Substrate accommodating device with accommodation environment detection

Abstract

The present invention discloses a substrate accommodating device with accommodation environment detection, which has a detection device detachably connected to an outer box. The detection device includes a sensing part, which has a sensing end, a cavity and a sensor. The sensing part is detachably connected to the outer box, so that the sensing end is exposed to an accommodation space inside the outer box. The cavity extends between an outer side of the outer box and the accommodation space and accommodates the sensor. The cavity is fluidly connected to the accommodation space of the outer box via the sensing end, thereby enabling the sensor to read information about the accommodation space.

Description

Technical Field

[0001] The present invention relates to a substrate accommodating device, in particular to a substrate accommodating device provided with an internal accommodation environment detection means, and a method for connecting the accommodation environment detection means to the substrate accommodating device. Background Art

[0002] In the current extreme ultraviolet (EUV) process, the photomasks involved need to be protected by dedicated EUV photomask boxes. Figure 1 Disclosed is a photomask box for accommodating the EUV photomask, which has an inner and an outer accommodation space defined by an outer box 100 and an inner box 110. The outer box 100 includes a box cover 101 and a base 102, and the two are combined to define an accommodation space for accommodating the inner box 110. The inner box 110 includes a box cover 111 and a base 112, which are combined by special means to define a sealed accommodation space for accommodating a photomask 120.

[0003] In a known cleaning process, the outer box 100 accommodating the inner box 110 is sent into a cleaning device for processing. Cleaning liquid or gas is introduced into the accommodation space in the outer box 100 to clean the inside of the outer box 100 and the outside of the inner box 110. Finally, a drying gas is introduced into the outer box 100 to dry the remaining liquid and water vapor. If the remaining water vapor adheres to the inner box 110, it may affect the cleanliness of the photomask. Therefore, monitoring of the accommodation environment during the cleaning process becomes an important operation. When the outer box 100 is in the accommodating state, that is, the box cover 101 and the base 102 are combined with each other, the internal accommodation environment cannot be measured by an electronic instrument to obtain environmental information such as humidity. Even if a sensor is provided inside the outer box 100, the cleaning liquid or the drying gas will increase the risk of damaging the charged sensor. Of course, a chip accommodating device with high cleanliness requirements may also face the same problem.

[0004] In view of the monitoring limitations of the known substrate accommodating device during the cleaning process, it is necessary to develop a substrate accommodating device with accommodation environment detection and capable of effectively reducing the damage risk caused by cleaning gas or drying gas. Summary of the Invention

[0005] An object of the present invention is to provide a substrate accommodating device, which has an outer box for accommodating an inner box and a detection device detachably connected to the outer box. The inner box is used for accommodating a substrate. The detection device includes: a sensing part, which has a sensing end, a cavity and a sensor. The sensing part is detachably connected to the outer box, so that the sensing end is exposed to an accommodation space inside the outer box. The cavity extends between the outside of the outer box and the accommodation space and accommodates the sensor. The cavity is fluidly connected to the accommodation space of the outer box through the sensing end, thereby enabling the sensor to read information about the accommodation space.

[0006] In a specific embodiment, a sensing end of the sensing part has a breathable component, such that a cavity of the sensing part is in fluid connection with a receiving space of the outer box via the breathable component.

[0007] In a specific embodiment, the sensing part further has a connection end, the connection end is exposed outside the outer box, and a first connector electrically coupled to the sensor is provided at the connection end for transmitting a sensing signal.

[0008] In a specific embodiment, the first connector extends from the connection end of the sensing part to the outside.

[0009] In a specific embodiment, the sensing part has an outer shell and an inner shell, the outer shell and the inner shell are detachably connected to each other and define the cavity, the outer shell provides the connection end exposed outside the outer box, and the inner shell provides the sensing end exposed in the receiving space of the outer box.

[0010] In a specific embodiment, an inner side surface of the outer shell is connected to an outer side surface of the inner shell, and the inner shell extends outside and into the receiving space of the outer box.

[0011] In a specific embodiment, an outer side surface of the outer shell is connected to an inner side surface of the inner shell, and the outer shell extends outside and into the receiving space of the outer box.

[0012] In a specific embodiment, the outer shell and the inner shell are rotatably and detachably connected to each other.

[0013] In a specific embodiment, the outer shell and the inner shell are fixed to a wall of the outer box, and the wall is clamped between the outer shell and the inner shell.

[0014] In a specific embodiment, the detection device further includes: an adapter part having an adapter end and a housing, the adapter end extends from the housing and is detachably connected to the outer shell of the sensing part, a circuit component is accommodated in the housing, and the circuit component is electrically coupled to the first connector via the adapter end.

