Laser annealing window device and laser annealing equipment

Abstract

Some embodiments of the present disclosure provide a laser annealing window device and a laser annealing equipment, which relate to the field of display technology and are used to improve the process quality of the laser annealing process and to increase the service life of the laser annealing window device. The laser annealing window device includes a shell, an optical lens group and at least one driving structure. The shell forms a housing. The optical lens is arranged in the housing; the optical lens extends along the second direction, and the size of the optical lens along the third direction is smaller than the size of the housing along the third direction. The first direction is perpendicular to the reference plane; the second direction is parallel to the reference plane; the third direction is parallel to the reference plane and perpendicular to the second direction. Along the third direction, the driving structure is arranged on one side of the optical lens and is configured to drive the optical lens to move along the third direction in the housing. The laser annealing window device and the laser annealing equipment provided by some embodiments of the present disclosure are used to prepare display panels.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a laser annealing window device and laser annealing equipment. Background Art

[0002] Organic Light-Emitting Diode (OLED) display panels have the characteristics of high image quality, fast response speed, low power consumption and light weight, making them the most widely used display panels.

[0003] OLED display panels are equipped with a polycrystalline silicon film layer. Currently, this layer is typically prepared using an excimer laser annealing process. This is a complex process that requires laser annealing equipment to anneal the amorphous silicon film layer, converting it into a polycrystalline silicon layer. Therefore, the performance of the excimer laser annealing equipment determines the quality of the amorphous silicon to polycrystalline silicon process. Summary of the Invention

[0004] An object of some embodiments of the present disclosure is to provide a laser annealing window device and a laser annealing equipment, which are used to improve the process quality of the laser annealing process and increase the service life of the laser annealing window device.

[0005] To achieve the above objectives, some embodiments of the present disclosure provide the following technical solutions:

[0006] In a first aspect, a laser annealing window device is provided. The laser annealing window device includes a housing, an optical lens, and at least one driving structure. The housing encloses a housing cavity; the housing is provided with a first light-transmitting hole. Along a first direction, the first light-transmitting hole is located on one side of the housing cavity and communicates with the housing cavity. The first light-transmitting hole extends along a second direction. The first direction is perpendicular to a reference plane, and the second direction is parallel to the reference plane. The reference plane is parallel to the plane where the laser annealing window device is located. The optical lens is disposed within the housing cavity; the optical lens extends along the second direction and at least partially overlaps with the first light-transmitting hole. The dimension of the optical lens along a third direction is smaller than the dimension of the housing cavity along the third direction. The third direction is parallel to the reference plane and perpendicular to the second direction. The driving structure is disposed on one side of the optical lens along the third direction and is configured to drive the optical lens to move along the third direction within the housing cavity.

[0007] The optical lens at least partially overlaps with the first light-transmitting hole, and the overlapping portion on the optical lens can be used in the laser annealing process. The above-mentioned optical lens can move along the third direction in the accommodating cavity. In this way, during the movement of the optical lens, different areas of the optical lens overlap with the first light-transmitting hole, and the optical lens can be divided into a plurality of sub-parts that are sequentially adjacent along the third direction, and each sub-part overlaps with the orthographic projection of the first light-transmitting hole on the reference surface. Driven by the driving structure, the optical lens moves along the third direction in the accommodating cavity. Every time the optical lens moves a certain distance, different sub-parts overlap with the orthographic projection of the first light-transmitting hole on the reference surface, so that the laser beam passes through the first light-transmitting hole and the sub-parts of the optical lens in sequence to act on the substrate to be processed. In this way, the movement of the optical lens along the third direction enables different sub-parts of the optical lens to be used in the laser annealing process, thereby increasing the number of times an optical lens is used and improving the service life of the laser annealing window device.

[0008] In some embodiments, the housing is provided with a mounting hole, the axis of which extends along a third direction. The drive structure includes a drive rod, which is inserted into the mounting hole and rotatably connected to the mounting hole; both ends of the drive rod extend out of the mounting hole, with the end of the drive rod proximal to the optical lens abutting against a side surface of the optical lens, and the end of the drive rod distal to the optical lens serving as an operating end for a user to adjust the position of the optical lens within the accommodating cavity.

[0009] In some embodiments, the laser annealing window device includes at least one group of driving structures, each group includes two driving structures, the two driving structures are respectively arranged on both sides of the optical lens, and the two driving structures are arranged opposite to each other in the third direction.

[0010] In some embodiments, the laser annealing window device includes a plurality of driving structures, and the plurality of driving structures are arranged at equal intervals along the second direction.

[0011] In some embodiments, the housing includes an outer frame and a cover plate. The outer frame is disposed on at least two opposite sides of the optical lens in the third direction. The cover plate is disposed on one side of the outer frame and the optical lens along the first direction.

[0012] The cover plate includes a cover plate body and an extension portion. The cover plate body is arranged parallel to the reference plane; a distance is provided between the cover plate body and the outer frame along a first direction, and the first light-transmitting hole is provided on the cover plate body; a surface of the optical lens proximal to the cover plate body contacts the cover plate body. The extension portion is connected to at least two opposing edges of the cover plate body in a third direction; an end of the extension portion distal from the cover plate body is connected to a side of the outer frame proximal to the cover plate body.

[0013] In some embodiments, the cover body, the extension, and the outer frame form a mounting gap. The laser annealing window device further includes a sealing assembly. The sealing assembly is disposed within the mounting gap; a surface of the cover body proximal to the optical lens, a side surface of the optical lens, and a surface of the outer frame proximal to the cover body are in contact with the sealing assembly to seal the gap between the first light-transmitting hole and the optical lens. The sealing assembly is deformable in a third direction to accommodate movement of the optical lens in the third direction.

[0014] In some embodiments, the sealing assembly includes a baffle, a buffer pad, and an elastic member. The thickness of the baffle along the first direction is equal to the distance between the cover body and the outer frame along the first direction; a portion of the baffle is located on the outer frame. The buffer pad is arranged between the baffle and the side of the optical lens; the buffer pad includes a first surface and a second surface relative to each other, and a third surface, the first surface contacts the side of the optical lens, the second surface contacts a side of the baffle close to the optical lens, and the third surface contacts a side of the cover body close to the optical lens. The elastic member is arranged between the baffle and the extension portion, and its two ends are respectively connected to the baffle and the extension portion; the elastic member can produce elastic deformation.

