Wafer unloading tool after dicing

Abstract

The application discloses a post-cut wafer blanking tool and belongs to the technical field of related automation of semiconductor photovoltaic crystal bar slicing. The existing blanking tool has a complex overall mechanism structure and a high failure rate. In the process of placing the post-cut wafer into a frame, cutting fluid splashes, thereby polluting the equipment and causing the inductor to misjudge, resulting in frequent alarms. The blanking tool comprises a transfer machine, the transfer machine comprises a frame assembly, a frame positioning assembly is arranged on the side wall of the frame assembly, first and second flap flattening assemblies are arranged on the upper part of the side wall of the frame assembly, and a first pressure rod opening assembly is arranged on one side of the first flap flattening assembly. In the application, the complexity of the blanking process is greatly simplified, the efficiency of blanking is improved, the complexity of the structure is simplified, the failure rate is reduced, and the risk of equipment pollution caused by cutting fluid splashing is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor photovoltaic wafer slicing automation, in particular to a wafer unloading tool after slicing. BACKGROUND

[0002] Semiconductor refers to the material with electrical conductivity between conductor and insulator at room temperature, and semiconductor has application in the fields of integrated circuit, consumer electronics, communication system, photovoltaic power generation, illumination, high-power power conversion, etc. Diode is a device made of semiconductor. From the perspective of science and technology or economic development, the importance of semiconductor is very great. The core unit of most electronic products, such as computer, mobile phone or digital recorder, is closely related to semiconductor.

[0003] The original unloading tool uses many servo motors, lead screws, linear guide rails and other linear motion mechanisms, and many cylinders are used for auxiliary positioning and opening and closing of the material frame. The overall mechanism structure is complex, the failure rate is high, and during the process of placing the wafer after slicing into the material frame, cutting fluid splashes, which pollutes the equipment and causes the inductor to misjudge, resulting in frequent alarms. Therefore, the wafer unloading tool after slicing is proposed to solve the above problems. SUMMARY

[0004] The purpose of the present application is to provide a wafer unloading tool after slicing to solve the problems raised in the background.

[0005] To achieve the above purpose, the present application provides the following technical scheme: a wafer unloading tool after slicing, comprising a transfer machine, the transfer machine comprising a frame assembly, a material frame positioning assembly is arranged on the side wall of the frame assembly, a first flap flattening assembly and a second flap flattening assembly are arranged on the upper part of the side wall of the frame assembly, a first pressure rod opening assembly is arranged on one side of the first flap flattening assembly.

[0006] The frame assembly comprises a first frame body and a second frame body, an electric control box is fixedly connected to the outer side wall of the first frame body, and an air path assembly is arranged below the electric control box.

[0007] The material frame positioning assembly comprises a cylinder, a first connecting plate is arranged on one side of the cylinder, and a second connecting plate is arranged on the other side of the cylinder, the first flap flattening assembly comprises a sliding table cylinder, and the first pressure rod opening assembly comprises a clamping cylinder.

[0008] As a preferred technical scheme of the present application, the first flap flattening assembly and the second flap flattening assembly are the same, the first flap flattening assembly and the second flap flattening assembly are located above the material frame positioning assembly, the first flap flattening assembly is located on one side of the second frame body, and the second flap flattening assembly is located on one side of the first frame body.

[0009] As a preferred technical scheme of the present application, one side of the first pressing rod opening assembly is provided with a second pressing rod opening assembly, which is identical to the first pressing rod opening assembly.

[0010] As a preferred technical scheme of the present application, the middle part of the side wall of the first frame body is fixedly connected with a first cross beam, the upper part of the side wall of the first frame body is fixedly connected with a second cross beam, one end of the first cross beam away from the first frame body is fixedly connected with the second frame body, and the second cross beam is fixedly connected with the second frame body.

[0011] As a preferred technical scheme of the present application, the side wall of the air cylinder is provided with a first fixing seat, and the air cylinder is connected with the first frame body through the first fixing seat.

