Dust collector and dust collecting method

Abstract

Provided is a dust collector that can be installed in a small space and efficiently collect dust. The dust collector (1) includes: a first electrode layer (12) formed of a conductor; a second electrode layer (14) formed of a conductor, having a size that covers the first electrode layer (12) in plan view, having a defect (through hole (14H), slit (14S)) that penetrates in the thickness direction, and having a size that covers the first electrode layer (12) in plan view, and is disposed opposite the first electrode layer (12); and an insulating layer (first insulating layer (13), second insulating layer (15)) formed of an insulating material, insulating the first electrode layer (12) and the second electrode layer (14), and forming a one-layer structure with the first electrode layer (12) and the second electrode layer (14).

Description

TECHNICAL FIELD

[0001] The present application relates to a dust collector and a dust collecting method. BACKGROUND

[0002] For example, fine dust (particles) generated in the interior of a device such as a semiconductor manufacturing device or in the vicinity of the device often cause adverse effects such as foreign matter defects on a workpiece manufactured by the device. Therefore, there is a demand for reducing the particles in the vicinity of the workpiece in the interior or the vicinity of the device and making it clean.

[0003] In this regard, filter dust collecting methods, electric dust collecting methods, and electric field curtain methods have been proposed.

[0004] The filter dust collecting method sucks the already flying particles through an air duct and filters the air using a filter. Therefore, the dust collecting cannot be performed on the particles before flying, and the pressure loss is large, so the dust collecting efficiency is poor.

[0005] The electric dust collecting method charges the particles by corona discharge of the particles by an ion generator, and collects the charged particles on one electrode of a pair of electrodes. Therefore, the surroundings of the dust collector are charged, and the device is large, so the installation site cannot be selected.

[0006] A dust collecting device that omits the ion generator has also been proposed (for example, Patent Literature 1), but since an air passing structure between a pair of electrodes is adopted, there is a limit to space saving.

[0007] The electric field curtain method generates an unbalanced electric field that travels in one direction by applying an alternating current to a multi-phase wire electrode buried in a dielectric, causes the charged particles to float and transports them in the traveling direction, and performs dust collecting. In this device, the device is also large, so the installation site cannot be selected.

[0008] PRIOR ART DOCUMENTS

[0009] PATENT LITERATURE

[0010] Patent Literature 1: Japanese Patent No. 6620994 SUMMARY OF THE INVENTION

[0011] PROBLEMS TO BE SOLVED BY THE INVENTION

[0012] Therefore, a dust collector and a dust collecting method that can be installed in a small space and can efficiently collect dust are required.

[0013] MEANS OF SOLVING THE PROBLEMS

[0014] The dust collector of the present application includes: a first electrode layer formed of a conductor; a second electrode layer formed of a conductor, having a defect portion that penetrates in a thickness direction, and having a size that covers the first electrode layer when viewed from above, and being disposed opposite to the first electrode layer; and an insulating layer formed of an insulating material, insulating the first electrode layer and the second electrode layer, and forming a layer structure together with the first electrode layer and the second electrode layer.

[0015] Effects of Invention

[0016] According to the present application, a dust collector and a dust collecting method that can be disposed in a small space and efficiently collect dust can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a perspective view of the appearance of the dust collector.

[0018] Figure 2 is a perspective view of the appearance of the dust collector. Figure 1 is a cross-sectional view of AA line in

[0019] Figure 3 is a plan view of each layer of the dust collector.

[0020] Figure 4 is a cross-sectional view showing the case of the electric field generated in the dust collector. DETAILED DESCRIPTION

[0021] Hereinafter, a dust collector of an embodiment of the present application will be described in detail.

[0022] Figure 1 is a perspective view of the appearance of the dust collector 1 of the present embodiment, Figure 2 is a perspective view of the appearance of the dust collector 1 of the present embodiment, Figure 1 is a cross-sectional view of AA line in Figure 3 is a plan view of each layer of the dust collector 1.

[0023] As shown in Figures 1 to 2 , the dust collector 1 includes: a support base layer 11, a first electrode layer 12, a first insulating layer 13, a second electrode layer 14, a second insulating layer 15, and an adsorption layer 16.

