The pre-stage pipeline component of the four-station processing module

Abstract

A pre-stage pipeline component for a four-station processing module (QSM) is provided. In some examples, the pre-stage pipeline component includes: four inlets, each inlet being connectable to a chamber port of a processing module of the QSM; and an outlet, which is directly or indirectly connectable to a vacuum source. A first pre-stage pipeline bifurcation is provided adjacent to the outlet of the pre-stage pipeline component. Two second bifurcations are each provided between the first pre-stage pipeline bifurcation and a corresponding pair of the inlets. The first pre-stage pipeline bifurcation and the second bifurcations divide the pre-stage pipeline component into three pipe segments. The respective diameters of the pre-stage pipelines in each pipe segment: gradually increase at the corresponding bifurcations in the gas flow direction from at least one of the inlets to the outlet of the pre-stage pipeline component, and are constant within the corresponding pipe segments of the pre-stage pipeline component.

Description

[0001] Priority Claim

[0002] This application claims priority to U.S. Provisional Patent Application No. 62 / 836,501, filed on April 19, 2019, the entire disclosure of which is incorporated herein by reference. Field of the Invention

[0003] The present disclosure relates to a foreline duct assembly and configuration, and more particularly to a foreline duct assembly configured for a four-station processing module (QSM) in semiconductor manufacturing applications. Background Art

[0004] Foreline duct assemblies are typically connected to a vacuum source below a processing chamber or module and evacuate exhaust gas from the chamber during wafer processing. Conventional configurations of foreline duct assemblies can make servicing the hardware below the chamber very difficult. The lower portions of some modules are extremely crowded, making it difficult to add new hardware. In particular, some of the hardware below the chamber is particularly difficult to service because of the pedestal lift direction specified by the foreline geometry and position.

[0005] The background description provided here is for the purpose of generally presenting the background of the disclosure. The work of the currently named inventors, to the extent it is described in this background art section, is neither expressly nor impliedly admitted to be prior art to the present disclosure in respect of any aspect of the disclosure that is not otherwise specified in this application and the claims at the time of filing. Summary of the Invention

[0006] The present disclosure generally relates to a foreline duct assembly for a four-station processing module (QSM). In some embodiments, the foreline duct assembly includes: four inlets, each inlet being connectable to a chamber port of a processing module of the QSM; an outlet that is directly or indirectly connectable to a vacuum source; a first foreline duct bifurcation disposed adjacent to the outlet of the foreline duct assembly; two second bifurcations, each second bifurcation being disposed between the first foreline duct bifurcation and a corresponding pair of the inlets; the first bifurcation and the second bifurcations dividing the foreline duct assembly into three duct segments: a first duct segment extending from the inlets to the two second bifurcations, a second duct segment extending from the two second bifurcations to the first bifurcation, and a third duct segment extending from the first bifurcation to the outlet of the foreline duct assembly; wherein the respective diameters of the foreline ducts in each duct segment: increase stepwise at the respective bifurcations in the direction of gas flow from at least one of the inlets to the outlet of the foreline duct assembly and are constant within the respective duct segments of the foreline duct assembly.

[0007] In some examples, the diameter of the pre-stage pipe in the first pipe section is in the range of 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches), the diameter of the pre-stage pipe in the second pipe section is in the range of 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches), and the diameter of the pre-stage pipe in the third pipe section is in the range of 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches). In some examples, the diameter of the pre-stage pipe in the first pipe section is 50.8 mm (about 2 inches), the diameter of the pre-stage pipe in the second pipe section is 76.2 mm (about 3 inches), and the diameter of the pre-stage pipe in the third pipe section is 101.6 mm (about 4 inches).

[0008] In some examples, the pre-stage pipe assembly further includes T-shaped connectors disposed at each of the second bifurcations. In some examples, the T-shaped connector includes a tapered section that tapers outwardly to transition the diameter of the pre-stage pipe in the first pipe section to the diameter of the pre-stage pipe in the second pipe section. In some examples, the separation distance between the T-shaped connector and the lower side of the QSM is configured to accommodate components between the T-shaped connector and the lower side of the QSM.

[0009] In some examples, the first pipe section of the pre-stage pipe assembly includes four pre-stage pipes, and each of the pre-stage pipes includes three substantially right-angled elbows spaced along the pre-stage pipe. In some examples, each elbow is disposed between a corresponding inlet and a corresponding second bifurcation. In some examples, the pre-stage pipes in the first pipe section are generally continuous and have no separable joints or couplings.

