Device and method for monitoring visible and invisible light energy of laser

Abstract

The present invention discloses a monitoring device and method for the energy of visible and invisible light of a laser. The device includes a primary spectroscope, a secondary spectroscope, and a tertiary spectroscope. The output light of the laser is divided into transmitted light and reflected light by the primary spectroscope. The transmitted light is used as a working light path, and the reflected light is used as a monitoring light path. The reflected light is incident on the secondary spectroscope and is divided into primary visible light and primary invisible light by the secondary spectroscope. The primary visible light is then incident on a tertiary spectroscope and is divided into two paths of secondary visible light by the tertiary spectroscope. The primary invisible light is then incident on another tertiary spectroscope and is divided into two paths of secondary invisible light by the corresponding tertiary spectroscope. Each path of secondary visible light and secondary invisible light is respectively connected to a laser energy meter. The present invention first uses a spectroscope to separate light into visible light and invisible light, and then monitors the visible light part and the invisible light part respectively, solving the problem of different light dose limit standards for visible light and invisible light. Double redundancy of each path improves reliability.

Description

Technical Field

[0001] The present invention relates to the technical field of laser monitoring, and in particular to a device and method for monitoring visible light and invisible light energy of a laser. Background Art

[0002] like Figure 1 As shown, laser energy is typically monitored in real time using a spectroscope and a set of energy meters. Failure of only one energy meter can easily cause the laser energy to exceed the specified value. Furthermore, the error in the output energy measurement is affected by the meter's accuracy, resulting in significant measurement errors. Summary of the Invention

[0003] The object of the present invention is to provide a device and method for monitoring the energy of visible light and invisible light of a laser.

[0004] The technical solution adopted in the present invention is:

[0005] A monitoring device for the energy of visible and invisible light of a laser comprises a primary beam splitter, a secondary beam splitter and a tertiary beam splitter. The output light of the laser is divided into transmitted light and reflected light by the primary beam splitter. The transmitted light is used as a working light path, and the reflected light is used as a monitoring light path. The reflected light is incident on the secondary beam splitter and is divided into primary visible light and primary invisible light by the secondary beam splitter. The primary visible light is then incident on a tertiary beam splitter and is divided into two paths of secondary visible light by the tertiary beam splitter. The primary invisible light is then incident on another tertiary beam splitter and is divided into two paths of secondary invisible light by the corresponding tertiary beam splitter. Each path of secondary visible light and secondary invisible light is respectively connected to a laser energy meter.

[0006] Furthermore, the main beam splitter has a splitting ratio of 99:1. Of course, those skilled in the art can select a main beam splitter with an appropriate splitting ratio according to specific application scenarios, for example, a main beam splitter with a splitting ratio of 98:2; if the laser energy is weak, a main beam splitter with a splitting ratio of 4:1 or other appropriate splitting ratios can be further selected to ensure that the reflected light has sufficient energy for detection.

[0007] Furthermore, the splitting ratio of the secondary beam splitter is 1:1, but is not limited to 1:1. Those skilled in the art can select an appropriate splitting ratio according to specific application scenarios.

[0008] Furthermore, the splitting ratio of the two three-stage beam splitters is 1:1, but is not limited to 1:1. Those skilled in the art can select an appropriate splitting ratio according to specific application scenarios.

[0009] Furthermore, a grating and a convex lens are sequentially provided at the front end of the input end of the laser energy meter along the direction of the light path.

[0010] Furthermore, the output end of the laser energy meter is connected to a sampling device, which collects data from various channels and processes them to obtain energy data of visible light and invisible light.

[0011] Furthermore, the present invention also discloses a method for monitoring the energy of visible light and invisible light of a laser, which comprises the following steps:

[0012] Step 1: Use the main beam splitter to separate the reflected light from the laser output light as the monitoring light;

[0013] Step 2, using a secondary spectroscope to split the monitoring light into visible light and invisible light;

[0014] Step 3: Using a three-stage beam splitter, the visible light is split into two paths of secondary visible light, and the two paths are output to a laser energy meter respectively;

[0015] Another three-stage beam splitter is used to split the invisible light into two paths of secondary invisible light, and the two paths are output to a laser energy meter respectively;

[0016] Step 4: Each laser energy meter collects and obtains the laser energy value of the visible light or invisible light of the corresponding optical path.

[0017] Furthermore, the splitting ratio of the main beam splitter in step 1 is 99:1.

[0018] Furthermore, the splitting ratios of the two three-stage beam splitters in step 3 are both 1:1.

[0019] Furthermore, in step 4, before each light beam enters the laser energy meter, a grating is used to filter out stray light and a convex lens is used to expand the light beam.

[0020] Furthermore, it also includes step 5, the sampling device collects energy data of each channel of visible light and invisible light and processes it to obtain light output monitoring data of the laser.

[0021] The present invention adopts the above technical solution, first uses a spectroscope to separate light into visible light and invisible light, and then monitors the visible light part and the invisible light part separately, solving the problem of different visible light and invisible light output dose limit standards, and double redundancy of each channel improves reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments;

[0023] Figure 1 A schematic diagram of the structure of a traditional laser energy monitoring device with a single energy meter;

[0024] Figure 2 Schematic diagram of the structure of the monitoring device for visible light and invisible light energy of the laser of the present invention;

[0025] Figure 3 The figure is a schematic diagram of the structure of the monitoring device for the visible and invisible light energy of the laser of the present invention. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0027] like Figure 2 As shown, the present invention discloses a monitoring device for the energy of visible light and invisible light of a laser, which includes a main beam splitter, a secondary beam splitter and a tertiary beam splitter. The output light of the laser is divided into transmitted light and reflected light by the main beam splitter. The transmitted light is used as a working light path, and the reflected light is used as a monitoring light path. The reflected light is incident on the secondary beam splitter and is divided into primary visible light and primary invisible light by the secondary beam splitter. The primary visible light is incident on a tertiary beam splitter and is divided into two paths of secondary visible light by the tertiary beam splitter. The primary invisible light is incident on another tertiary beam splitter and is divided into two paths of secondary invisible light by the corresponding tertiary beam splitter. Each path of secondary visible light and secondary invisible light is respectively connected to a laser energy meter.

