper

[0093] 2931: First End

[0094] 2932: Middle section

[0095] 2933: Second End

[0096] 81, 91: Test circuit board

[0097] 91a: Upper surface

[0098] 91b: Lower surface

[0099] 91c: Perforation

[0100] 917: Electrical contact

[0101] D1, D2: Axial DETAILED DESCRIPTION

[0102] In the following embodiments, “upper” or “lower” is merely used to illustrate the orientation in the drawings and does not limit the actual orientation.

[0103] First embodiment

[0104] Reference Figures 1A to 4 , which illustrates an exemplary probe card 800 , wherein the probe card 800 is composed of a probe card assembly 100 and a test circuit board 81 .

[0105] The probe card assembly 100 mainly includes a first reinforcement plate 11, a fixed frame 12, a probe module 13 and a sliding frame 14. The first reinforcement plate 11 includes an upper surface 11a, a lower surface 11b and a mounting hole 11c, and the inner wall of the mounting hole 11c has an inner flange 11d. The first reinforcement plate 11 can be made of a metal material, such as aluminum or aluminum alloy or other metal materials, and is used to be combined with one side of the test circuit board 81 (such as Figure 3 and Figure 4As shown) to strengthen the rigidity of the test circuit board 81. The fixed frame 12 is disposed on the upper surface 11a of the first reinforcement plate 11 and surrounds the mounting hole 11c. The probe module 13 is disposed in the mounting hole 11c, and includes an upper surface 13a, a lower surface 13b, and an outer flange 13d located between the upper surface 13a and the lower surface 13b. The outer flange 13d includes a solid area 13e and a plurality of notch areas 13f (the attached figure shows four notch areas 13f), and the solid area 13e of the outer flange 13d abuts against the inner flange 11d of the first reinforcement plate 11. As shown Figure 1B As shown, the probe module 13 includes an upper cover 131, a second reinforcing plate 133 and a circuit substrate 134 in order from top to bottom, wherein the outer flange 13d of the probe module 13 is located on the second reinforcing plate 133, and the upper surface 13a and the lower surface 13b of the probe module 13 are respectively located on the upper cover 131 and the circuit substrate 134. The upper surface of the circuit substrate 134 is fixedly connected to the lower surface of the second reinforcing plate 133.

[0106] The sliding frame 14 is disposed on the inner wall of the fixed frame 12 and can be moved along an axial direction D1 (eg Figure 3 and Figure 4 Slide in the direction of the arrow on the Figure 3 and Figure 6 The state shown) and the fixed position (such as Figure 4 and Figure 7 The inner wall of the sliding frame 14 is provided with a plurality of pressing parts 141 (the attached figure shows four pressing parts 141). Figure 3 When the sliding frame 14 is in the release position shown in FIG. 1 , each pressing portion 141 corresponds to each notch area 13f of the outer flange 13d of the probe module 13. Figure 4 In the fixed position shown, each pressing portion 141 presses the solid area 13 e of the outer flange 13 d of the probe module 13 .

[0107] Through the above embodiment, the assembly and disassembly of the probe module 13 can be realized by controlling the sliding frame 14 to slide along the axial direction D1 relative to the fixed frame 12. When the assembly process is to be performed, the sliding frame 14 can be slid along the axial direction D1 to the position as shown in FIG. Figure 3 Then, the probe module 13 is placed in the mounting hole 11c of the first reinforcing plate 11. Figure 4 The fixed position shown can complete the assembly of the probe module 13. Similarly, when personnel want to disassemble the probe module 13, they only need to reverse the above assembly process.

[0108] In some embodiments, the outer flange 13d of the probe module 13 includes a first side 13g and a second side 13h that are opposite to and parallel to each other, and the first side 13g and the second side 13h are parallel to the axial direction D1. The notch areas 13f of the outer flange 13d of the probe module 13 are respectively located on the first side 13g and the second side 13h, and the number of notch areas 13f located on the first side 13g is equal to the number of notch areas 13f located on the second side 13h. In addition, each notch area 13f corresponds to a pressing portion 141 of the sliding frame 14, so the number of pressing portions 141 is also evenly distributed on both sides of the axial direction D1. The outer flange 13d of the probe module 13 is located on the second reinforcement plate 133.

