An RF shielding all-metal gate valve

Abstract

The present application discloses an RF shielding all-metal gate valve, comprising: a cylinder body, a valve body fixedly connected to the cylinder body, and a positioning frame arranged inside the valve body, wherein a piston and a push rod are arranged in the cylinder body; a first moving module and a second moving module are arranged on the positioning frame, the first moving module and the second moving module are fixedly connected to the push rod, one of the first moving module and the second moving module is provided with a sealing component, and the other is provided with a shielding component; the piston drives the first moving module and the second moving module to reciprocate in the valve body through the push rod; a vacuum channel is arranged on the cylinder body, when the positioning frame is located at the first lower limit position of the valve body and the first moving module is located at the second lower limit position on the positioning frame, the axis of the first moving module corresponds to the axis position of the vacuum channel; when the positioning frame is located at the first upper limit position of the valve body and the second moving module is located at the third upper limit position of the positioning frame, the axis of the second moving module corresponds to the axis position of the vacuum channel.

Description

Technical Field

[0001] The present application generally relates to the field of control valve technology, and specifically to an RF shielded all-metal gate valve. Background Art

[0002] The gate valve is an indispensable valve in the vacuum system and is widely used in aerospace, accelerators, light sources, electronics, semiconductors, vacuum systems, energy, machinery and related scientific research ultra-high vacuum systems.

[0003] At present, the more commonly used gate valves on the market use rubber seals. Due to the large degassing rate of rubber itself, the ultimate vacuum of the system will be affected during use. Rubber is more prone to aging, especially in environments with a certain radiation dose such as accelerators, the aging rate will be faster, resulting in poor sealing performance, shortened service life and other conditions that affect the normal operation of the system. Therefore, due to the material of rubber itself, it is difficult for a vacuum system that uses a gate valve made of rubber as a sealing material as a section valve of a vacuum system to meet the requirements of ultra-high vacuum.

[0004] In addition, the existing gate valve is not equipped with an RF (Radio Frequency) shielding device. When used in the vacuum environment of the accelerator, when the beam passes through this position, it will also generate a large impedance and high-order mode, affecting the stability of the beam, increasing the loss and thus affecting the life of the beam. Summary of the invention

[0005] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide an RF shielding all-metal gate valve that can meet the ultra-high vacuum sealing effect, has RF shielding function, can adapt to high and low temperature environments, and has a long life.

[0006] The present application provides an RF shielding all-metal gate valve, comprising: a cylinder body, a valve body fixedly connected to the cylinder body, and a positioning frame arranged inside the valve body, wherein:

[0007] A piston and a push rod connected to the piston are arranged in the cylinder body, and the push rod extends from the cylinder body into the valve body;

[0008] The positioning frame is provided with a first moving module and a second moving module, the first moving module and the second moving module are fixedly connected to the ejector rod, one of the first moving module and the second moving module is provided with a sealing component, and the other is provided with a shielding component;

[0009] The piston reciprocates within the cylinder body, and drives the first moving module and the second moving module to reciprocate within the valve body through the push rod;

[0010] A vacuum channel is provided on the cylinder body. When the positioning frame is located at the first lower limit position of the valve body and the first movable module is located at the second lower limit position on the positioning frame, the axis of the first movable module corresponds to the axis position of the vacuum channel; when the positioning frame is located at the first upper limit position of the valve body and the second movable module is located at the third upper limit position of the positioning frame, the axis of the second movable module corresponds to the axis position of the vacuum channel.

[0011] Optionally, the positioning frame is divided into a first accommodating cavity and a second accommodating cavity by a positioning plate on the positioning frame, the first movable module is arranged in the first accommodating cavity, and the second movable module is arranged in the second accommodating cavity; the upper end surface of the positioning plate located in the first accommodating cavity is the second lower limit of the first movable module, and the lower end surface of the positioning plate located in the second accommodating cavity is the third upper limit of the second movable module.

[0012] Optionally, the first mobile module includes a first mounting plate, a second mounting plate and a first central connecting rod, wherein:

[0013] The first central connecting rod is fixedly connected to the top rod, and the first mounting plate and the second mounting plate are connected to the first central connecting rod through a plurality of first connecting rod mechanisms;

[0014] The first link mechanism includes a first link hinged to the first central link, the first link is fixed to the first mounting plate or the second mounting plate via a first link mounting seat, and the first link mounting seat is provided with a first limiting surface for limiting the rotation of the first link.

[0015] Optionally, the first connecting rod is used to drive the first mounting plate and the second mounting plate to move downward when the first center connecting rod moves downward; the first connecting rod is also used to drive the first mounting plate and the second mounting plate to move in a direction perpendicular to the first center connecting rod until the first connecting rod reaches the first limit surface when the first mounting plate and the second mounting plate reach the second lower limit and the first center connecting rod continues to move downward.

[0016] Optionally, the sealing assembly includes a sealing ring, which is mounted on the first mounting plate via a mounting seat; an elastic member is arranged between the mounting seat and the first mounting plate, one end of the elastic member cooperates with the first mounting plate, and the other end of the elastic member cooperates with the mounting seat; an adjustment member for adjusting the compression length of the elastic member is also arranged on the first mounting plate.

[0017] Optionally, the second mobile module includes a third mounting plate, a fourth mounting plate and a second central connecting rod, wherein:

[0018] The second central connecting rod is fixedly connected to the first central connecting rod, and the third mounting plate and the fourth mounting plate are connected to the second central connecting rod through a plurality of third connecting rod mechanisms;

[0019] The third link mechanism includes a third link hinged to the second center link, the third link is fixed to the third mounting plate or the fourth mounting plate via a third link mounting seat, and the third link mounting seat is provided with a second limiting surface for limiting the rotation of the third link.

[0020] Optionally, the shielding assembly comprises a flexible shielding ring, wherein the flexible shielding ring is configured to be in an expanded state when corresponding to the axis of the vacuum channel, and in a compressed state when not corresponding to the axis of the vacuum channel.

[0021] Optionally, the positioning frame is provided with a guide column for guiding the movement of the first moving module and the second moving module; the first moving module is provided with a first guide mechanism cooperating with the guide column, and the first guide mechanism is fixedly mounted on the first mounting plate and the second mounting plate via a first elastic component; the second moving module is provided with a second guide mechanism cooperating with the guide column, and the second guide mechanism is fixedly mounted on the third mounting plate and the fourth mounting plate via a second elastic component.

[0022] Optionally, a vacuum connection assembly is provided at the connection position between the cylinder body and the valve body, and the vacuum connection assembly includes a bellows sleeved on the push rod, one end of the bellows is fixed on the sleeve shoulder, and the other end is fixed on the mounting shoulder; wherein the sleeve shoulder is arranged on the mounting surface of the cylinder body and the valve body and is pressed by the cylinder body and the valve body, and the mounting shoulder is fixedly mounted on the push rod.

[0023] Optionally, an end cover is further included, wherein the end cover includes a positioning surface for being arranged inside the valve body to form a first upper limit position of the valve body and a flange matching with the end face of the valve body and the end face of the cylinder body.