[0012] As a preferred technical scheme of the present application, one side of the first connecting plate away from the air cylinder is fixedly connected with a second fixing seat, one side of the second fixing seat away from the first connecting plate is provided with a roller fixing seat, the two sides of the roller fixing seat are provided with pressing blocks, the roller fixing seat is fixedly connected with the second fixing seat through the pressing blocks, the inner side wall of the roller fixing seat is provided with a roller, the inside of the roller is fixedly connected with a rotating shaft, the roller is rotatably connected with the roller fixing seat through the rotating shaft, one side of the first connecting plate facing the air cylinder is provided with a floating joint, the two sides of the floating joint are provided with guide shafts, one end of each guide shaft is fixedly connected with the first connecting plate, the other end of each guide shaft is fixedly connected with a second connecting plate, the side wall of each guide shaft is provided with a linear bearing, the side of the air cylinder is fixedly connected with a stop block, and the side wall of the second connecting plate is provided with a buffer.

[0013] As a preferred technical scheme of the present application, the air path assembly is fixed with the first frame body, the air path assembly comprises an electrical plate, the side wall of the electrical plate is fixedly connected with a pressure regulating valve, one side wall of the pressure regulating valve is provided with an L-shaped straight joint, the other side wall of the pressure regulating valve is provided with a pipe joint, the upper side of the pressure regulating valve is provided with a cross-shaped four-way joint, one side of the cross-shaped four-way joint is provided with a T-shaped three-way joint, the cross-shaped four-way joint and the T-shaped three-way joint are connected with the electrical plate, one side of the pressure regulating valve is provided with a solenoid valve, the side wall of the solenoid valve is provided with a valve seat, the solenoid valve is connected with the electrical plate through the valve seat, the side wall of the valve seat is provided with a silencer, the other side wall of the valve seat is provided with a plug, one side of the valve seat away from the electrical plate is provided with a cover plate, and one side of the valve seat away from the pressure regulating valve is provided with a three-union combination.

[0014] As a preferred technical scheme of the present application, the side wall of the sliding table air cylinder is provided with a first air cylinder fixing plate, the sliding table air cylinder is fixedly connected with the frame assembly through the first air cylinder fixing plate, the output shaft of the sliding table air cylinder is fixedly connected with a pressure roller fixing block, and the side wall of the pressure roller fixing block is provided with a cam follower.

[0015] As a preferred technical scheme of the present application, the side wall of the clamping cylinder is provided with a second cylinder fixing plate, the clamping cylinder is fixedly connected with the frame assembly through the second cylinder fixing plate, the side wall of the clamping cylinder is rotatably connected with a swing rod fixing plate, the side wall of the swing rod fixing plate is provided with a connecting shaft, and the end of the connecting shaft away from the swing rod fixing plate is provided with a swing rod.

[0016] As a preferred technical scheme of the present application, the side wall of the frame assembly is fixedly connected with a fixed support, the end surface of the fixed support is fixedly connected with a guide block, the side wall of the first frame body is fixedly connected with a first sensor mounting plate, the side wall of the second frame body is fixedly connected with a photoelectric opening mirror, the photoelectric opening mirror corresponds to the first sensor mounting plate, the side wall of the second cross beam is fixedly connected with a second sensor mounting plate, the side wall of the second sensor mounting plate is provided with a photoelectric sensor in a matched mode, the upper side of the first cross beam is provided with a drum conveying line, the top surface of the drum conveying line is provided with a baffle, and the side of the baffle away from the drum conveying line is fixedly connected with the second frame body.

