A plasma immersion ion implantation machine for alloys

Abstract

The invention belongs to the field of plasma immersion ion implantation, and specifically is a plasma immersion ion implantation integrated machine for alloys, comprising an operating table, a power supply module and a processing tank are fixedly installed on the top of the operating table, the power supply module is located on one side of the processing tank, the alloy product and the inner wall of the processing tank are energized through the power supply module, since the plasma is at zero potential and the sample is at negative potential, the positive ions in the plasma are injected into the target sample through the potential difference, so that a modified layer is attached to the surface of the alloy, and an ultrasonic vibration module is added, ultrasonic waves are introduced as an auxiliary in the oxidation process, and the ultrasonic cavitation effect generated by the ultrasonic waves is utilized, so that the electrolyte can fill the inside of the material through the pores, reduce the concentration gradient at the interface between the metal and the electrolyte solution, make the current distribution more uniform, prevent the excessive growth of the local oxide film, and thus improve the thickness uniformity and bonding strength of the micro-arc oxidation coating.

Description

Technical Field

[0001] The invention belongs to the field of plasma immersion ion implantation, in particular to a plasma immersion ion implantation integrated machine for alloys. Background Art

[0002] Plasma immersion ion implantation is a technique that immerses the target sample in a plasma atmosphere, then applies a pulsed negative bias to the sample, and then intermittently implants ions into the target sample immersed in the plasma atmosphere.

[0003] Plasma is a collection of charged positive and negative particles, in which the positive and negative charges are equal, so it is called plasma. Plasma has various components, usually composed of six basic particles: photons, electrons, ground state atoms or molecules, excited state atoms or molecules, and positive ions and negative ions. Due to its unique physical and chemical properties such as luminescence, large particle kinetic energy, and active chemical properties, plasma is often called the fourth state of matter. At present, there are many plasma-related technologies such as plasma immersion treatment, plasma source ion implantation, plasma physical / chemical vapor deposition, microplasma oxidation, etc., which are used for the functional construction of biomaterials;

[0004] The existing plasma immersion ion implantation integrated machine still has some shortcomings. When porous alloy products are undergoing plasma immersion ion implantation, the electrolyte is difficult to enter the holes due to the small pore size of the porous products, resulting in insufficient coating and reduced quality of the final product.

[0005] To this end, the present invention provides a plasma immersion ion implantation integrated machine for alloys. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problem is: the plasma immersion ion implantation integrated machine for alloys described in the present invention comprises an operating table, a power supply module and a processing tank are fixedly installed on the top of the operating table, the power supply module is located on one side of the processing tank, a plurality of groups of ultrasonic vibration modules are fixedly installed on the inner side of the processing tank, one end of the power supply module is fixedly connected with a transmission line 1 and a transmission line 2, the transmission line 1 is fixedly connected to the inner wall of the processing tank, one end of the transmission line 2 is fixedly installed with a connection seat, one end of the connection seat is provided with three groups of conductive fixing clips, through the power supply The module energizes the alloy product and the inner wall of the treatment tank. Since the plasma is at zero potential and the sample is at negative potential, the positive ions in the plasma are injected into the target sample through this potential difference, thereby causing a modified layer to adhere to the surface of the alloy. By adding an ultrasonic vibration module, ultrasound is introduced as an auxiliary in the oxidation process. The ultrasonic cavitation effect generated by ultrasound allows the electrolyte to fill the interior of the material through the pores, reducing the concentration gradient at the interface between the metal and the electrolyte solution, making the current distribution more uniform, and preventing the local oxide film from growing too fast, thereby improving the thickness uniformity and bonding strength of the micro-arc oxidation coating.

[0008] Preferably, an insulating layer is fixedly installed on the inner side of the connecting seat, and the conductive fixing clamp comprises two groups of transmission arms, a spring three is fixedly connected between the two groups of transmission arms, a rotating rod is rotatably connected to one side of the two groups of transmission arms, and three groups of connecting grooves are opened on the outer side of the connecting seat, and the two ends of the rotating rod are fixedly connected to the inner side of the connecting groove, a circulation component is provided at one end of the transmission arm, and a clamping arm is fixedly installed at the other end of the transmission arm, and a contact electrode is provided on the outer side of the clamping arm, and the three groups of conductive fixing clips and the circulation component are arranged, and the circulation component can make the three groups of conductive fixing clips repeatedly open and close. Through this arrangement, the power contact point is continuously replaced, so that the electrolyte can fully cover the alloy surface, thereby ensuring the coating quality of the product.

