Cutting device and cutting method of workpiece

Abstract

The present application provides a cutting device and a cutting method of a workpiece, which can reduce vibration of a cutting tool compared with the past. The cutting device has a chuck table that holds a workpiece, a cutting unit (20) that cuts the workpiece held by the chuck table using a cutting tool (21) fixed to the tip of a main shaft (22) via a mount (24), and a nozzle (30) that supplies cutting water to the cutting tool (21), the cutting tool (21) being fixed to the mount (24) in a manner that the thickness is 0.2 mm or less and the aspect ratio indicated by the nose protrusion amount / thickness is 30 or more, the cutting device having a nozzle (31) that supplies cutting water from the outer periphery to the outer peripheral surface of the cutting tool (21) in parallel with the side surface (21-3) of the cutting tool (21), the nozzle (31) having a partition plate (38) inside that straightens the flow of the cutting water.

Description

Technical Field

[0001] This invention relates to a cutting device and a cutting method for a workpiece. Background Technology

[0002] In order to divide various plate-shaped workpieces such as wafers, resin encapsulation substrates, ceramic substrates, and glass substrates in which semiconductor devices are formed into chips or to form grooves, there are known cutting devices that fix cutting tools to the front end of a high-speed rotating spindle and cutting methods for the workpiece (for example, see Patent Document 1).

[0003] Patent Document 1: Japanese Patent Application Publication No. 2015-023222

[0004] A higher aspect ratio, indicated by the cutting tool tip extension / thickness, makes the cutting tool more prone to vibration, resulting in meandering cutting grooves or saw marks adhering to the sides of the cut chip. Therefore, the aspect ratio needs to be adjusted appropriately according to the rigidity of the cutting tool. However, by narrowing the cutting groove width, the pre-defined dividing lines (spacers) can also be made thinner, increasing the number of chips that can be collected. Therefore, machining based on a high aspect ratio is always required. Furthermore, using vacuum force (negative pressure) to fix the cutting tool in a so-called vacuum flange of the mounting base has the following problems compared to mechanically fixing the cutting tool to the mounting base using nuts or the like: the cutting tool is more likely to vibrate, and under high aspect ratio conditions, the tool may vibrate even more. Summary of the Invention

[0005] The present invention was made in view of the above-mentioned problems, and its object is to provide a cutting device and a cutting method for workpiece that can reduce the vibration of cutting tools compared with the past.

[0006] To solve the aforementioned problems and achieve the objective, the cutting apparatus of the present invention comprises: a chuck table for holding a workpiece; a cutting unit for cutting the workpiece held by the chuck table using a cutting tool fixed to the front end of a spindle via a mounting base; and a nozzle for supplying cutting water to the cutting tool, the cutting tool being fixed to the mounting base with a thickness of 0.2 mm or less and an aspect ratio of 30 or more (as shown by the tool tip extension / tool ​​thickness), characterized in that the nozzle supplies cutting water from the outer periphery toward the outer peripheral surface of the cutting tool parallel to the side surface of the cutting tool, and the nozzle having a partition plate inside for rectifying the flow of cutting water.

[0007] Also, the mount can have a support mount that supports the cutting tool with the front end of the main shaft fitted thereto, and a fixing mount that fixes the cutting tool supported by the support mount to the support mount, the support mount having an attraction path inside that penetrates from a rear side, which is a side of a main shaft housing that supports the main shaft so as to be rotatable, to a support surface opposite the fixing mount, so that negative pressure from a rotary joint provided in front of the main shaft housing acts on the fixing mount via the attraction path of the support mount to attract and fix the fixing mount to the support surface of the support mount, thereby clamping the cutting tool with the support mount and the fixing mount.

[0008] To solve the above problem and achieve the object, the cutting method of a workpiece of the present application uses any of the cutting devices described above, characterized in that the cutting water from the nozzle is supplied from the outer periphery toward the peripheral surface of the cutting tool in parallel with the side surface of the cutting tool while cutting the workpiece held by the chuck table with the cutting tool, thereby cutting the workpiece while suppressing vibration of the cutting tool caused by the cutting water supplied from the nozzle.

