Image sensor
By introducing an innovative light-shielding structure into the image sensor, the problem of uneven light reception caused by pixel shrinkage is solved, improving the sensitivity and focusing ability of the image sensor and achieving higher performance stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- VISERA TECH CO LTD
- Filing Date
- 2021-03-15
- Publication Date
- 2026-05-15
AI Technical Summary
As pixel size shrinks, the accuracy of the image sensor shifts, leading to a decline in overall performance. This is especially true after integrating phase difference autofocus pixels, where uneven light reception by the sensing unit affects image focusing.
An innovative light-shielding structure is introduced into the image sensor, including a first and an additional light-shielding structure, which is positioned between the autofocus sensing unit and the adjacent sensing unit. By extending laterally, it blocks excess light and ensures uniform light reception.
By homogenizing light reception, the sensitivity of the image sensor and the image focusing capability are improved, the problem of uneven light reception is solved, and the overall performance is improved.
Smart Images

Figure CN114613791B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an image sensor and a method for forming the same, and more particularly to the configuration of a light-shielding structure for the image sensor. Background Technology
[0002] Image sensors, such as complementary metal-oxide-semiconductor (CIS) image sensors, are widely used in imaging devices, such as digital still cameras, digital video cameras, and other similar devices. The light-sensing unit of an image sensor detects color changes in the environment and generates a signal charge based on the amount of light received by the light-sensing unit. Furthermore, the signal charge generated in the light-sensing unit can be transmitted and amplified to obtain an image signal.
[0003] Driven by industry demands, pixel sizes continue to shrink. To maintain high performance, a set of phase difference autofocus (PDAF) pixels can be integrated with traditional pixels. Light received by this set of PDAF pixels is focused by a color filter and collected in the sensing unit at the bottom, thus detecting image focus. However, image sensors with reduced pixel sizes can significantly affect overall component performance due to slight deviations in accuracy. Therefore, the aforementioned and related issues need to be addressed through the design and manufacturing of image sensors. Summary of the Invention
[0004] The purpose of this disclosure is to provide an image sensor to solve at least one of the problems described above.
[0005] In one embodiment, an image sensor includes a group of autofocus sensing units. Adjacent sensing units are adjacent to and surround the group of autofocus sensing units, wherein each adjacent sensing unit has a first side and a second side, the first side being close to the group of autofocus sensing units and the second side being away from the group of autofocus sensing units. The image sensor includes a first light-shielding structure disposed between the group of autofocus sensing units and the adjacent sensing units; and a first additional light-shielding structure extending laterally from the first light-shielding structure and disposed on at least one of the first and second sides of one or more adjacent sensing units.
[0006] In another embodiment, an image sensor includes a group of autofocus sensing units. Adjacent sensing units are adjacent to and surround the group of autofocus sensing units, wherein each adjacent sensing unit has a first side and a second side, the first side being close to the group of autofocus sensing units and the second side being away from the group of autofocus sensing units. The image sensor includes a first light-shielding structure disposed between the group of autofocus sensing units and the adjacent sensing units, wherein the first light-shielding structure includes a plurality of first magnifying portions on at least one of the first and second sides of the adjacent sensing units, wherein the first magnifying portions are symmetrically arranged around the center point of the group of autofocus sensing units. Attached Figure Description
[0007] The various aspects of embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be noted that, in accordance with industry standard practice, the various features are not drawn to scale. In fact, the dimensions of various components can be arbitrarily enlarged or reduced to clearly demonstrate the features of embodiments of this disclosure.
[0008] Figure 1 This is a top view of an image sensor including various sensing units according to some embodiments of the present disclosure.
[0009] Figures 2A to 2C Based on some embodiments of this disclosure, Figure 1 A cross-sectional schematic diagram of the image sensor in the image sensor.
[0010] Figures 3A-3E This is a top view of an image sensor prior to the fabrication of a color filter unit and microlens, according to some embodiments of the present disclosure.
[0011] Figures 4A to 4C This is a top view of an image sensor prior to the fabrication of a color filter unit and microlens, according to some embodiments of the present disclosure.
[0012] Figures 5A to 5D This is a top view of an image sensor prior to the fabrication of a color filter unit and microlens, according to some embodiments of the present disclosure.
[0013] Figures 6A to 6D This is a top view of an image sensor prior to the fabrication of a color filter unit and microlens, according to some embodiments of the present disclosure.
[0014] The attached figures are labeled as follows:
[0015] 10: Image Sensor
[0016] 20: Image Sensor
[0017] 30: Image sensor
[0018] 100: Base
[0019] 102: Color filter unit
[0020] 104: Autofocus Sensing Unit Group
[0021] 106: Neighbor sensing unit
[0022] 106a, 106d, 106g, 106j: Adjacent edge sensing units (diagonal units)
[0023] 106b, 106c, 106h, 106i: Adjacent edge sensing unit (X-axis unit)
[0024] 106e, 106f, 106k, 106l: Adjacent edge sensing unit (Y-axis unit)
[0025] 106-B: Back-end sensing unit
[0026] 106-F: Front-end sensing unit
[0027] 108: Ambient Sensing Unit
[0028] 110: Light-shielding structure
[0029] 112: Additional light-shielding structure
[0030] 114: Grid Structure
[0031] 116: First microlens
[0032] 118: Second microlens
[0033] 120b: Incident light
[0034] 120f: Incident light
[0035] A-A': Line segment
[0036] P: Sensing Unit
[0037] S1: First side
[0038] S2: Second side Detailed Implementation
[0039] The following disclosure provides numerous different embodiments or examples for implementing various components of the invention. Specific examples of components and configurations are described below to simplify embodiments of this disclosure. Of course, these are merely examples and are not intended to limit the embodiments of this disclosure. For example, the description mentioning that a first component is formed on a second component may include embodiments in which the first and second components are in direct contact, or embodiments in which an additional component is formed between the first and second components such that the first and second components are not in direct contact.
[0040] It should be understood that additional operational steps may be performed before, during, or after the method, and in other embodiments of the method, some operational steps may be replaced or omitted.