[0024] The technical solution provided by the embodiments of the present application may have the following beneficial effects:

[0025] The RF shielding all-metal gate valve provided in the embodiment of the present application realizes the switching between the ultra-high vacuum sealing mode and the RF shielding mode of the RF shielding all-metal gate valve through reciprocating motion, providing an ultra-high vacuum and stable RF shielding environment for the beam operation of the vacuum system, and improving the stability and life of the beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0027] Figure 1 A schematic structural diagram of an RF shielding all-metal gate valve provided in an embodiment of the present application;

[0028] Figure 2 A schematic structural diagram of another state of an RF shielding all-metal gate valve provided in an embodiment of the present application;

[0029] Figure 3 A schematic structural diagram of a vacuum connection assembly provided in an embodiment of the present application;

[0030] Figure 4 A schematic diagram of the structure of an end cover provided in an embodiment of the present application;

[0031] Figure 5 A schematic diagram of the structure of a positioning framework provided in an embodiment of the present application;

[0032] Figure 6 A structural schematic diagram of a sealing module provided in an embodiment of the present application;

[0033] Figure 7 A schematic structural diagram of a first mounting plate provided in an embodiment of the present application;

[0034] Figure 8 A schematic structural diagram of a second mounting plate provided in an embodiment of the present application;

[0035] Fig. 9 A schematic diagram of an expanded state of a sealing module provided in an embodiment of the present application;

[0036] Fig.10 A schematic diagram of a compressed state of a sealing module provided in an embodiment of the present application;

[0037] Fig.11 A schematic structural diagram of a sealing ring provided in an embodiment of the present application;

[0038] Fig.12 A schematic structural diagram of a mounting base provided in an embodiment of the present application;

[0039] Fig.13 A schematic structural diagram of a positioning shaft tube provided in an embodiment of the present application;

[0040] Fig.14 A schematic diagram of the structure of an adjusting nut provided in an embodiment of the present application;

[0041] Fig.15A schematic diagram of the structure of a valve body provided in an embodiment of the present application;

[0042] Fig.16 for Fig.15 The enlarged schematic diagram of point I in the middle;

[0043] Fig.17 A schematic structural diagram of a shielding module provided in an embodiment of the present application;

[0044] Fig.18 A schematic structural diagram of a third mounting plate provided in an embodiment of the present application;

[0045] Fig.19 A schematic diagram of the state of a push rod provided in an embodiment of the present application;

[0046] Fig. 20 A schematic diagram of the state of another push rod provided in an embodiment of the present application. DETAILED DESCRIPTION

[0047] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It is also necessary to explain that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0048] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0049] In the current existing technology, a gate valve uses rubber seal. Since the rubber itself has a large degassing rate, it will affect the ultimate vacuum of the system during use. In addition, rubber is easy to age, especially in an accelerator and other use environment with a certain radiation dose. The aging speed will be faster, resulting in poor sealing performance, shortened service life and other conditions that affect the normal operation of the system. Therefore, due to the material of the rubber itself, it is difficult for a vacuum system using a gate valve using rubber as a sealing material as a section valve of a vacuum system to meet the requirements of ultra-high vacuum.

[0050] Another type of gate valve uses an oxygen-free copper sealing ring to replace the rubber ring. When sealing, the metal protrusion is pressed on the surface of the oxygen-free copper sealing ring. Under the action of pressure, the metal protrusion will be embedded in the oxygen-free copper sealing ring to achieve metal sealing that meets ultra-high vacuum requirements. However, since the oxygen-free copper gasket will produce non-resilient indentations after sealing, the positioning requirements for the metal protrusion and the indentation are relatively strict when sealing again.

[0051] For the gate valve with oxygen-free copper sealing ring, if the indentation is offset in this sealing type, it will affect the ultra-high vacuum sealing performance; since non-resilient indentations will be produced, the force requirements during use are very strict. If the user uses a large force to achieve ultra-high vacuum sealing, then a larger force must be used to seal again. However, the sealing structure of the all-metal gate valve is inside the vacuum system, and most of them are not designed with a force adjustment device. At this time, the vacuum system must be destroyed and the all-metal gate valve must be removed and repaired offline. If you are not careful, the all-metal valve will be scrapped, affecting the stability of the ultra-high vacuum system operation; although the all-metal gate valve with oxygen-free copper sealing ring has solved the ultra-high vacuum sealing performance to a certain extent, due to the principle of sealing through the indentation of the oxygen-free copper gasket, it is difficult to increase the life of this type of valve, affecting the stability of the use system.

[0052] Another type of gate valve uses a butterfly seal ring. After the butterfly seal ring contacts the double seal end face, it will produce elastic deformation to achieve ultra-high vacuum sealing. At the same time, the elastic deformation also avoids the problem of short sealing life of oxygen-free copper gaskets. However, since the ultra-high vacuum sealing of this type of all-metal valve has relatively high requirements for the elasticity and rigidity of the butterfly seal ring, special alloys need to be used. In addition, the elasticity and rigidity of the alloy material will also change greatly under low or high temperature environments. The sealing performance and life of the butterfly seal ring all-metal valve will also be affected under high or low temperature conditions.

[0053] The butterfly seal ring also has the same problem as the oxygen-free copper seal ring all-metal valve in terms of preload. If the user uses a large force to achieve ultra-high vacuum sealing, then the next seal must be achieved with an even greater force. However, the all-metal gate valve sealing structure is inside the vacuum system, and most of them are not designed with a force adjustment device. At this time, the vacuum system must be destroyed and the all-metal gate valve must be removed and repaired offline. If you are not careful, the all-metal valve will be scrapped, affecting the stability of the ultra-high vacuum system. Due to the overly strict processing and installation precision, the product installation scrap rate is high, and the lifting mechanism used for sealing the sealing structure has a large wear and tear, which will also affect the life of the valve.

[0054] Please see Figure 1-2 , an RF shielding all-metal gate valve, comprising: a cylinder body 100, a valve body 200 fixedly connected to the cylinder body 100, and a positioning frame 300 arranged inside the valve body 200, wherein,

[0055] The cylinder body 100 is provided with a piston 101 and a push rod 102 connected to the piston 101, and the push rod 102 extends from the cylinder body 100 to the valve body 200;

[0056] The positioning frame 300 is provided with a first moving module and a second moving module, the first moving module and the second moving module are fixedly connected to the ejector rod 102, one of the first moving module and the second moving module is provided with a sealing component 460, and the other is provided with a shielding component 560;

[0057] The piston 101 reciprocates in the cylinder 100, and drives the first moving module and the second moving module to reciprocate in the valve body 200 through the push rod 102;

[0058] A vacuum channel 210 is provided on the valve body 200. When the positioning frame 300 is located at the first lower limit position A2 of the valve body 200 and the first movable module is located at the second lower limit position B2 on the positioning frame 300, the axis of the first movable module corresponds to the axis position of the vacuum channel 210; when the positioning frame 300 is located at the first upper limit position A1 of the valve body 200 and the second movable module is located at the third upper limit position C1 of the positioning frame 300, the axis of the second movable module corresponds to the axis position of the vacuum channel 210.

[0059] The gate valve provided in this application is used in the accelerator vacuum system to divide the beam pipeline of the accelerator vacuum system into multiple sections, so that each section can be independently vacuumed, leak-checked, baked and maintained. At the same time, when the vacuum in a certain section deteriorates, the gate valve can be automatically closed through the interlocking protection system to prevent the pressure in other vacuum sections from rising. When the valve is in the open state, the corresponding RF shielding function needs to be designed to reduce the impedance when the beam passes through, reduce the beam loss, and increase the beam life.