[0009] The present application can reduce vibration of a cutting tool compared with the past. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a perspective view showing a structure example of a cutting device of an embodiment.

[0011] Figure 2 is a sectional view showing a cutting unit of Figure 1 .

[0012] Figure 3 is a front view showing a cutting unit of Figure 1 .

[0013] Figure 4 is a partial sectional view showing a nozzle of Figure 3 .

[0014] Figure 5 is a sectional view showing a nozzle of Figure 3 .

[0015] Figure 6 is a view explaining a positional relationship between a supply port of a nozzle of Figure 3 and a cutting tool.

[0016] Figure 7 is a sectional view showing an example of a cutting method of a workpiece of an embodiment.

[0017] Figure 8is a diagram for explaining an effect of the cutting apparatus and the cutting method of the workpiece of the embodiment.

[0018] Explanation of reference numerals

[0019] 1: cutting apparatus; 10: chuck table; 20: cutting unit; 21: cutting tool; 21-3: flank face; 22: spindle; 23: spindle housing; 24: mounting seat; 25: rotary joint; 30, 31, 32: nozzle; 38: partition plate; 50: support mounting seat; 52-1, 62: support face; 55: suction path; 60: fixed mounting seat; 71: tool tip overhang; 72: tool thickness; 100: workpiece. DETAILED DESCRIPTION

[0020] Embodiments for carrying out the present application will be explained in detail with reference to the drawings. The present application is not limited to the contents described in the following embodiments. In addition, among the structural elements described below, there are included structural elements that are substantially identical to those that can be easily thought of by those skilled in the art. Furthermore, the structures described below can be appropriately combined. In addition, various omissions, substitutions, or alterations of the structures can be made within a scope that does not depart from the gist of the present application.

[0021] 〔Embodiment〕

[0022] An embodiment of the cutting apparatus 1 of the present application will be explained with reference to the drawings. Figure 1 is a perspective view showing a structural example of the cutting apparatus 1 of the embodiment. As shown in Figure 1 , the cutting apparatus 1 of the embodiment has a chuck table 10, a cutting unit 20, a nozzle 30, and a control unit 40.

[0023] In the present embodiment, as shown in Figure 1 , a workpiece 100 that is a processing target of the cutting apparatus 1 is, for example, a round plate-shaped semiconductor wafer or an optical device wafer or the like that takes silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like as a base material. The workpiece 100 is formed with device 103 of a chip size in an area of a flat front surface 101 that is divided by a plurality of division predetermined lines (streets) 102 formed in a lattice shape. In the present embodiment, the workpiece 100 has an adhesive tape 105 attached on a back surface 104 on the back side of the front surface 101, and a ring-shaped frame 106 is mounted on an outer edge portion of the adhesive tape 105, but the present application is not limited thereto. In addition, in the present application, the workpiece 100 can also be a rectangular package substrate, a ceramic plate, a glass plate, or the like that has a plurality of devices sealed with resin.

[0024] The chuck table 10 has a frame body in a disc shape formed with a recess, and a suction portion in a disc shape embedded in the recess. The suction portion of the chuck table 10 is formed of a porous ceramic or the like having a plurality of pores, and is connected to a vacuum suction source not shown via a vacuum suction path not shown. An upper surface of the suction portion of the chuck table 10 is a holding surface 11 on which the workpiece 100 is placed and which holds the placed workpiece 100 by suction. The holding surface 11 and an upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to an XY plane as a horizontal plane. The chuck table 10 is configured to be freely movable in an X-axis direction as one direction in a horizontal direction by an X-axis moving unit not shown, and to be freely rotatable about a vertical direction, that is, a Z-axis perpendicular to the XY plane by a rotation drive source not shown.

