Numerical characterization, structure and method of suppressing anchor point damping of MEMS resonator

Abstract

The present invention relates to a structure and method for numerical characterization and suppression of anchor point damping of a MEMS resonator, which comprises: a suppression region, located at the center of each resonant mass block, and a plurality of the suppression regions are symmetrically distributed; a suppression structure, used to change the resonance parameters to suppress anchor point dissipation, arranged in the suppression region; a theoretical fixed point region, symmetrically distributed on a support frame connected to the resonant mass block with the anchor point as the center; a detection structure, used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, arranged in the theoretical fixed point region. The present invention realizes real-time measurement characterization and closed-loop suppression of anchor point dissipation by designing an asymmetric vibration detection structure and an asymmetric vibration suppression structure. The present invention has the characteristics of being easy to process, not increasing the process complexity, high detection accuracy, good closed-loop suppression effect, and effectively reducing anchor point damping dissipation.

Description

Technical Field

[0001] The invention relates to the technical field of micro-electromechanical systems, and in particular to a structure and method for numerically characterizing and suppressing anchor point damping of a MEMS resonator. Background Art

[0002] MEMS (Micro Electromechanical System) devices, such as Coriolis gyroscopes, resonant accelerometers, resonators and other structures manufactured by MEMS technology, have the characteristics of small size, low power consumption, high reliability and low cost, so they have broad application prospects in the fields of industry, national defense, and people's livelihood. Whether it is a MEMS gyroscope, a MEMS resonant accelerometer, or a MEMS resonator, the working state is a resonant state. Low damping, that is, a high Q value resonator, has a more concentrated energy transmission channel in the frequency domain, rather than dissipating in other forms of energy, which effectively improves the signal-to-noise ratio of the detection, and therefore has higher measurement accuracy.

[0003] The Q value reflects the damping characteristics of the structure. Structural damping is mainly composed of three types of damping: anchor point damping, thermoelastic damping and gas damping. Gas damping can be solved by vacuum packaging, and thermoelastic damping can be solved by optimizing structural parameters. At present, relevant technical methods have been used to optimize thermoelastic damping and gas damping. However, there are no reports on the suppression methods of anchor point damping. Anchor point damping refers to the fact that during the vibration process of the resonant structure, its asymmetric vibration will transfer the vibration energy to the outside world through the anchor point, thereby causing resonant energy loss and reducing the Q value of the resonant structure.

[0004] The main reasons for asymmetric vibrations in resonant structures are as follows: 1. The designed resonant structure is asymmetric. Asymmetric structural design schemes will cause vibrations at the anchor points. 2. Asymmetry caused by process problems. Various process steps in the MEMS process will lead to process defects, which will make the final structure different from the designed structure, resulting in damping asymmetry, stiffness asymmetry, mass asymmetry and other factors. These factors will cause asymmetric vibrations and dissipation through the anchor points. 3. The accuracy of the excitation signal. The excitation signal directly determines the force conditions of the resonant structure. Since the excitation signal applied by the circuit cannot be completely consistent, even for a fully symmetrical resonant structure, it will cause resonance asymmetry.

[0005] According to the above analysis, for any resonant structure of any design, there will often be asymmetric vibrations, and damping dissipation will occur through the anchor points. Therefore, studying how to suppress the asymmetric vibration of the structure is important for suppressing the damping dissipation of the anchor points and improving the accuracy of the resonator. Summary of the invention

[0006] In view of the above-mentioned anchor point dissipation problem, the purpose of the present invention is to provide a structure and method for numerical characterization and suppression of anchor point damping of a MEMS resonator, and to achieve real-time measurement characterization and closed-loop suppression of anchor point dissipation by designing a detection structure for asymmetric vibration and a suppression structure for asymmetric vibration. The present invention has the characteristics of easy processing, no increase in process complexity, high detection accuracy, good closed-loop suppression effect, and effective reduction of anchor point damping dissipation.