[0109] Refer to Figure 6 and Figure 7 In some embodiments, each pressing portion 141 of the sliding frame 14 includes a shell 1411, an elastic body 1412, and a roller 1413. The shell 1411 is fixed to the inner wall of the sliding frame 14, and has an opening 1411a and an end wall 1411b opposite to the opening 1411a. The elastic body 1412 is disposed in the shell 1411 and one end is fixed to the end wall 1411b, and the other end is connected to the roller 1413. In addition, the solid area 13e of the outer flange 13d of the probe module 13 also includes a plurality of ramp structures 13s, and these ramp structures 13s are respectively adjacent to each notch area 13f.

[0110] When the sliding frame 14 is located at Figure 3 and Figure 6 In the release position shown in the figure, the position of the pressing part 141 is located above the notch area 13f of the outer flange 13d of the probe module 13, that is, the roller 1413 does not contact the solid area 13e of the outer flange 13d of the probe module 13. At this time, the elastomer 1412 is not compressed, and the lower edge of the roller 1413 is also slightly lower than the upper surface of the solid area 13e of the outer flange 13d of the probe module 13. When the sliding frame 14 is pushed and slides from the release position to the fixed position, the roller 1413 of each pressing part 141 moves and climbs from the corresponding notch area 13f along the surface of the ramp structure 13s, and then moves to the solid area 13e of the outer flange 13d. When the sliding frame 14 is in the position as shown in the figure Figure 4 and Figure 7 In the fixed position shown, the elastic body 1412 is in a compressed state, so that the roller 1413 applies downward pressure to the solid area 13 e of the outer flange 13 d, thereby fixing the probe module 13 in the mounting hole 11 c of the first reinforcing plate 11 .

[0111] Reference Figure 1A and Figure 2In some embodiments, the fixed frame 12 has a through hole 121, and the sliding frame 14 includes a handle 142 passing through the through hole 121. The through hole 121 has a first inner wall surface 121a and a second inner wall surface 121b opposite to each other. When the sliding frame 14 is located in the Figure 3 In the release position shown in FIG. 1 , the handle portion 142 is against the first inner wall surface 121a of the through hole 121. Figure 4 In the fixed position shown, the handle portion 142 is against the second inner wall surface 121 b of the through hole 121 .

[0112] Reference Figure 5 In some embodiments, the inner wall of the fixed frame 12 is further provided with at least one positioning bead 125, and the outer wall of the sliding frame 14 is further provided with at least one positioning hole 145. The positioning bead 125 can be extended and retracted along the normal direction of the inner wall of the fixed frame 12. When the sliding frame 14 is located Figure 4 When the fixed position is shown, the positioning beads 125 of the fixed frame 12 are embedded in the positioning holes 145 of the sliding frame 14. It should be noted that the positions of the positioning beads 125 and the positioning holes 145 can also be interchanged, that is, the positioning beads 125 can be set on the outer wall of the sliding frame 14, and the positioning holes 145 can be set on the inner wall of the fixed frame 12.

[0113] Second embodiment

[0114] Please refer to Fig. 8A , Figure 8B , Fig. 9 and Fig.14 , which illustrates an exemplary probe card assembly 200 and a probe card 900 , wherein the probe card 900 is composed of the probe card assembly 200 and a test circuit board 91 .

[0115] The probe card assembly 200 mainly includes a first reinforcement plate 21, a fixed frame 22, a probe module 23 and a sliding frame 24. The first reinforcement plate 21 includes an upper surface 21a, a lower surface 21b and a mounting hole 21c, and the inner wall of the mounting hole 21c has an inner flange 21d. The first reinforcement plate 21 can be made of a metal material, such as aluminum or aluminum alloy or other metal materials, and is used to be combined with one side of the test circuit board 91 (such as Fig.10 and Fig.1121a and 21c) to strengthen the rigidity of the test circuit board 91. The fixed frame 22 is disposed on the upper surface 21a of the first reinforcement plate 21 and surrounds the mounting hole 21c. The probe module 23 is disposed in the mounting hole 21c, and includes an upper surface 23a, a lower surface 23b, and an outer flange 23d located between the upper surface 23a and the lower surface 23b. The outer flange 23d includes a solid area 23e and a plurality of notch areas 23f (the attached figure shows six notch areas 23f), and the solid area 23e of the outer flange 23d abuts against the upper surface of the inner flange 21d of the first reinforcement plate 21. In addition, the upper surface 23a of the probe module 23 is provided with two lifting rings 239 for facilitating personnel to extract the probe module 23, and the two lifting rings 239 can stand up relative to the upper surface 23a of the probe module 23 or lie flat against the upper surface 23a of the probe module 23.

