A single-channel double-ventilation pneumatic reciprocating motion mechanism and its usage method

Abstract

The present invention relates to a single-channel double-vent pneumatic reciprocating motion mechanism and its usage method, belonging to the technical field of pneumatic equipment, and solving the technical problems of large occupied space and high cost existing in such reciprocating motion mechanisms in the related art. The single-channel double-vent pneumatic reciprocating motion mechanism includes a seat body, the seat body is provided with a connecting rod connected to a first air pipe, an air flow channel is opened in the connecting rod, and the air flow channel is communicated with the first air pipe; a micro cylinder, installed on the seat body, the micro cylinder is communicated with the air flow channel, and the telescopic rod of the micro cylinder extends out of the seat body; an external piston rod, the external piston rod is connected to the telescopic rod; a guide sleeve, detachably and fixedly connected to the seat body, and the guide sleeve is sleeved outside the external piston rod; a gas generating device capable of generating positive-pressure gas and negative-pressure gas, and the first air pipe is communicated with the gas generating device. Through the above structure, the reciprocating motion mechanism can meet the power requirements of chip manufacturing, and has a smaller volume, lower cost and stronger practicability.

Description

Technical Field

[0001] The invention belongs to the technical field of pneumatic equipment, and in particular relates to a single-path double-pass pneumatic reciprocating motion mechanism and a use method thereof. Background Art

[0002] In the semiconductor field, the chip manufacturing process often requires up-and-down or forward-and-backward reciprocating motion in a small space. Currently, a large-stroke cylinder is used to achieve this. However, the reciprocating motion required for chip manufacturing is small, and the margin of the output motion of the large-stroke cylinder is large. In addition, two air pipes are connected to the cylinder, and the two air pipes are connected to the air source. The two air pipes are respectively inlet, thereby realizing the reciprocating motion of the cylinder output. Therefore, this type of reciprocating motion mechanism in the related art has the technical problems of large space occupation and high cost. Summary of the invention

[0003] The present invention provides a single-channel double-pass pneumatic reciprocating motion mechanism, which is used to solve the technical problems of large space occupation and high cost of such reciprocating motion mechanisms in the related art.

[0004] The present invention is implemented by the following technical solution: a single-channel double-pass pneumatic reciprocating motion mechanism, comprising:

[0005] A seat body, wherein the seat body is provided with a connecting rod connected to the first air pipe, wherein an air flow channel is opened in the connecting rod, and the air flow channel is communicated with the first air pipe;

[0006] A micro cylinder is mounted on the base, an air inlet of the micro cylinder is communicated with the air flow channel, and a telescopic rod of the micro cylinder extends out of the base;

[0007] An external piston rod, the external piston rod is detachably fixedly connected to the telescopic rod;

[0008] A guide sleeve is detachably fixedly connected to the seat body, and the guide sleeve is sleeved outside the external piston rod;

[0009] A gas generating device capable of generating positive pressure gas and negative pressure gas, wherein the first gas pipe is connected to the gas generating device.

[0010] Furthermore, in order to better implement the present invention, the gas generating device is a vacuum generator.

[0011] Furthermore, in order to better realize the present invention, it also includes a three-way valve, a second air pipe and a third air pipe, the three-way valve includes a first connection port, a second connection port and a third connection port, the vacuum generator includes an exhaust port and a vacuum port, the first air pipe is connected to the first connection port, the second air pipe is connected to the exhaust port and the second connection port, and the third air pipe is connected to the vacuum port and the third connection port.

[0012] Further, to better implement the present invention, the connecting rod is a straight rod, the telescopic rod is coaxial with the connecting rod, and the telescopic rod and the connecting rod face opposite directions.

[0013] Further, to better implement the present invention, a through hole is provided in the middle of the connecting piston rod, a guiding groove is provided on the inner hole wall of the guiding sleeve, and a pin is further included. The pin is pinned in the through hole and slidably inserted into the guiding groove.

[0014] Further, to better implement the present invention, an installation groove is provided on the seat body, and the housing of the micro cylinder is connected in the installation groove through a first bolt.

[0015] Further, to better implement the present invention, an external thread is provided at the free end of the telescopic rod of the micro cylinder, a counterbore is provided on one end face of the external connecting piston rod, an internal thread is provided on the inner wall of the counterbore, and the external thread and the internal thread are screwed together.

