Large-stroke Five-degree-of-freedom Compliant Precision Positioning Platform and Positioning System

Abstract

The present application provides a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system. The positioning platform includes a moving platform, a first driving mechanism, and a first displacement amplification mechanism. The first driving mechanism is used to drive the moving platform to move. The first displacement amplification mechanism is respectively connected to the moving platform and the first driving mechanism; the first displacement amplification mechanism is used to amplify the movement displacement of the moving platform driven by the first driving mechanism. In the present application, the first driving mechanism is used to drive the moving platform to move, the first displacement amplification mechanism is respectively connected to the moving platform and the first driving mechanism, and the first displacement amplification mechanism is used to amplify the movement displacement of the moving platform driven by the first driving mechanism. Therefore, the movement stroke of the moving platform in the compliant precision positioning platform can be increased. Thus, the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application can meet more application scenarios.

Description

Technical Field

[0001] This application belongs to the technical field of precision positioning, and particularly relates to a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system. Background Art

[0002] With the continuous development of science and technology, precision positioning technology has been widely applied in the fields of biomedical engineering, precision optical engineering, microelectronic systems, national defense technology, etc., and has become an essential part of the development of high-tech. Currently, the existing positioning platforms mainly fall into the following three categories:

[0003] The first category is the mechanical transmission type positioning platform, such as: screw mechanisms, lever mechanisms, wedge cam mechanisms, etc. and their combined mechanisms. The biggest advantage of the mechanical transmission type positioning platform is its large stroke and large output stiffness, but it has disadvantages such as mechanical clearance and friction wear, and it is difficult to significantly improve the motion sensitivity and positioning accuracy of the mechanism.

[0004] The second category is to achieve precision positioning through linear motors or ultrasonic motors, etc. The positioning accuracy is improved to a certain extent and it has advantages such as good frequency response, etc., but the system is relatively complex. Especially for multi-degree-of-freedom positioning platforms, multiple large-sized electric drive devices need to be designed.

[0005] The third category is the multi-degree-of-freedom compliant precision positioning platform, which uses piezoelectric ceramics as the driving device and flexible hinge mechanisms as the transmission device, and can achieve sub-micron and nano-level positioning. Therefore, its application is becoming more and more widespread; however, the existing multi-degree-of-freedom compliant precision positioning platforms also have the problem of relatively small motion stroke, so it is difficult to meet more application scenarios. Summary of the Invention

[0006] The embodiments of this application provide a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system to solve the problem that the existing multi-degree-of-freedom compliant precision positioning platforms have a relatively small motion stroke and thus it is difficult to meet more application scenarios.

[0007] In a first aspect, the embodiments of this application provide a large-stroke five-degree-of-freedom compliant precision positioning platform, and the positioning platform includes:

[0008] A moving platform;

[0009] A first driving mechanism for driving the moving platform to move;

[0010] A first displacement amplification mechanism, which is respectively connected to the moving platform and the first driving mechanism; the first displacement amplification mechanism is used to amplify the motion displacement of the moving platform driven by the first driving mechanism.

[0011] Optionally, the first displacement amplification mechanism includes a primary amplification component and a secondary amplification component. The primary amplification component is configured to amplify the motion displacement output by the first driving mechanism.

[0012] The secondary amplification component is configured to amplify the motion displacement output by the first driving mechanism that has been amplified by the primary amplification component.

[0013] Optionally, the primary amplification component includes a first lever amplification member and a second lever amplification member, and the secondary amplification component includes a first half-bridge amplification member.

[0014] The input ends of the first lever amplification member and the second lever amplification member are respectively connected to the output end of the first driving mechanism, and the input end of the first half-bridge amplification member is respectively connected to the output ends of the first lever amplification member and the second lever amplification member.

[0015] Optionally, the first lever amplification member and the second lever amplification member are respectively disposed on opposite sides of the first half-bridge amplification member.

[0016] Optionally, the positioning platform further includes:

[0017] A carrier member, which is connected to the first displacement amplification mechanism;

[0018] A second driving mechanism, which is connected to the carrier member and is configured to drive the moving platform to move on the carrier member.

[0019] Optionally, the moving direction of the moving platform driven by the second driving mechanism is perpendicular to the moving direction of the moving platform driven by the first driving mechanism.

[0020] Optionally, the positioning platform further includes:

[0021] A second displacement amplification mechanism, which is respectively connected to the moving platform and the second driving mechanism; the second displacement amplification mechanism is configured to amplify the motion displacement of the moving platform driven by the second driving mechanism on the carrier member.

[0022] Optionally, the positioning platform further includes:

[0023] A third driving mechanism, which is connected to the carrier member and is configured to drive the moving platform to move on the carrier member;

[0024] wherein, the moving direction of the moving platform driven by the third driving mechanism is perpendicular to the moving direction of the moving platform driven by the first driving mechanism; the moving direction of the moving platform driven by the third driving mechanism is perpendicular to the moving direction of the moving platform driven by the second driving mechanism.

[0025] Optionally, a first decoupling mechanism is further provided on the carrier; the first decoupling mechanism is used to reduce the parasitic displacement of the moving platform in the moving direction of the moving platform driven by the second driving mechanism.

[0026] In a second aspect, an embodiment of the present application further provides a positioning system, and the positioning system includes the large-stroke five-degree-of-freedom compliant precision positioning platform as described in any one of the above.

[0027] In the large-stroke five-degree-of-freedom compliant precision positioning platform and the positioning system provided by the embodiments of the present application, the first driving mechanism is used to drive the moving platform to move, and the first displacement amplification mechanism is respectively connected to the moving platform and the first driving mechanism, and the first displacement amplification mechanism is used to amplify the moving displacement of the moving platform driven by the first driving mechanism. Therefore, the moving stroke of the moving platform in the compliant precision positioning platform can be increased, so the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application can meet more application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative efforts.

[0029] In order to more fully understand the present application and its beneficial effects, the following will be described in conjunction with the drawings. Among them, the same reference numerals represent the same parts in the following description.

[0030] Figure 1 FIG. 20 is a schematic structural diagram of an existing six-degree-of-freedom Stewart platform.

[0031] Figure 2 FIG. 24 is a schematic structural diagram of the positioning platform provided by the embodiment of the present application.

[0032] Figure 3 FIG. 28 is a schematic structural diagram of the first driving mechanism and the first displacement amplification mechanism in the positioning platform provided by the embodiment of the present application.

[0033] Figure 4 FIG. Figure 2 FIG. 34 is a schematic structural diagram of the positioning platform in FIG. 34 after hiding the carrier.

[0034] Figure 5 FIG. Figure 4 FIG. 40 is a schematic structural diagram of the positioning platform in FIG. 40 after hiding the intermediate platform.

[0035] Figure 6 FIG. Figure 5Top view of the positioning platform in the middle.

[0036] Figure 7 Schematic structural diagram of the bearing member and the moving platform in the positioning platform provided by the embodiment of the present application.

