Method, device, equipment and storage medium for assigning transmittance of layout graphics

Abstract

The present application discloses a method, device, equipment and storage medium for assigning transmittance of a layout graphic. The method includes: dividing the dot matrix formed by the vertices of the target graphic to obtain at least two triangles, the target graphic is a graphic in the layout graphic that needs to be assigned transmittance, the triangle is composed of three vertices, and the area of ​​the circumscribed circle of any triangle does not contain other vertices; determining the first type of triangle and the second type of triangle in the triangle according to the centroid of the triangle, the first type of triangle is the triangle in the area where the target graphic is located, and the second type of triangle is the triangle outside the area where the target graphic is located; assigning transmittance to the target graphic according to the type of triangle. The present application determines whether the target graphic is located in the area where the target graphic is located by using the centroid of the triangle obtained by dividing the vertices of the target graphic, thereby assigning transmittance to the triangles inside and outside the target graphic respectively, thereby improving the accuracy of the assignment.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a method, device, equipment and storage medium for assigning transmittance of a layout graphic. Background Art

[0002] In the semiconductor manufacturing industry, integrated circuit layout data is usually stored as a GDSII file. In the GDSII file, the shape data of the layout graphics usually includes vertex information of the polygons contained in the graphics.

[0003] refer to Figure 1 , which shows a partial schematic diagram of an integrated circuit layout provided in the related art, such as Figure 1 As shown, the layout includes a figure 100 having four vertices a1, b1, c1, and d1, and its corresponding GDSII file includes {[a1, b1, c1, d1, a1]}{[(0,0), (1,0), (1,10), (10,0), (0,0)]}, that is, in the GDSII file, the shape feature of the figure is the vertex information (vertices and their corresponding coordinates) in sequence around the closed figure, and the first vertices are connected.

[0004] During the lithography simulation process, it is necessary to assign transmittance to the simulated two-dimensional grid according to the layout data (also known as "rasterization" of the layout data), that is, to obtain a two-dimensional grid of the graphic according to the layout data and assign transmittance to each grid point in the two-dimensional grid.

[0005] However, since in a GDSII file, the shape of a graphic is the vertex information of the polygons it contains, it is difficult to determine whether the local graphic surrounded by the vertex is inside or outside the graphic through the vertex information, thereby reducing the accuracy of the simulation. Summary of the invention

[0006] The present application provides a method, device, equipment and storage medium for assigning transmittance of a layout graphic, which can solve the problem of low simulation accuracy of the method for assigning transmittance of a layout graphic provided in the related art.

[0007] On the one hand, an embodiment of the present application provides a method for assigning transmittance of a layout graphic, comprising:

[0008] The dot matrix formed by the vertices of the target figure is divided into at least two triangles, wherein the target figure is a figure in the layout figure to be assigned a transmittance, the triangle is formed by three vertices, and the circumscribed circle of any triangle does not contain other vertices;

[0009] Determine a first type of triangle and a second type of triangle among the triangles according to the centroid of the triangle, wherein the first type of triangle is a triangle within the region where the target figure is located, and the second type of triangle is a triangle outside the region where the target figure is located;

[0010] The transmittance of the target graphic is assigned according to the type of the triangle.

[0011] Optionally, determining the first type of triangle and the second type of triangle in the triangle according to the centroid of the triangle includes:

[0012] For any center of gravity, calculate the vector angle formed by the center of gravity and any two consecutive vertices among each of the vertices;

[0013] Performing vector summation on the vector angles to obtain the vector angle sum of the center of gravity;

[0014] When the sum of the vector angles is zero, it is determined that the triangle corresponding to the center of gravity is the second type of triangle.

[0015] Optionally, also include:

[0016] When the sum of the vector angles is not zero, it is determined that the triangle corresponding to the centroid is the first type of triangle.

[0017] Optionally, the step of dividing the point matrix formed by the vertices of the target graphic to obtain at least two triangles includes:

[0018] The point matrix is ​​triangulated by a Delaunay triangulation algorithm to obtain the triangle.

[0019] Optionally, assigning a transmittance value to the target graphic according to the type of the triangle includes:

[0020] Generating a two-dimensional grid of the layer where the target graphic is located according to a preset accuracy;

[0021] Assigning transmittance to the mesh of the area where the first type of triangles are located;

[0022] The transmittances of the grids in other areas of the two-dimensional grid are assigned.