[0016] Further, to better implement the present invention, a bolt hole is provided on the seat body, a threaded hole is provided on the guiding sleeve, and a second bolt is further included. The second bolt passes through the bolt hole and is screwed into the threaded hole.

[0017] Further, to better implement the present invention, the bolt hole is a countersunk hole.

[0018] Further, to better implement the present invention, the first air pipe is connected to the connecting rod through a rotary air joint.

[0019] Further, to better implement the present invention, the rotary air joint includes a central pipe and a turntable. The turntable is rotatably sleeved outside the central pipe and the turntable is located in the middle of the central pipe;

[0020] One end of the central pipe is rotatably inserted into the air flow channel, the turntable is detachably and fixedly connected to the end face of the connecting rod through a connecting member, and the first air pipe is connected to the other end of the central pipe.

[0021] Further, to better implement the present invention, the connecting member is a screw, a through hole is provided on the turntable, a screw hole is provided on the end face of the connecting rod, and the screw passes through the through hole and is screwed into the screw hole.

[0022] Further, to better implement the present invention, the number of the screws, the number of the through holes, and the number of the screw holes are all several, and several screws correspond to several through holes and several screw holes one by one.

[0023] Further, to better implement the present invention, the number of the screws, the number of the through holes, and the number of the screw holes are all four. The four screws correspond to the four through holes and the four screw holes one by one, and the four screw holes are circumferentially arrayed around the central axis of the connecting rod.

[0024] Further, to better implement the present invention, the rotary air joint further includes a sealing gasket, and the sealing gasket is installed between the end face of the connecting rod and the turntable.

[0025] Further, to better implement the present invention, the rotary air joint further includes a sealing bearing, and the turntable is rotatably sleeved outside the central tube through the sealing bearing.

[0026] The present invention also provides a usage method of a single - path double - ventilation pneumatic reciprocating motion mechanism, including the following steps:

[0027] Using the gas generating device to generate positive - pressure gas, the positive - pressure gas is transported to the micro - cylinder through the first air pipe and the air flow channel, and the telescopic rod of the micro - cylinder pushes the external piston rod to extend outward in the guide sleeve;

[0028] Using the gas generating device to generate negative - pressure gas, the negative - pressure gas is transported to the micro - cylinder through the first air pipe and the air flow channel, and the telescopic rod of the micro - cylinder pulls the external piston rod to retract inward in the guide sleeve.

[0029] The present invention has the following beneficial effects compared with the prior art:

[0030] The single-channel dual-vent pneumatic reciprocating motion mechanism provided by the present invention includes a seat body, a micro cylinder, an external piston rod, a guide sleeve, and a gas generating device. The seat body is provided with a connecting rod connected to the first air pipe, and an air flow channel communicating with the first air pipe is opened in the connecting rod. The micro cylinder is installed on the seat body, and the air inlet of the micro cylinder is communicated with the air flow channel, that is, the air inlet of the micro cylinder is communicated with the first air pipe. Moreover, the telescopic rod of the micro cylinder extends out of the seat body and is detachably and fixedly connected to the external piston rod. When the telescopic rod of the micro cylinder expands and contracts, it drives the external piston rod to expand and contract, thereby outputting a small amount of reciprocating motion to meet the power required in the chip manufacturing process. The guide sleeve is detachably and fixedly connected to the seat body and sleeved outside the external piston rod to guide the telescopic motion of the external piston rod. The micro cylinder is small in volume and low in cost, making the entire motion mechanism smaller in volume and lower in cost while meeting the requirements of chip manufacturing. The above gas generating device can generate positive-pressure gas and negative-pressure gas. The first air pipe is communicated with the gas generating device, and the positive-pressure gas and negative-pressure gas generated by the gas generating device are both transported to the cylinder through the first air pipe. When the first air pipe inputs positive-pressure gas into the cylinder, the telescopic rod of the cylinder drives the external piston rod to extend. When the first air pipe inputs negative-pressure gas into the cylinder, the telescopic rod of the cylinder drives the external piston rod to retract. In this way, the reciprocating motion mechanism provided by the present invention only uses one air pipe (the first air pipe) to realize the input of positive-pressure gas and negative-pressure gas into the cylinder, thereby realizing the extension and retraction actions of the external piston rod. The structure is simpler, and the space occupied by one air pipe is smaller than that of two air pipes, and the cost is lower. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0032] Figure 1 is a schematic structural diagram of the single-channel dual-vent pneumatic reciprocating motion mechanism provided by the embodiment of the present invention;

[0033] Figure 2 is a schematic installation structure diagram of the pin in the embodiment of the present invention;

[0034] Figure 3 is a schematic connection structure diagram of the first air pipe and the connecting rod in the embodiment of the present invention;

[0035] Figure 4 is a schematic structural diagram of the turntable in the embodiment of the present invention.

