A laser rotary cutting system and method

Abstract

The application discloses a laser rotary cutting system and a rotary cutting method. The rotary cutting system comprises a laser, a wedge-shaped mirror group, a focusing mirror and an angle adjusting mirror. The wedge-shaped mirror group is arranged downstream of the light path transmission of the laser, and is used for making the light beam perform a translation movement. The focusing mirror is arranged downstream of the light path transmission of the focusing mirror, and is used for focusing the light beam. The angle adjusting mirror is arranged in the light path between the wedge-shaped mirror group and the laser, or is arranged in the light path between the focusing mirror and the wedge-shaped mirror group. The angle adjusting mirror is used for adjusting the flight angle of the light after passing through the angle adjusting mirror, and the angle adjusting mirror and the wedge-shaped mirror group rotate synchronously. The rotary cutting method adopts the rotary cutting system. The application has the advantages of simple structure and convenient adjustment.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser processing, in particular to a laser rotary cutting system and a rotary cutting method. BACKGROUND

[0002] The laser drilling device uses different optical devices and working principles inside, and can be divided into a galvanometer scanning drilling system, a three-prism rotary scanning drilling system and a Dove prism rotary scanning drilling system.

[0003] The galvanometer scanning drilling system is the most mature drilling system, has a large processing range and is easy to control. However, due to the limitation of mechanical resolution, the galvanometer scanning system is difficult to precisely process micro-holes with a diameter less than 0.2 mm.

[0004] The three-prism rotary scanning drilling system needs to ensure the synchronous rotation of the three prisms and accurately control the relative angle between the prisms. If the control precision is not good, it will affect the roundness and taper of the drilling, which requires high rotation control precision of the motor, and the algorithm for controlling the radius and taper of the drilling is very complex, for example, the disclosure of Chinese patent application No. CN103056519A.

[0005] The manufacturing and installation errors of the Dove prism will have a great influence on the roundness and taper of the drilling, so a complex compensation optical system is needed to compensate for the manufacturing and installation errors of the system. This not only greatly increases the volume and weight of the system, but also increases the manufacturing difficulty and production cost of the system. For example, the disclosure of US patent No. US7842901B2. SUMMARY

[0006] The technical problem to be solved by the present application is to solve at least one of the problems mentioned above.

[0007] The solution to the technical problem of the present application is:

[0008] A rotary cutting system, comprising a laser, a wedge-shaped mirror group, a focusing mirror and an angle adjusting mirror; the wedge-shaped mirror group is arranged downstream of the light path transmission of the laser, and is used for making the light beam move in translation; the focusing mirror is arranged downstream of the light path transmission of the focusing mirror, and is used for focusing the light beam; the angle adjusting mirror is arranged in the light path between the wedge-shaped mirror group and the laser, or in the light path between the focusing mirror and the wedge-shaped mirror group; the angle adjusting mirror is used for adjusting the flight angle of the light after passing through the angle adjusting mirror, and the angle adjusting mirror and the wedge-shaped mirror group rotate synchronously.

[0009] As a further improvement of the above technical solution, the angle adjusting mirror is a reflecting mirror or a beam splitter.

[0010] As a further improvement of the above technical solution, the angle adjustment mirror is arranged between the wedge-shaped mirror group and the laser, a quarter wave plate is arranged between the angle adjustment mirror and the wedge-shaped mirror group, a PBS beam splitter prism is arranged between the quarter wave plate and the wedge-shaped mirror group, the laser is arranged upstream of the PBS beam splitter prism, and the optical path transmission is in sequence of laser, PBS beam splitter prism, quarter wave plate, angle adjustment mirror, quarter wave plate, PBS beam splitter prism, wedge-shaped mirror group, and focusing mirror.

[0011] As a further improvement of the above technical solution, the PBS beam splitter prism comprises two PBS three-prism, the cross section of the PBS three-prism is a right triangle, and the two PBS three-prisms are spliced into a cuboid.

[0012] As a further improvement of the above technical solution, the angle adjustment mirror is arranged between the focusing mirror and the wedge-shaped mirror group, the angle adjustment mirror is a beam splitter, the beam splitter is used for reflecting part of the light to the focusing mirror, the remaining light passes through the beam splitter, a detector is arranged on the side of the beam splitter, and the detector is used for detecting the position and angle of the light passing through the beam splitter.

