Adsorption device and lithography equipment having the same

Abstract

The present invention discloses an adsorption device and a lithography apparatus having the same, including: a chuck, the chuck is provided with an adsorption cavity, an air extraction hole and a plurality of adsorption holes that communicate with each other, the chuck has a placement surface for placing a circuit board, the plurality of adsorption holes penetrate the placement surface, the adsorption cavity communicates with the outside air through at least one adsorption hole, and the air extraction hole penetrates the cavity wall of the adsorption cavity; at least one partition, at least one partition is rotatably mounted on the chuck and at least partially located in the adsorption cavity, the partition is rotatable between a communication position and a partition position, when the partition is in the partition position, the adsorption cavity is partitioned into two non-communicating cavities, each cavity communicates with a part of the plurality of adsorption holes, and when the partition is in the communication position, the two cavities are allowed to communicate. The adsorption device according to the embodiment of the present invention can adjust the size of the adsorption area according to the size of the circuit board, and has the advantages of high adsorption stability, low noise and low energy consumption.

Description

Technical Field

[0001] The present invention relates to the field of lithography technology, and in particular, to an adsorption device and a lithography apparatus having the same. Background Art

[0002] The adsorption device in the related art includes a suction cup. The suction cup is provided with a plurality of adsorption holes, and the plurality of adsorption holes constitute the adsorption area of the suction cup. When a circuit board is placed in the adsorption area, gas flows at the adsorption holes to adsorb the circuit board, so as to position and fix the circuit board, and then process the circuit board.

[0003] However, the sizes of circuit boards are not the same. Since the size of the adsorption area of the suction cup cannot be changed along with the size of the circuit board. For example, if the size of the adsorption area of the suction cup is larger than that of the circuit board, at this time, part of the adsorption holes are covered by the circuit board, and the other part of the adsorption holes are normally communicated with the air. When the suction cup works, air continuously flows to the uncovered adsorption holes, and the inside of the suction cup cannot be stably maintained in a negative pressure state, resulting in unstable adsorption of the circuit board, and large noise and high energy consumption during air intake. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. For this reason, an object of the present invention is to provide an adsorption device that can adjust the size of the adsorption area according to the size of the circuit board, and has the advantages of high adsorption stability, low noise and low energy consumption.

[0005] An embodiment of the present invention also provides a lithography apparatus having the above adsorption device.

[0006] To achieve the above object, an embodiment of the first aspect of the present invention provides an adsorption device, including: a suction cup, the suction cup is provided with an adsorption cavity, an air extraction hole and a plurality of adsorption holes that communicate with each other; the suction cup has a placement surface for placing a circuit board, and the plurality of adsorption holes penetrate through the placement surface, the adsorption cavity is communicated with the outside air through at least one of the adsorption holes, and the air extraction hole penetrates through the cavity wall of the adsorption cavity; at least one partition, at least one partition is rotatably installed in the suction cup and at least partially located in the adsorption cavity, the partition is rotatable between a communication position and a partition position, when the partition is in the partition position, the adsorption cavity is divided into two non-communicating cavities, each cavity communicates with a part of the plurality of adsorption holes, and when the partition is in the communication position, the two cavities are allowed to communicate.

[0007] The adsorption device according to the embodiment of the present invention can adjust the size of the adsorption area according to the size of the circuit board, and has the advantages of high adsorption stability, low noise and low energy consumption.

[0008] According to some specific embodiments of the present invention, there are a plurality of separators spaced apart along a first direction, each of the separators extends along a second direction, and the first direction intersects with the second direction and is parallel to the placement surface.

[0009] According to some specific embodiments of the present invention, the air suction hole is located at an edge of the suction cup along the first direction.

[0010] According to some specific embodiments of the present invention, the suction cup includes: a disc body, the exhaust hole, the placement surface and the adsorption chamber are constructed on the disc body; at least one partition column, at least one partition column is installed on the disc body and arranged in the adsorption chamber, the width sides of the partition column stop at the cavity walls on the height sides of the adsorption chamber, one end of at least one partition sheet is connected to at least one partition column and the other end is connected to the cavity wall of the adsorption chamber.

[0011] According to some specific embodiments of the present invention, the partition columns are multiple and spaced apart, the partition sheets are multiple and spaced apart, and the multiple partition sheets are connected to the multiple partition columns in a one-to-one correspondence.