[0007] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a structure for numerical characterization and suppression of anchor point damping of a MEMS resonator, comprising: a suppression area, located at the center of each resonant mass block, and a plurality of the suppression areas are symmetrically distributed; a suppression structure, used to change the resonance parameters to suppress anchor point dissipation, and arranged in the suppression area; a theoretical fixed point area, symmetrically distributed with the anchor point as the center on a support frame used to connect the resonant mass block; a detection structure, used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, and arranged in the theoretical fixed point area.

[0008] Furthermore, taking the center of the support frame as the origin, the center of the inhibition area and the center of the theoretical fixed point area are located in the same radiation radial direction.

[0009] Further, the suppression structure in each of the suppression areas includes: a first suppression comb-tooth electrode and a second suppression comb-tooth electrode;

[0010] The first suppression comb-tooth electrode is used to suppress asymmetric vibration of the driving mode, and the second suppression comb-tooth electrode is used to suppress asymmetric vibration of the detection mode. The first suppression comb-tooth electrode and the second suppression comb-tooth electrode have the same structural form and are set in orthogonal directions.

[0011] Furthermore, both the first suppression comb-tooth electrode and the second suppression comb-tooth electrode adopt a squeeze film damping comb-tooth structure.

[0012] Further, the detection structure in each of the theoretical fixed point regions includes: a first detection comb capacitance and a second detection comb capacitance;

[0013] The sensitive directions of the first detection comb capacitance and the second detection comb capacitance are orthogonal;

[0014] The first detection comb capacitance is used to detect asymmetric vibration in the Y direction in the theoretical fixed area;

[0015] The second detection comb capacitance is used to detect asymmetric vibration in the X direction in the theoretical stationary area.

[0016] Furthermore, the first detection comb-tooth capacitor adopts a sliding film damping comb-tooth structure, and the second detection comb-tooth capacitor adopts a squeeze film damping comb-tooth structure.

[0017] Furthermore, the suppression area and the theoretical fixed point area, the theoretical fixed point is a point where the sum of the force vectors in the symmetrical resonant structure is zero under an ideal working state.

[0018] A method for numerically characterizing and suppressing anchor point damping of a MEMS resonator comprises: a step of setting a suppression area, wherein the suppression area is set at the center position of each resonant mass block, and a plurality of the suppression areas are symmetrically distributed; a step of setting a suppression structure, wherein the suppression structure is used to change the resonance parameter to suppress anchor point dissipation, and is set in the suppression area; a step of setting a theoretical fixed point area, wherein two theoretical fixed point areas are symmetrically distributed on a support frame connected to the resonant mass block with the anchor point as the center; and a step of setting a detection structure, wherein the detection structure is used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, and is set in the theoretical fixed point area.

[0019] Further, the suppression structure includes: a first suppression comb-tooth electrode and a second suppression comb-tooth electrode;

[0020] The first suppression comb-tooth electrode is used to suppress asymmetric vibration of a driving mode, and the second suppression comb-tooth electrode is used to suppress asymmetric vibration of a detection mode. The first suppression comb-tooth electrode and the second suppression comb-tooth electrode have the same structure and are arranged in orthogonal directions.

[0021] The first suppression comb-teeth electrode and the second suppression comb-teeth electrode can generate electrostatic force to provide a stiffness change, thereby adjusting the resonance parameters of the resonator.

[0022] Further, the detection structure includes: a first detection comb capacitor and a second detection comb capacitor;

[0023] The sensitive directions of the first detection comb capacitance and the second detection comb capacitance are orthogonal;

[0024] The first detection comb capacitor is used to detect asymmetric vibration in the Y direction in the theoretical immobile area; when the support frame vibrates in the Y direction, the plate area of ​​the first detection comb capacitor changes, resulting in a change in capacitance, and the asymmetric vibration information in the Y direction of the theoretical immobile area is obtained through subsequent processing;

[0025] The second detection comb capacitor is used to detect asymmetric vibration in the X direction in the theoretical immobile area; when the support frame vibrates in the X direction, the plate spacing of the second detection comb capacitor changes, resulting in a change in capacitance, and the asymmetric vibration information in the X direction of the theoretical immobile area is obtained through subsequent processing.