[0116] Reference Figure 8B and Fig.14 The probe module 23 includes an upper cover 231, a second reinforcing plate 233 and a circuit substrate 234 in order from top to bottom, wherein the outer flange 23d of the probe module 23 is located on the second reinforcing plate 233, the upper surface 23a of the probe module 23 is the upper surface of the upper cover 231, and the lower surface 23b of the probe module 23 is the lower surface of the circuit substrate 234. In addition, the two lifting rings 239 are locked on the second reinforcing plate 233. The upper surface of the circuit substrate 234 is fixedly connected to the lower surface of the second reinforcing plate 233.

[0117] Reference Figure 8B , Fig.10 and Fig.11 In some embodiments, the outer flange 23d of the probe module 23 includes a first side 23g and a second side 23h that are opposite to and parallel to each other, and the first side 23g and the second side 23h are parallel to the axial direction D2. The notch areas 23f of the outer flange 23d of the probe module 23 are respectively located on the first side 23g and the second side 23h, and the number of notch areas 23f located on the first side 23g is equal to the number of notch areas 23f located on the second side 23h. In addition, each notch area 23f corresponds to a pressing portion 241 of the sliding frame 24, so the number of pressing portions 241 is also evenly distributed on both sides along the axial direction D2. The outer flange 23d of the probe module 23 is located on the second reinforcement plate 233.

[0118] The sliding frame 24 is disposed on the inner wall of the fixed frame 22 and can be moved along an axial direction D2 (eg Fig.10 and Fig.11 Slide in the direction of the arrow on the Fig.10 The state shown) and the fixed position (such as Fig.11 The inner wall of the sliding frame 24 is provided with a plurality of pressing parts 241 (six pressing parts 241 are drawn in the accompanying figure). Fig.10 When the sliding frame 24 is in the release position shown in FIG. 1 , each pressing portion 241 corresponds to each notch area 23f of the outer flange 23d of the probe module 23. Fig.11 In the fixed position shown, each pressing portion 241 presses the solid area 23 e of the outer flange 23 d of the probe module 23 .

[0119] Through the above embodiment, the assembly and disassembly of the probe module 23 can be realized by controlling the sliding frame 24 to slide relative to the fixed frame 22 along the axial direction D2. When the assembly process is to be performed, the sliding frame 24 can be slid along the axial direction D2 to a position as shown in FIG. Fig.10 Then, the probe module 23 is placed in the mounting hole 21c of the first reinforcing plate 21. Fig.11 The fixed position shown can complete the assembly of the probe module 23. Similarly, when personnel want to disassemble the probe module 23, they only need to reverse the above assembly process.

[0120] Reference Figures 10 to 14 , each pressing part 241 of the present embodiment includes a shell 2411 and a roller 2413. The shell 2411 is fixed to the inner wall of the sliding frame 24, and has an opening 2411a. The roller 2413 is disposed in the shell 2411 and partially protrudes outside the opening 2411a of the shell 2411. In addition, the solid area 23e of the outer flange 23d of the probe module 23 includes a plurality of ramp structures 23s, and the lower surface of the solid area 23e is further provided with a plurality of elastic protrusions 235 (four are drawn in the accompanying figure). Each ramp structure 23s is adjacent to each notch area 23f respectively, and each elastic protrusion 235 protrudes from the lower surface of the solid area 23e so that the solid area 23e of the outer flange 23d abuts against the upper surface of the inner flange 21d of the first reinforcing plate 21 via the elastic protrusion 235.

[0121] Since the outer flange 23d of the probe module 23 and the inner flange 21d of the first reinforcement plate 21 may not be completely flat, the probe tip (not shown) of the probe module 23 is not on the same horizontal plane during testing after being assembled. By providing an elastic protrusion 235 on the lower surface of the outer flange 23d of the probe module 23, the above problem can be solved through the elastic deformation of the elastic protrusion 235. It should be particularly noted that the elastic protrusion 235 can also be provided on the upper surface of the inner flange 21d of the first reinforcement plate 21. In some embodiments, the elastic protrusion 235 can be realized by embedding a spring and a steel ball on the lower surface of the outer flange 23d of the probe module 23, wherein the steel ball can change its height protruding from the lower surface of the outer flange 23d through the deformation of the spring.