[0060] In the embodiment of the present application, the gate valve is made of all-metal material, which can be used in an environment with a certain radiation dose such as an accelerator to reduce the aging of the material during use. In addition, through the structure of the present application, the switching between the ultra-high vacuum sealing mode and the RF shielding mode can be achieved. In the embodiment of the present application, there is no restriction on the material of the gate valve, and different metal materials can be selected according to different application scenarios.

[0061] In the embodiment of the present application, when used, the medium of the cylinder body 100 can be liquid or gas, and the drive of the push rod 102 can be hydraulic pressure or pneumatic pressure. The present application does not limit this. In the embodiment of the present application, the cylinder body 100 is used as an example cylinder for illustration.

[0062] In addition, one of the first movable module and the second movable module is a sealing module 400 and the other is a shielding module 500. There is no restriction on the relative positions of the sealing module 400 and the shielding module 500 on the positioning frame 300. In the embodiment of the present application, the first movable module is located above the second movable module, the first movable module is the sealing module 400, and the second movable module is the shielding module 500 for exemplary description. Of course, in other embodiments, the sealing module 400 can also be located below the shielding module 500, that is, the first movable module is the shielding module 500, and the second movable module is the sealing module 400.

[0063] It is worth noting that in the embodiment of the present application, the first upper limit position A1 and the first lower limit position A2 are described as two relatively set limit positions on the valve body 200, the second upper limit position B1 and the second lower limit position B2 are described as two relatively set limit positions on the positioning frame 300, and the third upper limit position C1 and the third lower limit position C2 are described as two relatively set limit positions on the positioning frame 300. In different embodiments, according to the different positions of the first moving module and the second moving module, the two relatively set limit positions of "upper limit" and "lower limit" can be interchangeable, and the present application does not limit this.

[0064] Vacuum connection kit 600

[0065] like Figure 3 As shown, a vacuum connection assembly 600 is provided at the connection position between the cylinder body 100 and the valve body 200, and the vacuum connection assembly 600 includes a bellows 601 sleeved on the push rod 102, one end of the bellows 601 is fixed on a sleeve shoulder 602, and the other end is fixed on a mounting shoulder 603; wherein the sleeve shoulder 602 is provided on the mounting surface of the cylinder body 100 and the valve body 200 and is pressed by the cylinder body 100 and the valve body 200, and the mounting shoulder 603 is fixedly installed on the push rod 102.

[0066] One end of the push rod 102 is connected to the piston 101, and the other end passes through the sleeve shoulder 602 and the bellows 601 and is fixedly connected to the mounting shoulder 603. When used, it can be detachably connected by threaded holes or fixedly connected by welding, etc., and this application does not limit this. The bellows 601 can be made of metal materials such as stainless steel.

[0067] The lower surface of the mounting shoulder 603 is also provided with a mounting bracket 604 for fixed connection with the first center link. The cross-sectional shape of the mounting bracket 604 can be circular or rectangular, etc., and the present application does not limit this. In the embodiment of the present application, an example is given in which the mounting bracket 604 has a rectangular cross-sectional shape, wherein the mounting bracket 604 is provided with a mounting hole for fixed installation with the first center link.

[0068] In the embodiments of the present application, Figure 4 As shown, the RF shielding all-metal gate valve also includes an end cover 201, which includes a positioning surface 203 for being arranged inside the valve body 200 to form a first upper limit A1 of the valve body 200 and a flange 202 that cooperates with the end faces of the valve body 200 and the end faces of the cylinder body 100.

[0069] In the embodiment of the present application, the shapes of the cylinder body 100, the valve body 200 and the end cover 201 are not limited, and their cross-sectional shapes may be circular, square or other shapes. In the embodiment of the present application, the cross-sectional shape of the cylinder body 100 is circular, and the cross-sectional shape of the valve body 200, the end face shape of the end cover 201 and the end face shape of the flange 202 are rectangular for exemplary description.

[0070] In the embodiment of the present application, the end cover 201 includes a flange 202 and a boss 201 arranged on the flange 202, wherein the boss 201 is installed inside the valve body 200, the lower end surface of the flange 202 is flush with the end surface of the valve body 200, and the upper end surface of the flange 202 is flush with the end surface of the cylinder body 100, and a first through hole 204 for accommodating the vacuum connection assembly 600 is arranged inside the end cover 201.

[0071] The sleeve shoulder 602 on the vacuum connection assembly 600 is set on the upper end surface of the flange 202 and is pressed by the stepped hole on the cylinder body 100. Of course, when setting, the sleeve shoulder 602 can also be fixedly connected with the cylinder body 100 or the end surface of the flange 202 by bolts or other means. In this application, there is no restriction on the connection method between the cylinder body 100 and the valve body 200, the cylinder body 100 and the end cover 201, the valve body 200 and the end cover 201, the vacuum connection assembly 600 and the end cover 201, and the vacuum connection assembly 600 and the cylinder body 100. In the embodiment of the present application, in order to improve the sealing effect, sealing structures such as sealing rings and sealing gaskets are set at the above various connection positions, and this application does not limit this.

[0072] Through the vacuum connection assembly 600 provided in the embodiment of the present application, a vacuum isolation structure is formed at the connecting end surface of the cylinder and the valve body 200. When the push rod 102 moves up and down, the bellows 601 is compressed or stretched along with the push rod 102, thereby ensuring the seal between the cylinder and the valve body 200 in real time, avoiding dynamic sealing by sealing rings or the like at the position of the push rod 102, and overcoming the problem in the prior art that the rubber sealing ring is prone to aging, deformation or damage, which affects the sealing effect and causes sealing leakage.

[0073] In the embodiment of the present application, the cross-sectional shape of the valve body 200 is rectangular, the boss 201 on the end cover 201 extends into the interior of the valve body 200, and the lower surface of the boss 201 is the positioning surface 203 of the first upper limit position A1 of the valve body 200. By adjusting the height of the boss 201, the upper limit position of the positioning frame 300 can be limited. The lower surface of the valve body 200 is a closed structure, and the lower surface of the valve body 200 is provided with a positioning shaft 205, and the positioning shaft 205 is used to cooperate with the positioning frame 300, and is used for alignment when the positioning frame 300 moves to the bottom; the positioning shaft 205 is the first lower limit position A2 of the valve body 200, and the lower limit position of the positioning frame 300 can be limited by adjusting the position of the lower end surface.

[0074] Positioning frame 300

[0075] In the embodiments of the present application, Figure 5 As shown, the positioning frame 300 is divided into a first accommodating cavity 310 and a second accommodating cavity 320 by a positioning plate 340, the first movable module is arranged in the first accommodating cavity 310, and the second movable module is arranged in the second accommodating cavity 320; the upper end surface of the positioning plate 340 located in the first accommodating cavity 310 is the second lower limit B2 of the first movable module, and the lower end surface of the positioning plate 340 located in the second accommodating cavity 320 is the third upper limit C1 of the second movable module.

