A temperature and humidity, time, air pressure compensation method for electrostatic voltage detection

Abstract

The application relates to a temperature and humidity, time and air pressure compensation method for electrostatic voltage detection, belonging to the electrostatic detection field. The method comprises the following steps: outputting a standard electrostatic voltage value; testing electrostatic voltage test values output by an electrostatic sensor at different environmental parameter values and time points; deriving conversion coefficients according to the standard electrostatic voltage value and the electrostatic voltage test values; fitting data relationships of the conversion coefficients, the test environmental parameters and the time; obtaining a mathematical model of the conversion coefficients for respective environmental parameters and time; performing weighted summation operation on the conversion coefficient formula for the environment and the time to obtain a final comprehensive conversion coefficient; and introducing the comprehensive conversion coefficient into an electrostatic voltage value algorithm formula to obtain a comprehensive compensation electrostatic voltage value algorithm formula containing environmental and time factors, so that the final electrostatic detection value is calculated. The method adopts weighted compensation of various environmental influence factors, can effectively compensate temperature, humidity, air pressure and time drift of the electrostatic sensor, and guarantees the stability and accuracy of the electrostatic voltage detection result.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of electrostatic detection data processing, and particularly relates to a temperature, humidity, time and air pressure compensation method for electrostatic voltage detection. BACKGROUND

[0002] The electrostatic voltage detection / sensor (also referred to as an electrostatic voltage detection device) is an instrument for detecting the electric field information of charged objects around it, which is widely used in the industrial production fields of photoelectricity, semiconductors, liquid crystal display, thin film, etc., and plays a very important role in improving production efficiency and product quality.

[0003] With the rapid development of integrated circuit technology, more and more semiconductor chips are used on the electrostatic detection / sensor, which provides a strong circuit foundation for the improvement of performance parameters such as detection accuracy and detection speed. However, due to the sensitivity of semiconductor chips to temperature, humidity and air pressure, in the actual application process of the product, the detection stability is poor and the detection value drifts when it is in different temperature, humidity and air pressure environments, which limits the application scenarios of the product.

[0004] In the research on the influence of changes in product use environment on detection, there is currently only research on temperature drift compensation methods for sensors, such as establishing a mathematical compensation model through differential operation of the electrostatic detection signal and performing algorithm / software compensation.

[0005] From the principle of electrostatic detection, the non-contact electrostatic voltage detection device detects the static electricity on the surface of an object, and its essence is to detect the combined static electric field generated by the static electricity on the surface of the object.

[0006] Under the condition that the detection distance is determined, the static electric field (V / m) detected by the non-contact electrostatic voltage detection device is converted into a static voltage value. That is, at each determined detection distance, by setting a correction operation and data processing program / algorithm and inputting relevant parameters, the static voltage value at the detection distance can be determined. The algorithm formula is:

[0007] V = K n X (Formula 1)

[0008] Wherein, X is the external static voltage signal after sampling processing, K n is the conversion coefficient at different detection distances, and V is the detection output static voltage value. K n The value is obtained by testing and calibrating a standard detection panel and a standard DC high voltage source at different detection distances, and each is a fixed value at different detection distances, so the above formula is a linear relationship.

[0009] The prior art has the following technical defects:

[0010] 1) The effects of humidity, air pressure, and time on the detection have not been studied, and a mathematical compensation method / model has not been established for actual detection, resulting in a lack of accuracy in the detection results.

[0011] 2) Existing temperature compensation mathematical models / methods are complex and not convenient for practical application.

[0012] In electrostatic detection or active elimination processes, how to eliminate the influence of changes in temperature, humidity, time, and air pressure on electrostatic sensors, and effectively compensate for temperature and humidity drift, time drift, or air pressure drift of electrostatic voltage detection / sensors, so as to ensure stable and accurate measurement of electrostatic voltage detection results, is a technical problem that needs to be solved in practical work. Summary of the Invention

[0013] The technical problem to be solved by this invention is to provide a method for compensating for temperature, humidity, time, and air pressure in electrostatic voltage detection. During the detection process of an electrostatic detection device / electrostatic sensor, a comprehensive environmental factor compensation method is adopted, enabling the electrostatic sensor to undergo weighted compensation for various environmental influencing factors. This achieves effective compensation for temperature, humidity, air pressure, and time drift of the electrostatic sensor, ensuring the stability and accuracy of the electrostatic voltage detection results.