[0010] In some examples, the second pipe section of the pre-stage pipe assembly includes two pre-stage pipes, and each pre-stage pipe includes a substantially right-angled elbow disposed between the first bifurcation and the corresponding second bifurcation. In some examples, the pre-stage pipe assembly further includes separable couplings disposed at or toward the upper end of each right-angled elbow. In some examples, each coupling includes two opposing flanges. In some examples, when installed to the QSM, the opposing flanges are each in a horizontal plane.

[0011] In some examples, the third pipe section of the pre-stage pipe assembly includes an inflation chamber, and the inflation chamber is disposed at the first pre-stage pipe bifurcation.

[0012] In some examples, the foreline pipe assembly further includes a barrel piece, which includes one or more of a slow pump inlet, a tetraethyl orthosilicate or tetraethyl orthosilicate (TEOS) adapter, a gas box adapter, a precursor or other adapter, a Hastings gauge port, and a bellows. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Some embodiments are described by way of example and not limitation with reference to the accompanying drawings:

[0014] Figures 1-4 A schematic diagram of a substrate processing tool is shown, in which an exemplary foreline pipe assembly of the present disclosure can be configured.

[0015] Figure 5 A schematic diagram of an exemplary substrate processing tool including a four-station processing module is shown, in which an exemplary foreline pipe assembly of the present disclosure can be configured.

[0016] Figures 6-8 An exemplary configuration of a foreline pipe assembly and related components installed to a QSM according to an exemplary embodiment is shown.

[0017] Figures 9-10 A perspective view of a foreline pipe assembly (not installed to a QSM for clarity) according to an exemplary embodiment is shown.

[0018] Figure 11 A perspective view of a barrel piece according to an exemplary embodiment is shown.

[0019] Figure 12 A flowchart showing operations in a method according to an exemplary embodiment is shown. DETAILED DESCRIPTION

[0020] The following description includes systems, methods, techniques, instruction sequences, and computer program products embodying illustrative embodiments of the present disclosure. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the exemplary embodiments. However, it will be apparent to one of ordinary skill in the art that the present disclosure may be practiced without these specific details.

[0021] Portions of the disclosure of this patent document may contain material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or patent disclosure as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyrights. The following notice applies to any data in the following and in the drawings forming a part of this document: Copyright © 2019 - 2020 by Lam Research Corporation. All rights reserved.

[0022] A substrate processing system can be used to perform deposition, etching, and / or other processing of substrates such as semiconductor wafers. During processing, the substrate is placed on a substrate support in a processing chamber of the substrate processing system. During etching or deposition, a gas mixture including one or more etching gases or gas precursors is introduced into the processing chamber, and a plasma can be excited to activate chemical reactions.

[0023] The substrate processing system can include a plurality of substrate processing tools disposed in a manufacturing chamber. Each of these substrate processing tools can include a plurality of processing modules. Generally, a substrate processing tool includes up to six processing modules.

[0024] Now referring to Figure 1 , a top view of an exemplary substrate processing tool 100 is shown. The substrate processing tool 100 includes a plurality of processing modules 104. In some examples, each of the processing modules 104 can be configured to perform one or more corresponding processes on a substrate. The substrate to be processed is loaded into the substrate processing tool 100 through a port of a load station of an equipment front end module (EFEM) 108 and then transferred to one or more of the processing modules 104. For example, the substrate can be loaded into each of the processing modules 104 in sequence. Now referring to Figure 2 , an exemplary configuration 200 of a manufacturing chamber 204 including a plurality of substrate processing tools 208 is shown.

[0025] Figure 3 A first exemplary configuration 300 including a first substrate processing tool 304 and a second substrate processing tool 308 is shown. The first substrate processing tool 304 and the second substrate processing tool 308 are arranged in sequence and connected by a transfer stage 312, which is under vacuum. As shown, the transfer stage 312 includes a pivot transfer mechanism configured to transfer substrates between a vacuum transfer module (VTM) 316 of the first substrate processing tool 304 and a vacuum transfer module (VTM) 320 of the second substrate processing module 308. However, in other examples, the transfer stage 312 can include other suitable transfer mechanisms, such as a linear transfer mechanism. In some examples, a first robotic arm (not shown) of the VTM 316 can place the substrate on a support 324 disposed at a first position, the support 324 pivots to a second position, and a second robotic arm (not shown) of the VTM 320 picks up the substrate from the support 324 at the second position. In some examples, the second substrate processing tool 308 can include a storage buffer 328 configured to store one or more substrates between processing stages.

