Treatment furnace

Abstract

The present application provides a kind of processing furnace, it makes the preparation work before starting to carry out the treatment of the object of processing become simple. Heat treatment furnace has: furnace body, input port roller, multiple guide rollers, output port roller and through device. Through device has: the front end of the object of processing wound on input port roller is installed in a detachable manner for mounting part, and the mounting part moves along the second conveying path set in advance by moving device. If the front end of the object of processing wound on input port roller is installed in mounting part, and the mounting part moves along the second conveying path by moving device, the object of processing wound on input port roller is erected on multiple guide rollers, and is installed on output port roller from output port to send out to the outside of furnace.

Description

TECHNICAL FIELD

[0001] The technology disclosed in this specification relates to a processing furnace that processes a processed object that is erected from an input port to an output port via a processing chamber. BACKGROUND

[0002] In the processing furnace disclosed in Patent Literature 1, a processed object is input from an input port into a processing chamber, is processed (for example, dried, etc.) during conveyance in the processing chamber, and is output from an output port to the outside of the furnace. Therefore, the processing time of the processed object is the time during which the processed object is conveyed in the processing chamber. In the processing furnace of Patent Literature 1, in order to effectively utilize the space in the processing chamber, a plurality of guide rollers are provided in the processing chamber. The processed object is erected from the input port to the output port by the plurality of guide rollers, and is conveyed in the processing chamber via a conveyance path defined by the plurality of guide rollers. By providing the plurality of guide rollers in the processing chamber, the conveyance path is lengthened, and thus the required processing time can be ensured.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: International Publication No. 2014 / 163175 SUMMARY

[0006] In the above-described processing furnace, as a preparatory work before starting the processing of the processed object, the processed object wound around the input port roller must be introduced into the processing chamber via the input port, and must be installed on the output port roller outside the furnace via the output port from the processing chamber. On the other hand, in order to lengthen the processing time of the processed object, a plurality of guide rollers are provided in the processing chamber of the processing furnace, and a complex conveyance path is formed by the plurality of guide rollers. Therefore, when the preparatory work is performed, the processed object introduced into the processing chamber must be guided to the output port again via the complex conveyance path in a state in which the processed object is erected on the plurality of guide rollers in order. The preparatory work before the start of the processing of the processed object becomes complicated. This specification discloses a technology that can make the preparatory work before starting the processing of the processed object easy.

[0007] The processing furnace disclosed in the present specification includes: a furnace body having an input port, an output port, and a processing chamber disposed between the input port and the output port; an input port roller disposed outside the furnace body and in the vicinity of the input port and winding a processed object; a plurality of guide rollers disposed in the processing chamber and guiding the processed object; an output port roller disposed outside the furnace body and in the vicinity of the output port and winding the processed object conveyed in the processing chamber; a threading device for erecting the processed object wound on the input port roller from the input port to the output port via the plurality of guide rollers; and a control device for controlling rotation of the input port roller. The processed object wound on the input port roller is conveyed from the input port to the output port via a first conveying path defined by the plurality of guide rollers with the leading end of the processed object installed on the output port roller. The threading device includes an installation member to which the leading end of the processed object wound on the input port roller is detachably installed, and a moving device that moves the installation member along a second conveying path set in advance. The second conveying path is set along the first conveying path so that the processed object installed on the installation member is erected on the plurality of guide rollers. The length of the second conveying path is longer than that of the first conveying path in the processing chamber. When the installation member is moved along the second conveying path by the moving device to erect the processed object wound on the input port roller on the plurality of guide rollers, the control device stops the rotation of the input port roller when the position of the installation member on the second conveying path is at a position at which the processed object erected on the adjacent guide rollers is bent, so that the processed object is not fed out from the input port roller.

[0008] In the processing furnace described above, the processed object is erected on the output port roller from the input port roller using the threading device when a preparation work before processing starts is performed. That is, first, the leading end of the processed object wound on the input port roller is installed on the installation member of the threading device. Next, the installation member is moved along a second conveying path set in advance by the moving device while the input port roller is rotated to feed out the processed object from the input port roller. Accordingly, the installation member on which the leading end of the processed object is installed is moved along the second conveying path in the processing chamber, and the processed object is erected on the plurality of guide rollers. When the processed object is erected on the plurality of guide rollers, the leading end of the processed object is detached from the installation member and installed on the output port roller. Accordingly, the processed object is erected on the output port roller from the input port roller. Since the installation member is moved along the second conveying path by the moving device while the input port roller is rotated, the preparation work before processing starts can be easily performed.

[0009] Further, in the processing chamber, in order to mount the processed object on the plurality of guide rollers, the length of the second conveying path of the mounting member is made longer than the length of the first conveying path. Thus, the position of the mounting member on the second conveying path causes the processed object mounted on the adjacent guide rollers to be bent. If the processed object is continuously fed from the input port roller in the state where the processed object is bent, the processed object is wound around the guide rollers in the bent state, and the operation must be restarted. In the above-described heat treatment furnace, when the mounting member reaches a specific position (i.e., a position where the processed object mounted on the adjacent guide rollers is bent), the input port roller is stopped from rotating, and the processed object is not fed from the input port roller. Thus, the processed object is wound around the guide rollers in the bent state is suppressed, and the processed object can be properly mounted on the guide rollers. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a longitudinal sectional view of the heat treatment furnace according to Embodiment 1.

[0011] Figure 2 is a II-II line sectional view of Figure 1

[0012] Figure 3 is a sectional view of the heater according to Embodiment 1.

[0013] Figure 4 is a sectional view of the gas supply pipe according to Embodiment 1.

[0014] Figure 5 is a block diagram showing the configuration of a control system for controlling the through-feed device.

[0015] Figure 6 is a plan view of the mounting member, the chain, and the sheet W (processed object).

[0016] Figure 7 is an enlarged view showing a part of the track of the sheet W, the track of the chain, and the plurality of guide rollers.

[0017] Figure 8A is a view showing the state of the upper guide roller 22a and the sheet W when the mounting member is at the x1 point (A point).

[0018] Figure 8B is a view showing the state of the upper guide roller 22a and the sheet W when the mounting member is at the x2 point.

[0019] Figure 8C is a view showing the state of the upper guide roller 22a and the sheet W when the mounting member is at the x3 point.

[0020] Figure 8D ​is a view showing the state of the upper guide rollers 22a and the sheet W when the mounting member is at the x4 point (B point).

[0021] Figure 9 is a timing chart for explaining the actions of the start switch 45 for starting the through device, the chain drive motor 42c for driving the chain 42, the sensor 29 for detecting the mounting member 43, and the input port motor 21a for driving the input port roller 21.

[0022] BRIEF DESCRIPTION OF DRAWINGS

[0023] 10…heat treatment furnace, 12…furnace body, 22a, 22b, 22c…upper guide rollers, 24…lower guide rollers, 26a, 26b…first heaters, 28…second heater, 38…gas supply pipe. DETAILED DESCRIPTION

[0024] In the treatment furnace disclosed in the present specification, in the case where the treated object wound around the input port roller is erected on the plurality of guide rollers by moving the mounting member along the second conveyance path using the moving device, when the position of the mounting member on the second conveyance path is at a position where the flexure of the treated object erected on the adjacent guide rollers is eliminated, the control device can rotate the input port roller so as to send the treated object out from the input port roller. According to such a configuration, it is possible to suppress the treated object erected on the guide rollers from generating excessive tension.

