Evaporation device

Abstract

The present invention provides an evaporation device, which includes a heating chamber, a heating electrode and an electrode connection structure. The heating chamber includes a heating cylinder and a heating bottom shell arranged at the bottom of the heating cylinder; the heating electrode is used to provide a heat source for the heating chamber; and the electrode connection structure is used to connect the heating chamber and the heating bottom shell. In an embodiment of the present invention, the heating electrode is arranged on the heating bottom shell of the heating chamber, and the heating electrode is arranged on the heating bottom shell without position interference with the peripheral equipment of the heating chamber, so that it can be installed and removed from the upper opening of the evaporation device, which is conducive to the maintenance and replacement of the heater.

Description

Technical Field

[0001] The present invention relates to the field of evaporation technology, and in particular to an evaporation device. Background Art

[0002] The evaporation device comprises a heater and a heating electrode connected to the heater, the heater is used to heat the evaporated object, and the heating electrode is used to provide a heat source for the heater.

[0003] However, during the use of the evaporation device, since the heating electrode is arranged on the side wall of the heater, it is very inconvenient to disassemble the heater and the heater is easily damaged.

[0004] Therefore, how to improve the above-mentioned problems of the evaporation equipment has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0005] (I) Purpose of the invention

[0006] The object of the present invention is to provide a vapor deposition device which can solve the problem that the vapor deposition device is inconvenient to disassemble.

[0007] (II) Technical solution

[0008] To solve the above problems, according to one aspect of the present invention, the present invention provides an evaporation device, the evaporation device comprising a heating chamber, a heating electrode and an electrode connection structure. The heating chamber comprises a heating cylinder and a heating bottom shell arranged at the bottom of the heating cylinder;

[0009] A heating electrode, the heating electrode is used to provide power to the heating chamber;

[0010] The electrode connection structure is used to connect the heating chamber and the heating bottom shell.

[0011] In an embodiment of the present invention, the heating electrode is arranged on the heating bottom shell of the heating chamber. It is arranged on the heating bottom shell without position interference with the peripheral equipment of the heating chamber, and can be installed and removed from the upper opening of the evaporation equipment, which is beneficial to the maintenance and replacement of the heater.

[0012] Further, along a direction perpendicular to the heating bottom shell, a projection formed by the heating electrode and the electrode connecting structure is located within a projection of the heating bottom shell.

[0013] Furthermore, the connection portion between the heating tube and the heating bottom shell is formed as an arc transition.

[0014] Further, the heating bottom shell is annular;

[0015] There are multiple heating electrodes, and multiple heating electrode arrays are arranged on the heating bottom shell.

[0016] Furthermore, the electrode connection structure is arranged at a distance from a connection portion between the heating tube and the heating bottom shell.

[0017] Furthermore, the electrode connection structure comprises:

[0018] An electrode connecting column connected to the heating chamber, an adjustment hole being formed on the electrode connecting column; wherein one end of the heating electrode is formed to extend into the adjustment hole;

[0019] The adjusting member is used for being adapted and connected with the adjusting hole, and the adjusting member is used for fixing the heating electrode in the adjusting hole.

[0020] Further, the electrode connecting column comprises a column body, and a thread is formed on the column body;

[0021] The column is configured to penetrate the heating bottom shell and extend into the heating chamber, and is threadedly connected to the column by at least one threaded connector to fix the electrode connecting column to the heating chamber.

[0022] Preferably, it also includes:

[0023] A gasket is arranged between the electrode connection structure and the heating chamber.

[0024] Furthermore, the gasket is made of refractory metal.

[0025] Preferably, it also includes:

[0026] The electrode insulating rod sleeve is sleeved on the outer periphery of the heating electrode.

[0027] (III) Beneficial effects

[0028] The above technical solution of the present invention has the following beneficial technical effects:

[0029] 1. The present invention provides an evaporation device, which includes a heating chamber, a heating electrode and an electrode connection structure. The heating chamber includes a heating cylinder and a heating bottom shell arranged at the bottom of the heating cylinder; the heating electrode is used to provide power to the heating chamber; and the electrode connection structure is used to connect the heating chamber and the heating bottom shell. In an embodiment of the present invention, the heating electrode is arranged on the heating bottom shell of the heating chamber, and the heating electrode is arranged on the heating bottom shell without position interference with the peripheral equipment of the heating chamber, so that it can be installed and removed from the upper opening of the evaporation device, which is conducive to the maintenance and replacement of the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a cross-sectional view of the evaporation device provided by the present invention;

[0031] Figure 2is a cross-sectional view of the evaporation device provided by the present invention, wherein the heating electrode is schematically shown in the figure;

[0032] Figure 3 yes Figure 2 A partially enlarged schematic diagram of

[0033] Figure 4 It is a structural schematic diagram provided by the present invention for showing the relative position relationship between the electrode connection structure and the gasket;

[0034] Figure 5 is a structural diagram of a first reflector of the evaporation device provided by the present invention;

[0035] Figure 6 yes Figure 5 a cross-sectional view of a first reflective member;

[0036] Figure 7 It is a partial structural diagram of the evaporation device provided by the present invention;

[0037] Figure 8 yes Figure 7 A partial structural diagram of a vapor deposition device;

[0038] Fig. 9 is a structural diagram of a positioning member provided by the present invention;

[0039] Fig.10 is a cross-sectional view of the positioning member provided by the present invention;

[0040] Fig.11 yes Fig.10 An enlarged schematic diagram of a part of the structure of the positioning member;

[0041] Fig.12 is a structural diagram of the evaporation device provided by the present invention;

[0042] Fig.13 is an exploded view of the evaporation device provided by the present invention;

[0043] Fig.14 is another exploded view of the evaporation device provided by the present invention;

[0044] Fig.15 for Fig.14 A partially enlarged schematic diagram of a vapor deposition device;

[0045] Fig.16 for Fig.15 A cross-sectional view of a vapor deposition device;

[0046] Fig.17 It is a structural diagram of the fixing member provided by the present invention.