[0037] Figure 8 For Figure 7 Partial enlarged view at A in the middle. Specific implementation manner

[0038] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0039] Currently, the existing multi-degree-of-freedom compliant precision positioning platform uses piezoelectric ceramics as the driving device and a flexible hinge mechanism as the transmission device; due to the advantages of high resolution, high stiffness, and large output force of piezoelectric ceramics, sub-micron and nano-level positioning can be achieved. Therefore, its application is becoming more and more extensive. At the same time, in the field of precision positioning, the compliant precision positioning platform with piezoelectric ceramics as the driver is also a research hotspot.

[0040] The degrees of freedom of the existing compliant precision positioning platform are mostly two degrees of freedom, and there is also a six-degree-of-freedom Stewart platform such as Figure 1 shown. The main connection forms of the multi-degree-of-freedom compliant precision positioning platform are series, parallel, and hybrid. The series compliant precision positioning platform has the advantages of large working space and high flexibility. At the same time, there are also some deficiencies: there are error accumulations of each rod and flexible hinge, and low end accuracy. The parallel compliant precision positioning platform has only one moving platform, and this moving platform is simultaneously driven by six piezoelectric ceramics. The six piezoelectric ceramics coordinate and operate simultaneously to push the moving platform to output the required movement. Compared with the series combination form, the inertia of the moving platform in the parallel form is much smaller, so the response speed is faster. At the same time, the piezoelectric ceramics do not move with the moving platform, and the connection lines do not affect the accuracy of the moving platform. In the case of lacking an amplification mechanism, the stroke of this form is generally less than the driving stroke of a single piezoelectric ceramic. The hybrid compliant precision positioning platform adopts a series-parallel hybrid combination method, and this type of compliant precision positioning platform can integrate the advantages of the series compliant precision positioning platform and the parallel compliant precision positioning platform.

[0041] In addition to the above advantages, the existing compliant precision positioning platform also has some deficiencies. For example: 1. The output displacement of piezoelectric ceramics is extremely small. Even for stacked piezoelectric ceramics, their output displacement generally does not exceed 0.2% of their own size. Therefore, it is difficult to meet the requirements in the fields of electronic manufacturing, biomedical engineering, optical microassembly, and ultra-precision machining; 2. Parasitic displacement will be generated and it does not have decoupling ability. For a multi-degree-of-freedom compliant precision positioning platform (such as the above Stewart platform), the occurrence of parasitic displacement during the movement process will make its control more difficult and also reduce the positioning accuracy of the compliant precision positioning platform. Therefore, its decoupling ability needs to be considered more in the design.

[0042] To solve the above problems, the embodiments of the present application provide a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system, which will be described below with reference to the accompanying drawings. The large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application can be applied in a positioning system. Exemplarily, please refer to Figure 2 , Figure 2 The structural schematic diagram of the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application. The large-stroke five-degree-of-freedom compliant precision positioning platform includes a moving platform 310, a first driving mechanism 110, and a first displacement amplification mechanism. The first driving mechanism 110 is used to drive the moving platform 310 to move. The first displacement amplification mechanism is respectively connected to the moving platform 310 and the first driving mechanism 110; the first displacement amplification mechanism is used to amplify the movement displacement of the moving platform 310 driven by the first driving mechanism 110.

[0043] In the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application, the first driving mechanism 110 is used to drive the moving platform 310 to move, and the first displacement amplification mechanism is respectively connected to the moving platform 310 and the first driving mechanism 110, and the first displacement amplification mechanism is used to amplify the movement displacement of the moving platform 310 driven by the first driving mechanism 110. Therefore, it can improve the movement stroke of the moving platform 310 in the precision positioning platform. Therefore, the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiments of the present application can meet more application scenarios.

[0044] Exemplarily, the above first displacement amplification mechanism includes a first-stage amplification component Ⅰ and a second-stage amplification component Ⅰ. The first-stage amplification component Ⅰ is used to amplify the movement displacement output by the first driving mechanism 110; and the second-stage amplification component Ⅰ is used to amplify the movement displacement output by the first driving mechanism 110 that has been amplified by the first-stage amplification component Ⅰ. Relying on the above two-stage amplification components to amplify the movement displacement output by the first driving mechanism 110 twice, thereby further improving the movement stroke of the moving platform 310 in the large-stroke five-degree-of-freedom compliant precision positioning platform, and further enabling the large-stroke five-degree-of-freedom compliant precision positioning platform to meet more application scenarios.

[0045] Exemplarily, as Figure 3 shown, the above-mentioned first-stage amplification component I includes a first lever amplification member 210 and a second lever amplification member 220, and the second-stage amplification component I includes a first half-bridge amplification member 230. The input ends of the first lever amplification member 210 and the second lever amplification member 220 are respectively connected to the output end of the first driving mechanism 110, and the input ends of the first half-bridge amplification member 230 are respectively connected to the output ends of the first lever amplification member 210 and the second lever amplification member 220. Thus, a two-stage amplification method of connecting two lever amplification members in parallel and then connecting them in series with a half-bridge amplification member is realized.

[0046] Exemplarily, as Figure 3 shown, the first lever amplification member 210 and the second lever amplification member 220 are respectively arranged on opposite sides of the first half-bridge amplification member 230. The large-stroke five-degree-of-freedom compliant precision positioning platform further includes a base 340, and a plurality of third through holes 341 are formed in the base 340. Then, the base 340 of the large-stroke five-degree-of-freedom compliant precision positioning platform can be fixed by setting bolts to pass through these third through holes 341 and then tightening them. The first lever amplification member 210 and the second lever amplification member 220 are arranged along the vertical direction (the vertical direction is shown by the arrow Z in the figure), and the first lever amplification member 210 and the second lever amplification member 220 are symmetric about the vertical direction; the first half-bridge amplification member 230 is arranged along the horizontal direction. The lower end of the first lever amplification member 210 is connected to the base 340 through a flexible hinge; the upper end of the first lever amplification member 210 is connected to the left end of the first half-bridge amplification member 230 through a flexible hinge, and the upper end of the first lever amplification member 210 is the output end of the first lever amplification member 210, and the left end of the first half-bridge amplification member 230 is the first input end of the first half-bridge amplification member 230. The lower end of the second lever amplification member 220 is connected to the base 340 through a flexible hinge; the upper end of the second lever amplification member 220 is connected to the right end of the first half-bridge amplification member 230 through a flexible hinge, and the upper end of the second lever amplification member 220 is the output end of the second lever amplification member 220, and the right end of the first half-bridge amplification member 230 is the second input end of the first half-bridge amplification member 230. The output end of the first half-bridge amplification member 230 is located in the middle of the first half-bridge amplification member 230, and the output end of the first half-bridge amplification member 230 is located above the first half-bridge amplification member 230.