[0015] In a specific embodiment, a second connector is provided at the adapter end, the second connector is structurally matched and electrically connected to the first connector to receive the sensing signal.

[0016] In a specific embodiment, the first connector extends from the connection end of the sensing part to the outside along an installation direction, the second connector is detachably connected to the first connector along the installation direction, such that the adapter end of the adapter part is detachably connected to the outer shell of the sensing part.

[0017] In a specific embodiment, the mating end has an arch portion that is detachably sleeved on the housing of the sensor, enabling the mating portion to be connected to the sensing portion.

[0018] In a specific embodiment, the mating portion further has a connecting arm. When the mating portion is connected to the sensing portion, a free end of the connecting arm is fixedly connected to the outer box, thereby stabilizing the connection between the mating portion and the sensing portion.

[0019] In a specific embodiment, the circuit assembly includes a processing unit, a display module, and a wireless communication module, and the wireless communication module transmits the sensing signal.

[0020] Another object of the present invention is to provide a method for installing a detection device to a substrate accommodating device, including: providing a sensing portion having a sensing end, a cavity, a sensor, and a connection end, wherein the cavity accommodates the sensor, and the connection end is provided with a first connector; detachably connecting the sensing portion to an outer box such that the sensing end is exposed in an accommodating space of the outer box, the cavity extends between an outer side of the outer box and the accommodating space, and the cavity is fluidly connected to the accommodating space of the outer box via the sensing end; and extending the first connector along an installation direction toward the outer side of the outer box.

[0021] In a specific embodiment, the method further includes: providing a mating portion having a mating end and a housing, wherein the mating end extends from the housing, the mating end is provided with a second connector, and the housing accommodates a circuit assembly; combining the mating portion with the sensing portion along the installation direction such that the mating end of the mating portion is connected to the connection end of the sensing portion, and electrically connecting the first connector and the second connector.

[0022] In a specific embodiment, the combining the mating portion with the sensing portion along the installation direction further includes: providing a connecting arm on the mating portion and fixedly connecting a free end of the connecting arm to the outer box, thereby stabilizing the connection between the mating portion and the sensing portion.

[0023] In a specific embodiment, the detachably connecting the sensing portion to the outer box further includes: fixedly connecting an inner housing of the sensing portion to a wall of the outer box, and then fixedly connecting an outer housing of the sensing portion to the inner housing, wherein the inner housing is provided with the sensing end and the outer housing is provided with the connection end.

[0024] In a specific embodiment, the detachably connecting the sensing portion to the outer box further includes: clamping a wall of the outer box with an inner housing and an inner housing of the sensing portion, wherein the inner housing is provided with the sensing end and the outer housing is provided with the connection end.

[0025] Another object of the present invention is to provide a detection device for a substrate accommodating device to read information of an accommodation space, comprising: a sensing part having a sensing end, a connection end, and a cavity extending between the sensing end and the connection end, wherein the cavity accommodates a sensor and the cavity is fluidly connected to the outside of the sensing part via the sensing end; and a mating part having a mating end and a circuit component, wherein the mating end is detachably connected to the sensing part and electrically connected to the sensor, and the circuit component is electrically connected to the sensor via the mating end.

[0026] In a specific embodiment, the connection end of the sensing part is provided with a first connector, the mating end of the mating part is provided with a second connector, and the sensing part and the mating part are detachably connected along an installation direction, so that the first connector and the second connector are detachably electrically connected.

[0027] In a specific embodiment, the mating end of the mating part has an arch part, and the arch part is detachably combined with the sensing part.

[0028] In a specific embodiment, the sensing part is configured to detachably match and connect to a mounting hole of the substrate accommodating device, and the mating part has at least one connecting arm, and the connecting arm is configured to engage a rib of the substrate accommodating device.

[0029] In a specific embodiment, the circuit component includes a processing unit, a display module, and a wireless communication module. Description of the Drawings

[0030] With reference to the following drawings and descriptions, the present invention can be further understood. Non-limiting and non-exhaustive examples are described with reference to the following drawings. The components in the drawings are not necessarily of actual size; the emphasis is on illustrating the structure and principle.