[0025] In the processing furnace disclosed in the present specification, the control device can also control the rotation of the plurality of guide rollers. The furnace body can have a first wall disposed in parallel with a first direction connecting the input port and the output port, and a second wall disposed in parallel with the first direction and opposite the first wall. The plurality of guide rollers can have one or more first guide rollers disposed at a position on the first wall side when viewed from the center of the processing chamber, and spaced apart in the first direction, and one or more second guide rollers disposed at a position on the second wall side when viewed from the center of the processing chamber, and spaced apart in the first direction. The processed object transported from the input port can be initially placed on one of the first guide rollers and the second guide rollers, and then alternately placed on the first guide rollers and the second guide rollers, and thereby placed on the output port. In the case where the mounting member is moved along the second transport path by the moving device to place the processed object wound around the input port roller on the plurality of guide rollers, the control device can control the rotation so that the torque generated by one of the first guide rollers and the second guide rollers is constant, and control the rotation so that the other of the first guide rollers and the second guide rollers rotates at a constant speed. According to such a configuration, when the processed object is placed on the first guide rollers and the second guide rollers, excessive tension can be suppressed from being generated in the placed processed object, and the processed object can be transported toward the output port.

[0026] In the processing furnace disclosed in the present specification, the moving device can have a roller chain to which the mounting member is detachably mounted, and which is disposed along the second transport path, extends from the input port through the processing chamber to the output port, and returns from the output port to the input port through the outside or the inside of the furnace body, and a drive motor that drives the roller chain. According to such a configuration, by driving the roller chain, the mounting member can be circulated between the input port and the output port.

[0027] In the processing furnace disclosed in the present specification, a plurality of heaters can also be provided, which are disposed in the processing chamber and along the first transport path, for heating the processed object transported by the transport device. In a state where the processing chamber is made into a prescribed heating atmosphere by the plurality of heaters, the through device can place the processed object wound around the input port roller from the input port to the output port by the plurality of guide rollers. According to such a configuration, in a state where the processing chamber is adjusted to a prescribed heating atmosphere, the processed object wound around the input port roller can be placed from the input port to the output port. Therefore, after the preparation work, the processing of the processed object can be quickly performed.

[0028] In the processing furnace disclosed in the present specification, in the prescribed heating atmosphere, the temperature in the processing chamber can be 400°C or lower.

[0029] The processing furnace disclosed in this specification may further include a gas supply device for supplying gas into the processing chamber and an exhaust device for discharging gas from the processing chamber. With the processing chamber maintained at a predetermined atmosphere by the gas supply device and the exhaust device, the through-feed device can guide the workpiece wound on the inlet roller from the inlet to the outlet via multiple guide rollers. With this configuration, the workpiece wound on the inlet roller can be guided from the inlet to the outlet while the processing chamber is maintained at a predetermined atmosphere. Therefore, after preparation, the workpiece can be processed quickly.

[0030] In the processing furnace disclosed in this specification, the oxygen concentration in the processing chamber under the specified atmosphere can be 10% or less. Furthermore, in the processing furnace disclosed in this specification, the dew point in the processing chamber under the specified atmosphere can be 0°C or less.

[0031] Example

[0032] The heat treatment furnace 10 (an example of a processing furnace) according to Example 1 will be described below. The heat treatment furnace 10 of this embodiment is a drying furnace (dehydration apparatus) for removing moisture contained in a workpiece W (an example of a workpiece to be processed). The workpiece W is a sheet (an example of a workpiece to be processed) that extends continuously in the length direction; for example, a thin film used in liquid crystal displays, organic EL, batteries, etc., belongs to this workpiece W. For such a thin film, sometimes the film itself contains moisture, or, if the film is covered with a coating layer, sometimes the coating layer contains moisture. Therefore, firstly, the moisture contained in the film is removed, and then the film after moisture removal is cut into the desired size, thereby manufacturing a final product. The heat treatment furnace 10 of this embodiment can be used to remove moisture from the aforementioned sheet.

[0033] The structure of the heat treatment furnace 10 will be described below with reference to the accompanying drawings. Figure 1 , 2 As shown, the heat treatment furnace 10 includes: a rectangular furnace body 12, a conveying device 20 for inputting and outputting workpiece W relative to the furnace body 12, a heating device (26a, 26b, 28) for heating workpiece W, and a gas supply device (38, etc.) for supplying cooling gas to the surface of workpiece W.

[0034] The furnace body 12 includes: a lower wall 13, an upper wall 14 opposite to the lower wall 13, and side walls 17 and 18 (see reference) connected at one end to the lower wall 13 and at the other end to the upper wall 14. Figure 2 ), and the input side wall 15 and output side wall 16 that close the ends of the processing chambers (19a, 19b) surrounded by the aforementioned walls 13, 14, 17, 18.

[0035] The lower wall 13 is a rectangular plate when viewed from above, positioned below the processing chambers (19a, 19b). For example...Figure 1 As shown in the drawing, a plurality of exhaust ports 13a are provided in the lower wall 13 at substantially constant intervals in the x direction. The plurality of exhaust ports 13a are respectively connected to exhaust fans 13b. When the exhaust fans 13b are operated, the atmosphere gas in the processing chambers (19a, 19b) is exhausted to the outside of the processing chambers (19a, 19b).

[0036] The upper wall 14 is a plate material of the same shape as the lower wall 13, and is disposed above the processing chambers (19a, 19b). As with the lower wall 13, a plurality of exhaust ports 14a are provided in the upper wall 14 at substantially constant intervals in the x direction. The plurality of exhaust ports 14a are respectively connected to exhaust fans 14b. When the exhaust fans 14b are operated, the atmosphere gas in the processing chambers (19a, 19b) is exhausted to the outside of the processing chambers (19a, 19b).

[0037] An input port 15a is provided in the input side wall 15, and an output port 16a is formed in the output side wall 16. The input port 15a and the output port 16a are located at the same position in the height direction, and the input port 15a and the output port 16a face each other. Figure 1 It is known that the processing chambers (19a, 19b) are disposed between the input port 15a and the output port 16a.

[0038] Further, the inner surfaces of the walls 13, 14, 15, 16, 17, 18 (i.e., the surfaces on the processing chamber (19a, 19b) side) constituting the furnace body 12 are mirror finished. As a result, the reflectance of electromagnetic waves in the infrared region (specifically, electromagnetic waves radiated from the heaters 26a, 26b, 28 described later) of the above-mentioned surfaces is 50% or more. Accordingly, electromagnetic waves radiated from the heaters 26a, 26b, 28 can be effectively irradiated to the workpiece W.

[0039] The conveyance device 20 is provided with: an input port roller 21 disposed outside the furnace body 12 and in the vicinity of the input port 15a; an output port roller 25 disposed outside the furnace body 12 and in the vicinity of the output port 16a; and a plurality of guide rollers (22a, 22b, 22c, 24) disposed in the processing chambers (19a, 19b).