[0047] As Figure 3As shown, the above-mentioned first driving mechanism 110 is arranged between the first lever amplification member 210 and the second lever amplification member 220, and the first driving mechanism 110 is arranged in the horizontal direction. The left end of the first driving mechanism 110 is connected to the first lever amplification member 210 through a flexible hinge, where the connection between the first lever amplification member 210 and the first driving mechanism 110 is the input end of the first driving mechanism 110; the right end of the first driving mechanism 110 is connected to the second lever amplification member 220 through a flexible hinge, where the connection between the second lever amplification member 220 and the first driving mechanism 110 is the input end of the second driving mechanism 120. In this application, the first driving mechanism 110 can be a piezoelectric ceramic driver. Of course, the first driving mechanism 110 can also adopt other driving methods, which are not limited here. In this application, the hinge can be a circular notch type flexible hinge. Of course, it can also be other types of hinges, such as hyperbolic notch type hinges, elliptical notch type hinges, parabolic notch type hinges, etc.

[0048] The movement displacement amounts output by the first driving mechanism 110 are respectively applied to the input ends of the first lever amplification member 210 and the second lever amplification member 220, causing the first lever amplification member 210 and the second lever amplification member 220 to rotate around the hinge points of the lever amplification members and the base 340. Therefore, the first lever amplification member 210 and the second lever amplification member 220 perform a first-level amplification on the movement displacement amounts output by the first driving mechanism 110. The output ends of the first lever amplification member 210 and the second lever amplification member 220 are respectively hinged to the input ends of the first half-bridge amplification member 230. The movement displacement amounts output by the output ends of the first lever amplification member 210 and the second lever amplification member 220 are applied to the input ends of the first half-bridge amplification member 230, causing the output end of the first half-bridge amplification member 230 to rotate around the flexible hinge inside the first half-bridge amplification member 230. Therefore, the first half-bridge amplification member 230 performs a second-level amplification on the movement displacement amounts output by the first driving mechanism 110. The movement displacement amount output by the output end of the first half-bridge amplification member 230 is a movement displacement amount in the vertical direction.

[0049] Exemplarily, such as Figure 3As shown, the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform further includes a first guiding mechanism 410 and a second guiding mechanism 420. The first guiding mechanism 410 is arranged at the left end of the first driving mechanism 110. The left end of the first driving mechanism 110 is connected to the first lever amplification member 210 through a flexible hinge by the first guiding mechanism 410. The second guiding mechanism 420 is arranged at the right end of the first driving mechanism 110. The right end of the first driving mechanism 110 is connected to the second lever amplification member 220 through a flexible hinge by the second guiding mechanism 420. When the first driving mechanism 110 drives the first lever amplification member 210 and the first lever amplification member 210 to rotate, shear force will be generated on the first driving mechanism 110. By arranging the first guiding mechanism 410 and the second guiding mechanism 420 at both ends of the first driving mechanism 110 respectively, the first guiding mechanism 410 and the second guiding mechanism 420 can reduce the shear force received by the first driving mechanism 110, thereby protecting the first driving mechanism 110. In this application, the first guiding mechanism 410 and the second guiding mechanism 420 can adopt the existing parallel plate guiding mechanism, or other guiding mechanisms, which are not limited here.

[0050] Exemplarily, such as Figure 2 , Figure 4 and Figure 5 As shown, the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform further includes a fourth driving mechanism 140, a fifth driving mechanism 150, a fourth displacement amplification mechanism and a fifth displacement amplification mechanism. Among them, the fourth driving mechanism 140 is also used to drive the moving platform 310 to move, and the fourth displacement amplification mechanism is respectively connected to the moving platform 310 and the fourth driving mechanism 140; the fourth displacement amplification mechanism is used to amplify the moving displacement of the fourth driving mechanism 140 driving the moving platform 310. The above-mentioned fifth driving mechanism 150 is also used to drive the moving platform 310 to move, and the fifth displacement amplification mechanism is respectively connected to the moving platform 310 and the fifth driving mechanism 150; the fifth displacement amplification mechanism is used to amplify the moving displacement of the fifth driving mechanism 150 driving the moving platform 310.

[0051] Exemplarily, in this application, the structure and connection mode of the fourth driving mechanism 140 and the fourth displacement amplification mechanism are the same as those of the first driving mechanism 110 and the first displacement amplification mechanism. Among them, the above-mentioned first displacement amplification mechanism also includes a primary amplification component II and a secondary amplification component II. The primary amplification component II is used to amplify the moving displacement output by the fourth driving mechanism 140; and the secondary amplification component II is used to amplify the moving displacement output by the fourth driving mechanism 140 amplified by the primary amplification component II. The moving displacement output by the fourth driving mechanism 140 is amplified twice by the above two-stage amplification components.

[0052] Exemplarily, the above-mentioned primary amplification component II includes a seventh lever amplification member and an eighth lever amplification member, and the secondary amplification component II includes a fourth half-bridge amplification member 231. The input ends of the seventh lever amplification member and the eighth lever amplification member are respectively connected to the output end of the fourth driving mechanism 140, and the input ends of the fourth half-bridge amplification member 231 are respectively connected to the output ends of the seventh lever amplification member and the eighth lever amplification member. Thus, a two-stage amplification method is achieved in which two lever amplification members are connected in parallel and then connected in series with a half-bridge amplification member.

[0053] Exemplarily, the seventh lever amplification member and the eighth lever amplification member are respectively arranged on opposite sides of the fourth half-bridge amplification member 231. The seventh lever amplification member and the eighth lever amplification member are arranged vertically, and the seventh lever amplification member and the eighth lever amplification member are symmetric about the vertical direction; the fourth half-bridge amplification member 231 is arranged horizontally. The lower end of the seventh lever amplification member is connected to the base 340 through a flexible hinge; the upper end of the seventh lever amplification member is connected to the left end of the fourth half-bridge amplification member 231 through a flexible hinge, and the upper end of the seventh lever amplification member is the output end of the seventh lever amplification member, and the left end of the fourth half-bridge amplification member 231 is the first input end of the fourth half-bridge amplification member 231. The lower end of the eighth lever amplification member is connected to the base 340 through a flexible hinge; the upper end of the eighth lever amplification member is connected to the right end of the fourth half-bridge amplification member 231 through a flexible hinge, and the upper end of the eighth lever amplification member is the output end of the eighth lever amplification member, and the right end of the fourth half-bridge amplification member 231 is the second input end of the fourth half-bridge amplification member 231. The output end of the fourth half-bridge amplification member 231 is located in the middle of the fourth half-bridge amplification member 231, and the output end of the fourth half-bridge amplification member 231 is located above the fourth half-bridge amplification member 231.

