A vacuum-sealed toroidal resonant chamber device

Abstract

The application provides a vacuum sealed annular resonant cavity device for converting incident fundamental frequency laser output into frequency-doubled laser, which is characterized by comprising a vacuum cavity including a main cavity, an upper cover plate and a threaded array bottom plate; a perspective window assembly arranged on the main cavity for allowing laser to enter or exit the vacuum cavity; and a laser processing part arranged in the vacuum cavity for converting the fundamental frequency laser into frequency-doubled laser, wherein the main cavity is a square cavity with one side open, the upper cover plate is arranged on the main cavity, the threaded array bottom plate is arranged inside the main cavity, the laser processing part is detachably mounted on the threaded array bottom plate, and the laser processing part comprises an incident coupling mirror assembly, a resonant mirror assembly, a fundamental frequency light mirror assembly, a crystal temperature control chamber assembly, an output coupling mirror assembly and a photosensitive detector assembly.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser technology, in particular to a vacuum sealed annular resonant cavity device. BACKGROUND

[0002] The annular resonant cavity frequency doubling technology is widely used as a mature technical solution. Whether the frequency doubling laser can be stably output depends on the mechanical stability of the annular resonant cavity and the anti-interference ability to the environment.

[0003] In the prior art, the conventional method for improving the two problems is to additionally provide an anti-interference shield outside the annular resonant cavity, but the additionally provided shield occupies a large space and is not convenient to use, and the effect achieved by this method is not ideal, and the frequency doubling laser is still easily affected by the fluctuations of temperature, air and noise, etc., which is not conducive to the stable output of the frequency doubling laser. SUMMARY

[0004] The present application is carried out to solve the above problems, and aims to provide a vacuum sealed annular resonant cavity device. To this end, the present application provides the following technical solutions:

[0005] The present application provides a vacuum sealed annular resonant cavity device for outputting incident fundamental frequency laser as frequency doubling laser, characterized in that it comprises: a vacuum cavity comprising a main cavity, an upper cover plate and a threaded array bottom plate; a perspective window assembly provided on the main cavity for laser to enter or exit the vacuum cavity; and a laser processing part provided in the vacuum cavity for outputting the fundamental frequency laser as frequency doubling laser, wherein the main cavity is a square cavity with one side open, the upper cover plate is provided on the main cavity, the threaded array bottom plate is provided inside the main cavity, the laser processing part is detachably mounted on the threaded array bottom plate, and comprises an incident coupling mirror assembly, a resonant mirror assembly, a fundamental frequency light mirror assembly, a crystal temperature control chamber assembly, an output coupling mirror assembly and a photosensitive detector assembly.

[0006] In the vacuum sealed annular resonant cavity device provided by the present application, the crystal temperature control chamber assembly can further have the following features: the crystal temperature control chamber assembly comprises a temperature control base, a refrigeration fin heat conduction bottom plate, a semiconductor refrigeration fin, a refrigeration fin heat conduction top plate, a temperature control chamber main body and a frequency doubling crystal, the refrigeration fin heat conduction bottom plate is detachably provided on the temperature control base, the lower surface of the semiconductor refrigeration fin is attached to the refrigeration fin heat conduction bottom plate, the upper surface is attached to the refrigeration fin heat conduction top plate, the temperature control chamber main body is a cavity with one side open, and the frequency doubling crystal is provided in the temperature control chamber main body.

[0007] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0008] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0009] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0010] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0011] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0012] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0013] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0014] In the vacuum sealed annular resonant cavity device provided by the application, the perspective window assembly can further comprise a sealing ring, a window lens and a window fixing plate, the sealing ring is arranged on the window lens, and the window fixing plate is used for fixing the window lens on the main cavity.