[0014] The technical solution of the present invention is to provide a method for compensating for temperature, humidity, time, and air pressure in electrostatic voltage detection, characterized by including the following steps:

[0015] 1) Output a standard static voltage value;

[0016] 2) Test the electrostatic voltage output of the electrostatic sensor at different environmental parameter values ​​and time points;

[0017] 3) Derive the conversion factor based on the standard static voltage value and the static voltage test value;

[0018] 4) Fit the data relationship between the conversion factor and the test environment parameters and time;

[0019] 5) Obtain mathematical models of conversion coefficients for each environmental parameter and time;

[0020] 6) Perform a weighted summation of the above conversion factor formulas for environment and time to obtain the final comprehensive conversion factor;

[0021] 7) By importing the comprehensive conversion coefficient into the static voltage value algorithm formula, the comprehensive compensation static voltage value algorithm formula containing environmental and time factors can be obtained, and the final electrostatic detection value can be calculated.

[0022] Specifically, the output of a standard static voltage value includes applying a standard static voltage value to a metal electrode.

[0023] Specifically, the different environmental parameter values include at least temperature and humidity parameters, time parameters and / or air pressure parameters.

[0024] Specifically, the metal electrode is the same as or proportional to the surface area of the object to be measured.

[0025] Specifically, the static voltage value algorithm formula is V=K n X;

[0026] Wherein, X is the external static voltage signal after sampling processing, K n is the conversion coefficient under different detection distances, and V is the static voltage value of the detection output.

[0027] Further, the comprehensive conversion coefficient is:

[0028]

[0029] Wherein, K T is the conversion coefficient for the environmental temperature, K H is the conversion coefficient for the humidity, K P is the conversion coefficient for the air pressure, and K t is the conversion coefficient formula for the time.

[0030] Further, the relationship between the standard output static voltage of the static detection device or the static sensor and the static voltage test value is: V=K e XV e

[0031] Wherein, V is the standard output static voltage, and V e is the static voltage test value.

[0032] Further, the weight factors of temperature, humidity, air pressure and time factors are added to equal 1.

[0033] Compared with the prior art, the advantages of the present application are:

[0034] 1. In the detection data processing process of the static sensor, the influence relationship of humidity, air pressure and time factors on the static voltage detection is increased, the comprehensive mathematical compensation method / model of the environment and time factors is established, so that the detection result is more accurate and more accurate.

[0035] 2. The comprehensive compensation method and mathematical model operation steps in the technical scheme are simple, convenient for actual operation, and have strong practicality. BRIEF DESCRIPTION OF DRAWINGS

[0036] Figure 1 is the block diagram of the whole steps of the environmental parameter and time compensation conversion coefficient determination method of the present application;

[0037] Figure 2 is a block diagram of the environmental parameter and time compensation conversion coefficient determination process of the present application. DETAILED DESCRIPTION

[0038] The present application will be further described in conjunction with the accompanying drawings.

[0039] In Figure 1 the technical solution of the present application can be summarized as follows: a standard electrostatic voltage value is applied to a metal electrode (hereinafter referred to as "outputting a standard electrostatic voltage value"), the electrostatic voltage test values obtained by testing the plate-shaped metal electrode using an electrostatic sensor at different environmental parameter values and time points are tested, the conversion coefficient is derived based on the standard electrostatic voltage value and the electrostatic voltage test value, the data relationship between the conversion coefficient and the test environmental parameter and time is fitted, the conversion coefficient mathematical model for each environmental parameter and time is obtained, the weighted summation operation of the conversion coefficient formula for the environment and time is performed, the final comprehensive conversion coefficient is obtained, the comprehensive conversion coefficient is introduced into the electrostatic voltage value algorithm formula, and the comprehensive compensation electrostatic voltage value algorithm formula containing the environmental and time factors is obtained, and the final electrostatic detection value is calculated.

