Processing equipment

Abstract

The present invention provides a processing device that shortens the waiting time of a grinding unit and improves the productivity of the grinding device. A conveying unit (100) receives a plurality of plate-shaped workpieces temporarily placed on the temporary unit and conveys them to the first holding surface of a rough grinding unit by a single action of a holding portion (140) realized by a moving unit (110). That is, a plurality of plate-shaped workpieces temporarily placed on the temporary unit can be conveyed to the first holding surface by a single conveying action. Therefore, the conveying time for conveying a plurality of plate-shaped workpieces to the first holding surface can be shortened. Thus, the waiting time of the rough grinding unit can be shortened. Therefore, the productivity of the processing device can be improved.

Description

Technical Field

[0001] The present invention relates to a processing device. Background Art

[0002] In a grinding device that holds a plate-like workpiece with a holding surface of a chuck table and grinds the upper surface of the plate-like workpiece with a grinding tool, as disclosed in Patent Document 1, for example, a plurality of plate-like workpieces may be held by the holding surface.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2020-55080

[0004] When a plurality of plate-like workpieces are held by the holding surface, the plate-like workpieces are conveyed one by one to the holding surface by a conveying unit multiple times.

[0005] Therefore, the time required to carry out the ground plate-shaped workpiece from the holding surface and then to carry out the new plate-shaped workpiece onto the holding surface is longer than the grinding time required for the grinding process. Summary of the Invention

[0006] Therefore, an object of the present invention is to shorten the waiting time of a grinding unit and improve the productivity of a grinding device.

[0007] The processing device of the present invention (this processing device) at least comprises: a holding unit that uses a holding surface to hold a plate-shaped workpiece; a processing unit that processes the plate-shaped workpiece held on the holding surface; a box loading table that is used to load the box, the box having a shelf that is separated in the upper and lower directions and accommodates a plurality of plate-shaped workpieces; a temporary placement unit that is used to temporarily place the plate-shaped workpiece taken out of the box; and a conveying unit that conveys the plate-shaped workpiece temporarily placed on the temporary placement unit to the holding surface, wherein the holding unit has a plurality of holding surfaces, the temporary placement unit can temporarily place a number of plate-shaped workpieces corresponding to the number of the holding surfaces, and the conveying unit comprises: a holding portion that simultaneously holds a plurality of plate-shaped workpieces; and a moving unit that moves the holding portion from the temporary placement unit to the holding unit, the conveying unit receives the plurality of plate-shaped workpieces temporarily placed on the temporary placement unit through a single movement of the holding portion achieved by the moving unit, and conveys the plurality of plate-shaped workpieces to the holding surface.

[0008] In the present processing device, the temporary placement unit may also include: an air slider having air injection holes opened on the upper surface for ejecting air in order to support the lower surface of the plate-like workpiece in a non-contact manner by means of air, and the air slider extends from the box to the receiving position of the conveying unit; a slider moving unit that moves the plate-like workpiece supported on the upper surface of the air slider in a non-contact manner by means of the air in the extending direction of the air slider; and a stopping unit that stops the plate-like workpiece moved by the slider moving unit at the receiving position of the conveying unit.

[0009] In this case, the slide moving unit may also have a pushing mechanism that pushes one edge of the plate-like workpiece supported on the upper surface of the air slide in a non-contact manner toward the receiving position, and the stopping unit may also have a stopper that contacts the other edge of the plate-like workpiece moved to the receiving position.

[0010] Alternatively, the air injection hole may also include: a forward air injection hole, which serves as the sliding member moving unit and is formed by being inclined from a direction perpendicular to the upper surface of the air sliding member in the moving direction so as to make the air flow in the moving direction of the plate-shaped workpiece; and a reverse air injection hole, which serves as the stopping unit and has an inclination opposite to the inclination of the forward air injection hole so as to form a flow of air opposite to the flow of air injected from the forward air injection hole. The temporary placement unit may also support the plate-shaped workpiece in a non-contact manner at the receiving position by the flow of air injected from the forward air injection hole and the flow of air injected from the reverse air injection hole.

[0011] Alternatively, the temporary placement unit may also include: a first channel, which is composed of a first rail and a second rail that respectively support the lower surfaces of the plate-like workpiece on both sides; a second channel, which is arranged in parallel with the first channel and is composed of a third rail and a fourth rail that respectively support the lower surfaces of the plate-like workpiece on both sides, like the first channel; and a width adjustment unit, which can simultaneously adjust the widths of the first channel and the second channel, and the width adjustment unit may also include: a first internal thread formed on the second rail; a second internal thread that is connected to the second rail; The same pitch as the first internal thread is formed on the third track; the third internal thread is formed on the fourth track with a pitch twice that of the first internal thread and the second internal thread; the shaft has a first external thread and a second external thread, the first external thread is screwed together with the first internal thread and the second internal thread, and the second external thread is screwed together with the third internal thread; and a rotating unit that rotates the shaft. The width changing unit can also be constructed to be able to simultaneously expand or narrow the widths of the first channel and the second channel by rotating the shaft.

[0012] In addition, in the processing device, the temporary storage unit may include: an endless belt; a rotating mechanism that rotates the endless belt; and a front end sensor that detects that the plate-shaped workpiece placed on the upper surface of the endless belt has reached the receiving position of the conveying unit.

[0013] In this case, the processing device may also include: a detection sensor that detects the plate-like workpiece taken out of the box and placed on the endless belt; a size setting unit that sets the length and width of the plate-like workpiece as the size; a speed setting unit that rotates the endless belt at a specified rotational speed through the rotation mechanism; a time measuring unit that measures the time from the time when the detection sensor detects one edge of the plate-like workpiece to the time when the other edge is detected when the plate-like workpiece whose size is set by the size setting unit moves at the speed set by the speed setting unit; a size calculation unit that calculates the size of the plate-like workpiece based on the rotation speed of the endless belt set by the speed setting unit and the time measured by the time measurement unit; and a judgment unit that judges that there is an abnormality in the rotation of the endless belt when the size of the plate-like workpiece calculated by the size calculation unit is smaller than the size of the plate-like workpiece set by the size setting unit.

[0014] In this processing device, the transport unit receives multiple plate-like workpieces temporarily placed in the temporary storage unit and transports them to the holding surface through a single movement of the holding portion, which is achieved via the moving unit. In other words, in this processing device, multiple plate-like workpieces temporarily placed in the temporary storage unit can be transported to the holding surface in a single transport movement. This shortens the transport time required to transport multiple plate-like workpieces to the holding surface. Consequently, in this processing device, the waiting time of the processing unit can be shortened. Consequently, the processing device can achieve higher productivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a perspective view showing the structure of a processing device according to one embodiment of the present invention.

[0016] Figure 2 It is a perspective view showing the position of the temporary storage unit.

[0017] Figure 3 It is a perspective view showing the structure of the transport unit.

[0018] Figure 4 It is a perspective view showing the structure of the cassette transport mechanism.

[0019] Figure 5 It is a perspective view showing the structure of the temporary storage unit.

[0020] Figure 6 (a) is a cross-sectional view showing the first internal thread formed in the second track, Figure 6 (b) is a cross-sectional view showing the structure of the third internal thread formed in the fourth track.

[0021] Figure 7 (a) is a perspective view showing the structure of the first guide rail, Figure 7 (b) is an explanatory diagram showing the structure of the first guide rail.

[0022] Figure 8 This is an explanatory diagram showing a state in which a plate-shaped workpiece moves on a first guide rail.

[0023] Figure 9 This is an explanatory diagram showing a state in which a plate-shaped workpiece moves on the first rail.

[0024] Figure 10 This is an explanatory diagram showing a state in which a plate-shaped workpiece stops on the first rail.

[0025] Figure 11 It is a perspective view showing the structure of the first belt moving unit.

[0026] Figure 12 It is a perspective view showing the structure of the second belt moving unit.

[0027] Figure 13 It is a perspective view showing another example of the temporary storage unit.

