Excimer lamp exciter with emi solution

Abstract

The application discloses an exciter of an excimer lamp for solving EMI, which comprises an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternate conduction circuit, an LLC resonant circuit and a boost output circuit connected in sequence, and a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A. The technical scheme is characterized in that a band pass filter with large impedance is adopted to block strong interference in a fundamental frequency band range, and a low pass filter with small impedance is adopted to pass independent pulses in working frequency multiplication, electromagnetic interference generated during high-voltage gas discharge is effectively solved, the working process of the excimer lamp is optimized, and commercialization of the product is realized.

Description

Technical Field

[0001] This invention relates to the field of excimer gas discharge lamp technology, and more particularly to an excimer lamp exciter that solves EMI. Background Technology

[0002] With the rapid development of global biomedicine, the ability to detect more pathogens that threaten human survival and to effectively physically inactivate them without leaving residue has always been a common goal of the scientific community. Excimer UV lamps are the latest technological achievement, emitting ultraviolet light of specific wavelengths. Due to their concentrated energy output and high intensity, they can be used to deactivate viruses, bacteria, and microorganisms at different nanometer wavelengths, as well as for urban wastewater and air purification, photochemical reactions, and the synthesis of new nanomaterials.

[0003] The excimer 222nm UV lamp represents the latest technological advancement, emitting ultraviolet light of a specific wavelength. Its highly concentrated and intense energy output effectively kills photosensitive germs. In particular, deep ultraviolet light with wavelengths below 230nm possesses extremely short wavelengths and weak penetrating power. Scientific research has found that deep ultraviolet light with wavelengths below 230nm is harmless to the human body and eyes, while effectively penetrating airborne bacteria, thus allowing people to coexist for a certain period under ultraviolet light conditions.

[0004] However, data shows that this type of excimer high-pressure gas discharge lamp differs significantly from traditional xenon lamps, nano lamps, and fluorescent lamps. Traditional discharge lamps, after high-voltage activation, operate at voltages below 280V due to lamp characteristics, resulting in almost no visible discharge. In contrast, the excimer lamp maintains a high voltage (>2kV) almost constant before and after activation, leading to prolonged high-voltage, high-frequency arcing discharge within the lamp. The resulting current spikes from this arcing discharge can severely impact the normal operation of the lamp or other equipment. Therefore, resolving electromagnetic compatibility issues under high-frequency, high-voltage conditions presents a new challenge.

[0005] Chinese patent document CN213583699U discloses a "radio frequency stepless excimer curing lamp". It employs a plasma lamp tube, a reflector, two focusers, and two radio frequency sources. The plasma lamp tube is filled with an ionized and excited luminescent material that emits ultraviolet light. The two focusers are respectively mounted at both ends of the plasma lamp tube, with the luminescent material at least partially located in the focusing area of ​​the focusers. The two radio frequency sources are respectively mounted on the two focusers. The reflector covers the plasma lamp tube and is used to adjust the irradiation direction of the plasma lamp tube. This technical solution would severely affect the normal operation of the device or other equipment under high-frequency, high-voltage electromagnetic compatibility conditions. Summary of the Invention

[0006] This invention primarily addresses the technical problem that existing technical solutions severely affect the normal operation of the device or other equipment when facing electromagnetic compatibility issues under high frequency and high voltage conditions. It provides an excimer lamp exciter that solves EMI, using a high-impedance bandpass filter to block strong interference in the fundamental frequency band and a low-impedance low-pass filter to clear independent pulses in the operating frequency harmonics. This effectively solves the electromagnetic interference generated during high-pressure gas discharge, thereby optimizing the excimer lamp's operation and enabling the commercialization of the product.

[0007] The above-mentioned technical problems of the present invention are mainly solved by the following technical solution: The present invention includes an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternating conduction circuit, an LLC resonant circuit and a boost output circuit connected in sequence, wherein a fuse F11 is provided between the EMC filter circuit and the power supply terminal X11A. The excimer lamp exciter uses an AC 120-277V input voltage, protected by fuse F11. An EMC filter composed of components such as L11 and C11 is used, followed by rectification by a rectifier bridge consisting of DS11-DS14. The rectified DC voltage is then filtered by C21 and passed through a DC-DC converter. The input current is then boosted to DC 410V by an APFC circuit composed of MOSQ21 and L21 controlled by US21, and applied to the electrolytic capacitor C22. A signal from the DC-AC half-bridge control IC US31 to the half-bridge driver IC US41 drives MOSFETs QS41 and QS42 to conduct alternately. An LLC resonant circuit composed of L42, L41, C43, and C44 provides the pulsed voltage to 3500VAC at a frequency of 110kHz, which is then output to excite the excimer lamp.