[0047] Reference numerals:

[0048] 10. Insulation cylinder; 20. Heating chamber; 30. Fixing part; 40. Insulation part; 50. Support seat; 60. Water cooling jacket; 70. Support seat fixing piece; 80. Electrode-thermocouple connection base; 90. Electrode insulating rod sleeve; 100. Positioning piece; 110. Connection part; 120. Elastic part; 130. Fastening part; 140. Electrode connection structure; 150. Gasket; 160. Heating electrode; 170. Power connector; 21. Heating cylinder; 22. Heating bottom shell; 141. Electrode connection column; 142. Adjustment piece; 1411. Adjustment hole; 1412. Column; 11. Inner cylinder; 1 2. Outer cylinder; 31. Fixing member; 32. Support ring; 41. Bottom shell; 42. Peripheral wall; 51. First connecting member; 52. First reflecting member; 53. Second connecting member; 54. Second reflecting member; 61. Connecting bottom ring; 62. Pipeline; 63. Connecting flange; 64. Protective cover; 65. External electrode; 66. Vacuum thermocouple connector; 67. Thermocouple; 71. Guide plate; 72. Fastener; 131. First limiting member; 132. Second limiting member; 311. Arc-shaped portion; 312. Clamping portion; 521. Insulating layer; 522. Spacer; 523. Reflecting layer; 3111. Clamping hole. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0050] In view of the above technical problems, the present invention proposes the following technical solutions.

[0051] The present invention is described in detail below with reference to the accompanying drawings and embodiments.

[0052] In one embodiment, if Figure 1-17 As shown, the present invention provides an evaporation device, which includes a heating chamber 20, a heating electrode 160 and an electrode connection structure 140. The heating chamber 20 includes a heating cylinder 21 and a heating bottom shell 4122 arranged at the bottom of the heating cylinder 21, the heating electrode 160 is used to provide power to the heating chamber 20, and the electrode connection structure 140 is used to connect the heating chamber 20 and the heating bottom shell 4122.

[0053] In the related art, the electrodes are distributed on the side walls of the heater. Because the electrodes are arranged on the side walls of the heater, there is position interference between the heater and its peripheral equipment. When installing the heater, it is necessary to install it from the bottom of the evaporation device, and the subsequent maintenance and replacement of the equipment are difficult.

[0054] In some embodiments, the heating bottom shell 4122 is formed to extend along the heating cylinder 21 toward the axis of the heating chamber 20. In a direction perpendicular to the heating bottom shell 4122, the projection formed by the heating electrode 160 and the electrode connection structure 140 is located within the projection of the heating bottom shell 4122.

[0055] In an embodiment of the present invention, the heating electrode 160 is arranged on the heating bottom shell 4122 of the heating chamber 20. It is arranged on the heating bottom shell 4122 without position interference with the peripheral equipment of the heating chamber 20, and can be installed and removed from the upper opening of the evaporation equipment, which is beneficial to the maintenance and replacement of the heater.

[0056] In some embodiments, the connection portion 110 between the heating tube 21 and the heating bottom shell 4122 is formed as an arc transition.

[0057] In the embodiment of the present invention, the connection portion 110 between the heating cylinder 21 and the heating bottom shell 4122 is formed as an arc transition, which ensures that the transition portion of the heating chamber 20 will not crack or be damaged, which is beneficial to ensuring the working reliability of the evaporation device.

[0058] In some embodiments, the heating bottom shell 4122 is annular. There are multiple heating electrodes 160, and multiple heating electrodes 160 are arranged in an array on the heating bottom shell 4122. There may be four heating electrodes 160, and the four heating electrodes 160 are arranged in a circular array on the heating bottom shell 4122, and the four heating electrodes 160 are centrally symmetrical.

[0059] In the embodiment of the present invention, on the one hand, the heating electrodes 160 are symmetrically distributed on the heating bottom shell 4122, which can effectively correct the deformation caused by the high temperature of the heating chamber 20 and the position offset during the installation of the heating chamber 20, thereby ensuring the positioning accuracy of the heating chamber 20. On the other hand, the heating electrodes 160 are symmetrically distributed on the heating bottom shell 4122, which can ensure the consistent distance between the heating surface and the internal evaporated material and the uniformity of the heating of the heating chamber 20, thereby effectively ensuring the evaporation rate of the evaporated material and the uniformity of the evaporation.

[0060] Furthermore, the electrode connection structure 140 is arranged at an interval with the connection portion 110 of the heating tube 21 and the heating bottom shell 4122 .

[0061] In the embodiment of the present invention, the electrode connection structure 140 and the connection portion 110 between the heating tube 21 and the heating bottom shell 4122 are arranged at a distance, which can effectively avoid the problem of spark damage at the connection between the heating bottom shell 4122 and the heating electrode 160 caused by the loose fit between the electrode connection structure 140 and the arc portion 311 of the heating chamber 20.

[0062] In one embodiment, the heating electrode 160 is configured to be deformable and is flexibly connected to the electrode connection structure 140 and the external electrode 65 .

[0063] In the embodiment of the present invention, on the one hand, based on the deformable characteristics of the heating electrode 160, the heating electrode 160 can release the stress generated by the heating chamber 20 in a high-temperature working environment, thereby avoiding the problem of damage to the heating chamber 20 due to stress. On the other hand, the heating electrode 160 adopts a soft connection method, which can ensure the close fit between the electrode connection structure 140 and the heating electrode 160, reduce the risk of ignition, and effectively ensure the safety of heating.