[0015] In some embodiments, the housing further comprises a bottom plate, disposed opposite the cover plate body. The outer frame is connected to two opposing edges of the bottom plate in a third direction. Along the first direction, the optical lens is positioned between the cover plate body and the bottom plate. A second light-transmitting hole is provided on the bottom plate, extending along the second direction; the orthographic projection of the second light-transmitting hole on the reference plane overlaps with the orthographic projection of the first light-transmitting hole on the reference plane.

[0016] In some embodiments, the optical lens includes an optical lens and a fixture. The fixture surrounds the optical lens along the reference surface; at least one of the two opposing ends of the fixture in the second direction is provided with a retaining hole. The base plate includes a plurality of retaining grooves at least one of the two opposing ends in the second direction, the plurality of retaining grooves being spaced apart along the third direction. The laser annealing window device further includes a positioning pin that passes through the retaining hole and is inserted into the retaining groove.

[0017] In another aspect, a laser annealing device is provided. The laser annealing device includes a laser annealing window device and an annealing chamber provided in any of the above embodiments. The annealing chamber has an annealing cavity. The annealing chamber includes a first sidewall, a third light-transmitting hole is provided on the first sidewall, the third light-transmitting hole extends along a second direction, and the third light-transmitting hole is in communication with the annealing cavity. The laser annealing window device is provided on a side of the third light-transmitting hole away from the annealing cavity; the orthographic projection of the first light-transmitting hole on the first sidewall at least partially overlaps with the third light-transmitting hole.

[0018] The beneficial effects that can be achieved by the laser annealing equipment provided by the embodiment of the present disclosure are the same as the beneficial effects that can be achieved by the laser annealing window device provided by the above technical solution, and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings described herein are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the embodiments of the present disclosure. The exemplary embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation of the present disclosure. In the drawings:

[0020] Figure 1 A schematic structural diagram of a laser annealing window device provided in an embodiment of the present disclosure;

[0021] Figure 2A Schematic diagram of the structure of a laser annealing window device in the related art;

[0022] Figure 2B Schematic diagram of the structure of another laser annealing window device in the related art;

[0023] Figure 3 A schematic structural diagram of a laser annealing window device provided in an embodiment of the present disclosure;

[0024] Figure 4 A schematic structural diagram of another laser annealing window device provided in an embodiment of the present disclosure;

[0025] Figure 5 A schematic structural diagram of another laser annealing window device provided in an embodiment of the present disclosure;

[0026] Figure 6 A schematic structural diagram of another laser annealing window device provided in an embodiment of the present disclosure;

[0027] Figure 7 for Figure 6 A schematic structural diagram of a laser annealing window device is provided;

[0028] Figure 8 A schematic structural diagram of another laser annealing window device provided in an embodiment of the present disclosure;

[0029] Figure 9 for Figure 8 A schematic structural diagram of a laser annealing window device is provided;

[0030] Figure 10 for Figure 3 A schematic cross-sectional view of a laser annealing window device along section line AA is provided;

[0031] Figure 11 for Figure 10 Schematic diagram of the enlarged structure of local G;

[0032] Figure 12 Schematic diagram of a polysilicon film prepared by a laser annealing device provided in the related art;

[0033] Figure 13 Schematic diagram of a polysilicon film prepared by a laser annealing device according to an embodiment of the present disclosure;

[0034] Figure 14 This is a schematic diagram of the laser energy intensity received by different regions of a polysilicon film prepared by a laser annealing device provided in the related art. DETAILED DESCRIPTION

[0035] For ease of understanding, the technical solutions provided by some embodiments of the present disclosure are described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the proposed technical solutions, rather than all embodiments. Based on some embodiments of the present disclosure, all other embodiments that can be obtained by those skilled in the art are within the scope of protection of the present disclosure.

[0036] The use of "adapted to" or "configured to" herein is intended to be open and inclusive language that does not exclude devices adapted or configured to perform additional tasks or steps.

[0037] Additionally, the use of “based on” is meant to be open and inclusive, as a process, step, calculation, or other action “based on” one or more stated conditions or values ​​may, in practice, be based on additional conditions or values ​​beyond those stated.

[0038] As used herein, "about," "substantially," or "approximately" includes the stated value and an average value that is within an acceptable range of deviation from the particular value as determined by one of ordinary skill in the art taking into account the measurements in question and the errors associated with the measurement of the particular quantity (i.e., the limitations of the measurement system).

[0039] Exemplary embodiments are described herein with reference to cross-sectional and / or plan views that are idealized exemplary drawings. In the drawings, the thicknesses of layers and regions are exaggerated for clarity. Therefore, variations in shape relative to the drawings due to, for example, manufacturing techniques and / or tolerances are contemplated. Therefore, the exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but rather include deviations in shape due to, for example, manufacturing. For example, an etched region shown as a rectangle will typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shape of regions of the device and are not intended to limit the scope of the exemplary embodiments. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art will recognize the application of other processes and / or the use of other materials.

[0040] Currently, polycrystalline silicon films are typically prepared using an excimer laser annealing process. Using an excimer laser as a heat source, the laser passes through a projection system, generating a uniformly distributed laser beam. This beam is then projected onto the amorphous silicon (a-Si) film. Upon absorbing the excimer laser's energy, the amorphous silicon film transforms into a polycrystalline silicon (p-Si) film. Throughout the entire process, nitrogen is evenly introduced into the annealing chamber of the laser annealing equipment, sweeping the surface of the amorphous silicon film to reduce the impact of oxygen concentration on the quality of the polycrystalline silicon formed by melt recrystallization of the amorphous silicon film.

[0041] For example, the active layer in a polysilicon thin-film transistor is a polysilicon film layer. Polysilicon thin-film transistors can be used in various display panels, for example, in OLED display panels; or in liquid crystal display (LCD) display panels. For example, polysilicon thin-film transistors include low-temperature polysilicon (LTPS) thin-film transistors.

