A high-temperature gas rapid cooling device

Abstract

The present invention discloses a high-temperature gas rapid cooling device, comprising a water supply system, a cooling system, an exhaust system and a reflux system. The water supply system is connected to the cooling system, and the cooling system is respectively connected to the exhaust system and the reflux system. The cooling system comprises an atomizer, and the water supply system comprises a water pump and a water storage tank. The water pump provides atomization power for cooling water in the atomizer. The exhaust system is used to extract the high-temperature gas. The atomized liquid after the cooling water is atomized cools the high-temperature gas. The condensed water condensed from the atomized liquid flows back to the water storage tank through the reflux system for recycling. The present invention adopts the physical principle of water vaporization phase change cooling to cool the high-temperature gas; water and high-temperature gas are directly mixed, and the cooling efficiency is significantly improved. The present invention adopts an atomizer to atomize the cooling water to ensure that the cooling water and high-temperature air are fully mixed.

Description

Technical Field

[0001] The invention belongs to the field of semiconductors and relates to a high-temperature gas rapid cooling device. Background Art

[0002] High-temperature furnaces are important production equipment in the semiconductor industry. Furnaces must be made of materials with very good thermal insulation properties. The high-temperature gas inside cannot be discharged directly. The cooling rate of the furnace has always been a key factor affecting production efficiency. How to quickly cool down the internal high-temperature gas after it is extracted to improve production efficiency is a key research direction in the high-temperature furnace industry. The existing technology allows the high-temperature gas to cool naturally in the furnace, and the cooling rate is slow, about 0.5-2.5 degrees per minute. It takes a lot of time to completely cool the high-temperature gas, and it is difficult to improve production efficiency. The present invention effectively solves this problem. Summary of the Invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a high-temperature gas rapid cooling device.

[0004] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a high-temperature gas rapid cooling device, characterized in that: it includes a water supply system, a cooling system, an exhaust system and a reflux system, the water supply system is connected to the cooling system, the cooling system is respectively connected to the exhaust system and the reflux system, the cooling system includes an atomizer, the water supply system includes a water pump and a water storage tank, the water pump provides atomization power for cooling water in the atomizer, the exhaust system is used to extract high-temperature gas, the atomized liquid after the cooling water is atomized cools the high-temperature gas, and the condensed water condensed from the atomized liquid is returned to the water storage tank through the reflux system for recycling.

[0005] Furthermore; one end of the water tank of the water supply system is connected to the water pump through a water outlet pipe, and the water outlet pipe is equipped with a water pump valve. The other end of the water tank is connected to the water supply device through a water inlet pipe, and the water pump and the cooling system are connected through a circulation pipe. The water pump transports the cooling water from the water outlet pipe to the cooling system through the circulation pipe.

[0006] Furthermore, the cooling system includes a cooling pipe, which includes a cooling head and a cooling tail. The cooling pipe is connected to the circulation pipe, and the atomizer is installed at the end of the circulation pipe and opposite to the cooling head. Cooling water circulates along the circulation pipe, and the atomized liquid after atomization by the atomizer is sprayed into the cooling pipe along the cooling head. The internal space of the cooling pipe constitutes a cooling zone, and the high-temperature gas is cooled in the cooling zone. One end of the cooling head is connected to a high-temperature pipe, and the high-temperature pipe is connected to the reaction chamber of the hot furnace. The high-temperature gas in the reaction chamber is passed into the cooling pipe along the high-temperature pipe for cooling. A high-temperature gas valve is provided on the high-temperature pipe, and the cooling pipe is tilted. The high-temperature gas flows downward along the cooling pipe. The cooling tail is connected to the first reflux pipe of the reflux system, and the unvaporized atomized liquid condenses into condensed water along the cooling pipe and refluxes along the first reflux pipe. The tilted design of the cooling pipe prevents condensed water from flowing back.