[0017] Compared with the prior art, the present application has the beneficial effects that: the present application cancels the servo, lead screw, guide rail and other mechanisms, and all adopts the cylinder to realize the opening of the material frame, greatly simplifies the complexity of the downlink process, improves the efficiency of the downlink, and simplifies the complexity of the structure, thereby reducing the failure rate and the risk of equipment pollution caused by cutting fluid splashing. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a schematic view of the structure of the present application,

[0019] Figure 2 is another schematic view of the structure of the present application,

[0020] Figure 3 is a schematic view of the material frame positioning assembly structure of the present application,

[0021] Figure 4 is an exploded view of the material frame positioning assembly of the present application,

[0022] Figure 5 is a schematic view of the gas circuit assembly structure of the present application,

[0023] Figure 6 is a schematic view of the first flap flattening assembly structure of the present application,

[0024] Figure 7 is a schematic view of the first pressure rod opening assembly structure of the present application,

[0025] Figure 8 is a schematic view of the frame assembly structure of the present application.

[0026] In the figure: 1, reclaimer; 2, material frame positioning assembly; 3, air path assembly; 4, first flap flattening assembly; 5, second flap flattening assembly; 6, first pressure rod opening assembly; 7, second pressure rod opening assembly; 8, frame assembly; 9, fixed support; 10, guide block; 11, first inductor mounting plate; 12, second inductor mounting plate; 13, baffle; 14, mounting seat; 15, photoelectric inductor; 16, photoelectric light opening reflector; 17, roller conveying line; 18, electric control box; 201, air cylinder; 202, first fixed seat; 203, guide shaft; 204, first connecting plate; 205, second fixed seat; 206, roller fixed seat; 207, roller; 208, rotating shaft; 209, pressing block; 210, second connecting plate; 211, stop block; 212, linear bearing; 213, buffer; 214, floating joint; 301, T-shaped tee; 302, pressure regulating valve; 303, L-shaped straight-through joint; 304, pipe joint; 305, valve seat; 306, electromagnetic valve; 307, silencer; 308, cover plate; 309, plug; 310, triplex combination; 311, electrical board; 312, cross-shaped cross; 401, first air cylinder fixed plate; 402, sliding table air cylinder; 403, pressure roller fixed block; 404, cam follower; 601, second air cylinder fixed plate; 602, swing lever; 603, clamping air cylinder; 604, connecting shaft; 605, swing lever fixed plate; 801, first frame body; 802, second frame body; 803, first cross beam; 804, second cross beam. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0028] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] Example: Figures 1-8 As shown, the present invention provides a wafer unloading fixture after dicing, including a transfer machine 1. The transfer machine 1 includes a frame assembly 8. A material frame positioning assembly 2 is provided on the side wall of the frame assembly 8. A first flip-plate flattening assembly 4 and a second flip-plate flattening assembly 5 are provided on the upper part of the side wall of the frame assembly 8. The first flip-plate flattening assembly 4 and the second flip-plate flattening assembly 5 are the same. The first flip-plate flattening assembly 4 and the second flip-plate flattening assembly 5 are located above the material frame positioning assembly 2. The first flip-plate flattening assembly 4 is located on one side of the second frame 802, and the second flip-plate flattening assembly 5 is located on one side of the first frame 801. A first pressure rod opening assembly 6 is provided on one side of the first flip-plate flattening assembly 4, and a second pressure rod opening assembly 7 is provided on one side of the first pressure rod opening assembly 6. The second pressure rod opening assembly 7 is the same as the first pressure rod opening assembly 6.