[0040] The workpiece W is wound around the input port roller 21. The workpiece W wound around the input port roller 21 is erected from the input port 15a through the processing chambers (19a, 19b) to the output port 16a. Specifically, the workpiece W is erected from the input port roller 21 to the guide rollers (22a, 22b, 22c, 24) via the input port 15a, and further, from the guide rollers (22a, 22b, 22c, 24) to the output port roller 25 via the output port 16a. The input port motor 21a (not shown in the figure) is connected to the input port roller 21. Figure 1 The figure is omitted in the middle (however, in the figure, the input port motor 21a is shown as a dotted line) Figure 5The workpiece W wound around the input port roll 21 is fed to the processing chamber (19a, 19b) when the input port roll 21 is rotated by the input port motor 21a. Further, a tension roll (46a, 46b) is disposed between the input port roll 21 and the input port 15a Figure 1 The illustration is omitted in the figure. However, in the case where the workpiece W is fed to the processing chamber (19a, 19b) by the input port roll 21, the workpiece W is fed to the input port 15a by the tension roll (46a, 46b) as illustrated in the figure. The tension roll (46a, 46b) is constituted by an upper tension roll 46a and a lower tension roll 46b. The workpiece W fed from the input port roll 21 is fed to the input port 15a by the tension roll (46a, 46b). The workpiece W is clamped by the upper tension roll 46a and the lower tension roll 46b, and thus a tension is applied to the workpiece W. Further, as a constitution for applying a tension to the workpiece W, various known constitutions can be adopted, and for example, a suction roll can be adopted. Figure 7 The illustration is omitted in the figure. However, in the case where the workpiece W is fed to the processing chamber (19a, 19b) by the input port roll 21, the workpiece W is fed to the input port 15a by the tension roll (46a, 46b) as illustrated in the figure. The tension roll (46a, 46b) is constituted by an upper tension roll 46a and a lower tension roll 46b. The workpiece W fed from the input port roll 21 is fed to the input port 15a by the tension roll (46a, 46b). The workpiece W is clamped by the upper tension roll 46a and the lower tension roll 46b, and thus a tension is applied to the workpiece W. Further, as a constitution for applying a tension to the workpiece W, various known constitutions can be adopted, and for example, a suction roll can be adopted.

[0041] The output port roll 25 is a roll that winds the workpiece W output from the processing chamber (19a, 19b). A drive device not illustrated is connected to the output port roll 25, and the output port roll 25 is rotationally driven by the drive device. The workpiece W fed from the input port roll 21 is guided by the guide rolls (22a, 22b, 22c, 24) to move on a prescribed conveyance path in the processing chamber (19a, 19b), and is fed from the output port 16a to the outside of the processing chamber (19a, 19b), and thus is wound around the output port roll 25 that is rotationally driven. That is, the guide rolls (22a, 22b, 22c, 24) prescribe the conveyance path of the workpiece W in the processing chamber (19a, 19b).

[0042] The guide rolls (22a, 22b, 22c, 24) are provided with a plurality of upper guide rolls (22a, 22b, 22c) disposed in the vicinity of the upper wall 14, and a plurality of lower guide rolls 24 disposed in the vicinity of the lower wall 13. Further, in the present embodiment, the guide rolls (22a, 22b, 22c, 24) use contact type rolls that contact the workpiece W, but non-contact type rolls that guide the workpiece W without contacting the workpiece W can also be used.

[0043] The upper guide rolls (22a, 22b, 22c) (an example of the first guide roll referred to in the claims) are disposed at constant intervals in the x direction. Specifically, the upper guide roll 22a is disposed adjacent to the input port 15a, and the upper guide roll 22c is disposed adjacent to the output port 16a. A plurality of guide rolls 22b are disposed at equal intervals between the upper guide roll 22a and the upper guide roll 22c. The upper guide rolls (22a, 22b, 22c) each have the same position in the height direction. The upper motor 23a (in the case of the first embodiment, the upper motor 23a is connected to the upper guide roll 22a) is connected to each of the upper guide rolls (22a, 22b, 22c). Figure 5illustrated in FIG. 6). The upper guide rollers (22a, 22b, 22c) are rotated by driving the upper motor 23a. Further, a torque sensor 23b (illustrated in FIG. 6) is attached to the rotational shaft of the upper motor 23a. The torque sensor 23b is connected to the controller 44, and detects the torque acting on the rotational shaft of the upper motor 23a, i.e., the upper guide rollers (22a, 22b, 22c). As will be described later, the controller 44 rotationally drives the upper motor 23a in such a manner that the torque detected by the torque sensor 23b is constant while the workpiece W is being passed through the apparatus. Figure 5 illustrated in FIG. 6). The torque sensor 23b is connected to the controller 44, and detects the torque acting on the rotational shaft of the upper motor 23a, i.e., the upper guide rollers (22a, 22b, 22c). As will be described later, the controller 44 rotationally drives the upper motor 23a in such a manner that the torque detected by the torque sensor 23b is constant while the workpiece W is being passed through the apparatus.

[0044] The plurality of lower guide rollers 24 (an example of the second conveying rollers referred to in the claims) are arranged in such a manner that they are spaced apart by a constant distance in the x direction, as are the upper guide rollers (22a, 22b, 22c). The distance between adjacent lower guide rollers 24 in the x direction is the same as the distance between adjacent upper guide rollers (22a, 22b, 22c) in the x direction. The positions of the plurality of lower guide rollers 24 in the x direction are at the central positions of the adjacent upper guide rollers (22a, 22b, 22c). The positions of the plurality of lower guide rollers 24 in the height direction are the same. The lower motor 27a (illustrated in FIG. 7) is connected to each of the lower guide rollers 24. Figure 5 illustrated in FIG. 7). The lower guide rollers 24 are rotated by driving the lower motor 27a. Further, an encoder 27b (illustrated in FIG. 7) is attached to the rotational shaft of the lower motor 27a. The encoder 27b is connected to the controller 44, and detects the rotational speed of the rotational shaft of the lower motor 27a, i.e., the lower guide rollers 24. As will be described later, the controller 44 rotationally drives the lower motor 27a in such a manner that the rotational speed detected by the encoder 27b is constant while the workpiece W is being passed through the apparatus. Figure 5 illustrated in FIG. 7). The encoder 27b is connected to the controller 44, and detects the rotational speed of the rotational shaft of the lower motor 27a, i.e., the lower guide rollers 24. As will be described later, the controller 44 rotationally drives the lower motor 27a in such a manner that the rotational speed detected by the encoder 27b is constant while the workpiece W is being passed through the apparatus.