[0007] Furthermore; the exhaust system includes an exhaust fan and an exhaust duct, the exhaust duct includes a first exhaust duct, a second exhaust duct, a third exhaust duct and a fourth exhaust duct, the first exhaust duct, the second exhaust duct, the third exhaust duct and the fourth exhaust duct are connected in pairs in sequence, the first exhaust duct is connected to the first return pipe of the return system, and is arranged to have an inclined structure with an inclined direction upward, the second exhaust duct is arranged to have a vertical or approximately vertical structure, a water vapor filter is arranged in the second exhaust duct to filter the cooling gas, the third exhaust duct is arranged to have an inclined structure with an inclined direction upward, the exhaust fan is located between the third exhaust duct and the fourth exhaust duct, and is used to transport the gas from the third exhaust duct to the fourth exhaust duct for discharge, most of the condensed water is returned to the first return pipe of the return system along the third exhaust duct, the second exhaust duct and the first exhaust duct by gravity, and a small amount of condensed water is passed into the fourth exhaust duct through the exhaust fan.

[0008] Furthermore; the high-temperature pipe, cooling pipe, first return pipe and exhaust duct are arranged as sealed pipe structures that are interconnected and constitute a gas flow path. The exhaust fan creates a negative pressure state in the high-temperature pipe, cooling pipe, first return pipe and exhaust duct, and the high-temperature gas flows along the flow path. The exhaust fan is connected to an exhaust fan power regulator, which is used to adjust the speed of the exhaust fan.

[0009] Furthermore; the reflux system includes a water level pipe, a reflux pipe and a U-shaped pipe, the reflux pipe includes a second reflux pipe, the first reflux pipe is respectively connected to the cooling tail end of the cooling pipe, the first exhaust pipe of the exhaust pipe and the U-shaped pipe, the water level pipe is connected to the U-shaped pipe, the other end of the U-shaped pipe is connected to the drain pipe, the discharge outlet of the drain pipe faces the water tank, the U-shaped pipe is filled with cooling water, and the gas flow path is isolated from the atmosphere by the cooling water.

[0010] Furthermore; the U-shaped tube is provided with a first drainage level line, and the water level tube is provided with a second drainage level line and a maximum water level line. The first drainage level line and the second drainage level line are on the same horizontal line, and the water level of the cooling water is at the first drainage level line. During operation, the pressure of the first drainage level line is less than the pressure of the cooling water at the discharge port. The condensed water flows back to the U-shaped tube through the first return pipe. The water level in the U-shaped tube exceeds the first drainage level line. The cooling water in the U-shaped tube automatically flows out from the discharge port and flows back to the water tank. The second return pipe is in communication with the fourth exhaust duct. The outlet of the second return pipe is located above the water tank and opposite to the water tank. A small amount of condensed water flows back to the water tank through the second return pipe.

[0011] Furthermore; the reflux system includes a water level controller, which is located in the first reflux pipe. The water level controller adjusts the negative pressure of the gas flow path and controls the positions of the first drainage level line and the second drainage level line in the first reflux pipe and the water level pipe. The first drainage level line and the second drainage level line are lower than the highest water level line.

[0012] Furthermore, the high-temperature pipeline includes a gas inlet end, a gas compression end and a gas guide end. The gas inlet end is connected to the reaction chamber of the hot furnace. The gas compression end is located between the gas inlet end and the gas guide end. The gas compression end gradually decreases in size from the gas inlet end to the gas guide end, compressing the high-temperature gas. The gas compression end plays a preliminary guiding role in the flow direction of the high-temperature gas. The gas guide end is connected to the cooling head end. The gas guide end is tilted to control the downward flow of the high-temperature gas, guide the high-temperature gas and prevent the high-temperature gas from flowing back. The high-temperature gas in the reaction chamber is sequentially passed into the cooling pipeline along the gas inlet end, the gas compression end and the gas guide end for cooling.

[0013] Furthermore, the water supply system also includes a water level control valve, which is located at the outlet of the water inlet pipe. The water level control valve uses a float valve or an electric control valve to control the water level in the water storage tank. The water pump is connected to a water pump power regulator. The water pump power regulator is used to adjust the speed of the impeller in the water pump and control the flow rate of cooling water transported from the outlet pipe to the circulation pipe. The circulation pipe is provided with a water flow regulating valve, which is used to control the water supply flow of the water supply system to the cooling system.

