Soft X-ray static removal device

Abstract

The present invention provides a soft X-ray type static electricity removal device that increases the amount of ionized air released with a simple structure. The soft X-ray type static electricity removal device (1) comprises: a soft X-ray generating device (90) that generates soft X-rays (92); a container (10) that allows ionized air (100) ionized by the soft X-rays to flow out from an outlet (12); a soft X-ray shielding plate (20) that is used at the outlet of the container; and an insulating layer (50) that insulates the soft X-ray shielding plate from the container, wherein the soft X-ray shielding plate (20) comprises: a first outer layer plate (30) formed of a material that does not allow the soft X-rays to pass through, an intermediate layer plate (34 ) and a second outer plate (40), an ionized air supply port (32) is formed on the first outer plate, an ionized air passage (38) is formed on the intermediate plate, the ionized air passage (38) has an ionized air inlet opening (36) connected to the supply port, an exhaust port (42) connected to the ionized air passage is formed on the second outer plate, and the soft X-ray shielding plate has an ionized air passage portion (44), and the ionized air passage portion (44) is arranged in a manner that the supply port, the ionized air passage and the exhaust port are connected.

Description

Technical Field

[0001] The present invention relates to a soft X-ray type static electricity removal device, and in particular to a soft X-ray type static electricity removal device that releases a large amount of ions. Background Art

[0002] In the past, it is known that in the manufacturing process of semiconductors, liquid crystals, and organic ELs, the surfaces of semiconductor substrates, liquid crystal substrates, and organic EL substrates are charged with static electricity through the processing and treatment process of the substrates, and the circuits of the semiconductor substrates, liquid crystal substrates, and organic EL substrates are damaged by the static electricity. In addition, the charging of each substrate also causes the problem of dust adhering to the surface.

[0003] As a countermeasure for such failures, semiconductor, liquid crystal, and organic EL manufacturing equipment is provided with an electrostatic removal device that generates ions to prevent the substrate surface from being charged and remove static electricity. The electrostatic removal device includes a corona discharge type electrostatic removal device that ionizes the air using a high voltage, and a soft X-ray type electrostatic removal device that ionizes the air by irradiating the air with soft X-rays.

[0004] In a corona discharge type static eliminator, particles are generated from the electrode during discharge, whereas in a soft X-ray type static eliminator, particles are not generated, but if soft X-rays leak, they can affect the human body, so each has its own drawbacks.

[0005] Therefore, a soft X-ray type static removal device that only takes out ionized air without leaking soft X-rays to the outside has been developed, but the structure is complicated. Therefore, the inventor first proposed a soft X-ray shielding plate, in which the soft X-rays incident from the supply port collide with the passage at least three times before reaching the discharge port, thereby preventing the straight-forward nature of the soft X-rays, causing the soft X-rays to attenuate and disappear, and preventing the soft X-rays from leaking from the discharge port with a simple structure (Patent Document 1).

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: International Publication No. WO2008 / 023727 Summary of the invention

[0009] However, as semiconductors and the like become increasingly thinner, there is a need to further increase the amount of ionized air released, and there is also a need to adjust the amount of positive ions / negative ions. Therefore, the subject of the present invention is to provide a soft X-ray type static eliminator that further increases the amount of ionized air released with a simple structure. Furthermore, the subject of the present invention is to provide a soft X-ray type static eliminator that can adjust the amount of positive ions / negative ions released.

[0010] In order to solve the above-mentioned problems, a soft X-ray type static eliminator 1 according to a first embodiment of the present invention is provided. Figure 1 and Figure 2 As shown, it includes: a soft X-ray generating device 90, which generates soft X-rays 92 for ionizing air 102; a container 10, which allows the ionized air 100 ionized by the soft X-rays 92 to flow out from an outlet 12; a soft X-ray shielding plate 20, which is used at the outlet 12 of the container 10; and an insulating layer 50, which insulates the soft X-ray shielding plate 20 and the container 10, and the soft X-ray shielding plate 20 includes: a first outer plate 30 formed of a material that does not allow the soft X-rays 92 to pass, an intermediate plate 34 formed of a material that does not allow the soft X-rays 92 to pass, and a second outer plate 35 formed of a material that does not allow the soft X-rays 92 to pass. The second outer layer plate 40 is formed, a supply port 32 for ionized air 100 is formed on the first outer layer plate 30, an ionized air passage 38 is formed on the middle layer plate 34, the ionized air passage 38 has an ionized air inlet opening 36 connected to the supply port 32, an exhaust port 42 connected to the ionized air passage 38 is formed on the second outer layer plate 40, and the soft X-ray shielding plate 20 has an ionized air passage portion 44, and the ionized air passage portion 44 is arranged in a manner that the first outer layer plate 30, the middle layer plate 34 and the second outer layer plate 40 are stacked and fixedly connected and the supply port, the ionized air passage and the exhaust port are connected.