[0026] The present invention adopts the above technical solution, which has the following advantages:

[0027] 1. The present invention is easy to process, and can complete the processing of the MEMS sensitive structure and the asymmetric vibration detection structure and suppression structure at one time in the bulk silicon process without increasing the complexity of the process.

[0028] 2. The present invention has good compatibility and high precision. It adopts a comb-tooth capacitance detection method and an electrostatic force electrode suppression method, is compatible with a closed-loop control method of a MEMS resonator, and has high precision.

[0029] 3. The detection of asymmetric vibration of the present invention is real-time, which provides effective observation conditions for further laser adjustment of anchor point damping dissipation and other technical means. At the same time, the online closed-loop suppression of anchor point dissipation can be achieved in conjunction with the closed-loop control circuit.

[0030] 4. The present invention is applicable to all planar MEMS resonators requiring high Q value design.

[0031] In summary, the present invention realizes the numerical characterization and closed-loop suppression of anchor point damping dissipation, reduces the asymmetric vibration of the structure, and further reduces the vibration transmitted to the outside through the anchor point. Therefore, it can effectively suppress the anchor point damping dissipation and improve the measurement accuracy of the resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic diagram of the overall structure of a resonator including an anchor point dissipation detection and suppression structure in one embodiment of the present invention;

[0033] Figure 2 is a cross-sectional schematic diagram of a MEMS resonant structure in one embodiment of the present invention;

[0034] Figure 3 It is an enlarged schematic diagram of an asymmetric vibration detection structure and an asymmetric vibration suppression structure in one embodiment of the present invention. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0036] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0037] The present invention provides a structure and method for numerical characterization and suppression of anchor point damping of a MEMS resonator, which is applicable to a planar MEMS resonator for capacitance detection processed by bulk silicon technology. A comb-tooth detection capacitor is designed at the theoretical fixed point of the resonant structure to realize the characterization and detection of the asymmetric vibration of the structure, thereby realizing the numerical characterization of the anchor point dissipation; a comb-tooth electrode capable of applying electrostatic force is designed in the resonant structure to adjust the structural resonance parameters and reduce the asymmetric vibration of the structure, thereby reducing the vibration transmitted to the outside world through the anchor point, realizing the suppression of the anchor point dissipation and improving the Q value.

[0038] Symmetrical structural design can reduce anchor point damping compared to asymmetric structural design, but due to process defects and drive circuit accuracy issues, the resonant structure produces asymmetric vibrations in the working state. In order to further suppress the asymmetric vibration of the symmetrical structure in the actual working state, an asymmetric vibration detection structure is designed at its theoretical fixed point, and an asymmetric vibration suppression structure is designed in the resonant structure. The above theoretical fixed point refers to the point where the sum of the force vectors is zero under the ideal working state of the resonant structure.

[0039] Under ideal working conditions, the theoretical fixed point does not vibrate because the sum of the force vectors is zero. The vibration of the structure cannot be transmitted to the outside world through the anchor point, and no energy dissipation occurs. Under actual working conditions, the vibration amplitude of the theoretical fixed point is positively correlated with the asymmetric vibration amplitude of the resonant structure, and therefore is also positively correlated with the degree of anchor point damping dissipation. Physics shows that the vibration energy of the oscillator is positively correlated with the square of the vibration amplitude. Therefore, the larger the asymmetric vibration amplitude, the greater the anchor point dissipation.