[0031] Figure 1 An exploded view of a known substrate accommodating device, a photomask cassette, is illustrated;

[0032] Figure 2 A perspective view of the substrate accommodating device of the present invention is illustrated;

[0033] Figure 3 For Figure 2 the top view of

[0034] Figure 4 A disassembled state of the detection device of the present invention is shown;

[0035] Figure 5 A block diagram of the substrate accommodating device of the present invention;

[0036] Figure 6A And Figure 6BCross-sectional view of the first embodiment of the present invention, showing the assembled detection device and the exploded view of the detection device respectively;

[0037] Figures 7A to 7C Side view, top view and bottom view of the detection device of the first embodiment of the present invention are shown respectively;

[0038] Figure 8 Exploded view of the detection device of the first embodiment of the present invention is shown;

[0039] Figure 9A And Figure 9B Cross-sectional view of the second embodiment of the present invention, showing the assembled detection device and the exploded view of the detection device respectively;

[0040] Figures 10A to 10C Side view, top view and bottom view of the detection device of the second embodiment of the present invention are shown respectively;

[0041] Figure 11 Exploded view of the detection device of the second embodiment of the present invention is shown;

[0042] Figure 12 An installation direction of the detection device of the second embodiment of the present invention is schematically shown.

[0043] [Symbol description]

[0044] 100 Outer box

[0045] 101 Lid

[0046] 102 Base

[0047] 110 Inner box

[0048] 111 Lid

[0049] 112 Base

[0050] 120 Photomask

[0051] 2 Outer box

[0052] 21 Groove

[0053] 22 Wall

[0054] 23 Rib

[0055] 24 Mounting hole

[0056] 4, 4’ Detection device

[0057] 41, 41’ Sensing part

[0058] 410, 410’ Inner shell

[0059] 411, 411’ Ventilation component

[0060] 412 and 412' sensors

[0061] 413 and 413' first connectors, connectors

[0062] 414 and 414' housings

[0063] 4141 and 4141' limit blocks

[0064] 4142 sealing rings

[0065] 42 and 42' mating parts

[0066] 420 and 420' mating ends

[0067] 4200 and 4200' masks

[0068] 4201 and 4201' channels

[0069] 4202 and 4202' second connectors

[0070] 4203 and 4203' sockets

[0071] 421 processing unit

[0072] 422 display module / wireless communication module

[0073] 423 and 423' housings

[0074] 424 caps

[0075] 43 connecting arm

[0076] 431 lateral extension

[0077] 432 vertical extension

[0078] 433 coupling part

[0079] 5 gas

[0080] 6 inner box

[0081] D installation direction Detailed implementation manners

[0082] The present invention will be fully described below with reference to the drawings, and specific exemplary embodiments will be shown by illustration. However, the subject matter of the present application can be embodied in many different forms, and thus the construction of the claimed or covered subject matter is not limited to any of the exemplary embodiments disclosed in this specification; the exemplary embodiments are only illustrative. Similarly, the present invention is intended to provide a reasonably broad scope for the claimed or covered subject matter.

[0083] The term "in one embodiment" as used in this specification does not necessarily refer to the same specific embodiment, and the term "in some other embodiments" as used in this specification does not necessarily refer to different specific embodiments. The purpose is, for example, that the subject matter of the application includes combinations of all or part of the exemplary specific embodiments.

[0084] Figure 2 A perspective view illustrating the substrate accommodating device of the present invention, including an outer case 2 and a detection device 4. The outer case 2 is substantially similar to Figure 1 the outer case 100, including a lid and a base, which define an accommodation space for accommodating an inner case (not shown) or other substrate carriers. The detection device 4 is detachably connected to the outer case 2, as shown on the side wall of the lid of the outer case, but the present invention is not limited thereto. The detection device 4 may be provided with a display module, such as a display panel, for displaying environmental information in the outer case 2, such as humidity and temperature.

[0085] Figure 3 A top view of the substrate accommodating device and a partial enlarged view thereof are shown. Figure 4 A part of the detection device 4 is shown separated from the outer case 2. A groove 21 is formed on the side wall of the outer case 2, which is defined by an outer side wall and an inner side wall. The groove 21 provides an installation space to improve the suitability between the detection device 4 and the outer case 2. The detection device 4 includes a sensing part 41 and a mating part 42. As Figure 4 shown, the sensing part 41 is detachably embedded on a wall 22 of the outer case 2. An inner side of the mating part 42 is detachably connected to the sensing part 41. The mating part 42 has at least one connecting arm 43, and a free end of the connecting arm 43 is detachably connected to a corresponding rib 23 on the outer case 2. A holding structure is provided at the free end of the connecting arm 43, and the rib 23 extends between the side wall of the outer case 2 and a plane. The holding structure at the free end of the connecting arm 43 and the rib 23 are in a matching configuration, so that the connecting arm 43 can more firmly hold the rib 23 to prevent the mating part 42 from shaking relative to the outer case 2. As Figure 3 shown in the partial enlarged view, the holding part of the connecting arm 43 may have a structure similar to a hook. As shown in the figure, in this embodiment, there are two ribs 23 located on both sides of the groove 21 respectively, and the mating part 42 has two connecting arms 43 symmetrically arranged on both sides. Therefore, when the mating part 42 is connected to the outer case 2, the connecting arms 43 are respectively connected to the corresponding ribs 23. However, the present invention is not limited thereto.