[0013] As a further improvement of the above technical solution, the wedge-shaped mirror group comprises two identical wedge-shaped mirrors, the two wedge-shaped mirrors are arranged in central symmetry, and the two wedge-shaped mirrors rotate synchronously with the angle adjustment mirror.

[0014] As a further improvement of the above technical solution, the distance between the two wedge-shaped mirrors is adjustable.

[0015] As a further improvement of the above technical solution, the laser is a pulse laser.

[0016] The application further provides a rotary cutting method using the rotary cutting system, step 1, determining the processing cone angle and the punching radius of the rotary cutting and punching, so that the focusing mirror is directed to the position of the punching; step 2, adjusting the wedge-shaped mirror group and the angle adjustment mirror respectively, so that the wedge-shaped mirror group and the angle adjustment mirror rotate synchronously, the angle adjustment mirror is a reflecting mirror, and the wedge-shaped mirror group comprises two wedge-shaped mirrors in central symmetry; and step 3, turning on the laser.

[0017] As a further improvement of the above technical solution, the punching radius is R, the R=f*tanβ1=f*tan2w, the f is the focal length of the focusing mirror, the β1 is the exit angle of the reflected light beam of the mirror, and the w is the inclination angle of the mirror; the processing cone angle is θ, the θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R) / f], wherein L1 is the distance between the mirror and the nearest wedge-shaped mirror, L2 is the distance between the two wedge-shaped mirrors, the distance between the wedge-shaped mirror and the focusing mirror, R is the punching radius, f is the focal length of the focusing mirror; the angle between the wedge-shaped mirror exit light and the optical axis is β2, the β2=arcsin[n2sin[α-arcsin[sin(α+β1) / n2]]], wherein n2 is the refractive index of the wedge-shaped mirror, and α is the wedge angle of the wedge-shaped mirror.

[0018] The beneficial effects of the present application are that the rotary cutting system in the present application is different from the multiple optical wedges driving the laser rotation in the conventional technology, the rotary cutting system of the present application realizes driving the laser rotation through the rotation of the angle adjusting mirror, effectively reduces the weight and volume of the rotating object, and makes the laser rotation speed faster and the processing precision higher.

[0019] The rotary cutting method in the present application applies the above rotary cutting system, which is simple in operation and structure, and is convenient for users to adjust parameters. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly described below. Obviously, the described drawings are only a part of the embodiments of the present application, not all the embodiments, and those skilled in the art can obtain other design schemes and drawings according to these drawings without creative labor.

[0021] Figure 1 is a schematic view of the angle adjusting mirror in the present application being arranged in the optical path between the wedge-shaped mirror group and the laser;

[0022] Figure 2 is a schematic view of the angle adjusting mirror in the present application being arranged in the optical path between the focusing mirror and the wedge-shaped mirror;

[0023] Figure 3 is a schematic view of the embodiment of the present application simultaneously using the mirror and the beam splitter.

[0024] In the drawings: 1-laser, 2-wedge-shaped mirror, 3-PBS beam splitter prism, 4-focusing mirror, 5-mirror, 6-beam splitter, 7-detector. DETAILED DESCRIPTION

[0025] The concept, specific structure and generated technical effects of the present application will be clearly and completely described below in combination with the embodiments and drawings, so as to fully understand the purposes, features and effects of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, but not all the embodiments, and other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative labor are within the protection scope of the present application. In addition, all the coupling / connection relationships mentioned in the present application do not mean that the components are directly connected, but that a better coupling structure can be formed by adding or reducing coupling accessories according to the specific implementation. The technical features in the present application can be combined with each other as long as they do not conflict with each other.

[0026] In the present application, Figure 1 、 Figure 2 and Figure 3 , the line segment connecting the laser 1 represents a laser light ray.

[0027] As shown in Figure 1 , a rotary cutting system comprises a laser 1, a wedge mirror group, a focusing mirror 4 and an angle adjusting mirror; the wedge mirror group is arranged downstream of the light path transmission of the laser 1, and is used for making the light beam perform translational motion; the focusing mirror 4 is arranged downstream of the light path transmission of the focusing mirror, and is used for focusing the light beam; the angle adjusting mirror is arranged in the light path between the wedge mirror group and the laser 1; the angle adjusting mirror is used for adjusting the flight angle of the light ray after passing through the angle adjusting mirror, and the angle adjusting mirror and the wedge mirror group are synchronously rotated.

