Micromechanical component for a rotational speed sensor and method for manufacturing the same, rotational speed sensor

Abstract

The invention relates to a micromechanical component for a rotational speed sensor, having a substrate with a substrate surface (10), a one-piece first rotor mass (12a) and at least one first part (22a, 22b, 38a, 38b) of the micromechanical component, which first rotor mass can be placed in a first torsional vibration motion (16a) about a first rotational axis (18a) oriented perpendicular to the substrate surface (10), wherein the first rotor mass (12a) is attached to the at least one first part (22a, 22b, 38a, 38b) by at least one first spring element (26a), wherein the at least one first spring element (26a) respectively extends through a respective lateral recess (28a) in the first rotor mass (12a) and is attached to a retracted edge region of the first rotor mass (12a). The invention also relates to a rotational speed sensor and a manufacturing method for a micromechanical component of a rotational speed sensor.

Description

Technical Field

[0001] This invention relates to a micromechanical component for a speed sensor and a speed sensor itself. The invention also relates to a method for manufacturing the micromechanical component for a speed sensor. Background Technology

[0002] DE 10 2017 216 010 A1 discloses a micromechanical speed sensor arrangement having two rotor masses that can be placed in torsional vibration motion via a drive frame assembly. For this purpose, the two rotor masses are each connected to the drive frame assembly via a transom. Furthermore, four vibrating masses can be placed in harmonic resonance motion via the drive frame assembly. Summary of the Invention

[0003] This invention proposes a micromechanical component for a speed sensor. The micromechanical component comprises: a substrate with a substrate surface; a one-piece first rotor mass capable of being subjected to a first torsional vibration motion about a first axis of rotation oriented perpendicular to the substrate surface; and at least one first component of the micromechanical component, wherein the first rotor mass is attached to the at least one first component by at least one first spring element. The at least one first spring element extends through each of a lateral notch on the first rotor mass and is attached to a retracted edge region of the first rotor mass.

[0004] This invention proposes a speed sensor having the aforementioned micromechanical components.

[0005] This invention proposes a method for manufacturing a micromechanical component for a speed sensor. The method comprises the following steps: constructing and / or arranging a one-piece first rotor mass of the micromechanical component such that it can be subjected to a first torsional vibration motion about a first axis of rotation, the first axis of rotation being oriented perpendicular to the substrate surface of the substrate of the micromechanical component; constructing and / or arranging at least one first component of the micromechanical component, wherein the first rotor mass is attached to the at least one first component by at least one first spring element. The at least one first spring element is attached to a retracted edge region of the first rotor mass, each of the at least one first spring element extending through a lateral notch on the first rotor mass.

[0006] This invention proposes a micromechanical component that can advantageously be used as at least a portion of a speed sensor, particularly a 3-axis speed sensor. Based on the micromechanical component according to the invention, at least one rotor mass is attached to at least one first / second component via an "extended spring structure," realizing lever transmission for transmitting force to the respective rotor mass, wherein the point of action of the respective lever is closer to the intersection of the respective rotor mass and its axis of rotation. This improves the force and / or torque transmission to the respective rotor mass.

[0007] The improved force and / or torque transmission to the corresponding rotor mass can also be used for at least one rotor mass of the micromechanical component according to the invention and for the miniaturization of the corresponding micromechanical component. Therefore, the micromechanical component according to the invention requires only a relatively small structural space, which is why the speed sensor implemented using this micromechanical component can be used in a wider variety of ways.

[0008] In an advantageous embodiment, the micromechanical component additionally includes a one-piece second rotor mass, which is mirror-symmetrical with respect to the first rotor mass about a plane of symmetry oriented perpendicular to the substrate surface and intersecting the first and second rotor masses centrally. This second rotor mass can be subjected to a second torsional vibrational motion about a second rotational axis oriented parallel to the first rotational axis, the second torsional vibrational motion being 180° phase with the first torsional vibrational motion. The second rotor mass is attached to at least one first component and / or at least one second component of the micromechanical component via at least one second spring element, wherein the at least one second spring element extends through each of a lateral notch on the second rotor mass and is attached to a retracted edge region of the second rotor mass. Therefore, the micromechanical component can be implemented using a dual rotor, the advantages of which are listed below.

[0009] In another advantageous embodiment of the micromechanical component, the two rotor masses are constructed and / or arranged such that the two rotor masses, placed in their respective torsional vibrational motions, can tilt respectively about a rotational axis located in a first plane of symmetry and another rotational axis oriented perpendicular to the first plane of symmetry. Therefore, the two rotor masses can be used not only to detect a first rotational motion of the corresponding micromechanical component about a first axis oriented in the first plane of symmetry and parallel to the substrate surface, but also to detect a second rotational motion of the corresponding micromechanical component about a second axis oriented in a second plane of symmetry and parallel to the substrate surface.

