Display substrate, method for manufacturing display substrate, and display device

Abstract

The present application provides a display substrate, a method for manufacturing a display substrate, and a display device, wherein the display substrate includes a base substrate and a plurality of power lines arranged on the base substrate, wherein the power lines extend from the display area to the non-display area of ​​the display substrate, and the power lines include: a first metal layer, arranged on the base substrate; a first spacer layer, wherein the first spacer layer has a first concave-convex surface including a plurality of first grooves on a side facing away from the base substrate, and the first metal layer is partially exposed in the second grooves; a second metal layer, covering the first concave-convex surface, and the second metal layer covers the surface of the first metal layer in the first grooves. The power lines of the display substrate of the present application increase the cross-sectional area of ​​the second metal layer by setting the first spacer layer, which is beneficial to reduce the voltage drop of the power lines, thereby improving the display quality of the display substrate.

Description

Technical Field

[0001] The present application relates to the technical field of display devices, and in particular to a display substrate, a method for manufacturing a display substrate, and a display device. Background Art

[0002] In order to achieve a higher screen-to-body ratio, narrow borders have become an inevitable trend. However, as the border space is compressed, the improvement of mask accuracy and the reduction of shadows in the display substrate preparation process are becoming more and more bottlenecks. When the border is further reduced, the line width of the VSS power line can be reduced to a certain extent through circuit layout optimization to adapt to the narrow border. Under the existing architecture, as the line width connecting the VSS power line is reduced, the line resistance increases, the IR drop increases, and the display quality and power consumption are affected. Summary of the invention

[0003] The present application provides a display substrate, a method for manufacturing the display substrate, and a display device to solve the problem of large power wiring resistance.

[0004] In one aspect, the present application provides a display substrate, comprising a base substrate and a plurality of power supply lines arranged on the base substrate, wherein the power supply lines extend from a display area to a non-display area of ​​the display substrate, and the power supply lines include:

[0005] A first metal layer is disposed on the base substrate;

[0006] A first spacer layer, wherein a surface of the first spacer layer facing away from the base substrate is a first concave-convex surface including a plurality of first grooves, and a portion of the first metal layer is exposed in the second grooves;

[0007] The second metal layer covers the first concave-convex surface, and the second metal layer covers the surface of the first metal layer in the first groove.

[0008] In a possible implementation of the present application, the power supply wiring includes:

[0009] A second spacer layer is disposed between the base substrate and the second metal layer, wherein a surface of the second spacer layer facing the first metal layer is a second concave-convex surface including a plurality of second grooves;

[0010] The substrate base portion is exposed in the second groove;

[0011] The second metal layer covers the second concave-convex surface, and the second metal layer covers the surface of the base substrate in the second groove.

[0012] In a possible implementation of the present application, the first spacer layer further includes a plurality of first protrusions, and two adjacent first protrusions are arranged at intervals to form a side wall of the first groove;

[0013] The second spacer layer further includes a plurality of second protrusions, and two adjacent second protrusions are arranged at intervals to form a side wall of the second groove;

[0014] The orthographic projection of the first protrusion on the base substrate and the orthographic projection of the second protrusion on the base substrate are staggered with each other.

[0015] In a possible implementation of the present application, the first spacer layer is made of an insulating material, and the second spacer layer is made of an insulating material or a metal material.

[0016] In a possible implementation of the present application, the substrate includes a flexible substrate and an insulating layer disposed in sequence, and the insulating layer is partially exposed in the second groove.

[0017] In a possible implementation of the present application, the width of the first protrusion is smaller than the width of the second protrusion.

[0018] In a possible implementation of the present application, the display substrate includes a thin film transistor located in a display area, and the thin film transistor includes an active layer, a gate layer, and a source-drain layer arranged in sequence;

[0019] The first metal layer and the source and drain electrode layer are arranged in the same layer.

