actuating body

By alternating layers of electromechanical materials with alternating polarization directions, the problems of existing piezoelectric actuators requiring high voltage and being unable to independently control directional deformation are solved. Independent or superimposed longitudinal and lateral deformation under low voltage is achieved, improving the driving efficiency and flexibility of the actuator.

CN114127968BActive Publication Date: 2025-11-11PHYSIK INSTRUMENTE (PI) GMBH & CO KG
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Patent Information

Application Number
CN202080051427.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-05-16
Filing Date
2020-05-15
Publication Date
2025-11-11
Estimated Expiration
2040-05-15

AI Technical Summary

Technical Problem

Existing piezoelectric actuators require high control voltages to achieve deformation of the longitudinal and shear actuator segments, and cannot independently control deformation in the stacking and lateral directions.

Method used

By employing electromechanical material layers with alternating polarization directions, longitudinal or transverse deformation can be achieved by applying voltage to layers with different polarization directions, or deformation in multiple directions can be controlled simultaneously. Independent longitudinal and shear actuator segments can be deformed using low voltage.

Benefits of technology

It enables independent control of the longitudinal or lateral deformation of the actuator under low voltage, or simultaneous superposition of deformations, reducing thermal load and simplifying electrical connections, thereby improving the flexibility of the actuator and the transmission of driving force.

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Abstract

The present invention relates to an actuator (1) in the form of a stack (2), wherein the stack (2) includes at least a plurality of first paired layers (10) and a plurality of second paired layers (20), the first paired layers (10) having two layers (11, 12) of polarized electromechanical material, the second paired layers (20) having two layers (21, 22) of polarized electromechanical material, and the first and second paired layers (10, 20) are arranged one after another in the stacking direction, wherein in each paired layer (10, 20), when viewed from the stacking direction, Each terminal surface is provided with a conductive layer (3) for connection to at least one first polarity connection electrode (5), and in each case, a conductive layer (4) for connection to at least one second polarity connection electrode (6) is provided between the two layers of each pair of layers, and the polarization directions (P) of the electromechanical materials of the two layers of each pair of layers are arranged opposite to each other, and in each case, the polarization direction of the electromechanical materials of the layers of each pair of layers is arranged perpendicular to the polarization direction of the electromechanical materials of the layers of the adjacent pairs of layers.
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Description

Technical Field

[0001] The present invention relates to an actuator according to claims 1 to 7, a drive unit having the actuator according to claims 8 and 9, a motor having the drive unit according to claim 10, and a method for controlling the actuator according to claims 11 to 13. Background Technology

[0002] US 2014 / 0001923 A1 discloses a piezoelectric actuator having multiple layers stacked on top of each other, wherein adjacent piezoelectric material layers include polarization directions arranged perpendicular to each other. Electrical application of electrodes disposed on the upper and lower end faces of the stack causes a hybrid deformation of the actuator, consisting of a longitudinal component along the stack direction of the actuator and a shear component transverse to the stack direction of the actuator. In other words, upon activation, viewed from the stack direction, deformation of two terminal electrodes is simultaneously induced in the actuator along and transverse to the stack direction, resulting in an overall superimposed deformation. Here, layers made of piezoelectric material whose polarization directions extend along or parallel to the stack direction are responsible for deformation along the stack direction, thus forming longitudinal actuator segments, while layers of piezoelectric material whose polarization directions extend transversely or perpendicularly to the stack direction are responsible for deformation transversely to the stack direction, thus forming shear actuator segments.

[0003] The drawback of the actuator known from US 2014 / 0001923 A1 is that it requires a relatively high control voltage to induce the desired deformation of the longitudinal actuator segment and shear actuator segment in individual applications where the actuator is stacked at a given height. Furthermore, the actuator cannot generate deformation independently of each other along the stacking direction and transversely to the stacking direction. Summary of the Invention

[0004] Therefore, the object of the present invention is to provide an actuator that can produce usable deformation only along the stacking direction or only transverse to the stacking direction, even when a low voltage is applied to it, or additionally deform both along the stacking direction and transverse to the stacking direction simultaneously or in combination.

