Chamber Cooling Unit of Heat Treatment Furnace

Abstract

The present invention discloses a chamber cooling unit of a heat treatment furnace. The chamber cooling unit of the heat treatment furnace of the present invention includes: a heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, and a heating element composed of heaters is installed in the chamber, so as to heat or dry the substrate by using the heat of the heaters; a cooling air flow passage formed along the inner and outer boxes of the chamber; and at least one cooling jacket located in the vertical direction on the outer side of the chamber, so as to form a cooling air flow in the cooling air flow passage formed inside the chamber.

Description

Technical Field

[0001] The present invention relates to a chamber cooling unit of a heat treatment furnace that effectively cools a heat treatment furnace chamber. Background Art

[0002] Organic light emitting display devices, LCD glass substrates, etc. are used in various image devices such as image screens, TVs, mobile phones, monitors, etc. Organic light emitting display devices, LCD glass substrates, etc. are being used in various fields as one of the next-generation displays. Recently, in order to improve performance and yield, the development of flat panel display manufacturing technology in this field is continuously underway.

[0003] In the process of manufacturing an organic light emitting display device or an LCD glass substrate (hereinafter referred to as 'the substrate' or 'the glass substrate'), which is a typical flat panel display, temperature control and temperature uniformity are essential to ensure high-quality substrate quality and yield.

[0004] For example, in the manufacturing process of an organic light emitting display device, since an organic layer is formed on the substrate surface, it may contain a certain amount of moisture. Therefore, a drying process for evaporating the moisture is required.

[0005] In the LCD glass substrate manufacturing process, a cleaning process is performed before coating a photosensitive film on the substrate surface, and a heating and drying process for removing moisture is performed after the cleaning process.

[0006] In addition, an exposure and development process is performed after coating the photosensitive film on the LCD glass substrate. A pre-baking and a post-baking process are sequentially performed before and after the exposure and development process.

[0007] Thus, most of the substrate manufacturing processes perform heating and drying processes to manufacture the substrate. The moisture generated in the substrate manufacturing process can be removed by heating and drying through ultraviolet rays or by placing it in a chamber of a heat treatment furnace including a heating element such as a sheath heater.

[0008] A heat treatment furnace for a substrate related thereto has been proposed in Korean Patent Publication No. 10-2094763.

[0009] However, although the existing heat treatment furnace removes the moisture remaining on the substrate by using a heater system in the chamber, it is difficult to effectively control the high temperature of the chamber. Therefore, the improvement of the product quality in batch production is limited, and it cannot fully meet the high-performance process capabilities.

[0010] In addition, in order to improve the production efficiency of products by shortening the process time, the existing heat treatment furnace has limitations in terms of rapidly reducing the temperature while structurally satisfying the durability of the chamber during chamber cooling.

[0011] Therefore, there is a current need for a heat treatment furnace with improved performance that meets the user requirements for performance upgrades, including changes in the heat treatment process trends for flat panel display substrates.

[0012]

Prior Art Documents

[0013]

Patent Documents

[0014] Patent Document 1. Korean Patent Publication No. 10-2094763 (Publication Date: March 31, 2020) Summary of the Invention

[0015]

Technical Problem

[0016] One technical problem to be solved by the present invention is to provide a heat treatment furnace that meets the heat treatment process performance of the substrate.

[0017] One technical problem to be solved by the present invention is to provide a heat treatment furnace that shortens the heat treatment process time of the heat-treated substrate and can structurally strengthen the durability of the chamber.

[0018]

Technical Solution

[0019] According to the present invention, the object can be achieved by a chamber cooling unit of a heat treatment furnace, and the cooling unit includes: a heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, and a heating element composed of heaters is installed in the chamber to heat or dry the substrate using the heat of the heaters; a cooling air flow channel formed along the inner and outer boxes of the chamber; and at least one cooling jacket located in a vertical direction on the outer side of the chamber to form a cooling air flow in the cooling air flow channel formed inside the chamber.

