Substrate conveying apparatus and substrate conveying method

Abstract

The present application relates to a position determination device, a substrate carrying device, a position determination method, and a substrate carrying method. The substrate carrying device includes a robot that holds a substrate, a support member that moves the robot in a horizontal plane, a rotation member, and a moving member. The substrate carrying device also includes a detector that has a detection area, and a carrying control unit that controls movement of the support member, rotation of the rotation member, and movement of the moving member when carrying the substrate. The carrying control unit controls each of the members in such a manner that a plurality of portions in a peripheral end portion of the substrate held by the robot are sequentially positioned in the detection area of the detector. The positions of the plurality of portions in the robot are calculated based on output signals of the detector. The position of the substrate in the robot is determined based on the calculated positions of the plurality of portions.

Description

Technical Field

[0001] The present invention relates to a position determination device for determining the position of a substrate supported by a support portion in a support portion, a substrate conveying device having said device, a position determination method, and a substrate conveying method using said method. Background Technology

[0002] In the past, substrate processing equipment was used to perform various processing on various substrates such as FPD (Flat Panel Display) substrates, semiconductor substrates, optical disc substrates, magnetic disk substrates, magneto-optical disk substrates, photomask substrates, ceramic substrates, or solar cell substrates used in liquid crystal display devices or organic EL (Electro Luminescence) display devices.

[0003] In a substrate processing apparatus, a substrate is processed continuously, for example, in multiple processing units. Therefore, a substrate conveying device is provided in the substrate processing apparatus to transport the substrate between the multiple processing units.

[0004] For example, in the substrate conveying apparatus described in Japanese Patent Application Publication No. 2018-133415, a substrate to be processed is held by a holding part, and the substrate is conveyed by moving the holding part. When conveying the substrate from a first position to a second position, the first to fifth portions of the outer peripheral end of the substrate held by the holding part are detected, assuming the substrate is received by the holding part at the first position. Based on this detection, the positions of the first to fifth portions in the holding part are calculated respectively. Based on the calculated positions of the first to fifth portions, the position of the substrate in the holding part is determined. The movement of the holding part is controlled based on the determined substrate position in a manner that accurately conveys the substrate to the second position. Summary of the Invention

[0005] To reduce the cost of the substrate processing apparatus, it is desirable to simplify the configuration used to determine the substrate position (hereinafter referred to as the position determination device). Furthermore, to further reduce the cost of the substrate processing apparatus, it is desirable to reduce the number of parts in the position determination device.

[0006] The purpose of this invention is to provide a position determination device that enables low-cost substrate processing apparatus, a substrate conveying apparatus having the device, a position determination method, and a substrate conveying method using the method.

[0007] (1) A position determination device according to one aspect of the present invention is a position determination device for determining the position of a substrate supported by a support portion, comprising: a first detector having a first detection area; a relative movement portion configured to move the substrate supported by the support portion relative to the first detector; and a control portion for controlling the relative movement portion; and the control portion comprising: a relative movement control portion for controlling the relative movement portion such that a plurality of portions of the outer peripheral end of the substrate are sequentially located in the first detection area; a partial position calculation portion for calculating the positions of the plurality of portions in the support portion based on the detection signal of the first detector; and a position determination portion for determining the position of the substrate in the support portion based on the positions of the plurality of portions calculated by the partial position calculation portion.

[0008] In the position determination device, the substrate supported by the support portion is moved relative to the first detector such that multiple portions of the outer peripheral end of the substrate are sequentially located in the first detection area. Based on the detection signal of the first detector, the positions of the multiple portions in the support portion are calculated. Based on the calculated positions of the multiple portions, the position of the substrate in the support portion is determined.

[0009] According to the position determination device, multiple portions of the substrate supported by the support are detected using a first detector. Therefore, it is unnecessary to prepare multiple detectors corresponding to each of the multiple portions of the substrate in order to detect their positions. Thus, the configuration of the position determination device is simplified. Furthermore, the number of parts in the position determination device is reduced. As a result, the substrate processing apparatus is reduced in cost.

[0010] (2) Alternatively, the support portion may include: a transport holding portion configured to hold and move the substrate; and a relative moving portion configured to move the substrate held by the transport holding portion relative to the first detector by moving the transport holding portion.

[0011] At this time, the state of the substrate can be maintained by the conveying and holding part, and the position of the substrate in the conveying and holding part can be controlled.

[0012] (3) Alternatively, the position determination device may further include: a second detector having a second detection area; and a relative movement unit configured to move the substrate held by the transport and holding unit relative to the second detector by moving the transport and holding unit; a relative movement control unit controlling the relative movement unit such that the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area; and a partial position calculation unit calculating the positions of multiple portions in the transport and holding unit based on the detection signals of the first and second detectors respectively.

[0013] At this time, the first and second portions of the substrate are detected using the first detector, and the third and fourth portions of the substrate are detected using the second detector.

[0014] (4) Alternatively, the first and second detectors are arranged such that the first detection area and the second detection area are arranged in the first direction with a spacing smaller than the diameter of the substrate; the relative movement control unit controls the relative movement unit by moving the transport holding unit in the second direction intersecting the first direction, so that the substrate traverses the first and second detection areas.

[0015] At this time, as the substrate moves in the second direction, the first and second portions of the substrate pass through the first detection region in approximately the same timing, while the third and fourth portions of the substrate pass through the second detection region in sequence. Therefore, the detection time required for the first to fourth portions of the substrate can be shortened.

[0016] (5) Alternatively, the relative moving part can be configured such that the first detector can be moved relative to the substrate supported by the support part by moving the first detector.

[0017] At this time, by moving the first detector, the position of the substrate in the support can be determined without moving the support.

[0018] (6) Alternatively, the position determination device may further include: a second detector having a second detection area; and a relative movement unit configured to move the second detector relative to the substrate supported by the support unit by moving the second detector; a relative movement control unit controlling the relative movement unit such that the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area; and a partial position calculation unit calculating the positions of multiple portions in the support unit based on the detection signals of the first and second detectors respectively.

[0019] At this time, the first and second portions of the substrate are detected using the first detector, and the third and fourth portions of the substrate are detected using the second detector.

[0020] (7) Alternatively, the first and second detectors are arranged such that the first detection area and the second detection area are arranged in the first direction with a spacing smaller than the diameter of the substrate; the relative movement control unit controls the relative movement unit by moving the first and second detectors in the second direction that intersects the first direction, so that the first and second detection areas traverse the substrate.

[0021] At this time, by moving the first and second detectors in the second direction, the first and second portions of the substrate are passed sequentially in the first detection region at approximately the same timing, and the third and fourth portions of the substrate are passed sequentially in the second detection region. Therefore, the detection time required for the first to fourth portions of the substrate can be shortened.

[0022] (8) A substrate conveying apparatus according to another aspect of the present invention includes the position determination device.

[0023] In the substrate conveying device, the substrate can be conveyed based on the determination result of the position determination device. Therefore, the substrate can be conveyed with high precision.

[0024] (9) A position determination method according to another aspect of the present invention is a position determination method for determining the position of a substrate supported by a support portion, comprising the following steps: preparing a first detector having a first detection area; moving the substrate supported by the support portion relative to the first detector such that a plurality of portions of the outer peripheral end of the substrate supported by the support portion are sequentially located in the first detection area; calculating the positions of the plurality of portions in the support portion based on the detection signal of the first detector; and determining the position of the substrate in the support portion based on the positions of the plurality of portions calculated by the calculation step.

[0025] In the position determination method, the substrate supported by the support portion is moved relative to the first detector such that multiple portions of the outer peripheral end of the substrate are sequentially located in the first detection area. Based on the detection signal from the first detector, the positions of the multiple portions in the support portion are calculated. Based on the calculated positions of the multiple portions, the position of the substrate in the support portion is determined.

[0026] According to the position determination method, multiple portions of the substrate supported by the support are detected using a first detector. Therefore, it is unnecessary to prepare multiple detectors corresponding to each of the multiple portions of the substrate in order to detect their positions. Thus, the configuration of the position determination device is simplified. Furthermore, the number of parts in the position determination device is reduced. As a result, the substrate processing apparatus is reduced in cost.

[0027] (10) Alternatively, the support may include a transport holding portion configured to hold and move the substrate; and the step of moving the substrate supported by the support relative to the first detector may include moving the substrate held by the transport holding portion relative to the first detector by moving the transport holding portion.

[0028] At this time, the state of the substrate can be maintained by the conveying and holding part, and the position of the substrate in the conveying and holding part can be controlled.

[0029] (11) Alternatively, the position determination method may also include the step of preparing a second detector having a second detection area; and the operation of moving the substrate held by the transport holding part relative to the first detector includes: moving the substrate held by the transport holding part relative to the first and second detectors in such a way that the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area; the step of calculating the positions of the multiple portions includes the following steps: calculating the positions of the multiple portions in the transport holding part based on the detection signals of the first and second detectors.

[0030] At this time, the first and second portions of the substrate are detected using the first detector, and the third and fourth portions of the substrate are detected using the second detector.

[0031] (12) Alternatively, the first and second detectors are arranged in a manner such that the first detection area and the second detection area are spaced apart in the first direction at a distance smaller than the diameter of the substrate; and the operation of moving the substrate held by the transport holding part relative to the first and second detectors includes: moving the transport holding part in a second direction that intersects the first direction in such a manner that the substrate traverses the first and second detection areas.