[0041] Furthermore, spatial terms such as "below," "below," "lower," "above," "above," "higher," and similar terms may be used to describe the relationship between one element or component and other elements or components as shown in the figure. These spatial terms are intended to encompass different orientations of the device in use or operation, as well as the orientations shown in the figures. When the device is rotated to other orientations (rotated 90° or other orientations), the spatial relative descriptions used herein can also be interpreted according to the orientation after rotation.
[0042] In this disclosure, the terms "about," "approximately," and "roughly" generally mean within 20%, 10%, 5%, 3%, 2%, 1%, or even 0.5% of a given value or range. The quantities given here are approximate. That is, the meanings of "about," "approximately," and "roughly" are implied even without specific explanation.
[0043] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art. It should be understood that these terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with the relevant art and the background or context of this disclosure, and should not be interpreted in an idealized or overly formal manner, unless specifically defined in embodiments of this disclosure.
[0044] The different embodiments disclosed below may reuse the same reference numerals and / or designations. These repetitions are for simplicity and clarity purposes and are not intended to govern the relationship between the various embodiments and / or structures discussed.
[0045] Traditionally, light-shielding structures separate each sensing unit (or pixel) from each other, allowing a color filter to convert incident light into the desired color for each sensing unit, unaffected by neighboring sensing units. However, adding a group of autofocus sensing units (also known as phase difference autofocus (PDAF) pixels) can disrupt the cycling effect inherent in conventional image sensors, where microlenses of the same size are arranged sequentially. Therefore, a shielding effect can occur when light enters outside the normal direction of the image sensor plane (e.g., at an angle relative to the image sensor plane), where sensing units adjacent to the autofocus sensing unit group receive less light than other sensing units in the same group. This results in non-uniform sensitivity among the sensing units on the element. Embodiments of this disclosure provide an innovative light-shielding structure configuration method to address the above problems. The light-shielding structure of this disclosure blocks excess light, thereby achieving higher uniformity of sensitivity among image sensors.
[0046] Figure 1 This is a top view of an image sensor including various sensing units according to some embodiments of the present disclosure. In some embodiments, the image sensor may actually include millions of sensing units. The present disclosure presents a portion of an actual image sensor, which may be divided into three groups. At the center, four sensing units constitute a group of autofocus sensing units 104. According to some embodiments of the present disclosure, the group of autofocus sensing units 104 is arranged in a 2×2 configuration, but the embodiments of the present disclosure are not limited thereto. In some embodiments, the autofocus sensing units 104 may correspond to m×n photoelectric conversion components, where m and n may be the same or different positive integers, but the embodiments of the present disclosure are not limited thereto. It should be noted that only one microlens is disposed on the entire group of autofocus sensing units 104, indicating that its microlens will have different dimensions (e.g., bottom area, height, and / or radius of curvature) than the microlenses on other sensing units. According to some embodiments of the present disclosure, the image sensor will be able to focus when light is received evenly by each autofocus sensing unit within this group. However, if the light received by each autofocus sensing unit is not evenly distributed, the image sensor will be out of focus. Therefore, the autofocus sensing unit group 104 can detect and track the image focus of the entire element.
[0047] Reference Figure 1The sensing units directly adjacent to and surrounding the autofocus sensing unit group 104 are called neighboring sensing units 106. For clarity, the neighboring sensing units 106 are further divided into neighboring sensing units 106a, 106b, 106c, 106d, 106e, 106f, 106g, 106h, 106i, 106j, 106k, and 106l. Finally, the sensing units on the periphery are called surrounding sensing units 108. According to some embodiments of this disclosure, the neighboring sensing units 106 can be further classified based on the axial direction relative to the autofocus sensing unit group 104. For example, adjacent sensing units 106b, 106c, 106h, and 106i are X-axis units; adjacent sensing units 106e, 106f, 106k, and 106l are Y-axis units; and adjacent sensing units 106a, 106d, 106g, and 106j are diagonal units. According to some embodiments of this disclosure, the microlenses on each adjacent sensing unit 106 and the surrounding sensing unit 108 have the same size.
[0048] Figures 2A to 2C yes Figure 1 The cross-sectional schematic diagram of the image sensor shown is composed of [amount not specified]. Figure 1 The perpendicular plane of line segment A-A' is obtained. Figures 2A to 2C Image sensors 10, 20, and 30 are shown respectively. The differences between image sensors 10, 20, and 30 will be described in detail later. (See reference...) Figure 2A In some embodiments, the image sensor 10 includes a group of autofocus sensing units 104, adjacent sensing units 106, and surrounding sensing units 108, as described above. Each of the autofocus sensing unit group 104, adjacent sensing units 106, and surrounding sensing units 108 includes a plurality of sensing elements P, a color filter unit 102, and microlenses (such as a first microlens 116 and a second microlens 118). The plurality of sensing elements P may be embedded within a substrate 100. The substrate 100 may be a single structure shared by all units of the image sensor 10.
[0049] In some embodiments, the substrate 100 may be, for example, a wafer or a die, but this disclosure is not limited thereto. In some embodiments, the substrate 100 may be a semiconductor substrate, such as a silicon substrate. Furthermore, in some embodiments, the semiconductor substrate may also be: an elemental semiconductor, including germanium; a compound semiconductor, including gallium nitride (GaN), silicon carbide (SiC), gallium arsenide (GaAs), gallium phosphide (GaP), indium phosphide (InP), indium arsenide (InAs), and / or indium antimonide (InSb); or an alloy semiconductor, including silicon germanium (SiGe) alloy, gallium arsenide phosphide (GaAsP) alloy, aluminum indium arsenide (AlInAs) alloy, aluminum gallium arsenide (AlGaAs) alloy, and gallium indium arsenide (GaInAs). The substrate 100 may be a photoelectric conversion substrate, such as a silicon substrate or an organic photoelectric conversion layer. The substrate may be an arsenide (GaInAs) alloy, a gallium-indium phosphide (GaInP) alloy, and / or a gallium-indium arsenide phosphide (GaInAsP) alloy, or a combination thereof. In some embodiments, the substrate 100 may be a photoelectric conversion substrate, such as a silicon substrate or an organic photoelectric conversion layer.
