An electro-control lifting arm device for a semiconductor single crystal furnace equipment

Abstract

The present invention belongs to the technical field of Czochralski single crystal technology, and specifically relates to an electrically controlled lifting arm device for a semiconductor single crystal furnace equipment, including a lifting arm; a motor is installed at the end of the lifting arm; a wire winding shaft is rotatably connected at a position near the motor at the end of the lifting arm, and the wire winding shaft is driven by the motor; a crystal taking hook is arranged on the lower side of the lifting arm; a steel wire rope is arranged at the upper end of the crystal taking hook, and the other end of the steel wire rope passes through the inside of the lifting arm and is fixedly connected to the outside of the wire winding shaft; in the present invention, an electrically controlled crystal taking and lifting device is arranged on the lifting arm of the equipment itself, and the crystal bar can be taken out without additional equipment access. It has a small volume, is integrated, convenient, and is convenient for automatic operation. Since the electrically controlled crystal taking device is installed on the lifting arm of the equipment body, it has high precision, large lifting force, and is convenient for installation, making the crystal taking operation safer and more reliable. The control signal is led out from the equipment body, and the operation is controllable without human intervention.

Description

Technical Field

[0001] The present invention belongs to the technical field of Czochralski single crystal technology, and specifically relates to an electrically controlled lifting arm device for a semiconductor single crystal furnace equipment. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by the Czochralski method. After growth and formation, the crystal rod needs to be taken out from the top of the single crystal furnace.

[0003] Currently, in the existing technology, after the crystal rod is formed in the market, the crystal is taken out manually or by an external crystal taking vehicle. The cost is relatively high, and the crystal taking process is cumbersome and complex, affecting the production efficiency of monocrystalline silicon. There is a lack of an electrically controlled lifting arm device for a semiconductor single crystal furnace equipment.

[0004] Therefore, the present invention provides an electrically controlled lifting arm device for a semiconductor single crystal furnace equipment. Summary of the Invention

[0005] In order to make up for the deficiencies of the existing technology and solve at least one of the technical problems proposed in the background art.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: An electrically controlled lifting arm device for a semiconductor single crystal furnace equipment described in the present invention includes a lifting arm; a motor is installed at the end of the lifting arm; a wire winding shaft is rotatably connected at a position near the motor at the end of the lifting arm, and the wire winding shaft is driven by the motor; a crystal taking hook is provided on the lower side of the lifting arm; a steel wire rope is provided at the upper end of the crystal taking hook, and the other end of the steel wire rope passes through the inside of the lifting arm and is fixedly connected to the outside of the wire winding shaft; the motor drives the wire winding shaft to rotate, driving the steel wire rope wound thereon to lift and lower, and the lifting and lowering of the steel wire rope drives the crystal taking hook to lift and lower. With the lifting and rotating actions of the lifting arm, the lifting, lowering and rotation of the crystal rod can be realized, that is, the crystal taking function can be realized. The present invention sets an electrically controlled crystal taking and lifting device on the lifting arm of the equipment itself, and the crystal rod can be taken out without the need for additional equipment access. It has a small volume, is integrated, convenient, and is convenient for automatic operation. Since the electrically controlled crystal taking device is installed on the lifting arm of the equipment body, it has high precision, large lifting force, and is easy to install, making the crystal taking operation safer and more reliable. The control signal is led out from the equipment body, and the operation is controllable without human intervention.

[0007] Preferably, a speed reducer is installed at the end of the lifting arm; the input shaft of the speed reducer is fixedly connected to the output shaft of the motor, and the output shaft of the speed reducer is fixedly connected to the wire winding shaft; by setting a speed reducer between the motor and the wire winding shaft, the rotation speed of the wire winding shaft can be reasonably regulated, thereby improving the control precision of the rising or falling of the crystal rod.