[0032] At this time, as the substrate moves in the second direction, the first and second portions of the substrate pass through the first detection region in approximately the same timing, while the third and fourth portions of the substrate pass through the second detection region in sequence. Therefore, the detection time required for the first to fourth portions of the substrate can be shortened.

[0033] (13) Alternatively, the step of moving the substrate supported by the support relative to the first detector may include: moving the first detector relative to the substrate supported by the support by moving the first detector.

[0034] At this time, by moving the first detector, the position of the substrate in the support can be determined without moving the support.

[0035] (14) Alternatively, the position determination method may also include the step of preparing a second detector having a second detection area; and the operation of moving the first detector relative to the substrate supported by the support includes: moving the first and second detectors relative to the substrate supported by the support in such a way that the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area; the step of calculating the positions of the multiple portions includes the following steps: calculating the positions of the multiple portions in the support based on the detection signals of the first and second detectors.

[0036] At this time, the first and second portions of the substrate are detected using the first detector, and the third and fourth portions of the substrate are detected using the second detector.

[0037] (15) Alternatively, the first and second detectors are arranged with the first detection area and the second detection area in the first direction at a spacing smaller than the diameter of the substrate; and the operation of moving the first and second detectors relative to the substrate supported by the support includes: moving the first and second detectors in a second direction that intersects the first direction in such a way that the first and second detection areas traverse the substrate.

[0038] At this time, by moving the first and second detectors in the second direction, the first and second portions of the substrate are passed sequentially in the first detection region at approximately the same timing, and the third and fourth portions of the substrate are passed sequentially in the second detection region. Therefore, the detection time required for the first to fourth portions of the substrate can be shortened.

[0039] (16) A substrate transport method according to another aspect of the present invention includes the position determination method.

[0040] In the substrate conveying device, the substrate can be conveyed based on the determination result of the position determination device. Therefore, the substrate can be conveyed with high precision. Attached Figure Description

[0041] Figure 1 This is a top view of the substrate conveying apparatus of the first embodiment.

[0042] Figure 2 yes Figure 1 Side view of the substrate conveying device.

[0043] Figure 3 yes Figure 1 Front view of the substrate conveying device.

[0044] Figure 4 This is a schematic diagram illustrating an example of a method for detecting multiple portions of the outer peripheral end of a substrate held by a robotic arm.

[0045] Figure 5 This is a block diagram showing the configuration of the control system of the substrate transport apparatus of the first embodiment.

[0046] Figure 6 This is a top view showing an example of the XY coordinate system defined by the robot.

[0047] Figure 7 It is a top view showing the positional relationship between the substrate on the robot arm and the virtual circle when at least one of the multiple offsets exceeds a threshold.

[0048] Figure 8 It is a top view showing the positional relationship between the substrate on the robot arm and the virtual circle when at least one of the multiple offsets exceeds a threshold.

[0049] Figure 9 It is a top view showing the positional relationship between the substrate on the robot arm and the virtual circle when at least one of the multiple offsets exceeds a threshold.

[0050] Figure 10 It is a top view showing the positional relationship between the substrate on the robot arm and the virtual circle when at least one of the multiple offsets exceeds a threshold.

[0051] Figure 11This is a block diagram showing the functional structure of the conveying control unit.

[0052] Figure 12 This is a flowchart illustrating the basic transport operations of a substrate transport device on a substrate.

[0053] Figure 13 This is a flowchart illustrating the basic transport operations of a substrate transport device on a substrate.

[0054] Figure 14 This is a top view of the substrate conveying apparatus of the second embodiment.

[0055] Figure 15 yes Figure 14 Side view of the substrate conveying device.

[0056] Figure 16 This is a top view showing multiple portions of the substrate being detected in the substrate transport apparatus of the second embodiment.

[0057] Figure 17 This is a top view of the substrate conveying apparatus of the third embodiment.

[0058] Figure 18 This is a block diagram showing the configuration of the control system of the substrate transport apparatus in the third embodiment.

[0059] Figure 19 This is a schematic diagram illustrating an example of a method for detecting more than five portions of the outer peripheral end of a substrate W held by a robotic arm using two detectors.

[0060] Figure 20 This is a side view of the substrate conveying apparatus according to the fourth embodiment.

[0061] Figure 21 This is a top view of the substrate conveying apparatus according to the fifth embodiment.

[0062] Figure 22 yes Figure 21 Side view of the substrate conveying device.

[0063] Figure 23 yes Figure 21 Front view of the substrate conveying device.

[0064] Figure 24 This is a schematic diagram illustrating an example of a method for detecting multiple portions of the outer peripheral end of a substrate supported by a substrate support.

[0065] Figure 25 This is a schematic block diagram showing the overall configuration of a substrate processing apparatus having any one of the embodiments of the substrate conveying apparatus from the first to the fifth. Detailed Implementation

[0066] Hereinafter, a position determination apparatus, a substrate conveying apparatus, a position determination method, and a substrate conveying method according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the following description, substrate means substrate for FPD (Flat Panel Display), semiconductor substrate, optical disc substrate, magnetic disk substrate, magneto-optical disk substrate, photomask substrate, ceramic substrate, or solar cell substrate, etc., used in liquid crystal display devices or organic EL (Electro Luminescence) display devices.

[0067] Furthermore, in the embodiments shown below, at least a portion of the substrate used has a rounded outer peripheral end. Specifically, a positioning groove is formed in the substrate, and the outer peripheral end of the substrate, excluding the groove, has a rounded shape. Alternatively, an orientation plane may be formed on the substrate instead of a groove.

[0068] [1] First Embodiment

[0069] (1) Configuration of the substrate transport apparatus of the first embodiment

[0070] Figure 1 This is a top view of the substrate conveying apparatus according to the first embodiment. Figure 2 yes Figure 1 Side view of the substrate transport device 500. Figure 3 yes Figure 1 Front view of the substrate transport device 500. Figures 1-3 The substrate conveying device 500 shown includes a moving part 510. Figure 2 and Figure 3 ), rotating component 520, two robotic arms H1 and H2, and multiple detectors SE1 and SE2 ( Figure 1 In this embodiment, two detectors, SE1 and SE2, are provided. The moving part 510 is configured to move horizontally along a guide rail (not shown).

[0071] On the moving part 510, a generally cuboid-shaped rotating part 520 is rotatably mounted about an axis in the vertical direction. On the rotating part 520, robotic arms H1 and H2 are supported by support parts 521 and 522, respectively. Robotic arms H1 and H2 are configured to move forward and backward along the long side of the rotating part 520. In this embodiment, robotic arm H2 is located above the upper surface of the rotating part 520, and robotic arm H1 is located above robotic arm H2.

[0072] Robotic arms H1 and H2 each include a guide section Ha and an arm section Hb. For example... Figure 1 As shown, the guide portion Ha has a roughly V-shaped flat plate shape, and the arm portion Hb has a rectangular flat plate shape extending in one direction. The guide portion Ha is arranged such that it branches into two from one end of the arm portion Hb.

[0073] On the upper surface of the guide portion Ha, multiple (three in this example) adsorption portions sm are respectively disposed on multiple (three in this example) spaced apart from each other. Each adsorption portion sm is connected to a suction system (not shown). A substrate W is placed on the multiple adsorption portions sm. In this state, multiple portions of the substrate W on the multiple adsorption portions sm are adsorbed onto the multiple adsorption portions sm by the suction system.

[0074] Two detectors, SE1 and SE2, are transmittance photoelectric sensors, each consisting of a light-emitting section Se and a light-receiving section Sr. The two light-emitting sections Se are mounted on the upper surface of the rotating component 520 at a common position along its long side and spaced apart along its short side (width direction). The two light-receiving sections Sr are connected via a support member 530 (…). Figure 2 and Figure 3 It is arranged above the rotating component 520, facing each of the two projection units Se. Additionally, Figure 1 The diagram of support component 530 is omitted.

[0075] Light is emitted upwards from each projection section Se. Each receiving section Sr receives the light emitted from the opposing projection section Se as return light. Thus, in each detector SE1, SE2, as... Figure 2 and Figure 3 As shown by the shaded lines, a detection region DA extending in the vertical direction is formed between the light-emitting portion Se and the light-receiving portion Sr, which are facing each other. The two detection regions DA of detectors SE1 and SE2 are separated by a distance smaller than the diameter of the substrate W and larger than the length of the circumferential groove of the substrate W. In addition, the diameter of the substrate W in this embodiment is, for example, 300 mm, and the circumferential length of the groove of the substrate W is, for example, 2.73 mm.

[0076] When substrate W is present between the light-projecting part Se and the light-receiving part Sr of detectors SE1 and SE2, light emitted from the light-projecting part Se does not reach the light-receiving part Sr. This state where light does not reach the light-receiving part Sr is called the non-incident state. When substrate W is not present between the light-projecting part Se and the light-receiving part Sr of detectors SE1 and SE5, light emitted from the light-projecting part Se reaches the light-receiving part Sr. This state where light reaches the light-receiving part Sr is called the incident state. The light-receiving part Sr outputs detection signals indicating the incident and non-incident states.

[0077] The boundary position on the rotating part 520 where the robotic arms H1 and H2 can retract in the forward and backward direction is called the initial forward and backward position (home position). In addition, the position of the robotic arms H1 and H2 when the guide part Ha is located away from the rotating part 520 when viewed from above in the forward and backward direction is called the forward position.

