Roller transport system carrier, roller transport system and vacuum processing device

Abstract

A carrier (100) for transport along a transport direction (X) on a roller transport track (200a, 200b) is described, the carrier (100) comprising: a first track (120) having a first roller contact surface, the first track being configured for supporting the carrier (100) on at least one first roller (210a, 210b) of the roller transport track (200a, 200b); the first track (120) comprising a first main portion (124) having a first main roller contact surface (126) and a first front end portion (150) having a first front end surface (160), wherein the first roller contact surface is formed by the first main roller contact surface (126) and the first front end surface (160), wherein the first front end surface (160) is an inclined surface (160) and / or the first front end portion (126) of the first track (120) is flexible.

Description

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to a carrier for transportation on a roller transportation track, in particular a carrier for supporting a substrate or a mask in a vacuum processing apparatus. Further embodiments of the present disclosure relate to a vacuum processing apparatus having a roller transportation track for transporting a carrier to and from a vacuum processing chamber. More particularly, embodiments of the present disclosure relate to apparatuses and methods for transporting a carrier which can be used in processing systems for vertical substrate processing, such as material deposition on large area substrates for display production. BACKGROUND

[0002] Techniques for performing layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in several applications and in several technical fields. For example, coated substrates can be used in the field of display devices. Display devices can be used to manufacture television screens, computer monitors, mobile phones, other hand-held devices, etc. to display information. Typically, a display is produced by coating a substrate with a stack of layers of different materials.

[0003] For depositing a layer stack, an in-line processing module arrangement can be used. An in-line processing system comprises a plurality of subsequent processing modules, such as deposition modules, and optionally further processing modules, such as cleaning modules and / or etching modules, wherein processing aspects are subsequently performed in the processing modules, so that a plurality of substrates can be processed continuously or quasi-continuously in the in-line processing system.

[0004] A substrate or a mask can be carried by a carrier, i.e. a carrying device for carrying a substrate. The carrier is typically transported through a vacuum system using a transportation system. The transportation system can be configured for transporting the carrier with the substrate disposed thereon along one or more transportation paths. For example, at least two transportation paths can be disposed in the vacuum system next to each other, such as a first transportation path for transporting the carrier in a forward direction and a second transportation path for transporting the carrier in a return direction opposite to the forward direction. Alternatively, a single transportation path can be provided for transporting the carrier in either of the forward direction and the return direction.

[0005] Accurate and smooth transportation of substrate carriers and / or mask carriers through a vacuum system is challenging. For example, in a roller-based transportation system, even a slight misalignment of a roller can cause the transported carrier to hit the misaligned roller and result in an uneven load of the roller. An increased load on a particular roller can result in an increased particle generation, thereby deteriorating the manufacturing process. Therefore, there is a need for transporting a carrier in a processing system with reduced or minimized particle generation. Further, a challenge is to provide a robust carrier transportation system for high temperature vacuum environments, for example, at low cost.

[0006] Therefore, there is an ongoing need for improved apparatus and methods for transporting carriers and for providing improved vacuum processing systems that overcome at least some of the problems of the prior art. SUMMARY

[0007] In view of the above, a roller transport system and a vacuum processing system are provided. Other aspects, advantages and features of the disclosure are apparent from the description and drawings.

[0008] According to an aspect of the disclosure, a carrier for transport on a roller transport track in a transport direction is provided. The carrier comprises a first track having a first roller contact surface, the first track being configured for supporting the carrier on at least one first roller of the roller transport track, and the first track comprising a first main portion having a first main roller contact surface and a first front end portion having a first front end surface. The first roller contact surface is formed by the first main roller contact surface and the first front end surface, wherein the first front end surface has at least one of the following features: the first front end surface is an inclined surface; and the first front end surface has flexibility.

[0009] According to another aspect of the disclosure, a roller transport system is provided. The roller transport system comprises a roller transport track comprising a plurality of rollers and a carrier according to embodiments described herein.

[0010] According to yet another aspect of the disclosure, a vacuum processing apparatus for depositing a material onto a substrate is provided. The vacuum processing apparatus comprises at least one vacuum processing chamber and a roller transport system according to embodiments described herein for transporting a carrier according to embodiments described herein to and from the at least one vacuum processing chamber.

[0011] Aspects of the disclosure provide a carrier for transport on a roller transport track, which reduces the impact and load on misaligned rollers when the carrier is transported on the roller transport track. BRIEF DESCRIPTION OF DRAWINGS

[0012] For a more detailed understanding of the above-recited features of the present disclosure, reference can be made to the more particular description of the disclosure that is referred to in brief above and discussed more fully below. The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the present disclosure and together with the description, serve to explain the principles of the present disclosure.