[0050] In other embodiments, substrate 100 may also be a semiconductor on-insulator (SOI) substrate. The SOI substrate may include a base plate, a buried oxide (BOX) layer disposed on the base plate, and a semiconductor layer disposed on the buried oxide layer. Furthermore, substrate 100 may be of N-type or P-type conductivity.
[0051] In some embodiments, substrate 100 may include various isolation components (not shown) to define active regions and electrically isolate active region components within or on substrate 100. In some embodiments, the isolation components may include shallow trench isolation (STI) components, local oxidation of silicon (LOCOS) components, other suitable isolation components, or combinations thereof. In some embodiments, forming the isolation components may include, for example, forming an insulating layer on substrate 100, selectively etching the insulating layer and substrate 100 to form trenches within substrate 100, growing a nitrogen-rich (e.g., silicon oxynitride, SiON) liner in the trenches, filling the trenches with an insulating material (e.g., silicon dioxide, SiO2, silicon nitride, or silicon oxynitride) using a deposition process, then annealing the insulating material in the trenches, and then planarizing the substrate 100 to remove excess insulating material, so that the insulating material in the trenches is flush with the top surface of substrate 100.
[0052] In some embodiments, the substrate 100 may include various P-type doped regions and / or N-type doped regions (not shown) formed by processes such as ion implantation and / or diffusion. In some embodiments, transistors, photodiodes, or other similar devices may be formed in the active region (defined by the isolation component).
[0053] As mentioned above, each of the autofocus sensing unit group 104, the adjacent sensing unit 106, and the surrounding sensing unit 108 includes a color filter unit 102 disposed on a plurality of sensing portions P (embedded within the substrate 100). According to some embodiments of the present disclosure, the adjacent sensing unit 106 may be vertically and laterally adjacent to the autofocus sensing unit group 104, while the surrounding sensing unit 108 may be vertically and laterally adjacent to the adjacent sensing unit 106. In some embodiments, the height of the color filter unit 102 may be between approximately 0.3 μm and 2.0 μm. In some embodiments, the color filter unit 102 may be red, green, blue, white, or infrared, depending on the needs of each sensing unit, wherein each underlying sensing portion P (such as a photodiode) may convert the light signal received by each of the autofocus sensing unit group 104, the adjacent sensing unit 106, and the surrounding sensing unit 108 into an electronic signal.
[0054] Reference Figure 2A The image sensor 10 includes a light-shielding structure 110 disposed on the substrate 100. For example... Figures 3A-3E , Figures 4A to 4C , Figures 5A to 5D ,and Figures 6A to 6D As shown (described later), from a top view, the light-shielding structure 110 is a single mesh structure. From the top view, the light-shielding structure 110 distinguishes each autofocus sensing unit group 104, each adjacent sensing unit 106, and each surrounding sensing unit 108. However, for clarity, the light-shielding structure 110 will be classified as a first light-shielding structure and a second light-shielding structure (not separately labeled in the figures). In this embodiment, the first light-shielding structure of the light-shielding structure 110 is disposed between the autofocus sensing unit group 104 and the adjacent sensing unit 106, and between the adjacent sensing unit 106 and the surrounding sensing unit 108. In some embodiments, the first light-shielding structure of the light-shielding structure 110 spans the boundaries of the autofocus sensing unit group 104, the adjacent sensing unit 106, and the surrounding sensing unit 108. In other words, the first light-shielding structure of the light-shielding structure 110 is configured to be shared by any two adjacent units (such as the autofocus sensing unit group 104 and the adjacent sensing unit 106, or the adjacent sensing unit 106 and the surrounding sensing unit 108). The configuration of the light-shielding structure 110 prevents one of the sensing units P below one of the color filter units 102 from receiving additional light from adjacent color filter units 102 of different colors, which could affect the accuracy of signal reception. In some embodiments of this disclosure, the height of the light-shielding structure 110 may be between approximately 0.005 μm and 2.000 μm. In some embodiments, the material of the light-shielding structure 110 may include opaque metals (such as tungsten, aluminum, etc.), opaque metal nitrides (such as titanium nitride, TiN), opaque metal oxides (such as titanium oxide, TiO), other suitable materials, or combinations thereof, but this disclosure is not limited thereto. The light-shielding structure 110 can be formed by depositing a metal layer on the substrate 100 and then patterning the metal layer using photolithography and etching processes, but the embodiments disclosed herein are not limited thereto.
[0055] Reference Figure 2AA grid structure 114 is provided on the light-shielding structure 110. In some embodiments, the shape of the grid structure 114 may correspond to the shape of the light-shielding structure 110. In some embodiments, the centerline (not shown) of the grid structure 114 may define the boundary of each autofocus sensing unit group 104, each adjacent sensing unit 106, and each surrounding sensing unit 108. In some embodiments, the light-shielding structure 110 may be intentionally not aligned with the centerline of the grid structure 114 in the lateral direction depending on the reception of oblique incident light. Similarly, the subsequently formed microlenses may be intentionally not aligned with the centerline of the grid structure 114 in the lateral direction. Therefore, in some embodiments, the light-shielding structure 110 is embedded within the grid structure 114. In other embodiments, the light-shielding structure 110 may extend beyond the edge of the grid structure 114. Nevertheless, the inventors have found that the intentionally misaligned configuration may not adequately compensate for the shading effect caused by the structure of the autofocus sensing unit group 104. Therefore, an additional light-shielding structure 112 is introduced in this disclosure to address the above-mentioned problem, which will be explained later. In some embodiments, the height of the mesh structure 114 may be greater than or equal to the height of the light-shielding structures 110 (the first light-shielding structure and the second light-shielding structure), depending on the design requirements of each of the image sensors 10, 20, and 30. According to some embodiments of this disclosure, the mesh structure 114 may have a lower refractive index than the color filter unit 102. According to some embodiments of this disclosure, the refractive index of the mesh structure 114 is between approximately 1.00 and 1.99. When incident light enters the color filter unit 102, the mesh structure 114 can isolate the light within a specific color filter unit 102 to achieve a light-trapping effect. The material of the mesh structure 114 may include a transparent dielectric material.