[0011] With such a structure, soft X-rays can be used to ionize the air, and the soft X-ray shielding plate can be used to allow the ionized air to pass through and block the soft X-rays. Moreover, since the soft X-ray shielding plate is insulated from the container, the ionized air will not be captured by the soft X-ray shielding plate, and the amount of released ionized air will increase.

[0012] The soft X-ray type static eliminator 1 according to the second embodiment of the present invention is, for example, Figure 3 As shown, a bend 39 is provided in the ionized air passage 38 from the supply port 32 to the exhaust port 42. With such a structure, since the ionized air passage for the ionized air to flow has a bend, the number of collisions between the soft X-rays and the passage increases in order to pass through the ionized air passage, making it difficult for the soft X-rays to pass through.

[0013] The soft X-ray type static eliminator 1 according to the third aspect of the present invention is, for example, Figure 1 As shown, the insulating layer 50 is formed of ceramic. With such a structure, since the insulating layer is formed of ceramic, it is difficult to be degraded by soft X-rays.

[0014] The soft X-ray type static eliminator 1 according to the fourth aspect of the present invention is, for example, Figure 5As shown, the soft X-ray shielding plate 20 has a circular cross section, and the insulating layer 50 has a plurality of arc-shaped ceramics 52 arranged so as to surround the outer periphery of the soft X-ray shielding plate 20. With such a structure, since the insulating layer has a plurality of arc-shaped ceramics, it is difficult to be degraded by soft X-rays and is difficult to be broken during manufacturing and use.

[0015] The soft X-ray type static eliminator 1 according to the fifth aspect of the present invention is, for example, Figure 1 As shown, there is also a power supply device 60 for applying a potential difference between the container 10 and the soft X-ray shielding plate 20. With such a structure, since a potential difference can be applied between the container and the soft X-ray shielding plate, the amount of positive ions / negative ions can be adjusted.

[0016] The soft X-ray type static eliminator 1 according to the sixth aspect of the present invention is, for example, Figure 1 and Figure 5 As shown, there is also a housing 55, which is arranged at the outlet 12 of the container 10 by holding the insulating layer 50, and the insulating layer 50 and the soft X-ray shielding plate 20 are arranged at the outlet 12, and there is a gap 56 between the housing 55 and the soft X-ray shielding plate 20. With such a structure, it is difficult for soft X-rays to leak from between the housing and the soft X-ray shielding plate.

[0017] According to the soft X-ray type static removal device of the present invention, the air is ionized by soft X-rays, and the soft X-ray shielding plate can be used to block the soft X-rays by allowing the ionized air to pass through, and since the soft X-ray shielding plate is insulated from the container, the amount of ionized air released can be increased. In addition, by applying a potential difference between the container and the soft X-ray shielding plate, the amount of positive ions / negative ions released can be adjusted.

[0018] This application is based on patent application No. 2019-092937 filed in Japan on May 16, 2019, the contents of which constitute a part of the present application.

[0019] In addition, the present invention can be more completely understood by the following detailed description. However, the detailed description and specific embodiments are preferred embodiments of the present invention and are recorded only for the purpose of illustration. Based on the detailed description, various changes and modifications are obvious to those skilled in the art.

[0020] The applicant does not intend to dedicate any disclosed embodiment to the public, and even if some disclosed improvements and alternatives are not literally within the scope of the claims, they are still considered to be part of the present invention under the doctrine of equivalents.

[0021] In the description of this specification or claims, the use of nouns and similar indicators should be interpreted as including both the singular and the plural, unless otherwise indicated or explicitly denied by the context. The use of any illustrative or exemplary terms (such as "etc.") provided in this specification is only for the purpose of easily explaining the intention of the present invention, and does not limit the scope of the present invention unless otherwise specifically stated in the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a conceptual diagram for explaining the soft X-ray type static eliminator of the present invention.