[0008] Preferably, a connecting block is fixedly connected to the lower end of the steel wire rope, and the crystal taking hook is rotatably connected to the lower end of the connecting block through a pin shaft; a clamping groove is formed in the lower side of the lifting arm above the connecting block, and the clamping groove is matched with the connecting block; after the crystal bar is lifted from the single crystal furnace by the crystal taking hook, the lifting arm rotates and transports the crystal bar. During this process, the crystal bar is likely to shake and there is a risk of collision with other equipment, resulting in bump damage to the crystal bar. At the same time, the newly formed crystal bar has a relatively high temperature and its structure is relatively fragile, and shaking may cause the crystal bar to break. At this time, by setting the connecting block and the clamping groove, after the crystal taking hook lifts the crystal bar from the single crystal furnace, the connecting block can be inserted into the clamping groove for clamping, so that the steel wire rope cannot shake, effectively reducing the possibility of shaking during the rotation of the crystal bar and ensuring the smooth transportation of the crystal bar.

[0009] Preferably, a slider is slidably connected to the top of the connecting block; an installation groove is formed inside the connecting block; a guide rod is fixedly connected in the installation groove; a pair of guide blocks are slidably connected to the guide rod, and a spring is fixedly connected between the guide blocks; a connecting rod is hinged between the guide block and the bottom of the slider; a pair of clamping plates are hinged to the bottom of the connecting block; a first elastic sheet is hinged between the clamping plate and the guide block; after the connecting block rises, the top of the clamping groove squeezes the slider and makes the slider move towards the crystal taking hook, and then the guide block is pushed to slide towards both sides through the connecting rod, and the clamping plate is driven to rotate through the first elastic sheet, and then the clamping plate clamps the top of the crystal taking hook, effectively reducing the possibility of the crystal taking hook driving the crystal bar to shake during the rotation process and further ensuring the smooth transportation of the crystal bar.

[0010] Preferably, an elastic clamping block is fixedly connected to the side of the clamping plate close to the crystal taking hook; the side of the elastic clamping block close to the crystal taking hook is set as an arc surface; by setting the elastic clamping block and making the arc surface of the elastic clamping block squeeze the top of the crystal taking hook, the contact area between the clamping plate and the crystal taking hook can be increased, thereby improving the clamping degree of the crystal taking hook and further reducing the risk of the crystal bar shaking.

[0011] Preferably, a plurality of elastic tentacles are fixedly connected to the side of the elastic clamping block close to the crystal taking hook; the elastic tentacles are set in an arc shape, and the bending direction thereof faces the two ends of the elastic clamping block; a plurality of storage cavities are formed inside the elastic clamping block close to the elastic tentacles; after the crystal taking hook lifts the crystal bar from the single crystal furnace, the temperature of the crystal taking hook is still relatively high at this time, and dust and other impurities in the workshop will adhere to the surface of the crystal taking hook. By setting the elastic tentacles, when the elastic clamping block squeezes the crystal taking hook, the elastic tentacles will gradually bend and push the impurities on the surface of the crystal taking hook outwards, reducing the slipping phenomenon caused by the impurities and improving the clamping degree of the crystal taking hook. At the same time, the impurities will enter the storage cavity along the inner side of the elastic tentacles for collection, reducing the problem of impurities falling into the single crystal furnace and causing pollution.

[0012] Preferably, an elastic bladder is fixedly connected to the inner wall of the storage cavity, and cleaning water is filled inside the elastic bladder; small holes are formed on the surface of the elastic bladder, and a fitting piece is fixedly connected to the upper side of the elastic bladder; a second elastic piece is fixedly connected between the fitting piece and the root of the elastic antenna; during the bending process of the elastic antenna, the fitting piece will be pushed by the second elastic piece, and then the fitting piece squeezes the elastic bladder, and the water inside the elastic bladder is atomized and extruded through the small holes and sprayed on the inner wall of the storage cavity. Then, the water and impurities are mixed to form a viscous object, improving the fixing degree of the impurities inside the storage cavity and reducing the problem of impurities falling from the inside of the storage cavity.

