Photovoltaic cell passivation deposition equipment

Abstract

The present invention discloses a photovoltaic cell passivation deposition device, which relates to the technical field of solar cell production equipment. A mounting frame is provided within the working chamber of the device, and the mounting frame includes a plurality of placement plates arranged parallel to each other. A lifting member is provided within the working chamber for pushing the mounting frame as a whole out of the furnace mouth of the furnace body or retracting the mounting frame. The lifting member includes a lifting tube, which is hollow and located on one side of the placement plate. The plurality of placement plates are fixed parallel to the lifting tube, and one side of the lifting tube is slidably connected to the side of the furnace body. The side of the furnace body is provided with a sliding groove arranged vertically and horizontally. The present invention provides a mounting frame capable of placing a plurality of layers of photovoltaic panels within the furnace body, and a lifting tube is provided on one side of the mounting frame. The lifting tube can be lifted to a specified position by the lifting member provided within the furnace body, making it convenient for operators to place and replace photovoltaic panels, and can also achieve the purpose of stable installation, ensuring stability during the processing process.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell production equipment, and in particular to a photovoltaic cell passivation deposition device. Background Art

[0002] Solar photovoltaic power generation, due to its clean, safe, convenient, and efficient characteristics, has become a globally recognized and rapidly developing emerging industry. In recent years, the production of crystalline silicon solar cells has rapidly expanded, and the technology has continued to advance. Currently, most crystalline silicon solar cell manufacturers, both domestically and internationally, use traditional solar cell structures, which are relatively mature technologies.

[0003] High efficiency and low cost are the two most important research areas for solar cells. For crystalline silicon solar cells, with advancements in crystalline silicon manufacturing technology, the bulk carrier lifetime of the substrate silicon wafer continues to increase, and is no longer the key factor limiting cell efficiency. However, the impact of cell surface passivation on conversion efficiency is becoming increasingly significant.

[0004] In the production process of solar cells, the cost of the substrate silicon wafer accounts for the highest proportion of the total production cost. To reduce production costs, quickly achieve "grid parity" for photovoltaic electricity prices, and improve market competitiveness, thinning of silicon wafers is an inevitable trend. The resulting problem is severe surface recombination of the cell. This poses a challenge to solar cell surface passivation technology. Therefore, whether it is to improve the conversion efficiency of solar cells or reduce the production cost of solar cells, research on surface passivation technology for crystalline silicon solar cells is essential.

[0005] Currently, Chinese patent publication number CN112663030A discloses a vertical photovoltaic cell passivation deposition device comprising a vertically arranged mainframe chamber containing at least one vertically arranged process chamber. The top of the process chamber is tightly connected to the chamber cover via an upper flange seal assembly, and the bottom is connected to an external gas treatment device. Multiple graphite disks are used in the process chamber, each of which carries a number of silicon wafers, which are then stacked layer by layer within the process chamber. The present invention comprises a vertically arranged mainframe chamber containing at least one vertically arranged process chamber, and implements the photovoltaic cell passivation process using the vertical process chamber.

[0006] This vertical photovoltaic cell passivation deposition device occupies a small area, has a more reasonable layout, and is highly intensive. However, since this deposition device requires vacuum heating and the furnace body is relatively high, it is inconvenient to place photovoltaic cells in it, which reduces the operator's work efficiency. Summary of the Invention

[0007] The present invention aims to solve the above technical problems, overcome the shortcomings of the prior art, and provide a photovoltaic cell passivation deposition device.

[0008] In order to solve the above technical problems, the present invention provides a photovoltaic cell passivation deposition device.

[0009] Technical effect: A mounting frame capable of placing several layers of photovoltaic panels is provided in the furnace body, and a lifting tube is provided on one side of the mounting frame. The lifting tube can be lifted to a designated position by a lifting member provided in the furnace body, so that the operator can place and replace the photovoltaic panels conveniently. In addition, fixing parts are provided at the top and bottom of the mounting frame, which can cooperate with the connecting parts provided on the top and cover of the furnace body to fix the mounting frame in the furnace body, thereby achieving the purpose of stable installation and ensuring stability during the processing.