[0086] Figure 5 A schematic diagram of the substrate accommodating device of the present invention. A part of the sensing part 41 assembled to the outer case 2 is exposed to the inner environment in the outer case 2, and another part is exposed to the outside of the outer case 2 and connected to the mating part 42. Although not shown, the bottom of the outer case 2 may be provided with an air inlet means such as an air inlet valve for introducing a gas 5 for cleaning and drying the inner environment of the box.

[0087] The sensing unit 41 is provided with a breathable component 411, a sensor 412, and a connector 413 in sequence from the inside to the outside of the outer case 2. The breathable component 411 can effectively prevent the gas introduced from damaging the sensor 412, but still can communicate the accommodation space inside the case and the accommodation space in the sensing unit 41. The sensor 412 is used to read the environmental information in the accommodation space inside the case, such as values of humidity, temperature, or concentration, etc., but the present invention is not limited thereto. The connector 413 is responsible for transmitting the signal of the sensor 412 to a processing unit 421 of the mating unit 42. The connector 413 can be designed according to the combination manner of the sensing unit 41 and the mating unit 41. The connector 413 is not limited to being included in the sensing unit 41, and the connector 413 can be respectively disposed at a connection interface between the sensing unit 41 and the mating unit 42.

[0088] The mating unit 42 has a circuit component, which may include a processing unit 421, mainly used to process the reading value of the sensor 412, and present it via a display module or a wireless communication module 422, but the present invention is not limited thereto. Via the display module or the wireless communication module of the mating unit 42, the operator can know the relevant data and information of the environment inside the case without opening the outer case 2. In a possible embodiment, the sensing unit 41 and the mating unit 42 do not necessarily have to be combined with each other, except for electrical connection. Information can also be communicated between the sensing unit 41 and the mating unit 42 via wireless communication.

[0089] Figure 6A and Figure 6B are cross-sectional views of the first embodiment of the present invention, respectively showing the assembled detection device 4 and the exploded view of the detection device 4. Figures 7A to 7C respectively show the side view, top view, and bottom view of the detection device 4 of the first embodiment of the present invention. Figure 8 shows the three-dimensional exploded view of the detection device 4 of the first embodiment of the present invention.

[0090] The wall 22 of the outer box 2 is formed with a mounting hole 24. When the detection device 4 is assembled and embedded on the wall 22 through the mounting hole 24, one end of the sensing portion 41 is exposed in the accommodation space in the outer box 2 and faces an inner box 6 accommodated therein. The sensing portion 41 has a sensing end and a connecting end, wherein the sensing end is exposed to the accommodation space inside the outer box 2, and the connecting end is exposed to the outside of the outer box 2. The sensing end mainly has an inner shell 410, a breathable component 411 and a sensor 412. The inner shell 410 is substantially barrel-shaped, and an outer side surface of the inner shell 410 is provided with threads and a flange. When the inner shell 410 is accommodated in the mounting hole 24, the flange of the inner shell 410 abuts against the inner surface of the wall 22, and the outer side surface with threads passes through the mounting hole 24 and is exposed outside the outer box 2. The sensor 412 is accommodated in a cavity defined by the inner shell 410, and the cavity can extend to the outside and inside of the outer box 2. The breathable component 411 is a cover body having breathable holes, and it can be combined to the inner end of the inner shell 410. A breathable material (not numbered) is placed between the inner shell 410 and the breathable component 411.

[0091] The connecting end has an outer shell 414, which has an inner side surface formed with threads, so that the inner side surface of the outer shell 414 and the outer side surface of the inner shell 410 are detachably combined, and the outer shell 414 is exposed to the outside of the outer box 2. As Figure 6A shown in the assembled sensing portion 41, wherein the wall 22 is sandwiched between the combined inner shell 410 and the outer shell 414, so that the sensing portion 41 will not move between the outside and the inside. One end of the first connector 413 is electrically connected to the sensor 412, and the other end extends to the outside of the outer shell 414 through an opening (not numbered). The first connector 413 is a terminal presenting an L shape, so the other end of the first connector 413 extends substantially upward on the outside of the outer shell 414. Therefore, the first connector 413 of the assembled sensing portion 41 is exposed to the outside, as Figure 4 shown, whereby the circuit components of the electrical connection mating portion 42 are connected. Accordingly, the assembly sequence of the sensing portion 41 can include the following steps. Extend the inner shell 410 of the sensing end from the inside of the outer box 2 through the mounting hole 24 so that the outer side surface with threads reaches the outside of the outer box 2. Align the outer shell 414 holding the first connector 413 and the sensor 412 with the inner shell 410 and combine the threads on the inner side surface of the outer shell 414 with the threads on the outer side surface of the inner shell 410. Rotate the inner shell 410 and the outer shell 414 relative to each other until the sensing portion 41 is firmly embedded on the wall 22. Disassembly is the reverse order of the above steps.