[0078] When the robotic arm H1, which holds the substrate W, moves backward from the forward position to the initial forward / backward position, the positions of the two portions of the outer periphery of the substrate W can be calculated based on the timing of the change in the detection signals of detectors SE1 and SE2 from the light-incident state to the non-light-incident state. Furthermore, when the robotic arm H1, which holds the substrate W, moves backward from the forward position to the initial forward / backward position, the positions of the other two portions of the outer periphery of the substrate W can be calculated based on the timing of the change in the detection signals of detectors SE1 and SE2 from the non-light-incident state to the light-incident state.

[0079] Specifically, the position of the first portion of the outer periphery of the substrate W relative to the robot arm H1 can be calculated based on the relative position of the robot arm H1 and the detector SE1 when the detection signal of the detector SE1 changes from an incident light state to a non-incident light state. The position of the second portion of the outer periphery of the substrate W relative to the robot arm H1 can be calculated based on the relative position of the robot arm H1 and the detector SE2 when the detection signal of the detector SE2 changes from an incident light state to a non-incident light state. The position of the third portion of the outer periphery of the substrate W relative to the robot arm H1 can be calculated based on the relative position of the robot arm H1 and the detector SE1 when the detection signal of the detector SE1 changes from a non-incident light state to an incident light state. The position of the fourth portion of the outer periphery of the substrate W relative to the robot arm H1 can be calculated based on the relative position of the robot arm H1 and the detector SE2 when the detection signal of the detector SE2 changes from a non-incident light state to an incident light state.

[0080] In the following description, the situation in which the detection signals of detectors SE1 and SE2 change from the light-incident state to the non-light-incident state or vice versa, through the outer peripheral end of substrate W across the detection area DA of detectors SE1 and SE2, is referred to as appropriate detection.

[0081] Figure 4 This is a schematic diagram illustrating an example of a method for detecting multiple portions of the outer peripheral end of a substrate W held by a robotic arm H1. Figure 4 In the middle, the following was omitted. Figure 1 The illustration shows the robot arm H2, support member 522, and support member 530 in the substrate transfer device 500. Furthermore, Figure 4 The image shows four top views arranged from left to right, illustrating the state of the substrate transport device 500 at four points in time as the robotic arm H1 holding the substrate W moves backward from the forward position to the initial forward / backward position.

[0082] like Figure 4 As shown in the top view on the left, when the robot arm H1 moves backward from the forward position to the initial forward / backward position, the substrate W is located outside the rotating component 520 and does not overlap with detectors SE1 and SE2. Therefore, the detection signals from detectors SE1 and SE2 indicate the incident light state.

[0083] Next, as Figure 4 As shown in the second top view from the left, if the robotic arm H1 retracts a certain distance, then the two portions of the outer periphery of the substrate W overlap with detectors SE1 and SE2 when viewed from above. That is, the two portions of the outer periphery of the substrate W traverse the two detection regions DA of detectors SE1 and SE2. Figure 3 At this time, the detection signals of detectors SE1 and SE2 change from the incident light state to the non-incident light state. Based on this, the positions of the two portions of the outer periphery of the substrate W held by the robot arm H1 can be calculated according to the detection timing of the change from the incident light state to the non-incident light state of the detection signals of detectors SE1 and SE2. The portion of the outer periphery of the substrate W detected based on the detection signal of detector SE1 is referred to as portion p1. Furthermore, the portion of the outer periphery of the substrate W detected based on the detection signal of detector SE2 is referred to as portion p2.

[0084] Next, as Figure 4 As shown in the third top view from the left, if the robotic arm H1 retracts a certain distance further, the other two portions of the outer periphery of the substrate W overlap with detectors SE1 and SE2 when viewed from above. That is, the other two portions of the outer periphery of the substrate W traverse the two detection areas DA of detectors SE1 and SE2. Figure 3 At this time, the detection signals of detectors SE1 and SE2 change from a non-light-incident state to a light-incident state. Based on the timing of the change in the detection signals of detectors SE1 and SE2 from a non-light-incident state to a light-incident state, the positions of the two portions of the outer periphery of the substrate W held by the robot arm H1 can be calculated. The portion of the outer periphery of the substrate W detected based on the detection signal of detector SE1 is referred to as portion p3. Furthermore, the portion of the outer periphery of the substrate W detected based on the detection signal of detector SE2 is referred to as portion p4.

[0085] After that, as Figure 4 As shown in the top view on the right, the robotic arm H1 has reached its initial forward / backward position. At this time, the substrate W does not overlap with detectors SE1 and SE2 when viewed from above. Therefore, the detection signals of detectors SE1 and SE2 are maintained in the incident light state.

[0086] Alternatively, in the example described above, the positions of the four portions of the outer periphery of the substrate W held by the robot arm H1 can be calculated based on the timing of the change in the detection signals of detectors SE1 and SE2 from the light-incident state to the non-light-incident state as the robot arm H1 holding the substrate W moves forward on the rotating component 520 from the initial forward / backward position, and the timing of the change in the detection signals of detectors SE1 and SE2 from the non-light-incident state to the light-incident state. At this time, as the state of the substrate transport device 500 changes from... Figure 4The top view from the right end changes to the top view from the left end, detecting multiple portions p1 to p4 at the outer periphery of the substrate W. Alternatively, when the substrate W is held by the robot arm H2, the positions of the four portions at the outer periphery of the substrate W can be detected using the same method as in the example of robot arm H1.

[0087] In each of the robotic arms H1 and H2, a reference position (hereinafter referred to as the first reference position) is predetermined where the center of the substrate W to be held should be located. The first reference position of each robotic arm H1 and H2 is, for example, the center position of the three adsorption parts sm.

[0088] Given the radius of the substrate W, if the positions of the four portions p1 to p4 of the substrate W held by each of the robotic arms H1 and H2 can be calculated, then the position of the substrate W in the robotic arms can be determined. In this way, it is possible to calculate how much the center of the substrate W actually held by each of the robotic arms H1 and H2 has shifted from the first reference position.

[0089] (2) Configuration of the control system of the substrate transport device 500

[0090] Figure 5 This is a block diagram showing the configuration of the control system of the substrate transport apparatus 500 according to the first embodiment. (As shown) Figure 5 As shown, the substrate conveying device 500 includes a vertical drive motor 511, a vertical encoder 512, a horizontal drive motor 513, a horizontal encoder 514, a rotation drive motor 515, a rotation encoder 516, an upper robot arm forward / backward drive motor 525, an upper robot arm encoder 526, a lower robot arm forward / backward drive motor 527, a lower robot arm encoder 528, multiple detectors SE1 and SE2, a conveying control unit 550, and an operation unit 529.

[0091] The up-down drive motor 511, under the control of the conveying control unit 550, moves the moving part 510 ( Figure 2 The moving part 510 moves in the vertical direction. The vertical encoder 512 outputs a signal indicating the rotation angle of the vertical drive motor 511 to the transport control unit 550. In this way, the transport control unit 550 can detect the vertical position of the moving part 510.

[0092] The horizontal drive motor 513, under the control of the conveying control unit 550, moves the moving part 510 ( Figure 2 The moving part 510 moves horizontally. The horizontal encoder 514 outputs a signal indicating the rotation angle of the horizontal drive motor 513 to the transport control unit 550. In this way, the transport control unit 550 can detect the horizontal position of the moving part 510.

[0093] The rotation direction drive motor 515, under the control of the conveying control unit 550, causes the rotating component 520 ( Figure 1 The rotating component 520 rotates about an axis in the vertical direction. The rotation direction encoder 516 outputs a signal indicating the rotation angle of the rotation direction drive motor 515 to the transport control unit 550. In this way, the transport control unit 550 can detect the direction of the rotating component 520 in the horizontal plane.

[0094] The drive motor 525 for the forward and backward movement of the upper robotic arm is controlled by the conveying control unit 550 to move the robotic arm H1 ( Figure 1 The robot moves forward and backward in the horizontal direction on the rotating component 520. The upper robot encoder 526 outputs a signal indicating the rotation angle of the upper robot drive motor 525 to the transport control unit 550. In this way, the transport control unit 550 can detect the position of the robot H1 on the rotating component 520.

[0095] The drive motor 527 for the forward and backward movement of the lower robotic arm is controlled by the conveying control unit 550 to move the robotic arm H2 ( Figure 2 The robot moves forward and backward in the horizontal direction on the rotating component 520. The lower robot encoder 528 outputs a signal indicating the rotation angle of the drive motor 527 for moving forward and backward to the transport control unit 550. In this way, the transport control unit 550 can detect the position of the robot H2 on the rotating component 520.

[0096] The light-emitting sections Se of detectors SE1 and SE2 emit light to the light-receiving section Sr under the control of the transport control unit 550. The detection signal from the light-receiving section Sr is transmitted to the transport control unit 550. This allows the transport control unit 550 to determine whether each detector SE1 and SE2 is in a light-incident state or a non-light-incident state. Based on the detection signals from the two detectors SE1 and SE2 and the output signal from the upper robot encoder 526, the transport control unit 550 can calculate the positions of portions p1 to p4 of the substrate W in the robot arm H1. Similarly, based on the detection signals from the two detectors SE1 and SE2 and the output signal from the lower robot encoder 528, the transport control unit 550 can calculate the positions of portions p1 to p4 of the substrate W in the robot arm H2.