[0064] In some embodiments, the heating electrode 160 includes at least two electrode wires, wherein each electrode wire is spirally wound to form the heating electrode 160. Specifically, each electrode wire is spirally wound to form a twist-shaped heating electrode 160.

[0065] In the embodiment of the present invention, the heating electrode 160 includes at least two spirally wound electrode wires, so that the heating electrode 160 has the function of relieving stress, which can ensure the reliability of the evaporation device while ensuring the heating of the heating chamber 20.

[0066] In some embodiments, the material of the heating electrode 160 includes but is not limited to tantalum.

[0067] In the embodiment of the present invention, the melting point of tantalum is as high as 2996°C, and the high temperature resistance is outstanding, and it can be applied to high temperature working environment. In addition, the thermal expansion coefficient of tantalum is very small, and it only expands by 6.6 parts per million for every increase of one degree Celsius. In the high temperature use environment, it can ensure that the structural reliability of the heating electrode 160 is guaranteed while effectively releasing stress.

[0068] Further, the electrode connection structure 140 includes an electrode connection column 141 and an adjustment member 142. The electrode connection column 141 is connected to the heating chamber 20, and an adjustment hole 1411 is formed on the electrode connection column 141. Among them, one end of the heating electrode 160 is formed to extend into the adjustment hole 1411. Specifically, along the axial direction of the electrode connection column 141, a connection hole is formed at the lower end of the electrode connection column 141, and the connection hole is connected to the adjustment hole 1411, and one end of the heating electrode 160 extends into the adjustment hole 1411 through the connection hole. The adjustment member 142 is used to adapt and connect with the adjustment hole 1411, and the adjustment member 142 is used to fix the heating electrode 160 in the adjustment hole 1411.

[0069] In the embodiment of the present invention, the heating electrode 160 is fastened to the adjustment hole 1411 of the electrode connecting column 141 by using the adjustment piece 142, thereby realizing a soft connection between the heating electrode 160 and the electrode connecting structure 140, ensuring a close fit between the electrode connecting structure 140 and the heating electrode 160, reducing the risk of ignition, and effectively ensuring the safety of heating use.

[0070] In some embodiments, the heating chamber 20 includes a heating tube 21 and a heating bottom shell 4122 connected to the heating tube 21. The electrode connection column 141 includes a column 1412, and a thread is formed on the column 1412. The column 1412 is configured to penetrate the heating bottom shell 4122 and extend into the heating chamber 20, and at least one threaded connector is threadedly connected to the column 1412 to fix the electrode connection column 141 to the heating chamber 20. The threaded connector can be a nut.

[0071] In the embodiment of the present invention, the threaded connection between the electrode connection column 141 and the threaded connector is used to realize the detachable connection between the heating electrode 160 and the heating chamber 20, which is beneficial to the later equipment maintenance. Furthermore, the threaded connection between the electrode connection column 141 and the threaded connector makes the electrode connection structure 140 and the heating electrode 160 fit tightly, reducing the risk of ignition and effectively ensuring the safety of heating.

[0072] In some other embodiments, the evaporation device further includes a gasket 150. The gasket 150 is disposed between the electrode connection structure 140 and the heating chamber 20. Specifically, the gasket 150 is disposed between the electrode connection column 141 and the heating bottom shell 4122, and / or the gasket 150 is disposed between the heating bottom shell 4122 and the threaded connector.

[0073] In the embodiment of the present invention, by providing a gasket 150 between the electrode connection column 141 and the heating bottom shell 4122, and / or between the heating bottom shell 4122 and the threaded connector, the connection reliability between the electrode connection structure 140 and the heating chamber 20 can be significantly improved, and the reliability of the evaporation device can be ensured. The gasket 150 is made of a refractory metal, including but not limited to molybdenum, tantalum or tungsten.

[0074] In some embodiments, the evaporation device further includes an electrode insulating rod sleeve 90. The electrode insulating rod sleeve 90 is sleeved on the outer periphery of the heating electrode 160. Specifically, the electrode insulating rod sleeve 90 is disposed at the lower end of the electrode connecting column 141, and the electrode insulating rod sleeve 90 is coaxially arranged with the electrode connecting column 141. The material of the electrode insulating rod sleeve 90 includes but is not limited to aluminum oxide.

[0075] In the embodiment of the present invention, an electrode insulating rod sleeve 90 is sleeved on the heating electrode 160 to protect the heating electrode 160 and prevent the heating electrode 160 from damaging other equipment in the evaporation device when working.

[0076] In some embodiments, the evaporation device further includes a power connector 170 and an electrode-thermocouple connection base 80. The power connector 170 is disposed between the heating electrode 160 and the external electrode 65, and the electrode-thermocouple connection base 80 is used to fix the external electrode 65.

[0077] Furthermore, the power connector 170 is in a U-shaped sheet shape, and the heating electrode 160 and the external electrode 65 are disposed at two opposite ends of the power connector 170 .

[0078] In one embodiment, the evaporation device further includes a first reflector 52. The heating electrode 160 is connected to the bottom of the heating chamber 20, and the first reflector 52 is disposed in the heating chamber 20. The first reflector 52 is formed to cover the connection between the heating electrode 160 and the heating chamber 20. The first reflector 52 includes an insulating layer 521, a spacer 522 and a reflective layer 523. The spacer 522 is configured to space the insulating layer 521 and the reflective layer 523. The reflective layer 523 is used to prevent the heat in the heating chamber 20 from being dissipated from the bottom of the heating chamber 20.

