Container conveying device and container storage system having the same

Abstract

The present application provides a container carrying device for storing articles such as FOUPs, reticle boxes, etc. in a dead zone space located in an upper portion of a semiconductor manufacturing apparatus constructed in a manufacturing plant, and a container storage system having the container carrying device. The container storage system includes a first storage unit provided at a side of a moving path of a transfer device that transfers containers containing substrates, and storing the containers; a second storage unit provided at a side of the first storage unit, and storing the containers; and a carrying unit that moves between the first storage unit and the second storage unit, and carries the containers stored in the first storage unit to the second storage unit.

Description

TECHNICAL FIELD

[0001] The present application relates to a container conveying device and a container storage system having the same. More particularly, the present application relates to a container conveying device and a container storage system having the same, which can be applied to a space in which a semiconductor manufacturing apparatus is constructed. BACKGROUND

[0002] A process of manufacturing a semiconductor element can be continuously performed in a semiconductor manufacturing apparatus, and can be classified into a front process and a back process. The semiconductor manufacturing apparatus can be generally provided in a space defined as a fabrication plant (FAB) to manufacture a semiconductor element.

[0003] The front process refers to a process of forming a circuit pattern on a wafer to complete a chip. The front process can include a deposition process of forming a thin film on a wafer, a photo-lithography process of transferring a photo resist to a thin film using a photo mask, an etching process of selectively removing unnecessary portions using a chemical substance or a reaction gas to form a desired circuit pattern on a wafer, an ashing process of removing a residual photo resist after etching, an ion implantation process of implanting ions into a portion connected to a circuit pattern to make it have characteristics of an electronic element, a cleaning process of removing a contamination source on a wafer, and the like.

[0004] The back process refers to a process of evaluating the performance of a product completed through the front process. The back process can include a wafer inspection process of inspecting whether each chip on a wafer works to screen good and bad products, a package process of cutting and separating each chip to make it have a shape of a product through dicing, die bonding, wire bonding, molding, marking, and the like, a final inspection process of finally inspecting characteristics and reliability of a product through an electrical characteristic inspection, a burn-in inspection, and the like. SUMMARY

[0005] A stocker stores articles such as FOUPs (Front Opening Unified Pods) containing wafers, reticle pods containing reticles, and the like. Such a stocker can be provided on the floor in a FAB in which semiconductor manufacturing apparatuses are constructed.

[0006] A stocker can include a plurality of shelves for loading articles and a crane that moves along the shelves. However, if the number of articles to be stored increases, the space occupied by the stocker in the FAB also increases, thereby possibly reducing the space utilization efficiency of the FAB.

[0007] The technical problem to be solved by the present application is to provide a container transport apparatus that stores FOUPs, reticle pods, and the like using a dead zone space located in an upper portion of a semiconductor manufacturing apparatus constructed in a FAB, and a container storage system having the same.

[0008] The technical problem of the present application is not limited to the above-mentioned technical problem, and other technical problems not mentioned can be clearly understood by those skilled in the art from the following description.

[0009] One aspect of a container storage system of the present application for solving the above-mentioned technical problem includes a first storage unit provided at a side of a movement path of a transfer device that transfers containers containing substrates, and storing the containers; a second storage unit provided at a side of the first storage unit, and storing the containers; and a transport unit that moves between the first storage unit and the second storage unit, and transports the containers stored in the first storage unit to the second storage unit.

[0010] The second storage unit can be provided in an upper portion of a semiconductor manufacturing apparatus in a space in which the semiconductor manufacturing apparatus is constructed.

[0011] The upper portion of the space in which the semiconductor manufacturing apparatus is constructed can include a first area and at least one second area arranged at a periphery of the first area, and the second storage unit can be provided in the second area.

[0012] The second area can be provided at both sides of the first area, or can be provided around the first area.

[0013] The second area can be arranged at both sides of the first area, or can be arranged around the first area.

[0014] The second storage unit can be arranged in at least one column, and the transport unit can transport the containers using a stroke.

[0015] The plurality of second storage units can be arranged along a plurality of columns, and a second storage unit arranged along any one of the plurality of columns can be formed to have a different height from a second storage unit arranged along another one of the plurality of columns.

[0016] The conveyance unit can be provided at an upper portion of the second storage unit arranged along the any one column.

[0017] The conveyance unit can include a driving wheel that rotates along a track, a driving control portion that has the driving wheel coupled at both sides and controls the driving wheel, and a main body portion that is coupled to a lower portion of the driving control portion and includes a clamping portion that clamps the container, a first movement control portion that moves the clamping portion in a vertical direction, and a second movement control portion that moves the clamping portion in a lateral direction.

[0018] The second movement control portion can include a plate structure formed to extend in the lateral direction, and a first sliding member provided on the plate structure to be movable in the lateral direction.

[0019] The second movement control portion can further include a second sliding member provided on the first sliding member to be movable in the lateral direction.

[0020] At least one of the second sliding members can be provided on the first sliding member, and when a plurality of the second sliding members are provided on the first sliding member, the plurality of second sliding members can be provided to be stacked to be movable in the lateral direction.