[0013] Preferably, a guide wheel is rotatably connected to a position inside the lifting arm close to the card slot, and the steel wire rope bypasses the outside of the guide wheel; an oil shell is arranged inside the lifting arm close to the guide wheel, and lubricating oil is filled in the oil shell; a coating ball is fixedly connected to the top of the oil shell through a bracket; the coating ball is made of a water-absorbing material and is in contact with the surface of the guide wheel; a first cotton strip is fixedly connected to the coating ball, and the other end of the first cotton strip extends into the oil shell; a plurality of coating blocks are evenly distributed on the outer circumference of the guide wheel, and the coating blocks are made of a water-absorbing material; the first cotton strip continuously transports the lubricating oil inside the oil shell to the inside of the coating ball. During the movement of the steel wire rope, the guide wheel will be driven to rotate. Then, the coating blocks on the surface of the guide wheel will absorb the lubricating oil from the inside of the coating ball. When the coating blocks come into contact with the steel wire rope subsequently, the lubricating oil will be smeared on the surface of the steel wire rope, providing an uninterrupted lubricating effect for the steel wire rope and avoiding serious wear on the surface of the steel wire rope after long-term use, resulting in the risk of the crystal bar falling.

[0014] Preferably, an annular oil-absorbing cotton is fixedly connected to the inner wall of the top of the card slot, and the steel wire rope passes through the oil-absorbing cotton and is slidably connected thereto; a plurality of elastic scraping strips are evenly distributed on the inner side wall of the oil-absorbing cotton; the elastic scraping strips bend upward and closely adhere to the surface of the steel wire rope; when the steel wire rope moves downward, the plurality of elastic scraping strips will scrape off the lubricating oil on the surface of the steel wire rope, and then the lubricating oil flows into the inside of the oil-absorbing cotton along the upper side of the elastic scraping strips for collection, thus avoiding the problem that a large amount of lubricating oil remains on the surface of the steel wire rope after it descends, resulting in the lubricating oil spilling into the single crystal furnace and causing pollution.

[0015] Preferably, an oil-absorbing block is fixedly connected to a position close to the steel wire rope on the lower side of the elastic scraping strip; a second cotton strip is fixedly connected between the oil-absorbing block and the oil-absorbing cotton; the lubricating oil inside the oil-absorbing cotton is transported to the oil-absorbing block through the second cotton strip. When the steel wire rope moves upward, it will drive the elastic scraping strip to bend further, and then the oil-absorbing block comes into contact with the steel wire rope and re-smears the lubricating oil on the surface of the steel wire rope. Since the steel wire rope enters the lifting arm after rising, the lubricating oil will not spill into the single crystal furnace again. At this time, this operation reclaims and reuses the lubricating oil stored inside the oil-absorbing cotton on the surface of the steel wire rope, improving the utilization rate of the lubricating oil.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. A kind of electric control lifting arm device for semiconductor single crystal furnace equipment according to the present invention. In the present invention, an electric control crystal taking and lifting device is arranged on the lifting arm of the equipment itself, and the crystal bar can be taken out without additional equipment access. It has a small volume, is integrated, convenient, and is convenient for automatic operation. Since the electric control crystal taking device is installed on the lifting arm of the equipment body, it has high precision, large lifting force, and is convenient for installation, making the crystal taking operation safer and more reliable. The control signal is led out from the equipment body, and the operation is controllable without human intervention.

[0018] 2. A kind of electric control lifting arm device for semiconductor single crystal furnace equipment according to the present invention. By arranging a speed reducer between the motor and the wire winding shaft, the rotation speed of the wire winding shaft can be reasonably regulated, thereby improving the control precision of the rising or falling of the crystal bar. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings.

[0020] Figure 1 is a perspective view of the present invention;

[0021] Figure 2 is a structural schematic diagram of the present invention;

[0022] Figure 3 is a front view of the present invention;

[0023] Figure 4 is a partial cross-sectional view of the present invention;

[0024] Figure 5 is a structural schematic diagram of the connecting block in the present invention;

[0025] Figure 6 is Figure 4 a partial enlarged view at A in

[0026] Figure 7 is a structural schematic diagram of the elastic clamping block in the present invention;

[0027] Figure 8 is Figure 7 a partial enlarged view at B in

[0028] Figure 9 is a structural schematic diagram of the elastic scraping strip in the present invention;

[0029] In the figure: lifting arm 1, motor 2, wire winding shaft 3, crystal taking hook 4, steel wire rope 5, speed reducer 6, connecting block 7, card slot 8, slider 9, guide block 10, spring 11, connecting rod 12, clamping plate 13, first elastic sheet 14, elastic clamping block 15, elastic antenna 16, storage cavity 17, elastic sac 18, fitting sheet 19, second elastic sheet 20, guide wheel 21, oil shell 22, coating ball 23, first cotton strip 24, coating block 25, oil absorbing cotton 26, elastic scraping strip 27, oil absorbing block 28, second cotton strip 29. Detailed implementation manners

