An angle compensation method for electrostatic voltage detection

Abstract

The application discloses an angle compensation method for electrostatic voltage detection, belonging to the field of detection. A multi-angle electrostatic voltage correction / device is built; electrostatic signal values detected by an electrostatic sensor at different detection angles under different standard voltages are tested; a conversion coefficient K is derived according to the standard voltage value and the detection value of the electrostatic sensor; a curve fitting is performed on the relationship between the conversion coefficient K and the detection angle; a mathematical model of the angle conversion coefficient is obtained; the mathematical model is introduced into an algorithm formula for outputting an electrostatic voltage value; an algorithm formula for outputting an electrostatic voltage value containing angle compensation is obtained; and data processing is performed on the output value of the electrostatic sensor for non-vertical detection, so that the electrostatic detection value containing angle compensation is finally obtained. The angle detection device is set to provide a detection angle signal for the electrostatic detection device, and the algorithm formula containing angle compensation is used to realize the non-vertical electrostatic detection function, thereby solving the distortion problem of the electrostatic sensor detection value during non-vertical detection.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of static electricity elimination, and particularly relates to an angle compensation method for static voltage detection. BACKGROUND

[0002] At present, in the electronic, photoelectric and semiconductor industries, a considerable number of static electricity sensors are installed on production lines.

[0003] These static electricity sensors are all non-contact detection, and must be installed vertically on the normal direction of the surface of the object to be measured (see FIG. 1). Figure 1

[0004] However, sometimes due to process operation or production design reasons, there is not enough space on the production line to meet the technical requirements of vertical installation on the surface of the object to be measured, so that the static electricity sensor and the surface of the object to be measured form a certain angle (see FIGS. 2-1 and 2-2), which greatly affects the accuracy of detection. Figure 2-1

[0005] In order to reduce the adverse effects of the installation environment or conditions, one way is to try to rotate the measured object to achieve vertical detection with the static electricity sensor, and the other way is to try to control the indicators, fully consider the detection error, and reduce the alarm threshold.

[0006] There is no effective solution to the above problems in engineering or on-site processing technology.

[0007] From the principle of static electricity detection, the detection window of the non-contact static voltage detection device must be perpendicular to the electric field line to accurately measure the surface electric field. At present, the correction standard and detection program / algorithm of all static electricity detection devices are based on the premise of vertical detection. That is, the correction operation and data processing program / algorithm at each different detection distance and different range are obtained under the premise of vertical detection, and the algorithm formula is as follows:

[0008] V = K n × X (Formula 1)

[0009] Wherein, X is the external static voltage signal after sampling processing, K n is the conversion coefficient at different detection distances, and V is the static voltage value of the detection output. K n The value is obtained by testing and calibrating the standard detection plate and the standard DC high voltage source at different detection distances, and it is a fixed value at different detection distances. Therefore, the above formula is a linear relationship, which is not suitable for non-vertical detection.

[0010] Since the existing non-contact static voltage detection technology is based on vertical detection, the following technical defects exist:​​

[0011] 1) From the detection accuracy, only applicable to vertical detection, the use of conditions is more strict, limit its scope of application.

[0012] 2) Electrostatic detection device without additional angle detection function or not configured with angle detection device, can not provide angle correction function for detection program / algorithm.

[0013] 3) The distortion of the detection data obtained by non-vertical detection will become a loophole of product electrostatic safety control and threaten the electrostatic safety of the product.

[0014] When the normal of the plane where the electrostatic sensor detection window is located and the normal of the plane of the object to be measured present a test angle, how to solve the distortion problem of the electrostatic sensor detection value is an actual problem that needs to be solved in practical work. SUMMARY

[0015] The technical problem to be solved by the present application is to provide an angle compensation method for electrostatic voltage detection. By setting an angle detection device to provide a detection angle signal for the electrostatic detection device, and using an algorithm formula containing angle compensation to realize non-vertical electrostatic detection function, the distortion problem of the electrostatic sensor detection value in non-vertical detection is solved.