[0020] According to an embodiment of the present invention, the cooling air flow channel formed along the inner and outer boxes of the chamber may include a cooling water pipe.

[0021] According to an embodiment of the present invention, the cooling air flow channel includes: a first channel portion formed between the outer box of the chamber and the inner box spaced apart therefrom; and a second channel portion that introduces the cooling air flow formed by the cooling jacket into the first channel portion and discharges the fluid discharged from the first channel portion.

[0022] According to an embodiment of the present invention, the first channel portion and the second channel portion may be formed as an integral type or an independent type.

[0023] According to an embodiment of the present invention, the first channel portion may be formed in the upper and lower portions of the outer box of the chamber and the inner box spaced apart therefrom in a horizontal direction, respectively.

[0024] According to an embodiment of the present invention, in the first channel portion, the cooling pipe is arranged in a built-in form between the outer box body and the inner box body spaced apart therefrom of the chamber.

[0025] According to an embodiment of the present invention, the second channel portion may be formed in a vertical direction along the vertical wall surfaces of the outer box body and the inner box body spaced apart therefrom of the chamber.

[0026] According to an embodiment of the present invention, the cooling jacket may be arranged along the vertical direction of the chamber to form the outer wall of the chamber.

[0027] According to an embodiment of the present invention, the cooling jacket may be arranged along the vertical direction of the chamber and assembled in multiple small cell units to form the outer wall of the chamber.

[0028] According to an embodiment of the present invention, the cooling jacket includes a main body housing that houses a cooling pipe through which cooling water is introduced and passed from the outside, and has a space inside for forming a cooling air flow to supply air along the cooling air flow channel of the chamber. The upper and lower portions of the main body housing may respectively have an external gas inlet for introducing external gas and an exhaust port for discharging the cooling air flow.

[0029] According to an embodiment of the present invention, a plurality of air fins are provided on the vertical wall surface of the inner wall of the main body housing facing the chamber.

[0030] According to the present invention, there is provided a chamber cooling unit for a heat treatment furnace, including: a heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, and a heating element composed of a heater is installed in the chamber to heat or dry the substrate using the heat of the heater; a cooling air flow channel formed along the inner and outer box bodies of the chamber; and at least one cooling jacket located in a vertical direction on the outer side of the chamber to form a cooling air flow in the cooling air flow channel formed inside the chamber. The cooling air flow channel includes: a first channel portion formed between the outer box body of the chamber and the inner box body spaced apart from the outer box body; and a second channel portion for introducing the cooling air flow formed by the cooling jacket into the first channel portion and discharging the fluid discharged from the first channel portion. In the first channel portion, the cooling pipe is arranged in a built-in form between the outer box body of the chamber and the inner box body spaced apart from the outer box body. The cooling jacket includes a main body housing that houses a cooling pipe through which cooling water is introduced and passed from the outside, and has a space inside for forming a cooling air flow to supply air along the cooling air flow channel of the chamber.

[0031] According to the present invention, there is provided a chamber cooling unit for a heat treatment furnace, comprising: a heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, a heating element composed of heaters being installed in the chamber so as to heat or dry the substrate by the heat of the heaters; a cooling air flow passage formed along the inner and outer casings of the chamber; and at least one cooling jacket vertically located on the outer side surface of the chamber so as to form a cooling air flow in the cooling air flow passage formed inside the chamber, the cooling air flow passage including: a first passage portion formed between the outer casing of the chamber and an inner casing spaced apart from the outer casing; and a second passage portion for introducing the cooling air flow formed by the cooling jacket into the first passage portion and discharging the fluid discharged from the first passage portion. In the first passage portion, cooling pipes are arranged in a built-in manner between the outer casing of the chamber and an inner casing spaced apart from the outer casing. The cooling jacket includes a main body casing that houses cooling pipes through which cooling water is introduced from the outside and passed through, and has a space inside for forming a cooling air flow so as to supply air along the cooling air flow passage of the chamber. The first passage portions are respectively formed horizontally at the upper and lower portions of the outer casing of the chamber and an inner casing spaced apart from the outer casing, and the second passage portion is formed vertically along the vertical wall surfaces of the outer casing of the chamber and an inner casing spaced apart from the outer casing.

