Tape application device

Abstract

The present application provides a tape attaching device that prevents stacking of a ring-shaped frame. The tape attaching device integrates a ring-shaped frame and a substrate by an adhesive tape, and has a holding unit that has a ring-shaped frame holding portion that holds the ring-shaped frame, a tape attaching unit that attaches the adhesive tape to the ring-shaped frame and the substrate, and a control unit that controls the frame holding portion. The frame holding portion has a movable portion that can advance and retreat. The ring-shaped frame can be moved to a prescribed position by bringing the movable portion into abutment with the ring-shaped frame. The frame holding portion has a sensor that can detect whether the movable portion is positioned at a stop position of the movable portion when the ring-shaped frame is positioned at the prescribed position. With regard to the control unit, when the movable portion advances and retreats, if the movable portion is brought into abutment with the ring-shaped frame and stopped at the stop position, it is determined that the ring-shaped frame is present on the upper surface of the frame holding portion.

Description

TECHNICAL FIELD

[0001] The present application relates to a tape adhering apparatus that adheres an adhesive tape to a ring-shaped frame having a circular opening portion to close the opening portion, and adheres a substrate to the adhesive tape exposed to the opening portion. BACKGROUND

[0002] A device chip used in an electronic device such as a mobile phone or a computer is formed by dividing a substrate such as a semiconductor wafer on which a plurality of devices are arranged on a front surface by each device. As an apparatus that divides a substrate, a cutting apparatus that cuts a substrate using a cutting tool in a ring shape and a laser processing apparatus that performs laser processing by irradiating a laser beam to a workpiece are known.

[0003] A circular adhesive tape called a dicing tape or a spreading tape is adhered to a substrate processed by a processing apparatus such as a cutting apparatus or a laser processing apparatus in advance. Further, an outer peripheral portion of the adhesive tape is adhered to an inner peripheral portion of a ring-shaped frame having an opening portion formed in a center. That is, the substrate, the adhesive tape, and the ring-shaped frame are integrated to form a frame unit. Then, the substrate is carried into the processing apparatus in the state of the frame unit to be processed.

[0004] The substrate assembled in the state of the frame unit is easily handled. In addition, when the adhesive tape is spread in a peripheral direction after the substrate is divided, the interval between the chips formed of the substrate is enlarged, and the pickup of the chips becomes easy. Here, a tape adhering apparatus that adheres the adhesive tape to the substrate and the ring-shaped frame to form the frame unit is known (see Patent Literature 1).

[0005] The tape adhering apparatus has a holding unit having a substrate holding portion that holds the substrate and a ring-shaped frame holding portion that holds the ring-shaped frame around the substrate holding portion. Further, when the adhesive tape is adhered to the ring-shaped frame and the substrate by the tape adhering apparatus, the substrate is held by the substrate holding portion, the ring-shaped frame is held by the ring-shaped frame holding portion, and the adhesive tape is pressed from above to the substrate and the ring-shaped frame. Then, a roller is caused to roll on the adhesive tape to press the adhesive tape, and the adhesive tape is adhered to the substrate and the ring-shaped frame.

[0006] Patent Literature 1: Japanese Patent Application Laid-Open No. 2011-236024

[0007] The tape adhering apparatus sometimes stops due to some trouble when a plurality of frame units are sequentially formed. For example, when the tape adhering apparatus stops while the ring-shaped frame is held by the ring-shaped frame holding portion, if the tape adhering apparatus is started again without taking out the ring-shaped frame, a new ring-shaped frame is stacked on the ring-shaped frame that has already been carried in. In this state, the adhered surface of the ring-shaped frame is largely protruded upward than the adhered surface of the substrate.

[0008] In the case where the height of the adhering surface of the ring-shaped frame is higher than the height of the adhering surface of the substrate, the adhesive tape cannot be adhered to the substrate with sufficient force using the roller, and the adhesive tape is adhered to the substrate in a state where air bubbles are present between the substrate and the adhesive tape. Even if the frame unit in which air bubbles are present between the adhesive tape and the substrate is carried into the processing device, the substrate cannot be properly processed. SUMMARY

[0009] The present application has been achieved in view of the above-described problems, and an object thereof is to provide a tape adhering device capable of preventing stacking of ring-shaped frames.

[0010] According to one embodiment of the present application, a tape adhering device that integrates a ring-shaped frame having an opening in the center and a plate-shaped substrate disposed at the opening of the ring-shaped frame by an adhesive tape having an adhering surface is provided, characterized by comprising: a holding unit having a ring-shaped frame holding portion that holds the ring-shaped frame and a substrate holding portion that holds the substrate, the substrate holding portion being disposed in the opening of the frame holding portion in which the opening is formed in the center; a tape adhering unit that adheres the adhesive tape to the ring-shaped frame and the substrate while pressing the adhesive tape from above using a roller with the adhering surface of the adhesive tape facing the ring-shaped frame held by the frame holding portion and the substrate held by the substrate holding portion; and a control unit that controls the frame holding portion having a movable portion that protrudes from an upper surface and is capable of advancing and retreating in a direction parallel to the upper surface, the ring-shaped frame being capable of being moved to a prescribed position by bringing the movable portion into abutment with the ring-shaped frame placed on the upper surface, the frame holding portion having a sensor that is capable of detecting whether the movable portion is positioned at a stop position of the movable portion when the ring-shaped frame is positioned at the prescribed position, the control unit determining that the ring-shaped frame is not present on the upper surface of the frame holding portion in the case where the movable portion is not in abutment with the ring-shaped frame and is not stopped at the stop position when the movable portion is advanced and retreated, and determining that the ring-shaped frame is present on the upper surface of the frame holding portion in the case where the movable portion is in abutment with the ring-shaped frame and is stopped at the stop position.

[0011] It is preferable that the movable portion have two pins that are in abutment with the side surface of the ring-shaped frame.