[0040] In one embodiment of the present invention, a structure for numerically characterizing and suppressing the anchor point damping of a MEMS resonator is provided. The structure for numerically characterizing and suppressing the anchor point damping of a MEMS resonator provided in this embodiment is applicable to MEMS bulk silicon process for processing various planar capacitive detection MEMS resonators. The MEMS resonator includes but is not limited to the single anchor point four-mass gyro structure in this embodiment, but includes any MEMS device with a resonant structure. In this embodiment, a single anchor point four-mass block MEMS resonant gyroscope is used as an example for explanation, and the structure for numerically characterizing and suppressing the anchor point damping of the MEMS resonator includes:

[0041] The suppression area 6 is located at the center of each resonant mass block 1, and the plurality of suppression areas 6 are symmetrically distributed;

[0042] A suppression structure, used for changing resonance parameters to suppress anchor point dissipation, is arranged in the suppression area 6;

[0043] Theoretical fixed point region 5 is symmetrically distributed on a support frame 3 for connecting the resonant mass block 1 with the anchor point 2 as the center;

[0044] The detection structure is used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, and is arranged in the theoretical fixed point area 5.

[0045] In this embodiment, the basic structure of the gyroscope includes two major parts: a substrate layer and a structural layer.

[0046] like Figure 1 The figure shows a top view of the overall structure of the gyroscope. The structural layer includes: four resonant mass blocks 1, anchor points 2 and support frames 3, cantilever beams 4, four theoretical fixed point regions 5 where detection structures for realizing asymmetric vibration detection are located, and four suppression regions 6 where suppression structures for realizing asymmetric vibration suppression are located. The four resonant mass blocks 1 are connected to the support frame 3 through cantilever beams 4. The theoretical fixed point of the support frame 3 is located in the theoretical fixed point region 5. Due to the symmetrical design of the structure, the theoretical fixed point regions 5 are symmetrically distributed on the support frame 3, and the suppression regions 6 are symmetrically distributed at the center of each resonant mass block 1, and the number of suppression regions 6 is the same as the number of theoretical fixed point regions 5.

[0047] In a preferred embodiment, with the center of the support frame 3 as the origin, the center of the theoretical fixed point area 5 and the center of the inhibition area 6 are located in the same radiation radial direction.

[0048] The theoretical fixed point of the structural layer is located in the theoretical fixed point area 5, and the theoretical fixed point area 5 includes a symmetrically arranged capacitor comb structure for detecting asymmetric vibration of the resonator to realize the detection of asymmetric vibration; the suppression area 6 includes a symmetrically arranged comb electrode for adjusting the resonance parameters of the resonator to suppress asymmetric vibration, and the resonance parameters of the resonator are changed by applying negative stiffness of electrostatic force to suppress the generation of asymmetric vibration (hereinafter, the "symmetrically arranged capacitor comb structure for detecting asymmetric vibration of the resonator" is uniformly referred to as "detection comb capacitor", and the "symmetrically arranged comb electrode for adjusting the resonance parameters of the resonator to suppress asymmetric vibration" is referred to as "suppression comb electrode").

[0049] like Figure 2 As shown, it is a cross-sectional view of the overall structure of the gyroscope. Figure 2The positional relationship between the anchor point 2 and the structural layer and the substrate layer 11 is indicated. The substrate layer 11 is located below the structural layer. One end of the anchor point 2 is bonded to the substrate layer 11, and the other end is bonded to the geometric center of the support frame 3. Anchor point damping dissipation refers to the phenomenon that the vibration energy of the structural layer is transmitted to the substrate layer 11 or other external objects through the anchor point 2.

[0050] Since the gyro is closed-loop controlled by constant frequency excitation force, the resonant mass block 1 has plane linear vibration as the main mode (driving mode and detection mode), and the non-plane mode and the torsion mode in the plane are all secondary modes. Therefore, in actual working conditions, the asymmetric vibration of the gyro mainly comes from the asymmetric factors of the main mode, and the coupling caused by the asymmetric factors of the secondary mode can be reasonably ignored.

[0051] like Figure 3 As shown, Figure 1 An enlarged schematic diagram of the theoretical fixed point region 5 and the inhibition region 6. Two orthogonal directions are defined in each pair of theoretical fixed point region 5 and inhibition region 6: the X direction and the Y direction. The Y direction is the direction of the line connecting the center of the theoretical fixed point region 5 and the center of the inhibition region 6; the X direction is in the structural plane and is orthogonal to the Y direction.