[0036] In the figure:

[0037] 1 - Seat body; 2 - First air pipe; 3 - Connecting rod; 31 - Air flow channel; 4 - Micro cylinder; 5 - External piston rod; 6 - Guide sleeve; 61 - Guide groove; 7 - Gas generating device; 8 - Three - way valve; 9 - Second air pipe; 10 - Third air pipe; 11 - Pin; 12 - Rotary air joint; 121 - Central pipe; 122 - Turntable; 123 - Screw; 124 - Sealing gasket; 125 - Sealing bearing; 126 - Through hole. Detailed implementation mode

[0038] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other implementation manners obtained by those of ordinary skill in the art without making creative efforts fall within the scope protected by the present invention.

[0039] Embodiment 1:

[0040] The single - path double - ventilation pneumatic reciprocating motion mechanism provided by the present invention includes a seat body 1, a micro cylinder 4, an external piston rod 5, a guide sleeve 6 and a gas generating device 7, wherein:

[0041] The seat body 1 is a block - shaped structure. An integrally - formed connecting rod 3 is provided on the seat body 1. The connecting rod 3 is connected to the first air pipe 2, and an air flow channel 31 is opened inside the connecting rod 3. When the first air pipe 2 is connected to the connecting rod 3, the air flow channel 31 is communicated with the first air pipe 2. Optionally, the connecting rod 3 in this embodiment is a straight rod.

[0042] The micro cylinder 4 is installed on the seat body 1. Optionally, an installation groove is opened on the seat body 1. The outer shell of the micro cylinder 4 is connected to the installation groove through a first bolt, so as to achieve the purpose of detachably and fixedly installing the micro cylinder 4 on the seat body 1, which is convenient for disassembly and assembly. In this way, the micro cylinder 4 is actually embedded in the seat body 1, and the groove wall of the installation groove can protect the micro cylinder 4. Of course, the micro cylinder 4 can also be embedded in the installation groove by means of clamping. The installation groove is communicated with the air flow channel 31, and the air inlet of the micro cylinder 4 is communicated with the air flow channel 31, so that the air inlet of the micro cylinder 4 is communicated with the first air pipe 2. When the micro cylinder 4 is installed on the seat body 1, its telescopic rod is coaxial with the connecting rod 3, and the telescopic rod and the connecting rod 3 face opposite directions.

[0043] The telescopic rod of the micro cylinder 4 extends out of the seat body 1 and is detachably and fixedly connected to the external piston rod 5. Optionally, an external thread is provided at the free end of the telescopic rod of the micro cylinder 4, and a counterbore is provided on the end face of one end of the above-mentioned external piston rod 5, and an internal thread is provided on the inner wall of the counterbore. In this way, the above-mentioned counterbore is a threaded hole, the free end of the telescopic rod of the micro cylinder 4 is a stud, and the external thread and the internal thread are screwed together, that is, the stud is screwed into the threaded hole to realize the detachable and fixed connection between the telescopic rod of the micro cylinder 4 and the external piston rod 5.

[0044] The air inlet of the micro cylinder 4 is communicated with the first air pipe 2, and the first air pipe 2 is communicated with the above-mentioned gas generating device 7. In this way, the first air pipe 2 introduces the gas generated by the gas generating device 7 into the micro cylinder 4, and the telescopic rod of the micro cylinder 4 expands and contracts. When the telescopic rod expands and contracts, it drives the external piston rod 5 to expand and contract, thereby outputting a small amount of reciprocating motion to meet the power required in the chip manufacturing process. The micro cylinder 4 is small in volume and low in cost, so that the entire motion mechanism is smaller in volume and lower in cost while meeting the chip manufacturing requirements.