[0092] The mating portion 42 has a mating end 420 and a housing 423, and the two can be integrally formed. The mating end 420 extends from the inside of the housing 423 and is detachably connected to the outer shell 414 of the connecting end of the sensing portion 41, as Figures 7A to 7CThe connection between the mating end 420 and the housing 414 includes an electrical connection mechanism, which means that when the mating end 420 is coupled to the housing 414, both are electrically connected at the same time. Figure 7A and Figure 8 , the mating end 420 has a mask 4200 and a bow portion (not numbered), the bow portion bends and extends downward from the mask 4200 of the mating end 420, and the bow portion may be elastic to facilitate the combination with the outer surface of the shell 414. The shell 414 of this embodiment is barrel-shaped, which can be matched and combined with the bow portion. When combined, the shell 414 enters the bow portion from a channel 4201 between the bow portions, so that the bow portion is stretched open and limited by the axial movement of the limit block 4141 of the shell 414 to prevent the mating end 420 from slipping. When disassembling, the mating end 420 is lifted upward and the elastic force of the bow portion is overcome to detach the shell 414 from the channel 4201. A sealing ring 4142 can be arranged on the outer surface of the shell 414 to prevent gas leakage.

[0093] The mating end 420 also has a second connector 4202 and a socket 4203 for receiving the second connector 4202 between the cover 4200 and the housing 423. The second connector 4202 is a small data bus, which is detachably received in the socket 4203, so that one end of the second connector 4202 faces downward for detachably connecting to the first connector 413, and the other end is electrically coupled to the circuit component held in the housing 423, thereby transmitting the sensing signal. However, the present invention is not limited thereto, and the second connector 4202 can be configured at other positions of the mating end 420, or the second connector 4202 can be integrally formed with the mating end.

[0094] The housing 423 is basically a rectangular body, but the present invention is not limited thereto. The outer side of the housing 423 is used to accommodate the circuit components, including the aforementioned processing unit 421 and the display module or the wireless communication module 422, which can be integrated on a circuit board. The housing 423 has a length, a width, and a thickness. The length and the width define an inner surface, and the mating end 420 is located on the inner surface. The inner surface of the housing 423 is in an inclined relationship with the mask 4200, such as Figure 7A As shown, this is to match the direction of the assembled sensing part 41. The width and thickness define the two sides of the shell 423, and the connecting arms 43 are respectively arranged on the two sides. Each connecting arm 43 of this embodiment has a lateral extension portion 431, a vertical extension portion 432 and an engaging member 433. The lateral extension portion 431 extends horizontally from both sides of the shell 423, the vertical extension portion 432 extends downward from the end of the lateral extension portion 431, and the engaging member 433 is arranged at the bottom end of the vertical extension portion 432, thereby defining a coupling space between the vertical extension portion 432 and the engaging member 433, which allows the following example: Figure 3 and Figure 4The convex rib 23 can thus be inserted. Therefore, when the mating part 420 is engaged with the coupling housing 414, the connecting arm 43 is also synchronously connected to the convex rib 23. In other embodiments, the number of the connecting arms 43 can be more or less and can be disposed at other positions. For example, the positions of the connecting arm 43 and the convex rib 23 can be exchanged, i.e., the connecting arm 43 is disposed on the outer case 2 and the convex rib 23 is disposed on the mating part 42.

[0095] A cover 424 is detachably connected to the outside of the housing 423 to cover the circuit components. The cover 424 can be partially light-penetrating so that the information presented by the display module is visible. In a possible embodiment, the cover 424 can provide an operation interface (not shown) for an operator to input control signals to the circuit components.