[0026] The transfer mechanism can also be stacked to provide two or more transfer systems between substrate processing tools 308 and 304. The transfer stage 312 can also have multiple slots to transfer or buffer multiple substrates at once.

[0027] In configuration 300, the first substrate processing tool 304 and the second substrate processing tool 308 are configured to share a single equipment front end module (EFEM) 332.

[0028] Figure 4 A second exemplary configuration 400 is shown that includes a first substrate processing tool 404 and a second substrate processing tool 408, which are configured in sequence and connected by a transfer stage 412. Configuration 400 is similar to Figure 3 configuration 300, except that EFEM 332 is removed in configuration 400. Thus, substrates can be directly loaded into the first substrate processing tool 404 via an air lock load station 416 (e.g., using a storage or transfer carrier such as a front-opening unified pod (FOUP), an atmospheric (ATM) robot, etc. or other suitable mechanisms).

[0029] The pre-pump line assembly of the present disclosure can be arranged in a four-station processing module (QSM). In some examples, as Figure 5 shown, a four-station processing module is provided. The substrate processing tool 500 includes four processing modules (or processing chambers) 508 disposed at each corner station in the substrate processing tool 500. Other configurations of the processing module 508 are possible. The substrate processing tool 500 includes transfer robots 502 and 504, collectively referred to as transfer robot 502 / 504. The processing tool 500 does not show a mechanical indexer for illustrative purposes. In other examples, each processing module 508 of the tool 500 can include a mechanical indexer.

[0030] The VTM 516 and the EFEM 510 can each include one of the transfer robots 502 / 504. The transfer robot 502 / 504 can have the same or different configurations. In some examples, the transfer robot 502 is shown as having two arms, each arm having two vertically stacked end effectors. The robot 502 of the VTM 516 selectively transfers substrates to and from the EFEM 510 and between the processing modules 508. The robot 504 of the EFEM 510 transfers substrates in and out of the EFEM 510. In some examples, the robot 504 can have two arms, each arm having a single end effector or two vertically stacked end effectors. The system controller 506 can control various operations of the illustrated substrate processing tool 500 and its components, including but not limited to the operations of the robots 502 / 504, and the rotation of the respective indexers of the processing modules 508, etc.

[0031] For example, the tool 500 is configured to dock with each of the four processing modules 508. Each processing module 508 may have a single load station that can be accessed via respective slots 512. In this example, the side 514 of the VTM 516 is not angled (i.e., the side 514 is substantially straight or flat). Other configurations are possible. In the illustrated manner, two of the processing modules 508 (each having a single load station) are coupled to each of the sides 514 of the VTM 516. Thus, the EFEM 510 can be at least partially configured between two of the processing modules 508.

[0032] During substrate processing in the processing module 508, processing gas enters the module to, for example, assist in generating a plasma. The gas then exits the processing module 508. The exhaust of the waste gas can be performed through a vacuum or evacuation duct (also referred to as a foreline duct in this specification). One or more foreline ducts in the foreline duct assembly can be located below each processing module 508 and connected to a vacuum source to evacuate gas from the processing module 508.

[0033] Figures 6-8 An exemplary configuration of the foreline duct assembly 606 and associated components mounted below the QSM 600 is generally shown. The exemplary QSM 600 is illustrated in Figure 6 . Some parts of the QSM 600 are omitted for clarity. The QSM 600 includes four processing modules (or processing chambers, or processing stations) 608 arranged in a generally square configuration at respective corner stations of the QSM 600. Other configurations of the processing modules 608 are possible. Each processing module 608 in the QSM 600 includes a wafer support 610 that supports a substrate or wafer during processing. In some examples, the wafer support 610 includes a pedestal or chuck. Other types of wafer supports or components can be used to support the wafer in the processing module 608 to perform different types of processing thereon.

[0034] Each processing module 608 includes a corresponding lift pin actuator assembly 612 that can move the lift pins upward and unload the wafer during wafer transfer. The lift pin actuator assembly 612 can include an eDSC. In some examples, the eDSC is a component that is generally positioned outside the processing chamber and below each processing module 608 and interacts with the wafer support 610 and its support mechanism.

