A device and method for measuring atomic oxygen flux density

Abstract

The present invention discloses a device and method for measuring atomic oxygen flux density. The device provided by the present invention includes a tray, an interlayer and a cover plate; the tray is provided with a plurality of first recessed holes for placing samples, and the first recessed holes are arranged axially symmetrically with the symmetry axis of the tray; the shapes and sizes of any of the first recessed holes are the same; in use, the sample is placed in the first recessed hole of the tray, and the interlayer and the cover plate are placed on the tray in sequence. The present invention can effectively solve the problem of atomic oxygen erosion of the test sample during the atomic oxygen density measurement test, and can accurately measure the flux density of atomic oxygen. The invention can also accurately measure the uniformity of the atomic oxygen flux density, reduce the atomic oxygen flux density deviation, improve the accuracy of atomic oxygen test data, and promote the research and development, application and development progress of aerospace products.

Description

Technical Field

[0001] The invention relates to the technical field of spacecraft environment simulation, and in particular to a device and method for measuring atomic oxygen flux density. Background Art

[0002] In the orbital altitude of 200-1000km in space, atomic oxygen is the most abundant component of space gas, accounting for about 80%. Atomic oxygen is produced by the photodissociation of residual oxygen molecules in space by solar ultraviolet rays with a wavelength less than 240nm, and is one of the most dangerous environmental factors in low-Earth orbit. Atomic oxygen has high chemical activity, and its oxidizing effect is much greater than that of oxygen molecules. Atomic oxygen will corrode spacecraft materials exposed to the space environment. When atomic oxygen interacts with the surface of the spacecraft, crack initiation points will form on the surface of the material, causing erosion and degrading the material performance, thereby affecting the normal operation and service life of the spacecraft. The performance and duration of spacecraft surface materials in the atomic oxygen environment in space are not only related to the erosion rate of the material itself, but also to the density of atomic oxygen.

[0003] Flight tests are the most direct and effective means of studying the environmental effects of atomic oxygen, but they are expensive and technically difficult, so the current research method is usually ground simulation tests. Based on the research ideas of ground simulation of atomic oxygen effects at home and abroad, the main focus is on studying atomic oxygen beams with high quality and high flux density, so as to conduct accelerated exposure tests of materials in a shorter time and screen spacecraft surface materials.

[0004] The measurement method of the flux density of ground simulation equipment has a great influence on the accuracy and effectiveness of the simulation test. A lot of research has been done on the measurement method of atomic oxygen flux density at home and abroad, and the most commonly used method is the Kapton film mass loss method. The atomic oxygen erosion rate of Kapton material during space flight is relatively stable. Therefore, the mass loss of Kapton material under the action of atomic oxygen is used to infer the atomic oxygen flux density at the location of the sample.

[0005] The patent application number 201010523070.7 on a method for measuring atomic oxygen flux density proposes a method for obtaining the atomic oxygen flux density by measuring the change in the open-circuit current of the battery using a solar cell as a detector probe. This method is relatively complex and costly, and is not applicable to ground simulation tests. The patent application numbers 201810745850.2 and 200910235752.5 use a graphene oxide film as the sensitive layer of the atomic oxygen sensor, and calculate the atomic oxygen flux density by measuring the resistance change of the sensitive layer. This method has high requirements for the ambient temperature and cannot measure the uniformity of the atomic oxygen flux density. The patent application number 201710780829.1 on an atomic oxygen integrated flux measurement method and an atomic oxygen sensor uses a Wheatstone bridge method to measure the atomic oxygen flux density. This method is sensitive to the ambient temperature and cannot measure the uniformity of atomic oxygen when applied to atomic oxygen ground simulation equipment. The document "Effect of Atomic Oxygen on Metallic Copper" proposes a tooling for measuring atomic oxygen flux density using the Kapton film mass loss method, but the device is prone to atomic oxygen side corrosion, resulting in inaccurate measurement results and poor uniformity of measurement results.

