LIBS analysis device with autofocus and micro-area imaging functions and its application

Abstract

The present invention relates to the technical field of laser induced breakdown spectroscopy, and discloses a LIBS analysis device with autofocus and micro-area imaging functions and its application. The device body includes a mounting seat, on which a pulse laser, an optical path module and an autofocus module are arranged, the optical path module includes a first mounting box, a second mounting box and a third mounting box, the first mounting box, the second mounting box and the third mounting box are respectively provided with a perforated total reflector, a beam splitter and a total reflector, the autofocus module and the pulse laser are respectively arranged on both sides of the first mounting box, the side of the second mounting box is connected to a fiber coupler, the side of the third mounting box is connected to a camera, and the mounting seat is also provided with a processing module connected to both the fiber coupler and the camera. Through the above-mentioned arrangement, it is possible to observe the position of the laser target of the LIBS instrument when detecting the sample, so as to judge whether the laser target falls on the sample or on the impurity particles, which is more convenient to use.

Description

Technical Field

[0001] The invention relates to the technical field of laser induced breakdown spectroscopy, and in particular to a handheld LIBS analysis device with automatic focusing and micro-area imaging functions and an application thereof. Background Art

[0002] LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy. Its working principle is to use pulsed laser to focus on the sample, induce the sample to produce plasma atomic emission spectrum, and extract the atomic emission spectrum through a spectrometer to identify the elemental composition of the sample. It is a technology for identifying, classifying, qualitatively and quantitatively analyzing materials.

[0003] With the continuous development of lasers and high-resolution spectrometers, the size and cost have been continuously reduced and reduced, LIBS technology has been widely studied and applied, and LIBS detection devices have gradually become smaller, from large laboratory devices to handheld instruments that can be used outdoors. With the advantages of LIBS technology, it focuses on in-situ and online analysis, so it is particularly suitable for field environments. At present, the reported application fields include environment (water quality testing and soil pollution, etc.), geology (field rock identification) and cultural heritage (ancient buildings and murals), etc., and commercial applications are mainly metal grade identification and scrap metal recycling.

[0004] In fact, most natural minerals in the wild are not absolutely homogeneous, but are mixed with some impurity particles. Therefore, operators cannot determine whether the laser target falls on the sample or on the impurity particles. If the laser target falls on these impurity particles, the acquired spectral information will not match the sample, thus affecting the analysis results. Summary of the invention

[0005] In view of the defect that the LIBS instrument in the prior art cannot determine whether the laser target falls on the sample or on the impurity particles, the present invention provides a handheld LIBS analysis device with automatic focusing and micro-area imaging functions. It can observe the position of the laser target of the LIBS instrument when detecting the sample, thereby determining whether the laser target falls on the sample or on the impurity particles, which is more convenient to use.

[0006] In order to solve the above technical problems, the present invention is solved by the following technical solutions.

[0007] A LIBS analysis device with autofocus and micro-area imaging functions comprises a device body, the device body comprises a mounting seat, a pulse laser, an optical path module and an autofocus module are arranged on the mounting seat, the optical path module comprises a first mounting box, a second mounting box and a third mounting box which are arranged in sequence from bottom to top, the first mounting box, the second mounting box and the third mounting box are respectively provided with a rotatable perforated total reflector, a beam splitter and a total reflector, the autofocus module and the pulse laser are respectively arranged on both sides of the first mounting box and are relatively arranged in the same horizontal plane, a fiber coupler is connected to the side of the second mounting box, a camera is connected to the side of the third mounting box, and a processing module connected to both the fiber coupler and the camera is also provided on the mounting seat.

[0008] Through the structure of the present invention, the device body can detect the test sample. Specifically, the laser is emitted by a pulsed laser, so that the laser induces the generation of plasma on the surface of the test sample, and then the atomic spectrum emitted by the plasma is reflected to the beam splitter through the perforated total reflection mirror in turn, and the transmission and reflection ratio of the beam splitter is 1:9, so the atomic spectrum with an intensity ratio of 9 / 10 is reflected by the beam splitter into the optical fiber coupler, and then enters the processing module; the atomic spectrum with an intensity ratio of 1 / 10 is reflected by the total reflection mirror through the beam splitter into the camera, and then the processing module obtains image information, thereby determining whether the laser target falls on the test sample; compared with the prior art, this enables the operator to more accurately detect the sample during the use of the device, and is more convenient to use.

