Vacuum light source

Abstract

The present disclosure provides a vacuum light source, characterized in that it includes: a light source for emitting light; a light guiding device for connecting with the light source, including: a light guide tube for providing a transmission channel for the light emitted by the light source; a sealing member arranged on the light guide tube for vacuum sealing connection; and a lens assembly sealed and connected with the light guide tube.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum light sources, and in particular to a vacuum light source. Background Art

[0002] Mass spectrometry is an analytical method that analyzes the sample by measuring the mass-to-charge ratio of the ions. The sample to be analyzed must first be ionized to form ions of various mass-to-charge ratios (M / Q), and then the electromagnetic principle is used to separate the ions according to different mass-to-charge ratios and measure the intensity of various ions to determine the molecular weight and structure of the substance being measured. The qualitative and quantitative results of the sample can be obtained through the mass spectrum and related information of the sample. Mass spectrometers are currently widely used in various fields such as chemistry, chemical engineering, materials, environment, geology, energy, medicine, criminal investigation, life sciences, sports medicine, etc., and are divided into isotope mass spectrometers, inorganic mass spectrometers and organic mass spectrometers according to their application range.

[0003] Ionization technology is the premise of mass spectrometry analysis. Samples can only be detected by mass spectrometry after being ionized. Ionization technology can be divided into hard ionization and soft ionization. Electron impact ionization (EI) used in traditional organic mass spectrometers is a hard ionization technology that ionizes the substance to be measured by electron bombardment or other means. However, due to the high electron energy, the ionization process is prone to produce more fragments and too many unnecessary ion peaks, which brings great difficulty to subsequent analysis and interferes with the accuracy of analysis. Therefore, soft ionization technologies such as chemical ionization (CI), electrospray ionization (ESI), and matrix-assisted laser desorption ionization (MALDI) have emerged. Compared with hard ionization, soft ionization produces very few fragment ions, which is suitable for samples that are easy to break or ionize, and has a great impact on the development of mass spectrometry. Most of the molecules and free radicals have an ionization energy of about 10eV, which is located in the vacuum ultraviolet band of light. Therefore, the molecules can be ionized near the ionization energy by absorbing the energy of a single vacuum ultraviolet photon. This process is a soft ionization process that does not require any matrix and can directly ionize almost all organic macromolecules without generating fragments and without sample pretreatment. Photoionization mass spectrometry can cover polar and non-polar, large and small mass organic molecules, and the spectra are clean and easy to analyze, so this technology is both universal.

[0004] Currently, commonly used photoionization sources include vacuum ultraviolet lamps, vacuum ultraviolet lasers, and synchrotron radiation sources. Among them, synchrotron radiation source is a high-performance strong light source that uses relativistic electrons (or positrons) to generate synchrotron radiation when they are deflected in a magnetic field. It has the advantages of wide band, high collimation, high brightness, and narrow pulses. However, its structure is extremely complex, large in size, and expensive. It is usually built and operated by the state as a national large scientific facility. Due to limited machine time, users must submit application materials according to research needs and make an appointment to use the beam line generated by the synchrotron radiation source. The current synchrotron radiation source cannot meet the increasing demand of scientific researchers for high-brightness deep ultraviolet photon sources.

[0005] Vacuum ultraviolet laser mainly uses laser to bombard samples to produce ions. The main laser light sources used are Nd:YAG laser (1064nm) and its quadrupled and quintuple frequency, ArF excimer laser (193nm). Vacuum ultraviolet laser has the characteristics of good monochromaticity, good directionality, and high brightness, but it is complicated to install and difficult to emit light. Regular maintenance is required, otherwise the optical path will be detuned. In particular, vacuum ultraviolet laser is generally generated outside a vacuum, and when it is introduced into a vacuum cavity, most of the light intensity will inevitably be lost.

[0006] In addition, vacuum ultraviolet light sources or other vacuum light sources are widely used in many fields such as production and scientific research. A reliable and efficient vacuum light source is needed. Summary of the invention

[0007] The present disclosure provides a vacuum light source, characterized in that it includes: a light source for emitting light; a light guiding device for connecting with the light source, including: a light guide tube for providing a transmission channel for the light emitted by the light source; a sealing member arranged on the light guide tube for vacuum sealing connection; and a lens assembly sealed and connected with the light guide tube.

