Device and method for determining three-dimensional image of object body

Abstract

The present disclosure provides a detachable second device that is combined with a first device for determining a three-dimensional image of an object body to determine an angle of an upper surface of the object body with respect to a reference plane. The second device may include: a first light source that sequentially irradiates one or more first pattern lights having a single phase range; a beam splitter and one or more lenses that change an optical path of the one or more first pattern lights so that light corresponding to each phase of the phase range is diffusely incident on a partial area of the upper surface; a communication interface that communicates with the first device; and a first processor electrically connected to the first light source and the communication interface. The first processor may obtain first information of one or more first reflected lights generated by reflection of the one or more first pattern lights from the partial area from the first device, and determine an angle of the upper surface with respect to the reference plane based on the first information.

Description

Technical Field

[0001] The present disclosure relates to a technique for determining a three-dimensional image of an object body. Background Art

[0002] For a process of mounting an element (e.g., a die) on a substrate, various inspections regarding whether the process is appropriately performed can be executed. For example, when the element is not disposed at an appropriate position on the substrate, defects may occur on the substrate after the process. Therefore, it is necessary to grasp the three-dimensional image of the element on the substrate. In the present disclosure, an element may refer to a component or a chipset used as a constituent element in all electronic devices such as circuits and semiconductor devices. For example, an element may refer to a coil, a capacitor, a resistor, a transistor, a diode, an LED, etc. In the present disclosure, the element is not limited to the above examples.

[0003] In determining the three-dimensional image of an element (i.e., an object body), particularly, the angle that the upper surface of the element has with respect to the substrate (i.e., a reference plane) can be inspected. This angle can be used to inspect whether there is a tilt between the element and the substrate. This is because when the lower surface of the element is disposed or mounted in a manner that closely adheres to the substrate, or depending on the coating state of solder or solder balls coated on the substrate, if the element is disposed or mounted in a tilted state with respect to the substrate, defects on the substrate may occur.

[0004] In determining the three-dimensional image of an element, a method of inspecting the tilt by irradiating illumination onto the element and using the position of the reflected light for imaging can be used to inspect the tilt of the upper surface of the element. However, this method has the following disadvantages: when the element is a mirror surface, even if the element is tilted at a small angle, the reflection angle changes greatly, and thus a large amount of space is required to detect the imaging position of the reflected light, making it difficult to miniaturize the inspection equipment. Additionally, to inspect the tilt of the upper surface of the element, a method of irradiating structured light onto the element to form diffraction fringes caused by the structured light in the air above the element and inspecting the tilt through the phase change of the diffraction fringes can be used. However, this method has the disadvantage of generating a large amount of noise due to the diffraction fringes being imaged in the air. Summary of the Invention

[0005] Technical Problem

[0006] The present disclosure provides a technique for determining a three-dimensional image of an object body.

[0007] Solution to the Problem

[0008] One aspect of the present disclosure may provide an apparatus for determining a three-dimensional image of an object body. The apparatus according to one aspect of the present disclosure may be a detachable second apparatus that is combined with a first apparatus for determining a first three-dimensional image of an object body located on a reference plane to determine an angle of an upper surface of the object body with respect to the reference plane. The second apparatus may include: a first light source that sequentially irradiates one or more first pattern lights having a single phase range; a beam splitter and one or more lenses that change an optical path of the one or more first pattern lights so that light corresponding to each phase of the phase range is diffusely incident on a partial area of the upper surface; a communication interface that communicates with the first apparatus; and a first processor that is electrically connected to the first light source and the communication interface. The first processor may obtain first information regarding one or more first reflected lights from the first apparatus, the one or more first reflected lights being generated by reflection of the one or more first pattern lights from the partial area, and determine an angle of the upper surface with respect to the reference plane based on the first information.

[0009] In one embodiment, the first information includes information indicating a light quantity value of each of the one or more first reflected lights. The first processor may derive a phase value of each of the one or more first reflected lights from the light quantity value of each of the one or more first reflected lights, and determine an angle of the upper surface with respect to the reference plane based on the phase value.

[0010] In one embodiment, the second apparatus may further include: a memory that stores association information indicating a relationship between an angle of the upper surface with respect to the reference plane and a phase value of each of the one or more first reflected lights. The first processor may determine an angle of the upper surface with respect to the reference plane based on the phase value and the association information.

[0011] In one embodiment, the first processor may control the communication interface to transmit second information indicating an angle of the upper surface to the first apparatus, and the second information may be used by the first apparatus to correct an upper surface of the object body represented by the first three-dimensional image to determine a second three-dimensional image of the object body.

[0012] In one embodiment, the first processor may control the communication interface to obtain third information indicating the first three-dimensional image of the object body from the first apparatus, and correct an upper surface of the object body represented by the first three-dimensional image based on the angle of the upper surface to determine a second three-dimensional image of the object body.

[0013] In one embodiment, the first light source may further emit monochromatic light, and the beam splitter and the one or more lenses may change the optical path of the monochromatic light so that the monochromatic light reaches the upper surface.

[0014] In one embodiment, the first processor may control the communication interface to obtain, from the first device, fourth information indicating the reflectance of the upper surface. When the reflectance of the upper surface is equal to or greater than a preset reference reflectance, the first processor may control the first light source to sequentially emit the one or more first pattern lights.

[0015] In one embodiment, each of the one or more first pattern lights may be a pattern light generated by phase-shifting a pattern light having a pattern in a first direction or a second direction perpendicular to the first direction by an integer multiple of a preset phase interval.

[0016] In one embodiment, the first device may include: a second light source that emits one or more second pattern lights toward the object; an image sensor that captures one or more second reflected lights generated by the object reflecting the one or more first reflected lights and the one or more second pattern lights; and a second processor that determines a first three-dimensional image of the object based on the one or more first reflected lights and the one or more second reflected lights and transmits third information indicating the first three-dimensional image to the second device.

[0017] One aspect of the present disclosure may provide a method for determining a three-dimensional image of an object. The method according to one aspect of the present disclosure is a method for determining an angle of an upper surface of an object with respect to a reference plane, which can be executed on a detachable second device combined with determining a first three-dimensional image of an object located on the reference plane. The method according to the present disclosure may include: a step of sequentially irradiating, by a first light source, one or more first pattern lights having a single phase range; a step of changing, by a beam splitter and one or more lenses, an optical path of the one or more first pattern lights so that light corresponding to each phase of the phase range dispersedly reaches a partial area of the upper surface; a step of the first processor obtaining, from the first device, first information regarding one or more first reflected lights, the one or more first reflected lights being generated by the partial area reflecting the one or more first pattern lights; and a step of the first processor determining, based on the first information, an angle of the upper surface with respect to the reference plane.

[0018] In one embodiment, the first information may include information indicating the light quantity value of each of the one or more first reflected lights. The step of determining the angle of the upper surface may include: the step in which the first processor derives the phase value of each of the one or more first reflected lights from the light quantity value of each of the one or more first reflected lights; and the step in which the first processor determines the angle of the upper surface with respect to the reference plane based on the phase value.

[0019] In one embodiment, the method according to the present disclosure may further include: the step in which the first processor transmits second information indicating the angle of the upper surface to the first device, and the second information may be used by the first device to correct the upper surface of the object represented by the first three-dimensional image to determine a second three-dimensional image of the object.

[0020] In one embodiment, the method according to the present disclosure may further include: the step in which the first processor obtains third information indicating the first three-dimensional image of the object from the first device; and the step in which the first processor corrects the upper surface of the object represented by the first three-dimensional image based on the angle of the upper surface to determine a second three-dimensional image of the object. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 FIG. is a diagram showing a device 100 according to an embodiment of the present disclosure.

[0022] Figure 2 FIG. is a diagram showing an operation process of a device 100 according to an embodiment of the present disclosure.

[0023] Figure 3 FIG. is a diagram showing a block diagram of a device 100 according to an embodiment of the present disclosure.

[0024] Figure 4 FIG. is a diagram showing a process in which pattern light according to an embodiment of the present disclosure is irradiated onto an object.

[0025] Figure 5 FIG. is a diagram showing a process in which reflected light passes through an aperture according to an embodiment of the present disclosure.

[0026] Figure 6 FIG. is a diagram showing a process in which reflected light passes through an aperture according to an embodiment of the present disclosure.

[0027] Figure 7 FIG. is a diagram showing the appearance of pattern light irradiated from a pattern light source in an aperture according to an embodiment of the present disclosure.

[0028] Figure 8 FIG. is a diagram showing associated information according to an embodiment of the present disclosure.

[0029] Figure 9 FIG. is a diagram showing the direction of the pattern of the pattern light according to an embodiment of the present disclosure.

[0030] Figure 10 FIG. is a diagram showing the inspection process of the apparatus 100 using the illumination light according to an embodiment of the present disclosure.

[0031] Figure 11 FIG. is a diagram showing the process of additionally irradiating white light by the pattern light source according to an embodiment of the present disclosure.

[0032] Figure 12 FIG. is a diagram showing the apparatus 1210 according to an embodiment of the present disclosure.

[0033] Figure 13 FIG. is a diagram of a block diagram of the apparatus 1210 according to an embodiment of the present disclosure.

[0034] Figure 14 FIG. is a diagram showing an embodiment of a method 1700 for determining a three-dimensional image of an object that can be performed by the apparatus 100 according to the present disclosure.