[0014] In summary, the present invention is beneficial in that:

[0015] 1) The present invention uses the physical principle of water vaporization phase change cooling to cool the high-temperature gas; water is directly mixed with the high-temperature gas, and the water vaporization heat reaches 2400J / g, which significantly improves the cooling efficiency.

[0016] 2) The present invention adopts an atomizer to atomize the cooling water to ensure that the cooling water and the high-temperature air are fully mixed.

[0017] 3) The cooling pipe of the present invention is designed to be tilted downward to prevent condensed water from flowing back.

[0018] 4) The present invention uses a U-shaped pipe to isolate the atmosphere from the flow path, ensuring that the cooling water can flow out normally. The cooling water in the U-shaped pipe isolates the atmosphere, which can ensure that the flow path forms a negative pressure state.

[0019] 5) The present invention is controlled by a water pump controller to achieve water circulation and water volume regulation, ensuring the safety and reliability of the equipment.

[0020] 6) The present invention is designed to use a cooling temperature probe to detect the cooling gas temperature, and to control the water regulating valve through a thermostat to increase the water inlet of the water regulating valve, or / and to control the high-temperature gas valve through a thermostat to reduce the intake of high-temperature gas, thereby controlling the temperature value of the cooling gas and ensuring the controllability of the cooling gas temperature and the safety and reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of the device of the present invention.

[0022] Figure 2 This is a schematic diagram of the thermostat control principle of the present invention.

[0023] Figure 3 This is a schematic diagram of the control principle of the water pump controller in the present invention. DETAILED DESCRIPTION

[0024] The following describes the embodiments of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. The details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other unless they conflict.

[0025] It should be noted that the illustrations provided in the following embodiments are merely schematic illustrations of the basic concept of the present invention. Therefore, the illustrations only show components related to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be changed arbitrarily, and the component layout may also be more complex.

[0026] All directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, horizontal, vertical...) are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0027] Example 1:

[0028] like Figure 1-3 As shown, a high-temperature gas rapid cooling device includes a water supply system, a cooling system, an exhaust system and a reflux system. The cooling system includes an atomizer 21, and the water supply system includes a water pump 12 and a water storage tank 11. The water pump 12 provides atomization power for cooling water in the atomizer 21. The exhaust system is used to extract high-temperature gas. The atomized liquid after the cooling water is atomized cools the high-temperature gas. The condensed water condensed from the atomized liquid is returned to the water storage tank 11 through the reflux system for recycling.

[0029] The water supply system includes a water tank 11, a water pump 12 and a water pump controller (not shown). One end of the water tank 11 is connected to the water pump 12 through an outlet pipe 112. The outlet pipe 112 is fixed with a water pump valve 121. The other end of the water tank 11 is connected to a water supply device (not shown) through an inlet pipe 111. The water supply device can be set as a tap or a water tank. The outlet pipe 112 and the inlet pipe 111 are respectively located on both sides of the water tank 11, and the inlet pipe 111 is located at the At the upper end, the water outlet pipe 112 is located at the lower end of the water tank 11. The position design of the water inlet pipe 111 and the water outlet pipe 112 can, on the one hand, discharge the water from the water tank 11 to prevent the water from being stored in time due to a malfunction or other reasons, and ensure the water supply to the cooling system as much as possible. On the other hand, the water outlet pipe 112 discharges the water located in the lower layer of the water tank 11, and the upper layer of the water tank 11 is replenished with water through the water inlet pipe 111, thereby realizing the circulation of cooling water in the water tank 11 and avoiding the problem of dead water.

[0030] In order to control the water level in the water tank 11, a water level control valve 13 is further provided at the outlet of the water inlet pipe 111. The water level control valve 13 can be a float valve or an electric control valve. The float valve or the electric control valve uses existing principles to control the water level in the water tank 11.

[0031] The water pump 12 is connected to the cooling system through a circulation pipe 122. The water pump 12 transports the cooling water from the water outlet pipe 112 to the cooling system through the circulation pipe 122 to ensure that the cooling system has a continuous supply of cooling water. The water pump 12 is connected to a water pump power regulator 14. The water pump controller is connected to the water pump power regulator 14. The water pump power regulator 14 is used to adjust the speed of the impeller in the water pump 12, thereby controlling the flow rate of cooling water transported from the water outlet pipe 112 to the circulation pipe 122. The circulation pipe 122 is provided with a water flow regulating valve 15, which is used to control the water supply flow of the water supply system to the cooling system.