[0012] According to some specific embodiments of the present invention, the separator includes: a separator segment, which is located in the adsorption chamber, the width of the separator segment is not less than the height of the adsorption chamber, and the thickness of the separator segment is less than the height of the adsorption chamber; a support portion, which is connected to the separator segment, and the cavity wall of the adsorption chamber is provided with a rotating hole, and the support portion cooperates with the rotating hole; and a handle, which is connected to the support portion and is located outside the adsorption chamber.

[0013] According to some specific embodiments of the present invention, the inner surfaces of the cavity walls on both sides of the height of the adsorption cavity are provided with positioning grooves, and when the separator is in the separation position, the separation section is located in the positioning groove, and the width sides of the separator are constructed into arcs that are adapted to the positioning grooves.

[0014] According to some specific embodiments of the present invention, the handle includes: a limiting portion, the limiting portion is provided with a limiting hole, the suction cup is provided with a limiting protrusion, the limiting protrusion extends into the limiting hole, when the separating piece is in the connecting position, the limiting protrusion stops at one end of the limiting hole, and when the separating piece is in the separating position, the limiting protrusion stops at the other end of the limiting hole; a holding portion, the holding portion is connected to a side of the limiting portion facing away from the suction cup, the cross-sectional area of ​​the holding portion is smaller than the cross-sectional area of ​​the limiting portion, and the limiting hole surrounds the holding portion.

[0015] According to some specific embodiments of the present invention, the adsorption device further includes: a shielding curtain, which is telescopically installed on the suction cup. The shielding curtain is switchable between an extended state and a contracted state. When the shielding curtain is in the extended state, it shields a part of the adsorption holes communicating with the air extraction holes, and when the shielding curtain is in the contracted state, it allows the adsorption holes communicating with the air extraction holes to be open.

[0016] According to some specific embodiments of the present invention, fixed tooth blocks are provided on both sides of the length of the shielding curtain, and the suction cup is provided with a plurality of fixed tooth grooves. When the shielding curtain is in the extended state, the fixed tooth blocks cooperate with one of the plurality of fixed tooth grooves.

[0017] According to an embodiment of the second aspect of the present invention, a lithography device is provided, including: the adsorption device according to the embodiment of the first aspect of the present invention; an air extraction assembly, which is communicated with the air extraction holes of the adsorption device.

[0018] The adsorption device according to the embodiment of the second aspect of the present invention, by using the lithography device according to the embodiment of the first aspect of the present invention, can adjust the size of the adsorption area according to the size of the circuit board, and has the advantages of high adsorption stability, low noise and low energy consumption.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present invention. Description of the Drawings

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, where:

[0021] Figure 1 is a schematic structural diagram of an adsorption device according to an embodiment of the present invention.

[0022] Figure 2 is a schematic structural diagram of a suction cup according to an embodiment of the present invention.

[0023] Figure 3 is a schematic structural diagram of a separator according to an embodiment of the present invention.

[0024] Figure 4 is a schematic structural diagram of a handle of a separator according to an embodiment of the present invention.

[0025] Figure 5 is Figure 1 a detailed view of part A of

[0026] Figure 6 is Figure 1 a detailed view of part B of

[0027] Reference numerals:

[0028] Adsorption device 1, air extraction assembly 2,

[0029] Suction cup 100, disc body 101, adsorption cavity 110, cavity 111, air extraction hole 120, adsorption hole 130, placement surface 140, positioning groove 160, fixed tooth groove 170, partition column 180, limit projection 190,

[0030] Partition sheet 200, partition section 210, support portion 220, handle 230, limit portion 231, limit hole 232, gripping portion 233,

[0031] Blocking curtain 300, fixed tooth block 310, storage portion 320, curtain cloth 330. Detailed implementation manners

[0032] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0033] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0034] In the description of the present invention, the "first feature" and "second feature" may include one or more of such features.

[0035] In the description of the present invention, the meaning of "a plurality" is two or more, and the meaning of "several" is one or more.

[0036] The adsorption device 1 according to an embodiment of the present invention will be described below with reference to the drawings.

[0037] As Figures 1-6 shown, the adsorption device 1 according to an embodiment of the present invention includes a suction cup 100 and at least one partition sheet 200.