[0035] Figure 15 FIG. is a diagram showing an embodiment of a method 1800 for determining the angle of the upper surface of an object that can be performed by the apparatus 1210 according to the present disclosure. DETAILED DESCRIPTION

[0036] The various embodiments described herein are exemplified for the purpose of clearly explaining the technical idea of the present disclosure and are not intended to limit it to a specific embodiment. The technical idea of the present disclosure includes various modifications, equivalents, alternatives, and embodiments in which all or part of each embodiment is selectively combined from the various embodiments described herein. In addition, the scope of rights of the technical idea of the present disclosure is not limited to the various embodiments presented below or the specific descriptions thereof.

[0037] Unless otherwise defined, terms used herein, including technical or scientific terms, may have the meaning generally understood by those of ordinary skill in the art to which the present disclosure pertains.

[0038] Expressions such as "including", "may include", "having", "may have", etc. used herein mean that there are features (e.g., functions, operations, or components, etc.) that are the object, and do not exclude the existence of other additional features. That is, such expressions should be understood as open-ended terms that include the possibility of including other embodiments.

[0039] As used herein, singular expressions, unless otherwise indicated in the context, shall include plural meanings, and the same shall apply to singular expressions recited in the claims.

[0040] As used herein, expressions such as "first", "second", "the first", "the second", etc., unless otherwise indicated in the context, are used to distinguish one object from another in reference to multiple objects of the same kind, and do not limit the order or importance between the objects.

[0041] As used herein, expressions such as "A, B, and C", "A, B, or C", "A, B, and / or C", "at least one of A, B, and C", "at least one of A, B, or C", "at least one of A, B, and / or C", "at least one selected from A, B, and C", "at least one selected from A, B, or C", "at least one selected from A, B, and / or C", etc., may mean each of the recited items or all possible combinations of the recited items. For example, "at least one selected from A and B" may all refer to (1) A, (2) at least one of A, (3) B, (4) at least one of B, (5) at least one of A and at least one of B, (6) at least one of A and B, (7) at least one of B and A, (8) A and B.

[0042] As used herein, the expression with the word "unit" may be a concept that collectively refers to hardware components including software or hardware components such as FPGA (field-programmable gate array) and ASIC (application specific integrated circuit), as well as optical elements. However, "unit" is not limited to hardware and software. "Unit" may be constituted in a manner of being stored in an addressable storage medium or in a manner of running on one or more processors. In one embodiment, "unit" may include components such as software components, object-oriented software components, class components, and task components, processors, functions, attributes, programs, subroutines, fragments of program code, drivers, firmware, microcode, circuits, data, databases, data structures, worksheets, arrays, and variables.

[0043] As used herein, the expression with the word "based on" is used to describe one or more factors that affect the act or action of determination or judgment described in the statement or passage containing the expression, and this expression does not exclude additional factors that affect the relevant determination or judgment.

[0044] As used herein, the expression that a certain component (e.g., the first component) is "connected to" or "joined to" another component (e.g., the second component) may mean that the certain component is directly connected or joined to the other component, or may mean that it is connected or joined through another new component (e.g., the third component).

[0045] As used herein, the expression "configured to" may, depending on the context, have meanings such as "set to", "capable of", "changed to", "formed to", "able to perform". This expression is not limited to the meaning of "specially designed in terms of hardware". For example, a processor configured to perform a specific action may mean a general-purpose processor that can perform its specific action by running software.

[0046] To illustrate various embodiments of the present disclosure, a rectangular coordinate system having X, Y, and Z axes perpendicular to each other may be defined. As used herein, expressions such as "X-axis direction", "Y-axis direction", "Z-axis direction" of the rectangular coordinate system may mean the two side directions in which each axis of the rectangular coordinate system extends, provided that they are not specifically defined otherwise in the corresponding description. In addition, the + sign attached to the front of each axis direction may mean the positive direction of any one of the two side directions in which the axis extends, and the - sign attached to the front of each axis direction may mean the negative direction of the remaining one of the two side directions in which the axis extends.

[0047] As used herein, direction indicators such as "above" and "upper" mean, in the drawings, the opposite directions of direction indicators such as "below" and "lower", based on the two Z-axis directions, provided that they are not specifically defined otherwise in the corresponding description.

[0048] In the present disclosure, a substrate is a board or container on which components such as semiconductor chips and dies are mounted, and can serve as a connection path for electrical signals between components. The substrate can be used for integrated circuit manufacturing, etc., and can be made of materials such as silicon. For example, the substrate can be a printed circuit board (PCB), and according to an embodiment, can be called a wafer, etc.

[0049] Hereinafter, various embodiments of the present disclosure will be described with reference to the accompanying drawings. In the drawings and the description of the drawings, the same or substantially equivalent components may be given the same reference numerals. In addition, in the following description of various embodiments, repeated descriptions of the same or corresponding components may be omitted, but this does not mean that the relevant components are not included in the embodiment.

[0050] Figure 1 FIG. is a diagram showing a device 100 according to an embodiment of the present disclosure. The technology for determining the three-dimensional image of an object according to the present disclosure can be embodied in a device according to various embodiments. The device 100 of the present disclosure can determine the three-dimensional image of an object (e.g., a component) using various inspection methods. In the present disclosure, the image of an object can be a concept that includes all the three-dimensional shapes of the object and the colors, textures, etc. on the surface of the object. In one embodiment, the device 100 can perform an inspection using pattern light and / or an inspection using coaxial deflectometry. In one embodiment, the device 100 can also perform an inspection using illumination light.

[0051] In the present embodiment, the device 100 can include a pattern light irradiation unit 110, a DFM (Deflectometry) unit 120, a measurement unit 130, and / or an illumination light irradiation unit 140. In one embodiment, the illumination light irradiation unit 140 can be omitted. The pattern light irradiation unit 110 can irradiate pattern light toward the object to perform an inspection using pattern light. The DFM unit 120 can irradiate pattern light toward the object to perform an inspection using coaxial deflectometry. The measurement unit 130 can capture the reflected light reflected from the object irradiated by the pattern light irradiation unit 110 and the DFM unit 120, and determine the three-dimensional image of the object. The illumination light irradiation unit 140 can irradiate illumination light toward the object to perform an inspection using illumination light. The illumination light can be reflected from the object and captured by the measurement unit 130 for determining the three-dimensional image of the object. The specific operations and inspection methods of each unit will be described later.

[0052] Figure 2 FIG. is a diagram showing the operation process of the device 100 according to an embodiment of the present disclosure. The device 100 according to the illustrated embodiment can perform an inspection method using pattern light and / or an inspection method using coaxial deflectometry. The device 100 can determine the three-dimensional image of the object based on the inspection result. The determined three-dimensional image can be used to judge the suitability of the performed process. The process of the device 100 performing an inspection using illumination light will be described later through additional embodiments.

[0053] In this embodiment, one or more pattern light sources 210 may irradiate one or more pattern lights 212 toward an object located on a reference plane R. One or more pattern light sources 210 may belong to the pattern light irradiation unit 110. One or more pattern light sources 210 may be arranged to irradiate one or more pattern lights 212 toward the object along respective different optical axes above the reference plane R. In one embodiment, one or more pattern light sources 210 may be arranged at intervals from each other on a virtual circumference above the reference plane R. One or more pattern lights 212 may be reflected from the object respectively. The phase of the pattern light 212 before and after reflection may change according to the shape of the object. That is, the reflected light 214 generated by reflecting the pattern light 212 by the object may have a phase different from the phase of the corresponding pattern light 212.

[0054] The image sensor 220 may capture one or more respective reflected lights 214 generated by reflecting one or more pattern lights 212 respectively. The image sensor 220 may belong to the measurement unit 130. In one embodiment, the image sensor 220 may be arranged facing the object directly above the area on the reference plane R where the object is located.

[0055] The apparatus 100 may obtain information on the phase of each of the one or more reflected lights 214 and the phase of each of the one or more pattern lights 212. The apparatus 100 may determine a first three-dimensional image of the object based on the phase change of each of the one or more pattern lights 212 for each of the one or more reflected lights 214.

[0056] On the other hand, a pattern light source 230 independently installed from one or more pattern light sources 210 may irradiate one or more pattern lights 232 in sequence. The pattern light source 230 may belong to the DFM unit 120. One or more pattern lights 232 may each have the same phase range (e.g., 0 to 7×π / 4). In one embodiment, one or more pattern lights 232 may each be generated by phase-shifting a single pattern light within the aforementioned phase range by an integer multiple of a preset phase interval (e.g., π / 2).

[0057] One or more pattern lights 232 may travel through lens 250 and / or other optical elements (e.g., mirrors) to beam splitter 240. In one embodiment, pattern light 232 may travel through aperture 252 to beam splitter 240. Beam splitter 240 may reflect one or more pattern lights 232 to direct the pattern lights 232 toward the object. At this time, beam splitter 240 and one or more lenses 250 may change the optical path of one or more pattern lights 232 so that light of each phase corresponding to the foregoing phase range is dispersed and reaches a partial area A on the upper surface of the object. That is, the optical path of the light corresponding to each phase of pattern light 232 may be changed (adjusted) so that the light corresponding to one phase (e.g., 3×π / 4) in the foregoing phase range (e.g., 0 to 7×π / 4) of pattern light 232 reaches each point on the surface corresponding to the foregoing partial area A. Beam splitter 240 and one or more lenses 250 may be arranged on the optical path of pattern light 232 to enable the above-described optical path change. Beam splitter 240 and one or more lenses 250 may belong to DFM unit 120.