[0122] When the sliding frame 24 is located Fig.10 and Fig.12 In the release position shown in FIG. 1 , the roller 2413 of each pressing portion 241 is located above the notch area 23f of the outer flange 23d of the probe module 23, that is, the roller 2413 does not contact the solid area 23e of the outer flange 23d of the probe module 23. At this time, the lower edge of the roller 2413 is slightly lower than the upper surface of the solid area 23e of the outer flange 23d of the probe module 23. Fig.11 and Fig.13 When in the fixed position shown, the roller 2413 of each pressing part 241 moves up from the corresponding notch area 23f along the surface of the ramp structure 23s, and then moves to the solid area 23e and applies downward pressure to the solid area 23e. At this time, the elastic protrusion 235 will reduce the height of the lower surface of the outer flange 23d of the probe module 23 due to the downward pressure.

[0123] Reference Fig. 8A and Fig. 9 In some embodiments, the fixed frame 22 of the probe card assembly 200 has a recess 221, and the sliding frame 24 includes a handle portion 242, wherein the handle portion 242 is located in the recess 221 of the fixed frame 22 and has a positioning hole 242a. The probe card assembly 200 further includes a stopper mechanism 29 disposed adjacent to the recess 221. The stopper mechanism 29 includes a seat 291, a spring 292, and a stopper 293. The seat 291 is disposed relative to the handle portion 242 and adjacent to the recess 221. The spring 292 (such as a torsion spring or a V-shaped spring) is pivotally disposed on the seat 291. The stopper 293 is generally T-shaped, and includes a first end 2931, a second end 2933 and a middle section 2932. The first end 2931 is opposite to the second end 2933 and faces the handle portion 242. The middle section 2932 is located between the first end 2931 and the second end 2933 and is pivotally connected to the spring 292, so that the stopper 293 can form a seesaw structure with the spring 292 as a fulcrum.

[0124] When the sliding frame 24 is located Fig.11 When the probe module 23 is in the fixed position shown in the figure, the first end 2931 of the stopper 293 is rotated downward relative to the spring 292 by the elastic force of the spring 292 and then abuts against the lower edge of the handle portion 242. In this way, the sliding frame 24 can be prevented from accidentally sliding from the fixed position to the release position. When a person wants to remove the probe module 23, he only needs to press the second end 2933 of the stopper 293 to make the first end 2931 of the stopper 293 tilt up and align with the positioning hole 242a of the handle portion 242. Since the size of the positioning hole 242a allows the first end 2931 of the stopper 293 and the middle section 2932 to pass through, the person can now operate the handle portion 242 to slide the sliding frame along the axial direction D2 to the position as shown in the figure. Fig.10Release position shown.

[0125] In some embodiments, in order to facilitate personnel to quickly align the first end 2931 with the positioning hole 242a, the handle portion 242 is further provided with a limiting flange 242b, which is adjacent to the positioning hole 242a and located above the positioning hole 242a. When a person presses the second end 2933 of the stopper 293, so that the first end 2931 of the stopper 293 is tilted and abuts against the limiting flange 242b, the first end 2931 is just aligned with the positioning hole 242a. In this way, personnel can quickly complete the disassembly or assembly of the probe module 23.

[0126] Reference Fig. 8A , Figure 8B , Fig. 9 and Fig.14 The lower surface 23b of the circuit substrate 234 of the probe module 23 of this embodiment is provided with a plurality of spring pins (conductors) 237 and a plurality of probes 238. The test circuit board 91 comprises an upper surface 91a, a lower surface 91b, a through hole 91c and a plurality of electrical contacts 917. The electrical contacts 917 of the test circuit board 91 are located on the upper surface 91a and around the through hole 91c. When the probe card assembly 200 and the test circuit board 91 are assembled into the probe card 900, the test circuit board 91 is fixedly connected to the lower surface 21b of the first reinforcement plate 21 with its upper surface 91a, and the through hole 91c of the test circuit board 91 is relative to the mounting hole 21c of the first reinforcement plate 21. One end of each spring pin 237 located on the circuit substrate 234 of the probe module 23 is electrically connected to the electrical contact 917 of the test circuit board 91, and the other end is electrically connected to the circuit substrate 234 of the probe module 23, so that the test signal can be transmitted from the test circuit board 91 to each probe 238 via the circuit substrate 234. In addition, the probes 238 of the probe module 23 protrude from the lower surface 91b of the test circuit board 91, so that when the probe card 900 is assembled on the test machine, the electrical test can be performed on the pads on the device under test through the probes 238.