[0025] The cutting unit 20 cuts the workpiece 100 held by the chuck table 10 with the cutting tool 21. As shown in Figure 1 , the cutting unit 20 is configured to be freely movable in the Y-axis direction relative to the workpiece 100 held by the chuck table 10 by a Y-axis moving unit, and to be freely movable in the Z-axis direction relative to the workpiece 100 held by the chuck table 10 by a Z-axis moving unit. The cutting device 1 relatively moves the cutting tool 21 of the cutting unit 20 along the division predetermined line 102 relative to the workpiece 100 held by the chuck table 10 by the X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit while rotating the cutting tool 21 of the cutting unit 20, thereby cutting the workpiece 100 to form a cutting groove 200 along the division predetermined line 102 (see Figure 7 ).

[0026] As shown in Figure 1 , the cutting device 1 further has a cassette placement table 91, a cleaning unit 92, and a conveyance unit not shown. The cassette placement table 91 is a placement table that places a cassette 95 as a storage for storing a plurality of workpieces 100, and lifts the placed cassette 95 in the Z-axis direction. The cleaning unit 92 cleans the workpiece 100 after cutting processing to remove foreign matter such as cutting chips attached to the workpiece 100. The conveyance unit not shown conveys the workpiece 100 before cutting processing from the cassette 95 to the chuck table 10, conveys the workpiece 100 after cutting processing from the chuck table 10 to the cleaning unit 92, and conveys the workpiece 100 after cleaning from the cleaning unit 92 to the cassette 95.

[0027] Figure 2 is a sectional view showing a configuration example of the cutting unit 20 of Figure 1 . Figure 3 is a front view showing the cutting unit 20 of Figure 1 . As shown in Figure 2 and Figure 3As shown, the cutting unit 20 includes a cutting tool 21, a spindle 22, a spindle housing 23, a mounting base 24, a rotary joint 25, and a tool cover 26.

[0028] The cutting tool 21 is fixed to the front end of the spindle 22 via the mounting base 24, and rotates about an axis parallel to the Y-axis (which is perpendicular to the X-axis) as the spindle 22 rotates. In this embodiment, the cutting tool 21 is a so-called hubless tool, having a disc-shaped (ring-shaped) cutting edge 21-1. The cutting tool 21 has a mounting hole 21-2 at its center, which serves as a hole for fixing the cutting tool 21 to the mounting base 24. The outer peripheral surface of the cutting edge 21-1 has a predetermined thickness in the axial direction and becomes the cutting surface when cutting is performed using the cutting tool 21. The two side surfaces 21-3 of the cutting edge 21-1 are formed parallel to each other and are perpendicular to the outer peripheral surface of the cutting edge 21-1. The cutting edge 21-1 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness.

[0029] With its front end exposed to the outside from the spindle housing 23, the spindle 22 is supported by the spindle housing 23 so that it can rotate about an axis parallel to the Y-axis and is housed within the spindle housing 23. Figure 2 As shown, the front end of the spindle 22 is locally tapered in that its outer diameter gradually decreases towards the front end. An electric motor (not shown) for rotating the spindle 22 is connected to the base end of the spindle 22.

[0030] like Figure 2 As shown, the mounting base 24 has a support mounting base 50 and a fixed mounting base 60. The support mounting base 50 engages with the front end of the spindle 22, supporting the cutting tool 21 from the rear side (+Y direction side) of the spindle housing 23. The support mounting base 50 has a boss portion 51, a support flange portion 52, and a cylindrical portion 53. The boss portion 51 is formed into a cylindrical shape extending along the rotation axis of the spindle 22, i.e., the Y-axis direction. The support flange portion 52 extends radially outward from the rear side of the boss portion 51 and is formed into a disc shape (annular shape). The cylindrical portion 53 is formed to protrude towards the rear side of the support flange portion 52. The boss portion 51, the support flange portion 52, and the cylindrical portion 53 are integrally formed, with their respective central axes overlapping each other and arranged along the Y-axis direction.