[0008] Preferably, the EMC filter circuit includes a common-mode inductor L11. One input terminal of the common-mode inductor L11 is connected to a fuse F11, and one output terminal is connected to an inductor L12A. The other input terminal of the common-mode inductor L11 is connected to a power supply terminal X11B, and the other output terminal is connected to an inductor L12B. A capacitor C11 is provided between the two input terminals of the common-mode inductor L11. The other end of inductor L12A is connected to one input terminal of common-mode inductor L12. One output terminal of common-mode inductor L12 is connected to one input terminal of common-mode inductor L13, and the other end of inductor L12B is connected to the input terminal of common-mode inductor L12. The other end is connected to the common mode inductor L12. The other end of the common mode inductor L12 is connected to the other end of the common mode inductor L13. One end of inductor L12A is connected to the power supply terminal X11C through capacitor C13B. The other end of inductor L12A is connected to the power supply terminal X11C through capacitor C13C. One end of inductor L12B is connected to the power supply terminal X11C through capacitor C13A. One end of inductor L12B is connected to the power supply terminal X11C through capacitor C13D. A capacitor C15 is connected in parallel between one end of the common mode inductor L13 and the other end of the common mode inductor L13. One end of the common mode inductor L13 and the other end of the common mode inductor L13 are connected to the rectifier bridge circuit.

[0009] Preferably, the rectifier bridge circuit includes diodes DS11 and DS13 connected in series, and diodes DS12 and DS14 connected in series. The diodes DS11 and DS13 are connected in parallel with the diodes DS12 and DS14 connected in series, and the anodes of diodes DS13 and DS14 are connected to the power supply terminal X21B.

[0010] Preferably, the APFC circuit includes a chip US21. Pin 1 of the chip US21 is grounded via source resistors RS26D, RS26C, RS26B, and RS26A, and also via source resistor RS26F. Pin 2 is connected to pin 1 via capacitor CS26, and simultaneously connected to pin 1 via source resistors RS23 and CS27. Pin 3 is grounded via capacitor CS29, and simultaneously connected to pins 1 via source resistors RS21E and CS21F. Pin 3 is grounded via source resistors RS21D, RS21C, RS21B, RS21A, inductor L21A, diode DS21A, and capacitor C22. Pin 4 is grounded via capacitor C24 and source resistor RS24. Source resistors RS25A, RS25B, and RS25C are connected in parallel between source resistor RS24 and the ground terminal. Pin 5 is grounded via source resistor RS22 and inductor L21B. Pin 6 is grounded. Pin 7 is connected to the base of MOS Q21. The emitter of MOS Q21 is grounded via parallel source resistors RS25A, RS25B, and RS25C. The collector of MOS Q21 is grounded via capacitor CS21 and connected to diode DS21A. Pin 8 is grounded via capacitor CS28 and connected to the power supply terminal.