[0008] In some embodiments, the lens assembly includes: a first lens sealed and connected to the light guide.

[0009] In some embodiments, the lens assembly further includes: an extension tube connected to the light guide tube; and a second lens connected to the extension tube, wherein the extension tube is disposed between the first lens and the second lens.

[0010] In some embodiments, the lens assembly further includes: a first sealing ring, disposed on the first lens, for sealingly connecting the first lens to the light guide; and a locking ring, for mounting the first lens on the light guide.

[0011] In some embodiments, the lens assembly further includes: a second sealing ring disposed on the second lens for sealingly connecting the second lens to the extension tube; and a sealing cover for mounting the second lens on the extension tube.

[0012] In some embodiments, the vacuum light source further includes an adjusting device connected to the light guiding device, and configured to adjust an extension distance and / or an extension angle of the light guiding device.

[0013] In some embodiments, the adjustment device includes: a fixed flange, fixedly connected to the seal; an adjusting flange, used for vacuum sealing connection; a bellows, fixedly and sealingly connected to the fixed flange and the adjusting flange and sleeved outside the light guide tube; at least one adjusting screw assembly, passed through the fixed flange and the adjusting flange, for adjusting the extension distance and / or extension angle of the light guide device.

[0014] In some embodiments, the adjustment flange includes a knife-edge structure for vacuum-tight connection, and at least one adjustment screw assembly is disposed outside the knife-edge structure.

[0015] In some embodiments, the vacuum light source further includes: a differential cavity disposed between the light source and the light guide device, including: a first window sealedly connected to the light source; and a second window sealedly connected to the light guide device.

[0016] In some embodiments, the differential chamber further includes: a third window for connecting a vacuum pump.

[0017] In some embodiments, the vacuum light source further comprises: a light transmission tube coupled to an output end of the light source and configured to transmit light to the lens assembly.

[0018] In some embodiments, the light source includes: a radio frequency focusing excitation device for forming a radio frequency electric field; and an ion holder for emitting ultraviolet light under the action of the radio frequency electric field.

[0019] In some embodiments, the ion holder includes an output cavity, and a terminal end of the output cavity is an output end of the ultraviolet light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 A schematic diagram showing the structure of an organic mass spectrometer deep ultraviolet light source according to some embodiments of the present disclosure;

[0022] Figure 2 A cross-sectional schematic diagram showing an organic mass spectrometry deep ultraviolet light source according to some embodiments of the present disclosure;

[0023] Figure 3 An exploded diagram showing the structure of an organic mass spectrometry deep ultraviolet light source according to some embodiments of the present disclosure;

[0024] Figure 4 A schematic structural diagram of a light guide device according to some embodiments of the present disclosure is shown;

[0025] Figure 5 A schematic diagram showing the structure of a lens assembly according to some embodiments of the present disclosure is shown;

[0026] Figure 6 A schematic diagram showing the structure of an ultraviolet light source according to some embodiments of the present disclosure is shown;

[0027] Figure 7 A schematic structural diagram of an ion holder according to some embodiments of the present disclosure is shown.

[0028] In the above drawings, the reference numerals represent:

[0029] 100 Vacuum light source

[0030] 110 light source

[0031] 111 RF Focusing Excitation Device

[0032] 112 Ion Holder

[0033] 1121 Holding cavity

[0034] 1122 retainer base

[0035] 1123 Gas Inlet

[0036] 120 light guide device

[0037] 121 light guide

[0038] 122 Seals

[0039] 123 lens assembly

[0040] 1231 First Lens

[0041] 1233 first sealing ring

[0042] 1235 First Teflon Ring

[0043] 1236 Transition Ring

[0044] 1237 locking ring

[0045] 1238 Sealing cover

[0046] 1234 extension tube

[0047] 130 Adjustment device

[0048] 131 fixed flange

[0049] 132 Adjustment flange

[0050] 133 bellows

[0051] 134 screw assembly

[0052] 135 Nut

[0053] 140 differential cavity

[0054] 141 First Window

[0055] 142 Second Window

[0056] 143 Third Window

[0057] 150 optical transmission tube DETAILED DESCRIPTION

[0058] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0059] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection", and "coupling" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0060] In some embodiments of the present disclosure, a vacuum light source is disclosed, comprising: a light source for emitting light; and a light guide device for connecting to the light source. The light guide device may include: a light guide tube for providing a transmission channel for the light emitted by the light source; a sealing member provided on the light guide tube for vacuum sealing connection; and a lens assembly for sealing connection to the light guide tube.