[0028] Description of labels

[0029] 1: Processing device; 2: Plate-shaped workpiece; 3: First device base; 5: Second device base; 7: Control unit; 10: Rough grinding unit; 11: Rough grinding feed unit; 12: First holding surface; 13: First chuck table; 15: Rough grinding unit; 18: Rough grinding tool; 30: Finishing grinding unit; 31: Finishing grinding feed unit; 32: Second holding surface; 33: Second chuck table; 35: Finishing grinding unit; 38: Finishing grinding tool; 40: Cassette mounting table; 41: Cassette; 180: Cassette transport space; 60: Cassette transport mechanism; 61: Housing plate; 62: Moving mechanism; 70: Support mechanism; 170: Conveying space; 100: Conveying unit; 101: Housing plate; 110: Moving unit; 120: Y-axis moving mechanism; 130: Z-axis moving mechanism; 140: Holding unit; 141: Holding plate; 142: Suction pad; 152: Relay unit; 153: Moving unit; 154: Relay workbench; 155: Robot; 190: Temporary storage space; 200: Temporary storage unit; 201: Base; 210: Temporary storage channel; 211: 1st channel; 212: 1st track; 213: 2nd track; 214: Stopper; 253: Pushing mechanism; 215: 2nd channel; 216: 3rd track; 21 7: 4th track; 205: 3rd channel; 206: 5th track; 207: 6th track; 250: guide channel; 251: 1st guide rail; 252: 2nd guide rail; 260: step portion; 225: 1st external thread; 226: 2nd external thread; 227: 1st reverse external thread; 228: 2nd reverse external thread; 220: width change unit; 221: guide rail; 222: shaft; 241: 1st internal thread; 242: 2nd internal thread; 243: 3rd internal thread; 245: 1st reverse internal thread; 246: 2nd reverse internal thread; 247: 3rd reverse internal thread; P1-P3: pitch; 229: Base; 230: Position adjustment unit; 261: First air injection hole; 262: Second air injection hole; 263: Third air injection hole; 270: Air source; 400: First belt moving unit; 401: Annular belt; 402: Rotating mechanism; 403: Driven roller; 404: Driving roller; 405: Motor; 407: Encoder; 410: Front end sensor; 420: Second belt moving unit; 421: Detection sensor; 423: Time measurement unit; 425: Speed ​​setting unit; 427: Size setting unit; 429: Size calculation unit; 431: Judgment unit; 500: Temporary placement unit. DETAILED DESCRIPTION

[0030] like Figure 1 As shown, the machining device 1 of this embodiment includes a rough grinding unit 10 , a fine grinding unit 30 , and a control unit 7 . Under the control of the control unit 7 , the rough grinding unit 10 and the fine grinding unit 30 grind a quadrilateral plate-shaped workpiece 2 .

[0031] The processing device 1 includes a first device base 3 and a second device base 5 arranged behind (on the +Y direction side) the first device base 3. The first device base 3 is used for loading and unloading of the plate-shaped workpiece 2. The second device base 5 processes the plate-shaped workpiece 2 in the rough grinding section 10 or the fine grinding section 30.

[0032] A cassette mounting table 40 and a stocker 50 are provided on the front side (-Y direction side) of the first device base 3. A cassette 41 containing unprocessed plate-shaped workpieces 2 is mounted on the cassette mounting table 40. The stocker 50 can accommodate a plurality of similar cassettes 41 containing unprocessed plate-shaped workpieces 2.

[0033] The cassette 41 has shelves that are spaced apart in the vertical direction to accommodate a plurality of plate-like workpieces 2. The plate-like workpieces 2 are accommodated one by one on each shelf.

[0034] The cassette 41 has an opening facing the +Y direction side. A robot 155 is disposed on the +Y direction side of the opening. The robot 155 carries (stores) the processed plate-like workpiece 2 into a cassette for storing processed workpieces (not shown).

[0035] In addition, the robot 155 takes out the plate-like workpiece 2 before processing from the box 41 and places it on the Figure 2 The temporary placement unit 200 is provided at Figure 1 The temporary storage unit 200 is used to temporarily store the plate-like workpiece 2 taken out from the cassette 41 in the temporary storage space 190 indicated by the dotted line on the +Y direction side of the cassette mounting table 40.

[0036] In addition, if Figure 1 As shown, the rough grinding section 10 and the fine grinding section 30 are arranged on the second device base 5 on the +Y direction side of the temporary storage space 190 .

[0037] The rough grinding section 10 includes a first chuck table 13 for holding a plate-like workpiece 2. The first chuck table 13 is an example of a holding unit for holding the plate-like workpiece 2 and has two first holding surfaces 12 for suctioning and holding the plate-like workpiece 2. Each first holding surface 12 is connected to a suction source (not shown) and is capable of suctioning and holding a single plate-like workpiece 2. Therefore, in this embodiment, the first chuck table 13 can simultaneously hold two plate-like workpieces 2 via the two first holding surfaces 12.

[0038] The first chuck table 13 is rotatable about a central axis that passes through the center of the first holding surface 12 and extends in the Z-axis direction while holding the plate-like workpiece 2 by suction on the first holding surface 12 .

[0039] A first column 14 is erected on the rear (+Y direction side) of the second device base 5. The rough grinding section 10 includes a rough grinding unit 15 on the front surface of the first column 14 for rough grinding the plate-like workpiece 2, and a rough grinding feed unit 11 for feeding the rough grinding unit 15 during grinding.

[0040] The rough grinding unit 15 is an example of a machining unit that machines the plate-like workpiece 2 held by the first holding surface 12, and includes a rough grinding wheel 17 including a rough grinding tool 18. The rough grinding tool 18 is an example of a machining tool and is a grinding tool including relatively large abrasive grains.

[0041] Furthermore, the rough grinding unit 10 includes a first height gauge 19 for measuring the thickness of the plate-like workpiece 2 held by the first holding surface 12 of the first chuck table 13 .

[0042] In the rough grinding section 10 , the plate-like workpiece 2 held by the first holding surface 12 of the first chuck table 13 is roughly ground by a rough grinding wheel 18 rotated by the rotation of the spindle 16 of the rough grinding unit 15 .

[0043] The finishing grinding section 30 includes a second chuck table 33 for holding a plate-like workpiece 2. The second chuck table 33 is an example of a holding unit for holding a plate-like workpiece 2 and has two second holding surfaces 32 for suctioning and holding the plate-like workpiece 2. Each second holding surface 32 is connected to a suction source (not shown) and is capable of suctioning and holding a single plate-like workpiece 2. Therefore, in this embodiment, the second chuck table 33 can simultaneously hold two plate-like workpieces 2 via the two second holding surfaces 32.

[0044] The second chuck table 33 is rotatable about a central axis that passes through the center of the second holding surface 32 and extends in the Z-axis direction while holding the plate-like workpiece 2 by suction on the second holding surface 32 .

[0045] A second column 34 is erected on the rear of the second device base 5 adjacent to the first column 14. The fine grinding section 30 includes a fine grinding unit 35 on the front surface of the second column 34 for fine grinding the plate-like workpiece 2 and a fine grinding feed unit 31 for feeding the fine grinding unit 35 during grinding.

[0046] The finishing grinding unit 35 is an example of a machining unit that machines the plate-like workpiece 2 held by the second holding surface 32, and includes a finishing grinding wheel 37 including a finishing grinding tool 38. The finishing grinding tool 38 is an example of a machining tool and is a grinding tool including relatively small abrasive grains.

[0047] Furthermore, the fine grinding section 30 includes a second height gauge 39 for measuring the thickness of the plate-like workpiece 2 held by the second holding surface 32 of the second chuck table 33 .

[0048] In the finish grinding section 30 , the plate-like workpiece 2 held by the second holding surface 32 of the second chuck table 33 is finish ground by a finish grinding wheel 38 rotated by the rotation of the spindle 36 of the finish grinding unit 35 .

[0049] In addition, the gap between the rough grinding part 10 and the fine grinding part 30 on the second device base 5 is Figure 1 The conveying space 170 shown by the middle dotted line is provided with two conveying units 100 for the rough grinding section 10 and the fine grinding section 30 (see FIG. Figure 3 ).