[0096] After the sensing part 41 is assembled to the outer case 2, the mating part 42 then sleeves on the housing 414 of the connecting part of the sensing part 41 exposed to the outside. A part of the housing 414 is received in the mating end 420 through the channel 4201 of the mating end 420. The two arms of the bow apply elasticity to firmly hold the housing 414. The first connector 413 exposed to the housing 414 and the second connector 4203 of the mating part 42 are combined with each other to form an electrical connection during the process that the housing 414 enters the mating end 420. The connecting arm 43 is also connected to the convex rib 23 during the connection process of the mating end 420 and the housing 414. After the above assembly and connection are completed, the outer case 2 can be sent into a cleaning device, which introduces cleaning gas and drying gas into the accommodation space in the outer case 2, and the sensors 413 in the sensing part 41 and the circuit components in the mating part 42 can read and record the environmental information in the accommodation space. The wireless communication module 422 can immediately send the reading value to a remote monitoring device. After the outer case 2 is taken out after the cleaning process, the operator can know the environmental condition inside the outer case 2 through the information provided by the mating part 42 without opening the outer case 2 for measurement.

[0097] Figure 9A and Figure 9B are cross-sectional views of the second embodiment of the present invention, respectively showing the assembled detection device 4' and the exploded view of the detection device 4'. Figures 10A to 10C Respectively show the side view, top view and bottom view of the detection device 4' of the second embodiment of the present invention. Figure 11 Show the three-dimensional exploded view of the detection device 4' of the first embodiment of the present invention.

[0098] The wall 22 of the outer box 2 is formed with a mounting hole 24. When the detection device 4' is assembled and embedded on the wall 22 through the mounting hole 24, one end of the sensing portion 41' is exposed in the accommodation space in the outer box 2 and faces an inner box 6 accommodated therein. Similarly, the sensing portion 41' has a sensing end and a connecting end, wherein the sensing end is exposed to the accommodation space inside the outer box 2, and the connecting end is exposed to the outside of the outer box 2. The sensing end mainly has an inner shell 410' and a sensor 412'. The inner shell 410' is substantially barrel-shaped, and a threaded surface is provided on an inner side surface of the inner shell 410'. The inner side end of the inner shell 410' has a hollow, as Figure 11 . The sensor 412' is accommodated in a cavity defined by the inner shell 410', and the cavity can extend inside the outer box 2. A breathable material (not numbered) can be placed between the hollow of the inner shell 410' and the sensor 412', as Figure 9B and Figure 11 shown. The diameter of the inner shell 410' is larger than that of the mounting hole 24, so the inner shell 410' cannot extend to the outside of the outer box 2.

[0099] The connecting end has an outer shell 414', which has an outer threaded surface and a barrel portion with a larger diameter, wherein the diameter of the barrel portion is larger than that of the mounting hole 24, and the diameter of the outer threaded surface is smaller than that of the mounting hole 24 and the inner shell 410', so that the barrel portion with a larger diameter cannot pass through the mounting hole 24. The outer threaded surface of the outer shell 414' is detachably combined with the inner side surface of the inner shell 410', and both ends of the outer shell 414' extend to the outside and inside of the outer box 2 respectively. As Figure 9A shown, the assembled sensing portion 41', wherein the wall 22 is sandwiched between the combined inner shell 410' and the outer shell 414', so that the sensing portion 41' will not move between the outside and the inside. Similarly, one end of the first connector 413' is electrically connected to the sensor 412', and the other end extends to the outside of the outer shell 414' through an opening (not numbered). The first connector 413' is an L-shaped terminal, so the other end of the first connector 413' extends substantially upward on the outside of the outer shell 414'. Therefore, the first connector 413' of the assembled sensing portion 41' is exposed to the outside, as Figure 4 shown, thereby electrically connecting to the circuit components of the mating portion 42'. Accordingly, the assembly sequence of the sensing portion 41' can include the following steps. Extend the outer shell 414' of the connecting end from the outside of the outer box 2 through the mounting hole 24 so that the outer threaded surface extends to the inside of the outer box 2. Align the inner shell 410' with the outer shell 414' and engage the thread on the outer side surface of the outer shell 414' with the thread on the inner side surface of the inner shell 410'. Rotate the inner shell 410' and the outer shell 414' relative to each other until the sensing portion 41' is firmly embedded on the wall 22. Disassembly is the reverse order of the above steps.

[0100] Similarly, the mating part 42’ has a mating end 420’ and a housing 423’, and the two can be integrally formed. The mating end 420’ extends from an inner side of the housing 423’ and is detachably connected to the outer shell 414’ of the connection end of the sensing part 41’, as Figures 10A to 10C shown. The connection between the mating end 420’ and the outer shell 414’ includes an electrical connection mechanism, which means that when the mating end 420’ is combined with the outer shell 414’, the two establish an electrical connection at the same time. Refer to Figure 10A and Figure 11 , the mating end 420’ has a mask 4200’ and a bow part (not numbered). The bow part extends downward and bends from the mask 4200’ of the mating end 420’, and its function is as described above. When combined, the outer shell 414’ enters the bow part from a channel 4201’ between the bow parts. The limit block 4141’ can limit the axial movement of the bow part to prevent the mating end 420’ from slipping off. The principle of disassembly is the same. In a preferred embodiment, the bow part can have excellent elasticity or a multi-diameter structure, so that the mating end can adapt to outer shells of different diameters.