[0023] Figure 2 This is a cross-sectional view for explaining the ionized air passage portion of the soft X-ray shielding plate used in the soft X-ray type static eliminator.

[0024] Figure 3 This is an exploded perspective view of a soft X-ray shielding plate for explaining an ionized air passage portion of the soft X-ray shielding plate used in a soft X-ray type static eliminator.

[0025] Figure 4 These are diagrams for illustrating the soft X-ray shielding plate and insulating layer used in the soft X-ray static removal device. (a) is a cross-sectional view of a surface perpendicular to the flow direction of ionized air, and (b) is a side view observed from the flow direction of ionized air.

[0026] Figure 5 These are diagrams for explaining an insulating layer according to one embodiment, wherein (a) is a cross-sectional view taken along a plane perpendicular to the flow direction of ionized air, and (b) is an AA cross-sectional view.

[0027] Figure 6 This is a diagram showing a soft X-ray type static eliminator used to experiment on the effect of the insulating layer of the soft X-ray type static eliminator.

[0028] Figure 7 This is a conceptual diagram for explaining a conventional soft X-ray type static eliminator.

[0029] Description of Reference Numerals

[0030] Main reference numerals used in this specification and the drawings are summarized and shown below.

[0031] 1 Soft X-ray static removal device

[0032] 10 Container

[0033] 12 Exit

[0034] 20 Soft X-ray shielding sheet

[0035] 30 1st outer layer

[0036] 31 Inner side surface of the first outer layer plate 30

[0037] 32 Supply port

[0038] 34 Intermediate layer board

[0039] 36 Ionized air inflow opening

[0040] 37 Curved surface

[0041] 38 Ionized air passage

[0042] 39 Bending part

[0043] 40 2nd outer layer

[0044] 41 Inner surface of the second outer layer

[0045] 42 Exhaust

[0046] 44 Ionized air passage

[0047] 50 Insulation layer

[0048] 52 Arc-shaped ceramic

[0049] 54 Soft X-ray blocking plate

[0050] 55 Shell of soft X-ray shielding sheet

[0051] 56 Gap

[0052] 60 Power supply unit

[0053] 90 Soft X-ray Generator

[0054] 92 Soft X-ray

[0055] 100 Ionized air

[0056] 102 Air

[0057] 201 Conventional soft X-ray static elimination device

[0058] 210 Ground wire

[0059] 212 Potential (flow) DETAILED DESCRIPTION

[0060] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, in each figure, the same reference numerals are given to the same or corresponding devices, and repeated descriptions are omitted. Figure 1, the soft X-ray type static elimination device 1 of the present invention is described.

[0061] The soft X-ray type static removal device 1 has a container 10, which provides a space for ionizing air and for the ionized air, i.e., ionized air 100, to flow. The container 10 has an air intake port 14 for sucking air 102 into the container 10. The air intake port 14 may also have a fan to forcibly suck the air 102 outside the container 10 into the container 10. A soft X-ray generator 90 is arranged near the position where the air intake port 14 is set in the container 10. Soft X-rays 92 are generated from the soft X-ray generator 90 and irradiate the air in the container 10, thereby ionizing the air. The soft X-ray generator 90 can be a well-known soft X-ray device, so a detailed description is omitted. An outlet 12 for the ionized air 100 is formed at a position far from the position where the air intake port 14 is set in the container 10. When the soft X-ray generator 90 is arranged near the air inlet 14 and the outlet 12 is arranged at a position away from the air inlet 14, air flows from the air inlet 14 to the outlet 12, and the air can be ionized by the soft X-rays 92 from the soft X-ray generator 90, and the ionized air 100 is released from the outlet in a short time, so it is preferred, but other configurations are also possible. In addition, the container 10 is usually formed of stainless steel or other metals.

[0062] The soft X-ray shielding plate 20 is disposed at the outlet 12 . That is, the ionized air 100 passes through the soft X-ray shielding plate 20 when being released from the container 10 .