[0050] Figure 3 The transport unit 100 for the rough grinding section 10 is shown. The transport unit 100 for the rough grinding section 10 has a holding portion 140 for simultaneously holding a plurality of plate-like workpieces 2 and a moving unit 110 for moving the holding portion 140 on a surface on the −X direction side of a housing plate 101 extending in the Y-axis direction.

[0051] The moving unit 110 includes a Z-axis moving mechanism 130 for moving the holding portion 140 in the Z-axis direction, and a Y-axis moving mechanism 120 for moving the holding portion 140 and the Z-axis moving mechanism 130 in the Y-axis direction.

[0052] Y-axis moving mechanism 120 includes a pair of guide rails 123 extending in the Y-axis direction, a Y-axis table 124 placed on guide rails 123 , a ball screw 125 extending parallel to guide rails 123 , and a drive motor 126 that rotates ball screw 125 .

[0053] A pair of guide rails 123 are arranged parallel to the Y-axis direction on the front surface of the housing plate 101. A Y-axis stage 124 is slidably mounted on the pair of guide rails 123. A Z-axis moving mechanism 130 and a holding portion 140 are mounted on the Y-axis stage 124.

[0054] The ball screw 125 is threadedly engaged with a nut (not shown) provided on the Y-axis stage 124. A drive motor 126 is connected to one end of the ball screw 125 to rotationally drive the ball screw 125. The rotation of the ball screw 125 causes the Y-axis stage 124, the Z-axis moving mechanism 130, and the holding unit 140 to move in the Y-axis direction along the guide rail 123.

[0055] The Z-axis moving mechanism 130 has a mounting plate 134, a guide rail 131 extending in the Z-axis direction, a Z-axis table 132 mounted on the guide rail 131, a ball screw 133 extending parallel to the guide rail 131, a driving motor 135 for rotating the ball screw 133, and an arm 137 for supporting the retaining portion 140.

[0056] The mounting plate 134 is arranged on the side surface of the Y-axis stage 124. The guide rail 131 is arranged parallel to the Z-axis direction on the mounting plate 134. The Z-axis stage 132 is slidably mounted on the guide rail 131. An arm 137 is mounted on the Z-axis stage 132.

[0057] The ball screw 133 is threadedly engaged with a nut (not shown) provided on the Z-axis stage 132. A drive motor 135 is connected to one end of the ball screw 133 to rotationally drive the ball screw 133. The rotation of the ball screw 133 causes the Z-axis stage 132, the arm 137, and the holder 140 supported by the arm 137 to move in the Z-axis direction along the guide rail 131.

[0058] The arm 137 is mounted on the Z-axis stage 132 and extends along the X-axis direction.

[0059] The holding portion 140 is supported by the front end of the arm 137. The holding portion 140 includes a pair of holding plates 141 arranged to sandwich the arm 137, and two suction pads 142 on each holding plate 141. The suction pads 142 are connected to a suction source (not shown) to attract and hold the plate-like workpiece 2. Because the holding portion 140 includes multiple suction pads 142 on a single holding plate 141, it can simultaneously hold multiple plate-like workpieces 2.

[0060] In the transport unit 100 for the rough grinding section 10, the holding portion 140 holding a plurality of plate-like workpieces 2 is moved from the temporary placement unit 200 to the first chuck table 13 by the moving unit 110. Specifically, the transport unit 100 simultaneously holds two plate-like workpieces 2 temporarily placed in the temporary placement unit 200 using the holding portion 140, and transports and places them onto the two first holding surfaces 12 of the first chuck table 13 of the rough grinding section 10.

[0061] In this manner, in the transport unit 100 , the plurality of plate-like workpieces 2 temporarily placed in the temporary placement unit 200 are received by a single operation of the holding portion 140 via the moving unit 110 and are transported to the first holding surface 12 .

[0062] In addition, after the rough grinding, the transport unit 100 for the rough grinding section 10 simultaneously holds the two plate-like workpieces 2 on the two first holding surfaces 12 of the first chuck table 13 using the holding section 140 and places them on the workpiece 2. Figure 1On the relay workbench 154 of the relay unit 152 shown.

[0063] The relay table 154 is used to move the plate-like workpiece 2 roughly ground by the rough grinding section 10 to the fine grinding section 30. The relay table 154 is configured to be able to place two plate-like workpieces 2. The relay unit 152 further includes a moving unit 153 for moving the relay table 154 in the X-axis direction.

[0064] When the plate-like workpiece 2 is placed on the relay table 154 of the relay unit 152 by the conveying unit 100, the relay unit 152 disposes the relay table 154 at the rough grinding position ( Figure 1 The location of the relay station 154 is shown).

[0065] After the roughly ground plate-like workpiece 2 is placed on the relay table 154 of the relay unit 152 , the relay unit 152 moves the relay table 154 from the rough grinding position on the −X direction side to the finish grinding position on the +X direction side via the moving unit 153 .

[0066] Furthermore, in the transport space 170, a transport unit 100 for the fine grinding section 30 is also arranged on the +X direction side of the transport unit 100 for the rough grinding section 10. Figure 3 In the structure of the transport unit 100 for the rough grinding section 10 shown, the transport unit 100 for the fine grinding section 30 is configured to include a holding portion 140 and the transport unit 100 (Z-axis moving mechanism 130 and Y-axis moving mechanism 120) on the +X direction side surface of the housing plate 101.

[0067] The conveying unit 100 for the fine grinding section 30 simultaneously holds two plate-like workpieces 2 temporarily placed on the relay table 154 at the fine grinding position on the +X direction side using the holding section 140 and conveys them to the two second holding surfaces 32 of the second chuck table 33 of the fine grinding section 30.

[0068] In addition, after the fine grinding, the conveying unit 100 for the fine grinding section 30 simultaneously holds the two plate-like workpieces 2 on the two second holding surfaces 32 of the second chuck table 33 using the holding section 140 and conveys them to the second chuck table 33. Figure 1 On the rotating workbench 157 of the cleaning unit 156 shown.

[0069] The cleaning unit 156 is a rotary cleaning unit that cleans the plate-like workpiece 2. The cleaning unit 156 includes a rotary table 157 that holds the plate-like workpiece 2 and a nozzle 158 that sprays cleaning water and dry air toward the rotary table 157. The rotary table 157 is configured to hold two plate-like workpieces 2 simultaneously.

[0070] In the cleaning unit 156 , the rotary table 157 holding the plate-like workpiece 2 rotates, and cleaning water is sprayed toward the plate-like workpiece 2 to perform rotational cleaning on the plate-like workpiece 2 . Thereafter, dry air is blown toward the plate-like workpiece 2 to dry the plate-like workpiece 2 .

[0071] The plate-like workpiece 2 cleaned by the cleaning unit 156 is carried by the robot 155 into a box for storing processed workpieces.

[0072] In addition, if Figure 1 As shown in FIG. 5 , the reservoir 50 includes a rectangular parallelepiped base 51 and an adapter plate 52 interposed between the base 51 and the cassette 41 . The cassette 41 is placed on the upper surface of the adapter plate 52 .

[0073] Furthermore, three plate support portions 511 corresponding to the respective receiving plates 52 are provided on the stage 51 . The receiving plates 52 are positioned on the stage 51 by these three plate support portions 511 .

[0074] In addition, if Figure 1 As shown in FIG. 1 , in the processing device 1, a box conveying space 180 shown by a dotted line is provided above the robot 155. A box conveying space 180 is provided for conveying the box 41 placed on the storage container 50 to the box placing table 40. Figure 4 The box transport mechanism 60 is shown.

[0075] The cassette transport mechanism 60 includes a support mechanism 70 that supports the receiving plate 52 on which the cassette 41 is placed, and a moving mechanism 62 that moves the support mechanism 70 between the stocker 50 and the cassette mounting table 40 .

[0076] The moving mechanism 62 is provided on the front surface (the surface on the -Y direction side) of the housing plate 61 extending in the X-axis direction of the cassette transport mechanism 60. The moving mechanism 62 includes an X-axis moving mechanism 63 for moving the support mechanism 70 in the X-axis direction and a Z-axis moving mechanism 64 for moving the support mechanism 70 in the Z-axis direction.

