Alignment device and method for mass transfer, and backplane of display panel

Abstract

This invention discloses an alignment device and method for mass transfer, and a backplate for a display panel. The alignment device includes: a controller, a first piezoelectric structure arrayed on the backplate, and a second piezoelectric structure arrayed on the backplate, wherein the backplate includes an array of backplate electrodes; the controller is configured to apply a voltage to two adjacent first piezoelectric structures in a first direction, causing the two adjacent first piezoelectric structures to align with the backplate electrodes in a first direction by deforming and positioning light-emitting diodes placed between the two adjacent first piezoelectric structures; the controller is further configured to apply a voltage to two adjacent second piezoelectric structures in a second direction, causing the two adjacent second piezoelectric structures to align with the backplate electrodes in a second direction by deforming and positioning light-emitting diodes placed between the two adjacent second piezoelectric structures, wherein the first direction and the second direction are orthogonal.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and more specifically, to an alignment device and method for mass transfer, and a backplane of a display panel. Background Art

[0002] For display panels such as MicroLed, the display panel includes several pixel areas, each pixel area includes several LEDs (light emitting diodes) such as vertical structures. In the prior art, the usual method for making LEDs is to perform epitaxial growth on a growth substrate, separate the epitaxial structure from the growth substrate by laser stripping, and divide the epitaxial structure to form a single LED. Finally, the single LED is transferred in bulk to the backplane of the display panel. The inventors found that the existing mass transfer method is prone to position deviation, and the alignment accuracy of the LED electrode and the backplane electrode is low, resulting in too many defective products, resulting in increased costs, reduced product qualification rate and other problems. Summary of the invention

[0003] An object of the present invention is to provide an alignment device and method for mass transfer, and a backplane of a display panel, so as to solve at least one of the problems existing in the prior art.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A first aspect of the present invention provides an alignment device for mass transfer, comprising: a controller, a first piezoelectric structure arranged in an array on a backplane, and a second piezoelectric structure arranged in an array on the backplane, wherein the backplane comprises backplane electrodes arranged in an array;

[0006] The controller is used to apply voltage to two first piezoelectric structures adjacent to each other in a first direction so that the two first piezoelectric structures are deformed to align the light-emitting diode disposed between the two first piezoelectric structures with the back plate electrode in the first direction;

[0007] The controller is also used to apply voltage to two second piezoelectric structures adjacent to each other in a second direction so that the two adjacent second piezoelectric structures are deformed to align the light-emitting diodes disposed between the two adjacent second piezoelectric structures with the back plate electrode in the second direction, wherein the first direction is orthogonal to the second direction.

[0008] Optionally, the distance between two adjacent first piezoelectric structures in the first direction and the back plate electrode between the two adjacent first piezoelectric structures is equal; and / or,

[0009] The distance between two adjacent second piezoelectric structures in the second direction and the back plate electrode between the two adjacent second piezoelectric structures is equal.

[0010] Optionally, the first piezoelectric structure includes a first piezoelectric layer and a first electrode and a second electrode located on both sides of the first piezoelectric layer along a first direction, and the controller applies a voltage to the first piezoelectric structure through the first electrode and the second electrode; and / or,

[0011] The second piezoelectric structure includes a second piezoelectric layer and a third electrode and a fourth electrode located on both sides of the second piezoelectric layer along a second direction, and the controller applies a voltage to the second piezoelectric structure through the third electrode and the fourth electrode;

[0012] The first piezoelectric structure further includes a first elastic insulating layer formed on an outer side thereof; and / or,

[0013] The second piezoelectric structure further includes a second elastic insulating layer formed on an outer side thereof.

[0014] Optionally, a sacrificial layer is provided on the back plate, and the first piezoelectric structure and the second piezoelectric structure are provided on the sacrificial layer;

[0015] The thickness of the sacrificial layer is greater than the thickness of the back plate electrode;

[0016] The sacrificial layer is a low surface energy sacrificial layer.

[0017] A second aspect of the present invention provides a backplane of a display panel, comprising an alignment device for mass transfer provided by the first aspect of the present invention.

