An acoustic transducer structure and array thereof

Abstract

The application provides an acoustic transducer structure and an array thereof, which comprises a substrate, a central cavity, at least one annular cavity and a diaphragm, wherein the central cavity is open on the upper surface of the substrate and extends towards the lower surface of the substrate; the at least one annular cavity surrounds the central cavity, and the inner edge of the annular cavity is spaced apart from the edge of the central cavity by a preset distance; and the diaphragm is located on the upper surface of the substrate and covers the openings of the central cavity and the annular cavity. The application can be manufactured by mechanical processing or MEMS based on semiconductor technology, realizes mechanical dynamic correlation between structures layer by layer outward, and achieves the effect of mechanical frequency response coupling between different diaphragms. Through the repeated combination of simple physical device structures, the mechanical resonance frequency inherent in the device itself is realized, and the resonance modes are coupled with each other, the frequency response at other frequencies (such as high-order modes) is achieved, so that a wider acoustic dynamic response is realized, and the sound field intensity in the response range is improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of microelectronic chip design, and relates to an acoustic transducer structure and an array thereof. BACKGROUND

[0002] The dynamic response range of a conventional acoustic transducer is generally determined by the natural resonance frequency. The natural resonance frequency is generally determined by the physical structure and size of the device. Limited by the processing technology, the acoustic transducer / sensor made of conventional fast materials generally has a fixed physical structure and only one dynamic response frequency. It is impossible to truly achieve a good dynamic response in a wide range. Many acoustic devices need to have a high dynamic response at different frequencies in the acoustic medium to meet more extensive application requirements. For example, the measurement resolution is adjusted by adjusting the frequency, and the detection range is controlled.

[0003] The MEMS (Micro-Electro-Mechanical System) sensor processed by microprocessing can achieve a larger bandwidth response by different combinations of device physical shapes and sizes. However, a single device design generally only works at a single frequency. The combination of multiple devices generally corresponds to the same number of frequency responses and working bandwidths.

[0004] Therefore, how to provide an acoustic transducer structure and an array thereof with a wider acoustic dynamic response range has become an important technical problem to be solved by those skilled in the art. SUMMARY

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an acoustic transducer structure and an array thereof, which can solve the problems of narrow acoustic dynamic response range and low sound field intensity in the response range of the existing acoustic transducer.

[0006] To achieve the above-mentioned purposes and other related purposes, the present application provides an acoustic transducer structure, comprising:

[0007] a substrate;

[0008] a central cavity opening from the upper surface of the substrate and extending towards the lower surface of the substrate;

[0009] at least one annular cavity surrounding the central cavity, the inner edge of the annular cavity being spaced apart from the edge of the central cavity by a predetermined distance;

[0010] a diaphragm located on the upper surface of the substrate and covering the opening of the central cavity and the opening of the annular cavity.

[0011] Optionally, the number of annular cavities is 2-10, and each annular cavity is arranged in sequence from inside to outside.

[0012] Optionally, the center of the annular cavity coincides with the center of the central cavity.

[0013] Optionally, the opening of the central cavity is circular, polygonal or rounded rectangular, and the opening of the annular cavity is circular ring, polygonal ring or rounded rectangular ring.

[0014] Optionally, the first order resonance frequency of the diaphragm corresponding to the central cavity is higher than the first order resonance frequency of the diaphragm corresponding to the annular cavity.

[0015] Optionally, the first order resonance frequency of the diaphragm corresponding to the central cavity is equal to an integer multiple of the first order resonance frequency of the diaphragm corresponding to the annular cavity, or deviates from the integer multiple of the first order resonance frequency of the diaphragm corresponding to the annular cavity by no more than 20%.

[0016] Optionally, one of the high order resonance frequencies of the diaphragm corresponding to the annular cavity is equal to the first order resonance frequency of the diaphragm corresponding to the central cavity, or deviates from the first order resonance frequency of the diaphragm corresponding to the central cavity by no more than 20%.

[0017] Optionally, the first order resonance frequency of the diaphragm corresponding to the central cavity is lower than the first order resonance frequency of the diaphragm corresponding to the annular cavity.

[0018] Optionally, the first order resonance frequency of the diaphragm corresponding to the annular cavity is equal to an integer multiple of the first order resonance frequency of the diaphragm corresponding to the central cavity, or deviates from the integer multiple of the first order resonance frequency of the diaphragm corresponding to the central cavity by no more than 20%.