[0058] One or more pattern lights 232 whose optical paths have been changed (adjusted) may each reach the object. Since light of each phase is dispersed and irradiated on the entire partial area A on the upper surface of the object, light having an average light amount corresponding to pattern light 232 may reach each point in partial area A. One or more pattern lights 232 reaching partial area A may be reflected from partial area A, respectively. The light reflected by pattern light 232 (hereinafter referred to as reflected light 234) may sequentially pass through lens 250 and beam splitter 240. In one embodiment, reflected light 234 may pass through aperture 262 and reach image sensor 220 through lens 260 additionally arranged as needed. Image sensor 220 may capture each of the one or more reflected lights 234 reaching it.

[0059] If a partial region A on the upper surface of the object body is inclined with respect to the reference plane R, only a part of the light reflected from the partial region A can be input to the image sensor 220 through the aperture 262. That is, the aperture 252 allows the pattern light 232 to pass through to the beam splitter 240, and the aperture 262 allows the reflected light 234 traveling from the partial region A to pass through to the image sensor. Therefore, the light quantity value of the reflected light 234 captured by the image sensor 220 can be determined according to the light quantity of the light reflected by the partial region A through the aperture 252 and then passing through the aperture 262 again. At this time, the light captured by the image sensor 220 can be light corresponding to a partial phase range (e.g., 3×π / 4 to 5×π / 4) within the aforementioned phase range (e.g., 0 to 7×π / 4) of the initially irradiated pattern light 232. That is, the light quantity captured by the image sensor 220 through the aperture 262 can vary according to the degree of inclination of the upper surface of the object body or the partial region A with respect to the reference plane R. If this principle is utilized, the degree of inclination of the reflecting surface can be derived based on the light quantity of the captured reflected light, and in the present disclosure, this can be referred to as deflectometry. In particular, as shown in the illustrated embodiment, for the case where the pattern light 232 incident on the object body and the reflected light 234 reflected from the object body travel along substantially the same optical axis, deflectometry can be referred to as coaxial deflectometry. The specific principle of deflectometry will be described later.

[0060] According to deflectometry, the device 100 can determine the angle of the upper surface of the object body with respect to the reference plane R based on the light quantity value of each of one or more reflected lights 234. The device 100 can correct the previously determined primary three-dimensional image using the determined angle of the upper surface to determine the secondary three-dimensional image. That is, the device 100 can correct the upper surface represented by the primary three-dimensional image using the information on the angle of the upper surface measured by deflectometry, and derive a refined new three-dimensional image, that is, the secondary three-dimensional image. In one embodiment, this correction can be performed by overriding the angle of the upper surface represented by the primary three-dimensional image with the angle of the upper surface derived by deflectometry. In one embodiment, this correction can also be performed by determining the average value of the angle of the upper surface represented by the primary three-dimensional image and the angle of the upper surface derived by deflectometry as the angle of the upper surface represented by the secondary three-dimensional image. The secondary three-dimensional image is the final three-dimensional image of the object body and can be used to judge the suitability for processes such as mounting.

[0061] Figure 3FIG. is a block diagram showing a device 100 according to an embodiment of the present disclosure. In the present embodiment, the device 100 may include more than one pattern light source 210, an image sensor 220, a pattern light source 230, a beam splitter 240, more than one lens 250, more than one processor 310, and / or more than one memory 320. In one embodiment, at least one of these components of the device 100 may be omitted, or other components may be added to the device 100. In one embodiment, some of the components may be embodied additionally or alternatively combined, or may be embodied as a single or multiple individuals. In the present disclosure, more than one processor may be expressed as a processor. The expression of the word "processor" may mean a set of one or more processors as long as the context does not clearly indicate otherwise. In the present disclosure, more than one memory may be expressed as a memory. The expression of the word "memory" may mean a set of one or more memories as long as the context does not clearly indicate otherwise. In one embodiment, at least some of the components inside and outside the device 100 may be connected to each other through a bus, GPIO (general-purpose input / output), SPI (serial peripheral interface), or MIPI (mobile industry processor interface) to transmit and receive data and / or signals.

[0062] One or more pattern light sources 210 can respectively irradiate one or more pattern lights 212 as described above. The pattern light sources 210 can generate the pattern lights 212 in various ways. For example, the pattern of the pattern light 212 can be formed according to a digital method or an analog method. In the digital method, there can be a liquid crystal transmission method using an LCD (Liquid Crystal Display), a liquid crystal reflection method using LcoS (Liquid Crystal on Silicon), a mirror reflection method using a DMD (Digital Micromirror Device) or DLP (Digital Light Processing). In the analog method, there can be a method of forming a pattern using a periodic pattern, a gradient pattern, a lattice pattern, etc. As described above, one or more pattern light sources 210 can be respectively arranged in such a way that the pattern lights 212 are irradiated along different optical axes above the reference plane R. In one embodiment, four pattern light sources 210 can be arranged at intervals of about 90 degrees on a virtual circumference (4-way). In one embodiment, eight pattern light sources 210 can be arranged at intervals of about 45 degrees on a virtual circumference (8-way). In one embodiment, the pattern light sources 210 can respectively irradiate one or more pattern lights 212 phase-shifted by four buckets (an inherent term of the 4-bucket algorithm) in sequence. In one embodiment, one or more pattern lights 212 can respectively be generated by phase-shifting an individual pattern light by an integer multiple of a preset phase interval (e.g., π / 2). For example, if eight pattern light sources 210 are used and the pattern lights 212 phase-shifted by four buckets are irradiated in sequence, a total of 32 (8×4) pattern lights 212 can be irradiated onto the object body. Therefore, a total of 32 images can be captured, and the information on 32 phase changes can be used to determine the three-dimensional image of the object body once.

[0063] The image sensor 220 can respectively capture one or more reflected lights 214 and reflected lights 234 as described above. For example, the image sensor 220 can be embodied as a CCD (Charge Coupled Device) or a CMOS (Complimentary Metal Oxide Semiconductor) sensor, etc.

[0064] The pattern light source 230 can generate and irradiate the pattern light 232 in various ways, similar to the pattern light source 210. In one embodiment, the pattern light source 230 can sequentially irradiate one or more pattern lights 232 shifted by 4 buckets. In one embodiment, if the pattern light formed in one direction (hereinafter referred to as the w-axis direction) uses the pattern light 232 shifted by 4 buckets and the pattern light formed in the direction perpendicular to the w-axis direction (hereinafter referred to as the v-axis direction) uses the pattern light 232 shifted by 4 buckets, a total of 8 (4 + 4) pattern lights 232 can be sequentially irradiated. Therefore, a total of 8 images can be captured and used to determine the angle of the upper surface of the object body.

[0065] The beam splitter 240, one or more lenses 250, and / or other aforementioned optical elements can be variously embodied by optical elements in a manner known in the technical field of the present disclosure. In one embodiment, the beam splitter 240 and / or one or more lenses 250 can be configured in a manner capable of changing the optical path of the aforementioned pattern light 232 for the deflectometry method. Alternatively, in one embodiment, the processor 310 can also adjust its position, configuration, and related parameters so that the beam splitter 240 and / or one or more lenses 250 can perform this optical path change. In one embodiment, the apparatus 100 can also include the aforementioned aperture 252 and aperture 262.

[0066] The processor 310 can control at least one component of the apparatus 100 connected to the processor 310 by driving software (e.g., commands, programs, etc.). Additionally, the processor 310 can perform various operations, processes, data generation, processing, etc. related to the present disclosure. Further, the processor 310 can load data, etc. from the memory 320 or store them in the memory 320. In one embodiment, the processor 310 can determine the primary three-dimensional image of the object body based on the phase change of each of the one or more pattern lights 212 for each of the one or more reflected lights 214. Additionally, the processor 310 can determine the angle of the upper surface of the object body with respect to the reference plane R based on the light quantity value of each of the one or more reflected lights 234 according to the deflectometry method. The processor 310 can correct the primary three-dimensional image using the determined angle of the upper surface to determine the secondary (final) three-dimensional image.

[0067] The memory 320 may store various data. The data stored in the memory 320 is data obtained, processed, or used by at least one component of the device 100, and may include software (e.g., commands, programs, etc.). The memory 320 may include volatile and / or non-volatile memory. In the present disclosure, commands and programs are software stored in the memory 320, and may include an operating system for controlling the resources of the device 100, application programs, and / or middleware that provides various functions to the application programs to enable the application programs to utilize the resources of the device 100. In one embodiment, the memory 320 may store commands that, when executed by the processor 310, cause the processor 310 to perform operations.

[0068] In one embodiment, the apparatus 100 may further include a communication interface (not shown in the figure). The communication interface may perform wireless or wired communication between the apparatus 100 and a server or between the apparatus 100 and other apparatuses. For example, the communication interface may perform wireless communication based on eMBB (enhanced Mobile Broadband), URLLC (Ultra Reliable Low-Latency Communications), MMTC (Massive Machine Type Communications), LTE (Long-Term Evolution), LTE-A (LTE Advance), NR (New Radio), UMTS (Universal Mobile Telecommunications System), GSM (Global System for Mobile communications), CDMA (Code Division Multiple Access), WCDMA (Wideband CDMA), WiBro (Wireless Broadband), WiFi (Wireless Fidelity), Bluetooth, NFC (Near Field Communication), GPS (Global Positioning System), or GNSS (Global Navigation Satellite System). For example, the communication interface may perform wired communication according to USB (universal serial bus), HDMI (high definition multimedia interface), RS-232 (recommended standard 232), or POTS (plain old telephone service). In one embodiment, the processor 310 may control the communication interface to obtain information required for the technology according to the present disclosure from the server. The information obtained from the server may be stored in the memory 320. In one embodiment, the information obtained from the server may include information about the substrate and even the object body, information about the reference plane R, and association information to be described later.