[0042] Some embodiments of the present disclosure provide a laser annealing device 1000. Figure 1 As shown, the laser annealing equipment 1000 includes: an excimer laser generator (not shown), a laser beam cutter, an annealing chamber 100, and a laser annealing window device 200 disposed on a side wall of the annealing chamber 100. The excimer laser generator is configured to emit a laser beam. The laser beam cutter cuts the laser light emitted by the excimer laser generator to form a laser beam that can be emitted from the laser annealing window device 200 into the annealing chamber 100.

[0043] The annealing chamber 100 includes a first side wall 11, a second side wall 12 opposite to the first side wall 11, a third side wall connecting the first side wall 11 and the second side wall 12, and a fourth side wall opposite to the third side wall. The first side wall 11, the third side wall, the second side wall 12 and the fourth side wall are sequentially connected to form the annealing chamber 20. It should be explained that since the plane where the third side wall and the fourth side wall are located is parallel to the Figure 1 The cross-section shown is in the plane where the Figure 1 The third side wall and the fourth side wall are not shown.

[0044] For example, Figure 1 As shown, a third light-transmitting hole 111 is provided on the first sidewall 11. The third light-transmitting hole 111 extends along the second direction Y and communicates with the annealing chamber 20. Furthermore, a laser annealing window device 200 is provided on a side of the third light-transmitting hole 111 away from the annealing chamber 20. The laser beam sequentially passes through the laser annealing window device 200 and the third light-transmitting hole 111 and enters the annealing chamber 20.

[0045] A carrier 21 is provided in the annealing chamber 20 and is configured to carry a substrate 22 to be processed (a substrate having an amorphous silicon film). It is understood that the laser annealing apparatus 1000 is configured to utilize the energy of the laser beam to melt and recrystallize the amorphous silicon material into polycrystalline silicon material.

[0046] like Figure 1 As shown, the first sidewall 11 of the annealing chamber 100 is further provided with a plurality of through holes 30 and a nitrogen gas delivery pipe 40 connected to the through holes 30. The nitrogen gas delivery pipe 40 is configured to deliver nitrogen gas to fill the annealing chamber 20 and to purge the substrate 22 to be processed with nitrogen gas, thereby creating a relatively uniform nitrogen atmosphere on the surface of the substrate 22 to be processed. In this way, the laser beam is emitted through the third light-transmitting hole 111 toward the substrate 22 to be processed on the carrier 21, ensuring that the melted and recrystallized region of the amorphous silicon film illuminated by the laser beam is in a pure nitrogen environment without interference from oxygen (from the air), thereby improving the crystallization quality of the polysilicon and, in turn, the product yield of the polysilicon display panel.

[0047] In addition, if Figure 1 As shown, a groove is provided on one side of the first side wall 11 close to the laser annealing window device 200, and an air cushion 50 is provided in the groove. The air cushion 50 is configured to seal the gap between the laser annealing window device 200 and the first side wall 11 to prevent external air from entering the annealing chamber 20 and affecting the pure nitrogen environment around the amorphous silicon film on the substrate 22 to be processed.

[0048] In related technologies, such as Figure 2A and Figure 2BAs shown, the laser annealing window device 200 includes a housing 210 and an optical lens 220. The housing 210 forms a receiving cavity 201, and the optical lens 220 is located in the receiving cavity 201.

[0049] For example, Figure 2A and Figure 2B As shown, the housing 210 includes an outer frame 211 and a cover plate 212. The side of the outer frame 211 near the optical lens 220 abuts against the optical lens 220, and the inner side of the cover plate 212 near the optical lens abuts against the optical lens 220. Under the combined action of the outer frame 211 and the cover plate 212, the optical lens 220 is snapped into the accommodating cavity 201. Here, the optical lens 220 is immovable relative to the first sidewall 11 of the annealing chamber 100.

[0050] like Figure 1 and Figure 2A As shown, in the process of preparing polysilicon film using laser annealing window equipment 1000, the laser beam sequentially passes through the laser cutter, optical lens 220 and third light-transmitting hole 111 to irradiate the amorphous silicon film layer in the annealing chamber 20. Figure 1 As shown, since the distance p between the optical lens 220 and the amorphous silicon film layer on the carrier 21 is relatively close, typically p is 6mm to 10mm, the laser beam passes through the optical lens 220 and irradiates the amorphous silicon film layer. The laser beam blasts particles (such as dust) in the environment, and the resulting fragments are splashed onto the optical lens 220, causing local contamination of the optical lens 220. The contaminated area blocks the transmission of part of the laser beam, reducing the transmittance of the laser beam. In this way, the laser energy transmitted by the contaminated and non-contaminated areas of the optical lens 220 is uneven, and the size of the melted and recrystallized crystals on the amorphous silicon film layer is uneven. Furthermore, over time, as the laser annealing window device 200 is used more frequently, the laser beam passes through the fixed area of ​​the optical lens 220, causing local wear of the optical lens 220. Furthermore, the laser cutter has a relatively sharp edge, which can easily reflect the laser light irradiated by the laser cutter edge onto the optical lens 220, further exacerbating the local wear of the optical lens 220. Consequently, the laser energy transmitted through the worn and unworn areas of the optical lens 220 is uneven, and the size of the crystals melted and recrystallized on the amorphous silicon film layer is uneven. Consequently, other film layers fabricated on the amorphous silicon film layer develop undesirable protrusions, affecting the surface flatness of the light-emitting side of the display panel and thus the yield of the display panel.

[0051] For example, Figure 12 and Figure 14 As shown, Figure 14 The polysilicon film of different regions prepared in the laser annealing apparatus 1000 ( Figure 12Schematic diagram of the laser energy intensity received by region Q1 and region Q2 in the optical lens 220. In the case where the optical lens 220 is contaminated by particles in the air or is irreversibly damaged, the contaminated or damaged region on the optical lens 220 corresponds to region Q1 on the substrate to be processed 22, and the uncontaminated and undamaged region corresponds to region Q2 on the substrate to be processed 22. In this way, since the transmittance of the laser beam is different between the contaminated or damaged region and the uncontaminated and undamaged region on the optical lens 220, the various regions of the entire surface to be processed of the substrate to be processed 22 receive different laser energies and uneven laser energy density. As a result, after the amorphous silicon film on the substrate to be processed 22 is melted and recrystallized, the size of the polycrystalline silicon particles in region Q1 is significantly different from that of the polycrystalline silicon particles in region Q2 (i.e., the uneven laser energy received by region Q1 causes the size of the crystallized polycrystalline silicon particles to fluctuate greatly and be unevenly distributed). As a result, the flatness of subsequent film layers (such as the gate insulating layer) is affected, and the shapes of various patterns of the metal conductive layer are affected, which can easily cause short circuit problems and affect the yield of the display panel.