[0031] The support mount 50 is formed with a mounting hole 54 on the inner side. The mounting hole 54 is partially formed in a tapered shape with an inner diameter that gradually decreases toward the front end, and is fitted without a gap with the outer periphery of the front end of the main shaft 22. The support mount 50 inserts the front end of the main shaft 22 into the mounting hole 54, and fastens the fastening nut 27, which is formed with a threaded groove on the inner periphery, to the threaded groove 22-1 formed on the front end of the main shaft 22 from the front side, that is, the -Y direction side of the main shaft 22, thereby fixing the support mount 50 to the front end of the main shaft 22.

[0032] The boss portion 51 is inserted into the mounting hole 61 of the fixed mount 60, and supports the fixed mount 60 from the inner periphery side of the mounting hole 61. The cylindrical portion 53 is fitted without a gap with the receiving hole 25-1 of the rotary joint 25 in a manner that allows rotation about the Y axis.

[0033] The support flange portion 52 has a support surface 52-1 toward the front side and an annular recessed portion 52-2. The support surface 52-1 is formed in a ring shape on the radially outer side of the surface of the support flange portion 52 toward the front side, and supports the surface of the cutting tool 21 on the rear side. The annular recessed portion 52-2 is formed to be recessed toward the rear side than the support surface 52-1, and is fitted with the annular protruding portion 63 of the fixed mount 60, which surrounds the boss portion 51.

[0034] The support mount 50 has a suction passage 55 formed inside in a range from the support flange portion 52 to the cylindrical portion 53. The front side of the suction passage 55 communicates with the bottom surface 52-3 of the annular recessed portion 52-2, and communicates with the support surface 52-1. In addition, when the cylindrical portion 53 of the support mount 50 is fitted with the receiving hole 25-1 of the rotary joint 25, the rear side of the suction passage 55 communicates with the suction passage 25-2 of the rotary joint 25.

[0035] The fixed mount 60 covers the cutting tool 21 supported by the support surface 52-1 of the support mount 50 from the front side, and is mounted to the outer periphery side of the boss portion 51, thereby fixing the cutting tool 21 to the support mount 50. The fixed mount 60 is formed with a mounting hole 61 on the inner side. The mounting hole 61 is fitted without a gap with the outer periphery of the boss portion 51 of the support mount 50.

[0036] The fixed mount 60 has a support surface 62 toward the rear side and an annular protruding portion 63. The support surface 62 is formed in a ring shape on the radially outer side of the surface of the fixed mount 60 toward the rear side, and supports the surface of the cutting tool 21 on the front side. The annular protruding portion 63 is formed to protrude toward the rear side than the support surface 62, and is fitted with the mounting hole 21-2 of the cutting tool 21 and the annular recessed portion 52-2 of the support mount 50, which surrounds the boss portion 51 when the fixed mount 60 is mounted to the support mount 50.

[0037] When the fixed mounting base 60 clamps the cutting tool 21 in the middle and is mounted on the support mounting base 50, the support surface 52-1 of the support mounting base 50 and the support surface 62 of the fixed mounting base 60 are opposite each other in the Y-axis direction, separated by the cutting tool 21. Similarly, when the fixed mounting base 60 is mounted on the support mounting base 50, the bottom surface 52-3 of the annular recess 52-2 of the support mounting base 50 and the convex surface 64 of the annular protrusion 63 of the fixed mounting base 60 are opposite each other in the Y-axis direction, forming a closed space 75.

[0038] A rotary joint 25 is located at the front of the spindle housing 23. A receiving hole 25-1 is formed on the inner side of the rotary joint 25. The receiving hole 25-1 engages with the cylindrical portion 53 of the support mounting base 50 from the front side. The rotary joint 25 extends radially outward to form a suction path 25-2. The outer periphery of the suction path 25-2 is connected to a suction source 79 that introduces negative pressure into the suction path 25-2. When the cylindrical portion 53 of the support mounting base 50 engages with the receiving hole 25-1 of the rotary joint 25, the inner periphery of the suction path 25-2 communicates with the suction path 55 of the support mounting base 50.