[0063] Here, refer to Figure 2 and Figure 3 Next, the ionized air passage portion 44 of the soft X-ray shielding plate member 20 through which the ionized air 100 passes will be described. Figure 2 is a cross-sectional view of the vicinity of the ionized air passage portion 44 of the soft X-ray shielding plate 20, Figure 3: is its exploded stereogram. The soft X-ray shielding plate 20 is formed by stacking and fixing three plates, namely, a first outer plate 30 formed of a material that does not allow the soft X-rays 92 to pass through, an intermediate plate 34 formed of a material that does not allow the soft X-rays 92 to pass through, and a second outer plate 40 formed of a material that does not allow the soft X-rays 92 to pass through. Here, the material that does not allow the soft X-rays to pass through is represented by metals such as lead, iron, and aluminum, but is not limited to metals. If it is a metal, it can block the passage of soft X-rays 92 even if it is very thin, and it is easy to form a thin film, which is suitable for the soft X-ray shielding plate 20. In addition, the stacking and fixing method is not particularly limited. The first outer plate 30 is provided with a supply port 32 for the ionized air 100 in the container 10 to enter the soft X-ray shielding plate 20. The intermediate plate 34 is provided with an ionized air passage 38, and the ionized air passage 38 has ionized air inlet openings 36 at both ends thereof. The second outer plate 40 is provided with an exhaust port 42 for releasing the ionized air 100 to the outside of the container 10 .

[0064] In this embodiment, two supply ports 32 of the first outer layer plate 30 are respectively opened in the first outer layer plate 30 at intervals. The ionized air passage 38 of the intermediate layer plate 34 has ionized air inlet openings 36 respectively opened at positions communicating with the supply ports 32 of the first outer layer plate 30, and is formed in a manner communicating with each ionized air inlet opening 36. The discharge port 42 of the second outer layer plate 40 is opened at a position communicating with the ionized air passage 38 of the intermediate layer plate 34.

[0065] When the first outer layer plate 30, the intermediate layer plate 34, and the second outer layer plate 40 formed as described above are stacked and fixed, each supply port 32 of the first outer layer plate 30 is connected to each ionized air inlet opening 36 of the intermediate layer plate 34, and further, at the center position of the ionized air passage 38 of the intermediate layer plate 34, the ionized air passage 38 is connected to the exhaust port 42 of the second outer layer plate 40, forming an ionized air passage 44. The soft X-ray shielding plate 20 may be formed with one ionized air passage 44, or may be formed with a plurality of ionized air passages 44.

[0066] The ionized air passage 38 is provided with a bending portion 39 that is bent 90 degrees on a plane, so that the number of times the soft X-rays 92 collide with the inner side surface 41 of the second outer layer plate 40 and the inner side surface 31 of the first outer layer plate 30 during the period from the supply port 32 to the exhaust port 42 increases, causing the soft X-rays 92 to attenuate and disappear.

[0067] In addition, in order to reduce the fluid resistance of the ionized air 100, each bend 39 of the ionized air passage 38 is formed in a manner having a curved surface 37, so as to suppress the fluid resistance of the ionized ionized air 100 and reach the exhaust port 42 in a short time, thereby suppressing the recombination of positive ions and negative ions. That is, the ionized air passage 38 has at least one bend 39 bent 90 degrees on the plane, and the soft X-ray 92 collides with the inner side surface, that is, the passage, causing the soft X-ray 92 to disappear. In addition, the shape of the ionized air passage 38 can also be other shapes. It is preferably a shape that increases the number of times the soft X-ray 92 collides with the passage and suppresses the fluid resistance of the ionized air 100.

[0068] based on Figure 2 The function of the soft X-ray shielding plate 20 used in the soft X-ray type static removal device 1 of the present invention having the above-mentioned structure will be described. In the container 10 on the upstream side of the soft X-ray shielding plate 20, the ionized air 100 ionized into positive ions and negative ions by the soft X-rays 92 is in a pressurized state because the air 102 is sent into the container 10. Therefore, the ionized air 100 is discharged from the supply port 32 to the downstream side of the soft X-ray shielding plate 20 from the discharge port 42 after passing through the ionized air inlet opening 36 and the ionized air passage 38.