[0013] Figure 1 A schematic side view of a roller transport system for transporting a carrier is shown;

[0014] Figure 2 A partial schematic view of a carrier according to a further embodiment is shown;

[0015] Figure 3 a schematic side view showing a further embodiment of a carrier;

[0016] Figure 4 a schematic view showing a further embodiment of a first track;

[0017] Figure 5 a schematic view showing a further embodiment of a carrier; and

[0018] Figure 6 a cross-sectional front view of a roller transport system and a carrier. DETAILED DESCRIPTION

[0019] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the figures. In the following description, same reference numbers refer to same elements. Differences between embodiments are described only with respect to one embodiment as a part of the description. The description is intended to include such modifications and changes.

[0020] In the following description of the drawings, same reference numbers refer to same or similar elements. Typically, only differences with respect to the various embodiments are described. Descriptions of parts or aspects in one embodiment can also apply to corresponding parts or aspects in another embodiment, unless otherwise stated.

[0021] According to embodiments of the present disclosure, a carrier is provided for transport between different modules of a substrate processing assembly along a roller transport track. Embodiments of the present disclosure enable a smoother transition of the carrier between two modules. Misalignment between a sending module (i.e. a track module supporting the carrier) and a receiving module (i.e. a track module supporting the carrier after the sending module) can cause vertical or lateral forces on the carrier when the carrier is transferred between the modules. In addition, misalignment of the carrier, such as bending or bulging, can cause such lateral forces and / or vertical forces when the carrier is transferred along the transport track, for example due to thermal expansion. By providing a first front end portion according to embodiments described herein at a front end of a first track, impacts and vibrations caused by various forces can be reduced. The front end portion has a ramped surface and / or the front end portion is flexible. Other embodiments of the front end portion will be described herein.

[0022] Reference is first made to Figure 1 , Figure 1A carrier 100 for transport along a transport direction X on a roller transport track 200a, 200b is shown. The carrier 100 comprises a first track 120 having a first roller contact surface, the first track being configured for supporting the carrier 100 on at least one first roller 210a, 210b of the roller transport track 200a, 200b. The first track 120 comprises a first main portion 124 having a first main roller contact surface 126 and a first front end portion 150 having a first front end surface 160. The first roller contact surface is formed by the first main roller contact surface 126 and the first front end surface 160. The first front end surface 160 is an inclined surface 160 and / or the first front end portion 126 of the first track 120 is flexible.

[0023] Figure 1 A schematic side view of a roller transport system for transporting a carrier 100 is shown. The roller transport system comprises at least one roller track, wherein the roller transport track 200a, 200b comprises a plurality of rollers 210a, 210b.

[0024] In the present disclosure, a carrier 100 is provided for supporting a planar object, in particular a planar substrate S or a planar mask. However, the present disclosure is not limited thereto, the carrier 100 can be configured for supporting other products or tools which can be used in a vacuum processing apparatus. The carrier 100 comprises a carrier main body 110 which constitutes the structure of the carrier 100. The carrier main body 110 can comprise a substrate face on which a substrate S can be supported. The substrate face can comprise an electrostatic chuck which is configured for holding the substrate S on the substrate face by electrostatic forces.

[0025] The roller transport track 200a, 200b is provided to support the weight W or at least a part of the weight W of the carrier 100. The roller transport track further provides an effective means for moving the carrier 100 along the length of the roller transport track. The rollers 210a, 210b can comprise at least one bearing such that the rollers 210a, 210b can rotate with low friction.

[0026] The carrier 100 comprises a first roller contact surface. The roller contact surface extends along a lower surface of the carrier main body 110 and contacts the rollers 210a, 210b of the roller transport track 200a, 200b. The first roller contact surface can extend along the length or substantially the entire length of the carrier main body 110 and contacts at least two rollers 210a, 210b of the roller transport track 200a, 200b such that the weight or at least a part of the weight of the carrier 100 is supported.

[0027] As Figure 1As shown, the first roller transport track 200a is provided on a left-hand side sending module and the second roller transport track 200b is provided on a right-hand side receiving module. For example, a first vacuum process chamber and the first roller track 200a can be provided in the sending module, while a second vacuum process chamber and the second roller track 200b are provided in the receiving module. A valve (not shown) can be arranged between the sending module and the receiving module. The respective sending module and receiving module can be arranged in the vacuum processing apparatus depending on the process being performed, so that the carrier 100 can be transported through the vacuum processing apparatus.