[0069] Figures 4 to 8 It is a diagram for explaining the principle of the aforementioned coaxial deflection measurement method. Figure 4 It is a diagram showing the process in which the pattern light 232 according to an embodiment of the present disclosure irradiates an object. As described above, for each of one or more pattern lights 232, the optical paths of the one or more pattern lights 232 can be changed so that the light corresponding to each phase in a corresponding phase range (e.g., 0 to 7×π / 4) can be scattered and reach a partial area A on the upper surface of the object. Hereinafter, the description will be made based on one pattern light 232.

[0070] As described above, the pattern light source 230 can irradiate a pattern light 232 corresponding to a phase range. The optical paths 410, 420, and 430 of the light corresponding to any three phases within the aforementioned phase range are shown. Each light can be irradiated onto a partial area A on the upper surface of the object through one or more lenses 250, apertures 252, and / or beam splitters 240. As described above, the light corresponding to one phase can be scattered and irradiated onto the entire partial area A. That is, the light 410 corresponding to one phase can be irradiated in such a way as to reach each point on the surface corresponding to the partial area A. The light (420, 430, etc.) corresponding to different phases of the pattern light 232 can also be irradiated onto the object in the same way. Therefore, at a point in the partial area A on the object, the light corresponding to the phase within the aforementioned phase range can be irradiated respectively. For example, in the illustrated embodiment, all of the lights 410, 420, and 430 reach each point in the partial area A on the object. Therefore, in the entire partial area A of the object, the light having the average light amount of the pattern light 232 corresponding to the above phase range can be irradiated.

[0071] The reflected light 234 generated by the reflection of the pattern light 232 from the partial area A can be input to the image sensor 220 through the aperture 262. As described above, when the upper surface of the object is inclined with respect to the reference plane R, only a part of the reflected light 234 can pass through the aperture 262. A part of the reflected light passing through the aperture 262 can correspond to a part of the phase range in the phase range of the pattern light 232 irradiated from the pattern light source 230. The average light amount of the light corresponding to this part of the phase range can finally be captured by the image sensor 220.

[0072] In the illustrated embodiment 440, the angle of the upper surface of the object with respect to the reference plane R can be 0 degrees. At this time, most of the light reflected from a point in the partial area A can pass through the aperture 262 and be captured by the image sensor 220. That is, in the embodiment 440, the light corresponding to the phase intervals identified by A and A' can be reflected from the partial area A, pass through the aperture 262, and be input to the image sensor 220.

[0073] In the illustrated Example 450, the object body can be inclined at an angle of 3 degrees with respect to the reference plane R. At this time, only a part of the light reflected from a point in a part of the region A can pass through the aperture 262 and be captured by the image sensor 220. Specifically, if the phase range of the patterned light 232 passing through the aperture 252 is the interval represented by the straight line 451, the phase range of the reflected light 234 passing through the aperture 262 can correspond to the interval represented by the straight line 452. Therefore, the light having an optical path that entirely passes through the aperture 252 and the aperture 262 can be the light corresponding to the phase intervals identified by A and A' in the illustration. At this time, the amount of light of the reflected light 234 obtained by the image sensor 220 can be the average amount of light of the light corresponding to the phase intervals identified by A and A'.

[0074] In the illustrated Example 460, the object body can be inclined at an angle of 5 degrees with respect to the reference plane R. At this time, most of the light reflected from a point in a part of the region A will not be able to pass through the aperture 262. Therefore, the image sensor 220 will not be able to capture the reflected light 234. The angles of the upper surface of the object body in the foregoing Examples 440, 450, and 460 can be exemplary values selected for illustration.

[0075] That is, according to the angle of the upper surface of the object body, the amount of light that entirely passes through the aperture 252 and the aperture 262 and is input to the image sensor 220 can vary. The apparatus 100 can determine (derive) the angle of the upper surface of the object body using the varying amount of light of the reflected light 234.

[0076] Figure 5 It is a diagram showing the process in which the reflected light 234 passes through the aperture 262 according to an embodiment of the present disclosure. The illustrated example, as shown in the foregoing Example 450, can show a situation where the upper surface of the object body is inclined at a predetermined angle with respect to the reference plane R.

[0077] Similarly, the patterned light 232 having a single phase range can be irradiated from the pattern light source 230 and diffusely irradiated onto a part of the region A on the upper surface of the object body. Due to the inclination of the upper surface of the object body, only a part of the reflected light 234 can pass through the aperture 262 and be input to the image sensor 220. Among the reflected lights of the lights 410, 420, 430, etc. incident on a part of the region A, only the reflected light whose optical path travels within the range indicated by the thick solid line can pass through the aperture 262 and be input to the image sensor 220.

[0078] A part of the reflected light input to the image sensor 220 can be the light reflected from a part of the region A on the object body that corresponds to a part of the phase range of the patterned light 232. Ultimately, the amount of light of the reflected light 234 obtained by the image sensor 220 can be the average amount of light of the light corresponding to the foregoing part of the range of the patterned light 232.

[0079] Figure 6 FIG. is a diagram showing a process in which reflected light 234 passes through aperture 262 according to an embodiment of the present disclosure. In the illustrated embodiment, a part A1 of a part A in the upper surface of the object body may not be inclined with respect to the reference plane R, and the other part A2 is in an inclined state.

[0080] As shown in the foregoing embodiment 440, the light reflected from the non-inclined location A1 can be input to the corresponding location (thick solid line) of the image sensor 220 through the aperture 262. The corresponding location of the image sensor 220 can receive the average light amount of the input light corresponding to the foregoing phase range irradiated from the pattern light source 230. As shown in the foregoing embodiment 450, only a part of the light reflected from the inclined location A2 can be input to the image sensor 220 through the aperture 262 (thick dashed line). The corresponding location of the image sensor 220 can receive the average light amount of the input light corresponding to only a part of the foregoing phase range irradiated from the pattern light source 230. The inclination value at each location in a part of the region A of the object body can be obtained by using the average light amount value input to each location (pixel) of the image sensor 220, respectively.

[0081] Figure 7 FIG. is a diagram showing the appearance of the pattern light 232 irradiated from the pattern light source 230 in the aperture 252 according to an embodiment of the present disclosure. The pattern of one pattern light 232 may have a period. When the phase corresponding to one period is referred to as 2π, during the interval from 0 to π / 2, the pattern of the pattern light gradually brightens, during the interval from π / 2 to 3×π / 2, the pattern of the pattern light gradually darkens, and during the interval from 3×π / 2 to 2π, the pattern of the pattern light gradually brightens again. As described above, the pattern light source 230 can irradiate the pattern light 232 having a phase range. This phase range can be appropriately set as needed. In one embodiment, the phase range can be set so as not to be one period or a multiple of one period of the pattern. That is, the phase range can be set to a range that is not a phase range corresponding to 0, 2π, 4π,..., 2nπ. This is because, in a part of the region A, light corresponding to the average light amount of the pattern light 232 is irradiated, and thus when using a pattern light having a range corresponding to one period or a multiple of one period, the light corresponding to each phase of the pattern light cancels each other out. In addition, in one embodiment, the phase range can be set to be greater than the phase range corresponding to half a period of the pattern light and less than the phase range corresponding to one period of the pattern light. In addition, in one embodiment, the phase range can be set to be greater than the phase (N is a natural number) corresponding to (N + 1 / 2) periods of the pattern light and less than the phase range corresponding to (N + 1) periods of the pattern light. Such a phase range can be set when it is necessary to increase the entire light amount of the pattern light itself in order to facilitate the measurement of the reflected light.

[0082] One or more pattern lights 232 can be generated by respectively phase-shifting a pattern light corresponding to the aforementioned phase range by an integer multiple of a preset phase interval (e.g., π / 2). In one embodiment, the aforementioned phase interval can be set to a value greater than 0 and less than π. One or more pattern lights 232 can be respectively referred to as the 0th bucket, the first bucket, the second bucket, and the third bucket, that is, can be referred to as 4 buckets. The pattern lights 232 generated by phase-shifting can also respectively have the aforementioned phase range α. That is, for example, the pattern lights 232 can respectively have a phase range of α starting from 0, a phase range of π / 2 + α starting from π / 2, a phase range of π + α starting from π, and a phase range of 3×π / 2 + α starting from 3×π / 2. The pattern lights 232 of each bucket can be shown as the pattern 710 in the figure in the aperture 252. In one embodiment, the area of the pattern light passing through the aperture 252 can be circular 720. Thus, among the pattern lights in the quadrilateral form in the pattern light source 230, the light corresponding to this circular area can be irradiated onto the object. In one embodiment, the apparatus 100 can also determine the angle of the upper surface of the object using only one pattern light 232. However, by using multiple pattern lights to measure the angle of the upper surface of the object, various measurement errors such as errors caused by the material of the upper surface of the object can be reduced.

[0083] The total light quantity value of the pattern light 232 in the pattern light source 230 can be calculated as shown in the following mathematical formula.