[0077] The cassette transport mechanism 60 supports the cassette 41 placed on the receiving plate 52 of the table 51 together with the receiving plate 52 by the support mechanism 70 and transports the cassette to the cassette placement table 40 by the moving mechanism 62 .

[0078] Here, the structure of the temporary placement unit 200 will be described. The temporary placement unit 200 is configured to temporarily hold a number of plate-like workpieces 2 corresponding to the number of first holding surfaces 12 (second holding surfaces 32) of the first chuck table 13 (second chuck table 33). Therefore, in this embodiment, the temporary placement unit 200 can temporarily hold two plate-like workpieces 2.

[0079] like Figure 5As shown, the temporary placement unit 200 includes: a base 201; a temporary placement channel portion 210, which includes a first channel 211 and a second channel 215; a width adjustment unit 220, which is used to adjust the width of the first channel 211 and the second channel 215; a position adjustment unit 230, which adjusts the position of the temporary placement channel portion 210 in the X-axis direction; and a guide channel 250, which guides the plate-like workpiece 2 to the temporary placement channel portion 210.

[0080] The position adjustment unit 230 supports the width changing unit 220 and the temporary storage path portion 210 and adjusts their positions in the X-axis direction.

[0081] The position adjustment unit 230 includes a pair of guide rails 231 extending in the X-axis direction, an X-axis stage 234 mounted on the guide rails 231 , a ball screw 232 extending parallel to the guide rails 231 , and a drive motor 233 that rotates the ball screw 232 .

[0082] A pair of guide rails 231 are arranged parallel to the X-axis direction on the base 201. An X-axis stage 234 is provided on the pair of guide rails 231 so as to be slidable along these guide rails 231. The width changing unit 220 and the temporary storage channel portion 210 are arranged on the X-axis stage 234.

[0083] The ball screw 232 is threadedly engaged with a nut (not shown) mounted on the X-axis stage 234. A drive motor 233 is connected to one end of the ball screw 232 to rotationally drive the ball screw 232. By rotating the ball screw 232, the X-axis stage 234, the width adjustment unit 220, and the temporary storage channel 210 move along the guide rail 231 in the X-axis direction. This allows the positions of the width adjustment unit 220 and the temporary storage channel 210 in the X-axis direction to be adjusted.

[0084] The +Y direction side of the temporary storage passage portion 210 is arranged on the conveying unit 100 (see Figure 3 ), i.e., the position where the transport unit 100 receives the plate-like workpiece 2 for transport to the first chuck table 13. The temporary storage channel portion 210 includes a first channel 211 and a second channel 215. The first channel 211 includes a first rail 212 and a second rail 213 that respectively support the lower surfaces of the plate-like workpiece 2 on both sides. The first rail 212 and the second rail 213 extend along the Y-axis direction.

[0085] The second channel 215 is arranged in parallel with the first channel 211. Like the first channel 211, the second channel 215 has third rails 216 and fourth rails 217 that respectively support the lower surfaces of the plate-like workpiece 2. The third rails 216 and fourth rails 217 extend along the Y-axis direction.

[0086] Furthermore, in this embodiment, the third rail 216 of the second channel 215 is adjacent to the second rail 213 of the first channel 211 .

[0087] The width adjustment unit 220 is configured to simultaneously adjust the widths of the first channel 211 and the second channel 215. The width adjustment unit 220 includes a base 229 mounted on the upper surface of the X-axis table 234 of the position adjustment unit 230. The width adjustment unit 220 also includes a pair of guide rails 221 extending in the X-axis direction on the base 229.

[0088] A pair of guide rails 221 is arranged parallel to the X-axis direction on the base 201. The second rail 213 of the first channel 211 and the third and fourth rails 216 and 217 of the second channel 215 are slidably provided on the pair of guide rails 221.

[0089] In addition, the first rail 212 is fixed to the base 229 .

[0090] In addition, if Figure 6 (a) and Figure 6 As shown in FIG. 2( b ), the width changing mechanism 220 includes a first internal thread 241 formed on the second rail 213 , a second internal thread 242 formed on the third rail 216 , and a third internal thread 243 formed on the fourth rail 217 .

[0091] like Figure 6 As shown in (a), the first internal thread 241 of the third track 216 and the second internal thread 242 of the second track 213 have the same pitch P1. Figure 6 As shown in (b) of FIG. 2 , the third internal thread 243 of the fourth rail 217 has a pitch P2 that is twice the pitch P1 (P2=2×P1).

[0092] In addition, if Figure 5 As shown, the width changing unit 220 includes a shaft 222 extending parallel to the guide rail 221. The shaft 222 includes a first external thread 225 that screws together with the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216, with a pitch P1, and a second external thread 226 that screws together with the third internal thread 243 of the fourth rail 217, with a pitch P2.

[0093] The shaft 222 extends parallel to the guide rail 221 with the first external thread 225 threadedly engaged with the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216 , and the second external thread 226 threadedly engaged with the third internal thread 243 of the fourth rail 217 .

[0094] The width changing unit 220 includes a shaft support 224 fixed to a base 229 and rotatably supporting the distal end of the shaft 222, and a drive motor 233 attached to the distal end of the shaft 222 to rotate the shaft 222. The drive motor 233 is an example of a rotating unit.

[0095] The width changing mechanism 220 can simultaneously expand or narrow the widths of the first passage 211 and the second passage 215 by driving the motor 233 to rotate the shaft 222 .

[0096] Specifically, the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216 are threadedly engaged with the first external thread 225 of the shaft 222 such that the second rail 213 and the third rail 216 move in the −X direction along the guide rail 221 when the shaft 222 rotates clockwise.

[0097] Furthermore, the third internal thread 243 of the fourth rail 217 is also threadedly engaged with the second external thread 226 of the shaft 222 such that when the shaft 222 rotates clockwise, the fourth rail 217 moves along the guide rail 221 in the -X direction. Here, the third internal thread 243 of the fourth rail has a pitch P2 that is twice the pitch P1 of the first internal thread 241 and the second internal thread 242. Therefore, the distance that the fourth rail 217 moves with clockwise rotation of the shaft 222 is twice the distance between the second rail 213 and the third rail 216.

[0098] Therefore, when the shaft 222 rotates clockwise, the second rail 213 moves in the −X direction, and thus the distance between the second rail 213 and the fixed first rail 212 , that is, the width of the first channel 211 increases.

[0099] Furthermore, as shaft 222 rotates clockwise, third rail 216, adjacent to second rail 213, moves in the -X direction by the same distance as second rail 213. Therefore, the movement of second rail 213 is not hindered. Furthermore, fourth rail 217 moves twice as far as third rail 216. Consequently, the distance between third rail 216 and fourth rail 217, i.e., the width of second channel 215, increases in the same manner as first channel 211.

[0100] Furthermore, by rotating the shaft 222 counterclockwise, the second rail 213 and the third rail 216 move in the +X direction, and the fourth rail 217 moves twice the distance of the second rail 213 and the third rail 216. Therefore, the widths of the first channel 211 and the second channel 215 are similarly narrowed.

[0101] In this manner, in the width changing unit 220 , by rotating the shaft 222 , the widths of the first channel 211 and the second channel 215 can be expanded or narrowed in accordance with the width of the plate-like workpiece 2 .

[0102] Furthermore, a size setting portion for setting (acquiring) the size (length and width) of the plate-like workpiece 2 may be provided.

[0103] The guide passage 250 is located on the +Y direction side of the box 41 (see Figure 2 ).like Figure 5 As shown, the guide channel 250 includes a first guide rail 251 and a second guide rail 252, each of which supports the lower surfaces of the plate-like workpiece 2. The first guide rail 251 and the second guide rail 252 extend along the Y-axis direction. The distance between the first guide rail 251 and the second guide rail 252, which constitutes the width of the guide channel 250, is configured to be the same as the width of the first channel 211 and the second channel 215.