[0101] Similarly, the mating end 420’ also has a second connector 4202’ and a socket 4203’ for accommodating the second connector 4202’ between the mask 4200’ and the housing 423’. The second connector 4202’ is a small data bus and is detachably accommodated in the socket 4203’, so that one end of the second connector 4202’ faces downward for detachably connecting to the first connector 413’, and the other end is electrically coupled to the circuit components held in the housing 423’, thereby transmitting sensing signals. The difference between the aforementioned socket 4203 and the socket 4203’ here lies in the position of the opening. As for the details of the circuit components, the housing 23 and the cover 424 are the same as those in the previous embodiment, so their descriptions are omitted.

[0102] After the sensing part 41’ is assembled to the outer box 2, the mating part 42’ is then sleeved on the outer shell 414’ of the connection part of the sensing part 41’ exposed on the outside. The first connector 413’ exposed on the outer shell 414’ and the second connector 4203’ of the mating part 42’ are combined with each other to form an electrical connection during the process of the outer shell 414’ entering the mating end 420’. After the above assembly and connection are completed, the outer box 2 can be sent to a cleaning device or a storage library, and the operator can know the environmental conditions inside the box through the information provided by the mating part 42 without opening it.

[0103] Figure 12Illustrating an installation direction of the mating part 42' of the second embodiment of the present invention, which can also be applied to the first embodiment. Although the wall 22 of the outer case 2 is omitted and not shown, it should be understood that the assembled sensing part 41' is slightly inclined, and the free end of the exposed first connector 413' also extends along an inclined direction, which determines an installation direction D of the sensing part 41' and the mating part 42'. When combining, the downward opening of the socket 4203' of the mating part 42' is aligned with the free end of the first connector 413' and approaches along the installation direction D until the first connector 413' and the second connector 4202' are combined and the mating end 420' is combined with the housing 414'. The present invention is not limited thereto. For example, magnetic connection means can be arranged between the mating part 42' and the sensing part 41' so that the two parts can be connected attractively to each other. In other possible embodiments, the sensing part and the mating part can be integrally formed and cannot be separated from each other. Or, the mating part and the sensing part do not necessarily have to be structurally connected together, and there is a wireless or wired communication connection between the first connector and the second connector. The sensing part does not necessarily have to be embedded in the side wall of the outer case 2, and the top or bottom is also feasible.

[0104] Based on the above description, it can be seen that the present invention proposes a substrate accommodating device, through the detachable means of the detection device and the detachable means of the detection device and the outer case structure, enabling electronic components to safely exist in the chemical environment inside the box and creating a monitoring strategy different from the existing ones.

Claims

1. A substrate accommodating device, characterized in that, An outer box for accommodating an inner box and a detection device detachably connected to the outer box, the inner box for accommodating a substrate, the detection device comprising: A sensing part having a sensing end on an inner side of the outer box and a connection end on an outer side of the outer box, the sensing end and the connection end being detachably connected to each other so that the sensing part is detachably connected to the outer box, the sensing end having a cavity and a sensor accommodated in the cavity. When the sensing part is connected to the outer box, the sensing end is exposed to an accommodation space on the inner side of the outer box, and the cavity is fluidly connected to the accommodation space of the outer box via the sensing end, whereby the sensor reads information about the accommodation space.

2. The substrate housing device according to claim 1, wherein The sensing end of the sensing part has a breathable component, so that the cavity of the sensing part is fluidly connected to the accommodation space of the outer box via the breathable component.

3. The substrate housing device according to claim 1, wherein The connection end is provided with a first connector electrically coupled to the sensor for transmitting a sensing signal.

4. The substrate accommodating device according to claim 3, wherein The first connector extends outward from the connection end of the sensing part.

5. The substrate accommodating device according to claim 3, wherein The sensing part has an outer shell and an inner shell, the outer shell and the inner shell being detachably connected to each other and defining the cavity, the outer shell providing the connection end exposed to the outer side of the outer box, and the inner shell providing the sensing end exposed to the accommodation space of the outer box.

6. The substrate accommodating device according to claim 5, wherein An inner side surface of the outer shell is connected to an outer side surface of the inner shell, and the inner shell extends outside and into the accommodation space of the outer box.

7. The substrate accommodating device according to claim 5, wherein An outer side surface of the outer shell is connected to an inner side surface of the inner shell, and the outer shell extends outside and into the accommodation space of the outer box.