[0016] The technical solution of the present application is to provide an angle compensation method for electrostatic voltage detection, characterized by:

[0017] 1) Build a multi-angle electrostatic voltage correction / calibration device;

[0018] 2) Test the electrostatic signal values detected by the electrostatic sensor at different detection angles under different standard voltages;

[0019] 3) Test the electrostatic signal values detected by the electrostatic sensor at different detection angles under different installation distances;

[0020] 4) Derive the conversion coefficient K according to the standard voltage value and the detection value of the electrostatic sensor;

[0021] 5) Curve fitting of the relationship between the conversion coefficient K at each detection distance and the detection angle;

[0022] 6) Obtain the mathematical model of the angle conversion coefficient;

[0023] 7) Import the mathematical model of the angle conversion coefficient into the algorithm formula of the detected output electrostatic voltage value;

[0024] 8) Obtain the algorithm formula of the detected output electrostatic voltage value containing angle compensation;

[0025] 9) using the algorithm formula of the detection output static voltage value containing angle compensation, the output value of the non-vertical detection static sensor is processed, and the static detection value containing angle compensation is finally obtained.

[0026] Further, the multi-angle static voltage correction / calibration device comprises an angle-adjustable static sensor or a static sensor mounting device, and an angle detection device is arranged on the static sensor or the static sensor mounting device; the mounting plane of the angle detection device is arranged in parallel with the plane where the detection window of the static sensor is located; the angle detection device and the static sensor or the static sensor mounting device are fixedly installed together to form an integrated structure; and the angle detection device rotates together with the static sensor at the same angle.

[0027] Further, the algorithm formula of the detection output static voltage value containing angle compensation is as follows:

[0028] V=(A n ×θ 2 +B n ×θ+C)×X

[0029] wherein V is the detection output static voltage value containing angle compensation, θ is the detection angle value, X is the external static voltage signal value after sampling processing, A n , B n and C are coefficients of a monomial quadratic polynomial, and n is a natural number.

[0030] Specifically, the angle compensation method comprises the following steps: firstly, an algorithm formula of the detection output static voltage value containing angle compensation is established; then, a detection distance set by a distance dial switch of the static sensor is read, and a detection angle signal sent by an angle sensor is received; the static sensor receives an electric field signal generated by a static charge on the surface of a measured object and processes and samples the electric field signal; subsequently, sampling data is analyzed and operated to obtain an external static voltage signal value X after sampling processing, an algorithm formula of the detection output static voltage value containing angle compensation corresponding to the read detection distance set value is called according to the read detection distance set value, the read detection angle value θ is brought into the algorithm formula of the detection output static voltage value containing angle compensation, and finally a static detection value containing angle compensation is obtained.

[0031] The technical scheme of the present application also provides a static detection device working according to the above angle compensation method, and the working process of the static detection device comprises the following steps:

[0032] 1) the power supply of the static detection device is turned on, the detection program is initialized and operated, and the static detection device starts to work normally;

[0033] 2) According to the field situation, the detection distance of the electrostatic sensor is set by detecting the distance dial switch and setting it to the corresponding code;

[0034] 3) The detection program starts reading the detection distance setting information;

[0035] 4) The detection program reads the angle signal value sent by the angle detection device; or reads the detection angle setting information;

[0036] 5) The sampling program samples the electrostatic signal output by the signal amplification, detection, and shaping circuit module, removes the maximum and minimum values of the sampled data, and performs mean value processing, finally outputting the mean value processed sampling data, i.e. X value, to the subsequent calculation program;

[0037] 6) The subsequent calculation program is divided into multiple sub-programs, each detection distance corresponding to a calculation sub-program; when calculating, the X value obtained under each detection distance and the read detection angle θ value are input into the corresponding calculation sub-program, and the final electrostatic detection value is calculated;

[0038] 7) If the calculated electrostatic detection value is greater than the maximum electrostatic range under this detection distance, the maximum electrostatic range under this detection distance is taken as the electrostatic detection value, and an alarm output is given to notify the management personnel to adjust the electrostatic sensor detection distance setting to a larger detection distance;

[0039] 8) If the calculated electrostatic detection value does not exceed the maximum electrostatic range under this detection distance, the electrostatic detection value obtained by the calculation program is saved.