[0097] The operation unit 529 is connected to the transport control unit 550. The user can use the operation unit 529 to send various commands and information to the transport control unit 550.

[0098] (3) Determining the position of substrate W in robotic arms H1 and H2

[0099] In each of the robotic arms H1 and H2, an XY coordinate system is defined with an X-axis and a Y-axis. The X-axis and Y-axis lie in a horizontal plane parallel to the substrate W held by each robotic arm H1 and H2, and are orthogonal to the first reference position of each robotic arm H1 and H2. Therefore, the first reference position is the origin O. In this example, the Y-axis is defined as parallel to the forward and backward directions of each robotic arm H1 and H2.

[0100] Figure 6 This is a top view showing an example of the XY coordinate system defined by the robot arm H1. Figure 6 In the diagram, the X and Y axes of the XY coordinate system defined by the robot arm H1 are represented by a dashed line. Furthermore, the first reference position is represented as the origin O. Additionally, the substrate W held by the robot arm H1 is represented by a solid line. Figure 6 In the example, the center of the substrate W held by the robot arm H1 is located at the origin O.

[0101] In the substrate transfer device 500, detectors SE1 and SE2 detect four portions p1 to p4 of the substrate W in the robot arm H1, and the position of the substrate W in the robot arm H1 is determined based on the detected positions of portions p1 to p4. Similarly, detectors SE1 and SE2 detect four portions p1 to p4 of the substrate W in the robot arm H2, and the position of the substrate W in the robot arm H2 is determined based on the detected positions of portions p1 to p4. Based on the determined position of the substrate W, the up-down direction drive motor 511, the horizontal direction drive motor 513, the rotation direction drive motor 515, the upper robot arm forward / backward drive motor 525, and the lower robot arm forward / backward drive motor 527 are controlled. Here, the method for determining the position of the substrate W in the robot arm H1 will be described.

[0102] First, based on, for example Figure 4 The method shown involves retracting the robotic arm H1, which holds the substrate W, from a forward position to an initial forward / retractable position. Detectors SE1 and SE2 are used to detect portions p1 to p4 of the substrate W, respectively. Based on the detection signals from detectors SE1 and SE2... Figure 5 The output signal of the upper robotic encoder 526 is used to calculate the positions of portions p1 to p4 of the substrate W in the robotic arm H1. Furthermore, four virtual circles passing through the positions of three different portions p1, p2, p3, and p4 in the XY coordinate system are calculated, and the center positions of the four virtual circles are calculated for each. Additionally, multiple offsets between the four center positions are calculated.

[0103] In the following description, the virtual circle passing through portions p1, p2, and p3 is referred to as virtual circle cr1; the virtual circle passing through portions p2, p3, and p4 is referred to as virtual circle cr2; the virtual circle passing through portions p1, p3, and p4 is referred to as virtual circle cr3; and the virtual circle passing through portions p1, p2, and p4 is referred to as virtual circle cr4. Furthermore, the center positions of the virtual circles cr1, cr2, cr3, and cr4 in the robot arm H1 are referred to as vp1, vp2, vp3, and vp4, respectively.

[0104] like Figure 6 As shown by the dashed line, when all offsets between center positions vp1 and vp4 are 0, the four center positions vp1 to vp4 coincide with the center position C of the substrate W in the robot arm H1. Furthermore, even if at least one of the offsets is not 0, and all offsets between the four center positions vp1 and vp4 are below a predetermined threshold, the four center positions vp1 to vp4 also coincide with the center position C of the substrate W in the robot arm H1. Here, the threshold is set as, for example, the allowable error between the actual positions of detectors SE1 and SE2 and their designed mounting positions (designed positions).

[0105] Thus, when all offsets are below the threshold, there is no groove N in any of the portions p1 to p4 of the substrate W detected by detectors SE1 and SE2. Therefore, all four virtual circles cr1 to cr4 represent the position of the substrate W in the robot arm H1, and thus the position of the substrate W in the robot arm H1 can be determined based on any one or all of the four virtual circles cr1 to cr4.

[0106] Figures 7-10 This is a top view showing the positional relationship between the substrate W on the robot arm H1 and the four virtual circles cr1 to cr4 when at least one of the multiple offsets exceeds a threshold. Additionally, in Figures 7-10 The illustration of the robotic arm H1 is omitted in the text. Figure 7 This indicates the positional relationship between the substrate W and the virtual circle cr2. Figure 8 This indicates the positional relationship between the substrate W and the virtual circle cr3. Furthermore, Figure 9 This indicates the positional relationship between the substrate W and the virtual circle cr1. Figure 10 This indicates the positional relationship between the substrate W and the virtual circle cr4.

[0107] When at least one of the multiple offsets exceeds the threshold, only one of the four center positions vp1 to vp4 (in this example, the center position vp4 of the virtual circle cr4) is consistent with or approximately consistent with the center position C of the substrate W in the robot arm H1. Figure 10On the other hand, the remaining three center positions (in this example, the center positions vp1, vp2, and vp3 of the virtual circles cr1, cr2, and cr3) are offset from the center position C of the substrate W in the robot arm H1 by a larger than a specific value. Figure 7 , Figure 8 and Figure 9 ).

[0108] Thus, when at least one of the multiple offsets exceeds the threshold, a groove N exists in any of the portions p1 to p4 (in this example, portion p3) of the substrate W detected by detectors SE1 and SE2. At this time, the radius (or diameter) of the three virtual circles passing through the portion containing the groove N is larger than the actual radius (or diameter) of the substrate W. On the other hand, the radius (or diameter) of the one virtual circle not passing through the portion containing the groove N is the same as or approximately the same as the actual radius (or diameter) of the substrate W.

[0109] In this embodiment, the radius of the substrate W, which is the object to be transported by the substrate transport device 500, is known. In the following description, the designed radius of the substrate W, whose information about the substrate W is known, is referred to as the design radius. At this time, by selecting a virtual circle (cr4 in this example) from the four virtual circles cr1 to cr4 that has a radius that is the same as or closest to the design radius, the position of the substrate W in the robot arm H1 can be determined based on the selected virtual circle.

[0110] (4) Functional configuration of the conveying control unit 550

[0111] Figure 11 This is a block diagram illustrating the functional configuration of the transport control unit 550. The transport control unit 550 includes a partial position calculation unit 51, a virtual circle calculation unit 52, a substrate position determination unit 53, a detector position storage unit 54, a threshold storage unit 55, a movement control unit 58, a coordinate information storage unit 59, a coordinate information correction unit 60, and a substrate information storage unit 61. The transport control unit 550 is composed of a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), and storage devices. The CPU executes a computer program stored in a storage medium such as ROM or storage devices, thereby realizing the functions of each component of the transport control unit 550. Furthermore, some or all of the components of the transport control unit 550 can also be implemented using hardware such as electronic circuits.

[0112] Here, the substrate transfer device 500 receives and transfers a substrate W located at a specific position (hereinafter referred to as the receiving position) in one processing unit, and places the substrate W at a specific position (hereinafter referred to as the placement position) in another processing unit. The receiving position and the placement position are represented by coordinates in a coordinate system that is fixed to the entire substrate transfer device 500. The coordinates of the receiving position are referred to as the receiving coordinates, and the coordinates of the placement position are referred to as the placement coordinates.

[0113] The coordinate information storage unit 59 stores the receiving coordinates of the receiving position and the mounting coordinates of the mounting position as coordinate information in advance. The motion control unit 58 controls the receiving of the substrate W from the receiving position based on the coordinate information (receiving coordinates) stored in the coordinate information storage unit 59. Figure 5 The system includes a vertical drive motor 511, a horizontal drive motor 513, and a rotation drive motor 515, and controls the upper manipulator's forward and backward drive motor 525 or the lower manipulator's forward and backward drive motor 527. At this time, manipulator H1 or manipulator H2 advances from the initial forward / backward position to receive the substrate W at the receiving position, and then retreats to the initial forward / backward position.

[0114] The detector position storage unit 54 stores the designed positions of multiple detectors SE1 and SE2 as detector information. The partial position calculation unit 51 calculates the positions of multiple portions p1 to p4 of the substrate W in the robot arm H1 or robot arm H2 based on the detection signals of the multiple detectors SE1 and SE2, the output signals of the upper robot arm encoder 526 or the lower robot arm encoder 528, and the detector information stored in the detector position storage unit 54.

[0115] The virtual circle calculation unit 52 calculates four virtual circles cr1 to cr4 based on the positions of parts p1 to p4 calculated by the part position calculation unit 51. Figures 6-10 Furthermore, the virtual circle calculation unit 52 calculates the center positions vp1 to vp4 of each virtual circle cr1 to cr4. Figures 6-10 Calculate them separately.

[0116] The threshold storage unit 55 stores the threshold. The substrate position determination unit 53 calculates multiple offsets between the multiple center positions vp1 to vp4 calculated by the virtual circle calculation unit 52. Furthermore, the substrate position determination unit 53 determines whether all of the multiple offsets are below the threshold stored in the threshold storage unit 55.

[0117] When all offsets are below a threshold, the substrate position determination unit 53 determines the position of the substrate W in robot H1 or robot H2 based on any one or all of the four virtual circles cr1 to cr4. In this case, the substrate position determination unit 53 may also select one virtual circle for determination based on the distance between the center positions vp1 to vp4 and the first reference position. For example, the virtual circle with the nth smallest distance (n is an integer from 1 to 4) between the center positions vp1 to vp4 and the first reference position may be selected. Alternatively, the substrate position determination unit 53 may determine the position of the substrate W in robot H1 or robot H2 as the average position of all virtual circles cr1 to cr4.