[0010] The micromechanical component may, in particular, include at least one rocker structure oriented parallel to the plane of symmetry as the at least one first component, with a first rotor mass attached to the at least one rocker structure via at least one first spring element, and a second rotor mass attached to the at least one rocker structure via at least one second spring element. As explained more precisely below, the at least one rocker structure enables the targeted suppression of undesirable movements of the two rotor masses. Thus, the at least one rocker structure advantageously resists the occurrence of undesirable disturbance modes.

[0011] In another advantageous embodiment, the micromechanical component has a first pair of drive structures as at least one first component and a second pair of drive structures as at least one second component, wherein the first drive structure on a first side of the plane of symmetry in the first and second pairs of drive structures is mirror-symmetrical about the plane of symmetry with respect to the second drive structure on a second side of the plane of symmetry in the first and second pairs of drive structures. The first drive structure of the first pair of drive structures can be placed in a first harmonic vibration motion oriented parallel to the plane of symmetry, and the second drive structure of the first pair of drive structures can be placed in a second harmonic vibration motion oriented parallel to the plane of symmetry and phase-shifted by 180° relative to the first harmonic vibration motion. The first drive structure of the second pair of drive structures can be placed in the second harmonic vibration motion, and the second drive structure of the second pair of drive structures can be placed in the first harmonic vibration motion, such that, by means of the four drive structures placed in their respective harmonic vibration motions, the two rotor masses are placed in their respective torsional vibration motions. In this case, due to the "extended spring structure," the amplitude of the torsional vibration motion of the two rotor masses is increased.

[0012] More preferably, the two rotor masses are constructed and / or arranged such that when the two rotor masses are subjected to their respective torsional vibrations, the vector sum of the first torque of the first torsional vibration of the first rotor mass and the second torque of the second torsional vibration of the second rotor mass is equal to zero. This also prevents the torque of one of the two rotor masses from undesirably coupling into the sensor design of the corresponding micromechanical component, even when the two rotor masses are subjected to their respective torsional vibrations.

[0013] Preferably, the micromechanical component additionally has a first pair of vibrating masses and a second pair of vibrating masses, wherein the first vibrating mass located on a first side of the plane of symmetry is mirror-symmetric with respect to the second vibrating mass located on a second side of the plane of symmetry, and wherein the four vibrating masses can be placed in harmonic resonant motions oriented parallel to the plane of symmetry by means of two rotor masses placed in their respective torsional vibrational motions and / or by means of four drive structures placed in their respective harmonic vibrational motions. Therefore, the vector sum of the pulses of the harmonic resonant motions of the four vibrating masses is zero, thus eliminating concerns about one pulse of a vibrating mass undesirably coupling into the sensor design of the corresponding micromechanical component.

[0014] Preferably, the four vibrating masses placed in their respective harmonic resonant motions are additionally capable of deflecting parallel to the second plane of symmetry. As explained more precisely below, in this case, the four vibrating masses can be used to detect a (further) third rotational motion of the corresponding micromechanical component about a third axis oriented perpendicular to the substrate surface.

[0015] In speed sensors with such micromechanical components, the aforementioned advantages are also guaranteed. Specifically, the speed sensor can be, in particular, a triaxial speed sensor. In this case, a triaxial speed sensor should be understood as being able to detect not only, using two rotor masses, a first rotational motion of the speed sensor about a first axis oriented in a first plane of symmetry and parallel to the substrate surface; a second rotational motion of the speed sensor about a second axis oriented in a second plane of symmetry and parallel to the substrate surface; and a third rotational motion of the speed sensor about a third axis oriented perpendicular to the substrate surface, using four vibrating masses. In this case, detecting the corresponding rotational motion can be understood not only as proving the corresponding rotational motion, but also as measuring physical parameters reflecting the corresponding rotational motion, such as rotational rate, rotational speed, and / or angular velocity.

[0016] Furthermore, the implementation of a corresponding manufacturing method for a micromechanical component used in a speed sensor also achieves the above advantages, wherein the manufacturing method can be extended based on the above-described embodiment of the micromechanical component. Attached Figure Description

[0017] Other features and advantages of the invention are described below with reference to the accompanying drawings. The drawings show:

[0018] Figure 1 A schematic diagram showing a first embodiment of the micromechanical component;

[0019] Figure 2A partial schematic diagram of a second embodiment of the micromechanical component is shown;

[0020] Figure 3 A flowchart illustrating an embodiment of a method for manufacturing a micromechanical component for a speed sensor is shown. Detailed Implementation

[0021] Figure 1 A schematic diagram showing a first embodiment of the micromechanical component is provided.

[0022] exist Figure 1 The micromechanical component schematically shown has a substrate with a substrate surface 10. This substrate may be, for example, a semiconductor substrate, particularly a silicon substrate.