[0009] Preferably, the circulation component includes a motor, the motor is fixedly connected to the inner side of the connecting seat, the transmission end of the motor is fixedly installed with a transmission gear, the outer side of the transmission gear is transmission-connected with a toothed disk, a connecting frame is fixedly installed at one end of the toothed disk, and an impact component is provided at the end of the connecting frame away from the toothed disk. After the impact component leaves, the conductive fixing clip can be restored normally in cooperation with the setting of spring three. Since there are three groups of conductive fixing clips, when one group is opened, the other two groups remain in a closed state, so that the conductive effect still exists. While ensuring the normal working process, the effect of continuous replacement of the current contact points is effectively achieved, thereby ensuring the coating quality of the product.

[0010] Preferably, gear teeth are provided on half of the circumference of the transmission gear, and the other half of the circumference is a smooth surface. A transmission groove is opened in the middle of the gear plate, and a row of gear teeth are provided at the upper and lower ends of the transmission groove. The transmission gear is meshed with the two rows of gear teeth, so that the effect of reciprocating motion can be achieved by simply rotating, and there is no need to set a reciprocating rotation program for the motor.

[0011] Preferably, the impact assembly includes an impact ball, which is spherical and fixedly connected to the connecting frame. An offset seat is fixedly installed on one side of the transmission arm, and both sides of the offset seat are concave, thereby achieving the effect of repeated opening and closing of three groups of conductive fixing clips. At the same time, the concave setting on both sides of the offset seat can assist the impact process and make the impact extrusion process smoother.

[0012] Preferably, a sealing gasket is fixedly installed on the outer side of the clamping arm. The sealing gasket is arranged in a long strip shape and is made of elastic material. The setting of the elastic sealing gasket can close the connecting groove to reduce the entry of electrolyte into the connecting seat. In the process of opening and closing the clamping arm, the extrusion and expansion of the elastic sealing gasket can ensure that the sealing effect is always present.

[0013] Preferably, a slide groove is provided on the inner side of one group of the clamping arms, and the contact electrode is slidably connected to the clamping arm via the slide groove, and a plurality of groups of slide plates are slidably connected to the outer side of the contact electrode, and a conductive seat is fixedly connected between one ends of the plurality of groups of slide plates, and the conductive seat is connected to transmission line 2, and a lifting component is provided at one end of the contact electrode, and a blocking component is provided on the inner side of the slide groove, so that the contact electrode can maintain an electrical connection with transmission line 2 during the lifting process, and the blocking component can close the slide groove, thereby greatly reducing the problem of the contact electrode being coated on the outer side due to contact with the electrolyte.

[0014] Preferably, the lifting assembly includes a linkage rod, two groups of extrusion grooves are provided on the outer side of the clamping arm, one group of extrusion grooves is close to the clamping arm, an extrusion block is slidably connected to the inner side of the extrusion groove, a spring is fixedly connected between the inner wall of the extrusion groove and the clamping arm, a transmission groove is provided on the inner side of the clamping arm, one end of the transmission groove is connected to the extrusion groove close to the clamping arm, the linkage rod is slidably connected to the transmission groove, and one end of the linkage rod is fixedly connected to the contact electrode, thereby effectively realizing the lifting and lowering of the contact electrode, and no other external force is required during the process.

[0015] Preferably, the end of the linkage rod away from the contact electrode is made of elastic material, and the end of the linkage rod close to the contact electrode is made of hard material. The cross-section of the linkage rod is circular, and the diameter of the linkage rod is the same as the transmission slot one. In conjunction with the setting of the elastic material at one end of the linkage rod, the linkage rod can be turned on the inner side of the transmission slot one, ensuring that the contact electrode can be pulled back to the distance inside the slide slot, and the setting of the hard material at one end ensures that there is sufficient thrust when the contact electrode is ejected, thereby ensuring the stable lifting and lowering process of the contact electrode.