[0011] Preferably, the alternating conduction circuit includes a DC-AC half-bridge control IC US31 and a half-bridge driver IC US41. Pin 1 of US31 is grounded via a parallel capacitor CS33 and a source-side resistor RS33B, and simultaneously connected to pin 16 via a source-side resistor RS31B, and to pin 9 via a source-side resistor RS36. Pin 2 is grounded via a parallel capacitor CS34 and a source-side resistor RS33A, and simultaneously connected to pin 16 via a source-side resistor RS31A. Pin 5 is grounded via a capacitor CS31 and simultaneously connected to pin 7 via a source-side resistor RS34. Pin 6 is grounded via a parallel source-side resistor RS35A and a source-side resistor RS35B, and simultaneously connected to the collector of MOS Q33. The emitter of MOS Q33 is connected to pin 6 via a source-side resistor RS35C. The base of Q33 is connected to pin 8 via source resistor RS35D. Pin 8 is grounded via capacitor CS32. Pin 9 is grounded via capacitor CS35. Pin 10 is grounded via capacitor CS37 and simultaneously connected to pin 5 of US41 via capacitor CS68. Pin 11 of US31 is connected to pin 2 of US41. Pin 12 of US31 is grounded. Pin 13 is grounded via capacitor CS66. Pin 14 is connected to pin 1 of US41. Pin 15 of US31 is grounded via capacitor CS66 and simultaneously connected to pin 5 of US41. Pin 3 of US41 is grounded. Pin 4 is connected to one end of source resistor RS42A via parallel capacitor CS46 and diode DS43. The other end of source resistor RS42A is connected to the base of MOS Q42 and simultaneously connected to the emitter of MOS Q42 via source resistor RS42C. The emitter of MOS Q42 is grounded via parallel source resistors RS46A, RS46B, RS46C, RS46D, RS46E, and RS46F. The collector of MOS Q42 is connected to the emitter of MOS Q42 via diode DS42 and to pin 6 via inductor LS48. Pin 5 is grounded via parallel capacitors C67 and CS67 and to pin 8 via diode DS61. Pin 6 is connected to the emitter of MOS Q41 and to the base of MOS Q41 via source resistor RS4. The collector of MOS Q41 is connected to the emitter of MOS Q41 via diode DS41 and to the ground via inductor LS47 and capacitor C41. Pin 7 is connected to one end of source resistor RS41A via parallel capacitor CS45 and diode DS44. The other end of source resistor RS41A is connected to the base of MOS Q41. Pin 8 is connected to pin 6 via capacitor CS41.

[0012] Preferably, the LLC resonant circuit includes inductors L41A and L41B connected in series. The other end of inductor L41A is connected to the other end of inductor L41B in sequence via inductor L42, capacitor C42A, source resistor RS43A, source resistor RS43B, and source resistor RS43C. At the same time, it is connected to the other end of inductor L41B in sequence via inductor L42, capacitor C42B, source resistor RS44C, source resistor RS44B, and source resistor RS44A. The other end of inductor L41B is connected to capacitor C42A via capacitor C43 and to capacitor C42B via capacitor C44.

[0013] Preferably, the boost output circuit includes an inductor L41C, one end of which is connected to the power supply terminal X41A via an inductor LS49, and the other end of which is connected to the power supply terminal X42A via an inductor LS50. A capacitor C47A, a source resistor RS45A, and a capacitor C47B are connected in series between the two ends of the inductor L41C.

[0014] The beneficial effects of this invention are: strong interference in the fundamental frequency band is blocked by a bandpass filter with high impedance, and independent pulses in the operating frequency harmonics are blocked by a low-pass filter with low impedance, which effectively solves the electromagnetic interference generated during high-pressure gas discharge, thereby optimizing the working process of the excimer lamp and realizing the commercialization of the product. Attached Figure Description

[0015] Figure 1 This is an EMC filter circuit diagram of the present invention.

[0016] Figure 2 This is a typical application circuit diagram of the main circuit of the present invention. Detailed Implementation

[0017] The technical solution of the present invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0018] Example: This example describes an excimer lamp exciter for solving EMI, such as... Figure 1 , Figure 2 As shown, it includes an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternating conduction circuit, an LLC resonant circuit, and a boost output circuit connected in sequence. A fuse F11 is provided between the EMC filter circuit and the power supply terminal X11A.

[0019] The EMC filter circuit includes a common-mode inductor L11. One input terminal of the common-mode inductor L11 is connected to a fuse F11, and one output terminal is connected to an inductor L12A. The other input terminal of the common-mode inductor L11 is connected to a power supply terminal X11B, and the other output terminal is connected to the inductor L12B. A capacitor C11 is provided between the two input terminals of the common-mode inductor L11. The other end of inductor L12A is connected to one input terminal of common-mode inductor L12. One output terminal of common-mode inductor L12 is connected to one input terminal of common-mode inductor L13. The other end of inductor L12B is connected to the other input terminal of common-mode inductor L12. The output terminal of common mode inductor L12 is connected to the other end of the input terminal of common mode inductor L13. One end of inductor L12A is connected to power supply terminal X11C through capacitor C13B, and the other end of inductor L12A is connected to power supply terminal X11C through capacitor C13C. One end of inductor L12B is connected to power supply terminal X11C through capacitor C13A, and the other end of inductor L12B is connected to power supply terminal X11C through capacitor C13D. A capacitor C15 is connected in parallel between one end of the input terminal of common mode inductor L13 and the other end of the input terminal of common mode inductor L13. One end of the output terminal of common mode inductor L13 and the other end of the output terminal of common mode inductor L13 are connected to the rectifier bridge circuit.