[0127] Although the present invention has been disclosed as above by embodiments, they are not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope defined by the attached claims.

Claims

1. A probe card, characterized in that: Include: A first reinforcing plate, comprising an upper surface, a lower surface and a mounting hole, wherein the inner wall of the mounting hole has an inner flange; a fixed frame, disposed on the upper surface of the first reinforcing plate and surrounding the mounting hole; A probe module is arranged in the mounting hole, the probe module comprises an upper surface, a lower surface and an outer flange located between the upper surface and the lower surface, the outer flange comprises a solid area and a plurality of notch areas, and the solid area of ​​the outer flange abuts against the inner flange of the first reinforcing plate, the probe module further comprises a circuit substrate, the lower surface of the probe module is the lower surface of the circuit substrate, and the lower surface of the circuit substrate is provided with a plurality of conductors and a plurality of probes; a sliding frame, which is arranged on the inner wall of the fixed frame and can slide along an axial direction between a release position and a fixed position, wherein the inner wall of the sliding frame is provided with a plurality of pressing parts, and when the sliding frame is located at the release position, each of the pressing parts respectively corresponds to each of the notch areas of the outer flange of the probe module, and when the sliding frame is located at the fixed position, each of the pressing parts presses the solid area of ​​the outer flange of the probe module; and A test circuit board comprises an upper surface, a lower surface, a through hole and a plurality of electrical contacts, wherein the plurality of electrical contacts are located on the upper surface of the test circuit board and around the through hole, the upper surface of the test circuit board is fixedly connected to the lower surface of the first reinforcement plate, the through hole of the test circuit board is opposite to the mounting hole of the first reinforcement plate, the plurality of conductors of the probe module are respectively electrically connected to the plurality of electrical contacts of the test circuit board and the circuit substrate, and the plurality of probes of the probe module protrude from the lower surface of the test circuit board.

2. The probe card according to claim 1, wherein: The outer flange includes a first side and a second side opposite to each other, the first side and the second side are parallel to the axial direction, the multiple notch areas are located on the first side and the second side, and the number of notch areas located on the first side is equal to the number of notch areas located on the second side.

3. The probe card according to claim 2, characterized in that: Each of the pressing parts comprises: A shell connected to the inner wall of the sliding frame, having an opening and an end wall opposite to the opening; An elastic body, disposed in the housing and having one end connected to the end wall; and a roller connected to the other end of the elastic body; Wherein, when the sliding frame is located at the fixed position, the roller of each pressing portion presses the solid area of ​​the outer flange of the probe module.

4. The probe card according to claim 3, characterized in that: The solid area of ​​the outer flange includes a plurality of ramp structures, and the plurality of ramp structures are respectively adjacent to the plurality of notch areas. When the sliding frame slides from the release position to the fixed position, the rollers of each pressing part move from the corresponding notch area along the ramp structure to the solid area of ​​the outer flange.

5. The probe card according to claim 1, wherein: The fixed frame has a through hole, and the through hole has a first inner wall surface and a second inner wall surface opposite to each other. The sliding frame includes a handle portion, and the handle portion passes through the through hole. When the sliding frame is located at the release position, the handle portion abuts against the first inner wall surface of the through hole. When the sliding frame is located at the fixed position, the handle portion abuts against the second inner wall surface of the through hole.

6. The probe card according to claim 1, wherein: The inner wall of the fixed frame is further provided with at least one positioning bead, and the outer wall of the sliding frame is further provided with at least one positioning hole. When the sliding frame is located at the fixed position, the positioning bead is embedded in the positioning hole.