[0016] Preferably, the blocking assembly includes a baffle, a receiving groove is provided on the inner wall of the slide groove, the baffle is slidably connected to the inner side of the receiving groove, a friction pad is fixed to the outer side of the baffle, a spring 2 is fixedly connected between the baffle and the receiving groove, a transmission groove 2 is provided on the inner side of the clamping arm, one end of the transmission groove 2 is connected to the inner side of the receiving groove, and the other end of the transmission groove 2 is connected to the bottom end of the extrusion groove away from the clamping arm, a sealing plate is fixedly installed on the inner side of the extrusion groove, and the sealing plate is slidably connected to the outer side of the baffle, thereby realizing the function of opening and closing the baffle, and at the same time, in conjunction with the setting of the friction pad, the outer side of the contact electrode can be rubbed to remove the coating on the outer side of the contact electrode, so that the contact electrode can be used for a long time.

[0017] The beneficial effects of the present invention are as follows:

[0018] 1. The plasma immersion ion implantation integrated machine for alloys described in the present invention introduces ultrasound as an auxiliary in the oxidation process by adding an ultrasonic vibration module, and utilizes the ultrasonic cavitation effect generated by ultrasound to enable the electrolyte to fill the interior of the material through the pores, thereby reducing the concentration gradient at the interface between the metal and the electrolyte solution, making the current distribution more uniform, and preventing the excessive growth of the local oxide film, thereby improving the thickness uniformity and bonding strength of the micro-arc oxidation coating.

[0019] 2. The plasma immersion ion implantation integrated machine for alloys described in the present invention cooperates with the setting of three groups of conductive fixing clips and a circulation component. The circulation component can allow the three groups of conductive fixing clips to be repeatedly opened and closed. Through this setting, the power contact point is continuously replaced on the alloy surface, so that the electrolyte can fully cover the alloy surface, ensuring the coating quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1 is a stereogram of the present invention;

[0022] Figure 2 is a cross-sectional view of a treatment tank in the present invention;

[0023] Figure 3 is a top view of the connecting seat in the present invention;

[0024] Figure 4 is a cross-sectional view of the conductive fixing clip of the present invention;

[0025] Figure 5 yes Figure 4 A partial enlarged view of the middle part;

[0026] Figure 6 is a cross-sectional view of the baffle in the present invention;

[0027] In the figure: 1. operating table; 2. power supply module; 3. processing tank; 4. ultrasonic vibration module; 5. transmission line 1; 7. connecting seat; 8. transmission line 2; 9. conductive fixing clip; 10. insulating layer; 11. motor; 12. transmission gear; 13. toothed plate; 14. connecting frame; 15. impact ball; 16. offset seat; 17. transmission arm; 18. rotating rod; 19. connecting groove; 20. clamping arm; 21. sealing pad; 22. extrusion block; 23. spring 1; 24. transmission groove 1; 25. linkage rod; 26. conductive seat; 27. slide plate; 28. contact electrode; 29. ​​transmission groove 2; 30. slide groove; 31. baffle; 32. friction pad; 33. spring 2; 34. extrusion groove; 35. storage groove; 36. sealing plate. DETAILED DESCRIPTION

[0028] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0029] Embodiment 1

[0030] like Figure 1 to Figure 2As shown, a plasma immersion ion implantation integrated machine for alloys according to an embodiment of the present invention comprises an operating table 1, a power supply module 2 and a processing tank 3 are fixedly installed on the top of the operating table 1, the power supply module 2 is located on one side of the processing tank 3, a plurality of groups of ultrasonic vibration modules 4 are fixedly installed on the inner side of the processing tank 3, one end of the power supply module 2 is fixedly connected with a transmission line 1 5 and a transmission line 2 8, the transmission line 1 5 is fixedly connected to the inner wall of the processing tank 3, one end of the transmission line 2 8 is fixedly installed with a connection seat 7, one end of the connection seat 7 is provided with three groups of conductive fixing clips 9, when working, electrolyte and plasma material are added to the processing tank 3, and then the alloy product is connected with the conductive The electric fixing clamp 9 is connected, and the alloy product is placed in the interior of the processing tank 3. The alloy product and the inner wall of the processing tank 3 are energized through the power supply module 2. Since the plasma is at zero potential and the sample is at negative potential, the positive ions in the plasma are injected into the target sample through this potential difference, so that the modified layer is attached to the surface of the alloy. By adding the ultrasonic vibration module 4, ultrasound is introduced as an auxiliary in the oxidation process. The ultrasonic cavitation effect generated by ultrasound is utilized to enable the electrolyte to fill the interior of the material through the pores, reduce the concentration gradient at the interface between the metal and the electrolyte solution, make the current distribution more uniform, prevent the excessive growth of the local oxide film, and thus improve the thickness uniformity and bonding strength of the micro-arc oxidation coating.