[0035] The substrate processing tool 600 includes a mandrel 602 that can transfer a wafer from one wafer support 610 to another wafer support 610. The mandrel 602 can be by Figure 7is driven by a mandrel motor 704 that is more clearly visible in. For clarity, the transfer plate is not shown in the figure, and the mandrel 602 can act on the transfer plate. The transfer plate can rotate during the wafer transfer stage, and the wafer movement during this stage can be coordinated with the wafer movement imparted by other wafer transfer mechanisms (such as Figure 5 transfer manipulators 502 / 504).

[0036] The pipe section of the foreline pipe assembly 606 is visible below the QSM 600 in Figure 6 . This pipe section is the "third pipe section" of the foreline pipe assembly and is described in more detail below. The foreline pipe assembly 606 includes a lower outlet 616 of a combined control valve 614 that can be directly or indirectly connected to a vacuum source 604 and other downstream components. During wafer processing, the foreline pipe assembly 606 exhausts waste gas from each of the processing modules 608 (processing chambers) and the QSM as a whole during wafer or substrate processing.

[0037] Figure 7 is a schematic view of the underside of the QSM 600 and associated components. A bottom view of the foreline pipe assembly 606 and the lift pin actuator assembly 612 is visible. The RF filter box 611 is attached to each lift pin actuator assembly 612. As described in more detail below, each (upper) inlet 712 of the foreline pipe assembly 606 is connected to a corresponding processing module (chamber) 608 at a corresponding chamber port.

[0038] It can be noted that the configuration of the foreline pipe assembly 606 shown maintains the space for positioning the lift pin actuator assembly 612 relative to the axis of the mandrel 602 (or the mandrel motor 704), that is, the lift pin actuator assembly 612 follows an imaginary concentric ring around the mandrel 60 in the same direction. The (lower) outlet 616 of the foreline pipe assembly 606 can be directly or indirectly connected to the vacuum source 604 and the control valve 614. As shown, the QSM 600 can include various components as well as supply pipes 702, connectors 706, control lines 708, and other modules 710 to supply the QSM 600. Other component and QSM configurations are possible.

[0039] Figure 8 Shows a further view of an exemplary foreline pipe assembly 606 assembled on the underside of the QSM 600. The foreline pipe assembly 606, the mandrel motor 704, and the lift pin actuator assembly 612 are again visible in the view. It can be noted that the configuration of the foreline pipe assembly 606 shown provides a large amount of clearance around the mandrel motor 704 and other processing support components located below the QSM 600. This clearance and the consistent orientation of the lift pin actuator assembly 612 discussed above enable uniformity of replacement parts during maintenance of the QSM 600 or between wafer processing cycles and facilitate operator access to the QSM 600.

[0040] Figures 9-10 Shows a view of the pre-stage pipe assembly 606 not assembled to the QSM. The shown pre-stage pipe assembly 606 includes four inlets 712, which in this example include chamber ports. Other inlet numbers or configurations are possible, depending on the processing requirements. For example, a 2-inch inlet 712 may include a 4-inch chamber port to facilitate the assembly of the pre-stage pipe assembly 606 without modification to an existing port in the in-situ processing module (chamber) 608. The outlet 616 of the pre-stage pipe assembly 606 may be directly or indirectly connected to a vacuum source at 604. The vacuum pressure and exhaust gas flow through the pre-stage pipe assembly 606 can be regulated by a control valve such as a combined control valve 614.

[0041] In some examples, the pre-stage pipe of the pre-stage pipe assembly 606 includes three bifurcations. For example, the first or main bifurcation 902 is disposed adjacent to the outlet 616. At the first bifurcation 902, a relatively large-diameter pipe section joins two relatively smaller pipe sections 908, as shown in the example of Figure 9 As shown. The respective diameters of the two pre-stage pipes 908 (now bifurcated) close to the processing module 608 can be almost the same, as shown in the view of the example. In some examples, the respective pipe diameters can be different, depending on the processing flow or pressure requirements. The first bifurcation 902 may include an inflation chamber 922 to equalize the vacuum pressure to more evenly distribute into the bifurcated pre-stage pipes 908. From an alternative perspective of the exhaust gas flow direction from the processing module 608 outward and downward, the two pre-stage pipes 908 upstream of the first bifurcation 902 merge into one pipe, and the exhaust gas forms a single gas stream.