[0015] Effects and advantages of the application

[0016] The vacuum sealed annular resonant cavity device provided by the application comprises a vacuum cavity, a perspective window assembly and a laser processing part, and has the following effects:

[0017] The vacuum cavity comprises a main cavity, an upper cover plate and a threaded array bottom plate, the main cavity is a square cavity with one side open, the upper cover plate is arranged on the main cavity and can provide a sealed vacuum environment for the laser processing part, thereby reducing the interference of external factors and making the output frequency-doubled laser more stable. The threaded array bottom plate is arranged inside the main cavity and is used for mounting the laser processing part, can be connected with various components through threads, has a wide application range and can be flexibly disassembled and combined.

[0018] The perspective window assembly is arranged on the main cavity, and the laser can be shot into or out of the vacuum chamber, and the operator can observe the inside of the vacuum chamber through the window.

[0019] The laser processing part includes an incident coupling mirror assembly, a resonance mirror assembly, a fundamental light mirror assembly, a crystal temperature control chamber assembly, an output coupling mirror assembly, and a photosensitive detector assembly, which can output the incident fundamental laser as a frequency-doubled laser. The laser processing part is arranged in the vacuum chamber and is detachably mounted on the threaded array base plate, facilitating replacement and maintenance of the components. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a structural schematic diagram of a vacuum-sealed annular resonant cavity device in an embodiment of the present application.

[0021] Figure 2 is an assembly diagram of a vacuum-sealed annular resonant cavity device in an embodiment of the present application.

[0022] Figure 3 is a structural schematic diagram of a perspective window assembly in an embodiment of the present application.

[0023] Figure 4 is a structural schematic diagram of an incident coupling mirror assembly in an embodiment of the present application.

[0024] Figure 5 is a structural schematic diagram of a resonance mirror assembly in an embodiment of the present application.

[0025] Figure 6 is a structural schematic diagram of a fundamental light mirror assembly in an embodiment of the present application.

[0026] Figure 7 is a structural schematic diagram of a crystal temperature control chamber assembly in an embodiment of the present application.

[0027] Figure 8 is a structural schematic diagram of an output coupling mirror assembly in an embodiment of the present application.

[0028] Figure 9 is a structural schematic diagram of a photosensitive detector assembly in an embodiment of the present application. DETAILED DESCRIPTION

[0029] In order to make the technical means, creative features, purposes and effects of the present application easy to understand, the following embodiments will be described in detail in combination with the drawings.

[0030] <EMBODIMENT>

[0031] Figure 1 is a structural schematic diagram of a vacuum-sealed annular resonant cavity device in an embodiment of the present application. Figure 2is an assembly view of a vacuum-sealed annular resonant chamber device in an embodiment of the present application.

[0032] As shown in Figure 1 , 2 , the vacuum-sealed annular resonant chamber device 100 includes a vacuum chamber 10, a view window assembly 20, and a laser processing part 30.

[0033] The vacuum chamber 10 includes a main cavity 11, an upper cover plate 12, and a threaded array bottom plate 13. In this embodiment, the main cavity 11 is a square cavity with one side open, made of hard aluminum alloy by one-piece processing and molding. The main cavity 11 has a vacuum electrode interface 111. The upper cover plate 12 is installed on the main cavity 11 and has a quick-connect valve 121. The threaded array bottom plate 13 is installed inside the main cavity 11 by screws and is made of invar steel with a low expansion coefficient. The threaded array bottom plate 13 has a plurality of M3 threaded holes, and the distance between adjacent threaded holes is 12.5 mm. The vacuum chamber 10 also includes a gasket 14. The opening edge of the main cavity 11 has a groove, and the gasket 14 is arranged in the groove. The main cavity 11 and the upper cover plate 12 form a flat static seal.

[0034] Figure 3 is a structural schematic view of a view window assembly in an embodiment of the present application.