[0020] On the other hand, the present application also provides a method for manufacturing a display substrate, for forming a plurality of power supply lines extending from a display area to a non-display area of ​​the display substrate, the method comprising:

[0021] forming a first metal layer on the base substrate;

[0022] forming a first spacer layer on the first metal layer;

[0023] Etching a surface of the first spacer layer facing away from the first metal layer to form a first concave-convex surface including a plurality of first grooves, so that a portion of the first metal layer is exposed in the second grooves;

[0024] A second metal layer is formed on the first concave-convex surface, so that the second metal layer is formed on the surface of the first metal layer in the first groove.

[0025] In a possible implementation of the present application, the step of forming a first metal layer on the base substrate includes:

[0026] forming a second spacer layer on the base substrate;

[0027] Etching a side of the second spacer layer facing the first metal layer to form a second concave-convex surface including a plurality of second grooves;

[0028] The first metal layer is formed on the second concave-convex surface.

[0029] On the other hand, the present application also provides a display device, comprising the display substrate.

[0030] The present application provides a display substrate, a method for manufacturing a display substrate, and a display device. A first spacer layer is arranged between a first metal layer and a second metal layer, and a first concave-convex surface with a plurality of first grooves is arranged on a side of the first spacer layer facing away from the base substrate. When the second metal layer covers the first concave-convex surface, since the surface area of ​​the second metal layer is larger than the area of ​​the orthographic projection of the second metal layer on the base substrate, the cross-sectional area of ​​the second metal layer can be increased under the premise that the area of ​​the orthographic projection of the pattern of the second metal layer on the base substrate is constant, that is, the cross-sectional area of ​​the power supply line can be increased, which is beneficial to reducing the resistance of the power supply line. The first metal layer is partially exposed in the second groove, so that the second metal layer covers the surface of the first metal layer in the first groove, so that a parallel structure is formed between the first metal layer and the second metal layer, further reducing the resistance of the power supply line. The power supply line on the display substrate of the present application is beneficial to reducing the voltage drop of the line, thereby improving the display quality of the display substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0032] Figure 1 A schematic diagram of the structure of a display substrate provided in an embodiment of the present application.

[0033] Figure 2 A schematic structural diagram of the first spacer layer of the display substrate provided in an embodiment of the present application.

[0034] Figure 3 A schematic structural diagram of a display substrate provided in yet another embodiment of the present application.

[0035] Figure 4 A schematic structural diagram of the second spacer layer of the display substrate provided in an embodiment of the present application.

[0036] Figure 5 A schematic structural diagram of a base substrate of a display substrate provided in an embodiment of the present application.

[0037] Figure 6A schematic diagram of the structure of a thin film transistor of a display substrate provided in an embodiment of the present application.

[0038] Figure 7 A schematic flow chart of a method for manufacturing a display substrate provided in an embodiment of the present application.

[0039] Figure 8 A schematic flow chart of a method S100 for manufacturing a display substrate provided in an embodiment of the present application. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0041] In the description of the present application, it should be understood that the features of the terms "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present application, "multiple" means two or more, unless otherwise clearly and specifically defined. It should be noted that, unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be directly connected or indirectly connected through an intermediate medium. It can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0042] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the various specific processes and material examples provided by the present application, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0043] The embodiments of the present application provide a display substrate, a method for manufacturing the display substrate, and a display device, which are described in detail below.

[0044] Please refer to Figure 1-Figure 6The embodiment of the present application provides a display substrate, which may be an OLED display substrate, a liquid crystal display substrate, or a Mini LED display substrate, etc., and is not specifically limited here. The display substrate of the embodiment of the present application includes a base substrate 10 and a plurality of power lines arranged on the base substrate 10. Taking the power line as a VSS line as an example, the power line extends from the display area 101 of the display substrate to the non-display area 102, and the power line includes a first metal layer 20, a first spacer layer 30, and a second metal layer 40.

[0045] The first metal layer 20 is disposed on the base substrate 10 .

[0046] Combination Figure 1 and Figure 2 As shown, the side of the first spacer layer 30 facing away from the base substrate 10 is a first concave-convex surface 301 including a plurality of first grooves 302, and the first metal layer 20 is partially exposed in the second groove 502. The first spacer layer 30 is formed between the first metal layer 20 and the second metal layer 40, and is used to increase the surface area of ​​the second metal layer 40. Since the surface area of ​​the second metal layer 40 is larger than the area of ​​the orthographic projection of the second metal layer 40 on the base substrate 10, the cross-sectional area of ​​the second metal layer 40 can be increased under the premise that the area of ​​the orthographic projection of the pattern of the second metal layer 40 on the base substrate 10 is constant, that is, the cross-sectional area of ​​the power supply line can be increased.