[0024] A power supply device 2 is connected to the first electrode layer 12 and the second electrode layer 14.

[0025] The support base layer 11 is a layer formed of an insulator, more preferably an insulating synthetic resin.

[0026] The first electrode layer 12 is a layer formed of a conductor. As the conductor, for example, gold foil, conductive synthetic resin, carbon, or the like can be cited. The first electrode layer is provided on one face of the support base layer 11.

[0027] The first insulating layer 13 is a layer formed of an insulator, more preferably an insulating synthetic resin that does not hinder electric field. As the insulating synthetic resin that does not hinder electric field, for example, polyimide can be given. The first insulating layer 13 is provided on the side of the support base layer 11 on which the first electrode layer 12 is provided, and insulates the first electrode layer 12 together with the support base layer 11 or by the first insulating layer 13 alone.

[0028] The second electrode layer 14 is a layer formed of a conductor. As the conductor, for example, gold foil, conductive synthetic resin, carbon, or the like can be given. The second electrode layer 14 is provided at a position opposite to the first electrode layer 12 with the first insulating layer 13 interposed therebetween. The second electrode layer 14 has a defect portion that penetrates in the thickness direction, and has a size that covers the first electrode layer 12 in plan view.

[0029] The second insulating layer 15 is a layer formed of an insulator, more preferably an insulating synthetic resin that does not hinder electric field. As the insulating synthetic resin that does not hinder electric field, for example, polyimide can be given. The second insulating layer 15 is provided at a position opposite to the first insulating layer 13 with the second electrode layer 14 interposed therebetween, and insulates the second electrode layer 14 together with the first insulating layer 13 or by the second insulating layer 15 alone.

[0030] The adsorbing layer 16 is provided at a position opposite to the second electrode layer 14 with the second insulating layer 15 interposed therebetween. The adsorbing layer 16 is formed of a material suitable for adsorbing and retaining fine dust (particulates). As the material of the adsorbing layer 16, a material having high intermolecular force, a material having large friction, or the like can be appropriately selected.

[0031] The dust collector 1 is formed in a layered sheet or plate shape in the order of the support base layer 11, the first electrode layer 12, the first insulating layer 13, the second electrode layer 14, the second insulating layer 15, and the adsorbing layer 16.

[0032] The first insulating layer 13 and the second insulating layer 15 can also be formed integrally. Furthermore, the support base layer 11 can also be formed of the same material as the first insulating layer 13 and the second insulating layer 15 and integrally with the first insulating layer 13 and the second insulating layer 15.

[0033] As shown in Figs. 1 and 2, the dust collector 1 according to the present embodiment can be formed in a substantially square shape in plan view. Figure 2 and Figure 3 As shown in Figs. 1 and 2, the dust collector 1 according to the present embodiment can be formed in a substantially square shape in plan view.

[0034] The support base layer 11, the first insulating layer 13, the second insulating layer 15, and the adsorbing layer 16 are formed in a substantially square shape of the same size in plan view with one side of length LI.

[0035] The second electrode layer 14 is formed in a square shape with one side of length L2 shorter than the length LI.

[0036] The first electrode layer 12 is formed in a square shape having a length L3 shorter than a length L2.

[0037] Therefore, in a plan view from the adsorption layer 16 side, the first electrode layer 12 converges inside the second electrode layer 14, and the second electrode layer 14 converges inside the support base disk layer 11, the first insulating layer 13, the second insulating layer 15, and the adsorption layer 16.

[0038] As shown in Fig. 1, the first electrode layer 12 is formed so that the edge of the first electrode layer 12 is wider than the edge of the second electrode layer 14 by a width W or more. The width W is preferably 5 mm or more. Figure 2 The thickness Tl of the first electrode layer 12 is thinner than the thickness T2 of the first insulating layer 13. Also, the thickness T3 of the second electrode layer 14 is thinner than the thickness T4 of the second insulating layer 15.

[0039] As shown in Fig. 1, in a plan view, the support base disk layer 11, the first electrode layer 12, the first insulating layer 13, the second insulating layer 15, and the adsorption layer 16 do not have a defective portion, and are each formed as one face.