[0076] Among them, the first moving module is a sealing module 400, and the second moving module is a shielding module 500. The positioning frame 300 is provided with a guide column 330 for guiding the movement of the first moving module and the second moving module. The first moving module moves up and down along the guide column 330, and is limited by the positioning frame 300 and the positioning plate 340. While limiting, the positioning frame 300 can also be driven to move up and down in the valve body 200. Similarly, the second moving module moves up and down along the guide column 330, and is limited by the positioning frame 300 and the positioning plate 340. While limiting, the positioning frame 300 can also be driven to move up and down in the valve body 200.

[0077] The positioning frame 300 is provided with bearing rollers that cooperate with the surface of the valve body 200 to assist the positioning frame 300 to slide up and down in the valve body 200 to reduce friction. When set, the cross-sectional shape of the positioning frame 300 is adapted to the cross-sectional shape of the valve body 200. In the embodiment of the present application, the positioning frame 300 is square, wherein a plurality of bearing rollers 301 can be provided on each side of the positioning frame 300. The present application does not limit this. The structure and type of the bearing rollers can be adjusted as needed when applied.

[0078] The upper end surface of the positioning frame 300 is provided with a mounting hole 302 for the mounting bracket 604 on the vacuum connection assembly 600 to pass through. The lower end surface of the positioning frame 300 is provided with a positioning hole 303 for cooperating with the positioning shaft 205 of the valve body 200. The positioning plate 340 is provided with a second through hole 304 for the first center connecting rod or the second center connecting rod to pass through.

[0079] Sealing module 400

[0080] In the embodiments of the present application, Figure 6-8 As shown, the first moving module is taken as the sealing module 400 for exemplary description. The sealing module 400 includes a first mounting plate 410 , a second mounting plate 420 and a first central connecting rod 430 . Figure 7 A schematic structural diagram of a first mounting plate 410 is shown; Figure 8 Shows a schematic structural diagram of a second mounting plate 420.

[0081] One end of the first center link 430 is fixedly connected to the top rod 102, and the other end of the first center link 430 is fixedly connected to the second center link. In the embodiment of the present application, the first center link 430 adopts a rectangular frame structure, and a hollow structure is formed by the rectangular frame structure, and the sealing assembly can be accommodated in the hollow structure.

[0082] The rectangular frame structure is a closed structure, including a first side frame 431, a second side frame 432, an upper frame 433, and a lower frame 434. The upper frame 433 is provided with a first mounting hole 435 for connecting with the mounting frame 604, and the lower frame 434 is provided with a second mounting hole 436 connected with the second central connecting rod.

[0083] The first mounting plate 410 and the second mounting plate 420 are connected to the first center link 430 through multiple first link mechanisms 440; the first link mechanism 440 includes a first link 441 hinged to the first center link 430, and the first link 441 is fixed to the first mounting plate 410 or the second mounting plate 420 through a first link mounting seat 442, and the first link mounting seat 442 is provided with a first limiting surface 443 for limiting the rotation of the first link 441.

[0084] In a specific configuration, the first link mechanism 440 includes at least two, which are respectively located at the upper and lower sides of the sealing assembly, and are used to limit the movement balance of the sealing module 400 when it moves up and down or moves on both sides. In the embodiment of the present application, since the first central link 430 adopts a rectangular frame structure, the number of the first link mechanism 440 can be four when it is configured, two of which are connected to the first side frame 431, and two of which are connected to the second side frame 432.

[0085] In the embodiment of the present application, one of the two first link mechanisms 440 connected to the first side frame 431 is located on the first mounting plate 410, and the other is located on the second mounting plate 420. For example, when setting, the first link 441 located on the first mounting plate 410 is connected to the inner surface of the first side frame 431, and the first link 441 located on the second mounting plate 420 is connected to the outer surface of the first side frame 431. By forming a plurality of symmetrically arranged first link mechanisms 440, the sealing module 400 can drive the first central link 430 through the top rod 102, and the mounting plate can be driven to move stably through the first central link 430, thereby reducing vibration and other phenomena during movement.

[0086] It should be noted that the installation positions of the first link mechanism 440 and the first center link 430, the first mounting plate 410, and the second mounting plate 420 can be appropriately adjusted according to different positions, and the present application does not limit this. There is also no limit to the number of the first link mechanism 440, and it can be appropriately adjusted according to the length of the first center link 430.

[0087] In the embodiment of the present application, the first limiting surface 443 on the first link mounting seat 442 is located on a side close to the positioning plate 340, one end of the first link 441 is hinged to the first link mounting seat 442, and the other end of the first link 441 is hinged to the first center link 430. When the first center link 430 moves up and down, the first link 441 is driven to rotate around the hinge point, and the first link 441 rotates between the first mounting plate 410 (or the second mounting plate 420) above the first limiting surface 443.

[0088] The movement of the sealing module 400 is guided by the guide column on the positioning frame 300. When the first connecting rod 441 rotates to reach the first limiting surface 443, the lateral distance between the first mounting plate 410 and the second mounting plate 420 is the farthest, and the distance between the outer side surface of the first mounting plate 410 and the outer side surface of the second mounting plate 420 is equal to the cavity end surface distance of the valve body 200. When the first connecting rod 441 moves between the first limiting surface 443 and the first mounting plate 410 (or the second mounting plate 420), the distance between the outer side surface of the first mounting plate 410 and the outer side surface of the second mounting plate 420 is smaller than the cavity end surface distance of the valve body 200.

[0089] It should be noted that, in the embodiment of the present application, the lateral distance is defined as the distance in the direction perpendicular to the first central link 430, and the longitudinal distance is defined as the distance in the direction along the first central link 430. When the direction of the first link 441 is at the first limiting surface 443, the sealing module 400 is in the deployed state. Fig. 9 When the direction of the first connecting rod 441 is not in the first limiting surface 443, the sealing module 400 is in a compressed state, such as Fig.10 shown.

[0090] In the embodiment of the present application, the movement direction of the first connecting rod mechanism 440 includes: the first connecting rod 441 is used to drive the first mounting plate 410 and the second mounting plate 420 to move downward when the first center connecting rod 430 moves downward, and the sealing module 400 is in a compressed state when moving downward; the first connecting rod 441 is also used to drive the first mounting plate 410 and the second mounting plate 420 to move in a direction perpendicular to the first center connecting rod 430 until the first connecting rod 441 reaches the first limit surface 443 when the first mounting plate 410 and the second mounting plate 420 reach the second lower limit B2 and the first center connecting rod 430 continues to move downward.

[0091] The first connecting rod 441 is used to drive the first mounting plate 410 and the second mounting plate 420 to move upward when the first central connecting rod 430 moves upward; it should be noted that in the embodiment of the present application, it is not limited that when the positioning frame 300 is in the first upper limit position A1, the position of the sealing module 400 on the positioning frame 300 can be in the second upper limit position B1, and of course it can also be not in the second upper limit position B1. By not being in the second upper limit position B1, the vibration between the sealing module 400 and the shielding module 500 can be reduced. When applied, it can be selected according to needs. In addition, there is no restriction on the state of the first connecting rod mechanism 440, and it is preferably set to be in a compressed state to reduce the friction between the cavity of the valve body 200 and the sealing module 400.

[0092] It should be noted that in the embodiment of the present application, when the first connecting rod 441 is in the extreme position, that is, when it reaches the first limiting surface 443, the angle between the first connecting rod 441 and the first center connecting rod 430 is 90°. In other embodiments, the present application does not limit the position of the first limiting surface 443 and the angle between it and the first mounting plate 410 and the second mounting plate 420, and it can be selected as needed in specific applications.