[0030] In order to make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0031] Embodiment 1

[0032] As Figures 1 to 3 shown, a kind of electric control lifting arm device for semiconductor single crystal furnace equipment described in the embodiment of the present invention includes a lifting arm 1; a motor 2 is installed at the end of the lifting arm 1; a wire winding shaft 3 is rotatably connected at a position of the end of the lifting arm 1 close to the motor 2, and the wire winding shaft 3 is driven by the motor 2; a crystal taking hook 4 is arranged on the lower side of the lifting arm 1; a steel wire rope 5 is arranged at the upper end of the crystal taking hook 4, and the other end of the steel wire rope 5 passes through the inside of the lifting arm 1 and is fixedly connected to the outside of the wire winding shaft 3; the motor 2 drives the wire winding shaft 3 to rotate, drives the steel wire rope 5 wound thereon to lift and lower, and the lifting and lowering of the steel wire rope 5 drives the crystal taking hook 4 to lift and lower. Cooperating with the lifting and rotating actions of the lifting arm 1, the lifting, lowering and rotation of the crystal bar can be realized, that is, the crystal taking function can be realized. The present invention sets an electric control crystal taking and lifting device on the lifting arm 1 of the equipment itself, and the crystal bar can be taken out without additional equipment access. It has a small volume, is integrated, convenient, and is convenient for automatic operation. Since the electric control crystal taking device is installed on the lifting arm 1 of the equipment body, it has high precision, large lifting force, is convenient for installation, makes the crystal taking operation safer and more reliable, the control signal is led out from the equipment body, and the operation is controllable without manual intervention.

[0033] A speed reducer 6 is installed at the end of the lifting arm 1; the input shaft of the speed reducer 6 is fixedly connected to the output shaft of the motor 2, and the output shaft of the speed reducer 6 is fixedly connected to the wire winding shaft 3; by arranging the speed reducer 6 between the motor 2 and the wire winding shaft 3, the rotation speed of the wire winding shaft 3 can be reasonably regulated, so as to improve the control precision of the rising or falling of the crystal bar.

[0034] Embodiment 2

[0035] As Figures 4 to 6As shown, compared with the first comparative example, another implementation manner of the present invention is as follows: A connection block 7 is fixedly connected to the lower end of the steel wire rope 5, and the crystal picking hook 4 is rotatably connected to the lower end of the connection block 7 through a pin shaft; A clamping groove 8 is formed in the lower side of the lifting arm 1 above the connection block 7, and the clamping groove 8 cooperates with the connection block 7; After the crystal bar is lifted from the single crystal furnace by the crystal picking hook 4, the lifting arm 1 rotates and transports the crystal bar. During this process, the crystal bar is prone to shaking and there is a risk of colliding with other equipment, resulting in bumps and damages to the crystal bar. At the same time, the temperature of the newly formed crystal bar is relatively high and its structure is relatively fragile. Shaking may cause the crystal bar to break. At this time, by setting the connection block 7 and the clamping groove 8, after the crystal picking hook 4 lifts the crystal bar from the single crystal furnace, the connection block 7 can be inserted into the clamping groove 8 for clamping, so that the steel wire rope 5 cannot shake, effectively reducing the possibility of shaking during the rotation of the crystal bar and ensuring the smooth transportation of the crystal bar.

[0036] A slider 9 is slidably connected to the top of the connection block 7; An installation groove is formed inside the connection block 7; A guide rod is fixedly connected in the installation groove; A pair of guide blocks 10 are slidably connected to the guide rod, and a spring 11 is fixedly connected between the guide blocks 10; A connecting rod 12 is hinged between the guide block 10 and the bottom of the slider 9; A pair of clamping plates 13 are hinged to the bottom of the connection block 7; A first elastic sheet 14 is hinged between the clamping plate 13 and the guide block 10; After the connection block 7 rises, the top of the clamping groove 8 squeezes the slider 9 and makes the slider 9 move towards the crystal picking hook 4, and then the guide block 10 is pushed to slide to both sides through the connecting rod 12, and the clamping plate 13 is driven to rotate through the first elastic sheet 14, and then the clamping plate 13 clamps the top of the crystal picking hook 4, effectively reducing the possibility of the crystal picking hook 4 driving the crystal bar to shake during the rotation process and further ensuring the smooth transportation of the crystal bar.