[0040] Further, when the detection program reads an external electrostatic detection value output request, the detection program sends the saved electrostatic detection value to the receiving or display device.

[0041] Further, when there is no electrostatic detection request, the detection program controls the single-chip microcomputer to enter a sleep state, and after receiving an electrostatic detection request, the single-chip microcomputer is awakened from the sleep state.

[0042] Compared with the prior art, the advantages of the present application are:

[0043] 1. Compared with the existing electrostatic detection device without additional angle detection function or without angle detection device, the present technical solution provides detection angle signal for the electrostatic detection device by setting the angle detection device, and realizes the non-vertical electrostatic detection function by using the algorithm formula containing angle compensation.

[0044] 2. Since the non-vertical angle electrostatic detection of the electrostatic sensor is realized and accurate detection results can be obtained, the installation of the electrostatic sensor does not need to consider the installation angle problem, and the applicability is greatly increased.

[0045] 3. The data correction compensation for the non-vertical detection data is carried out, the accurate measurement result is obtained, the loophole of product electrostatic safety control is avoided, the product electrostatic safety is ensured, and the management cost is not additionally increased. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 It is a vertical installation detection schematic view of the electrostatic sensor;

[0047] Figure 2-1 It is a non-vertical installation detection schematic view of the electrostatic sensor;

[0048] Figure 2-2 It is another non-vertical installation detection schematic view of the electrostatic sensor;

[0049] Figure 3 It is a method block diagram for determining the angle compensation conversion coefficient of the application;

[0050] Figure 4 It is a test curve diagram of the conversion coefficient K and the detection angle under different standard voltages;

[0051] Figure 5 It is a relationship (fitting) curve diagram of the conversion coefficient K and the detection angle under different test distances;

[0052] Figure 6 It is a non-vertical installation electrostatic detection flow chart of the application;

[0053] Figure 8 It is data statistics of the conversion coefficient K on the detection angle under different standard voltages;

[0054] Figure 9 It is a fitting equation of the conversion coefficient K on the detection angle under different test distances.

[0055] In the figure, 1 is an electrostatic sensor, and 2 is a measured object. DETAILED DESCRIPTION

[0056] The application is further described below in combination with the drawings and examples.

[0057] The static electricity sensor and the detection method thereof disclosed in the Chinese patent application with the application publication date of April 9, 2019 and the application publication number of CN109596902A include a sensing support unit, a sensing driving unit and a sensing signal processing unit; a single-chip microcomputer circuit, a detection distance dial switch, a detection gear dial switch and a device address dial switch are arranged; the output end of the sensing signal processing unit is connected with the I / O port of the single-chip microcomputer circuit in correspondence; the output end of each dial switch is connected with the I / O port of the single-chip microcomputer circuit in correspondence; the corresponding detection gear is selected by the detection gear dial switch to adjust the different detection distances of the static electricity sensor; different distance codes are dialed to make the single-chip microcomputer circuit receive different distance codes and then call different detection calculation subprograms. The static electricity sensor can realize the static electricity measurement with the same or similar precision under different detection distances.

[0058] In the technical scheme of the application, the static electricity sensor is the static electricity sensor with the detection distance dial switch in the above patent application.

[0059] In order to enable the static electricity sensor to realize the non-vertical detection, a correction device for static electricity test under different detection angles must be built in advance.

[0060] In the technical scheme of the application, an angle detection device is arranged on the static electricity sensor or the mounting device thereof, and the mounting plane of the angle detection device must be arranged in parallel with the plane where the detection window of the static electricity sensor is located. The angle detection device is fixedly installed with the static electricity sensor or the mounting device thereof and rotates with the static electricity sensor, thereby constituting the required multi-angle static voltage correction (calibration) device.

[0061] Then, the static electricity signal values under different standard voltages and different detection distances and different detection angles are tested by using the multi-angle static voltage correction (calibration) device, and the conversion coefficient is derived according to the standard value and the detection signal value; the data relationship between the conversion coefficient and the test angle is curve-fitted to obtain a mathematical model of the angle conversion coefficient:

[0062] K n =A n ×θ 2 +B n ×θ+C (Formula 2);

[0063] The mathematical model is introduced into the algorithm formula V=K n ×X to obtain an algorithm formula containing angle compensation:

[0064] V=(A n ×θ 2 +B n ×θ+C)×X (Formula 3).