[0038] The suction cup 100 is provided with an adsorption cavity 110, an air extraction hole 120 and a plurality of adsorption holes 130 that communicate with each other. The suction cup 100 has a placement surface 140 for placing the circuit board. The plurality of adsorption holes 130 penetrate through the placement surface 140. The adsorption cavity 110 communicates with the outside air through at least one adsorption hole 130. The air extraction hole 120 penetrates through the cavity wall of the adsorption cavity 110. At least one partition 200 is rotatably mounted on the suction cup 100 and is at least partially located inside the adsorption cavity 110. At least one partition 200 is rotatable between a communication position and a partition position. When at least one partition 200 is in the partition position, the adsorption cavity 110 is partitioned into two non-communicating cavities 111. Each cavity 111 communicates with a part of the plurality of adsorption holes 130. When at least one partition 200 is in the communication position, it allows the two cavities 111 to communicate.

[0039] For example, the axial direction of the adsorption hole 130 can be perpendicular to the placement surface 140, which can reduce the length of the adsorption hole 130, and the flow direction of the air flow at the adsorption hole 130 is perpendicular to the circuit board. Therefore, the suction force direction of the air flow at the adsorption hole 130 on the circuit board is perpendicular to the circuit board, and the relative position between the circuit board and the placement surface 140 is more stable.

[0040] Among them, the suction cup 100 can be constructed as a cuboid, that is, the suction cup 100 has a total of 6 faces. The placement surface 140 is one side surface in the thickness direction of the suction cup 100. In this way, the area of the placement surface 140 is larger, which is convenient for placing the circuit board. The air extraction hole 120 can be constructed on any side surface of the suction cup 100. Through the air extraction hole 120, the air in the adsorption cavity 110 can be sucked out.

[0041] According to the adsorption device 1 of the embodiment of the present invention, by providing an adsorption cavity 110, an air extraction hole 120 and a plurality of adsorption holes 130 that communicate with each other in the suction cup 100, the suction cup 100 has a placement surface 140 for placing the circuit board. The plurality of adsorption holes 130 penetrate through the placement surface 140. The air extraction hole 120 penetrates through the cavity wall of the adsorption cavity 110. For example, the plurality of adsorption holes 130 can be evenly spaced on the placement surface 140, so that the adsorption force of the suction cup 100 on the circuit board is more uniform and the adsorption is more stable. When the circuit board is placed on the placement surface 140, it can cover the plurality of adsorption holes 130. The air in the adsorption cavity 110 is sucked out by the air extraction hole 120 of the suction cup 100. Furthermore, the inside of the adsorption cavity 110 is in a negative pressure state. Thus, the plurality of adsorption holes 130 can generate a suction force to adsorb and fix the circuit board on the placement surface 140.

[0042] In addition, at least one partition 200 is rotatably mounted on the suction cup 100 and is at least partially located within the adsorption cavity 110. The partition 200 is rotatable between a communication position and a partition position. When the partition 200 is in the partition position, the adsorption cavity 110 is partitioned into two non-communicating cavities 111. Each cavity 111 communicates with a part of the plurality of adsorption holes 130. It should be noted that one of the two cavities 111 communicates with a part of the plurality of adsorption holes 130 and the other communicates with the other part, that is, the adsorption holes 130 communicated with the two cavities 111 are different. When the partition 200 is in the communication position, it allows the two cavities 111 to communicate.

[0043] For example, when there is one partition 200, the partition 200 divides the adsorption cavity 110 into two cavities 111, and at least a part of one side wall of each cavity 111 is composed of the partition 200; when there are multiple partitions 200, at least a part of one side wall of the outermost two cavities 111 is composed of the partition 200, and the opposite two side walls of the remaining cavities 111 are composed of the partition 200. The volume of each cavity 111 can be the same, and the number of adsorption holes 130 corresponding to each cavity 111 can be the same.