[0006] At present, the research on the measurement method of atomic oxygen flux density has not put forward any requirements for the atomic oxygen uniformity of the ground simulation system or the uniformity of the measurement results is poor, and the proposed measurement methods are more complicated or costly. Summary of the invention

[0007] The object of the present invention is to provide a device and method capable of eliminating the undercut of atomic oxygen and accurately measuring the flux density and uniformity of atomic oxygen.

[0008] In order to achieve the above object, the present invention provides a device for measuring atomic oxygen flux density, comprising a tray, an interlayer and a cover plate;

[0009] The tray is provided with a plurality of first concave holes for placing samples, and the first concave holes are arranged axially symmetrically with respect to the symmetry axis of the tray; and the shapes and sizes of any of the first concave holes are the same;

[0010] In a use state, the sample is placed in the first concave hole of the tray, and the interlayer and the cover plate are then placed on the tray in sequence.

[0011] Optionally, a second recessed hole matching the first recessed hole is provided on the interlayer; a third recessed hole matching the second recessed hole is provided on the cover plate; the second recessed hole and the third recessed hole have the same shape as the first recessed hole; in use, the second recessed hole can be embedded in the first recessed hole, and the third recessed hole can be embedded in the second recessed hole.

[0012] Optionally, the area of ​​the second concave hole is smaller than that of the first concave hole; the area of ​​the third concave hole is smaller than that of the first concave hole; and the distance between the edge of the third concave hole and the edge of the first concave hole is 2-5 mm.

[0013] Optionally, the cover plate, the interlayer and the tray are all provided with through holes; when in use, screws can pass through the through holes on the cover plate, the interlayer and the tray in sequence to fix the cover plate, the interlayer and the tray together.

[0014] Optionally, the interlayer is a polyimide film.

[0015] Optionally, there are 7-48 first recessed holes.

[0016] Optionally, the first recessed hole is a square with a side length of 12 mm to 32 mm.

[0017] Optionally, the first recessed hole is circular, and its diameter is 12 mm-32 mm.

[0018] The present invention also provides a method for measuring atomic oxygen flux density using the above device, wherein the first concave hole is square, a third concave hole having the same shape as the first concave hole is provided on the cover plate, and the area of ​​the third concave hole is smaller than the area of ​​the first concave hole, and the method comprises:

[0019] Step 1: Place the first group of samples in the first concave holes of the tray, and place two samples in each first concave hole, which are stacked and recorded as i-upper and i-lower (i is a natural number, indicating the number of first concave holes); place the interlayer on the samples, and then place the cover plate on the interlayer;

[0020] Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber;

[0021] Step 3: vacuum place for 2h-4h;

[0022] Step 4, take out the sample and weigh the mass of the sample, which is recorded as m0iup and m0idown;

[0023] Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, evacuate the sample, and then introduce oxygen to adjust the vacuum degree to 1.7×10 -1 Pa-3.0×10 -1 After Pa, the atomic oxygen generator was turned on;

[0024] Step 6: Take out the sample and record the atomic oxygen test time Δt; weigh the mass of the sample, recorded as m i上 、m i下 ; Among them, Δt is 1h-2h;

[0025] Step 7: Calculate the atomic oxygen flux density:

[0026]

[0027] Wherein, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, S is the area of ​​the sample, L is the side length of the first concave hole, and L0 is the difference between the side lengths of the first concave hole and the third concave hole.

[0028] The present invention also provides a method for measuring atomic oxygen flux density using the above device, wherein the first concave hole is circular, a third concave hole having the same shape as the first concave hole is provided on the cover plate, and the area of ​​the third concave hole is smaller than the area of ​​the first concave hole, and the method comprises:

[0029] Step 1: Place the first group of samples in the first concave holes of the tray. In each first concave hole, two samples are stacked and placed, denoted as i. 上 and i 下 (i is a natural number, indicating the number of the first concave holes); placing the interlayer on the sample, and then placing the cover plate on the interlayer;

[0030] Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber;

[0031] Step 3: vacuum place for 2h-4h;

[0032] Step 4: Take out the sample and weigh the mass of the sample, recorded as m 0i上 、m 0i下 ;

[0033] Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, evacuate the sample, and then introduce oxygen to adjust the vacuum degree to 1.7×10 -1 Pa-3.0×10 -1 After Pa, the atomic oxygen generator was turned on;

[0034] Step 6: Take out the sample and record the atomic oxygen test time Δt; weigh the mass of the sample, recorded as m i上 、m i下 ; Among them, Δt is 1h-2h;

[0035] Step 7: Calculate the atomic oxygen flux density:

[0036]

[0037] Wherein, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, D is the diameter of the first concave hole, and D0 is the difference between the diameters of the first concave hole and the third concave hole.