[0065] In the technical solution, the flow of the electrostatic sensor for non-vertical detection is: reading the detection distance set by the detection distance dial switch, and receiving the detection angle signal sent by the angle sensor; the electrostatic sensor receives the electric field signal generated by the static charge on the surface of the object, and processes and samples it; then the sampled data is analyzed and operated to obtain the sampled and processed external static voltage signal value X, and the algorithm formula 3 corresponding to the read detection distance set value is called according to the read detection distance set value, and then the read detection angle value θ is brought into the algorithm formula 3, and finally the electrostatic detection value containing angle compensation is obtained.

[0066] Embodiment:

[0067] 1. Referring to Figure 3 , the electrostatic signals detected by the electrostatic sensor at different detection angles (such as 0°, 15°, 30°, 45°, 60°, 75°, and 90°) under different standard voltages (such as 2.5KV, 5.0KV, 7.5KV, 10.0KV, 12.5KV, 15.0KV, 17.5KV, and 20.0KV) are tested on the built multi-angle electrostatic voltage correction (calibration) device; according to each standard voltage value and the corresponding electrostatic signal value, the conversion coefficients of the electrostatic sensor at multiple detection angles under different standard voltages are derived.

[0068] 2. Referring to Figure 5 and Figure 8 , the derived conversion coefficients are tested on the detection angle to make a test data graph, and from the graph it can be seen that the curves under each standard voltage basically coincide, indicating that the relationship between the K value under different standard voltages and the detection angle can be expressed by a mathematical formula. Figure 8 In each of the above embodiments, the conversion coefficients K under different standard voltages and their arithmetic mean, average absolute deviation, and the proportion of the deviation to the arithmetic mean (not more than 0.7%) under the same detection angle are given, and it can also be concluded that the relationship between the conversion coefficients K under different standard voltages and the detection angle can be expressed by a mathematical formula.

[0069] 3. Referring to Figure 3 , the electrostatic signals detected by the electrostatic sensor at different detection angles (such as 0°, 15°, 30°, 45°, 60°, 75°, and 90°) under different distances (installation distances) (such as 100mm, 150mm, 200mm, 250mm, 300mm, 350mm, 400mm, 450mm, 500mm, 550mm, 600mm, and 700mm) are tested on the built electrostatic voltage correction (calibration) device; according to the standard voltage and the corresponding electrostatic signal value, the conversion coefficients of the electrostatic sensor at multiple detection angles under different distances are derived.

[0070] 4. Referring toFigure 6 As shown in the figure, the derived conversion coefficient makes a test data graph for the detection angle. As can be seen from the figure, the curves under different installation distances are quite different, indicating that the relationship between the K value under different detection distances and the detection angle must be expressed by a set of mathematical formulas, i.e., each detection distance corresponds to a mathematical formula.

[0071] 5、Combining Figure 3 , Figure 4 , Figure 6 As shown, the relationship between the K value under each detection distance and the detection angle is curve-fitted to obtain formula 2, and the fitting parameters are shown in Figure 9 As can be seen from the fitting parameters, the relationship between the K value under each detection distance and the detection angle conforms to a quadratic polynomial. Finally, the fitted detection angle conversion coefficient expression is brought into algorithm formula 1 to obtain algorithm formula 3 containing angle compensation.

[0072] 6、Combining Figure 7 As shown, for the non-vertical installation of the electrostatic detection sensor device (which includes the aforementioned electrostatic sensor), the detection angle value must be obtained before calculating the final electrostatic detection value, and the specific detection process is as follows:

[0073] 1) Turn on the power supply of the electrostatic detection device, and the detection program initializes to run, and the electrostatic detection device starts to work normally.

[0074] 2) Set the detection distance of the electrostatic sensor according to the on-site situation. The detection distance can be set to the corresponding code by the detection distance dial switch.