[0042] As shown in the figure, two second bifurcations 904 of the pre-stage pipe assembly are disposed between the first bifurcation 902 and the corresponding pairs of inlets 712. In the Figure 9 View, only one of the two second bifurcations 904 is fully visible. In some examples, the first bifurcation 902 and the second bifurcations 904 divide the pre-stage pipe of the pre-stage pipe assembly 606 into multiple pipe sections: a first pipe section 906 extending from the inlet 712 to the two second bifurcations 904, a second pipe section 908 extending from the second bifurcations 904 to the first bifurcation 902, and a third pipe section 910 extending from the first bifurcation 902 to the outlet 616 of the pre-stage pipe assembly 606.

[0043] The diameter of the pre-stage duct in the first duct segment 906 can range from 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches). The diameter of the pre-stage duct in the second duct segment 908 can range from 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches). The diameter of the pre-stage duct in the third duct segment 910 can range from 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches). In the example shown, the pre-stage duct assembly 606 of 2-3-4 is shown, indicating that the pre-stage duct assembly 606 uses a 2-inch duct in the first duct segment 906, a 3-inch duct in the second duct segment 908, and a 4-inch duct in the third duct segment 910. Other duct configurations are possible. In some examples, the diameters of the ducts in each of the duct segments 906, 908, and 910 between the inlet 712 or connectors are generally substantially the same.

[0044] In some examples, a T-shaped connector 912 is provided at each of the second bifurcations 904. As shown, the exemplary T-shaped connector 912 can include two outwardly tapering conical sections that transition the diameter of a 3-inch pre-stage duct to a 2-inch pre-stage duct (or vice versa in the direction of the exhaust gas flow). In some examples, the position or separation distance between the T-shaped connector 912 and the lower side of the QSM 600 can be selected to accommodate other components, such as the lift pin actuator assembly 612, the RF filter box 611, the mandrel motor 704, the mDSC motor, or the eDSC motor.

[0045] In the first duct segment 906, the pre-stage duct assembly 606 includes four pre-stage ducts, which each include three substantially right-angled elbows 914 spaced along the pre-stage duct. These elbows are provided between each inlet 712 and the corresponding second bifurcation 904. In some examples, the pre-stage ducts in the first duct segment 906 are generally continuous and do not have separable joints or unions. Other configurations are possible.

[0046] In the second pipe section 908, the pre-stage pipe assembly 606 includes two pre-stage pipes, each of which correspondingly includes a substantially right-angled elbow 916 disposed between the first bifurcation 902 and the second bifurcation 904. In some examples, separable pipe sleeves 918 are disposed at or toward the upper ends of the elbows 916. As shown, each pipe sleeve 918 may include two opposing flanges 920 that can be bolted together to join each elbow 916 to the outlet port of the T-shaped connector 912. The flanges 920 are located in a horizontal plane, and their positioning above the elbows 916 creates symmetry for the two halves of the second pipe section 908 in terms of avoiding different "right" or "left" components in the second pipe section 908. Since the nuts or bolts passing vertically through the flanges 920 to secure the pipe sleeves can be disassembled and assembled directly below the QSM 600, the horizontal orientation of the flanges 920 also enables an operator to easily disassemble and assemble these nuts or bolts without the need for lateral space for such disassembly and assembly. This horizontal orientation of the pipe sleeves 918 and the flanges 920 further aids the operator in maintaining the QSM 600, along with the improved clearance around the mandrel motor 704 described above.

[0047] The third pipe section 910 of the pre-stage pipe assembly 606 may include the inflation chamber 922 mentioned above, as well as a relatively short length of large-diameter pre-stage pipe extending from the inflation chamber 922 to the outlet 616 of the pre-stage pipe assembly 606.

[0048] Referring Figure 11 , in some examples, the pre-stage pipe assembly 606 includes or is connectable to a barrel fitting 1104. The barrel fitting 1104 may be interposed between the vacuum source 604 and the outlet 616 of the pre-stage pipe assembly 606. For convenience, the exemplary barrel fitting 1104 may include an indicator 1102 pointing in the direction of the vacuum source 604. In some examples, the barrel fitting 1104 includes a roughing pump inlet 1106, a TEOS adapter 1108, and a gas box adapter 1110. In some examples, the barrel fitting 1104 includes a precursor or other adapter 1112, a Hastings gauge port 1114, and a bellows 1116 to facilitate maintainability and easy adjustment of the barrel fitting 1104 by the operator.