[0009] Preferably, one side of the first installation box, the second installation box and the third installation box are all opened, and the first installation box, the second installation box and the third installation box are formed into a whole through a connecting plate, and the first installation box and the second installation box, and the second installation box and the third installation box are all interconnected through a vertical hole; the first installation box is provided with a through hole in the horizontal direction for the pulse laser to pass through, the second installation box is provided with a first through hole in the horizontal direction on the side surface, and the third installation box is provided with a second through hole in the horizontal direction on the side surface; the first installation box, the second installation box and the third installation box are all provided with lens holders, and the three lens holders are respectively used to install a perforated total reflector, a beam splitter and a total reflector.

[0010] Through the arrangement of the present invention, the pulsed laser emits laser light through the through hole and then through the small hole, and finally the laser light falls on the detection sample, thereby obtaining the spectral information of the corresponding detection sample; the arrangement of the first through hole and the second through hole in the present invention facilitates the atomic spectrum to enter the optical fiber coupler and the camera.

[0011] Preferably, an L-shaped fixing portion is provided on the upper side surface of the pulse laser, and the L-shaped fixing portion includes a horizontal plate installed on the upper end surface of the pulse laser and a vertical plate perpendicular to the horizontal plate. The input end of the fiber optic coupler is fixed on the second mounting box and arranged opposite to the first through hole, and a mounting opening is provided on the vertical plate for the output end of the fiber optic coupler to pass through; one side of the camera is vertically mounted on the vertical plate and the lens is arranged facing the second through hole.

[0012] Through the structure of the present invention, the pulse laser, the optical fiber coupler, the camera and the optical path module are installed and fixed on the mounting base.

[0013] Preferably, the first installation box, the second installation box and the third installation box are each provided with a lens adjustment rotating seat, the lens bracket is fixed on the lens adjustment rotating seat, and the side walls of the first installation box, the second installation box and the third installation box are provided with a lens adjustment end cover which is coaxially arranged with the lens adjustment rotating seat and can rotate with the lens adjustment rotating seat, the lens adjustment end cover and the lens adjustment rotating seat are connected by bolts, and the bolts are provided with a disc spring located between the lens adjustment end cover and the lens adjustment rotating seat.

[0014] In the present invention, through the arrangement of the lens adjustment end cover, the lens adjustment rotating seat, the bolts and the disc spring, when it is necessary to fine-tune the lens, the bolts are loosened so that the elastic force of the disc spring increases the gap between the lens adjustment end cover and the lens adjustment rotating seat, so that the lens adjustment rotating seat follows the rotation of the lens adjustment end cover, thereby adjusting the angle of the lens and thus adjusting the optical path; after the adjustment is completed, the bolts are tightened so that the lens adjustment end cover abuts against the outer wall of the installation box, and the lens adjustment rotating seat abuts against the inner wall inside the installation box, thereby achieving the fixation of the lens.

[0015] Preferably, the processing module includes a spectrometer and a microcomputer, and an optical fiber is connected between the optical fiber coupler and the spectrometer.

[0016] In the present invention, through the setting of the processing module, the optical fiber coupler reflects the atomic spectrum into the optical fiber, and then the atomic spectrum enters the spectrometer, so that the spectrometer performs spectral analysis on the detection sample, and then obtains the data information of the detection sample and sends it to the microcomputer; the setting of the microcomputer in the present invention is that the microcomputer is provided with a screen display, which can not only display the image information collected by the camera, but also display the data information of the detection sample.