[0039] Mounting base 24 causes the negative pressure from rotary joint 25 to act on fixed mounting base 60 through suction path 55 and enclosed space 75 of support mounting base 50, attracting and fixing fixed mounting base 60 toward support mounting base 50 (rear side), thereby using support surface 52-1 of support mounting base 50 and support surface 62 of fixed mounting base 60 to clamp cutting tool 21.

[0040] Furthermore, the mounting base 24 is not limited to the above-described manner in this invention. In this invention, the mounting base 24 may, for example, be a fixed mounting base 60 covering the fastening nut 27 and the boss portion 51 of the supporting mounting base 50 from the front side. Alternatively, in this invention, the mounting base 24 may be a so-called hub tool base portion that uses a supporting mounting base 50 and a fixed mounting base 60 of the same shape as described above to clamp the base portion of the tool, which has a cutting edge 21-1 and a base provided on the inner circumference of the cutting edge 21-1. Furthermore, in this invention, the mounting base 24 is not limited to a so-called vacuum flange structure that uses negative pressure from the rotary joint 25 to fix the cutting tool 21 to the front end of the spindle 22; it may also be a method of fixing the cutting tool 21 to the front end of the spindle 22 simply by tightening a nut that engages with the external thread of the boss portion 51.

[0041] The cutting edge 21-1 of the cutting tool 21 is fixed to the mounting seat 24 in a manner that the aspect ratio (a dimensionless quantity) indicated by the value obtained by dividing the nose protrusion amount 71 by the blade thickness 72 is 30 or more. Here, the nose protrusion amount 71 is the length in the radial direction in which the cutting edge 21-1 of the cutting tool 21 protrudes from the outer periphery of the member that supports the cutting edge 21-1. In the case where the cutting tool 21 is a hubless cutting tool as in the present embodiment, as shown in FIG. 1, the nose protrusion amount 71 is the length in the radial direction from the outer periphery of the mounting seat 24 to the outer periphery of the cutting edge 21-1. In addition, the outer periphery of the mounting seat 24 refers to the outer periphery of the support surface 52-1 and the outer periphery of the support surface 62 among the outer peripheries on the outer circumferential side. In addition, in the case where the cutting tool 21 is a hub cutting tool, the nose protrusion amount 71 is the length in the radial direction from the outer periphery of the base to the outer periphery of the cutting edge 21-1. As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72. Figure 2 Figure 2 As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72.

[0042] As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72. Figure 3 As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72.

[0043] As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72. Figure 3 As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72.

[0044] As shown in FIG. 1, the blade thickness 72 is the thickness of the nose protruding portion of the cutting edge 21-1 of the cutting tool 21. In the present embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by making the unit of the nose protrusion amount 71 and the blade thickness 72 uniform and dividing the numerical value of the nose protrusion amount 71 by the numerical value of the blade thickness 72. Figure 3 ​As shown in FIG. 1, the nozzle 31 is provided from the outer periphery toward the outer peripheral surface of the cutting tool 21 in parallel with the side surface 21-3 of the cutting tool 21. This means that the cutting water is supplied toward the outer peripheral surface of the cutting edge 21-1 along a radial component 81 from the outer periphery of the cutting tool 21 toward the center of the cutting tool 21 or along a circumferential component 82 of the cutting tool 21 in the circumferential direction toward the outer peripheral surface of the cutting edge 21-1 of the cutting tool 21. Here, the supply direction 80 of the cutting water is perpendicular to the face of the supply port 31-1 of the nozzle 31. In addition, the supply direction 80 of the cutting water intersects the outer peripheral surface of the cutting edge 21-1 of the cutting tool 21. The nozzle 31 can change the supply direction 80 of the cutting water in a prescribed face in parallel with the side surface 21-3 of the cutting edge 21-1 of the cutting tool 21 by the turning portions 36, 37.