[0118] The substrate information storage unit 61 stores the design radius of the substrate W to be transported by the substrate transport device 500. When at least one of the plurality of offsets exceeds a threshold, the substrate position determination unit 53 selects a virtual circle from four virtual circles cr1 to cr4 that has a radius that is the same as or closest to the design radius. Furthermore, based on the selected virtual circle, the substrate position determination unit 53 determines the position of the substrate W in either robot arm H1 or robot arm H2.

[0119] The coordinate information correction unit 60 calculates the offset of the center position C of the substrate W relative to the first reference position of the robot H1 or robot H2, based on the position of the substrate W in the robot H1 or robot H2 determined by the substrate position determination unit 53. Furthermore, the coordinate information correction unit 60 corrects the coordinate information (placement coordinates) stored in the coordinate information storage unit 59 based on the calculated offset. The movement control unit 58 controls the placement of the substrate W received at the receiving position at the placement position based on the coordinate information stored and corrected in the coordinate information storage unit 59. Figure 5 The system includes a vertical drive motor 511, a horizontal drive motor 513, and a rotation drive motor 515, which also control the upper manipulator's forward and backward movement drive motor 525 or the lower manipulator's forward and backward movement drive motor 527. At this time, either manipulator H1 or manipulator H2 moves forward from its initial forward / backward position.

[0120] (5) Operation of substrate conveying device 500

[0121] Figure 12 and Figure 13 This is a flowchart illustrating the basic transport operation of the substrate W in the substrate transport apparatus 500. The transport operation of the substrate W using the robot arm H1 will be described below. In the initial state, the robot arm H1 is positioned at the initial forward / backward position on the rotating member 520. Furthermore, in the initial state, the robot arm H1 is set not to hold the substrate W.

[0122] Figure 11The movement control unit 58 moves the robot arm H1 to the vicinity of the receiving position based on the coordinate information (receiving coordinates) stored in the coordinate information storage unit 59 (step S1), and receives the substrate W at the receiving position by moving the robot arm H1 forward (step S2). Furthermore, the movement control unit 58 moves the robot arm H1, which receives the substrate W, back to the initial forward / backward position (step S3). At this time, the partial position calculation unit 51 calculates the position of the robot arm H1 in the multiple portions p1 to p4 of the outer periphery of the substrate W based on the detection signals of the multiple detectors SE1 and SE2 and the output signal of the upper robot arm encoder 526 (step S4).

[0123] The virtual circle calculation unit 52 calculates four virtual circles cr1 to cr4, which are three different parts of the substrate W based on the calculated positions of parts p1 to p4, and calculates the center positions vp1 to vp4 of the virtual circles cr1 to cr4 respectively (step S5).

[0124] Next, the substrate position determination unit 53 calculates multiple offsets between the multiple center positions vp1 to vp4 (step S6), and determines whether all the calculated multiple offsets are below the threshold stored in the threshold storage unit 55 (step S7).

[0125] When all offsets are below the threshold, the substrate position determination unit 53 determines the position of the substrate W in the robot arm H1 based on any one or all of the four virtual circles cr1 to cr4 (step S8).

[0126] Next, the coordinate information correction unit 60 calculates the offset of the center position C of the substrate W relative to the first reference position based on the determined position of the substrate W, and corrects the coordinate information (placement coordinates) stored in the coordinate information storage unit 59 based on the calculation result in a manner that cancels out the offset between the position of the substrate W placed by the robot arm H1 and the placement position (step S9).

[0127] Subsequently, the motion control unit 58, based on the corrected coordinate information (placement coordinates), begins the transport control of the robot arm H1 to move the substrate W to the placement position (step S10), and places the substrate W held by the robot arm H1 at the placement position (step S11). In this way, the substrate W can be correctly placed at the placement position without depending on the position of the substrate W in the robot arm H1.

[0128] In step S7, when at least one of the multiple offsets exceeds a threshold, the substrate position determination unit 53 selects one of the four virtual circles cr1 to cr4 with a radius that is the same as or closest to the design radius (step S12). Then, the substrate position determination unit 53 determines the position of the substrate W in the robot arm H1 based on the selected virtual circle (step S13), and proceeds to step S9.

[0129] Alternatively, in the conveying operation, step S10 can be performed after step S3 and before step S4. In this case, the partial position calculation unit 51 can calculate the position of each of the multiple portions p1 to p4 of the outer periphery of the substrate W by the robotic arm H1 while holding the received substrate W in motion from its initial forward / backward position. Afterward, steps S5 to S10 or steps S5 to S7, S12, S13, S9, and S10 can be performed in parallel with the conveying operation until the substrate W is placed in its designated position. Furthermore, in the conveying operation, steps S12 and S13 can be performed instead of steps S7 and S8. In this case, it is not necessary to set a threshold related to the offset.

[0130] (6) Effects of the first embodiment

[0131] In the substrate transfer apparatus 500, robotic arms H1 and H2 move on the rotating component 520, respectively, and a single detector SE1 detects multiple portions p1 and p3 of the substrate W. Furthermore, a single detector SE2 detects multiple portions p2 and p4 of the substrate W. Therefore, it is unnecessary to prepare multiple detectors corresponding to each of the multiple portions p1 to p4 of the substrate W in order to detect their positions. This simplifies the configuration of the substrate transfer apparatus 500. Furthermore, the number of parts in the substrate transfer apparatus 500 is reduced. As a result, the cost of the substrate processing apparatus including the substrate transfer apparatus 500 is reduced.

[0132] Furthermore, in the substrate conveying device 500, when the robotic arms H1 and H2 move forward or backward on the rotating component 520, portions p1 and p2 of the substrate W pass through the detection areas DA of detectors SE1 and SE2 at approximately the same time. Similarly, portions p3 and p4 of the substrate W pass through the detection areas DA of detectors SE1 and SE2 at approximately the same time. Therefore, the time required for detecting multiple portions p1 to p4 of the substrate W can be shortened.

[0133] In the substrate transport device 500, the four portions p1 to p4 of the substrate W detected by detectors SE1 and SE2 are respectively located in the first to fourth quadrants of the XY coordinate system defined by each robot arm H1 and H2 when viewed from above. In this case, compared with the case where two or more portions of p1 to p4 are located in one quadrant, the accuracy of determining the position of the substrate W is improved.

[0134] In the substrate transport device 500, the arms Hb of the robotic arms H1 and H2 have a width smaller than the distance between detectors SE1 and SE2 when viewed from above. Furthermore, the arms Hb of the robotic arms H1 and H2 are configured such that when the robotic arms H1 and H2 move forward and backward on the rotating member 520, they do not cross the detection areas DA of detectors SE1 and SE2. Moreover, when the robotic arms H1 and H2 hold the substrate W, most of the guide portion Ha is located below the substrate W. This configuration prevents a portion of the robotic arms H1 and H2 from mistakenly detecting the substrate W as its outer peripheral end when determining its position.

[0135] [2] Second Embodiment

[0136] Regarding the substrate transfer apparatus 500 of the second embodiment, the differences from the substrate transfer apparatus 500 of the first embodiment will be explained. Figure 14 This is a top view of the substrate transport apparatus 500 according to the second embodiment. Figure 15 yes Figure 14 Side view of the substrate transport device 500.

[0137] like Figure 14 and Figure 15 As shown, the substrate transfer apparatus 500 of the second embodiment, in addition to the configuration of the substrate transfer apparatus 500 of the first embodiment, is also provided with a detector SE3.

[0138] Detector SE3 is a transmissive photoelectric sensor, similar to detectors SE1 and SE2, consisting of a light-emitting section Se and a light-receiving section Sr. The light-emitting section Se of detector SE3 is mounted approximately at the center of the long side of the rotating component 520, but at a different position in the short side (width direction) than the light-emitting sections Se of detectors SE1 and SE2. The light-receiving section Sr of detector SE3 is supported by a support component 530 (…). Figure 15 It is configured to face the light-emitting part Se of the detector SE3 above the rotating component 520. Additionally, Figure 14 The diagram of support component 530 is omitted.

[0139] In detector SE3, light is emitted upwards from the projection section Se, similar to detectors SE1 and SE2. The receiving section Sr receives the light emitted from the opposing projection section Se as return light. Therefore, in detector SE3, as with detectors SE1 and SE2, ... Figure 15 As shown by the shaded line, the detection area DA is formed in the vertical direction.

[0140] Detector SE3 is configured to overlap with the substrate W held by each of the robotic arms H1 and H2 when viewed from above, in the initial forward / backward position. In other words, detector SE3 is configured such that the detection signal is in a non-light-incident state when the robotic arms H1 and H2 are in the initial forward / backward position, and the detection signal becomes light-incident when the robotic arms H1 and H2 are in the forward position. Based on this configuration, when detectors SE1 and SE2 detect four portions p1 to p4 of the outer periphery of the substrate W, they can detect not only the outer periphery of the substrate W but also other portions.

[0141] Figure 16 This is a top view showing multiple portions of the substrate W being detected in the substrate transport apparatus 500 of the second embodiment. (Example) Figure 16 As shown, in this embodiment, detectors SE1 and SE2 are used to detect four portions p1 to p4 at the outer peripheral end of the substrate W, and detector SE3 is used to detect one portion p5 at the outer peripheral end of the substrate W.