[0005] This objective is achieved by the actuator according to claim 1, wherein the subsequent dependent claims describe at least a useful improvement.

[0006] Therefore, the actuator has a stacked substrate comprising at least a plurality of first and second pairs of layers (first and second paired layers) of polarized electromechanical materials. Optionally, a plurality of third pairs of layers of electromechanical materials (third paired layers) may be present. The corresponding paired layers are arranged in an alternating sequence, one after the other or one on top of the other, in the stacking direction or longitudinal direction of the actuator, wherein on each paired layer, viewed from the stacking direction, a conductive layer for connection to at least one first polarity connection electrode is provided on each terminal surface.

[0007] In each case, a conductive layer for connecting to a second polarity electrode is provided between the layers of the paired layers. The polarization directions P of the two layers of the paired layers are opposite to each other or antiparallel, and in each case, the polarization directions P of the layers of the paired layers are arranged perpendicular to the polarization directions of the adjacent layers.

[0008] Due to the corresponding arrangement of the layers of polarized electromechanical materials and the arrangement of conductive layers within and between these pairs of layers, it is possible to control only one pair of layers (meaning, for example, only the first pair of layers) or to control two or three pairs of layers simultaneously, in which sufficient deformation of the actuator can be achieved using a low control voltage.

[0009] Based on this, this advantage allows the polarization direction of the electromechanical material in the first pair of layers to be arranged substantially parallel to the stacking direction of the actuator. In this case, when a voltage is applied to the conductive layer disposed on or within the first pair of layers, deformation along the stacking direction or longitudinal extension direction of the actuator can be achieved. The term "substantially" as used above and below should always mean that a deviation of up to 10% from a particular direction or orientation (i.e., generally parallel, perpendicular, or transverse) will be considered to be within the scope of the invention.

[0010] Furthermore, it is advantageous that the polarization directions of the electromechanical materials of the second pair of layers and the optional third pair of layers are arranged substantially perpendicular to the stacking direction of the actuator, wherein the polarization direction of the electromechanical materials of the second pair of layers differs from the polarization direction of the electromechanical materials of the optional third pair of layers and is arranged substantially perpendicular to each other. In this way, by applying a voltage to the conductive layer disposed on or within the second pair of layers, deformation can be achieved transversely to the stacking direction or the longitudinal extension direction of the actuator, wherein, in the presence of an additional optional third pair of layers, transverse deformation in two different directions, preferably perpendicular to each other, is possible.

[0011] Advantageously, all conductive layers provided for connection to the first polarity electrode extend to one identical side surface of the stack, and all conductive layers provided for connection to the second polarity electrode extend to another identical side surface of the stack. This achieves a relatively simple electrical connection between all conductive layers and the individual connection electrodes.

[0012] Due to the alternating sequence of different pairs of layers in the stacking direction (including but not limited to the following order or sequence: first pair / second pair / first pair / second pair, etc.; first pair / second pair / third pair / first pair / second pair / third pair, etc.; first pair / second pair / first pair / third pair, etc.), especially when only one set of pairs of layers is controlled, the heat generated can be effectively transferred to adjacent and uncontrolled pairs of layers, thereby keeping the thermal load of the actuator low, especially at high frequencies or when higher voltages are applied. The alternating sequence of pairs of layers also has advantages when all sets of pairs of layers are controlled simultaneously, because the deformation directions of adjacent pairs of layers are arranged perpendicular to each other, thereby reducing local stress at the interface between two adjacent pairs of layers.

[0013] Advantageously, the first pair of layers is designed to deform along the stacking direction and form longitudinal actuator segments of the actuator when a voltage signal is applied to the relevant conductive layer, and the second pair of layers and optionally the third pair of layers are designed to deform transversely to the stacking direction and respectively form shear actuator segments of the actuator when a voltage signal is applied to the relevant conductive layer. Thus, the movement of the actuator in two or three different and mutually perpendicular directions can be independent of each other, and the deformation can be superimposed accordingly when different pairs of layers are electrically controlled in parallel or simultaneously.