[0031] like Figure 4 As shown, an insulating layer 10 is fixedly installed on the inner side of the connecting seat 7, and the conductive fixing clamp 9 includes two groups of transmission arms 17, and a spring three is fixedly connected between the two groups of transmission arms 17. A rotating rod 18 is rotatably connected to one side of the two groups of transmission arms 17. Three groups of connecting grooves 19 are opened on the outer side of the connecting seat 7, and both ends of the rotating rod 18 are fixedly connected to the inner side of the connecting groove 19. A circulation component is arranged at one end of the transmission arm 17, and a clamping arm 20 is fixedly installed at the other end of the transmission arm 17. A contact electrode 28 is arranged on the outer side of the clamping arm 20. During operation, in the process of adding a modified layer to the alloy, if the alloy and the wire electrode are directly fixed, it is easy to cause the contact point to not be in good contact with the electrolyte, so that the product coating is not comprehensive and the quality is poor. With the setting of the three groups of conductive fixing clamps 9 and the circulation component, the circulation component can allow the three groups of conductive fixing clamps 9 to repeatedly open and close. Through this setting, the power contact point is continuously replaced, so that the electrolyte can fully cover the alloy surface, ensuring the coating quality of the product.

[0032] like Figure 4As shown, the circulation component includes a motor 11, and the motor 11 is fixedly connected to the inner side of the connecting seat 7. A transmission gear 12 is fixedly installed on the transmission end of the motor 11, and a toothed plate 13 is transmission-connected to the outer side of the transmission gear 12. A connecting frame 14 is fixedly installed on one end of the toothed plate 13, and an impact component is arranged on the end of the connecting frame 14 away from the toothed plate 13. When working, the starting motor 11 drives the transmission gear 12 to rotate, and the transmission gear 12 drives the toothed plate 13 to move. With the connection of the connecting frame 14, the impact component can be driven to move. The impact component can knock open the three groups of conductive fixing clips 9 in sequence. After the impact component leaves, with the setting of spring three, the conductive fixing clips 9 can be restored normally. Since there are three groups of conductive fixing clips 9, when one group is opened, the other two groups remain in a closed state, so that the conductive effect still exists. While ensuring the normal working process, the effect of continuous replacement of the current contact point is effectively achieved, thereby ensuring the coating quality of the product.

[0033] like Figure 4 As shown, gear teeth are provided on half of the circumference of the transmission gear 12, and the other half of the circumference is a smooth surface. A transmission groove is opened in the middle of the gear plate 13, and a row of gear teeth are provided at the upper and lower ends of the transmission groove. The transmission gear 12 meshes with the two rows of gear teeth. When working, it cooperates with the half-gear shape setting of the transmission gear 12. When the transmission gear 12 rotates the first half of the circle, it meshes with the gear teeth at the upper end of the transmission groove, driving the gear plate 13 to move to one side. When the transmission gear 12 rotates to the second half of the circle, it meshes with the gear teeth at the lower end of the transmission groove, thereby driving the gear plate 13 to move to the other side, thereby achieving the effect of reciprocating motion by simple rotation, and there is no need to set a reciprocating rotation program for the motor 11.