[0023] The micromechanical component also has at least one one-piece first rotor mass 12a. Optionally, the micromechanical component may additionally have a one-piece second rotor mass 12b, wherein the second rotor mass 12b is preferably mirror-symmetric with respect to the first rotor mass 12a about a first plane of symmetry 14, which is oriented perpendicular to the substrate surface 10 and intersects the first rotor mass 12a and the second rotor mass 12b centrally. The one-piece construction of the first / second rotor mass 12a or 12b should be understood as the corresponding first / second rotor mass 12a or 12b being realized as a continuous and compact part. At least the first rotor mass 12a can be placed in a first torsional vibration motion 16a about a first axis of rotation 18a oriented perpendicular to the substrate surface 10. Advantageously, in Figure 1 In the micromechanical component, the second rotor mass 12b can also be placed in a second torsional vibration motion 16b about a second rotation axis 18b oriented parallel to the first rotation axis 18a, wherein the second torsional vibration motion 16b is phase-shifted by 180° relative to the first torsional vibration motion 16a.

[0024] By way of example only, in the embodiment of the micromechanical component described herein, each of the two rotor masses 12a and 12b has an internal groove through which the rotation axis 18a or 18b of the respective rotor mass 12a or 12b extends, wherein each internal groove is defined by the inner edge of the respective rotor mass 12a or 12b. By way of example, each of the two rotor masses 12a and 12b is also attached to / on the micromechanical component by at least one rotor mass attachment spring (not shown), which extends from the inner edge of the respective rotor mass 12a or 12b to an anchoring region fixed on the substrate surface 10. Additionally, each of the two rotor masses 12a and 12b is also attached to / on the micromechanical component by a rotor mass attachment spring 20, which extends from the outer edge of the respective rotor mass 12a or 12b to an anchoring region fixed on the substrate surface 10.

[0025] The micromechanical component further includes at least one first component 22a and 22b, to which a first rotor mass 12a is attached via at least one first spring element 26a, wherein the at least one first spring element 26a extends through a lateral notch 28a to the outer edge of the first rotor mass 12a and is attached to a retracted edge region of the first rotor mass 12a. Advantageously, a second rotor mass 12b may additionally be attached to at least one first component 22a and 22b and / or at least one second component 24a and 24b of the micromechanical component via at least one second spring element 26b, wherein, in this case, at least one second spring element 26b extends through a lateral notch 28b on the second rotor mass 12b and is attached to a retracted edge region of the second rotor mass 12b.

[0026] Therefore, at least the first rotor mass 12a is attached to at least one first component 22a and 22b via an "extended spring structure". As an advantageous extension, the second rotor mass 12b can also be attached to at least one first component 22a and 22b and / or at least one second component 24a and 24b via an "extended spring structure". In any case, the "extended spring structure" enables lever transmission for transmitting force to the respective rotor mass 12a or 12b. By constructing corresponding lateral notches 28a or 28b and attaching corresponding spring elements 26a or 26b to the retracted edge region, the point of action of the corresponding lever is closer to the intersection of the respective rotor mass 12a or 12b with its axis of rotation 18a or 18b, thus improving the force and / or torque transmission to the respective rotor mass 12a or 12b. An example of the use of this force and / or torque transmission to the respective rotor mass 12a or 12b is described below.

[0027] The lateral notches 28a or 28b can also be referred to as recesses or depressions on the side of the corresponding rotor mass 12a or 12b. The retracted edge region (constructed on the corresponding rotor mass 12a or 12b by means of its lateral notches 28a or 28b) should be understood as the region of the corresponding rotor mass 12a or 12b where the distance from this region to the intersection of the corresponding rotor mass 12a or 12b with its axis of rotation 18a or 18b is less than the minimum distance from the outer edge region of the same rotor mass 12a or 12b located at the outer boundary of the lateral notches 28a or 28b to that intersection.

[0028] exist Figure 1 In one embodiment, the micromechanical component has a first pair of drive structures 22a and 22b as at least one first component 22a and 22b and a second pair of drive structures 24a and 24b as at least one second component 24a and 24b. The first drive structure 22a and the second drive structure 22b of the first pair of drive structures are each attached to a first rotor mass 12a via a first spring element 56a. Correspondingly, the first drive structure 24a and the second drive structure 24b of the second pair of drive structures are each attached to a second rotor mass 12b via a second spring element 26b. The first drive structures 22a and 24a of the first pair of drive structures and the second pair of drive structures located on a first side of a first plane of symmetry 24 are mirror-symmetric with respect to the second drive structures 22b and 24b of the first pair of drive structures and the second pair of drive structures located on a second side of a first plane of symmetry 14 about the first plane of symmetry 14.