[0014] The present invention also relates to a drive unit having at least one of the aforementioned actuators, wherein, viewed from the stacking direction, the actuator is connected to the end of an elongated and elastically deformable support assembly via one of its terminal surfaces, and wherein a friction component is arranged on the terminal surface opposite to its stacking direction. Such a drive unit is relatively easy to manufacture and inexpensive, and the friction component can be flexibly pressed against the component to be driven in a relatively simple manner with sufficient force.

[0015] Advantageously, the friction assembly has two spaced-apart protrusions provided for frictional contact with the component to be driven. Because the friction assembly is designed this way, a greater driving force can be transmitted to the component to be driven. Furthermore, the space between the two protrusions forms a reservoir for wear that occurs during operation of the actuator unit. However, it is also conceivable that the friction assembly may include only one protrusion, or more than two spaced-apart sections.

[0016] The present invention also relates to a motor having at least one of the above-described drive units, comprising an actuator according to the invention and a component to be driven by the drive unit, wherein the drive unit is connected to the base of the motor via an end section of a support assembly, such that a friction component elastically presses against the component to be driven.

[0017] The present invention also relates to a method for operating the aforementioned actuator, wherein only the longitudinal actuator segment or only the shear actuator segment is controlled by a voltage signal. As a result, the actuator can undergo a single longitudinal deformation along its stacking direction, or a single shear deformation in a direction transverse to its stacking direction, or separate shear deformation in two different directions transverse to its stacking direction.

[0018] As an alternative to the aforementioned control method, it is advantageous that the voltage signal can be applied to some or all of the longitudinal actuator segments in each case, and that some or all of the shear actuator segments are acted upon individually, resulting in superposition of longitudinal and lateral deformations of the actuator. In this regard, it is advantageous that the corresponding voltage signal includes a sawtooth shape, for example, to achieve inertial or stick-slip drive, or that the corresponding voltage signal is sinusoidal to achieve quasi-continuous drive.

[0019] Finally, the present invention relates to a computer program product designed to create a digital image (digital twin) of the aforementioned actuator, drive unit, or motor. Attached Figure Description

[0020] The advantages and conveniences of the invention will become clearer from the following description of preferred exemplary embodiments with reference to the accompanying drawings, wherein the same reference numerals refer to the same parts in different drawings, which illustrate:

[0021] Figure 1A Side view of the actuator according to the present invention; Figure 1B :according to Figure 1A A perspective view of the actuator.

[0022] Figure 2 : Block diagram related to possible electrical control of the actuator according to Figure 1.

[0023] Figures 3A to 3D According to Figure 1 or Figure 2 The deformation states of the actuators, which are simulated by finite element method (FEM) calculations due to the different electrical controls of the longitudinal actuator portion and the shear actuator portion.

[0024] Figure 4 A block diagram relating to possible electrical control of an actuator according to the invention having three paired layers.

[0025] Figure 5 : A drive unit having an actuator according to the invention.

[0026] Figure 6 : based on Figure 5 The motor of the drive unit.

[0027] Figures 7A to 7C : has such Figure 5 The control voltage and deformation of the corresponding controlled drive unit of the actuator according to the invention are shown, wherein the deformation is simulated by calculation per FEM.

[0028] Figures 8A to 8C : based on Figure 5 The control voltage and deformation of the corresponding controlled drive unit of the actuator according to the invention, wherein the deformation is simulated by calculation per FEM. Detailed Implementation

[0029] Figure 1A A side view of an embodiment of an actuator 1 according to the present invention is shown, the actuator being in the form of a stack 2 comprising multiple layers 11, 12, 21, 22 of polarized piezoelectric ceramic material stacked on top of one another; Figure 1B A corresponding perspective view of the actuator is shown. Two adjacent layers 11 and 12 or 21 and 22 that cooperate with each other form pairs of layers 10 and 20, respectively, wherein a conductive layer 3 is arranged on the two end faces of each pair of layers 10 and 20 when viewed from the stacking direction, wherein the conductive layer 3 is provided for electrical connection to a first polarity connection electrode not shown in FIG1, and wherein a conductive layer 4 is arranged between two adjacent layers of the pair of layers, wherein the conductive layer 4 is provided for electrical connection to a second polarity connection electrode not shown in FIG1.