[0032] The cooling system includes an atomizer 21 and a cooling pipe 22. The cooling pipe 22 includes a cooling head end 221 and a cooling tail end 222. The cooling pipe 22 is connected to the circulation pipe 122. The atomizer 21 is installed at the end of the circulation pipe 122 and is opposite to the cooling head end 221. The cooling water flows along the circulation pipe 122. After being atomized by the atomizer 21, the atomized liquid is sprayed into the cooling pipe 22 along the cooling head end 221. The internal space of the cooling pipe 22 constitutes a cooling zone 223. The high-temperature gas is cooled in the cooling zone 223. The high temperature generated by the hot furnace is cooled. The gas is passed into the cooling pipe 22 and cooled by the atomized liquid. Specifically, one end of the cooling head 221 is connected to the high-temperature pipe 31. The high-temperature pipe 31 includes a gas inlet end 311, a gas compression end 312 and a gas guide end 313. The gas inlet end 311 is connected to the reaction chamber of the hot furnace (not shown in the figure). The gas compression end 312 is located between the gas inlet end 311 and the gas guide end 313. The gas compression end 312 gradually decreases in size from the gas inlet end 311 to the gas guide end 313, compressing the high-temperature gas and Figure 1 From a visual perspective, the gas compression end 312 plays a preliminary guiding role in the flow direction of the high-temperature gas. The gas guide end 313 is connected to the cooling head end 221. The gas guide end 313 is tilted to control the downward flow of the high-temperature gas, which plays a further guiding role and can also prevent the high-temperature gas from flowing back. In this embodiment, the high-temperature gas in the reaction chamber is sequentially introduced into the cooling pipe 22 along the gas inlet end 311, the gas compression end 312 and the gas guide end 313 for cooling. A high-temperature gas valve 32 is provided on the high-temperature pipe 31.

[0033] The cooling pipe 22 is arranged at an angle, and the high-temperature gas flows downward along the cooling pipe 22, and the inclination direction of the cooling pipe 22 matches the inclination direction of the gas guide end 313. After the cooling water is atomized by the atomizer 21, the atomized liquid is fully mixed with the high-temperature gas, and most of the atomized liquid is quickly vaporized, causing the temperature of the high-temperature gas to drop instantly. The cooling tail end 222 is connected to the first return pipe 50 of the return system, and the unvaporized atomized liquid condenses into condensed water along the cooling pipe 22 and refluxes along the first return pipe 50. The inclined design of the cooling pipe 22 can prevent the condensed water from flowing back.

[0034] The cooling system also includes a cooling temperature probe 23 and a thermostat (not shown in the figure). The cooling temperature probe 23 is installed at the cooling tail end 222. The cooling tail end 222 is used to detect the temperature of the cooling gas after cooling. The thermostat sets the cooling gas temperature to be less than 60°C. The thermostat is connected to the water regulating valve 15 and the high-temperature gas valve 32. If the cooling gas temperature detected by the cooling temperature probe 23 is higher than the set temperature value, the thermostat controls the water regulating valve 15 to increase the water inlet of the water regulating valve 15, or / and the thermostat controls the high-temperature gas valve 32 to reduce the intake of the high-temperature gas, thereby controlling the temperature value of the cooling gas.