[0023] Optionally, there are regions with different transmittances in the region where the first type of triangles are located.

[0024] Optionally, the transmittances of the other regions are the same.

[0025] On the other hand, an embodiment of the present application provides a device for assigning transmittance of a layout pattern, comprising:

[0026] An identification module, used for dividing a dot matrix formed by vertices of a target figure to obtain at least two triangles, wherein the target figure is a figure in the layout figure to be assigned a transmittance, the triangle is formed by three vertices, and the area of ​​the circumscribed circle of any triangle does not contain other vertices; determining a first type of triangle and a second type of triangle in the triangle according to the center of gravity of the triangle, wherein the first type of triangle is a triangle in the area where the target figure is located, and the second type of triangle is a triangle outside the area where the target figure is located;

[0027] The assignment module is used to assign a transmittance value to the target graphic according to the type of the triangle.

[0028] On the other hand, an embodiment of the present application provides a computer device, including a processor and a memory, wherein the memory stores at least one instruction or program, and the instruction or program is loaded and executed by the processor to implement the transmittance assignment method of a layout graphic as described above.

[0029] On the other hand, an embodiment of the present application provides a computer-readable storage medium, wherein at least one instruction is stored in the storage medium, and the instruction is loaded and executed by a processor to implement any of the above-described methods for assigning transmittance of a layout graphic.

[0030] The technical solution of this application has at least the following advantages:

[0031] By dividing the point matrix formed by the vertices of the target figure into at least two triangles, it is determined whether the triangle is located in the area where the target figure is located according to the center of gravity of the triangle, and the transmittance of the triangles located inside and outside the area where the target figure is located is assigned respectively. This solves the problem of low assignment accuracy caused by the difficulty in judging whether the area surrounded by the vertices is within the area of ​​the figure provided in the related art, thereby improving the accuracy of the transmittance assignment. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 It is a partial schematic diagram of an integrated circuit layout provided in the related art;

[0034] Figure 2 is a flow chart of a method for assigning transmittance of a layout graphic provided by an exemplary embodiment of the present application;

[0035] Figure 3 It is a schematic diagram of a triangle obtained by lattice decomposition in a method for assigning transmittance of a layout graphic provided by an exemplary embodiment of the present application;

[0036] Figure 4 is a flow chart of a method for assigning transmittance of a layout graphic provided by an exemplary embodiment of the present application;

[0037] Figure 5 is a schematic diagram of the calculated centroid of the triangle;

[0038] Figure 6 It is a schematic diagram of the vector angle corresponding to the center of gravity;

[0039] Figure 7 It is a schematic diagram of a two-dimensional grid of the local area where the target graphic is located;

[0040] Figure 8 is a block diagram of a transmittance assignment device for a layout pattern provided by an exemplary embodiment of the present application;

[0041] Fig. 9 is a block diagram of a computer device provided by an exemplary embodiment of the present application. DETAILED DESCRIPTION

[0042] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in this application. Obviously, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0043] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0044] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can also be the internal connection of two components, it can be a wireless connection, or it can be a wired connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0046] refer to Figure 2 , which shows a flow chart of a method for assigning transmittance of a layout pattern provided by an exemplary embodiment of the present application, which method can be executed by a computer device, such as Figure 2 As shown, the method includes:

[0047] Step 201, dividing the point matrix formed by the vertices of the target figure into at least two triangles.

[0048] The target figure is a figure in the layout figure that needs to be assigned a transmittance value. A triangle is composed of three vertices, and the area of ​​the circumscribed circle of any triangle does not contain other vertices.

[0049] refer to Figure 3 , which shows a schematic diagram of a triangle obtained by lattice decomposition. For example, Figure 3 As shown, the target figure is a Z-shaped figure as an example for explanation. The Z-shaped target figure has 8 vertices 300. The point matrix formed by the vertices 300 is divided according to the above rules to obtain triangles 1, 2, 3, 4, 5, 6, 7, and 8. The area of ​​the circumscribed circle of any of these triangles does not contain other vertices. Among them, the point matrix can be divided by the Delaunay triangulation algorithm to obtain the required triangle.