[0052] Therefore, after the laser annealing window device 200 has been used for a period of time or a certain number of times, the optical lens 220 that will be irreversibly damaged needs to be replaced. Since the laser annealing window device 200 is an integrated device with its components tightly connected, the optical lens 220 cannot be removed individually. The laser annealing window device 200 must be removed as a whole, making the replacement of the laser annealing window device 200 complicated and affecting the production efficiency of the product. In addition, when the laser annealing equipment is used frequently, the optical lens 220 in the laser annealing window device 200 ages at a faster rate. To ensure the yield of the display panel being manufactured, the laser annealing window device 200 needs to be replaced frequently, which incurs expensive process costs.

[0053] To this end, some embodiments of the present disclosure provide a laser annealing window device 300 with a novel structure. Without changing the structure of other parts of the laser annealing equipment 1000 and the trajectory of the laser beam, the service life of the laser annealing window device 300 is improved. Figure 10 As shown, the laser annealing window device 300 includes a housing 310, an optical lens 320, and at least one driving structure 330. The housing 310 encloses a housing cavity 301. The optical lens 320 is disposed within the housing cavity 301. The width W3 of the optical lens 320 along the third direction Z is less than the width W2 of the housing cavity 301 along the third direction Z. Each driving structure 330 is disposed on one side of the optical lens 320 along the third direction Z and is configured to drive the optical lens 320 to move within the housing cavity 301 along the third direction Z. The third direction Z is parallel to a reference plane, which is parallel to the plane on which the laser annealing window device 300 is located.

[0054] In some embodiments, as Figure 10 As shown, the housing 310 is provided with a first light-transmitting hole 311 . Along the first direction X, the first light-transmitting hole 311 is located on one side of the accommodating cavity 301 , and the first light-transmitting hole 311 communicates with the accommodating cavity 301 . The first light-transmitting hole 311 extends along the second direction Y.

[0055] Here, the optical lens 320 extends along the second direction Y and at least partially overlaps with the first light-transmitting hole 311. Furthermore, the orthographic projection of the first light-transmitting hole 311 on the first sidewall 11 at least partially overlaps with the third light-transmitting hole 111 in the annealing chamber 10, so that the laser beam sequentially passes through the first light-transmitting hole 311, the optical lens 320, and the third light-transmitting hole 111 and enters the annealing chamber 20. The first direction X is perpendicular to the reference plane; the second direction Y is parallel to the reference plane and perpendicular to the third direction Z.

[0056] In some examples, such as Figure 3 、 Figure 5 and Figure 6 As shown, the housing 310 includes an outer frame 312. The outer frame 312 is at least disposed on two opposite sides of the optical lens 320 in the third direction Z. For example, Figure 3 As shown, the outer frame 312 is disposed on two opposite sides of the optical lens 320 in the third direction Z. Alternatively, as shown in FIG. Figure 5 As shown, the outer frame 312 is disposed on two opposite sides of the optical lens 320 in the third direction Z and one side in the second direction Y, surrounding the optical lens 320 on three sides. Alternatively, as Figure 6 As shown, the outer frame 312 is arranged on two opposite sides of the optical lens 320 in the third direction Z and on both sides of the second direction Y, and the outer frame 312 is provided with a first opening K1 on one side of the second direction Y, and the dimension W4 of the first opening K1 along the third direction Z is not less than the width W2 of the optical lens 320 along the third direction Z, so that the optical lens 320 can be removed from the first opening K1.

[0057] In some examples, such as Figure 10 As shown, the housing 310 further includes a cover plate 313 . Along the first direction X, the cover plate 313 is disposed on one side of the outer frame 312 and the optical lens 320 . The cover plate 313 is connected to the outer frame 312 to snap the optical lens 320 into the accommodating cavity 301 .

[0058] For example, Figure 10 As shown, the cover plate 313 includes a cover plate body 3131 and an extension portion 3132. The cover plate body 3131 is arranged parallel to the reference plane. Along the first direction X, there is a distance between the cover plate body 3131 and the outer frame 312, and the first light transmission hole 311 is provided on the cover plate body 3131. The optical lens 320 is in contact with the cover plate body 3131 on a surface close to the cover plate body 3131.

[0059] The extension portion 3132 is connected to at least two opposite edges of the cover body 3131 in the third direction Z. One end of the extension portion 3132 away from the cover body 3131 is connected to a side of the outer frame 312 close to the cover body 3131 .

[0060] It is understood that the extension portion 3132 of the cover plate 313 needs to be provided with a second opening (not shown in the figure) on one side of the optical lens 320 along the second direction Y, and the size of the second opening along the third direction Z is not less than the width W2 of the optical lens 320 along the third direction Z, so that the optical lens 320 can be removed from the second opening; and the size of the second opening along the third direction Z is not less than the first opening K1 ( Figure 6 Dimension W4 along the third direction Z) as shown.

[0061] In some embodiments, as Figure 10 As shown, the cover body 3131, the extension portion 3132, and the outer frame 312 form a mounting gap. Furthermore, the laser annealing window device 300 further includes a sealing assembly 340. The sealing assembly 340 is disposed within the mounting gap. A surface of the cover body 3131 proximal to the optical lens 320, a side surface of the optical lens 320, and a surface of the outer frame 312 proximal to the cover body 3131 are in contact with the sealing assembly 340, respectively, to seal the gap between the first light-transmitting hole 311 and the optical lens 320. The sealing assembly 340 can deform along the third direction Z to accommodate movement of the optical lens 320 along the third direction Z.

