O-ring vacuum sealing structure and vacuum equipment

Abstract

The present application belongs to the field of sealing technology, and discloses an O-ring vacuum sealing structure and vacuum equipment. The O-ring vacuum sealing structure includes a mounting member and a sealing ring. The mounting member has a sealing groove, and the sealing ring is arranged in the sealing groove. It also includes a receiving groove and a positioning exhaust block. The receiving groove is provided in the mounting member and is connected to the sealing groove. The positioning exhaust block is detachably provided in the receiving groove and abuts against the sealing ring. The vacuum equipment includes an O-ring vacuum sealing structure; the O-ring vacuum sealing structure and vacuum equipment of the present application have a receiving groove on the mounting member to embed the positioning exhaust block, thereby ensuring the integrity of the sealing groove, so that the sealing groove restricts the side wall of the sealing ring, thereby achieving a predetermined required compression deformation when the sealing ring is squeezed, and realizing better sealing. In addition, when disassembling the sealing ring, there is no need to use a special prying hook tool, which avoids scratching the sealing surface of the mounting member or the sealing ring by the prying hook tool, and ensures the sealing effect when it is reinstalled and used.

Description

Technical Field

[0001] The invention belongs to the technical field of sealing, and in particular relates to an O-ring vacuum sealing structure and vacuum equipment. Background Art

[0002] An O-ring is a rubber sealing ring with a circular cross-section. It is generally installed in a dovetail groove or a square groove when in use. It is subjected to mechanical extrusion, producing a certain degree of compression deformation. Under the action of the compression rebound force, it contacts the sealing surface to achieve the purpose of sealing. It is widely used in high vacuum equipment.

[0003] In the prior art, in order to facilitate the removal of the O-ring and to discharge the trapped gas in the dovetail groove or the square groove during the vacuuming, an exhaust groove is designed on the sealing groove, such as Figure 1 As shown, the exhaust groove is connected to the dovetail groove or square groove where the O-ring is installed. However, this structure allows the O-ring near the exhaust groove to expand freely laterally when subjected to mechanical compression. In other words, the compression deformation of the part of the O-ring located opposite the exhaust groove is less than the compression deformation of the other part of the O-ring directly abutting the inner wall of the dovetail groove or square groove, failing to achieve the required compression deformation of the O-ring (about 16%). The insufficient compression deformation of the O-ring will have a negative impact on the sealing effect.

[0004] Therefore, the existing technology needs to be improved and developed. Summary of the Invention

[0005] The purpose of this application is to provide an O-ring vacuum sealing structure and vacuum equipment. By providing a receiving groove on the mounting member to embed a positioning exhaust block, the integrity of the sealing groove is ensured, so that the sealing groove restricts the side wall of the sealing ring, thereby achieving a predetermined compression deformation when the sealing ring is squeezed, thereby achieving a better seal. In addition, when removing the sealing ring, no special prying tool is required, avoiding scratches on the sealing surface of the mounting member or the sealing ring caused by the prying tool, and ensuring the sealing effect when it is reinstalled and used.

[0006] In the first aspect, the present application provides an O-ring vacuum sealing structure, including a mounting member and a sealing ring, wherein the mounting member has a sealing groove, the sealing ring is arranged in the sealing groove, and further includes a receiving groove and a positioning exhaust block, the receiving groove is opened in the mounting member and connected to the sealing groove, the positioning exhaust block is detachably arranged in the receiving groove and abuts the sealing ring.

[0007] The O-ring vacuum seal structure provided by this application ensures the integrity of the sealing groove by providing a groove on the mounting member to embed a positioning exhaust block. This allows the sealing groove to restrict the sidewall of the sealing ring, thereby achieving a predetermined amount of compression deformation when the sealing ring is squeezed, thereby achieving a better seal. Furthermore, when removing the sealing ring, no special prying tool is required, avoiding scratches on the sealing surface of the mounting member or the sealing ring caused by the prying tool, and ensuring the sealing effect when reinstalled and used.

[0008] Furthermore, the positioning exhaust block has a mounting through hole, and a fastener passes through the mounting through hole to connect to the mounting piece.

[0009] The present application opens a mounting through hole on the positioning exhaust block to facilitate the fasteners to pass through and connect the positioning exhaust block and the mounting part into one, thereby limiting and fixing the sealing ring so that the sealing ring reaches the predetermined required compression deformation when it is squeezed and deformed, thereby achieving better sealing.