[0035] The view window assembly 20 is arranged on the main cavity 11 and is used for laser to enter or exit. As shown in Figure 3 , the view window assembly 20 includes a sealing ring 21, a window lens 22, and a window fixing plate 23. In this embodiment, two sealing rings 21 are arranged, one on each side of the window lens 22, and the window fixing plate 23 is used to fix the window lens 22 on the main cavity. The view window assembly 20 is arranged in three groups, namely a first view window assembly 201, a second view window assembly 202, and a third view window assembly 203, which are respectively installed on three sides of the main cavity 11. The first view window assembly 201 is used for the fundamental frequency laser to enter the vacuum chamber 10. The second view window assembly 202 is installed on the opposite side of the first view window assembly 201 and is used for the frequency-doubled laser to exit the vacuum chamber 10. The third view window assembly 203 is arranged between the first view window assembly 201 and the second view window assembly 202 and is used for the reflected fundamental frequency laser to output.

[0036] The laser processing part 30 is arranged inside the vacuum chamber 10 and is used to output the fundamental frequency laser as a frequency-doubled laser. The laser processing part 20 is detachably installed on the threaded array bottom plate 13 and includes an incident coupling mirror assembly 31, a resonant mirror assembly 32, a fundamental frequency light mirror assembly 33, a crystal temperature control chamber assembly 34, an output coupling mirror assembly 35, and a photosensitive detector assembly 36.

[0037] Figure 4is a structural schematic diagram of an incident coupling mirror assembly in an embodiment of the present application.

[0038] As shown in Figure 4 , the incident coupling mirror assembly 31 comprises an incident coupling mirror 311 and an incident coupling mirror base 312. The incident coupling mirror 311 is arranged on the incident coupling mirror base 312, and the incident coupling mirror base 312 is screwed with the threaded array base plate 13.

[0039] Figure 5 is a structural schematic diagram of a resonant mirror assembly in an embodiment of the present application.

[0040] As shown in Figure 5 , the resonant mirror assembly 32 comprises a resonant mirror 321, a resonant mirror base 322, a piezoelectric ceramic 323, and a piezoelectric ceramic base 324. The resonant mirror 321 is coaxially fixed and pasted on one side surface of the piezoelectric ceramic 323, and the other side surface of the piezoelectric ceramic 323 is coaxially fixed and pasted on the piezoelectric ceramic base 324. The resonant mirror 321, the piezoelectric ceramic 323, and the piezoelectric ceramic base 324 are installed on the threaded array base plate 13 through the resonant mirror base 322. The piezoelectric ceramic 323 is connected with the vacuum electrode interface 111 through a wire.

[0041] Figure 6 is a structural schematic diagram of a fundamental light mirror assembly in an embodiment of the present application.

[0042] As shown in Figure 6 , the fundamental light mirror assembly 33 comprises a fundamental light mirror 331 and a fundamental light mirror base 332. The fundamental light mirror 331 is fixed on the fundamental light mirror base 332, and the fundamental light mirror base 332 is installed on the threaded array base plate 13.

[0043] Figure 7 is a structural schematic diagram of a crystal temperature control chamber assembly in an embodiment of the present application.

[0044] As shown in Figure 7As shown, the crystal temperature control chamber assembly 34 includes a temperature control base 341, a cooling chip heat-conducting base plate 342, a semiconductor cooling chip 343, a cooling chip heat-conducting top plate 344, a temperature control chamber body 345, a frequency doubling crystal 346, a crystal positioning plate 347, and a temperature probe 348. The temperature control base 341 is mounted on the threaded array base plate 13, and the cooling chip heat-conducting base plate 342 is mounted on the temperature control base 341 by bolts. The lower surface of the semiconductor cooling chip 343 is bonded to the cooling chip heat-conducting base plate 342, and the upper surface is bonded to the cooling chip heat-conducting top plate 344. The temperature control chamber body 345 is a cavity with an opening on one side. The temperature control chamber body 345 includes a lower chamber 3451 and a pressure plate 3452. The lower chamber 3451 is mounted on the cooling chip heat-conducting top plate 344 by bolts, and the pressure plate 3452 is mounted on the lower chamber 3451 by bolts. The frequency doubling crystal 346 is disposed inside the temperature control chamber body 345 and is pressed and fixed by the crystal positioning plate 347. The temperature measuring probe 348 is disposed on the temperature control chamber body 345 and is connected to the vacuum electrode interface 111 via a wire.