[0030] All conductive layers 3 provided for connection to the first polarity electrode extend on one side to the side surface 9 of the stack 2 of the actuator 1 and protrude beyond the opposite side surface 8, thus enabling particularly simple electrical connection to the first polarity electrode. Similarly, all conductive layers 4 provided for connection to the second polarity electrode extend to the side surface 8 and simultaneously protrude beyond the opposite side surface 9, thus enabling equally simple electrical connection to the second polarity electrode. In addition to the above arrangement of conductive layers 3 and 4, it is conceivable to provide them with a so-called interdigital arrangement, where each individual electrical layer extends only to one of the side surfaces 8 and 9 and is spaced apart from the corresponding opposite side surface for electrical insulation.

[0031] It is conceivable that, in all cases, an electrically insulating layer or a separating layer is arranged between the conductive layers 3 of adjacent paired layers, so that adjacent paired layers are not directly adjacent to each other. Furthermore, it is conceivable that the conductive layers 3 of adjacent or adjacent paired layers are implemented integrally or as a whole, so that adjacent paired layers share each other's conductive layers 3.

[0032] The polarization directions P of the electromechanical materials in the paired layers—that is, layers 11 and 12 of paired layer 10 and layers 21 and 22 of paired layer 20—are arranged in opposite and antiparallel directions, respectively. Furthermore, the polarization directions of the electromechanical materials in each paired layer are perpendicular to the polarization directions of the electromechanical materials in each adjacent or adjacent paired layer. In other words, the polarization directions of adjacent or adjacent paired layers are perpendicular to each other.

[0033] In this regard, the polarization direction P of the paired layers 10 is set or parallel to the stacking direction of the actuator 1, while the polarization direction P of the paired layers 20 is arranged perpendicular or transverse to the stacking direction of the actuator. By applying a voltage to the electrical layers 3 and 4 assigned to the paired layers 10, deformation can be induced primarily in or along the stacking direction of the actuator in each of these paired layers, thereby forming a longitudinal actuator portion. On the other hand, by applying a voltage to the electrical layers 3 and 4 assigned to the paired layers 20, deformation can be induced primarily transversely to the stacking direction of the actuator in each case, thereby forming a shear actuator portion. Only the longitudinal actuator portion or only a portion of the longitudinal actuator portion can be electrically controlled, or only the shear actuator portion or only a portion of the shear actuator portion can be electrically controlled. Furthermore, joint or simultaneous control of the longitudinal actuator portion and the shear actuator portion can be achieved.

[0034] Figure 2 This is a block diagram relating to possible electrical control of the actuator as shown in Figure 1. All conductive layers 3 are connected to a first polarity connecting electrode 5, wherein the connecting electrode 5 is connected to a corresponding pole of the first voltage source 7. The other pole of the first voltage source 7 is connected to a connecting electrode 6, and the components of the connecting electrode 6 are in electrical contact with all conductive layers 4 of the paired layers 10, that is, the polarization direction of the electromechanical materials of each layer 11 and 12 in the paired layers is arranged in or along the stacking direction of the actuator to form a longitudinal actuator portion.

[0035] Figure 2 The block diagram also shows a second voltage source 7', whose first electrode is also connected to the connecting electrode 5, and whose second electrode is connected to the connecting electrode 6', wherein the connecting electrode 6' is in contact with all the conductive layers 4 of the paired layers 11, that is, the paired layers having the polarization directions of the electromechanical materials of each layer 21 and 22 are arranged laterally or perpendicular to the stacking direction of the actuator and form a shear actuator portion.

[0036] Therefore, according to Figure 2 The block diagram shows that, for the desired deformation of each actuator, only the longitudinal actuator segment, only the shear actuator segment, or both the longitudinal actuator segment and the shear actuator segment are jointly controlled, as shown by... Figures 3A to 3D The simulation of the FEM calculation implementation is shown.