[0047] The second metal layer 40 covers the first concavoconvex surface 301 and covers the surface of the first metal layer 20 in the first groove 302. The first metal layer 20 and the second metal layer 40 enable the power line VSS of this embodiment to form a dual metal parallel structure.

[0048] The display substrate of the embodiment of the present application is provided with a first spacer layer 30 between the first metal layer 20 and the second metal layer 40, and a side of the first spacer layer 30 facing away from the base substrate 10 is provided as a first concave-convex surface 301 with a plurality of first grooves 302, so that when the second metal layer 40 covers on the first concave-convex surface 301, since the surface area of ​​the second metal layer 40 is larger than the area of ​​the orthographic projection of the second metal layer 40 on the base substrate 10, under the premise that the area of ​​the orthographic projection of the pattern of the second metal layer 40 on the base substrate 10 is constant, the cross-sectional area of ​​the second metal layer 40 can be increased, that is, the cross-sectional area of ​​the power line can be increased, which is beneficial to reduce the resistance of the power line, and the first metal layer 20 is partially exposed in the second groove 502, so that the second metal layer 40 covers the surface of the first metal layer 20 in the first groove 302, so that a parallel structure is formed between the first metal layer 20 and the second metal layer 40, further reducing the resistance of the power line, and the power line on the display substrate of the present application is beneficial to reduce the line voltage drop, thereby improving the display quality of the display substrate.

[0049] In some embodiments, the power supply line further includes a second spacer layer 50. The second spacer layer 50 is formed between the first metal layer 20 and the base substrate 10, and is used to increase the cross-sectional area of ​​the first metal layer 20. Since the surface area of ​​the first metal layer 20 is larger than the area of ​​the orthographic projection of the first metal layer 20 on the base substrate 10, the cross-sectional area of ​​the first metal layer 20 can be increased under the premise that the area of ​​the orthographic projection of the pattern of the first metal layer 20 on the base substrate 10 is constant, that is, the cross-sectional area of ​​the power supply line can be further increased.

[0050] Combination Figure 3 and Figure 4 As shown, the second spacer layer 50 is disposed between the base substrate 10 and the second metal layer 40 , and a surface of the second spacer layer 50 facing the first metal layer 20 is a second concave-convex surface 501 including a plurality of second grooves 502 .

[0051] The base substrate 10 is partially exposed in the second groove 502 , the second metal layer 40 covers the second concavo-convex surface 501 , and the second metal layer 40 covers the surface of the base substrate 10 in the second groove 502 .

[0052] In the implementation of the present application, a second spacer layer 50 is set between the first metal layer 20 and the base substrate 10, and a side of the second spacer layer 50 facing the first metal layer 20 is set as a second concave-convex surface 501 with multiple second grooves 502, so that when the first metal layer 20 covers the second concave-convex surface 501, the cross-sectional area of ​​the first metal layer 20 can be increased, thereby further reducing the resistance of the power line, which is beneficial to further reduce the line voltage drop of the power line, thereby better improving the display quality of the display substrate.

[0053] In some embodiments, the first spacer layer 30 is made of an organic insulating material, and the second spacer layer 50 is made of an insulating material or a metal material. Specifically, the first spacer layer 30 can be made of an organic insulating material, which can include general general polymers such as polymethyl methacrylate (PMMA: Polymethylmethacrylate) or polystyrene (PS: Polystylene), polymer derivatives with phenolic groups, acrylic polymers, imide polymers, aromatic ether polymers, amide polymers, fluorine polymers, paraxylene polymers, vinyl alcohol polymers, and blends thereof. Since the thickness of the organic insulating material is greater than that of the inorganic insulating material, by making the first spacer layer 30 of an organic insulating material, the first spacer layer 30 is formed to be thicker, thereby further increasing the cross-sectional area of ​​the second metal layer 40, thereby further reducing the resistance of the power supply line.

