Vertical heat treatment apparatus

Abstract

This invention provides a vertical heat treatment device, comprising: a chassis with a first support plate, a receiving cavity, and a loading cavity; the first support plate having a first clearance opening; a furnace body entirely located within the receiving cavity, the furnace body being height-adjustably mounted on the first support plate via an adjustment mechanism; a furnace tube disposed within the furnace body, with its bottom extending downwards from the furnace opening and through the first clearance opening into the loading cavity; the furnace tube being detachably mounted on the first support plate; the portion of the furnace tube extending beyond the furnace body being entirely detachably fitted with an insulation sleeve; the internal space of the furnace tube forming a process cavity; the bottom of the furnace tube having a pipe opening; after the furnace body's height is adjusted via the adjustment mechanism, the vertical distance between the pipe opening and the first support plate remains constant; the length of the insulation sleeve is adapted to the length of the portion of the furnace tube extending beyond the furnace body; and a support boat for carrying the workpiece to be processed, the support boat being entirely located within the process cavity. The above device can accommodate support boats of different lengths without altering the furnace body.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and more specifically, to a vertical heat treatment apparatus. Background Technology

[0002] Vertical heat treatment equipment is an important process equipment used in semiconductor processing, widely applied in fields such as integrated circuit manufacturing. A typical vertical heat treatment system includes a chassis, furnace body, furnace tubes, and a support boat. The furnace body is fixedly located within the chassis, forming a heating chamber. The furnace tubes are fixedly installed within the heating chamber, forming a process chamber. The support boat carries the workpiece (e.g., silicon wafers) and is placed entirely within the process chamber of the furnace tubes, allowing the workpiece to undergo heat treatment within the chamber. The furnace body, as the core component of the vertical heat treatment equipment, significantly determines the equipment's performance; therefore, its design and development account for a large portion of the equipment's development costs.

[0003] With increasing customer demands, enhancing the single-furnace silicon wafer processing capacity of vertical heat treatment equipment has become a key focus of equipment development. Increasing this capacity requires increasing the number of silicon wafers carried by a single carrier boat, which necessitates increasing the boat's length. In existing technologies, increasing the carrier boat's length necessitates corresponding increases in the length of the furnace tubes housing the boat and the furnace body providing the temperature environment. Developing a furnace body compatible with the carrier boat's length significantly increases development costs and prolongs the development cycle.

[0004] Furthermore, increasing the furnace length typically requires a corresponding increase in the chassis height, which in turn increases the overall height of the vertical heat treatment equipment. However, processing plants often have limited height, preventing such increases. In this situation, if the customer requests an increase in the number of silicon wafers that can be carried by a single carrier boat, the existing method of increasing the furnace length accordingly cannot be implemented, thus failing to meet the customer's needs. Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a vertical heat treatment device.

[0006] This invention provides a vertical heat treatment device, comprising: a chassis, wherein a first support plate is provided inside the chassis, the first support plate dividing the internal space of the chassis into a receiving cavity and a loading cavity arranged sequentially from top to bottom, the first support plate having a first clearance opening communicating with the receiving cavity and the loading cavity; a furnace body and an adjustment mechanism, the furnace body being entirely located within the receiving cavity, the furnace body being height-adjustably mounted on the first support plate via the adjustment mechanism, the bottom of the furnace body having a furnace opening; and a furnace tube and an insulation sleeve, the furnace tube being disposed within the furnace body, with the bottom of the furnace tube extending downward from the furnace opening and passing through the first clearance opening. The furnace tube extends into the loading cavity. The furnace tube is detachably installed on the first support plate. The part of the furnace tube extending out of the furnace body is completely detachably covered with an insulation sleeve. The internal space of the furnace tube forms a process cavity. The bottom of the furnace tube has a pipe opening. After the height of the furnace body is adjusted by the adjustment mechanism, the vertical distance between the pipe opening and the first support plate remains unchanged. The length of the insulation sleeve is adapted to the length of the part of the furnace tube extending out of the furnace body. The support boat is used to carry the workpiece to be processed. The support boat can enter the process cavity from the loading cavity through the pipe opening, and the entire support boat is located inside the process cavity.

[0007] Furthermore, the process chamber includes a heating zone located inside the furnace body, the carrier boat includes a support part, the workpiece to be processed is placed in the support part, and the vertical heat treatment equipment also includes a lifting mechanism, which cooperates with the carrier boat to enable the carrier boat to rise from the initial position located in the loading chamber through the pipe opening to the process position where the entire carrier boat is located in the process chamber. When the carrier boat is in the initial position, the top of the carrier boat is lower than the furnace tube; when the carrier boat is in the process position, the entire support part is located in the heating zone.

[0008] Furthermore, the process cavity also includes a non-heating zone located inside the insulation sleeve, and the carrier boat also includes a non-load-bearing zone located below and adjacent to the carrier section. The lifting mechanism includes a second carrier plate and a drive structure. The second carrier plate is used to support the carrier boat, and the drive structure is used to drive the second carrier plate to rise and fall, thereby driving the carrier boat to rise and fall. When the carrier boat rises to the process position, the second carrier plate blocks the pipe opening, and the carrier boat fills the process cavity. If the furnace body is adjusted to the minimum height by the adjustment mechanism, when the carrier boat is in the process position, a portion of the non-load-bearing zone near the carrier section is located in the heating zone; if the furnace body is adjusted to the maximum height by the adjustment mechanism, when the carrier boat is in the process position, the entire non-load-bearing zone is located in the non-heating zone.

[0009] Furthermore, a protruding structure is provided at the bottom edge of the furnace body. The protruding structure protrudes outward along the radial direction of the furnace body. The adjustment mechanism includes a first support structure and a height adjustment structure. The first support structure is provided with a mounting position for the protruding structure. The protruding structure is detachably connected to the mounting position for the protruding structure. The height adjustment structure is detachably mounted on the first support plate. The height adjustment structure cooperates with the first support structure to adjust the height of the first support structure.

[0010] Furthermore, the protruding structure extends circumferentially around the furnace body. The first supporting structure includes a supporting plate with a second clearance opening. The mounting position of the protruding structure includes a mounting groove. The second clearance opening is located at the bottom of the mounting groove. The shape formed by the groove wall of the mounting groove is adapted to the outer contour shape of the protruding structure. The protruding structure is accommodated and connected in the mounting groove. The furnace opening corresponds to the second clearance opening in the vertical direction so that the furnace tube extending from the furnace opening can pass through the second clearance opening.

[0011] Furthermore, the middle part of the support plate is recessed relative to its edge to form a recessed space. The second clearance opening and the mounting groove are located in the recessed space. There are multiple height adjustment structures, which cooperate with the edge of the support plate and are evenly arranged along the circumference of the furnace body.

[0012] Furthermore, it also includes a height measuring structure for measuring the height of the furnace body relative to the first support plate and / or the difference in height of the furnace body before and after adjustment. The height measuring structure includes a matching measuring element and an indicator, the measuring element being disposed on the first support plate and the indicator being disposed on the first support structure and / or the protruding structure.