[0044] By adjusting the state of the partition 200, the number of cavities 111 communicating with the air extraction hole 120 can be adjusted. The adsorption holes 130 communicating with this part of the cavities 111 form an adsorption area. The area of the adsorption area is the same as or similar to the area of the circuit board placed on the placement surface 140. The air in the cavities 111 communicating with the air extraction hole 120 can be extracted through the air extraction hole 120. The adsorption holes 130 communicating with this part of the cavities 111 can adsorb the circuit board. The cavities 111 communicating with the air extraction hole 120 are adsorption cavities. At this time, the gas in the cavities 111 not communicating with the air extraction hole 120 circulates normally, that is, the gas in the cavities 111 not communicating with the air extraction hole 120 does not flow towards the air extraction hole 120. The cavities 111 not communicating with the air extraction hole 120 are non-adsorption cavities, which can avoid air leakage from the adsorption holes 130 communicating with the non-adsorption cavities. Thus, it not only ensures that the adsorption cavity can be stably in a negative pressure state, the adsorption force is more concentrated, making the adsorption of the circuit board more stable, but also avoids noise generated by air leakage from the adsorption holes 130 communicating with the non-adsorption cavities, reducing noise and energy consumption.

[0045] Therefore, the adsorption device 1 according to the embodiment of the present invention can adjust the size of the adsorption area according to the size of the circuit board, and has the advantages of high adsorption stability, low noise and low energy consumption.

[0046] According to some specific embodiments of the present invention, as Figure 1 shown (the arrow C indicates the first direction, and the arrow D indicates the second direction), the partitions 200 are multiple spaced along the first direction, and each partition 200 extends along the second direction, and the first direction intersects the second direction.

[0047] For example, the first direction is perpendicular to the second direction. When the suction cup 100 is rectangular, the first direction can be one of the length direction and the width direction of the suction cup 100, and the second direction is the other of the length direction and the width direction of the suction cup 100. At this time, the first direction and the second direction are perpendicular, and the plane formed by the first direction and the second direction is parallel to the placement surface 140, so that the length of the partition 200 can be shorter.

[0048] By providing a plurality of partitions 200, the adsorption cavity 110 can be partitioned into a plurality of cavities 111 along the first direction. By adjusting the states of different partitions 200, the number of cavities 111 communicating with the air extraction hole 120 can be controlled, thereby adjusting the size of the adsorption area in the first direction and increasing the diversity of the adjustment of the adsorption area of the adsorption device 1. Moreover, when the partitions 200 in the non-adsorption cavities are all adjusted to the partition positions, the sealing effect of the non-adsorption cavities can be improved.

[0049] According to some specific embodiments of the present invention, as Figure 2 shown, the air extraction hole 120 is located at the edge of the suction cup 100 along the first direction. In this way, in the first direction, the air extraction hole 120 is located between the cavity wall of the adsorption cavity 110 and the partition 200, that is, on one side of the air extraction hole 120 in the first direction is the cavity wall of the adsorption cavity 110, and on the other side of the air extraction hole 120 are a plurality of partitions 200. By adjusting the states of the partitions 200 at different distances from the air extraction hole 120, the size of the adsorption area in the first direction can be adjusted, the adjustment is convenient and the range of the adsorption area can be quickly determined. Moreover, the adsorption area extends from the edge of the suction cup 100 along the first direction towards the middle of the suction cup 100, and the position of the adsorption area is easier to determine. That is to say, the circuit board can be preliminarily positioned through the air extraction hole 120 at the edge of the suction cup 100, which is convenient for the position of the circuit board to correspond to the adsorption area.

[0050] Moreover, in the second direction, the air extraction hole 120 is located between the cavity wall of the adsorption cavity 110 and the shielding curtain 300, that is, on one side of the air extraction hole 120 in the second direction is the cavity wall of the adsorption cavity 110, and on the other side of the air extraction hole 120 is the shielding curtain 300. By adjusting the distance between the shielding curtain 300 and the air extraction hole 120, the size of the adsorption area in the second direction can be adjusted, the adjustment is convenient and the range of the adsorption area can be quickly determined.

[0051] In summary, by arranging the air extraction hole 120 at the corner of the adsorption cavity 110 away from the shielding curtain 300, the space utilization rate can be greatly improved, the difficulty of adjusting the area of the adsorption area can be reduced, and it is easier for the circuit board to correspond to the position of the adsorption area.

[0052] According to some specific embodiments of the present invention, as Figure 2As shown, the suction cup 100 includes a disk body 101 and at least one partition column 180.

[0053] The adsorption cavity 110, the air extraction hole 120, and the placement surface 140 are formed on the disk body 101, that is, a plurality of adsorption holes 130 are formed on the disk body 101. At least one partition column 180 is installed on the disk body 101 and is disposed in the adsorption cavity 110. The two width sides of the partition column 180 abut against the cavity walls on the two thickness sides of the adsorption cavity 110. One end of at least one partition piece 200 is connected to at least one partition column 180, and the other end is connected to the cavity wall of the adsorption cavity 110.