[0010] Furthermore, the fastener is a captive screw, and the fastener is riveted onto the positioning exhaust block.

[0011] The present application rivets a fastener on the positioning exhaust block so that when the sealing ring is removed, the fastener is screwed out of the connection hole of the mounting piece, and the fastener remains connected to the positioning exhaust block due to the action of the rivet, thereby preventing the fastener from falling off and into the vacuum system when the positioning exhaust block is removed, thereby causing a negative impact on the vacuum system.

[0012] Furthermore, the above-mentioned mounting through hole is a countersunk through hole, and the head of the fastener is located in the countersunk head of the countersunk through hole.

[0013] Furthermore, the fastener has an exhaust hole, and the exhaust hole is arranged along the axial direction of the fastener.

[0014] Furthermore, the positioning exhaust block is provided with an exhaust channel, and the exhaust channel is connected to the sealing groove.

[0015] Furthermore, a connection between the top surface of the positioning and exhaust block and the first side surface of the positioning and exhaust block is a chamfered arc surface.

[0016] Furthermore, the first side surface abuts against the sealing ring, and the first side surface is an arc-shaped surface.

[0017] Furthermore, the height of the inner side of the sealing groove is lower than the height of the outer side of the sealing groove.

[0018] In a second aspect, the present application provides a vacuum device comprising the above-mentioned O-ring vacuum sealing structure.

[0019] In specific applications, the O-ring vacuum sealing structure is not only convenient for sealing the joints of vacuum equipment, providing a sealed environment for the vacuum chamber of the vacuum equipment to avoid the impact of air leakage, but also the O-ring vacuum sealing structure is convenient for installation and disassembly. In particular, when removing the sealing ring, no additional special tools are required, so as not to scratch the sealing surface of the sealing ring or the mounting part, thereby avoiding the impact of scratches on the sealing effect of the sealing ring or the mounting part.

[0020] As can be seen from the above, the O-ring vacuum sealing structure and vacuum equipment of the present invention ensure the integrity of the sealing groove by providing a accommodating groove on the mounting part and embedding the positioning exhaust block, so that the sealing groove restricts the side wall of the sealing ring, so that when the sealing ring is squeezed, it can reach the predetermined required compression deformation amount, thereby realizing better sealing. At the same time, when removing the sealing ring, there is no need to use special dedicated tools, and the situation where the special tools will scratch the mounting part or the sealing ring when using special tools to remove the sealing ring is eliminated, thereby ensuring the sealing effect when it is installed and used again.

[0021] Other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or understood by practicing the present application. The purposes and other advantages of the present application can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The figure is a schematic structural diagram of an O-ring vacuum sealing structure in the prior art.

[0023] Figure 2 This is a structural schematic diagram of an O-ring vacuum sealing structure provided in an embodiment of the present application.

[0024] Figure 3 A cross-sectional view of an O-ring vacuum sealing structure provided in an embodiment of the present application.

[0025] Figure 4 This is a schematic diagram of an exploded view of an O-ring vacuum sealing structure provided in an embodiment of the present application.

[0026] Figure 5 A schematic structural diagram of the positioning exhaust block provided in an embodiment of the present application.

[0027] Figure 6 Another structural schematic diagram of the positioning exhaust block provided in an embodiment of the present application.

[0028] Explanation of reference numerals: 20, mounting part; 22, sealing groove; 24, exhaust groove; 26, sealing ring; 28, accommodating groove; 30, positioning exhaust block; 32, mounting through hole; 34, fastener; 36, exhaust hole; 38, exhaust channel; 40, first channel; 42, second channel; 44, first side surface; 46, second side surface; 48, chamfered arc surface. DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the terms "lateral", "thickness", "up", "down", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections, or mutual communication; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0032] In the present invention, unless otherwise clearly stipulated and limited, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or the first and second features not being in direct contact but being in contact through another feature between them.

[0033] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and configurations of specific examples are described below. Of course, these are merely examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or configurations discussed.