[0012] Further, according to another aspect of the present application, there is provided a tape attaching apparatus that integrates a ring-shaped frame having an opening in the center and a plate-shaped substrate arranged at the opening of the ring-shaped frame by a tape having an adhesive surface, characterized by comprising: a holding unit having a ring-shaped frame holding portion that holds the ring-shaped frame and a substrate holding portion that holds the substrate, the substrate holding portion being arranged in the opening of the frame holding portion having the opening in the center; a tape attaching unit that causes the adhesive surface of the tape to face the ring-shaped frame held by the frame holding portion and the substrate held by the substrate holding portion, and attaches the tape to the ring-shaped frame and the substrate while pressing the tape from above by a roller; and a control unit that controls the frame holding portion having: a first fixed portion that protrudes from an upper surface to restrict movement of the ring-shaped frame in a first direction parallel to the upper surface; a second fixed portion that protrudes from the upper surface to restrict movement of the ring-shaped frame in a second direction perpendicular to the first direction; a first movable portion that protrudes from the upper surface, is opposed to the first fixed portion, and advances and retreats in the first direction to sandwich the ring-shaped frame with the first fixed portion; and a second movable portion that protrudes from the upper surface, is opposed to the second fixed portion, and advances and retreats in the second direction to sandwich the ring-shaped frame with the second fixed portion, the frame holding portion being capable of positioning the ring-shaped frame at a prescribed position by sandwiching the ring-shaped frame with the first fixed portion and the first movable portion and sandwiching the ring-shaped frame with the second fixed portion and the second movable portion, the frame holding portion further having a sensor capable of detecting whether the first movable portion is positioned at a stop position of the first movable portion when the ring-shaped frame is positioned at the prescribed position, the control unit determining that the ring-shaped frame is not present on the upper surface of the frame holding portion when the first movable portion does not abut against the ring-shaped frame and is not stopped at the stop position while the first movable portion advances and retreats, and determining that the ring-shaped frame is present on the upper surface of the frame holding portion when the first movable portion abuts against the ring-shaped frame and is stopped at the stop position.

[0013] Preferably, the tape attaching apparatus according to the third aspect is characterized in that the first movable portion or the second movable portion has two pins that abut against a side surface of the ring-shaped frame.

[0014] In the tape attaching apparatus according to one aspect of the present application, the frame holding portion that holds the ring-shaped frame has a movable portion that is capable of advancing and retreating in a direction parallel to the upper surface, and is capable of moving the ring-shaped frame to a prescribed position by causing the movable portion to abut against the ring-shaped frame placed on the upper surface. Here, the frame holding portion has a sensor that is capable of detecting whether the movable portion is positioned at a stop position of the movable portion when the ring-shaped frame is positioned at the prescribed position.

[0015] Therefore, when the movable section is advanced and retracted, in a case where the movable section is stopped at the stop position by abutting against the annular frame, it can be determined that the annular frame is present on the upper surface of the frame holding section. On the other hand, in a case where the movable section is not stopped at the stop position by not abutting against the annular frame, it can be determined that the annular frame is not present on the upper surface of the frame holding section.

[0016] In a case where it is determined that the annular frame is present on the upper surface of the frame holding section, the operator can prevent the stacking of the annular frames by instructing the tape attaching device to produce the frame unit after the remaining annular frame is removed. Therefore, the annular frame does not protrude upward more than the substrate, and the adhesive tape can be properly attached to the annular frame and the substrate using the roller.

[0017] Therefore, according to one embodiment of the present application, a tape attaching device capable of preventing the stacking of annular frames is provided. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a perspective view schematically showing a tape attaching device.

[0019] Figure 2 is a perspective view schematically showing a tape attaching unit and a holding unit.

[0020] Figure 3 is a perspective view schematically showing a moving mechanism that moves a movable section.

[0021] Figure 4 is a perspective view schematically showing a case where an annular frame and a substrate are placed on a holding unit.

[0022] Figure 5 is a cross-sectional view schematically showing a case where an adhesive tape is attached to an annular frame and a substrate.

[0023] Figure 6 is a perspective view schematically showing a frame unit.

[0024] Figure 7 (A) of FIG. 1 is a perspective view schematically showing a stop position of a movable section in a case where an annular frame is not present that remains on a holding unit, Figure 7 (B) of FIG. 1 is a perspective view schematically showing a stop position of a movable section in a case where an annular frame is present that remains on a holding unit.

[0025] REFERENCE NUMERALS

[0026] 1: substrate; 1a, 3a: front surface; 1b, 3b: back surface; 3: ring-shaped frame; 3c: opening portion; 5: adhesive tape; 5a: adhesive surface; 5b: base material layer; 7: release tape; 9: device; 11: frame unit; 2: tape attaching apparatus; 2a: control unit; 4: base; 4a: opening; 6a, 6b, 6c: cassette placement table; 8a, 8b, 8c: cassette; 10a, 10b, 10c: contents; 12a, 12b: conveyance unit; 14a, 14b: moving support portion; 16a, 16b: arm portion; 18a, 18b: support portion; 20: moving unit; 22a: guide rail; 22b: ball screw; 22c: pulse motor; 24: holding unit; 26: frame holding portion; 28: upper surface; 30: substrate holding portion; 32, 38: pin; 34, 40: movable portion; 36, 42: fixed portion; 44: tape attaching unit; 46: tape supply roller; 48, 54: guide roller; 50: press roller; 52: release portion; 56: winding roller; 58: support portion; 60: moving body; 62: cylinder; 64: piston rod; 66: air cylinder; 68: automatic switch; 70: wiring; 72: moving mechanism. DETAILED DESCRIPTION

[0027] An embodiment of one mode of the present application will be described with reference to the drawings. The tape attaching apparatus of the present embodiment attaches an adhesive tape to a substrate and a ring-shaped frame having an opening portion capable of accommodating the substrate to form a frame unit, which becomes a work to be processed by a processing apparatus such as a cutting apparatus or a laser processing apparatus. First, the frame unit including the substrate, the ring-shaped frame, and the adhesive tape will be described. Figure 6 FIG. 1 is a perspective view schematically showing a frame unit 11.