[0062] Exemplarily, the laser annealing window device 300 includes two sealing assemblies 340, which are respectively located on either side of the optical lens 320 along the third direction Z. The length of each sealing assembly 340 along the second direction Y is equal to the length of the third light-transmitting hole 311 along the second direction Y. Thus, during the movement of the optical lens 320, the sealing assemblies 340 cooperate with the movement of the optical lens 320 to prevent air outside the laser annealing window device 300 from entering the annealing chamber 20 through the accommodating cavity 301 and the first light-transmitting hole 111, thereby affecting the uniformity of the particle size of the polycrystalline silicon material formed by the melting and recrystallization of the amorphous silicon material.

[0063] In some examples, such as Figure 11 As shown, the sealing assembly 340 includes a baffle 342 , a buffer pad 343 and an elastic member 341 .

[0064] like Figure 11As shown, the thickness of the baffle 342 along the first direction X is equal to the distance between the cover body 3131 and the outer frame 312 along the first direction X. The baffle 342 is partially located on the outer frame 312. During movement of the baffle 342 along the third direction Z, the baffle 342 always remains at least partially located on the outer frame 312, preventing the baffle 342 from falling into the gap between the optical lens 342 and the portion of the outer frame 312 on the same side thereof, which could damage the laser annealing window device 300. For example, the length of the baffle 342 along the second direction Y is equal to the length of the third light-transmitting aperture 311 along the second direction Y. The baffle 342 is made of a rigid material.

[0065] The above-mentioned buffer pad 343 is arranged between the baffle 342 and the side of the optical lens 320. The buffer pad 343 includes a first surface S1 and a second surface S2 relative to each other, and a third surface S3. The first surface S1 contacts the side of the optical lens 320, the second surface S2 contacts a side of the baffle 342 close to the optical lens 320, and the third surface S3 contacts a side of the cover body 3131 close to the optical lens 320. For example, the length of the buffer pad 343 along the second direction Y is equal to the length of the baffle 342 along the second direction Y. The material used for the buffer pad 343 includes any one of elastic materials such as polyimide. Since the optical lens 320 and the baffle 342 are both rigid materials, the buffer pad 343 can provide a buffering effect for the optical lens 320 and the sealing assembly 340 to fit tightly together during movement along the third direction Z.

[0066] The elastic member 341 is disposed between the baffle 342 and the extension 3132 of the cover plate 313, and its two ends are connected to the baffle 342 and the extension 3132, respectively. The elastic member 341 is capable of generating elastic deformation. When the optical lens 320 moves leftward along the third direction Z, the elastic member 341 stretches due to elastic recovery, so that the first surface S1 of the buffer pad 343 is closely fitted to the side of the optical lens 320. For example, the sealing assembly 340 includes a plurality of elastic members 341, and the plurality of elastic members 341 are arranged at equal intervals along the second direction Y, and one end of each of the plurality of elastic members 342 is connected to the baffle 342 to ensure that the elastic members 341 have good elastic properties. For example, the elastic member 341 can be a spring.

[0067] In some embodiments, as Figure 10 As shown, the outer frame 312 of the laser annealing window device 300 is provided with a mounting hole 3121, and the axis of the mounting hole 3121 extends along the third direction Z. Each of the above-mentioned driving structures 330 is installed in the mounting hole 3121. Figure 11 As shown, each driving structure 330 includes a driving rod 331. The driving rod 331 is inserted into the mounting hole 3121 and is rotatably connected to the mounting hole 3121.

[0068] The driving structure 330 drives the optical lens 320 to move along the third direction Z. The arrangement of the driving structure 330 is not limited by space and is simple to manufacture, thereby increasing the service life of the laser annealing window device 300 in the overall process flow.

[0069] In some examples, such as Figure 11 As shown, both ends of the driving rod 331 extend out of the mounting hole 3121, and the end of the driving rod 331 close to the optical lens 320 is against the side of the optical lens 320, and the end of the driving rod 331 away from the optical lens 320 serves as the operating end for the user to adjust the position of the optical lens 320 in the accommodating cavity 301.

[0070] For example, the inner wall of the mounting hole 3121 is provided with a thread, and the driving rod 331 is provided with a thread matching the thread of the mounting hole 3121 ( Figure 11 (not shown), thus, by rotating the operating end of the driving rod 331 to make the driving rod 331 reciprocate along the third direction Z, the optical lens 320 is driven to move along the third direction.

[0071] In other examples, the drive rod 331 includes a fixed rod and a telescopic rod. The fixed rod is sleeved over the telescopic rod, and the inner wall of the fixed rod is provided with internal threads, while the telescopic rod is provided with external threads. The fixed rod is rotatably connected to the mounting hole 3121. In this way, by rotating the telescopic rod, the telescopic rod reciprocates along the third direction Z, thereby driving the optical lens 320 to move along the third direction.

[0072] In yet other examples, the drive rod 331 comprises a mechanical differential head, which includes a sleeve, a differential cylinder, and a retractable measuring rod. The differential cylinder and the sleeve are provided with scales, and rotating the differential cylinder causes the differential cylinder to reciprocate along the sleeve, thereby driving the retractable measuring rod to move in a third direction Z. By rotating the differential cylinder, the scales on the differential cylinder and the sleeve are read (the sum of the scales on the sleeve and the differential cylinder), thereby controlling the movement distance of the retractable measuring rod in the third direction Z (i.e., the sum of the scales on the sleeve and the differential cylinder).

[0073] For example, the sleeve is provided with two rows of scale lines, one row marked with whole millimeter scale (1mm / division) and the other row marked with half millimeter scale (0.5mm / division). The front circumferential surface of the differential cylinder is provided with 50 equally divided scale lines (0.01mm / division). The setting standard of the scale on the differential cylinder and sleeve is related to the distance that the differential head drives the optical lens 320 to move once in the third direction Z. The setting standard can be selected according to actual conditions and is not limited here.

[0074] In some embodiments, as Figure 3 and Figure 4As shown, the laser annealing window device 300 includes at least one group of driving structures 330 , each group includes two driving structures 330 , and the two driving structures 330 are respectively disposed on both sides of the optical lens 320 , and the two driving structures 330 are disposed opposite to each other in the third direction Z.