[0045] Figure 4 is a partial cross-sectional view of the nozzle 31 of Figure 3 Figure 4 is a cross section of the tip region of the nozzle 31 of Figure 3 Figure 5 is a cross-sectional view of the nozzle 31 of Figure 3 Figure 5 is a cross-sectional view of the tip region of the nozzle 31 of Figure 3 Figure 4 is a cross-sectional view along the V-V line of Figure 4 Figure 5 As shown in FIGS. 1 and 2, the nozzle 31 has a partition plate 38. The partition plate 38 is provided in the tip region near the supply port 31-1 of the nozzle 31 in the inside where the cutting water flows, and regulates the flow of the cutting water just before being supplied from the supply port 31-1 in the supply direction 80. The partition plate 38 is one or a plurality of thin plate-like members extending along the supply direction 80 of the cutting water. In the example shown in FIG. 2, the partition plate 38 is seven cylindrical members provided by being inserted into the inside of the nozzle 31 and extending along the supply direction 80 of the cutting water. Figure 5

[0046] Figure 6 is a view for explaining the positional relationship between the supply port 31-1 of the nozzle 31 and the cutting tool 21. Figure 3 Figure 6 is a view of the supply port 31-1 of the nozzle 31 as viewed from the cutting edge 21-1 of the cutting tool 21 in the direction opposite to the supply direction 80. As shown in FIG. 3, the supply port 31-1 of the nozzle 31 is positioned to cross the outer peripheral surface of the cutting edge 21-1 of the cutting tool 21 in the thickness direction as viewed from the supply direction 80, toward the outer peripheral surface of the cutting edge 21-1 of the cutting tool 21. Figure 6 Figure 6 ​​​​​​​​In the example shown, the supply port 31-1 of the nozzle 31 is disposed so as to intersect the central portion of the thickness direction of the peripheral surface of the cutting edge 21-1 of the cutting tool 21 in the direction 80 of supply.

[0047] The control unit 40 controls the operation of various structural elements of the cutting apparatus 1, and causes the cutting apparatus 1 to perform the cutting processing of the workpiece 100. The control unit 40 controls the rotation sections 36, 37, and controls the direction of the supply port 31-1 of the nozzle 31, that is, the direction 80 of supply of the cutting water based on the nozzle 31. The control unit 40 controls the supply amount and the supply pressure of the cutting water from the cutting water supply source 39, and thereby controls the supply amount and the supply pressure of the cutting water from the nozzles 31, 32.

[0048] In the present embodiment, the control unit 40 includes a computer system. The computer system included in the control unit 40 has an arithmetic processing device having a microprocessor like a CPU (Central Processing Unit), a storage device having a memory like a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 40 performs an arithmetic processing in accordance with a computer program stored in the storage device of the control unit 40, and outputs a control signal for controlling the cutting apparatus 1 to each structural element of the cutting apparatus 1 via the input / output interface device of the control unit 40.

[0049] Next, in the present specification, the cutting method of the workpiece of the embodiment is described with reference to the drawings. The cutting method of the workpiece of the embodiment is performed using the cutting apparatus 1 of the embodiment. Figure 7 is a cross-sectional view showing an example of the cutting method of the workpiece of the embodiment.