[0084]

Mathematical formula 1

[0085]

[0086] I o can be a constant for determining the amplitude of the sine wave graph of the pattern of the pattern light 232, and I o can be a constant for determining the offset of the sine wave graph of the pattern. Integrating the pattern light 232 in the pattern light source 230 within the phase range (α to β) can derive the total light quantity value I LCoS .

[0087] Figure 8 is a diagram showing associated information according to an embodiment of the present disclosure. As described above, the apparatus 100 can determine the angle of the upper surface of the object with respect to the reference plane R based on the light quantity value of each of one or more reflected lights 234. The apparatus 100 can derive the phase value of the reflected light 234 from the light quantity value of the reflected light 234, compare the derived phase value with the associated information, and determine the angle of the upper surface of the object.

[0088] In this embodiment, the processor 310 may derive the phase value of each of one or more reflected lights 234 from the light quantity value of each of the one or more reflected lights 234. When a pattern light 232 is reflected from a partial area A of the object body and captured by the image sensor 220, the light quantity value I of the reflected light n can be expressed as shown in the following mathematical formula.

[0089]

Mathematical formula 2

[0090]

[0091] A and B may respectively correspond to the aforementioned I o and I o respectively. φ(x, y) may be the phase value of the reflected light reflected from a point (x, y) in the partial area A. α(t) may represent the aforementioned phase shift amount of the pattern light 232. For example, the light quantity values I1, I2, I3, and I4 of the reflected lights generated when a plurality of pattern lights 232 (i.e., 4 buckets) generated by phase-shifting at a phase interval of π / 2 are respectively reflected from a partial area A can be expressed as shown in the following mathematical formula 3. Mathematical formula 3 can be obtained by substituting each phase shift amount α(t) into mathematical formula 2 and arranging it.

[0092]

Mathematical formula 3

[0093] α(t) = 0

[0094]

[0095] α(t) = π

[0096]

[0097] As described above, the image sensor 220 may capture light having an average light quantity of light corresponding to a partial range in the phase range of the pattern light 232. Among them, the light corresponding to the partial range may vary depending on the angle of the upper surface of the object body and / or which bucket of the pattern light 232 is irradiated. That is, even for an object body tilted at the same angle, depending on how much the pattern light 232 is phase-shifted, the composition of the light corresponding to the aforementioned partial range becomes different. The light quantity of the reflected light for each of those buckets may be the aforementioned I1, I2, I3, and I4.

[0098] The light quantity values I1, I2, I3, and I4 of the respective reflected lights are values that can be measured by the image sensor 220. A, B, and φ can be derived using four equations for the aforementioned I1, I2, I3, and I4. Since there are three unknowns, at least three or more equations are required. Therefore, the measurement of three or more pattern lights 232 that are different from each other should be performed at least three times. Therefore, if the aforementioned mathematical formula 3 is arranged, the phase value φ of the reflected light can be derived using the following mathematical formula 4.

[0099]

Mathematical formula 4

[0100]

[0101] Through this process, the phase value of one or more reflected lights 234 can be derived from the light quantity value of one or more reflected lights 234. This derivation process can be executed by the processor 310.

[0102] In one embodiment, the memory 320 of the device 100 may further store association information. The association information may indicate the relationship between the angle of the upper surface of the object with respect to the reference plane R and the phase value of the reflected light 234. The numerical values shown in the illustrated association information are exemplary values, and the values of the association information may vary according to the embodiment. The relationship between the phase value shown in the association information and the tilt angle of the object can be databaseized through measurement and calculation and stored in the memory 220.

[0103] As shown in the figure, the association information may include the angle of inclination of the object, the light quantity values I1, I2, I3, and I4 of the reflected lights of the respective buckets measured at the corresponding angles, and information on the phase value of the reflected light derived from the measured light quantity values. For example, when the tilt angle of the object is 1 degree, the light quantity values I1, I2, I3, and I4 of the reflected lights of the respective buckets measured may be 239.50, 145.67, 132.41, and 226.34, respectively. The phase value derived from this light quantity value may also be 37.02. In one embodiment, the association information may also include the values of A and B in the aforementioned mathematical formula 3.

[0104] The processor 310 may determine the angle of the upper surface of the object with respect to the reference plane R based on the phase value of the reflected light 234 and the association information. The processor 310 may use the determined angle of the upper surface to correct the upper surface represented by the three-dimensional image once and determine the refined (final) three-dimensional image.

[0105] Figure 9FIG. is a diagram showing the direction of the pattern of the pattern lights 212 and 232 according to an embodiment of the present disclosure. In one embodiment, the pattern light sources 210 and 230 may generate the pattern lights 212 and 232 having a pattern on a quadrilateral surface. When an axis corresponding to one side of the quadrilateral is called the w-axis and an axis corresponding to the other side and perpendicular to the w-axis is called the v-axis, the pattern of the pattern lights 212 and 232 may be formed in the w-axis direction or the v-axis direction. In one embodiment, one or more of the pattern lights 212 and 232 may each have a pattern in the w-axis direction or the v-axis direction perpendicular to the w-axis. In one embodiment, the pattern direction of the pattern lights 212 and 232 may be set differently for each bucket. In one embodiment, by using a plurality of patterns formed in each axis direction, it is possible to reduce the error in determining the three-dimensional image of the object body.

[0106] Figure 10 FIG. is a diagram showing an inspection process of the apparatus 100 using illumination light according to an embodiment of the present disclosure. Some of the components of the apparatus 100 are arbitrarily omitted. In one embodiment, the apparatus 100 may also perform an inspection using illumination light. In addition to the inspection result using the aforementioned pattern light, the apparatus 100 may additionally reflect the inspection result using illumination light and determine the primary three-dimensional image of the object body.

[0107] In the present embodiment, the apparatus 100 may further include one or more illumination light sources 1010. The illumination light sources 1010 may belong to the illumination light irradiation unit 140. The illumination light sources 1010 may each irradiate illumination light 1020 toward an object body located on the reference plane R. In one embodiment, one illumination light source 1010 may be embodied in a form including a plurality of illumination light sources (e.g., LED illumination) arranged at predetermined intervals on a circumference. The circumference may be arranged parallel to the reference plane R. In one embodiment, one illumination light source 1010 may also be embodied as one illumination light source having a circular shape. The illumination light sources 1010 may each be arranged above the reference plane R to the object body. The illumination light sources 1010 may each be arranged to irradiate illumination light toward the object body along an optical axis inclined by one or more angles (e.g., 17 degrees, 40 degrees, 58 degrees, 70 degrees, etc.) with respect to the reference plane R. In one embodiment, four illumination light sources 1010 may be used as shown. In the present disclosure, the illumination light may be light according to one or more wavelengths. In one embodiment, the illumination light may be red light, green light, or blue light. The illumination light sources 1010 may each be embodied as an RGB light source and may include a red light source, a green light source, and / or a blue light source. In one embodiment, the illumination light sources 1010 may irradiate at least two light sources simultaneously, and may also irradiate red, green, and blue light simultaneously to irradiate white light.

[0108] The illumination light 1020 can be reflected from the object body. The image sensor 220 can capture the light reflected by the illumination light 1020 (hereinafter referred to as the reflected light 1030). At this time, the amount of light captured by the image sensor 220 varies depending on the angle at which the illumination light 1020 irradiates the object body and the angle at which the reflected light 1030 is reflected from the object body. The image of the object body can be determined based on the light quantity values that change before and after reflection.

[0109] That is, the processor 310 can obtain the light quantity change of each of the one or more reflected lights 1030 from the light quantity change of each of the illumination lights 1020 according to one or more wavelengths. The processor 310 can determine the aforementioned first three-dimensional image of the object body based on the corresponding light quantity change. In one embodiment, the processor 310 can also utilize the inspection results of the pattern light and the inspection results of the illumination light to determine the first three-dimensional image of the object body. At this time, the processor 310 can determine the first three-dimensional image of the object body based on the phase change of each of the one or more pattern lights 212 and the light quantity change of each of the one or more reflected lights 1030 from the light quantity change of each of the illumination lights 1020 according to one or more wavelengths. Then, as described above, the processor 310 corrects the corresponding first three-dimensional image using the determined angle of the upper surface, thereby determining the second (final) three-dimensional image of the object body. In one embodiment, if four illumination light sources 1010 are used and each illumination light source 1010 sequentially irradiates red light, green light, and blue light, a total of 12 (4×3) illumination lights can irradiate the object body. Accordingly, a total of 12 reflected lights can be captured by the image sensor 220 and can be used to determine the first three-dimensional image of the object body.

[0110] Figure 11 FIG. is a diagram showing a process of additionally irradiating white light 1110 by the pattern light source 230 according to an embodiment of the present disclosure. Some of the components of the aforementioned device 100 are arbitrarily omitted. In one embodiment, the pattern light source 230 of the device 100 can also irradiate white light 1110, and the information on its reflected light 1120 can be utilized to determine a more accurate first three-dimensional image of the object body.

[0111] In this embodiment, the pattern light source 230 can irradiate at least one monochromatic light such as red (Red), green (Green), blue (Blue), or white (white) light. For example, it can irradiate white light 1120. By controlling the element that generates the pattern in the pattern light source 230, unpatterned white illumination light can be irradiated from the pattern light source 230. The white light 1120 can travel along an optical path similar to that of the aforementioned pattern light 232. The beam splitter 240 and one or more lenses 250 can change the optical path of the white light 1110 so that the white light 1110 reaches the upper surface of the object. For example, the white light 1110 can travel through the lens 250, the aperture 252, and other optical elements to reach the beam splitter 240. The beam splitter 240 can change the optical path of the white light 1110 so that the white light 1110 faces the upper surface of the object.