[0050] It should be noted that in the embodiment of the present application, the beneficial effect of selecting the Delaunay triangulation algorithm to divide the point lattice is that when the point lattice is divided by this algorithm, the result will not be affected by the different starting points, thereby improving the accuracy of the division.

[0051] Step 202, determining first-category triangles and second-category triangles in the triangle according to the centroid of the triangle, the first-category triangles are triangles within the region where the target figure is located, and the second-category triangles are triangles outside the region where the target figure is located.

[0052] Since the triangle obtained by dissecting according to the above rules is a convex hull figure, the centroid of the triangle is inside the triangle. Therefore, by judging whether the centroid of the triangle is in the area where the target figure is located, it can be determined whether the triangle corresponding to the centroid is in the area where the target figure is located, thereby realizing the judgment of the type of triangle.

[0053] Step 203: assigning transmittance to the target graphic according to the type of the triangle.

[0054] Usually, the transmittance inside and outside the area where the target graphic is located is different. The transmittance of the area where the first type of triangle is located and other areas can be assigned by preset values, thereby achieving transmittance assignment for the target graphic.

[0055] To summarize, in the embodiment of the present application, at least two triangles are obtained by subdividing the point matrix formed by the vertices of the target graphic, and whether the triangle is located in the area where the target graphic is located is determined according to the center of gravity of the triangle, thereby assigning transmittance to the triangles located inside and outside the area where the target graphic is located, respectively. This solves the problem of low assignment accuracy caused by the difficulty in determining whether the area surrounded by the vertices is within the area of ​​the graphic by the assignment method provided in the related art, thereby improving the accuracy of the transmittance assignment.

[0056] refer to Figure 4 , which shows a flow chart of a method for assigning transmittance of a layout pattern provided by an exemplary embodiment of the present application, which method can be Figure 2 An optional implementation of the embodiment may be performed by a computer device, such as Figure 4 As shown, the method includes:

[0057] Step 401: triangulate the point matrix formed by the vertices of the target figure using the Delaunay triangulation algorithm to obtain at least two triangles.

[0058] Exemplarily, a GDSII file of a layout graphic (which contains the precision, structure type, and vertex coordinates of each layout graphic) can be obtained, the structure type (including the lines of the layout graphic, the polygons (usually rectangles) contained in the layout graphic, the dot matrix formed by the vertices of the polygons, etc.) can be converted into a filled polygon type, the vertex coordinates of the polygons contained in the target graphic can be obtained, and the vertex coordinates of each triangle can be calculated using the Delaunay triangulation algorithm.

[0059] Step 402, calculate and obtain the centroid of the triangle.

[0060] For example, the centroid of each triangle is calculated based on its vertex coordinates. Figure 5 , which shows a schematic diagram of the calculated centroid of a triangle. Figure 5 As shown, triangles 1 to 8 obtained by segmentation according to the above rules are convex hull figures, so the centroid 301 of each triangle is inside it.

[0061] Step 403: For any center of gravity, calculate the vector angle between the center of gravity and any two consecutive vertices in each vertex.

[0062] refer to Figure 6 , which shows a schematic diagram of the vector angle corresponding to a center of gravity. For example, Figure 6 As shown, taking the centroid of triangle 3 as an example, we can define the clockwise direction as positive and the negative clockwise direction as negative. By traversing each vertex through the centroid, we can obtain the angles 11, 12, 13, 14, 15, 16, 17, 18, 19 (such as Figure 5 As shown, the direction of the arrow is the direction of the angle), and according to the defined direction, the vector angle of the above-mentioned angle is obtained.

[0063] Step 404, performing vector summation on the vector angles to obtain the vector angle sum of the center of gravity.

[0064] Through step 403, the vector angle corresponding to each center of gravity can be obtained. For each center of gravity, the corresponding vector angle is calculated to obtain the sum of the vector angles of each center of gravity.

[0065] Step 405, determining the type of triangle corresponding to each center of gravity according to the vector angle of the center of gravity.

[0066] When the sum of the vector angles is zero, the triangle corresponding to the centroid is determined to be a second type of triangle; when the sum of the vector angles is not zero (usually ±360°), the triangle corresponding to the centroid is determined to be the first type of triangle.