[0054] In some embodiments, in combination Figure 2 and Figure 4 As shown, the first spacer layer 30 further includes a plurality of first protrusions 31, and two adjacent first protrusions 31 are arranged at intervals to form the sidewalls of the first groove 302. The second spacer layer 50 further includes a plurality of second protrusions 51, and two adjacent second protrusions 51 are arranged at intervals to form the sidewalls of the second groove 502. The widths of the first protrusions 31 and the second protrusions 51 may be the same or different, and are not specifically limited here.

[0055] The orthographic projection of the first protrusion 31 on the base substrate 10 and the orthographic projection of the second protrusion 51 on the base substrate 10 are mutually offset. In the present embodiment, since the first metal layer 20 is made by physical vapor deposition (PVD) to form a uniform film thickness, and since the first metal layer 20 is formed on the second protrusion 51, when the film thickness of the first metal layer 20 is uniform, the side of the first metal layer 20 facing the first spacer layer 30 will also form a corresponding concave-convex surface structure, and the first spacer layer 30 is made of organic insulating material and formed by a coating process. At this time, the side of the first spacer layer 30 facing the second metal layer 40 is a flat surface, that is, the thickness of the part of the first spacer layer 30 corresponding to the second groove 502 is relatively thick. By offsetting the first protrusion 31 and the second protrusion 51, the depth of the second groove 502 can be made shallow when etching to form the second groove 502, that is, there is no need for an excessively deep groove, which is conducive to saving processes and improving manufacturing yield.

[0056] In some embodiments, in combination Figure 5 and Figure 6 As shown, the substrate 10 includes a flexible substrate 11 and an insulating layer 12 disposed on the flexible substrate 11 in sequence, and the insulating layer 12 is partially exposed in the second groove 502, so that the first metal layer 20 covers the surface of the insulating layer 12 in the second groove 502. The setting of the insulating layer 12 can prevent water vapor from entering from the flexible substrate 11 to corrode the first metal layer 20, which is beneficial to prolong the service life of the power supply line. Among them, the insulating layer 12 can be a single-layer insulating layer 12 or a multi-layer insulating layer 12. Exemplarily, the insulating layer 12 can be arranged in the same layer as at least one of the insulating layers 12 such as the buffer layer (Buffer) 113, the gate insulating layer 115, and the interlayer dielectric layer 117 (ILD). The insulating layer 12 can be made of inorganic materials such as silicon oxide or silicon nitride, and no specific restrictions are made here.

[0057] In some embodiments, please refer to Figure 6The display substrate includes a thin film transistor 100 located in a display area 101, and the thin film transistor 100 includes an active layer 114, a gate layer 116, and a source-drain electrode layer 118 arranged in sequence from bottom to top. Specifically, the display substrate is provided with a light shielding layer 112, a buffer layer (Buffer) 113, an active layer 114, a gate insulating layer 115, a gate layer 116, an interlayer dielectric layer (ILD) 117, a source-drain electrode layer 118, a first flat layer 119, and a second flat layer 120 in sequence from bottom to top on a flexible substrate 11. The first metal layer 20 and the source-drain electrode layer 118 are arranged in the same layer, that is, the first metal layer 20 and the source-drain electrode layer 118 are formed in the same film layer using the same material in the same process. Among them, the first metal layer 20 and the source-drain electrode layer 118 can be made of one of metals such as molybdenum, titanium, aluminum, aluminum-nickel alloy, molybdenum-tungsten alloy, chromium, copper, or titanium-aluminum alloy, or a combination of the above-mentioned metal materials. Exemplarily, the material of the first metal layer 20 is a titanium-aluminum-titanium (Ti-Al-Ti) metal stacked structure. The first metal layer 20 and the source-drain electrode layer 118 are arranged in the same layer, which is conducive to saving manufacturing processes. In addition, the first metal layer 20 and the second metal layer 40 can also be made of the same metal material.