[0035] The exhaust system includes an exhaust fan 44 and an exhaust duct 42. The exhaust duct includes a first exhaust duct 421, a second exhaust duct 422, a third exhaust duct 423 and a fourth exhaust duct 424. The first exhaust duct 421, the second exhaust duct 422, the third exhaust duct 423 and the fourth exhaust duct 424 are connected in pairs in sequence. The first exhaust duct 421 is connected to the first return pipe 50 and is set to an inclined structure. The inclination direction is based on Figure 1 The visual angle is upward, the second exhaust duct 422 is set to a vertical or approximately vertical structure, and a water vapor filter 47 is set in the second exhaust duct 422 to filter the cooling gas and filter impurities in the cooling gas to ensure the normal use of the equipment and the cleanliness of the filtered gas. The third exhaust duct 423 is set to an inclined structure, and the inclined direction is based on Figure 1 From the visual angle upward, the exhaust fan 44 is located between the third exhaust duct 423 and the fourth exhaust duct 424, and is used to transport the gas in the third exhaust duct 423 to the fourth exhaust duct 424. The fourth exhaust duct 424 can be connected to the outside to discharge the cooled gas directly into the air, and can also be connected to other related equipment to discharge the cooled gas to related equipment for further processing. The high-temperature gas is cooled by the atomizer 21 of the cooling system. The humidity of the cooling gas is high and it circulates along the exhaust duct with atomized liquid. The structural design of the first exhaust duct 421, the second exhaust duct 422 and the third exhaust duct 423 can make most of the condensed water of the atomized liquid and the cooling gas condensed when it is cold flow back to the first return pipe 50 along the third exhaust duct 423, the second exhaust duct 422 and the first exhaust duct 421 under the action of gravity, and a small amount of condensed water enters the fourth exhaust duct 424 through the exhaust fan 44.

[0036] The return system is isolated from the atmosphere. In this embodiment, the high-temperature pipe 31, the cooling pipe 22, the first return pipe 50 and the exhaust pipe 42 are configured as sealed pipe structures that are interconnected and constitute a gas flow path. After the exhaust fan 44 is started, a negative pressure state is formed in the high-temperature pipe 31, the cooling pipe 22, the first return pipe 50 and the exhaust pipe, and the high-temperature gas is extracted and circulated along the flow path. The exhaust fan 44 is connected to an exhaust fan power regulator 45, which is used to adjust the speed of the exhaust fan 44. A vacuum gauge can be installed in the flow path to detect the negative pressure of the flow path. If the negative pressure of the flow path is too small, the exhaust fan power regulator 45 adjusts the speed of the exhaust fan 44 to adjust the negative pressure.

[0037] The exhaust system may also include a first temperature probe 43 and a second temperature probe 46. In this embodiment, the first temperature probe 43 is located in the third exhaust duct 423, and the second temperature probe 46 is located in the fourth exhaust duct 424 to monitor the temperature of the cooling gas and further ensure the reliability of the equipment.

[0038] The return system includes a water level pipe 51, a return pipe and a U-shaped pipe 53. The return pipe includes a first return pipe 50 and a second return pipe 55. The first return pipe 50 is respectively connected to the cooling tail end 222 of the cooling pipe 22, the first exhaust pipe 421 of the exhaust pipe and the U-shaped pipe 53. The condensed water flows into the U-shaped pipe 53 along the first return pipe 50. The water level pipe 51 is connected to the U-shaped pipe 53. The other end of the U-shaped pipe 53 is connected to the drain pipe 54. The discharge port 541 of the drain pipe 54 faces the water tank 11. The U-shaped pipe 53 is filled with cooling water. The cooling water isolates the gas flow path from the atmosphere to ensure that the gas flow path forms a negative pressure and that the cooling water can flow out normally. The U-shaped pipe 53 is provided with a first drainage level line 531. The water level pipe 51 is provided with a second drainage level line 512 and a maximum water level line 511. The first drainage level line 531 and the second drainage level line 512 are at the same level. At the same horizontal line, when working, the pressure of the cooling water when the water level is at the first drainage level line 531 is less than the pressure of the cooling water at the discharge port 541. Under normal circumstances, the pressure is restored to the same, and the cooling water can maintain a stable state in the U-shaped tube 53 to ensure that the gas flow path is always isolated from the external air. The condensed water flows back to the U-shaped tube 53 through the first return pipe 50. The water level in the U-shaped tube 53 exceeds the first drainage level line 531. The cooling water in the U-shaped tube 53 automatically flows out from the discharge port 541 and flows back to the water tank 11. The second return pipe 55 is circulated with the fourth exhaust duct 424. The outlet of the second return pipe 55 is located above the water tank 11 and opposite to the water tank 11. A small amount of condensed water flows back to the water tank 11 through the second return pipe 55. In this embodiment, the condensed water flows back to the water tank 11, and the water volume of the water tank 11 can be replenished to realize the recycling of cooling water.