[0038] The beneficial effects of the present invention are:

[0039] The atomic oxygen flux density measurement method and device of the present invention can effectively solve the problem of atomic oxygen erosion of the test sample during the atomic oxygen density measurement test, and can accurately measure the flux density of atomic oxygen. In addition, the invention can accurately measure the uniformity of the atomic oxygen flux density, reduce the atomic oxygen flux density deviation, improve the accuracy of atomic oxygen test data, and promote the research and development, application and development progress of aerospace products. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a schematic diagram of a device provided in Example 1 of the present invention.

[0041] Figure 2 for Figure 1 Sectional view of section AA.

[0042] Figure 3 This is a schematic diagram of the device tray provided in Example 1 of the present invention.

[0043] Figure 4 This is a schematic diagram of the device interlayer provided in Example 1 of the present invention.

[0044] Figure 5 This is a schematic diagram of the device cover provided in Example 1 of the present invention.

[0045] Figure 6 This is a schematic diagram of the device interlayer provided in Example 2 of the present invention.

[0046] Figure 7 for Figure 6 Sectional view of section AA.

[0047] Figure 8 This is a schematic diagram of the device tray provided in Example 2 of the present invention.

[0048] Fig. 9 This is a schematic diagram of the device interlayer provided in Example 2 of the present invention.

[0049] Fig.10 This is a schematic diagram of the device cover provided in Example 2 of the present invention.

[0050] In the figure, 1-tray, 11-first concave hole, 2-interlayer, 21-second concave hole, 3-cover plate, 31-third concave hole, 4-through hole. DETAILED DESCRIPTION

[0051] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0053] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] like Figure 1 and Figure 2 As shown, the present invention provides a device for measuring atomic oxygen flux density, comprising a tray 1, an interlayer 2 and a cover plate 3.

[0055] like Figure 3 As shown, the tray 1 is provided with a plurality of first recessed holes 11 for placing samples, and the first recessed holes 11 are arranged axially symmetrically with respect to the symmetry axis of the tray 1, and the shapes and sizes of any first recessed holes 11 are the same to ensure the uniformity and accuracy of the measurement results. Preferably, 7-48 first recessed holes 11 are provided. In the use state, the sample is placed in the first recessed hole 11 of the tray 1, and the interlayer 2 and the cover plate 3 are placed on the tray 1 in sequence.

[0056] like Figure 4 As shown, the interlayer 2 is provided with a second concave hole 21, and the position of the second concave hole 21 corresponds to the position of the first concave hole 11, so that after the sample is placed in the first concave hole 11 and the interlayer 2 is placed on the tray 1, the second concave hole 21 is embedded in the first concave hole 11. Preferably, the interlayer 2 is a polyimide film.

[0057] When atomic oxygen is injected into the sample and the tray 1, there is reflection and scattering. Some atomic oxygen will be reflected or scattered to the side of the sample after multiple reflections or will enter the gap between the cover plate and the sample after multiple collisions and reflections, causing erosion on the side or bottom of the sample, increasing mass loss and causing large errors in the calculation of atomic oxygen flux density. By providing a polyimide film interlayer 2, most of the atomic oxygen entering the gap will be reacted between the polyimide film interlayer and the front of the sample, thereby reducing the erosion of the side and bottom of the sample by atomic oxygen.