[0142] Here, the distance between detectors SE1 and SE3 and the distance between detectors SE2 and SE3 in the short side direction (width direction) of the rotating component 520 are greater than the circumferential length of the groove N in the substrate W. At this time, part p5 is at least further away from other parts p1 to p4 than the circumferential length of the groove N.

[0143] In this embodiment, the position of the substrate W in the robotic arms H1 and H2 is determined based on the detected positions of five portions p1 to p5. Specifically, similar to the example in the first embodiment, firstly, four virtual circles cr1 to cr4 are calculated, passing through the positions of three different portions p1 to p4, and the center positions vp1 to vp4 of each of the four virtual circles cr1 to cr4 are calculated. Then, multiple offsets between the four center positions are calculated. Therefore, when all multiple offsets are 0 or below a predetermined threshold, the position of the substrate W in the robotic arms H1 and H2 is determined based on any one or all of the four virtual circles cr1 to cr4.

[0144] When at least one of the multiple offsets exceeds a threshold, as described above, a groove N exists in any of the portions p1 to p4 of the substrate W. At this time, no groove exists in the portion p5 of the substrate W detected by detector SE3. Therefore, the virtual circle representing the position of the substrate W in the robotic arms H1 and H2 passes through the position of portion p5. Therefore, by selecting one of the four virtual circles cr1 to cr4 that passes through the position of portion p5, the position of the substrate W in the robotic arms H1 and H2 is determined based on the selected virtual circle.

[0145] Thus, according to the substrate conveying device 500 of the second embodiment, even when the design radius of the substrate W is unknown, the position of the substrate W in the robotic arms H1 and H2 can be easily and accurately determined.

[0146] [3] Third embodiment

[0147] Regarding the substrate transfer apparatus 500 of the third embodiment, the differences from the substrate transfer apparatus 500 of the first embodiment will be explained. Figure 17 This is a top view of the substrate transport apparatus 500 according to the third embodiment. Figure 17 The top view of the substrate transport device 500 corresponds to that of the first embodiment. Figure 1 The substrate transfer device 500 is shown in top view. Therefore, the substrate transfer device 500 of the third embodiment also includes a robot arm H2 (not shown) and a support member 530. In the substrate transfer device 500, the robots H1 and H2 can move forward and backward along the long side of the rotating member 520, and as... Figure 17 As shown by the thick arrow, it can be configured to move forward and backward in the short side direction of the rotating component 520.

[0148] Figure 18 This is a block diagram illustrating the configuration of the control system of the substrate transport apparatus 500 according to the third embodiment. (As shown) Figure 18 As shown, the substrate transfer device 500 of this embodiment includes a first drive motor 525A and a second drive motor 525B for the upper robot arm, replacing the first embodiment. Figure 5 The upper robotic arm in this embodiment uses a drive motor 525 for forward and backward movement. Furthermore, the substrate transport apparatus 500 of this embodiment replaces the first embodiment with a lower robotic arm first drive motor 527A and a lower robotic arm second drive motor 527B. Figure 5 The lower robotic arm in the structure uses a drive motor 527 for forward and backward movement.

[0149] The first drive motor 525A of the upper robotic arm, under the control of the conveying control unit 550, enables the robotic arm H1 ( Figure 17 The rotating component 520 moves forward and backward along its long side. The second drive motor 525B of the upper robot arm, controlled by the transport control unit 550, moves the robot arm H1 (…). Figure 17 The robot moves along the short side of the rotating component 520. The upper robot encoder 526 outputs signals indicating the rotation angles of the upper robot's first drive motor 525A and the upper robot's second drive motor 525B to the transport control unit 550. In this way, the transport control unit 550 can detect the position of the robot H1 on the rotating component 520.

[0150] The first drive motor 527A of the lower robotic arm, under the control of the conveying control unit 550, enables the robotic arm H2 ( Figure 17The rotating component 520 moves forward and backward along its long side. The second drive motor 527B of the lower robot arm, controlled by the transport control unit 550, moves the robot arm H2 ( Figure 17 The robot moves along the short side of the rotating component 520. The lower robot encoder 528 outputs signals indicating the rotation angles of the lower robot's first drive motor 527A and the lower robot's second drive motor 527B to the transport control unit 550. This allows the transport control unit 550 to detect the position of the robot H2 on the rotating component 520.

[0151] In the substrate transport device 500 with the aforementioned configuration, by moving the robotic arms H1 and H2 that hold the substrate W in two orthogonal directions in the horizontal plane, more than five portions of the outer peripheral end of the substrate W can be detected by two detectors SE1 and SE2.

[0152] Figure 19 This is a schematic diagram illustrating an example of a method for detecting more than five portions of the outer peripheral end of a substrate W held by a robotic arm H1 using two detectors SE1 and SE2. Figure 19 In Chinese, only means Figure 17 It is a component of the substrate transport device 500.

[0153] First, such as Figure 19 As indicated by the thick arrow in the top view on the left, the robotic arm H1, holding the substrate W, retracts from the forward position towards the initial forward / backward position along the central axis CL of the rotating component 520. Here, the central axis CL is a straight line extending along the long side of the rotating component 520 through the center of the short side. At this time, the substrate W passes through the two detection areas DA of detectors SE1 and SE2, detecting four portions p1 to p4 at the outer peripheral end of the substrate W.

[0154] In this example, if four portions p1 to p4 of substrate W are being detected, then robot arm H1 stops its forward and backward movement such that a portion of substrate W is positioned between detectors SE1 and SE2 when viewed from above. Afterward, robot arm H1... Figure 19 As shown by the thick arrow in the top view on the right, portion p5 of the substrate W, excluding p1 to p4, moves along the short side of the rotating component 520 by traversing the detection area DA of either detector SE1 or SE2. This allows for the detection of more than five portions of the outer periphery of the substrate W using the two detectors SE1 and SE2. Therefore, even when the design radius of the substrate W is unknown, the position of the substrate W in the robot arm H1 can be determined based on the selected virtual circle (cr1 to cr4) that passes through the position of portion p5.

[0155] Thus, according to the substrate conveying device 500 of the third embodiment, the position of substrate W in the robotic arms H1 and H2 can be easily and accurately determined without increasing the number of detectors at the outer peripheral end of substrate W.

[0156] [4] Fourth Embodiment

[0157] Regarding the substrate transfer apparatus 500 of the fourth embodiment, the differences from the substrate transfer apparatus 500 of the first embodiment will be explained. Figure 20 This is a side view of the substrate transport apparatus 500 according to the fourth embodiment.

[0158] like Figure 20 As shown, in the substrate transport apparatus 500 of this embodiment, detectors SE1 and SE2 are disposed in fixed portions 611 and 612, which are separate from the robotic arms H1 and H2 and the rotating component 520. A substrate support portion 600, configured to support the substrate W, is provided at the receiving or placement position. The fixed portions 611 and 612 are located near the substrate support portion 600 and are not movable relative to the substrate support portion 600. Detectors SE1 and SE2 are arranged such that the substrate W transported by the substrate transport apparatus 500 traverses the detection area DA of detectors SE1 and SE2.

[0159] The substrate support 600 is, for example, a carrier for holding one or more substrates W. Alternatively, the substrate support 600 is, for example, a substrate mounting portion for transferring substrates W between two substrate transport devices. Alternatively, the substrate support 600 is provided within a processing unit for performing specific processing on the substrates W. As an example of a substrate support 600 provided within a processing unit, there is a heating plate or a cooling plate for heat-processing the substrates W. In addition to the above, as an example of a substrate support 600 provided within a processing unit, there is a rotating holding portion (rotating chuck) that can rotatably hold the substrates W in a horizontal position.

[0160] In the substrate transport apparatus 500 of this embodiment, multiple portions p1 to p4 of the substrate W are detected during the period from when the robot arm H1 (or robot arm H2) receiving the substrate W from the substrate support 600 retracts from the receiving position to the initial forward / backward position. Alternatively, multiple portions p1 to p4 of the substrate W are detected during the period from when the robot arm H1 (or robot arm H2) holding the substrate W advances from the initial forward / backward position to the placement position. This allows the position of the substrate W within the robot arm H1 (or robot arm H2) to be determined.

[0161] According to the aforementioned configuration, detectors SE1 and SE2, used to detect multiple portions p1 to p4 of the substrate W, are mounted on the fixing parts 611 and 612. At this time, because the mounting state of detectors SE1 and SE2 is stable, the accuracy of determining the position of the substrate W in the robotic arms H1 and H2 is improved.

[0162] [5] Fifth Embodiment

[0163] Regarding the substrate transfer apparatus 500 of the fifth embodiment, the differences from the substrate transfer apparatus 500 of the first embodiment will be explained. Figure 21 This is a top view of the substrate transport apparatus according to the fifth embodiment. Figure 22 yes Figure 21 Side view of the substrate transport device 500. Figure 23 yes Figure 21 Front view of the substrate transport device 500.

[0164] like Figure 21 As shown, in the substrate transfer apparatus 500 of this embodiment, four detectors SE11, SE12, SE21, and SE22 are provided to replace... Figure 1 Detectors SE1 and SE2 are installed on robot arm H1, located at the two front ends of the branch guide section Ha. Detectors SE21 and SE22 are installed on robot arm H2, located at the two front ends of the branch guide section Ha. Therefore, in Figures 21-22 The substrate transfer device 500 does not have a substrate transfer device 500. Figure 2 Support component 530.