[0021] The conveyance unit can convey the container using a movement path of the transfer device.

[0022] The conveyance unit can convey the container when a first storage unit in which the container is stored is not present or is present in the plurality of first storage units.

[0023] At least one of the plurality of first storage units can be a joint unit, and the conveyance unit can convey the container to the second storage unit when the container is stored in the joint unit.

[0024] The plurality of second storage units can be arranged along a plurality of columns, and the conveyance unit can first convey the container to a second storage unit of a column located at an outer side.

[0025] The plurality of second storage units can be arranged along a plurality of columns, and the conveyance unit can convey a long-term storage container to a second storage unit of a column located at an outer side, and can convey a short-term storage container to a second storage unit of a column located at an inner side.

[0026] The conveyance unit can convey the container based on any one of a storage position of the container, a storage order of the container, and a processing order of the container.

[0027] The first storage unit, the second storage unit, and the conveyance unit can be disposed at a lower position than the water sparger in a space in which a semiconductor manufacturing apparatus is constructed.

[0028] Another aspect of a container storage system according to the present application for solving the above-described technical problem includes: a first storage unit disposed at a side of a moving path of a transfer device that transfers a container that accommodates a substrate, and storing the container; a second storage unit disposed at a side of the first storage unit, and storing the container; and a conveyance unit that moves between the first storage unit and the second storage unit, and conveys the container stored in the first storage unit to the second storage unit, wherein the second storage unit is disposed at an upper portion of a semiconductor manufacturing apparatus in a space in which the semiconductor manufacturing apparatus is constructed, and is arranged along at least one column, and the conveyance unit conveys the container using a stroke.

[0029] An aspect of a container conveyance device according to the present application for solving the above-described technical problem, the container conveyance device moves between a first storage unit disposed at a side of a moving path of a transfer device, and a second storage unit disposed at a side of the first storage unit, and includes: a drive wheel that rotates along a track; a drive control portion that incorporates the drive wheel at both sides, and controls the drive wheel; and a main body portion that is incorporated to a lower portion of the drive control portion, and includes: a clamping portion that clamps the container; a first movement control portion that moves the clamping portion in a vertical direction; and a second movement control portion that moves the clamping portion in a lateral direction, and the container conveyance device conveys the container stored in the first storage unit to the second storage unit using a stroke of the second movement control portion.

[0030] Details of other embodiments are included in the detailed description and the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 is a conceptual view that schematically shows an internal configuration of a container storage system according to an embodiment of the present application.

[0032] Figure 2 is a plan view that shows a setting environment of a container storage system according to an embodiment of the present application.

[0033] Figure 3 is a side view that shows a setting environment of a container storage system according to an embodiment of the present application.

[0034] Figure 4 is a plan view showing a set position of a container storage system according to another embodiment of the present application.

[0035] Figure 5 is a view schematically showing a configuration of a conveyance unit constituting a container storage system according to an embodiment of the present application.

[0036] Figure 6 is a view schematically showing a set form of the conveyance unit shown in Figure 5

[0037] Figure 7 is a first example view schematically showing an internal configuration of a second movement control section constituting the conveyance unit shown in Figure 5

[0038] Figure 8 is a first example view showing an arrangement configuration when a plurality of first storage units and a plurality of second storage units constitute a container storage system according to an embodiment of the present application.

[0039] Figure 9 is a second example view showing an arrangement configuration when a plurality of first storage units and a plurality of second storage units constitute a container storage system according to an embodiment of the present application.

[0040] Figure 10 is a second example view schematically showing an internal configuration of a second movement control section constituting the conveyance unit shown in Figure 5

[0041] Figure 11 is a first example view showing a set environment of a second storage unit constituting a container storage system according to an embodiment of the present application.

[0042] Figure 12 is a second example view showing a set environment of a second storage unit constituting a container storage system according to an embodiment of the present application.

[0043] Figure 13 is an example view for explaining an operation method of a control unit constituting a container storage system according to an embodiment of the present application. DETAILED DESCRIPTION

[0044] Hereinafter, a preferred embodiment of the present application will be described in detail with reference to the accompanying drawings. Advantages and features of the present application and a method of achieving the advantages and features will be apparent by referring to the following embodiments described with reference to the accompanying drawings. Figure 1 ​​​The embodiments will be described in detail with reference to the drawings. However, the present application is not limited to the embodiments disclosed below, but can be implemented in various forms, and the embodiments are provided only to make the present application complete and to completely inform those skilled in the art to which the present application pertains of the scope of the application, and the present application is defined only by the scope of the claims. Throughout the specification, like drawing reference numerals refer to like constituent elements.

[0045] An element or layer referred to as "on" or "above" another element or layer includes not only one directly on the other but also one indirectly on the other with another element or layer interposed therebetween. In contrast, an element referred to as "directly on" or "directly above" another element indicates one without another element or layer interposed therebetween.

