A two-axis thin film sample stage for X-ray diffractometer

Abstract

The present invention discloses a two-axis thin film sample stage for an X-ray diffractometer, comprising an adapter, an electric lifting slide, an electric swing slide and a cushion block. The electric swing slide is connected to the X-ray diffractometer through the adapter, the electric lifting slide is connected to the top of the electric swing slide, the electric swing slide can drive the electric lifting slide to swing around the x-axis, and the cushion block is detachably connected to the top of the electric lifting slide, and the top of the cushion block is used to place the thin film sample. The present invention can achieve a height adjustment of thin film samples of different thicknesses through the electric lifting slide and the cushion block, so that the upper surface of the thin film sample can be located at the center point of the X-ray diffractometer, thereby meeting the requirements of the X-ray diffractometer for testing thin film samples of different thicknesses, and the electric swing slide can be used to adjust the inclination of the thin film sample so that the surface of the thin film sample is in a high-precision horizontal position, thereby enabling a general diffractometer to have the leveling, alignment and testing functions of the thin film sample.

Description

Technical Field

[0001] The invention relates to the technical field of sample stages, in particular to a two-axis thin film sample stage for an X-ray diffractometer. Background Art

[0002] X-ray diffractometer uses the principle of diffraction to accurately measure the crystal structure, texture and stress of materials, and accurately perform phase analysis, qualitative analysis and quantitative analysis. As the main means of characterizing the crystal structure of materials, it is widely used in scientific research, inspection and testing, and enterprise quality control of products. With the proposal of the Materials Genome Project, X-ray diffractometer has been used more and more as an efficient and non-destructive detection method.

[0003] At present, conventional X-ray diffractometers equipped in test centers are mainly used to test powder samples, and the diffraction pattern of powder samples is a series of concentric Debye rings, so only two-axis diffraction is required. However, for the testing of thin film samples, strict position alignment is required before testing. Since organic semiconductor films are very thin, a special thin film sample stage is required to accurately align the position of the sample so that the sample is in the light path and parallel to the light beam at 0°. This alignment is critical for subsequent tests and is related to the accuracy of the data. Generally, the direction perpendicular to the sample is defined as the z direction (i.e., the sample height direction), the direction along the X-ray incidence and reflection is defined as the x direction; the direction perpendicular to these two directions is the y direction; and the horizontal rotation of the sample (i.e., rotation around the z axis) is the φ direction; the rotation around the y axis is exactly equivalent to the change in the incident angle, defined as the ω direction; the rotation around the x axis is defined as the χ direction.

[0004] However, since powder samples do not need to be aligned, conventional powder diffractometers are only equipped with Y-axis and Z-axis, and can achieve Y-axis and Z-axis movement, which cannot meet the testing needs of thin film samples, especially the ability to adjust the flatness of thin film samples. Therefore, there is an urgent need for a sample stage that can adjust the surface displacement and flatness of thin film samples on a general powder diffractometer, so that general X-ray diffractometers can have the function of testing thin film samples of various thicknesses. Summary of the invention

[0005] The purpose of the present invention is to provide a two-axis thin film sample stage for an X-ray diffractometer to solve the problems existing in the above-mentioned prior art, so that the thin film sample stage can realize rotation around the x-axis and lifting movement in the z-axis, thereby being able to level thin film samples of different thicknesses.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a two-axis thin film sample stage for an X-ray diffractometer, comprising an adapter, an electric lifting slide, an electric swing slide and a cushion block, wherein the electric swing slide is connected to the X-ray diffractometer via the adapter, the electric lifting slide is connected above the electric swing slide, the electric swing slide can drive the electric lifting slide to swing around the x-axis direction, the cushion block is detachably connected above the electric lifting slide, and the cushion block is used to place a thin film sample.

[0008] Preferably, the cushion block can be replaced with models of different thicknesses according to different film sample thicknesses, and the cushion block is connected to the electric lifting slide by bolts.

[0009] Preferably, the thickness of the cushion block ranges from 1 mm to 20 mm, and the total height of the film sample and the electric lifting slide is a fixed value, so that the upper surface of the film sample is located at the center point of the X-ray diffractometer.

[0010] Preferably, the stroke of the electric lifting slide is 2-20 mm, and the movement accuracy is 0.005 mm.

[0011] Preferably, the swing angle range of the electric swing slide is ±15°.

[0012] Preferably, the adapter is an L-shaped plate and the two side plates are respectively connected to the electric swing slide and the goniometer of the X-ray diffractometer by bolts, so that the film sample, the light source and the detector are located in the same plane.

[0013] Compared with the prior art, the present invention has achieved the following technical effects:

[0014] The present invention can achieve height adjustment of thin film samples of different thicknesses through an electric lifting slide and a pad, so that the upper surface of the thin film sample can be located at the center point of a general X-ray diffractometer, thereby meeting the needs of a general X-ray diffractometer for testing thin film samples of different thicknesses. The electric swing slide can be used to adjust the inclination of the thin film sample so that the surface of the thin film sample is in a high-precision horizontal position, thereby enabling a general diffractometer to have the leveling, alignment and testing functions of the thin film sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic structural diagram of a two-axis thin film sample stage for an X-ray diffractometer of the present invention;

[0017] Figure 2 It is a structural schematic diagram of the electric lifting slide in the present invention;

[0018] Figure 3 It is a structural schematic diagram of the electric swing slide in the present invention;

[0019] Figure 4 It is a structural schematic diagram of the adapter in the present invention;

[0020] Figure 5 It is a schematic diagram of the layout of each axis of the present invention;

[0021] Among them: 1- pad, 2- electric lifting slide, 3- electric swing slide, 4- adapter. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] The purpose of the present invention is to provide a two-axis thin film sample stage for an X-ray diffractometer to solve the problems existing in the prior art, so that the thin film sample stage can realize rotation around the x-axis and lifting movement along the z-axis, thereby being able to level thin film samples of different thicknesses.