[0061] The vacuum light source according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the vacuum light source of some embodiments of the present disclosure can be an organic mass spectrometry deep ultraviolet light source, which can solve the problems of extremely complex structure, large size, and high cost of synchrotron radiation light sources in conventional technology. It can also solve the problems of complex installation of existing vacuum ultraviolet lasers, high difficulty in emitting light, and the need for regular maintenance, otherwise the optical path will be detuned, and vacuum ultraviolet lasers are generally generated outside the vacuum. In the current technology, when light emitted from outside the vacuum cavity is introduced into the vacuum cavity, most of the light intensity will inevitably be lost, but some embodiments of the present disclosure can efficiently conduct light and reduce losses. In some embodiments of the present disclosure, it is possible to separate the vacuum cavity and the light source to avoid mutual contamination and extend the working distance of the light source. In addition, focusing the light into a small spot and transmitting it into the ionization area can improve the utilization rate of photons, and the equipment is simple to install and easy to maintain.

[0062] Figure 1 A schematic structural diagram of a vacuum light source 100 according to some embodiments of the present disclosure is shown. Figure 2 A schematic cross-sectional view of a vacuum light source 100 according to some embodiments of the present disclosure is shown. Figure 3 The structure explosion diagram of the vacuum light source 100 according to some embodiments of the present disclosure is shown. Those skilled in the art will understand that the organic mass spectrometry deep ultraviolet light source is only exemplary. Similarly, the vacuum light source 100 can also be other types of vacuum light sources, such as vacuum visible light source, vacuum infrared light source, etc.

[0063] like Figures 1 to 3 As shown, the present disclosure provides a vacuum light source (eg, an organic mass spectrometry deep ultraviolet light source) 100 , including: a light source 110 for emitting light, and a light guiding device 120 for connecting with the light source 110 .

[0064] Figure 4 A schematic structural diagram of a light guide device 120 according to some embodiments of the present disclosure is shown.

[0065] like Figure 4 As shown, the light guide device 120 of the present disclosure includes a light guide tube 121, a seal 122, and a lens assembly 123. The light guide tube 121 can provide a transmission channel for the light emitted by the light source 110. The light guide tube 121 can be installed in the vacuum chamber so that the light emitted by the light source 110 is transmitted into the vacuum chamber. The seal 122 is arranged on the light guide tube and can be used for vacuum sealing connection. For example, the seal 122 can be sealed and connected to the vacuum chamber, and / or connected to the differential chamber 140 (such as Figure 1-3 As shown). The lens assembly 123 may be sealed and connected to the light guide. For example, the lens assembly 123 may be sealed and connected to one end of the light guide or sealed and connected to the inside of the light guide to isolate the vacuum atmosphere in the light guide from the vacuum atmosphere in the vacuum chamber.

[0066] Figure 5 A schematic structural diagram of a lens assembly 123 according to some embodiments of the present disclosure is shown.

[0067] like Figure 5 As shown, in some embodiments of the present disclosure, the lens assembly 123 may include a first lens 1231, and the first lens 1231 is sealed and connected to the light guide 121. Figure 5 As shown, the first lens 1231 is disposed at the left end of the light pipe 121. In some embodiments, the first lens 1231 is a plano-convex lens.

[0068] like Figure 4 As shown, in some embodiments of the present disclosure, the lens assembly 123 may further include an extension tube 1234 connected to the light guide tube 121 .

[0069] In some embodiments of the present disclosure, the lens assembly 123 may further include a second lens (not shown), which is connected to the extension tube 1234, for example, in a sealed connection or an unsealed connection. The extension tube 1234 may be disposed between the first lens 1231 and the second lens. The length of the extension tube 1234 may be used to adjust the distance between the first lens 1231 and the second lens. In some embodiments, the second lens is a plano-convex lens, and the first lens 1231 is disposed opposite to the planar surface of the second lens.

[0070] Those skilled in the art will appreciate that the lens assembly 123 may further include other devices to process the light emitted by the light source 110, such as focusing, collimating, filtering, etc. The other devices may include additional lenses, prisms, filters, switches, waveguides, and the like.