[0032] According to the present invention, there is provided a chamber cooling unit for a heat treatment furnace, comprising: a heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, and a heating element composed of heaters is installed in the chamber, so as to heat or dry the substrate by the heat of the heaters; a cooling air flow channel formed along the inner and outer boxes of the chamber; and at least one cooling jacket arranged along the vertical direction of the chamber on the outer side surface of the chamber, assembled in a plurality of small cell units to form the outer wall of the chamber, so as to form a cooling air flow in the cooling air flow channel formed inside the chamber. The cooling air flow channel includes: a first channel portion formed between the outer box of the chamber and an inner box spaced apart from the outer box; and a second channel portion for introducing the cooling air flow formed by the cooling jacket into the first channel portion and discharging the fluid discharged from the first channel portion. In the first channel portion, cooling tubes are arranged in a built-in manner between the outer box of the chamber and an inner box spaced apart from the outer box. The cooling jacket includes a main body housing that houses cooling tubes through which cooling water is introduced and passed from the outside, and has a space inside for forming a cooling air flow so as to supply air along the cooling air flow channel of the chamber. The first channel portions are respectively formed in the upper and lower portions of the outer box of the chamber and an inner box spaced apart from the outer box in the horizontal direction, and the second channel portion is formed in the vertical direction along the vertical wall surfaces of the outer box of the chamber and an inner box spaced apart from the outer box.

[0033]

Advantageous Effects

[0034] By forming a cooling air flow channel and cooling tubes inside the chamber of the heat treatment furnace, the present invention can quickly and uniformly manage the temperature inside the chamber, thereby having the effect of improving the cooling performance of the chamber.

[0035] In addition, by improving the durability of the chamber, the chamber can be used for a long time even under the condition that the temperature inside the chamber drops rapidly repeatedly during the heat treatment process, and the burning or normal malfunction of the chamber can be prevented, thereby having the effect of improving the use safety of the heat treatment furnace and the performance of the heat treatment furnace.

[0036] In addition, by improving the chamber performance of the heat treatment furnace, the heat treatment process time of the substrate is reduced, the heat treatment production volume of the substrate is increased, the heat treatment quality of the substrate is improved, and the energy consumption efficiency is increased, thereby having the effect of being able to provide a heat treatment furnace that meets environmental protection conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is an example showing a heat treatment furnace according to an embodiment of the present invention.

[0038] Figure 2It is an example showing the front of a heat treatment furnace according to an embodiment of the present invention.

[0039] Figure 3 It is an example showing a top view of a heat treatment furnace according to an embodiment of the present invention.

[0040] Figure 4 It is an example showing the side of a heat treatment furnace according to an embodiment of the present invention.

[0041] Figure 5 It is an example showing the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0042] Figure 6 It is an example showing a top view of the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0043] Figure 7 It is an example showing the internal structure of the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0044] Figure 8 It is an example showing the main components of the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0045] Figure 9 (a), (b), and (c) of Figure 8 are detailed drawings, (a) is Figure 8 part A of Figure 8 part B of Figure 8 (c) of Figure 8 is an enlarged example of part C of

[0046] Figure 10 It is an example showing a side view selected to illustrate the main components of the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0047] Figure 11 (a) and (b) of

[0048] Figure 12 are examples showing the air flow in the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0049] Figure 13 (a) and (b) of

[0050] Description of reference numerals

[0051] 100: Heat treatment furnace 110: Furnace door

[0052] 120: Shield 200: Chamber

[0053] 210: Inner box 220: Outer box

[0054] 230: First channel part 240: Second channel part

[0055] 250: Cooling pipe 300: Cooling jacket

[0056] 301: Main body housing 302: Outer gas inlet

[0057] 303: Exhaust port 304: Air fin

[0058] 310: Cooling pipe 320: Space Detailed implementation manner

[0059] Next, with reference to the drawings, the content of the cooling unit of the heat treatment furnace chamber according to the preferred embodiment of the present invention will be specifically described.