[0058] Among them, when the second spacer layer 50 is made of insulating material, the second spacer layer 50 can be set in the same layer as the interlayer dielectric layer (ILD) 117. When the second spacer layer 50 is made of metal material, the second spacer layer 50 can be set in the same layer as the gate layer 116, which can be beneficial to further save manufacturing processes and reduce manufacturing costs.

[0059] In some embodiments, the display substrate further includes a planarization layer, wherein the planarization layer may be a double-layer planarization layer structure. Exemplarily, the double-layer planarization layer structure may include a first planarization layer 119 and a second planarization layer 120, wherein the first planarization layer 119 is disposed on the surface of the source-drain electrode layer 118, and specifically, the first spacer layer 30 may be disposed on the same layer as either the first planarization layer 119 or the second planarization layer 120, thereby facilitating the saving of manufacturing processes.

[0060] On the other hand, in order to better implement the display substrate of the present application, please refer to Figure 7 The present application also provides a method for manufacturing a display substrate, which is used to form a plurality of power supply lines extending from a display area 101 to a non-display area 102 of the display substrate, and the method includes the following steps S100-S400:

[0061] S100 , forming a first metal layer 20 on a base substrate 10 .

[0062] S200, forming a first spacer layer 30 on the first metal layer 20. The first spacer layer 30 may be made of an organic insulating material.

[0063] S300 , etching the side of the first spacer layer 30 facing away from the first metal layer 20 to form a first concave-convex surface 301 including a plurality of first grooves 302 , so that a portion of the first metal layer 20 is exposed in the second grooves 502 .

[0064] The first spacer layer 30 is etched to form a plurality of first protrusions 31 , and the plurality of protrusions 31 are arranged at intervals to form a first concave-convex surface 301 with a plurality of first grooves 302 .

[0065] S400, forming a second metal layer 40 on the first concave-convex surface 301, so that the second metal layer 40 is formed on the surface of the first metal layer 20 in the first groove 302. The first metal layer 20 and the second metal layer 40 can be formed by physical vapor deposition (PVD) coating.

[0066] The manufacturing method of the display substrate provided in the embodiment of the present application is to set a first spacer layer 30 between the first metal layer 20 and the second metal layer 40, and set the side of the first spacer layer 30 facing away from the base substrate 10 as a first concave-convex surface 301 with multiple first grooves 302, so that when the second metal layer 40 covers the first concave-convex surface 301, since the surface area of ​​the second metal layer 40 is greater than the area of ​​the orthographic projection of the second metal layer 40 on the base substrate 10, under the premise that the area of ​​the orthographic projection of the pattern of the second metal layer 40 on the base substrate 10 is constant, the cross-sectional area of ​​the second metal layer 40 can be increased, that is, the cross-sectional area of ​​the power line can be increased, which is beneficial to reduce the resistance of the power line, and the first metal layer 20 is partially exposed in the second groove 502, so that the second metal layer 40 covers the surface of the first metal layer 20 in the first groove 302, so that a parallel structure is formed between the first metal layer 20 and the second metal layer 40, and the resistance of the power line is further reduced. The power line on the display substrate of the present application is beneficial to reduce the line voltage drop, thereby improving the display quality of the display substrate.

[0067] Please refer to Figure 8 In some embodiments, step S100, forming a first metal layer 20 on the base substrate 10, specifically includes the following steps S101-S103:

[0068] S101, forming a second spacer layer 50 on the base substrate 10;

[0069] S102, etching the side of the second spacer layer 50 facing the first metal layer 20 to form a second concave-convex surface 501 including a plurality of second grooves 502;

[0070] S103 , forming a first metal layer 20 on the second concave-convex surface 501 .

[0071] In the implementation of the present application, a second spacer layer 50 is set between the first metal layer 20 and the base substrate 10, and a side of the second spacer layer 50 facing the first metal layer 20 is set as a second concave-convex surface 501 with multiple second grooves 502, so that when the first metal layer 20 covers the second concave-convex surface 501, the cross-sectional area of ​​the first metal layer 20 can be increased, thereby further reducing the resistance of the power line, which is beneficial to further reduce the line voltage drop of the power line, thereby better improving the display quality of the display substrate.