[0017] Preferably, the autofocus module includes a fixed plate fixed on the mounting seat, a fixed seat perpendicular to the fixed plate is provided on one side of the fixed plate, a motor mounting plate is provided on the end of the fixed plate away from the fixed seat, a drive motor is mounted on the motor mounting plate, a lead screw is connected to the motor shaft of the drive motor, a sliding seat is threadedly connected to the lead screw, and a focusing seat is provided on the sliding seat that can move toward or away from the fixed seat.

[0018] In the present invention, through the arrangement of a fixed seat, a driving motor, a screw rod, a sliding seat and a focusing seat, when a pulse laser is performing laser targeting on a test sample, the driving motor can drive the screw rod to rotate, thereby causing the sliding seat to drive the focusing seat to move toward or away from the fixed seat along the axial direction of the screw rod, thereby realizing automatic focusing of the laser target on the surface of the test sample.

[0019] Preferably, two parallel sliding rails with the same length direction as the axial direction of the lead screw are provided on the fixed plate, and sliders that can slide along the length direction of the sliding rails are provided on the two sliding rails. Long strips for connecting the two sliding rails are provided on the upper end surfaces of the two sliding rails, and the focusing seat is fixed on the upper end surface of the long strip, and the sliding seat is fixed on the lower end surface of the long strip and is arranged between the two sliding rails.

[0020] In the present invention, by setting the slider and the slide rail, when the lead screw drives the focus seat to move toward or away from the fixed seat along the axial direction of the lead screw, the two sliders can keep sliding on the slide rail, thereby improving the stability of the focus seat movement.

[0021] Preferably, both the fixed seat and the focusing seat are provided with mounting holes, the two mounting holes are coaxially arranged, and a contact end is provided on the side of the fixed seat away from the focusing seat and located at the mounting hole of the fixed seat; a focusing lens group is provided on the focusing seat away from the fixed seat and located at the mounting hole of the focusing seat; the focusing lens group includes a mounting tube with openings at both ends, a plano-convex mirror is provided at one end of the mounting tube close to the focusing seat, and the flat mirror of the plano-convex mirror is arranged toward the mounting hole of the focusing seat.

[0022] Through the arrangement in the present invention, the contact end is made to contact the surface of the test sample, and then the laser emitted by the pulse laser passes through the focusing lens group. To further illustrate, the laser beam is completely focused at the focal point of the plano-convex mirror under the action of the plano-convex mirror, and the position of the focusing seat on the fixed plate is adjusted so that the focus falls on the test sample, thereby achieving the laser target falling on the test sample.

[0023] Preferably, a square slot is provided on the end face of the sliding seat, and an anti-differential sleeve is sleeved on the screw rod. The anti-differential sleeve includes a sleeve body, a convex ring is provided at one end of the sleeve body, and two oppositely arranged protrusions are provided at the other end. The two protrusions together constitute a clamping portion that is inserted into the slot.

[0024] In the present invention, by setting the aberration-eliminating sleeve, the protrusion is always stuck in the slot. Since there is a backlash error when the focus seat moves toward or away from the fixed seat, an axial compression spring adjustment method is adopted to enable the aberration-eliminating sleeve to eliminate the backlash error, thereby improving the reliability of the automatic focusing module.

[0025] Preferably, the device body further comprises a handle mounted on the lower end surface of the mounting base, the handle being provided with a trigger switch and a battery box arranged on the lower end surface of the handle.

[0026] In the present invention, by setting the handle, trigger switch and battery box, after pressing the trigger switch, the operator can conveniently align the contact end with the test sample, and the pulse laser emits laser under the action of the trigger switch. The setting of the battery box in the present invention ensures continuous power supply of the device.

[0027] Based on any of the above devices, this embodiment also provides its application in LIBS analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the device body in Example 1;

[0029] Figure 2 It is a schematic structural diagram of another viewing angle of the device body in Example 1;

[0030] Figure 3 is a half-section schematic diagram of the device body in Example 1;

[0031] Figure 4 This is a hand-held schematic diagram of the device body in Example 1.