[0037] Here, Figure 3A The diagram shows the state in its initial state, i.e., in a non-electrical control state, according to Figure 1 and... Figure 2 The basic FEM model of the actuator, and Figure 3B The deformation is shown when the shear actuator section of the actuator is controlled individually. Figure 3C The deformation calculated when the longitudinal actuator segment is controlled individually is shown. Figure 3D Ultimately, it represents the calculated deformation of both the longitudinal actuator segment and the shear actuator segment of the actuator, which are controlled simultaneously.

[0038] Figure 4 The block diagram and based on Figure 2 The only difference in the block diagram is that, according to Figure 4 The actuator upon which the block diagram is based includes additional paired layers 30, such as paired layers 20, forming a shear actuator segment, wherein, in contrast, the polarization directions of the piezoelectric materials in layers 31 and 32 are arranged perpendicular to both the polarization directions of the piezoelectric materials in layers 11 and 12 and the polarization directions of the piezoelectric materials in layers 21 and 22. Accordingly, according to Figure 4 The block diagram also illustrates different or extended types of control due to different actuator structures, wherein an additional third voltage source 7" is connected to the connecting electrode 5 with one pole and to the connecting electrode 6" with the other pole, and wherein the connecting electrode 6" itself is connected to all conductive layers 4 of the paired layers 30, thereby enabling individual control of the additional shear actuator segment. Similar to... Figure 2 The control options for the actuators can enable control of only the longitudinal actuator segments of the paired layers 10, or only the shear actuator segments of the paired layers 20, or only the shear actuator segments of the paired layers 30, wherein it should be understood that variations of control in all possible combinations are also possible.

[0039] Figure 5 An embodiment of a drive unit 100 according to the invention, based on FIG1, is shown. The actuator 1 is connected to an end section of an elongated, flat, and elastically deformable steel support assembly 102 via a flat terminal surface relative to its stacking direction. The support assembly may also be made of other metals, such as titanium or phosphor bronze. It is also conceivable to use a support assembly made of fiber-filled plastic.

[0040] Friction components 104 are arranged on the corresponding opposite terminal surfaces of the actuator. The friction components 104 include two protrusions 106, which are spaced apart from each other and arranged in parallel and are provided for frictional contact with the component to be driven.

[0041] refer to Figure 6 , for having Figure 5The motor 200 of the drive unit shown is an embodiment. Here, the support assembly is connected to the base assembly 202 via an end section. A driveable component 206 that can move or be displaced linearly is provided on the base assembly 202. A friction or friction guide 204 is attached to the driveable component 206 and makes frictional contact with the friction component 104.

[0042] Figures 7A to 7C 8A to 8C show the use Figure 2 The circuit shown is based on Figure 5 The corresponding controlled drive unit is simulated by FEM calculation of control voltage and deformation. Figure 7A The sawtooth-shaped voltage of voltage source 7 shown in the above figure is applied to the longitudinal actuator section, while Figure 7A The serrated voltage of voltage source 7', as shown in the figure below, is applied to the shear actuator segment. Therefore, the voltages from both voltage sources 7 and 7' are simultaneously applied to the actuator or the corresponding actuator segment, causing deformation through superposition. Figure 7B and 7C The image shows the two maximum states of the deformation.

[0043] Therefore, the actuator extends to the right in its corresponding longitudinal direction ( Figure 7B ), and expands to the left in a superimposed manner during the associated backward movement accompanying the contraction of the actuator in its stacking direction ( Figure 7C Simultaneously, it deforms once. In other words, the actuator expands (while shearing to the right). Figure 7B ), while shearing to the left, contracting ( Figure 7C This periodic, repetitive deformation results in the movement of the actuator, which can be used to drive the component to be driven. Utilizing according to... Figure 7B Simultaneous linear expansion and rightward shearing allow the component to be driven, positioned opposite the actuator, to be pulled to the right due to linear expansion after contact with the actuator. On the other hand, according to... Figure 7C During the longitudinal contraction and simultaneous leftward shearing of the actuator, the contact between the driven component and the actuator can be canceled out, so that the shearing of the actuator in the direction opposite to the driving direction is not transmitted to the driving direction, and thus the rearward movement of the actuator does not affect the driven component.