[0028] In the context of the present disclosure, a plurality of directions is defined as follows. A first direction corresponding to the transport direction X is arranged in a substantially horizontal direction. The transport direction X is shown in Figure 1 alignment with the horizontal direction in the figure. A second direction corresponding to the vertical direction Y is arranged in a direction substantially perpendicular to the transport direction X and substantially in alignment with the direction of gravity. The vertical direction Y is shown in Figure 1 alignment with the vertical direction in the figure. A third direction corresponding to the lateral direction Z is arranged in a direction substantially perpendicular to the transport direction X and substantially perpendicular to the vertical direction Y. The lateral direction Z will be shown in Figure 1 normal to the figure. Further, in the present disclosure, any reference to a transport axis, a vertical axis or a lateral axis is to be understood as an axis extending in the transport direction X, the vertical direction Y or the lateral direction Z, respectively.

[0029] The roller transport tracks 200a, 200b are configured for guiding or transporting the carrier 100 in the transport direction X. In the context of the present disclosure, the transport direction X is defined as the direction of the carrier 100. In the figure, the transport direction X is shown as being oriented from left to right, in other words, the carrier 100 is guided or transported from left to right. It can be considered that the transport direction X is a forward transport direction, i.e. a unidirectional transport of the carrier 100. Typically, a pair of roller transport tracks 200a, 200b can be provided, each roller transport track 200a, 200b being configured for unidirectional transport of the carrier 100 in opposite directions.

[0030] However, the present disclosure is not limited thereto, the carrier 100 can be guided or transported in a forward transport direction or a reverse transport direction, i.e. a bidirectional transport of the carrier 100. In this case, a single roller transport track 200a, 200b can be provided, wherein the single roller transport track 200a, 200b is configured for bidirectional transport of the carrier 100.

[0031] According to some embodiments, which can be combined with other embodiments described herein, features, details and embodiments described and shown in relation to the first front end portion 150 with the first front end face 160 can be similarly provided at the first back end portion. In case of a first back end portion constructed in a similar manner as the first front end portion, a smooth transport can be provided for the reverse transport direction. The first roller contact face is formed by the first main roller contact face 126, the first front end face 160 and the first back end face. The first back end face can be a beveled face 160 and / or the first back end portion of the first track 120 can be flexible.

[0032] As shown in Fig. 1 1, the first roller transport track 200a of the sending module can be misaligned with respect to the second roller transport track 200b of the receiving module. In particular, the axis 240a of the rollers 210a of the first roller transport track 200a can be offset in the y-direction from the axis 240b of the rollers 210b of the second roller transport track 200b. When transferring the carrier 100 from the first roller support track 200a to the second roller support track 200b along the x-direction, the offset will result in a force pushing the carrier 100 in the y-direction, which will cause vibrations and / or an impact on the carrier 100, in particular on the substrate S. Figure 1 According to embodiments described herein, the first front end portion 126 can reduce or avoid an impact on the carrier 100. The first front end portion 126 has a beveled face 160 and / or the first front end portion 126 is flexible. The beveled face 160 can smoothen or dampen the movement of the carrier 100 in the y-direction due to the beveling to reduce the impact of the misalignment. The beveled face 160 can also be understood as a surface comprising e.g. a chamfer, a slope or an incline. The beveled face 160 can be understood as being inclined with respect to the first main roller contact face 126.

[0033] The first front end portion 126 is flexible, which can be understood as the first front end portion 126 being pliable, soft, compressible, bendable, etc. The flexibility of the first front end portion 126 enables the first front end portion 126 to yield to allow a smooth transfer of the carrier 100 between the first roller transport track 200a and the second roller transport track 200b. The first front end portion 126 can be bent to reduce the impact force of the misaligned rollers 210b of the second roller transport track 200b.

[0034] The first front end portion 126 can comprise or be made of a flexible material. The flexible material can be a rubber-like material, a metal material, a metal composite material, a raw rubber, a foam material, a plastic or a synthetic material.

[0035]

[0036] ​According to embodiments which can be combined with some other embodiments described herein, the first front end portion 126 has a beveled face 160, and according to embodiments described herein, the first front end portion is flexible. The flexible first front end portion can further enhance the effect of the beveled face on reducing impact. Furthermore, the effect of the flexible first front end portion can be further enhanced by the beveled face.

[0037] According to embodiments which can be combined with other embodiments described herein, the beveled face is at least partially curved with respect to the first main roller contact face. Curved can be understood as the beveled face corresponding to a circumference of a sector with a radius R. The term at least partially curved can be understood as the first main roller contact face being curved only in certain portions.

[0038] Figure 2 A partial schematic view of a carrier 100 according to further embodiments is shown, wherein the first front end face 160 is a curved beveled face 160. The first track 120 comprises a first main body portion 124 and a first front end portion 150. The first track 120 (partially shown) is oriented substantially along the X-axis. The first front end portion 150 is curved or bent upwards with respect to the first main body portion 124.