[0013] Furthermore, the first support structure has a through hole, and the height adjustment structure includes a base, a rotating component, and a support component. The base is set on the first bearing plate, the first end of the rotating component is rotatably set on the base, the second end of the rotating component protrudes upward through the through hole, the support component is sleeved on the rotating component, and the support component abuts against the bottom surface of the first support structure. The support component and the rotating component are threaded together. By rotating the rotating component, the support component and the first support structure are moved in the vertical direction. A thrust bearing is provided between the first end of the rotating component and the base.

[0014] Furthermore, the rotating component is threadedly engaged with the wall of the through hole, and rotating the rotating component can directly drive the first support structure to move in the vertical direction; and / or, the support component includes a first nut and a second nut sleeved on the rotating component from top to bottom, the first nut and the second nut being in contact with each other, and the first nut being in contact with the bottom surface of the first support structure; and / or, the second end of the rotating component has a plurality of clamping surfaces connected sequentially along the circumference of the rotating component, wherein at least two clamping surfaces are symmetrically arranged and parallel to each other.

[0015] Furthermore, it also includes an installation assembly, through which the furnace tube is installed on the first support plate. The installation assembly includes a second support structure and multiple lifting components. The bottom of the furnace tube is disposed on the second support structure. The multiple lifting components are evenly arranged along the circumference of the furnace tube. The first end of each lifting component is detachably connected to the first support structure and / or the protruding structure, and the second end of each lifting component is detachably connected to the second support structure.

[0016] The present invention has the following beneficial effects:

[0017] The vertical heat treatment equipment provided by this invention requires no changes to the structure of the chassis and furnace body. Based on the different lengths of the support boat and furnace tube, the furnace body is raised to corresponding heights via an adjustment mechanism. Simultaneously, insulation sleeves of varying lengths are fitted onto the portions of the furnace tube extending from the furnace body, thus adapting to support boats of different lengths without altering the furnace body, saving R&D costs and time. Furthermore, the chassis structure remains unchanged, maintaining the overall equipment height and avoiding the limitation of increasing the number of silicon wafers that can be supported by the support boat due to height constraints in processing plants, thereby better meeting customer needs. Additionally, the heights of the receiving cavity and loading cavity do not need to be changed, thus not affecting the original gas and electrical circuit design. Only minor modifications to the existing equipment are required, resulting in low modification costs. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a vertical heat treatment device in the prior art;

[0019] Figure 2 for Figure 1 A structural schematic diagram of a vertical heat treatment device from another angle;

[0020] Figure 3 for Figure 2 A schematic sectional view of a vertical heat treatment equipment along the AA direction;

[0021] Figure 4 for Figure 3 Enlarged schematic diagram of point B of the vertical heat treatment equipment;

[0022] Figure 5 for Figure 3 A schematic diagram of the structure of a vertical heat treatment equipment after the support boat is installed into the furnace tube;

[0023] Figure 6 This is a schematic diagram of a vertical heat treatment apparatus according to an embodiment of the present invention, wherein the support boat is in the initial position;

[0024] Figure 7 for Figure 6 A structural schematic diagram of a vertical heat treatment device from another angle;

[0025] Figure 8 for Figure 7 A schematic cross-sectional view of a vertical heat treatment equipment along the CC direction;

[0026] Figure 9 for Figure 8 Enlarged schematic diagram of point D of the vertical heat treatment equipment;

[0027] Figure 10This is a schematic diagram of a vertical heat treatment device according to an embodiment of the present invention, wherein the supporting boat is at its minimum length and in its initial position, and the furnace body is at its minimum height;

[0028] Figure 11 for Figure 10 A partially enlarged schematic diagram of a vertical heat treatment equipment;

[0029] Figure 12 for Figure 10 A schematic diagram of the structure of the support boat of the vertical heat treatment equipment when it is in the process position;

[0030] Figure 13 This is a schematic diagram of a vertical heat treatment device according to an embodiment of the present invention, wherein the supporting boat is at its maximum length and in its initial position, and the furnace body is at its maximum height;

[0031] Figure 14 for Figure 13 A partially enlarged schematic diagram of a vertical heat treatment equipment;

[0032] Figure 15 for Figure 13 A schematic diagram of the structure of the support boat of the vertical heat treatment equipment when it is in the process position;

[0033] Figure 16 This is a schematic diagram of the adjustment mechanism of a vertical heat treatment apparatus according to an embodiment of the present invention;

[0034] Figure 17 for Figure 16 A schematic diagram of the first support structure of the adjustment mechanism;

[0035] Figure 18 for Figure 17 A structural schematic diagram of the first supporting structure from another angle;

[0036] Figure 19 for Figure 16 A schematic diagram of the height adjustment structure of the adjustment mechanism;

[0037] Figure 20 for Figure 19 A schematic diagram of the exploded structure of the height adjustment structure. Detailed Implementation

[0038] To enable those skilled in the art to better understand the technical solution of the present invention, the vertical heat treatment equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0039] Existing vertical heat treatment equipment such as Figures 1 to 5As shown, the existing vertical heat treatment equipment includes a chassis 1, a furnace body 2, a furnace tube 3, and a support boat 4. The chassis 1 is the main outer shell of the equipment, used to house all other components. A support plate 5 is provided inside the chassis 1, which is welded to the inner wall of the chassis 1. The support plate 5 divides the internal space of the chassis 1 into a receiving cavity and a loading cavity arranged sequentially from top to bottom. The receiving cavity is mainly used to receive the furnace body 2 and its related accessories, while the process of loading the workpiece (such as a silicon wafer) onto the support boat 4 takes place in the loading cavity.

[0040] Specifically, the casing 1 also includes an annular mounting plate 6, and the support plate 5 has a clearance opening 5-1. The shape of the clearance opening 5-1 matches the outer ring shape of the annular mounting plate 6, and the outer wall of the annular mounting plate 6 fits against the side wall of the clearance opening 5-1. The annular mounting plate 6 is connected and fixed to the support plate 5 by screws or other means. The furnace body 2 is located inside the accommodating cavity, and the bottom edge of the furnace body 2 has an annular bottom plate 2-1 that protrudes radially outward. The annular bottom plate 2-1 is placed on the part of the annular mounting plate 6 near the inner ring, and the two are connected by screws, thereby installing and fixing the furnace body 2 to the support plate 5. Furnace tube 3 is installed inside furnace body 2, with its bottom protruding from the furnace opening of furnace body 2 and extending into loading cavity via clearance opening 5-1. Insulation sleeves 7 are fitted over the protruding portion of furnace tube 3 to maintain temperature. The bottom end face of furnace tube 3 rests on a support ring 8, which is connected to the bottom surface of annular mounting plate 6 via multiple lifting components 9, thereby fixing furnace tube 3 to the support plate 5. Additionally, a lifting mechanism is provided inside the loading cavity. When the workpiece to be processed (such as a silicon wafer) is loaded onto the support boat 4, the lifting mechanism raises the support boat 4 through the opening of furnace tube 3 into the process cavity formed inside furnace tube 3. The workpiece to be processed (such as a silicon wafer) carried by the support boat 4 undergoes processing within the process cavity.