[0054] For example, the partition column 180 may extend in the second direction, that is, the extending direction of the partition column 180 is the same as the extending direction of the partition piece 200. And, the partition column 180 may be integrally formed with the suction cup 100. One end of the partition column 180 is connected to the partition piece 200, and the other end of the partition column 180 is connected to the cavity wall of the suction cup 100. Thus, when the partition piece 200 is in the partition position, the width direction of the partition piece 200 is parallel to the width direction of the partition column 180. The partition piece 200 and the partition column 180 can together separate two adjacent cavities 111. When the partition piece 200 is in the communication position, the width direction of the partition piece 200 intersects the width direction of the partition column 180. The gas inside two adjacent cavities 111 can flow at the partition piece 200, thereby realizing the communication of two adjacent cavities 111.

[0055] By providing the partition column 180, the length of the partition piece 200 can be shortened, so that the partition piece 200 is less likely to break and be damaged, and it is convenient to rotate the partition piece 200, reducing energy consumption.

[0056] Furthermore, a plurality of partition columns 180 are arranged at intervals, and a plurality of partition pieces 200 are arranged at intervals. The plurality of partition pieces 200 are connected to the plurality of partition columns 180 one by one. In this way, the partitioning effect is better, and the connection stability of each partition piece 200 is high.

[0057] According to some specific embodiments of the present invention, as Figure 3 shown, the partition piece 200 includes a partition section 210, a support portion 220, and a handle 230.

[0058] The partition section 210 is located in the adsorption cavity 110 and is used to partition the adsorption cavity 110. The width of the partition section 210 is not less than the height of the adsorption cavity 110, and the thickness of the partition section 210 is less than the height of the adsorption cavity 110. Wherein, the height direction of the adsorption cavity 110 is the axial direction of the adsorption hole 130.

[0059] When the width direction of the partition segment 210 is parallel to the height direction of the adsorption cavity 110, the partition sheet 200 can be used to partition the adsorption cavity 110, so that the adsorption cavity 110 is partitioned into multiple cavities 111. When the thickness direction of the partition segment 210 is parallel to the height direction of the adsorption cavity 110, the cavities 111 located on the adjacent two sides of the partition sheet 200 can remain connected. The structure of the partition sheet 200 is simple and it is easy to realize the connection and disconnection of multiple cavities 111.

[0060] It can be understood that even if the thickness direction of the partition segment 210 is not parallel to the height direction of the adsorption cavity 110, as long as the width direction of the partition segment 210 is not parallel to the height direction of the adsorption cavity 110, the cavities 111 on both sides of the partition segment 210 can be connected.

[0061] In addition, the support portion 220 is connected to the partition segment 210, and a rotation hole (not shown in the figure) is provided on the cavity wall of the adsorption cavity 110. The support portion 220 is fitted into the rotation hole. Among them, the cross-sectional area shape of the support portion 220 can be circular, which is convenient for the support portion 220 to cooperate with the rotation hole. The support portion 220 can rotate in the rotation hole, thereby switching the partition sheet 200 between the partition position and the connection position. Moreover, the support portions 220 are respectively provided at both ends of the partition segment 210, so that the connection strength between the partition sheet 200 and the suction cup 100 is higher, and the rotation of the partition sheet 200 is more stable.

[0062] In addition, the handle 230 is connected to the support portion 220 and is located outside the adsorption cavity 110, which is convenient for a human hand or a driving mechanism (such as a motor) to control the rotation of the partition sheet 200 through the handle 230, and is easy to operate. Among them, the outer contour of the cross-section of the handle 230 can be non-circular or the outer peripheral surface of the handle 230 is provided with anti-slip protrusions to prevent relative rotation between the human hand or the driving mechanism and the handle 230.

[0063] Furthermore, as Figure 2 shown, positioning grooves 160 are provided on the inner surfaces of the cavity walls on both sides of the height of the adsorption cavity 110. When the partition sheet 200 is in the partition position, the partition segment 210 is located in the positioning grooves 160, and the two sides of the width of the partition sheet 200 are configured to be arc-shaped and adapted to the positioning grooves 160.