[0067] Step 406, generating a two-dimensional grid of the layer where the target graphic is located according to a preset accuracy.

[0068] Step 407, assigning transmittance to the mesh in the area where the first type of triangles are located.

[0069] refer to Figure 7 , which shows a schematic diagram of a two-dimensional grid of a local area where the target graphic is located. For example, Figure 7 As shown, when assigning transmittance to the target graphic, the third triangle (i.e., the second type of triangles 3 and 7) outside the area where the target graphic is located can be removed, and the transmittance of the mesh in the area where the first type of triangles are located can be assigned according to the preset value. Among them, there may be areas with different transmittances in the area where the first type of triangles are located, for example, Figure 7In the figure, the areas where triangles 1, 2, 4, 5, and 6 are located have different transmittances, and the transmittances of the grids in the areas where triangles 1, 2, 4, 5, and 6 are located can be assigned respectively according to preset values.

[0070] Step 408: Assign transmittance values ​​to grids in other areas of the two-dimensional grid.

[0071] The transmittances of other regions are the same, and transmittances of other regions in the two-dimensional grid can be assigned according to preset values.

[0072] refer to Figure 8 , which shows a block diagram of a transmittance assignment device for a layout graphic provided by an exemplary embodiment of the present application. The device can be implemented as a computer device in the above embodiment through software, hardware or a combination of both. The device includes an identification module 810 and an assignment module 820.

[0073] The identification module 810 is used to divide the dot matrix formed by the vertices of the target figure into at least two triangles, where the target figure is a figure in the layout figure that needs to be assigned a transmittance, and the triangle is composed of three vertices. The area of ​​the circumscribed circle of any triangle does not contain other vertices; the first type of triangles and the second type of triangles in the triangle are determined according to the center of gravity of the triangle, where the first type of triangles are triangles within the area where the target figure is located, and the second type of triangles are triangles outside the area where the target figure is located.

[0074] The assignment module 820 is used to assign a transmittance value to the target graphic according to the type of the triangle.

[0075] Optionally, the identification module 810 is also used to calculate, for any center of gravity, the vector angle formed by the center of gravity and any two consecutive vertices in each vertex; perform vector summation on the vector angles to obtain the vector angle sum of the center of gravity; when the vector angle sum is zero, determine that the triangle corresponding to the center of gravity is a second-type triangle.

[0076] Optionally, the identification module 810 is further configured to determine that the triangle corresponding to the centroid is a first-category triangle when the sum of the vector angles is not zero.

[0077] Optionally, the identification module 810 is further configured to triangulate the point matrix using a Delaunay triangulation algorithm to obtain triangles.

[0078] Optionally, the assignment module 820 is further used to generate a two-dimensional grid of the layer where the target graphic is located according to a preset accuracy; assign transmittance to the grid in the area where the first type of triangle is located; and assign transmittance to the grids in other areas of the two-dimensional grid.

[0079] Optionally, there are regions with different transmittances in the region where the first type of triangles are located.

[0080] Optionally, the transmittances of other regions are the same.

[0081] refer to Fig. 9 , which shows a block diagram of a computer device provided by an exemplary embodiment of the present application. The computer device may be a device for executing any of the above method embodiments, and includes: a processor 910 and a memory 920.

[0082] The processor 910 may be a central processing unit (CPU), a network processor (NP) or a combination of a CPU and a NP. The processor 910 may further include a hardware chip. The hardware chip may be an application-specific integrated circuit (ASIC), a programmable logic device (PLD) or a combination thereof. The PLD may be a complex programmable logic device (CPLD), a field-programmable gate array (FPGA), a generic array logic (GAL) or any combination thereof.

[0083] The memory 920 is connected to the processor 910 via a bus or other means, and at least one instruction, at least one program, code set or instruction set is stored in the memory 920. The at least one instruction, at least one program, code set or instruction set is loaded and executed by the processor 910 to implement the transmittance assignment method of the layout graphic provided in any of the above embodiments. The memory 920 can be a volatile memory (volatile memory), a non-volatile memory (non-volatile memory) or a combination thereof. The volatile memory can be a random access memory (random-access memory, RAM), such as a static random access memory (static random access memory, SRAM), a dynamic random access memory (dynamic random access memory, DRAM). The non-volatile memory can be a read-only memory (readonly memory image, ROM), such as a programmable read only memory (programmable read only memory, PROM), an erasable programmable read only memory (erasable programmable read only memory, EPROM), and an electrically erasable programmable read-only memory (electrically erasable programmable read-only memory, EEPROM). The non-volatile memory may also be a flash memory, a magnetic memory such as a magnetic tape, a floppy disk, or a hard disk. The non-volatile memory may also be an optical disk.