[0028] The substrate 1 is, for example, a wafer formed of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or another semiconductor. Alternatively, the substrate 1 is a substantially circular plate-shaped substrate formed of a material such as sapphire, glass, quartz, or the like. The glass is, for example, alkali glass, non-alkali glass, soda-lime glass, lead glass, borosilicate glass, quartz glass, or the like.

[0029] A plurality of devices 9 such as ICs (Integrated Circuits), LSIs (Large Scale Integrations), or the like are formed on the front surface la of the substrate 1. When the substrate 1 is divided by a processing apparatus such as a cutting apparatus or a laser processing apparatus in accordance with each device 9, individual device chips can be formed. When the substrate 1 is conveyed to the processing apparatus, an adhesive tape 5 having a larger diameter than the substrate 1 is attached, for example, on the back surface lb side of the substrate 1.

[0030] The adhesive tape 5 is called a dicing tape. In the present embodiment, the adhesive tape 5 is a double-sided adhesive tape.Figure 5 The cross-sectional view schematically shows the adhesive tape 5 peeled from the release tape 7 and adhered to the substrate 1 or the like. The adhesive tape 5 includes a film-like base material layer 5b having flexibility. The base material layer 5b is formed of PO (polyolefin), PET (polyethylene terephthalate), PVC (polyvinyl chloride), PS (polystyrene), or the like. An adhesive layer (paste layer) (not shown) is provided on one face of the base material layer 5b.

[0031] The adhesive layer is formed of ultraviolet-cured silicone rubber, acrylic material, epoxy material, or the like, respectively. The adhesive layer is adhered to the back face lb side of the substrate 1. Further, the face exposed by the adhesive layer becomes the adhesive face 5a of the adhesive tape 5. By adhering the adhesive tape 5 to the substrate 1, it is possible to moderate the impact on the substrate 1 at the time of processing, conveyance, or the like, and thus it is possible to reduce the damage to the substrate 1.

[0032] The inner periphery of the annular frame 3 formed of metal such as aluminum or stainless steel is adhered to the outer periphery of the adhesive tape 5. The annular frame 3 has an opening portion 3c having a diameter larger than that of the substrate 1, and the front face 3a and the back face 3b are flat. In a state where the substrate 1 is positioned at substantially the center of the opening portion 3c of the annular frame 3, the adhesive tape 5 is adhered to the back face lb side of the substrate 1 and the back face 3b of the annular frame 3, and thus the frame unit 11 is formed.

[0033] Next, the tape adhering device that adheres the adhesive tape 5 to the substrate 1 and the annular frame 3 will be described. Figure 1 is a perspective view schematically showing the tape adhering device 2. The tape adhering device 2 has a base 4 that supports each structural element.

[0034] The cartridge placement stages 6a, 6b, 6c are arranged along the Y-axis direction at the front end of the base 4. For example, the substrate 1 is carried into the tape adhering device 2 in a state of being housed in the cartridge 8a placed on the cartridge placement stage 6a, and the annular frame 3 is carried into the tape adhering device 2 in a state of being housed in the cartridge 8b placed on the cartridge placement stage 6b.

[0035] In addition, the frame units 11 produced by the tape adhering device 2 are housed in the cartridge 8c placed on the cartridge placement stage 6c. Further, a plurality of frame units 11 produced by the tape adhering device 2 are carried out of the tape adhering device 2 by carrying out the cartridge 8c. In Figure 2 In, the contents 10a, 10b, 10c housed in each of the cartridges 8a, 8b, 8c are indicated by broken lines.

[0036] The tape adhering device 2 is formed with an opening 4a long in the Y-axis direction at a position adjacent to the cartridge placement stages 6a, 6b, 6c. In the opening 4a, the first conveyance unit 12a that conveys the annular frame 3 and the frame unit 11 and the second conveyance unit 12b that conveys the substrate 1 are housed in a manner movable along the Y-axis direction, respectively.

[0037] The first conveyance unit 12a has a movement support portion 14a which is movable along the Y-axis direction, an arm portion 16a of which one end is rotatably fixed to the movement support portion 14a, and a support portion 18a which is provided to the other end of the arm portion 16a. The first conveyance unit 12a is a multi-joint robot which is capable of moving the support portion 18a by extending and rotating the arm portion 16a.

[0038] The first conveyance unit 12a supports the ring-shaped frame 3 housed in the cassette 8b placed on the cassette placement table 6b by the support portion 18a, and conveys the ring-shaped frame 3 out of the cassette 8b and places it on the holding unit 24 described later. In addition, the first conveyance unit 12a supports the frame unit 11 placed on the holding unit 24 by the support portion 18a, and conveys it to the cassette 8c placed on the cassette placement table 6c.

[0039] The second conveyance unit 12b has a movement support portion 14b which is movable along the Y-axis direction, an arm portion 16b of which one end is rotatably fixed to the movement support portion 14b, and a support portion 18b which is provided to the other end of the arm portion 16b. The second conveyance unit 12b is a multi-joint robot which is capable of moving the support portion 18b by extending and rotating the arm portion 16b. The second conveyance unit 12b supports the substrate 1 housed in the cassette 8a placed on the cassette placement table 6a by the support portion 18b, and conveys the substrate 1 out of the cassette 8a and places it on the holding unit 24 described later.

[0040] A movement unit 20 which moves the holding unit 24 along the X-axis direction perpendicular to the Y-axis direction, and a holding unit 24 which is supported by the movement unit 20 are provided at a position adjacent to the opening 4a of the base 4. The movement unit 20 has a pair of guide rails 22a along the X-axis direction. The holding unit 24 is supported by the guide rails 22a so as to be movable along the X-axis direction.