[0030] The frame assembly 8 comprises a first frame body 801 and a second frame body 802, a first cross beam 803 is fixedly connected to the middle part of the side wall of the first frame body 801, a second cross beam 804 is fixedly connected to the upper part of the side wall of the first frame body 801, the end of the first cross beam 803 away from the first frame body 801 is fixedly connected with the second frame body 802, the second cross beam 804 is fixedly connected with the second frame body 802, the side wall of the frame assembly 8 is fixedly connected with a fixed support 9, the end surface of the fixed support 9 is fixedly connected with a guide block 10, a mounting seat 14 is arranged below the guide block 10, the mounting seat 14 is used for mounting an inductor, the side wall of the first frame body 801 is fixedly connected with a first inductor mounting plate 11, the side wall of the second frame body 802 is fixedly connected with a photoelectric light opening mirror 16, the photoelectric light opening mirror 16 corresponds to the first inductor mounting plate 11, the side wall of the second cross beam 804 is fixedly connected with a second inductor mounting plate 12, the side wall of the second inductor mounting plate 12 is cooperatively provided with a photoelectric inductor 15, the upper part of the first cross beam 803 is provided with a roller conveying line 17, the top surface of the roller conveying line 17 is provided with a baffle 13, one side of the baffle 13 away from the roller conveying line 17 is fixedly connected with the second frame body 802, and the outer side wall of the first frame body 801 is fixedly connected with an electric control box 18;

[0031] The lower part of the electric control box 18 is provided with an air path assembly 3, the air path assembly 3 is fixed with the first frame body 801, and the air path assembly 3 comprises an electrical plate 311, the side wall of the electrical plate 311 is fixedly connected with a pressure regulating valve 302, the side wall of the pressure regulating valve 302 is provided with an L-shaped straight-through connector 303, the other side wall of the pressure regulating valve 302 is provided with a pipe connector 304, the upper part of the pressure regulating valve 302 is provided with a cross-shaped four-way connector 312, one side of the cross-shaped four-way connector 312 is provided with a T-shaped three-way connector 301, the cross-shaped four-way connector 312 and the T-shaped three-way connector 301 are connected with the electrical plate 311, one side of the pressure regulating valve 302 is provided with a solenoid valve 306, the side wall of the solenoid valve 306 is provided with a valve seat 305, the solenoid valve 306 is connected with the electrical plate 311 through the valve seat 305, the side wall of the valve seat 305 is provided with a silencer 307, the other side wall of the valve seat 305 is provided with a plug 309, one side of the valve seat 305 away from the electrical plate 311 is provided with a cover plate 308, and one side of the valve seat 305 away from the pressure regulating valve 302 is provided with a three-in-one combination 310;

[0032] The material frame positioning assembly 2 comprises a cylinder 201, the side wall of the cylinder 201 is provided with a first fixing seat 202, the cylinder 201 is connected with the first frame body 801 through the first fixing seat 202, one side of the cylinder 201 is provided with a first connecting plate 204, the other side of the cylinder 201 is provided with a second connecting plate 210, the side away from the cylinder 201 of the first connecting plate 204 is fixedly connected with a second fixing seat 205, the side away from the first connecting plate 204 of the second fixing seat 205 is provided with a roller fixing seat 206, the two sides of the roller fixing seat 206 are provided with pressing blocks 209, the roller fixing seat 206 is fixedly connected with the second fixing seat 205 through the pressing blocks 209, the inner side wall of the roller fixing seat 206 is provided with a roller 207, the inside of the roller 207 is fixedly connected with a rotating shaft 208, the roller 207 is rotationally connected with the roller fixing seat 206 through the rotating shaft 208, the side of the first connecting plate 204 towards the cylinder 201 is provided with a floating joint 214, the two sides of the floating joint 214 are provided with guide shafts 203, one end of the guide shaft 203 is fixedly connected with the first connecting plate 204, the other end of the guide shaft 203 is fixedly connected with the second connecting plate 210, the side wall of the guide shaft 203 is provided with a linear bearing 212, the side of the cylinder 201 is fixedly connected with a stop block 211, the side wall of the second connecting plate 210 is provided with a buffer 213 in a penetrating mode;

