A high FOM biochemical sensor in the visible light band

Through the combined design of multi-layer film structure and graphene layer, the parameters of the sub-wavelength metal grating array are optimized, which solves the problem of insufficient sensitivity and quality factors of the sensor, and achieves high sensitivity and stability of high FOM biochemical sensors, which are suitable for real-time monitoring of the percentage of heavy oil water.

CN113866126BActive Publication Date: 2025-09-02GUILIN UNIV OF ELECTRONIC TECH
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Patent Information

Application Number
CN202111214318.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-10-19
Publication Date
2025-09-02
Estimated Expiration
2041-10-19

AI Technical Summary

Technical Problem

The existing subwavelength metal grating biochemical sensors have shortcomings in sensitivity and factor of quality (FOM), and it is difficult to achieve higher sensing indicators at the same time, and the structure is complex.

Method used

The combined design of a multi-layer film structure, periodic sub-wavelength metal grating array and graphene layer is adopted. By adjusting the hybrid structure, cavity structure and grating array parameters of high and low refractive index dielectric layer, the SP mode coupling between the guide mode and the metal grating is realized, the cavity mode resonance is stimulated, and the sensitivity and quality factor of the sensor are optimized.

Benefits of technology

The sensor is realized in the visible light band with high sensitivity and high quality factors, and can monitor external environmental changes in real time, especially in industrial production, to dynamically monitor the percentage of heavy oil water content.

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Abstract

The present invention relates to the field of metal micro-nano devices, and specifically to a high-FOM biochemical sensor in the visible light band. The sensor comprises a high- and low-refractive-index dielectric layer hybrid structure composed of an upper low-refractive-index layer and a lower high-refractive-index layer. Multiple high- and low-refractive-index dielectric layer hybrid structures are sequentially connected, with a low-refractive-index substrate disposed at the bottom of the multiple high- and low-refractive-index dielectric layer hybrid structures. A high-refractive-index graphene layer is disposed on top of the high- and low-refractive-index dielectric layer hybrid structures. The graphene layer itself is disposed on top of the high-refractive-index layer. A cavity structure layer is disposed on top of the graphene layer. A periodic subwavelength metal grating array is disposed on top of the cavity structure layer. The sensor's sensitivity and quality factor are adjusted by optimizing the structural parameters of the high / low-refractive-index dielectric layer hybrid structure, the cavity length and width of the cavity structure, the grating width and height, and the period of the periodic subwavelength metal grating array, thereby achieving a high level of comprehensive evaluation indicators.
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