[0056] Reference Figure 2AThe microlenses are positioned above the color filter unit 102 corresponding to the autofocus sensing unit group 104, the adjacent sensing unit 106, and the surrounding sensing unit 108. In some embodiments of this disclosure, as previously mentioned, the microlenses include a first microlens 116 and a second microlens 118. In some embodiments, each first microlens 116 corresponds to each group of autofocus sensing units 104, and each second microlens 118 corresponds to each adjacent sensing unit 106 and each surrounding sensing unit 108. In some embodiments, the first microlens 116 and the second microlens 118 are used to converge incident light through the color filter unit 102 into a plurality of sensing portions P on the substrate 100. In some embodiments, the materials of the first microlens 116 and the second microlens 118 may be transparent materials. For example, their materials may include glass, epoxy resin, silicone resin, polyurethane, any other suitable materials or combinations thereof, but embodiments of this disclosure are not limited thereto. In some embodiments, the first microlens 116 and the second microlens 118 may be formed by photoresist reflow, hot embossing, any other available method, or a combination thereof. In some embodiments, the steps of forming the first microlens 116 and the second microlens 118 may include spin-on coating, photolithography, etching, any other available process, or a combination thereof, but the embodiments disclosed herein are not limited thereto.
[0057] As mentioned, since each first microlens 116 covers more than one sensing unit, while each second microlens 118 covers only a single sensing unit, the first microlens 116 has different structural dimensions than the second microlens 118. For example, the bottom area, height, and / or radius of curvature of the first microlens 116 may differ from the bottom area, height, and / or radius of curvature of the second microlens 118. Before the incorporation of the autofocus sensing unit group 104, the overall surface of the image sensor contained only microlenses of the same size (such as the size of the second microlens 118), which could produce a cyclic effect. The cyclic effect allows each sensing unit to receive a uniform amount of incident light, regardless of the direction and / or angle of the incident light. By integrating the autofocus sensing unit group 104, the sensitivity of the image sensor 10 can be improved, and image focus can be detected and tracked. However, the structure of the first microlens 116 may disrupt the cyclic effect of the image sensor 10, resulting in poor uniformity of sensitivity.
[0058] For clarity and simplification, each adjacent sensing unit 106 may include a first side S1 and a second side S2. According to some embodiments of this disclosure, the first side S1 is an interface (or boundary) between the autofocus sensing unit group 104 and the adjacent sensing unit 106, while the second side S2 is an interface (or boundary) between the adjacent sensing unit 106 and the surrounding sensing unit 108. In some embodiments, the first side S1 is close to (or adjacent to) the autofocus sensing unit group 104, while the second side S2 is away from (or opposite to) the autofocus sensing unit group 104.
[0059] According to some embodiments of this disclosure, when incident light enters at an angle (e.g., tilted to the right), the adjacent sensing unit 106 to the right of the autofocus sensing unit group 104 can be directly illuminated. Conversely, the adjacent sensing unit 106 to the left of the autofocus sensing unit group 104 can be indirectly illuminated, for example, by having a first microlens 116 blocking it. Figures 2A to 2C In this embodiment, based on the incident direction of light, the adjacent sensing unit 106 to the right of the autofocus sensing unit group 104 (directly facing the incident light in front of the autofocus sensing unit group 104) can also be considered as the front sensing unit 106-F, and the adjacent sensing unit 106 to the left of the autofocus sensing unit group 104 (receiving light through the autofocus sensing unit group 104 in the horizontal direction) can also be considered as the rear sensing unit 106-B. As previously mentioned, the first microlens 116 may have a different structural size than the second microlens 118, and the light received by the front sensing unit 106-F and the rear sensing unit 106-B may be affected by the structure of the first microlens 116. In other words, the amount of light received by the front sensing unit 106-F may be different from the amount of light received by the rear sensing unit 106-B, resulting in poor light reception uniformity between the front sensing unit 106-F and the rear sensing unit 106-B.
[0060] Reference Figure 2A The height of the first microlens 116 of the image sensor 10 is substantially equal to that of the adjacent second microlens 118. Given the substantially equal height, the first microlens 116, having a larger bottom area, can have a larger radius of curvature than the second microlens 118. Figure 2AAs shown, the two ends of the first microlens 116 are respectively adjacent to the second microlens 118 on the front-end sensing unit 106-F and the second microlens 118 on the rear-end sensing unit 106-B. When the incident light enters at an angle (tilted to the right), it should be noted that, due to the structural characteristics of the first microlens 116, the adjacent portion of the first microlens 116 and the second microlens 118 on the rear-end sensing unit 106-B provides a larger surface area for light to irradiate than the adjacent portion of the second microlens 118 on the front-end sensing unit 106-F and the second microlens 118 on the adjacent surrounding sensing unit 108 (because the gap between the first microlens 116 and the second microlens 118 is deeper than the gap between the two second microlenses 118). Therefore, the rear-end sensing unit 106-B receives more incident light 120b than the front-end sensing unit 106-F receives incident light 120f.
[0061] Reference Figure 2A To overcome poor light reception uniformity, as previously mentioned, an additional light-shielding structure 112 is introduced. However, for clarity, the additional light-shielding structure 112 will be classified as a first additional light-shielding structure and a second additional light-shielding structure (not shown separately in the figures). The first additional light-shielding structure of the additional light-shielding structure 112 may be disposed on the first side S1 of the front-end sensing unit 106-F and the rear-end sensing unit 106-B, and extends laterally from the first light-shielding structure of the light-shielding structure 110 toward the second side S2 of the corresponding adjacent sensing unit 106.