[0112] The white light 1110 can be reflected from the upper surface of the object. The amount of light of the white light 1110 before and after reflection can change according to the shape of the object. That is, the amount of light of the white light 1110 and the amount of light of the reflected light 1120 can be different. The reflected light 1120 can travel toward the beam splitter 240, and the beam splitter 240 can pass the reflected light 1120 to the image sensor 220. The image sensor 220 can capture the reflected light 1120.

[0113] The processor 310 can determine the shape of the object based on the light amount values that change before and after reflection. That is, the processor 310 can obtain the change in the amount of light of the reflected light 1120 from the amount of light of the white light 1110, and determine the primary three-dimensional shape of the object based on the corresponding change in the amount of light. In one embodiment, the processor 310 can also determine the primary three-dimensional shape of the object by fully utilizing the inspection results using the pattern light and the inspection results using the white light. At this time, the processor 310 can determine the primary three-dimensional shape of the object based on the phase change of each of the one or more pattern lights 212 for each of the one or more reflected lights 214 and the change in the amount of light of the reflected light 1120 from the amount of light of the white light 1110. Then, as described above, the processor 310 can correct the corresponding primary three-dimensional shape using the determined angle of the upper surface, thereby determining the secondary (final) three-dimensional shape of the object.

[0114] In one embodiment, the apparatus 100 may perform an inspection using the coaxial deflection measurement method to determine the three-dimensional image twice only when a preset criterion is met; otherwise, it may only determine the three-dimensional image once. This is to perform an additional inspection of the upper surface of the object only when it is determined to be necessary, thereby shortening the time required for the inspection process. In one embodiment, when the reflectivity of the upper surface of the object is equal to or higher than a preset reference reflectivity, the apparatus 100 may additionally perform an inspection using the coaxial deflection measurement method for the object. When the upper surface of the object is a mirror surface or becomes mirror-finished after the rearrangement process, it may be difficult to accurately measure the shape of the upper surface of the object only by the inspection using illumination light or pattern light. Therefore, when it is determined that the upper surface of the object is a mirror surface (i.e., when the reflectivity is equal to or higher than the preset reference reflectivity), the apparatus 100 may additionally perform an inspection using the coaxial deflection measurement method.

[0115] Specifically, the processor 310 may obtain the light quantity information of the white light 1110 from the pattern light source 230 and obtain the light quantity information of the reflected light 1120 from the image sensor 220. The processor 310 may derive the reflectivity of the upper surface of the object based on the change in the light quantity of the white light 1110 of the reflected light 1120. When the derived reflectivity of the upper surface is equal to or higher than the preset reference reflectivity, the processor 310 may control the pattern light source 230 to sequentially irradiate the aforementioned one or more pattern lights 232. In one embodiment, the information on the preset reference reflectivity may be stored in the memory 320.

[0116] In one embodiment, the apparatus 100 may first perform an inspection using the pattern light and then perform an inspection using the deflection measurement method. That is, the pattern light 212 may be first irradiated, and its reflected light 214 may be captured, and then the pattern light 232 may be irradiated, and its reflected light 234 may be captured. In one embodiment, the inspection using the illumination light may be performed before the inspection using the deflection measurement method.

[0117] As one embodiment, the apparatus 100 may use the pattern light to photograph the reference surface R, the object, or the reference surface R and the object to determine the three-dimensional image, and then use the deflection measurement method to derive the angle of the upper surface of the object.

[0118] That is, in the case where the upper surface of the object is a mirror surface, although the reference surface R may be confirmed using the pattern light, it may be difficult to restore the accurate three-dimensional image of the object. Therefore, based on the angle information of the upper surface of the object derived using the deflection measurement method, the upper surface information of the object and the three-dimensional image information of the object may be accurately derived compared to the reference surface R.

[0119] Figure 12FIG. 0 is a diagram showing an apparatus 1210 according to an embodiment of the present disclosure. The apparatus 1210 is an apparatus corresponding to the foregoing DFM unit 120, and can determine the angle of the upper surface of an object located on a reference plane R. At least one component in the apparatus 1210 can be embodied as a detachable apparatus and coupled to the apparatus 1220. When the apparatus 1210 is not coupled, a coaxial 2D light source can be attached at the corresponding position where it was previously coupled. The coaxial 2D light source can irradiate at least one monochromatic light selected from red light, green light, blue light, and white light. The coaxial 2D light source can be embodied by an optical element such as an LED. By irradiating 2D monochromatic illumination with such a detachable apparatus 1210 or the coaxial 2D light source, more accurate three-dimensional image restoration can be performed according to the object.

[0120] The apparatus 1220 can be an apparatus including the foregoing pattern light irradiation unit 110, measurement unit 130, and / or illumination light irradiation unit 140. The apparatus 1220 can determine the foregoing first three-dimensional image of the object on the reference plane R. If the apparatus 1210 is coupled to the apparatus 1220, it can have a configuration similar to that of the foregoing apparatus 100. The coupled apparatus 1210 and apparatus 1220 can determine the foregoing second (final) three-dimensional image of the object in the same manner as the apparatus 100. That is, the apparatus 1220 can perform an inspection using pattern light and / or an inspection using illumination light to determine the first three-dimensional image of the object, and the apparatus 1210 can determine the angle of the upper surface of the object. The angle of the upper surface can be used to correct the first three-dimensional image of the object to determine the second three-dimensional image. According to an embodiment, the correction and the process of determining the second three-dimensional image can be performed by the apparatus 1210 or the apparatus 1220.

[0121] Specifically, the pattern light source 1230 of the apparatus 1210 can sequentially irradiate one or more pattern lights 1232. The pattern light source 1230 and the pattern light 1232 can respectively correspond to the foregoing pattern light source 230 and pattern light 232. Similar to the pattern light 232, the pattern lights 1232 can each have the same one phase range. In addition, the pattern lights 1232 can each be generated by phase-shifting a pattern light having a pattern in the w-axis direction or v-axis direction by an integer multiple of a preset phase interval.

[0122] The beam splitter 1240 and one or more lenses 1250 can change the optical path of one or more pattern lights 1232. The beam splitter 1240 and one or more lenses 1250 can respectively correspond to the aforementioned beam splitter 240 and one or more lenses 250. Similar to the aforementioned beam splitter 240 and one or more lenses 250, the beam splitter 1240 and one or more lenses 1250 can change the optical path of one or more pattern lights 1232 so that the light corresponding to each phase of the aforementioned phase range is dispersed and reaches a partial area A on the upper surface of the object. In one embodiment, other necessary optical elements (e.g., mirrors) can also be used for the corresponding optical path change. In one embodiment, the pattern light 1232 can pass through the aperture 1252 before being input to the beam splitter 1240.

[0123] One or more pattern lights 1232 can be reflected from a partial area A of the object. The light reflected by the pattern light 1232 (hereinafter referred to as the reflected light 1234) can be input to the image sensor of the device 1220 via the beam splitter 1240, the aperture 1262, other lenses 1260, etc. This image sensor can correspond to the aforementioned image sensor 220.

[0124] The device 1210 can obtain the information 1270 about one or more reflected lights 1234 from the device 1220. The device 1210 can determine the angle of the upper surface of the object with respect to the reference plane R based on the information 1270. The process of determining the angle of the upper surface can be the same as the process described in the aforementioned device 100. In one embodiment, the information 1270 can include information indicating the light quantity values of each of the one or more reflected lights 1234.

[0125] As described above, the device 1220 is a device including the aforementioned pattern light irradiation unit 110, measurement unit 130, and / or illumination light irradiation unit 140, and can perform inspections using pattern light and / or illumination light. Specifically, the device 1220 can include one or more pattern light sources (corresponding to the pattern light source 210), an image sensor (corresponding to the image sensor 220), and / or a processor (corresponding to the processor 310). The pattern light source can irradiate one or more pattern lights (corresponding to the pattern light 212) onto the object. The image sensor can capture the reflected light (corresponding to the reflected light 214) of the pattern light (corresponding to the pattern light 212). Additionally, the image sensor can also capture the reflected light (corresponding to the reflected light 234) of the pattern light 1232. The processor can determine the primary three-dimensional image of the object based on the captured reflected light and transmit the information indicating the determined primary three-dimensional image to the device 1210.

[0126] Figure 13FIG. is a block diagram showing a device 1210 according to an embodiment of the present disclosure. In one embodiment, the device 1210 may include a pattern light source 1230, a beam splitter 1240, one or more lenses 1250, a communication interface 1330, one or more processors 1310, and / or one or more memories 1320. In one embodiment, at least one of these components of the device 1210 may be omitted, or other components may be added to the device 1210. In one embodiment, some components may be embodied additionally or alternatively combined, or embodied as a single or multiple individuals. In one embodiment, at least some of the components inside and outside the inspection device 1210 may be connected to each other via a bus, GPIO (general purpose input / output), SPI (serial peripheral interface), or MIPI (mobile industry processor interface) to transmit and receive data and / or signals.

[0127] The pattern light source 1230, the beam splitter 1240, and the one or more lenses 1250 may correspond to the aforementioned pattern light source 230, beam splitter 240, and one or more lenses 250, and may perform the same or similar operations to perform inspection according to the deflection measurement method.