[0033] The first flap flattening assembly 4 comprises a sliding table cylinder 402, the side wall of the sliding table cylinder 402 is provided with a first cylinder fixing plate 401, the sliding table cylinder 402 is fixedly connected with the frame assembly 8 through the first cylinder fixing plate 401, the output shaft of the sliding table cylinder 402 is fixedly connected with a pressing wheel fixing block 403, the side wall of the pressing wheel fixing block 403 is provided with a cam follower 404, the first pressing rod opening assembly 6 comprises a clamping cylinder 603, the side wall of the clamping cylinder 603 is provided with a second cylinder fixing plate 601, the clamping cylinder 603 is fixedly connected with the frame assembly 8 through the second cylinder fixing plate 601, the side wall of the clamping cylinder 603 is rotationally connected with a swing rod fixing plate 605, the side wall of the swing rod fixing plate 605 is provided with a connecting shaft 604, one end of the connecting shaft 604 away from the swing rod fixing plate 605 is provided with a swing rod 602.

[0034] Working principle: when the material frame is conveyed to the discharging tooling through the roller conveying line 17, the inductor detects that the material frame is in place, and then the material frame positioning assembly 2 starts to act to position the material frame, and then the first flap flattening assembly 4 and the second flap flattening assembly 5 start to act to open the pressing plate, and then the robot sends the cut product into the material frame, and then the pressing plate opening and closing assembly retreats, the pressing plate clamps the wafer by using the self-tension spring and the torsional spring, then the first flap flattening assembly 4 and the second flap flattening assembly 5 start to retreat, then the material frame positioning assembly 2 also retreats, and the roller conveying line 17 reverses to make the material frame output with the roller conveying line 17.

[0035] While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely exemplary of the principles and application of the present application. Numerous modifications and adaptions can be made without departing from the spirit and scope of the present application, which is defined by the following claims and their equivalents.

Claims

1. A post-dicing wafer handling tool, comprising a transfer machine (1), characterized in that: The transfer machine (1) comprises a frame assembly (8), the side wall of the frame assembly (8) is provided with a frame positioning assembly (2), the upper part of the side wall of the frame assembly (8) is provided with a first flap flattening assembly (4) and a second flap flattening assembly (5), one side of the first flap flattening assembly (4) is provided with a first pressure rod opening assembly (6); The frame assembly (8) comprises a first frame body (801) and a second frame body (802), the outer side wall of the first frame body (801) is fixedly connected with an electric control box (18), and the lower part of the electric control box (18) is provided with an air path assembly (3); The frame positioning assembly (2) comprises a gas cylinder (201), one side of the gas cylinder (201) is provided with a first connecting plate (204), the other side of the gas cylinder (201) is provided with a second connecting plate (210), the first flap flattening assembly (4) comprises a sliding table gas cylinder (402), the side wall of the sliding table gas cylinder (402) is provided with a first gas cylinder fixing plate (401), the sliding table gas cylinder (402) is fixedly connected with the frame assembly (8) through the first gas cylinder fixing plate (401), the output shaft of the sliding table gas cylinder (402) is fixedly connected with a pressure roller fixing block (403), the side wall of the pressure roller fixing block (403) is provided with a cam follower (404), the first pressure rod opening assembly (6) comprises a clamping gas cylinder (603), the side wall of the clamping gas cylinder (603) is provided with a second gas cylinder fixing plate (601), the clamping gas cylinder (603) is fixedly connected with the frame assembly (8) through the second gas cylinder fixing plate (601), the side wall of the clamping gas cylinder (603) is rotatably connected with a swing rod fixing plate (605), the side wall of the swing rod fixing plate (605) is provided with a connecting shaft (604), and one end of the connecting shaft (604) away from the swing rod fixing plate (605) is provided with a swing rod (602).

2. The post-cut wafer blanking fixture of claim 1, wherein: The first flap flattening assembly (4) and the second flap flattening assembly (5) are the same, the first flap flattening assembly (4) and the second flap flattening assembly (5) are located above the frame positioning assembly (2), the first flap flattening assembly (4) is located on one side of the second frame body (802), and the second flap flattening assembly (5) is located on one side of the first frame body (801).

3. The post-cut wafer blanking fixture of claim 1, wherein: One side of the first pressure rod opening assembly (6) is provided with a second pressure rod opening assembly (7), and the second pressure rod opening assembly (7) is the same as the first pressure rod opening assembly (6).