[0041] The movement unit 20 further has a ball screw 22b which is parallel to the guide rails 22a and is screwed with a nut portion (not shown) provided to a lower surface of the holding unit 24, and a pulse motor 22c which is connected to one end of the ball screw 22b. The pulse motor 22c is capable of rotating the ball screw 22b. When the ball screw 22b is rotated, the holding unit 24 is moved along the X-axis direction.

[0042] The movement unit 20 moves the holding unit 24 between a conveyance-in and conveyance-out region on the front side and a tape sticking region on the inner side. In the conveyance-in and conveyance-out region, conveyance-in of the substrate 1 and the ring-shaped frame 3 into the holding unit 24 and conveyance-out of the frame unit 11 are performed. In addition, in the tape sticking region, sticking of the adhesive tape 5 performed by a tape sticking unit 44 described later is performed.

[0043] Figure 2 Fig. 10 is a perspective view schematically showing the tape attaching unit 44 and the holding unit 24 moved to the tape attaching area. Next, the holding unit 24 and the tape attaching unit 44 will be described.

[0044] The holding unit 24 has a ring-shaped frame holding portion 26 that holds the ring-shaped frame 3, and a substrate holding portion 30 that holds the substrate 1. An opening is formed in the center of an upper surface 28 of the frame holding portion 26, and the substrate holding portion 30 is disposed in the opening of the frame holding portion 26. When the holding unit 24 is positioned in the carry-in / out area, the ring-shaped frame 3 is carried onto the frame holding portion 26 by the first conveyance unit 12a, and the substrate 1 is carried onto the substrate holding portion 30 by the second conveyance unit 12b.

[0045] Figure 4 Fig. 11 is a perspective view schematically showing a case where the substrate 1 and the ring-shaped frame 3 are placed on the holding unit 24. At this time, the back surface 3b side of the ring-shaped frame 3 to which the adhesive tape 5 is to be attached is oriented upward, and the back surface Ib side of the substrate 1 to which the adhesive tape 5 is to be attached is oriented upward. That is, the front surface 3a side of the ring-shaped frame 3 is caused to face the frame holding portion 26, and the front surface la side of the substrate 1 is caused to face the substrate holding portion 30. However, the adhesive tape 5 can also be attached to the front surface 3a of the ring-shaped frame 3 and the front surface la of the substrate 1.

[0046] After the substrate 1 and the ring-shaped frame 3 are placed on the upper surface, the holding unit 24 is sent to the tape attaching area. In order to be able to properly attach the adhesive tape 5 to the ring-shaped frame 3, the position of the ring-shaped frame 3 is adjusted on the upper surface of the holding unit 24. The frame holding portion 26 is capable of adjusting the position of the ring-shaped frame 3 placed on the upper surface 28.

[0047] The frame holding portion 26 has a first fixed portion 36 that protrudes from the upper surface 28 and restricts movement of the ring-shaped frame 3 in a first direction (e.g., the X-axis direction) that is parallel to the upper surface 28. The first fixed portion 36 is formed, for example, in a shape that is long in a second direction (e.g., the Y-axis direction) that is perpendicular to the first direction, and restricts movement of the ring-shaped frame 3 that abuts from the first direction.

[0048] In addition, the frame holding portion 26 has a first movable portion 34 that protrudes from the upper surface 28, is opposed to the first fixed portion 36, and is capable of advancing and retreating in the first direction, thereby sandwiching the ring-shaped frame 3 between the first fixed portion 36. The first movable portion 34 is provided at a position that is opposed to the first fixed portion 36 across the substrate holding portion 30, and has, for example, two pins 32 that protrude from the upper surface 28 of the frame holding portion 26.

[0049] Two holes shaped along the first direction are formed on the upper surface 28 of the frame holding portion 26, and each pin 32 protrudes upward from the hole. The holding unit 24 has a moving mechanism inside that moves the pin 32 along the hole. Figure 3 FIG. 7 is a perspective view schematically showing a moving mechanism 72 that moves the first movable portion 34 along the first direction.

[0050] The moving mechanism 72 has a support portion 58 that supports the two pins 32 at a position lower than the upper surface 28 of the frame holding portion 26 along the second direction, and a moving body 60 connected to one end of the support portion 58. In addition, the moving mechanism 72 has a cylinder 66 that includes a piston rod 64 whose front end is connected to the moving body 60, and a cylinder tube 62 that houses the base end side of the piston rod 64.

[0051] The cylinder 66 has a piston (not shown) inside the space that can move along the first direction. The piston divides the inside space of the cylinder tube 62 into front and back. Also, when a pressure difference is applied to the inside space in front and back of the piston, the piston moves in front and back. The base end of the piston rod 64 is connected to the piston, and when the piston is moved, the piston rod 64, the moving body 60, and the support portion 58 move along the first direction, and the pins 32 advance and retreat along the first direction.

[0052] In addition, the frame holding portion 26 has a second fixed portion 42 that protrudes from the upper surface 28 and restricts movement of the annular frame 3 along the second direction (for example, the Y-axis direction) parallel to the upper surface 28. The second fixed portion 42 is formed, for example, in a shape long along the first direction, and restricts movement of the annular frame 3 abutting from the second direction.

[0053] In addition, the frame holding portion 26 has a second movable portion 40 that protrudes from the upper surface 28, is opposed to the second fixed portion 42, and advances and retreats in the second direction, thereby sandwiching the annular frame 3 between the second fixed portion 42. The second movable portion 40 is provided at a position opposed to the second fixed portion 42 across the substrate holding portion 30, and has, for example, two pins 38 protruding from the upper surface 28 of the frame holding portion 26.