[0072] On the other hand, in order to better implement the display substrate of the present application, the present application also provides a display device, the display device comprising the display substrate. Since the display device has the above display substrate, it has all the same beneficial effects, and this embodiment will not be repeated here.

[0073] The embodiments of the present application do not impose any specific restrictions on the applicability of the display device, which can be a handheld device (smartphone, tablet computer, etc.), a wearable device (smart bracelet, wireless headset, smart watch, smart glasses, etc.), a vehicle-mounted device (navigation system, assisted reversing system, driving recorder, car refrigerator, etc.), a virtual reality device, an augmented reality device, a terminal device (Terminal Device), etc., without any restriction here.

[0074] In the above embodiments, the description of each embodiment has its own emphasis. For parts not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. In specific implementation, the above units or structures can be implemented as independent entities, or can be arbitrarily combined and implemented as the same or several entities. The specific implementation of the above units or structures can refer to the previous method embodiments, which will not be repeated here.

[0075] The above is a detailed introduction to a display substrate, a method for manufacturing a display substrate, and a display device provided in the embodiments of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the embodiments of the present application. The description of the above embodiments is only used to help understand the technical solutions and core ideas of the embodiments of the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A display substrate, characterized in that: The invention comprises a base substrate and a plurality of power supply lines arranged on the base substrate, wherein the power supply lines extend from a display area to a non-display area of ​​the display substrate, and the power supply lines include: A first metal layer is disposed on the base substrate; A first spacer layer, wherein a surface of the first spacer layer facing away from the base substrate is a first concave-convex surface including a plurality of first grooves, and a portion of the first metal layer is exposed in the first grooves; A second metal layer covers the first concave-convex surface, and the second metal layer covers the surface of the first metal layer in the first groove; The power supply routing includes: A second spacer layer is disposed between the base substrate and the second metal layer, wherein a surface of the second spacer layer facing the first metal layer is a second concave-convex surface including a plurality of second grooves; The substrate base portion is exposed in the second groove; The second metal layer covers the second concave-convex surface, and the second metal layer covers the surface of the base substrate in the second groove.

2. The display substrate according to claim 1, characterized in that: The first spacer layer is made of organic insulating material, and the second spacer layer is made of insulating material or metal material.

3. The display substrate according to claim 1, characterized in that: The first spacer layer further includes a plurality of first protrusions, and two adjacent first protrusions are arranged at intervals to form a side wall of the first groove; The second spacer layer further includes a plurality of second protrusions, and two adjacent second protrusions are arranged at intervals to form a side wall of the second groove; The orthographic projection of the first protrusion on the base substrate and the orthographic projection of the second protrusion on the base substrate are staggered with each other.

4. The display substrate according to claim 1, characterized in that: The base substrate includes a flexible substrate and an insulating layer arranged in sequence, and the insulating layer is partially exposed in the second groove.

5. The display substrate according to any one of claims 1 to 4, characterized in that: The display substrate comprises a thin film transistor located in the display area, and the thin film transistor comprises an active layer, a gate layer and a source-drain layer arranged in sequence; The first metal layer and the source and drain electrode layer are arranged in the same layer.

6. The display substrate according to claim 5, characterized in that: The display substrate further comprises: A planarization layer is arranged on the source and drain electrode layer, and the planarization layer and the first spacer layer are arranged in the same layer.

7. A method for manufacturing a display substrate, characterized in that: The method is used to form a plurality of power supply lines extending from a display area to a non-display area of ​​a display substrate, the method comprising: forming a first metal layer on the base substrate; forming a first spacer layer on the first metal layer; Etching a surface of the first spacer layer facing away from the first metal layer to form a first concave-convex surface including a plurality of first grooves, so that a portion of the first metal layer is exposed in the first grooves; forming a second metal layer on the first concave-convex surface, so that the second metal layer is formed on the surface of the first metal layer in the first groove; The step of forming a first metal layer on the substrate includes: forming a second spacer layer on the base substrate; Etching a side of the second spacer layer facing the first metal layer to form a second concave-convex surface including a plurality of second grooves; The first metal layer is formed on the second concave-convex surface.

8. A display device, characterized in that: The display substrate comprises the display substrate according to any one of claims 1 to 6.

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