4. The post-cut wafer blanking fixture of claim 1, wherein: The side wall of the first frame body (801) is fixedly connected with a first cross beam (803) in the middle, the side wall of the first frame body (801) is fixedly connected with a second cross beam (804) at the upper part, one end of the first cross beam (803) away from the first frame body (801) is fixedly connected with the second frame body (802), and the second cross beam (804) is fixedly connected with the second frame body (802).

5. The post-cut wafer blanking fixture of claim 1, wherein: The side wall of the gas cylinder (201) is provided with a first fixing seat (202), and the gas cylinder (201) is connected with the first frame body (801) through the first fixing seat (202).

6. The post-cut wafer blanking fixture of claim 1, wherein: The second fixed base (205) is fixedly connected with the first connecting plate (204), and the second fixed base (205) is provided with a roller fixed base (206) away from the first connecting plate (204), the two sides of the roller fixed base (206) are provided with a pressing block (209), the roller fixed base (206) is fixedly connected with the second fixed base (205) through the pressing block (209), the inner side wall of the roller fixed base (206) is provided with a roller (207), the roller (207) is fixedly connected with the roller fixed base (206) through the rotating shaft (208), the first connecting plate (204) is provided with a floating joint (214) towards the cylinder (201), the two sides of the floating joint (214) are provided with a guide shaft (203), one end of the guide shaft (203) is fixedly connected with the first connecting plate (204), the other end of the guide shaft (203) is fixedly connected with the second connecting plate (210), the side wall of the guide shaft (203) is provided with a linear bearing (212), the side of the cylinder (201) is fixedly connected with a stop block (211), the side wall of the second connecting plate (210) is provided with a buffer (213).

7. The post-cut wafer blanking fixture of claim 1, wherein: The gas circuit assembly (3) is fixed with the first frame body (801), the gas circuit assembly (3) comprises an electrical plate (311), the side wall of the electrical plate (311) is fixedly connected with a pressure regulating valve (302), the side wall of the pressure regulating valve (302) is provided with an L-shaped straight connector (303), the other side wall of the pressure regulating valve (302) is provided with a pipe joint (304), the upper side of the pressure regulating valve (302) is provided with a cross-shaped four-way (312), one side of the cross-shaped four-way (312) is provided with a T-shaped three-way (301), the cross-shaped four-way (312) and the T-shaped three-way (301) are connected with the electrical plate (311), one side of the pressure regulating valve (302) is provided with a solenoid valve (306), the side wall of the solenoid valve (306) is provided with a valve seat (305), the solenoid valve (306) is connected with the electrical plate (311) through the valve seat (305), the side wall of the valve seat (305) is provided with a silencer (307), the other side wall of the valve seat (305) is provided with a plug (309), one side of the valve seat (305) away from the electrical plate (311) is provided with a cover plate (308), one side of the valve seat (305) away from the pressure regulating valve (302) is provided with a three-in-one combination (310).

8. The post-cut wafer blanking tool of claim 4, wherein: The side wall of the frame assembly (8) is fixedly connected with a fixed support (9), the end face of the fixed support (9) is fixedly connected with a guide block (10), the side wall of the first frame body (801) is fixedly connected with a first inductor mounting plate (11), the side wall of the second frame body (802) is fixedly connected with a photoelectric open light reflector (16), the photoelectric open light reflector (16) corresponds to the first inductor mounting plate (11), the side wall of the second cross beam (804) is fixedly connected with a second inductor mounting plate (12), the side wall of the second inductor mounting plate (12) is provided with a photoelectric inductor (15) in a matched mode, the upper side of the first cross beam (803) is provided with a roller conveying line (17), the top face of the roller conveying line (17) is provided with a baffle (13), and the side, away from the roller conveying line (17), of the baffle (13) is fixedly connected with the second frame body (802).

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