[0028] In the present embodiment, the laser generated by the laser 1 passes through the angle adjusting mirror, the wedge mirror group and the focusing mirror 4 in sequence. The user can adjust the angle of the laser emitted from the angle adjusting mirror by adjusting the angle adjusting mirror, so as to adjust the diameter of the laser hole. The user can also adjust the path of the laser flight by adjusting the wedge mirror group, which is very convenient to adjust. At the same time, the angle adjusting mirror and the wedge mirror group can be coaxially driven synchronously, so that the laser light can rotate 360° to realize the function of rotary cutting.

[0029] In use, in order to adjust the exit angle of the light ray from the angle adjusting mirror, the user can tilt the angle adjusting mirror, so as to change the scanning radius of the light beam on the machining surface. The synchronous rotation of the angle adjusting mirror and the wedge mirror group can realize the high-speed scanning of the light beam on the machining surface.

[0030] Optionally, the angle adjusting mirror is a reflecting mirror 5 or a beam splitter 6. Preferably, in the present embodiment, the angle adjusting mirror is a reflecting mirror 5. The reflecting mirror 5 is light and its incident angle and reflection angle are easy to adjust.

[0031] Preferably, the diameter of the mirror 5 is 15mm, and the speed of the mirror 5 and the wedge mirror group is 1000-48000r / min.

[0032] Further, the angle adjustment mirror is the mirror 5, which is arranged between the wedge mirror group and the laser 1, and a quarter wave plate is arranged between the angle adjustment mirror and the wedge mirror group, and the PBS prism 3 is arranged between the quarter wave plate and the wedge mirror group, and the laser 1 is arranged upstream of the PBS prism 3, and the light path transmission is in sequence of the laser 1, the PBS prism 3, the quarter wave plate, the angle adjustment mirror, the quarter wave plate, the PBS prism 3, the wedge mirror group, and the focusing mirror 4.

[0033] The PBS prism is used, so that the laser beam can be vertically incident on the angle adjustment mirror, so that the size of the angle adjustment mirror used can be smaller, and the mass and volume are smaller, and high-speed rotation is easier to achieve.

[0034] If the PBS prism is not used, the angle between the laser incident on the angle adjustment mirror and the angle adjustment mirror is generally about 30-60°, so the area of the angle adjustment mirror needs to be relatively larger, but this embodiment does not need to use the PBS prism and the quarter wave plate, which reduces the loss of laser energy and saves equipment.

[0035] In use, the quarter wave plate can rotate linearly polarized light, and after the incident linearly polarized light passes through the quarter wave plate, the phase difference between the outgoing light and the incident light is delayed by π / 2, and one period is 2π. After the laser passes through the quarter wave plate twice, the phase of the laser is delayed by π, so that the laser can finally completely transmit through the PBS polarizing beam splitter. The PBS polarizing beam splitter can totally reflect the linearly polarized laser emitted by the laser 1 onto the angle adjustment mirror, and the angle adjustment mirror in this embodiment is preferably the mirror 5. After the laser is reflected by the mirror 5, it passes through the quarter wave plate and finally completely transmits through the PBS polarizing beam splitter to reach the wedge mirror group, so that the energy of the laser generated by the laser 1 can be more completely preserved.

[0036] Of course, in actual use, the PBS prism 3 and the quarter wave plate can also not be used, and the laser can also be directly emitted by the laser 1 to the mirror 5. In this embodiment, when the mirror 5 is rotated, the normal line of the mirror 5 is not collinear with the axis of rotation of the mirror.

[0037] In addition, the PBS polarizing beam splitter and the quarter wave plate are arranged outside the angle adjustment mirror, which greatly reduces the weight that the driving assembly needs to drive when the angle adjustment mirror moves, and more effectively improves the precision.

[0038] The PBS light splitting prism 3 comprises two PBS triangular prisms, the cross section of the PBS triangular prisms is a right triangle, and the two PBS triangular prisms are spliced into a cuboid. The structure is simple and convenient to set. Preferably, the PBS light splitting prism 3 is a polarization light splitting prism, and the length, width and height of the PBS light splitting prism 3 are 10*10*10mm to 20*20*20mm. Optionally, the PBS light splitting prism 3 is made of quartz or ordinary glass material.