[0037] An elastic clamping block 15 is fixedly connected to the side of the clamping plate 13 close to the crystal picking hook 4; The side of the elastic clamping block 15 close to the crystal picking hook 4 is set as an arc surface; By setting the elastic clamping block 15 and making the arc surface of the elastic clamping block 15 squeeze the top of the crystal picking hook 4, the contact area between the clamping plate 13 and the crystal picking hook 4 can be increased, thereby increasing the clamping degree of the crystal picking hook 4 and further reducing the risk of the crystal bar shaking.

[0038] As Figures 7 to 8As shown in the figure, a plurality of elastic tentacles 16 are fixedly connected to one side of the elastic clamping block 15 close to the crystal picking hook 4; the elastic tentacles 16 are arranged in an arc shape, and the bending direction thereof faces both ends of the elastic clamping block 15; a plurality of storage cavities 17 are formed inside the elastic clamping block 15 close to the elastic tentacles 16; after the crystal picking hook 4 lifts the crystal bar from the single crystal furnace, the temperature of the crystal picking hook 4 is still relatively high at this time, and dust and other impurities inside the workshop will adhere to the surface of the crystal picking hook 4. By providing the elastic tentacles 16, when the elastic clamping block 15 squeezes the crystal picking hook 4, the elastic tentacles 16 will gradually bend and push the impurities on the surface of the crystal picking hook 4 outward, reducing the slipping phenomenon caused by the impurities, improving the clamping degree of the crystal picking hook 4, and at the same time, the impurities will enter the storage cavity 17 along the inner side of the elastic tentacles 16 and be collected, reducing the problem of impurities falling into the single crystal furnace and causing pollution.

[0039] An elastic bladder 18 is fixedly connected to the inner wall of the storage cavity 17, and cleaning water is filled inside the elastic bladder 18; small holes are formed on the surface of the elastic bladder 18, and a fitting piece 19 is fixedly connected to the upper side of the elastic bladder 18; a second elastic piece 20 is fixedly connected between the fitting piece 19 and the root of the elastic tentacle 16; during the bending process of the elastic tentacle 16, the fitting piece 19 will be pushed through the second elastic piece 20, and then the fitting piece 19 squeezes the elastic bladder 18, and the water inside the elastic bladder 18 is atomized and extruded through the small holes, sprayed on the inner wall of the storage cavity 17, and then the water is mixed with the impurities to form a viscous object, improving the fixing degree of the impurities inside the storage cavity 17 and reducing the problem of impurities falling from the inside of the storage cavity 17.

[0040] As Figure 6 and Figure 9 As shown in the figure, a guide wheel 21 is rotatably connected to a position inside the lifting arm 1 close to the card slot 8, and the steel wire rope 5 bypasses the outside of the guide wheel 21; an oil shell 22 is arranged inside the lifting arm 1 close to the guide wheel 21, and lubricating oil is filled in the oil shell 22; a coating ball 23 is fixedly connected to the top of the oil shell 22 through a bracket; the coating ball 23 is made of a water-absorbing material and is in contact with the surface of the guide wheel 21; a first cotton strip 24 is fixedly connected to the coating ball 23, and the other end of the first cotton strip 24 extends into the oil shell 22; a plurality of coating blocks 25 are evenly distributed on the outer circumference of the guide wheel 21, and the coating blocks 25 are made of a water-absorbing material; the first cotton strip 24 continuously transports the lubricating oil inside the oil shell 22 to the inside of the coating ball 23. During the movement of the steel wire rope 5, the guide wheel 21 will be driven to rotate, and then the coating blocks 25 on the surface of the guide wheel 21 will absorb the lubricating oil from the inside of the coating ball 23. When the coating blocks 25 come into contact with the steel wire rope 5 subsequently, the lubricating oil will be smeared on the surface of the steel wire rope 5, providing an uninterrupted lubrication effect for the steel wire rope 5 and avoiding the risk that the surface of the steel wire rope 5 is severely worn after long-term use, resulting in the crystal bar falling.