[0019] Optionally, one of the high order resonance frequencies of the diaphragm corresponding to the central cavity is equal to the first order resonance frequency of the diaphragm corresponding to the annular cavity, or deviates from the first order resonance frequency of the diaphragm corresponding to the annular cavity by no more than 20%.

[0020] The application also provides an array of acoustic transducer structures, comprising a plurality of acoustic transducer structures according to any one of the above, and the plurality of acoustic transducer structures are arranged in an array.

[0021] Optionally, the plurality of acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in adjacent rows are aligned.

[0022] Optionally, the plurality of acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in adjacent rows are staggered.

[0023] As mentioned above, the acoustic transducer structure and its array of the present application can be made by mechanical processing or MEMS based on semiconductor process, realizing mechanical dynamic correlation between structures layer by layer outward, and achieving the effect of mechanical frequency response coupling between the diaphragms corresponding to different cavities. Through the repeated combination of simple physical device structures, not only the mechanical resonance frequency inherent in the device itself is realized, but also the resonance modes are coupled with each other, achieving the frequency response at other frequencies (such as high-order modes), so as to realize the purpose of wider acoustic dynamic response and improve the sound field intensity in the response range. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 A single mechanical diaphragm structure shown as a rounded rectangle.

[0025] Figure 2 A single mechanical diaphragm structure shown as a circle.

[0026] Figure 3 A single mechanical diaphragm structure shown as a square.

[0027] Figure 4 A single mechanical diaphragm structure shown as a regular hexagon.

[0028] Figure 5 A single mechanical diaphragm structure shown as a circular ring.

[0029] Figure 6 A dual frequency response array structure composed of two different size mechanical diaphragms.

[0030] Figure 7 A cross-sectional structure diagram of the acoustic transducer structure in the first embodiment of the present application.

[0031] Figure 8 A planar layout diagram of the center diaphragm suspended above the center cavity and the annular diaphragm (outer diaphragm) suspended above the annular cavity in the first embodiment of the present application.

[0032] Figure 9 A diagram showing that the opening of the center cavity is a hexagon and the opening of the annular cavity is a hexagonal ring in another embodiment.

[0033] Figure 10 A diagram showing that the opening of the center cavity is a square and the opening of the annular cavity is a square ring in another embodiment.

[0034] Figure 11 A diagram showing that the opening of the center cavity is a rounded rectangle and the opening of the annular cavity is a rounded rectangular ring in another embodiment.

[0035] Figure 12A schematic diagram showing the acoustic transducer structure in Example 1 of the present application arranged in at least two rows, and the acoustic transducer structures in adjacent rows aligned with each other.

[0036] Figure 13 A schematic diagram showing the acoustic transducer structure in Example 1 of the present application arranged in at least two rows, and the acoustic transducer structures in adjacent rows staggered with each other.

[0037] Figure 14 A dynamic amplitude frequency response diagram showing the inner and outer diaphragms of the acoustic transducer structure in Example 1 of the present application.

[0038] Figure 15 A whole acoustic frequency response diagram showing the acoustic transducer structure in Example 1 of the present application.

[0039] Figure 16 A cross-sectional structure schematic diagram showing the acoustic transducer structure in Example 2 of the present application.

[0040] Figure 17 A planar layout diagram showing the center diaphragm suspended above the center cavity, the annular diaphragm suspended above the first annular cavity, and the annular diaphragm suspended above the second annular cavity in Example 2 of the present application.

[0041] Figure 18 A schematic diagram showing the acoustic transducer structure in Example 2 of the present application arranged in at least two rows, and the acoustic transducer structures in adjacent rows aligned with each other.

[0042] Figure 19 A schematic diagram showing the acoustic transducer structure in Example 2 of the present application arranged in at least two rows, and the acoustic transducer structures in adjacent rows staggered with each other.

[0043] Figure 20 A wide-area acoustic response simulation result showing the acoustic transducer structure in Example 2 of the present application.