[0020] The rectifier bridge circuit includes diodes DS11 and DS13 connected in series, and diodes DS12 and DS14 connected in series. The diodes DS11 and DS13 are connected in parallel with the diodes DS12 and DS14 connected in series. The anodes of diodes DS13 and DS14 are connected to the power supply terminal X21B.

[0021] The APFC circuit includes a chip US21. Pin 1 of the chip US21 is grounded sequentially through source resistors RS26D, RS26C, RS26B, and RS26A, and capacitor C22, and also grounded through source resistor RS26F. Pin 2 is connected to pin 1 via capacitor CS26, and simultaneously connected to pin 1 via source resistor RS23 and capacitor CS27. Pin 3 is grounded via capacitor CS29, and simultaneously grounded through source resistors RS21E and CS21F. Pin 3 is grounded sequentially through source resistors RS21D, RS21C, RS21B, RS21A, inductor L21A, diode DS21A, and capacitor C22. Pin 4 is grounded via capacitor C24 and source resistor RS24. Source resistors RS25A, RS25B, and RS25C are connected in parallel between source resistor RS24 and the ground terminal. Pin 5 is grounded sequentially through source resistor RS22 and inductor L21B. Pin 6 is grounded. Pin 7 is connected to the base of MOS Q21. The emitter of MOS Q21 is grounded via parallel source resistors RS25A, RS25B, and RS25C. The collector of MOS Q21 is grounded via capacitor CS21 and connected to diode DS21A. Pin 8 is grounded via capacitor CS28 and connected to the power supply terminal.

[0022] The alternating conduction circuit includes a DC-AC half-bridge control IC US31 and a half-bridge driver IC US41. Pin 1 of US31 is grounded via a parallel capacitor CS33 and a source resistor RS33B, and simultaneously connected to pin 16 via a source resistor RS31B, and also connected to pin 9 via a source resistor RS36. Pin 2 is grounded via a parallel capacitor CS34 and a source resistor RS33A, and simultaneously connected to pin 16 via a source resistor RS31A. Pin 5 is grounded via a capacitor CS31 and simultaneously connected to pin 7 via a source resistor RS34. Pin 6 is grounded via a parallel source resistor RS35A and a source resistor RS35B, and simultaneously connected to the collector of MOS Q33. The emitter of MOS Q33 is connected to pin 6 via a source resistor RS35C. The base of Q33 is connected to pin 8 via source resistor RS35D. Pin 8 is grounded via capacitor CS32. Pin 9 is grounded via capacitor CS35. Pin 10 is grounded via capacitor CS37 and simultaneously connected to pin 5 of US41 via capacitor CS68. Pin 11 of US31 is connected to pin 2 of US41. Pin 12 of US31 is grounded. Pin 13 is grounded via capacitor CS66. Pin 14 is connected to pin 1 of US41. Pin 15 of US31 is grounded via capacitor CS66 and simultaneously connected to pin 5 of US41. Pin 3 of US41 is grounded. Pin 4 is connected to one end of source resistor RS42A via parallel capacitor CS46 and diode DS43. The other end of source resistor RS42A is connected to the base of MOS Q42 and simultaneously connected to the emitter of MOS Q42 via source resistor RS42C. The emitter of MOS Q42 is grounded via parallel source resistors RS46A, RS46B, RS46C, RS46D, RS46E, and RS46F. The collector of MOS Q42 is connected to the emitter of MOS Q42 via diode DS42 and to pin 6 via inductor LS48. Pin 5 is grounded via parallel capacitors C67 and CS67 and to pin 8 via diode DS61. Pin 6 is connected to the emitter of MOS Q41 and to the base of MOS Q41 via source resistor RS4. The collector of MOS Q41 is connected to the emitter of MOS Q41 via diode DS41 and to the ground via inductor LS47 and capacitor C41. Pin 7 is connected to one end of source resistor RS41A via parallel capacitor CS45 and diode DS44. The other end of source resistor RS41A is connected to the base of MOS Q41. Pin 8 is connected to pin 6 via capacitor CS41.