[0045] The guide sleeve 6 is detachably and fixedly connected to the seat body 1, and the guide sleeve 6 is sleeved outside the external piston rod 5, so as to guide the telescopic motion of the external piston rod 5, so that the reciprocating motion of the external piston rod 5 is more accurate. Optionally, a bolt hole is provided on the above-mentioned seat body 1, a threaded hole is provided on the guide sleeve 6, and the second bolt passes through the bolt hole and is screwed into the threaded hole, so as to realize the detachable and fixed connection between the guide sleeve 6 and the seat body 1. More preferably, the above-mentioned bolt hole is a counterbore, and when the second bolt is connected in the bolt hole, the nut of the second bolt sinks into the above-mentioned counterbore.

[0046] Optionally, a positioning mechanism is provided between the connecting piston rod and the guide sleeve 6. Specifically, the positioning mechanism is a pin 11. A through hole is provided in the middle of the above-mentioned connecting piston rod, and a guide groove 61 is provided on the inner wall of the inner hole of the guide sleeve 6. The above-mentioned pin 11 is pinned in the through hole and the pin 11 is slidably inserted into the guide groove 61. The above-mentioned guide groove 61 is along the axial direction of the above-mentioned guide sleeve 6. In this way, by the action of the pin 11, the external piston rod 5 can be prevented from rotating relative to the guide sleeve 6.

[0047] The above gas generating device 7 can generate positive pressure gas and negative pressure gas. The first air pipe 2 is connected to the gas generating device 7. Both the positive pressure gas and the negative pressure gas generated by the gas generating device 7 are transported to the cylinder through the first air pipe 2. When the first air pipe 2 inputs positive pressure gas into the micro cylinder 4, the telescopic rod of the micro cylinder 4 drives the external piston rod 5 to extend. When the first air pipe 2 inputs negative pressure gas into the micro cylinder 4, the telescopic rod of the micro cylinder 4 drives the external piston rod 5 to retract. In this way, the reciprocating motion mechanism provided by the present invention only uses one air pipe (the first air pipe 2) to input positive pressure gas and negative pressure gas into the micro cylinder 4, thereby realizing the extension and retraction actions of the external piston rod 5. The structure is simpler, and the space volume occupied by one air pipe is smaller than that of two air pipes, and the cost is lower.

[0048] Optionally, the gas generating device 7 in this embodiment is a vacuum generator, which includes an air inlet, an air outlet, and a vacuum port. Among them, the air outlet discharges positive pressure gas, and the vacuum port outputs negative pressure gas. The vacuum generator has the advantage of small volume, so that the single-channel double-vent pneumatic reciprocating motion mechanism provided by this embodiment has the advantage of small volume. The above first air pipe 2 is connected to an interface of a three-way valve 8. The three-way valve 8 has three interfaces. The interface connected to the above first air pipe 2 is defined as the first connection port, and the other two interfaces are respectively the second connection port and the third connection port. A second air pipe 9 and a third air pipe 10 are respectively connected to the second connection port and the third connection port. The second air pipe 9 is connected to the air outlet of the above vacuum generator, and the third air pipe 10 is connected to the vacuum port of the above vacuum generator. In this way, by connecting a first air pipe 2 to the micro cylinder 4, it is possible to input positive pressure gas and negative pressure gas into the micro cylinder 4.

[0049] An alternative implementation manner of this embodiment is as follows: The above first air pipe 2 is connected to the connecting rod 3 through a rotary air joint 12. With the rotation of the rotary air joint 12, the assembly composed of the connecting rod 3 (i.e., the seat body 1), the micro cylinder 4, the external piston rod 5, and the guide sleeve 6 can rotate relative to the first air pipe 2, further improving the use flexibility and practicality of the single-channel double-vent pneumatic reciprocating motion mechanism provided by this embodiment. It can be understood that the first air pipe 2 in this embodiment can also be connected to the connecting rod 3 through an ordinary air pipe joint.