[0032] The parts indicated by the numbers in the accompanying drawings are as follows:

[0033] 110, mounting seat; 120, pulse laser; 130, microcomputer; 140a, first mounting box; 140b, second mounting box; 140c, third mounting box; 141, connecting plate; 150, camera; 160, fiber coupler; 161, optical fiber; 170, L-shaped fixing part; 180, fixing seat; 181, mounting sleeve; 182, focusing seat; 183, mounting tube; 184, contact end; 190, slide rail; 191, slider; 210, spectrometer; 220, lens adjustment end cap; 310, lens bracket; 320a, punched full reflector; 320b, beam splitter; 320 c. full reflective mirror; 330. drive motor; 331. screw rod; 340. plano-convex mirror; 510. horizontal plate; 520. vertical plate; 530. mounting opening; 710. through hole; 720. first through hole; 730. second through hole; 1010. lens adjustment rotating seat; 1210. fixing plate; 1211. motor mounting plate; 1220. differential sleeve; 1310. mounting hole; 1410. long strip; 1420. sliding seat; 1421. slot; 1430. LED lamp bead; 2010. convex ring; 2020. bump; 2110. handle; 2111. trigger switch; 2120. battery box. DETAILED DESCRIPTION

[0034] In order to further understand the content of the present invention, the present invention is described in detail in conjunction with the accompanying drawings and embodiments. It should be understood that the embodiments are only for explaining the present invention and are not intended to limit it.

[0035] Example 1

[0036] like Figure 1-4 As shown, the present embodiment provides a handheld LIBS analysis device with autofocus and micro-area imaging functions, which includes a device body, the device body includes a mounting base 110, a pulse laser 120, an optical path module and an autofocus module are arranged on the mounting base 110, the optical path module includes a first mounting box 140a, a second mounting box 140b and a third mounting box 140c arranged in sequence from bottom to top, the first mounting box 140a, the second mounting box 140b and the third mounting box 140c are respectively provided with a rotatable perforated total reflection mirror 320a, a beam splitter 320b and a total reflection mirror 320c, the autofocus module and the pulse laser 120 are respectively arranged on both sides of the first mounting box 140a and are arranged opposite to each other in the same horizontal plane, a fiber coupler 160 is connected to the side of the second mounting box 140b, a camera 150 is connected to the side of the third mounting box 140c, and a processing module connected to both the fiber coupler 160 and the camera 150 is also provided on the mounting base 110.

[0037] Through the structure in this embodiment, the device body can detect the test sample. Specifically, the laser is emitted by the pulse laser 120, so that the laser induces the generation of plasma on the surface of the test sample, and then the atomic spectrum emitted by the plasma is reflected to the beam splitter 320b through the perforated total reflection mirror 320a in turn. The transmission and reflection ratio of the beam splitter 320b is 1:9, so the atomic spectrum with an intensity ratio of 9 / 10 is reflected by the beam splitter 320b to the optical fiber coupler 160, and then enters the processing module; the atomic spectrum with an intensity ratio of 1 / 10 is reflected by the total reflection mirror 320c through the beam splitter 320b to the camera 150, so that the processing module obtains image information, thereby determining whether the laser target falls on the test sample; compared with the prior art, this enables the operator to more accurately detect the sample during the use of the device, and is more convenient to use.

[0038] In this embodiment, the perforated total reflection mirror 320a, the beam splitter 320b and the total reflection mirror 320c are all installed at an angle of 45 degrees, and the perforated total reflection mirror 320a is provided with a small hole at an angle of 45 degrees.

[0039] Through the structure in this embodiment, the atomic spectrum can be preferably realized to enter the optical fiber coupler 160 and the camera 150 along the predetermined optical path; the role of the small hole is to facilitate the pulse laser 120 to induce the detection of the atomic spectrum of the sample, thereby detecting all the spectral information of the atomic spectrum of the sample and entering the optical fiber coupler 160 and the camera 150 along the predetermined optical path in equal proportion.