[0052] In a preferred embodiment, the detection structure in the theoretical fixed point area 5 includes a first detection comb tooth capacitor 7 and a second detection comb tooth capacitor 8; the sensitive directions detected by the first detection comb tooth capacitor 7 and the second detection comb tooth capacitor 8 are orthogonal; the first detection comb tooth capacitor 7 is used to detect asymmetric vibrations in the Y direction in the theoretical fixed area 5, and the second detection comb tooth capacitor 8 is used to detect asymmetric vibrations in the X direction in the theoretical fixed area 5.

[0053] In the theoretical fixed point area 5, the first detection comb-tooth capacitor 7 adopts a synovial damping comb-tooth structure. The principle of synovial damping comb-tooth vibration detection is that when the support frame 3 vibrates in the Y direction, the plate area of ​​the first detection comb-tooth capacitor 7 changes, resulting in a change in its capacitance. Through subsequent external circuit processing, the asymmetric vibration information in the Y direction of the theoretical fixed area 5 can be obtained. The second detection comb-tooth capacitor 8 adopts a squeeze film damping comb-tooth structure. The principle of squeeze film damping comb-tooth vibration detection is that when the support frame 3 vibrates in the X direction, the plate spacing of the second comb-tooth capacitor 8 changes, resulting in a change in its capacitance. Through subsequent external circuit processing, the asymmetric vibration information in the X direction of the theoretical fixed area 5 can be obtained. It should be noted that the detection comb-tooth capacitors include but are not limited to those in this embodiment, but include all MEMS structural forms that can realize displacement detection.

[0054] In a preferred embodiment, the suppression structure in each suppression area 6 includes a first suppression comb electrode 9 and a second suppression comb electrode 10. Both the first suppression comb electrode 9 and the second suppression comb electrode 10 adopt a squeeze film damping comb structure. The first suppression comb electrode 9 is used to suppress the asymmetric vibration of the driving mode, and the second suppression comb electrode 10 is used to suppress the asymmetric vibration of the detection mode. The first suppression comb electrode 9 and the second suppression comb electrode 10 have the same structure, but are set in an orthogonal direction.

[0055] The principle of the first suppression comb-tooth electrode 9 and the second suppression comb-tooth electrode 10 is that when a driving voltage is applied to the suppression comb-tooth electrode, an electrostatic force is generated to provide a stiffness change, thereby adjusting the resonance parameters of the resonator. It should be noted that the suppression comb-tooth electrode includes but is not limited to the suppression comb-tooth electrode of this embodiment, and includes all MEMS structures that can generate electrostatic force.

[0056] In the above embodiments, the setting positions, numbers, shapes, and areas of the suppression regions 6 and the theoretical fixed point regions 5 are not limited to those in the above embodiments, but may be any reasonable positions, numbers, shapes, and areas.

[0057] In one embodiment of the present invention, a method for numerically characterizing and suppressing the anchor point damping of a MEMS resonator is provided. The method in this embodiment is based on the numerically characterizing and suppressing structure of the anchor point damping of the MEMS resonator provided in the above embodiment. In this embodiment, the method includes:

[0058] A step of setting a suppression area 6, wherein the suppression area 6 is set at the center of each resonant mass block 1, and the plurality of suppression areas 6 are symmetrically distributed;

[0059] a step of providing a suppression structure, the suppression structure being used to change resonance parameters and suppress anchor point dissipation, and being provided in the suppression area 6;

[0060] The step of setting a theoretical fixed point region 5, wherein two theoretical fixed point regions 5 are symmetrically distributed on a support frame 3 for connecting the resonant mass block 1 with the anchor point as the center;

[0061] The step of setting a detection structure, where the detection structure is used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, and is set in the theoretical fixed point area 5.

[0062] In a preferred embodiment, the suppression structure comprises a first suppression comb electrode 9 and a second suppression comb electrode 10;

[0063] The first suppression comb-tooth electrode 9 is used to suppress the asymmetric vibration of the driving mode, and the second suppression comb-tooth electrode 10 is used to suppress the asymmetric vibration of the detection mode. The first suppression comb-tooth electrode 9 and the second suppression comb-tooth electrode 10 have the same structure and are arranged in orthogonal directions.