[0044] Element number explanation

[0045] 101 smaller diaphragm

[0046] 102 larger diaphragm

[0047] 201 substrate

[0048] 202 center cavity

[0049] 203 annular cavity

[0050] 203a first annular cavity

[0051] 203b second annular cavity

[0052] 204 diaphragm

[0053] 2041 center diaphragm

[0054] 2042, 2043 ring diaphragm DETAILED DESCRIPTION

[0055] The present application is herein described, by way of example only, with the comprehension that the advantages and utility thereof are more fully illustrated by the following examples, but are in no way limited thereto. Still yet, other objects, advantages and novel features of the present application can become apparent to those skilled in the art from the following detailed description, which, when taken in con junction with the drawings, discloses preferred embodiments.

[0056] Reference will now be made to the drawings, wherein: Figures 1 to 20 It is to be understood that the drawings are to be used only for illustrating the preferred embodiments and thus are not to be construed as being to scale. The embodiments shown by the drawings are intended to illustrate the basic concept of the present application, and thus the drawings show only the components related to the present application, rather than showing the components in the number, shape and size as they are actually implemented. The actual implementation of the components can be arbitrarily changed in shape, number and size, and the layout of the components can be more complicated.

[0057] As shown in FIG. 1, five different shapes of single mechanical diaphragm structures are shown, wherein, Figures 1 to 5 a single mechanical diaphragm structure in a rounded rectangular shape is shown, Figure 1 a single mechanical diaphragm structure in a circular shape is shown, Figure 2 a single mechanical diaphragm structure in a square shape is shown, Figure 3 a single mechanical diaphragm structure in a regular hexagonal shape is shown, Figure 4 a single mechanical diaphragm structure in a circular ring shape is shown. For such an acoustic transducer using a single mechanical diaphragm structure, it has only one dynamic response frequency, and thus cannot truly achieve a good dynamic response in a wide range Figure 5 As shown in FIG. 2, a dual-frequency array structure composed of two different sizes of mechanical diaphragms is shown, wherein the smaller diaphragm 101 corresponds to a higher dynamic frequency response, and the larger diaphragm 102 corresponds to a lower dynamic frequency response. For such an acoustic transducer using multiple devices in combination, it generally corresponds to the same number of frequency responses and working bandwidth, and the increased dynamic response range is limited.

[0058] Figure 6 Therefore, the present application further expands the acoustic dynamic response range of the acoustic transducer by improving the structural design of the acoustic transducer. The technical solutions of the present application are described below through specific embodiments.

[0059] Embodiment One

[0060] Embodiment One

[0061] ​The application provides an acoustic transducer structure, please refer to Figure 7 , which is shown as a schematic diagram of a cross-sectional structure of the acoustic transducer structure, comprising a substrate 201, a central cavity 202, an annular cavity 203 and a diaphragm 204, wherein the central cavity 202 is opened from the upper surface of the substrate 201 and extends to the lower surface of the substrate 201; the annular cavity 203 surrounds the central cavity 202, and the inner edge of the annular cavity 203 is spaced apart from the edge of the central cavity 202 by a predetermined distance; and the diaphragm 204 is located on the upper surface of the substrate and covers the opening of the central cavity 202 and the opening of the annular cavity 203.

[0062] Specifically, the diaphragm 204 is an integral whole, so that the diaphragms suspended above different cavities can be connected to each other. Please refer to Figure 8 , which is shown as a plan view of the central diaphragm 2041 suspended above the central cavity 202 and the annular diaphragm 2042 (outer diaphragm) suspended above the annular cavity 203, wherein the connecting part between the central diaphragm 2041 and the annular diaphragm 2042 (not shown in Figure 8 , please refer to Figure 7 ) is fixed to the upper surface of the substrate 201.

[0063] As an example, the center of the annular cavity 203 coincides with the center of the central cavity 202.

[0064] As an example, the opening of the central cavity 202 is circular, the opening of the annular cavity 203 is a circular ring, and correspondingly, the central diaphragm 2041 is circular and the annular diaphragm 2042 is a circular ring.

[0065] Of course, in other embodiments, the opening of the central cavity 202 can also be polygonal (for example, hexagonal as shown in Figure 9 , or square as shown in Figure 10 ) or rounded rectangular (as shown in Figure 11 ), and the opening of the annular cavity 203 can also be a polygonal ring (for example, a hexagonal ring as shown in Figure 9 , or a square ring as shown in Figure 10 ) or a rounded rectangular ring (as shown in Figure 11 ).