[0039] The beveled face 160 can correspond to a circumference of a sector with a radius R, wherein R extends horizontally to a tangent of the beveled face 160. The first main roller contact face 126 can be continuously merged into the curved face 160. The merged area of the merging of the main roller face 126 and the curved face 160 is indicated by the number 164. The dashed line 166 indicates the border between the first main body portion 124 and the first front end portion 150.

[0040] According to embodiments which can be combined with other embodiments described herein, the radius R of the curved face 160 is equal to or larger than the length of the first front end portion 150 along the X-direction, in particular, the radius R is at least three times larger than the length of the first front end portion 150 along the X-direction, or more specifically, at least five times larger.

[0041] According to embodiments which can be combined with some other embodiments described herein, the beveled face 160 can be inherently curved or can be naturally curved as described herein. According to embodiments which can be combined with some other embodiments described herein, the first front end portion 150 can be bent by the force F of the roller 210b hitting the beveled face 160, while forming the curved face according to embodiments described herein.

[0042] According to embodiments which can be combined with other embodiments described herein, the beveled face can be at least partially beveled with respect to the first main roller contact face by an angle. The angle can be understood as a bevel angle indicating the inclination of the beveled face with respect to the X-axis. Figure 3An exemplary embodiment of a first front end portion 150 comprising a ramped face 160 is shown, wherein the ramped face 160 is inclined with respect to the X-axis. The first front end portion 150 comprises a ramped face 160, which can have the shape of a ramped edge or beveled edge. The dashed line 340 is oriented parallel to the X-axis and can also be interpreted as a projection of the first primary roller contact face 126. The angle 370 can also be interpreted as an inclination angle 370 between the projection of the first primary roller contact face 126 and the ramped face 160.

[0043] According to embodiments, which can be combined with other embodiments described herein, the first front end portion 150 can have a dimension in the X-direction of at least 20 mm, in particular at least 50 mm, or more particularly between 50 mm and 150 mm.

[0044] In Figure 3 In the exemplary embodiment shown, the first track 120 is arranged on the carrier frame 110 and supports the at least one first roller 210b from below. In Figure 3 In the exemplary embodiment shown, the first track 120 can also be understood as a bottom track support. According to embodiments, which can be combined with other embodiments described herein, the first track 120 can support the first roller 210a from above, similar to Figure 1 or Figure 2 as shown in

[0045] According to embodiments, which can be combined with other embodiments described herein, the ramped face 160 can have an inclination angle 370 of between 0.05° and 5°, more particularly between 0.1° and 2°, even more particularly between 0.2° and 1°. The inclination angle 370 of the ramped face 160 with respect to the X-axis as described herein can have an improving effect in terms of reducing the impact when the first roller 210a of the transport track 200b is in contact with the ramped face 160.

[0046] According to embodiments, which can be combined with other embodiments described herein, the first front end portion has a lower stiffness than the first main portion. For example, the lower stiffness can be based on using different materials for the first front end portion and the first main portion. For example, the first main portion can comprise a material, or the first main portion can be manufactured with a material having a higher stiffness than the material comprised in the first front end portion. The term stiffness can also be understood as a bending stiffness or flexural stiffness. The first main portion can further comprise a coating layer or a treated face, increasing the stiffness of the first main portion to be higher than the stiffness of the first front end portion. The higher stiffness of the first main portion can stabilize the carrier transport on the first main portion, while the lower stiffness of the first front end portion can reduce the impact caused by misaligned rollers.

[0047] According to embodiments which can be combined with other embodiments described herein, the thickness of the first front end portion is smaller than the thickness of the first main portion. The smaller thickness can enhance the flexibility of the first front portion. Having a smaller thickness can also be understood as the cross section of the first front portion being smaller than the cross section of the first main portion. The smaller cross section can facilitate arranging the first front end portion in the frame. In particular, arranging the first front end portion having the inclined face can be improved within the carrier body.

[0048] According to embodiments which can be combined with other embodiments described herein, the carrier frame can comprise a slot for receiving the curved first front end portion. Referring to Figure 3 The carrier body 110 can comprise a slot 380 along the first front end portion 150. The slot can also be understood as a space between the carrier frame and the first front end portion. In case the first front end portion is subjected to bending due to the pressure of the first roller 210b of the transport track 200b, the slot is configured to receive the first front end portion. The slot 380 can extend along the X direction to a main portion of the first front end portion 150. The main portion can be understood as the slot extending to 50%, in particular at least 75%, or more specifically more than 90% of the dimension along the X axis of the first front end portion 150. According to embodiments which can be combined with other embodiments described herein, the slot enables the first front end portion to bend or yield to the pressure induced by the first roller. The amplitude of the bending is limited by the carrier frame. The slot can also prevent the first front end portion 150 from overextending.