[0046] In order to easily describe the relative relationship of one element or constituent element to another element or constituent element as shown in the drawings, spatial relative terms "below", "beneath", "lower", "above", "upper" and the like can be used. It should be understood that the spatial relative terms are terms including the different directions of the elements from each other when used or operated, in addition to the directions shown in the drawings. For example, when the elements shown in the drawings are turned over, the element described as "below" or "beneath" another element can be located "above" the other element. Therefore, the exemplary term "below" can include both the below and above directions. The elements can also be oriented in another direction, and thus the spatial relative terms can be interpreted according to the orientation.

[0047] Although the terms "first", "second" and the like are used to describe various elements, constituent elements and / or parts, the elements, constituent elements and / or parts are obviously not limited by these terms. These terms are used only to distinguish one element, constituent element and / or part from another element, constituent element and / or part. Therefore, the first element, the first constituent element or the first part mentioned below can obviously be a second element, a second constituent element or a second part within the technical idea of the present application.

[0048] The terms used in the present specification are for the purpose of describing the embodiments, and are not intended to limit the present application. In the present specification, the singular forms are intended to include the plural forms unless the context clearly indicates otherwise. The use of "comprises" and / or "comprising", or "includes" and / or "including" in the specification is not intended to exclude other constituent, steps, operations, and / or elements from the one recited. The use of the terms "comprises" and / or "comprising", or "includes" and / or "including" in the specification, and in the following claims, is not intended to exclude other constituent, steps, operations, and / or elements from the one recited.

[0049] If not otherwise defined, all terms (including technical and scientific terms) used in this specification can be used in meanings commonly understood by those having ordinary knowledge in the art to which this application belongs. Also, terms defined in generally used dictionaries, unless explicitly particularly defined, are not to be ideally or excessively interpreted.

[0050] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings. In describing the embodiments with reference to the drawings, the same or corresponding components are given the same reference numerals regardless of the reference numerals, and repeated description thereof will be omitted.

[0051] The present application relates to a container transport apparatus and a container storage system having the same, which utilize a dead zone space located at an upper portion of a semiconductor manufacturing equipment constructed in a manufacturing factory (FAB) to store articles such as a front opening unified pod (FOUP), a reticle pod, etc.

[0052] In the present application, a storage device (Storage) in which articles can be stored is constructed in the dead zone space, and a loader (Loader) which can interchangeably perform a transport function with a side track buffer (STB: Side Track Buffer) and the storage device is provided, so that the limited storage capacity (Storage Capacity) in the FAB can be expanded, thereby achieving an effect of improving the storage density. In addition, the logistics transfer time can be shortened, and the logistics efficiency linked with an overhead hoist transport (OHT: Overhead Hoist Transport) can be improved.

[0053] Hereinafter, the present application will be described in detail with reference to the accompanying drawings.

[0054] Figure 1 is a conceptual view schematically showing an internal configuration of a container storage system according to an embodiment of the present application, and Figure 2 is a plan view showing a setting environment of the container storage system according to an embodiment of the present application. Also, Figure 3 is a side view showing the setting environment of the container storage system according to an embodiment of the present application.

[0055] According to Figures 1 to 3 , the container storage system 100 can include a first storage unit 110, a second storage unit 120, a transport unit 130, and a control unit 140.

[0056] The first storage unit 110 stores containers 250 (e.g., FOUPs, reticle pods, etc.). For example, the containers 250 can be FOUPs, reticle pods, etc.

[0057] At least one first storage unit 110 can be provided in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed. For example, the first storage unit 110 can be implemented as a side track buffer (STB). Further, the above-mentioned space 200 in which the semiconductor manufacturing apparatus 240 is constructed can be, for example, a FAB, i.e., a clean room.

[0058] The first storage unit 110 can be provided in the first area 210 in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed. At this time, the first area 210 is an upper area of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, and can be formed in a central area thereof. A lower portion of the first area 210 can not be provided with the semiconductor manufacturing apparatus 240.

[0059] The first storage unit 110 can receive the container 250 from an OHT (not shown) and store the container 250. To this end, the first storage unit 110 can be provided in the vicinity of a movement path of the OHT. The movement path of the OHT can be constructed in the first area 210 as well as the first storage unit 110.

[0060] The second storage unit 120 stores the container 250 as well as the first storage unit 110. At least one such second storage unit 120 can be provided in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed. For example, the second storage unit 120 can be implemented as a storage.

[0061] The second storage unit 120 can be provided in the second area 220 in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed. At this time, the second area 220 is an upper area of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, and can be formed in a side area (i.e., a peripheral area of the first area 210) thereof. A lower portion of the second area 220 can be arranged with the semiconductor manufacturing apparatus 240.

[0062] The second area 220 can be formed on both sides of the first area 210. However, the present embodiment is not limited thereto. The second area 220 can also be formed on one side of the first area 210.

[0063] Further, as Figure 4 indicated, the second area 220 can also be formed on each of the sides around the first area 210 to surround the first area 210. Figure 4 is a plan view showing a provided position of a container storage system according to another embodiment of the present application.

[0064] Reference will again be made to Figures 1 to 3 for explanation.