[0034] Throughout this specification, references to terms such as "embodiment" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0035] O-ring vacuum sealing structure is mainly used in high vacuum equipment such as etching, photolithography, physical vapor deposition (PVD), chemical vapor deposition (CVD) and atomic layer deposition (ALD). Figure 1 As shown, existing O-ring vacuum seal structures generally have a connecting sealing groove 22 and an exhaust groove 24 formed on a mounting member 20. The sealing groove 22 is used to accommodate a sealing ring 26 of a matching shape, and the exhaust groove 24 is used to expel trapped gas within the sealing groove 22 after the sealing ring 26 is squeezed. Since the sealing ring 26 expands toward the sidewalls of the sealing groove 22 after being squeezed, the sealing ring 26 near the exhaust groove 24 is not restricted by the sealing groove 22 and can expand freely laterally. As a result, the compression deformation of the portion of the sealing ring located opposite the exhaust groove 24 is less than the compression deformation of the other portion of the sealing ring directly abutting the inner sidewall of the dovetail groove or square groove, failing to achieve the required compression deformation (approximately 16%), thus affecting the sealing effect. Furthermore, when removing the sealing ring from existing O-ring vacuum seal structures, a dedicated tool, such as a pry hook, is sometimes required. Inserting one end of the pry hook into the exhaust groove 24 allows the sealing ring to be removed. Although the pry hook tool used to remove the O-ring is made of nylon, it can scratch the sealing surface when the sealing surface is made of a material with a lower hardness (such as aluminum alloy). Furthermore, the pry hook tool can easily damage the sealing ring when removing it. Based on this, the present application provides an O-ring vacuum sealing structure and vacuum equipment.

[0036] like Figure 2-Figure 4As shown, the present invention provides an O-ring vacuum seal structure, comprising a mounting member 20 and a sealing ring 26. The mounting member 20 has a sealing groove 22, in which the sealing ring 26 is disposed. The mounting member 20 also comprises a receiving groove 28 and a positioning and exhaust block 30. The receiving groove 28 is formed in the mounting member 20 and communicates with the sealing groove 22. The positioning and exhaust block 30 is disposed in the receiving groove 28 and abuts against the sealing ring 26. In a specific application, the shape of the receiving groove 28 is adapted to the shape of the positioning and exhaust block 30. When installing the sealing ring 26, first place the positioning exhaust block 30 in the receiving groove 28 so that the mounting part 20 and the positioning exhaust block 30 form a complete O-shaped sealing groove 22. Then, place the sealing ring 26 according to the contour of the sealing groove 22. When the sealing ring 26 is mechanically squeezed, the sealing ring 26 deforms and fits with the inner side wall, outer side wall, lower bottom surface of the sealing groove 22 and the bottom surface of the extrusion. The inner side wall and outer side wall of the sealing groove 22 constrain the positioning of the sealing ring 26, and the lower bottom surface of the sealing groove 22 and the bottom surface of the extrusion serve as sealing surfaces. When removing the sealing ring 26, first remove the positioning exhaust block 30 from the receiving groove 28. After the positioning exhaust block 30 is removed, the sealing ring 26 loses the limit of the positioning exhaust block 30. At this time, the sealing ring 26 can be directly removed with your fingers without the help of any tools.

[0037] It should be noted that the shape of the receiving groove 28 is compatible with the shape of the positioning and exhaust block 30. This means that the inner contour of the receiving groove 28 is the same as or similar to the outer contour of the positioning and exhaust block 30, and the depth of the receiving groove 28 is the same as or similar to the thickness of the positioning and exhaust block 30. In specific applications, the thickness (height) of the positioning and exhaust block 30 can be designed to be slightly smaller than the depth of the receiving groove 28, for example, by 0.1-1.0 mm. This ensures that during vacuuming, the positioning and exhaust block 30 does not contact other components. Only the mounting member 20 contacts other components, and the mounting member 20 and other components work together to compress the sealing ring 26, achieving a sealing effect.

[0038] In this embodiment, the receiving groove 28 is located inside the sealing groove 22 (the vacuum side), replacing the existing exhaust groove 24. Of course, the receiving groove 28 can also be located outside the sealing groove 22 (the atmospheric pressure side), or the receiving groove 28 can be located both inside and outside the sealing groove 22, that is, two receiving grooves 28 are connected to the sealing groove 22. In actual applications, the specific location of the receiving groove 28 can be adaptively set according to actual needs, and the number of receiving grooves 28 can also be adaptively adjusted according to actual needs. The above is only one embodiment of the present invention and should not be limited to this.