[0039] A water level controller 52 is provided on the first return pipe 50. The water level controller 52 adjusts the negative pressure of the gas flow path, thereby controlling the positions of the first drainage level line 531 and the second drainage level line 512 in the first return pipe 50 and the water level pipe 51. The first drainage level line 531 and the second drainage level line 512 are lower than the highest water level line 511.

[0040] The water pump controller is also connected to the water level controller 52, the high-temperature gas valve 32, the water volume regulating valve 15 and the water pump power regulator 14. The water pump controller controls the water level controller 52, the high-temperature gas valve 32, the water volume regulating valve 15 and the water pump power regulator 14 to achieve water circulation and water volume regulation to ensure the safety and reliability of the equipment.

[0041] During the implementation of this embodiment, the water supply system pump 12 passes the cooling water in the water tank 11 to the atomizer 21 of the cooling system, and the high-temperature gas valve 32 is opened to pass the high-temperature gas into the cooling pipe 22. The cooling water is atomized by the atomizer 21 and fully mixed with the high-temperature gas, gasified and cooled. After cooling, the gas is drawn into the exhaust pipe 22 for filtration and discharge, and the condensed water flows back to the water tank 11 through the first return pipe 50, the U-shaped pipe 53 and the second return pipe 55 for recycling.

[0042] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

Claims

1. A high-temperature gas rapid cooling device, characterized by: The cooling system comprises a water supply system, a cooling system, an exhaust system and a return system. The water supply system is connected to the cooling system, and the cooling system is connected to the exhaust system and the return system respectively. The cooling system comprises an atomizer, and the water supply system comprises a water pump and a water storage tank. The water pump provides the atomization power of the cooling water in the atomizer. The exhaust system is used to extract the high-temperature gas. The atomized liquid after the cooling water is atomized cools the high-temperature gas. The condensed water condensed from the atomized liquid flows back to the water storage tank through the return system for recycling. The cooling system comprises a cooling pipe. The cooling head end of the cooling pipe is connected to the high-temperature pipe. The exhaust system comprises an exhaust fan and an exhaust pipe. The high-temperature pipe, the cooling pipe, the first return pipe of the return system and the exhaust pipe are arranged The air duct is arranged to be a sealed pipe structure that is interconnected and constitutes a gas flow path. The exhaust duct includes a first exhaust duct, a second exhaust duct, a third exhaust duct and a fourth exhaust duct. The first exhaust duct is arranged to be an inclined structure, the second exhaust duct is arranged to be a vertical or approximately vertical structure, and the third exhaust duct is arranged to be an inclined structure. Most of the condensed water is returned to the first return pipe of the return system along the third exhaust duct, the second exhaust duct and the first exhaust duct under the action of gravity. A small amount of condensed water is passed into the fourth exhaust duct through the exhaust fan. The return system includes a return pipe, and the return pipe includes a second return pipe. The second return pipe is in communication with the fourth exhaust duct, and a small amount of condensed water is returned to the water storage tank through the second return pipe.

2. The high-temperature gas rapid cooling device according to claim 1, characterized in that: One end of the water tank of the water supply system is connected to the water pump through a water outlet pipe, and the water outlet pipe is equipped with a water pump valve. The other end of the water tank is connected to the water supply device through a water inlet pipe. The water pump and the cooling system are connected through a circulation pipe. The water pump transports the cooling water from the water outlet pipe to the cooling system through the circulation pipe.

3. The high-temperature gas rapid cooling device according to claim 2, characterized in that: The cooling pipe includes a cooling head end and a cooling tail end. The cooling pipe is connected to the circulation pipe. The atomizer is installed at the end of the circulation pipe and is opposite to the cooling head end. Cooling water circulates along the circulation pipe. The atomized liquid after atomization by the atomizer is sprayed into the cooling pipe along the cooling head end. The internal space of the cooling pipe constitutes a cooling zone. The high-temperature gas is cooled in the cooling zone. One end of the cooling head end is connected to a high-temperature pipe. The high-temperature pipe is connected to the reaction chamber of the hot furnace. The high-temperature gas in the reaction chamber is passed into the cooling pipe along the high-temperature pipe for cooling. A high-temperature gas valve is provided on the high-temperature pipe. The cooling pipe is tilted. The high-temperature gas flows downward along the cooling pipe. The cooling tail end is connected to the first return pipe of the return system. The unvaporized atomized liquid condenses into condensed water along the cooling pipe and refluxes along the first return pipe. The tilted design of the cooling pipe prevents the condensed water from flowing back.