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] like Figures 1 to 5 As shown: This embodiment provides a two-axis thin film sample stage for an X-ray diffractometer, including an adapter 4, an electric lifting slide 2, an electric swing slide 3 and a pad 1. The electric swing slide 3 is connected to the X-ray diffractometer through the adapter 4, the electric lifting slide 2 is connected to the top of the electric swing slide 3, the electric swing slide 3 can drive the electric lifting slide 2 to swing around the x-axis direction, and the pad 1 is detachably connected to the top of the electric lifting slide 2, and the top of the pad 1 is used to place the thin film sample.

[0026] The pad 1 can be replaced with models of different thicknesses according to the thickness of different film samples. The pad 1 is connected to the electric lifting slide 2 by bolts. The thickness range of the pad 1 is 1mm-20mm. The total height of the film sample and the electric lifting slide 2 is a fixed value. In this embodiment, the total height is 80mm, ensuring that the upper surface of the film sample is located at the center point of the X-ray diffractometer (i.e., the incident point of the light source). For example, a pad 1 with a thickness of 16mm can be tested with a film sample of 0-8mm thickness; a pad 1 with a thickness of 8mm can be tested with a film sample of 8-16mm thickness; a pad 1 with a thickness of 2mm can be tested with a film sample of 16-22mm thickness.

[0027] The travel of the electric lifting slide 2 is 8 mm, the moving accuracy is 0.005 mm, and the height of the electric lifting slide in this embodiment varies between 56-64 mm. The swing angle range of the electric swing slide 3 is ±15°, and the minimum swing angle range is generally ±2°.

[0028] The adapter 4 is an L-shaped plate and the two side plates are connected to the electric swing slide 3 and the goniometer of the X-ray diffractometer by bolts, so that the film sample, the light source and the detector are located in the same plane.

[0029] The specific leveling process of the two-axis thin film sample stage for the X-ray diffractometer of this embodiment is as follows:

[0030] 1. Lower the height of the film sample to outside the optical path of the direct light from the light source, and use a detector to determine the zero angle corresponding to the direct light.

[0031] 2. When the film sample is horizontal (ω=χ=0°), fix the detector at 0°, and adjust the height of the film sample by the electric lifting slide 2. When the light intensity received by the detector shows a step-shaped curve, it indicates that the surface of the film sample is at the center of the light beam (i.e., half-light-cut state). If the initial state of the film sample is not horizontal, it is also necessary to keep the detector at 0° after this step, fix the height of the film sample, adjust the swing angle of the electric swing slide 3, and use the light source to scan in the ω direction (swing curve). The peak value detected by the detector corresponds to the angle when the film sample is completely parallel to the light beam (at this time, the light beam is least blocked), indicating that the surface of the film sample is at the center of the light beam, that is, the surface of the film sample is in a leveling state.

[0032] 3. Check again whether the surface of the thin film sample is in a leveled state: fix the height of the thin film sample, change the incident angle θ of the light source (0.2° can be selected based on empirical values), keep the detector at 2θ (0.4° can be selected based on empirical values) or other angles, and scan in the ω direction (rocking curve). The peak value corresponds to the angle between the sample and the light beam at exactly 0.2° or half of 2θ.

[0033] 4. Fix the height of the thin film sample, keep the incident angle θ (can be 0.2°) and the detector at 2θ (can be 0.4° or other symmetrical angles), and perform a horizontal scan in the x direction. The peak value corresponds to the angle when the thin film sample is completely parallel to the light beam.

[0034] It is worth noting that if the peak values ​​of the ω and χ scans are not at the zero point, then the height scan is actually not performed using the film sample plane but a section of the sample. After leveling, the film sample will not be in the center of the beam. Therefore, the above adjustment steps need to be repeated multiple times to ensure that the final sample is completely parallel to the beam and in the center of the beam.

[0035] The present specification uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A two-axis thin film sample stage for an X-ray diffractometer, characterized in that: It includes an adapter, an electric lifting slide, an electric swing slide and a pad. The electric swing slide is connected to the X-ray diffractometer through the adapter. The electric lifting slide is connected to the top of the electric swing slide. The electric swing slide can drive the electric lifting slide to swing around the x-axis direction. The swing angle range of the electric swing slide is ±15°. The pad is detachably connected to the top of the electric lifting slide. The top of the pad is used to place a thin film sample. The pad can be replaced with models of different thicknesses according to the thickness of the thin film sample. The pad is connected to the electric lifting slide by bolts. The total height of the thin film sample and the electric lifting slide is a fixed value, so that the upper surface of the thin film sample is located at the center point of the X-ray diffractometer.

2. The two-axis thin film sample stage for X-ray diffractometer according to claim 1, characterized in that: The thickness of the pad is in the range of 1 mm to 20 mm.

3. The two-axis thin film sample stage for X-ray diffractometer according to claim 1, characterized in that: The stroke of the electric lifting slide is 2-20mm, and the moving accuracy is 0.005mm.

4. The two-axis thin film sample stage for X-ray diffractometer according to claim 1, characterized in that: The adapter is an L-shaped plate and the two side plates are respectively connected to the electric swing slide and the goniometer of the X-ray diffractometer by bolts, so that the film sample, the light source and the detector are located in the same plane.

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