[0029] The four drive structures 22a, 22b, 24a, and 24b are respectively constructed / arranged such that the first drive structure 22a of the first pair of drive structures can be placed in the first harmonic vibration motion 30a oriented parallel to the first symmetry plane 14; the second drive structure 22b of the first pair of drive structures can be placed in the second harmonic vibration motion 30b oriented parallel to the first symmetry plane 14 and phase-shifted by 180° relative to the first harmonic vibration motion 30a; the first drive structure 24a of the second pair of drive structures can be placed in the second harmonic vibration motion 30b; and the second drive structure 24b of the second pair of drive structures can be placed in the first harmonic vibration motion 30a. Preferably, the four drive structures 22a, 22b, 24a, and 24b are each constructed with drive electrode elements (not shown), which form capacitors with each of a fixed drive electrode (not shown), which are, for example, fixed on the substrate surface 10. Each of the four drive structures 22a, 22b, 24a, and 24b can, for example, be a drive frame.

[0030] The four drive structures 22a, 22b, 24a, and 24b can be positioned in their respective harmonic vibration motions 30a or 30b such that, by means of the four drive structures 22a, 22b, 24a, and 24b positioned in their respective harmonic vibration motions 30a or 30b, the two rotor masses 12a and 12b are positioned in their respective torsional vibration motions 16a or 16b. Therefore, the harmonic vibration motions 30a and 30b of the four drive structures 22a, 22b, 24a, and 24b cause the corresponding torsional vibration motions 16 or 16b of the two rotor masses 12a and 12b. Due to the lever transmission achieved by means of the "extended spring structure," the driving amplitude of the harmonic vibration motions 30a or 30b is transmitted closer to the intersection of the corresponding rotor mass 12a or 12b with its rotation axis 18a or 18b. Therefore, during the torsional vibration motions 16a and 16b of the two rotor masses 12a and 12b, the (maximum) amplitude of the outer edges of the rotor masses 12a and 12b is greater than the driving amplitude of the harmonic vibration motions 30a or 30b. Thus, the "extended spring structure" causes an increase in the amplitude of the torsional vibration motions 16a and 16b of the rotor masses 12a and 12b.

[0031] Advantageously, each of the two rotor masses 12a and 12b placed in the corresponding torsional vibration motion 16a or 16b can tilt respectively about a first axis of rotation (not shown) located in the first plane of symmetry 14 (and preferably oriented parallel to the substrate surface 10) and a second axis of rotation (not shown) perpendicular to the first plane of symmetry 14 (and preferably oriented parallel to the substrate surface 10). Therefore, Figure 1 The micromechanical components are advantageously suited as / used for speed sensors. Additionally, the first rotor mass 12a and the first pair of drive structures 22a and 22b are mirror-symmetric with respect to the second rotor mass 12b and the second pair of drive structures 24a and 24b about a second symmetry plane 32 oriented perpendicular to the substrate surface 10 and perpendicular to the first symmetry plane 14.

[0032] When the micromechanical component undergoes a first rotational motion about a first axis A1 located in the first plane of symmetry 14 and oriented parallel to the substrate surface 10, the Coriolis force causes a first tilting motion of the two rotor masses 12a and 12b, which are placed in corresponding torsional vibrations 16a or 16b about their respective first axes of rotation. The first tilting motions of the two rotor masses 12a and 12b are mirror-symmetric about the second plane of symmetry 32 due to the 180° phase angle between the first and second torsional vibrations 16a and 16b. This mirror-symmetric motion of the two rotor masses 12a and 12b about the second plane of symmetry 32 is not triggered by external linear or rotational accelerations.

[0033] Furthermore, the first tilting motion can be well detected due to the increased amplitude of the torsional vibrations 16a and 16b of the rotor masses 12a and 12b achieved by means of the "extended spring structure". For example, each of the two rotor masses 12a and 12b can be assigned a first pair of sensor electrodes (not shown), which extend along the first plane of symmetry 14 adjacent to the assigned rotor mass 12a or 12b, respectively, wherein each sensor electrode in the first pair of sensor electrodes forms a capacitor with the assigned rotor mass 12a or 12b. For example, the first pair of sensor electrodes can be fixed on the substrate surface 10. When differential analysis is performed on the signal obtained by means of the first pair of sensor electrodes, the mirror symmetry of the first tilting motion of the two rotor masses 12a and 12b about the second plane of symmetry 32 causes amplification of the signal triggered by the first rotational motion of the micromechanical component about the first axis A1, while the differential analysis automatically corrects / "filters out" fault signals of the first pair of sensor electrodes that can be attributed to the external linear acceleration and rotational acceleration of the micromechanical component. Therefore, the first rotational motion of the micromechanical component about the first axis A1 can be reliably detected by means of the two rotor masses 12a and 12b.