[0028] Furthermore, as a preferred embodiment, the main beam splitter has a splitting ratio of 99:1. Of course, those skilled in the art can select a main beam splitter with an appropriate splitting ratio according to the specific application scenario, for example, a main beam splitter with a splitting ratio of 98:2. If the laser energy is weak, a main beam splitter with a splitting ratio of 4:1 or other appropriate splitting ratio can be further selected to ensure that the reflected light has sufficient energy for detection.

[0029] Furthermore, as a preferred embodiment, the splitting ratio of the secondary beam splitter is 1:1, but is not limited to 1:1. Those skilled in the art can select an appropriate splitting ratio according to specific application scenarios.

[0030] Furthermore, as a preferred embodiment, the splitting ratio of the two three-stage beam splitters is 1:1, but is not limited to 1:1. Those skilled in the art can select an appropriate splitting ratio according to the specific application scenario.

[0031] Furthermore, if Figure 3 As shown in the figure, a grating and a convex lens are arranged in sequence at the front end of the input end of the laser energy meter along the direction of the optical path. The grating is used to filter out incoherent stray light, and the convex lens is used to expand the light beam to avoid excessive concentration of light on the center of gravity of the energy probe, resulting in waste of measurement area and high quantization noise caused by uneven energy distribution.

[0032] Furthermore, the output end of the laser energy meter is connected to a sampling device, which collects data from various channels and processes them to obtain energy data of visible light and invisible light.

[0033] Furthermore, the present invention also discloses a method for monitoring the energy of visible light and invisible light of a laser, which comprises the following steps:

[0034] Step 1: Use the main beam splitter to separate the reflected light from the laser output light as the monitoring light;

[0035] Step 2, using a secondary spectroscope to split the monitoring light into visible light and invisible light;

[0036] Step 3: Using a three-stage beam splitter, the visible light is split into two paths of secondary visible light, and the two paths are output to a laser energy meter respectively;

[0037] Another three-stage beam splitter is used to split the invisible light into two paths of secondary invisible light, and the two paths are output to a laser energy meter respectively;

[0038] Step 4: Each laser energy meter collects and obtains the laser energy value of the visible light or invisible light of the corresponding optical path.

[0039] Furthermore, the splitting ratio of the main beam splitter in step 1 is 99:1.

[0040] Furthermore, the splitting ratios of the two three-stage beam splitters in step 3 are both 1:1.

[0041] Furthermore, in step 4, before each light beam enters the laser energy meter, a grating is used to filter out stray light and a convex lens is used to expand the light beam.

[0042] Furthermore, it also includes step 5, the sampling device collects energy data of each channel of visible light and invisible light and processes it to obtain light output monitoring data of the laser.

[0043] The present invention adopts the above technical solution, first uses a spectroscope to separate light into visible light and invisible light, and then monitors the visible light part and the invisible light part separately, solving the problem of different visible light and invisible light output dose limit standards, and double redundancy of each channel improves reliability.

[0044] Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. In the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the detailed description of the embodiments of the present application is not intended to limit the scope of the application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

Claims

1. A monitoring device for laser visible and invisible light energy, characterized by: It includes a main beam splitter, a secondary beam splitter and a tertiary beam splitter. The output light of the laser is divided into transmitted light and reflected light by the main beam splitter. The transmitted light is used as the working light path, and the reflected light is used as the monitoring light path. The reflected light is incident on the secondary beam splitter and is divided into primary visible light and primary invisible light by the secondary beam splitter. The primary visible light is incident on a tertiary beam splitter and is divided into two secondary visible light paths by the tertiary beam splitter. The primary invisible light is incident on another tertiary beam splitter and is divided into two secondary invisible light paths by the corresponding tertiary beam splitter. Each secondary visible light path and each secondary invisible light path are respectively connected to a laser energy meter. The front end of the input end of the laser energy meter is provided with a grating and a convex lens in sequence along the direction of the light path; The output end of the laser energy meter is connected to the sampling device, which collects the data from various channels and processes them to obtain the energy data of visible light and invisible light; The splitting ratio of the main beam splitter is 99:1; the splitting ratios of the two third-stage beam splitters are both 1:

1.

2. A method for monitoring the energy of visible and invisible laser light, comprising: The method comprises the following steps: Step 1: Use the main beam splitter to separate the reflected light from the laser output light as the monitoring light; the main beam splitter has a splitting ratio of 99:1; Step 2, using a secondary spectroscope to split the monitoring light into visible light and invisible light; Step 3: Using a three-stage beam splitter, the visible light is split into two paths of secondary visible light, and the two paths are output to a laser energy meter respectively; Another three-stage beam splitter is used to split the invisible light into two paths of secondary invisible light, which are respectively output to a laser energy meter; the splitting ratio of the two three-stage beam splitters is 1:1; Step 4: Each laser energy meter collects and obtains the laser energy value of the visible light or invisible light of the corresponding optical path; before each light path is incident on the laser energy meter, stray light is filtered out by a grating and the light beam is expanded by a convex lens; In step 5, the sampling device collects the energy data of each visible light and invisible light and processes it to obtain the laser light output monitoring data.

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