[0049] Figure 4 A schematic view showing a further embodiment of the first track 120 is shown. According to embodiments as described herein, the first front end portion 150 is a curved surface corresponding to a circumference of a sector having a radius R. The first front end portion comprises an inclined face 160, in particular a chamfer 160 at the outer end of the first front end portion 150. The cavity can have a dimension in the transport direction X of at least 30 mm, in particular at least 30 mm to 50 mm. According to embodiments which can be combined with other embodiments described herein, the cross section of the first main portion 124 has a dimension in the perpendicular direction Y of at least 5 mm, in particular at least 7 to 15 mm, more particularly about 10 mm.

[0050] According to embodiments which can be combined with other embodiments described herein, the carrier further comprises a second track facing the first track, wherein the second track comprises a second roller contact surface configured for supporting the carrier on at least one first roller 210a, 210b on the opposite roller transport track 200a, 200b. By providing a second track facing the first track, the guidance of the rollers can be improved. The second track can comprise similar features and embodiments as described herein for the first track. For example, the first track can be considered as an upper track supporting the at least one first roller from above, as described herein. For example, the second track can be considered as a lower track supporting the at least one first roller from below, in particular from the bottom.

[0051] According to embodiments which can be combined with some other embodiments described herein, the second track 320 comprises a second main portion 324 having a second main roller contact surface and a second front end portion 350 having a second front end surface 360, the second roller contact surface being formed by the second main roller contact surface and the second front end surface 360, wherein the second front end surface 360 is a further inclined surface and / or the second front end surface of the second track 320 has a flexibility. Figure 5 Fig. 1 depicts a schematic view of an exemplary embodiment of a carrier 100. Figure 5 The exemplary embodiment of the carrier shown corresponds to Figure 1 The embodiment of the carrier 100 shown, wherein Figure 5 The embodiment of the carrier shown corresponds to Figure 1 The embodiment of the carrier shown in Fig. 1, wherein Figure 5 The embodiment of the carrier described comprises a second track 320 as described herein.

[0052] The substrate S carried on the carrier 100 can be a large area substrate for manufacturing displays, having dimensions such as several square meters. Alternatively, the substrate S can be a semiconductor wafer, which can also comprise a plurality of wafers.

[0053] In particular, the substrate S can be a large area substrate having a size of at least 1 m 2 . The size can be from about 1.375 m 2 (1.1 m * 1.25 m - GEN 5) to about 15 m 2 , more specifically from about 5 m 2 to about 9 m 2 or even up to 15 m 2 . For example, the substrate can be GEN 7.5, corresponding to an area of about 4.39 m 2 (1.95 m * 2.25 m); can be GEN 8.5, corresponding to an area of about 5.7 m 2of about 9 m 2 of about 9 m Even larger generations, such as GEN 11 and GEN 12, can be implemented.

[0054] The size of the carrier 100 in the vertical direction Y can be 1 m or more, in particular 2 m or more, or even 3 m or more. The carrier 100 can have a size in the longitudinal direction corresponding to the transport direction X of 1 m or more, in particular 2 m or more, or even 3 m or more. The carrier 100 can have a size of 5 m 2 or more, in particular 9 m 2 or more, or even 15 m 2 or more.

[0055] Some embodiments described herein relate to the concept of transporting the carrier 100 in a "vertical or near-vertical direction". In the context of the present disclosure, a vertical orientation of the carrier 100 refers to the carrier 100 being arranged to extend in a direction substantially parallel to the direction of gravity, i.e. substantially parallel to the vertical direction Y. A near-vertical orientation can be an orientation defined as an angle deviating from the exact perpendicularity (the latter being defined by the direction of gravity) by at most 15 degrees. In the vertical or near-vertical orientation, the carrier 100 can support the substrate in a vertical standing orientation or a near-vertical orientation.

[0056] However, the present disclosure is not limited to carriers 100 being oriented in a vertical or near-vertical direction only. Alternatively, the carrier 100 can be oriented in a horizontal or near-horizontal direction, i.e. where the carrier 100 is aligned to extend in a direction substantially parallel to the lateral direction Z. In the horizontal or near-horizontal orientation, the carrier 100 can support the substrate in a horizontal or near-horizontal lying orientation.

[0057] In the context of the present disclosure, the carrier 100 is configured for supporting a substrate, but the present disclosure is not limited thereto. Alternatively, the carrier 100 can be configured for supporting a mask. According to some embodiments, which can be combined with other embodiments described herein, the carrier 100 can be configured for supporting a substrate or a mask in a vacuum processing device.