[0041] Among them, such as Figure 2 As shown, the furnace body 2 provides a temperature environment for the processing of workpieces (such as silicon wafers). The portion of the furnace tube 3 extending into the loading cavity is equipped with a pipe connector 3-1, which connects to external process pipes, enabling the furnace tube 3 to provide a gas environment for the processing of workpieces. Since the height of the support plate 5 within the chassis 1 is not adjustable, the height of the furnace body 2 and furnace tube 3, which are mounted and fixed to the support plate 5, is also not adjustable within the chassis 1. For the aforementioned existing vertical heat treatment equipment, if it is desired to increase the processing capacity of a single furnace, i.e., increase the number of workpieces carried by a single support boat 4, the lengths of the furnace tube 3 and furnace body 2 need to be increased accordingly based on the length of the support boat. In other words, a furnace body 2 adapted to the length of the support boat 4 needs to be designed separately, which would significantly increase development costs and lengthen the development cycle.

[0042] like Figure 3As shown, in existing vertical heat treatment equipment, the process chamber inside the furnace tube 3, corresponding to the inner side of the furnace body 2, is a constant temperature zone. The workpiece to be processed, carried by the support boat 4, should be processed within this constant temperature zone. The support boat 4 includes a support section 4-1 and a non-support section 4-2 connected sequentially from top to bottom. The support section 4-1 is used to support the workpiece to be processed, and the non-support section 4-2 can be used to insulate the area near the tube opening after the support boat 4 is placed inside the furnace tube 3, or it can be used to place other accessories of the support boat 4 or to perform other functions. During the research on this vertical heat treatment equipment, the inventors discovered that, as Figure 5 As shown, when the entire support boat 4 is placed inside the furnace tube 3, the support part 4-1 does not cover the constant temperature zone. That is, the length of the support part 4-1 is less than the length of the constant temperature zone. A portion of the non-support part 4-2 adjacent to the support part 4-1 is located in the constant temperature zone. Therefore, the stable temperature field provided by the furnace body 2 is not fully utilized.

[0043] Based on this, the present invention provides a vertical heat treatment device that can make full use of the internal space of the chassis and the stable temperature field provided by the furnace without changing the original structure of the chassis and furnace body, so as to meet the adaptation requirements of bearing boats of different lengths to the greatest extent.

[0044] The original structure of the chassis and furnace body remains unchanged, meaning that the length of the furnace body remains unchanged, the height of the internal space of the chassis remains unchanged, and the height and position of the support plate welded inside the chassis remain unchanged. Therefore, the height of the accommodating cavity above the support plate and the loading cavity below it remains unchanged.

[0045] Since the support boat needs to be placed entirely within the furnace tube, the length of the furnace tube must increase accordingly as the length of the support boat increases. If the height of the furnace body within the chassis remains constant, the portion of the furnace tube protruding downwards from the furnace body (i.e., the portion located within the loading cavity) will be longer after the increased length of the furnace tube is placed inside the furnace body. However, since the height of the loading cavity remains constant and the length of the support boat increases, the sum of the length of the portion of the furnace tube within the loading cavity and the length of the support boat may exceed the height of the loading cavity. This can cause interference between the portion of the furnace tube within the loading cavity and the top of the support boat, making normal loading and unloading operations between the support boat and the furnace tube impossible.

[0046] Therefore, the vertical heat treatment equipment of the present invention, without changing the original structure of the chassis and furnace body, achieves the adaptability of the furnace body to the bearing boat of different lengths by adjusting the height position of the furnace body inside the chassis and at least cooperating with insulation sleeves of different lengths.

[0047] like Figures 6 to 9As shown, in some embodiments, the vertical heat treatment equipment includes a casing 10, a furnace body 20, a furnace tube 50, an insulation sleeve 70, a support boat 80, and a lifting mechanism 90. The casing 10 contains a first support plate 11, which is fixedly connected to the inner wall of the casing 10 by welding or other means. The first support plate 11 vertically divides the internal space of the casing 10 into a receiving cavity 12 and a loading cavity 13 arranged sequentially from top to bottom. The first support plate 11 has a first clearance opening 111, which connects the receiving cavity 12 and the loading cavity 13.

[0048] The furnace body 20 is always located within the accommodating cavity 12 and is mounted on the first supporting plate 11. The bottom of the furnace body 20 has a furnace opening, which vertically corresponds to the first clearance opening 111. The accommodating cavity 12 is mainly used to accommodate the furnace body 20 and its related accessories (such as heating components, electrical components, etc.). The furnace tube 50 is disposed within the furnace body 20, and its bottom extends downward from the furnace opening, extending through the first clearance opening 111 into the loading cavity 13. The furnace tube 50 is also mounted on the first supporting plate 11, which is mainly used to support the weight of the furnace body 20 and the furnace tube 50. The internal space of the furnace tube 50 forms a process cavity 51, and the bottom of the furnace tube 50 has a pipe opening 52 communicating with the process cavity 51. This pipe opening 52 is always located within the loading cavity 13. The process chamber 51 includes a heating zone located inside the furnace body 20. This heating zone is primarily used for heating the workpiece to be processed; in other words, the furnace body 20 provides the temperature environment for the processing of the workpiece. The portion of the furnace tube 50 extending out of the furnace body 20 is entirely covered with an insulation sleeve 70. That is, the outer portion of the furnace tube 50 not surrounded by the furnace body 20 is completely enclosed by the insulation sleeve 70, which helps to insulate the process chamber 51 and prevent heat loss. Additionally, a pipe connector 53 is provided on the portion of the furnace tube 50 extending out of the furnace body 20 and located within the loading chamber 13. This pipe connector 53 passes through the insulation sleeve 70 and extends to the outside. The vertical heat treatment equipment also includes process piping, which provides different process gases to the process chamber 51 according to different process types during the processing of the workpiece. The pipe connector 53 is used to connect to the process piping, thereby enabling the introduction of process gases into the process chamber 51 through the process piping. In other words, the furnace tube 50 provides the gas environment for the processing of the workpiece.

[0049] The carrier boat 80 is used to carry the workpiece to be processed (e.g., a silicon wafer). The carrier boat 80 includes a carrier section 81, on which the workpiece to be processed (e.g., a silicon wafer) is specifically placed. The process of loading the workpiece to be processed (e.g., a silicon wafer) onto the carrier boat 80 is completed within the loading cavity 13. The carrier boat 80 can enter the process cavity 51 from the loading cavity 13 through the port 52, and the entire carrier boat 80 is located within the process cavity 51. The above process of the carrier boat 80 can be realized by a lifting mechanism 90. Specifically, the lifting mechanism 90 is located within the loading cavity 13, and through the cooperation of the lifting mechanism 90 and the carrier boat 80, the carrier boat 80 can be raised from its initial position within the loading cavity 13 through the port 52 to a process position where the entire carrier boat 80 is located within the process cavity 51. When the carrier boat 80 is in the initial position, the workpiece to be processed has already been loaded onto it; when the carrier boat 80 is in the process position, the workpiece to be processed carried by the carrier boat 80 can be processed within the process cavity 51.