[0054] The above-mentioned fourth driving mechanism 140 is arranged between the seventh lever amplification member and the eighth lever amplification member, and the fourth driving mechanism 140 is arranged horizontally. The left end of the fourth driving mechanism 140 is connected to the seventh lever amplification member through a flexible hinge, and the connection between the seventh lever amplification member and the fourth driving mechanism 140 is the input end of the fourth driving mechanism 140; the right end of the fourth driving mechanism 140 is connected to the eighth lever amplification member through a flexible hinge, and the connection between the eighth lever amplification member and the fourth driving mechanism 140 is the input end of the second driving mechanism 120. In this application, the fourth driving mechanism 140 can be a piezoelectric ceramic driver. Of course, the fourth driving mechanism 140 can also adopt other driving methods, which are not limited here.

[0055] The motion displacement output by the fourth driving mechanism 140 is respectively applied to the input ends of the seventh lever amplification member and the eighth lever amplification member, causing the seventh lever amplification member and the eighth lever amplification member to rotate around the hinge joint between the lever amplification member and the base 340. Therefore, the seventh lever amplification member and the eighth lever amplification member perform a first-level amplification on the motion displacement output by the fourth driving mechanism 140. The output ends of the seventh lever amplification member and the eighth lever amplification member are respectively hinged to the input ends of the fourth half-bridge amplification member 231, and the motion displacement output by the output ends of the seventh lever amplification member and the eighth lever amplification member is applied to the input ends of the fourth half-bridge amplification member 231, causing the output end of the fourth half-bridge amplification member 231 to rotate around the flexible hinge inside the fourth half-bridge amplification member 231. Therefore, the fourth half-bridge amplification member 231 performs a second-level amplification on the motion displacement output by the fourth driving mechanism 140. The motion displacement output by the output end of the fourth half-bridge amplification member 231 is the motion displacement in the vertical direction.

[0056] Exemplarily, the large-stroke five-degree-of-freedom compliant precision positioning platform further includes a seventh guiding mechanism and an eighth guiding mechanism. The seventh guiding mechanism is arranged at the left end of the fourth driving mechanism 140, and the left end of the fourth driving mechanism 140 is connected to the seventh lever amplification member through a flexible hinge by the seventh guiding mechanism. The eighth guiding mechanism is arranged at the right end of the fourth driving mechanism 140, and the right end of the fourth driving mechanism 140 is connected to the eighth lever amplification member through a flexible hinge by the eighth guiding mechanism. When the fourth driving mechanism 140 drives the seventh lever amplification member and the eighth lever amplification member to rotate, shear forces will be generated on the fourth driving mechanism 140. By arranging the seventh guiding mechanism and the eighth guiding mechanism at both ends of the fourth driving mechanism 140 respectively, the seventh guiding mechanism and the eighth guiding mechanism can reduce the shear forces received by the fourth driving mechanism 140, thereby protecting the fourth driving mechanism 140. In this application, the seventh guiding mechanism and the eighth guiding mechanism can adopt the existing parallel plate guiding mechanism or other guiding mechanisms, which are not limited here.

[0057] Exemplarily, in this application, the structure and connection mode of the fifth driving mechanism 150 and the fifth displacement amplification mechanism are the same as those of the first driving mechanism 110 and the first displacement amplification mechanism. The first displacement amplification mechanism also includes a first-level amplification component III and a second-level amplification component III. The first-level amplification component III is used to amplify the motion displacement output by the fifth driving mechanism 150; and the second-level amplification component III is used to amplify the motion displacement output by the fifth driving mechanism 150 that has been amplified by the first-level amplification component III. Relying on the above two-level amplification components, the motion displacement output by the fifth driving mechanism 150 is amplified twice.

[0058] Exemplarily, the above-mentioned primary amplification component III includes a ninth lever amplification member and a tenth lever amplification member, and the secondary amplification component III includes a fifth half-bridge amplification member 232. The input ends of the ninth lever amplification member and the tenth lever amplification member are respectively connected to the output end of the fifth driving mechanism 150, and the input ends of the fifth half-bridge amplification member 232 are respectively connected to the output ends of the ninth lever amplification member and the tenth lever amplification member. Thus, a two-stage amplification method of connecting two lever amplification members in parallel and then connecting them in series with a half-bridge amplification member is realized.

[0059] Exemplarily, the ninth lever amplification member and the tenth lever amplification member are respectively arranged on opposite sides of the fifth half-bridge amplification member 232. The ninth lever amplification member and the tenth lever amplification member are arranged in the vertical direction, and the ninth lever amplification member and the tenth lever amplification member are symmetric about the vertical direction; the fifth half-bridge amplification member 232 is arranged in the horizontal direction. The lower end of the ninth lever amplification member is connected to the base 340 through a flexible hinge; the upper end of the ninth lever amplification member is connected to the left end of the fifth half-bridge amplification member 232 through a flexible hinge, and the upper end of the ninth lever amplification member is the output end of the ninth lever amplification member, and the left end of the fifth half-bridge amplification member 232 is the first input end of the fifth half-bridge amplification member 232. The lower end of the tenth lever amplification member is connected to the base 340 through a flexible hinge; the upper end of the tenth lever amplification member is connected to the right end of the fifth half-bridge amplification member 232 through a flexible hinge, and the upper end of the tenth lever amplification member is the output end of the tenth lever amplification member, and the right end of the fifth half-bridge amplification member 232 is the second input end of the fifth half-bridge amplification member 232. The output end of the fifth half-bridge amplification member 232 is located in the middle of the fifth half-bridge amplification member 232, and the output end of the fifth half-bridge amplification member 232 is located above the fifth half-bridge amplification member 232.

[0060] The above-mentioned fifth driving mechanism 150 is arranged between the ninth lever amplification member and the tenth lever amplification member, and the fifth driving mechanism 150 is arranged in the horizontal direction. The left end of the fifth driving mechanism 150 is connected to the ninth lever amplification member through a flexible hinge, and the connection between the ninth lever amplification member and the fifth driving mechanism 150 is the input end of the fifth driving mechanism 150; the right end of the fifth driving mechanism 150 is connected to the tenth lever amplification member through a flexible hinge, and the connection between the tenth lever amplification member and the fifth driving mechanism 150 is the input end of the second driving mechanism 120. In this application, the fifth driving mechanism 150 can be a piezoelectric ceramic driver. Of course, the fifth driving mechanism 150 can also adopt other driving methods, which are not limited here.

[0061] The motion displacement output by the fifth driving mechanism 150 is respectively applied to the input ends of the ninth lever amplification member and the tenth lever amplification member, causing the ninth lever amplification member and the tenth lever amplification member to rotate around the hinge joint between the lever amplification member and the base 340. Therefore, the ninth lever amplification member and the tenth lever amplification member perform a first-level amplification on the motion displacement output by the fifth driving mechanism 150. The output ends of the ninth lever amplification member and the tenth lever amplification member are respectively hinged to the input ends of the fifth half-bridge amplification member 232. The motion displacement output by the output ends of the ninth lever amplification member and the tenth lever amplification member is applied to the input ends of the fifth half-bridge amplification member 232, causing the output end of the fifth half-bridge amplification member 232 to rotate around the flexible hinge inside the fifth half-bridge amplification member 232. Therefore, the fifth half-bridge amplification member 232 performs a second-level amplification on the motion displacement output by the fifth driving mechanism 150. The motion displacement output by the output end of the fifth half-bridge amplification member 232 is the motion displacement in the vertical direction. The above-mentioned first driving mechanism 110, fourth driving mechanism 140, and fifth driving mechanism 150 move simultaneously in the vertical direction, which can drive the motion platform 310 to move in the vertical direction.