[0071] In some embodiments of the present disclosure, the lens assembly 123 may further include a first sealing ring 1233, which is disposed on the first lens 1231 and is used to seal the first lens 1231 to the light pipe 121. The lens assembly 123 may further include a locking ring 1237, which is used to mount the first lens on the light pipe.

[0072] like Figure 5As shown, the first sealing ring 1233, the first lens 1231, the first Teflon ring 1235, the first transition ring 1236 and the locking ring 1237 are sequentially installed at the left end of the light guide 121. The locking ring 1237 is provided with threads that can be matched and locked with the threads on the inner wall of the light guide 121 to fix the first lens 1231 on the light guide 121. The first sealing ring 1233 can be a high-temperature resistant rubber ring, which has a sealing function and can make the first lens 1231 and the light guide 121 sealed and connected, so as to completely separate the vacuum chamber from the light source 110 and prevent the light source 110 and the vacuum chamber from contaminating each other. The first lens 1231 is located between the first sealing ring 1233 and the first Teflon ring 1235, which can be used to prevent the surface of the first lens 1231 from being damaged, thereby affecting light transmission. The first transition ring 1236 is located between the first Teflon ring 1235 and the locking ring 1237, and can prevent the first Teflon ring 1235 from being damaged or shifted when locking.

[0073] In some embodiments of the present disclosure, the lens assembly 123 may further include a second sealing ring disposed on the second lens for sealingly connecting the second lens to the extension tube 1234. The lens assembly 123 may further include a sealing cover 1238 for mounting the second lens on the extension tube 1234.

[0074] like Figure 4 As shown, the sealing cover 1238 is installed at the end of the extension tube 1234, and the whole is in a frustum shape. The second lens is sealed and installed on the extension tube 1234 through the second sealing ring and the sealing cover 1238. The installation method is similar to the installation method of the first lens 1232, and it is not repeated here. The optical system composed of the first lens 1231 and the second lens can be used to reduce the light spot to meet different experimental requirements, and also improve the utilization efficiency of photons. Moreover, by changing the parameters of the first lens 1231 and the second lens, the working distance of the light source 110 can also be changed.

[0075] Those skilled in the art will appreciate that, although the sealed connection between the first lens 1231 and the second lens is used in the embodiment of the present disclosure to separate the light source 110 and the vacuum chamber, and to focus the light emitted by the light source 110, this is only one embodiment of the present disclosure, and in actual applications, the technical effect of separating the light source 110 and the vacuum chamber and focusing the light emitted by the light source 110 may be achieved by using only the first lens 1231.

[0076] Those skilled in the art can understand that, although the first sealing ring 1233 in the embodiment of the present disclosure is a high temperature resistant rubber ring, any sealing material can also be used. Accordingly, those skilled in the art can understand that, although the embodiment of the present disclosure adopts the installation method of sequentially installing the first sealing ring 1233, the first lens 1231, the first Teflon ring 1235, the first transition ring 1236 and the locking ring 1237 so that the first lens 1231 is sealed and connected to the light guide 121, other installation methods can also be used to seal and connect the first lens 1231 to the light guide 121.

[0077] In some embodiments, both ends of the extension tube 1234 have threads, one end matches with the threads of the light guide 121, and the other end matches with the threads of the sealing cover 1238, and is detachably installed between the light guide 121 and the sealing cover 1238. The length of the extension tube 1234 can be between 20 mm and 200 mm, and can achieve a variety of length changes between the first lens 1231 and the second lens to adapt to vacuum chambers of different volumes.

[0078] Those skilled in the art should understand that although in the embodiment of the present disclosure the extension tube 1234 is detachably connected to the light guide tube 121 and the sealing cover 1238 via threads, the extension tube 1234 may also be detachably connected to the light guide tube 121 and the sealing cover 1238 via plug-in, snap-on or other connection methods.

[0079] In some embodiments of the present disclosure, the vacuum light source 100 further includes an adjustment device 130. The adjustment device 130 is connected to the light guide device 120 and can be used to adjust the extension distance or extension angle of the light guide device 121. In the embodiments of the present disclosure, the distance that the end of the sealing cover 1238 extends forward in the vacuum chamber is the extension distance, and the angle of the light conducted by the light guide device 121 (for example, transmitted along the extension line direction of the end of the sealing cover 1238) in the vacuum chamber coordinate system is the extension angle.