[0066] As an example, the first-order resonance frequency of the diaphragm corresponding to the central cavity (the central diaphragm 2041) is different from that of the diaphragm corresponding to the annular cavity (the annular diaphragm 2042).

[0067] As an example, the mechanical frequency response of the inner and outer diaphragms can be made to be in a multiple relationship by adjusting the size of the cavities, so as to maximize the mechanical coupling. For example, when the first order resonance frequency of the diaphragm corresponding to the center cavity is higher than the first order resonance frequency of the diaphragm corresponding to the ring cavity, the first order resonance frequency of the diaphragm corresponding to the center cavity is equal to an integer multiple of the first order resonance frequency of the diaphragm corresponding to the ring cavity, or in a close range, such as deviating from the integer multiple of the first order resonance frequency of the diaphragm corresponding to the ring cavity by no more than 20%. When the first order resonance frequency of the diaphragm corresponding to the center cavity is lower than the first order resonance frequency of the diaphragm corresponding to the ring cavity, the first order resonance frequency of the diaphragm corresponding to the ring cavity is equal to an integer multiple of the first order resonance frequency of the diaphragm corresponding to the center cavity, or in a close range, such as deviating from the integer multiple of the first order resonance frequency of the diaphragm corresponding to the center cavity by no more than 20%.

[0068] In addition, due to the mechanical coupling effect, when the low-frequency diaphragm reaches the resonance response, it will drive the high-frequency diaphragm to resonate. For example, when the high-order response of the low-frequency diaphragm is close to or consistent with the resonance frequency of the high-frequency diaphragm, the driving effect will be enhanced, and the resonance phenomenon will also appear repeatedly in the high-order mode of the high-frequency diaphragm. Therefore, the first order resonance frequency of the diaphragm corresponding to the center cavity can be made to be higher than the first order resonance frequency of the diaphragm corresponding to the ring cavity, and one high-order resonance frequency of the diaphragm corresponding to the ring cavity can be made to be equal to the first order resonance frequency of the diaphragm corresponding to the center cavity, or deviate from the first order resonance frequency of the diaphragm corresponding to the center cavity by no more than 20% by adjusting the size of the cavities. The first order resonance frequency of the diaphragm corresponding to the center cavity can also be made to be lower than the first order resonance frequency of the diaphragm corresponding to the ring cavity, and one high-order resonance frequency of the diaphragm corresponding to the center cavity can be made to be equal to the first order resonance frequency of the diaphragm corresponding to the ring cavity, or deviate from the first order resonance frequency of the diaphragm corresponding to the ring cavity by no more than 20% by adjusting the size of the cavities.

[0069] As an example, please refer to Figure 12 and Figure 13 A plurality of acoustic transducer structures can be provided to form an acoustic transducer structure array, and the plurality of acoustic transducer structures are arranged in an array, wherein, Figure 12 as shown in the case where the plurality of acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures of adjacent two rows are aligned with each other, Figure 13 as shown in the case where the plurality of acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures of adjacent two rows are staggered. Of course, in other embodiments, the specific arrangement rules of the plurality of acoustic transducer structures in the acoustic transducer structure array can also be adjusted as needed, and the protection scope of the present application should not be excessively limited herein.

[0070] As an example, refer to Figure 14 and Figure 15 , which are dynamic response simulation diagrams of the acoustic transducer structure of the embodiment, wherein Figure 14 is a dynamic frequency response diagram of the amplitude of the inner and outer diaphragms, Figure 15 is a whole acoustic frequency response diagram of the inner and outer diaphragm structure. As can be seen from Figure 14 , the first-order resonance frequency of the outer ring diaphragm is 1 MHz, and the first-order resonance frequency of the center diaphragm is 5 MHz, which is 5 times the first-order resonance frequency of the outer ring diaphragm. Figure 15 The three dashed boxes in represent the first resonance coupling, the second resonance coupling, and the high-order resonance coupling response from left to right, respectively. It can be seen that there is a linkage effect caused by mechanical coupling between the inner and outer diaphragms. Figure 15 As can be seen from , the acoustic dynamic response and acoustic energy of the device at frequencies of 1 MHz, 5 MHz and 8 MHz are improved, realizing the improvement of the wide-area acoustic dynamic response and acoustic energy.