[0018] A third aspect of the present invention provides an alignment method for mass transfer, comprising:

[0019] Applying voltage to two first piezoelectric structures adjacent to each other in a first direction so that the two first piezoelectric structures are deformed to align a light emitting diode disposed between the two first piezoelectric structures with a back plate electrode in a first direction;

[0020] A voltage is applied to two second piezoelectric structures adjacent to each other in a second direction so that the two second piezoelectric structures are deformed to align a light-emitting diode disposed between the two second piezoelectric structures with the back plate electrode in a second direction, wherein the first direction is orthogonal to the second direction.

[0021] Optionally, the distance between two adjacent first piezoelectric structures in the first direction and the back plate electrode between the two adjacent first piezoelectric structures is equal, and the step of applying voltage to the two adjacent first piezoelectric structures in the first direction so that the two adjacent first piezoelectric structures align the light-emitting diode disposed between the two adjacent first piezoelectric structures with the back plate electrode in the first direction by deformation includes:

[0022] Applying a first voltage to the nth and n+1th first piezoelectric structures adjacent in a first direction so that the adjacent nth and n+1th first piezoelectric structures align the light-emitting diode disposed between the adjacent nth and n+1th first piezoelectric structures with the back plate electrode in the first direction through deformation, where n is an odd number;

[0023] Applying a second voltage to the n+1th and n+2th first piezoelectric structures adjacent in the first direction so that the adjacent n+1th and n+2th first piezoelectric structures align the light-emitting diode disposed between the adjacent n+1th and n+2th first piezoelectric structures with the back plate electrode in the first direction through deformation, wherein the second voltage is a voltage of opposite polarity to the first voltage;

[0024] and / or,

[0025] The distances between two second piezoelectric structures adjacent to each other in the second direction and the back plate electrode between the two adjacent second piezoelectric structures are equal, and the step of applying voltage to the two second piezoelectric structures adjacent to each other in the second direction so that the two adjacent second piezoelectric structures align the light-emitting diodes disposed between the two adjacent second piezoelectric structures with the back plate electrode in the second direction by deformation comprises:

[0026] Applying a third voltage to the mth and m+1th first piezoelectric structures adjacent in the second direction so that the adjacent mth and m+1th second piezoelectric structures align the light-emitting diode disposed between the adjacent mth and m+1th second piezoelectric structures with the back plate electrode in the second direction through deformation, where m is an odd number;

[0027] A fourth voltage is applied to the m+1th and m+2th second piezoelectric structures adjacent to each other in the second direction so that the light-emitting diodes disposed between the adjacent m+1th and m+2th second piezoelectric structures are aligned with the back plate electrode in the second direction through deformation, wherein the fourth voltage is a voltage of opposite polarity to the third voltage.

[0028] The beneficial effects of the present invention are as follows:

[0029] The technical solution provided by the present invention can effectively improve the mass transfer accuracy of display panels such as Micro LEDs and improve product yield by controlling the deformation of the first piezoelectric structure and the second piezoelectric structure arrayed on the backplane to accurately align the light-emitting diodes and the backplane electrodes. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0031] Figure 1 A top view of an alignment device for mass transfer provided by one embodiment of the present invention is shown;

[0032] Figure 2 A cross-sectional view of an alignment device for mass transfer provided by one embodiment of the present invention is shown;

[0033] Figure 3 A step diagram showing a method for mass transfer provided by an embodiment of the present invention;

[0034] Figure 4 A cross-sectional view showing an alignment device according to an embodiment of the present invention;

[0035] Figure 5 A schematic diagram showing an alignment method according to an embodiment of the present invention;

[0036] Figure 6 A schematic diagram showing an alignment method according to an embodiment of the present invention;

[0037] Figure 7 A schematic diagram showing a back plate after peeling off the sacrificial layer according to an embodiment of the present invention. DETAILED DESCRIPTION

[0038] In order to explain the present invention more clearly, the present invention is further described below in conjunction with embodiments and drawings. Similar components in the drawings are represented by the same reference numerals. It should be understood by those skilled in the art that the content specifically described below is illustrative rather than restrictive, and the protection scope of the present invention should not be limited thereto.