[0034] Accordingly, when the micromechanical component performs a second rotational motion about a second axis A2 located within the second symmetry plane 32 and oriented parallel to the substrate surface 10, the Coriolis force causes a second tilting motion of the rotor masses 12a and 12b placed in their respective torsional vibration motions 16a or 16b. Due to the 180° phase angle between the first torsional vibration motion 16a and the second torsional vibration motion 16b, the second tilting motions of the two rotor masses 12a and 12b are symmetrical about the intersection point of the first symmetry plane 14 and the second symmetry plane 32. This symmetrical motion of the two rotor masses 12a and 12b about the intersection point is not triggered by external linear or rotational accelerations.

[0035] In this configuration, the second tilting motion can also be well detected due to the increased amplitude of the torsional vibrations 16a and 16b of the rotor masses 12a and 12b, achieved through the "extended spring structure." For example, each of the two rotor masses 12a and 12b can be associated with a second pair of sensor electrodes (not shown), extending adjacent to the associated rotor mass 12a or 12b along a line oriented parallel to the second plane of symmetry 32, wherein each sensor electrode in the second pair forms a capacitor with the associated rotor mass 12a or 12b. The second pair of sensor electrodes can also be fixed to the substrate surface 10. During differential analysis processing of the signals obtained using the second pair of sensor electrodes, the point symmetry of the second tilting motion of the two rotor masses 12a and 12b causes an amplification of the signal attributable to the second rotational motion of the micromechanical component about the second axis A2, while the differential analysis automatically corrects / "filters out" fault signals of the second pair of sensor electrodes based on the external linear acceleration and rotational acceleration of the micromechanical component. Therefore, the second rotational motion of the micromechanical component around the second axis A2 can also be reliably detected by means of the two rotor masses 12a and 12b.

[0036] Therefore, the two rotor masses 12a and 12b can be referred to as a dual rotor, which can be advantageously used for vibration-resistant measurements against the first axis A1 and the second axis A2. The increased amplitude of the torsional vibration movements 16a and 16b of the rotor masses 12a and 12b, achieved by means of the "extended spring structure," advantageously contributes to improving the sensitivity of the dual rotor, even in the case of a relatively small dual rotor configuration. Furthermore, in the configuration of the two rotor masses 12a and 12b described herein, it is also ensured that even when the two rotor masses 12a and 12b are placed in their respective torsional vibration movements 16a or 16b, the vector sum of the first torque of the first torsional vibration movement 16a of the first rotor mass 12a and the second torque of the second torsional vibration movement 16b of the second rotor mass 12b is also (substantially always) zero. Therefore, even when the two rotor masses 12a and 12b are placed in their respective torsional vibration movements 16a or 16b, there is no need to worry about the undesirable coupling of the torque of one of the two rotor masses 12a and 12b.

[0037] As an advantageous extension, the two rotor masses 12a and 12b are additionally coupled to each other by (optionally) an intermediate spring 34, which does not resist a first tilting motion of the two rotor masses 12a and 12b triggered by a first rotational motion of the micromechanical component about a first axis A1 and mirror-symmetric about a second plane of symmetry 32. However, the intermediate spring suppresses asymmetrical motion of the two rotor masses 12a and 12b about their first axis of rotation about the second plane of symmetry 32, which is conventionally triggered by linear and rotational accelerations external to the micromechanical component. Figure 1 In the example, the intermediate spring 34 has a first end section, a second end section, and a beam-like intermediate section located between the two end sections. The first end section has a forked portion attached to the first rotor mass 12a, and the second end section has a forked portion attached to the second rotor mass 12b. However, the intermediate spring 34 in... Figure 1 The shapes shown are to be interpreted as examples only. Alternatively, the intermediate spring 34 may be, for example, an O-type spring comprising a beam-shaped first end section (attached to the first rotor mass 12a), a beam-shaped second end section (attached to the second rotor mass 12b), and an intermediate section located between the two end sections, wherein the four beam-shaped spring sections form the intermediate section in an O-shape or rectangular shape.

[0038] As an additional (optional) extension, each of the two rotor masses 12a and 12b is further attached by a first spring 36a to a first rocker structure 38a oriented parallel to the first plane of symmetry 14, and by a second spring 36b to a second rocker structure 38b oriented parallel to the first plane of symmetry 14. Each of the rocker structures 38a and 38b is tiltable about a rocker axis located in the second plane of symmetry 32 (and preferably parallel to the substrate surface 10). Each of the rocker structures 38a and 38b can be attached to the micromechanical component, for example, by at least one rocker structure attachment spring 35, which extends from the respective rocker structure 38a or 38b to an anchoring region fixed on the substrate surface 10. The rocker structures 38a and 38b do not resist the point-symmetric second tilting motion of the two rotor masses 12a and 12b, but the two rocker structures 38a and 38b suppress the mirror-symmetric motion of the two rotor masses 12a and 12b about their respective second rotation axes about the second symmetry plane 32.