[0079] In the embodiment of the present invention, the first reflector 52 is formed to cover the connection between the heating electrode 160 and the heating chamber 20 (i.e., the electrode connection structure 140 described above), and the first reflector 52 includes an insulating layer 521, a spacer 522, and a reflective layer 523, and the spacer 522 is configured to arrange the insulating layer 521 and the reflective layer 523 in a spaced manner. On the one hand, the reflective layer 523 is used to prevent the heat in the heating chamber 20 from being lost from the bottom of the heating chamber 20. On the other hand, the insulating layer 521 is used to protect the connection between the heating electrode 160 and the heating chamber 20 to prevent the connection between the heating electrode 160 and the heating chamber 20 from being damaged due to the excessively high temperature inside the heating chamber 20. On the other hand, the insulating layer 521 and the reflective layer 523 are arranged in a spaced manner through the spacer 522, which can further reduce the heat conducted from the reflective layer 523 to the insulating layer 521, and further reduce the heat loss in the heating chamber 20.

[0080] Specifically, along a direction from the top of the heating chamber 20 to the bottom of the heating chamber 20 , the reflective layer 523 and the insulating layer 521 are sequentially arranged.

[0081] In some embodiments, the reflective layer 523 is made of tantalum, and the insulating layer 521 is made of pyrolytic boron nitride.

[0082] In the embodiment of the present invention, tantalum is hard and has a hardness of 6-6.5. The melting point of tantalum is as high as 2996°C, and its high temperature resistance is outstanding, so it can be used in high temperature working environments. In addition, the thermal expansion coefficient of tantalum is very small, and it only expands by 6.6 parts per million for every increase of one degree Celsius. In a high temperature use environment, the structural reliability of the reflective layer 523 in the heating chamber 20 can be guaranteed. Furthermore, the insulating layer 521 can not only provide support for the reflective layer 523 through the spacer 522, but also reduce the downward conduction of heat to a certain extent based on the extremely low thermal conductivity of the PBN material.

[0083] In some embodiments, the thickness of the reflective layer 523 is smaller than the thickness of the insulating layer 521 .

[0084] In the embodiment of the present invention, on the one hand, the reflective layer 523 has a smaller thickness dimension than the insulating layer 521, so that the reflective layer 523 can prevent the heat in the heating chamber 20 from being lost while avoiding accumulating more heat itself, so as to limit the heat conducted from the reflective layer 523 to the insulating layer 521. On the other hand, by configuring the insulating layer 521 to have a larger thickness dimension than the reflective layer 523, the insulating layer 521 can effectively support the reflective layer 523, and at the same time, based on the extremely low thermal conductivity of the PBN material, further reduce the downward conduction of heat.

[0085] In some embodiments, along the direction from the top of the heating chamber 20 to the bottom of the heating chamber 20 , the projection of the reflective layer 523 is located within the projection of the insulating layer 521 .

[0086] In the embodiment of the present invention, the projection of the reflective layer 523 is located within the projection of the insulating layer 521, so that the insulating layer 521 has a larger area relative to the reflective layer 523, thereby ensuring that the insulating layer 521 effectively supports the reflective layer 523 while enabling the insulating layer 521 to better seal the bottom of the heating chamber 20, effectively preventing the heat in the heating chamber 20 from being dissipated from the bottom of the heating chamber 20.

[0087] In order to ensure the connection reliability between the reflective layer 523 and the insulating layer 521, in some embodiments, the number of spacers 522 is multiple, and the multiple spacers 522 are arranged between the reflective layer 523 and the insulating layer 521. The multiple number of spacers 522 includes but is not limited to being arranged at equal intervals or unequal intervals. Furthermore, the spacers 522 are hollowed out to further reduce the heat conducted from the reflective layer 523 to the insulating layer 521.

[0088] In some embodiments, the evaporation device further includes a heat preservation tube 10 and a heat preservation portion 40 . The heat preservation tube 10 is sleeved on the outer periphery of the heating chamber 20 , and the heat preservation portion 40 is disposed at the bottom end of the heat preservation tube 10 .

[0089] In the embodiment of the present invention, by disposing a heat preservation tube 10 on the periphery of the heating chamber 20 and a heat preservation part 40 at the bottom end of the heating chamber 20, the heat preservation effect of the heating chamber 20 can be significantly improved, and the serious heat loss problem of the evaporation device can be improved.

[0090] Preferably, the evaporation device further includes a second connecting member 53. One end of the second connecting member 53 is connected to the heat preservation part 40, and the other end of the second connecting member 53 is connected to the first reflecting member 52, wherein the first reflecting member 52 is configured to be formed in the heating chamber 20 through the second connecting member 53, and the second connecting member 53 is formed to be hollowed out.

[0091] In the embodiment of the present invention, the first reflector 52 can be reliably fastened to the heat preservation part 40 by using the second connecting member 53, and the second connecting member 53 arranged between the first reflector 52 and the heat preservation part 40 is hollowed out, which can reduce the heat conducted from the second connecting member 53 to the heat preservation part 40 and reduce the heat loss in the heating chamber 20.

[0092] In some embodiments, the evaporation device further includes a first connecting member 51 and a second reflecting member 54. One end of the first connecting member 51 is connected to the heat preservation part 40, and the second reflecting member 54 is connected to the first connecting member 51. The second reflecting member 54 is configured to be fixed between the bottom end of the heating chamber 20 and the heat preservation part 40 through the first connecting member 51.

[0093] In the embodiment of the present invention, the second reflector 54 is fixed between the bottom end of the heating chamber 20 and the heat preservation part 40 by using the first connecting member 51, which can further improve the heat preservation effect of the bottom of the heating chamber 20 to reduce the heat loss of the evaporation device.

[0094] Furthermore, along the axial direction of the heat-insulating tube 10 , the projection of the heat-insulating tube 10 is located within the projection of the second reflective member 54 .

[0095] In the embodiment of the present invention, the projection of the insulation tube 10 is located within the projection of the second reflector 54, so that the second reflector 54 has a sufficiently large area, thereby effectively blocking the heat generated at the bottom of the heating chamber 20, preventing heat loss, and improving the insulation effect of the evaporation device.