[0080] The adjusting device 130 may include a fixed flange 131, an adjusting flange 132, and a bellows 133. The fixed flange 131 is fixedly connected to the sealing member 122. The adjusting flange 132 is used for vacuum sealing connection, for example, vacuum sealing connection with a vacuum chamber. The bellows 133 is fixedly and sealedly connected to the fixed flange 131 and the adjusting flange 132 and is sleeved outside the light guide 121.

[0081] The adjusting device 130 may include at least one adjusting screw assembly 134. The adjusting screw assembly 134 is disposed on the fixing flange 131 and the adjusting flange 132, and is used to adjust the extension distance and / or extension angle of the light guide device 120. Figure 1 or Figure 3As shown, the fixed flange 131 and the adjusting flange 132 are fixed together by at least three screw assemblies 134. For example, the screw assembly 134 may include a threaded screw, and the distance and angle between the fixed flange 131 and the adjusting flange 132 are adjusted by rotating the screw. For another example, the screw assembly 134 may include a screw and a nut 135 matched with the screw, and the distance and angle between the fixed flange 131 and the adjusting flange 132 are adjusted by rotating the nut. One end of the bellows 133 is fixedly connected to the fixed flange 131, and the other end is fixed to the adjusting flange 132. In some embodiments, the adjusting flange 132 may include a knife-edge structure for vacuum sealing connection. At least one adjusting screw assembly 134 may be arranged outside the knife-edge structure to keep it outside the vacuum chamber for easy adjustment during use.

[0082] like Figure 1-3 As shown, the adjustment device 130 is sleeved on the light guide 121, the light guide 121 is inserted into the bellows 133, the fixed flange 131 is fixed on the seal 122, and the adjustment flange 132 is sealed and connected to the window of the vacuum chamber. By loosening the three nuts on the adjustment flange 132, the fixed flange 131 and the light source 110 connected to the fixed flange 131 can be deflected or linearly moved, thereby adjusting the extension distance and extension angle of the vacuum light source 100. In the embodiment of the mass spectrometer, the extension distance and extension angle of the vacuum light source 100 can be adjusted by the adjustment device 130 to improve the mass spectrometry imaging effect.

[0083] Those skilled in the art will appreciate that, although three nuts and screws are used to fix the adjusting flange 132 and the fixing flange 131 in the embodiment of the present disclosure, two or more screw assemblies may be used to fix the adjusting flange 132 and the fixing flange 131 .

[0084] In some embodiments of the present disclosure, the vacuum light source 100 further includes a differential cavity 140 . The differential cavity 140 is disposed between the light source 110 and the light guide 120 , and includes a first window 141 sealedly connected to the light source 110 and a second window 142 sealedly connected to the light guide 120 .

[0085] In some embodiments of the present disclosure, the differential cavity 140 may further include a third window 143 , which may be used to connect a vacuum pump to ensure a vacuum atmosphere between the light source 110 and the differential cavity 140 , and between the seal 122 and the first lens 1231 .

[0086] Those skilled in the art may understand that, although the differential cavity 140 is included in the embodiment of the present disclosure, this is only an exemplary implementation of the present disclosure, and in actual applications, the light source 110 may be directly sealed and connected to the seal 122 of the light guide device 120 .

[0087] In some embodiments of the present disclosure, the vacuum light source 100 may further include a light transmission tube 150, which is coupled to the output end of the light source 110 and may be used to guide light to the lens assembly 123. In some embodiments, the light transmission tube 150 may include a waveguide, such as an optical fiber. The light transmission tube 150 may extend within the differential cavity 140, and may extend through the differential cavity 140 to enter the light guide 121, such as Figure 1-3 shown.

[0088] Figure 6 FIG. 1 is a schematic diagram showing the structure of the ultraviolet light source 110 according to some embodiments of the present disclosure. Figure 6 As shown, in some embodiments of the present disclosure, the light source 110 includes: a radio frequency focusing excitation device 111, which can be used to form a radio frequency electric field; and an ion holder 112, which can be used to emit ultraviolet light under the action of the radio frequency electric field.

[0089] Those skilled in the art will appreciate that although Figure 6 The shell of the RF focusing excitation device 111 shown in the figure is cylindrical, but the shell of the RF focusing excitation device 111 can also be a cylindrical structure with a cross-section of a square, rectangle or polygon.