[0069] On the other hand, the soft X-rays 92 enter from each supply port 32 and travel straight, and from the ionized air inlet opening 36 through the ionized air passage 38 to the exhaust port 42, as shown in FIG. Figure 2 As shown, the soft X-ray 92 collides with the inner side surface 41 of the second outer layer plate 40, the inner side surface 31 of the first outer layer plate 30, or the curved surface 37 of the bent portion 39, and is prevented from advancing straightly. Due to the collision with the inner side surfaces 31, 41, etc., the soft X-ray 92 is attenuated and eventually substantially disappears, so that the dangerous soft X-ray 92 does not leak from the exhaust port 42. In order to make the soft X-ray 92 attenuate and substantially disappear, it is preferred that it collides with the inner side surfaces 31, 41, etc. more than three times. Therefore, the size and length of the cross section of the ionized air passage 44, the number of bent portions 39, that is, the path of the ionized air passage 38, etc. are designed. In addition, the number of plates constituting the soft X-ray shielding plate 20 may be not three, but four or more.

[0070] Furthermore, the ionized air 100 introduced from the supply port 32 reaches the exhaust port 42 through the ionized air passage 38. By setting the bent portion 39 of the ionized air passage 38 provided from the viewpoint of preventing the leakage of the soft X-rays 92 to the curved surface 37, the fluid resistance is reduced, and the ionized air 100 can reach the exhaust port 42 in a short time. In particular, it is preferred that the ionized air 100 can pass through the soft X-ray shielding plate 20 in a short time to suppress the recombination of positive ions and negative ions, thereby shortening the path of the ionized air passing portion 44. Therefore, a large amount of ions are released from the exhaust port 42 to the downstream side.

[0071] In addition, Figure 2 and Figure 3 In the case of the soft X-ray shielding plate 20 shown, there are two supply ports 32 and one exhaust port 42, but the ionized air 100 flowing from two directions through the ionized air passage 38 collides at the exhaust port 42, thereby enabling the ionized air 100 from the exhaust port 42 to be ejected vertically.

[0072] However, if Figure 7 As shown, in the conventional soft X-ray type static eliminator 201, the container 10 is electrically connected to the soft X-ray shielding plate 20. Furthermore, the grounding wire 210 is connected to the container 10, and the potential 212 from the container 10 and the soft X-ray shielding plate 20 flows to the ground. Therefore, the ionized air 100 is captured by the soft X-ray shielding plate 20, and the amount of the ionized air 100 passing through the soft X-ray shielding plate 20 tends to decrease.

[0073] Therefore, if Figure 1 and Figure 4 As shown, in the soft X-ray type static eliminator 1 , the container 10 and the soft X-ray shielding plate 20 are insulated by the insulating layer 50 . Figure 4 The soft X-ray shielding plate material 20 shown has a circular cross section and is formed with a plurality of ionized air passages 44. An insulating layer 50 is disposed on the outer periphery of the circular shape.

[0074] Figure 5An example of an insulating layer 50 is shown in FIG. Three arc-shaped ceramics 52 are arranged on the outer circumference of the circular soft X-ray shielding plate 20. In addition to ceramics, there are insulating materials such as plastics, but if irradiated with soft X-rays, they will deteriorate and produce powder. If ceramics are used, they are less likely to deteriorate even if irradiated with soft X-rays, so they are preferred. In addition, it is also possible to use an annular ceramic covering the outer circumference of the soft X-ray shielding plate 20, but since ceramics are brittle materials, there is a possibility of cracking during manufacturing or use. Therefore, instead of using a single annular component to cover the entire circumference, a plurality of arc-shaped ceramics 52 are used. In addition, soft X-rays 92 penetrate ceramics. Therefore, in order to prevent the soft X-rays 92 from penetrating the annular insulating layer 50 covering the outer circumference of the soft X-ray shielding plate 20 and leaking, the outer shell 55 of the soft X-ray shielding plate 20 (see Figure 6 ) covers the annular insulating layer 50. The outer shell 55 is usually formed of a material of the same material as the container 10, such as stainless steel. Here, the outer shell 55 is constructed to cover the soft X-ray shielding plate 20 in a manner having a narrow gap 56 (for example, a gap of 0.5 mm and a width of 2 mm in the radial direction). The gap 56 insulates the soft X-ray shielding plate 20 from the outer shell 55. In addition, by making the gap 56 narrower and longer, that is, making the width in the radial direction larger than the gap, it is possible to prevent the soft X-rays 92 from passing through the soft X-ray shielding plate 20 and the outer shell 55. Specifically, the shape of the gap 56 is such that if the soft X-rays 92 want to pass through the gap 56, they will collide with the soft X-ray shielding plate 20 and the outer shell 55 more than three times. Therefore, the straight-forward nature of the soft X-rays 92 is prevented, and this is because they are attenuated and disappear due to collisions with the outer edge of the outer shell 55 or the soft X-ray shielding plate 20. As the outer shell 55 of the soft X-ray shielding plate 20, such as Figure 5 (a) shows a structure in which a circular ring with a cross section in the shape of a Japanese character "コ" is used, and a circular arc-shaped ceramic 52 is accommodated in the "コ" character, which makes it easy to process the insulating layer 50, so it is preferred. Figure 5 In the embodiment, arc-shaped ceramics 52 obtained by dividing a circle into three equal parts are used, but the number of the arc-shaped ceramics 52 is arbitrary.