[0040] In this embodiment, one side of the first installation box 140a, the second installation box 140b and the third installation box 140c are all opened, and the first installation box 140a, the second installation box 140b and the third installation box 140c are formed into a whole through a connecting plate 141, and the first installation box 140a and the second installation box 140b, the second installation box 140b and the third installation box 140c are all connected to each other through a vertical hole; the first installation box 140a is provided with a through hole 710 for the pulse laser 120 to pass through in the horizontal direction, the second installation box 140b is provided with a first through hole 720 in the horizontal direction on the side surface, and the third installation box 140c is provided with a second through hole 730 in the horizontal direction on the side surface; the first installation box 140a, the second installation box 140b and the third installation box 140c are all provided with a lens bracket 310, and the three lens brackets 310 are respectively used to install the perforated total reflection mirror 320a, the beam splitter 320b and the total reflection mirror 320c.

[0041] Through the structure in this embodiment, the pulse laser 120 emits laser light through the through hole 710 and then through the small hole, and finally the laser light falls on the detection sample, thereby obtaining the spectral information of the corresponding detection sample; the setting of the first through hole 720 and the second through hole 730 in this embodiment facilitates the atomic spectrum to enter the optical fiber coupler 160 and the camera 150; wherein, the setting of the lens bracket 310 in this embodiment realizes the installation of the lens.

[0042] In this embodiment, an L-shaped fixing portion 170 is provided on the upper side surface of the pulse laser 120, and the L-shaped fixing portion 170 includes a horizontal plate 510 installed on the upper end surface of the pulse laser 120 and a vertical plate 520 perpendicular to the horizontal plate 510. The input end of the fiber coupler 160 is fixed on the second mounting box 140b and arranged opposite to the first through hole 720. The vertical plate 520 is provided with a mounting opening 530 for the output end of the fiber coupler 160 to pass through; one side of the camera 150 is vertically installed on the vertical plate 520 and the lens is arranged facing the second through hole 730.

[0043] Through the structure in this embodiment, the pulse laser 120, the optical fiber coupler 160, the camera 150 and the optical path module are installed and fixed on the mounting base 110.

[0044] In this embodiment, a lens adjustment rotating seat 1010 is provided in the first installation box 140a, the second installation box 140b and the third installation box 140c, and the lens bracket 310 is fixed on the lens adjustment rotating seat 1010. The side walls of the first installation box 140a, the second installation box 140b and the third installation box 140c are provided with a lens adjustment end cover 220 which is coaxially arranged with the lens adjustment rotating seat 1010 and can rotate with the lens adjustment rotating seat 1010. The lens adjustment end cover 220 is connected to the lens adjustment rotating seat 1010 by bolts, and a disc spring is sleeved on the bolts and is located between the lens adjustment end cover 220 and the lens adjustment rotating seat 1010.

[0045] Through the structure in this embodiment, when it is necessary to fine-tune the lens, the bolts are loosened so that the elastic force of the disc spring increases the gap between the lens adjustment end cover 220 and the lens adjustment rotating seat 1010, so that the lens adjustment rotating seat 1010 rotates with the lens adjustment end cover 220, thereby adjusting the angle of the lens and adjusting the optical path; after the adjustment is completed, the bolts are tightened so that the lens adjustment end cover 220 abuts against the outer wall of the installation box, and the lens adjustment rotating seat 1010 abuts against the inner wall inside the installation box, thereby achieving the fixation of the lens.

[0046] In this embodiment, the processing module includes a spectrometer 210 and a microcomputer 130 , and an optical fiber 161 is connected between the optical fiber coupler 160 and the spectrometer 210 .

[0047] Through the setting of the processing module in this embodiment, the optical fiber coupler 160 reflects the atomic spectrum into the optical fiber 161, and then the atomic spectrum enters the spectrometer 210, so that the spectrometer 210 performs spectral analysis on the detection sample, and then obtains the data information of the detection sample and sends it to the microcomputer 130; the setting of the microcomputer 130 in this embodiment is that the microcomputer 130 is provided with a screen display, which can not only display the image information collected by the camera 150, but also display the data information of the detection sample.