[0165] Detectors SE11, SE12, SE21, and SE22 are reflective photoelectric sensors. The reflective photoelectric sensors used here have, for example, a light-emitting portion Se and a light-receiving portion Sr integrated into a common package. Detectors SE11, SE12, SE21, and SE22 are respectively arranged such that light emitted upwards from the light-emitting portion Se and traveling downwards is incident on the light-receiving portion Sr. Therefore, in each detector SE11, SE12, SE21, and SE22, as... Figure 22 and Figure 23 As shown by the shaded line, a detection region DA is formed that extends upward from the detector.

[0166] In each of the detectors SE11, SE12, SE21, and SE22, when the substrate W is present in the detection region DA, light emitted from the projection section Se and reflected by the substrate W is incident on the light-receiving section Sr as returning light. Therefore, a detection signal indicating the incident light state is output from the light-receiving section Sr. Conversely, when the substrate W is not present in the detection region DA, light emitted from the projection section Se does not return to the light-receiving section Sr. Therefore, a detection signal indicating the non-incident light state is output from the light-receiving section Sr.

[0167] As described in the fourth embodiment, a substrate support portion 600, for example, supporting the substrate W, is provided at the receiving position. In the substrate support portion 600, similar to determining the first reference position for the robotic arms H1 and H2, a reference position (hereinafter referred to as the second reference position) where the center of the indicated substrate W should be located is predetermined.

[0168] In the substrate transfer apparatus 500 of this embodiment, when receiving the substrate W supported by the substrate support 600, multiple portions of the outer peripheral end of the substrate W are detected by detectors SE11 and SE12.

[0169] Figure 24 This is a schematic diagram illustrating an example of a method for detecting multiple portions of the outer peripheral end of the substrate W supported by the substrate support 600. Figure 24 In this example, only the substrate support 600, the substrate W supported by the substrate support 600, and the robot arm H1 are shown. The substrate support 600 in this example is, for example, a rotating holding part (rotating chuck) that holds the lower surface of the substrate W in an adsorption manner.

[0170] When inspecting multiple portions of the outer peripheral end of substrate W, for example, when the robotic arm H1 is not holding substrate W, Figure 24 As indicated by the thick arrow in the top view on the left, the light advances towards the substrate support 600, located below the substrate W on which the substrate support 600 is placed. At this time, because the substrate W is not located above the two detectors SE11 and SE12, the detection signals of detectors SE11 and SE12 are in a non-incident light state.

[0171] Next, as Figure 24 As indicated by the thick arrow in the central top view, if the robotic arm H1 advances a specific distance, detectors SE11 and SE12 overlap with two portions of the outer periphery of the substrate W when viewed from above. That is, the two portions of the outer periphery of the substrate W traverse the two detection areas DA of detectors SE11 and SE12. Figure 23 At this time, the detection signals of detectors SE11 and SE12 change from a non-light-incident state to a light-incident state. Therefore, based on the timing of the change in the detection signals of detectors SE11 and SE12 from a non-light-incident state to a light-incident state, the positions of two portions of the outer periphery of the substrate W supported by the substrate support 600 are detected. The portion of the outer periphery of the substrate W detected based on the detection signal of detector SE11 is referred to as portion p11. Furthermore, the portion of the outer periphery of the substrate W detected based on the detection signal of detector SE12 is referred to as portion p12.

[0172] Next, as Figure 24As indicated by the thick arrow in the top view on the right, if the robotic arm H1 advances a certain distance further, detectors SE11 and SE12 will overlap with the other two portions of the outer periphery of substrate W when viewed from above. That is, the other two portions of the outer periphery of substrate W traverse the two detection areas DA of detectors SE11 and SE12. Figure 23 At this time, the detection signals of detectors SE11 and SE12 change from the light-incident state to the non-light-incident state. Based on the timing of the change in the detection signals of detectors SE11 and SE12 from the non-light-incident state to the light-incident state, the positions of two portions of the outer periphery of the substrate W supported by the substrate support 600 are detected. The portion of the outer periphery of the substrate W detected based on the detection signal of detector SE11 is referred to as portion p13. Furthermore, the portion of the outer periphery of the substrate W detected based on the detection signal of detector SE12 is referred to as portion p14. If all four portions p11 to p14 are detected, the robot arm H1 stops its forward movement on the substrate support 600 without contacting it.

[0173] Alternatively, in the example described above, the robotic arm H1 can move from the position closest to the substrate support 600 of the supporting substrate W, pressing... Figure 24 The four parts p11 to p14 are detected when the substrate support 600 is moved back from right to left.

[0174] In addition, similar to the example of robot H1, when robot H2 moves forward or backward relative to substrate support 600, the positions of four parts p11 to p14 at the outer periphery of substrate W can be detected based on the detection signals of detectors SE21 and SE22.

[0175] As described above, multiple portions p11 to p14 at the outer peripheral end of the substrate W in the substrate support 600 are detected, and their positions are calculated. Based on the calculated positions of the multiple portions p11 to p14, the position of the substrate W in the substrate support 600 is determined.

[0176] The substrate transport apparatus 500 of the fifth embodiment has a control system that is substantially the same as that of the substrate transport apparatus 500 of the first embodiment. Figure 5 At this time, in the transport control unit 550 of this embodiment, the substrate position determination unit 53 determines the position of the substrate W in the substrate support unit 600 based on the detected positions of the multiple portions p11 to p14.

[0177] The coordinate information correction unit 60 calculates the offset of the center position C of the substrate W relative to the second reference position based on the position of the substrate W in the substrate support 600 determined by the substrate position determination unit 53. Furthermore, after the robots H1 and H2 receive the substrate W, the coordinate information correction unit 60 corrects the coordinate information of the receiving position based on the calculated offset, ensuring that the center position C of the substrate W coincides with the first reference position of the robots H1 and H2. Alternatively, after the substrate W is transferred from the robots H1 and H2 to other substrate supports 600, the coordinate information correction unit 60 corrects the coordinate information of the placement position based on the calculated offset, ensuring that the center position C of the substrate W coincides with the second reference position of the other substrate support 600. This allows for the transfer of the substrate W with high precision.

[0178] According to the aforementioned configuration, the movement of the robotic arm H1 utilizes two detectors SE11 and SE12 to detect four portions p11 to p14 of the substrate W. Furthermore, the movement of the robotic arm H2 utilizes two detectors SE21 and SE22 to detect the four portions p11 to p14 of the substrate W. Therefore, it is unnecessary to prepare multiple detectors corresponding to each portion p11 to p14 of the substrate W in order to detect their positions. This simplifies the configuration of the substrate transfer device 500. Moreover, because the number of parts in the substrate transfer device 500 is reduced, the cost of the substrate processing apparatus including the substrate transfer device 500 is reduced.

[0179] [6] 6th Embodiment

[0180] Figure 25 This is a schematic block diagram showing the overall configuration of a substrate processing apparatus having any one of the embodiments 1 to 5, including the substrate transport apparatus 500. Figure 25 As shown, the substrate processing apparatus 100 is arranged adjacent to the exposure apparatus 800, and includes a control device 210, a substrate transport device 500 according to any one of the embodiments of the first to fifth, a heat treatment unit 230, a coating treatment unit 240, and a developing treatment unit 250.

[0181] The control device 210 includes, for example, a CPU and memory, or a microcomputer, to control the operation of the substrate transport device 500, the heat treatment unit 230, the coating treatment unit 240, and the developing treatment unit 250. Furthermore, the control device 210 provides instructions to the transport control unit 550 to align the robotic arm H1 of the substrate transport device 500 with the substrate support portion of a specific processing unit.

[0182] The substrate transport apparatus 500 transports the substrate W between the heat treatment unit 230, the coating treatment unit 240, the developing treatment unit 250, and the exposure apparatus 800. The coating treatment unit 240 and the developing treatment unit 250 each include multiple processing units PU. In each processing unit PU located in the coating treatment unit 240, a rotating chuck is provided as a substrate support 600. Furthermore, a processing liquid nozzle 5 is provided in each processing unit PU, supplying a processing liquid for forming a resist film on the substrate W rotating via the rotating chuck. This forms a resist film on the untreated substrate W. The substrate W with the formed resist film is then exposed in the exposure apparatus 800.

[0183] In the processing unit PU provided in the developing processing section 250, a developing solution nozzle 6 is provided to supply developing solution to a substrate W that is rotated by a rotating chuck. Thereby, the substrate W exposed by the exposure apparatus 800 is developed.

[0184] The heat treatment unit 230 includes multiple processing units TU for heating or cooling the substrate W. Each processing unit TU has a temperature adjustment plate serving as a substrate support 600. The temperature adjustment plate can be a heating plate or a cooling plate. In the heat treatment unit 230, heat treatment of the substrate W is performed before and after the coating process in the coating process unit 240, the development process in the development process unit 250, and the exposure process in the exposure apparatus 800.

[0185] The substrate processing apparatus 100 is provided with a substrate transfer device 500 according to any one of the first to fifth embodiments. This eliminates the need for multiple detectors to determine the position of the substrate W, thus reducing costs. Furthermore, the substrate W is transferred with high precision between multiple processing units PU and TU. This prevents poor processing caused by positional misalignment of the substrate W in each processing unit PU and TU, and improves the processing accuracy of the substrate W.