[0075] For example, Figure 3 As shown, the laser annealing window device 300 includes a group of driving structures 330, and the two driving structures 330 in a group are respectively located on both sides of the optical lens 320 along the second direction Y, and each driving structure 330 is located at the center line M1 of the optical lens 320 along the second direction Y to improve the balance and stability of driving the optical lens 320 to move.

[0076] For example, Figure 4 As shown, the laser annealing window device 300 includes a plurality of driving structures 330 , and the plurality of driving structures 330 are arranged along the second direction Y at equal intervals.

[0077] For example, Figure 4 As shown, the laser annealing window device 300 includes three groups of driving structures 330. Along the second direction Y, the first group of driving structures 330, the second group of driving structures 330, and the third group of driving structures 330 are arranged in sequence. The second group of driving structures 330 is located at the center line M1 of the optical lens 320 along the second direction Y. In addition, the spacing between the first group of driving structures 330 and the second group of driving structures 330 is equal to the spacing between the second group of driving structures 330 and the third group of driving structures 330.

[0078] In this way, when the three groups of driving structures 330 drive the optical lens 320 to move along the third direction Z, the three driving structures 330 on the same side extend or contract by the same distance, so that the parts of the optical lens 320 corresponding to different driving structures 330 move the same distance.

[0079] In some embodiments, as Figure 10 As shown, the housing 310 includes a bottom plate 350. The bottom plate 350 is disposed opposite to the cover plate body 3131. The outer frame 312 is connected to the bottom plate 350 at two opposite edges in the third direction Z.

[0080] Along the first direction X, the optical lens 320 is located between the cover body 3131 and the bottom plate 350. A second light-transmitting hole 351 is provided on the bottom plate 350, and the second light-transmitting hole 351 extends along the second direction Y. The orthographic projection of the second light-transmitting hole 351 on the reference plane overlaps with the orthographic projection of the first light-transmitting hole 311 on the reference plane.

[0081] In some examples, such as Figure 3 and Figure 7As shown, the orthographic projection of the third light-transmitting hole 311 on the reference plane is located within the orthographic projection of the second light-transmitting hole 351 on the reference plane, and the orthographic projection of the first light-transmitting hole 111 on the reference plane is located within the orthographic projection of the second light-transmitting hole 351 on the reference plane, thereby preventing the second light-transmitting hole 351 on the bottom plate 350 from affecting the transmittance of the laser beam through the third light-transmitting hole 311 and the first light-transmitting hole 111 to the annealing chamber 20.

[0082] For example, Figure 7 As shown, the width W2 of the second light-transmitting hole 351 on the bottom plate 350 along the third direction Z is greater than the width W1 of the first light-transmitting hole 111 along the third direction Z, and the length L2 of the second light-transmitting hole 351 along the second direction Y is greater than the length L1 of the first light-transmitting hole 111 along the second direction Y.

[0083] In other examples, such as Figure 8 and Figure 9 As shown, the orthographic projection of the second light-transmitting hole 351 on the reference surface overlaps with the orthographic projection of the first light-transmitting hole 111 on the reference surface. Figure 9 As shown, the width W2 of the second light transmission hole 351 along the third direction Z is equal to the width W1 of the first light transmission hole 111 along the third direction Z, and the length L2 of the second light transmission hole 351 along the second direction Y is equal to the length L1 of the first light transmission hole 111 along the second direction Y.

[0084] Here, the bottom plate 350 can be formed in one piece with the outer frame 312. The thickness of the bottom plate 350 along the first direction X is much smaller than the thickness of the outer frame 312, ensuring that the optical lens 320 is stably snapped into the accommodating cavity 301. This embodiment of the present disclosure does not limit this.

[0085] In some embodiments, as Figure 10 As shown, the optical lens 320 includes an optical lens 321 and a fixture 322. The fixture 322 surrounds the optical lens 321 along the reference plane.

[0086] For example, a through hole is provided on the fixture 322, and an elastic pad is attached to the inner wall of the through hole to clamp the optical lens 321 into the through hole. The material used for the fixture 322 includes a rigid material, such as stainless steel.

[0087] In some examples, such as Figure 5 As shown, a pull ring 370 is provided on one side of the clamp 322 along the second direction Y, so as to facilitate removal of the optical lens 320 from the accommodating cavity 301 along the second direction Y.

[0088] In some examples, such as Figure 3 As shown, the laser annealing window device 300 further includes a positioning pin 360 .

[0089] The fixture 322 of the optical lens 320 is provided with a retaining hole 3221 at at least one of its two opposite ends in the second direction Y. Furthermore, the base plate 350 is provided with a plurality of retaining grooves 352 at at least one of its two opposite ends in the second direction Y. The retaining grooves 352 are spaced apart along the third direction Z. The retaining holes 3221 and the retaining grooves 352 have matching apertures. Thus, the positioning pin 360 passes through the retaining hole 3221 and is inserted into the retaining groove 352, preventing the optical lens 320 from shaking and improving its stability.

[0090] For example, Figure 4 As shown, the fixture 322 of the optical lens 320 has a limiting hole 3221 at one of the two opposite ends in the second direction Y. The base plate 350 has a plurality of limiting grooves 352 at one of the two opposite ends in the second direction Y. Accordingly, the laser annealing window device 300 includes a positioning pin 360.

[0091] For example, Figure 3 As shown, the fixture 322 of the optical lens 320 is provided with limiting holes 3221 at both opposite ends in the second direction Y. The base plate 350 is provided with a plurality of limiting grooves 352 at both opposite ends in the second direction Y. Accordingly, the laser annealing window device 300 includes two positioning pins 360.

[0092] Exemplarily, the plurality of limiting grooves 352 are sequentially arranged along the third direction Y, and the spacing between each two adjacent limiting grooves 352 is 5 mm to 10 mm. For example, the spacing between each two adjacent limiting grooves 352 is 5 mm, 6 mm, or 10 mm.

[0093] In order to more clearly illustrate the laser annealing window device 300 disclosed in some of the above embodiments, the dimensions of the components of the laser annealing window device 300 are exemplarily described below based on the dimensions of the optical lens 321 .