[0010] The technical solution further defined in the present invention is: a photovoltaic cell passivation deposition device, comprising a vertically arranged furnace body and a cover, a working chamber is provided in the furnace body, a mounting frame is provided in the working chamber, the mounting frame comprises several placing plates arranged parallel to each other, a lifting member is provided in the working chamber, for pushing the mounting frame as a whole out of the furnace mouth of the furnace body or retracting the mounting frame, the lifting member comprises a lifting tube, the lifting tube is hollow and located on one side of the placing plate, several placing plates are fixed in parallel on the lifting tube, one side of the lifting tube is slidably connected to the side of the furnace body, a sliding groove arranged vertically and horizontally is provided on the side of the furnace body, a sliding bar is connected to the lifting tube, the sliding bar is slidably connected in the sliding groove, a connecting member is provided in the middle position of the bottom surface of the working chamber and on the cover, and the corresponding connecting members on the top and bottom surfaces of the mounting frame are provided with fixing members that are compatible with them.

[0011] Furthermore, connecting rods perpendicular to the lifting tube are provided at the top and bottom positions of the side of the lifting tube, and the ends of the connecting rods are fixed to the sliding bar. The length of the sliding bar is the same as the length of the lifting tube. One end of the sliding groove extends to the bottom surface of the furnace body, and the other end penetrates the furnace mouth.

[0012] The photovoltaic cell passivation deposition device mentioned above, the lifting part includes a lifting screw rotatably connected to the bottom surface of the furnace body, the lifting tube is sleeved in the lifting screw and threadedly connected to it, the bottom end of the lifting screw passes through the bottom surface of the furnace body, a closed accommodating cavity is provided outside the bottom surface of the furnace body, and limiting rings are provided on the lifting screw at the bottom surface of the furnace body and in the accommodating cavity, and a movable seal is provided between the lifting screw and the furnace body.

[0013] The photovoltaic cell passivation deposition device mentioned above has a drive motor provided in the accommodating chamber, a drive worm provided on the output shaft of the drive motor, a drive worm wheel fixed coaxially on the lifting screw, the drive worm wheel and the drive worm wheel are engaged with each other, and two sets of sliding grooves and sliding bars are provided in the working chamber.

[0014] The photovoltaic cell passivation deposition device mentioned above, the connecting parts include connecting columns arranged on the bottom surface of the furnace body and the cover, and the fixing parts include a fixing ring arranged in the middle position between the top and bottom of the mounting frame. The fixing ring and the connecting columns match each other, and the connecting columns are embedded in the fixing ring when in use.

[0015] The photovoltaic cell passivation deposition device mentioned above, the connecting part includes a closed box fixed on the cover, the closed box is hollow, the connecting column is fixed at the center of the closed box, the connecting part includes a connecting groove opened in the circumferential direction on the side of the connecting column, a fixed block is slidingly connected in the connecting groove, and a fixing ring is provided with a plurality of fixing grooves adapted to the fixed block at the position corresponding to the fixed block.

[0016] The photovoltaic cell passivation deposition device mentioned above, the connecting part includes a connecting motor arranged in a closed box, the connecting motor is arranged perpendicular to the horizontal plane, a driving disk is provided on the output shaft of the connecting motor, and a plurality of circumferential driving grooves are fixed on the side of the driving disk, and the driving grooves are arranged in an arc shape.

[0017] In the photovoltaic cell passivation deposition device mentioned above, a cylindrical driving post is provided at the end of the fixed block. The driving post is embedded in the driving groove and can slide along the shape of the driving groove.

[0018] The beneficial effects of the present invention are:

[0019] (1) In the present invention, when the wafer needs to be placed in the furnace body during production, the operator can lift the mounting frame upward through the lifting member, and the entire mounting frame is lifted out of the furnace mouth. The operator can place the battery cells on the placement plate of each layer, and then drive the lifting member in reverse to return the entire mounting frame to the furnace body for passivation deposition of the battery cells. The lifting member includes a lifting tube, and a sliding bar is provided on the lifting tube to be slidably connected in the working chamber, which can ensure the stability of the mounting frame lifting. A connecting member is provided in the middle position between the cover and the bottom surface of the working chamber. After the mounting frame is placed in the furnace body, the connecting member and the fixing member are adapted to each other to achieve stable installation of the mounting frame, thereby ensuring the stability of the mounting frame and the battery cells during the passivation deposition process.