[0044] Figures 8A to 8C The voltage signals applied to the longitudinal actuator section and the shear actuator section, and the corresponding maximum deformation of the actuator according to the invention, are shown for achieving a leftward driving motion opposite to that in FIG7, i.e., a motion of the component to be driven relative to the actuator. Figure 8A The above figure shows the voltage signal applied to the longitudinal actuator section and... Figure 7A The voltage signal in the above diagram is the same. Conversely, according to... Figure 8AThe voltage signal applied to the shear actuator section in the figure below is... Figure 7A The difference between those in the following figures is that a steeper rising edge is followed by a gentler falling edge. This results in slower shear deformation along the driving direction in the shear actuator segment (according to...). Figure 8B ) and faster shear deformation opposite to the driving direction (according to Figure 8C ).

[0045] Regarding respectively based on Figure 7A and Figure 8A The voltage signals, the relatively gentle and steep edges of the two related sawtooth voltages V1 and V2, are always time-consistent. This means that the slower expansion or shearing in the direction corresponding to the driving direction of the component to be driven occurs simultaneously or concurrently in time (driving phase), and the faster contraction or shearing in the direction opposite to the driving direction of the component to be driven occurs simultaneously or concurrently in time (retraction phase). In the driving phase, the actuator or friction component disposed on the actuator comes into contact with the component to be driven due to the expansion of the longitudinal actuator segment, thereby transmitting the simultaneously occurring shearing motion to the driving direction of the component to be driven. The retraction phase should proceed as quickly as possible to enable the start of the next driving phase. Therefore, based on the corresponding voltage signals, rapid contraction of the longitudinal actuator segment and equally rapid shear deformation in the opposite direction of the driving direction occur here.

[0046] Figure Labels

[0047] 1. Actuator

[0048] 2 stacking

[0049] 3 (Conductive layer of actuator 1)

[0050] 4 (Conductive layer of actuator 1)

[0051] 5. Connect the electrode (first polarity)

[0052] 6,6',6" Connect the electrodes (second polarity)

[0053] 7,7',7" Voltage source

[0054] 8 (Side surface of actuator 1)

[0055] 9 (Side surface of actuator 1)

[0056] 10 Paired Layers

[0057] Layers 11 and 12 (paired layers 10)

[0058] 20 paired layers

[0059] Layers 21 and 22 (paired layers 20)

[0060] 30 paired layers

[0061] Layers 31 and 32 (paired layers 30)

[0062] 100 drive units

[0063] 102 (support assembly of drive unit 100)

[0064] 104 (Friction assembly of drive unit 100)

[0065] 106 (Friction assembly 104 protrusion)

[0066] 200 motors

[0067] 202 (Motor 200) Base Assembly

[0068] 204 (motor 200) friction guide rail

[0069] 206 (Motor 200) Components to be driven

[0070] P (polarization direction of electromechanical materials in layers 11, 12, 21, 22, 31, 32)

Claims

1. An actuator (1) in a stacked form, wherein the stack (2) comprises at least a plurality of first paired layers (10) and a plurality of second paired layers (20), the first paired layers (10) having two layers (11, 12) of polarized electromechanical material, the second paired layers (20) having two layers (21, 22) of polarized electromechanical material, and the first and second paired layers (10, 20) are arranged one after another in an alternating sequence in the stacking direction, wherein in each paired layer (10, 20), when viewed from the stacking direction, its Each terminal surface is provided with a conductive layer (3) for connection to at least one first polarity connection electrode (5), and in each case, a conductive layer (4) for connection to at least one second polarity connection electrode (6) is provided between the two layers of each pair of layers, and the polarization directions (P) of the electromechanical materials of the two layers of each pair of layers are arranged opposite to each other, and in each case, the polarization directions of the electromechanical materials of the layers of each pair of layers are arranged perpendicular to the polarization directions of the electromechanical materials of the layers of the adjacent pairs of layers. Its features The polarization direction of the electromechanical material of the layers (11, 12) of each first paired layer (10) is substantially parallel to the stacking direction of the actuator.