[0050] like Figures 6 to 15 As shown, the vertical heat treatment equipment also includes an adjustment mechanism 30. The furnace body 20 is height-adjustably mounted on the first support plate 11 via the adjustment mechanism 30. That is, the height of the furnace body 20 within the accommodating cavity 12 can be raised or lowered via the adjustment mechanism 30. It is important to note that regardless of how the height of the furnace body 20 is adjusted, it must always be ensured that the entire furnace body 20 remains within the accommodating cavity 12. The furnace tube 50 is detachably mounted on the first support plate 11, and the insulation sleeve 70 is also detachably fitted onto the portion of the furnace tube 50 extending out of the furnace body 20.

[0051] When it is necessary to increase the number of workpieces (such as silicon wafers) carried by the support boat 80 or to increase the spacing between the workpieces carried by the support boat 80, the length of the support boat 80 needs to be increased. Since the support boat 80 is entirely placed in the furnace tube 50, when the length of the support boat 80 increases, the length of the furnace tube 50 that is adapted to it must also increase accordingly. At this time, the structure of the chassis 10 and furnace body 20 of the above-mentioned vertical heat treatment equipment does not need to be changed. That is, the length of the furnace body 20, the overall height of the chassis 10 and the height of the internal space, the height position of the first support plate 11 in the chassis 10, and the height of the accommodating cavity 12 and the loading cavity 13 do not need to be changed. The height position of the furnace body 20 is adjusted by the adjustment mechanism 30 to raise it to a certain height, and the furnace tube 50 is installed on the first support plate 11. At the same time, a heat insulation sleeve 70 of appropriate length is selected and fitted on the part of the furnace tube 50 that extends out of the furnace body 20 (that is, the length of the heat insulation sleeve 70 is adapted to the length of the part of the furnace tube 50 that extends out of the furnace body 20) to ensure the heat preservation effect and process performance.

[0052] The specific height of the furnace body 20 (or the adjusted height of the furnace body 20) and the specific length of the insulation sleeve 70 need to be determined based on factors such as the specific length of the carrying boat 80 (or the specific length of the furnace tube 50), the height of the housing cavity 12 of the chassis 10, and the height of the bottom of the furnace tube 50 within the loading cavity 13.

[0053] Generally, after the furnace tube 50 is installed inside the furnace body 20, there is a certain limiting distance between the top of the furnace tube 50 and the top of the furnace body 20. This limiting distance is used to ensure that the top of the furnace tube 50 is not too close to the furnace body 20, thereby avoiding problems such as deformation of the furnace tube 50 due to excessively high temperatures on the inner wall of the furnace body 20. Assuming that the above limiting distance remains unchanged, the length of the furnace body 20 remains unchanged, and the length of the furnace tube 50 installed inside the furnace body 20 also remains unchanged, the length of the portion of the furnace tube 50 extending out of the furnace body 20 will increase due to the increased length of the furnace tube 50. Figure 10 and Figure 13 As shown, Figure 10 The length of the medium-load-bearing boat 80 is less than Figure 13 The length of the vessel is 80 mm, therefore... Figure 10 The length of the furnace tube 50 is less than Figure 13 The length of the furnace tube 50 is the same as the length of the furnace body 20. Figure 10 The length H1 of the portion of the furnace tube 50 extending out of the furnace body 20 is less than Figure 13 The length H2 of the portion of the furnace tube 50 extending out of the furnace body 20. The specific length of the insulation sleeve 70 is further selected based on the length of the portion of the furnace tube 50 extending out of the furnace body 20, that is, the insulation sleeve 70 can be selected with a length that matches the length of the portion of the furnace tube 50 extending out of the furnace body 20.

[0054] The specific height of the furnace body 20 (or the adjusted height of the furnace body 20) can be determined based on two aspects: the height of the housing cavity 12 of the chassis 10 and the height of the bottom of the furnace tube 50 within the loading cavity 13. Firstly, the height of the housing cavity 12 is limited, and the furnace body 20 cannot exceed the height limit set by the top of the housing cavity 12 when raised. Secondly, once the length of the furnace tube 50 is determined, the length of the portion of the furnace tube 50 extending out of the furnace body 20 is also determined. Raising or lowering the furnace body 20 at this point will affect the height of the bottom of the furnace tube 50 within the loading cavity 13. The bottom of the furnace tube 50 cannot be too low. In fact, when the carrier boat 80 is in its initial position, the top of the carrier boat 80 should be lower than the furnace tube 50; otherwise, interference will occur with the top of the carrier boat 80, preventing normal loading and unloading operations between the carrier boat 80 and the furnace tube 50. Therefore, this indirectly limits the adjusted height of the furnace body 20.

[0055] It should be noted that during internal testing of the aforementioned vertical heat treatment equipment, it was found that changes in the length of the portion of the furnace tube 50 extending beyond the furnace body 20 have virtually no impact on the stable temperature field within the process chamber 51 of the furnace tube 50. In other words, they have virtually no impact on the temperature distribution within the heating zone corresponding to the inner side of the furnace body 20, where a stable temperature field remains constant. As can be seen from the foregoing, the stable temperature field provided by the furnace body 2 in existing equipment is not fully utilized. Based on this, the technical solution of this invention is proposed to maximize the utilization of the stable temperature field provided by the original furnace body 2, thereby improving the constant temperature zone of the furnace tube 3's process chamber where the supporting portion 4-1 was not previously placed (i.e.,...). Figure 5 The "unutilized area" shown in the diagram can also be used to place the workpiece to be processed. Therefore, in the vertical heat treatment equipment of the present invention, the length of the support boat 80 cannot be increased indefinitely. When the support boat 80 is in the process position, the entire support portion 81 needs to be located within the heating zone of the process chamber 51. That is to say, if the length of the support boat 80 is increased too much, causing a part of the support portion 81 of the support boat 80 to extend beyond the heating zone, this situation is not allowed.

[0056] As can be seen from the above, the structure of the chassis 10 and furnace body 20 of the vertical heat treatment equipment does not need to be changed. Based on the different lengths of the support boat 80 and furnace tube 50, the furnace body 20 is raised to corresponding heights via the adjustment mechanism 30. Simultaneously, insulation sleeves 70 of different lengths are fitted onto the portions of the furnace tube 50 extending from the furnace body 20, thus adapting to support boats 80 of different lengths without altering the furnace body 20, saving R&D costs and time. Furthermore, the structure of the chassis 10 also remains unchanged, i.e., the overall height of the equipment remains constant, thus avoiding the problem of being unable to increase the number of silicon wafers supported by the support boat due to the limited height of the processing plant, thereby better meeting customer needs. In addition, the heights of the accommodating cavity 12 and loading cavity 13 do not need to be changed, thus not affecting the original gas and electrical circuit design. Only minor modifications to the original equipment are required, resulting in low modification costs.