[0020] (2) In the present invention, when the entire mounting frame needs to be lifted, the operator can start the drive motor to drive the drive worm to rotate, thereby driving the worm wheel and the lifting screw to rotate in conjunction. Since the lifting screw is restricted in rotation within the furnace body by a limit ring, when the lifting screw rotates, the lifting tube can be lifted by the action of the thread, thereby achieving the lifting and lowering of the entire mounting frame, and ultimately achieving the effect of facilitating the installation and removal of the solar panels. The use of the worm gear for transmission can utilize its own self-locking property to achieve the purpose of preventing reversal.

[0021] (3) In the present invention, the entire mounting frame can be installed and fixed in the furnace body by means of the connecting pieces provided at the bottom surface of the furnace body and the cover position, in cooperation with the fixing pieces, thereby achieving the purpose of stabilizing the mounting frame and ensuring the stability of the processing process. During installation, the fixing ring can be aligned with the connecting column, and the connecting column can be embedded in the fixing ring. Then, the connection and fixation are achieved through the mutual cooperation between the fixing groove and the fixing block, and finally the connection and fixation are completed;

[0022] (4) In the present invention, a mounting frame capable of placing several layers of photovoltaic panels is provided in the furnace body, and a lifting tube is provided on one side of the mounting frame. The lifting tube can be lifted to a designated position by a lifting member provided in the furnace body, so that the operator can place and replace the photovoltaic panels conveniently. In addition, fixing members are provided at the top and bottom of the mounting frame, which can cooperate with the connecting members provided on the top of the furnace body and the cover to fix the mounting frame in the furnace body, thereby achieving the purpose of stable installation and ensuring stability during the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a structural diagram of Example 1;

[0024] Figure 2 This is a structural diagram of the lifting member in Example 1;

[0025] Figure 3 This is a structural diagram of the connecting member and the fixing member in Example 1.

[0026] Among them: 1. Furnace body; 11. Cover; 12. Working chamber; 13. Mounting frame; 131. Placement plate; 14. Accommodating chamber; 15. Closing box; 2. Lifting member; 21. Lifting tube; 22. Sliding groove; 23. Sliding bar; 24. Connecting rod; 25. Lifting screw; 251. Limiting ring; 26. Driving motor; 27. Driving worm; 28. Driving worm wheel; 3. Connecting member; 31. Connecting column; 32. Connecting groove; 33. Connecting motor; 34. Driving disk; 35. Driving groove; 36. Driving column; 4. Fixing member; 41. Fixing ring; 42. Fixing block; 43. Fixing groove. DETAILED DESCRIPTION

[0027] This embodiment provides a photovoltaic cell passivation deposition device, the structure of which is as follows Figure 1-3 As shown, it includes a vertically arranged furnace body 1 and a cover 11, a working chamber 12 is provided in the furnace body 1, a mounting frame 13 is provided in the working chamber 12, the mounting frame 13 includes a plurality of placement plates 131 arranged parallel to each other, and a lifting member 2 is provided in the working chamber 12 for pushing the mounting frame 13 out of the furnace mouth of the furnace body 1 as a whole or retracting the mounting frame 13.

[0028] like Figure 1-3As shown, the lifting member 2 includes a lifting tube 21, which is hollow and located on one side of the placement plate 131. Several placement plates 131 are fixed in parallel on the lifting tube 21. One side of the lifting tube 21 is slidably connected to the side of the furnace body 1. A sliding groove 22 is provided on the side of the furnace body 1 in a vertical and horizontal plane. A sliding bar 23 is connected to the lifting tube 21, and the sliding bar 23 is slidably connected in the sliding groove 22. A connecting member 3 is provided in the middle position of the bottom surface of the working chamber 12 and on the cover 11. A fixing member 4 that is compatible with the corresponding connecting member 3 is provided on the top and bottom surfaces of the mounting frame 13.