[0096] In one embodiment, the evaporation device further includes a fastening portion 130 and a positioning member 100. The fastening portion 130 is used to connect the heat preservation tube 10 and the heating chamber 20. The heat preservation tube 10 includes an inner tube 11 and an outer tube 12 disposed on the outer periphery of the inner tube 11. The positioning member 100 is used to position the relative position between the inner tube 11 and the outer tube 12.

[0097] In the embodiment of the present invention, the present invention sets a positioning piece 100 to limit the relative position between the inner cylinder 11 and the outer cylinder 12, which can effectively solve the problem that the inner cylinder 11 is easy to fall off during the use of the evaporation device, thereby ensuring the normal use of the evaporation equipment, improving the practicality of the evaporation equipment, meeting the user's usage needs, and improving the user's usage experience.

[0098] In some embodiments, the positioning member 100 is disposed between the inner cylinder 11 and the outer cylinder 12. The positioning member 100 is configured to generate elastic force between the inner cylinder 11 and the outer cylinder 12 to position the relative position between the inner cylinder 11 and the outer cylinder 12. The outer cylinder 12 is fixed to a support seat of the evaporation device.

[0099] In the embodiment of the present invention, the outer cylinder 12 is fixed to the support base of the evaporation device, and the positioning member 100 is arranged between the inner cylinder 11 and the outer cylinder 12, and the positioning member 100 is configured to generate an elastic force between the inner cylinder 11 and the outer cylinder 12, so that an interaction force is formed between the inner cylinder 11 and the outer cylinder 12, thereby positioning the relative positions of the inner cylinder 11 and the outer cylinder 12 to prevent the inner cylinder 11 from falling off the outer cylinder 12.

[0100] In some other embodiments, the positioning member 100 is integrally connected to the inner cylinder 11. The positioning member 100 includes but is not limited to being formed on the inner cylinder 11 by welding.

[0101] In the embodiment of the present invention, the positioning member 100 and the inner cylinder 11 are integrally formed, which can significantly improve the structural firmness of the positioning member 100 and the inner cylinder 11 , thereby ensuring the positioning reliability between the inner cylinder 11 and the outer cylinder 12 .

[0102] In some further embodiments, the positioning member 100 is annular in shape, is sleeved on the outer wall of the inner tube 11 , and is disposed on the top of the inner tube 11 .

[0103] In the embodiment of the present invention, on the one hand, the annular positioning member 100 can position the inner cylinder 11 and the outer cylinder 12 in the circumferential direction, thereby significantly improving the positioning reliability between the inner cylinder 11 and the outer cylinder 12; on the other hand, the positioning member 100 is arranged on the inner cylinder 11 and the top, which can facilitate the disassembly of the inner cylinder 11 and the outer cylinder 12 and ensure the flexibility of use of the thermal insulation cylinder 10.

[0104] Specifically, the positioning member 100 includes a connecting portion 110 and an elastic portion 120 connected to the connecting portion 110, the connecting portion 110 is connected to the inner cylinder 11, and the elastic portion 120 is used to abut against the outer cylinder 12. According to the matching installation of the inner cylinder 11 and the outer cylinder 12, the elastic force generated by the positioning member 100 located between the inner cylinder 11 and the outer cylinder 12 acts on the outer cylinder 12.

[0105] Furthermore, one end of the connecting portion 110 is connected to one end of the elastic portion 120 to form an arc-shaped portion. When the inner cylinder 11 and the outer cylinder 12 are matched and installed, the arc-shaped portion is installed at the top end of the inner cylinder 11. The other ends of the connecting portion 110 and the elastic portion 120 corresponding to each other are formed to extend into the gap between the inner cylinder 11 and the outer cylinder 12. The arc-shaped portion is formed between the inner cylinder 11 and the outer cylinder 12 and provides elastic force. The other end of the elastic portion 120 away from the arc-shaped portion abuts against the outer wall of the inner cylinder 11, and a certain interval is formed between the other end of the connecting portion 110 and the elastic portion 120.

[0106] In the embodiment of the present invention, on the one hand, one end of the connecting portion 110 is connected to one end of the elastic portion 120 and forms an arc-shaped portion, which can generate elastic force when the inner cylinder 11 and the outer cylinder 12 are matched and installed, so as to be used for positioning the inner cylinder 11 and the outer cylinder 12. On the other hand, the end of the elastic portion 120 away from the arc-shaped portion abuts against the outer wall of the inner cylinder 11, which can further prevent the inner cylinder 11 from falling off, and realize the double positioning effect of the inner cylinder 11 and the outer cylinder 12 by using the positioning member 100. Furthermore, a certain interval is formed between the connecting portion 110 and the elastic portion 120, which can meet the positioning requirements of different interval sizes between the inner cylinder 11 and the outer cylinder 12, and has the characteristics of high flexibility in use.

[0107] In some embodiments, there are multiple elastic portions 120 , and the multiple elastic portions 120 are disposed at intervals on the connecting portion 110 .

[0108] In the embodiment of the present invention, a plurality of elastic portions 120 can significantly improve the positioning effect of the positioning member 100 on the inner cylinder 11 and the outer cylinder 12 , thereby ensuring the positioning reliability of the inner cylinder 11 and the outer cylinder 12 .

[0109] Furthermore, the material of the positioning member 100 is tantalum.

[0110] In some embodiments, the fastening portion 130 includes a first stopper 131 and a second stopper 132. The first stopper 131 is connected to the inner cylinder 11, the second stopper 132 is connected to the first stopper 131, and the second stopper 132 is connected to the outer wall of the heating chamber 20.