[0062] According to some embodiments of this disclosure, the additional light-shielding structure 112 (first additional light-shielding structure and second additional light-shielding structure) can be an enlarged portion derived from the light-shielding structure 110 (first light-shielding structure and second light-shielding structure), making the light-shielding structure 110 and the additional light-shielding structure 112 a continuous structure. In other words, the light-shielding structure 110 and the additional light-shielding structure 112 are integrally formed. In some embodiments, the light-shielding structure 110 and the additional light-shielding structure 112 can share the same material, thus allowing the same mask to be used to simultaneously form the light-shielding structure 110 and the additional light-shielding structure 112 without increasing additional costs. In other embodiments, the additional light-shielding structure 112 may also have a different material than the light-shielding structure 110, which may require different masks for manufacturing. According to some embodiments of this disclosure, the additional light-shielding structure 112 (first additional light-shielding structure and second additional light-shielding structure) can be symmetrically arranged around the center point of the autofocus sensing unit group 104. As previously mentioned, the actual image sensor may include millions of autofocus sensing unit groups 104. The symmetrical feature of the additional light-shielding structure 112 allows for more intuitive process steps and mask design between component surfaces. It should be noted that... Figure 2AIn this configuration, excess light received by the rear-end sensing unit 106-B is blocked by the first additional light-shielding structure of the additional light-shielding structure 112 of the rear-end sensing unit 106-B. Therefore, the amount of light received by the front-end sensing unit 106-F and the rear-end sensing unit 106-B can be more uniform.
[0063] Reference Figure 2B The height of the first microlens 116 of the image sensor 20 is significantly greater than that of the adjacent second microlens 118. Using a fixed radius of curvature, the larger height of the first microlens 116 increases its base area. Figure 2B As shown, the two ends of the first microlens 116 overlap the second microlens 118 on the front-end sensing unit 106-F and the second microlens 118 on the rear-end sensing unit 106-B, respectively. It should be noted that, due to the larger height and bottom area of the first microlens 116, the overlapping portion of the first microlens 116 and the second microlens 118 on the rear-end sensing unit 106-B provides a smaller surface area for light illumination than the overlapping portion of the second microlens 118 on the front-end sensing unit 106-F and the second microlens 118 on the adjacent surrounding sensing unit 108. Furthermore, a blocking effect occurs, with a portion of the incident light 120b being blocked by the first microlens 116, thus reducing the amount of incident light 120b received by the rear-end sensing unit 106-B. Therefore, the final amount of incident light 120b received by the rear-end sensing unit 106-B may be less than the amount of incident light 120f received by the front-end sensing unit 106-F.
[0064] Reference Figure 2B To overcome poor light reception uniformity, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the second side S2 of the front-end sensing unit 106-F and the rear-end sensing unit 106-B, extending laterally from the first light-shielding structure of the light-shielding structure 110 toward the first side S1 of the corresponding adjacent sensing unit 106. The features of the additional light-shielding structure 112 in the image sensor 20 are similar to those in the image sensor 10, and will not be repeated here. According to some embodiments of this disclosure, the additional light-shielding structures 112 (first additional light-shielding structure and second additional light-shielding structure) can also be symmetrically arranged around the center point of the autofocus sensing unit group 104. The symmetrical features of the additional light-shielding structure 112 can improve the light reception uniformity between the front-end sensing unit 106-F and the rear-end sensing unit 106-B. It should be noted that in Figure 2B In this process, a portion of the light received by the front-end sensing unit 106-F is blocked by the first additional light-shielding structure of the additional light-shielding structure 112 of the front-end sensing unit 106-F. Therefore, the amount of light received by the front-end sensing unit 106-F and the back-end sensing unit 106-B can be more uniform.
[0065] Reference Figure 2C An alternative design is shown in image sensor 30, which combines the design concepts of image sensor 10 and image sensor 20. Whenever the autofocus sensing unit group 104 has a strong light absorption rate (sensitivity), a portion of the light can be evenly distributed among adjacent sensing units 106. In the above situation, it is necessary to further limit the light reception at the front sensing unit 106-F and the rear sensing unit 106-B to adjust the energy difference. Figure 2C As shown, the two ends of the first microlens 116 do not overlap with the second microlens 118 on the front-end sensing unit 106-F and the second microlens 118 on the rear-end sensing unit 106-B, so that the light received by the front-end sensing unit 106-F and the rear-end sensing unit 106-B can be substantially uniform. In other words, the incident light 120f and the incident light 120b can illuminate relatively equal amounts of surface area. However, it can be noted that slight variations in the structure of the first microlens 116 will affect the uniformity of light reception between the front-end sensing unit 106-F and the rear-end sensing unit 106-B. For example, if the height of the first microlens 116 is slightly increased, a portion of the incident light 120b will be blocked, resulting in the rear-end sensing unit 106-B receiving less light than the front-end sensing unit 106-F. Conversely, if the height of the first microlens 116 is slightly reduced, the incident light 120b may illuminate a larger surface area, resulting in the rear sensing unit 106-B receiving a greater amount of light than the front sensing unit 106-F. Therefore, maintaining the uniformity of light reception between the front sensing unit 106-F and the rear sensing unit 106-B is very difficult.
[0066] Reference Figure 2C To overcome the difficulties in energy differences and maintaining light reception uniformity, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on both the first side S1 and the second side S2 of the front-end sensing unit 106-F and the rear-end sensing unit 106-B, extending laterally from the first light-shielding structure of the light-shielding structure 110 toward the second side S2 and the first side S1 of the corresponding adjacent sensing unit 106. The features of the first additional light-shielding structure of the additional light-shielding structure 112 in the image sensor 30 are similar to those of the first additional light-shielding structure of the additional light-shielding structure 112 in the image sensor 10 and the image sensor 20, and will not be repeated here. According to some embodiments of this disclosure, the additional light-shielding structures 112 (first additional light-shielding structure and second additional light-shielding structure) can be symmetrically arranged around the center point of the autofocus sensing unit group 104. The symmetrical features of the additional light-shielding structure 112 can improve the light reception uniformity between the front-end sensing unit 106-F and the rear-end sensing unit 106-B. Therefore, depending on circuit requirements, the image sensor 30 may be a suitable option.