[0039] also, Figure 1The micromechanical components include a first pair of vibrating masses 40a and 40b and a second pair of vibrating masses 42a and 42b, which are mirror-symmetric about a first plane of symmetry 14. The four vibrating masses 40a, 40b, 42a, and 42b can be placed in harmonic resonant motions oriented parallel to the first plane of symmetry 14 by means of two rotor masses 12a and 12b placed in their respective torsional vibrational motions 16a or 16b and / or by means of four drive structures 22a, 22b, 24a, and 24b placed in their respective harmonic vibrational motions. Advantageously, the first vibrating mass 40a of the first pair of vibrating masses can be / has been placed in a first harmonic resonance motion oriented parallel to the first plane of symmetry 14; the second vibrating mass 40b, mirror-symmetrical to the first vibrating mass 40a of the first pair of vibrating masses about the first plane of symmetry 14, can be / has been placed in a second harmonic resonance motion oriented parallel to the first plane of symmetry 14; the first vibrating mass 42a of the second pair of vibrating masses can be / has been placed in a second harmonic resonance motion; and the second vibrating mass 42b, mirror-symmetrical to the first vibrating mass 42a of the second pair of vibrating masses about the first plane of symmetry 14, can be / has been placed in a first harmonic resonance motion. A significant advantage of the excitation described herein for the harmonic resonance motions of the four vibrating masses 40a, 40b, 42a, and 42b is that the first harmonic resonance motion is phase-shifted by 180° relative to the second harmonic resonance motion.

[0040] Therefore, the first pair of vibrating masses 40a and 40b are (indirectly) attached to the first rotor mass 12a, while the second pair of vibrating masses 42a and 42b are (indirectly) attached to the second rotor mass 12b. Furthermore, only by way of example, in Figure 1 In one embodiment, the first vibrating mass 40a of the first pair of vibrating masses is (directly) attached to the side of the first drive structure 22a of the first pair of drive structures that is oriented away from the first rotor mass 12a; the second vibrating mass 40b of the first pair of vibrating masses is (directly) attached to the side of the second drive structure 22b of the first pair of drive structures that is oriented away from the first rotor mass 12a; the first vibrating mass 42a of the second pair of vibrating masses is (directly) attached to the side of the first drive structure 24a of the second pair of drive structures that is oriented away from the second rotor mass 12b; and the second vibrating mass 42b of the second pair of vibrating masses is (directly) attached to the side of the second drive structure 24b of the second pair of drive structures that is oriented away from the second rotor mass 12b. This can be interpreted as the drive structures 22a, 22b, 24a and 24b being “externally attached” to the two rotor masses 12a and 12b, and each vibrating mass 40a, 40b, 42a and 42b being “externally attached” to one of the drive structures 22a, 22b, 24a and 24b, respectively.

[0041] Furthermore, the four vibrating masses 40a, 40b, 42a, and 42b, placed in their respective harmonic resonant motions, can deflect / adjust perpendicularly to the first plane of symmetry 14. Therefore, when the micromechanical component undergoes a third rotational motion about a third axis (not shown) oriented perpendicular to the substrate surface 10, the Coriolis force causes the four vibrating masses 40a, 40b, 42a, and 42b, placed in their respective harmonic resonant motions, to deflect perpendicularly to the first plane of symmetry 14. The 180° phase angle between the first and second harmonic resonant motions causes a first adjustment motion 44a of the first vibrating mass 40a of the first pair of vibrating masses and a second adjustment motion 44b of the second vibrating mass 42b of the second pair of vibrating masses, which is opposite in direction to the first adjustment motion 44a. Therefore, the adjustment movements 44a and 44b triggered by the Coriolis force of the four vibrating masses 40a, 40b, 42a, and 42b are mirror-symmetric about the first symmetry plane 14. The external linear acceleration and rotational acceleration of the micromechanical component do not trigger these mirror-symmetric adjustment movements 44a and 44b about the first symmetry plane 14 of the four vibrating masses 40a, 40b, 42a, and 42b. Therefore, the third rotational motion of the micromechanical component about the third axis can also be reliably detected by means of the four vibrating masses 40a, 40b, 42a, and 42b.

[0042] Therefore, preferably, the vibrating masses 40a, 40b, 42a, and 42b are configured with probe electrode elements (not shown), which each form a capacitor with a fixed probe electrode (not shown), which is, for example, fixed on the substrate surface 10. During differential analysis of the signals obtained by means of their probe electrode elements and the associated fixed probe electrodes, the mirror symmetry of the adjustment movements 44a and 44b of the four vibrating masses 40a, 40b, 42a, and 42b about the first symmetry plane 14 causes an amplification of the signal attributable to a third rotational motion of the micromechanical component about a third axis. The differential analysis automatically corrects / "filters out" fault signals of the probe electrode elements and the fixed probe electrodes, which are based on the external linear acceleration and rotational acceleration of the micromechanical component.