[0050] In the cutting method of the workpiece of the embodiment, as shown in Figure 7 the cutting water from the nozzle 31 is supplied from the peripheral surface to the peripheral surface of the cutting tool 21 in parallel with the side surface 21-3 of the cutting tool 21, and the cutting tool 21 in rotation is caused to cut the workpiece 100 held by the holding surface 11 of the chuck table 10 along the division predetermined line 102 (in Figure 7The cutting device 1 of the embodiment having the above structure provides the cutting water to the outer peripheral surface of the cutting tool 21 from the inside of the nozzle 31 in parallel with the side surface 21-3 of the cutting tool 21, and the partition plate 38 is provided in the inside of the nozzle 31 to regulate the cutting water provided from the nozzle 31, so that the vibration of the cutting tool 21 caused by the cutting water provided from the nozzle 31 can be reduced even in the condition in which the cutting tool 21 is easily vibrated in the past, which means that the thickness of the cutting tool 21 is 0.2 mm or less and the aspect ratio is 30 or more. Thus, the cutting device 1 of the embodiment has the effect of being able to suppress the meandering of the cutting groove 200 and the effect of being able to suppress the attachment of the saw marks to the side surface of the cut chip.

[0051] The cutting device 1 of the embodiment having the above structure provides the cutting water to the outer peripheral surface of the cutting tool 21 from the inside of the nozzle 31 in parallel with the side surface 21-3 of the cutting tool 21, and the partition plate 38 is provided in the inside of the nozzle 31 to regulate the cutting water provided from the nozzle 31, so that the vibration of the cutting tool 21 caused by the cutting water provided from the nozzle 31 can be reduced even in the condition in which the cutting tool 21 is easily vibrated in the past, which means that the thickness of the cutting tool 21 is 0.2 mm or less and the aspect ratio is 30 or more. Thus, the cutting device 1 of the embodiment has the effect of being able to suppress the meandering of the cutting groove 200 and the effect of being able to suppress the attachment of the saw marks to the side surface of the cut chip.

[0052] In addition, the cutting device 1 of the embodiment has the effect of being able to suppress the vibration of the cutting tool 21 caused by the cutting water provided from the nozzle 31 even in the condition in which the cutting tool 21 is more easily vibrated in the past, which means that the mounting seat 24 has the so-called vacuum flange structure in which the negative pressure from the rotary joint 25 is applied to the fixed mounting seat 60, and the cutting tool 21 is clamped by the support surface 52-1 of the support mounting seat 50 and the support surface 62 of the fixed mounting seat 60.

[0053] Next, the inventors of the present application confirmed the effects of the cutting device 1 of the embodiment and the cutting method of the workpiece. Figure 8 is a view for explaining the effects of the cutting device 1 of the embodiment and the cutting method of the workpiece. Figure 8 The results obtained when the effects were confirmed are summarized.

[0054] In Figure 8In the case where the cutting apparatus 1 of the embodiment or the cutting apparatus 1 of the embodiment from which the partition plate 38 inside the nozzle 31 was removed substantially corresponds to the conventional cutting apparatus, a metal tool having a thickness of 50 μm was used as the cutting tool 21, a resin binder dressing plate was used as the workpiece 100, the relative speed of the cutting tool 21 in rotation with respect to the workpiece 100, that is, the machining feed speed was set to 10 mm / s, and the aspect ratio indicated by the tool tip overhang amount 71 / tool thickness 72 of the cutting tool 21 was set to 25, 30, 40, and 45, respectively, and the results of the meandering evaluation of the cutting groove 200 formed by the cutting tool 21 were shown, respectively. In addition, the metal tool used as the cutting tool 21 was equal in ease of vibration to a tool containing abrasive grains used for cutting processing of a general wafer or the like. In addition, the machinability of the metal tool used as the workpiece 100 of the resin binder dressing plate was equal to the machinability of the tool containing abrasive grains used for the wafer of the general base material.