[0054] Two holes shaped along the second direction are formed on the upper surface 28 of the frame holding portion 26, and each pin 38 protrudes upward from the hole. The holding unit 24 has a moving mechanism inside that moves the pin 38 along the hole. The moving mechanism is the same structure as the moving mechanism 72 that moves the first movable portion 34, and thus the description is omitted.

[0055] When the position of the annular frame 3 placed on the upper surface 28 of the frame holding section 26 is adjusted, first, the two pins 32 of the first movable section 34 are moved along the first direction to abut against the side surface of the annular frame 3, and the annular frame 3 is clamped by the first fixed section 36 and the first movable section 34. Next, the two pins 38 of the second movable section 40 are moved along the second direction to abut against the side surface of the annular frame 3, and the annular frame 3 is clamped by the second fixed section 42 and the second movable section 40. At this time, the annular frame 3 is moved by the first movable section 34 and the second movable section 40.

[0056] In the frame holding section 26, the positions of the first fixed section 36, the first movable section 34, the second fixed section 42, and the second movable section 40 are determined in such a manner that the annular frame 3 is positioned at a prescribed position suitable for the attachment of the adhesive tape 5.

[0057] Next, the tape attaching unit 44 that attaches the adhesive tape 5 to the annular frame 3 and the substrate 1 will be described. In Figure 2 a perspective view that schematically shows the tape attaching unit 44 is included in FIG. 6. In Figure 5 a cross-sectional view that schematically shows the tape attaching unit 44 is included in FIG. 7.

[0058] The tape attaching unit 44 has a tape supply roller 46 that winds and stores a plurality of adhesive tapes 5 supported in a state peeled from the peeling tape 7, and a winding roller 56 that winds and recovers the peeling tape 7 from which the adhesive tape 5 is peeled. The adhesive tape 5 is supported in the peeling tape 7, for example, in a state cut into a prescribed shape that closes the opening section 3c of the annular frame 3. Here, the diameter of the adhesive tape 5 is larger than the opening section 3c and smaller than the outer diameter of the annular frame 3.

[0059] The tape attaching unit 44 also has a guide roller 48 that guides the peeling tape 7 pulled out from the tape supply roller 46, and a peeling section 52 that causes the peeling tape 7 guided by the guide roller 48 to be bent to be peeled from the adhesive tape 5. In addition, the tape attaching unit 44 has a guide roller 54 that guides the peeling tape 7 peeled from the adhesive tape 5 by the peeling section 52.

[0060] Furthermore, the tape attaching unit 44 also has a pressing roller 50 that can be raised and lowered above the holding unit 24 to press the adhesive tape 5 from which the peeling tape 7 is peeled by the peeling section 52 to be attached to the attached object from above. Here, the pressing roller 50 presses the adhesive tape 5 by raising and lowering the tape attaching unit 44. Alternatively, the holding unit 24 can also be able to be raised, and the adhesive tape 5 can be relatively pressed from above by the pressing roller 50 by raising the holding unit 24.

[0061] Further, the tape attaching unit 44 has a winding roller 56 that winds and recovers the peeled tape 7 peeled from the adhesive tape 5 and guided by the guide roller 54. The tape attaching unit 44 rotates the tape supply roller 46, the guide rollers 48, 54, and the winding roller 56 in linkage, and supplies the adhesive tape 5 to the adherend during movement of the peeled tape 7 from the tape supply roller 46 to the winding roller 56.

[0062] Next, the adhesive tape 5 is attached to the ring-shaped frame 3 and the substrate 1 held by the holding unit 24. First, the moving unit 20 is operated to move the holding unit 24 to the tape attaching area. At this time, the end portion of the ring-shaped frame 3 located on the front side (rear side in the moving direction (X-axis direction)) of the tape attaching device 2 is positioned below the pressing roller 50 of the tape attaching unit 44. Figure 5

[0063] Then, the tape attaching unit 44 is lowered to a predetermined height, the winding roller 56 and the like are rotated, and the peeled tape 7 is peeled from the adhesive tape 5 by the peeling portion 52. Thereafter, the adhesive tape 5 is attached to the ring-shaped frame 3 in a state where the adhesive surface 5a of the exposed adhesive tape 5 faces the back surface 3b of the ring-shaped frame 3. Further, the holding unit 24 is moved to the front side (rear side in the moving direction) of the tape attaching device 2 by the moving unit 20 while the portion of the adhesive tape 5 that has been attached to the ring-shaped frame 3 is pressed from above by the pressing roller 50.

[0064] Thus, the adhesive surface 5a of the adhesive tape 5 sequentially contacts the back surface 3b of the ring-shaped frame 3 from the end portion to the other end of the ring-shaped frame 3, the adhesive tape 5 is sequentially pressed by the pressing roller 50, and the adhesive tape 5 is gradually attached to the ring-shaped frame 3. At this time, when the back surface 1b of the substrate 1 approaches below the pressing roller 50, the adhesive tape 5 is also attached to the back surface 1b of the substrate 1.

[0065] Further, in order to prevent the adhesive tape 5 from being wrinkled or the like, the moving speed of each portion of the peeled tape 7 moving from the tape supply roller 46 to the winding roller 56 is made to coincide with the moving speed of the holding unit 24 moved by the moving unit 20. Then, when the pressing roller 50 reaches the other end of the ring-shaped frame 3, the attachment of the adhesive tape 5 to the ring-shaped frame 3 and the substrate 1 is completed.

[0066] When the adhesive tape 5 is attached to the ring-shaped frame 3 and the substrate 1 while being pressed by the pressing roller 50, air bubbles do not enter between the adhesive tape 5 and the ring-shaped frame 3 and the substrate 1, and the adhesive tape 5 does not become wrinkled. Thus, the frame unit 11 suitable for being carried into a processing device that processes the substrate 1 is formed.