[0029] like Figure 1-3 As shown, connecting rods 24, perpendicular to the lifting tube 21, are provided at the top and bottom of the side of the lifting tube 21. The ends of the connecting rods 24 are fixed to the sliding bars 23, which are the same length as the lifting tube 21. One end of the sliding slot 22 extends to the bottom surface of the furnace body 1, and the other end penetrates the furnace opening. The lifting member 2 includes a lifting screw 25 rotatably connected to the bottom surface of the furnace body 1. The lifting tube 21 is sleeved within the lifting screw 25 and threadedly connected thereto. The bottom end of the lifting screw 25 passes through the bottom surface of the furnace body 1.

[0030] like Figure 1-3 As shown, a closed accommodating chamber 14 is provided on the bottom surface of the furnace body 1. A stop ring 251 is provided on the lifting screw 25, both on the bottom surface of the furnace body 1 and within the accommodating chamber 14, creating a movable seal between the lifting screw 25 and the furnace body 1. A drive motor 26 is provided within the accommodating chamber 14. A drive worm 27 is provided on the output shaft of the drive motor 26. A drive worm gear 28 is coaxially fixed to the lifting screw 25, meshing with the drive worm gear 28. Two sets of sliding grooves 22 and sliding bars 23 are provided within the working chamber 12.

[0031] like Figure 1-3 As shown, the connecting member 3 includes a connecting post 31 provided on the inner bottom surface of the furnace body 1 and the cover 11. The fixing member 4 includes a fixing ring 41 provided between the top and bottom of the mounting frame 13. The fixing ring 41 matches the connecting post 31. When in use, the connecting post 31 is embedded in the fixing ring 41. The connecting member 3 includes a closed box 15 fixed to the cover 11. The closed box 15 is hollow, and the connecting post 31 is fixed at the center of the closed box 15.

[0032] like Figure 1-3As shown, the connector 3 includes a connecting groove 32 circumferentially formed on the side of a connecting post 31. A fixed block 42 is slidably connected to the connecting groove 32. A fixing ring 41 is provided with a plurality of fixing grooves 43 corresponding to the fixing block 42 at positions corresponding to the fixing block 42. The connector 3 includes a connecting motor 33 disposed within the closed box 15. The connecting motor 33 is arranged perpendicular to the horizontal plane. A drive disk 34 is provided on the output shaft of the connecting motor 33. A plurality of circumferential drive grooves 35 are fixed to the side of the drive disk 34. The drive grooves 35 are arranged in an arc shape. A cylindrical drive post 36 is provided at the end of the fixed block 42. The drive post 36 is embedded in the drive groove 35 and can slide within the drive groove 35 along the shape of the drive groove 35.

[0033] During production, the wafer needs to be placed in the furnace body 1. The operator can lift the mounting frame 13 upward through the lifting member 2, and the entire mounting frame 13 is lifted out from the furnace mouth. The operator can place the battery cells on the placement plate 131 of each layer, and then by reverse driving the lifting member 2, the entire mounting frame 13 can be sent back to the furnace body 1 for passivation deposition of the battery cells. The lifting member 2 includes a lifting tube 21. A sliding bar 23 is provided on the lifting tube 21 and is slidably connected in the working chamber 12, which can ensure the stability of the lifting of the mounting frame 13. A connecting member 3 is provided in the middle of the cover 11 and the bottom surface of the working chamber 12. After the mounting frame 13 is placed in the furnace body 1, the mounting frame 13 can be firmly installed by the mutual adaptation of the connecting member 3 and the fixing member 4.

[0034] The present invention provides a mounting frame 13 in the furnace body 1 that can hold several layers of photovoltaic panels. A lifting tube 21 is provided on one side of the mounting frame 13. The lifting tube 21 can be lifted to a specified position by a lifting member 2 provided in the furnace body 1, so that the operator can place and replace the photovoltaic panels conveniently. In addition, fixing members 4 are provided at the top and bottom of the mounting frame 13, which can cooperate with the connecting members 3 provided on the top of the furnace body 1 and the cover 11 to fix the mounting frame 13 in the furnace body 1, thereby achieving the purpose of stable installation and ensuring stability during the processing.

[0035] In addition to the above embodiments, the present invention may also have other implementations. Any technical solution formed by equivalent replacement or equivalent transformation falls within the scope of protection required by the present invention.