[0039] An embodiment of the present invention provides a positioning device for mass transfer, such as Figure 1 As shown, including:

[0040] Controller( Figure 1 ), a first piezoelectric structure 101 arranged in an array on a back plate, and a second piezoelectric structure 102 arranged in an array on the back plate, wherein the back plate includes a back plate electrode 103 arranged in an array;

[0041] The controller is used to apply voltage to two adjacent first piezoelectric structures 101 in a first direction so that the two adjacent first piezoelectric structures 101 are deformed to align the light-emitting diode disposed between the two adjacent first piezoelectric structures 101 with the back plate electrode 103 in the first direction;

[0042] The controller is further used to apply voltage to two second piezoelectric structures 102 adjacent to each other in the second direction so that the two adjacent second piezoelectric structures 102 are deformed to align the light-emitting diodes disposed between the two adjacent second piezoelectric structures 102 with the back plate electrode 103 in the second direction, wherein the first direction is orthogonal to the second direction, for example Figure 1 As shown, the first direction is the horizontal X direction, and the second direction is the vertical Y direction.

[0043] The alignment device provided in this embodiment can accurately align the light-emitting diode and the backplane electrode by controlling the deformation of the first piezoelectric structure and the second piezoelectric structure arrayed on the backplane, which can effectively improve the mass transfer accuracy of display panels such as Micro LED and improve product yield.

[0044] In one possible implementation, Figure 2 , which is a cross-sectional view of part of the alignment device along the first direction X, wherein the distance between two adjacent first piezoelectric structures 101 and the back plate electrode 103 between the two adjacent first piezoelectric structures 101 in the first direction X is equal; and / or,

[0045] The distance between two adjacent second piezoelectric structures in the second direction Y and the back plate electrode between the two adjacent second piezoelectric structures is equal.

[0046] It is understandable that the backplane electrodes are usually arranged in a uniform array. In this case, the distance between the backplane electrodes of two adjacent first piezoelectric structures in the first direction X and the two adjacent first piezoelectric structures is equal, and the distance between the backplane electrodes of two adjacent second piezoelectric structures in the second direction Y and the two adjacent second piezoelectric structures is equal. This design facilitates the precise alignment of the light-emitting diodes and the backplane electrodes. When aligning, the controller can achieve precise alignment by applying voltages of the same value to each first piezoelectric structure and each second piezoelectric structure, and can achieve alignment of all light-emitting diodes and the backplane electrodes by adjusting only the polarity of the voltage through the symmetrical deformation of the first piezoelectric structure in the first direction and the symmetrical deformation of the second piezoelectric structure in the second direction. In addition, for the case where the backplane electrodes are arranged in a non-uniform array, this embodiment can also achieve precise alignment of the light-emitting diodes and the backplane electrodes by controlling the applied voltage.

[0047] In a specific embodiment, the distance between the two adjacent first piezoelectric structures 101 in the first direction is 60 um, and the center distance of the back plate electrode 103 between the two adjacent first piezoelectric structures 101 in the first direction is 30 um from the two first piezoelectric structures.

[0048] In one possible implementation, the first piezoelectric structure 101 includes a first piezoelectric layer 1013 and a first electrode 1012 and a second electrode 1014 located on both sides of the first piezoelectric layer 1013 along a first direction, and the controller applies a voltage to the first piezoelectric structure through the first electrode 1012 and the second electrode 1014; and / or, the second piezoelectric structure includes a second piezoelectric layer and a third electrode and a fourth electrode located on both sides of the second piezoelectric layer along a second direction, and the controller applies a voltage to the second piezoelectric structure through the third electrode and the fourth electrode.

[0049] Specifically, the first piezoelectric layers 1013 of two adjacent first piezoelectric structures 101 in the first direction are equidistant from the back plate electrode 103 therebetween, and the first electrode 1012 and the second electrode 1014 located on both sides of the first piezoelectric layer 1013 along the first direction are symmetrical about the center of the first piezoelectric layer 1013 therebetween; and / or,

[0050] The second piezoelectric layers of two adjacent second piezoelectric structures in the second direction are equidistant from the back plate electrode therebetween, and the third electrode and the fourth electrode located on both sides of the second piezoelectric layer along the second direction are symmetrical about the center of the second piezoelectric layer therebetween; specifically, the materials of the first piezoelectric layer and the second piezoelectric layer are, for example, highly reflective metal materials, such as copper or silver.

[0051] In a possible implementation, the first piezoelectric structure 101 further includes a first elastic insulating layer 1011 formed on an outer side thereof; and / or,

[0052] The second piezoelectric structure further includes a second elastic insulating layer formed on an outer side thereof.