[0067] According to some embodiments of this disclosure Figures 2A to 2C Three different methods are shown for configuring the first additional light-shielding structure of the additional light-shielding structure 112 on image sensors 10, 20, and 30. The design choice can be determined based on simulation results, depending on circuit requirements and the nature of the specified incident light. It should be understood that when the first additional light-shielding structure of the additional light-shielding structure 112 is not sufficiently extended by the first side S1 and / or the second side S2 of each adjacent sensing unit 106, it may fail to adequately block excess received light, resulting in poor uniformity of sensitivity on image sensors 10, 20, and 30. However, if the first additional light-shielding structure of the additional light-shielding structure 112 extends excessively by the first side S1 and / or the second side S2 of each adjacent sensing unit 106, the multiple sensing elements P embedded in the substrate 100 may fail to operate properly (appropriately receive light signals), which can degrade the overall performance of image sensors 10, 20, and 30. Therefore, a specific amount of the total area of each adjacent sensing unit 106 must be kept unblocked so that light can be received by the multiple sensing units P within the substrate 100. In some embodiments of this disclosure, additional light-shielding structures 112 (first additional light-shielding structure and second additional light-shielding structure) may cover between approximately 0% and 50% of the total area of each adjacent sensing unit 106.
[0068] Figures 3A-3E This is a top view of an image sensor according to some embodiments of the present disclosure, showing an autofocus sensing unit group 104, adjacent sensing units 106, light-shielding structures 110 (first light-shielding structure and second light-shielding structure), and additional light-shielding structures 112 (first additional light-shielding structure and second additional light-shielding structure), while omitting the color filter unit 102, the surrounding sensing unit 108, the grid structure 114, and the microlenses (first microlens 116 and second microlens 118). In some embodiments, the shape of the additional light-shielding structure 112 (when viewed from top view) can vary within manufacturing limits. According to some embodiments of the present disclosure, various shapes are suitable as long as the additional light-shielding structure 112 is symmetrically arranged around the center point of the autofocus sensing unit group 104 and the coverage area is between approximately 0% and 50% of the total area of each adjacent sensing unit 106. Figures 3A-3E Several examples of how the shape of the additional light-shielding structure 112 can be varied are shown, but the embodiments disclosed herein are not limited thereto.
[0069] Reference Figures 3A-3EFor clarity and simplicity, only the first additional light-shielding structure of the additional light-shielding structure 112 is shown, which extends only from the first side S1 of each adjacent sensing unit 106 toward the second side S2 of the corresponding adjacent sensing unit 106. In these embodiments, emphasis may be placed on the description of the X-axis and Y-axis units, namely adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l. Diagonal units are not considered at this time.
[0070] In some embodiments, Figure 3A The first additional light-shielding structure shown in the additional light-shielding structure 112 is rectangular. For example... Figure 3A As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the first side S1 of the adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l, and extends laterally from the first light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0071] In some embodiments, Figure 3B The first additional light-shielding structure shown in the additional light-shielding structure 112 is partially elliptical. For example... Figure 3B As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the first side S1 of the adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l, and extends laterally from the first light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0072] In some embodiments, Figure 3C The first additional light-shielding structure shown as the additional light-shielding structure 112 is partially elliptical, spanning two or more adjacent sensing units 106. (See attached image.) Figure 3C As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the first side S1 of the adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l, and extends laterally from the first light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0073] In some embodiments, Figure 3D The first additional light-shielding structure shown in the additional light-shielding structure 112 is arc-shaped. For example... Figure 3DAs shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the first side S1 of the adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l, and extends laterally from the first light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0074] In some embodiments, Figure 3E The first additional light-shielding structure shown in the additional light-shielding structure 112 is U-shaped. For example... Figure 3E As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the first side S1 of the adjacent sensing units 106b, 106c, 106e, 106f, 106h, 106i, 106k, and 106l, and extends laterally from the first light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0075] Figures 4A to 4C This is a top view of an image sensor according to some embodiments of the present disclosure, showing an autofocus sensing unit group 104, adjacent sensing units 106, light-shielding structures 110 (first light-shielding structure and second light-shielding structure), and additional light-shielding structures 112 (first additional light-shielding structure and second additional light-shielding structure), while omitting the color filter unit 102, the surrounding sensing unit 108, the grid structure 114, and the microlenses (first microlens 116 and second microlens 118). In some embodiments, the configuration of the second light-shielding structure of the light-shielding structure 110 may differ from that of the first light-shielding structure of the light-shielding structure 110. According to some embodiments of the present disclosure, the second light-shielding structure of the light-shielding structure 110 has four sides, and from the top view, the adjacent sensing units 106 diagonally adjacent to the autofocus sensing unit group 104 are the adjacent sensing units 106a, 106d, 106g, and 106j (also referred to as diagonal units). In this embodiment, the second light-shielding structure of the light-shielding structure 110 has a first corner and a second corner. The first corner is close to the autofocus sensing unit group 104, while the second corner is far away from the autofocus sensing unit group 104. Two of the four sides intersect at the first corner, and the other two of the four sides intersect at the second corner.
[0076] In some embodiments, the configuration of the second additional light-shielding structure of the additional light-shielding structure 112 may differ from that of the first additional light-shielding structure of the additional light-shielding structure 112. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 extends laterally from the second light-shielding structure of the light-shielding structure 110, and from a top view, the second additional light-shielding structure of the additional light-shielding structure 112 is disposed on at least two of the four sides. In other words, each X-axis unit and Y-axis unit has one side (first side S1) adjacent to the autofocus sensing unit group 104, while each diagonal unit has one corner (first corner) adjacent to the autofocus sensing unit group 104.
[0077] In some embodiments, Figure 4A Showing Figure 3A An image sensor designed based on an image sensor. For example... Figure 4A As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on both sides intersecting the first corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the other two sides intersecting the second corner of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0078] In some embodiments, Figure 4B Showing Figure 3A An image sensor designed based on an image sensor. For example... Figure 4B As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the other two sides intersecting the second corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the two sides intersecting the first corner in the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0079] In some embodiments, Figure 4C Showing Figure 3A An image sensor designed based on an image sensor. For example... Figure 4C As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the four sides of the second light-shielding structure of the light-shielding structure 110, extending inwardly to the inner side of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0080] Figures 5A to 5DThis is a top view of an image sensor according to some embodiments of the present disclosure, showing an autofocus sensing unit group 104, an adjacent sensing unit 106, a light-shielding structure 110 (a first light-shielding structure and a second light-shielding structure), and an additional light-shielding structure 112 (a first additional light-shielding structure and a second additional light-shielding structure), while omitting the color filter unit 102, the surrounding sensing unit 108, the grid structure 114, and the microlenses (a first microlens 116 and a second microlens 118). As previously mentioned, the second light-shielding structure of the light-shielding structure 110 has four sides surrounding a diagonal unit. In this embodiment, the second light-shielding structure of the light-shielding structure 110 has a first corner and a second corner, the first corner being closer to the autofocus sensing unit group 104 and the second corner being farther away from the autofocus sensing unit group 104. Two of the four sides intersect at the first corner, and the other two of the four sides intersect at the second corner.