[0050] As an alternative implementation of this embodiment: The above-mentioned rotary air joint 12 includes a central tube 121 and a turntable 122. The turntable 122 is rotatably sleeved outside the central tube 121 and the turntable 122 is located in the middle of the central tube 121. In this way, the turntable 122 can rotate relative to the central tube 121. The above-mentioned turntable 122 is detachably and fixedly connected to the end face of the above-mentioned connecting rod 3 through a connecting piece. One end of the above-mentioned central tube 121 is rotatably inserted into the above-mentioned air flow channel 31, and the first air tube 2 is connected to the other end of the central tube 121. Through the above structure, not only can the air flow channel 31 of the connecting rod 3 and the first air tube 2 be communicated, but also the connecting rod 3 can rotate relative to the first air tube 2. The structure is simple and reliable, and the cost is low.

[0051] Optionally, the connecting piece in this embodiment is a screw 123. A through hole 126 is provided on the above-mentioned turntable 122, and a screw hole is provided on the end face of the connecting rod 3. The screw 123 passes through the through hole 126 and is screwed into the screw hole, thereby firmly connecting the turntable 122 and the connecting rod 3 together and facilitating disassembly and assembly.

[0052] The number of the above-mentioned screws 123, the number of the above-mentioned through holes 126, and the number of the above-mentioned screw holes are all several. The several screws 123, the several through holes 126, and the several screw holes correspond to each other one by one. In this way, the turntable 122 can be more firmly connected to the connecting rod 3. Specifically, the number of the screws 123, the number of the through holes 126, and the number of the screw holes are all four. The four screws 123, the four through holes 126, and the four screw holes correspond to each other one by one, and the four screw holes are circumferentially arrayed around the central axis of the connecting rod 3.

[0053] More preferably, a sealing gasket 124 is pad-mounted between the end face of the above-mentioned connecting rod 3 and the turntable 122, so as to seal the connection position between the turntable 122 and the connecting rod 3 and avoid air leakage. It should be noted that the above-mentioned screw 123 passes through the above-mentioned sealing gasket 124.

[0054] More preferably, the above-mentioned turntable 122 is rotatably sleeved outside the central tube 121 through a sealing bearing 125, which can not only seal the gap between the turntable 122 and the central tube 121, but also enable the turntable 122 to rotate flexibly on the central tube 121.

[0055] Embodiment 2:

[0056] This embodiment provides a usage method of a single-channel double-vent pneumatic reciprocating motion mechanism. The single-channel double-vent pneumatic reciprocating motion mechanism is the single-channel double-vent pneumatic reciprocating motion mechanism provided in Embodiment 1. The method includes the following steps:

[0057] Step 1: Use the gas generating device 7 to generate positive pressure gas. The positive pressure gas is transported to the micro cylinder 4 through the first air pipe 2 and the air flow channel 31. The telescopic rod of the micro cylinder 4 pushes the external piston rod 5 to extend outward in the guide sleeve 6;

[0058] Step 2: Use the gas generating device 7 to generate negative pressure gas. The negative pressure gas is transported to the micro cylinder 4 through the first air pipe 2 and the air flow channel 31. The telescopic rod of the micro cylinder 4 pulls the external piston rod 5 to retract inward in the guide sleeve 6.

[0059] In this method, only one air pipe (the first air pipe 2) needs to be used to input positive pressure gas and negative pressure gas into the cylinder, so as to realize the extension and retraction of the external piston rod 5. The structure is simpler. Compared with two air pipes, the space volume occupied by one air pipe is smaller and the cost is lower.

[0060] As mentioned above, it is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope recorded in the present invention can easily think of changes or substitutions, which should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A single - path double - ventilation pneumatic reciprocating motion mechanism, characterized in that, it includes: A seat body, the seat body is provided with a connecting rod connected to the first air pipe, an air flow channel is opened in the connecting rod, and the air flow channel is communicated with the first air pipe; A micro - cylinder, installed on the seat body, the air inlet of the micro - cylinder is communicated with the air flow channel, and the telescopic rod of the micro - cylinder extends out of the seat body; An external piston rod, the external piston rod is detachably and fixedly connected to the telescopic rod; A guide sleeve, detachably and fixedly connected to the seat body, the guide sleeve is sleeved outside the external piston rod; A gas generating device capable of generating positive - pressure gas and negative - pressure gas, the positive - pressure gas outlet and the negative - pressure gas outlet of the gas generating device are connected to the first air pipe through a three - way valve.

2. The single - path double - ventilation pneumatic reciprocating motion mechanism according to claim 1, characterized in that: The gas generating device is a vacuum generator.