[0053] The elastic insulating layer is made of resin material, and its elastic characteristics are used to enhance the deformation ability of the piezoelectric structure, and its insulating characteristics can prevent the electrodes from short-circuiting.

[0054] In one possible implementation, Figure 2 As shown, a sacrificial layer 104 is disposed on the back plate 100 , and the first piezoelectric structure 101 and the second piezoelectric structure (not shown in the figure) are disposed on the sacrificial layer 104 .

[0055] In a possible implementation, the thickness of the sacrificial layer is greater than the thickness of the back plate electrode, so that the LED can be easily and accurately embedded in the groove formed by the sacrificial layer below and exposing the back plate electrode, which is conducive to improving the alignment accuracy.

[0056] In a possible implementation, the sacrificial layer 104 is a low surface energy sacrificial layer with a low friction coefficient.

[0057] In a specific embodiment, for Figure 2 The structure shown can be used to prepare the alignment device on the backplane using a metal oxide semiconductor process, including: forming a patterned sacrificial layer on the backplane; forming an array of backplane electrodes on the backplane; forming a first piezoelectric layer and a first electrode and a second electrode located on both sides of the first piezoelectric layer along a first direction on the sacrificial layer, forming an elastic insulating layer that wraps the first piezoelectric layer, the first electrode and the second electrode, thereby forming the first piezoelectric structure; wherein the first piezoelectric layer, the first electrode and the second electrode are symmetrical about the center line of the sacrificial layer, and the first piezoelectric structures adjacent to each other in the first direction are at an equal distance from the backplane electrodes therebetween. Specifically, the first piezoelectric layers of the first piezoelectric structures adjacent to each other in the first direction are at an equal distance from the backplane electrodes therebetween, and the first electrode layer and the second electrode layer of the first piezoelectric structure have the same thickness in the first direction, thereby forming a structure as shown in FIG. Figure 2 The first piezoelectric structure has a symmetrical structure as shown.

[0058] The manufacturing method of the second piezoelectric structure is similar to that of the first piezoelectric structure, and will not be repeated here.

[0059] In a possible implementation, the first piezoelectric layer and the second piezoelectric layer are high-voltage electric constant materials, such as barium titanate or lead zirconate titanate binary piezoelectric ceramics (PZT), and are manufactured by inkjet, for example.

[0060] The piezoelectric constant of lead zirconate titanate binary piezoelectric ceramics (PZT) is 190×10 -11 C / N, if a voltage of 200V is added, a moving distance of 380nm can be generated according to the formula U=V×d. In this embodiment, the controller can determine the voltage required for alignment according to the positional relationship between the first piezoelectric structure and the second piezoelectric structure and the backplane electrode, so as to achieve precise alignment of the light-emitting diode and the backplane electrode 103.

[0061] In a possible implementation, the material of the low surface energy sacrificial layer is one or more combinations of polytetrafluoroethylene, fluorinated ethylene propylene copolymer, and perfluoroalkyl compounds.

[0062] Another embodiment of the present invention provides a backplane of a display panel, including an alignment device for mass transfer provided by the above embodiment.

[0063] The retention of the alignment device can prevent color mixing and light crosstalk, improve the reflectivity of the display panel, and increase the light extraction efficiency of the display panel. In addition, after alignment, the alignment device on the backplane can be removed by peeling off the sacrificial layer.

[0064] like Figure 3As shown, another embodiment of the present invention provides an alignment method based on the alignment device provided in the above embodiment, comprising:

[0065] S201: applying voltage to two first piezoelectric structures adjacent to each other in a first direction so that the two first piezoelectric structures are deformed to align a light emitting diode disposed between the two first piezoelectric structures with a back plate electrode in a first direction;

[0066] S202: Applying voltage to two second piezoelectric structures adjacent to each other in a second direction so that the two second piezoelectric structures are deformed to align a light-emitting diode disposed between the two second piezoelectric structures with the back plate electrode in a second direction, wherein the first direction is orthogonal to the second direction.