[0060] Generally, the front side of a heat treatment furnace for heat-treating a substrate may have a shield, and the rear side may have a furnace door, so as to place the substrate to be heat-treated into each one preset in the chamber or remove the substrate that has completed the heat treatment process from the chamber.

[0061] In addition, the heat treatment furnace has a chamber for accommodating the substrate to be heated or dried, and a heating element composed of heaters is installed in the chamber, so that the substrate can be heated by the heat generated from the heaters or dried by evaporating moisture. In addition, depending on the configuration, generally, upper / lower heat transfer plates that are in close contact with the heaters are provided above and below the heaters, so that the substrate heating process can be effectively carried out.

[0062] In addition, one side of the chamber of the heat treatment furnace has a gas supply port for allowing a fluid containing process gas to flow in, and an exhaust port for discharging the fluid in the chamber, and includes a frame having a support for supporting and lifting the chamber and a conductive part connected to a plurality of busbars. The busbars are connected to the heating wires of the heaters to conduct current.

[0063] In addition, in order to remove the moisture remaining on the substrate during the heat treatment process of the substrate, the chamber interior of the heat treatment furnace includes heaters, and in order to improve the product quality, it is necessary to have more effective and high-performance process capabilities.

[0064] In addition, in order to mass-produce more products by shortening the heat treatment process time, a heat treatment furnace is needed that can quickly increase the temperature inside the chamber and can quickly cool while having excellent durability in structure.

[0065] The chamber of the existing heat treatment furnace functions to maintain and manage the temperature of the chamber under the temperature conditions of the heat treatment process, and is set to meet performance such as efficiency and mass production under the heat treatment process conditions.

[0066] In addition, recently, with the thinning and enlargement of substrates, the trends of heat treatment processes have changed frequently, and the demand for performance improvement has been increasing continuously.

[0067] Therefore, there is a current need to develop a solution that can effectively maintain and manage the chamber temperature of a heat treatment furnace during the heat treatment process.

[0068] The method of improving the chamber structure of a heat treatment furnace needs to meet several aspects of performance.

[0069] For example, in order for the chamber of a heat treatment furnace to quickly maintain the heat treatment process temperature, it is necessary to effectively manage the temperature of the chamber.

[0070] In addition, in the process of heat treatment carried out in the chamber of a heat treatment furnace, it is necessary to quickly maintain and manage the temperature inside the chamber.

[0071] In addition, in the process of heat treatment carried out in the chamber of a heat treatment furnace, it is necessary to improve production efficiency by enhancing the ability to maintain and manage temperature.

[0072] In addition, in the process of heat treatment carried out in the chamber of a heat treatment furnace, it should be possible to manage the temperature in all intervals of the process.

[0073] Therefore, the present invention forms a cooling air flow channel and cooling pipes inside the chamber of a heat treatment furnace, thereby enabling quick and uniform management of the temperature inside the chamber and improving the cooling performance of the chamber.

[0074] In addition, the present invention improves the durability of the chamber, and even under the condition that the temperature inside the chamber drops rapidly repeatedly during the heat treatment process, the chamber can be used for a long time, and the burning or normal malfunction of the chamber can be prevented, thereby improving the use safety of the heat treatment furnace and the performance of the heat treatment furnace.

[0075] In addition, the present invention improves the chamber performance of the heat treatment furnace, so that the heat treatment process time of the substrate is reduced, the heat treatment production volume of the substrate is increased, the heat treatment quality of the substrate is improved, and the energy consumption efficiency is increased, thereby enabling the provision of a heat treatment furnace that meets environmental protection conditions.