[0040] Specifically, the implementation of the technical solution of the present application includes the following steps:

[0041] 1. Refer to the accompanying Figure 2 , a standard electrostatic voltage value V is output on the test equipment, the standard electrostatic voltage value V is tested using an electrostatic sensor at different environmental temperature parameter values (such as T0, T1, T2, T3, T4, T5, T6, T7, T8, T9, T 10 , T 11 , T 12 , T 13 , T 14 ), and a group of electrostatic voltage test data (such as V T0 , V T1 , V T2 , V T3 , V T4 , V T5 , V T6 , V T7 , V T8 , V T9 , V T10 , V T11 , V T12 , V T13 , V T14 ) is obtained;

[0042] 2. The standard electrostatic voltage value V is divided by the test data V T , respectively, to obtain a group of conversion coefficients K T = V / V TFor this set of conversion factors K T By fitting the data, we obtain the conversion factor formula for temperature:

[0043] 3. Output a standard static voltage value V on the testing equipment under different environmental humidity parameters (e.g., H0, H1, H2, H3, H4, H5, H6, H7, H8, H9, H). 10 H 11 H 12 H 13 H 14 Using an electrostatic sensor, this standard electrostatic voltage value V is tested, and a set of electrostatic voltage test data (e.g., V) is obtained. H0 V H1 V H2 V H3 V H4 V H5 V H6 V H7 V H8 V H9 V H10 V H11 V H12 V H13 V H14 );

[0044] 4. Divide the standard static voltage value V by this set of test data V respectively. H A set of conversion factors K for ambient humidity was obtained. H =V / V H For this set of conversion factors K H By fitting the data, we obtain the conversion factor formula for humidity:

[0045] 5. Output a standard static voltage value V on the testing equipment under different ambient air pressure parameters (e.g., P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P). 10 P 11 P 12 P 13 P 14 Using an electrostatic sensor, this standard electrostatic voltage value V is tested, and a set of electrostatic voltage test data (e.g., V) is obtained. P0 V P1 V P2 V P3 V P4 V P5 V P6 V P7 V P8 V P9 VP10 , V P11 , V P12 , V P13 , V P14 );

[0046] 6. Divide the standard electrostatic voltage value V by the test data V P , respectively, to obtain a set of conversion coefficients K P = V / V P , for the ambient pressure P Perform data fitting on this set of conversion coefficients K 10 to obtain the conversion coefficient formula for the pressure:

[0047] 7. Continuously test this standard electrostatic voltage value V, and record a set of electrostatic voltage test data (V t0 , V t1 , V t2 , V t3 , V t4 , V t5 , V t6 , V t7 , V t8 , V t9 , V t10 , V t11 , V t12 , V t12 , V t13 , V t14 ) at a set of specified time points (e.g.: t0, t1, t2, t3, t4, t5, t6, t7, t8, t9, t 10 , t 11 , t 12 , t 13 , t 14 );

[0048] 8. Divide the standard electrostatic voltage value V by the test data V t , respectively, to obtain a set of conversion coefficients K t = V / V t , for the time t Perform data fitting on this set of conversion coefficients K e to obtain the conversion coefficient formula for the time:

[0049] 9. Perform a weighted summation operation on the above temperature, humidity, pressure, and time conversion formulas to obtain the comprehensive conversion coefficient formula: K T = α T × K H + α H × K P + α P × K t + αt wherein:

[0050] α T +α H +α P +α t =1,

[0051]

[0052]

[0053]

[0054]

[0055] From the above formulas, we have: K e is a comprehensive conversion coefficient, which is a function of temperature, humidity, air pressure and time; the comprehensive conversion coefficient is introduced into the aforementioned electrostatic voltage value algorithm formula (formula 1) to obtain a comprehensive compensation electrostatic voltage value algorithm formula containing environmental and time factors, and the final electrostatic detection value is calculated.