[0090] Figure 7 FIG. 1 is a schematic diagram showing the structure of the ion holder 112 according to some embodiments of the present disclosure. Figure 7 As shown, in some embodiments of the present disclosure, the ion holder 112 includes a holding cavity 1121 , and the end of the holding cavity 1121 is the output end of the light source 110 .

[0091] The ion holder 112 also includes a holder base 1122 and a gas inlet 1123. One side of the holder base 1122 is connected to the RF focusing excitation device 111, and the other side is connected to the seal 122 or the first window of the differential cavity 140. The holding cavity 1121 is installed on the side connected to the RF focusing excitation device 111 and is placed in the RF focusing excitation device 111. The working gas enters the holding cavity 1121 from the gas inlet 1123 and is distributed along the optical transmission tube 150. The RF focusing excitation device 111 can form a high-density RF electric field in a local space. The working gas becomes plasma under the action of the RF focusing excitation device 111 and emits ultraviolet light.

[0092] The vacuum light source 100, such as the organic mass spectrometer deep ultraviolet light source 100, uses the radio frequency focusing excitation device 111 to perform plasma excitation to increase the light intensity, and extends the working distance of the light source 110 through the light transmission tube 150, and focuses the ultraviolet light into a small spot through the optical system composed of the first lens 1231 and the second lens to transmit it into the vacuum cavity, which can effectively improve the utilization efficiency of photons. The various structures of the vacuum light source 100 are all detachably connected to facilitate replacement and maintenance, and most of the structures are located outside the vacuum cavity, so there is no need to break the vacuum during maintenance, reducing maintenance time and cost.

[0093] It should be pointed out that the above are only preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum light source, characterized in that: include: A light source for emitting light; A light guide device, used to connect with the light source, comprising: A light guide pipe, used to provide a transmission channel for the light emitted by the light source; a sealing member, disposed on the light guide tube, for vacuum sealing connection; and A lens assembly is sealed and connected to the light guide, and the lens assembly comprises: A first lens, sealed and connected to the light guide; An extension tube connected to the light guide tube; a second lens connected to the extension tube, wherein the extension tube is disposed between the first lens and the second lens; An adjusting device, connected to the light guiding device, for adjusting the extension distance and / or extension angle of the light guiding device, the adjusting device comprising: A fixed flange, fixedly connected to the sealing member; An adjusting flange, used for vacuum-tight connection with the vacuum chamber; A bellows, fixedly and sealingly connected to the fixed flange and the adjustable flange and sleeved outside the light guide tube; At least one adjusting screw assembly is provided on the fixing flange and the adjusting flange, and is used for adjusting the extension distance and / or extension angle of the light guide device.

2. The vacuum light source according to claim 1, characterized in that: The lens assembly further comprises: A first sealing ring, disposed on the first lens, for sealingly connecting the first lens to the light guide; and A locking ring is used to mount the first lens on the light guide tube.

3. The vacuum light source according to claim 1, characterized in that: The lens assembly further comprises: A second sealing ring, disposed on the second lens, for sealingly connecting the second lens to the extension tube; and A sealing cover is used to mount the second lens on the extension tube.

4. The vacuum light source according to claim 1, characterized in that: The adjusting flange comprises a knife-edge structure for vacuum-tight connection, and the at least one adjusting screw assembly is arranged outside the knife-edge structure.

5. The vacuum light source according to any one of claims 1 to 4, characterized in that: Also includes: A differential cavity, arranged between the light source and the light guide device, comprises: a first window, sealed and connected to the light source; as well as The second window is sealed and connected to the light guiding device.

6. The vacuum light source according to claim 5, characterized in that The differential cavity further comprises: The third window is used to connect the vacuum pump.

7. The vacuum light source according to claim 5, characterized in that Also includes: A light transmission tube is coupled to the output end of the light source and is used to transmit light to the lens assembly.

8. The vacuum light source according to any one of claims 1 to 4, characterized in that: The light source comprises: A radio frequency focusing excitation device, used for forming a radio frequency electric field; and The ion holder is used to emit ultraviolet light under the action of the radio frequency electric field.

9. The vacuum light source according to claim 8, characterized in that The ion holder comprises an output cavity, and the end of the output cavity is the output end of the ultraviolet light source.

Images