[0076] Next, the content of the preferred embodiment according to the present invention will be described in more detail with reference to the accompanying drawings.

[0077] Figure 1 It is an example showing a heat treatment furnace according to an embodiment of the present invention. Figure 2This is an example showing the front of a heat treatment furnace according to an embodiment of the present invention. Figure 3 This is an example showing a top view of a heat treatment furnace according to an embodiment of the present invention. Figure 4 This is an example showing the side of a heat treatment furnace according to an embodiment of the present invention.

[0078] Figures 1 to 4 The accompanying drawings illustrated in show the overall structure of the heat treatment furnace 100, which is an example of a heat treatment furnace 100 including a chamber 200.

[0079] The heat treatment furnace 100 according to the present invention is as Figures 1 to 4 As shown, the front side of the heat treatment furnace 100 for heat-treating a substrate may have a blocker 120, and the rear side may have a furnace door 110, so that the substrate to be heat-treated can be placed in each stage preset in the chamber 200 or the substrate after the heat treatment process is completed can be taken out of the chamber 200.

[0080] In addition, the heat treatment furnace 100 has a chamber 200 for accommodating a substrate to be heated or dried, and a heating element composed of heaters is installed in the chamber 200, so that the substrate can be heated by the heat generated from the heaters or dried by evaporating moisture. In addition, depending on the configuration, generally, upper / lower heat transfer plates in close contact with the heaters are provided above and below the heaters, so that the substrate heating process can be effectively performed.

[0081] In addition, the heat treatment furnace 100 has a gas supply port for allowing a fluid containing a process gas to flow in on one side of the chamber 200, and an exhaust port for discharging the fluid in the chamber, and includes a frame having a support for supporting and lifting the chamber and a conductive part 500 connected to a plurality of busbars 510, and the busbars 510 are connected to the heating wires of the heaters to conduct current.

[0082] Among them, the reference numeral 400 not shown is a power supply unit for power supply. For reference, the basic components forming the heat treatment furnace, for example, heaters, upper / lower heat transfer plates, the gas supply and exhaust systems for process gases, and the components of the power supply system including the conductive part for supplying power to the heaters, have no direct relation to the present invention. In addition, the basic components of the heat treatment furnace are not related to the gist of the present invention and are known components, so the present invention will omit their description.

[0083] Next, the main components of the chamber cooling unit of the heat treatment furnace according to the present invention will be described.

[0084] Figure 5 This is an example showing the chamber of a heat treatment furnace according to an embodiment of the present invention. Figure 6 This is an example showing a top view of the chamber of a heat treatment furnace according to an embodiment of the present invention. Figure 7 This is an example showing the internal structure of the chamber of a heat treatment furnace according to an embodiment of the present invention.Figure 8 It is an example showing the main components of the chamber of a heat treatment furnace according to an embodiment of the present invention. Figure 9 (a), (b), and (c) of Figure 8 are detailed views of Figure 8 part A of Figure 8 part B of Figure 8 and (c) of Figure 8 is an enlarged example of part C of Figure 10 It is an example showing a side view selected to illustrate the main components of the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0085] Figures 5 to 10 The accompanying drawings illustrated therein are examples showing a side view selected from the chamber 200 forming the heat treatment furnace 100.

[0086] The chamber cooling unit of the heat treatment furnace according to an embodiment of the present invention may be composed of a heat treatment furnace 100 having a chamber 200 for accommodating a substrate for heating or drying the substrate, and a heating element composed of a heater is installed in the chamber 200, so as to heat or dry the substrate by the heat of the heater.

[0087] In addition, a cooling air flow channel and a cooling water pipe may be provided along the inner box body 210 and the outer box body 220 of the chamber 200.