[0048] In this embodiment, the autofocus module includes a fixed plate 1210 fixed on the mounting base 110, and a fixed base 180 perpendicular to the fixed plate 1210 is provided on one side of the fixed plate 1210, and a motor mounting plate 1211 is provided on the end of the fixed plate 1210 away from the fixed base 180, and a driving motor 330 is installed on the motor mounting plate 1211, and a screw rod 331 is connected to the motor shaft of the driving motor 330, and a sliding base 1420 is threadedly connected to the screw rod 331, and a focusing base 182 capable of moving toward or away from the fixed base 180 is provided on the sliding base 1420.

[0049] Through the structure of this embodiment, when the pulse laser 120 performs laser targeting on the detection sample, the driving motor 330 can drive the screw 331 to rotate, so that the sliding seat 1420 drives the focusing seat 182 to move toward or away from the fixed seat 180 along the axial direction of the screw 331, thereby realizing the automatic focusing of the laser target on the surface of the detection sample;

[0050] The lower end surface of the fixing seat 180 is provided with a mounting sleeve 181 through which one end of the screw rod 331 passes, so as to achieve a smooth rotation of the screw rod 331 .

[0051] In this embodiment, two parallel sliding rails 190 are provided on the fixed plate 1210 and the length direction is the same as the axial direction of the lead screw 331. Both sliding rails 190 are provided with sliders 191 that can slide along the length direction of the sliding rails 190. The upper end surfaces of the two sliders 191 are provided with long strips 1410 for connecting the two sliders 191. The focusing seat 182 is fixed on the upper end surface of the long strip 1410, and the sliding seat 1420 is fixed on the lower end surface of the long strip 1410 and is arranged between the two sliding rails 190.

[0052] Through the structure in this embodiment, when the lead screw 331 drives the focus seat 182 to move toward or away from the fixed seat 180 along the axial direction of the lead screw 331, the two sliders 191 can keep sliding on the slide rail 190, thereby improving the stability of the movement of the focus seat 182.

[0053] In this embodiment, the fixing seat 180 and the focusing seat 182 are both provided with a mounting hole 1310, and the two mounting holes 1310 are coaxially arranged. A contact end 184 is provided on the side of the fixing seat 180 away from the focusing seat 182 and located at the mounting hole 1310 of the fixing seat 180; a focusing lens group is provided on the focusing seat 182 away from the fixing seat 180 and located at the mounting hole 1310 of the focusing seat 182; the focusing lens group includes a mounting tube 183 with openings at both ends, and a plano-convex mirror 340 is provided at one end of the mounting tube 183 close to the focusing seat 182, and the plano-convex mirror 340 is arranged toward the mounting hole 1310 of the focusing seat 182.

[0054] Through the structure in this embodiment, the contact end 184 is in contact with the surface of the test sample, so that the laser emitted by the pulse laser 120 passes through the focusing lens group. Further explanation: the laser beam is completely focused at the focus of the plano-convex mirror 340 under the action of the plano-convex mirror 340, and the focus is made to fall on the test sample by adjusting the position of the focusing seat 182 on the fixed plate 1210, so that the laser target falls on the test sample;

[0055] The contact surface of the contact end 184 is a conical surface, so that better contact with the test sample is achieved and a certain sample detection area is also increased.

[0056] In this embodiment, a square slot 1421 is provided on the end face of the sliding seat 1420, and an anti-differential sleeve 1220 is sleeved on the screw rod 331. The anti-differential sleeve 1220 includes a sleeve body, a convex ring 2010 is provided at one end of the sleeve body, and two oppositely arranged protrusions 2020 are provided at the other end. The two protrusions 2020 together constitute a clamping portion that is clamped into the slot 1421.

[0057] Through the setting of the aberration-eliminating sleeve 1220 in this embodiment, the protrusion 2020 is always stuck in the slot 1421. Since there is a return error when the focusing seat 182 moves toward or away from the fixed seat 180, the axial compression spring adjustment method is adopted to enable the aberration-eliminating sleeve 1220 to eliminate the return error, thereby improving the reliability of the autofocus module.