[0067] In a specific example, if Figure 4 As shown, the distance between two adjacent first piezoelectric structures 101 in the first direction and the back plate electrode 103 between the two adjacent first piezoelectric structures is equal, and the voltage is applied to the two adjacent first piezoelectric structures in the first direction so that the two adjacent first piezoelectric structures are deformed to align the light-emitting diode 8 disposed between the two adjacent first piezoelectric structures with the back plate electrode 103 in the first direction, including:

[0068] A first voltage is applied to the nth and n+1th first piezoelectric structures adjacent in the first direction so that the adjacent nth and n+1th first piezoelectric structures are deformed to align the light-emitting diode 8 disposed between the adjacent nth and n+1th first piezoelectric structures with the back plate electrode in the first direction, where n is an odd number; Figure 5 shown.

[0069] A second voltage is applied to the n+1th and n+2th first piezoelectric structures adjacent in the first direction so that the adjacent n+1th and n+2th first piezoelectric structures align the light-emitting diode disposed between the adjacent n+1th and n+2th first piezoelectric structures with the first direction of the back plate electrode through deformation, wherein the second voltage is a voltage of opposite polarity to the first voltage; Figure 6 As shown;

[0070] and / or,

[0071] The distances between two second piezoelectric structures adjacent to each other in the second direction and the back plate electrode between the two adjacent second piezoelectric structures are equal, and the step of applying voltage to the two second piezoelectric structures adjacent to each other in the second direction so that the two adjacent second piezoelectric structures align the light-emitting diodes disposed between the two adjacent second piezoelectric structures with the back plate electrode in the second direction by deformation comprises:

[0072] Applying a third voltage to the mth and m+1th first piezoelectric structures adjacent in the second direction so that the adjacent mth and m+1th second piezoelectric structures align the light-emitting diode disposed between the adjacent mth and m+1th second piezoelectric structures with the back plate electrode in the second direction through deformation, where m is an odd number;

[0073] A fourth voltage is applied to the m+1th and m+2th second piezoelectric structures adjacent to each other in the second direction so that the light-emitting diodes disposed between the adjacent m+1th and m+2th second piezoelectric structures are aligned with the back plate electrode in the second direction through deformation, wherein the fourth voltage is a voltage of opposite polarity to the third voltage.

[0074] In a specific embodiment, the alignment of the light emitting diode and the corresponding back plate electrode in the first direction includes: the controller first controls Figure 5 The first piezoelectric structure from the left and the second piezoelectric structure from the left are deformed so that the first LED from the left is aligned with the corresponding back plate electrode in the first direction X, and the third piezoelectric structure from the left and the fourth piezoelectric structure from the left are controlled to be deformed so that the third LED from the left is aligned with the corresponding back plate electrode in the first direction X, as shown in FIG. Figure 6 As shown, the second piezoelectric structure from the left and the third piezoelectric structure from the left are controlled to align the second LED from the left with the corresponding backplane electrode in the first direction X. Since the distances between the two adjacent piezoelectric structures and the backplane electrodes between the two adjacent piezoelectric structures in the first direction X are equal, the alignment of the third LED from the left with the corresponding backplane electrode in the first direction X can be achieved by simply swapping the polarity of the voltage applied to the two electrodes of each piezoelectric structure. The alignment of each light-emitting diode with the corresponding backplane electrode in the second direction Y is similar to the above steps and will not be repeated here.

[0075] In a possible implementation, after each light emitting diode is aligned with the back plate electrode in the first direction and the second direction, the sacrificial layer is peeled off by chemical etching. Figure 7 shown.

[0076] In the description of the present invention, it should be noted that the terms "upper", "lower", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present invention. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0077] It should also be noted that, in the description of the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0078] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the embodiments here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. A positioning device for mass transfer, characterized in that: include: A controller, a first piezoelectric structure arranged in an array on a back plate, and a second piezoelectric structure arranged in an array on the back plate, wherein the back plate includes back plate electrodes arranged in an array; The controller is used to apply voltage to two first piezoelectric structures adjacent to each other in a first direction so that the two first piezoelectric structures are deformed to align the light-emitting diode disposed between the two first piezoelectric structures with the back plate electrode in the first direction; The controller is also used to apply voltage to two second piezoelectric structures adjacent to each other in a second direction so that the two adjacent second piezoelectric structures are deformed to align the light-emitting diodes disposed between the two adjacent second piezoelectric structures with the back plate electrode in the second direction, wherein the first direction is orthogonal to the second direction.