[0075] The container 10 and the soft X-ray shielding plate 20 are insulated by the insulating layer 50, so that when ions are captured by the soft X-ray shielding plate 20 at the initial stage of operation, the soft X-ray shielding plate 20 has the potential (positive or negative) of the captured ions, and then ions with the same potential (positive or negative) are not captured and pass through the soft X-ray shielding plate 20. Therefore, the ionized air 100 released by passing through the soft X-ray shielding plate 20 increases.

[0076] Furthermore, since the insulation is provided by the insulating layer 50, a potential difference can be applied to the container 10 and the soft X-ray shielding plate 20. Figure 1 As shown, there is a power supply device 60, a positive electrode or a negative electrode is connected to the soft X-ray shielding plate 20 by a soft X-ray shielding plate cable 62, and the other electrode is connected to the container 10 by a container cable 64. Then, the soft X-ray shielding plate 20 is positively or negatively charged, and the container 10 is charged with the opposite positive / negative voltage. It is presumed that since the container 10 is charged, the escape of the same ions on the container 10 (positive ions if positively charged, negative ions if negatively charged) is reduced, the same ions in the container 10 are increased, and the same ions passing through the soft X-ray shielding plate 20 are increased. That is, the amount of positive / negative ions released can be adjusted. In addition, since the container 10 and the soft X-ray shielding plate 20 can be small and the applied potential can be low, the current flowing out of the power supply device 60 can be extremely small, several nA to several pA, and the power supply device 60 can also be a low-power battery.

[0077] As described above, according to the soft X-ray type static eliminator 1 of the present invention, the amount of ionized air 100 released can be increased by insulating the soft X-ray shielding plate 20. Furthermore, by applying a potential difference between the container 10 and the soft X-ray shielding plate 20, the amount of positive / negative ions released can be adjusted.

[0078] Example 1

[0079] Here, an experiment conducted to confirm the effect of the insulating layer of a soft X-ray type static eliminator is described. Here, a soft X-ray type static eliminator with an insulating layer and a soft X-ray type static eliminator without an insulating layer are used to confirm the effect of the insulating layer by measuring the time until the charged plate is freed of static electricity. The soft X-ray type static eliminator used in the experiment is C-IGB-CA-100434 manufactured by Kondo Industries, Ltd., and its appearance is Figure 6 The charged plate is H0601 manufactured by SHISHIDO ELECTROSTATIC, LTD., and the plate size is 150 mm × 150 mm. The distance from the discharge port of the soft X-ray electrostatic removal device to the charged plate was changed to 50, 100, 150, and 200 mm, and the air flow rate was changed to 20, 30, and 40 L / min. The static elimination time from +1000 V to +100 V and the static elimination time from -1000 V to -100 V were measured according to JIS C61340-4-7 "Charged Plate". The results are shown in Table 1.

[0080] [Table 1]

[0081]

[0082] The results shown in Table 1 are average values ​​of three measurements. In Table 1, the contents indicated by "***" indicate that static electricity could not be eliminated even after 200 seconds (the voltage could not be reduced to 100 V).

[0083] It is clear from the results in Table 1 that the static elimination time is shortened by providing an insulating layer, except for some exceptions. In particular, when the distance is set to 150 mm and 200 mm and the static elimination time is prolonged without an insulating layer, the static elimination time is significantly shortened. This is believed to be the result of a large amount of ionized air being released and static electricity being eliminated from the charged plate.