[0045] Figure 8 This is a schematic diagram of the output coupling mirror assembly in an embodiment of the present invention.

[0046] like Figure 8 As shown, the output coupling mirror assembly 35 includes an output coupling mirror 351 and an output coupling mirror base 352. The output coupling mirror 351 is disposed on the output coupling mirror base 352, and the output coupling mirror base 352 is mounted on the threaded array base plate 13.

[0047] Figure 9 This is a schematic diagram of the structure of the photosensitive detector assembly in an embodiment of the present invention.

[0048] like Figure 9 As shown, the photodetector assembly 36 includes a photodetector 361 and a photodetector base 362. The photodetector 361 is mounted on the threaded array base plate 13 via the photodetector base 362, and the photodetector 361 is connected to the vacuum electrode interface 111 via wires.

[0049] The following is in conjunction with the appendix Figures 1 to 9 The following details the assembly and usage of the vacuum-sealed annular resonant cavity device 100 of the present invention:

[0050] Step 1: Install the components of the laser processing unit 30 to the appropriate positions on the threaded array base plate 13, fix the threaded array base plate 13 on the bottom surface inside the main cavity 11, and then connect the wires to the vacuum electrode interface 111.

[0051] Step 2: Cover the vacuum chamber 10 with the upper cover plate 12 to form a sealed space inside;

[0052] Step 3: The air inside the vacuum chamber 10 is extracted through the quick-connection valve 121.

[0053] Step 4: After the vacuum environment is formed inside the vacuum chamber 10, the incident fundamental frequency laser can be stabilized and output as a frequency-doubled laser.

[0054] Effects and advantages of the embodiment

[0055] The vacuum-sealed annular resonant chamber device of the embodiment includes a vacuum chamber, a perspective window assembly, and a laser processing part, which have the following effects:

[0056] The vacuum chamber includes a main cavity, an upper cover plate, and a threaded array bottom plate. The main cavity is a square cavity with one open side, made of hard aluminum alloy by one-piece processing, has good sealing performance, and is not easy to deform during vacuum extraction. The upper cover plate is arranged on the main cavity and has a quick-connection valve for air extraction. The vacuum chamber also includes a sealing gasket, the opening edge of the main cavity has a groove, and the sealing gasket is arranged in the groove to form a plane static seal between the main cavity and the upper cover plate. The main cavity has a vacuum electrode interface, which allows the electrical components inside the vacuum chamber to be connected to an external power source without affecting the air tightness of the vacuum chamber. The threaded array bottom plate is installed inside the main cavity by screws and is made of invar steel plate with low expansion coefficient, which can effectively improve the stability of the internal environment of the vacuum chamber. The threaded array bottom plate has multiple M3 threaded holes with a spacing of 12.5mm between adjacent threaded holes. The threaded array bottom plate can be connected to various components of the laser processing part through threads, has a wide range of applications, and can be flexibly disassembled and assembled. The vacuum chamber can provide a sealed vacuum environment for the laser processing part, reduce external interference, and make the output frequency-doubled laser more stable.

[0057] The perspective window assembly is arranged on the main cavity and includes a sealing ring, a window lens, and a window fixing plate. The sealing ring is arranged in two parts, one on each side of the window lens, has good sealing performance, and the window fixing plate can fix the window lens on the main cavity. In this embodiment, the perspective window assembly is arranged in three groups, namely the first perspective window assembly, the second perspective window assembly, and the third perspective window assembly, which are installed on the three sides of the main cavity. The first perspective window assembly allows the fundamental frequency laser to enter the vacuum chamber. The second perspective window assembly is installed on the opposite side of the first perspective window assembly and allows the frequency-doubled laser to exit the vacuum chamber. The third perspective window assembly is arranged between the first perspective window assembly and the second perspective window assembly and allows the reflected fundamental frequency laser to be output. The perspective window assembly allows the laser to enter or exit the vacuum chamber, and also allows the operator to observe the inside of the vacuum chamber through the window