[0040] Figure 3 Unlike this, the second electrode layer 14 is provided at regular intervals with a circular through-hole 14H penetrating in the thickness direction as a defective portion. The through-hole 14H has, for example, an inner diameter of 5 mm to 15 mm, and the interval from an adjacent through-hole 14H is 10 mm to 30 mm.

[0041] A deformation example of the second electrode layer 14 is a second electrode layer 14A having a slit 14S as a defective portion. The slit 14S is provided alternately from one edge of the second electrode layer 14A toward an edge opposite to the one edge. Therefore, it is possible to prevent uneven adsorption.

[0042] The defective portion is provided in a manner not to hinder the passage of electricity to the second electrode layer 14.

[0043] The defective portion is provided in a manner not to hinder the passage of electricity to the second electrode layer 14.

[0044] Figure 4 is a cross-sectional view showing the state of the electric field generated in the dust collector 1. In Figure 4 , the hollow arrow X and the arrow Y indicate the electric field.

[0045] The positive electrode of the power supply device 2 is connected to one of the first electrode layer 12 and the second electrode layer 14, and the negative electrode is connected to the other, and the passage of electricity is performed.

[0046] In the case where the fine particles are insulating objects, from the viewpoint of the dust collection efficiency, it is preferable to connect the electrode opposite to the easily-charged electrode of the insulating objects to the second electrode layer 14.

[0047] ​The electric field from the second electrode layer 14 passes from the second electrode layer 14 through the second insulating layer 15 and the adsorption layer 16 to the space where the fine particles exist, again passes through the adsorption layer 16 and the second insulating layer 15, passes through the defect portion of the second electrode layer 14 and the first insulating layer 13, and reaches the equalization portion of the electric field from the first electrode layer 12 indicated by the arrow Y.

[0048] Therefore, an unbalanced electric field is generated in the outer side direction of the adsorption layer 16 of the dust collector 1, the fine particles are repelled from the workpiece or the like by the electric field toward the outer side, and the fine particles are moved along the electric field by the electric field toward the inner side and are adsorbed by the adsorption layer 16. Here, the unbalanced electric field refers to a range other than the positive and negative 0 point which becomes the equalization portion due to the cancellation of the electric field and refers to an electric field in which the Coulomb force having a direction is generated. In the present embodiment, the first electrode layer 12 is not at the same position height as the second electrode layer 14 in the front view but is further disposed below the first insulating layer 13 with the first insulating layer 13 interposed therebetween. Therefore, the equalization portion of the electric field is not the upper end of the arrow X of the dust collector 1 but is present at the position where the arrow X and the arrow Y face each other, that is, the inside of the dust collector 1, and thus it is possible to always move the garbage into the electric field toward the Figure 4 Figure 4 Figure 4

[0049] Here, the second electrode layer 14 covers the entire surface of the first electrode layer 12 in the plan view. Therefore, since the direction of the electric field from the second electrode layer 14 is entirely concentrated in the defect direction, that is, the inner side direction of the dust collector 1 in the plan view, it is possible to prevent the fine particles from flying to the outside of the dust collector 1.

[0050] Further, in the inside of the electric field, the fine particles are charged by electrostatic induction in the case where the fine particles are conductors or a part of insulators, and the fine particles are charged by dielectric polarization in the case where the fine particles are insulators or semiconductors, and in any case, the fine particles are charged.

[0051] The charged fine particles are transported by the electric field and are adsorbed by the adsorption layer 16.

[0052] Here, the experimental results will be described. The dust collector 1 of the present embodiment was formed to be 60 mm x 60 mm and experiments were performed.

[0053] A voltage of 2 kv was applied to the first electrode layer 12 of the dust collector 1 which was vertically erected with respect to the ground, and a voltage of -4 kv which is a reverse voltage higher than the voltage applied to the first electrode layer 12 was applied to the second electrode layer 14.

[0054] The sample was hung with a thread at intervals on the adsorption layer 16 side of the dust collector 1.

[0055] ​​​The sample was an aluminum foil of 10 mm x 0.5 mm, and the effect of pulling the distance apart to about 100 mm was confirmed.