[0064] Specifically, the positioning grooves 160 are recessed into an arc shape on the inner surfaces of the cavity walls on both sides of the height of the adsorption cavity 110, which is convenient for the partition sheet 200 to cooperate with the positioning grooves 160. The partition sheet 200 can rotate clockwise or counterclockwise arbitrarily, and the switching is more smooth. Moreover, through the arc surface cooperation, the partition sheet 200 can have a better partitioning effect on the cavities 111 on both sides of it, so as to ensure that when the partition sheet 200 is in the partition position, the adjacent two cavities 111 can be completely disconnected.

[0065] Furthermore, as Figure 4 andFigure 6 As shown, the handle 230 includes a limiting portion 231 and a gripping portion 233.

[0066] The limiting portion 231 is provided with a limiting hole 232, and the suction cup 100 is provided with a limiting protrusion 190. The limiting protrusion 190 cooperates with the limiting hole 232 to limit the rotation of the partition sheet 200. The limiting protrusion 190 protrudes from the outer surface of the suction cup 100. The limiting hole 232 axially penetrates the limiting portion 231 along the axis of the limiting portion 231, and the cross-section of the limiting hole 232 can be arc-shaped, and the center of the arc coincides with the axis of the handle 230.

[0067] Thus, the limiting protrusion 190 can be inserted into the limiting hole 232. When the partition sheet 200 is in the communication position, the limiting protrusion 190 abuts against one end of the limiting hole 232. When the partition sheet 200 is in the partition position, the limiting protrusion 190 abuts against the other end of the limiting hole 232. By the cooperation of the limiting protrusion 190 and the limiting hole 232, the rotation angle of the partition sheet 200 can be limited, which is convenient for positioning the rotation position of the partition sheet 20, so as to ensure that when the partition sheet 200 is in the partition position, the width direction of the partition section 210 is parallel to the height direction of the adsorption cavity 110, thereby maximizing the partition area and improving the partition effect. When the partition sheet 200 is in the communication position, the thickness direction of the partition section 210 is parallel to the height direction of the adsorption cavity 110, thereby maximizing the communication area between two adjacent cavities 111 and optimizing the communication effect.

[0068] The gripping portion 233 is connected to one end of the limiting portion 231 facing away from the suction cup 100, which is convenient for human hands or a driving mechanism to contact. The cross-sectional area of the gripping portion 233 is smaller than the cross-sectional area of the limiting portion 231. The limiting portion 231 can abut against the outer surface of the suction cup 100 to achieve the positioning function. The limiting hole 232 surrounds the gripping portion 233. Among them, the outer contour of the cross-section of the gripping portion 233 can be non-circular or the outer peripheral surface of the gripping portion 233 is provided with anti-slip protrusions.

[0069] According to some specific embodiments of the present invention, as Figure 1 shown, the adsorption device 1 further includes a shielding curtain 300.

[0070] The shielding curtain 300 is telescopically installed on the suction cup 100. The shielding curtain 300 can be switched between an extended state and a contracted state. When the shielding curtain 300 is in the extended state, it shields a part of the adsorption holes 130 communicated with the air extraction holes 120. When the shielding curtain 300 is in the contracted state, it allows the adsorption holes 130 communicated with the air extraction holes 120 to be opened.

[0071] For example, the telescopic direction of the shielding curtain 300 is parallel to the extending direction of the partition piece 200. In this way, the shielding curtain 300 can adjust the size of the adsorption area of the adsorption device 1 in the second direction, and the partition piece 200 can adjust the size of the adsorption area in the first direction. Through the cooperation of the shielding curtain 300 and the partition piece 200, it is possible to jointly adjust the size of the adsorption area in two mutually perpendicular directions, with higher adjustability. Moreover, the circuit board is generally rectangular, so that the shape of the adsorption area can be more matched with the shape of the circuit board.

[0072] Since the shielding curtain 300 can block a part of the adsorption holes 130 communicated with the air extraction holes 120, there will be no gas flow in the blocked adsorption holes 130. Therefore, the noise generated by the gas flow in this part of the adsorption holes 130 will be reduced, and the energy consumption can be reduced. Moreover, it is beneficial to ensure that the adsorption cavity maintains a negative pressure state, thereby improving the stability of the relative position between the circuit board and the suction cup 100.