[0043] exist Figure 1In this embodiment, the four vibrating masses 40a, 40b, 42a, and 42b are merely exemplary frame structures. Optionally, the two first vibrating masses 40a and 42a may each be attached to a first coupling rocker 48a via a spring element 46, and the two second vibrating masses 40b and 42b may each be attached to a second coupling rocker 48b via a spring element 46. More preferably, in this case, each of the two coupling rockers 48a and 48b is capable of tilting about a rocker axis that intersects centrally with the corresponding coupling rocker 48a or 48b and is oriented perpendicular to the substrate surface 10. In this case, the coupling rockers 48a or 48b do not resist the mirror-symmetric adjustment movements 44a and 44b of the four vibrating masses 40a, 40b, 42a, and 42b about the first symmetry plane 14; rather, the two coupling rockers 48a or 48b suppress the asymmetrical movements of the two rotor masses about the first symmetry plane 14.

[0044] Figure 2 A partial schematic diagram of a second embodiment of the micromechanical component is shown.

[0045] Unlike the previously described implementation, Figure 2 The micromechanical component has rocker structures 38a and 38b, respectively oriented parallel to a first plane of symmetry, as at least one of its first components. A first rotor mass 12a is attached to these rocker structures via at least one first spring element 26a, and a second rotor mass 12b is attached to these rocker structures via at least one second spring element 26b. Therefore, the advantage of lever transmission achieved by means of "extended spring structures" can also be used for attaching the two rotor masses 12a and 12b to the two rocker structures 38a and 38.

[0046] exist Figure 2 In the schematically illustrated micromechanical components, two rotor masses 12a and 12b are respectively constructed in a cross shape or a plus sign shape. This can be understood as each of the two rotor masses 12a and 12b having four arms extending outward from its center. In the intermediate space between two adjacent arms of each rotor mass 12a or 12b, either a drive structure 22a, 22b, 24a or 24b assigned to the corresponding rotor mass 12a or 12b is engaged, or a vibrating mass 40a, 40b, 42a or 42b assigned to the corresponding rotor mass 12a or 12b is engaged. The drive structures 22a, 22b, 24a and 24b and the vibrating masses 40a, 40b, 42a and 42b are respectively spring-coupled to the assigned rotor mass 12a or 12b. Additionally, the drive structures 22a, 22b, 24a and 24b, and the vibrating masses 40a, 40b, 42a and 42b can be attached to the micromechanical component, particularly to the substrate surface 10, respectively, via at least one attachment spring.

[0047] about Figure 2 For other features and advantages of micromechanical components, please refer to [reference needed]. Figure 1 The implementation method.

[0048] In the aforementioned micromechanical components, rotor masses 12a and 12b, drive structures 22a, 22b, 24a and 24b, vibrating masses 40a, 40b, 42a and 42b, rocker structures 38a and 38b, coupling rockers 48a and 48b, and all springs can be structured from semiconductor layers (e.g., especially silicon layers) deposited on the substrate surface 10.

[0049] In the above embodiment, each of the spring elements 26a and 26b includes a first beam-like section extending from its adjacent lateral recess 28a or 28b and a second beam-like section oriented perpendicular to the first beam-like section, the first beam-like section being anchored to the second beam-like section, wherein both ends of the second beam-like section are attached to the associated rotor mass 12a or 12b. However, this configuration of the spring elements 26a and 26b should only be interpreted as an example.

[0050] All of the aforementioned micromechanical components are suitable for use as (at least a portion thereof) rotational speed sensors, for example, particularly as triaxial rotational speed sensors, which can detect not only a first rotational motion about a first axis A1 and a second rotational motion about a second axis A2, but also a third rotational motion about a third axis oriented perpendicular to the substrate surface 10. Detecting the corresponding rotational motion can be understood not only as proving the corresponding rotational motion, but also as measuring physical parameters reflecting the corresponding rotational motion, such as rotational rate, rotational speed, and / or angular velocity.

[0051] Figure 3 A flowchart illustrating an embodiment of a method for manufacturing a micromechanical component for a speed sensor is shown.

[0052] In method step S1, the one-piece first rotor mass of the micromechanical component is constructed / arranged such that the first rotor mass can be subjected to a first torsional vibration motion about a first axis of rotation oriented perpendicular to the substrate surface of the micromechanical component. As method step S2, at least one first component of the micromechanical component is also constructed / arranged, wherein the first rotor mass is attached to at least one first component by at least one first spring element. Furthermore, at least one first spring element is attached to a retracted edge region of the first rotor mass, each extending through a lateral notch on the first rotor mass. An example of at least one first component has been described above. Therefore, the implementation of the manufacturing method described herein also yields the aforementioned advantages.

[0053] Method steps S1 and S2 can be performed in any temporal order, simultaneously, or overlapping in time.