[0071] The acoustic transducer structure of the embodiment realizes the coupled vibration of the diaphragm above the different cavities by the hierarchical combination of one center diaphragm and one ring diaphragm, and utilizes the mechanical modal dynamic coupling between multiple diaphragms. Not only does it enhance the vibration intensity of each mode, but also it expands the acoustic dynamic response range of the device, realizing the effect of mutual superposition of the acoustic dynamic frequency response of only a single diaphragm when multiple physical diaphragms are combined.

[0072] Embodiment Two

[0073] The embodiment and embodiment one adopt basically the same technical solution, the difference is that the acoustic transducer structure of embodiment one includes one center diaphragm and one ring diaphragm, while in this embodiment, the acoustic transducer structure includes one center diaphragm and two ring diaphragms.

[0074] Refer to Figure 16 , which is a cross-sectional structure schematic diagram of the acoustic transducer structure of the embodiment, including a substrate 201, a center cavity 202, a first ring cavity 203a, a second ring cavity 203b, and a diaphragm 204. The center cavity 202 is opened from the upper surface of the substrate 201 and extends to the lower surface of the substrate 201. The first ring cavity 203a and the second ring cavity 203b are arranged in sequence from inside to outside around the center cavity 202. The diaphragm 204 is located on the upper surface of the substrate 201 and covers the openings of the center cavity 202, the first ring cavity 203a, and the second ring cavity 203b.

[0075] Refer to Figure 17, a planar layout view of the center diaphragm 2041 suspended above the center cavity 202, the ring diaphragm 2042 suspended above the first ring cavity 203a, and the ring diaphragm 2043 suspended above the second ring cavity 203b.

[0076] Please refer to Figure 18 and Figure 19 , a plurality of acoustic transducer structures described in the embodiment can be provided to form an array of acoustic transducer structures, and the plurality of acoustic transducer structures are arranged in an array, wherein, Figure 18 , the acoustic transducer structures in the array are arranged in at least two rows, and the acoustic transducer structures in adjacent rows are aligned with each other, Figure 19 , the acoustic transducer structures in the array are arranged in at least two rows, and the acoustic transducer structures in adjacent rows are staggered. Of course, in other embodiments, the specific arrangement of the plurality of acoustic transducer structures in the array of acoustic transducer structures can also be adjusted as needed, and this should not be too limited to the protection scope of the present application.

[0077] As an example, please refer to Figure 20 , a wide-area acoustic response (2-8MHz) simulation result of the acoustic transducer structure of the embodiment is shown, it can be seen that the acoustic transducer structure of the embodiment achieves a nearly flat-band acoustic frequency response range between 2-8MHz, realizing wide-area acoustic dynamic response and sound energy improvement.

[0078] The acoustic transducer structure of the embodiment realizes the coupled vibration of the diaphragms above the different cavities through the hierarchical combination of one center diaphragm and two ring diaphragms, utilizes the mechanical modal dynamic coupling between the plurality of diaphragms, realizes the coupled vibration of the diaphragms above the different cavities, not only enhances the vibration intensity of each mode, but also expands the acoustic dynamic response range of the device, realizes the effect of mutual superposition of the acoustic dynamic frequency response of only a single diaphragm when the traditional multiple physical diaphragms are combined.

[0079] Embodiment three

[0080] The embodiment and the embodiment one or the embodiment two adopt basically the same technical solution, the difference is that the acoustic transducer structure of the embodiment one includes one center diaphragm and one ring diaphragm, the acoustic transducer structure of the embodiment two includes one center diaphragm and two ring diaphragms, and in the embodiment, the acoustic transducer structure includes one center diaphragm and at least three ring diaphragms, for example, 3-10, and the ring cavities are arranged in sequence from inside to outside.

[0081] The acoustic transducer structure of the embodiment can be combined with a central diaphragm and at least three annular diaphragms in a hierarchical manner, and the vibration of the diaphragms above different cavities is realized by dynamic coupling of mechanical modes between the diaphragms, thereby enhancing the vibration intensity of each mode and expanding the acoustic dynamic response range of the device, and the effect of mutual superposition of the acoustic dynamic frequency response of only a single diaphragm when a plurality of physical diaphragms are combined is achieved.