[0104] In this embodiment, the position adjustment unit 230 adjusts the position of the temporary channel portion 210 in the X-axis direction so that any channel among the first channel 211 and the second channel 215 in the temporary channel portion 210 matches the guide channel 250 (i.e., is parallel to the guide channel 250 along the Y-axis direction).

[0105] Here, the structure of the rails in temporary storage unit 200 will be described. The first rail 212, second rail 213, third rail 216, fourth rail 217, first guide rail 251, and second guide rail 252 in temporary storage unit 200 have the same structure, except for the presence or absence of internal threads and the spacing between them. Therefore, the structure of these rails will be described using the first guide rail 251 as an example.

[0106] like Figure 7 As shown in (a), the first guide rail 251 has a substantially L-shaped cross section and has a stepped portion 260 for supporting the side end portion of the plate-like workpiece 2. Figure 7 (a) and Figure 7 As shown in (b), a first air injection hole 261 is formed on the upper surface of the stepped portion 260. The first air injection hole 261 is connected to the air source 270 and is capable of ejecting air. The plate-shaped workpiece 2 supported by the first guide rail 251 is lifted from the stepped portion 260 by the air ejected from the first air injection hole 261. Therefore, the first guide rail 251 is configured to support the lower surface of the plate-shaped workpiece 2 in a non-contact manner using air.

[0107] Therefore, the guide channel 250 including the first guide rail 251 and the second guide rail 252, the first channel 211 including the first rail 212 and the second rail 213, and the second channel 215 including the third rail 216 and the fourth rail 217 function as an air slider, which has a first air injection hole 261 opened on the upper surface to eject air in order to support the lower surface of the plate-like workpiece 2 in a non-contact manner with the help of air, and extends from the box 41 to the receiving position of the conveying unit 100.

[0108] In addition, if Figure 5 As shown, a pushing mechanism 253 is provided between the first guide rail 251 and the second guide rail 252 in the guide channel 250 .

[0109] The pushing mechanism 253 is configured to push one edge (edge ​​on the -Y direction side) of the plate-like workpiece 2 supported in a non-contact manner by air on the upper surface of the step portion 260 of the first guide rail 251 and the second guide rail 252 toward the temporary storage channel portion 210 including the receiving position of the conveying unit 100, that is, toward the +Y direction.

[0110] Pushed by the pushing mechanism 253 , the plate-like workpiece 2 moves in the +Y direction to the receiving position of the conveying unit 100 while being floated by air on the guide channel 250 and the first channel 211 or the second channel 215 matching the guide channel 250 .

[0111] The pushing mechanism 253 is an example of a slider moving unit that moves the plate-like workpiece 2 supported by air in a non-contact manner on the upper surfaces of the step portions 260 of the first and second guide rails 251 and 252 in the extending direction of the guide path 250 .

[0112] In addition, if Figure 5 As shown, stoppers 214 are provided at the ends of the first and second passages 211 and 215 on the +Y direction side. The stoppers 214 are configured to contact the other edge (the +Y direction edge) of the plate-shaped workpiece 2 on the +Y direction side of the temporary passage section 210 that has moved to the receiving position of the conveyor unit 100. Thus, the stoppers 214 stop the plate-shaped workpiece 2 moving in the +Y direction at the receiving position of the conveyor unit 100 within the temporary passage section 210 (the first and second passages 211 and 215).

[0113] The stopper 214 is an example of a stopping unit that stops the plate-like workpiece 2 moved by the pushing mechanism 253 as the slider moving unit at a receiving position of the conveying unit 100 .

[0114] In the machining operation of this embodiment, the control unit 7 first controls the width changing unit 220 of the temporary storage unit 200 to change the widths of the first and second channels 211 and 215 according to the width of the plate-like workpiece 2 being machined. The control unit 7 also changes the width of the guide channel 250 in a similar manner.

[0115] Next, the control unit 7 controls the position adjustment unit 230 of the temporary storage unit 200, thereby aligning the first channel 211 in the temporary storage channel unit 210 with the guide channel 250. Furthermore, the control unit 7 connects the first air injection holes 261 of each track in the temporary storage unit 200 to the air source 270, and sprays air from the first air injection holes 261.

[0116] Furthermore, the control unit 7 Figure 1 The robot 155 shown in FIG. 1 is controlled to take out the plate-shaped workpiece 2 before processing from the box 41 and place it on the Figure 5 The plate-like workpiece 2 is supported on the -Y direction side of the guide passage 250 (on the first guide rail 251 and the second guide rail 252) of the temporary storage unit 200 shown in FIG.

[0117] The control unit 7 controls the pushing mechanism 253 to push the plate-like workpiece 2 supported by the guide channel 250 in the +Y direction, thereby moving the plate-like workpiece 2 in the +Y direction. The moving plate-like workpiece 2 comes into contact with the stopper 214 in the first channel 211 and stops. In this way, the first channel 211 supports the plate-like workpiece 2 at the receiving position of the conveying unit 100.

[0118] The control unit 7 then controls the width changing unit 220 to align the second channel 215 in the temporary channel section 210 with the guide channel 250. The control unit 7 then controls the robot 155 and the pushing mechanism 253 to support another plate-shaped workpiece 2 via the second channel 215 in the same manner as described above.

[0119] In this manner, two plate-like workpieces 2 are supported at the receiving position of the transport unit 100 in the temporary storage passage portion 210 of the temporary storage unit 200 .

[0120] Next, the control unit 7 Figure 3 The conveying unit 100 for the rough grinding section 10 shown in the figure is controlled, and the two plate-like workpieces 2 temporarily placed in the receiving position of the conveying unit 100 in the temporary placement channel 210 of the temporary placement unit 200 are simultaneously held by the holding unit 140, and are conveyed and placed on the conveying unit 100. Figure 1 The rough grinding unit 10 is shown on two first holding surfaces 12 of the first chuck table 13. Thereafter, the control unit 7 controls the rough grinding unit 10 to perform rough grinding on the plate-like workpiece 2.

[0121] Furthermore, the control unit 7 controls the transport unit 100 for the rough grinding unit 10 to transport the rough-ground plate-shaped workpiece 2 to the relay unit 152, and controls the transport unit 100 for the fine grinding unit 30 to transport and place two plate-shaped workpieces 2 on the two second holding surfaces 32 of the second chuck table 33 of the fine grinding unit 30. Thereafter, the control unit 7 controls the fine grinding unit 30 to perform fine grinding on the plate-shaped workpiece 2.

[0122] Next, the control unit 7 controls the conveying unit 100 for the finish grinding section 30 to simultaneously convey the two plate-like workpieces 2 after finish grinding to the cleaning unit 156. Furthermore, the control unit 7 controls the cleaning unit 156 to simultaneously clean the two plate-like workpieces 2. Thereafter, the control unit 7 controls the robot 155 to transport the cleaned plate-like workpieces 2 into a box for storing processed workpieces.

[0123] As described above, in this embodiment, the transport unit 100 receives a plurality of plate-like workpieces 2 temporarily placed on the temporary placement unit 200 and transports them to the first holding surface 12 of the rough grinding unit 10 through a single movement of the holding portion 140 via the moving unit 110. Specifically, in this embodiment, a plurality of plate-like workpieces 2 temporarily placed on the temporary placement unit 200 can be transported to the first holding surface 12 in a single transport operation. Consequently, the transport time required to transport the plurality of plate-like workpieces 2 to the first holding surface 12 can be shortened.

[0124] Therefore, in this embodiment, it is possible to shorten the waiting time of the rough grinding portion 10. Therefore, it is possible to improve the productivity of the machining apparatus 1.

[0125] Furthermore, in this embodiment, the first channel 211, the second channel 215, and the guide channel 250 of the temporary storage channel section 210 in the temporary storage unit 200 function as air sliders that support the lower surface of the plate-like workpiece 2 in a non-contact manner using air. Furthermore, the plate-like workpiece 2 placed in the guide channel 250 can be moved in a non-contact manner to the temporary storage channel section 210, which includes the receiving position of the transport unit 100, and can be supported in a non-contact manner by the temporary storage channel section 210.