[0039] As shown in Figure 2 As an optional additional embodiment, the rotary cutting system comprises a laser 1, a wedge mirror group, a focusing mirror, and an angle adjusting mirror. The wedge mirror group is arranged downstream of the light path transmission of the laser 1, and is used for translational movement of the light beam. The focusing mirror 4 is arranged downstream of the light path transmission of the focusing mirror, and is used for focusing the light beam. The angle adjusting mirror is arranged in the light path between the focusing mirror 4 and the wedge mirror group. The angle adjusting mirror is used for adjusting the flight angle of the light after passing through the angle adjusting mirror, and the angle adjusting mirror and the wedge mirror group rotate synchronously.

[0040] In the embodiment, the angle adjusting mirror is arranged between the focusing mirror 4 and the wedge mirror 2, which is different from the above-mentioned embodiment in which the angle adjusting mirror is arranged between the wedge mirror group and the laser 1. However, both of them can adjust the radius of the rotary cutting and punching by adjusting the inclination angle of the angle adjusting mirror.

[0041] In the embodiment, preferably, the angle adjusting mirror and the wedge mirror group are respectively driven by different motors, but preferably, the two motors rotate synchronously.

[0042] Optionally, the angle adjusting mirror is a reflecting mirror 5 or a light splitting mirror 6, and preferably, the light splitting mirror 6 is used in the embodiment.

[0043] Further, the angle adjusting mirror is arranged between the focusing mirror 4 and the wedge mirror group, the angle adjusting mirror is a light splitting mirror 6, the light splitting mirror 6 is used for reflecting a part of the light to the focusing mirror 4, and the remaining light passes through the light splitting mirror 6. A detector 7 is arranged beside the light splitting mirror 6, and the detector 7 is used for detecting the position and angle of the laser passing through the light splitting mirror 6. In the embodiment, the angle adjusting mirror uses the light splitting mirror 6, so that the user can arrange the detector 7 on the back of the light-incident surface of the light splitting mirror 6, detect the position and angle of the laser incident on the light splitting mirror 6 through the detector 7, and then judge whether the position of the light is accurate, and further judge the accuracy of the rotary cutting through the result of the detector 7. The user can form a negative feedback through the arrangement of the detector 7, and adjust the position of the angle adjusting mirror and the wedge mirror group according to the result of the feedback, so as to effectively improve the machining accuracy of the laser rotary cutting.

[0044] Further, as shown in Figure 3As shown, the skilled in the art can also use the following embodiments, the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge-shaped mirror 2, and is arranged between the wedge-shaped mirror group and the laser mirror, in this case, the angle adjustment mirror between the wedge-shaped mirror group and the laser mirror is a reflecting mirror 5, the reflecting mirror 5 rotates synchronously with the wedge-shaped mirror group, the reflecting mirror 5 is used for adjusting the exit angle of the laser emitted from the laser 1, so that the radius of the rotary cutting and punching can be adjusted, the angle adjustment mirror between the focusing mirror 4 and the wedge-shaped mirror 2 is a beam splitter 6, the beam splitter 6 is a lens, the beam splitter 6 is used for partially reflecting the light beam emitted from the wedge-shaped mirror group, and the remaining part passes through the beam splitter 6.

[0045] Optionally, the beam splitter 6 can transmit 1%-10% of light, that is, 1%-10% of the laser passes through the beam splitter 6, and the remaining laser is reflected onto the focusing mirror.

[0046] The user can set a detector 7 at the back of the beam splitter 6, the detector 7 is used for detecting the position of the light incident on the beam splitter 6, and ensuring the position accuracy of the laser transmission movement before the beam splitter 6. The user can also monitor the laser in real time through the detector 7, so as to form negative feedback in time and ensure the machining precision.

[0047] In some embodiments, the focusing mirror 4 is made of quartz material or optical glass material, and the focal length is optionally between 50mm and 100mm. In actual use, the longer the focal length of the focusing mirror 4, the larger the scanning radius of the laser on the machining surface, and vice versa.