[0049] Some embodiments include methods. Referring Figure 12, a method 1200 for fabricating a pre-stage pipe assembly for QSM includes: at operation 1202, setting four inlets for the pre-stage pipe assembly, each inlet being connectable to a chamber port of a processing module of the QSM; at operation 1204, setting an outlet for the pre-stage pipe assembly, the outlet being directly or indirectly connectable to a vacuum source; at operation 1206, setting a first pre-stage pipe bifurcation for the pre-stage pipe assembly, the first pre-stage pipe bifurcation being disposed adjacent to the outlet of the pre-stage pipe assembly; at operation 1208, setting two second bifurcations for the pre-stage pipe assembly, each second bifurcation being disposed between the first pre-stage pipe bifurcation and a corresponding pair of inlets; wherein at 1210, the first bifurcation and the second bifurcations divide the pre-stage pipe assembly into three pipe segments, a first pipe segment extending from the inlets to the two second bifurcations, a second pipe segment extending from the two second bifurcations to the first bifurcation, and a third pipe segment extending from the first bifurcation to the outlet of the pre-stage pipe assembly, and wherein at 1212, the respective diameters of the pre-stage pipes in each pipe segment gradually increase at the corresponding bifurcations in the gas flow direction from at least one of these inlets to the outlet of the pre-stage pipe assembly and are constant within the respective pipe segments of the pre-stage pipe assembly.

[0050] In some examples, method 1200 further includes setting a pre-stage pipe in the first pipe segment having a diameter in the range of 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches), setting a pre-stage pipe in the second pipe segment having a diameter in the range of 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches), and setting a pre-stage pipe in the third pipe segment having a diameter in the range of 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches).

[0051] In some examples, method 1200 further includes setting a pre-stage pipe with a diameter of 50.8 mm (about 2 inches) in the first pipe segment, setting a pre-stage pipe with a diameter of 76.2 mm (about 3 inches) in the second pipe segment, and setting a pre-stage pipe with a diameter of 101.6 mm (about 4 inches) in the third pipe segment.

[0052] In some examples, method 1200 further includes setting a T-shaped connector at each of the second bifurcations.

[0053] In some examples, method 1200 further includes including at least one outwardly tapering section in the T-shaped connector, the tapering section transitioning the diameter of the pre-stage pipe in the first pipe segment to the diameter of the pre-stage pipe in the second pipe segment.

[0054] While examples have been illustrated with reference to specific exemplary embodiments or methods, it will be apparent that many modifications and changes can be made to these embodiments without departing from the broader scope of the embodiments. Accordingly, the specification and drawings are to be regarded as illustrative and not restrictive. The figures forming a part hereof show specific embodiments of the subject matter that can be practiced in an illustrative, but not a restrictive, manner. The illustrated embodiments are described in sufficient detail to enable those skilled in the art to practice the teachings disclosed herein. Other embodiments can be utilized and derived therefrom, such that structural and logical substitutions and changes can be made without departing from the scope of the disclosure. Thus, this implementation should not be regarded as restrictive, and the scope of various embodiments is defined only by the appended claims and equivalents of the full scope given to those claims.

[0055] Here, such embodiments of the inventive subject matter can be referred to individually or collectively by the term "invention" solely for convenience, and if in fact more than one invention or inventive concept is disclosed, there is no intention to actively limit the scope of this application to any single invention or inventive concept. Accordingly, while specific embodiments have been shown and described herein, it should be understood that any configuration calculated to achieve the same purpose can be substituted for the specific embodiments shown. The disclosure is intended to cover any and all modifications or variations of various embodiments. Combinations of the above embodiments as well as other embodiments not specifically described herein will be apparent to those skilled in the art upon reading the above description.