[0126] As described above, in the present embodiment, since the plate-like workpiece 2 is moved to the temporary storage path portion 210 in a non-contact manner and supported, damage to the lower surface of the plate-like workpiece 2 can be suppressed.

[0127] Furthermore, in this embodiment, the widths of the first channel 211 and the second channel 215 can be arbitrarily changed according to the width of the plate-like workpiece 2 being processed by the width changing unit 220 of the temporary storage unit 200. Therefore, in this embodiment, even if the plate-like workpiece 2 being processed is changed, the widths of the first channel 211 and the second channel 215 can be quickly changed according to the changed width of the plate-like workpiece 2.

[0128] The temporary placement unit 200 of this embodiment includes a push mechanism 253 as an example of a slider moving unit that moves the plate-like workpiece 2 in the extending direction of the guide path 250. Furthermore, the temporary placement unit 200 includes a stopper 214 as an example of a stopping unit that stops the plate-like workpiece 2 moved by the push mechanism 253 at the receiving position of the conveying unit 100.

[0129] In this regard, the temporary placement unit 200 may not have the pushing mechanism 253 and the stopper 214. In this case, for example, the first rail 212, the second rail 213, the third rail 216, the fourth rail 217, the first guide rail 251, and the second guide rail 252 in the temporary placement unit 200 have the same Figure 5 The first air injection holes 261 shown are air injection holes of a different shape.

[0130] Related to this, such as Figure 8 As shown, the first guide rail 251 (and the second guide rail 252) of the guide channel 250 has a second air injection hole 262 on the step portion 260. The second air injection hole 262 is formed to be inclined from the direction perpendicular to the upper surface of the step portion 260 of the first guide rail 251 toward the +Y direction, which is the movement direction, so as to flow air in the +Y direction, which is the movement direction of the plate-like workpiece 2. The second air injection hole 262 is an example of a forward air injection hole as a slider moving unit.

[0131] The plate-like workpiece 2 placed on the guide path 250 (on the first guide rail 251 and the second guide rail 252) passes through the Figure 8 As indicated by arrow 301, the air ejected from the second air ejection hole 262 moves in the +Y direction while floating, as indicated by arrow 302. Thus, the second air ejection hole 262 functions as a slider moving unit that moves the plate-like workpiece 2 in the direction in which the guide path 250 extends.

[0132] In addition, if Figure 9As shown, the first rail 212 (the second rail 213, the third rail 216, and the fourth rail 217) of the temporary storage path section 210 has second air injection holes 262 on the -Y direction side of the step portion 260, similar to those of the first guide rail 251. Furthermore, the first rail 212 has third air injection holes 263 on the +Y direction side of the step portion 260. The third air injection holes 263 in the first rail 212 are formed at a position included in the receiving position of the transport unit 100.

[0133] The third air injection hole 263 is formed to be inclined in the -Y direction with an inclination opposite to the inclination of the second air injection hole 262, so as to form an air flow opposite to the flow of air injected from the second air injection hole 262. The third air injection hole 263 is an example of a reverse air injection hole serving as a stop unit.

[0134] like Figure 9 As shown, the plate-like workpiece 2 moved from the guide channel 250 is moved in the +Y direction in a floating state on the upper surface of the step portion 260 of the first rail 212 by the air injected from the first air injection hole 261 formed in the first holding surface 12. When the plate-like workpiece 2 reaches the +Y direction side of the first rail 212, as shown in FIG. Figure 10 As shown, the air is injected from both the second air injection hole 262 and the third air injection hole 263 .

[0135] As indicated by arrow 301, the air ejected from the second air ejection hole 262 has a component in the +Y direction. On the other hand, as indicated by arrow 303, the air ejected from the third air ejection hole 263 has a component in the -Y direction. Therefore, the plate-like workpiece 2, having been exposed to air ejected from both the second air ejection hole 262 and the third air ejection hole 263, stops at the +Y direction side of the first rail 212.

[0136] Thus, in this structure, the temporary placement unit 200 supports the plate-like workpiece 2 in a non-contact manner at the position where the third air injection holes 263 are formed, which is the receiving position of the conveying unit 100, by the flow of air injected from the second air injection holes 262 and the flow of air injected from the third air injection holes 263.

[0137] In this structure, it is not necessary to set up the temporary storage unit 200. Figure 5 The push mechanism 253 and the stopper 214 are shown. Therefore, the cost of the temporary storage unit 200 can be reduced. In addition, there is no need to bring parts into contact with the plate-like workpiece 2 in order to move and stop the plate-like workpiece 2. Therefore, damage to the plate-like workpiece 2 can be more effectively suppressed.

[0138] In addition, in this embodiment, in order to support the plate-like workpiece 2, the first air injection hole 261, the second air injection hole 262 or the third air injection hole 263 is formed on the first rail 212, the second rail 213, the third rail 216, the fourth rail 217, the first guide rail 251 and the second guide rail 252 in the temporary storage unit 200.

[0139] In this regard, the temporary storage unit 200 may also have a method of replacing the air injection holes on each rail. Figure 11 The first belt moving unit 400 and Figure 12 The second belt moving unit 420 is shown.

[0140] The first belt moving unit 400 is provided between the rails of the guide passage 250 , the first passage 211 , and the second passage 215 , and is provided to move the plate-like workpiece 2 in each passage.

[0141] Figure 11 The first belt moving unit 400 shown is provided between the rails of the first channel 211 and the second channel 215. The first belt moving unit 400 includes an endless belt 401 and a rotating mechanism 402 for rotating the endless belt 401.

[0142] The rotating mechanism 402 includes: a driven roller 403, which is arranged at the end of the endless belt 401 on the -Y direction side; a driving roller 404, which is arranged at the end of the endless belt 401 on the +Y direction side; a motor 405, which drives the driving roller 404; and an encoder 407, which detects the rotation angle of the motor 405.

[0143] The endless belt 401 is stretched over a driven roller 403 and a driving roller 404 that are in contact with the inner peripheral surface of the endless belt 401. The endless belt 401 is configured so that the plate-like workpiece 2 is placed on its upper surface.

[0144] In the first belt moving unit 400 having such a structure, the plate-shaped workpiece 2 conveyed from the guide path 250 is placed on the -Y direction side end of the upper surface of the endless belt 401. In this state, the drive roller 404 is rotated by the motor 405, thereby rotating the endless belt 401 about the drive roller 404 and the driven roller 403 as the rotation axis. As a result, as indicated by arrow 310, the plate-shaped workpiece 2 placed on the upper surface of the endless belt 401 is conveyed toward the -Y direction.

[0145] In addition, if Figure 11As shown, the first belt moving unit 400 includes a front end sensor 410. The front end sensor 410 detects when the front end (the end on the +Y direction side) of the plate-like workpiece 2 placed on the upper surface of the endless belt 401 reaches the end on the +Y direction side of the endless belt 401 (the first channel 211 and the second channel 215). Thus, the front end sensor 410 detects when the plate-like workpiece 2 has reached the receiving position of the conveying unit 100.

[0146] For example, to transport the plate-like workpiece 2 to the receiving position of the transport unit 100, the control unit 7 rotates the endless belt 401 carrying the plate-like workpiece 2 via the motor 405. When the front end sensor 410 detects that the front end of the plate-like workpiece 2 has reached the end of the endless belt 401 on the +Y direction side, the control unit 7 determines that the plate-like workpiece 2 has reached the receiving position, stops driving the motor 405, and thus stops the rotation of the endless belt 401.

[0147] in addition, Figure 12 The second belt moving unit 420 is provided between the rails of the guide channel 250. Like the first belt moving unit 400, the second belt moving unit 420 has an endless belt 401 and a rotating mechanism 402. Figure 1 The plate-shaped workpiece 2 removed from the cassette 41 by the robot 155 is placed on the -Y direction side of the upper surface of the endless belt 401. In this state, the driving roller 404 is rotated by the motor 405, thereby rotating the endless belt 401 about the driving roller 404 and the driven roller 403. As a result, as indicated by arrow 310, the plate-shaped workpiece 2 placed on the upper surface of the endless belt 401 is conveyed in the +Y direction toward the first channel 211 or the second channel 215.