[0057] like Figure 8 , Figures 10 to 15As shown, in some embodiments, after the height of the furnace body 20 is adjusted by the adjustment mechanism 30, the vertical distance between the inlet 52 of the furnace tube 50 and the first support plate 11 remains constant. Thus, when adjusting the height of the furnace body 20, as long as the vertical distance between the inlet 52 and the first support plate 11 is determined, there is no need to consider the influence of the height of the bottom of the furnace tube 50 within the loading cavity 13. In other words, once the vertical distance between the inlet 52 of the furnace tube 50 and the first support plate 11 is determined, if it can be ensured that the inlet 52 of the furnace tube 50 does not interfere with the top of the support boat 80 in its initial position, no matter how the height of the furnace body 20 is adjusted, it will not affect the loading and unloading operation of the support boat 80. At this time, the increase in height of the furnace body 20 is basically consistent with the increase in length of the support boat 80, and correspondingly, the change in length of the selected insulation sleeve 70 is also consistent with the increase in length of the support boat 80. Of course, it is understandable that in other embodiments not shown in the figure, the vertical distance between the port 52 of the furnace tube 50 and the first support plate 11 can also change, as long as the final position of the port 52 of the furnace tube 50 is at a certain distance from the top of the support boat 80 in the initial position.

[0058] Furthermore, such as Figures 6 to 15 As shown, in some embodiments, the process cavity 51 also includes a non-heated area located inside the insulation sleeve 70. The carrier boat 80 also includes a non-load-bearing part 82 located below and adjacent to the carrier part 81. The lifting mechanism 90 includes a second carrier plate 91 and a drive structure 92. The second carrier plate 91 is used to support the carrier boat 80, and the drive structure 92 is used to drive the second carrier plate 91 to rise and fall, thereby driving the carrier boat 80 to rise and fall. When the carrier boat 80 rises to the process position, the second carrier plate 91 can block the pipe opening 52, at which time the non-load-bearing part 82 is located in the non-heated area. The specific use of the non-load-bearing part 82 is not limited. In some embodiments, the non-load-bearing part 82 can be an insulation part, which can further ensure the insulation effect. The drive structure 92 is a relatively mature conventional structure and will not be described in detail here.

[0059] When the carrier boat 80 is in the process position, the carrier boat 80 basically fills the process cavity 51, that is, at this time the length of the carrier boat 80 is basically the same as or slightly less than the length of the process cavity 51 (e.g., Figure 12 and Figure 15 (The status is shown in the image).

[0060] Figures 10 to 12 This diagram shows the structure of a vertical heat treatment device when the supporting boat 80 is at its minimum length. Figure 10 The middle-load vessel 80 is in its initial position. Figure 12The supporting boat 80 is in the process position. When the supporting boat 80 is at its minimum length, the length of the supporting part 81 is L1, and at this time, the furnace body 20 is adjusted to its minimum height via the adjustment mechanism 30. For example... Figure 12 As shown, in this case, when the carrier boat 80 is in the process position, a part of the non-carrier part 82 near the carrier part 81 is located in the heating zone. That is to say, the heating zone is not fully utilized at this time, and there is still space to increase the length of the carrier part 81. This is a prerequisite for subsequently increasing the length of the carrier part 81 and adjusting the height of the furnace body 20.

[0061] Figures 13 to 15 This diagram shows the structure of the vertical heat treatment equipment when the supporting boat 80 is at its maximum length. Figure 13 The medium-sized carrier boat 80 is in its initial position. Figure 15 The supporting boat 80 is in the process position. When the supporting boat 80 is at its maximum length, the length of the supporting part 81 is L2, and at this time, the furnace body 20 is adjusted to its maximum height via the adjustment mechanism 30. For example... Figure 15 As shown, in this case, when the carrier boat 80 is in the process position, the non-carrier part 82 is entirely located in the non-heating zone. This means that the carrier part 81 has already filled the heating zone, and the heating zone has been utilized to the maximum extent, leaving no space to further increase the length of the carrier part 81. Additionally, as... Figure 13 As shown, in this case, when the support boat 80 is in its initial position, the distance between the top of the support boat 80 and the bottom of the furnace tube 50 is small. Increasing the length of the support boat 80 would easily cause interference between the two. Therefore, the support boat 80 is at its maximum length at this time.

[0062] like Figure 8 , Figure 9 , Figure 11 as well as Figure 14 As shown, in some embodiments, a protruding structure 21 is provided at the bottom edge of the furnace body 20, and the protruding structure 21 protrudes outward along the radial direction of the furnace body 20. The adjustment mechanism 30 cooperates with the protruding structure 21, and the adjustment mechanism 30 directly drives the protruding structure 21 to move up and down in the vertical direction, thereby realizing the adjustment of the height position of the furnace body 20. It should be noted that the specific structure of the protruding structure 21 is not limited, and it can be any structure that can connect to the bottom edge of the furnace body 20 and cooperate with the adjustment mechanism 30. For example, in some embodiments, the protruding structure 21 extends around the circumference of the furnace body 20 to form a ring; of course, it can be understood that in other embodiments, there can also be multiple protruding structures 21, which are spaced apart and evenly distributed along the circumference of the furnace body 20, and the multiple protruding structures 21 are located in the same horizontal plane.

[0063] Furthermore, in Figure 8 , Figure 9 , Figure 11as well as Figure 14 In the illustrated embodiment, the protruding structure 21 includes a first annular plate 211 and a second annular plate 212. The first annular plate 211 is connected to the bottom edge of the furnace body 20. Preferably, the first annular plate 211 is fixed integrally with the bottom edge of the furnace body 20. The second annular plate 212 is independent of the first annular plate 211. The first annular plate 211 can be placed above the second annular plate 212 and detachably connected to the second annular plate 212 by fasteners such as screws. The first annular plate 211 and the second annular plate 212 together constitute the protruding structure 21. It should be noted that the first annular plate 211 and the second annular plate 212 can be structures that are compatible with the original furnace body 20. When the height of the furnace body 20, the length of the furnace tube 50, etc., changes due to the increase in the length of the support boat 80, the first annular plate 211 and the second annular plate 212 can remain unchanged and can continue to be used. In addition, it is understood that in some other embodiments, the protruding structure 21 may also include only one annular plate.

[0064] like Figures 6 to 9 as well as Figure 16 and Figure 17 As shown, in some embodiments, the adjustment mechanism 30 includes a first support structure 31 and a height adjustment structure 32. The first support structure 31 is provided with a protruding structure mounting position 311. The protruding structure 21 is detachably connected to the protruding structure mounting position 311. The height adjustment structure 32 is detachably disposed on the first support plate 11. The height adjustment structure 32 cooperates with the first support structure 31 to adjust the height of the first support structure 31, that is, to adjust the distance between the first support structure 31 and the first support plate 11 in the vertical direction.