[0041] An annular oil-absorbing cotton 26 is fixedly connected to the inner wall of the top of the card slot 8, and the steel wire rope 5 passes through the oil-absorbing cotton 26 and is slidably connected thereto; a plurality of elastic scraping strips 27 are circumferentially distributed on the inner side wall of the oil-absorbing cotton 26; the elastic scraping strips 27 are bent upward and closely attached to the surface of the steel wire rope 5; when the steel wire rope 5 moves downward, the plurality of elastic scraping strips 27 will scrape the lubricating oil on the surface of the steel wire rope 5, and then the lubricating oil flows into the interior of the oil-absorbing cotton 26 along the upper side of the elastic scraping strips 27 for collection, thereby avoiding the problem that a large amount of lubricating oil exists on the surface of the steel wire rope 5 after it descends, resulting in the lubricating oil spilling into the single crystal furnace and causing pollution.

[0042] An oil-absorbing block 28 is fixedly connected to the position close to the steel wire rope 5 on the lower side of the elastic scraping strip 27; a second cotton strip 29 is fixedly connected between the oil-absorbing block 28 and the oil-absorbing cotton 26; the lubricating oil inside the oil-absorbing cotton 26 is transported to the oil-absorbing block 28 through the second cotton strip 29. When the steel wire rope 5 moves upward, it will drive the elastic scraping strip 27 to bend further, and then the oil-absorbing block 28 contacts the steel wire rope 5 and reapplies the lubricating oil to the surface of the steel wire rope 5. Since the steel wire rope 5 enters the lifting arm 1 after rising, the lubricating oil will no longer spill into the single crystal furnace. At this time, this operation reclaims and reuses the lubricating oil stored inside the oil-absorbing cotton 26 on the surface of the steel wire rope 5, improving the utilization rate of the lubricating oil.