[0062] Exemplarily, the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform further includes a ninth guiding mechanism and a tenth guiding mechanism. The ninth guiding mechanism is arranged at the left end of the fifth driving mechanism 150. The left end of the fifth driving mechanism 150 is connected to the ninth lever amplification member through a flexible hinge by the ninth guiding mechanism. The tenth guiding mechanism is arranged at the right end of the fifth driving mechanism 150. The right end of the fifth driving mechanism 150 is connected to the tenth lever amplification member through a flexible hinge by the tenth guiding mechanism. When the fifth driving mechanism 150 drives the ninth lever amplification member and the tenth lever amplification member to rotate, shear forces will be generated on the fifth driving mechanism 150. By arranging the ninth guiding mechanism and the tenth guiding mechanism at the two ends of the fifth driving mechanism 150 respectively, the ninth guiding mechanism and the tenth guiding mechanism can reduce the shear forces received by the fifth driving mechanism 150, thereby protecting the fifth driving mechanism 150. In this application, the ninth guiding mechanism and the tenth guiding mechanism can adopt the existing parallel plate guiding mechanism or other types of guiding mechanisms, which are not limited here.

[0063] Exemplarily, such as Figure 4 and Figure 5As shown, the large-stroke five-degree-of-freedom compliant precision positioning platform in this application further includes an intermediate platform 330, and the initial state of the intermediate platform 330 is parallel to the above-mentioned base 340. The output end of the first half-bridge amplification member 230 is connected to the intermediate platform 330 through a first flexible Hooke hinge 332, the output end of the fourth half-bridge amplification member 231 is connected to the intermediate platform 330 through a second flexible Hooke hinge 333, and the output end of the fifth half-bridge amplification member 232 is connected to the intermediate platform 330 through a third flexible Hooke hinge 334. Moreover, the movement displacement amounts of the first half-bridge amplification member 230, the fourth half-bridge amplification member 231, and the fifth half-bridge amplification member 232 are all movement displacement amounts in the vertical direction. Therefore, the intermediate platform 330 has three degrees of freedom, namely the rotational degree of freedom about the X-axis, the rotational degree of freedom about the Y-axis, and the translational degree of freedom along the Z-axis (the X-axis, Y-axis, and Z-axis are as shown in the figure).

[0064] As Figure 6 shown, in this application, the first half-bridge amplification member 230, the fourth half-bridge amplification member 231, and the fifth half-bridge amplification member 232 are arranged in a circular array on the horizontal plane, and the projections of the first half-bridge amplification member 230, the fourth half-bridge amplification member 231, and the fifth half-bridge amplification member 232 on the horizontal plane extend to intersect pairwise and enclose an equilateral triangle on the horizontal plane.

[0065] Exemplarily, as Figure 2 shown, the large-stroke five-degree-of-freedom compliant precision positioning platform in this application further includes a carrier 320 and a second driving mechanism 120. A number of first through holes 321 are provided on the carrier 320, and corresponding second through holes 331 are also provided on the above-mentioned intermediate platform 330. Then, the carrier 320 and the intermediate platform 330 can be fixedly connected by passing a bolt through a first through hole 321 and a second through hole 331, so that the carrier 320 also has the same three degrees of freedom. As Figure 7 shown, the above-mentioned second driving mechanism 120 is connected to the carrier 320, and the second driving mechanism 120 is used to drive the moving platform 310 to move on the carrier 320. Among them, the movement direction of the second driving mechanism 120 driving the moving platform 310 is perpendicular to the movement direction of the first driving mechanism 110 driving the moving platform 310. Then, the above-mentioned second driving mechanism 120 can also increase one degree of freedom of the moving platform 310.

[0066] Exemplarily, as Figure 7As shown, the large-stroke five-degree-of-freedom compliant precision positioning platform in the present application further includes a second displacement amplification mechanism, which is respectively connected to the moving platform 310 and the second driving mechanism 120; the second displacement amplification mechanism is used to amplify the movement displacement of the second driving mechanism 120 driving the moving platform 310 on the bearing member 320. Exemplarily, the second displacement amplification mechanism includes a primary amplification component Ⅳ and a secondary amplification component Ⅳ. The primary amplification component Ⅳ is used to amplify the movement displacement output by the second driving mechanism 120; and the secondary amplification component Ⅳ is used to amplify the movement displacement output by the second driving mechanism 120 amplified by the primary amplification component Ⅳ.

[0067] Exemplarily, such as Figure 7 As shown, the primary amplification component Ⅳ includes a third lever amplification member 240 and a fourth lever amplification member 250, and the secondary amplification component Ⅳ includes a second half-bridge amplification member 260. The input ends of the third lever amplification member 240 and the fourth lever amplification member 250 are respectively connected to the output end of the second driving mechanism 120, and the input ends of the second half-bridge amplification member 260 are respectively connected to the output ends of the third lever amplification member 240 and the fourth lever amplification member 250. Thus, a two-stage amplification method of connecting two lever amplification members in parallel and then connecting them in series with a half-bridge amplification member is realized.

[0068] Exemplarily, such as Figure 7As shown, the third lever amplification member 240 and the fourth lever amplification member 250 are respectively disposed on opposite sides of the second half-bridge amplification member 260. The third lever amplification member 240 and the fourth lever amplification member 250 are arranged along the X-axis direction, and the third lever amplification member 240 and the fourth lever amplification member 250 are symmetric about the X-axis; the second half-bridge amplification member 260 is arranged along the Y-axis direction. The first end of the third lever amplification member 240 is connected to the carrier 320 through a flexible hinge, and the second end of the third lever amplification member 240 is connected to the first end of the second half-bridge amplification member 260 through a flexible hinge, and the second end of the third lever amplification member 240 is the output end of the third lever amplification member 240. The first end and the second end on the third lever amplification member 240 are respectively the opposite ends of the third lever amplification member 240, and the first end of the second half-bridge amplification member 260 is the first input end of the second half-bridge amplification member 260. The first end of the fourth lever amplification member 250 is connected to the carrier 320 through a flexible hinge, and the second end of the fourth lever amplification member 250 is connected to the second end of the second half-bridge amplification member 260 through a flexible hinge, and the second end of the fourth lever amplification member 250 is the output end of the fourth lever amplification member 250. The first end and the second end on the fourth lever amplification member 250 are respectively the opposite ends of the fourth lever amplification member 250; the first end and the second end on the second half-bridge amplification member 260 are respectively the opposite ends of the second half-bridge amplification member 260, and the second end of the second half-bridge amplification member 260 is also the second input end of the second half-bridge amplification member 260, and the output end of the second half-bridge amplification member 260 is located in the middle of the second half-bridge amplification member 260.