[0065] The first support structure 31 supports the furnace body 20 and the protruding structure 21. The first support structure 31 is provided with a protruding structure mounting position 311. This protruding structure mounting position 311 facilitates the installation of the protruding structure 21 that matches the original furnace body 20, and has good versatility. At the same time, the protruding structure 21 and the protruding structure mounting position 311, as well as the height adjustment structure 32 and the first bearing plate 11, are detachably connected. Compared with the method of directly fixing the first support structure 31 to the protruding structure 21 (or furnace body 20) and the first bearing plate 11, the height adjustment structure 32 can quickly meet the transformation of the original vertical heat treatment equipment, thereby improving the single furnace processing capacity of the equipment more quickly.

[0066] like Figures 6 to 9 as well as Figures 16 to 18As shown, in some embodiments, the first supporting structure 31 is a supporting plate with a second clearance opening 312. The protruding structure mounting position 311 is a mounting groove, with the second clearance opening 312 located at the bottom of the mounting groove. The protruding structure 21 can be accommodated within the mounting groove and connected to it. The furnace opening corresponds vertically to the second clearance opening 312. After the protruding structure 21 is connected to the mounting groove, the furnace tube 50 extending from the furnace opening passes through the second clearance opening 312 and extends downwards. The shape formed by the groove wall of the mounting groove is adapted to the outer contour shape of the protruding structure 21. When the protruding structure 21 is accommodated within the mounting groove, the groove wall of the mounting groove and the circumferential outer wall of the protruding structure 21 are fitted together or have a clearance fit, thereby providing a certain degree of installation and positioning for the protruding structure 21. Furthermore, when the protruding structure 21 is accommodated within the aforementioned mounting groove, the portion of the bottom of the mounting groove surrounding the second clearance opening 312 (i.e., the portion of the bottom of the mounting groove excluding the second clearance opening 312) can contact the bottom surface of the protruding structure 21, thereby providing support for the protruding structure 21. Since the protruding structure 21 is annular, and the portion of the bottom of the mounting groove surrounding the second clearance opening 312 is also annular, their contact increases the contact area, thus making the support of the mounting groove for the protruding structure 21 more stable.

[0067] Furthermore, such as Figures 6 to 9 as well as Figures 16 to 18 As shown, in some embodiments, the middle portion of the support plate is recessed relative to its edge portion to form a recessed space, and the second clearance opening 312 and the mounting groove are located within the recessed space. Multiple height adjustment structures 32 are present, each engaging with the edge portion of the support plate, and are evenly arranged along the circumference of the furnace body 20. When the protruding structure 21 is installed in the mounting groove, the weight of the furnace body 20 is primarily applied to the middle portion of the support plate, and the stress point of the height adjustment structure 32 and the support plate is located at the edge portion of the support plate. Because the middle portion is recessed relative to the edge portion, the two are connected by a vertically extending cylindrical portion. During the height adjustment of the support plate, the middle portion may be adjusted to be substantially in contact with the first bearing plate 11 (e.g., ...). Figure 11 As shown in the diagram, there is still a certain distance between the edge of the support plate and the first support plate 11, which facilitates the design of the cooperation between the height adjustment structure 32 and the support plate. Furthermore, the evenly distributed arrangement of multiple height adjustment structures 32 along the circumference of the furnace body 20 allows for smoother raising and lowering of the support plate. Of course, it is understood that the specific form of the support plate is not limited to this; in other embodiments not shown in the diagram, the support plate may also be flat.

[0068] It should be noted that in the specific embodiment shown in the figure, the first annular plate 211 is disposed above the second annular plate 212, and the second annular plate 212 is housed in the mounting groove and is detachably connected to the mounting groove by fasteners such as screws. Furthermore, the support plate can be customized according to different models of vertical heat treatment equipment and different process requirements. For example, after the adjustment range of the height adjustment structure 32 is determined, the height difference between the middle part and the edge part of the support plate can be customized according to the different lengths of the furnace body 20, furnace tube 50, and bearing boat 80, thereby meeting the requirements for the adjustable height range of the furnace body 20; another example is that the shape and size of the mounting groove of the support plate can be customized according to different models of the second annular plate 212; yet another example is that, in order to ensure the reliability of the connection between the process pipeline and the pipeline joint 53, auxiliary fixing structures, such as fixing holes and fixing claws, can be provided on the support plate to auxiliaryly fix the process pipeline.

[0069] Furthermore, it can be understood that the specific form of the protruding structure mounting position 311 is not limited to the aforementioned mounting groove. In other embodiments not shown in the figures, the protruding structure mounting position 311 can also be in other forms. For example, the support plate may not have a mounting groove, but the support plate may divide a certain area that can fit against the bottom surface of the protruding structure 21. This area can also serve as the protruding structure mounting position 311. In addition, the first support structure 31 is not limited to a support plate. In other embodiments not shown in the figures, the first support structure 31 may also include multiple circumferentially spaced and evenly distributed support blocks. The multiple support blocks are all fixed on a base, and the height adjustment structure 32 is used to drive the base to rise and fall. The multiple support blocks are used together to support the protruding structure 21 and the furnace body 20.

[0070] like Figures 6 to 8 , Figure 11 , Figure 14 as well as Figures 16 to 18 As shown, in some embodiments, the vertical heat treatment equipment further includes a height measuring structure 40. The height measuring structure 40 is used to measure the height of the furnace body 20 relative to the first support plate 11 and / or the difference in height of the furnace body 20 before and after adjustment. This makes the adjustment process of the furnace body 20's height position more intuitive, facilitating the accurate adjustment of the furnace body 20 to the desired position. It should be noted that the specific type of the height measuring structure 40 is not limited; it can be any structure capable of measuring the real-time height position of the furnace body 20.

[0071] For example, in the specific embodiment shown in the figure, the height measuring structure 40 includes a cooperating measuring element 41 and an indicator 42. The measuring element 41 is disposed on the first support plate 11, and the indicator 42 is disposed on the first support structure 31 and / or the protruding structure 21. The installation of the measuring element 41 and the indicator 42 needs to ensure as precise an installation as possible. The measuring element 41 typically has a scale, and the indicator 42 moves up and down as the height of the furnace body 20 changes. The height value of the furnace body 20 relative to the first support plate 11 is determined by the specific position of the scale of the measuring element 41 indicated by the indicator 42. The difference in height of the furnace body 20 before and after the adjustment is determined by the two positions of the scale of the measuring element 41 indicated by the indicator 42 before and after the height adjustment of the furnace body 20. Preferably, the height measuring structure 40 is a vernier caliper, the measuring element 41 is the main scale of the vernier caliper, and the indicator 42 is the vernier scale of the vernier caliper. Of course, it is understood that in other embodiments not shown in the figure, the height measuring structure 40 can also be an infrared ranging device, a laser ranging device, etc.