[0064] The first suppression comb-teeth electrode 9 and the second suppression comb-teeth electrode 10 can generate electrostatic force to provide a stiffness change, thereby adjusting the resonance parameters of the resonator.

[0065] In a preferred embodiment, the detection structure includes a first detection comb capacitor 7 and a second detection comb capacitor 8;

[0066] The sensitive directions detected by the first detection comb capacitance 7 and the second detection comb capacitance 8 are orthogonal;

[0067] The first detection comb capacitor 7 is used to detect the asymmetric vibration in the Y direction of the theoretical immobile area 5; when the support frame vibrates in the Y direction, the plate area of ​​the first detection comb capacitor 7 changes, resulting in a change in capacitance, and the asymmetric vibration information in the Y direction of the theoretical immobile area 5 is obtained through subsequent processing;

[0068] The second detection comb capacitor 8 is used to detect the asymmetric vibration in the X direction in the theoretical immobile area 5; when the support frame vibrates in the X direction, the distance between the plates of the second detection comb capacitor 8 changes, resulting in a change in capacitance, and the asymmetric vibration information in the X direction of the theoretical immobile area 5 is obtained through subsequent processing.

[0069] The method provided in this embodiment is used to execute the above-mentioned system embodiments. Please refer to the above-mentioned embodiments for the specific process and detailed contents, which will not be repeated here.

[0070] In this embodiment, the closed-loop control process of the asymmetric vibration detection and suppression method is further described. The detection comb capacitance is sensitive to asymmetric vibration signals, and a total of 4 signals in the X direction and the Y direction can be detected. The processing of the 4 Y-axis signals can characterize the asymmetric linear vibration, reflecting the difference in the resonance parameters of the driving mode between different resonant mass blocks 1; the processing of the 4 X-axis signals can characterize the asymmetric rotation, reflecting the difference in the resonance parameters of the detection mode between different resonant mass blocks 1. In order to adjust the consistency of the resonance parameters between different mass blocks, the stiffness of the resonant structure is changed by applying a suitable voltage to the two suppression comb electrodes, thereby adjusting the resonance parameters, and realizing the suppression of the asymmetric vibration of the driving mode and the detection mode of the entire structure. Therefore, this method realizes the numerical characterization and suppression of the asymmetric vibration of the gyroscope working plane mode, and can reduce the anchor point damping dissipation.

[0071] In summary, the present invention is applicable to planar MEMS resonators for capacitance detection processed by bulk silicon technology. A comb-tooth detection structure is designed at the theoretical fixed point position of the resonant structure to achieve effective detection of anchor point dissipation, and the design suppresses the comb-tooth electrode from changing the resonance parameters to achieve reduction of anchor point dissipation. The present invention is adapted to the MEMS process, and the implementation of the method does not increase the difficulty of the process; the method is implemented using a flat plate capacitor, and the process is simple and accurate; the detection of anchor point dissipation is real-time and can achieve closed-loop suppression; it is applicable to all planar MEMS resonators that require high Q value design.

[0072] The contents not described in detail in the specification of the present invention belong to the prior art known to the professional and technical personnel in this field.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A structure for numerically characterizing and suppressing the anchor point damping of a MEMS resonator, characterized in that: include: A suppression region is located at the center of each resonant mass block, and a plurality of the suppression regions are symmetrically distributed; A suppression structure, used for changing resonance parameters to suppress anchor point dissipation, and arranged in the suppression area; Theoretical fixed point regions are symmetrically distributed on a support frame for connecting the resonant mass block with the anchor point as the center; A detection structure, used for numerically characterizing the anchor point dissipation and realizing the detection of asymmetric vibration, is arranged in the theoretical fixed point region; The MEMS resonator is a four-mass MEMS resonant gyroscope with a single anchor point; The suppression structure in each of the suppression areas includes: a first suppression comb-tooth electrode and a second suppression comb-tooth electrode; The first suppression comb-tooth electrode is used to suppress asymmetric vibration of a driving mode, and the second suppression comb-tooth electrode is used to suppress asymmetric vibration of a detection mode. The first suppression comb-tooth electrode and the second suppression comb-tooth electrode have the same structure and are arranged in orthogonal directions. The detection structure in each of the theoretical fixed point regions includes: a first detection comb capacitance and a second detection comb capacitance; The sensitive directions of the first detection comb capacitance and the second detection comb capacitance are orthogonal; The first detection comb capacitance is used to detect asymmetric vibration in the Y direction in the theoretical fixed area; The second detection comb capacitance is used to detect asymmetric vibration in the X direction in the theoretical stationary area.