Claims

1. A pre-stage pipeline assembly for a four-station processing module, the pre-stage pipeline assembly comprising: Four inlets, each inlet being connectable to a chamber port of a processing module of the four-station processing module; An outlet, which is directly or indirectly connectable to a vacuum source; A first bifurcation, which is disposed adjacent to the outlet of the pre-stage pipeline assembly; Two second bifurcations, each second bifurcation being disposed between the first bifurcation and a corresponding pair of the inlets; The first bifurcation and the second bifurcations divide the pre-stage pipeline assembly into three pipe segments: a first pipe segment, which extends from the inlets to the two second bifurcations, a second pipe segment, which extends from the two second bifurcations to the first bifurcation, and a third pipe segment, which extends from the first bifurcation to the outlet of the pre-stage pipeline assembly; Wherein the respective diameters of the pre-stage pipelines in each pipe segment: Gradually increase at corresponding bifurcations in the gas flow direction from at least one of the inlets to the outlet of the pre-stage pipeline assembly, and Remain unchanged within the respective pipe segments of the pre-stage pipeline assembly; Wherein the first pipe segment of the pre-stage pipeline assembly comprises four pre-stage pipelines, each of which comprises three substantially right-angled elbows spaced along the pre-stage pipeline.

2. The pre-stage pipeline assembly according to claim 1, wherein the diameter of the pre-stage pipelines in the first pipe segment is in the range of 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches), the diameter of the pre-stage pipelines in the second pipe segment is in the range of 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches), and the diameter of the pre-stage pipelines in the third pipe segment is in the range of 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches).

3. The pre-stage pipeline assembly according to claim 2, wherein the diameter of the pre-stage pipelines in the first pipe segment is 50.8 mm (about 2 inches), the diameter of the pre-stage pipelines in the second pipe segment is 76.2 mm (about 3 inches), and the diameter of the pre-stage pipelines in the third pipe segment is 101.6 mm (about 4 inches).

4. The pre-stage pipeline assembly according to claim 1, further comprising a T-shaped connector disposed at each of the second bifurcations.

5. The pre-stage pipeline assembly according to claim 4, wherein the T-shaped connector comprises a tapered section that tapers outwardly, the tapered section transitioning the diameter of the pre-stage pipelines in the first pipe segment to the diameter of the pre-stage pipelines in the second pipe segment.

6. The pre-stage pipeline assembly according to claim 4, wherein the separation distance between the T-shaped connector and the lower side of the four-station processing module is configured to accommodate components between the T-shaped connector and the lower side of the four-station processing module.

7. The pre-stage pipeline assembly according to claim 1, wherein each elbow is disposed between a corresponding inlet and a corresponding second bifurcation.

8. The pre-stage pipeline assembly according to claim 1, wherein the pre-stage pipelines in the first pipe segment are generally continuous and have no separable joints or couplings.

9. The pre-stage pipe assembly according to claim 1, wherein the third pipe section of the pre-stage pipe assembly includes an inflation chamber, and the inflation chamber is disposed at the first bifurcation.

10. The pre-stage pipe assembly according to claim 1, further comprising a barrel pipe fitting, the barrel pipe fitting including one or more of a slow pump inlet, a tetraethyl orthosilicate or tetraethyl orthosilicate (TEOS) adapter, a gas box adapter, a precursor adapter, a Hastings gauge port, and a bellows.

11. A pre-stage pipe assembly for a four-station processing module, the pre-stage pipe assembly comprising: Four inlets, each inlet being connectable to a chamber port of a processing module of the four-station processing module; An outlet that can be directly or indirectly connected to a vacuum source; A first bifurcation disposed adjacent to the outlet of the pre-stage pipe assembly; Two second bifurcations, each second bifurcation being disposed between the first bifurcation and a corresponding pair of the inlets; The first bifurcation and the second bifurcations divide the pre-stage pipe assembly into three pipe sections: a first pipe section extending from the inlet to the two second bifurcations, a second pipe section extending from the two second bifurcations to the first bifurcation, and a third pipe section extending from the first bifurcation to the outlet of the pre-stage pipe assembly; Wherein the respective diameters of the pre-stage pipes in each pipe section: Gradually increase at the corresponding bifurcations in the gas flow direction from at least one of the inlets to the outlet of the pre-stage pipe assembly, and Remain unchanged within the respective pipe sections of the pre-stage pipe assembly; Wherein the second pipe section of the pre-stage pipe assembly includes two pre-stage pipes, each pre-stage pipe including an elbow substantially at a right angle disposed between the first bifurcation and the corresponding second bifurcation.

12. The pre-stage pipe assembly according to claim 11, further comprising a separable pipe sleeve section disposed at or towards the upper end of each elbow at a right angle.

13. The pre-stage pipe assembly according to claim 12, wherein each pipe sleeve section includes two opposing flanges.

14. The pre-stage pipe assembly according to claim 13, wherein when installed to the four-station processing module, the opposing flanges are each located in a horizontal plane.