[0072] like Figures 6 to 9 as well as Figures 16 to 20 As shown, in some embodiments, the first support structure 31 has a through hole 313. The height adjustment structure 32 includes a base 321, a rotating member 322, and a support member 323. The base 321 is detachably mounted on the first support plate 11 by fasteners such as screws. Preferably, there can be multiple fasteners to connect the base 321 to the first support plate 11, thereby ensuring the installation strength and reliability of the height adjustment structure 32. The first end of the rotating member 322 is rotatably mounted on the base 321, and the second end of the rotating member 322 protrudes upward through the through hole 313. The support member 323 is sleeved on the rotating member 322, and the support member 323 abuts against the bottom surface of the first support structure 31. The support member 323 and the rotating member 322 are threaded together. By rotating the rotating member 322, the support member 323 and the first support structure 31 are moved vertically, thereby adjusting the height position of the first support structure 31 relative to the first support plate 11, and thus realizing the height adjustment of the furnace body 20.

[0073] Since the total weight of the furnace body 20 and the protruding structure 21 is relatively large, and both weights are applied to the first supporting structure 31, if the rotating component 322 and the base 321 adopt a sliding fit, the rotational resistance torque of the rotating component 322 during rotation will be large, making height adjustment difficult. Therefore, to solve this problem, in some embodiments, a thrust bearing 324 is provided between the first end of the rotating component 322 and the base 321, and the first end of the rotating component 322 is mounted in the base 321 through the thrust bearing 324. The thrust bearing 324 can withstand axial loads. Using the thrust bearing 324 as the rotational support of the rotating component 322 can change the sliding fit into a rolling fit, effectively reducing the rotational resistance torque of the rotating component 322 during rotation, thereby making the height adjustment operation of the furnace body 20 easier and facilitating rapid height adjustment of the furnace body 20.

[0074] Furthermore, such as Figures 16 to 20 As shown, the rotating component 322 is threadedly engaged with the wall of the through hole 313. Rotating the rotating component 322 directly drives the first support structure 31 to move vertically. Additionally, when the rotating component 322 is rotated, the support component 323, which abuts against the bottom surface of the first support structure 31, also moves vertically. When the rotating component 322 stops rotating, the support component 323 abuts against the bottom surface of the first support structure 31, thus providing support for the first support structure 31.

[0075] In the specific embodiment shown in the figure, the second end of the rotating member 322 has a plurality of clamping surfaces 3221 connected sequentially along the circumference of the rotating member 322, wherein at least two clamping surfaces 3221 are symmetrically arranged and parallel to each other. Preferably, there are four clamping surfaces 3221, and the four clamping surfaces 3221 are parallel to each other in pairs, in which case the second end of the rotating member 322 forms a square column head. The operator can rotate the rotating member 322 by clamping two parallel clamping surfaces 3221 with a tool, making the operation more convenient.

[0076] In addition, the support member 323 includes a first nut 3231 and a second nut 3232 fitted onto the rotating member 322 from top to bottom. The first nut 3231 and the second nut 3232 are in close contact with each other, and the first nut 3231 is in close contact with the bottom surface of the first supporting structure 31. That is to say, the support member 323 is a double-nut structure with friction anti-loosening function, thereby preventing the support member 323 from loosening due to vibration generated during equipment operation, and thus avoiding changes in the height of the first supporting structure 31 and the furnace body 20.

[0077] It should be noted that in other embodiments not shown in the figure, the through hole 313 may not have threads, in which case the rotating member 322 simply passes through the through hole 313. Since the support member 323 abuts against the bottom surface of the first support structure 31, the support member 323 is pressed under the gravity of the first support structure 31 and the furnace body 20 on it. In this case, if the rotating member 322 rotates, it can also drive the support member 323 to move up and down, and the support member 323 supports the first support structure 31 so that it moves up and down accordingly.

[0078] like Figures 6 to 15 As shown, in some embodiments, the vertical heat treatment equipment further includes a mounting assembly 60, through which the furnace tube 50 is detachably mounted to the first support plate 11. The mounting assembly 60 is detachable from both the furnace tube 50 and the first support plate 11; that is, the mounting assembly 60 can be removed from the furnace tube 50 and the first support plate 11 for replacement. In some embodiments, the mounting assembly 60 may have different specifications, such as the dimensions of certain components within the mounting assembly 60, and these different specifications can be adapted to different lengths of the portion of the furnace tube 50 extending out of the furnace body 20.

[0079] When it is necessary to increase the length of the support boat 80, the height of the furnace body 20 is adjusted by the adjustment mechanism 30 to raise it to a certain height. At the same time, an insulation sleeve 70 of appropriate length is selected and fitted onto the part of the furnace tube 50 that extends out of the furnace body 20. At the same time, an installation component 60 of appropriate specification (i.e., an installation component 60 of specification that matches the length of the part of the furnace tube 50 that extends out of the furnace body 20) is also selected to install the furnace tube 50 onto the first support plate 11 to ensure the reliable installation of the furnace tube 50.

[0080] Specifically, such as Figures 6 to 15As shown, in some embodiments, the mounting assembly 60 includes a second support structure 61 and multiple lifting components 62. The bottom of the furnace tube 50 is disposed on the second support structure 61, and the multiple lifting components 62 are evenly arranged along the circumference of the furnace tube 50. The first end of each lifting component 62 is detachably connected to the first support structure 31 and / or the protruding structure 21, and the second end of each lifting component 62 is detachably connected to the second support structure 61. When the height of the furnace body 20 is adjusted to the correct position, the second support structure 61 can be fixed to a certain height position by the multiple lifting components 62, and the bottom of the furnace tube 50 is supported by the second support structure 61, thereby fixing the relative position of the furnace tube 50 and the furnace body 20. Since the second support structure 61 is mounted on the first support structure 31 and / or the protruding structure 21 through the lifting components 62, and the first support structure 31 and the protruding structure 21 are mounted on the first bearing plate 11, it can be considered that the furnace tube 50 is mounted on the first bearing plate 11 through the mounting assembly 60. Preferably, the second support structure 61 is a support ring, and the bottom end face of the furnace tube 50 is supported on the support ring. The inner ring space of the support ring is aligned with the tube opening 52 of the furnace tube 50 in the vertical direction.

[0081] The specifications of the installation component 60 mainly refer to the length of the lifting component 62. When the length of the support boat 80 increases, the height of the furnace body 20 is adjusted by the adjustment mechanism 30 to raise it to a certain height. A lifting component 62 of appropriate length is then selected and connected to the second support structure 61 to install the furnace tube 50 onto the first support plate 11, thereby ensuring the reliable installation of the furnace tube 50. Additionally, it should be noted that in some embodiments, the insulation sleeve 70 can be fixed to the furnace tube 50 by binding it with flexible components such as ropes. In this case, only an appropriate length of insulation sleeve 70 needs to be selected based on the length of the support boat 80 and the degree of elevation of the furnace body 20, and it can be fixed to the furnace tube 50 by binding it with flexible components. There is no need to consider the connection between the insulation sleeve 70 and components such as the first support plate 11.