[0069] As Figure 7 shown, the above-mentioned second driving mechanism 120 is disposed between the third lever amplification member 240 and the fourth lever amplification member 250, and the second driving mechanism 120 is arranged along the Y-axis direction. The first end of the second driving mechanism 120 is connected to the third lever amplification member 240 through a flexible hinge, and the connection between the third lever amplification member 240 and the second driving mechanism 120 is the input end of the second driving mechanism 120. The second end of the second driving mechanism 120 is connected to the fourth lever amplification member 250 through a flexible hinge, and the connection between the fourth lever amplification member 250 and the second driving mechanism 120 is the input end of the second driving mechanism 120; the first end and the second end on the second driving mechanism 120 are respectively the opposite ends of the second driving mechanism 120. In this application, the second driving mechanism 120 can be a piezoelectric ceramic driver. Of course, the second driving mechanism 120 can also adopt other driving methods, which are not limited here.

[0070] The motion displacement output by the second driving mechanism 120 is respectively applied to the input ends of the third lever amplification member 240 and the fourth lever amplification member 250, causing the third lever amplification member 240 and the fourth lever amplification member 250 to rotate around the hinge joint between the lever amplification member and the carrier 320. Therefore, the third lever amplification member 240 and the fourth lever amplification member 250 perform a first-level amplification on the motion displacement output by the second driving mechanism 120. The output ends of the third lever amplification member 240 and the fourth lever amplification member 250 are respectively hinged to the input ends of the second half-bridge amplification member 260, and the motion displacement output by the output ends of the third lever amplification member 240 and the fourth lever amplification member 250 is applied to the input ends of the second half-bridge amplification member 260, causing the output end of the second half-bridge amplification member 260 to rotate around the flexible hinge inside the second half-bridge amplification member 260. Therefore, the second half-bridge amplification member 260 performs a second-level amplification on the motion displacement output by the second driving mechanism 120. If the motion displacement output by the output end of the second half-bridge amplification member 260 is the motion displacement in the X-axis direction, then the motion direction of the second driving mechanism 120 driving the motion platform 310 is along the X-axis direction, that is, the motion direction of the second driving mechanism 120 driving the motion platform 310 is perpendicular to the motion direction of the first driving mechanism 110 driving the motion platform 310.

[0071] Exemplarily, the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform further includes a third guiding mechanism 430 and a fourth guiding mechanism 440. The third guiding mechanism 430 is disposed at the first end of the second driving mechanism 120, and the first end of the second driving mechanism 120 is connected to the third lever amplification member 240 through a flexible hinge by the third guiding mechanism 430. The fourth guiding mechanism 440 is disposed at the second end of the second driving mechanism 120, and the second end of the second driving mechanism 120 is connected to the fourth lever amplification member 250 through a flexible hinge by the fourth guiding mechanism 440. When the second driving mechanism 120 drives the third lever amplification member 240 and the fourth lever amplification member 250 to rotate, shear forces will be generated on the second driving mechanism 120. By disposing the third guiding mechanism 430 and the fourth guiding mechanism 440 at the two ends of the second driving mechanism 120 respectively, the third guiding mechanism 430 and the fourth guiding mechanism 440 can reduce the shear forces received by the second driving mechanism 120, thereby protecting the second driving mechanism 120. In this application, the third guiding mechanism 430 and the fourth guiding mechanism 440 can adopt the existing parallel plate guiding mechanism, or can adopt other guiding mechanisms, which are not limited herein.

[0072] Exemplarily, such as Figure 7As shown, the large-stroke five-degree-of-freedom compliant precision positioning platform in the present application further includes a third driving mechanism 130. The third driving mechanism 130 is connected to the carrier 320, and the third driving mechanism 130 is used to drive the moving platform 310 to move on the carrier 320. Among them, the moving direction of the third driving mechanism 130 driving the moving platform 310 is perpendicular to the moving direction of the first driving mechanism 110 driving the moving platform 310; at the same time, the moving direction of the third driving mechanism 130 driving the moving platform 310 is perpendicular to the moving direction of the second driving mechanism 120 driving the moving platform 310. Then the above-mentioned third driving mechanism 130 can also increase one degree of freedom of the moving platform 310.

[0073] Exemplarily, such as Figure 7 As shown, the large-stroke five-degree-of-freedom compliant precision positioning platform in the present application further includes a third displacement amplification mechanism. The third displacement amplification mechanism is respectively connected to the moving platform 310 and the third driving mechanism 130; the third displacement amplification mechanism is used to amplify the moving displacement of the third driving mechanism 130 driving the moving platform 310 on the carrier 320. Exemplarily, the above-mentioned third displacement amplification mechanism includes a primary amplification component V and a secondary amplification component V. The primary amplification component V is used to amplify the moving displacement output by the third driving mechanism 130; and the secondary amplification component V is used to amplify the moving displacement output by the third driving mechanism 130 amplified by the primary amplification component V.

[0074] Exemplarily, such as Figure 7 As shown, the above-mentioned primary amplification component V includes a fifth lever amplification member 270 and a sixth lever amplification member 280, and the secondary amplification component V includes a third half-bridge amplification member 290. The input ends of the fifth lever amplification member 270 and the sixth lever amplification member 280 are respectively connected to the output end of the third driving mechanism 130, and the input ends of the third half-bridge amplification member 290 are respectively connected to the output ends of the fifth lever amplification member 270 and the sixth lever amplification member 280. Then a two-stage amplification method of connecting two lever amplification members in parallel and then connecting them in series with a half-bridge amplification member is realized.

[0075] Exemplarily, such as Figure 7As shown, the fifth lever amplification member 270 and the sixth lever amplification member 280 are respectively disposed on opposite sides of the third half-bridge amplification member 290. The fifth lever amplification member 270 and the sixth lever amplification member 280 are arranged along the Y-axis direction, and the fifth lever amplification member 270 and the sixth lever amplification member 280 are symmetric about the Y-axis; the third half-bridge amplification member 290 is arranged along the X-axis direction. The first end of the fifth lever amplification member 270 is connected to the carrier 320 through a flexible hinge, and the second end of the fifth lever amplification member 270 is connected to the first end of the third half-bridge amplification member 290 through a flexible hinge, and the second end of the fifth lever amplification member 270 is the output end of the fifth lever amplification member 270. The first end and the second end on the fifth lever amplification member 270 are respectively the opposite ends of the fifth lever amplification member 270, and the first end of the third half-bridge amplification member 290 is the first input end of the third half-bridge amplification member 290. The first end of the sixth lever amplification member 280 is connected to the carrier 320 through a flexible hinge, and the second end of the sixth lever amplification member 280 is connected to the second end of the third half-bridge amplification member 290 through a flexible hinge, and the second end of the sixth lever amplification member 280 is the output end of the sixth lever amplification member 280. The first end and the second end on the sixth lever amplification member 280 are respectively the opposite ends of the sixth lever amplification member 280; the first end and the second end on the third half-bridge amplification member 290 are respectively the opposite ends of the third half-bridge amplification member 290, and the second end of the third half-bridge amplification member 290 is also the second input end of the third half-bridge amplification member 290, and the output end of the third half-bridge amplification member 290 is located in the middle of the third half-bridge amplification member 290.