[0094] For example, Figure 10 and Figure 3 As shown, the width W0 of the optical lens 321 along the third direction Z is 100 mm, the length L0 along the second direction Y is 1150 mm, and the height H0 along the first direction X is 50 mm.

[0095] like Figure 1As shown, the laser beam emitted by the excimer laser injector is laser cut (beam cut) to form a laser beam with a cross-section of 1000 mm in length along the second direction Y and a width of 0.6 mm in the third direction Z. The laser beam enters the laser annealing window device 300 at a certain pre-tilt angle (for example, the pre-tilt angle of the laser beam is 3° to 7°), and the distance between the laser cutter and the optical lens 320 along the first direction X is 1 mm. In this way, the width of the laser beam along the third direction Z is approximately 5 mm when it is irradiated on the incident surface of the optical lens 321.

[0096] Therefore, in order to allow the processed laser beam to be incident on the annealing chamber 20 in its entirety, the orthographic overlapping area of ​​the third light-transmitting hole 311 and the first light-transmitting hole 111 on the reference surface is set to be no less than the cross-sectional area of ​​the laser beam (1000 mm × 5 mm), that is, the length of the overlapping area along the second direction Y is no less than the length of the cross-sectional area of ​​the laser beam (1000 mm), and the width of the overlapping area along the third direction Z is no less than the width of the cross-sectional area of ​​the laser beam (5 mm). For example, Figure 7 As shown, the orthographic projection of the third light transmission hole 311 on the reference plane completely overlaps with the orthographic projection of the first light transmission hole 111 on the reference plane, that is, the length of the third light transmission hole 311 along the second direction Y is equal to the length L1 of the first light transmission hole 111 along the second direction, and L1 is 1000 mm; the width of the third light transmission hole 311 along the third direction Z is equal to the width W1 of the first light transmission hole 111 along the third direction Z, and W1 is 5 mm.

[0097] Based on the sizes of the optical lens 320, the optical lens 321, the first light-transmitting hole 111, the second light-transmitting hole 351 and the third light-transmitting hole 311, as shown in FIG. Figure 10 As shown, in order to allow the optical lens 320 to move along the third direction Z within the accommodating cavity 301, the dimension W3 of the optical lens 320 along the third direction Z is set to be smaller than the dimension W2 of the accommodating cavity 301 along the third direction Z. For example, the width W3 of the optical lens 320 along the third direction Z is 110 mm, and the width W2 of the accommodating cavity 301 ranges from 120 mm to 205 mm. For example, W2 is 120 mm, 180 mm, or 205 mm.

[0098] Furthermore, the height H3 of the optical lens 320 along the first direction X is equal to the height H2 of the accommodating cavity 301 along the first direction X (i.e., the distance between the cover body 3131 and the bottom plate 350 along the first direction X). For example, if the height H3 of the optical lens is 50 mm, then the height H2 of the accommodating cavity 301 is equal to H1, and H2 is 50 mm.

[0099] Here, if Figure 7As shown, the length L2 of the accommodating cavity 301 along the second direction Y is greater than the length L1 of the optical lens 321 along the second direction Y, and the fixture 322 in the optical lens 320 is mounted on the bottom plate 350 on both sides along the second direction Y. In the embodiment of the present disclosure, the lengths of the accommodating cavity 301 and the optical lens 320 along the second direction Y are not specifically limited. It is sufficient to ensure that the length L0 of the optical lens 321 along the second direction Y is not less than the length L1 of the first light-transmitting hole 111 along the second direction Y (and the length of the third light-transmitting hole 311 along the second direction Y).

[0100] In some examples, such as Figure 3 As shown, when the width W0 of the optical lens 321 along the third direction Z is 100 mm and the width W2 of the optical lens 320 along the third direction Z is 110 mm (i.e., the size of the parts of the fixture 322 located on both sides of the optical lens 321 along the third direction Z is 5 mm), the optical lens 321 along the third direction Z is divided into 20 sequentially connected sub-segments, and the width of each sub-segment along the third direction is 5 mm. In this way, when the driving structure 330 drives the optical lens 320 to move along the third direction Z, different sub-segments are sequentially overlapped with the first light transmission hole 111 (and the third light transmission hole 311), which can fully utilize the optical lens 321 and enable the optical lens 320 to be used 20 times, thereby increasing the number of uses of the optical lens 320 and thereby increasing the service life of the laser annealing window device 300.

[0101] For example, Figure 13 As shown, the optical lens 320 is moved a certain distance along the third direction Z, and the contaminated or damaged sub-portion of the optical lens 321 is moved out of the area where the orthographic projection of the first light-transmitting hole 111 (and the third light-transmitting hole 311) is located on the reference surface, so that the other sub-portions overlap with the first light-transmitting hole 111 (and the third light-transmitting hole 311). In this way, when using the same laser beam to form a polysilicon film, the laser energy passing through the optical lens 321 is stable, so that the size of the polysilicon particles in area Q1 and area Q2 on the substrate 22 to be processed are equal and evenly distributed, effectively reducing the probability of defects in the display panel being manufactured.

[0102] It can be understood that the laser annealing window device 300 is applied to the laser annealing device 1000, and the substrate to be processed 22 scanned by the laser annealing device 1000 is a display substrate master, that is, the substrate to be processed 22 can be divided into multiple display substrates applied to the display device, for example, Figure 14As shown, one substrate 22 to be processed can be divided into 190 display substrates. Thus, during the use of the laser annealing window device 300, the laser annealing equipment 1000 needs to scan the substrate 22 to be processed twice (reciprocating motion of the substrate to be processed), which can damage or contaminate the optical lens 300, resulting in defects in 38 display substrates. Using the laser annealing window device 300 disclosed in the above embodiment, all 190 display substrates can meet qualified product specifications, reducing product costs while improving product yield and increasing production efficiency.