[0058] like Figure 5 As shown, the cover plate 3 is provided with a third concave hole 31, and the position of the third concave hole 31 corresponds to the position of the first concave hole 11 and the second concave hole 21, so that after the interlayer 2 is placed on the tray 1 and the cover plate 3 is placed on the interlayer 2, the third concave hole 31 further presses the second concave hole 21 into the first concave hole 11 and presses the sample in the first concave hole 11. Preferably, the second concave hole 21 and the third concave hole 31 have the same shape as the first concave hole 11; the edges of the second concave hole 21 and the third concave hole 31 are slightly smaller than the edges of the first concave hole 11, so that the second concave hole 21 and the third concave hole 31 can be embedded in the first concave hole 11, that is, the areas of the second concave hole 21 and the third concave hole 31 are smaller than the area of ​​the first concave hole 11. The distance between the edge of the third concave hole 31 and the edge of the first concave hole 11 is 2-5mm.

[0059] Preferably, the tray 1, the interlayer 2 and the cover plate 3 are all provided with through holes 4; when in use, screws can sequentially pass through the through holes 4 respectively provided on the cover plate 3, the interlayer 2 and the tray 1 to fix the cover plate 3, the interlayer and the tray 1 together.

[0060] Example 1

[0061] like Figure 1-Figure 5 As shown, the tray 1, interlayer 2 and cover plate 3 of the device for measuring atomic oxygen flux density are circular with a diameter of 160 mm. 48 first recessed holes 11 are opened on the tray 1. In this example, the first recessed holes 11 are square with a side length of 12 mm. The depth of the first recessed holes 11 is 0.1 mm, which is consistent with the thickness of the interlayer 2, so as to reduce the deformation of the sample when the cover plate 3 and the tray 1 are tightened, thereby reducing the risk of the sample being eroded by atomic oxygen.

[0062] The interlayer 2 is provided with a second concave hole 21, and the cover plate 3 is provided with a third concave hole 31. The second concave hole 21 and the third concave hole 31 are squares with a side length of 10 mm. The side lengths of the second concave hole 21 and the third concave hole 31 are 2 mm smaller than the first concave hole 11. By reducing the size of the concave holes on the interlayer 2 and the cover plate 3, the passage of atomic oxygen is necked, which can prevent atomic oxygen from entering the edge of the first concave hole of the sample tray from the edge of the second concave hole and the third concave hole. The probability of the scattered or reflected atomic oxygen acting on the side surface (sample thickness surface) of the sample through the passage is greatly reduced, thereby avoiding the side erosion of the sample placed in the first concave hole 11 of the tray 1 by atomic oxygen.

[0063] The method of using the atomic oxygen flux density device comprises the following steps:

[0064] Step 1: Clean the sample surface with anhydrous ethanol, place the first group of samples in the first concave holes of the tray, and stack two samples in each first concave hole, which are respectively marked as 1 and 上 , 1 下 , 2 上 , 2 下 , 3 上 , 3 下 ……48 上 and 48 下 ; Place the interlayer on the sample, and then place the cover on the interlayer;

[0065] Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber;

[0066] Step 3: vacuum place for 4 hours;

[0067] Step 4: Take out the sample and weigh the mass of the sample, recorded as m 01上 、m 01下 、m 02上 、m 02下 m 03上 、m 03下 ……m 048上 and m 048下 ;

[0068] Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, and evacuate to 1.3×10 -3 Pa, and then introduce oxygen to adjust the vacuum degree to 2.0×10 -1 After Pa, the atomic oxygen generator was turned on;

[0069] Step 6: After the atomic oxygen generator is turned on for 1 hour, take out the sample; weigh the mass of the sample, recorded as m 1上 、m 1下 、m 2上 、m 2下 、m 3上、m 3下 ……m 48上 and m 48下 ;

[0070] Step 7: Calculate the atomic oxygen flux density according to the following formula:

[0071]

[0072] Wherein, Δt is 1h, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, L is the side length of the first concave hole, and L0 is the difference between the side lengths of the first concave hole and the third concave hole.

[0073] The equivalent atomic oxygen flux density Φ measured at each hole position is calculated by the above formula: i , take the average value Φ 平 , the atomic oxygen flux density non-uniformity is The maximum value of the atomic oxygen flux density non-uniformity is 5% and the minimum value is 0.1% through calculation. Generally, it is considered that the atomic oxygen flux density value is sufficiently accurate when the atomic oxygen flux density non-uniformity is less than 10%. The non-uniformity data measured by the device provided by the present invention are all far less than 10%, indicating that the device can accurately measure the uniformity of the atomic oxygen flux density, reduce the atomic oxygen flux density deviation, and improve the accuracy of the atomic oxygen test data.