[0076] As Figure 7 shown, the above-mentioned third driving mechanism 130 is disposed between the fifth lever amplification member 270 and the sixth lever amplification member 280, and the third driving mechanism 130 is arranged along the X-axis direction. The first end of the third driving mechanism 130 is connected to the fifth lever amplification member 270 through a flexible hinge, and the connection between the fifth lever amplification member 270 and the third driving mechanism 130 is the input end of the third driving mechanism 130. The second end of the third driving mechanism 130 is connected to the sixth lever amplification member 280 through a flexible hinge, and the connection between the sixth lever amplification member 280 and the third driving mechanism 130 is the input end of the third driving mechanism 130; the first end and the second end on the third driving mechanism 130 are respectively the opposite ends of the third driving mechanism 130. In this application, the third driving mechanism 130 can be a piezoelectric ceramic driver. Of course, the third driving mechanism 130 can also adopt other driving methods, which are not limited here.

[0077] The motion displacement output by the third driving mechanism 130 is respectively applied to the input ends of the fifth lever amplification member 270 and the sixth lever amplification member 280, causing the fifth lever amplification member 270 and the sixth lever amplification member 280 to rotate around the hinge joint between the lever amplification member and the carrier 320. Therefore, the fifth lever amplification member 270 and the sixth lever amplification member 280 perform a first-level amplification on the motion displacement output by the third driving mechanism 130. The output ends of the fifth lever amplification member 270 and the sixth lever amplification member 280 are respectively hinged to the input ends of the third half-bridge amplification member 290. The motion displacement output by the output ends of the fifth lever amplification member 270 and the sixth lever amplification member 280 is applied to the input ends of the third half-bridge amplification member 290, causing the output end of the third half-bridge amplification member 290 to rotate around the flexible hinge inside the third half-bridge amplification member 290. Therefore, the third half-bridge amplification member 290 performs a second-level amplification on the motion displacement output by the third driving mechanism 130. If the motion displacement output by the output end of the third half-bridge amplification member 290 is the motion displacement in the Y-axis direction, then the driving direction of the third driving mechanism 130 for the moving platform 310 is along the Y-axis direction, that is, the driving direction of the third driving mechanism 130 for the moving platform 310 is perpendicular to the driving direction of the first driving mechanism 110 for the moving platform 310, and the driving direction of the third driving mechanism 130 for the moving platform 310 is perpendicular to the driving direction of the second driving mechanism 120 for the moving platform 310.

[0078] Exemplarily, the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform further includes a fifth guiding mechanism 450 and a sixth guiding mechanism 460. The fifth guiding mechanism 450 is disposed at the first end of the third driving mechanism 130, and the first end of the third driving mechanism 130 is connected to the fifth lever amplification member 270 through a flexible hinge by the fifth guiding mechanism 450. The sixth guiding mechanism 460 is disposed at the third end of the third driving mechanism 130, and the third end of the third driving mechanism 130 is connected to the sixth lever amplification member 280 through a flexible hinge by the sixth guiding mechanism 460. When the third driving mechanism 130 drives the fifth lever amplification member 270 and the sixth lever amplification member 280 to rotate, shear forces will be generated on the third driving mechanism 130. By respectively disposing the fifth guiding mechanism 450 and the sixth guiding mechanism 460 at both ends of the third driving mechanism 130, the fifth guiding mechanism 450 and the sixth guiding mechanism 460 can reduce the shear forces received by the third driving mechanism 130, thereby protecting the third driving mechanism 130. In this application, the fifth guiding mechanism 450 and the sixth guiding mechanism 460 can adopt existing parallel plate guiding mechanisms or guiding mechanisms in other forms, which are not limited herein.

[0079] Such as Figure 7As shown, the output end of the second half-bridge amplification member 260 is connected to the moving platform 310. The movement displacement of the second half-bridge amplification member 260 is the movement displacement along the X-axis direction. Therefore, the moving platform 310 has the freedom of movement along the X-axis. The output end of the third half-bridge amplification member 290 is connected to the moving platform 310. The movement displacement of the third half-bridge amplification member 290 is the movement displacement along the Y-axis direction. Therefore, the moving platform 310 has the freedom of movement along the Y-axis. Also, since the moving platform 310 can move with the carrier 320, and the carrier 320 has the rotational freedom about the X-axis, the rotational freedom about the Y-axis, and the translational freedom along the Z-axis, the moving platform 310 thus has the rotational freedom about the X-axis, the rotational freedom about the Y-axis, the translational freedom along the Z-axis, the translational freedom along the X-axis, and the translational freedom along the Y-axis.

[0080] Exemplarily, such as Figure 7 and Figure 8 As shown, the large-stroke five-degree-of-freedom compliant precision positioning platform further includes an eleventh guiding mechanism 610, a twelfth guiding mechanism 620, a first decoupling mechanism 510, and a second decoupling mechanism 520. The output end of the second half-bridge amplification member 260 is connected to the moving platform 310 through the eleventh guiding mechanism 610 and the first decoupling mechanism 510. Due to the manufacturing and installation errors of the parts in the positioning platform, the movement displacement output by the output end of the second half-bridge amplification member 260 is not completely the displacement along the X-axis direction. By arranging the eleventh guiding mechanism 610 at the output end of the second half-bridge amplification member 260, the eleventh guiding mechanism 610 guides the movement displacement output by the second half-bridge amplification member 260, thereby reducing the displacement in the non-X-axis direction output by the output end of the second half-bridge amplification member 260. In this application, the eleventh guiding mechanism 610 can adopt an existing parallel plate guiding mechanism or other guiding mechanisms, which is not limited here.

[0081] Such as Figure 8 As shown, when the third driving mechanism 130 drives the moving platform 310 to move along the Y-axis direction, the moving platform 310 will generate a parasitic displacement in the X-axis direction. After connecting the first decoupling mechanism 510 to the moving platform 310, the first decoupling mechanism 510 can reduce the parasitic displacement in the X-axis direction and achieve the decoupling function. In this application, the first decoupling mechanism 510 can adopt an existing double parallelogram leaf spring or other decoupling mechanisms, which is not limited here.