[0148] In addition, if Figure 12 As shown, the second belt moving unit 420 includes a detection sensor 421 for detecting the plate-like workpiece 2. The detection sensor 421 detects the plate-like workpiece 2 that has been removed from the cassette 41 and placed on the endless belt 401. Specifically, the detection sensor 421 detects one edge (one end) and the other edge (the other end) of the plate-like workpiece 2 that is conveyed in the +Y direction by the endless belt 401.

[0149] The second belt moving unit 420 also includes a size setting unit 427 that sets (acquires) the size (length and width) of the plate-like workpiece 2 , and a speed setting unit 425 that sets (controls) the rotation speed of the endless belt 401 .

[0150] The size setting unit 427 is configured based on the information from the control unit 7 (see Figure 1) to obtain the size of the cartridge 41 removed from the cartridge 41 and placed on the endless belt 401. The speed setting unit 425 controls the rotation speed of the endless belt 401, for example, based on an instruction from the control unit 7. Specifically, the speed setting unit 425 rotates the endless belt 401 at a predetermined rotation speed via the rotation mechanism 402.

[0151] Furthermore, the second belt moving unit 420 includes a time measuring unit 423 connected to the detection sensor 421 , a size calculating unit 429 for calculating the size of the plate-like workpiece 2 , and a determining unit 431 for determining the presence or absence of an abnormality.

[0152] When the plate-like workpiece 2 sized by the size setting unit 427 and placed on the endless belt 401 moves at the speed set by the speed setting unit 425 , the time measuring unit 423 measures the time from when the detection sensor 421 detects one edge of the plate-like workpiece 2 to when it detects the other edge.

[0153] The size calculation unit 429 calculates the size of the plate-like workpiece 2 being placed and moved on the endless belt 401 based on the rotation speed of the endless belt 401 set by the speed setting unit 425 and the time measured by the time measurement unit 423 .

[0154] The determination unit 431 compares the size of the plate-like workpiece 2 set (acquired) by the size setting unit 427 with the size of the plate-like workpiece 2 calculated by the size calculation unit 429. If the size of the plate-like workpiece 2 calculated by the size calculation unit 429 is smaller than the size of the plate-like workpiece 2 set by the size setting unit 427, the determination unit 431 determines that there is an abnormality in the rotation of the endless belt 401.

[0155] In this regard, the endless belt 401 may not rotate normally due to slack. In the above configuration, the determination unit 431 can confirm whether the endless belt 401 rotates normally.

[0156] In addition, when the size of the plate-shaped workpiece 2 set by the size setting unit 427 is different from the size of the plate-shaped workpiece 2 calculated by the size calculation unit 429 (when the former is smaller than the latter and when the former is larger than the latter), the judgment unit 431 may judge that there is an abnormality in the rotation of the annular belt 401.

[0157] In addition, you can also Figure 11 The first belt moving unit 400 shown is provided with Figure 12 The detection sensor 421, the time measuring unit 423, the speed setting unit 425, the size setting unit 427, the size calculating unit 429, and the judging unit 431 are shown. In this case, it is possible to judge whether there is any abnormality in the rotation of the endless belt 401 of the first belt moving unit 400 using the plate-like workpiece 2 moved by the first belt moving unit 400.

[0158] In addition, when using Figure 12 In the case of the second belt moving unit 420 shown, the plate-shaped workpiece 2 can be removed from the cassette 41 using the endless belt 401 of the second belt moving unit 420, instead of the robot 155. In this configuration, the end of the endless belt 401 on the -Y direction side is inserted under the plate-shaped workpiece 2 stored in the cassette 41, and this end supports the lower surface of the plate-shaped workpiece 2. In this state, the endless belt 401 is rotated to pull the plate-shaped workpiece 2 stored in the cassette 41 out of the cassette 41.

[0159] In addition, the processing device 1 of this embodiment may also have Figure 13 Instead of the temporary storage unit 500 shown Figure 5 The temporary storage unit 500 has the following structure: in the structure of the temporary storage unit 200, the temporary storage passage portion 210 has a third passage 205 in addition to the first passage 211 and the second passage 215.

[0160] In addition, the temporary storage unit 500 also has Figure 5 The guide channel 250 is shown. Figure 13 In the figure, the guide passage 250 is omitted.

[0161] The third channel 205 is arranged adjacent to the first channel 211 on the +X direction side of the first channel 211. The third channel 205 includes a fifth rail 206 and a sixth rail 207 that respectively support the lower surfaces of the plate-like workpiece 2. The fifth rail 206 and the sixth rail 207 extend along the Y-axis direction.

[0162] Furthermore, the fifth rail 206 of the third channel 205 is adjacent to the first rail 212 of the first channel 211 .

[0163] In addition, in this structure, the first rail 212 and the second rail 213 of the first channel 211, the third rail 216 and the fourth rail 217 of the second channel 215, and the fifth rail 206 and the sixth rail 207 of the third channel 205 are provided on a pair of guide rails 221 of the width change unit 220 in a manner that they can slide along the guide rails 221.

[0164] That is, to change the width of the first channel 211, the third channel 205 is moved in the same direction as the movement direction of the first rail 212, and the width of the third channel 205 is changed. In addition, to change the width of the first channel 211, the second channel 215 is moved in the same direction as the movement direction of the second rail 213, and the width of the second channel 215 is changed.

[0165] Therefore, when the second rail 213 is moved in the direction opposite to the moving direction of the first rail 212 and the shaft 222 is rotated, the widths of the first channel 211 , the second channel 215 , and the third channel 205 are simultaneously changed.

[0166] In this structure, the first internal thread 241 is formed on the second rail 213, the second internal thread 242 is formed on the third rail 216, and the third internal thread 243 is formed on the fourth rail 217. As described above, the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216 have a pitch P1 (see FIG. Figure 6 On the other hand, in this structure, the third internal thread 243 of the fourth rail 217 has a pitch P3 that is three times the pitch P1 (P3=3×P1).

[0167] In this structure, a first reverse internal thread 245 is formed on the first rail 212, a second reverse internal thread 246 is formed on the fifth rail 206, and a third reverse internal thread 247 is formed on the sixth rail 207. The first reverse internal thread 245 of the first rail 212 and the second reverse internal thread 246 of the fifth rail 206 have a pitch P1. The third reverse internal thread 247 of the sixth rail 207 has a pitch P3 that is three times the pitch P1. Furthermore, the first reverse internal thread 245, the second reverse internal thread 246, and the third reverse internal thread 247 are internal threads that are in the opposite direction to the first internal thread 241.

[0168] In this structure, the shaft 222 also includes a first external thread 225 having a pitch P1 that screws with the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216, and a second external thread 226 having a pitch P3 that screws with the third internal thread 243 of the fourth rail 217. Furthermore, the shaft 222 includes a first reverse external thread 227 having a pitch P1 that screws with the first reverse internal thread 245 of the first rail 212 and the second reverse internal thread 246 of the fifth rail 206, and a second reverse external thread 228 having a pitch P3 that screws with the third reverse internal thread 247 of the sixth rail 207.

[0169] The first external thread 225 is screwed into the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216, the second external thread 226 is screwed into the third internal thread 243 of the fourth rail 217, the first reverse external thread 227 is screwed into the first reverse internal thread 245 of the first rail 212 and the second reverse internal thread 246 of the fifth rail 206, and the second reverse external thread 228 is screwed into the third reverse internal thread 247 of the sixth rail 207. In this state, the shaft 222 extends parallel to the guide rail 221.

[0170] In this structure, the first internal thread 241 of the second rail 213 and the second internal thread 242 of the third rail 216 are threadedly engaged with the first external thread 225 of the shaft 222 so that the second rail 213 and the third rail 216 move in the −X direction along the guide rail 221 when the shaft 222 rotates clockwise.