[0045] As described above, since the upper guide rollers (22a, 22b, 22c) and the lower guide rollers 24 are arranged, the workpiece W conveyed in the x direction from the input port 15a is conveyed downward by the upper guide roller 22a, next, is conveyed upward by the lower guide rollers 24, and thereafter, is repeatedly conveyed in the vertical direction by the upper and lower guide rollers 22b and 24. Further, the workpiece W conveyed upward from the lower guide roller 24 arranged closest to the output port 16a side is conveyed toward the output port 16a by the upper guide roller 22c. In this way, by repeatedly conveying in the vertical direction within the processing chambers (19a, 19b), the space within the processing chambers (19a, 19b) can be effectively utilized, and the processing time for drying the workpiece W can be ensured. Further, since the workpiece W is conveyed in the vertical direction within the processing chambers (19a, 19b), the workpiece W can be dried in a short time. Figure 1It can be seen that the processing chambers (19a, 19b) are divided into an upper processing chamber 19a located on the upper wall 14 side and a lower processing chamber 19b located on the lower wall 13 side by the workpiece W mounted on the guide rollers (22a, 22b, 22c, 24). Furthermore, by... Figure 2 It can be seen that in the position where there is no workpiece W (i.e., the position of the outer side of both ends of workpiece W in the y direction), the upper processing chamber 19a and the lower processing chamber 19b are connected.

[0046] A heating device is disposed within the processing chambers (19a, 19b) to heat the workpiece W conveyed by the conveyor 20. The heating device includes: a first heater (26a, 26b) disposed near the guide rollers (22a, 22b, 22c, 24); and a second heater 28 disposed at a height between the upper guide rollers (22a, 22b, 22c) and the lower guide roller 24. Figure 2 As shown, the first heater (26a, 26b) and the second heater 28 extend along the axial direction of the guide rollers (22a, 22b, 22c, 24) and are capable of heating the entire width direction (y direction) of the workpiece W.

[0047] like Figure 1 As shown, the first heaters (26a, 26b) include: a plurality of first upper heaters 26a disposed above the upper guide rollers (22a, 22b, 22c); and a plurality of first lower heaters 26b disposed below the lower guide rollers 24. The first upper heaters 26a are configured to face their respective upper guide rollers (22a, 22b, 22c), and the first lower heaters 26b are configured to face their respective lower guide rollers 24. Therefore, the workpiece W is located between the first upper heaters 26a and the upper guide rollers (22a, 22b, 22c), and is directly heated by the first upper heaters 26a. Similarly, the workpiece W is located between the first lower heaters 26b and the lower guide rollers 24, and is directly heated by the first lower heaters 26b.

[0048] Two second heaters 28 are arranged below each of the upper guide rollers (22a, 22b, 22c) with a gap along the z-direction. Additionally, two second heaters 28 are arranged above each of the lower guide rollers 24 with a gap along the z-direction. Therefore, 11 second heaters 28 are arranged with a gap along the x-direction, and two second heaters 28 are arranged with a gap along the y-direction. As shown in the figure, the second heaters 28 are positioned opposite the workpiece W mounted on the upper guide rollers (22a, 22b, 22c) and the lower guide roller 24 (i.e., near the midpoint between adjacent guide rollers in the conveying direction of the workpiece W). Since the second heaters 28 extend along the axial direction of the guide rollers (22a, 22b, 22c, 24), the entire width direction of the workpiece W mounted on the upper guide rollers (22a, 22b, 22c) and the lower guide roller 24 is heated by the second heaters 28.

[0049] The first heater (26a, 26b) is a known wavelength-controllable heater that emits electromagnetic waves in the infrared region, and the first heater (26a, 26b) and the second heater 28 have the same structure. Therefore, the structure of the second heater 28 will be briefly described here.

[0050] like Figure 3 As shown, the second heater 28 includes: a filament 30, an inner tube 32 for housing the filament 30, and an outer tube 34 for housing the inner tube 32. The filament 30 is a heating element made of, for example, tungsten, and is powered by an external power source (not shown). When the filament 30 is powered and reaches a predetermined temperature (e.g., 1200–1700°C), electromagnetic waves, including infrared rays, are emitted from the filament 30. The inner tube 32 is formed of an infrared-transmitting material, wherein only electromagnetic waves of a specific wavelength range (infrared range in this embodiment) can pass through the infrared-transmitting material emitted from the filament 30. By appropriately selecting the infrared-transmitting material used to form the inner tube 32, the wavelength of the electromagnetic waves emitted from the filament 30 to the outside of the inner tube 32 can be adjusted to a desired wavelength. The outer tube 34 is also formed of the same infrared-transmitting material as the inner tube 32. Therefore, electromagnetic waves that pass through the inner tube 32 pass through the outer tube 34 and are emitted to the outside. The space 36 between the inner tube 32 and the outer tube 34 is a refrigerant flow path for the circulation of refrigerant (e.g., air). By supplying refrigerant to the space 36 (i.e., the refrigerant flow path), the temperature of the outer tube 34 can be prevented from becoming too high. Accordingly, overheating of the workpiece W can be prevented. Furthermore, a heater with controllable wavelength of electromagnetic waves emitting infrared regions has been disclosed in detail, for example, in Japanese Patent No. 4790092.

[0051] The gas supply device has a plurality of gas supply pipes 38 extending in the y direction inside the processing chambers (19a, 19b), and a gas supply fan (not shown) disposed outside the processing chambers (19a, 19b) to supply cooling gas to the plurality of gas supply pipes 38. As shown in Figure 4 , two ejection holes 39a, 39b are formed in the circumferential direction of the gas supply pipe 38. Thus, the cooling gas supplied from the gas supply fan to the gas supply pipe 38 is ejected into the processing chambers (19a, 19b) from the ejection holes 39a, 39b. In the present embodiment, the orientation of the gas supply pipe 38 is adjusted so that the ejection direction of the cooling gas ejected from the ejection holes 39a, 39b is orthogonal to the surface of the workpiece W. As shown in Figure 4 , the ejection holes 39a, 39b are disposed at positions opposite each other sandwiching the axis of the gas supply pipe 38. Thus, in the case where the workpiece W is positioned on the input port 15a side and the output port 16a side of the gas supply pipe 38, the cooling gas ejected from the ejection hole 39a of the gas supply pipe 38 is ejected toward the workpiece W on one side, and the cooling gas ejected from the ejection hole 39b of the gas supply pipe 38 is ejected toward the workpiece W on the other side. In addition, as shown in Figure 2 , a plurality of ejection holes 39a, 39b of the gas supply pipe 38 are formed at intervals in the y direction. Thus, the cooling gas ejected from the ejection holes 39a, 39b is ejected toward the entire width direction (y direction) of the workpiece W.

[0052] As shown in Figure 1 , the gas supply pipe 38 is disposed two at a time below each of the upper guide rollers (22a, 22b, 22c) at intervals in the z direction. In addition, the gas supply pipe 38 is disposed two at a time above each of the lower guide rollers 24 at intervals in the z direction. By Figure 1 , it is understood that the gas supply pipe 38 is disposed at a position different from the disposition positions of the first heaters (26a, 26b) and the second heater 28. Specifically, the second heater 28 and the gas supply pipe 38 are alternately disposed at equal intervals in the z direction (the conveying direction). In addition, as described above, the processing chambers (19a, 19b) are divided into the upper processing chamber 19a and the lower processing chamber 19b by the workpiece W supported by the guide rollers (22a, 22b, 22c, 24), and the gas supply pipe 38 is disposed in each of the upper processing chamber 19a and the lower processing chamber 19b.