[0074] Example 2

[0075] like Figure 6-Figure 10 As shown, the tray 1, interlayer 2 and cover plate 3 of the device for measuring atomic oxygen flux density are circular with a diameter of 160 mm. Nine first concave holes 11 are opened on the tray 1. In this example, the first concave holes 11 are circular with a diameter of 32 mm. The depth of the first concave holes 11 is 0.1 mm, which is consistent with the thickness of the interlayer 2, so as to reduce the deformation of the sample when the cover plate 3 and the tray 1 are tightened, thereby reducing the risk of the sample being eroded by atomic oxygen.

[0076] The interlayer 2 is provided with a second concave hole 21, and the cover plate 3 is provided with a third concave hole 31. The second concave hole 21 and the third concave hole 31 are circular with a diameter of 30 mm. The diameters of the second concave hole 21 and the third concave hole 31 are 2 mm smaller than the first concave hole 11. By reducing the size of the concave holes on the interlayer 2 and the cover plate 3, atomic oxygen can be prevented from entering the concave hole edge of the sample tray from the concave hole edge, thereby avoiding the side erosion of the sample placed in the first concave hole 11 of the tray 1 by atomic oxygen.

[0077] The method of using the atomic oxygen flux density device comprises the following steps:

[0078] Step 1: Clean the sample surface with anhydrous ethanol, place the first group of samples in the first concave holes of the tray, and stack two samples in each first concave hole, which are respectively marked as 1 and 上 , 1 下 , 2 上 , 2 下 , 3 上 , 3 下 ……9 上 and 9 下 ; Place the interlayer on the sample, and then place the cover on the interlayer;

[0079] Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber;

[0080] Step 3: vacuum place for 4 hours;

[0081] Step 4: Take out the sample and weigh the mass of the sample, recorded as m 01上 、m 01下 、m 02上 、m 02下 m 03上 、m 03下 ……m 09上 and m 09下 ;

[0082] Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, and evacuate to 1.3×10 -3 Pa, and then introduce oxygen to adjust the vacuum degree to 2.0×10 -1 After Pa, the atomic oxygen generator was turned on;

[0083] Step 6: After the atomic oxygen generator is turned on for 2 hours, take out the sample; weigh the mass of the sample, recorded as m 1上 、m 1下 、m 2上 、m 2下 、m 3上 、m 3下 ……m 9上 and m 9下 ;

[0084] Step 7: Calculate the atomic oxygen flux density according to the following formula:

[0085]

[0086] Wherein, Δt is 2h, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, D is the diameter of the first concave hole, and D0 is the difference between the diameters of the first concave hole and the third concave hole.

[0087] The equivalent atomic oxygen flux density Φ measured at each hole position is calculated by the above formula:i , take the average value Φ 平 , the atomic oxygen flux density non-uniformity is The calculation shows that the maximum value of the atomic oxygen flux density non-uniformity is 4%, and the minimum value is 0.5%.

[0088] In summary, the device for measuring atomic oxygen flux density provided by the present invention can accurately measure the flux density of atomic oxygen, and can effectively solve the lateral corrosion of atomic oxygen on the test sample during the atomic oxygen density measurement test. In addition, the invention can accurately measure the uniformity of atomic oxygen flux density, reduce the atomic oxygen flux density deviation, improve the accuracy of atomic oxygen test data, and promote the research and development, application and development progress of aerospace products. The method for measuring atomic oxygen flux density provided by the present invention will provide an effective solution for simulating the ground atomic oxygen test environment of space materials.