[0171] Furthermore, the third internal thread 243 of the fourth rail 217 is also threadedly engaged with the second external thread 226 of the shaft 222 such that when the shaft 222 rotates clockwise, the fourth rail 217 moves in the -X direction along the guide rail 221. Here, the third internal thread 243 of the fourth rail 217 has a pitch P3 that is three times the pitch P1 of the first internal thread 241 and the second internal thread 242. Therefore, the distance that the fourth rail 217 moves with the clockwise rotation of the shaft 222 is three times the distance between the second rail 213 and the third rail 216.

[0172] The first inverted female thread 245 of the first rail 212 and the second inverted female thread 246 of the fifth rail 206 are screwed into the first inverted male thread 227 of the shaft 222 so that the first rail 212 and the fifth rail 206 move in the +X direction along the guide rail 221 when the shaft 222 rotates clockwise.

[0173] Therefore, when shaft 222 rotates clockwise, second rail 213 moves in the -X direction, while first rail 212 moves in the +X direction. Consequently, the width of first channel 211, which is the distance between second rail 213 and first rail 212, increases. Furthermore, fourth rail 217 moves in the -X direction by a distance three times that of third rail 216. Consequently, the width of second channel 215, which is the distance between third rail 216 and fourth rail 217, also increases, similar to first channel 211.

[0174] Furthermore, in this configuration, the third inverted female thread 247 of the sixth rail 207 is also threadedly engaged with the second inverted male thread 228 of the shaft 222 such that the sixth rail 207 moves in the +X direction along the guide rail 221 when the shaft 222 rotates clockwise. Here, the third inverted female thread 247 of the sixth rail 207 has a pitch P3 that is three times the pitch P1. Therefore, the distance that the sixth rail 207 moves in the +X direction with clockwise rotation of the shaft 222 is three times the distance of the first rail 212 and the fifth rail 206.

[0175] Therefore, as the shaft 222 rotates clockwise, the sixth rail 207 moves in the +X direction by a distance three times that of the fifth rail 206. Therefore, the width of the third channel 205, which is the distance between the sixth rail 207 and the fifth rail 206, increases similarly to the first channel 211.

[0176] Furthermore, by rotating the shaft 222 counterclockwise, the second rail 213 and the third rail 216 move in the +X direction, and the fourth rail 217 moves in the +X direction by a distance three times that of the second rail 213 and the third rail 216. Furthermore, the first rail 212 and the fifth rail 206 move in the -X direction, and the sixth rail 207 moves in the -X direction by a distance three times that of the first rail 212 and the fifth rail 206. Consequently, the widths of the first channel 211, the second channel 215, and the third channel 205 are similarly narrowed.

[0177] Thus, also in this structure, by rotating the shaft 222 , the widths of the first channel 211 , the second channel 215 , and the third channel 205 can be expanded or narrowed in accordance with the width of the plate-like workpiece 2 .

Claims

1. A processing device, comprising at least: a holding unit that holds the plate-shaped workpiece using a holding surface; a machining unit that machines a plate-shaped workpiece held on the holding surface; a cassette placement table for placing a cassette having shelves for accommodating a plurality of plate-shaped workpieces separated by gaps in the vertical direction; a temporary placement unit for temporarily placing the plate-shaped workpiece taken out from the box; and A conveying unit that conveys the plate-shaped workpiece temporarily placed on the temporary placement unit to the holding surface, in, The holding unit has a plurality of holding surfaces. The temporary storage unit has: an air slider having air injection holes opened in an upper surface thereof for ejecting air in order to support the lower surface of the plate-like workpiece in a non-contact manner by air, the air slider extending from the cassette toward a receiving position of the conveying unit; a slider moving unit that moves a plate-like workpiece supported on the upper surface of the air slider in a non-contact manner by the air in an extending direction of the air slider; and a stopping unit that stops the plate-like workpiece moved by the slide moving unit at the receiving position of the conveying unit, The temporary placement unit can temporarily place a number of plate-shaped workpieces corresponding to the number of the holding surfaces. The transport unit has: a holding portion that simultaneously holds a plurality of plate-like workpieces; and a moving unit that moves the holding portion from the temporary placement unit to the holding unit, The conveying unit receives the plurality of plate-shaped workpieces temporarily placed on the temporary placement unit through a single movement of the holding portion by the moving unit, and conveys the plurality of plate-shaped workpieces to the holding surface.

2. The processing device according to claim 1, wherein The slide moving unit has a pushing mechanism that pushes one edge of a plate-like workpiece supported on the upper surface of the air slide in a non-contact manner toward the receiving position. The stopping unit has a stopper that comes into contact with the other edge of the plate-like workpiece moved to the receiving position.

3. The processing device according to claim 1, wherein The air injection hole has: a forward air injection hole as the slider moving unit, which is formed obliquely from a direction perpendicular to the upper surface of the air slider toward the moving direction so as to cause air to flow toward the moving direction of the plate-like workpiece; as well as The reverse air ejection hole as the stop unit has an inclination opposite to the inclination of the forward air ejection hole so as to form a flow of air opposite to the flow of air ejected from the forward air ejection hole, The temporary placement unit supports the plate-shaped workpiece in a non-contact manner at the receiving position by the flow of air ejected from the forward air ejection holes and the flow of air ejected from the reverse air ejection holes.

4. The processing device according to claim 1, wherein The temporary storage unit has: a first channel, which is composed of a first rail and a second rail for supporting the lower surfaces of both sides of the plate-like workpiece respectively; a second channel arranged in parallel with the first channel and, like the first channel, composed of a third rail and a fourth rail for supporting both lower surfaces of the plate-like workpiece; and A width changing unit capable of adjusting the widths of the first channel and the second channel simultaneously, The width changing unit has: a first internal thread formed on the second track; a second internal thread formed on the third track with the same pitch as the first internal thread; a third internal thread formed on the fourth track with a pitch twice that of the first internal thread and the second internal thread; a shaft having a first external thread and a second external thread, the first external thread being threadedly engaged with the first internal thread and the second internal thread, and the second external thread being threadedly engaged with the third internal thread; and a rotating unit that causes the shaft to rotate, The width changing unit can simultaneously expand or narrow the widths of the first channel and the second channel by rotating the shaft.

5. A processing device comprising at least: a holding unit that holds the plate-shaped workpiece using a holding surface; a machining unit that machines a plate-shaped workpiece held on the holding surface; a cassette placement table for placing a cassette having shelves for accommodating a plurality of plate-shaped workpieces separated by gaps in the vertical direction; a temporary placement unit for temporarily placing the plate-shaped workpiece taken out from the box; and A conveying unit that conveys the plate-shaped workpiece temporarily placed on the temporary placement unit to the holding surface, in, The holding unit has a plurality of holding surfaces. The temporary storage unit has: annular belt; a rotating mechanism that rotates the endless belt; and A front end sensor detects that the plate-shaped workpiece placed on the upper surface of the endless belt has reached a receiving position of the conveying unit. The temporary placement unit can temporarily place a number of plate-shaped workpieces corresponding to the number of the holding surfaces. The transport unit has: a holding portion that simultaneously holds a plurality of plate-like workpieces; and a moving unit that moves the holding portion from the temporary placement unit to the holding unit, The conveying unit receives the plurality of plate-shaped workpieces temporarily placed on the temporary placement unit through a single movement of the holding portion by the moving unit, and conveys the plurality of plate-shaped workpieces to the holding surface.

6. The processing device according to claim 5, wherein: The processing device also has: a detection sensor that detects the plate-like workpiece taken out of the box and placed on the endless belt; a size setting portion that sets a length and a width as the size of the plate-like workpiece; a speed setting unit that rotates the endless belt at a predetermined rotational speed through the rotating mechanism; a time measuring unit that measures a time from when the detection sensor detects one edge of the plate-like workpiece to when the detection sensor detects another edge thereof, when the plate-like workpiece, the size of which is set by the size setting unit, moves at the speed set by the speed setting unit; a size calculation section that calculates a size of a plate-like workpiece based on the rotational speed of the endless belt set by the speed setting section and the time measured by the time measuring section; as well as The determination unit determines that there is an abnormality in the rotation of the endless belt when the size of the plate-shaped workpiece calculated by the size calculation unit is smaller than the size of the plate-shaped workpiece set by the size setting unit.

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