[0093] In order to reduce the vibration between the sealing module 400 and the positioning plate 340, a bearing or a roller 444 or the like may be provided on the lower end surface of the sealing module 400 to contact the positioning plate 340. Of course, if the sealing module 400 contacts the upper end surface of the positioning frame 300, a bearing or a roller may also be provided, and the present application does not limit this.

[0094] In the embodiment of the present application, the sealing assembly 460 includes a sealing ring 461, which is mounted on the first mounting plate 410 via a mounting seat 462; an elastic member 463 is arranged between the mounting seat 462 and the first mounting plate 410, one end of the elastic member 463 cooperates with the first mounting plate 410, and the other end of the elastic member 463 cooperates with the mounting seat 462; an adjustment member 464 for adjusting the compression length of the elastic member 463 is also arranged on the first mounting plate 410.

[0095] Among them, Fig.11 As shown, the sealing ring 461 includes a sealing surface 41 for sealing with the vacuum channel 210 on the valve body 200. The cross-sectional shape of the sealing surface 41 is arc-shaped, which can control the action of force under the action of the elastic member 463 and reduce the impact when contacting with the sealing end surface 211 on the valve body 200.

[0096] The sealing ring 461 is provided with a screw 42 for fixedly connecting with the mounting seat 462. Fig.12 As shown, the mounting seat 462 is provided with a mounting groove 43 for accommodating the sealing ring 461 and a screw hole 44 for cooperating with the screw rod 42. The mounting seat 462 is fixed to the first mounting plate 410 through a positioning shaft tube 464, wherein the mounting seat 462 is also provided with a limiting shaft 45 for limiting and guiding the compression stroke of the elastic member 463, so as to limit the movement direction and movement range of the sealing ring 461 and the mounting seat 462. The limiting shaft 45 is elastically installed on the mounting shaft 46, and the mounting shaft 46 is arranged along the lateral direction of the first central connecting rod 430, and the setting direction of the limiting shaft 45 is perpendicular to the direction of the mounting shaft 46.

[0097] like Fig.13 As shown, the positioning shaft tube 464 is provided with a mounting shaft hole 47 cooperating with the mounting shaft 46 and a limiting groove 48 cooperating with the limiting shaft 45. After the limiting shaft 45 is installed in the limiting groove 48, the limiting shaft 45 does not protrude from the surface of the limiting groove 45 to prevent movement interference.

[0098] The positioning shaft tube 464 is used to fix the mounting seat 462 on the first mounting plate 410. The positioning shaft tube 464 is provided with a threaded surface 49 for cooperating with the adjusting nut 465 to be fixed on the first mounting plate 410. Fig.14 As shown, an anti-loosening structure is provided on the adjusting nut 465, and the anti-loosening structure includes a plurality of first adjusting holes 411 provided on the first mounting plate 410 and a second adjusting hole 412 provided on the adjusting nut 465, and the second adjusting hole 412 is locked with one of the first adjusting holes 411 by bolts to prevent the adjusting nut 465 from loosening and affecting the clamping force between the sealing ring 461 and the sealing end face 211, thereby affecting the sealing effect.

[0099] In the embodiment of the present application, the positioning shaft tube 464 and the adjusting nut 465 are both provided with a flat end surface 413 for pre-tightening. It can be used to apply force when adjusting the installation position. In addition, in addition to the first adjustment hole 411 for adjusting the locking position of the anti-loosening nut, the first mounting plate 410 is also provided with a third adjustment hole 414 for cooperating with the adjusting member 464. The adjusting member can be a bolt, a screw structure, etc.

[0100] In the embodiment of the present application, the mounting seat 462 is fixed by the adjusting nut 465 and is also used to adjust the compression of the elastic member 463. The elastic member 463 can also adjust the compression by the adjusting member 464. In some embodiments, coarse adjustment can be performed by adjusting the nut 465 and fine adjustment can be performed by adjusting the adjusting member 464. For example, when a certain position of the sealing ring 461 is severely worn, the adjusting member 464 can be used to fine-tune the position.

[0101] In the embodiments of the present application, Figure 15-16 As shown, an inclined sealing end surface 211 and a supporting end surface 212 for positioning are provided at the vacuum channel 210 of the valve body 200. The supporting end surface 212 protrudes from the inner end surface of the valve body 200. When the sealing module 400 is unfolded, the supporting end surface 212 is pressed against the first mounting plate 410 to provide the sealing force required for the sealing module 400 to seal at the vacuum channel 210. When the sealing module 400 is compressed, the supporting end surface 212 does not contact the sealing module 400 to prevent wear and vibration.

[0102] In the embodiment of the present application, the design of the elastic member 463 and the adjusting member 464 can avoid the defect that a new sealing ring must be replaced when the sealing ring 461 or the lifting mechanism is worn. Usually, the size of the new sealing ring is generally larger than the size of the original unworn gasket, that is, the surface size of the worn position needs to be increased, which is time-consuming and labor-intensive, and has poor stability and durability in use. In addition, since most of them use a simple positioning structure, it is difficult to achieve concentricity between the sealing structure and the vacuum channel 210. During sealing, the sealing surface 41 and the sealing end face 211 will be subjected to a large lateral force, which increases the wear of the sealing end face 211 and affects the sealing life of the valve.

[0103] The first mounting plate 410 and the second mounting plate 420 are also provided with a plurality of second link mechanisms 450, wherein the second link mechanism 450 includes a second link 451, one end of the second link 451 is hinged to the first mounting plate 410, and the other end is hinged to the second mounting plate 420, and the second link mechanism 450 is used to cooperate with the first link mechanism 440, so that when the first mounting plate 410 and the second mounting plate 420 move in a direction perpendicular to the first central link 430, they can move stably in all directions to achieve a stable sealing effect. The second link 451 is installed on the first mounting plate 410 or the second mounting plate 420 through a second link mounting seat 452.

[0104] In addition, in the embodiment of the present application, the positioning frame 300 is provided with a guide column 330 for guiding the movement of the sealing module 400 and the second moving module; the sealing module 400 is provided with a first guide mechanism 470 cooperating with the guide column 330, and the first guide mechanism 470 is fixedly mounted on the first mounting plate 410 and the second mounting plate 420 through a first elastic component 480.

[0105] Wherein, an arc-shaped platform 482 is provided on each of the first mounting plate 410 and the second mounting plate 420 . The arc-shaped platform 482 protrudes from the outer side surfaces of the first mounting plate 410 and the second mounting plate 420 and is used to cooperate with the first elastic component 480 to fix the first guide mechanism 470 .

[0106] The first guide mechanism 470 includes at least two guide blocks 472 arranged along the guide column 330, and the guide block 472 is provided with a guide hole 471 that cooperates with the guide column 330. Elastic sheets 481 are fixedly provided on the end faces of both sides of the guide block 472, and one end of the elastic sheet 481 is fixed on the guide block 472. One end of the guide block 472 is pressed on the arc platform 482. The cross-sectional shape of the arc platform 482 in the direction along the guide column 330 is an arc. When the sealing module 400 is compressed and expanded, the elastic sheet 481 can slide stably on the arc platform 482 to prevent vibration.