8. The substrate accommodating device according to claim 5, characterized in that, The outer shell and the inner shell are rotatably and detachably connected to each other.

9. The substrate accommodating device according to claim 5, wherein The outer shell and the inner shell are fixed to a wall of the outer box, and the wall is sandwiched between the outer shell and the inner shell.

10. The substrate accommodating device according to claim 5, wherein The detection device further comprises: An adapter part having an adapter end and a housing, the adapter end extending from the housing and being detachably connected to the outer shell of the sensing part, the housing accommodating a circuit component, and the circuit component being electrically coupled to the first connector via the adapter end.

11. The substrate accommodating device according to claim 10, wherein, The adapter end is provided with a second connector, the second connector being structurally matched and electrically connected to the first connector to receive the sensing signal.

12. The substrate accommodating device according to claim 11, wherein The first connector extends outward from the connection end of the sensing part along an installation direction, and the second connector is detachably connected to the first connector along the installation direction, so that the adapter end of the adapter part is detachably connected to the outer shell of the sensing part.

13. The substrate accommodating device according to claim 12, wherein The adapter end has an arch part, and the arch part is detachably sleeved on the outer shell of the sensor, so that the adapter part is connected to the sensing part.

14. The substrate housing device according to claim 10, wherein The adapter part further has a connecting arm. When the adapter part is connected to the sensing part, a free end of the connecting arm is fixedly connected to the outer box, thereby stabilizing the connection between the adapter part and the sensing part.

15. The substrate accommodating device according to claim 10, wherein The circuit component includes a processing unit, a display module and a wireless communication module, and the wireless communication module sends the sensing signal.

16. A method for installing a detection device to a substrate accommodating device, characterized in that, Comprising: Provide a sensing unit, which has a sensing end, a cavity, a sensor and a connection end. The sensor is accommodated in the cavity, and a first connector is provided at the connection end; Detachably connect the sensing unit to an outer box, such that the sensing end is exposed in a receiving space of the outer box. The cavity extends between an outer side of the outer box and the receiving space, and the cavity is in fluid connection with the receiving space of the outer box via the sensing end; And Expose the first connector on an outer side of the outer box and extend it along an installation direction.

17. The method according to claim 16, wherein Further include: Provide a mating unit, which has a mating end and a housing. The mating end extends from the housing, a second connector is provided at the mating end, and a circuit component is accommodated in the housing; Combine the mating unit with the sensing unit along the installation direction, such that the mating end of the mating unit is connected to the connection end of the sensing unit, and the first connector and the second connector are electrically connected.

18. The method according to claim 17, wherein The step of combining the mating unit with the sensing unit along the installation direction further includes: providing a connecting arm on the mating unit and fixedly connecting a free end of the connecting arm to the outer box, thereby stabilizing the connection between the mating unit and the sensing unit.

19. The method according to claim 16, wherein The step of detachably connecting the sensing unit to the outer box further includes: fixedly connecting an inner shell of the sensing unit to a wall of the outer box, and then fixing an outer shell of the sensing unit on the inner shell. The inner shell is provided with the sensing end, and the outer shell is provided with the connection end.

20. The method according to claim 16, wherein The step of detachably connecting the sensing unit to the outer box further includes: clamping a wall of the outer box with an inner shell and an outer shell of the sensing unit. The inner shell is provided with the sensing end, and the outer shell is provided with the connection end.

21. A detection device, characterized in that, For a substrate receiving device to read information of a receiving space, including: A sensing unit, having a sensing end, a connection end and a cavity extending between the sensing end and the connection end. The sensor is accommodated in the cavity and the cavity is in fluid connection with an outer side of the sensing unit via the sensing end; and A mating unit, having a mating end and a circuit component. The mating end is detachably connected to the sensing unit and electrically connected to the sensor, and the circuit component is electrically connected to the sensor via the mating end.

22. The detection device according to claim 21, wherein A first connector is provided at the connection end of the sensing unit, a second connector is provided at the mating end of the mating unit, and the sensing unit and the mating unit are detachably connected along an installation direction, such that the first connector and the second connector are detachably electrically connected.

23. The detection device according to claim 21, wherein The mating end of the mating unit has a bow portion, and the bow portion is detachably combined with the sensing unit.

24. The detection device according to claim 21, wherein The sensing unit is configured to detachably match and connect to a mounting hole of the substrate receiving device, and the mating unit has at least one connecting arm, and the connecting arm is configured to combine with a rib of the substrate receiving device.

25. The detection device according to claim 21, characterized in that The circuit component includes a processing unit, a display module and a wireless communication module.

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