[0082] In summary, the acoustic transducer structure and its array of the present application can be manufactured by mechanical processing or MEMS based on semiconductor processes, and the mechanical dynamic correlation between the structures is realized layer by layer outward, and the effect of mechanical frequency response coupling between the diaphragms corresponding to different cavities is achieved. Through the repeated combination of simple physical device structures, not only the inherent mechanical resonance frequency of the device itself is realized, but also the resonance modes are coupled with each other, the frequency response at other frequencies (such as high-order modes) is achieved, thereby achieving the purpose of wider acoustic dynamic response, and the sound field intensity in the response range is improved. Therefore, the present application effectively overcomes the various shortcomings in the prior art and has high industrial utilization value.

[0083] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. An acoustic transducer structure, characterized in that, include: Substrate; A central cavity opens from the upper surface of the substrate and extends toward the lower surface of the substrate; At least one annular cavity surrounds the central cavity, and the inner edge of the annular cavity is spaced apart from the edge of the central cavity by a predetermined distance; A diaphragm is located on the upper surface of the substrate and covers the opening of the central cavity and the opening of the annular cavity; The diaphragm corresponding to the central cavity and the diaphragm corresponding to the annular cavity vibrate together, and their mechanical modes are dynamically coupled. Furthermore, the mechanical frequency responses of the diaphragm corresponding to the central cavity and the diaphragm corresponding to the annular cavity are multiples of each other.

2. The acoustic transducer structure according to claim 1, characterized in that: The number of the annular cavities ranges from 2 to 10, and the annular cavities are arranged alternately from the inside to the outside.

3. The acoustic transducer structure according to claim 1, characterized in that: The center of the annular cavity coincides with the center of the central cavity.

4. The acoustic transducer structure according to claim 1, characterized in that: The opening of the central cavity is circular, polygonal, or rounded rectangular, and the opening of the annular cavity is circular, polygonal, or rounded rectangular.

5. The acoustic transducer structure according to claim 1, characterized in that: The first-order resonant frequency of the diaphragm corresponding to the central cavity is higher than the first-order resonant frequency of the diaphragm corresponding to the annular cavity.

6. The acoustic transducer structure according to claim 5, characterized in that: The first-order resonant frequency of the diaphragm corresponding to the central cavity is an integer multiple of the first-order resonant frequency of the diaphragm corresponding to the annular cavity, or the first-order resonant frequency of the diaphragm corresponding to the central cavity deviates from the first-order resonant frequency of the diaphragm corresponding to the annular cavity by no more than 20%.

7. The acoustic transducer structure according to claim 5, characterized in that: A higher-order resonance frequency of the diaphragm corresponding to the annular cavity is equal to the first-order resonance frequency of the diaphragm corresponding to the central cavity, or a higher-order resonance frequency of the diaphragm corresponding to the annular cavity deviates from the first-order resonance frequency of the diaphragm corresponding to the central cavity by no more than 20%.

8. The acoustic transducer structure according to claim 1, characterized in that: The first-order resonant frequency of the diaphragm corresponding to the central cavity is lower than the first-order resonant frequency of the diaphragm corresponding to the annular cavity.

9. The acoustic transducer structure according to claim 8, characterized in that: The first-order resonant frequency of the diaphragm corresponding to the annular cavity is an integer multiple of the first-order resonant frequency of the diaphragm corresponding to the central cavity, or the first-order resonant frequency of the diaphragm corresponding to the annular cavity deviates from the first-order resonant frequency of the diaphragm corresponding to the central cavity by no more than 20%.

10. The acoustic transducer structure according to claim 8, characterized in that: A higher-order resonance frequency of the diaphragm corresponding to the central cavity is equal to the first-order resonance frequency of the diaphragm corresponding to the annular cavity, or a higher-order resonance frequency of the diaphragm corresponding to the central cavity deviates from the first-order resonance frequency of the diaphragm corresponding to the annular cavity by no more than 20%.

11. An acoustic transducer array, characterized in that: The acoustic transducer structure array includes multiple acoustic transducer structures as described in any one of claims 1-10, and the multiple acoustic transducer structures are arranged in an array.

12. The acoustic transducer structure array according to claim 11, characterized in that: The acoustic transducer structures are arranged in at least two rows, with the acoustic transducer structures in adjacent rows aligned.

13. The acoustic transducer array according to claim 11, characterized in that: The acoustic transducer structures are arranged in at least two rows, with the acoustic transducer structures in adjacent rows being staggered.

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