[0065] The second storage unit 120 can receive the container 250 from the conveyance unit 130 and store the container 250. At this time, the second storage unit 120 can receive the container 250 using a stroke of the conveyance unit 130, and can be disposed near a moving path of the conveyance unit 130. This will be described in detail later.

[0066] The conveyance unit 130 conveys the container 250. Such a conveyance unit 130 can convey the container 250 using a plurality of tracks formed between the first area 210 and the second area 220.

[0067] The plurality of tracks can be disposed in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, in a length direction of the first direction 10. When the second area 220 is formed on both sides of the first area 210, the first track 231 and the second track 232 can be disposed in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, on both sides of the first area 210, respectively, and can be disposed as lines that go back and forth between one point and another point.

[0068] However, the present embodiment is not limited thereto. One track can also be disposed in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed. In this case, as shown in FIG. 2B, the third track 233 can be disposed as a circular line, and the second area 220 can be formed on each side of the four sides of the first area 210. Figure 4

[0069] The conveyance unit 130 can convey the container 250 by using a back-and-forth movement of a back-and-forth line, by using a circular movement of a circular line, as such. However, the present embodiment is not limited thereto. The conveyance unit 130 can also convey the container 250 by a rotational movement. For example, the conveyance unit 130 can also receive the container 250 from the first storage unit 110 located on one side of the first track 231, and then convey the container 250 to the second storage unit 120 located on the other side of the first track 231, that is, the second storage unit 120 located on the opposite side of the first storage unit 110 across the first track 231, by a rotational movement.

[0070] In addition, the conveyance unit 130 can also convey the container 250 to a destination using a track disposed as a moving path of an OHT.

[0071] The conveyance unit 130 can convey the container 250 loaded in the first storage unit 110 to the second storage unit 120. However, the present embodiment is not limited thereto. The conveyance unit 130 can also convey the container 250 loaded in the second storage unit 120 to the first storage unit 110.

[0072] As shown in FIG. 2A, Figure 5 and Figure 6 ​As shown, the conveyance unit 130 can include a drive control portion 310, drive wheels 320, guide wheels 330, and a main body portion 340 to convey the container 250.

[0073] Figure 5 is a view schematically showing a configuration of a conveyance unit constituting a container storage system according to an embodiment of the present application, and Figure 6 is a view schematically showing Figure 5 a disposition form of the conveyance unit shown in FIG. 1. The following description refers to Figure 5 and Figure 6 .

[0074] The drive control portion 310 controls the drive wheels 320 that move along the pair of rails 411, 412. Such a drive control portion 310 can be coupled to the pair of drive wheels 320 at both sides thereof, and can also be coupled to the main body portion 340 at a lower portion thereof. The drive control portion 310 can also function to support the main body portion 340 positioned therebelow.

[0075] Although not shown in detail in Figure 5 and Figure 6 , the drive control portion 310 can include a drive motor, a drive shaft, a speed adjustment portion, and the like. Here, the drive motor generates a driving force, and the drive shaft transmits the driving force generated by the drive motor to the drive wheels 320. In addition, the speed adjustment portion adjusts the rotational speed of the drive wheels 320.

[0076] When the drive control portion 310 includes the drive motor, the drive shaft, the speed adjustment portion, and the like, the drive control portion 310 can provide the drive wheels 320 with a driving force through the drive motor, the drive shaft, and the like, and can control the rotational speed of the drive wheels 320 through the speed adjustment portion and the like.

[0077] The drive wheels 320 rotate on the pair of rails 411, 412 using the driving force provided from the drive control portion 310. To this end, at least one pair of drive wheels 320 can be provided at both sides of the drive control portion 310.

[0078] The guide wheels 330 prevent the conveyance unit 130 from disengaging from the pair of rails 411, 412 when the conveyance unit 130 travels on the pair of rails 411, 412. To this end, at least one pair of guide wheels 330 can be provided at both sides of the lower surface of the drive control portion 310 in a direction perpendicular to the drive wheels 320.

[0079] The rail assembly 410 provides a movement path to the conveyance unit 130. Such a rail assembly 410 can include the pair of rails 411, 412 and a rail support portion 413.

[0080] The pair of rails 411, 412 provide a path in which the conveyance unit 130 is movable. Referring to Figure 2 and Figure 3The first rail 231, the second rail 232, and the third rail 233 of the explanation can be implemented as a pair of rails 411, 412 as shown. Figure 6 The pair of rails 411, 412 can be provided on a ceiling 420 of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed.

[0081] On the ceiling 420 of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, the pair of rails 411, 412 and a rail support 413 can be provided. At this time, the pair of rails 411, 412 can be coupled to both sides of the rail support 413 fixed to the ceiling 420, respectively.

[0082] The pair of rails 411, 412 can be formed as a linear section to go back and forth between one point and another point. However, the present embodiment is not limited thereto. According to a layout in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, the pair of rails 411, 412 can be formed as a mixed section of a linear section, a curved section, an inclined section, a branched section, a crossroad section, and the like.

[0083] The rail support 413 is provided on the ceiling 420 of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed to support the pair of rails 411, 412. Such a rail support 413 can be formed in a cap shape.