[0053] As the cooling gas supplied from the gas supply pipe 38, an inert gas such as nitrogen or Ar gas can be used. The atmosphere gas in the processing chamber (19a, 19b) is adjusted by the gas injected into the processing chamber (19a, 19b) from the gas supply pipe 38. In the present embodiment, since the moisture contained in the workpiece W is removed, the atmosphere gas in the processing chamber (19a, 19b) is adjusted to a gas having a dew point of 0°C or less. More specifically, the atmosphere in the processing chamber (19a, 19b) is adjusted to have an oxygen concentration of 10% or less. In addition, the dew point is adjusted to 0°C or less. Further, as the cooling gas, an atmosphere having a dew point of 0°C or less can be used.

[0054] The controller 44 is constituted by a processor having a CPU, a ROM, and a RAM, and controls the conveyance device 20, the heating device (26a, 26b, 28), the gas supply device, and the exhaust device (13b, 14b). Specifically, the controller 44 controls the conveyance speed and the tension of the workpiece W by controlling the conveyance device 20, controls the amount of heat applied to the workpiece W by controlling the heating device (26a, 26b, 28), and controls the flow rate and the flow velocity of the cooling gas injected from the gas supply pipe 38 to the workpiece W by controlling the gas supply device. In addition, the controller 44 controls the through device described later to mount the workpiece W wound around the input port roller 21 to the output port roller 25. Hereinafter, the configuration and the control method of the through device will be described.

[0055] Next, the process of removing the moisture from the workpiece W using the heat treatment furnace 10 described above will be described. First, the cooling gas is supplied from the gas supply pipe 38 to the processing chamber (19a, 19b), and the processing chamber (19a, 19b) is adjusted to a prescribed atmosphere. Next, the controller 44 drives the motors (21a, 23a, 27a, etc.), whereby the workpiece W is conveyed from the input port 15a to the output port 16a through the processing chamber (19a, 19b). At this time, the controller 44 controls the heating device (26a, 26b, 28), thereby irradiating the workpiece W with electromagnetic waves in the infrared region, and ejecting the cooling gas from the gas supply pipe 38 to the surface of the workpiece W. When the electromagnetic waves in the infrared region are irradiated from the heating device (26a, 26b, 28), the moisture contained in the workpiece W absorbs the irradiated electromagnetic waves, so that the moisture evaporates. The moisture evaporated from the workpiece W is removed from the surface of the workpiece W by the cooling gas ejected from the gas supply pipe 38. The atmosphere gas containing the moisture removed from the surface of the workpiece W (wherein the moisture contains a trace amount of the organic solvent) is exhausted from the exhaust port 13a of the lower wall 13 and the exhaust port 14a of the upper wall 14 to the outside of the processing chamber (19a, 19b), respectively. The workpiece W is removed of the moisture during the conveyance from the input port 15a to the output port 16a. The workpiece W removed of the moisture is wound around the output port roller 25.

[0056] According to the heat treatment furnace 10 described above, the first heaters 26a, 26b are provided in the vicinity of the guide rollers (22a, 22b, 22c, 24) so as to face the guide rollers (22a, 22b, 22c, 24). Further, the second heater 28 is provided between the upper guide rollers (22a, 22b, 22c) and the lower guide roller 24. With the above-described heaters 26a, 26b, 28, it is possible to control the heat budget of the workpiece W in a state in which the workpiece W is in contact with the guide rollers (22a, 22b, 22c, 24), and it is also possible to control the heat budget of the workpiece W in a state in which the workpiece W is not in contact with the guide rollers (22a, 22b, 22c, 24). Therefore, it is possible to well control the heat budget of the workpiece W, and thus it is possible to significantly improve the efficiency of the process of removing moisture from the workpiece W. For example, in a case in which the workpiece W is excessively cooled due to heat flowing from the workpiece W to the guide rollers (22a, 22b, 22c, 24) as a result of the workpiece W being in contact with the guide rollers (22a, 22b, 22c, 24), the amount of heat supplied from the first heaters (26a, 26b) to the workpiece W is increased so that the workpiece W is not excessively cooled. Accordingly, it is possible to prevent a decrease in the efficiency of removing moisture from the workpiece W.

[0057] Further, in the heat treatment furnace 10 described above, the gas supply pipes 38 and the second heater 28 are alternately arranged in the conveying direction, and the cooling gas from the gas supply pipes 38 is ejected from a direction orthogonal to the surface of the workpiece W. Accordingly, the moisture evaporated from the inside of the workpiece W is quickly removed from the surface of the workpiece W, and the removal of moisture from the workpiece W is promoted. Accordingly, it is also possible to improve the efficiency of removing moisture from the workpiece W.

[0058] Further, the processing chambers (19a, 19b) are divided by the workpiece W supported on the guide rollers (22a, 22b, 22c, 24) into the upper processing chamber 19a and the lower processing chamber 19b, but the gas supply pipes 38 and the exhaust ports 14a, 13a are provided in both the upper processing chamber 19a and the lower processing chamber 19b. Therefore, the cooling gas supplied to the upper processing chamber 19a and the cooling gas supplied to the lower processing chamber 19b are quickly exhausted to the outside of the processing chambers (19a, 19b) together with the removed moisture. Accordingly, it is also possible to optimize the gas flow in the processing chambers (19a, 19b), and improve the efficiency of removing moisture from the workpiece W.

[0059] Furthermore, the heaters (26a, 26b, 28) are selected from infrared-transmitting materials used to form the inner and outer tubes, thereby allowing adjustment of the wavelength range of the emitted infrared radiation. Therefore, by adjusting the wavelength of the emitted electromagnetic waves according to the characteristics of the workpiece W, the heat treatment efficiency of the workpiece W can be improved. For example, consider a workpiece W that is dried from a solid component (phenol / epoxy resin, 10-90 wt%) and a solvent (water or a solvent such as IPA (isopropanol), NMP (N-methyl-2-pyrrolidone)) that forms the solid component into a slurry or paste. When drying such a workpiece W, the water or solvent can be dried using heaters (26a, 26b, 28) with selected near-infrared wavelengths in the first half of the heat treatment furnace 10, and annealing can be performed using heaters (26a, 26b, 28) with selected far-infrared wavelengths in the second half of the heat treatment furnace 10.

[0060] Furthermore, in the above embodiments, the heaters (26a, 26b, 28) radiate electromagnetic waves in the same wavelength range, but are not limited to the above examples. For example, the wavelength of the electromagnetic waves radiated from the heaters (26a, 26b, 28) can be adjusted according to their position on the transport path. For example, when removing moisture from the workpiece W using the heat treatment furnace 10, the moisture content in the workpiece W gradually decreases from the inlet 15a towards the outlet 16a. Therefore, by making the wavelength of the electromagnetic waves radiated from the heaters (26a, 26b, 28) gradually increase from the inlet 15a towards the outlet 16a, electromagnetic waves corresponding to the moisture content can be directed towards the workpiece W.

[0061] Furthermore, in the above embodiments, a first heater (26a, 26b) is arranged near the guide rollers (22a, 22b, 22c, 24) to heat the workpiece W, but this is not limited to the above example. For example, a flow path for the heating medium can be provided inside the guide rollers to heat the workpiece W. With this configuration, the heat loss and gain of the workpiece W in contact with the guide rollers can be controlled, thereby improving the heat treatment efficiency of the workpiece W.