15. The pre-stage pipe assembly according to claim 11, wherein the third pipe section of the pre-stage pipe assembly includes an inflation chamber, and the inflation chamber is disposed at the first bifurcation.

16. The pre-stage pipe assembly according to claim 11, further comprising a barrel pipe fitting, the barrel pipe fitting including one or more of a slow pump inlet, a tetraethyl orthosilicate or tetraethyl orthosilicate (TEOS) adapter, a gas box adapter, a precursor adapter, a Hastings gauge port, and a bellows.

17. The pre-stage pipeline assembly according to claim 16, further comprising setting the diameter of the pre-stage pipeline in the first pipe segment within the range of 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches), setting the diameter of the pre-stage pipeline in the second pipe segment within the range of 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches), and setting the diameter of the pre-stage pipeline in the third pipe segment within the range of 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches).

18. The pre-stage pipeline assembly according to claim 17, further comprising setting the diameter of the pre-stage pipeline in the first pipe segment to 50.8 mm (about 2 inches), setting the diameter of the pre-stage pipeline in the second pipe segment to 76.2 mm (about 3 inches), and setting the diameter of the pre-stage pipeline in the third pipe segment to 101.6 mm (about 4 inches).

19. The pre-stage pipeline assembly according to claim 11, further comprising T-shaped connectors provided at each of the second bifurcations.

20. The pre-stage pipeline assembly according to claim 19, wherein the T-shaped connector includes a tapered section that tapers outwardly, and the tapered section transitions the diameter of the pre-stage pipeline in the first pipe segment to the diameter of the pre-stage pipeline in the second pipe segment.

21. The pre-stage pipeline assembly according to claim 19, wherein the separation distance between the T-shaped connector and the lower side of the four-station processing module is configured to accommodate components between the T-shaped connector and the lower side of the four-station processing module.

22. A method of manufacturing a pre-stage pipeline assembly for a four-station processing module, the method comprising: providing four inlets for the pre-stage pipeline assembly, each inlet being connectable to a chamber port of the processing module of the four-station processing module; providing an outlet for the pre-stage pipeline assembly, the outlet being directly or indirectly connectable to a vacuum source; providing a first bifurcation for the pre-stage pipeline assembly, the first bifurcation being provided adjacent to the outlet of the pre-stage pipeline assembly; providing two second bifurcations for the pre-stage pipeline assembly, each second bifurcation being provided between the first bifurcation and a corresponding pair of the inlets, the first bifurcation and the second bifurcations dividing the pre-stage pipeline assembly into three pipe segments: a first pipe segment extending from the inlet to the two second bifurcations, a second pipe segment extending from the two second bifurcations to the first bifurcation, and a third pipe segment extending from the first bifurcation to the outlet of the pre-stage pipeline assembly; wherein the respective diameters of the pre-stage pipelines in the respective pipe segments: gradually increase at the respective bifurcations in the gas flow direction from at least one of the inlets to the outlet of the pre-stage pipeline assembly, and remain constant within the respective pipe segments of the pre-stage pipeline assembly; wherein the first pipe segment includes at least two horizontal pipe segments.

23. The method according to claim 22 further comprises setting the diameter of the pre-stage pipeline in the first pipe section within the range of 38.1 mm (about 1.5 inches) to 63.5 mm (about 2.5 inches), setting the diameter of the pre-stage pipeline in the second pipe section within the range of 63.5 mm (about 2.5 inches) to 88.9 mm (about 3.5 inches), and setting the diameter of the pre-stage pipeline in the third pipe section within the range of 88.9 mm (about 3.5 inches) to 114.3 mm (about 4.5 inches).

24. The method according to claim 23 further comprises setting the diameter of the pre-stage pipeline in the first pipe section to 50.8 mm (about 2 inches), setting the diameter of the pre-stage pipeline in the second pipe section to 76.2 mm (about 3 inches), and setting the diameter of the pre-stage pipeline in the third pipe section to 101.6 mm (about 4 inches).

25. The method according to claim 22 further comprises T-shaped connectors provided at each of the second bifurcations.

26. The method according to claim 25 further comprises: wherein the T-shaped connector includes at least one outwardly constricting tapered section that transitions the diameter of the pre-stage pipeline in the first pipe section to the diameter of the pre-stage pipeline in the second pipe section.

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