[0084] The main body 340 can include a gripping part 341, a first movement control part 342, and a second movement control part 343.

[0085] The gripping part 341 grips the container 250. Such a gripping part 341 can be lowered in the third direction 30 by the first movement control part 342 to grip the container 250 located in the downward direction of the conveyance unit 130. For example, the gripping part 341 can be implemented as a hand gripper.

[0086] The first movement control part 342 lowers and raises the gripping part 341 in the third direction 30 so that the gripping part 341 can grip the container 250. Such a first movement control part 342 can lower the gripping part 341 in the negative third direction 30 (i.e., the direction of the bottom surface of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed) and then raise the gripping part 341 in the positive third direction 30 (i.e., the direction of the ceiling of the space 200 in which the semiconductor manufacturing apparatus 240 is constructed) when the gripping part 341 grips the container 250. For example, the first movement control part 342 can be implemented as a hoist.

[0087] The second movement control section 343 moves the holding section 341 and the first movement control section 342 in the second direction 20. To this end, the second movement control section 343 can be coupled to the upper portion of the first movement control section 342. For example, the second movement control section 343 can be implemented as a slider.

[0088] As shown in FIG. 10, the second movement control section 343 can include a plate structure 510 and a first sliding member 520 to move the holding section 341 and the first movement control section 342 in the second direction 20. Figure 7

[0089] FIG. 11 is a first example view schematically showing an internal configuration of the second movement control section of the transport unit shown in FIG. 10. The following description refers to FIG. 11. Figure 7 Figure 5 Figure 7 The plate structure 510 can be formed on the first movement control section 342 in the second direction 20 as a length direction.

[0090] The first sliding member 520 is provided on the plate structure 510 to be movable in the second direction 20. Such a first sliding member 520 can be moved on the plate structure 510 in the second direction 20 by using a motor.

[0091] In the present embodiment, the first storage unit 110 and the second storage unit 120 can be arranged on both sides of the transport unit 130. FIG. 12 is a first example view showing an arrangement configuration when a plurality of first storage units and a plurality of second storage units constitute a container storage system according to an embodiment of the present application. The following description refers to FIG. 12.

[0092] Figure 8 As described above, the first storage unit 110 can receive the container 250 from the OHT and store the container 250. At this time, a plurality of first storage units 110a, 110b, …, 110k, …, 110n can be arranged in one column along the length direction of the first track 231 on one side of the first track 231. Figure 7 Figure 8 As described above, the second storage unit 120 can receive the container 250 from the transport unit 130 and store the container 250. At this time, a plurality of second storage units 120a, 120b, …, 120k, …, 120n can be arranged in one column along the length direction of the first track 231 on the other side of the first track 231.

[0093] As described above, the first storage unit 110 can receive the container 250 from the OHT and store the container 250. At this time, a plurality of first storage units 110a, 110b, …, 110k, …, 110n can be arranged in one column along the length direction of the first track 231 on one side of the first track 231.

[0094] As described above, the second storage unit 120 can receive the container 250 from the transport unit 130 and store the container 250. At this time, a plurality of second storage units 120a, 120b, …, 120k, …, 120n can be arranged in one column along the length direction of the first track 231 on the other side of the first track 231.

[0095] ​​​As described above, the conveyance unit 130 can convey the container 250 stored in the first storage unit 110 to store the container 250 in the second storage unit 120. To this end, the conveyance unit 130 can utilize the second movement control section 343.

[0096] Specifically, the first sliding member 520 can move in the negative second direction (-20) to move onto any one of the plurality of first storage units 110a, 110b,..., 110k,..., 110n, the first storage unit 110k. Then, when the container 250 is gripped by the gripping section 341 and the gripping section 341 is lowered and then raised by the first movement control section 342, the first sliding member 520 can move in the positive second direction (+20) to move onto any one of the plurality of second storage units 120a, 120b,..., 120k,..., 120n, the second storage unit 120k. Then, when the gripping section 341 is lowered by the first movement control section 342 and the gripping section 341 releases the grip of the container 250, the container 250 can be moved from the first storage unit 110 to the second storage unit 120. In the present embodiment, the container 250 can be moved like this by the movement of the first sliding member 520 in the second direction 20.

[0097] In Figure 8 , it is described that the plurality of second storage units 120a, 120b,..., 120k,..., 120n can be arranged in one row along the length direction of the first rail 231 like the plurality of first storage units 110a, 110b,..., 110k,..., 110n.

[0098] However, the present embodiment is not limited to this. The plurality of second storage units 120a, 120b,..., 120k,..., 120n can also be arranged in a plurality of rows along the length direction of the first rail 231. When the plurality of second storage units 120a, 120b,..., 120k,..., 120n are formed like this, an effect of greatly expanding the storage space of the container 250 in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed can be obtained.

[0099] For example, as Figure 9 shown, the plurality of second storage units 120a, 120b,..., 120k,..., 120n can be arranged in two rows along the length direction of the first rail 231. Figure 9 is a second example view showing the arrangement configuration when the plurality of first storage units and the plurality of second storage units constitute a container storage system according to an embodiment of the present application.