[0056] The sample was a silicon wafer of 10 mm x 0.5 mm, and the effect of pulling the distance apart to about 50 mm was confirmed.

[0057] The sample was a resin (acrylic resin) of 10 mm x 0.5 mm, and the effect of pulling the distance apart to about 60 mm was confirmed.

[0058] As described above, the dust collector 1 of the present embodiment includes: a first electrode layer 12 formed of a conductor; a second electrode layer 14 formed of a conductor, having a size covering the first electrode layer 12 in plan view, and having a defect (through-hole 14H, slit 14S) through in the thickness direction, disposed opposite the first electrode layer 12; and an insulating layer (first insulating layer 13, second insulating layer 15) formed of an insulating material, insulating the first electrode layer 12 and the second electrode layer 14, forming a one-layer structure with the first electrode layer 12 and the second electrode layer 14.

[0059] In addition, the dust collecting method of the present embodiment is as follows: an unbalanced electric field is generated by applying a voltage to the second electrode layer 14, which is disposed opposite the first electrode layer 12 as a layer with a size covering the first electrode layer 12 in plan view, and applying a voltage to the first electrode layer 12, the unbalanced electric field being an electric field that reaches the first electrode layer 12 through the defect (through-hole 14H, slit 14S) of the second electrode layer 14 from the electric field generated in the outward direction from the second electrode layer 14, and particles are transported along the unbalanced electric field.

[0060] Therefore, according to the present embodiment, it is possible to provide a dust collector that can be installed in a small space and that can efficiently collect dust.

[0061] Explanation of Reference Signs

[0062] 1 Dust collector

[0063] 2 Power supply device

[0064] 11 Support base layer

[0065] 12 First electrode layer

[0066] 13 First insulating layer

[0067] 14 Second electrode layer

[0068] 14A Second electrode layer

[0069] 14H Through-hole

[0070] 14S slit

[0071] 15 second insulating layer

[0072] 16 adsorption layer

Claims

1. A dust collector, comprising: The first electrode layer is formed of a conductor and is connected to one of the positive or negative terminals of the power supply device. The second electrode layer is formed of a conductor and has a defect that extends through the thickness direction. When viewed from above, multiple ends of the first electrode layer are located inside the multiple ends of the second electrode layer. The second electrode layer is disposed opposite to the first electrode layer and is formed to be connected to the other side of the positive or negative terminal of the power supply device. as well as An insulating layer, formed of an insulating material, insulates the first electrode layer and the second electrode layer, and together with the first electrode layer and the second electrode layer, forms a single layer structure.

2. The dust collector as described in claim 1, The first electrode layer is formed such that the edge of the first electrode layer is more than 5 mm inside the edge of the second electrode layer.

3. The dust collector as described in any one of claims 1 to 2, It also includes an adsorption layer, which is disposed opposite to the second electrode layer through the insulating layer.

4. The dust collector as described in any one of claims 1 to 2, It also includes a support base layer, which is disposed opposite to the first electrode layer through the insulating layer.

5. The dust collector as described in claim 3, It also includes a support base layer, which is disposed opposite to the first electrode layer through the insulating layer.

6. The dust collector according to any one of claims 1 to 2, The defect is a circular through hole.

7. The dust collector as described in claim 6, The inner diameter of the defect is 5mm to 15mm, and the interval between the defect and the adjacent defect is 10mm to 30mm.

8. The dust collector as described in any one of claims 1 to 2, The defect is a slit.

9. The dust collector according to any one of claims 1 to 2, The insulating layer is formed of polyimide.

10. A dust collection method, A voltage is applied to the second electrode layer, which is arranged in a layered manner opposite to the first electrode layer through an insulating layer and connected to the other side of the positive or negative terminal of the power supply device. When viewed from above, multiple ends of the first electrode layer are located inside the multiple ends of the second electrode layer, and the first electrode layer is connected to one side of the positive or negative terminal of the power supply device. An unbalanced electric field is generated by applying a voltage from the power supply device to the first electrode layer. The unbalanced electric field is such that the electric field generated from the second electrode layer in the outward direction reaches the first electrode layer through the defects in the second electrode layer. Particles are transported along the unbalanced electric field.

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