[0082] It should be noted that the specific structure of the mounting component 60 is not limited. In other embodiments not shown in the figure, the mounting component 60 may also adopt other structures that enable a detachable connection between the furnace tube 50 and the first support plate 11. Furthermore, depending on the specific structure of the mounting component 60 and the different installation methods of the furnace tube 50 and the first support plate 11, in some embodiments, the mounting component 60 may not need to be changed when the length of the support boat 80 and the height of the furnace body 20 change. For example, assuming the distance between the tube opening 52 of the furnace tube 50 and the first support plate 11 remains constant, the mounting component 60 still adopts the form of the second support structure 61 and the lifting component 62, but the lifting component 62 is directly connected to the first support plate 11. In this case, regardless of how the length of the support boat 80 and the height of the furnace body 20 change, the positional relationship between the second support structure 61 and the first support plate 11 remains unchanged, and the lifting component 62 does not need to be changed. The same mounting component 60 can be used to install the furnace tube 50 under different conditions for different lengths of support boats 80.

[0083] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A vertical heat treatment device, characterized in that, include: A chassis, wherein a first support plate is provided inside the chassis, the first support plate divides the internal space of the chassis into a receiving cavity and a loading cavity arranged sequentially from top to bottom, and the first support plate has a first clearance opening, the first clearance opening connecting the receiving cavity and the loading cavity; The furnace body and adjustment mechanism are provided. The furnace body is located entirely within the accommodating cavity. The furnace body is height-adjustably mounted on the first support plate via the adjustment mechanism. The bottom of the furnace body has a furnace opening. A furnace tube and an insulation sleeve are provided. The furnace tube is disposed within the furnace body, with its bottom extending downwards from the furnace opening and extending through the first clearance opening into the loading cavity. The furnace tube is detachably mounted on the first support plate. The portion of the furnace tube extending beyond the furnace body is entirely detachably fitted with the insulation sleeve. The internal space of the furnace tube forms a process cavity, and the bottom of the furnace tube has a pipe opening. After the height of the furnace body is adjusted by the adjustment mechanism, the vertical distance between the pipe opening and the first support plate remains unchanged, and the length of the insulation sleeve is adapted to the length of the part of the furnace tube extending out of the furnace body; The carrier boat is used to carry the workpiece to be processed. The carrier boat can enter the process cavity from the loading cavity through the pipe, and the entire carrier boat is located inside the process cavity.

2. The vertical heat treatment equipment according to claim 1, characterized in that, The process chamber includes a heating zone located inside the furnace body. The carrier boat includes a support portion, on which the workpiece to be processed is placed. The vertical heat treatment equipment further includes a lifting mechanism that cooperates with the carrier boat to allow the carrier boat to rise from an initial position within the loading chamber, through the pipe opening, to a process position where the entire carrier boat is located within the process chamber. When the carrier boat is in the initial position, the top of the carrier boat is lower than the furnace tube; when the carrier boat is in the process position, the entire carrier part is located within the heating zone.

3. The vertical heat treatment equipment according to claim 2, characterized in that, The process cavity also includes a non-heated area located inside the insulation sleeve. The carrier boat also includes a non-load-bearing portion located below and adjacent to the load-bearing portion. The lifting mechanism includes a second load-bearing plate and a driving structure. The second load-bearing plate supports the carrier boat, and the driving structure drives the second load-bearing plate to rise and fall, thereby driving the carrier boat to rise and fall. When the carrier boat rises to the process position, the second load-bearing plate blocks the pipe opening, and the carrier boat fills the process cavity. If the furnace body is adjusted to its minimum height by the adjustment mechanism, when the supporting boat is in the process position, a portion of the non-supporting part near the supporting part is located within the heating zone. If the furnace body is adjusted to its maximum height by the adjustment mechanism, when the supporting boat is in the process position, the entire non-supporting part is located within the non-heating zone.

4. The vertical heat treatment equipment according to any one of claims 1 to 3, characterized in that, The furnace body has a protruding structure at its bottom edge, which protrudes outward along the radial direction of the furnace body. The adjustment mechanism includes a first support structure and a height adjustment structure. The first support structure has a protruding structure mounting position, and the protruding structure is detachably connected to the protruding structure mounting position. The height adjustment structure is detachably mounted on the first support plate, and the height adjustment structure cooperates with the first support structure to adjust the height of the first support structure.

5. The vertical heat treatment equipment according to claim 4, characterized in that, The protruding structure extends circumferentially around the furnace body. The first supporting structure includes a supporting plate with a second clearance opening. The mounting position of the protruding structure includes a mounting groove. The second clearance opening is located at the bottom of the mounting groove. The shape formed by the groove wall of the mounting groove is adapted to the outer contour shape of the protruding structure. The protruding structure is accommodated and connected within the mounting groove. The furnace opening corresponds to the second clearance opening in the vertical direction so that the furnace tube extending from the furnace opening can pass through the second clearance opening.

6. The vertical heat treatment equipment according to claim 5, characterized in that, The middle part of the support plate is recessed relative to its edge to form a recessed space. The second clearance opening and the mounting groove are located in the recessed space. There are multiple height adjustment structures, which cooperate with the edge of the support plate and are evenly arranged along the circumference of the furnace body.

7. The vertical heat treatment equipment according to claim 4, characterized in that, It also includes a height measuring structure for measuring the height of the furnace body relative to the first support plate and / or the difference in height of the furnace body before and after adjustment. The height measuring structure includes a measuring element and an indicator, the measuring element being disposed on the first support plate and the indicator being disposed on the first support structure and / or the protruding structure.

8. The vertical heat treatment equipment according to claim 4, characterized in that, The first support structure has a through hole. The height adjustment structure includes a base, a rotating component, and a support component. The base is mounted on the first bearing plate. The first end of the rotating component is rotatably mounted on the base. The second end of the rotating component protrudes upward through the through hole. The support component is sleeved on the rotating component and abuts against the bottom surface of the first support structure. The support component and the rotating component are threaded together. Rotating the rotating component causes the support component and the first support structure to move vertically. A thrust bearing is provided between the first end of the rotating component and the base.

9. The vertical heat treatment equipment according to claim 8, characterized in that, The rotating component is threadedly engaged with the wall of the through hole, and rotating the rotating component can directly drive the first supporting structure to move vertically; and / or, The support member includes a first nut and a second nut fitted onto the rotating member from top to bottom, the first nut and the second nut being in contact with each other, and the first nut being in contact with the bottom surface of the first supporting structure; and / or, The second end of the rotating member has a plurality of clamping surfaces connected sequentially along the circumference of the rotating member, wherein at least two of the clamping surfaces are symmetrically arranged and parallel to each other.

10. The vertical heat treatment equipment according to claim 4, characterized in that, It also includes an installation assembly, through which the furnace tube is installed on the first support plate. The installation assembly includes a second support structure and a plurality of lifting components. The bottom of the furnace tube is disposed on the second support structure. The plurality of lifting components are evenly arranged along the circumference of the furnace tube. The first end of each lifting component is detachably connected to the first support structure and / or the protruding structure, and the second end of each lifting component is detachably connected to the second support structure.

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