[0107] The four elastic sheets 481 arranged on one side of the sealing component 460 constitute the first elastic component 480, and the first elastic component 480 can also apply a lateral pressing force to the sealing component 460, so that the sealing component 460 can be pushed by the first connecting rod mechanism 440 to achieve stable movement during expansion and compression.

[0108] Shielding Module 500

[0109] In the embodiments of the present application, Figure 17-18 As shown, the second moving module is taken as the shielding module 500 for exemplary description. The shielding module 500 includes a third mounting plate 510 , a fourth mounting plate 520 and a second central connecting rod 530 .

[0110] The second central link 530 is fixedly connected to the first central link 430, and the third mounting plate 510 and the fourth mounting plate 520 are connected to the second central link 530 via a plurality of third link mechanisms. In the embodiment of the present application, the second central link 530 has the same structure as the first central link 430, both of which adopt a rectangular frame structure, and a hollow structure is formed by the rectangular frame structure, and the shielding assembly can be accommodated in the hollow structure.

[0111] The rectangular frame structure is a closed structure, including a first side frame 431, a second side frame 432, an upper frame 433, and a lower frame 434. The upper frame 433 is provided with a first mounting hole 435 for connecting with the mounting frame 604, and the lower frame 434 is provided with a second mounting hole 436 connected with the first central connecting rod 430.

[0112] The third mounting plate 510 and the fourth mounting plate 520 are connected to the second center link 530 through multiple third link mechanisms 540; the third link mechanism 540 includes a third link 541 hinged to the second center link 530, and the third link 541 is fixed to the third mounting plate 510 or the fourth mounting plate 520 through a third link mounting seat 542, and the third link mounting seat 542 is provided with a second limiting surface 543 for limiting the rotation of the third link 541.

[0113] In the specific setting, the third link mechanism 540 includes at least two, which are respectively located on the upper and lower sides of the shielding assembly, and are used to limit the movement balance of the shielding module 500 when it moves up and down or moves on both sides. In the embodiment of the present application, since the second central link 530 adopts a rectangular frame structure, the number of the third link mechanism 540 can be four when it is set, two of which are connected to the first side frame 431, and two are connected to the second side frame 432.

[0114] In the embodiment of the present application, one of the two third link mechanisms 540 connected to the first side frame 431 is located on the third mounting plate 510, and the other is located on the fourth mounting plate 520. For example, when setting, the third link 541 located on the third mounting plate 510 is connected to the inner surface of the first side frame 431, and the third link 541 located on the fourth mounting plate 520 is connected to the outer surface of the first side frame 431. By forming a plurality of symmetrically arranged third link mechanisms 540, the shielding module 500 can drive the second central link 530 through the top rod 102, and the second central link 530 can drive the mounting plate to move stably, thereby reducing vibration and other phenomena during movement.

[0115] It should be noted that the installation positions of the third link mechanism 540 and the second center link 530, the third mounting plate 510, and the fourth mounting plate 520 can be appropriately adjusted according to different positions, and the present application does not limit this. There is also no limit to the number of the third link mechanism 540, and it can be appropriately adjusted according to the length of the second center link 530.

[0116] In the embodiment of the present application, the second limiting surface 543 on the third link mounting seat 542 is located on the side close to the positioning plate 340, one end of the third link 541 is hinged to the third link mounting seat 542, and the other end of the third link 541 is hinged to the second center link 530. When the second center link 530 moves up and down, the third link 541 is driven to rotate around the hinge point, and the third link 541 rotates between the third mounting plate 510 (or the fourth mounting plate 520) below the second limiting surface 543.

[0117] The movement of the shielding module 500 is guided by the guide column 330 on the positioning frame 300. When the third connecting rod 541 rotates to reach the second limiting surface 543, the lateral distance between the third mounting plate 510 and the fourth mounting plate 520 is the farthest, and the distance between the outer side surface of the third mounting plate 510 and the outer side surface of the fourth mounting plate 520 is equal to the cavity end surface distance of the valve body 200. When the third connecting rod 541 moves between the second limiting surface and the third mounting plate 510 (or the fourth mounting plate 520), the distance between the outer side surface of the third mounting plate 510 and the outer side surface of the fourth mounting plate 520 is less than the cavity end surface distance of the valve body 200.

[0118] It should be noted that, in the embodiment of the present application, the lateral distance is defined as the distance along the direction perpendicular to the second center link 530, and the longitudinal distance is defined as the distance along the direction of the second center link 530. When the direction of the third link 541 is at the second limit plane, the shielding module 500 is in an expanded state, and when the direction of the third link 541 is not at the second limit plane, the shielding module 500 is in a compressed state.

[0119] In the embodiment of the present application, the movement direction of the third link mechanism 540 includes: the third link 541 is used to drive the third mounting plate 510 and the fourth mounting plate 520 to move upward when the second center link 530 moves upward, and the shielding module 500 is in a compressed state when moving upward; the third link 541 is also used to drive the third mounting plate 510 and the fourth mounting plate 520 to move in a direction perpendicular to the second center link 530 until the third link 541 reaches the second limit surface when the third mounting plate 510 and the fourth mounting plate 520 reach the third upper limit position C1 and the second center link 530 continues to move upward.

[0120] The third connecting rod 541 is used to drive the third mounting plate 510 and the fourth mounting plate 520 to move downward when the second central connecting rod 530 moves downward; it should be noted that in the embodiment of the present application, it is not limited that when the positioning frame 300 is in the first lower limit position A2, the position of the shielding module 500 on the positioning frame 300 can be in the third lower limit position C2, and of course it can also be not in the third lower limit position C2. By not being in the third lower limit position C2, the vibration of the shielding module 500 to the shielding module 500 can be reduced. When applied, it can be selected according to needs. In addition, there is no restriction on the state of the third connecting rod mechanism 540, and it is preferably set to be in a compressed state to reduce the friction between the cavity of the valve body 200 and the shielding module 500.

[0121] It should be noted that in the embodiment of the present application, when the third connecting rod 541 is in the extreme position, that is, when it reaches the second limit surface, the angle between the third connecting rod 541 and the second center connecting rod 530 is 90°. In other embodiments, the position of the second limit surface and the angle between the third mounting plate 510 and the fourth mounting plate 520 are not limited in the present application, and can be selected as needed in specific applications.

[0122] In order to reduce the vibration between the shielding module 500 and the positioning plate 340, a bearing or a roller may be provided on the upper end surface of the shielding module 500 to contact the positioning plate 340. Of course, if the shielding module 500 contacts the lower end surface of the positioning frame 300, a bearing or a roller may also be provided, and the present application does not limit this.

[0123] In the embodiment of the present application, the shielding assembly 560 includes a flexible shielding ring 561 , which is configured to be in an expanded state when corresponding to the axis of the vacuum channel 210 , and in a compressed state when not corresponding to the axis of the vacuum channel 210 .

[0124] In the embodiment of the present application, the shielding ring 561 is fixedly mounted on the third mounting plate 510 and the fourth mounting plate 520 through a mounting ring, and the mounting ring is provided with a support surface 562 protruding from the surface of the third mounting plate 510 and the fourth mounting plate 520. When the shielding module 500 is unfolded, the support surface 562 cooperates with the support end surface 212 at the position of the vacuum channel 210 to press the shielding module 500 at the position of the vacuum channel 210. When the shielding module 500 is compressed, the support end surface 212 does not contact the shielding module 500 to prevent wear and vibration.