[0062] Next, the through-feed device for mounting the workpiece W wound on the input roller 21 onto the output roller 25 will be described. Figure 1 , 6 As shown, the through-feed device includes: a pair of roller chains 42a, 42b that pass through and circulate within and outside the processing chambers (19a, 19b); a mounting rod 43 (an example of a mounting component) that is detachably mounted to the pair of roller chains 42a, 42b; and a drive motor 42c (in... Figure 5(Illustrated in the figure), which drives a pair of roller chains 42a and 42b.

[0063] like Figure 6 As shown, a pair of roller chains 42a and 42b are arranged on both sides of the workpiece W. Specifically, the roller chains 42a and 42b are arranged on the sides (i.e., the side wall 18 in the +y direction and the side wall 17 in the -y direction, respectively) with respect to the guide rollers (22a, 22b, 22c, 24) supporting the workpiece W. Figure 2 )).

[0064] like Figure 1 As shown, the roller chains 42a and 42b, like the workpiece W mounted on the guide rollers (22a, 22b, 22c, 24), start from the input port 15a, change direction vertically, and extend to the output port 16a. From the output port 16a, they pass outside the processing chambers (19a, 19b) and return to the input port 15a. More specifically, the roller chains 42a and 42b extend from the input port 15a in the x-direction (direction of the upper guide roller 22a), go around the outside of the upper guide roller 22a and change direction toward the lower guide roller 24. Next, they go around the outside of the lower guide roller 24 and change direction toward the upper guide roller 22b. Then, similarly, they pass sequentially through the upper guide roller 22b and the lower guide roller 24, go around the outside of the upper guide roller 22c, and extend from the output port 16a outward from the furnace. The roller chains 42a and 42b, extending from the output port 16a outwards from the furnace, reverse 180 degrees and extend along the -x direction above the furnace body 12, returning to the input port 15a. Since the workpiece W needs to be mounted on the guide rollers (22a, 22b, 22c, 24), the tracks of the roller chains 42a and 42b (an example of the second conveying path) make a large bend outside the guide rollers (22a, 22b, 22c, 24). Therefore, the tracks of the roller chains 42a and 42b are longer than the conveying path of the workpiece W (an example of the first conveying path) defined by the guide rollers (22a, 22b, 22c, 24) within the processing chamber 19, and they intersect at multiple points along the conveying path of the workpiece W (i.e., at the center of each path portion extending in the vertical direction (z direction)).

[0065] In addition, such as Figure 7As shown, a detection sensor 29 for detecting the mounting bar 43 is arranged at a position on the track of the roller chain 42a, 42b. More specifically, the detection sensor 29 is arranged in the vicinity of the input port 15a and at a position that comes close to the mounting bar 43 installed on the roller chain 42a, 42b when the mounting bar 43 reaches a prescribed position. The detection sensor 29 detects that the mounting bar 43 has passed the prescribed position on the track (second conveyance path) of the roller chain 42a, 42b. A signal output from the detection sensor 29 is input to the controller 44. In addition, the detection sensor 29 can be an optical sensor composed of a light emitting portion and a light receiving portion, a proximity sensor, or the like.

[0066] The mounting bar 43 is configured such that one end thereof is detachably attached to the roller chain 42a and the other end thereof is detachably attached to the roller chain 42b. The mounting bar 43 has the front end of the workpiece W wound around the input port roller 21 detachably attached thereto. In a state where the mounting bar 43 is attached to the pair of roller chains 42a, 42b, the mounting bar 43 is orthogonal to the roller chains 42a, 42b, and the workpiece W attached to the mounting bar 43 extends parallel to the roller chains 42a, 42b.

[0067] The drive motor 42c is connected to one of the pair of roller chains 42a, 42b (i.e., the drive side roller chain). If the drive motor 42c is rotated in a state where the mounting bar 43 is attached to the roller chains 42a, 42b, the drive side roller chain is rotated, and thus the driven side roller chain is also rotated. By the rotation of the roller chains 42a, 42b, the mounting bar 43 and the front end of the workpiece W attached to the roller chains 42a, 42b are also moved along the track of the roller chains 42a, 42b.

[0068] As Figure 5As shown, the above-described through device is controlled by the controller 44. That is, the controller 44 is connected with the start switch 45, the detection sensor 29, the input port motor 21a, the drive motor 42c, the upper motor 23a, and the lower motor 27a. The start switch 45 is operated by the operator, and the start of the preparation work for mounting the work W toward the output port roller 25 is input to the controller 44. When the detection sensor 29 detects the mounting rod 43, the detection signal thereof is input to the controller 44. The controller 44 starts the operation of the input port motor 21a, the drive motor 42c, the upper motor 23a, and the lower motor 27a by the signal from the start switch 45. In addition, the controller 44 calculates the position of the mounting member 43 (the position on the track of the roller chain 42a, 42b) based on the detection signal from the detection sensor 29 and the time after the detection signal is input, and controls the rotation of the input port motor 21a according to the calculated position. The operation of the input port motor 21a, the drive motor 42c, the upper motor 23a, and the lower motor 27a is controlled by the controller 44, so that the work W wound around the input port roller 21 is erected to the vicinity of the output port roller 25.

[0069] Next, the step when the front end of the work W wound around the input port roller 21 is mounted to the output port roller 25 will be described. If the work W as a processing object is mounted to the input port roller 21, the operator detaches the mounting rod 43 from the roller chain 42a, 42b, and mounts the front end of the work W wound around the input port roller 21 to the mounting rod 43. The mounting rod 43 on which the front end of the work W is mounted is mounted to the roller chain 42a, 42b. Then, the operator presses the start switch 45, and the through device is started.

[0070] When the start switch 45 is pressed, first, the controller 44 starts driving of the motor 42c. By this, the roller chains 42a, 42b rotate, and along with this, the mounting bar 43 moves on the tracks of the roller chains 42a, 42b. The controller 44 rotates the input port motor 21a in accordance with the movement of the mounting bar 43, and feeds out the workpiece W wound on the input port roll 21. In addition, in the present embodiment, the motor 42c is driven at a predetermined constant speed (i.e., constant speed driving). Therefore, the mounting bar 43 also moves on the tracks of the roller chains 42a, 42b at a constant speed. On the other hand, as described in detail below, the input port motor 21a is rotated in accordance with the position of the mounting bar 43 (i.e., the position on the tracks of the roller chains 42a, 42b). In addition, the controller 44 controls the upper motor 23a on the basis of the detection value of the torque sensor 23b, and controls the lower motor 27a on the basis of the detection value of the encoder 27b. Specifically, the upper motor 23a is stopped from rotating in a state where the torque is less than a target value, and when the torque reaches the target value or more, is rotated at the target value of the torque. On the other hand, the lower motor 27a is driven at a constant speed at a predetermined speed.