[0058] The laser processing part is arranged inside the vacuum chamber and can output fundamental frequency laser as frequency-doubled laser. The laser processing part is detachably mounted on the threaded array base plate and includes an incident coupling mirror assembly, a resonance mirror assembly, a fundamental frequency light mirror assembly, a crystal temperature control chamber assembly, an output coupling mirror assembly and a photosensitive detector assembly.

[0059] The incident coupling mirror assembly includes an incident coupling mirror and an incident coupling mirror base, the incident coupling mirror is arranged on the incident coupling mirror base, and the incident coupling mirror base is screwed with the threaded array base plate. The incident coupling mirror assembly can couple incident light.

[0060] The resonance mirror assembly includes a resonance mirror, a resonance mirror base, a piezoelectric ceramic and a piezoelectric ceramic base. The resonance mirror is coaxially fixed and pasted on one side surface of the piezoelectric ceramic, and the other side surface of the piezoelectric ceramic is coaxially fixed and pasted on the piezoelectric ceramic base. The resonance mirror, the piezoelectric ceramic and the piezoelectric ceramic base are mounted on the threaded array base plate through the resonance mirror base. The piezoelectric ceramic is connected with the vacuum electrode interface through a wire.

[0061] The fundamental frequency light mirror assembly includes a fundamental frequency light mirror and a fundamental frequency light mirror base. The fundamental frequency light mirror is fixed on the fundamental frequency light mirror base, and the fundamental frequency light mirror base is mounted on the threaded array base plate and can reflect fundamental frequency light.

[0062] The crystal temperature control chamber assembly includes a temperature control base, a refrigeration fin heat-conducting bottom plate, a semiconductor refrigeration fin, a refrigeration fin heat-conducting top plate, a temperature control chamber main body, a frequency-doubled crystal, a crystal positioning pressing sheet and a temperature measurement probe. The temperature control base is mounted on the threaded array base plate, and the refrigeration fin heat-conducting bottom plate is mounted on the temperature control base by bolts. The lower surface of the semiconductor refrigeration fin is bonded to the refrigeration fin heat-conducting bottom plate 342, and the upper surface is bonded to the refrigeration fin heat-conducting top plate. The temperature control chamber main body is a cavity with one side open, and the temperature control chamber main body includes a lower chamber and a pressing plate, the lower chamber is mounted on the refrigeration fin heat-conducting top plate by bolts, and the pressing plate is mounted on the lower chamber by bolts. The frequency-doubled crystal is arranged in the temperature control chamber main body and is fixed by the crystal positioning pressing sheet. The temperature measurement probe is arranged on the temperature control chamber main body and connected with the vacuum electrode interface through a wire, and can detect the temperature control chamber main body. In the embodiment, the semiconductor cooling fin is not directly connected with the temperature control chamber main body and the temperature control base, but is first pasted between the upper and lower refrigeration fin heat-conducting plates, and then the two refrigeration fin heat-conducting plates are respectively mounted and connected with the temperature control chamber main body and the temperature control base. This transition mode is conducive to the later replacement and maintenance of each component.

[0063] The output coupling mirror assembly includes an output coupling mirror and an output coupling mirror base. The output coupling mirror is arranged on the output coupling mirror base, and the output coupling mirror base is mounted on the threaded array base plate and can couple output light.

[0064] The photosensitive detector assembly comprises a photosensitive detector and a photosensitive detector base. The photosensitive detector is installed on the threaded array base through the photosensitive detector base, and the photosensitive detector is connected with the vacuum electrode interface through a wire, and can detect the laser in the vacuum chamber.