[0128] The communication interface 1330 may be embodied in a manner similar to the communication interface of the aforementioned device 100. The communication interface 1330 may be controlled by the processor 1310 to communicate with the device 1220. For example, the communication interface 1330 may obtain information 1270 about one or more reflected lights 1234 from the device 120.

[0129] The processor 1310 may be embodied in a manner similar to the processor 310 of the aforementioned device 100. The processor 1310 may control the communication interface 1330, obtain information 1270 about one or more reflected lights 1234, and determine the angle of the upper surface of the object with respect to the reference plane R based on the corresponding information 1270.

[0130] In one embodiment, the processor 1310 of the device 1210 may derive the respective phase values of one or more reflected lights 1234 from the respective light quantity values of the one or more reflected lights 1234. The processor 1310 may determine the angle of the upper surface of the object body with respect to the reference plane R based on the derived phase values. This process may correspond to the process in which the aforementioned processor 310 derives the phase value from the light quantity value of the reflected light 234 and determines the angle of the upper surface from the phase value. In one embodiment, the memory 1320 may store the association information in the same manner as the memory 320, and the processor 1310 may determine the angle of the upper surface based on the respective phase values of the reflected lights 1234 and the association information.

[0131] In one embodiment, the device 1210 may transmit the information indicating the derived angle of the upper surface to the device 1220 so that the device 1220 determines the three-dimensional image twice. Specifically, the processor 1310 controls the communication interface 1330 to transmit the information indicating the derived angle of the upper surface to the device 1220. As described above, the device 1220 may determine the first three-dimensional image of the object body by using the inspection of the pattern light and / or the illumination light. The corresponding information indicating the angle of the upper surface may be used to correct (modify) the upper surface of the object body represented by the first three-dimensional image by the device 1220 to determine the second three-dimensional image.

[0132] In one embodiment, the device 1210 may also obtain the information indicating the first three-dimensional image of the object body from the device 1220 and directly determine the second three-dimensional image by using it. Specifically, the processor 1310 may control the communication interface 1330 to obtain the information of the first three-dimensional image of the object body determined by the device 1220. The processor 1310 may correct (modify) the upper surface of the object body represented by the first three-dimensional image based on the determined angle of the upper surface to determine the second three-dimensional image.

[0133] In one embodiment, the pattern light source 1230 may also irradiate white light, and the beam splitter 1240 and one or more lenses 1250 may change the optical path of the white light so that the white light reaches the upper surface of the object body. This may correspond to the case where the pattern light source 230 of the aforementioned device 100 irradiates the white light 1110. As described above, the white light may be reflected from the upper surface of the object body. The device 1220 may capture the reflected light and determine the first three-dimensional image of the object body based on the change in the light quantity of the white light from the reflected light.

[0134] In one embodiment, the processor 1310 may control the communication interface 1330 to obtain information indicating the reflectance of the upper surface of the object body from the device 1220. When the reflectance of the upper surface is equal to or greater than a preset reference reflectance, the processor 1310 may control the pattern light source 1230 to sequentially irradiate one or more pattern lights 1232. This may correspond to the case where the processor 310 of the aforementioned device 100 controls the pattern light source 230 based on the reference reflectance.

[0135] Figures 14 to 15 FIG. is a diagram illustrating an embodiment of a method that may be executed by the devices 100 and 1210 according to the present disclosure. The method according to the present disclosure may be a method embodied in a computer. In the illustrated flowchart, the steps of the method or algorithm according to the present disclosure are sequentially described. However, in addition to being executed sequentially, the steps may also be executed in any order that can be arbitrarily combined according to the present disclosure. The description of this flowchart does not exclude the case where no change or modification is made to the method or algorithm, and does not mean that any step is essential or preferred. In one embodiment, at least some of the steps may be executed in parallel, repeatedly, or heuristically. In one embodiment, at least some of the steps may be omitted, or other steps may be added.

[0136] Figure 14 FIG. is a diagram illustrating an embodiment of a method 1700 for determining a three-dimensional image of an object body that may be executed by the device 100 according to the present disclosure. The device 100 according to the present disclosure may execute the method 1700 in determining a first three-dimensional image (e.g., a secondary three-dimensional image) of an object body located on a reference plane. The method 1700 according to an embodiment of the present disclosure may include: a step S1710 of irradiating one or more first pattern lights onto the object body; a step S1720 of capturing one or more first reflected lights; a step S1730 of sequentially irradiating one or more second pattern lights having a single phase range; a step S1740 of changing the optical path of the second pattern light so that light corresponding to each phase of the phase range is diffusely incident on a partial area; a step S1750 of capturing one or more second reflected lights; and / or a step S1760 of determining the first three-dimensional image of the object body based on the one or more first reflected lights and the one or more second reflected lights.

[0137] In step S1710, one or more first light sources (e.g., the pattern light source 210) of the device 100 may irradiate one or more first pattern lights (e.g., the pattern light 212) onto the object body. In step S1720, the image sensor 220 may capture one or more first reflected lights (e.g., the reflected light 214) generated by the reflection of the one or more first pattern lights (e.g., the pattern light 212) by the object body.

[0138] In step S1730, a second light source (e.g., pattern light source 230) may sequentially irradiate one or more second pattern lights (e.g., pattern light 232) having a single phase range. In step S1740, the beam splitter 240 and one or more lenses 250 may change the optical paths of the one or more second pattern lights (e.g., pattern light 232) such that light corresponding to each phase of the phase range dispersedly reaches a partial area A on the upper surface of the object body. In step S1750, the image sensor 220 may capture one or more second reflected lights (e.g., reflected light 234) generated by reflection of the one or more second pattern lights (e.g., pattern light 232) from the partial area A.

[0139] In step S1760, the processor 310 may determine a first three-dimensional image (e.g., second three-dimensional image) of the object body based on the one or more first reflected lights (e.g., reflected light 214) and the one or more second reflected lights (e.g., reflected light 234).

[0140] In one embodiment, step S1760 of determining the first three-dimensional image (e.g., second three-dimensional image) may include: the step in which the processor 310 determines a second three-dimensional image (e.g., first three-dimensional image) of the object body based on respective phase changes of the one or more first reflected lights (e.g., reflected light 214) of the one or more first pattern lights (e.g., pattern light 212). Additionally, step S1760 may include: the step in which the processor 310 derives phase values of the one or more second reflected lights (e.g., reflected light 234) from respective light quantity values of the one or more second reflected lights (e.g., reflected light 234). Additionally, step S1760 may include: the step in which the processor 310 determines an angle of the upper surface with respect to the reference plane R based on the phase values. Additionally, step S1760 may include: the step in which the processor 310 corrects the upper surface of the object body represented by the second three-dimensional image (e.g., first three-dimensional image) based on the angle of the upper surface and determines the first three-dimensional image (e.g., second three-dimensional image) of the object body.

[0141] In one embodiment, the step of determining the angle of the upper surface may include: the step in which the processor 310 determines an angle of the upper surface with respect to the reference plane R based on the corresponding phase values and associated information.

[0142] In one embodiment, the apparatus 100 may further include more than one third light source (e.g., illumination light source 1010). Additionally, the step of determining the second three-dimensional image of the object body (e.g., the first three-dimensional image) may include: the processor 310 determining the second three-dimensional image of the object body (e.g., the first three-dimensional image) based on the respective phase changes of more than one first reflected light (e.g., reflected light 214) caused by more than one first pattern light (e.g., pattern light 212) and the respective light quantity changes of more than one third reflected light (e.g., reflected light 1030) caused by illumination light 1020 according to more than one wavelength.

[0143] In one embodiment, the method 1700 may further include: the step of a second light source (e.g., pattern light source 230) irradiating white light 1110; the step of the beam splitter 240 and more than one lens 250 changing the optical path of the white light 1110 so that the white light 1110 reaches the upper surface; and / or the step of the image sensor 220 capturing a fourth reflected light (e.g., reflected light 1120) generated by the reflection of the white light 1110 from the upper surface.

[0144] In one embodiment, the step of determining the second three-dimensional image (e.g., the first three-dimensional image) may include: the processor 310 determining the second three-dimensional image of the object body (e.g., the first three-dimensional image) based on the respective phase changes of more than one first reflected light (e.g., reflected light 214) caused by more than one first pattern light (e.g., pattern light 212) and the light quantity change of the fourth reflected light (e.g., reflected light 1120) caused by the white light 1110.

[0145] In one embodiment, the method 1700 may further include: the step of the processor 310 deriving the reflectivity of the upper surface based on the light quantity change of the fourth reflected light (e.g., reflected light 1120) caused by the white light 1110; and / or when the reflectivity of the upper surface is equal to or greater than a preset reference reflectivity, the step of controlling the second light source (e.g., pattern light source 230) to sequentially irradiate more than one second pattern light (e.g., pattern light 232).

[0146] Figure 15 FIG. is a diagram showing an embodiment of a method 1800 for determining the angle of the upper surface of an object body that can be performed by the apparatus 1210 according to the present disclosure. The method 1800 according to an embodiment of the present disclosure may include: step S1810 of sequentially irradiating more than one first pattern light; step S1820 of changing the optical path of the first pattern light so that light corresponding to each phase of the phase range is diffusely incident on a partial area; step S1830 of obtaining first information about more than one first reflected light from a first device; and / or step S1840 of determining the angle of the upper surface with respect to a reference plane based on the first information.