[0058] In this embodiment, the device body further comprises a handle 2110 mounted on the lower end surface of the mounting base 110 , and a trigger switch 2111 and a battery box 2120 arranged on the lower end surface of the handle 2110 are provided on the handle 2110 .

[0059] Through the structure in this embodiment, by pressing the trigger switch 2111, the operator can conveniently align the contact end 184 with the test sample, and the pulse laser 120 emits laser under the action of the trigger switch 2111. The setting of the battery box 2120 in this embodiment enables the battery box 2120 to ensure continuous power supply of the device.

[0060] In this embodiment, LED lamp beads 1430 are disposed on the side surface of the focusing seat 182 opposite to the fixing seat 180 along the circumference of the mounting hole 1310 on the focusing seat 182 .

[0061] Through the structure in this embodiment, when the light is poor, the LED lamp beads 1430 provide lighting, which is convenient for the operator to better observe the test samples.

[0062] When the handheld LIBS analysis device with automatic focusing and micro-area imaging functions of this embodiment is used, the handle 2110 is held and the contact end 184 is aligned with the test sample. At this time, the microcomputer 130 controls the drive motor 330 to drive the focus seat 182 to move on the fixed plate 1210, so that the laser target falls on the test sample. The trigger switch 2111 is turned to enable the pulse laser 120 to emit laser-induced plasma generated on the surface of the test sample. The plasma atomic spectrum of the test sample enters the fiber coupler 160 and the camera 150 along a predetermined optical path. The fiber coupler 160 reflects the received atomic spectrum to the spectrometer 210 through the optical fiber 161, so that the spectrometer 210 detects the spectral information of the test sample; the camera 150 sends the collected image information to the microcomputer 130, so that the image information can be displayed on the screen of the microcomputer 130 for observation by the operator.

[0063] In conclusion, the above is only a preferred embodiment of the present invention, and all equivalent changes and modifications made according to the scope of the patent application of the present invention should fall within the scope of the patent of the present invention.

Claims

1. A handheld LIBS analysis device with autofocus and micro-area imaging functions, characterized in that: The device comprises a device body, the device body comprises a mounting seat (110), a pulse laser (120), an optical path module and an autofocus module are arranged on the mounting seat (110), the optical path module comprises a first mounting box (140a), a second mounting box (140b) and a third mounting box (140c) arranged in sequence from bottom to top, and the first mounting box (140a), the second mounting box (140b) and the third mounting box (140c) are respectively provided with a perforated full-reflective mirror (320a), which are all rotatable A beam splitter (320b) and a total reflection mirror (320c), an autofocus module and a pulse laser (120) are respectively arranged on both sides of the first installation box (140a) and are arranged opposite to each other in the same horizontal plane, a fiber optic coupler (160) is connected to the side of the second installation box (140b), a camera (150) is connected to the side of the third installation box (140c), and a processing module connected to both the fiber optic coupler (160) and the camera (150) is also provided on the installation seat (110); The autofocus module comprises a fixing plate (1210) fixed on a mounting seat (110); a fixing seat (180) perpendicular to the fixing plate (1210) is provided on one side of the fixing plate (1210); a motor mounting plate (1211) is provided on one end of the fixing plate (1210) away from the fixing seat (180); a driving motor (330) is mounted on the motor mounting plate (1211); a lead screw (331) is connected to the motor shaft of the driving motor (330); a sliding seat (1420) is threadedly connected to the lead screw (331); and a focusing seat (182) capable of moving toward or away from the fixing seat (180) is provided on the sliding seat (1420); The fixed plate (1210) is provided with two slide rails (190) which are arranged in parallel and have a length direction which is the same as the axial direction of the lead screw (331); the two slide rails (190) are provided with sliders (191) which can slide along the length direction of the slide rails (190); the upper end surfaces of the two sliders (191) are provided with long strips (1410) for connecting the two sliders (191); the focusing seat (182) is fixed on the upper end surface of the long strip (1410); and the sliding seat (1420) is fixed on the lower end surface of the long strip (1410) and is arranged between the two slide rails (190); The fixing seat (180) and the focusing seat (182) are both provided with a mounting hole (1310), the two mounting holes (1310) are coaxially arranged, a contact end (184) is provided on the side of the fixing seat (180) away from the focusing seat (182) and located at the mounting hole (1310) of the fixing seat (180); the focusing seat (182) is provided with a focusing lens group away from the fixing seat (180) and located at the mounting hole (1310) of the focusing seat (182); the focusing lens group comprises a mounting tube (183) with openings at both ends, a plano-convex mirror (340) is provided at one end of the mounting tube (183) close to the focusing seat (182), and the plano-convex mirror (340) is arranged to face the mounting hole (1310) of the focusing seat (182); A square-shaped slot (1421) is provided on the end surface of the sliding seat (1420); an anti-differential shaft sleeve (1220) is sleeved on the screw rod (331); the anti-differential shaft sleeve (1220) comprises a shaft sleeve body; a convex ring (2010) is provided at one end of the shaft sleeve body; and two convex blocks (2020) are provided at the other end thereof, wherein the two convex blocks (220) together constitute a clamping portion that is clamped into the slot (1421).