[0023] The LLC resonant circuit includes inductors L41A and L41B connected in series. The other end of inductor L41A is connected to the other end of inductor L41B in sequence through inductor L42, capacitor C42A, source resistor RS43A, source resistor RS43B, and source resistor RS43C. At the same time, it is connected to the other end of inductor L41B in sequence through inductor L42, capacitor C42B, source resistor RS44C, source resistor RS44B, and source resistor RS44A. The other end of inductor L41B is connected to capacitor C42A through capacitor C43 and to capacitor C42B through capacitor C44.

[0024] The boost output circuit includes an inductor L41C. One end of the inductor L41C is connected to the power supply terminal X41A via an inductor LS49, and the other end of the inductor L41C is connected to the power supply terminal X42A via an inductor LS50. A capacitor C47A, a source resistor RS45A, and a capacitor C47B are connected in series between the two ends of the inductor L41C.

[0025] The excimer lamp exciter uses an AC 120-277V input voltage, protected by fuse F11. An EMC filter composed of components such as L11 and C11 is used, and the voltage is rectified by a rectifier bridge composed of DS11-DS14. After being filtered by C21, it becomes DC. Then, the DC-DC converter is controlled by US21, and the input current power factor correction circuit composed of MOS Q21 and L21 is boosted to DC 410V and applied to the electrolytic capacitor C22. The DC-AC half-bridge control IC US31 sends a signal to the half-bridge driver IC US41 to drive MOSFETs QS41 and QS42 to conduct alternately. L42, L41, C43 and C44 form an LLC resonant circuit. The pulsed voltage is boosted to 3500V AC with a frequency of 110KHZ through the X42A and X41A terminals for output, which excites the excimer lamp to emit light.

[0026] To address the electromagnetic interference of high-voltage, high-frequency pulses generated by LLC resonance on the overall circuit and external equipment, EMC's solution mainly employs the following five functions for bypassing and attenuation.

[0027] Firstly, magnetoresistive resistors LS47 and LS48, which have relatively high impedance to different frequency bands, are used to attenuate the high DV / DT and VI / DT generated by the QS41 and QS42 switches. Then, L42 attenuates the spike interference introduced by the high and low voltage distributed capacitors of L41. LS49 and LS50 primarily block the current spikes generated when the high voltage discharges to the lamp. Finally, an EMC input L13 small common-mode ring provides overall ultra-high frequency band attenuation for the 10MHz-300MHz band, thus solving the product's electromagnetic radiation interference problem.

[0028] Secondly, a blocking filter is constructed using a common-mode inductor L12 (>35mH) and an X capacitor C15 (>100nF). C15 bypasses high-frequency components above approximately 700kHz, which are then attenuated by the high impedance generated by the common-mode inductor L12. This can reduce the overall common-mode noise in the 150kHz-2MHz range by approximately 7dB.

[0029] Thirdly, the odd-order energies of the 3KV high-voltage and 110KHZ high-frequency pulses are quite strong, with the 3, 5, 7, and 9 odd-order frequency spikes being particularly prominent. Two schemes are employed to address these special spikes. Combinations of C13C, L12A, and C13B, and C13D, L12B, and C13A, are used to form a double-π filter on the LN line. Its unique feature is that the double-π filter forms four low-pass filters on the LN line to effectively reduce the frequency spikes at 330KHZ and 770KHZ. Specifically, the combination of C13C <800pF and L12A >5mH, and the combination of C13D <800pF and L12B >5mH, effectively filters the 330KHZ frequency; the combination of C13B >1000pF and L12A >5mH, and the combination of C13A >1000pF and L12B >5mH, effectively filters the 770KHZ frequency. Four low-pass filters effectively attenuate the 3rd and 7th passes while simultaneously filtering the 5th and 9th passes.

[0030] Finally, a blocking filter is formed by using a common-mode inductor of L11>50mH and capacitor X C11>270nF. This filter effectively prevents secondary interference caused by the background noise and high-frequency spikes introduced by the high-voltage output leads or lamps through the distributed capacitance and the Y capacitor, which flow back to LN via the test network. The background noise and high-frequency spikes above about 450KHZ are bypassed by C11 and attenuated by the high impedance generated by the large common-mode inductor of L11, thus effectively preventing overall interference to the LN line.

[0031] After performing the above five combined filters, the high peak current and voltage interference noise generated by the arcing discharge phenomenon in the excimer lamp at a voltage >3000KV and a high-frequency pulse output of 110KHZ is effectively attenuated and bypassed. According to the standard wiring method, in actual tests using EN5501, the conducted current has a margin of >10dB in the 10-150KHZ band, >6dB in the 150K-2MHZ band, and >6dB in the 2M-30MHZ band. In CDN testing, the 30M-300M band has a margin of >7dB.