[0048] Optionally, the laser 1 is a pulse laser 1, which can generate nanosecond, picosecond or femtosecond pulse width, and the wavelength can be 300nm to 1100nm, preferably between 355nm and 1064nm. More preferably, the laser 1 generates linearly polarized infrared laser with a wavelength of 1064nm, a pulse width of 300-350fs and a diameter of 2-6mm.

[0049] In some embodiments, which can be any of the above embodiments, the wedge-shaped mirror group includes two identical wedge-shaped mirrors 2, the two wedge-shaped mirrors 2 are arranged to be central symmetric to each other, and the two wedge-shaped mirrors 2 rotate synchronously with the angle adjustment mirror. The two wedge-shaped mirrors 2 have the same specification parameters, the two wedge-shaped mirrors 2 are placed in opposite directions, and the downstream wedge-shaped mirror 2 is used to correct the change of the angle of the incident light by the upstream wedge-shaped mirror 2, so that the angle of the light emitted by the downstream wedge-shaped mirror 2 is the same as the angle of the light reflected by the reflecting mirror 5.

[0050] Preferably, the wedge-shaped mirror 2 is made of quartz material or optical glass material, and the outer diameter is optionally 10mm to 30mm, the thickness is 3mm to 8mm, and the wedge angle is 6° to 12°. The user can select the specifications of the wedge-shaped mirror 2 according to the actual situation.

[0051] In some embodiments, the distance between the two wedge-shaped mirrors 2 is adjustable. By changing the relative distance between the two wedge-shaped mirrors 2, the change of the hole drilling taper can be achieved.

[0052] In some embodiments, the relative positions between the mirror 5, the quarter wave plate, the PBS polarizing beam splitter prism and the wedge-shaped mirror 2 upstream are fixed, and the user can install them on a movable platform which can be translated left and right along the optical axis. By moving the platform, the relative positions between the wedge-shaped mirror 2 upstream and the wedge-shaped mirror 2 downstream can be changed, so that the light beam is offset along the optical axis, and the change of the hole drilling taper can be achieved.

[0053] In some embodiments, the laser 1 is a pulse laser 1, and a beam expander can be further arranged at the output end of the laser.

[0054] The application further provides a drilling method using the drilling system in any of the above embodiments. Step 1: determining the processing taper angle and the hole drilling radius of the drilling, and making the focusing mirror 4 face the drilling position; Step 2: adjusting the wedge-shaped mirror group and the angle adjustment mirror respectively, and making the wedge-shaped mirror group and the angle adjustment mirror rotate synchronously; Step 3: turning on the laser 1.

[0055] Optionally, the angle adjustment mirror is the mirror 5, and the wedge-shaped mirror group includes two wedge-shaped mirrors 2 which are central symmetric to each other.

[0056] The method can use the above drilling system, and the drilling system has been described in words. Those skilled in the art should be able to understand it by combining with the drawings, and thus the drilling system will not be described here.

[0057] Further, the hole drilling radius is R, the R=f*tanβ1=f*tan2w, the f is the focal length of the focusing mirror 4, the β1 is the exit angle of the reflected light beam of the mirror, and the w is the inclination angle of the mirror 5; the processing taper angle is θ, the θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R) / f], wherein the L1 is the distance between the mirror 5 and the nearest wedge-shaped mirror 2, the L2 is the distance between the two wedge-shaped mirrors 2, the distance between the wedge-shaped mirror 2 and the focusing mirror 4, the R is the hole drilling radius, and the f is the focal length of the focusing mirror 4; the included angle between the exit light ray of the wedge-shaped mirror 2 and the optical axis is β2, and the β2=arcsin[n2sin[α-arcsinsinα+β1n2], wherein the n2 is the refractive index of the wedge-shaped mirror 2, and the α is the wedge angle of the wedge-shaped mirror 2.

[0058] Through the method, the user can adjust the exit angle of the mirror 55, the L1 and the L2 according to the parameters of the hole to be processed, and in addition, for different specifications of the hole, the user can also adjust the focal length of the focusing mirror 4 by replacing different focusing mirrors 4, and adjust the wedge angle by replacing different wedge mirrors 2, so that the adjustment of the light is very convenient.