[0056] Finally, the relationship between the actual electrostatic voltage value (standard output electrostatic voltage) V of the electrostatic detection device or the electrostatic sensor and the electrostatic voltage test value V e (V e can be processed as an intermediate value, that is, it can be regarded as a detected electrostatic signal value) is: V=K e ×V e .

[0057] Embodiment:

[0058] The following table lists how the conversion coefficients for each environmental parameter (temperature, humidity, air pressure) and time are determined:

[0059]

[0060]

[0061]

[0062] The technical scheme of the present application increases the influence of humidity, air pressure and time factors on electrostatic voltage detection in the detection data processing process of the electrostatic sensor, establishes a comprehensive mathematical compensation method / model based on environmental and time factors, makes the detection result more in line with the actual situation and more accurate, and the operation steps of the comprehensive compensation method and mathematical model are simple, convenient for actual operation and have strong practicality.

[0063] The present application can be widely used in the fields of design and manufacture of electrostatic detection devices.

Claims

1. A temperature and humidity, time, and air pressure compensation method for electrostatic voltage detection, characterized by It comprises the following steps: 1) output a standard electrostatic voltage value; 2) test the electrostatic voltage test value output by the electrostatic sensor at different environmental temperatures, humidity, air pressure, and time points; 3) divide the standard electrostatic voltage value V by the test data VT of the ambient temperature respectively to obtain a group of conversion coefficients KT=V / VT for the ambient temperature, and perform data fitting on the group of conversion coefficients KT to obtain a conversion coefficient formula for the temperature: ; 4) divide the standard electrostatic voltage value V by the test data VH of the ambient humidity respectively to obtain a set of conversion coefficients KH = V / VH for the ambient humidity, and perform data fitting on the set of conversion coefficients KH to obtain a conversion coefficient formula for the humidity: ; 5) divide the standard electrostatic voltage value V by the test data VP of the ambient air pressure respectively to obtain a set of conversion coefficients KP= V / VP for the ambient air pressure, and perform data fitting on the set of conversion coefficients KP to obtain a conversion coefficient formula for the air pressure: ; 6) divide the standard electrostatic voltage value V by the test data Vt for time respectively to obtain a set of conversion coefficients Kt= V / Vt for time, and perform data fitting on the set of conversion coefficients Kt to obtain a conversion coefficient formula for time: ; 7) perform a weighted summation operation on the above conversion coefficient formula for the environment and time to obtain a final comprehensive conversion coefficient; The comprehensive conversion coefficient is: ， wherein K T is a conversion factor for the ambient temperature, K H is a conversion factor for the humidity, K P is a conversion factor for the air pressure, K t is a conversion factor for the time formula; 8) import the comprehensive conversion coefficient into the electrostatic voltage value algorithm formula to obtain a comprehensive compensation electrostatic voltage value algorithm formula containing environmental and time factors, and calculate the final electrostatic detection value.

2. The temperature and humidity, time, and barometric pressure compensation method for electrostatic voltage detection according to claim 1, characterized by The output of a standard electrostatic voltage value includes applying a standard electrostatic voltage value to a metal electrode.

3. The temperature and humidity, time, and barometric pressure compensation method for electrostatic voltage detection according to claim 2, characterized by The metal electrode is the same size or proportional to the surface area of the object to be measured.

4. The temperature and humidity, time, and barometric pressure compensation method for electrostatic voltage detection according to claim 1, characterized by The relationship between the standard output electrostatic voltage of the electrostatic detection device or electrostatic sensor and the electrostatic voltage test value is: ; where V is the standard output static voltage, V e is the static voltage test value.

5. The temperature and humidity, time, and barometric pressure compensation method for electrostatic voltage detection according to claim 1, characterized by The weight factors of temperature, humidity, air pressure, and time factors are equal to 1 when added together.

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