Claims

1. A photovoltaic cell passivation deposition device, comprising a vertically arranged furnace body (1) and a cover (11), wherein a working chamber (12) is provided in the furnace body (1), characterized in that: The working chamber (12) is provided with a mounting frame (13), the mounting frame (13) includes a plurality of placement plates (131) arranged in parallel with each other, a lifting member (2) is provided in the working chamber (12), and is used to push the mounting frame (13) out of the furnace mouth of the furnace body (1) as a whole or to retract the mounting frame (13), the lifting member (2) includes a lifting tube (21), the lifting tube (21) is hollow and is located on one side of the placement plate (131), and the plurality of placement plates (131) are fixed in parallel to the lifting tube (21). 1), one side of the lifting tube (21) is slidably connected to the side of the furnace body (1), a sliding groove (22) arranged vertically and horizontally is provided on the side of the furnace body (1), a sliding bar (23) is connected to the lifting tube (21), and the sliding bar (23) is slidably connected in the sliding groove (22), a connecting piece (3) is provided at the middle position of the bottom surface of the working chamber (12) and on the cover (11), and a fixing piece (4) that is mutually adapted to the connecting piece (3) is provided on the top and bottom surfaces of the mounting frame (13); The lifting member (2) includes a lifting screw (25) rotatably connected to the bottom surface of the furnace body (1), a lifting tube (21) is sleeved in the lifting screw (25) and threadedly connected thereto, the bottom end of the lifting screw (25) passes through the bottom surface of the furnace body (1), a closed accommodating cavity (14) is provided outside the bottom surface of the furnace body (1), and a limiting ring (251) is provided on the lifting screw (25) at a position on the bottom surface of the furnace body (1) and in the accommodating cavity (14), and a movable seal is formed between the lifting screw (25) and the furnace body (1); A driving motor (26) is provided in the accommodating chamber (14), a driving worm (27) is provided on the output shaft of the driving motor (26), a driving worm wheel (28) is coaxially fixed on the lifting screw (25), the driving worm wheel (28) and the driving worm (27) are engaged with each other, and two groups of sliding grooves (22) and sliding bars (23) are provided in the working chamber (12).

2. The photovoltaic cell passivation deposition device according to claim 1, characterized in that: The top and bottom positions of the side of the lifting tube (21) are provided with connecting rods (24) arranged perpendicular to the lifting tube (21), the ends of the connecting rods (24) are fixed to the sliding bar (23), the length of the sliding bar (23) is the same as the length of the lifting tube (21), one end of the sliding groove (22) extends to the bottom surface of the furnace body (1), and the other end penetrates the furnace mouth.

3. The photovoltaic cell passivation deposition device according to claim 1, characterized in that: The connecting member (3) includes a connecting column (31) provided on the inner bottom surface of the furnace body (1) and the cover (11); the fixing member (4) includes a fixing ring (41) provided at a middle position between the top and bottom of the mounting frame (13); the fixing ring (41) and the connecting column (31) match each other, and when in use, the connecting column (31) is embedded in the fixing ring (41).

4. The photovoltaic cell passivation deposition device according to claim 3, characterized in that: The connecting member (3) includes a closed box (15) fixed on the cover (11), the closed box (15) is hollow, a connecting column (31) is fixed at the center of the closed box (15), the connecting member (3) includes a connecting groove (32) opened on the side of the connecting column (31) in a circumferential direction, a fixed block (42) is slidably connected in the connecting groove (32), and a fixing ring (41) is provided with a plurality of fixing grooves (43) adapted to the fixed block (42) at positions corresponding to the fixed block (42).

5. The photovoltaic cell passivation deposition device according to claim 4, characterized in that: The connecting member (3) includes a connecting motor (33) arranged in a closed box (15), the connecting motor (33) being arranged perpendicular to a horizontal plane, a driving disc (34) being arranged on an output shaft of the connecting motor (33), and a plurality of circumferential driving grooves (35) being fixed on a side surface of the driving disc (34), the driving grooves (35) being arranged in an arc shape.

6. The photovoltaic cell passivation deposition device according to claim 5, characterized in that: A cylindrical driving column (36) is provided at the end of the fixing block (42). The driving column (36) is embedded in the driving groove (35) and can slide in the driving groove (35) along the shape of the driving groove (35).

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