[0111] Furthermore, a mounting hole is formed on the inner cylinder 11, and the first limiting member 131 includes an arcuate portion and a clamping portion connected to the arcuate portion, the arcuate portion is formed to extend into the interior of the inner cylinder 11 through the mounting hole, and the clamping portion is configured to be clamped with the outer wall of the inner cylinder 11 through the mounting hole; wherein the arcuate portion of the first limiting member 131 is formed with a clamping hole, and the second limiting member 132 is clamped with the clamping hole to be fixedly connected with the first limiting member 131.

[0112] In the embodiment of the present invention, on the one hand, the heating chamber 20 is fixedly connected to the heat preservation tube 10 through the fixed connection between the first limit member 131 and the second limit member 132, so that the heating chamber 20 is supported by the inner tube 11, thereby ensuring the positioning reliability of the heating chamber 20.

[0113] Furthermore, the second limiting member 132 is in the shape of an annular sheet, a plurality of mounting holes are formed on the inner cylinder 11 , and a plurality of first limiting members 131 are provided, and the second limiting member 132 is connected to a plurality of first limiting members 131 .

[0114] In the embodiment of the present invention, a plurality of mounting holes are formed on the inner cylinder 11, and a plurality of first limiting members 131 are provided. The second limiting members 132 are connected to the plurality of first limiting members 131, thereby realizing the circumferential positioning of the inner cylinder 11 on the heating chamber 20, and significantly improving the positioning effect of the heating chamber 20.

[0115] In some embodiments, there are multiple second stoppers 132, and along the axial direction of the heating chamber 20, multiple second stoppers 132 are spaced apart and arranged on the outer wall of the heating chamber 20. A plurality of mounting holes are formed on the inner cylinder 11 at positions corresponding to the positions of each second stopper 132, each mounting hole is adapted to mount a first stopper 131, and each second stopper 132 is connected to a plurality of first stoppers 131.

[0116] In the embodiment of the present invention, by arranging a plurality of second limit members 132 at intervals on the outer wall of the heating chamber 20, and each second limit member 132 is connected to a plurality of first limit members 131, the supporting effect of the inner cylinder 11 on the heating chamber 20 can be significantly improved, thereby ensuring the structural stability of the heating chamber 20.

[0117] In some embodiments, the evaporation device further includes a fixing portion 30, and the fixing portion 30 includes a fixing member 31 and a support ring 32. The fixing member 31 is connected to the inner cylinder 11, and the support ring 32 is connected to the fixing member 31, and the support ring 32 is used to support the heating chamber 20.

[0118] Further, a mounting hole is formed on the inner cylinder 11, and the fixing member 31 includes an arcuate portion 311 and a clamping portion 312 connected to the arcuate portion 311, the arcuate portion 311 is formed to extend into the inner cylinder 11 through the mounting hole, and the clamping portion 312 is configured to clamp with the outer wall of the inner cylinder 11 through the mounting hole. The arcuate portion 311 is formed with a clamping hole 3111, and the support ring 32 is clamped with the clamping hole 3111 to be fixedly connected with the fixing member 31.

[0119] In some embodiments, the support ring 32 is coaxially arranged with the heating chamber 20 and the insulation tube 10, the outer diameter of the support ring 32 is smaller than the inner diameter of the insulation tube 10, the outer diameter of the support ring 32 is larger than the outer diameter of the heating chamber 20, and the inner diameter of the support ring 32 is smaller than the outer diameter of the heating chamber 20.

[0120] In the embodiment of the present invention, on the one hand, the heating chamber 20 is fixedly connected to the heat preservation tube 10 by the fixed connection between the fixing member 31 and the support ring 32, and the support ring 32 is used to support the heating chamber 20, thereby ensuring the reliability of the positioning of the heating chamber 20. On the other hand, by limiting the inner and outer diameters of the support ring 32, it is possible to reduce the contact area between the support ring 32 and the inner wall of the heat preservation tube 10 while ensuring that the heating chamber 20 is effectively supported by the support ring 32, thereby further reducing the heat in the heating chamber 20 from being transferred to the heat preservation tube 10 through the support ring 32, thereby reducing the heat loss in the heating chamber 20.

[0121] Further, there are a plurality of fixing members 31, and the plurality of fixing members 31 are arranged at intervals on the inner cylinder 11, and the support ring 32 is connected to the plurality of fixing members 31. It should be noted that the interval arrangement includes an equal interval arrangement or an unequal interval arrangement.

[0122] In the embodiment of the present invention, a plurality of fixing members 31 are arranged inside the heat preservation tube 10 , and the support ring 32 is configured to be connected to the plurality of fixing members 31 , thereby effectively ensuring the connection reliability between the heating chamber 20 and the heat preservation tube 10 .

[0123] In one embodiment, the evaporation device further includes a support seat 50. The outer wall of the heating chamber 20 and the inner wall of the heat preservation tube 10 are arranged to be spaced apart by the fixing portion 30, and the heat preservation portion 40 and the support seat 50 of the evaporation device are spaced apart. It can be understood that in the embodiment of the present invention, the evaporation device is a ceramic evaporation device, that is, the material of the heating chamber 20 is ceramic.

[0124] In the embodiment of the present invention, the outer wall of the heating chamber 20 and the inner wall of the insulation tube 10 are configured to be spaced apart by the fixing portion 30, and the insulation portion 40 and the support seat 50 of the evaporation device are spaced apart, which greatly reduces the contact area between the heating chamber 20 and the insulation tube 10 and between the heating chamber 20 and the support seat 50, and can prevent the heat in the heating chamber 20 from being transferred due to direct contact between the heating chamber 20 and the insulation tube 10, and between the heating chamber 20 and the support seat 50, thereby effectively reducing the heat loss in the heating chamber 20, and indirectly reducing the power consumption of the evaporation device, effectively saving production costs.