2. The structure for numerically characterizing and suppressing the anchor point damping of a MEMS resonator as claimed in claim 1, characterized in that: Taking the center of the support frame as the origin, the center of the inhibition area and the center of the theoretical fixed point area are located in the same radiation radial direction.

3. The structure for numerical characterization and suppression of the anchor point damping of the MEMS resonator as claimed in claim 1, characterized in that: The first suppression comb-tooth electrode and the second suppression comb-tooth electrode both adopt a squeeze film damping comb-tooth structure.

4. The structure for numerical characterization and suppression of anchor point damping of a MEMS resonator as claimed in claim 1, characterized in that: The first detection comb-tooth capacitor adopts a sliding film damping comb-tooth structure, and the second detection comb-tooth capacitor adopts a squeeze film damping comb-tooth structure.

5. The structure for numerical characterization and suppression of the anchor point damping of the MEMS resonator as claimed in claim 1, characterized in that: The suppression area and the theoretical fixed point area, the theoretical fixed point is a point in a symmetrical resonant structure where the sum of the force vectors is zero under an ideal working condition.

6. A method for numerically characterizing and suppressing the anchor point damping of a MEMS resonator, characterized in that: include: A step of setting an inhibition region, wherein the inhibition region is set at the center of each resonant mass block, and a plurality of the inhibition regions are symmetrically distributed; The step of providing a suppression structure, wherein the suppression structure is used to change the resonance parameters and suppress anchor point dissipation, and is provided in the suppression area; The step of setting theoretical fixed point regions, wherein two theoretical fixed point regions are symmetrically distributed on a support frame for connecting the resonant mass block with an anchor point as the center; The step of setting a detection structure, wherein the detection structure is used to numerically characterize the anchor point dissipation and realize the detection of asymmetric vibration, and is set in the theoretical fixed point area; The MEMS resonator is a four-mass MEMS resonant gyroscope with a single anchor point; The suppression structure includes: a first suppression comb-tooth electrode and a second suppression comb-tooth electrode; The first suppression comb-tooth electrode is used to suppress asymmetric vibration of a driving mode, and the second suppression comb-tooth electrode is used to suppress asymmetric vibration of a detection mode. The first suppression comb-tooth electrode and the second suppression comb-tooth electrode have the same structure and are arranged in orthogonal directions. The first suppression comb-tooth electrode and the second suppression comb-tooth electrode can generate electrostatic force to provide a stiffness change to adjust the resonance parameters of the resonator; The detection structure includes: a first detection comb capacitor and a second detection comb capacitor; The sensitive directions of the first detection comb capacitance and the second detection comb capacitance are orthogonal; The first detection comb capacitor is used to detect asymmetric vibration in the Y direction in the theoretical immobile area; when the support frame vibrates in the Y direction, the plate area of ​​the first detection comb capacitor changes, resulting in a change in capacitance, and the asymmetric vibration information in the Y direction of the theoretical immobile area is obtained through subsequent processing; The second detection comb capacitor is used to detect asymmetric vibration in the X direction in the theoretical immobile area; when the support frame vibrates in the X direction, the plate spacing of the second detection comb capacitor changes, resulting in a change in capacitance, and the asymmetric vibration information in the X direction of the theoretical immobile area is obtained through subsequent processing.

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