[0073] Of course, in some embodiments of the present invention, the telescopic direction of the shielding curtain 300 and the extending direction of the partition piece 200 may not be parallel. At this time, the adsorption area defined by the shielding curtain 300 and the partition piece 200 may be trapezoidal or other non-rectangular polygons. In this way, the adsorption area of the adsorption device 1 can adapt to circuit boards of different shapes, expanding the application scenarios of the adsorption device 1.

[0074] Specifically, the shielding curtain 300 includes a storage part 320 and a curtain cloth 330. The storage part 320 is installed on the outer peripheral surface of the suction cup 100. For example, the storage part 320 can be installed on the suction cup 100 through threaded fasteners. The curtain cloth 330 is connected to the storage part 320. When the shielding curtain 300 is in the contracted state, the curtain cloth 330 is stored in the storage part 320 to reduce the occupied space of the shielding curtain 300, and the storage part 320 can protect the curtain cloth 330 from being damaged. When the shielding curtain 300 is in the extended state, the curtain cloth 330 extends out of the storage part 320 to adjust the area of the curtain cloth 330 covering the suction cup 100, that is, the size of the adsorption area in the second direction can be adjusted.

[0075] Furthermore, as Figure 1 and Figure 5 shown, fixed tooth blocks 310 are provided on both sides of the length of the shielding curtain 300, and the suction cup 100 is provided with a plurality of fixed tooth grooves 170. When the shielding curtain 300 is in the extended state, the fixed tooth block 310 cooperates with one of the plurality of fixed tooth grooves 170. Among them, the length direction of the shielding curtain 300 may be perpendicular to the telescopic direction of the shielding curtain 300.

[0076] For example, the length direction of the shielding curtain 300 may be parallel to the first direction. In the first direction, a plurality of tooth grooves 170 may be evenly and spaced on each side of the suction cup 100, and the fixed tooth block 310 is disposed at the free end of the curtain cloth 330 away from the storage portion 320 (that is, the end of the curtain cloth 330 not fixed to the storage portion 320).

[0077] Thus, when the shielding curtain 300 is in the extended state, the relative position between the curtain cloth 330 and the suction cup 100 is more stable, and the situation where the curtain cloth 330 moves relative to the suction cup 100 will not occur, ensuring the shielding effect on the adsorption holes 130.

[0078] According to some specific embodiments of the present invention, as Figure 2 shown, the air extraction hole 120 and the adsorption hole 130 are respectively disposed on opposite sides of the suction cup 100. For example, the air extraction hole 120 and the adsorption hole 130 are respectively disposed on two sides of the thickness of the suction cup 100, that is, the placement surface 140 is formed on one side of the thickness direction of the suction cup 100, and the air extraction hole 120 penetrates through the other side of the thickness direction of the suction cup 100.

[0079] In this way, not only can the air in the adsorption cavity 110 be extracted through the air extraction hole 120 to make the adsorption cavity 110 form a negative pressure state, so that the relative position between the suction cup 100 and the circuit board is fixed, but also by disposing the air extraction hole 120 and the adsorption hole 130 on opposite sides of the suction cup 100, it can avoid interference between the air extraction assembly 2 connected to the air extraction hole 120 and the circuit board, facilitate layout, and improve the space utilization rate of the suction cup 100.

[0080] Next, the lithography apparatus according to the embodiments of the present invention will be described with reference to the accompanying drawings.

[0081] The lithography apparatus according to the embodiment of the present invention includes an adsorption device 1 and an air extraction assembly 2, and the air extraction assembly 2 is communicated with the air extraction hole 120 of the adsorption device 1.

[0082] The air extraction assembly 2 can provide suction force, and then extract the air in the adsorption cavity 110 through the air extraction hole 120 to make a negative pressure state in the adsorption cavity 110, so that the circuit board can be pressed against the placement surface 140 by the atmospheric pressure. In addition, the air extraction assembly 2 can also introduce air into the adsorption cavity 110 through the air extraction hole 120, so that the air pressure in the adsorption cavity 110 is the same as the atmospheric pressure, to eliminate the suction force of the suction cup 100 on the circuit board, and facilitate removing the circuit board from the suction cup 100 after the circuit board processing is completed.

[0083] According to the lithography apparatus of the embodiment of the present invention, by using the adsorption device 1 of the above embodiment of the present invention, the adsorption area size can be adjusted according to the size of the circuit board, and it has the advantages of high adsorption stability, low noise and low energy consumption.