[0043] Working principle: The motor 2 drives the wire winding shaft 3 to rotate, driving the lifting of the steel wire rope 5 wound thereon. The lifting and lowering of the steel wire rope 5 drive the lifting and lowering of the crystal-taking hook 4. Cooperating with the lifting and rotating actions of the lifting arm 1, the lifting, lowering, and rotation of the ingot can be realized, that is, the crystal-taking function can be realized. In the present invention, an electric control crystal-taking lifting device is provided on the lifting arm 1 of the equipment itself. The ingot can be taken out without the need for additional equipment access. It has a small volume, is integrated, convenient, and is convenient for automatic operation. Since the electric control crystal-taking device is installed on the lifting arm 1 of the equipment body, it has high precision, large lifting force, and is convenient for installation, making the crystal-taking operation safer and more reliable. The control signal is led out from the equipment body, and the operation is controllable without human intervention; by setting a speed reducer 6 between the motor 2 and the wire winding shaft 3, the rotation speed of the wire winding shaft 3 can be reasonably regulated, thereby improving the control precision of the lifting or lowering of the ingot; after the ingot is lifted from the single crystal furnace by the crystal-taking hook 4, the lifting arm 1 rotates and transports the ingot. During this process, the ingot is prone to shaking and there is a risk of collision with other equipment, resulting in damage to the ingot by knocking. At the same time, the newly formed ingot has a high temperature and its structure is relatively fragile. Shaking may cause the ingot to break. At this time, by setting a connecting block 7 and a clamping groove 8, after the crystal-taking hook 4 lifts the ingot from the single crystal furnace, the connecting block 7 can be inserted into the clamping groove 8 for clamping, so that the steel wire rope 5 cannot shake, effectively reducing the possibility of shaking during the rotation of the ingot and ensuring the smooth transportation of the ingot; after the connecting block 7 rises, the top of the clamping groove 8 squeezes the slider 9 and makes the slider 9 move towards the crystal-taking hook 4, and then pushes the guide block 10 to slide to both sides through the connecting rod 12, and drives the clamping plate 13 to rotate through the first elastic piece 14, and then the clamping plate 13 clamps the top of the crystal-taking hook 4, effectively reducing the possibility of the crystal-taking hook 4 driving the ingot to shake during the rotation process, and further ensuring the smooth transportation of the ingot; by setting an elastic clamping block 15 and making the arc surface of the elastic clamping block 15 squeeze the top of the crystal-taking hook 4, the contact area between the clamping plate 13 and the crystal-taking hook 4 can be increased, thereby increasing the clamping degree of the crystal-taking hook 4 and further reducing the risk of the ingot shaking; after the crystal-taking hook 4 lifts the ingot from the single crystal furnace, at this time, the temperature of the crystal-taking hook 4 is still relatively high, and dust and other impurities in the workshop will adhere to the surface of the crystal-taking hook 4. By setting elastic tentacles 16, when the elastic clamping block 15 squeezes the crystal-taking hook 4, the elastic tentacles 16 will gradually bend and push the impurities on the surface of the crystal-taking hook 4 outward, reducing the slipping phenomenon caused by impurities, increasing the clamping degree of the crystal-taking hook 4, and at the same time, the impurities will enter the storage cavity 17 along the inner side of the elastic tentacles 16 for collection, reducing the problem of impurities falling into the single crystal furnace and causing pollution; during the bending process of the elastic tentacles 16, the fitting piece 19 will be pushed by the second elastic piece 20, and then the fitting piece 19 squeezes the elastic capsule 18, and the water inside the elastic capsule 18 is atomized and extruded through the small holes, sprayed on the inner wall of the storage cavity 17, and then the water and impurities are mixed to form a viscous object, increasing the fixing degree of the impurities inside the storage cavity 17 and reducing the problem of impurities falling from the inside of the storage cavity 17;The No. 1 cotton wick 24 continuously transports the lubricating oil inside the oil shell 22 to the inside of the coating ball 23. During the movement of the steel wire rope 5, the guide wheel 21 will be driven to rotate. Furthermore, the coating block 25 on the surface of the guide wheel 21 will absorb the lubricating oil from the inside of the coating ball 23. When the coating block 25 comes into contact with the steel wire rope 5 subsequently, it will smear the lubricating oil on the surface of the steel wire rope 5, providing an uninterrupted lubrication effect for the steel wire rope 5 and avoiding serious wear on its surface after long-term use of the steel wire rope 5, which may lead to the risk of the crystal rod falling off; when the steel wire rope 5 moves downward, multiple elastic scraping strips 27 will scrape off the lubricating oil on the surface of the steel wire rope 5. Then, the lubricating oil flows into the inside of the oil-absorbing cotton 26 along the upper side of the elastic scraping strips 27 for collection, thus avoiding the problem that a large amount of lubricating oil remains on the surface of the steel wire rope 5 after it descends, causing pollution to the inside of the single crystal furnace; the lubricating oil inside the oil-absorbing cotton 26 is transported to the oil-absorbing block 28 through the No. 2 cotton wick 29. When the steel wire rope 5 moves upward, it will drive the elastic scraping strips 27 to bend further. Furthermore, the oil-absorbing block 28 comes into contact with the steel wire rope 5 and re-smears the lubricating oil on the surface of the steel wire rope 5. Since the steel wire rope 5 enters the lifting arm 1 immediately after rising, the lubricating oil will no longer be spilled into the inside of the single crystal furnace. At this time, this operation reclaims and re-uses the lubricating oil stored inside the oil-absorbing cotton 26 on the surface of the steel wire rope 5, improving the utilization rate of the lubricating oil.

[0044] The above front, back, left, right, up, and down are all based on the Figure 1 description in the attached drawings of the specification. Taking the perspective of the observer as the standard, the side of the device facing the observer is defined as the front, and the left side of the observer is defined as the left, and so on.

[0045] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the protection scope of the present invention.