[0067] ​At this time, in order to be able to appropriately press the adhesive tape 5 to the annular frame 3 and the substrate 1 arranged inside the opening portion 3c of the annular frame 3 by the pressing roller 50, the height of the back surface 3b of the annular frame 3 is preferably identical to the height of the back surface Ib of the substrate 1. For example, it is preferable that the height of the substrate holding portion 30 be changeable by the holding unit 24. Also, in the case where the thicknesses of the annular frame 3 and the substrate 1 are different from each other, it is preferable that the height of the substrate holding portion 30 be adjusted so as to make the heights of the back surfaces 3b, Ib identical to each other.

[0068] In addition, in the tape attaching unit 44, the release tape 7 can not be used. For example, the adhesive tape 5 in a long tape shape is wound on the tape supply roller 46, and after being attached to the annular frame 3 and the substrate 1, the adhesive tape 5 is cut off in the entire circumferential range between the inner periphery and the outer periphery of the annular frame 3. In this case, the tape attaching unit 44 has a cutter capable of cutting the adhesive tape 5 on the back surface 3b of the annular frame 3.

[0069] After the substrate 1, the annular frame 3, and the adhesive tape 5 are integrated to form the frame unit 11, the moving unit 20 is caused to operate so as to move the holding unit 24 to the carry-in / carry-out area. Then, the frame unit 11 is carried from the holding unit 24 to the case 8c placed on the case placement table 6c by the first carrying unit 12a.

[0070] The tape attaching apparatus 2 further has a control unit 2a that controls each structural element such as the respective case placement tables 6a, 6b, 6c, the respective carrying units 12a, 12b, the moving unit 20, the holding unit 24, the tape attaching unit 44, and the like.

[0071] The control unit 2a is constituted by a computer including a processing device such as a CPU (Central Processing Unit) and a storage device such as a flash memory. The control unit 2a functions as a specific unit in which software such as a program stored in the storage device and the processing device (hardware resource) cooperate, by causing the processing device to operate in accordance with the software.

[0072] The control unit 2a controls each structural element in accordance with an automatic program, for example, so as to sequentially form a plurality of frame units 11. When the automatic program is executed, a plurality of substrates 1 housed in the case 8a and a plurality of annular frames 3 housed in the case 8b are sequentially integrated by the adhesive tape 5, a plurality of frame units 11 are formed, and are housed in the case 8c.

[0073] Here, in the tape attaching device 2, there is a case where some kind of trouble occurs during execution of the automatic program and the function stops. For example, sometimes the tape attaching device 2 stops while the ring-shaped frame 3 is held to the frame holding portion 26. In this case, when the tape attaching device 2 is started again without taking out the ring-shaped frame 3, a new ring-shaped frame 3 is stacked on the remaining ring-shaped frame 3 at the time of resuming the formation of the frame unit 11 based on the automatic program.

[0074] Therefore, the adhesive tape 5 is attached by the tape attaching unit 44 to the substrate 1 held by the substrate holding portion 30 and the new ring-shaped frame 3. In this state, the attached surface (back surface 3b) of the ring-shaped frame 3 protrudes upward by the thickness of the remaining ring-shaped frame 3 more than the attached surface (back surface lb) of the substrate 1.

[0075] In the case where the height of the attached surface of the ring-shaped frame 3 is higher than the height of the attached surface of the substrate 1 at the time of implementing the attachment of the adhesive tape 5, the pressing roller 50 is supported by the ring-shaped frame 3, so the adhesive tape 5 cannot be pressed to the substrate 1 with sufficient force by the pressing roller 50. In this case, the adhesive tape 5 is attached to the substrate 1 in a state where air bubbles enter between the substrate 1 and the adhesive tape 5. Even if the frame unit 11 in which air bubbles exist between the adhesive tape 5 and the substrate 1 is carried into the processing device, the substrate 1 cannot be processed properly.

[0076] Further, even after the improper frame unit 11 has been formed, as long as the remaining ring-shaped frame 3 is not removed, in the tape attaching device 2, the problem occurs in all the frame units 11 formed thereafter. Further, there is no opportunity to notice such a defect during execution of the automatic program. That is, the defective frame units 11 continue to be formed until the frame units 11 of the prescribed number of the cartridges 8c are stored and the automatic program ends, and the damage is very large.

[0077] Therefore, in the tape attaching device 2 of the present embodiment, before implementing the attachment of the adhesive tape 5 to the substrate 1 and the ring-shaped frame 3, it is confirmed whether or not the ring-shaped frame 3 remains in the frame holding portion 26 of the holding unit 24. Hereinafter, the tape attaching device 2 of the present embodiment will be described further focusing on the structure that contributes to the detection of the remaining ring-shaped frame 3.

[0078] The frame holding portion 26 of the tape attaching device 2 further has a sensor that can detect whether or not the first movable portion 34 is positioned at the stop position of the first movable portion 34 when the ring-shaped frame 3 is positioned by the first movable portion 34 at the prescribed position. For example, as shown in FIG. 8, in the moving mechanism 72 of the frame holding portion 26, the automatic switch 68 is provided as the sensor at the outer periphery of the cylinder 66. Figure 3

[0079] ​With regard to the automatic switch 68 functioning as the sensor, for example, when the piston (not shown) moving in the front-rear direction in the space inside the cylinder 66 is positioned at a detection position, it is possible to detect that the piston is positioned at the detection position. For example, a magnet is incorporated in the piston, and the automatic switch 68 detects a magnetic field generated by the magnet.

[0080] Here, the detection position refers to the position of the piston when the first movable portion 34 has been positioned at a position suitable for performing the attachment of the annular frame 3 to the adhesive tape 5 when the annular frame 3 is placed on the frame holding portion 26. When the moving mechanism 72 is caused to act to move the first movable portion 34, the annular frame 3 comes into abutment with the fixed portion 36 and stops in the case where the annular frame 3 is placed on the frame holding portion 26, and the piston stops at the detection position. Thus, the automatic switch (sensor) 68 detects that the piston is at the detection position.