3. The single - path double - ventilation pneumatic reciprocating motion mechanism according to claim 2, characterized in that: It further includes a three - way valve, a second air pipe and a third air pipe. The three - way valve includes a first connection port, a second connection port and a third connection port. The vacuum generator includes an exhaust port and a vacuum port. The first air pipe is communicated with the first connection port, the second air pipe communicates the exhaust port and the second connection port, and the third air pipe communicates the vacuum port and the third connection port.

4. The single - path double - ventilation pneumatic reciprocating motion mechanism according to claim 1, characterized in that: The connecting rod is a straight rod, the telescopic rod is coaxial with the connecting rod, and the telescopic rod and the connecting rod face opposite directions.

5. The single - path double - ventilation pneumatic reciprocating motion mechanism according to claim 1, characterized in that: A through - hole is opened in the middle of the external piston rod, a guide groove is opened on the inner - hole wall of the guide sleeve, and a pin is further included. The pin is pinned in the through - hole and is slidably inserted into the guide groove.

6. The single - path double - ventilation pneumatic reciprocating motion mechanism according to any one of claims 1 - 5, characterized in that: An installation groove is opened on the seat body, and the outer shell of the micro - cylinder is connected in the installation groove through a first bolt.

7. The single - path double - ventilation pneumatic reciprocating motion mechanism according to any one of claims 1 - 5, characterized in that: The free end of the telescopic rod of the micro - cylinder is provided with an external thread, a counterbore is opened on one end face of the external piston rod, an internal thread is provided on the hole wall of the counterbore, and the external thread and the internal thread are screwed together.

8. The single - path double - ventilation pneumatic reciprocating motion mechanism according to any one of claims 1 - 5, characterized in that: A bolt hole is opened on the seat body, a threaded hole is opened on the guide sleeve, and a second bolt is further included. The second bolt passes through the bolt hole and is screwed into the threaded hole.

9. The single - path double - ventilation pneumatic reciprocating motion mechanism according to claim 8, characterized in that: The bolt hole is a counterbore.

10. The single - path double - ventilation pneumatic reciprocating motion mechanism according to any one of claims 1 - 5, It is characterized in that: The first air pipe is connected to the connecting rod through a rotary air joint.

11. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 10, It is characterized in that: The rotary air joint includes a central pipe and a turntable. The turntable is rotatably sleeved outside the central pipe and the turntable is located in the middle of the central pipe; One end of the central pipe is rotatably inserted into the air flow channel. The turntable is detachably and fixedly connected to the end face of the connecting rod through a connecting member. The first air pipe is connected to the other end of the central pipe.

12. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 11, It is characterized in that: The connecting member is a screw. A through hole is formed in the turntable, and a screw hole is formed in the end face of the connecting rod. The screw passes through the through hole and is screwed into the screw hole.

13. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 12, It is characterized in that: The number of the screws, the number of the through holes and the number of the screw holes are all several, and several screws correspond to several through holes and several screw holes one by one.

14. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 13, It is characterized in that: The number of the screws, the number of the through holes and the number of the screw holes are all four. The four screws correspond to the four through holes and the four screw holes one by one, and the four screw holes are circumferentially arranged in an array with the central axis of the connecting rod as the center.

15. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 11, It is characterized in that: The rotary air joint further includes a sealing gasket, and the sealing gasket is installed between the end face of the connecting rod and the turntable.

16. A single-channel double-vent pneumatic reciprocating motion mechanism according to claim 11, It is characterized in that: The rotary air joint further includes a sealed bearing, and the turntable is rotatably sleeved outside the central pipe through the sealed bearing.

17. A method for using the single-channel double-vent pneumatic reciprocating motion mechanism according to any one of claims 1-16, It is characterized in that, It includes the following steps: Using the gas generating device to generate positive pressure gas. The positive pressure gas is transported to the micro cylinder through the first air pipe and the air flow channel. The telescopic rod of the micro cylinder pushes the external piston rod to extend outward in the guide sleeve; Using the gas generating device to generate negative pressure gas. The negative pressure gas is transported to the micro cylinder through the first air pipe and the air flow channel. The telescopic rod of the micro cylinder pulls the external piston rod to retract inward in the guide sleeve.

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