[0039] It should be noted that when the space on the inner side (vacuum side) of the sealing groove 22 is very small and insufficient to install the receiving groove 28 and the positioning exhaust block 30, and the receiving groove 28 is located on the outer side (atmospheric pressure side) of the sealing groove 22, the inner side of the sealing groove 22 still needs to be provided with an exhaust groove 24 or an exhaust hole connected to the sealing groove 22. When designed as an exhaust hole, the exhaust hole can have a certain inclination angle, and the exhaust hole is connected to the lower corner of the sealing groove 22. It is worth noting that the size of the exhaust groove 24 or the exhaust hole needs to be designed to be very small, and there is no need to leave space for the special tool for removing the sealing ring to be inserted, so that the exhaust groove 24 or the exhaust hole does not affect the compression deformation and sealing effect of the sealing ring 26. The method of setting the receiving groove 28 on the outer side (atmospheric pressure side) of the sealing groove 22 is only for the convenience of removing the sealing ring.

[0040] Through this technical solution, the integrity of the sealing groove 22 is ensured, so that the sealing groove 22 restricts the side wall of the sealing ring 26, so that when the sealing ring is squeezed, it can reach the predetermined required compression deformation amount, thereby achieving better sealing. In addition, when adopting this technical solution, when removing the sealing ring 26, there is no need to use special dedicated tools, such as pry hooks, etc. Compared with the existing method of removing the sealing ring 26, which requires inserting one end of the pry hook into the exhaust groove 24 and lifting the sealing ring 26 from the sealing groove 22 before removing it, this technical solution fundamentally solves the problem that when using special tools to remove the sealing ring 26, the special tools will scratch the sealing surface of the mounting part 20 or the sealing ring 26, thereby ensuring the sealing effect of the sealing ring 26 and the mounting part 20 when they are installed and used again.

[0041] In some preferred embodiments, the positioning and exhaust block 30 has a mounting hole 32 through which a fastener 34 passes to connect to the mounting member 20. In specific applications, by providing the mounting hole 32 on the positioning and exhaust block 30, the fastener 34 can pass through the mounting hole 32 to connect the positioning and exhaust block 30 and the mounting member 20 as a whole, thereby limiting and fixing the sealing ring 26. This allows the sealing groove 22 to restrict the sidewall of the sealing ring 26, thereby achieving a predetermined required compression deformation when the sealing ring is squeezed, thereby achieving a better seal. In this embodiment, the fastener 34 is a screw or bolt, and there is only one fastener 34. Since the shape of the positioning and exhaust block 30 is compatible with the shape of the receiving groove 28, the positioning and exhaust block 30 and the mounting member 20 are connected by a single fastener 34. There is no space for the positioning and exhaust block 30 to rotate around the fastener 34, which ensures that the positioning and exhaust block 30 and the mounting member 20 are firmly connected and not easily loosened. Of course, the number of fasteners 34 can be adaptively increased according to actual needs. The above is only one embodiment of the present invention and should not be limited to this.

[0042] It should be noted that the method of installing the positioning exhaust block 30 in the receiving groove 28 that matches its shape is not limited to the use of fasteners 34 for connection, and other detachable connection methods can also be used, such as a hinge connection method, in which the positioning exhaust block 30 is hinged to the mounting member 20, and the positioning exhaust block 30 is installed in the receiving groove 28 or removed from the receiving groove 28 by rotation, thereby achieving tool-free disassembly. In other preferred embodiments, the fasteners 34 are captive screws, and the fasteners 34 are riveted to the positioning exhaust block 30. By riveting the fasteners 34 on the positioning exhaust block 30, when the sealing ring is removed, after the fasteners 34 are screwed out of the connection hole of the mounting member 20, the fasteners 34 remain connected to the positioning exhaust block 30 under the action of the riveting, thereby preventing the fasteners from falling off and into the vacuum system when the positioning exhaust block 30 is removed, thereby causing a negative impact on the vacuum system.

[0043] In some preferred embodiments, the mounting through-hole 32 is a countersunk through-hole, and the head of the fastener 34 is located within the countersunk portion of the countersunk through-hole. By designing the mounting through-hole 32 as a countersunk through-hole, after the fastener 34 connects the positioning exhaust block 30 and the mounting member 20, the head of the fastener 34 does not protrude from the countersunk through-hole. Specifically, the top surface of the head of the fastener 34 is lower than the top surface of the mounting member 20 or is flush with the top surface of the mounting member 20, thereby preventing the head of the fastener 34 from protruding and hindering sealing.