4. The high-temperature gas rapid cooling device according to claim 3, characterized in that: The first exhaust duct, the second exhaust duct, the third exhaust duct and the fourth exhaust duct are connected in pairs in sequence. The first exhaust duct is connected to the first return pipe of the return system and is inclined upward. A water vapor filter is provided in the second exhaust duct to filter the cooling gas and is inclined upward. The exhaust fan is located between the third exhaust duct and the fourth exhaust duct and is used to transport the gas in the third exhaust duct to the fourth exhaust duct for discharge.

5. The high-temperature gas rapid cooling device according to claim 4, characterized in that: The exhaust fan creates a negative pressure state in the high-temperature pipe, the cooling pipe, the first return pipe and the exhaust pipe, and the high-temperature gas flows along the flow path. The exhaust fan is connected to an exhaust fan power regulator, which is used to adjust the speed of the exhaust fan.

6. The high-temperature gas rapid cooling device according to claim 4, characterized in that: The reflux system includes a water level pipe, a reflux pipe and a U-shaped pipe. The first reflux pipe is respectively connected to the cooling tail end of the cooling pipe, the first exhaust pipe of the exhaust pipe and the U-shaped pipe. The water level pipe is connected to the U-shaped pipe. The other end of the U-shaped pipe is connected to the drain pipe. The discharge outlet of the drain pipe faces the water storage tank. The U-shaped pipe is filled with cooling water, and the cooling water is used to isolate the gas flow path from the atmosphere.

7. The high-temperature gas rapid cooling device according to claim 6, characterized in that: The U-shaped tube is provided with a first drainage level line, and a second drainage level line and a maximum water level line are provided in the water level tube. The first drainage level line and the second drainage level line are on the same horizontal line, and the water level of the cooling water is at the first drainage level line. During operation, the pressure of the first drainage level line is less than the pressure of the cooling water at the discharge port. The condensed water flows back to the U-shaped tube through the first return pipe. The water level in the U-shaped tube exceeds the first drainage level line. The cooling water in the U-shaped tube automatically flows out from the discharge port and flows back to the water storage tank. The outlet of the second return pipe is located above the water storage tank and opposite to the water storage tank.

8. The high-temperature gas rapid cooling device according to claim 7, characterized in that: The reflux system includes a water level controller, which is located in the first reflux pipe. The water level controller adjusts the negative pressure of the gas flow path and controls the positions of the first drainage level line and the second drainage level line in the first reflux pipe and the water level pipe. The first drainage level line and the second drainage level line are lower than the highest water level line.

9. The high-temperature gas rapid cooling device according to claim 3, characterized in that: The high-temperature pipeline includes a gas inlet end, a gas compression end and a gas guide end. The gas inlet end is connected to the reaction chamber of the hot furnace. The gas compression end is located between the gas inlet end and the gas guide end. The gas compression end gradually decreases in size from the gas inlet end to the gas guide end to compress the high-temperature gas. The gas compression end plays a preliminary guiding role in the flow direction of the high-temperature gas. The gas guide end is connected to the cooling head end. The gas guide end is inclined to control the downward flow of the high-temperature gas, guide the high-temperature gas and prevent the high-temperature gas from flowing back. The high-temperature gas in the reaction chamber is sequentially passed into the cooling pipeline along the gas inlet end, the gas compression end and the gas guide end to be cooled.

10. The high-temperature gas rapid cooling device according to claim 2, characterized in that: The water supply system also includes a water level control valve, which is located at the outlet of the water inlet pipe. The water level control valve uses a float valve or an electric control valve to control the water level in the water storage tank. The water pump is connected to a water pump power regulator. The water pump power regulator is used to adjust the speed of the impeller in the water pump and control the flow rate of cooling water transported from the outlet pipe to the circulation pipe. The circulation pipe is provided with a water flow regulating valve, which is used to control the water flow rate of the water supply system to the cooling system.

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