[0081] like Figure 5A As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the second side S2 of the X-axis unit and the Y-axis unit, extending laterally from the first light-shielding structure of the light-shielding structure 110 toward the first side S1 of the corresponding adjacent sensing unit 106. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0082] In some embodiments, Figure 5B Showing Figure 5A The image sensor is designed based on the image sensor. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 extends laterally from the second light-shielding structure of the light-shielding structure 110, and from a top view, the second additional light-shielding structure of the additional light-shielding structure 112 is disposed on at least two of the four sides. Figure 5B As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on both sides intersecting the first corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the other two sides intersecting the second corner of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0083] In some embodiments, Figure 5C Showing Figure 5A An image sensor designed based on an image sensor. For example... Figure 5CAs shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the other two sides intersecting the second corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the two sides intersecting the first corner in the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0084] In some embodiments, Figure 5D Showing Figure 5A An image sensor designed based on an image sensor. For example... Figure 5D As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the four sides of the second light-shielding structure of the light-shielding structure 110, extending inwardly to the inner side of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0085] Figures 6A to 6D This is a top view of an image sensor according to some embodiments of the present disclosure, showing an autofocus sensing unit group 104, an adjacent sensing unit 106, a light-shielding structure 110 (a first light-shielding structure and a second light-shielding structure), and an additional light-shielding structure 112 (a first additional light-shielding structure and a second additional light-shielding structure), while omitting the color filter unit 102, the surrounding sensing unit 108, the grid structure 114, and the microlenses (a first microlens 116 and a second microlens 118). As previously mentioned, the second light-shielding structure of the light-shielding structure 110 has four sides surrounding a diagonal unit. In this embodiment, the second light-shielding structure of the light-shielding structure 110 has a first corner and a second corner, the first corner being closer to the autofocus sensing unit group 104 and the second corner being farther away from the autofocus sensing unit group 104. Two of the four sides intersect at the first corner, and the other two of the four sides intersect at the second corner.
[0086] like Figure 6A As shown, the first additional light-shielding structure of the additional light-shielding structure 112 can be disposed on both the first side S1 and the second side S2 of the X-axis unit and the Y-axis unit, respectively, and extends laterally from the first light-shielding structure of the light-shielding structure 110 toward the second side S2 and the first side S1 of the corresponding adjacent sensing unit 106. According to some embodiments of this disclosure, the first additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0087] In some embodiments, Figure 6B Showing Figure 6AThe image sensor is designed based on the image sensor. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 extends laterally from the second light-shielding structure of the light-shielding structure 110, and from a top view, the second additional light-shielding structure of the additional light-shielding structure 112 is disposed on at least two of the four sides. Figure 6B As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on both sides intersecting the first corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the other two sides intersecting the second corner of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0088] In some embodiments, Figure 6C Showing Figure 6A An image sensor designed based on an image sensor. For example... Figure 6C As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the other two sides intersecting the second corner, extending laterally from the second light-shielding structure of the light-shielding structure 110 toward the two sides intersecting the first corner in the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0089] In some embodiments, Figure 6D Showing Figure 6A An image sensor designed based on an image sensor. For example... Figure 6D As shown, the second additional light-shielding structure of the additional light-shielding structure 112 can be disposed on the four sides of the second light-shielding structure of the light-shielding structure 110, extending inwardly to the inner side of the corresponding second light-shielding structure of the light-shielding structure 110. According to some embodiments of this disclosure, the second additional light-shielding structure of the additional light-shielding structure 112 can be symmetrically arranged around the center point of the autofocus sensing unit group 104.
[0090] In summary, such as Figures 2A to 2CAs shown, according to some embodiments, an image sensor disclosed herein includes a group of autofocus sensing units 104; adjacent sensing units 106 are adjacent to and surround the group of autofocus sensing units 104, wherein each adjacent sensing unit 106 has a first side S1 and a second side S2, the first side S1 being close to the group of autofocus sensing units 104 and the second side S2 being away from the group of autofocus sensing units 104. The image sensor also includes a first light-shielding structure disposed between the group of autofocus sensing units 104 and the adjacent sensing units 106; and a first additional light-shielding structure extending laterally from the first light-shielding structure and disposed on at least one of the first side S1 and the second side S2 of one or more adjacent sensing units 106.
[0091] like Figures 2A to 2C As shown, according to some embodiments, an image sensor disclosed herein includes a group of autofocus sensing units 104; adjacent sensing units 106 are adjacent to and surround the group of autofocus sensing units 104, wherein each adjacent sensing unit 106 has a first side S1 and a second side S2, the first side S1 being close to the group of autofocus sensing units 104 and the second side S2 being away from the group of autofocus sensing units 104. The image sensor also includes a first light-shielding structure disposed between the group of autofocus sensing units 104 and the adjacent sensing units 106, wherein the first light-shielding structure includes a plurality of first magnifying portions on at least one of the first side S1 and the second side S2 of the adjacent sensing units 106, wherein the first magnifying portions are symmetrically arranged around the center point of the group of autofocus sensing units 104.