[0088] In addition, at least one cooling jacket 300 may be included, which is located on the outer side surface of the chamber 200 in the vertical direction, so as to form a cooling air flow a1 in the cooling air flow channel formed inside the chamber 200.

[0089] The more specific configuration of the chamber cooling unit of the heat treatment furnace according to the present invention is as follows.

[0090] As Figures 5 to 10 shown, the chamber 200 may be provided with a cooling air flow channel and a cooling water pipe.

[0091] The cooling air flow channel may include: a first channel portion 230 formed between the outer box body 220 of the chamber 200 and the inner box body 210 spaced apart therefrom; and a second channel portion 240 that introduces the cooling air flow a1 formed by each cooling jacket 300 into the first channel portion 230 and discharges the discharged fluid a2 discharged from the first channel portion 230.

[0092] In addition, it may have a function of independently controlling the cooling air flow a1 / discharged fluid a2 discharged from the first channel portion 230 respectively.

[0093] In addition, the first channel portion 230 is formed in the upper and lower portions of the outer box body 220 of the chamber 200 and the inner box body 210 spaced apart therefrom in the horizontal direction respectively.

[0094] In this way, first channel portions 230 formed horizontally at the upper and lower portions of the outer casing 220 and the inner casing 210 spaced apart therefrom form uniform cooling airflows at the upper and lower portions of the chamber 200, respectively, so that the chamber 200 can be cooled uniformly.

[0095] In addition, in the first channel portion 230, cooling pipes 250 can be arranged in a built-in form between the outer casing 220 of the chamber 200 and the inner casing 210 spaced apart therefrom.

[0096] In this way, if the cooling pipes 250 are provided on the first channel portion 230, the relatively high internal temperature of the chamber 200 can be cooled to a uniform temperature distribution as needed. The first channel portion 230 is formed by arranging the cooling pipes 250 in a built-in form between the outer casing 220 of the chamber 200 and the inner casing 210 spaced apart therefrom.

[0097] In addition, a second channel portion 240 forming a cooling airflow channel can be formed in a vertical direction along the vertical wall surfaces of the outer casing 220 of the chamber 200 and the inner casing 210 spaced apart therefrom.

[0098] Figure 11 (a) and (b) of FIG. are examples showing a cooling jacket provided in a chamber of a heat treatment furnace according to an embodiment of the present invention. (a) is an example of the outside of the cooling jacket, and (b) is an example of the inside of the cooling jacket.

[0099] As Figures 5 to 11 shown, the cooling jacket 300 can be arranged along the vertical direction of the chamber 200 to form the outer wall of the chamber 200.

[0100] In addition, the cooling jacket 300 can be arranged along the vertical direction of the chamber 200 and assembled in multiple small cell units to form the outer wall of the chamber 200.

[0101] In addition, the cooling jacket 300 can include a main body housing 301 that houses cooling pipes 310 through which cooling water is introduced from the outside and passes, and has a space 320 inside for forming a cooling airflow a1 to supply air along the cooling airflow channel of the chamber 200.

[0102] In addition, the upper and lower portions of the main body housing 301 can respectively have an external gas inlet 302 for introducing external gas and an exhaust port 303 for discharging the cooling airflow.

[0103] In addition, the cooling jacket 300 has a plurality of air fins 304 formed on the vertical wall surface of the inner wall of the main body housing 301 facing the chamber 200, so as to improve the cooling performance.

[0104] Figure 12is an example showing the air flow inside the chamber of a heat treatment furnace according to an embodiment of the present invention.

[0105] Figure 13 Figures (a) and (b) are examples showing the air flow and the cooling water flow inside the chamber of a heat treatment furnace according to an embodiment of the present invention. (a) is an example of the air flowing in the horizontal direction, and (b) is an example of the cooling water flowing in the horizontal direction.