[0065] The above embodiment is a preferred case of the present application and does not limit the protection scope of the present application.

Claims

1. A vacuum-enclosed ring resonator chamber device for converting an incident fundamental frequency laser output into a frequency-doubled laser, characterized by, The application relates to a vacuum cavity chamber for laser processing. The vacuum cavity chamber comprises a main cavity, an upper cover plate and a threaded array bottom plate. A perspective window assembly is arranged on the main cavity for laser to enter or exit the vacuum cavity chamber. A laser processing part is arranged in the vacuum cavity chamber for outputting fundamental frequency laser as frequency-doubled laser. The main cavity is a square cavity with one side open. The main cavity is provided with a vacuum electrode interface. The upper cover plate is arranged on the main cavity. The threaded array bottom plate is arranged inside the main cavity. The laser processing part is detachably mounted on the threaded array bottom plate and comprises an incident coupling mirror assembly, a resonance reflecting mirror assembly, a fundamental frequency light reflecting mirror assembly, a crystal temperature control chamber assembly, an output coupling mirror assembly and a photosensitive detector assembly. The perspective window assembly comprises a sealing ring, a window lens and a window fixed pressing sheet. The sealing ring is arranged on the window lens. The window fixed pressing sheet is used for fixing the window lens on the main cavity. The perspective window assembly is arranged in three groups and is respectively arranged on three sides of the main cavity. The three groups of perspective window assemblies are respectively used for fundamental frequency laser to enter the vacuum cavity chamber, for frequency-doubled laser to exit the vacuum cavity chamber and for reflected fundamental frequency laser to be outputted. The threaded array bottom plate is provided with a plurality of M3 specification threaded holes. The interval between adjacent threaded holes is 12.5 mm. The threaded array bottom plate is made of low-expansion invar steel plate. The vacuum cavity chamber further comprises a sealing gasket. The main cavity is provided with a groove on the open side. The sealing gasket is arranged in the groove. The main cavity is made of integral hard aluminum alloy material. The resonance reflecting mirror assembly comprises a resonance reflecting mirror, a resonance reflecting mirror base, a piezoelectric ceramic and a piezoelectric ceramic base. The resonance reflecting mirror is coaxially fixed and pasted on one side surface of the piezoelectric ceramic. The other side surface of the piezoelectric ceramic is coaxially fixed and pasted on the piezoelectric ceramic base. The resonance reflecting mirror, the piezoelectric ceramic and the piezoelectric ceramic base are mounted on the threaded array bottom plate through the resonance reflecting mirror base. The piezoelectric ceramic is connected with the vacuum electrode interface through wires. The fundamental frequency light reflecting mirror assembly comprises a fundamental frequency light reflecting mirror and a fundamental frequency light reflecting mirror base. The fundamental frequency light reflecting mirror is fixed on the fundamental frequency light reflecting mirror base. The fundamental frequency light reflecting mirror base is mounted on the threaded array bottom plate. The crystal temperature control chamber assembly comprises a temperature control base, a refrigeration fin heat-conducting bottom plate, a semiconductor refrigeration fin, a refrigeration fin heat-conducting top plate, a temperature control chamber main body and a frequency-doubled crystal. The refrigeration fin heat-conducting bottom plate is detachably arranged on the temperature control base. The lower surface of the semiconductor refrigeration fin is attached to the refrigeration fin heat-conducting bottom plate. The upper surface of the semiconductor refrigeration fin is attached to the refrigeration fin heat-conducting top plate. The temperature control chamber main body is a cavity with one side open. The frequency-doubled crystal is arranged in the temperature control chamber main body. The photosensitive detector assembly comprises a photosensitive detector and a photosensitive detector base. The photosensitive detector is mounted on the threaded array bottom plate through the photosensitive detector base. The photosensitive detector is connected with the vacuum electrode interface through wires.

2. The vacuum sealed toroidal chamber device of claim 1, wherein: wherein the upper cover plate has a quick connect valve for evacuation.

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