[0100] As Figure 9As shown in the example of FIG. 12, it is considered that the plurality of second storage units 120a, 120b,..., 120k,..., 120n can be arranged in a plurality of columns, and the plate structure 510 and the first sliding member 520 can be formed to have a sufficient length in the second direction.

[0101] However, the present embodiment is not limited thereto. The second movement control section 343 can also have a plurality of sliding members on the plate structure 510 and be configured as a multi-stage structure. For example, as shown in FIG. 13, the second movement control section 343 can include the first sliding member 520 and the second sliding member 530 on the plate structure 510. Figure 10

[0102] Figure 10 is a second example diagram schematically showing the internal configuration of the second movement control section of the conveyance unit shown in Figure 5 FIG. 12. The following description refers to FIG. 13. Figure 10 .

[0103] The second sliding member 530 can be provided on the first sliding member 520 so as to be movable in the second direction 20. In the present embodiment, at least one of such second sliding members 530 can be provided. When a plurality of second sliding members 530 are provided, the plurality of second sliding members 530 can be provided in layers so as to be movable in the second direction 20.

[0104] The first sliding member 520 and the second sliding member 530 can move on the plate structure 510 in the same direction (for example, the positive second direction (+20)). However, the present embodiment is not limited thereto. The first sliding member 520 and the second sliding member 530 can also move on the plate structure 510 in different directions (for example, the negative second direction (-20) and the positive second direction (+20)).

[0105] Further, in Figure 8 and Figure 9 , a case where the rail formed in the space 200 in which the semiconductor manufacturing equipment 240 is built is the first rail 231 is described. However, the present embodiment is not limited thereto. When the rail formed in the space 200 in which the semiconductor manufacturing equipment 240 is built is the second rail 232 and the third rail 233, it is obvious that the contents of Figure 8 and Figure 9 can also be applied.

[0106] Further, when the plurality of second storage units 120a, 120b,..., 120k,..., 120n are arranged in a plurality of columns in the length direction of the first rail 231, respectively, the plurality of second storage units 120a, 120b,..., 120k,..., 120n arranged in each column can be formed to have the same height in the space 200 in which the semiconductor manufacturing equipment 240 is built. ​

[0107] For example, when the plurality of second storage units 120a, 120b,..., 120k,..., 120n are arranged in three columns, the second storage unit 120l located in the first column, the second storage unit 120m located in the second column, and the second storage unit 120n located in the third column can be formed to have the same height. Figure 11 is a first example diagram illustrating a setting environment of a second storage unit constituting a container storage system according to an embodiment of the present application.

[0108] However, the present embodiment is not limited thereto. It can also be that the plurality of second storage units 120a, 120b,..., 120k,..., 120n arranged in each column have different heights from each other, or the plurality of second storage units 120a, 120b,..., 120k,..., 120n arranged in some columns have the same height, and the plurality of second storage units 120a, 120b,..., 120k,..., 120n arranged in other columns have different heights.

[0109] For example, when the plurality of second storage units 120a, 120b,..., 120k,..., 120n are arranged in three columns, the second storage unit 120l located in the first column and the second storage unit 120m located in the second column can be formed to have the same height, and the second storage unit 120n located in the third column can be formed to have a different height. Figure 12 is a second example diagram illustrating a setting environment of a second storage unit constituting a container storage system according to an embodiment of the present application.

[0110] Reference will again be made to Figure 1 for explanation.

[0111] The control unit 140 controls the conveyance unit 130. Such a control unit 140 can control the conveyance unit 130 by transmitting and receiving information in a wired / wireless manner.

[0112] The control unit 140 can include a processor having a computing function, a control function, and the like, a memory having a storage function, a communication module having a wired / wireless communication function, a power supply supplying power, and various components required for operation, and the like. For example, the control unit 140 can be implemented as a computer or a server.

[0113] Next, an operation method of the control unit 140 will be described.

[0114] Figure 13 is an example diagram for explaining an operation method of a control unit constituting a container storage system according to an embodiment of the present application. The following description refers to Figure 13 .

[0115] Hereinafter, a case where the plurality of first storage units 110a, 110b,..., 110k,..., 110n are configured as the first column 610 on one side of the first track 231, and the plurality of second storage units 120a, 120b,..., 120k,..., 120n are configured as the second column 620 and the third column 630 on the other side of the first track 231 will be described as an example, but the present embodiment is obviously not limited thereto.

[0116] The control unit 140 can control the conveyance unit 130 to move the container 250 stored in the first storage unit 110 to the second storage unit 120 and store the container 250 in the second storage unit 120.

[0117] When the storage space is insufficient because all of the plurality of first storage units 110a, 110b,..., 110k,..., 110n configuring the first column 610 store the container 250 or any of them does not store the container 250, the control unit 140 can move the container 250 stored in the first storage unit 110 to the second storage unit 120. At this time, the control unit 140 can move the container 250 stored in the first storage unit (for example, 110k) corresponding to the joint unit among the plurality of first storage units 110a, 110b,..., 110k,..., 110n to the second storage unit 120. The first storage unit corresponding to the joint unit can be any one of the plurality of first storage units 110a, 110b,..., 110k,..., 110n, but can also be a plurality.