[0125] In other embodiments, the evaporation device further includes a water cooling jacket 60, a support seat fixing member 70 and a connecting flange 63. The water cooling jacket 60 is sleeved on the outer wall of the heat preservation cylinder 10, and the support seat fixing member 70 is used to fix the water cooling jacket 60 to the support seat 50. Among them, the support seat 50 is configured to be spaced apart from the heat preservation part 40 through the support seat fixing member 70, and the support seat fixing member 70 can be multiple.

[0126] Specifically, the evaporation device further includes a pipeline 62; the water cooling jacket 60 is sleeved on the outer wall of the heat preservation tube 10, the electrode-thermocouple connection base 80 is adapted to be connected with the connection flange 63, and the pipeline 62 is connected between the water cooling jacket 60 and the connection flange 63. In the axial direction of the heat preservation tube 10, the bottom end of the water cooling jacket 60 is formed to extend out of the bottom end of the heat preservation tube 10.

[0127] Further, the support seat fixing member 70 includes a guide plate 71 and a fastener 72, the guide plate 71 is detachably fixed to the bottom end of the water cooling jacket 60, and the fastener 72 is used to connect the guide plate 71 with the support seat 50, so that the support seat 50 is fixedly connected with the water cooling jacket 60. The fastener 72 includes but is not limited to a bolt, and threaded holes are correspondingly formed on the guide plate 71, the support seat 50 and the water cooling jacket 60, and the fastener 72 is fastened to the threaded hole by threaded connection.

[0128] In the embodiment of the present invention, along the axial direction of the insulation tube 10, the bottom end of the water-cooling jacket 60 is formed to extend out of the bottom end of the insulation tube 10, and the support seat 50 is fixed to the bottom end of the water-cooling jacket 60 by the support seat fixing member 70, and the support seat 50 is spaced apart from the insulation part 40 through this arrangement, thereby effectively avoiding direct contact between the support seat 50 and the insulation part 40, preventing heat loss inside the heating chamber 20, and reducing the energy consumption of the evaporation device.

[0129] Furthermore, the insulating column of the heating electrode 160 is configured to pass through the support base 50 and connect to the bottom end of the heating chamber 20 , and the aperture of the through hole is larger than the diameter of the heating electrode 160 .

[0130] In an embodiment of the present invention, the aperture of the through hole on the support seat 50 is larger than the diameter of the insulating column of the heating electrode 160, so that a gap is formed between the support seat 50 and the insulating column of the heating electrode 160, so that the heat transferred by the insulating column of the heating electrode 160 will not be directly transferred to the support seat 50, further reducing the heat loss in the heating chamber 20 and reducing the energy consumption of the evaporation device.

[0131] In some other embodiments, the support seat 50 is circular, the support seat 50 and the water cooling jacket 60 are arranged coaxially, and the radial dimension of the support seat 50 is smaller than the radial dimension of the water cooling jacket 60, and the insulation part 40 is configured to be fixed to the bottom end of the insulation tube 10 through a first connecting member 51.

[0132] In the embodiment of the present invention, the radial dimension of the support seat 50 is limited to be smaller than the radial dimension of the water-cooling jacket 60, so that a gap is formed between the outer wall of the support seat 50 and the inner wall of the water-cooling jacket 60, thereby avoiding direct contact between the support seat 50 and the water-cooling jacket 60. As a result, the internal heat of the evaporation device will not be transferred to the water-cooling jacket 60 through the support seat 50, thereby effectively reducing the heat loss in the evaporation device.

[0133] Specifically, the water cooling jacket 60 includes a connecting bottom ring 61 , and the evaporation device further includes a shield 64 . The connecting bottom ring 61 is located at the bottom of the water cooling jacket 60 , and the shield 64 is disposed at the bottom of the water cooling jacket 60 . The shield 64 covers the connecting bottom ring 61 .

[0134] The connection flange 63 is connected to the electrode-thermocouple connection base 80. The connection flange 63 is used to fix the evaporation device to the external device. The electrode-thermocouple connection base 80 is penetrated by an external electrode 65 and a vacuum thermocouple joint 66. There is a pipeline 62 on the connection flange 63. One end of the pipeline 62 is connected to the connection bottom ring 61. The upper side of the connection bottom ring 61 is provided with a water cooling jacket 60. The coolant in the pipeline 62 enters the water cooling jacket 60 through the connection bottom ring 61 for circulation and cooling, so as to achieve the effect of regulating the temperature in the evaporation device. Among them, the pipeline 62 itself plays a certain role in supporting and circulating the coolant.

[0135] Furthermore, the support seat 50 is disposed on the inner side of the connecting bottom ring 61 , and the support seat 50 is used to support the heat preservation tube 10 and the heating chamber 20 .

[0136] Further, one end of the thermocouple 67 is connected to the vacuum thermocouple joint 66 , and the other end of the thermocouple 67 is formed to extend into the heating chamber 20 . The thermocouple 67 is used to measure the actual temperature in the heating chamber 20 .

[0137] In some embodiments, the first reflective member 52 is configured to be spaced apart from the bottom end of the heating chamber 20 through the second connecting member 53 , and the first reflective member 52 is a circular sheet structure.

[0138] Specifically, the second reflector 54 is configured to be fixed between the bottom end of the heating chamber 20 and the heat preservation part 40 through the first connecting member 51. It should be understood that the second reflector 54 is fixed between the bottom end of the heating chamber 20 and the heat preservation part 40, which can be understood as a gap between the second reflector 54 and the bottom end of the heating chamber 20 and the heat preservation part 40.

[0139] The second reflector 54 is a circular sheet structure, and is arranged coaxially with the heating chamber 20 and the heat preservation tube 10 through the first connecting member 51. Further, the radial dimension of the second reflector 54 is greater than the radial dimension of the heating chamber 20.