[0089] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A device for measuring atomic oxygen flux density, characterized in that: Including tray, interlayer and cover; The tray is provided with a plurality of first concave holes for placing samples, and the first concave holes are arranged axially symmetrically with respect to the symmetry axis of the tray; and the shapes and sizes of any of the first concave holes are the same; In the use state, the sample is placed in the first concave hole of the tray, and the interlayer and the cover plate are placed on the tray in sequence; The interlayer is provided with a second concave hole matching the first concave hole; The cover plate is provided with a third concave hole matching the second concave hole; The second concave hole and the third concave hole have the same shape as the first concave hole; In a use state, the second concave hole can be embedded in the first concave hole, and the third concave hole can be embedded in the second concave hole; The interlayer is a polyimide film.

2. The device according to claim 1, characterized in that The area of ​​the second concave hole is smaller than the area of ​​the first concave hole; The area of ​​the third concave hole is smaller than the area of ​​the first concave hole; The distance between the edge of the third concave hole and the edge of the first concave hole is 2-5 mm.

3. The device according to claim 1, characterized in that The cover plate, interlayer and tray are all provided with through holes; when in use, screws can pass through the through holes on the cover plate, interlayer and tray in sequence to fix the cover plate, interlayer and tray together.

4. The device according to claim 1, characterized in that There are 7 to 48 first concave holes.

5. The device according to claim 1, characterized in that The first concave hole is a square with a side length of 12 mm to 32 mm.

6. The device according to claim 1, characterized in that The first concave hole is circular, and its diameter is 12mm-32mm.

7. A method for measuring atomic oxygen flux density, using the device according to any one of claims 1 to 5, characterized in that: The first concave hole is square, a third concave hole having the same shape as the first concave hole is provided on the cover plate, and an area of ​​the third concave hole is smaller than an area of ​​the first concave hole, and the method comprises: Step 1: Place the first group of samples in the first concave holes of the tray. In each first concave hole, two samples are stacked and placed, denoted as i. 上 and i 下 ; Wherein, i is a natural number, indicating the number of the first recessed holes; placing the interlayer on the sample, and then placing the cover on the interlayer; Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber; Step 3: vacuum place for 2h-4h; Step 4: Take out the sample and weigh the mass of the sample, recorded as m 0i上 、m 0i下 ; Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, evacuate the sample, and then introduce oxygen to adjust the vacuum degree to 1.7×10 -1 Pa-3.0×10 -1 After Pa, the atomic oxygen generator was turned on; Step 6: Take out the sample and record the atomic oxygen test time Δt; weigh the mass of the sample, recorded as m i上 、m i下 ; Among them, Δt is 1h-2h; Step 7: Calculate the atomic oxygen flux density: Wherein, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, S is the area of ​​the sample, L is the side length of the first concave hole, and L0 is the difference between the side lengths of the first concave hole and the third concave hole.

8. A method for measuring atomic oxygen flux density, using the device according to any one of claims 1 to 4 or claim 6, characterized in that: The first concave hole is circular, a third concave hole having the same shape as the first concave hole is provided on the cover plate, and an area of ​​the third concave hole is smaller than an area of ​​the first concave hole, and the method comprises: Step 1: Place the first group of samples in the first concave holes of the tray. In each first concave hole, two samples are stacked and placed, denoted as i. 上 and i 下 ; Wherein, i is a natural number, indicating the number of the first recessed holes; placing the interlayer on the sample, and then placing the cover on the interlayer; Step 2: The cover plate, the interlayer and the tray are fixedly connected and placed in the atomic oxygen test chamber; Step 3: vacuum place for 2h-4h; Step 4: Take out the sample and weigh the mass of the sample, recorded as m 0i上 、m 0i下 ; Step 5: Place the second set of samples in the first concave hole of the tray, repeat steps 1 and 2, evacuate the sample, and then introduce oxygen to adjust the vacuum degree to 1.7×10 -1 Pa-3.0×10 -1 After Pa, the atomic oxygen generator was turned on; Step 6: Take out the sample and record the atomic oxygen test time Δt; weigh the mass of the sample, recorded as m i上 、m i下 ; Among them, Δt is 1h-2h; Step 7: Calculate the atomic oxygen flux density: Wherein, Φ is the atomic oxygen flux density, η is the polyimide film stripping rate, ρ is the density of the sample, D is the diameter of the first concave hole, and D0 is the difference between the diameters of the first concave hole and the third concave hole.

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