[0125] In the embodiment of the present application, the shielding ring 561 is formed by an elastic metal sheet arranged along a ring shape. When the shielding device is compressed, the elastic metal sheet arches. When the shielding device is unfolded at the position of the vacuum channel 210, the elastic metal sheet flattens to improve the shielding effect.

[0126] The third mounting plate 510 and the fourth mounting plate 520 are also provided with a plurality of fourth link mechanisms 550, wherein the fourth link mechanism 550 includes a fourth link 551, one end of the fourth link 551 is hinged to the third mounting plate 510, and the other end is hinged to the fourth mounting plate 520, and the fourth link mechanism 550 is used to cooperate with the first link mechanism 440, so that when the third mounting plate 510 and the fourth mounting plate 520 move in a direction perpendicular to the second center link 530, they can move stably in all directions to achieve a stable sealing effect. The fourth link 551 is installed on the third mounting plate 510 or the fourth mounting plate 520 through a fourth link mounting seat 552.

[0127] In addition, in the embodiment of the present application, the positioning frame 300 is provided with a guide column 330 for guiding the movement of the first moving module and the second moving module; the first moving module is provided with a second guide mechanism 570 cooperating with the guide column 330, and the second guide mechanism 570 is fixedly mounted on the third mounting plate 510 and the fourth mounting plate 520 through a second elastic component 580.

[0128] Among them, an arc-shaped platform 482 is provided on the third mounting plate 510 and the fourth mounting plate 520. The arc-shaped platform 482 protrudes from the outer side surfaces of the third mounting plate 510 and the fourth mounting plate 520 and is used to cooperate with the second elastic component 580 to fix the second guide mechanism 570.

[0129] The second guide mechanism 570 includes at least two guide blocks 472 arranged along the guide column 330, and the guide block 472 is provided with a guide hole 471 that cooperates with the guide column 330. Elastic sheets 481 are fixedly provided on the end faces of both sides of the guide block 472, and one end of the elastic sheet 481 is fixed on the guide block 472. One end of the guide block 472 is pressed on the arc platform 482. The cross-sectional shape of the arc platform 482 in the direction along the guide column 330 is an arc. When the sealing module 400 is compressed and expanded, the elastic sheet 481 can slide stably on the arc platform 482 to prevent vibration.

[0130] The four elastic sheets 481 arranged on one side of the sealing component 460 constitute the second elastic component 580, and the second elastic component 580 can also apply a lateral clamping force to the sealing component 460, so that the sealing component 460 can be pushed by the first connecting rod mechanism 440 to achieve stable movement during expansion and compression.

[0131] In the embodiments of the present application, Figure 19-20 As shown, the cylinder assembly drives the push rod 102 to move up and down in the valve body 200, so as to realize the conversion of the gate valve to the ultra-high vacuum sealing mode and the RF shielding mode. After the gate valve provided in the embodiment of the present application is installed in the vacuum system, in the process of realizing ultra-high vacuum sealing and RF shielding:

[0132] (1) The piston 101 moves downward under the action of the high-pressure gas, and drives the positioning frame 300, the sealing module 400 and the shielding module 500 to move downward through the push rod 102.

[0133] (2) When the lower end surface of the positioning frame 300 contacts the bottom end surface of the valve body 200, the positioning frame 300 stops moving.

[0134] (3) The sealing module 400 and the shielding module 500 continue to move downward under the action of the piston 101. When the bottom of the sealing module 400 contacts the upper end surface of the positioning plate 340 on the positioning frame 300, the first mounting plate 410 and the second mounting plate 420 on the sealing module 400 stop moving. At this time, the angle between the first connecting rod 441 and the first central connecting rod 430 is less than 90°, and the sealing module 400 is in a compressed state.

[0135] (4) The first central link 430 and the shielding module 500 continue to move downward, and the first mounting plate 410 and the second mounting plate 420 move to both sides (laterally) under the action of the first central link 430 and the first link 441 and the second link 451 .

[0136] (5) When the first mounting plate 410 contacts the supporting end surface 212 on the valve body 200, under the supporting effect of the supporting end surface 212, the arcuate sealing surface 41 on the sealing ring 461 is further aligned with the axis of the vacuum channel 210 under the effect of the sealing end surface 211 on the valve body 200.

[0137] (6) The sealing ring 461 continues to move sideways, and the arcuate sealing surface 41 on the sealing ring 461 makes linear contact with the sealing end surface 211 on the valve body 200. At this time, the sealing ring 461 cannot continue to move sideways.

[0138] (7) As the first center link 430 continues to move sideways under the action of the first link 441, the linear contact force between the arc-shaped sealing end face 2119 and the sealing end face 211 will increase accordingly, and the force will also be transmitted to the elastic member 463. When the force exceeds the preload force of the elastic member 463, the elastic member 463 will be further compressed, so that the contact force between the arc-shaped sealing end face 2119 and the sealing end face 211 is always stable and does not change suddenly.

[0139] (8) Finally, when the first connecting rod 441 reaches the first limit surface 443 and the angle between the first connecting rod 441 and the first center rod is 90°, the sealing module 400 is in the ultra-high vacuum sealing mode, the gate valve realizes ultra-high vacuum sealing, and the vacuum section is divided into two parts.

[0140] It should be noted that during the downward movement of the first center link 430, in steps (3)-(8), the second center link 530 continues to drive the shielding module 500 to continue to move downward under the action of the first center link 430, and the shielding module 500 is in a compressed state.

[0141] When the beam needs to pass through the entire vacuum section, the RF shielding full metal gate valve needs to be opened and provide stable RF shielding.

[0142] 1) The piston 101 moves upward under the action of the high-pressure gas, and drives the positioning frame 300, the sealing module 400 and the shielding module 500 to move upward through the push rod 102.

[0143] Under the action of the first center connecting rod 430, the first connecting rod 441 and the second connecting rod 451, the first mounting plate 410 and the second mounting plate 420 on the sealing module 400 move laterally toward the middle, the arc-shaped sealing end surface 211 is separated from the sealing end surface 211, the ultra-high vacuum mode is turned on, and the sealing module 400 and the shielding module 500 continue to move upward under the action of the piston 101.

[0144] 2) The second central connecting rod 530 and the shielding module 500 continue to move upward, and when the upper end surface of the positioning frame 300 contacts the positioning surface 203 on the end cover 201 at the top of the valve body 200, the positioning frame 300 stops moving.

[0145] 3) As the second center link 530 drives the shielding module 500 to continue to move upward, when the shielding module 500 contacts the lower end surface of the positioning plate 34030, the third mounting plate 510 and the fourth mounting plate 520 stop moving upward. At this time, the angle between the third link 541 and the second center link 530 is less than 90°, and the shielding module 500 is in a compressed state.

[0146] 4) The second central link 530 continues to move upward, and under the action of the second central link 530 and the third link 541 and the fourth link 551, the third mounting plate 510 and the fourth mounting plate 520 move to both sides (laterally).

[0147] 5) When the support surface 562 on the third mounting plate 510 contacts the support end surface 212 on the valve body 200, the RF shielding ring 561 is pulled apart.