2. The alignment device according to claim 1, characterized in that: The distance between two adjacent first piezoelectric structures in the first direction and the back plate electrode between the two adjacent first piezoelectric structures is equal; and / or, The distance between two adjacent second piezoelectric structures in the second direction and the back plate electrode between the two adjacent second piezoelectric structures is equal.

3. The alignment device according to claim 1, characterized in that: The first piezoelectric structure includes a first piezoelectric layer and a first electrode and a second electrode located on both sides of the first piezoelectric layer along a first direction, and the controller applies a voltage to the first piezoelectric structure through the first electrode and the second electrode; and / or, The second piezoelectric structure includes a second piezoelectric layer and a third electrode and a fourth electrode located on both sides of the second piezoelectric layer along a second direction, and the controller applies a voltage to the second piezoelectric structure through the third electrode and the fourth electrode.

4. The alignment device according to claim 3, characterized in that: The first piezoelectric structure further includes a first elastic insulating layer formed on an outer side thereof; and / or, The second piezoelectric structure further includes a second elastic insulating layer formed on an outer side thereof.

5. The alignment device according to claim 1, characterized in that: A sacrificial layer is disposed on the back plate, and the first piezoelectric structure and the second piezoelectric structure are disposed on the sacrificial layer.

6. The alignment device according to claim 5, characterized in that: The thickness of the sacrificial layer is greater than the thickness of the back plate electrode.

7. The alignment device according to claim 5, characterized in that: The sacrificial layer is a low surface energy sacrificial layer.

8. A backplane of a display panel, characterized in that: It comprises the alignment device as described in any one of claims 1-7.

9. A positioning method based on the positioning device according to claim 1, characterized in that: include: Applying voltage to two first piezoelectric structures adjacent to each other in a first direction so that the two first piezoelectric structures are deformed to align a light emitting diode disposed between the two first piezoelectric structures with a back plate electrode in a first direction; A voltage is applied to two second piezoelectric structures adjacent to each other in a second direction so that the two second piezoelectric structures are deformed to align a light-emitting diode disposed between the two second piezoelectric structures with the back plate electrode in a second direction, wherein the first direction is orthogonal to the second direction.

10. The alignment method according to claim 9, characterized in that: The distance between two adjacent first piezoelectric structures in the first direction and the back plate electrode between the two adjacent first piezoelectric structures is equal, and the voltage is applied to the two adjacent first piezoelectric structures in the first direction so that the two adjacent first piezoelectric structures align the light-emitting diodes disposed between the two adjacent first piezoelectric structures with the back plate electrode in the first direction through deformation, comprising: Applying a first voltage to the nth and n+1th first piezoelectric structures adjacent in a first direction so that the adjacent nth and n+1th first piezoelectric structures align the light-emitting diode disposed between the adjacent nth and n+1th first piezoelectric structures with the back plate electrode in the first direction through deformation, where n is an odd number; Applying a second voltage to the n+1th and n+2th first piezoelectric structures adjacent in the first direction so that the adjacent n+1th and n+2th first piezoelectric structures align the light-emitting diode disposed between the adjacent n+1th and n+2th first piezoelectric structures with the back plate electrode in the first direction through deformation, wherein the second voltage is a voltage of opposite polarity to the first voltage; and / or, The distances between two second piezoelectric structures adjacent to each other in the second direction and the back plate electrode between the two adjacent second piezoelectric structures are equal, and the step of applying voltage to the two second piezoelectric structures adjacent to each other in the second direction so that the two adjacent second piezoelectric structures align the light-emitting diodes disposed between the two adjacent second piezoelectric structures with the back plate electrode in the second direction by deformation comprises: Applying a third voltage to the mth and m+1th first piezoelectric structures adjacent in the second direction so that the adjacent mth and m+1th second piezoelectric structures align the light-emitting diode disposed between the adjacent mth and m+1th second piezoelectric structures with the back plate electrode in the second direction through deformation, where m is an odd number; A fourth voltage is applied to the m+1th and m+2th second piezoelectric structures adjacent to each other in the second direction so that the light-emitting diodes disposed between the adjacent m+1th and m+2th second piezoelectric structures are aligned with the back plate electrode in the second direction through deformation, wherein the fourth voltage is a voltage of opposite polarity to the third voltage.

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