[0046] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An electric control lifting arm device for a semiconductor single crystal furnace equipment, characterized in that: It includes a lifting arm (1); a motor (2) is installed at the end of the lifting arm (1); a wire winding shaft (3) is rotatably connected at a position near the motor (2) at the end of the lifting arm (1), and the wire winding shaft (3) is driven by the motor (2); a crystal picking hook (4) is arranged on the lower side of the lifting arm (1); a steel wire rope (5) is arranged at the upper end of the crystal picking hook (4), and the other end of the steel wire rope (5) passes through the inside of the lifting arm (1) and is fixedly connected to the outside of the wire winding shaft (3). A connecting block (7) is fixedly connected to the lower end of the steel wire rope (5), and the crystal picking hook (4) is rotatably connected to the lower end of the connecting block (7) through a pin shaft; a clamping groove (8) is formed in the lower side of the lifting arm (1) above the connecting block (7), and the clamping groove (8) is matched with the connecting block (7). A slider (9) is slidably connected to the top of the connecting block (7); an installation groove is formed in the connecting block (7); a guide rod is fixedly connected in the installation groove; a pair of guide blocks (10) are slidably connected to the guide rod, and a spring (11) is fixedly connected between the guide blocks (10); a connecting rod (12) is hinged between the guide block (10) and the bottom of the slider (9); a pair of clamping plates (13) are hinged to the bottom of the connecting block (7); a first elastic sheet (14) is hinged between the clamping plate (13) and the guide block (10). An elastic clamping block (15) is fixedly connected to one side of the clamping plate (13) close to the crystal picking hook (4); the side of the elastic clamping block (15) close to the crystal picking hook (4) is set as an arc surface.

2. The electro-control lifting arm device for a semiconductor single crystal furnace equipment according to claim 1, characterized in that: A speed reducer (6) is installed at the end of the lifting arm (1); the input shaft of the speed reducer (6) is fixedly connected to the output shaft of the motor (2), and the output shaft of the speed reducer (6) is fixedly connected to the wire winding shaft (3).

3. The electro-control lifting arm device for a semiconductor single crystal furnace equipment according to claim 1, characterized in that: A plurality of elastic tentacles (16) are fixedly connected to one side of the elastic clamping block (15) close to the crystal picking hook (4); the elastic tentacles (16) are set in an arc shape, and the bending direction thereof faces the two ends of the elastic clamping block (15); a plurality of storage cavities (17) are formed in the elastic clamping block (15) near the elastic tentacles (16).

4. A semiconductor single crystal furnace equipment electric control lifting arm device according to claim 3, characterized in that: An elastic bladder (18) is fixedly connected to the inner wall of the storage cavity (17), and cleaning water is filled in the elastic bladder (18); small holes are formed in the surface of the elastic bladder (18), and a fitting piece (19) is fixedly connected to the upper side of the elastic bladder (18); a second elastic sheet (20) is fixedly connected between the fitting piece (19) and the root of the elastic tentacle (16).

5. A kind of electric control lifting arm device for semiconductor single crystal furnace equipment according to claim 1, characterized in that: A guide wheel (21) is rotatably connected inside the lifting arm (1) near the clamping groove (8), and the steel wire rope (5) bypasses the outside of the guide wheel (21); an oil shell (22) is arranged inside the lifting arm (1) near the guide wheel (21), and the oil shell (22) is filled with lubricating oil; a coating ball (23) is fixedly connected to the top of the oil shell (22) through a bracket; the coating ball (23) is made of a water-absorbing material, and the coating ball (23) is in contact with the surface of the guide wheel (21); a first cotton strip (24) is fixedly connected to the coating ball (23), and the other end of the first cotton strip (24) extends into the oil shell (22); a plurality of coating blocks (25) are evenly distributed on the outer circumference of the guide wheel (21), and the coating blocks (25) are made of a water-absorbing material.

6. A semiconductor single crystal furnace equipment electric control lifting arm device according to claim 5, characterized in that: An annular oil-absorbing cotton (26) is fixedly connected to the inner wall of the top of the clamping groove (8), and the steel wire rope (5) passes through the oil-absorbing cotton (26) and is slidably connected thereto; a plurality of elastic scraping strips (27) are evenly distributed on the inner side wall of the oil-absorbing cotton (26); the elastic scraping strips (27) are bent upward and closely attached to the surface of the steel wire rope (5).

7. A device for an electronically controlled lifting arm of a semiconductor single crystal furnace equipment according to claim 6, characterized in that: An oil-absorbing block (28) is fixedly connected to the lower side of the elastic scraping strip (27) near the steel wire rope (5); a second cotton strip (29) is fixedly connected between the oil-absorbing block (28) and the oil-absorbing cotton (26).

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