[0058] Figure 5The first track 120 is shown to comprise a first main body portion 124 having a first main roller contact surface 126 and a first front end portion 150 having a first front end surface 160. The second track 320 comprises a second main body portion 324 having a second main roller contact surface. According to some embodiments which can be combined with other embodiments described herein, the first main roller contact surface can be split in a first partial roller contact surface for supporting the carrier on at least one first roller of the roller transport track and a second partial roller contact surface configured for supporting the carrier on at least one second roller of the roller transport track, wherein the first partial roller contact surface and the second partial roller contact surface are spaced apart from each other by a space therebetween in the transport direction X. One or both of the first partial roller contact surface and the second partial roller contact surface can have a front end portion as described in embodiments of the present disclosure. In addition, one or both of the first partial roller contact surface and the second partial roller contact surface can have a back end portion as described in embodiments of the present disclosure.

[0059] By providing a space between the first partial roller contact surface and the second partial roller contact surface, the carrier is always supported by at least two rollers of the roller transport track. The space provided between the partial roller contact surfaces has the effect of limiting a portion of the support weight W of the carrier which is carried by each respective roller in contact with each of the first partial roller contact surface and the second partial roller contact surface. Thus, the support weight W of the carrier is more evenly distributed between the rollers.

[0060] Reference is now made to Figure 6 , Figure 6 A cross-sectional elevation view of a roller transport system for a vacuum processing apparatus and a carrier 100 according to embodiments described herein is shown. The roller transport system is provided with a roller transport track 200 according to embodiments described herein, and a carrier 100 for transport by the roller transport system in a transport direction X. According to some embodiments which can be combined with other embodiments described herein, the roller transport track 200 can be arranged at a bottom of the carrier 100, and the carrier 100 can be oriented in a vertical or near vertical direction.

[0061] As described in the above embodiments, the carrier 100 is provided with a first roller contact surface and a second roller contact surface configured to contact a plurality of rollers 210 of the roller transport track 200. According to some embodiments which can be combined with other embodiments described herein, the first roller contact surface and the second roller contact surface can be flat contact surfaces for contacting cylindrical rollers. Cylindrical rollers have the properties of low friction, low wear and low cost. However, additional means for guiding the carrier 100 in the lateral direction Z can be implemented.

[0062] Alternatively, the first and second roller contact faces can be convex contact faces for contacting a concave roller. For example, the first and second roller contact faces can be rods with a circular cross-section, wherein the arcuate contact faces are configured for contacting a concave roller of similar shape. Such an arrangement of rollers allows guiding the carrier 100 in the lateral direction Z in addition to providing support in the vertical direction Y, however, such rollers can have higher friction and higher wear characteristics compared to flat contact faces of cylindrical rollers. Alternatively, the first and second roller contact faces can be V-shaped contact faces for contacting a V-groove roller.

[0063] According to some embodiments, which can be combined with other embodiments described herein, the roller transport system can further comprise an upper rail 400 arranged at the top of the carrier 100, the upper rail 400 being configured for holding the carrier 100 in a vertical or near vertical orientation. According to other embodiments, Figure 6 The upper rail 400 is exemplarily shown in Fig. 5 to comprise at least one magnetic guiding element 410, the carrier 100 can further comprise at least one magnetic guiding element 530. The polarity of the magnetic guiding element 410 is arranged opposite to the polarity of the magnetic guiding element 530, such that a magnetic attractive force non-contactingly guides the carrier 100 in the lateral direction Z. Non-contact magnetic guiding of the carrier 100 is advantageous in vacuum processing devices as it avoids particle generation.

[0064] Alternatively, the upper rail 400 can comprise a plurality of rollers configured for guiding the carrier 100 in the lateral direction Z. The plurality of rollers can be arranged to rotate around an axis parallel to the vertical direction Y and to contact at least one side face of the carrier 100. The plurality of rollers can be provided at one side of the carrier 100 or at both sides of the carrier 100.

[0065] The roller transport system can further comprise a lower rail 600 arranged at the bottom of the carrier 100. Similar to the upper rail 400, the lower rail 600 can be configured for guiding the carrier 100 in the lateral direction Z, especially in case the plurality of rollers 210 are cylindrical rollers. The lower rail 600 can comprise at least one magnetic guiding element 610, the carrier 100 can further comprise at least one magnetic guiding element 140. The polarity of the magnetic guiding element 610 is arranged opposite to the polarity of the magnetic guiding element 140, such that a magnetic attractive force non-contactingly guides the carrier 100 in the lateral direction Z.

[0066] Due to the magnetic attraction force applied to the carrier 100, the upper rail 400 and / or the lower rail 600 can be further configured for supporting at least a part of the weight of the carrier 100. While the main function of the upper rail 400 and the lower rail 600 is to provide guidance in the lateral direction Z, the magnetic force can be used to counteract a part of the weight W of the carrier 100, such that the support weight W of the carrier 100 carried by the roller transport track 200 can even be further reduced, in turn further reducing the load and wear of the rollers.