[0071] Next, the controller 44 monitors whether or not a detection signal from the detection sensor 29 has been input. If the detection signal from the detection sensor 29 is input to the controller 44, the controller 44 starts a timer, and measures the time after the detection signal is input. Then, the controller 44 calculates the position of the mounting bar 43 on the basis of the time measured by the timer. As described above, the position at which the detection sensor 29 is disposed is known, and the input port motor 21a is driven at a constant speed. Therefore, the controller 44 can calculate the position of the mounting bar 43 on the basis of the time measured by the timer. When the position of the mounting bar 43 is calculated, the controller 44 controls the rotation of the input port motor 21a on the basis of the position of the mounting bar 43.

[0072] Here, the rotation control of the input port motor 21a will be described. As described above, the input port motor 21a is rotated in accordance with the position of the mounting bar 43. Therefore, the rotation of the input port motor 21a is controlled in accordance with the position of the mounting bar 43. Specifically, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding pitch. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding tension. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding speed. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding width. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding shape. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding pattern. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding direction. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding interval. In addition, the controller 44 controls the rotation of the input port motor 21a so that the workpiece W is wound on the input port roll 21 at a predetermined winding interval. Figure 7As shown, the track of the roller chain 42 (the conveyance path of the mounting bar 43) is longer than the conveyance path of the work W defined by the guide rollers (22a, 22b, 22c, 24). That is, the track of the roller chain 42 is provided with a bending point (A point) corresponding to the guide roller 22a, and is provided with bending points (C point, E point) corresponding to the guide rollers 24, and is provided with bending points corresponding to each of the guide rollers (22b, 24, 22c) in order. Since the work W mounted on the mounting bar 43 is to be erected to each of the guide rollers (22a, 22b, 22c, 24), each of the bending points (A, C, E, G, ···) is disposed at a position outside with respect to the corresponding guide roller. Therefore, the track of the roller chain 42 (the conveyance path of the mounting bar 43) has to be longer than the conveyance path of the work W. Therefore, if the input port motor 21a is rotated at a constant speed, the work W is bent (sags) due to the position of the mounting bar 43. If the work W is to be erected to the guide rollers (22a, 22b, 22c, 24) in a state where the work W is bent, the work W is sometimes wound around the guide rollers (22a, 22b, 22c, 24) in a state where a wrinkle is generated. Therefore, in the present embodiment, the rotational drive of the input port motor 21a is controlled in accordance with the position of the mounting bar 43.

[0073] Based on Figures 8A-8D , the rotational drive of the input port motor 21a will be described in detail. As shown in Figure 8A , during the period when the mounting bar 43 moves from the position of the detection sensor 29 to the bending point A, the distance from the tension rollers (46a, 46b) to the mounting bar 43 gradually becomes longer, and therefore the work W does not bend. On the other hand, as shown in Figure 8B , when the mounting bar 43 starts to move downward past the bending point A, the mounting bar 43 gradually approaches the guide roller 22a, and therefore the distance from the tension rollers (46a, 46b) to the mounting bar 43 gradually becomes shorter. As a result, even if the work W is not fed out from the input port roller 21, the work W bends. Therefore, in the initial stage when the mounting bar 43 starts to descend past the bending point A, the input port motor 21a does not need to be driven to feed out the work W. Therefore, in the present embodiment, the drive of the input port motor 21a is stopped when the mounting bar 43 is at a position where the work W does not bend.

[0074] In the state where the drive of the input port motor 21a is stopped, when the mounting bar 43 further descends, as shown in Figure 8C , the work W comes into contact with the guide roller 22a. As described above, the guide roller 22a is driven in such a manner that the torque acting thereon is equal to or less than the target value. Therefore, if the torque acting on the guide roller 22a from the work W becomes large, the guide roller 22a rotates, and the work W can be prevented from generating excessive tension. When the mounting bar 43 further descends, as shown in Figure 8Dshown, the work W is not flexed. Therefore, when the mounting bar 43 is lowered from the state shown in Fig. 6, the rotational drive of the input port motor 21a is restarted in correspondence therewith, and the work W is fed out from the input port roll 21. By feeding out the work W from the input port roll 21, and by performing torque control of the guide roll 22a, excessive tension is not applied to the work W, and the mounting bar 43 is lowered. Figure 8D When the mounting bar 43 is further lowered from the state shown, the rotational drive of the input port motor 21a is restarted in correspondence therewith, and the work W is fed out from the input port roll 21. By feeding out the work W from the input port roll 21, and by performing torque control of the guide roll 22a, excessive tension is not applied to the work W, and the mounting bar 43 is lowered.

[0075] After that, from each of the bending points (C point, E point, G point, ···) of the mounting bar 43 on the conveyance path, the work W is flexed within a prescribed range (C point ~ D point, E point ~ F point, G point ~ H point, ···), and therefore the drive of the input port motor 21a is stopped, and the feeding out of the work W is stopped. By this means, excessive flexing of the work W is suppressed, and winding of the work W in a state in which the work W has been wrinkled around the guide rolls (22a, 22b, 22c, 24) is suppressed. Further, by constant-speed rotation of the lower guide roll 24, the work W is always conveyed toward the mounting bar 43 side. Therefore, flexing of the work W when the mounting bar 43 is raised (i.e., when moving from the lower guide roll 24 side toward the upper guide roll 22b side) is quickly eliminated, and the work W is suppressed from being greatly flexed by gravity.

[0076] As described above, the rotational drive of the input port motor 21a is controlled in correspondence with the position of the mounting bar 43, and by this means the work W is erected around each of the guide rolls (22a, 22b, 22c, 24) in the processing chamber 19. When the mounting bar 43 is moved from the output port 16a toward the outside of the furnace and is moved to the vicinity of the output port roll 25, the operator presses the start switch 45 and stops the through-feed device. Next, the operator detaches the mounting bar 43 from the roller chain 42a, 42b, and further detaches the front end of the work W from the mounting bar 43. Then, the detached front end of the work W is mounted to the output port roll 25, and the mounting of the work W is completed.

[0077] Figure 9 A timing chart showing the operation of each part at the time of mounting the work W as described above is shown. As shown in Fig. 7, the work W is mounted to the mounting bar 43, and the mounting bar 43 is lowered from the output port 16a toward the input port roll 21. At this time, the rotational drive of the input port motor 21a is stopped, and the work W is flexed within a prescribed range (C point ~ D point, E point ~ F point, G point ~ H point, ···) from each of the bending points (C point, E point, G point, ···) of the mounting bar 43 on the conveyance path. When the mounting bar 43 is lowered to the vicinity of the input port roll 21, the rotational drive of the input port motor 21a is restarted, and the work W is fed out from the input port roll 21. By this means, the work W is flexed within a prescribed range (C point ~ D point, E point ~ F point, G point ~ H point, ···) from each of the bending points (C point, E point, G point, ···) of the mounting bar 43 on the conveyance path, and the work W is fed out from the input port roll 21. Figure 9As shown, when the start switch 45 is pressed at time tl, the roller chain 42a, 42b rotates in response thereto, and the input roll 21 also rotates. Then, when the detection sensor 29 detects the mounting rod 43 at time t2, the signal thereof is input to the controller 44. The controller 44 calculates the time elapsed from time t2, thereby controlling the operation of the subsequent portions. When time Tl set in advance elapses from time tl and time t3 is reached, the mounting rod 43 reaches the bending point A, and in response thereto, the rotation of the input roll 21 is stopped. When time T2 set in advance elapses after the rotation of the input roll 21 is stopped and time t4 is reached, the mounting rod 43 reaches the point B, so that the deflection of the work W is eliminated, and thus the rotation of the input roll 21 is started again. Thereafter, the rotation of the input roll 21 is turned on and off in accordance with the position of the mounting rod 43, so that the mounting rod 43 moves within the processing chamber 19 and moves to the vicinity of the output roll 25.