[0118] That is, the control unit 140 can move the container 250 stored in the plurality of first storage units 110a, 110b,..., 110k,..., 110n to the plurality of second storage units 120a, 120b,..., 120k,..., 120n configuring the second column 620 or the plurality of second storage units 120a, 120b,..., 120k,..., 120n configuring the third column 630, considering the storage position of the container 250.

[0119] However, the present embodiment is not limited thereto. The control unit 140 can also move the container 250 stored in the plurality of first storage units 110a, 110b,..., 110k,..., 110n to the plurality of second storage units 120a, 120b,..., 120k,..., 120n configuring the second column 620 or the plurality of second storage units 120a, 120b,..., 120k,..., 120n configuring the third column 630, considering the storage order of the container 250, the processing order of the container 250, and the like.

[0120] Further, the control unit 140 can also move the container 250 to the second storage units 120 by using the conveyance unit 130 when the container 250 is stored to the first storage units corresponding to the joining units.

[0121] In consideration of the storage order of the containers 250, the control unit 140 can move the container 250 last stored in any one of the plurality of first storage units 110a, 110b, 110k, 110n.

[0122] However, the present embodiment is not limited thereto. The control unit 140 can also move the container 250 first stored in any one of the plurality of first storage units 110a, 110b, 110k, 110n.

[0123] Further, in consideration of the processing order of the containers 250, the control unit 140 can move the container 250 in which the substrate to be processed last is accommodated.

[0124] Further, when moving the container 250 to the plurality of second storage units 120a, 120b, 120k, 120n constituting the second column 620 or the plurality of second storage units 120a, 120b, 120k, 120n constituting the third column 630, the control unit 140 can first store the container 250 in the plurality of second storage units 120a, 120b, 120k, 120n constituting the third column 630.

[0125] However, the present embodiment is not limited thereto. The control unit 140 can also store the container 250 requiring long-term storage in the plurality of second storage units 120a, 120b, 120k, 120n constituting the third column 630, and store the container 250 requiring short-term storage in the plurality of second storage units 120a, 120b, 120k, 120n constituting the second column 620.

[0126] Further, the first storage units 110, the second storage units 120, and the conveyance unit 130 can be respectively provided at a lower position than the water sprayers, so that in case of a fire occurring in the space 200 in which the semiconductor manufacturing apparatus 240 is constructed, early fire suppression can be performed by the water sprayers provided in the ceiling 420.

[0127] Hereinafter, the present embodiment will be described with reference to the accompanying drawings. Figures 1 to 13A container storage system 100 according to an embodiment of the present application is described. The container storage system 100 is intended to additionally provide a loader and a storage device on a side track buffer (STB) storage system, thereby greatly expanding the storage capacity (Capa) of a logistics carrier using the dead zone space of the upper part of the equipment in the current bay.

[0128] The features of the container storage system 100 are summarized as follows.

[0129] First, it is a system configuration that increases the storage capacity in a semiconductor FAB by additionally providing a loader and a storage device, and achieves the efficiency of OHT and logistics carriers through the control of the upper system.

[0130] Second, it is a configuration that can use the dead zone space of the upper part of the equipment.

[0131] Third, the loader can have a stroke that can cope with the storage of two rows of storage devices.

[0132] Fourth, the loader and the storage device can be provided on the side of the OHT track and the side track buffer.

[0133] Fifth, a row of storage devices can be provided below the loader.

[0134] Sixth, the storage device can have a configuration that is flexibly designed and manufactured according to the layout and space utilization.

[0135] Seventh, it can have the same loader track as the OHT track.

[0136] Eighth, it can have an independently operable configuration that is linked to / not linked to the upper control system of the OHT track.

[0137] According to the present application, the following effects can be obtained.

[0138] First, the storage capacity can be increased, and the storage density can be improved.

[0139] Second, the dead zone space of the upper part of the equipment can be used.

[0140] Third, the stocker, which is a storage device provided on the bottom surface, can be reduced.

[0141] The embodiments of the present application have been described above with reference to the accompanying drawings, but it would be understood by those of ordinary skill in the art that the present application can be implemented in other specific forms without changing the technical idea or essential characteristics thereof. Therefore, it should be understood that the above-described embodiments are exemplary in all aspects and are not limiting.

Claims

1. A container storage system comprising: a first storage unit provided at a side of a moving path of a transfer device that transfers a container that houses a substrate, and stores the container; a second storage unit provided at a side of the first storage unit, and stores the container; and a carrying unit that moves between the first storage unit and the second storage unit, and carries the container stored in the first storage unit to the second storage unit; wherein the second storage unit is plural, the plural second storage units include a 2-1 storage unit and a 2-2 storage unit, the 2-1 storage unit is installed below a moving path of the carrying unit, and the 2-2 storage unit is installed at a side of the moving path of the carrying unit, and the 2-1 storage unit is formed at a different height from the 2-2 storage unit.