[0082] Such as Figure 7As shown, the output end of the above-mentioned third half-bridge amplification member 290 is connected to the moving platform 310 through the twelfth guiding mechanism 620 and the second decoupling mechanism 520. Due to the manufacturing and installation errors of the parts in the positioning platform, the movement displacement output by the output end of the third half-bridge amplification member 290 is not completely the displacement along the Y-axis direction. By arranging the twelfth guiding mechanism 620 at the output end of the third half-bridge amplification member 290, the twelfth guiding mechanism 620 guides the movement displacement output by the third half-bridge amplification member 290, thereby reducing the displacement in the non-Y-axis direction output by the output end of the third half-bridge amplification member 290. In the present application, the twelfth guiding mechanism 620 can adopt an existing parallel plate guiding mechanism or other guiding mechanisms, which is not limited herein.

[0083] As Figure 7 shown, when the second driving mechanism 120 drives the moving platform 310 to move in the X-axis direction, the moving platform 310 will generate a parasitic displacement in the Y-axis direction. After connecting the second decoupling mechanism 520 to the moving platform 310, the second decoupling mechanism 520 can reduce the parasitic displacement in the Y-axis direction and achieve the decoupling function. In the present application, the second decoupling mechanism 520 can adopt an existing double parallelogram leaf spring or other decoupling mechanisms, which is not limited herein. In summary, the first decoupling mechanism 510 and the second decoupling mechanism 520 are provided in the precision positioning platform in the present application, making the control mode of the moving platform 310 simpler, thus reducing the requirements for the controller and thereby reducing costs.

[0084] The present invention also provides a positioning system, which includes: the large-stroke five-degree-of-freedom compliant precision positioning platform provided in the above embodiment. It should be noted that the positioning system provided in the embodiment of the present invention may also include other circuits and devices for supporting the normal operation of the large-stroke five-degree-of-freedom compliant precision positioning platform, such as an industrial computer for controlling the operation of the large-stroke five-degree-of-freedom compliant precision positioning platform.

[0085] In summary, in the large-stroke five-degree-of-freedom compliant precision positioning platform and positioning system provided in the present application, the first driving mechanism 110 is used to drive the moving platform 310 to move, and the first displacement amplification mechanism is respectively connected to the moving platform 310 and the first driving mechanism 110, and the first displacement amplification mechanism is used to amplify the movement displacement of the first driving mechanism 110 driving the moving platform 310. Therefore, the movement stroke of the moving platform 310 in the large-stroke five-degree-of-freedom compliant precision positioning platform can be increased. Therefore, the large-stroke five-degree-of-freedom compliant precision positioning platform provided in the embodiment of the present application can meet more application scenarios.

[0086] In the above embodiments, the descriptions of each embodiment have their own emphases. For the parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0087] In the description of the present application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. The positioning platform provided by the embodiments of the present application has been introduced in detail above. Specific examples are used herein to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the method and its core idea of the present application; at the same time, for those skilled in the art, according to the idea of the present application, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A large-stroke five-degree-of-freedom compliant precision positioning stage, characterized in that, The positioning platform includes: A moving platform; A first driving mechanism for driving the moving platform to move; A first displacement amplification mechanism respectively connected to the moving platform and the first driving mechanism; the first displacement amplification mechanism is used to amplify the movement displacement of the moving platform driven by the first driving mechanism; The first displacement amplification mechanism includes a primary amplification component and a secondary amplification component, and the primary amplification component is used to amplify the movement displacement output by the first driving mechanism; The secondary amplification component is used to amplify the movement displacement output by the first driving mechanism amplified by the primary amplification component; The primary amplification component includes a first lever amplification member and a second lever amplification member, and the secondary amplification component includes a first half-bridge amplification member; The input ends of the first lever amplification member and the second lever amplification member are respectively connected to the output end of the first driving mechanism, and the input ends of the first half-bridge amplification member are respectively connected to the output ends of the first lever amplification member and the second lever amplification member; The first lever amplification member and the second lever amplification member are respectively arranged on opposite sides of the first half-bridge amplification member; The positioning platform further includes: A carrier, which is connected to the first displacement amplification mechanism; A second driving mechanism connected to the carrier, and the second driving mechanism is used to drive the moving platform to move on the carrier; The large-stroke five-degree-of-freedom compliant precision positioning platform further includes: A base; the lower end of the first lever amplification member is connected to the base through a flexible hinge; An intermediate platform, and the initial state of the intermediate platform is parallel to the above-mentioned base; the output end of the first half-bridge amplification member is connected to the intermediate platform through a first flexible Hooke hinge, and the movement displacement amount of the first half-bridge amplification member is the movement displacement amount in the vertical direction; The carrier is fixedly connected to the intermediate platform; The movement direction of the moving platform driven by the second driving mechanism is perpendicular to the movement direction of the moving platform driven by the first driving mechanism; The positioning platform further includes: A second displacement amplification mechanism respectively connected to the moving platform and the second driving mechanism; the second displacement amplification mechanism is used to amplify the movement displacement of the moving platform driven by the second driving mechanism on the carrier; The second displacement amplification mechanism includes a primary amplification component Ⅳ and a secondary amplification component Ⅳ, and the primary amplification component Ⅳ is used to amplify the movement displacement output by the second driving mechanism; and the secondary amplification component Ⅳ is used to amplify the movement displacement output by the second driving mechanism amplified by the primary amplification component Ⅳ; The primary amplification component Ⅳ includes a third lever amplification member and a fourth lever amplification member, the secondary amplification component Ⅳ includes a second half-bridge amplification member, the input ends of the third lever amplification member and the fourth lever amplification member are respectively connected to the output end of the second driving mechanism, and the input ends of the second half-bridge amplification member are respectively connected to the output ends of the third lever amplification member and the fourth lever amplification member; The second driving mechanism is arranged between the third lever amplification member and the fourth lever amplification member, and the second driving mechanism is arranged along the Y-axis direction. The first end of the second driving mechanism is connected to the third lever amplification member through a flexible hinge; the second end of the second driving mechanism is connected to the fourth lever amplification member through a flexible hinge.

2. The large-stroke five-degree-of-freedom compliant precision positioning platform according to claim 1, wherein The positioning platform further includes: a third driving mechanism, connected to the carrier, and the third driving mechanism is used to drive the moving platform to move on the carrier; wherein, the moving direction of the moving platform driven by the third driving mechanism is perpendicular to the moving direction of the moving platform driven by the first driving mechanism; the moving direction of the moving platform driven by the third driving mechanism is perpendicular to the moving direction of the moving platform driven by the second driving mechanism.

3. The large-stroke five-degree-of-freedom compliant precision positioning platform according to claim 2, characterized in that, A first decoupling mechanism is further provided on the carrier; the first decoupling mechanism is used to reduce the parasitic displacement of the moving platform in the moving direction of the moving platform driven by the second driving mechanism.

4. A positioning system, characterized in that, The positioning system includes the large-stroke five-degree-of-freedom compliant precision positioning platform according to any one of claims 1-3.

Images