[0055] Figure 8 "the nozzle with the partition plate" indicates the results in the case where the cutting apparatus 1 of the embodiment having the nozzle 31 provided with the partition plate 38 was used, Figure 8 "the nozzle without the partition plate" indicates the results in the case where the cutting apparatus substantially corresponding to the conventional cutting apparatus in which the partition plate 38 inside the nozzle 31 was removed was used. Figure 8 "0" indicates the results in which the meandering of the cutting groove 200 was equal to or less than the prescribed threshold value, Figure 8 "X" indicates the results in which the meandering of the cutting groove 200 was greater than the prescribed threshold value. Here, in the case where the chip obtained by cutting processing of the resin binder dressing plate used as the workpiece 100 was temporarily treated as a product, the prescribed threshold value used in the meandering evaluation of the cutting groove 200 was determined in accordance with the current evaluation criterion for evaluating whether the cut surface was acceptable as a product or not.

[0056] As shown in Table 1, Figure 8 in the case where the cutting apparatus 1 of the embodiment was used, the meandering of the cutting groove 200 was equal to or less than the prescribed threshold value when the aspect ratio was 25, 30, and 40, but the meandering of the cutting groove 200 was greater than the prescribed threshold value when the aspect ratio was 45. On the other hand, in the case where the conventional cutting apparatus was used, the meandering of the cutting groove 200 was equal to or less than the prescribed threshold value when the aspect ratio was 25, but the meandering of the cutting groove 200 was greater than the prescribed threshold value when the aspect ratio was 30, 40, and 45.

[0057] Thus, it was found that, in the case where the cutting apparatus 1 of the embodiment was used, Figure 8In the illustrated embodiment, when the aspect ratio is 30 or more and 40 or less, by using the cutting apparatus 1 of the embodiment in which the nozzle 31 provided with the partition plate 38 is used, compared with the case in which the conventional cutting apparatus is used, the meandering of the cutting groove 200 can be sufficiently suppressed to a desired level. In addition, it is also known that, when the aspect ratio is 30 or more and 40 or less, by using the cutting apparatus 1 of the embodiment in which the nozzle 31 provided with the partition plate 38 is used, compared with the case in which the conventional cutting apparatus is used, the vibration of the cutting tool 21 can be sufficiently suppressed.

[0058] In addition, the present application is not limited to the above-described embodiments. That is, various modifications can be made within the scope of the gist of the present application and implemented.

Claims

1. A cutting apparatus having: a chuck table that holds a workpiece; a cutting unit that cuts the workpiece held by the chuck table with a cutting tool fixed to a front end of a main shaft via a mount; and a nozzle that supplies cutting water to the cutting tool, the cutting tool being fixed to the mount in a manner that a thickness is 0.2 mm or less and an aspect ratio indicated by a nose protrusion amount / thickness is 30 or more, characterized in that the nozzle supplies the cutting water from an outer periphery toward an outer peripheral surface of the cutting tool in parallel with a side surface of the cutting tool, the nozzle has a partition plate that regulates flow of the cutting water inside, the mount has: a support mount that is fitted to the front end of the main shaft and supports the cutting tool; and a fixed mount that fixes the cutting tool supported by the support mount to the support mount, the support mount has a suction passage inside that penetrates from a rear side, which is a side of a main shaft case that supports the main shaft so as to be rotatable, to a support surface opposite to the fixed mount, a negative pressure from a rotary joint provided in front of the main shaft case is made to act on the fixed mount via the suction passage of the support mount, the fixed mount is suction-fixed to the support surface of the support mount, the cutting tool is clamped by the support mount and the fixed mount, and the partition plate is provided at a front end of the nozzle.

2. The cutting apparatus according to claim 1, wherein the nozzle is cylindrical, the partition plate is seven cylindrical members provided inside the nozzle and extending in a direction in which the cutting water is supplied, and one of the seven cylindrical members is provided at a center of the nozzle and the remaining members are provided around the one member.

3. A cutting method of a workpiece using the cutting apparatus according to claim 1 or 2, characterized in that the cutting water from the nozzle is supplied from an outer periphery toward an outer peripheral surface of the cutting tool in parallel with a side surface of the cutting tool while the workpiece held by the chuck table is cut with the cutting tool, whereby the workpiece is cut while suppressing vibration of the cutting tool caused by the cutting water supplied from the nozzle. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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