[0106] The chamber cooling unit of the heat treatment furnace according to the present invention is as Figure 12 and as Figure 13 shown. The external gas introduced through the external gas inlet of the cooling jacket 300 forms a cooling air flow a1 during the process of passing through the cooling tubes 310 of the cooling jacket 300, and thus flows into the first channel portion 230 and the second channel portion 240, which are the cooling air flow channels formed inside the chamber 200. Therefore, the chamber 200 can be cooled to a uniform temperature distribution.

[0107] The fluid used to cool the inside of the chamber 200 can also be discharged to the outside through the first channel portion 230 and the second channel portion 240 that form the cooling air flow channels.

[0108] In addition, although not specifically shown in the drawings, the supply and exhaust of the cooling air flow a1 flowing through the first channel portion 230 and the second channel portion 240 including the cooling air flow channels of the chamber can be achieved by arranging a exhaust fan or a supply and exhaust device centered on the cooling jacket 300, so as to adjust the cooling air flow to be evenly distributed inside the chamber, and the air flow inside the chamber can be simply discharged to the outside of the chamber during the exhaust stage.

[0109] As described above, the chamber cooling unit of the heat treatment furnace according to the present invention forms a cooling air flow channel and cooling tubes inside the chamber of the heat treatment furnace, so that the temperature inside the chamber can be quickly and evenly managed, and has the advantage of improving the cooling performance of the chamber.

[0110] In addition, by improving the durability of the chamber, the chamber can be used for a long time even under the condition that the temperature inside the chamber drops rapidly repeatedly during the heat treatment process, and the burning or normal malfunction of the chamber can be prevented. Therefore, it has the advantages of improving the use safety and the performance of the heat treatment furnace.

[0111] In addition, by improving the chamber performance of the heat treatment furnace, the heat treatment process time of the substrate is reduced, the heat treatment production volume of the substrate is increased, the heat treatment quality of the substrate is improved, and the energy consumption efficiency is increased. Therefore, it has the advantage of being able to provide a heat treatment furnace that meets the environmental protection conditions.

[0112] Although the present invention is described with reference to an embodiment illustrated in the accompanying drawings, the present invention is not limited to these embodiments, and modifications and variations can be made without departing from the gist of the present invention, and these modifications and variations belong to the technical idea of the present invention.

Claims

1. A chamber cooling unit of a heat treatment furnace, comprising: A heat treatment furnace having a chamber for accommodating a substrate for heating or drying the substrate, and a heating element composed of heaters is installed in the chamber, so as to heat or dry the substrate by using the heat of the heaters; A cooling air flow channel formed along the inner and outer boxes of the chamber; and At least one cooling jacket arranged along the vertical direction of the chamber on the outer side of the chamber, assembled in a plurality of small cell units to form the outer wall of the chamber, so as to form a cooling air flow in the cooling air flow channel formed inside the chamber, The cooling air flow channel includes: A first channel portion formed between the outer box of the chamber and an inner box spaced from the outer box; And A second channel portion that introduces the cooling air flow formed by the cooling jacket into the first channel portion and discharges the fluid discharged from the first channel portion, In the first channel portion, cooling pipes are arranged in a built-in form between the outer box of the chamber and an inner box spaced from the outer box, The cooling jacket includes a main body housing that houses cooling pipes for introducing and passing cooling water from the outside, and has a space inside for forming a cooling air flow so as to supply air along the cooling air flow channel of the chamber, The first channel portions are respectively formed in the upper and lower portions of the outer box of the chamber and an inner box spaced from the outer box in the horizontal direction, The second channel portion is formed in the vertical direction along the vertical wall surfaces of the outer box of the chamber and an inner box spaced from the outer box.

2. The chamber cooling unit of the heat treatment furnace according to claim 1, wherein, The cooling air flow channel formed along the inner and outer boxes of the chamber includes a cooling water pipe.

3. The chamber cooling unit of the heat treatment furnace according to claim 1, wherein The upper and lower portions of the main body housing respectively have an external gas inlet for introducing external gas and an exhaust port for discharging the cooling air flow.

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