[0140] In the embodiment of the present invention, by arranging the second reflector 54 between the heating chamber 20 and the heat preservation part 40, the heat in the heating chamber 20 can be effectively prevented from being lost from the bottom of the heating chamber 20. The second reflector 54 is arranged at intervals from the heating chamber 20 and the heat preservation part 40, respectively, to avoid heat loss caused by the heat in the heating chamber 20 being transferred to the heat preservation part 40 through the second reflector 54. Furthermore, by limiting the radial dimension of the second reflector 54 to be larger than the radial dimension of the heating chamber 20, the second reflector 54 can cover the bottom of the heating chamber 20 to the maximum extent, thereby effectively preventing the loss of heat in the heating chamber 20, lowering the working temperature of the heating chamber 20, and reducing the power consumption of the evaporation device.

[0141] In some embodiments, the second reflective member 54 includes a reflective layer close to the heating chamber 20 and an insulating layer connected to the reflective layer, wherein the reflective layer is made of tantalum and the insulating layer is made of PBN.

[0142] In other embodiments, the heat preservation part 40 includes a bottom shell 41 and a peripheral wall 42 connected to the bottom shell 41. The heat preservation cylinder 10 includes an inner cylinder 11, a positioning member and an outer cylinder 12, and the inner cylinder 11 and the outer cylinder 12 are fixedly connected by the positioning member. Among them, the mounting hole is formed in the inner cylinder 11, the bottom shell 41 is configured to be fixed in the heat preservation cylinder 10 through the first connecting member 51, the peripheral wall 42 is connected to the inner wall surface of the outer cylinder 12, and the fixed connection can be performed by welding, and the upper end surface of the bottom shell 41 is abutted against the bottom end of the inner cylinder 11.

[0143] It should be understood that the above specific embodiments of the present invention are only used to illustrate or explain the principles of the present invention, and do not constitute a limitation of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. In addition, the appended claims of the present invention are intended to cover all changes and modifications that fall within the scope and boundaries of the appended claims, or the equivalent forms of such scope and boundaries.

Claims

1. A vapor deposition device, characterized in that: include: A heating chamber (20), the heating chamber (20) comprising a heating cylinder (21) and a heating bottom shell (22) arranged at the bottom of the heating cylinder (21), the heating bottom shell (22) being annular; A heating electrode (160), wherein the number of the heating electrodes (160) is plural, and the plurality of heating electrodes (160) are arranged in an array on the heating bottom shell (22), and the heating electrode (160) is used to provide power for the heating chamber (20); The electrode connection structure (140) is used to connect the heating chamber (20) and the heating bottom shell (22); the heating electrode (160) is configured to be deformable and is flexibly connected to the electrode connection structure (140) and the external electrode (65); the heating electrode (160) comprises at least two electrode wires, wherein each electrode wire is spirally wound to form a twisted heating electrode (160); A first reflective member (52) is disposed in the heating chamber (20), the first reflective member (52) being formed to cover the connection between the heating electrode (160) and the heating chamber (20); the first reflective member (52) is configured to be formed in the heating chamber (20) through a second connecting member (53); wherein the first reflective member (52) comprises an insulating layer (521), a spacer (522) and a reflective layer (523), the spacer (522) being configured to arrange the insulating layer (521) and the reflective layer (523) at intervals; the reflective layer (523) is used to prevent heat in the heating chamber (20) from being lost from the bottom of the heating chamber (20), and the insulating layer (521) is used to protect the connection between the heating electrode (160) and the heating chamber (20); The heat-insulating cylinder (10) is sleeved on the outer periphery of the heating chamber (20), and the heat-insulating portion (40) is arranged at the bottom end of the heat-insulating cylinder (10); one end of the second connecting member (53) is connected to the heat-insulating portion (40), and the other end of the second connecting member (53) is connected to the first reflecting member (52), wherein the first reflecting member (52) is configured to be formed in the heating chamber (20) through the second connecting member (53), and the second connecting member (53) is formed to be hollow; The water cooling jacket (60) is sleeved on the outer wall of the heat preservation tube (10), and the support seat fixing member (70) is used to fix the water cooling jacket (60) and the support seat (50) to each other; wherein the support seat (50) is configured to be spaced apart from the heat preservation portion (40) via the support seat fixing member (70).

2. The evaporation device according to claim 1, characterized in that Along a direction perpendicular to the heating bottom shell (22), a projection formed by the heating electrode (160) and the electrode connection structure (140) is located within a projection of the heating bottom shell (22).

3. The evaporation device according to claim 1, characterized in that The connection portion between the heating cylinder (21) and the heating bottom shell (22) is formed as an arc transition.

4. The evaporation device according to claim 1, characterized in that The electrode connection structure (140) is arranged at intervals from the connection parts of the heating cylinder (21) and the heating bottom shell (22).

5. The evaporation device according to claim 1, characterized in that The electrode connection structure (140) comprises: An electrode connection column (141) is connected to the heating chamber (20), and an adjustment hole (1411) is formed on the electrode connection column (141); wherein one end of the heating electrode (160) is formed to extend into the adjustment hole (1411); An adjusting member (142) is used for being adapted to be connected with the adjusting hole (1411), and the adjusting member (142) is used to fix the heating electrode (160) in the adjusting hole (1411).

6. The evaporation device according to claim 5, characterized in that: The electrode connection column (141) comprises a column (1412), and a thread is formed on the column (1412); The column (1412) is configured to penetrate the heating bottom shell (22) and extend into the heating chamber (20), and is threadedly connected to the column (1412) using at least one threaded connector to fix the electrode connecting column (141) to the heating chamber (20).

7. The evaporation device according to claim 1, characterized in that Also includes: A gasket (150) is arranged between the electrode connection structure (140) and the heating chamber (20).

8. The evaporation device according to claim 7, characterized in that: The gasket (150) is made of refractory metal.

9. The evaporation device according to claim 1, characterized in that: Also includes: The electrode insulating rod sleeve (90) is sleeved on the outer circumference of the heating electrode (160).

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