[0084] Example 2

[0085] Next, a potential difference is applied between the container 10 and the soft X-ray shielding plate 20 (see Figure 1 ) is described in an experiment that can adjust the amount of positive / negative ions released. Using the same soft X-ray type static eliminator (with an insulating layer) as the device used in Example 1, a potential difference is applied to the container 10 and the soft X-ray shielding plate 20, and the time until the charged plate is freed from static electricity is measured. The static elimination time was measured when the distance from the discharge port of the soft X-ray type static eliminator to the charged plate was set to 200 mm, the air flow rate was set to 30 L / min, and the potential difference between the soft X-ray shielding plate 20 and the container 10 was set to ±0 V, +10 V, and -10 V. The results are shown in Table 2.

[0086] [Table 2]

[0087]

[0088] The results shown in Table 2 are the average values ​​of three measurements. When the applied voltage is ±0 V, the difference from the results in Table 1 is that the measurement was performed on different dates and the static elimination time is greatly affected by the atmospheric conditions (humidity, temperature, etc.), so it can be inferred that the static elimination time changes due to the influence of different atmospheres.

[0089] If a potential difference of +10V is applied to the soft X-ray shielding plate (conversely, -10V is applied to the container), the time to eliminate static electricity of the positive voltage is shortened, that is, the release of negative ions increases, and the time to eliminate static electricity of the negative voltage is lengthened, that is, the release of positive ions decreases, compared with the case where no potential difference is applied. In addition, if a potential difference of -10V is applied to the soft X-ray shielding plate (conversely, +10V is applied to the container), the time to eliminate static electricity of the positive voltage is lengthened, that is, the release of negative ions decreases, and the time to eliminate static electricity of the negative voltage is shortened, that is, the release of positive ions increases, compared with the case where no potential difference is applied. This is because if a positive voltage is applied to the soft X-ray shielding plate and a negative voltage is applied to the container, the escape of negative ions on the inner wall of the container decreases, and the negative ions in the container increase. As a result, it can be inferred that the release of negative ions increases and the time to eliminate static electricity of the positive voltage is shortened. On the contrary, if a negative voltage is applied to the soft X-ray shielding plate and a positive voltage is applied to the container, it can be estimated that the positive ions in the container increase, the amount of positive ions released increases, and the time to eliminate static electricity of the negative voltage is shortened.

[0090] As is clear from Table 2, the amount of positive / negative ions released can be adjusted by applying a potential difference between the container and the soft X-ray shielding plate.

Claims

1. A soft X-ray static removal device, characterized in that: include: a soft X-ray generating device that generates soft X-rays for ionizing the air; a container for allowing ionized air ionized by the soft X-rays to flow out from an outlet; A soft X-ray shielding sheet used at the outlet of the container; as well as an insulating layer, which insulates the soft X-ray shielding plate from the container and is disposed on the outer periphery of the soft X-ray shielding plate, The soft X-ray shielding plate comprises: A first outer plate layer formed of a material that does not allow soft X-rays to pass; An intermediate layer of material formed of a material that does not allow soft X-rays to pass; and The second outer layer is made of a material that does not allow soft X-rays to pass through. The first outer plate is provided with an ionized air supply port. An ionized air passage is formed in the intermediate layer plate, and the ionized air passage has an ionized air inlet opening communicating with the supply port. The second outer plate has an outlet connected to the ionized air passage. The soft X-ray shielding plate has an ionized air passage portion, which is provided in a manner that the first outer layer plate, the intermediate layer plate and the second outer layer plate are stacked and fixedly connected and the supply port, the ionized air passage and the exhaust port are communicated.

2. The soft X-ray static removal device according to claim 1, characterized in that: A bent portion is provided in the ionized air passage from the supply port to the discharge port.

3. The soft X-ray static removal device according to claim 1 or 2, characterized in that: The insulating layer is formed of ceramic.

4. The soft X-ray static removal device according to claim 3, characterized in that: The soft X-ray shielding sheet has a circular cross section, The insulating layer includes a plurality of arc-shaped ceramics arranged so as to surround the outer circumference of the soft X-ray shielding plate member.

5. The soft X-ray type static elimination device according to claim 1 or 2, characterized in that: The invention also comprises a power supply device for applying a potential difference between the container and the soft X-ray shielding plate.

6. The soft X-ray type static elimination device according to claim 1 or 2, characterized in that: A housing is further provided for arranging the insulating layer and the soft X-ray shielding plate at the outlet of the container by holding the insulating layer at the outlet, and a gap is provided between the housing and the soft X-ray shielding plate.

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