[0092] The components of several embodiments have been outlined above to enable those skilled in the art to better understand the viewpoints of the embodiments described herein. Those skilled in the art should understand that they can design or modify other processes and structures based on the embodiments described herein to achieve the same purpose and / or advantages as the embodiments described herein. Those skilled in the art should also understand that such equivalent structures do not depart from the spirit and scope of the embodiments described herein, and that they can make various changes, substitutions, and replacements without departing from the spirit and scope of the embodiments described herein. Therefore, the scope of protection of the embodiments described herein is determined by the appended claims. Furthermore, although the present disclosure has been described above with reference to several preferred embodiments, it is not intended to limit the scope of the embodiments described herein.
[0093] References to features, advantages, or similar language throughout this specification are not intended to imply that all features and advantages achievable using embodiments of this disclosure should or may be implemented in any single embodiment of this disclosure. Rather, language relating to features and advantages is to be understood as meaning that a particular feature, advantage, or characteristic described in connection with an embodiment is included in at least one embodiment of this disclosure. Thus, the discussion of features and advantages, as well as similar language, throughout this specification may, but does not necessarily, represent the same embodiments.
[0094] Furthermore, in one or more embodiments, the features, advantages, and characteristics described in the embodiments of this disclosure may be combined in any suitable manner. Based on the description herein, those skilled in the art will recognize that embodiments of this disclosure may be implemented without one or more specific features or advantages of a particular embodiment. In other instances, additional features and advantages may be identified in certain embodiments that may not be present in all embodiments of this disclosure.
Claims
1. An image sensor, comprising: A set of autofocus sensing units; Multiple adjacent sensing units are located near and around the group of autofocus sensing units, wherein each adjacent sensing unit has a first side and a second side, the first side being close to the group of autofocus sensing units and the second side being far away from the group of autofocus sensing units; A first light-shielding structure is disposed between the group of autofocus sensing units and the plurality of adjacent sensing units and surrounds each adjacent sensing unit; as well as A first additional light-shielding structure extends laterally from the first light-shielding structure, and the first additional light-shielding structure is disposed only on the second side of one or more of the adjacent sensing units; The first microlens is disposed above the set of autofocus sensing units, and the second microlens is disposed above the adjacent sensing unit; the height of the first microlens is greater than the height of the second microlens, and the two ends of the first microlens overlap the second microlens on the front sensing unit and the second microlens on the rear sensing unit, respectively, and the first additional light-shielding structure is disposed on the second side.
2. The image sensor of claim 1, wherein the group of autofocus sensing units and the plurality of adjacent sensing units each include a plurality of color filter units disposed on the plurality of sensing parts, and further include a plurality of microlenses disposed on the plurality of color filter units, and a mesh structure disposed between the plurality of color filter units and on the first light-shielding structure, wherein the first light-shielding structure is embedded in the mesh structure; the height of the mesh structure is greater than or equal to the height of the first light-shielding structure; and the refractive index of the mesh structure is in the range of 1.00 and 1.
99.
3. The image sensor of claim 1 further includes a second light-shielding structure, which, in a top view, has a plurality of adjacent sensing units with four sides diagonally adjacent to the group of autofocus sensing units, wherein the second light-shielding structure has a first corner and a second corner, the first corner being close to the group of autofocus sensing units and the second corner being away from the group of autofocus sensing units, wherein two of the four sides intersect at the first corner and the other two of the four sides intersect at the second corner.
4. The image sensor of claim 3 further includes a second additional light-shielding structure extending laterally from the second light-shielding structure. In a top view, the second additional light-shielding structure is disposed on at least two of the four sides, wherein the second additional light-shielding structure is symmetrically arranged around the center point of the set of autofocus sensing units and is disposed on the two sides intersecting the first corner, extending toward the other two sides of the second light-shielding structure intersecting the second corner.
5. The image sensor of claim 3 further includes a second additional light-shielding structure extending laterally from the second light-shielding structure. In a top view, the second additional light-shielding structure is disposed on at least two of the four sides, wherein the second additional light-shielding structure is symmetrically arranged around the center point of the set of autofocus sensing units and disposed on the other two sides intersecting the second corner, extending toward the two sides of the second light-shielding structure intersecting the first corner.
6. The image sensor of claim 3 further includes a second additional light-shielding structure extending laterally from the second light-shielding structure. In a top view, the second additional light-shielding structure is disposed on at least two of the four sides, wherein the second additional light-shielding structure is symmetrically arranged around the center point of the set of autofocus sensing units and disposed on the four sides of the second light-shielding structure, extending inward within the corresponding second light-shielding structure.
7. The image sensor of claim 3 further includes a second additional light-shielding structure extending laterally from the second light-shielding structure. In a top view, the second additional light-shielding structure is disposed on at least two of the four sides, wherein the first additional light-shielding structure and the second additional light-shielding structure in each adjacent sensing unit are rectangular, elliptical, arc-shaped or U-shaped in a top view.
8. An image sensor, comprising: A set of autofocus sensing units; Multiple adjacent sensing units are located near and around the group of autofocus sensing units, wherein each adjacent sensing unit has a first side and a second side, the first side being close to the group of autofocus sensing units and the second side being far away from the group of autofocus sensing units; as well as A first light-shielding structure is disposed between the group of autofocus sensing units and the plurality of adjacent sensing units and surrounds each adjacent sensing unit, wherein the first light-shielding structure includes a plurality of first magnifying portions, the plurality of first magnifying portions are disposed only on the second side of the plurality of adjacent sensing units, and the plurality of first magnifying portions are symmetrically arranged around the center point of the group of autofocus sensing units. In this configuration, a first microlens is disposed above the set of autofocus sensing units, and a second microlens is disposed above the adjacent sensing units; the height of the first microlens is greater than the height of the second microlens, and the two ends of the first microlens overlap the second microlens on the front sensing unit and the second microlens on the rear sensing unit, respectively; and the plurality of first magnification portions are disposed only on the second side of the plurality of adjacent sensing units.
9. The image sensor of claim 8, wherein the set of autofocus sensing units and the plurality of adjacent sensing units each include a plurality of color filter units disposed on the plurality of sensing portions, and further include a plurality of microlenses disposed on the plurality of color filter units, wherein the first light-shielding structure includes metal or opaque metal oxide, wherein the plurality of first magnification portions of each adjacent sensing unit cover between 0% and 50% of the total area of each adjacent sensing unit.