[0032] The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

[0033] Although this paper uses terms such as EMC filter circuit, rectifier bridge circuit, and APFC line frequently, the possibility of using other terms is not excluded. These terms are used merely for the convenience of describing and explaining the essence of this invention; interpreting them as any additional limitation would contradict the spirit of this invention.

Claims

1. An excimer lamp exciter that solves EMI, characterized by, The EMC filter circuit, the rectifier bridge circuit, the APFC circuit for input current power factor correction, the alternate conduction circuit, the LLC resonant circuit and the boost output circuit are sequentially connected, a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A, the EMC filter circuit is composed of common mode inductors L11, L12 and L13 and a capacitor network, input ends of the L11 are respectively connected with the fuse F11 and a power supply X11B, an output end of the L11 is connected with an inductor L12A / L12B, and an input end of the L11 is connected with a capacitor C11 in parallel; one end of the L12A is connected with X11C through C13B, and the other end of the L12A is connected with X11C through C13C; one end of the L12B is connected with X11C through C13A, and the other end of the L12B is connected with X11C through C13D; output ends of the L12A and the L12B are connected with an input end of the L12, an output end of the L12 is connected with an input end of the L13, an input end of the L13 is connected with a capacitor C15 in parallel, and an output end of the L13 is connected with the rectifier bridge circuit, the APFC circuit includes a chip US21; in the EMC filter circuit, the L12A, the L12B, the C13A, the C13B, the C13C and the C13D form a double-pi filter, and are used for filtering 330KHZ and 770KHZ spikes.

2. The EMI-solved excimer lamp exciter of claim 1, wherein, The EMC filter circuit includes a common mode inductor L11, one end of an input end of the common mode inductor L11 is connected with a fuse F11, one end of an output end of the common mode inductor L11 is connected with an inductor L12A, the other end of the input end of the common mode inductor L11 is connected with a power supply end X11B, the other end of the output end of the common mode inductor L11 is connected with the inductor L12B, a capacitor C11 is arranged between the one end of the input end of the common mode inductor L11 and the other end of the input end of the common mode inductor L11, the other end of the inductor L12A is connected with one end of an input end of a common mode inductor L12, one end of an output end of the common mode inductor L12 is connected with one end of an input end of a common mode inductor L13, the other end of the inductor L12B is connected with the other end of the input end of the common mode inductor L12, the other end of the output end of the common mode inductor L12 is connected with the other end of the input end of the common mode inductor L13, one end of the inductor L12A is connected with a power supply end X11C through a capacitor C13B, the other end of the inductor L12A is connected with the power supply end X11C through a capacitor C13C, one end of the inductor L12B is connected with the power supply end X11C through a capacitor C13A, one end of the inductor L12B is connected with the power supply end X11C through a capacitor C13D, the capacitor C15 is arranged between one end of the input end of the common mode inductor L13 and the other end of the input end of the common mode inductor L13 in parallel, and one end of an output end of the common mode inductor L13 and the other end of the output end of the common mode inductor L13 are connected with a rectifier bridge circuit; wherein inductance values of the L12A and the L12B are greater than 5mH, the C13C and the C13D are less than 800pF, and the C13A and the C13B are greater than 1000PF.

3. The EMI-solved excimer lamp exciter according to claim 1 or 2, characterized in that, The rectifier bridge circuit includes a diode DS11, a diode DS13 and a diode DS12, the diode DS13 and the diode DS14 are connected in series, the diode DS11 and the diode DS13 are connected in parallel with the diode DS12 and the diode DS14 connected in series, and an anode of the diode DS13 and the diode DS14 is connected with a power supply end X21B.