[0084] The present application also provides a computer-readable storage medium, which stores at least one instruction, at least one program, a code set or an instruction set. The at least one instruction, the at least one program, the code set or the instruction set are loaded and executed by the processor to implement the transmittance assignment method of the layout graphic as described in any of the above embodiments.

[0085] The present application also provides a computer program product. When the computer program product is run on a computer, the computer executes the transmittance assignment method of the layout graphic provided by the above-mentioned various method embodiments.

[0086] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection created by this application.

Claims

1. A method for assigning transmittance of a layout pattern, characterized in that: include: The dot matrix formed by the vertices of the target figure is divided into at least two triangles, wherein the target figure is a figure in the layout figure to be assigned a transmittance, the triangle is formed by three vertices, and the circumscribed circle of any triangle does not contain other vertices; Determine a first type of triangle and a second type of triangle among the triangles according to the centroid of the triangle, wherein the first type of triangle is a triangle within the region where the target figure is located, and the second type of triangle is a triangle outside the region where the target figure is located; Assigning transmittance to the target graphic according to the type of the triangle; The step of determining the first type of triangle and the second type of triangle in the triangle according to the centroid of the triangle comprises: For any center of gravity, calculate the vector angle formed by the center of gravity and any two consecutive vertices among each of the vertices; Performing vector summation on the vector angles to obtain the vector angle sum of the center of gravity; When the sum of the vector angles is zero, determining that the triangle corresponding to the center of gravity is the second type of triangle; When the sum of the vector angles is not zero, it is determined that the triangle corresponding to the centroid is the first type of triangle.

2. The method according to claim 1, characterized in that The step of dividing the point matrix formed by the vertices of the target figure into at least two triangles comprises: The point matrix is ​​triangulated by a Delaunay triangulation algorithm to obtain the triangle.

3. The method according to claim 1 or 2, characterized in that: The assigning a transmittance value to the target graphic according to the type of the triangle includes: Generating a two-dimensional grid of the layer where the target graphic is located according to a preset accuracy; Assigning transmittance to the mesh of the area where the first type of triangles are located; The transmittances of the grids in other areas of the two-dimensional grid are assigned.

4. The method according to claim 3, characterized in that There are regions with different transmittances in the region where the first type of triangles are located.

5. The method according to claim 4, characterized in that The transmittances of the other regions are the same.

6. A device for assigning transmittance of a layout pattern, characterized in that: include: An identification module, used for dividing a dot matrix formed by vertices of a target figure to obtain at least two triangles, wherein the target figure is a figure in the layout figure to be assigned a transmittance, the triangle is formed by three vertices, and the area of ​​the circumscribed circle of any triangle does not contain other vertices; determining a first type of triangle and a second type of triangle in the triangle according to the center of gravity of the triangle, wherein the first type of triangle is a triangle in the area where the target figure is located, and the second type of triangle is a triangle outside the area where the target figure is located; An assignment module, used for assigning a transmittance value to the target graphic according to the type of the triangle; The identification module is also used to calculate, for any center of gravity, the vector angle formed by the center of gravity and any two consecutive vertices in each of the vertices; perform vector summation on the vector angles to obtain the vector angle sum of the center of gravity; when the vector angle sum is zero, determine that the triangle corresponding to the center of gravity is the second type of triangle; when the vector angle sum is not zero, determine that the triangle corresponding to the center of gravity is the first type of triangle.

7. A computer device, characterized in that: It comprises a processor and a memory, wherein the memory stores at least one instruction or program, and the instruction or program is loaded and executed by the processor to implement the transmittance assignment method of a layout graphic as described in any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that: The storage medium stores at least one instruction, which is loaded and executed by the processor to implement the method for assigning transmittance of a layout graphic as described in any one of claims 1 to 5.

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