[0034] like Figure 4 As shown, the impact assembly includes an impact ball 15, which is spherical and fixedly connected to the connecting frame 14. An offset seat 16 is fixedly installed on one side of the transmission arm 17. The two sides of the offset seat 16 are concave. When working, as the toothed disk 13 reciprocates, it can drive the connecting frame 14 and the impact ball 15 to pass through one side of the conductive fixing clip 9, so that the conductive fixing clip 9 is separated at the upper and lower ends, thereby achieving the effect of repeated opening and closing of the three groups of conductive fixing clips 9. At the same time, the concave setting on both sides of the offset seat 16 can assist the impact process and make the impact extrusion process smoother.

[0035] like Figure 4As shown, a sealing gasket 21 is fixedly installed on the outer side of the clamping arm 20. The sealing gasket 21 is arranged in a long strip shape and is made of elastic material. When working, the connecting groove 19 can be closed by the setting of the elastic sealing gasket 21 to reduce the electrolyte from entering the connecting seat 7. In addition, during the opening and closing process of the clamping arm 20, the extrusion and expansion of the elastic sealing gasket 21 can ensure that the sealing effect always exists.

[0036] like Figure 5 As shown, a slide groove 30 is opened on the inner side of one group of the clamping arms 20, and the contact electrode 28 is slidably connected to the clamping arm 20 through the slide groove 30. A plurality of groups of slide plates 27 are slidably connected to the outer side of the contact electrode 28. A conductive seat 26 is fixedly connected between one end of the plurality of groups of slide plates 27, and the conductive seat 26 is connected to the transmission line 28. A lifting component is provided at one end of the contact electrode 28, and a blocking component is provided on the inner side of the slide groove 30. When working, during the coating process, it is easy to cause the electrode part of the power supply to be covered with the oxide film, resulting in problems such as difficulty in cleaning and non-reusability. With the setting of the lifting component, the lifting component can retract the contact electrode 28 into the inner side of the slide groove 30 when the clamping arm 20 is opened. With the sliding connection between the slide plate 27 and the outer side of the contact electrode 28, the contact electrode 28 can maintain an electrical connection with the transmission line 28 during the lifting process, and the blocking component can close the slide groove 30, thereby greatly reducing the problem of the contact electrode 28 being coated on the outer side due to contact with the electrolyte.

[0037] like Figure 5 As shown, the lifting assembly includes a linkage rod 25, two groups of extrusion grooves 34 are opened on the outer side of the clamping arm 20, one group of extrusion grooves 34 is close to the clamping arm 20, the inner side of the extrusion groove 34 is slidably connected with an extrusion block 22, a spring 23 is fixedly connected between the inner wall of the extrusion groove 34 and the clamping arm 20, a transmission groove 24 is opened on the inner side of the clamping arm 20, one end of the transmission groove 24 is connected to the extrusion groove 34 close to the clamping arm 20, the linkage rod 25 is slidably connected to the transmission groove 24, and one end of the linkage rod 25 is fixedly connected to the contact electrode 28 When working, when the clamping arm 20 is opened, the setting of the spring 23 makes the extrusion block 22 rebound outward, and the linkage rod 25 is driven to move inward by the force of the negative pressure, so that the contact electrode 28 can be pulled back. When the clamping arm 20 is closed, the extrusion block 22 is squeezed, and the linkage rod 25 can be pushed upward by air pressure, so that the contact electrode 28 can be pushed upward, so that the contact electrode 28 can smoothly contact the alloy to complete the power-on work, thereby effectively realizing the lifting and lowering of the contact electrode 28, and no other external force is required in the process.

[0038] like Figure 5As shown, the end of the linkage rod 25 away from the contact electrode 28 is made of elastic material, and the end of the linkage rod 25 close to the contact electrode 28 is made of hard material, and the cross-section of the linkage rod 25 is circular, and the diameter of the linkage rod 25 is the same as the transmission slot 24. When working, the elastic material at one end of the linkage rod 25 is set, so that the linkage rod 25 can be turned on the inner side of the transmission slot 24 to ensure that the contact electrode 28 can be pulled back to the distance inside the slide groove 30, and the hard material at one end ensures that there is enough thrust when the contact electrode 28 is ejected, thereby ensuring the stable lifting process of the contact electrode 28.