[0081] Thus, in the tape attaching apparatus 2 of the present embodiment, when the frame unit 11 is formed, before the annular frame 3 is carried from the cassette 8b to the frame holding portion 26 of the holding unit 24, it is confirmed by the automatic switch 68 whether there is a residual annular frame 3. Figure 7 (A) of FIG. 9 and Figure 7 (B) of FIG. 9 is a perspective view schematically showing the holding unit 24 when performing the confirmation operation with regard to the residual annular frame 3.

[0082] Figure 7 (A) of FIG. 10 is a perspective view schematically showing the frame holding portion 26 in the case where there is no residual annular frame 3. Also, Figure 7 (B) of FIG. 10 is a perspective view schematically showing the frame holding portion 26 in the case where there is a residual annular frame 3.

[0083] As shown in Figure 7 (B), in the case where there is a residual annular frame 3 on the frame holding portion 26, when the first movable portion 34 is moved, the annular frame 3 pushed by the first movable portion 34 collides with the fixed portion 36 and stops, and the first movable portion 34 (pin 32) stops. At this time, the pin 32 stops at the stop position 32a when the annular frame 3 is positioned at the prescribed position suitable for the attachment of the adhesive tape 5. When the automatic switch (sensor) 68 is used, it is possible to detect that the pin 32 of the first movable portion 34 stops at the stop position 32a.

[0084] For example, the cylinder 66 incorporating the automatic switch 68 is connected via a wire 70 to the control unit 2a (refer to FIG. 1). Figure 1) connection. The control unit 2a controls the cylinder 66 and receives the detection result of the automatic switch (sensor) 68 via the wiring 70. Also, the control unit 2a, when the first movable portion 34 is advanced and retracted, determines that the annular frame 3 is present on the upper surface 28 of the frame holding portion 26 in the case where the first movable portion 34 abuts against the annular frame 3 and stops on the stop position 32a.

[0085] That is, it is detected that the annular frame 3 is present remaining on the frame holding portion 26. In this case, the control unit 2a issues a warning to the user of the tape attaching apparatus 2 or the like and urges the removal of the remaining annular frame 3. Alternatively, the control first conveyance unit 12a removes the remaining annular frame 3 from the frame holding portion 26 and stores it in the cassette 8b or the like. Alternatively, without conveying a new annular frame 3 to the frame holding portion 26, the adhesive tape 5 is attached to the remaining annular frame 3 and the substrate 1 to form the frame unit 11.

[0086] On the other hand, as shown in (A) of FIG. 32, in the case where the annular frame 3 does not remain on the frame holding portion 26, when the pin 32 of the first movable portion 34 is moved, the pin 32 of the first movable portion 34 passes through the stop position 32a. That is, the automatic switch (sensor) 68 detects that the pin 32 of the first movable portion 34 does not stop at the stop position 32a. Figure 7 Also, the control unit 2a, when the first movable portion 34 is advanced and retracted, determines that the annular frame 3 is not present on the upper surface 28 of the frame holding portion 26 in the case where the first movable portion 34 does not abut against the annular frame 3 and does not stop at the stop position 32a. In this case, the control unit 2a starts the automatic program as usual, conveys the annular frame 3 and the substrate 1 to the holding unit 24 and attaches the adhesive tape 5 to form the frame unit 11.

[0087] As described above, in the tape attaching apparatus 2 of the present embodiment, it is possible to confirm whether or not the remaining annular frame 3 is present on the frame holding portion 26 before the annular frame 3 is conveyed to the frame holding portion 26 of the holding unit 24. Therefore, it is not possible to stack the new annular frame 3 on the remaining annular frame 3, and it is not possible to form the frame unit 11 that is not suitable for conveyance to the processing apparatus.

[0088] In addition, the present application is not limited to the description of the above-described embodiments, and various modifications can be made to implement it. For example, in the above-described embodiments, the case where it is detected by the automatic switch (sensor) 68 whether or not the pin 32 of the first movable portion 34 that moves in the first direction (X-axis direction) stops at the stop position 32a to detect the presence or absence of the remaining annular frame 3 is described. However, one mode of the present application is not limited thereto.

[0089]

[0090] ​For example, the frame holding portion 26 of the holding unit 24 can also have a second sensor capable of detecting whether the pin 38 of the second movable portion 40 is positioned on the stop position 38a of the pin 38 of the second movable portion 40 when the annular frame 3 is positioned at the prescribed position. In this case, for example, a second automatic switch (not shown) configured similarly to the above-described automatic switch 68 can be provided to the frame holding portion 26. Also, the presence or absence of the remaining annular frame 3 can be determined using the second sensor.

[0091] In the above-described embodiment, the case where the annular frame 3 is moved to a prescribed position suitable for the attachment of the adhesive tape 5 by sandwiching the annular frame 3 with the movable portions 34, 40 and the fixed portions 36, 42 is described. However, one embodiment of the present application is not limited thereto. For example, the frame holding portion 26 of the holding unit 24 can also have a link moving portion (not shown) instead of the fixed portions 36, 42, the link moving portion moving in directions opposite to the movable portions 34, 40 in linkage with the movable portions 34, 40, respectively.

[0092] In this case, the frame holding portion 26 can also move the annular frame 3 to a prescribed position on the upper surface 28 of the frame holding portion 26 by sandwiching the annular frame 3 with the movable portions 34, 40 and the link moving portion. Also, instead of the sensors capable of detecting whether the movable portions 34, 40 are positioned at the stop positions 38a, 38b, a sensor capable of detecting whether the link moving portion is positioned at a specific stop position can be provided to the frame holding portion 26. The sensor can be used to determine the presence or absence of the remaining annular frame 3.