[0078] As described above, in the heat treatment furnace of the present embodiment, the front end of the work W wound around the input roll 21 can be mounted to the output roll 25 by the penetration device. Therefore, the preparation work before the start of the processing can be easily performed. In particular, the penetration device can operate in the state of the prescribed atmosphere within the processing chamber 19. Therefore, for example, when the input roll 21 mounts a new work W, the new work W can be mounted while the heating atmosphere within the processing chamber 19 is maintained. Therefore, the newly mounted work W can be immediately processed, and thus the processing efficiency of the work W can be improved.

[0079] Further, in the above-described embodiment, when the work W is deflected, the rotation of the input roll 21 is stopped, and when the deflection of the work W is eliminated, the rotation of the input roll 21 is started again, but it is not limited to such an example. For example, even if the work W is deflected, if the deflection is an allowable amount, the rotation of the input roll 21 can not be stopped. Similarly, when the deflection of the work W is eliminated to an allowable amount, the rotation of the input roll 21 can be started again. That is, the "position where the deflection occurs" according to the claim includes a position where the deflection is at the upper limit of the allowable range, and the "position where the deflection is eliminated" includes a position where the deflection is at the upper end of the allowable range.

[0080] Further, in the above-described embodiment, the roller chain 42a, 42b extends from the input port 15a within the processing chamber to the output port 16a and returns to the input port 15a outside the furnace from the output port 16a, but it is not limited to such an example. For example, the roller chain 42a, 42b that extends from the input port 15a within the processing chamber to the output port 16a can return to the input port 15a within the furnace (i.e., the processing chamber).

[0081] In addition, in the above-described embodiment, the upper motor 23a is stopped from rotating in a state where the torque is less than the target value, and when the torque reaches the target value or more, rotation is driven so that the torque is the target value, and the lower motor 27a is driven at a constant speed at a speed set in advance, but the example is not limited to this. For example, the upper motor 23a and the lower motor 27a can each be stopped from rotating in a state where the torque is less than the target value, and when the torque reaches the target value or more, rotation can be driven so that the torque is the target value.

[0082] The technical elements described in the present specification or the drawings exhibit technical usefulness either individually or through various combinations thereof, and are not limited to the combinations described in the claims at the time of the application. In addition, the techniques exemplified in the present specification or the drawings simultaneously achieve multiple objects, and the techniques that achieve one of the objects have technical usefulness in themselves.

Claims

1. A treatment furnace, characterized by, Possess: a furnace body that has an input port, an output port, and a processing chamber disposed between the input port and the output port; an input port roller disposed outside the furnace body and in the vicinity of the input port, and around which a processed object is wound; a plurality of guide rollers disposed inside the processing chamber for guiding the processed object; an output port roller disposed outside the furnace body and in the vicinity of the output port for winding the processed object conveyed inside the processing chamber; a through device for erecting the processed object wound around the input port roller from the input port to the output port via the plurality of guide rollers; and a control device for controlling rotation of the input port roller, in a state where a leading end of the processed object wound around the input port roller is mounted to the output port roller, the processed object is conveyed from the input port to the output port via a first conveying path defined by the plurality of guide rollers, the through device has: a mounting member to which a leading end of the processed object wound around the input port roller is detachably mounted; and a moving device that moves the mounting member along a second conveying path that is different from the first conveying path, the second conveying path is set along the first conveying path so that the processed object mounted to the mounting member is erected on the plurality of guide rollers, the length of the second conveying path is longer than the length of the first conveying path inside the processing chamber, when the processed object wound around the input port roller is erected on the plurality of guide rollers by moving the mounting member along the second conveying path using the moving device, the control device stops rotation of the input port roller so as not to feed the processed object from the input port roller when the position of the mounting member on the second conveying path is at a position where the processed object erected on adjacent guide rollers is bent, the control device also controls rotation of the plurality of guide rollers, the furnace body has: a first wall disposed in parallel with respect to a first direction connecting the input port and the output port, and a second wall disposed in parallel with respect to the first direction and opposite to the first wall, the plurality of guide rollers have: one or more first guide rollers disposed at a position on the first wall side when viewed from the center of the processing chamber, and spaced apart in the first direction; and one or more second guide rollers disposed at a position on the second wall side when viewed from the center of the processing chamber, and spaced apart in the first direction, the processed object conveyed from the input port is initially erected on one of the first guide rollers and the second guide rollers, and then alternately erected on the first guide rollers and the second guide rollers to be erected on the output port, ​ In a case where the installation member is moved along the second conveyance path by the moving device to install the processed object wound around the input port roller on the plurality of guide rollers, the control device controls rotation in a manner that the torque generated by one of the first guide roller and the second guide roller is constant, and controls rotation in a manner that the other of the first guide roller and the second guide roller rotates at a constant speed.

2. The processing furnace according to claim 1, wherein In a case where the installation member is moved along the second conveyance path by the moving device to install the processed object wound around the input port roller on the plurality of guide rollers, when the position of the installation member on the second conveyance path is at a position where the deflection of the processed object installed on the adjacent guide rollers is eliminated, the control device rotates the input port roller to send the processed object out from the input port.

3. The processing furnace according to claim 1 or 2, wherein The moving device includes: a roller chain to which the installation member is detachably attached and which is disposed along the second conveyance path, extends from the input port through the processing chamber to the output port, and returns from the output port to the input port through the outside or the inside of the furnace body; and a drive motor that drives the roller chain.

4. The processing furnace according to claim 1 or 2, wherein The processing furnace further includes a plurality of heaters disposed in the processing chamber and along the first conveyance path to heat the processed object conveyed by the conveyance device, In a state where the processing chamber is made into a prescribed heating atmosphere by the plurality of heaters, the through device can install the processed object wound around the input port roller from the input port to the output port via the plurality of guide rollers.

5. The processing furnace according to claim 4, wherein In the prescribed heating atmosphere, the temperature in the processing chamber is 0 to 400°C.

6. The processing furnace according to claim 4, wherein The processing furnace further includes a gas supply device that supplies a gas into the processing chamber, and an exhaust device that exhausts the gas in the processing chamber, In a state where the processing chamber is made into the prescribed heating atmosphere by the gas supply device and the exhaust device, the through device can install the processed object wound around the input port roller from the input port to the output port via the plurality of guide rollers.

7. The processing furnace according to claim 4, wherein In the prescribed heating atmosphere, the oxygen concentration in the processing chamber is 10% or less.

8. The processing furnace according to claim 4, wherein In the prescribed heating atmosphere, the dew point in the processing chamber is 0°C or less. ​

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