Claims

1. A micromechanical component for a speed sensor, the micromechanical component comprising: a substrate having a substrate surface; a one-piece first rotor mass capable of being subjected to a first torsional vibration motion about a first axis of rotation oriented perpendicular to the substrate surface; and at least one first component of the micromechanical component, wherein, The first rotor mass is attached to the at least one first component via at least one first spring element; characterized in that the at least one first spring element extends through each of a lateral notch on the first rotor mass and is attached to a retracted edge region of the first rotor mass, the lateral notch being a recessed or recessed portion of the first rotor mass constructed on its side, wherein the micromechanical component additionally includes a one-piece second rotor mass, the second rotor mass being mirror-symmetrical with respect to the first rotor mass about a plane of symmetry, the plane of symmetry being oriented perpendicular to the substrate surface and intersecting the first rotor mass and the second rotor mass centrally, and the second rotor mass being capable of being positioned around a plane parallel to the substrate surface. In the second torsional vibration motion of the second rotation axis oriented by the first rotation axis, the second torsional vibration motion is phase-shifted by 180° relative to the first torsional vibration motion. The second rotor mass is attached to at least one first component and / or at least one second component of the micromechanical component via at least one second spring element. The at least one second spring element extends through a lateral notch on the second rotor mass and is attached to a retracted edge region of the second rotor mass. The micromechanical component has a first pair of drive structures as the at least one first component and a second pair of drive structures as the at least one second component. The first driving structure located on the first side of the plane of symmetry is mirror-symmetrical about the plane of symmetry with respect to the second driving structure located on the second side of the plane of symmetry in the first pair of driving structures and the second driving structure in the second pair of driving structures. The first driving structure of the first pair of driving structures can be placed in a first harmonic vibration motion oriented parallel to the plane of symmetry; the second driving structure of the first pair of driving structures can be placed in a second harmonic vibration motion oriented parallel to the plane of symmetry and phase-shifted by 180° relative to the first harmonic vibration motion; the first driving structure of the second pair of driving structures can be placed in the second harmonic vibration motion; and the second driving structure of the second pair of driving structures can be placed in the first harmonic vibration motion, such that by means of the placement... In the four driving structures of its corresponding harmonic vibration motion, two rotor masses are placed in their corresponding torsional vibration motion, wherein the micromechanical component additionally has a first pair of vibrating masses and a second pair of vibrating masses, wherein the first vibrating mass located on a first side of the plane of symmetry is mirror-symmetric with respect to the second vibrating mass located on a second side of the plane of symmetry, and wherein, by means of the two rotor masses placed in their respective torsional vibration motion and / or by means of the four driving structures placed in their respective harmonic vibration motion, the four vibrating masses can be placed in harmonic resonant motion oriented parallel to the plane of symmetry.Two first vibrating masses are attached to a first coupling rocker arm, and two second vibrating masses are attached to a second coupling rocker arm. Each of the first and second coupling rockers is tiltable about a rocker axis that intersects the corresponding coupling rocker arm centrally and is oriented perpendicular to the substrate surface.

2. The micromechanical component according to claim 1, wherein, The two rotor masses are constructed and / or arranged such that the two rotor masses, placed in their respective torsional vibrational motions, can tilt respectively about an axis of rotation located in the plane of symmetry and another axis of rotation oriented perpendicular to the plane of symmetry.

3. The micromechanical component according to claim 2, wherein, The micromechanical component includes at least one rocker structure oriented parallel to the plane of symmetry as the at least one first component, the first rotor mass being attached to the at least one rocker structure via the at least one first spring element, and the second rotor mass being attached to the at least one rocker structure via the at least one second spring element.

4. The micromechanical component according to any one of claims 1 to 3, wherein, The two rotor masses are constructed and / or arranged such that when the two rotor masses are placed in their respective torsional vibrational motions, the vector sum of the first torque of the first torsional vibrational motion of the first rotor mass and the second torque of the second torsional vibrational motion of the second rotor mass is equal to zero.

5. The micromechanical component according to any one of claims 1 to 3, wherein, The four vibrating masses, placed in their respective harmonic resonant motions, are additionally capable of deflecting perpendicularly to the plane of symmetry.

6. A speed sensor having a micromechanical component according to any one of claims 1 to 5.

7. A method for manufacturing a micromechanical component, said micromechanical component being a micromechanical component for a speed sensor according to any one of claims 1 to 5, said manufacturing method comprising the steps of: constructing and / or arranging a one-piece first rotor mass of said micromechanical component such that the first rotor mass can be placed in a first torsional vibration motion about a first axis of rotation, the first axis of rotation being oriented perpendicular to the substrate surface of the substrate of said micromechanical component; and constructing and / or arranging at least one first component of said micromechanical component, wherein, The first rotor mass is attached to the at least one first component by at least one first spring element; characterized in that the at least one first spring element is attached to a retracted edge region of the first rotor mass, the at least one first spring element extending through each of a lateral notch on the first rotor mass.

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