2. A handheld LIBS analysis device with autofocus and micro-area imaging functions according to claim 1, characterized in that: One side of the first installation box (140a), the second installation box (140b) and the third installation box (140c) are all opened, and the first installation box (140a), the second installation box (140b) and the third installation box (140c) are formed into a whole through a connecting plate (141), and the first installation box (140a) and the second installation box (140b), and the second installation box (140b) and the third installation box (140c) are connected to each other through a vertical hole; the first installation box (140a) is provided with a pulse excitation A through hole (710) through which a laser of the optical device (120) passes is provided, a first through hole (720) is provided on the side surface of the second installation box (140b) in a horizontal direction, and a second through hole (730) is provided on the side surface of the third installation box (140c) in a horizontal direction; lens brackets (310) are provided in the first installation box (140a), the second installation box (140b) and the third installation box (140c), and the three lens brackets (310) are respectively used to install a perforated total reflection mirror (320a), a beam splitter (320b) and a total reflection mirror (320c).

3. A handheld LIBS analysis device with autofocus and micro-area imaging functions according to claim 2, characterized in that: An L-shaped fixing portion (170) is provided on the upper side of the pulse laser (120), the L-shaped fixing portion (170) comprising a horizontal plate (510) mounted on the upper end surface of the pulse laser (120) and a vertical plate (520) perpendicular to the horizontal plate (510); an input end of the optical fiber coupler (160) is fixed on the second mounting box (140b) and arranged opposite to the first through hole (720); a mounting opening (530) is provided on the vertical plate (520) for the output end of the optical fiber coupler (160) to pass through; one side of the camera (150) is vertically mounted on the vertical plate (520) and the lens is arranged facing the second through hole (730).

4. A handheld LIBS analysis device with autofocus and micro-area imaging functions according to claim 2, characterized in that: A lens adjustment rotating seat (1010) is provided in each of the first installation box (140a), the second installation box (140b) and the third installation box (140c); a lens bracket (310) is fixed on the lens adjustment rotating seat (1010); a lens adjustment end cover (220) is provided on the side walls of the first installation box (140a), the second installation box (140b) and the third installation box (140c), and the end cover is coaxially arranged with the lens adjustment rotating seat (1010) and can rotate with the lens adjustment rotating seat (1010); the lens adjustment end cover (220) and the lens adjustment rotating seat (1010) are connected by bolts, and a disc spring is sleeved on the bolts and is located between the lens adjustment end cover (220) and the lens adjustment rotating seat (1010).

5. The handheld LIBS analysis device with autofocus and micro-area imaging functions according to claim 1, characterized in that: The processing module comprises a spectrometer (210) and a microcomputer (130), and an optical fiber (161) is connected between the optical fiber coupler (160) and the spectrometer (210).

6. Application of a handheld LIBS analysis device with autofocus and micro-area imaging functions according to any one of claims 1 to 5, characterized in that: Applied to LIBS analysis.

Images