2. The actuator according to claim 1, characterized in that... The polarization direction of the electromechanical material of the layers (21, 22) of each second paired layer (20) is substantially perpendicular to the stacking direction of the actuator.

3. The actuator according to claim 1, characterized in that, The first pair of layers (10) is designed to deform along the stacking direction when a voltage signal is applied to the associated conductive layers (3, 4) to form a longitudinal actuator segment of the actuator, and the second pair of layers (20) is designed to deform transversely to the stacking direction when a voltage signal is applied to the associated conductive layers (3, 4) to form a shear actuator segment of the actuator.

4. The actuator according to claim 1 or 2, characterized in that... The stack (2) includes a plurality of third paired layers (30), each third paired layer (30) having two layers (31, 32) of polarized electromechanical material. In each third paired layer (30), viewed from the stacking direction, a conductive layer (3) for connection to at least one first polarity connection electrode (5) is provided on each terminal surface. In each case, a conductive layer (4) for connection to at least one second polarity connection electrode (6) is provided between the two layers (31, 32) of each paired layer (30). The polarization directions (P) of the electromechanical materials of the two layers (31, 32) of the paired layer (30) are arranged opposite to each other, and the polarization directions of the electromechanical materials of the layers (31, 32) of each third paired layer (30) are substantially perpendicular to the stacking direction of the actuator and substantially perpendicular to the polarization directions of the electromechanical materials of the layers (11, 12) of each first paired layer (10) and substantially perpendicular to the polarization directions of the electromechanical materials of the layers (21, 22) of each second paired layer (20).

5. The actuator according to claim 4, characterized in that, The three paired layers (10, 20, 30) are arranged one after another in an alternating order in the stacking direction.

6. The actuator according to claim 4, characterized in that, The first pair of layers (10) is designed to deform along the stacking direction when a voltage signal is applied to the associated conductive layers (3, 4) to form a longitudinal actuator segment of the actuator, and the second pair of layers (20) and the third pair of layers (30) are designed to deform transversely to the stacking direction when a voltage signal is applied to the associated conductive layers (3, 4) to form a shear actuator segment of the actuator, respectively.

7. The actuator according to claim 4, characterized in that, The conductive layers (3) of the adjacent paired layers (10, 20, 30) are formed as a single unit.

8. A drive unit (100) having an actuator according to any one of claims 1 to 7, characterized in that, The actuator (1) is connected to the end section of an elongated and elastically deformable surface support assembly (102) via a terminal surface relative to its stacking direction, and a friction assembly (104) is arranged on the opposite terminal surface relative to its stacking direction.

9. The driving unit (100) according to claim 8, characterized in that... The friction assembly (104) has two protrusions (106) spaced apart from each other and arranged in parallel, wherein the protrusions (106) are provided for frictional contact with the assembly to be driven.

10. A motor (200) comprising at least one drive unit (100) according to claim 8 or 9 and a driven component (206), characterized in that, The drive unit (100) is connected to the base (202) of the motor (200) via the end section of the support assembly (102), so that the friction assembly (104) elastically pushes against the component (206) to be driven.

11. A method for operating an actuator according to claim 6, characterized in that... The voltage signal applies only to the longitudinal actuator section or only to the shear actuator section, or the voltage signal applies to both the longitudinal actuator section and the shear actuator section simultaneously.

12. The method according to claim 11, characterized in that, Each of the voltage signals has a sawtooth shape.

13. The method according to claim 11, characterized in that... The voltage signals described are sinusoidal.

14. A computer program product comprising a computer program designed to provide a digital image of an actuator (1) according to any one of claims 1 to 7, a drive unit (100) according to any one of claims 8 and 9, or a motor (200) according to claim 10.

Citation Information

Patent Citations

  • Composite polarization type piezoelectric actuator

    US20140001923A1

  • Piezoelectric motor

    US5027028A