[0039] like Figure 6 As shown, the blocking assembly includes a baffle 31, a receiving groove 35 is provided on the inner wall of the slide groove 30, the baffle 31 is slidably connected to the inner side of the receiving groove 35, a friction pad 32 is fixed to the outer side of the baffle 31, a spring 23 is fixed between the baffle 31 and the receiving groove 35, a transmission groove 29 is provided on the inner side of the clamping arm 20, one end of the transmission groove 29 is communicated with the inner side of the receiving groove 35, and the other end of the transmission groove 29 is communicated with the bottom end of the extrusion groove 34 away from the clamping arm 20, a sealing plate 36 is fixedly installed on the inner side of the extrusion groove 34, and the sealing plate 36 is slidably connected to the outer side of the baffle 31. When working, the lifting assembly drives the contact electrode 28 inward. Before moving, since the other group of extrusion grooves 34 is closer to the edge of the clamping arm 20, the extrusion blocks 22 in the other group of extrusion grooves 34 rebound first. At this time, under the action of the second spring 33, the baffle 31 will be pushed outward to close the slide groove 30. When the clamping arm 20 is merged, the extruded air pressure in the transmission groove 29 enters the receiving groove 35. With the setting of the sealing plate 36, the baffle 31 can be pushed backward and stored in the receiving groove 35, thereby realizing the opening and closing function of the baffle 31. At the same time, with the setting of the friction pad 32, the outer side of the contact electrode 28 can be rubbed to remove the coating on the outer side of the contact electrode 28, so that the contact electrode 28 can be used for a long time.

[0040] During operation, electrolyte and plasma material are added to the processing tank 3, and then the alloy product is connected to the conductive fixing clip 9, and the alloy product is placed inside the processing tank 3. The alloy product and the inner wall of the processing tank 3 are energized through the power supply module 2. Since the plasma is at zero potential and the sample is at negative potential, the positive ions in the plasma are injected into the target sample through this potential difference, so that the modified layer is attached to the surface of the alloy. By adding the ultrasonic vibration module 4, ultrasonic waves are introduced as an auxiliary in the oxidation process. The ultrasonic cavitation effect generated by ultrasonic waves is used to enable the electrolyte to fill the interior of the material through the pores, reduce the concentration gradient at the interface between the metal and the electrolyte solution, make the current distribution more uniform, prevent the excessive growth of the local oxide film, and thus improve the micro-arc oxidation coating. Thickness uniformity and bonding strength; when working, in the process of adding a modified layer to the alloy, if the alloy and the wire electrode are directly fixed, it is easy to cause the contact point to not be in good contact with the electrolyte, resulting in insufficient product coating and poor quality. With the setting of three sets of conductive fixing clips 9 and a circulation component, the circulation component can allow the three sets of conductive fixing clips 9 to be repeatedly opened and closed. Through this setting, the power contact point is continuously replaced, so that the electrolyte can fully cover the alloy surface, ensuring the coating quality of the product; when working, the starting motor 11 drives the transmission gear 12 to rotate, and the transmission gear 12 will drive the card tooth plate 13 to move, and with the connection of the connecting frame 14, it can drive the impact component to move, and the impact component can move the three sets The conductive fixing clips 9 are knocked open in sequence, and after the impact component leaves, the conductive fixing clips 9 can be restored normally in cooperation with the setting of spring three. Since there are three sets of conductive fixing clips 9, when one set is opened, the other two sets remain closed, so that the conductive effect still exists. While ensuring the normal working process, the effect of continuous replacement of the current contact point is effectively achieved, thereby ensuring the coating quality of the product; when working, in cooperation with the half-gear shape setting of the transmission gear 12, when the transmission gear 12 rotates the first half of the circle, it meshes with the gear teeth at the upper end of the transmission groove, driving the toothed plate 13 to move to one side, and when the transmission gear 12 rotates to the second half of the circle, it will mesh with the gear teeth at the lower end of the transmission groove, thereby driving the toothed plate 13 to move to the other side, thereby realizing a simple The reciprocating motion effect can be achieved by rotating, and there is no need to set a reciprocating rotation program for the motor 11; when working, as the toothed disc 13 reciprocates, it can drive the connecting frame 14 and the impact ball 15 to pass through one side of the conductive fixing clamp 9, so that the conductive fixing clamp 9 is separated at the upper and lower ends, thereby achieving the effect of repeated opening and closing of the three groups of conductive fixing clamps 9, and at the same time, the concave setting on both sides of the offset seat 16 can assist the impact process and make the impact extrusion process smoother; when working, with the setting of the elastic sealing gasket 21, the connecting groove 19 can be closed to reduce the electrolyte from entering the connecting seat 7, and in the process of opening and closing the clamping arm 20, with the extrusion and expansion of the elastic sealing gasket 21, it can be ensured that its sealing effect always exists;During operation, during the coating process, the electrode part of the power supply is easily covered with the oxide film, which makes it difficult to clean and cannot be reused. With the setting of the lifting component, the lifting component can put the contact electrode 28 into the inner side of the slide groove 30 when the clamping arm 20 is opened. With the sliding connection between the slide plate 27 and the outer side of the contact electrode 28, the contact electrode 28 can maintain the electrical connection with the transmission line 28 during the lifting process, and the blocking component can close the slide groove 30, thereby greatly reducing the problem of the contact electrode 28 contacting with the electrolyte and causing the outer side to be coated. During operation, when the clamping arm 20 is opened, the spring 23 is set to make the extrusion block 22 rebound outward, and the linkage rod 25 is driven to move inward by the force of the negative pressure, so that the contact electrode 28 can be pulled back. When the clamping arm 20 is closed, the extrusion block 22 is squeezed, and the linkage rod 25 can be pushed upward by the air pressure, so that the contact electrode 28 can be pushed upward, so that the contact electrode 28 can smoothly contact the alloy to complete the electrification work, thereby effectively realizing the lifting and lowering work of the contact electrode 28, and no other external force is required in the process. When working, the elastic material at one end of the linkage rod 25 is arranged so that the linkage rod 25 can be turned inside the transmission slot 24 to ensure that the contact electrode 28 can be pulled back to the distance inside the slide slot 30, and the hard material at one end is arranged to ensure that there is enough thrust when the contact electrode 28 is ejected, thereby ensuring the stable lifting process of the contact electrode 28; when working, before the lifting assembly drives the contact electrode 28 to move inward, because the other group of extrusion grooves 34 are closer to the edge of the clamping arm 20, the extrusion blocks in the other group of extrusion grooves 34 22 rebounds first, and under the action of the second spring 33, the baffle 31 is pushed outward to close the slide 30. When the clamping arm 20 is combined, the extruded air pressure in the second transmission slot 29 enters the receiving slot 35. With the setting of the sealing plate 36, the baffle 31 can be pushed backward and stored in the receiving slot 35, thereby realizing the opening and closing function of the baffle 31. At the same time, with the setting of the friction pad 32, the outer side of the contact electrode 28 can be rubbed to remove the coating on the outer side of the contact electrode 28, so that the contact electrode 28 can be used for a long time. ;