[0093] In the above-described embodiment, the case where the first movable portion 34 for moving the annular frame 3 in a first direction and the second movable portion 40 for moving the annular frame 3 in a second direction perpendicular to the first direction are provided to the frame holding portion 26 is described. However, one embodiment of the present application is not limited thereto. For example, three movable portions that advance and retreat in directions different from each other by 60° toward the center of the substrate holding portion 30 can be provided to the frame holding portion 26, and four or more movable portions can also be provided.

[0094] In this case, the annular frame 3 placed on the upper surface 28 of the frame holding portion 26 can be moved to a prescribed position suitable for the attachment of the adhesive tape 5 by causing all the movable portions to operate. Also, in this case, when a sensor capable of detecting whether the movable portion is positioned at a prescribed stop position is provided to at least one movable portion, the presence or absence of the remaining annular frame 3 can be determined.

[0095] Therefore, in the tape attaching apparatus 2 of one embodiment of the present application, it is only necessary to provide a sensor that can detect whether the movable portion included in the frame holding portion 26 of the holding unit 24 is stopped at a prescribed stop position on at least one movable portion.

[0096] In addition to the above, the configuration, method, and the like of the above-described embodiments and modified examples can be appropriately changed and implemented within a range that does not depart from the object of the present application.

Claims

1. A tape applying device, which integrates an annular frame having an opening at the center and a plate-shaped substrate arranged at the opening of the annular frame by an adhesive tape having an adhesive surface, characterized in that: The tape applying device has: a holding unit having an annular frame holding portion for holding the annular frame and a substrate holding portion for holding the substrate, wherein the substrate holding portion is disposed in an opening of the frame holding portion having an opening formed at the center thereof; a conveying unit that conveys the annular frame to the frame holding portion of the holding unit; a tape applying unit for applying the adhesive tape to the annular frame held by the frame holding portion and the substrate held by the substrate holding portion while pressing the adhesive tape from above with a roller; as well as a control unit that controls the frame holding portion, The frame holding portion includes a movable portion protruding from an upper surface and capable of moving forward and backward in a direction parallel to the upper surface. The annular frame placed on the upper surface can be moved to a predetermined position by bringing the movable portion into contact with the annular frame. The frame holding portion includes a sensor capable of detecting whether the movable portion is positioned at a stop position of the movable portion when the annular frame is positioned at the predetermined position. Regarding the control unit, when the movable part is moved forward and backward before being transported to the frame holding part by the transport unit, if the movable part does not abut against the annular frame and does not stop at the stop position, it is determined that the annular frame does not exist on the upper surface of the frame holding part; if the movable part abuts against the annular frame and stops at the stop position, it is determined that the annular frame exists on the upper surface of the frame holding part.

2. The tape applying device according to claim 1, wherein: The movable portion includes two pins that abut against side surfaces of the annular frame.

3. The tape applying device according to claim 1 or 2, characterized in that: Regarding the control unit, when it is determined that the annular frame does not exist on the upper surface of the frame holding portion, the conveying unit is controlled to convey the annular frame to the upper surface of the frame holding portion, the frame holding portion is controlled to make the movable portion abut against the annular frame placed on the upper surface of the frame holding portion, thereby moving the annular frame to a specified position, and then, the tape pasting unit is controlled to press the adhesive tape from above with a roller while pasting the adhesive tape to the annular frame and the substrate.

4. A tape applying device, which integrates an annular frame having an opening at the center and a plate-like substrate arranged at the opening of the annular frame by means of an adhesive tape having an adhesive surface, characterized in that: The tape applying device has: a holding unit having an annular frame holding portion for holding the annular frame and a substrate holding portion for holding the substrate, wherein the substrate holding portion is disposed in an opening of the frame holding portion having an opening formed at the center thereof; a conveying unit that conveys the annular frame to the frame holding portion of the holding unit; a tape applying unit that places the adhesive surface of the adhesive tape facing the annular frame held by the frame holding portion and the substrate held by the substrate holding portion, and applies the adhesive tape to the annular frame and the substrate while pressing the adhesive tape from above with a roller; and a control unit that controls the frame holding portion, The frame holding portion has: a first fixing portion protruding from the upper surface and restricting movement of the annular frame in a first direction parallel to the upper surface; a second fixing portion protruding from the upper surface and restricting movement of the annular frame in a second direction perpendicular to the first direction; a first movable portion protruding from the upper surface, facing the first fixed portion and moving forward and backward along the first direction, thereby sandwiching the annular frame with the first fixed portion; as well as a second movable portion protruding from the upper surface, facing the second fixed portion and moving forward and backward along the second direction, thereby sandwiching the annular frame with the second fixed portion; The frame holding portion can position the annular frame at a predetermined position by clamping the annular frame with the first fixed portion and the first movable portion and clamping the annular frame with the second fixed portion and the second movable portion. The frame holding portion further includes a sensor capable of detecting whether the first movable portion is positioned at a stop position of the first movable portion when the annular frame is positioned at the predetermined position. Regarding the control unit, when the first movable part is moved forward and backward before the annular frame is transported to the frame holding part by the transport unit, if the first movable part does not abut against the annular frame and does not stop at the stop position, it is determined that the annular frame does not exist on the upper surface of the frame holding part; if the first movable part abuts against the annular frame and stops at the stop position, it is determined that the annular frame exists on the upper surface of the frame holding part.

5. The tape applying device according to claim 4, characterized in that The first movable portion or the second movable portion has two pins that abut against the side surface of the annular frame.

6. The tape applying device according to claim 4 or 5, characterized in that: Regarding the control unit, when it is determined that the annular frame does not exist on the upper surface of the frame holding portion, the conveying unit is controlled to convey the annular frame to the upper surface of the frame holding portion, the frame holding portion is controlled to make the first movable portion and the second movable portion abut against the annular frame placed on the upper surface of the frame holding portion, thereby moving the annular frame to a specified position, and then, the tape pasting unit is controlled to press the adhesive tape from above with a roller while pasting the adhesive tape to the annular frame and the substrate.

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