7. The probe card according to claim 2, wherein: Each of the pressing parts comprises: a housing connected to the inner wall of the sliding frame and having an opening; and a roller, disposed in the housing and partially protruding from the opening of the housing; Wherein, when the sliding frame is located at the fixed position, the roller of each pressing portion presses the solid area of ​​the outer flange of the probe module.

8. The probe card according to claim 5, characterized in that: The solid area of ​​the outer flange includes a plurality of ramp structures, and the plurality of ramp structures are respectively adjacent to the plurality of notches. When the sliding frame slides from the release position to the fixed position, each pressing portion slides from its corresponding notch area along the ramp structure to press against the solid area of ​​the outer flange.

9. The probe card according to claim 6, wherein: The lower surface of the solid area of ​​the outer flange of the probe module is provided with a plurality of elastic protrusions, each of which protrudes from the lower surface of the solid area so that the solid area of ​​the outer flange abuts against the upper surface of the inner flange of the first reinforcing plate via the elastic protrusions.

10. The probe card according to claim 6, wherein: The upper surface of the inner flange of the first reinforcing plate is provided with a plurality of elastic protrusions, each of which protrudes from the upper surface of the inner flange so that the solid area of ​​the outer flange abuts against the upper surface of the inner flange of the first reinforcing plate via the elastic protrusions.

11. The probe card according to claim 5, characterized in that: The fixed frame has a notch, the sliding frame includes a handle, the handle is located in the notch, and the probe card further includes: A seat body, arranged opposite to the handle portion and adjacent to the recess; a spring, disposed on the seat; and A stopper comprises a first end, a second end and a middle section, wherein the first end is opposite to the second end and faces the handle portion, and the middle section is located between the first end and the second end and is pivotally connected to the spring, and when the sliding frame is located at the fixed position, the first end rotates relative to the spring through the elastic force of the spring and abuts against the handle portion.

12. The probe card according to claim 11, wherein: The handle portion has a positioning hole, the size of which allows the first end of the stopper and the middle section to pass through. When the sliding frame is located at the fixed position, the first end abuts against the lower edge of the positioning hole. When the second end of the stopper is subjected to force to cause the first end to rotate relative to the spring and point to the positioning hole, the sliding frame can begin to slide from the fixed position to the release position.

13. The probe card according to claim 1, wherein: The probe module further includes a second reinforcement plate. The upper surface of the circuit substrate of the probe module is fixedly connected to the lower surface of the second reinforcement plate. The outer flange of the probe module is located on the second reinforcement plate.

14. A probe module, characterized in that: The probe module is used to be arranged in a mounting hole of a first reinforcement plate, wherein the inner wall of the mounting hole has an inner flange, and the probe module comprises: A second reinforcing plate, having an outer flange, the outer flange comprising a first side and a second side opposite to and parallel to each other, the first side and the second side each comprising a solid area and a plurality of notch areas, the number of notch areas located on the first side being equal to the number of notch areas located on the second side, the solid area being used to abut against the inner flange of the mounting hole of the first reinforcing plate, two adjacent notch areas being separated by the solid area, each of the solid areas of the outer flange being used for a pressing portion of a sliding frame to be pressed along a normal direction of the surface of the second reinforcing plate and fixed in the mounting hole of the first reinforcing plate, in addition, each of the notch areas is hollowed out along a normal direction of the surface of the second reinforcing plate, and each of the notch areas is open along a direction parallel to the surface of the second reinforcing plate and away from the outer flange, so that the probe module can be taken out from the mounting hole of the first reinforcing plate when the pressing portion of the sliding frame corresponds thereto; and A circuit substrate is disposed under the second reinforcing plate and has a lower surface, and a plurality of conductors and a plurality of probes are disposed on the lower surface, and at least one of the conductors is electrically connected to one of the probes.

15. The probe module according to claim 14, characterized in that: The probe module has an upper surface and a lower surface. The second reinforcing plate is located between the upper surface and the lower surface of the probe module. The lower surface of the circuit substrate is the lower surface of the probe module.

16. The probe module according to claim 14, characterized in that: The solid area of ​​the outer flange of the second reinforcing plate includes a plurality of ramp structures, and the plurality of ramp structures are respectively adjacent to the plurality of notch areas.

17. The probe module according to any one of claims 14 to 16, characterized in that: A plurality of elastic protrusions are disposed on the lower surface of the solid area of ​​the outer flange of the second reinforcing plate.

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