2. The container storage system according to claim 1, wherein the second storage unit is provided at an upper portion of a semiconductor manufacturing apparatus in a space where the semiconductor manufacturing apparatus is constructed.

3. The container storage system according to claim 1, wherein an upper portion of a space where a semiconductor manufacturing apparatus is constructed includes a first area and at least one second area arranged at a periphery of the first area, and the second storage unit is provided in the second area.

4. The container storage system according to claim 3, wherein the second area is arranged at both sides of the first area, or is arranged around the first area.

5. The container storage system according to claim 1, wherein the second storage unit is arranged along at least one column, and the carrying unit carries the container with a stroke.

6. The container storage system according to claim 1, wherein the plural second storage units are arranged along plural columns, and the second storage unit arranged along any one of the plural columns is formed to have a different height from the second storage unit arranged along another one of the plural columns.

7. The container storage system according to claim 6, wherein the carrying unit is provided at an upper portion of the second storage unit arranged along the any one column.

8. The container storage system according to claim 1, wherein the carrying unit includes: a drive wheel that rotates along a track; a drive control portion that incorporates the drive wheel at both sides, and controls the drive wheel; and a main body portion that is incorporated to a lower portion of the drive control portion, and includes: a clamping portion that clamps the container; a first movement control portion that moves the clamping portion in a vertical direction; and a second movement control portion that moves the clamping portion in a lateral direction.

9. The container storage system according to claim 8, wherein the second movement control portion includes: a plate structure formed in a manner of extending in the lateral direction; and a first slide member provided on the plate structure to be movable in the lateral direction.

10. The container storage system according to claim 9, wherein the second movement control portion further includes: ​ A second sliding member is provided on the first sliding member so as to be movable in the lateral direction.

11. The container storage system according to claim 10, wherein At least one of the second sliding members is provided on the first sliding member, and When a plurality of the second sliding members are provided on the first sliding member, the plurality of the second sliding members are provided in layers so as to be movable in the lateral direction.

12. The container storage system according to claim 1, wherein The conveyance unit conveys the containers using a movement path of the transfer device.

13. The container storage system according to claim 1, wherein The conveyance unit conveys the containers when, among the plurality of the first storage units, the first storage unit in which the containers are stored is not present or one is present.

14. The container storage system according to claim 1, wherein At least one of the plurality of the first storage units is a joint unit, and The conveyance unit conveys the containers to the second storage units when the containers are stored in the joint unit.

15. The container storage system according to claim 1, wherein The plurality of the second storage units are arranged along a plurality of rows, and The conveyance unit first conveys the containers to the second storage units of the rows located on the outer side.

16. The container storage system according to claim 1, wherein The plurality of the second storage units are arranged along a plurality of rows, and The conveyance unit conveys long-term storage containers to the second storage units of the rows located on the outer side, and conveys short-term storage containers to the second storage units of the rows located on the inner side.

17. The container storage system according to claim 1, wherein The conveyance unit conveys the containers based on any one of a storage position of the containers, a storage order of the containers, and a processing order of the containers.

18. The container storage system according to claim 1, wherein The first storage units, the second storage units, and the conveyance unit are provided at a position lower than a water jet in a space in which a semiconductor manufacturing apparatus is constructed.

19. A container storage system comprising: A first storage unit provided on a side of a movement path of a transfer device that transfers containers that accommodate substrates, and storing the containers; A second storage unit provided on a side of the first storage unit, and storing the containers; and A conveyance unit that moves between the first storage unit and the second storage unit, and conveys the containers stored in the first storage unit to the second storage unit, wherein the second storage unit is provided at an upper portion of a semiconductor manufacturing apparatus in a space in which the semiconductor manufacturing apparatus is constructed, and is arranged along at least one row, and the conveyance unit conveys the containers using a stroke, wherein the second storage unit is a plurality of The plurality of second storage units include a 2-1 storage unit and a 2-2 storage unit, the 2-1 storage unit is installed below a movement path of the conveyance unit, and the 2-2 storage unit is installed on a side of the movement path of the conveyance unit, and ​ The 2-1 storage unit is formed at a different height from the 2-2 storage unit. 20.A container carrying device that moves between a first storage unit provided on a side of a moving path of a transfer device and a second storage unit provided on a side of the first storage unit, and includes: a drive wheel that rotates along a track; a drive control portion that incorporates the drive wheel on both sides and controls the drive wheel; and a main body portion that is incorporated into a lower portion of the drive control portion and includes: a clamping portion that clamps the container; a first movement control portion that moves the clamping portion in a vertical direction; and a second movement control portion that moves the clamping portion in a lateral direction, and the container carrying device carries the container stored in the first storage unit to the second storage unit using a stroke of the second movement control portion, wherein the second storage unit is plural, the plural second storage units include a 2-1 storage unit and a 2-2 storage unit, the 2-1 storage unit is installed below a moving path of the carrying unit, and the 2-2 storage unit is installed on a side of the moving path of the carrying unit, and the 2-1 storage unit is formed at a different height from the 2-2 storage unit. ​

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