[0103] For example, the drive structure 330 drives the optical lens 320 to move 5 mm to the left along the third direction Z. At this time, the drive structure 320 located on the right side of the optical lens 320 along the third direction extends 5 mm to the left, and the drive structure 320 located on the left side of the optical lens 320 along the third direction contracts 5 mm to the left. Similarly, the drive structure 330 drives the optical lens 320 to move 100 mm to the left along the third direction Z. At this time, the rightmost sub-portion of the optical lens 321 along the third direction Z overlaps with the first light transmission hole 111 (and the third light transmission hole 311), and the partial clamp 322 located on the same side as the rightmost sub-portion is projected on the reference plane to the right of the orthographic projection of the first light transmission hole 111 (and the third light transmission hole 311) on the reference plane. In this way, the drive structure 320 located on the right side of the optical lens 320 along the third direction Z extends 100 mm to the left, and the drive structure 320 located on the left side of the optical lens 320 along the third direction Z contracts 100 mm to the left. The extension length of the driving structure 320 is related to the distance the optical lens 320 moves along the third direction Z in the accommodating cavity 301 and can be adjusted according to actual conditions.

[0104] It can be understood that the size of the width W2 of the accommodating cavity 301 is related to the size of the width W1 of the optical lens 320, ensuring that the optical lens 320 moves along the third direction Z in the accommodating cavity 301 and each sub-part can be used. Some embodiments of the present disclosure do not limit this.

[0105] The above description is merely a specific embodiment of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this disclosure should be included in the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on the scope of protection of the claims.

Claims

1. A laser annealing window device, characterized in that: include: A housing, the housing enclosing a housing cavity; the housing having a first light-transmitting hole, the first light-transmitting hole being located on one side of the housing cavity along a first direction, the first light-transmitting hole being in communication with the housing cavity, and the first light-transmitting hole extending along a second direction; the first direction being perpendicular to a reference plane, the second direction being parallel to the reference plane, and the reference plane being parallel to the plane where the laser annealing window device is located; an optical lens disposed in the accommodating cavity; the optical lens extends along the second direction and at least partially overlaps with the first light-transmitting hole; a dimension of the optical lens along a third direction is smaller than a dimension of the accommodating cavity along the third direction; the third direction is parallel to the reference plane and perpendicular to the second direction; At least one driving structure, along a third direction, the driving structure being disposed on one side of the optical lens and configured to drive the optical lens to move along the third direction within the accommodating cavity; Wherein, the housing comprises: an outer frame, provided at least on two opposite sides of the optical lens in the third direction; A cover plate is provided on one side of the outer frame and the optical lens along a first direction; the cover plate comprises: A cover body is arranged parallel to the reference surface; along a first direction, a distance is provided between the cover body and the outer frame, and the first light-transmitting hole is provided on the cover body; a surface of the optical lens close to the cover body is in contact with the cover body; The extension portion is connected to at least two opposite edges of the cover body in the third direction; one end of the extension portion away from the cover body is connected to a side of the outer frame close to the cover body; The cover plate body, the extension portion and the outer frame form a mounting gap; The laser annealing window device further includes: A sealing assembly is disposed in the installation gap; a surface of the cover body close to the optical lens, a side surface of the optical lens, and a surface of the outer frame close to the cover body are respectively in contact with the sealing assembly to seal the gap between the first light-transmitting hole and the optical lens; the sealing assembly can be deformed along a third direction to cooperate with the movement of the optical lens along the third direction.

2. The laser annealing window device according to claim 1, characterized in that: The housing is provided with a mounting hole, and the axis of the mounting hole extends along the third direction; The driving structure includes a driving rod, which is inserted into the mounting hole and rotatably connected to the mounting hole; both ends of the driving rod extend out of the mounting hole, and the end of the driving rod close to the optical lens abuts against the side of the optical lens, and the end of the driving rod away from the optical lens serves as an operating end for the user to adjust the position of the optical lens in the accommodating cavity.

3. The laser annealing window device according to claim 1, characterized in that: The laser annealing window device includes at least one group of driving structures, each group includes two driving structures, the two driving structures are respectively arranged on both sides of the optical lens, and the two driving structures are arranged opposite to each other in the third direction.

4. The laser annealing window device according to claim 3, characterized in that: The laser annealing window device includes multiple groups of driving structures, and the multiple groups of driving structures are arranged at equal intervals along the second direction.

5. The laser annealing window device according to claim 1, characterized in that: The sealing assembly comprises: a baffle, wherein the thickness of the baffle along the first direction is equal to the distance between the cover body and the outer frame along the first direction; and a portion of the baffle is located on the outer frame; a buffer pad disposed between the baffle and the side surface of the optical lens; the buffer pad includes a first surface, a second surface, and a third surface opposite to each other, the first surface being in contact with the side surface of the optical lens, the second surface being in contact with a surface of the baffle close to the optical lens, and the third surface being in contact with a surface of the cover body close to the optical lens; An elastic member is arranged between the baffle and the extension portion, and two ends of the elastic member are respectively connected to the baffle and the extension portion; the elastic member can generate elastic deformation.

6. The laser annealing window device according to claim 1, characterized in that: The housing further comprises: A bottom plate is arranged opposite to the cover plate body; the outer frame is connected to two opposite edges of the bottom plate in the third direction; along the first direction, the optical lens is located between the cover plate body and the bottom plate; A second light-transmitting hole is provided on the bottom plate, and the second light-transmitting hole extends along a second direction; an orthographic projection of the second light-transmitting hole on the reference surface overlaps with an orthographic projection of the first light-transmitting hole on the reference surface.

7. The laser annealing window device according to claim 6, characterized in that: The optical lens comprises: Optical lenses; A fixture, along the reference surface, the fixture surrounds the optical lens; at least one of the two opposite ends of the fixture in the second direction is provided with a limiting hole; Wherein, at least one of the two opposite ends of the bottom plate in the second direction is provided with a plurality of limiting grooves, and the plurality of limiting grooves are arranged at intervals along the third direction; The laser annealing window device further includes a positioning pin, which passes through the limiting hole and is inserted into the limiting groove.

8. A laser annealing device, characterized in that: include: An annealing chamber, forming an annealing cavity; the annealing chamber includes a first side wall, a third light-transmitting hole is provided on the first side wall, the third light-transmitting hole extends along the second direction, and the third light-transmitting hole is communicated with the annealing cavity; The laser annealing window device according to any one of claims 1 to 7 is arranged on a side of the third light-transmitting hole away from the annealing chamber; the orthographic projection of the first light-transmitting hole on the first side wall at least partially overlaps with the third light-transmitting hole.

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