[0067] The roller transport system can further comprise a drive device 500. As Figure 6 Exemplarily shown, the drive device 500 can comprise a linear motor with at least one electric coil 510, and the carrier 100 can comprise at least one magnetic drive element 550. The at least one electric coil 510 is configured to induce a magnetic force in the magnetic drive element 550, such that the carrier 100 is driven along the roller transport system in the transport direction X. Figure 6 The exemplarily shown embodiment has the drive device 500 arranged at the bottom end of the carrier 100. However, the drive device 500 can alternatively be arranged at the top end of the carrier 100. Similar to the magnetic non-contact guidance of the upper rail 400 and the lower rail 600, the non-contact magnetic drive device 500 avoids the generation of particles in the vacuum processing device, and is therefore advantageous.

[0068] Alternatively, the roller transport system can comprise a plurality of driven rollers configured to rotate along the roller transport system and drive the carrier 100 by contacting a surface of the carrier 100. For example, a part of the plurality of rollers 210 can be driven rollers.

[0069] According to some embodiments, a carrier transport system for transporting a carrier 100 within a vacuum processing chamber is provided. The carrier transport system comprises a track assembly extending in a transport direction X. The track assembly comprises a first passive magnetic unit arranged at a first longitudinal coordinate and extending in the transport direction X, a second passive magnetic unit arranged at a second longitudinal coordinate and extending in the transport direction, wherein the first passive magnetic unit and the second passive magnetic unit are configured to counteract a weight of the carrier; and a roller transport track 200 arranged at a third longitudinal coordinate, the roller transport track 200 comprising a plurality of rollers configured to support a part of the weight of the carrier 100, wherein a first vertical distance between the first longitudinal coordinate and the second longitudinal coordinate is greater than a second distance between the second longitudinal coordinate and the third longitudinal coordinate. According to some embodiments, other features, details, embodiments and implementations of the present disclosure can be combined with the above-described embodiments of the roller transport system.

[0070] Additionally or alternatively, according to some embodiments, a carrier 100 for a substrate S to be processed in a vacuum processing apparatus is provided. The carrier 100 comprises a first passive magnetic unit arranged at a first longitudinal carrier coordinate, a second passive magnetic unit arranged at a second longitudinal carrier coordinate, and a third passive magnetic unit arranged at a third longitudinal carrier coordinate, wherein a first vertical carrier distance between the first longitudinal carrier coordinate and the second longitudinal carrier coordinate is larger than a second vertical carrier distance between the second longitudinal carrier coordinate and the third longitudinal carrier coordinate. According to some embodiments, other features, details, embodiments and implementations of the present disclosure can be combined with the above described embodiments of the roller.

[0071] During processing of the substrate S, the carrier 100 can be heated and thus there is thermal expansion. Especially for vertically oriented or substantially vertically oriented substrates, wherein the substrate can have a vertical extension of 1 m or more or even up to several meters, i.e. large area substrates, the thermal expansion can be significant. Thus, it is beneficial if the second passive magnetic unit, i.e. the passive magnetic unit below the first passive magnetic unit at the top of the carrier 100, takes up a substantial part of the weight of the carrier. The amount of thermal expansion at the position of the second passive magnetic unit is smaller than the amount of thermal expansion in the vicinity of the first passive magnetic unit. Thus, the support force of the passive magnetic units is less affected by the thermal expansion at the position of the second passive magnetic unit.

[0072] According to one aspect of the present disclosure, a vacuum processing apparatus for depositing a material onto a substrate is provided. The vacuum processing apparatus comprises at least one vacuum processing chamber and a roller transport system as described herein, the roller transport system being configured for transporting a carrier as described herein. The roller transport system is configured for transporting the carrier into and out of the at least one vacuum processing chamber.

[0073] The vacuum processing apparatus can further comprise a processing apparatus. In particular, the processing apparatus is typically arranged in the at least one vacuum processing chamber, the processing apparatus can be selected from the group consisting of one or more of a deposition source, an evaporation source, and a sputter source.

[0074] The term "vacuum" can be understood as a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in the at least one vacuum processing chamber as described herein can be in the range of 10 -5 mbar and about 10 -8 mbar, more typically in the range of 10 -5 mbar and 10 -7 mbar, and even more typically in the range of about 10 -6 mbar and about 10 -7between about 10 -4 mbar and about 10 -7 mbar, especially in case a second component, such as a process gas or the like, is present in the at least one vacuum processing chamber in addition to the evaporated material. Thus, the at least one vacuum processing chamber can be a "vacuum deposition chamber", i.e. a vacuum processing chamber for vacuum deposition.