4. The EMI-solved excimer lamp exciter of claim 1, wherein, The APFC circuit comprises a chip US21, a pin 1 of the chip US21 is grounded through a source end resistor RS26D, a source end resistor RS26C, a source end resistor RS26B, a source end resistor RS26A and a capacitor C22 in sequence, and is also grounded through a source end resistor RS26F, a pin 2 is connected with the pin 1 through a capacitor CS26 and is grounded through a source end resistor RS23 and a capacitor CS27 in sequence, a pin 3 is grounded through a capacitor CS29 and is grounded through a source end resistor RS21E and a source end resistor CS21F in sequence, the pin 3 is grounded through a source end resistor RS21D, a source end resistor RS21C, a source end resistor RS21B, a source end resistor RS21A, an inductor L21A, a diode DS21A and a capacitor C22 in sequence, a pin 4 is grounded through a capacitor C24 and a source end resistor RS24 respectively, the source end resistor RS24 is provided with a source end resistor RS25A, a source end resistor RS25B and a source end resistor RS25C which are connected in parallel between the source end resistor RS24 and a ground end, a pin 5 is grounded through a source end resistor RS22 and an inductor L21B in sequence, a pin 6 is grounded, a pin 7 is connected with a base of a MOS Q21, an emitter of the MOS Q21 is grounded through the source end resistor RS25A, the source end resistor RS25B and the source end resistor RS25C which are connected in parallel, a collector of the MOS Q21 is connected with the diode DS21A while being grounded through a capacitor CS21, and a pin 8 is connected with a power supply end while being grounded through a capacitor CS28.

5. The EMI-solved excimer lamp exciter of claim 1, wherein, The alternating conducting circuit includes DC-AC half-bridge control IC US31 and half-bridge drive IC US41, pin 1 of the US31 is connected to pin 16 through parallel capacitor CS33 and source resistor RS33B grounded, and is connected to pin 9 through source resistor RS36, pin 2 is connected to pin 16 through parallel capacitor CS34 and source resistor RS33A grounded, and is connected to pin 7 through source resistor RS34 grounded, pin 6 is connected to the collector of MOS Q33 through parallel source resistor RS35A and source resistor RS35B grounded, the emitter of MOS Q33 is connected to pin 6 through source resistor RS35C, the base of MOS Q33 is connected to pin 8 through source resistor RS35D, pin 8 is grounded through capacitor CS32, pin 9 is grounded through capacitor CS35, pin 10 is connected to pin 5 of US41 through capacitor CS68 grounded, pin 11 of US31 is connected to pin 2 of US41, pin 12 of US31 is grounded, pin 13 is grounded through capacitor CS66, pin 14 is connected to pin 1 of US41, pin 15 of US31 is connected to pin 5 of US41 through capacitor CS66 grounded, pin 3 of US41 is grounded, pin 4 is connected to one end of source resistor RS42A through parallel capacitor CS46 and diode DS43, the other end of source resistor RS42A is connected to the base of MOS Q42, and is connected to the emitter of MOS Q42 through source resistor RS42C, the emitter of MOS Q42 is grounded through parallel source resistor RS46A, source resistor RS46B, source resistor RS46C, source resistor RS46D, source resistor RS46E and source resistor RS46F, the collector of MOS Q42 is connected to the emitter of MOS Q42 through diode DS42, and is connected to pin 6 through inductor LS48, pin 5 is connected to pin 8 through parallel capacitor C67 and capacitor CS67 grounded, and diode DS61, pin 6 is connected to the emitter of MOS Q41, and is connected to the base of MOS Q41 through source resistor RS4, the collector of MOS Q41 is connected to the emitter of MOS Q41 through diode DS41, and is grounded through inductor LS47 and capacitor C41 in sequence, pin 7 is connected to one end of source resistor RS41A through parallel capacitor CS45 and diode DS44, the other end of source resistor RS41A is connected to the base of MOS Q41, pin 8 is connected to pin 6 through capacitor CS41.

6. The EMI-solved excimer lamp exciter of claim 1, wherein, The LLC resonance circuit comprises an inductor L41A and an inductor L41B connected in series, one end of the inductor L41A is connected to the other end of the inductor L41B through an inductor L42, a capacitor C42A, a source resistor RS43A, a source resistor RS43B, a source resistor RS43C in sequence, and meanwhile through an inductor L42, a capacitor C42B, a source resistor RS44C, a source resistor RS44B, a source resistor RS44A in sequence, the other end of the inductor L41B is connected to the capacitor C42A through a capacitor C43 and connected to the capacitor C42B through a capacitor C44.

7. The EMI-solved excimer lamp exciter of claim 1, wherein, The boost output circuit comprises an inductor L41C, one end of the inductor L41C is connected to a power supply end X41A through an inductor LS49, the other end of the inductor L41C is connected to a power supply end X42A through an inductor LS50, and the inductor L41C has a capacitor C47A, a source resistor RS45A and a capacitor C47B connected in series between the two ends of the inductor L41C.

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