[0084] The adsorption device 1 according to an embodiment of the present invention and other components and operations of the lithography apparatus having the same are known to those of ordinary skill in the art and will not be described in detail herein.

[0085] In the description of this specification, the description referring to terms such as "specific embodiment", "specific example", etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0086] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and purposes of the present invention, and the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An adsorption device, characterized in that, include: A suction cup, wherein the suction cup is provided with an adsorption cavity, an air extraction hole and a plurality of adsorption holes which are interconnected, the suction cup has a placement surface for placing a circuit board, a plurality of the adsorption holes penetrate the placement surface, the adsorption cavity is constructed in the suction cup, the adsorption cavity is communicated with the outside air through at least one of the adsorption holes, and the air extraction hole penetrates the cavity wall of the adsorption cavity; At least one separator, at least one separator is rotatably mounted on the suction cup and is at least partially located in the adsorption chamber, at least one separator is rotatable between a communication position and a separation position, at least one separator separates the adsorption chamber into two non-communication chambers when in the separation position, each chamber is communicated with a part of the plurality of adsorption holes, at least one separator allows two chambers to communicate when in the communication position, the separator comprises a separation section, a support portion and a handle, the separation section is located in the adsorption chamber, the support portion is connected to the separation section, and the handle is connected to the support portion and is located outside the adsorption chamber; The inner surfaces of the cavity walls on both sides of the height of the adsorption cavity are provided with positioning grooves, the partition section is located in the positioning grooves when the partition is in the partition position, and the width sides of the partition are constructed into arcs that match the positioning grooves.

2. The adsorption device according to claim 1, characterized in that, The separators are multiple and spaced apart along a first direction, each of the separators extends along a second direction, and the first direction and the second direction intersect and are parallel to the placement surface.

3. The adsorption device according to claim 2, wherein The air suction hole is located at an edge of the suction cup along the first direction.

4. The adsorption device according to claim 1, characterized in that, The suction cup comprises: A tray body, wherein the air extraction hole, the placement surface and the adsorption cavity are constructed on the tray body; At least one partition column, at least one of the partition columns is installed on the disk body and arranged in the adsorption chamber, the width of the partition column is stopped at the cavity walls on both sides of the height of the adsorption chamber, and one end of at least one of the partition plates is connected to at least one of the partition columns and the other end is connected to the cavity wall of the adsorption chamber.

5. The adsorption device according to claim 4, wherein The partition columns are multiple and spaced apart, the partition sheets are multiple and spaced apart, and the multiple partition sheets are connected to the multiple partition columns in a one-to-one correspondence.

6. The adsorption device according to claim 1, characterized in that, The width of the partition section is not less than the height of the adsorption chamber, and the thickness of the partition section is less than the height of the adsorption chamber; The cavity wall of the adsorption cavity is provided with a rotation hole, and the supporting part is matched with the rotation hole.

7. The adsorption device according to claim 6, characterized in that, The handle comprises: A limiting portion, wherein the limiting portion is provided with a limiting hole, the suction cup is provided with a limiting protrusion, the limiting protrusion extends into the limiting hole, the limiting protrusion stops at one end of the limiting hole when the separator is in the connecting position, and the limiting protrusion stops at the other end of the limiting hole when the separator is in the separating position; A holding portion, wherein the holding portion is connected to a side of the limiting portion facing away from the suction cup, the cross-sectional area of ​​the holding portion is smaller than the cross-sectional area of ​​the limiting portion, and the limiting hole surrounds the holding portion.

8. The adsorption device according to claim 1, characterized in that, Also includes: A shielding curtain, the shielding curtain is telescopically mounted on the suction cup, the shielding curtain is switchable between an extended state and a contracted state, when the shielding curtain is in the extended state, it shields a part of the adsorption holes communicated with the air extraction holes, and when the shielding curtain is in the contracted state, it allows the adsorption holes communicated with the air extraction holes to be opened.

9. The adsorption device according to claim 8, wherein, Fixed tooth blocks are provided on both sides of the length of the shielding curtain, the suction cup is provided with a plurality of fixed tooth grooves, and when the shielding curtain is in the extended state, the fixed tooth blocks cooperate with one of the plurality of fixed tooth grooves.

10. A lithographic apparatus, characterized in that, Comprising: The adsorption device according to any one of claims 1-9; An air extraction assembly, the air extraction assembly is communicated with the air extraction hole of the adsorption device.

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