[0186] [7] Other implementation methods

[0187] (1) In the substrate conveying device 500 of the embodiment, the robotic arms H1 and H2 are configured to move forward and backward on the rotating member 520, but the robotic arms H1 and H2 may also be configured to move forward and backward and rotate on the rotating member 520.

[0188] At this time, the substrate conveying device 500 is equipped with a rotary motor that changes the direction of the robotic arms H1 and H2 on the rotating component 520, and a rotary encoder that outputs a signal indicating the rotation angle of the rotary motor. By rotating the robotic arms H1 and H2, for example, in a manner that traverses the detection area DA of the detector SE1, the position of a portion of the outer periphery of the substrate W can be calculated based on the detection signal of the detector SE1 and the output signal of the rotary encoder. Thus, the movements of the robotic arms H1 and H2 used to detect multiple portions of the outer periphery of the substrate W are not limited to forward and backward movements, but may also include rotational movements.

[0189] (2) In the substrate transport apparatus 500 of the third embodiment, a detector SE1 is used to detect three portions p1, p3, and p5 of the outer peripheral end of the substrate W, but the present invention is not limited to this. In the substrate transport apparatus 500 of the above embodiment, a detector SE1 may also be used to detect four or more portions of the outer peripheral end of the substrate W. In this case, the robotic arms H1 and H2 holding the substrate W move in a manner such that, for example, four or more portions of the outer peripheral end of the held substrate W sequentially traverse the detection area DA of a detector SE1. In this way, the positions of four or more portions of the outer peripheral end of the substrate W can be calculated based on the timing of the state switching of the output signal of the detector SE1 and the output of each encoder built into the substrate transport apparatus 500. According to this configuration, the number of detectors used to detect the outer peripheral end of the substrate W can be further reduced. Therefore, further cost reduction of the substrate processing apparatus including the substrate transport apparatus 500 is achieved.

[0190] (3) In the described embodiment, the substrate conveying device 500 receives and conveys the substrate W located at the receiving position of one processing unit, and places the substrate at the placement position of another processing unit, but the present invention is not limited thereto. The receiving position and placement position of the substrate W may also be set within one processing unit.

[0191] For example, in a processing unit that has two substrate support portions 600 (e.g., a cooling plate and a heating plate) within a housing, a substrate transfer device 500 of any of the first to fourth embodiments can be provided as a so-called local transfer mechanism. In this case, within a processing unit, when transferring a substrate W from one substrate support portion 600 to another substrate support portion 600, the position of the substrate W in the robotic arms H1 and H2 is determined.

[0192] Alternatively, the substrate transfer device 500 of the fifth embodiment can be provided as a so-called local transfer mechanism in a processing unit that has two substrate support portions 600 (e.g., a cooling plate and a heating plate) within a housing. In this case, within a processing unit, the position of the substrate W in the substrate support portion 600 is determined before or after the substrate W is transferred from one substrate support portion 600 to another substrate support portion 600.

[0193] (4) In the described embodiment, the guide portion Ha of the robotic arms H1 and H2 has a generally V-shaped flat plate shape, but the present invention is not limited to this. The guide portion Ha of the robotic arms H1 and H2 may also have a generally C-shaped flat plate shape extending in an arc. In this case, the guide portion Ha is configured such that, when the substrate W is held, it does not overlap with the outer peripheral end of the substrate W that should be detected by detectors SE1, SE2, and SE3 when viewed from above.

[0194] (5) In the described embodiment, the robotic arms H1 and H2 of the substrate conveying device 500 may also have a mechanism for holding the outer peripheral end of the substrate W by abutting against it, instead of a mechanism for adsorbing the lower surface of the substrate W. Because the abutting portion between the robotic arm holding the outer peripheral end of the substrate W and the outer peripheral end of the substrate W wears, there is a possibility that the center position C of the substrate W may be held by the robotic arm in a state offset from the first reference position. In this case, because the position of the substrate W in the robotic arm is correctly determined, the substrate W can be correctly placed in the position where it should be placed.

[0195] (6) In the embodiment described above, the light-emitting portions Se of the plurality of detectors SE1, SE2, and SE3 emit light upward from a position below the substrate W. Not limited thereto, the light-emitting portions Se of detectors SE1, SE2, and SE3 may also emit light downward from a position above the substrate W.

[0196] (7) In the substrate transport apparatus 500 of the first to fourth embodiments, a transmissive photoelectric sensor is used as the detectors SE1, SE2, and SE3, but the present invention is not limited thereto. In the substrate transport apparatus 500 of the first to fourth embodiments, a reflective photoelectric sensor may also be used instead of a transmissive photoelectric sensor as the detectors SE1, SE2, and SE3.

[0197] (8) In the embodiment described above, optical detectors SE1, SE2, and SE3 are used to detect multiple portions p1 to p5 of the outer periphery of the substrate W held by robotic arms H1 and H2. However, this is not a limitation; other detectors, such as ultrasonic sensors, may also be used to detect the multiple portions p1 to p5 of the outer periphery of the substrate W held by each robotic arm H1 and H2.

[0198] [8] Correspondence between the constituent elements of the claims and the constituent elements of the embodiments

[0199] Hereinafter, examples of the correspondence between the constituent elements of the claims and the elements of the embodiments will be described, but the present invention is not limited to the following examples.

[0200] In the above embodiment, the robotic arms H1 and H2 and the substrate support 600 are examples of support units, the substrate conveying device 500 is an example of a position determination device except for the robotic arms H1 and H2, the detection area DA of the detectors SE1, SE11, and SE21 is an example of a first detection area, and the detectors SE1, SE11, and SE21 are examples of a first detector.

[0201] Furthermore, the moving part 510, the up-down drive motor 511, the horizontal drive motor 513, the rotation drive motor 515, the rotating part 520, the support parts 521 and 522, the upper robot arm forward and backward drive motor 525, the upper robot arm first drive motor 525A, the upper robot arm second drive motor 525B, the lower robot arm forward and backward drive motor 527, the lower robot arm first drive motor 527A, and the lower robot arm second drive motor 527B are examples of relatively moving parts.

[0202] Furthermore, the following are examples of different types of units: the transport control unit 550 is a control unit, the movement control unit 58 is a relative movement control unit, the partial position calculation unit 51 is a partial position calculation unit, the substrate position determination unit 53 is a position determination unit, the robotic arms H1 and H2 are transport and holding units, the detection area DA of detectors SE2, SE12, and SE22 is a second detection area, detectors SE2, SE12, and SE22 are second detectors, the portions p1 and p11 at the outer periphery of substrate W are the first portions at the outer periphery of substrate W, and the portions p3 and p13 at the outer periphery of substrate W are the second portions at the outer periphery of substrate W.

[0203] Furthermore, p2 and p12 at the outer periphery of substrate W are examples of the third portion of the outer periphery of substrate W, p4 and p14 at the outer periphery of substrate W are examples of the fourth portion of the outer periphery of substrate W, the short side direction of rotating member 520 is an example of the first direction, and the long side direction of rotating member 520 is an example of the second direction.

[0204] Other elements having the structure or function described in the claims may also be used as constituent elements of the claims.

Claims

1. A substrate conveying apparatus, comprising a substrate conveying apparatus for determining the position of a substrate supported by a support portion, and including: The conveying and holding section is configured to hold the substrate while moving it. A first detector is disposed in the conveying and holding section and has a first detection area; A second detector is disposed in the conveying and holding part and has a second detection area; The relative moving part is configured to allow the first detector and the second detector to move relative to the substrate supported by the support part by moving the conveying and holding part; and The control unit controls the relative movement unit; and The control unit includes: The relative movement control unit controls the relative movement unit such that the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area. The partial position calculation unit calculates the positions of the first part, the second part, the third part, and the fourth part on the support part based on the detection signals of the first and second detectors, respectively. and The position determination unit determines the position of the substrate on the support portion based on the positions of the first portion, the second portion, the third portion, and the fourth portion calculated by the partial position calculation unit.

2. The substrate conveying apparatus according to claim 1, wherein the first and second detectors are arranged such that the first detection area and the second detection area are arranged in a first direction at an interval smaller than the diameter of the substrate; The relative movement control unit controls the relative movement unit in such a way that the first and second detection regions traverse the substrate by moving the first and second detectors in a second direction that intersects the first direction.

3. A substrate conveying method, comprising determining the position of a substrate supported by a support portion, and including the following steps: A first detector having a first detection area is prepared, the first detector being disposed in a transport and holding section, the transport and holding section being configured to hold the substrate while moving it; Prepare a second detector having a second detection area, the second detector being disposed in the conveying and holding part; The conveying and holding portion moves relative to the substrate supported by the support portion in such a manner that the first and second portions of the outer peripheral end of the substrate supported by the support portion are sequentially located in the first detection area, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located in the second detection area. Based on the detection signals of the first and second detectors, the positions of the first part, the second part, the third part, and the fourth part on the support are calculated respectively; and Based on the positions of the first part, the second part, the third part, and the fourth part calculated by the calculation step, the position of the substrate on the support is determined.

4. The substrate transport method according to claim 3, wherein the first and second detectors are arranged such that the first detection region and the second detection region are arranged at an interval smaller than the diameter of the substrate in a first direction; and The operation of moving the first and second detectors relative to the substrate supported by the support portion includes moving the first and second detectors in a second direction that intersects the first direction, such that the first and second detection regions traverse the substrate.

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