[0041] The above-mentioned front, back, left, right, top and bottom are all based on the figures in the specification. Figure 1 As a benchmark, according to the person's observation perspective, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0042] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the scope of protection of the present invention.

[0043] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A plasma immersion ion implantation machine for alloys, characterized in that: The operating table (1) comprises a power supply module (2) and a processing tank (3) fixedly mounted on the top of the operating table (1), the power supply module (2) being located on one side of the processing tank (3), a plurality of groups of ultrasonic vibration modules (4) fixedly mounted on the inner side of the processing tank (3), one end of the power supply module (2) being fixedly connected to a transmission line 1 (5) and a transmission line 2 (8), the transmission line 1 (5) being fixedly connected to the inner wall of the processing tank (3), one end of the transmission line 2 (8) being fixedly mounted to a connection seat (7), one end of the connection seat (7) being provided with three groups of conductive fixing clips (9); An insulating layer (10) is fixedly mounted on the inner side of the connecting seat (7); the conductive fixing clamp (9) comprises two groups of transmission arms (17); a spring (3) is fixedly connected between the two groups of transmission arms (17); a rotating rod (18) is rotatably connected to one side of the two groups of transmission arms (17); three groups of connecting grooves (19) are provided on the outer side of the connecting seat (7); both ends of the rotating rod (18) are fixedly connected to the inner side of the connecting grooves (19); a circulation component is provided at one end of the transmission arm (17); a clamping arm (20) is fixedly mounted on the other end of the transmission arm (17); and a contact electrode (28) is provided on the outer side of the clamping arm (20); The circulation assembly comprises a motor (11), the motor (11) being fixedly connected to the inner side of a connecting seat (7), a transmission gear (12) being fixedly mounted on a transmission end of the motor (11), a toothed disc (13) being transmission-connected to the outer side of the transmission gear (12), a connecting frame (14) being fixedly mounted on one end of the toothed disc (13), and an impact assembly being arranged on one end of the connecting frame (14) away from the toothed disc (13).