[0059] It has been verified through experiments that in actual use, the hole processing diameter and the hole taper range of the present application have high processing precision, can realize the processing of a hole diameter of 0.01mm-5mm, and can realize the processing of a taper hole of ±7°. For example, the processing of a zero-taper hole is realized, and the principle is that the outside of the light focused by the focusing mirror 4 rotates to cut the inner wall of the hole in the depth direction of the hole, thereby forming a zero-taper hole.

[0060] The preferred embodiments of the present application are described above, but the present application is not limited to the described embodiments, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the present application, and these equivalent modifications or replacements are all included in the scope defined by the claims of the present application.

Claims

1. A helical cutting method applying a helical cutting system, comprising a laser (1), characterized in that, Also include: The wedge-shaped mirror group is arranged in the light path transmission downstream of the laser (1), and is used for translational movement of the light beam; The focusing mirror (4) is arranged in the light path transmission downstream of the focusing mirror, and is used for focusing the light beam; The angle adjusting mirror is arranged in the light path between the wedge-shaped mirror group and the laser (1), and is arranged in the light path between the focusing mirror (4) and the wedge-shaped mirror group; The angle adjusting mirror is used for adjusting the flight angle of the light after passing through the angle adjusting mirror, and the angle adjusting mirror and the wedge-shaped mirror group rotate synchronously; The angle adjusting mirror is a reflecting mirror (5) or a beam splitter (6); The reflecting mirror (5) is arranged between the wedge-shaped mirror group and the laser (1), a quarter wave plate is arranged between the reflecting mirror (5) and the wedge-shaped mirror group, a PBS beam splitter prism (3) is arranged between the quarter wave plate and the wedge-shaped mirror group, the laser (1) is arranged upstream of the PBS beam splitter prism (3), and the light path transmission is laser (1), PBS beam splitter prism (3), quarter wave plate, reflecting mirror (5), quarter wave plate, PBS beam splitter prism (3), wedge-shaped mirror group, focusing mirror (4) in sequence; The PBS beam splitter prism (3) includes two PBS three prisms, the cross section of the PBS three prism is a right triangle, and the two PBS three prisms are spliced into a cuboid; The beam splitter (6) is arranged between the focusing mirror (4) and the wedge-shaped mirror group, and is used for reflecting part of the light to the focusing mirror (4); a detector (7) is arranged beside the beam splitter (6), and is used for detecting the position and angle of the light passing through the beam splitter (6); The wedge-shaped mirror group includes two identical wedge-shaped mirrors (2), the two wedge-shaped mirrors (2) are arranged in central symmetry, and the two wedge-shaped mirrors (2) rotate synchronously with the angle adjusting mirror; The distance between the two wedge-shaped mirrors (2) is adjustable; the relative positions of the reflecting mirror (5), the quarter wave plate, the PBS polarization beam splitter prism and the upstream wedge-shaped mirror (2) are fixed, the user installs them on a movable platform, translates left and right along the optical axis direction, changes the relative positions of the upstream wedge-shaped mirror (2) and the downstream wedge-shaped mirror (2) through the movable platform, so that the light beam is offset along the optical axis direction, and the change of the hole taper is realized; The laser (1) is a pulse laser (1); the output end of the laser (1) is provided with a beam expander; The rotary cutting method comprises: Step 1, determining the processing taper angle and hole radius of rotary cutting, so that the focusing mirror (4) is directed to the position of the hole; step 2, adjusting the wedge-shaped mirror group and the angle adjusting mirror respectively, so that the wedge-shaped mirror group and the angle adjusting mirror rotate synchronously, the angle adjusting mirror is a reflecting mirror (5), the wedge-shaped mirror group includes two wedge-shaped mirrors (2) in central symmetry; step 3, turning on the laser (1); The punching radius is R, the , the is the focal length of the focusing mirror, the is the exit angle of the reflected light beam of the mirror, the is the tilt angle of the mirror; the processing cone angle is , the , wherein L1 is the distance between the mirror and the nearest wedge-shaped mirror, L2 is the distance between the two wedge-shaped mirrors, and L3 is the distance between the wedge-shaped mirror and the focusing mirror, is the punching radius, is the focal length of the focusing mirror; the included angle between the wedge-shaped mirror exit light and the optical axis is , the , wherein is the refractive index of the wedge-shaped mirror, is the wedge angle of the wedge-shaped mirror.

Images