[0075] The vacuum processing chamber can comprise at least one roller transport system according to the embodiments described herein. The at least one roller transport system can be configured for operation in two directions, i.e. bidirectional transport of the carrier 100 in a forward transport direction and a return transport direction. Alternatively, a second roller transport system can be provided, wherein a first roller transport system is configured for operation in one direction and the other roller transport system is configured for operation in the other direction.

[0076] While the foregoing is directed to implementations of the present disclosure, other and further implementations of the disclosure can be devised without departing from the basic scope thereof.

[0077] In particular, this written description uses examples to disclose the present disclosure, including the best mode, and also to enable any person skilled in the art to practice the described subject matter, including making and using any devices or systems and performing any incorporated methods. Although specific embodiments have been disclosed herein, non-exclusive features of the foregoing implementations can be combined with each other.

Claims

1. A carrier (100) for transporting on roller transport tracks (200a, 200b) along a transport direction (X), the carrier (100) comprising: a first track (120) having a first roller contact surface, the first track being configured to support the carrier (100) on at least one first roller on the roller transport track (200a, 200b); and The first track (120) includes a first main body portion (124) and a first front end portion (150), the first main body portion having a first main roller contact surface (126), and the first front end portion having a first front end surface, the first roller contact surface being formed by the first main roller contact surface (126) and the first front end surface. wherein the first front end surface is an inclined surface, wherein the thickness of the first front end portion is smaller than the thickness of the first main body portion, wherein the stiffness of the first front end portion is lower than the stiffness of the first main body portion, and The carrier frame (110) of the carrier comprises a groove (380) for receiving the bent first front end portion.

2. The carrier (100) of claim 1, wherein the inclined surface is at least partially curved relative to the first main roller contact surface (126).

3. The carrier (100) of claim 1, wherein the inclined surface is at least partially inclined at an angle relative to the first main roller contact surface (126).

4. The carrier (100) according to claim 1, wherein the first front end surface is flexible.

5. The carrier (100) according to any one of claims 1 to 3, further comprising a second track facing the first track, wherein the second track comprises a second roller contact surface, the second roller contact surface being configured to support the carrier (100) on the at least one first roller on the roller transport track (200a, 200b) on the opposite side.

6. The carrier (100) of claim 5, wherein the second track (320) comprises a second main body portion (324) and a second front end portion (350), the second main body portion having a second main roller contact surface, the second front end portion having a second front end surface (360), the second roller contact surface being formed by the second main roller contact surface and the second front end surface (360), The second front end face (360) has at least one of the following characteristics: the second front end face is another inclined face; and the second front end face is flexible.

7. The vector according to any one of claims 1 to 3, further comprising: a third roller contact surface configured to support the carrier (100) on at least one second roller of the roller transport track (200a, 200b), The first roller contact surface and the third roller contact surface are separated by a space between the first roller contact surface and the third roller contact surface in the transport direction (X).

8. A carrier as described in claim 7, wherein the third roller contact surface includes a third main body portion and a third front end portion, the third main body portion has a third main roller contact surface, and the third front end portion has a third front end surface, wherein the third front end surface has at least one of the following characteristics: the third front end surface is an inclined surface; and the third front end surface is flexible.

9. A roller transport system comprising: A roller transport track (200a, 200b), wherein the roller transport track comprises a plurality of rollers; and The carrier (100) according to any one of claims 1 to 3.

10. The roller transport system of claim 9, wherein The carrier (100) is oriented in a vertical or nearly vertical direction; The roller transport tracks (200a, 200b) are arranged at the bottom of the carrier (100); and The roller transport system further includes an upper guide rail (400) disposed on top of the carrier (100), the upper guide rail being configured to maintain the carrier (100) in a vertical or near vertical orientation.

11. The roller transport system of claim 10, wherein the upper guide rail (400) comprises at least one magnetic guide element (410) configured to guide the carrier (100) contactlessly in a transverse direction (Z), or the plurality of rollers configured to guide the carrier (100) in the transverse direction (Z), the transverse direction (Z) being perpendicular to the transport direction (X).

12. A vacuum processing device for depositing a material onto a substrate (S), the vacuum processing device comprising at least one vacuum processing chamber and a roller transport system as claimed in any one of claims 9 to 11, the roller transport system being used to transport a carrier (100) as claimed in any one of claims 1 to 3 into and out of the at least one vacuum processing chamber.

13. The vacuum processing apparatus according to claim 12, wherein the carrier (100) is a substrate carrier configured to carry the substrate (S), or wherein the carrier (100) is a mask carrier configured to carry a mask.

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