[0044] In some preferred embodiments, the fastener 34 has an exhaust hole 36, which is arranged along the axial direction of the fastener 34. Through this technical solution, when the fastener 34 is screwed to connect with the mounting member 20, the exhaust hole 36 can exhaust the gas in the connection hole of the mounting member 20, facilitating subsequent vacuuming.

[0045] In some preferred embodiments, the positioning and exhaust block 30 is provided with an exhaust channel 38, which communicates with the sealing groove 22. By providing the exhaust channel 38 in the positioning and exhaust block 30, when the sealing ring 26 is mechanically squeezed, the gas in the sealing groove 22 can be simultaneously squeezed out through the exhaust channel 38 and the exhaust groove 24. This not only increases the exhaust speed of the gas in the sealing groove 22 but also makes the exhaust more thorough, preventing gas from remaining in the sealing groove 22 and negatively affecting the sealing effect.

[0046] In some preferred embodiments, the cross-section of the exhaust channel 38 is L-shaped. Designing the exhaust channel 38 into an L-shape facilitates direct grooving on two adjacent surfaces of the positioning exhaust block 30, reducing the difficulty of processing. Specifically, the L-shaped exhaust channel 38 includes a first channel 40 and a second channel 42 that are connected. The positioning exhaust block 30 includes a first side surface 44 and a second side surface 46. The first channel 40 is located on the bottom surface of the positioning exhaust block 30, and the second channel 42 is located on the second side surface 46 of the positioning exhaust block 30. The second side surface 46 is the surface of the positioning exhaust block 30 away from the sealing groove 22, and the second side surface 46 is adjacent to the bottom surface of the positioning exhaust block 30. Through this technical solution, when the sealing ring 26 is mechanically squeezed, the gas in the sealing groove 22 is discharged sequentially through the first channel 40 and the second channel 42.

[0047] like Figure 5-Figure 6 As shown, in some preferred embodiments, the connection between the top surface of the positioning and exhaust block 30 and the first side surface 44 of the positioning and exhaust block 30 is a chamfered arc surface 48. By designing the connection between the top surface of the positioning and exhaust block 30 and the first side surface 44 of the positioning and exhaust block 30 as a chamfered arc surface 48, the connection is rounded, thereby preventing the edges of the positioning and exhaust block 30 from scratching the sealing ring 26 when installing the sealing ring 26 into the sealing groove 22, thereby negatively affecting the sealing effect.

[0048] In some preferred embodiments, the first side surface 44 abuts the sealing ring 26 and is an arcuate surface. By designing the first side surface 44 as an arcuate surface, after the positioning and exhaust block 30 is installed on the mounting member 20, the first side surface 44 coincides with the inner sidewall of the sealing groove 22, forming a sealing groove 22 that matches the shape of the sealing ring 26. This achieves a better sealing effect when the sealing ring 26 is inserted into the sealing groove 22.

[0049] In some preferred embodiments, the height of the inner side of the sealing groove 22 is lower than the height of the outer side of the sealing groove 22. Specifically, the height of the inner side (vacuum side) of the sealing groove 22 is 0.2-1.0 mm lower than the height of the outer side (atmospheric pressure side) of the sealing groove 22. That is to say, the upper surface of the mounting member 20 is an inclined surface inclined from the outside to the inside, or the upper surface of the mounting member 20 is two parallel surfaces with a height difference. In this way, it is ensured that the outer side (atmospheric pressure side) of the sealing groove 22 of the mounting member 20 is the contact surface during vacuuming, and a small gap is left on the inside to facilitate exhaust and vacuuming.

[0050] In some preferred embodiments, the sealing groove 22 is a dovetail groove or a square groove. By designing the sealing groove 22 as a dovetail groove or a square groove, installation and removal of the sealing ring 26 are facilitated. It should be noted that when the sealing groove 22 is designed as a dovetail groove, the first side surface 44 is inclined from top to bottom, that is, the distance between the end of the first side surface 44 near the chamfered arc surface 48 and the sealing groove 22 is smaller than the distance between the end of the first side surface 44 far from the chamfered arc surface 48 and the sealing groove 22. In this way, the first side surface 44 and the inner sidewall of the sealing groove 22 form a dovetail-shaped sealing groove 22.

[0051] In some preferred embodiments, the mounting member 20 is annular. This design facilitates the flow of gas in the vacuum system through the central hole of the annular mounting member 20. Of course, the mounting member may also have other shapes, such as rectangular or square. In specific applications, the mounting member 20 may also be a flange. This is only one embodiment of the present invention and should not be construed as limiting.