[0147] In step S1810, a first light source (e.g., pattern light source 1230) can sequentially irradiate one or more first pattern lights (e.g., pattern light 1232) having a single phase range. In step S1820, a beam splitter (e.g., beam splitter 1240) and one or more lenses (e.g., lens 1250) can change the optical path of one or more first pattern lights (e.g., pattern light 1232) so that light corresponding to each phase of the phase range is dispersed and reaches a partial region A of the upper surface.

[0148] In step S1830, a first processor (e.g., processor 1310) can obtain first information (e.g., information 1270) of one or more first reflected lights (e.g., reflected light 1234) generated by reflection of one or more first pattern lights (e.g., pattern light 1232) from a partial region A from a first device (e.g., device 1220).

[0149] In step S1840, a first processor (e.g., processor 1310) can determine the angle of the upper surface with respect to the reference plane R based on the first information (e.g., information 1270).

[0150] In one embodiment, the step of determining the angle of the upper surface may include: a step in which a first processor (e.g., processor 1310) derives the phase value of each of one or more first reflected lights (e.g., reflected light 1234) from the light quantity value of each of the one or more first reflected lights (e.g., reflected light 1234); and / or a step of determining the angle of the upper surface with respect to the reference plane R based on the derived phase value.

[0151] In one embodiment, method 1800 may further include: a step in which a first processor (e.g., processor 1310) transmits second information indicating the angle of the upper surface to a first device (e.g., device 1220). The second information can be used to correct the upper surface of the object represented by the first three-dimensional image (e.g., primary three-dimensional image) of the first device (e.g., device 1220) to determine a second three-dimensional image (e.g., secondary three-dimensional image) of the object.

[0152] In one embodiment, method 1800 may further include: a step in which a first processor (e.g., processor 1310) obtains third information indicating a first three-dimensional image (e.g., primary three-dimensional image) of an object from a first device (e.g., device 1220); and / or a step of correcting the upper surface of the object represented by the first three-dimensional image (e.g., primary three-dimensional image) based on the angle of the upper surface to determine a second three-dimensional image (e.g., secondary three-dimensional image) of the object.

[0153] In one embodiment, method 1800 may further include: a step of the first light source (e.g., pattern light source 1230) also irradiating white light; and / or a step of a beam splitter (e.g., beam splitter 1240) and one or more lenses (e.g., lens 1250) changing the optical path of the white light so that the white light reaches the upper surface.

[0154] In one embodiment, method 1800 may further include: a step of a first processor (e.g., processor 1310) controlling the communication interface 1330 to obtain fourth information indicating the reflectivity of the upper surface from a first device (e.g., device 1220); and / or a step of controlling the first light source (e.g., pattern light source 1230) to sequentially irradiate one or more first pattern lights (e.g., pattern light 1232) when the reflectivity of the upper surface is equal to or greater than a preset reference reflectivity.

[0155] According to various embodiments of the present disclosure, the inclination of the upper surface of an object (e.g., a component) can be effectively measured using the amount of light of the reflected light from the object, thereby improving the determination of the three-dimensional image of the object. Whether the entire substrate mounting process is appropriately performed can be checked through the three-dimensional image of the object.

[0156] According to various embodiments of the present disclosure, since the inclination of the object is not checked based on the imaging position of the reflected light from the object, miniaturization of the inspection device becomes easy.

[0157] According to various embodiments of the present disclosure, since the inclination of the object is not checked based on the diffraction fringes formed in the air above the object, a strong check can be performed on noise.

[0158] Various embodiments of the present disclosure can be embodied by software recorded on a machine-readable recording medium. The software can be the software for embodying the various embodiments of the present disclosure described above. The software can be inferred by a programmer in the technical field to which the present disclosure pertains from the various embodiments of the present disclosure. For example, the software can be machine-readable commands (e.g., code or code snippets) or programs. The machine is a device that can operate according to commands called from the recording medium, and can be, for example, a computer. In one embodiment, the machine can be apparatuses 100 and 1210 according to the embodiments of the present disclosure. In one embodiment, a processor of the machine can run the called commands to cause components of the machine to perform functions corresponding to the commands. In one embodiment, the processor can be one or more processors according to the embodiments of the present disclosure. The recording medium can mean all kinds of recording media for storing data that can be read by a machine. The recording medium can include, for example, ROM (read-only memory), RAM (random access memory), CD-ROM (compact disc read-only memory), magnetic tape, floppy disk, optical data storage device, etc. In one embodiment, the recording medium can be one or more memories. In one embodiment, the recording medium can also be embodied in a distributed form in a computer system or the like connected through a network. The software can be stored and run distributively in a computer system or the like. The recording medium can be a non-transitory recording medium. A non-transitory recording medium means a tangible medium that actually exists regardless of semi-permanent or temporary storage of data, and does not include a transitory propagated signal.

[0159] The technical idea of the present disclosure has been described above according to various embodiments, but the technical idea of the present disclosure includes various permutations, deformations, and changes that can be implemented within the scope understandable by those skilled in the technical field to which the present disclosure pertains. In addition, such permutations, deformations, and changes should be understood to be included in the appended claims.

Claims

1. A second device that, in combination with a first device for determining a first three-dimensional image of an object located on a reference plane, determines an angle of an upper surface of the object with respect to the reference plane, comprising: A first light source that sequentially irradiates one or more first pattern lights having a single phase range, the phase range being the intensity phase range of light; A beam splitter and one or more lenses that change an optical path of the one or more first pattern lights so that light corresponding to each phase of the phase range dispersedly reaches a partial area of the upper surface; A communication interface that communicates with the first device; A first processor that is electrically connected to the first light source and the communication interface; And A memory that stores association information indicating a relationship between an angle of the upper surface with respect to the reference plane and light quantity values of each of the one or more first reflected lights, where the one or more first reflected lights are generated by reflection of the one or more first pattern lights from the partial area; The first processor, Obtains first information indicating light quantity values of each of the one or more first reflected lights from the first device, Generates second information indicating an angle of the upper surface with respect to the reference plane in a partial area of the upper surface of the object based on the first information and the association information, Controls the communication interface to obtain from the first device a first three-dimensional image of the object determined based on phase changes of one or more second pattern lights from one or more second reflected lights, The first device includes: One or more second light sources that irradiate one or more second pattern lights onto the object; and An image sensor that captures the one or more first reflected lights and the one or more second reflected lights generated by reflection of the one or more second pattern lights from the object, The second information is used to correct the upper surface of the object represented by the first three-dimensional image to determine a second three-dimensional image of the object, Each of the one or more second pattern lights is a pattern light generated by phase-shifting a single pattern light by an integer multiple of a preset phase interval.

2. The second device according to claim 1, wherein The first processor controls the communication interface to transmit second information indicating an angle of the upper surface to the first device.

3. The second device according to claim 1, wherein The first processor, Corrects the upper surface of the object represented by the first three-dimensional image based on the angle of the upper surface to determine a second three-dimensional image of the object.

4. The second device according to claim 1, wherein The first light source also irradiates monochromatic light, The beam splitter and the one or more lenses change an optical path of the monochromatic light so that the monochromatic light reaches the upper surface.

5. The second device according to claim 4, wherein The first processor, Controls the communication interface to obtain fourth information indicating a reflectivity of the upper surface from the first device, When the reflectance of the upper surface is equal to or higher than a preset reference reflectance, the first light source is controlled to irradiate the one or more first pattern lights in sequence.

6. The second device according to claim 1, wherein the first device includes: a second processor that determines the first three-dimensional image of the object based on the one or more first reflected lights and the one or more second reflected lights, and transmits the first three-dimensional image to the second device.

7. A method performed on a detachable second device coupled to a first device, wherein, The first device is configured to determine a first three-dimensional image of an object located on a reference plane, and the method determines an angle of an upper surface of the object with respect to the reference plane. The method includes: a step of the first light source irradiating one or more first pattern lights having a single phase range, the phase range being an intensity phase range of light; a step of a beam splitter and one or more lenses changing an optical path of the one or more first pattern lights so that light corresponding to each phase of the phase range dispersedly reaches a partial area of the upper surface; a step of a memory storing association information indicating a relationship between an angle of the upper surface with respect to the reference plane and light quantity values of the one or more first reflected lights, respectively, wherein the one or more first reflected lights are generated by reflection of the one or more first pattern lights from the partial area; a step of a first processor obtaining first information indicating light quantity values of the one or more first reflected lights, respectively, from the first device; a step of the first processor generating second information indicating an angle of the upper surface with respect to the reference plane in a partial area of the upper surface of the object based on the first information and the association information; and a step of the first processor controlling a communication interface to obtain from the first device a first three-dimensional image of the object determined based on phase changes of one or more second pattern lights based on one or more second reflected lights; the first device includes: one or more second light sources that irradiate one or more second pattern lights to the object; and an image sensor that captures the one or more first reflected lights and the one or more second reflected lights generated by reflection of the one or more second pattern lights from the object; the second information is used to correct an upper surface of the object represented by the first three-dimensional image to determine a second three-dimensional image of the object; each of the one or more second pattern lights is a pattern light generated by phase-shifting a single pattern light by an integer multiple of a preset phase interval, respectively.

8. The method according to claim 7, wherein it further includes: a step of the first processor transmitting second information indicating an angle of the upper surface to the first device.

9. The method according to claim 7, wherein It further includes: a step of the first processor correcting an upper surface of the object represented by the first three-dimensional image based on the angle of the upper surface to determine a second three-dimensional image of the object.

Images