2. The plasma immersion ion implantation integrated machine for alloys according to claim 1, characterized in that: The transmission gear (12) is provided with gear teeth on half of its circumference, and the other half of its circumference is a smooth surface. A transmission groove is provided in the middle of the toothed plate (13), and a row of gear teeth is provided at both the upper and lower ends of the transmission groove. The transmission gear (12) meshes with the two rows of gear teeth.

3. The plasma immersion ion implantation integrated machine for alloys according to claim 2, characterized in that: The impact assembly comprises an impact ball (15), the impact ball (15) is spherically arranged, the impact ball (15) is fixedly connected to a connecting frame (14), an offset seat (16) is fixedly mounted on one side of the transmission arm (17), and two sides of the offset seat (16) are arranged in a concave shape.

4. The plasma immersion ion implantation integrated machine for alloys according to claim 2, characterized in that: A sealing pad (21) is fixedly mounted on the outer side of the clamping arm (20); the sealing pad (21) is arranged in a long strip shape and is made of elastic material.

5. The plasma immersion ion implantation integrated machine for alloys according to claim 2, characterized in that: A slide groove (30) is provided on the inner side of one group of the clamping arms (20), and the contact electrode (28) is slidably connected to the clamping arm (20) through the slide groove (30). A plurality of groups of slide plates (27) are slidably connected to the outer side of the contact electrode (28), and a conductive seat (26) is fixedly connected between one end of the plurality of groups of slide plates (27). The conductive seat (26) is connected to the second transmission line (8), and a lifting component is provided at one end of the contact electrode (28), and a blocking component is provided on the inner side of the slide groove (30).

6. The plasma immersion ion implantation integrated machine for alloys according to claim 5, characterized in that: The lifting assembly comprises a linkage rod (25); two groups of extrusion grooves (34) are provided on the outer side of the clamping arm (20), one group of the extrusion grooves (34) being close to the clamping arm (20); an extrusion block (22) is slidably connected to the inner side of the extrusion groove (34); a spring (23) is fixedly connected between the inner wall of the extrusion groove (34) and the clamping arm (20); a transmission groove (24) is provided on the inner side of the clamping arm (20); one end of the transmission groove (24) is communicated with the extrusion groove (34) close to the clamping arm (20); the linkage rod (25) is slidably connected to the transmission groove (24); and one end of the linkage rod (25) is fixedly connected to the contact electrode (28).

7. The plasma immersion ion implantation integrated machine for alloys according to claim 6, characterized in that: The end of the linkage rod (25) away from the contact electrode (28) is made of elastic material, and the end of the linkage rod (25) close to the contact electrode (28) is made of hard material. The cross section of the linkage rod (25) is circular, and the diameter of the linkage rod (25) is the same as that of the transmission slot 1 (24).

8. The plasma immersion ion implantation integrated machine for alloys according to claim 7, characterized in that: The blocking assembly comprises a baffle (31), an inner wall of the slide groove (30) is provided with a receiving groove (35), the baffle (31) is slidably connected to the inner side of the receiving groove (35), a friction pad (32) is fixed to the outer side of the baffle (31), a spring (33) is fixedly connected between the baffle (31) and the receiving groove (35), a transmission groove (29) is provided on the inner side of the clamping arm (20), one end of the transmission groove (29) is communicated with the inner side of the receiving groove (35), and the other end of the transmission groove (29) is communicated with the bottom end of an extrusion groove (34) away from the clamping arm (20), a sealing plate (36) is fixedly installed on the inner side of the extrusion groove (34), and the sealing plate (36) is slidably connected to the outer side of the baffle (31).

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