[0052] On the other hand, the present invention provides a vacuum device, including the above-mentioned O-ring vacuum sealing structure. The mounting member 20 of the O-ring vacuum sealing structure is installed on the vacuum device by a detachable connection method or a fixed connection method. The O-ring vacuum sealing structure ensures the integrity of the sealing groove 22 by embedding a positioning exhaust block 30 on the side of the sealing groove 22 on the mounting member 20, replacing the existing relatively wide sealing exhaust groove 24, so that the sealing groove 22 restricts the side wall of the sealing ring 26, thereby achieving a predetermined required compression deformation when the sealing ring 26 is squeezed, achieving a better seal, and providing a sealed environment for the vacuum chamber of the vacuum device. In addition, when removing the sealing ring 26, the sealing ring 26 at the connection can be installed and removed without the help of additional special tools, preventing the special tools from scratching the sealing ring 26 or the sealing surface of the mounting member 20.

[0053] In summary, the O-ring vacuum sealing structure and vacuum equipment of the present invention ensure the integrity of the sealing groove 22 by opening a receiving groove 28 on the side of the sealing groove 22 on the mounting member 20, and installing a positioning exhaust block 30 that is adapted to the shape of the receiving groove 28 in the receiving groove 28, so that the sealing groove 22 restricts the side wall of the sealing ring 26, so that the predetermined compression deformation amount is achieved when the sealing ring 26 is squeezed, thereby achieving better sealing. In addition, when removing the sealing ring 26, no special tools are required to remove the sealing ring 26 in the sealing groove 22, which avoids the special tools from scratching the sealing ring 26 or the sealing surface of the mounting member 20 when removing the sealing ring 26, thereby avoiding affecting the sealing effect. The O-ring vacuum sealing structure of the present invention can be used in high-vacuum equipment in the semiconductor industry, such as etching, photolithography, physical vapor deposition (PVD), chemical vapor deposition (CVD), and atomic layer deposition (ALD), to provide a strict sealed environment for thin film growth and ensure the growth quality of the thin film in the high-vacuum cavity. Of course, the O-ring vacuum sealing structure of the present invention can also be used in high-vacuum equipment in other non-semiconductor industries, thereby providing a good sealing environment.

[0054] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all fall within the scope of protection of the present invention.

Claims

1. An O-ring vacuum sealing structure, comprising a mounting member and a sealing ring, wherein the mounting member has a sealing groove, and the sealing ring is disposed in the sealing groove, characterized in that: It also includes a receiving groove and a positioning exhaust block; the receiving groove is opened in the mounting member and communicates with the sealing groove; the positioning exhaust block is detachably arranged in the receiving groove and abuts against the sealing ring; The positioning exhaust block is provided with an exhaust channel, the exhaust channel being connected to the sealing groove; the exhaust channel has an L-shaped cross section, the L-shaped exhaust channel including a first channel and a second channel that are connected; the positioning exhaust block includes a first side surface and a second side surface, the first channel is located on the bottom surface of the positioning exhaust block, and the second channel is located on the second side surface of the positioning exhaust block; The connection between the top surface of the positioning and exhaust block and the first side surface of the positioning and exhaust block is a chamfered arc surface.

2. The O-ring vacuum sealing structure according to claim 1, characterized in that: The positioning exhaust block has a mounting through hole, and a fastener passes through the mounting through hole to connect with the mounting piece.

3. The O-ring vacuum sealing structure according to claim 2, characterized in that: The fastener is a captive screw, and the fastener is riveted onto the positioning exhaust block.

4. The O-ring vacuum sealing structure according to claim 2, characterized in that: The mounting through hole is a countersunk through hole, and the head of the fastener is located in the countersunk head of the countersunk through hole.

5. The O-ring vacuum sealing structure according to claim 2, characterized in that: The fastener has an exhaust hole, and the exhaust hole is arranged along the axial direction of the fastener.

6. The O-ring vacuum sealing structure according to claim 1, characterized in that: The first side surface abuts against the sealing ring, and the first side surface is an arc-shaped surface.

7. The O-ring vacuum sealing structure according to claim 1, characterized in that: The height of the inner side of the sealing groove is lower than the height of the outer side of the sealing groove.

8. A vacuum device, characterized in that: The invention comprises the O-ring vacuum sealing structure according to any one of claims 1 to 7.

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