[0148] 6) Finally, when the third connecting rod 541 reaches the second limit surface, the angle between the third connecting rod 541 and the second center rod is 90°, and the shielding ring 561 is fully expanded to achieve uniform transition of the channel and provide uniform RF shielding. At this time, the shielding module 500 is in the RF shielding open mode.

[0149] The same reciprocating motion realizes the switching between the ultra-high vacuum sealing mode and the RF shielding mode of the RF shielding all-metal gate valve, providing an ultra-high vacuum and stable RF shielding environment for the vacuum system beam operation, thereby improving the stability and life of the beam.

[0150] After running for a period of time, the arcuate sealing surface 41 and the sealing end face 211 will produce certain wear or irreversible plastic deformation. At this time, the preload force of the elastic part 463 can be increased by screwing the flexible force adaptive adjustment nut 465, so as to further increase the contact force between the arcuate sealing surface 41 and the sealing end face 211, thereby realizing non-disassembly repair; secondly, if the surface of the arcuate sealing surface 41 and the sealing end face 211 is damaged due to atmospheric impact or impact of hard objects, it can be repaired by disassembling and processing the sealing end face 211 and replacing a slightly larger sealing ring 461, so as to achieve the lowest scrap rate possible.

[0151] At the same time, the gate valve in the embodiment of the present application adopts an all-metal structure. Due to the arc-shaped sealing surface 41 structure, the deformation of the sealing end surface 211 is small during ultra-high vacuum sealing, the requirements for materials are relatively low, and it can be used in a larger temperature range.

[0152] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0153] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0154] Unless otherwise defined, the technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art in the technical field of the present invention. The terms used herein are only for describing specific implementation purposes and are not intended to limit the present invention. Terms such as "setting" and the like appearing in this article can mean that one component is directly attached to another component, or that one component is attached to another component through an intermediate. Features described in this article in one embodiment may be applied to another embodiment alone or in combination with other features, unless the feature is not applicable in the other embodiment or otherwise specified.

[0155] The present invention has been described through the above-mentioned embodiments, but it should be understood that the above-mentioned embodiments are only for the purpose of example and illustration, and are not intended to limit the present invention to the described embodiments. It can be understood by those skilled in the art that more variations and modifications can be made according to the teachings of the present invention, and these variations and modifications all fall within the scope of the protection claimed by the present invention.

Claims

1. An RF shielded all-metal gate valve, characterized in that: include: A cylinder body, a valve body fixedly connected to the cylinder body, and a positioning frame arranged inside the valve body, wherein: A piston and a push rod connected to the piston are arranged in the cylinder body, and the push rod extends from the cylinder body into the valve body; The positioning frame is provided with a first moving module and a second moving module, the first moving module and the second moving module are fixedly connected to the ejector rod, one of the first moving module and the second moving module is provided with a sealing component, and the other is provided with a shielding component; The piston reciprocates within the cylinder body, and drives the first moving module and the second moving module to reciprocate within the valve body through the push rod; A vacuum channel is provided on the cylinder body; when the positioning frame is located at the first lower limit position of the valve body and the first movable module is located at the second lower limit position on the positioning frame, the axis of the first movable module corresponds to the axis position of the vacuum channel; when the positioning frame is located at the first upper limit position of the valve body and the second movable module is located at the third upper limit position of the positioning frame, the axis of the second movable module corresponds to the axis position of the vacuum channel; It also includes an end cover, which includes a positioning surface for being arranged inside the valve body to form a first upper limit position of the valve body, a flange that cooperates with the end face of the valve body and the end face of the cylinder body, and a boss arranged on the flange, wherein the boss extends into the interior of the valve body, and the lower surface of the boss is the positioning surface.

2. The RF shielding all-metal gate valve according to claim 1, characterized in that: The positioning frame is divided into a first accommodating cavity and a second accommodating cavity by a positioning plate, the first movable module is arranged in the first accommodating cavity, and the second movable module is arranged in the second accommodating cavity; the upper end surface of the positioning plate located in the first accommodating cavity is the second lower limit of the first movable module, and the lower end surface of the positioning plate located in the second accommodating cavity is the third upper limit of the second movable module.

3. The RF shielding all-metal gate valve according to claim 2, characterized in that: The first mobile module includes a first mounting plate, a second mounting plate and a first central connecting rod, wherein: The first central connecting rod is fixedly connected to the top rod, and the first mounting plate and the second mounting plate are connected to the first central connecting rod through a plurality of first connecting rod mechanisms; The first link mechanism includes a first link hinged to the first central link, the first link is fixed to the first mounting plate or the second mounting plate via a first link mounting seat, and the first link mounting seat is provided with a first limiting surface for limiting the rotation of the first link.

4. The RF shielding all-metal gate valve according to claim 3, characterized in that: The first connecting rod is used to drive the first mounting plate and the second mounting plate to move downward when the first center connecting rod moves downward; the first connecting rod is also used to drive the first mounting plate and the second mounting plate to move in a direction perpendicular to the first center connecting rod until the first connecting rod reaches the first limit surface when the first mounting plate and the second mounting plate reach the second lower limit and the first center connecting rod continues to move downward.

5. The RF shielding all-metal gate valve according to claim 3, characterized in that: The sealing assembly includes a sealing ring, which is mounted on the first mounting plate through a mounting seat; an elastic member is arranged between the mounting seat and the first mounting plate, one end of the elastic member cooperates with the first mounting plate, and the other end of the elastic member cooperates with the mounting seat; an adjusting member for adjusting the compression length of the elastic member is also arranged on the first mounting plate.

6. The RF shielding all-metal gate valve according to claim 3, characterized in that: The second mobile module includes a third mounting plate, a fourth mounting plate and a second central connecting rod, wherein: The second central connecting rod is fixedly connected to the first central connecting rod, and the third mounting plate and the fourth mounting plate are connected to the second central connecting rod through a plurality of third connecting rod mechanisms; The third link mechanism includes a third link hinged to the second center link, the third link is fixed to the third mounting plate or the fourth mounting plate via a third link mounting seat, and the third link mounting seat is provided with a second limiting surface for limiting the rotation of the third link.

7. The RF shielding all-metal gate valve according to claim 6, characterized in that: The shielding assembly includes a flexible shielding ring, the flexible shielding ring being configured to be in an expanded state when corresponding to the axis of the vacuum passage, and in a compressed state when not corresponding to the axis of the vacuum passage.

8. The RF shielding all-metal gate valve according to claim 7, characterized in that: The positioning frame is provided with a guide column for guiding the movement of the first moving module and the second moving module; the first moving module is provided with a first guide mechanism cooperating with the guide column, and the first guide mechanism is fixedly mounted on the first mounting plate and the second mounting plate through a first elastic component; the second moving module is provided with a second guide mechanism cooperating with the guide column, and the second guide mechanism is fixedly mounted on the third mounting plate and the fourth mounting plate through a second elastic component.

9. The RF shielding all-metal gate valve according to claim 1, characterized in that: A vacuum connection assembly is provided at the connection position between the cylinder body and the valve body, and the vacuum connection assembly includes a bellows sleeved on the push rod, one end of the bellows is fixed on the sleeve shoulder, and the other end is fixed on the mounting shoulder; wherein the sleeve shoulder is provided on the mounting surface of the cylinder body and the valve body and is pressed by the cylinder body and the valve body, and the mounting shoulder is fixedly mounted on the push rod.

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