[0075] 3) Start reading the detection distance setting information.

[0076] 4) Read the angle signal value sent by the angle detection device; or read the detection angle setting information (set several fixed detection angles in advance, and the detection angle can be set to the corresponding code by the dial switch).

[0077] 5) The sampling program will sample the electrostatic signal output by the signal amplification, detection, and shaping circuit module, and after removing the maximum and minimum values of the sampled data, it will perform mean value processing, and finally output the mean value processed sampling data, i.e., X value, to the subsequent calculation program (also known as algorithm program).

[0078] 6) The algorithm program is divided into multiple sub-programs, and each detection distance corresponds to a sub-program; when calculating, the X value obtained under each detection distance and the read detection angle θ value are brought into the corresponding algorithm formula to calculate the final electrostatic detection value.

[0079] 7) If the calculated electrostatic detection value is greater than the maximum electrostatic range under this detection distance, the detection program will take the maximum electrostatic range under this detection distance as the electrostatic detection value and output an alarm to inform the management personnel to adjust the electrostatic sensor detection distance setting to a larger detection distance.

[0080] 8) If the calculated electrostatic detection value does not exceed the maximum electrostatic range under this detection distance, the detection program will save the electrostatic detection value obtained by the algorithm program and wait for an output request.

[0081] 9) When the detection program reads an external electrostatic detection value output request, the detection program will send the saved electrostatic detection value to a receiving or display device.

[0082] 10) When there is no electrostatic detection request, the single-chip microcomputer will enter a sleep state until it receives an electrostatic detection request and wakes up from the sleep state.

[0083] The technical scheme of the present application provides a detection angle signal for the electrostatic detection device by setting an angle detection device, and uses an algorithm formula containing angle compensation to realize the electrostatic detection function in a non-vertical state. The installation of the electrostatic sensor no longer needs to consider the installation angle, greatly increasing the applicability. The vulnerability of product electrostatic safety control is eliminated.

[0084] The present application can be widely used in the design or manufacturing field of electrostatic detection or electrostatic elimination devices.

Claims

1. An angle compensation method for electrostatic voltage detection, characterized by: 1) building a multi-angle electrostatic voltage correction / calibration device; 2) testing the detected electrostatic voltage signal detection values of the electrostatic sensor at different detection angles under different standard voltages; 3) testing the detected electrostatic voltage signal detection values of the electrostatic sensor at different detection angles under different installation distances; 4) deriving the conversion coefficients K of the electrostatic sensor at different detection angles under different standard voltages according to each standard voltage value and the corresponding electrostatic voltage signal detection value; 5) curve fitting the relationship between the conversion coefficients K and the detection angles under each installation distance; 6) obtaining the mathematical model of the angle conversion coefficient; 7) importing the mathematical model of the angle conversion coefficient into the algorithm formula for detecting the output electrostatic voltage value; 8) obtaining the algorithm formula for detecting the output electrostatic voltage value with angle compensation; 9) using the algorithm formula for detecting the output electrostatic voltage value with angle compensation to process the output value of the electrostatic sensor for non-vertical detection, and finally obtaining the electrostatic voltage detection value with angle compensation.

2. The angle compensation method for electrostatic voltage detection according to claim 1, characterized in that The multi-angle electrostatic voltage correction / calibration device comprises an electrostatic sensor and an electrostatic sensor mounting device, and the angle of the electrostatic sensor or the electrostatic sensor mounting device is adjustable; An angle detection device is provided on the electrostatic sensor or the electrostatic sensor mounting device; The installation plane of the angle detection device is parallel to the plane where the electrostatic sensor detection window is located; The angle detection device is fixedly installed with the electrostatic sensor or the electrostatic sensor mounting device, forming an integrated structure; The angle detection device rotates with the electrostatic sensor at the same angle.

3. The angle compensation method for electrostatic voltage detection according to claim 1, characterized in that The algorithm formula for detecting the output electrostatic voltage value with angle compensation is as follows: V = (A n × θ 2 + B n × θ + C) × X Wherein, V is the detection output electrostatic voltage value containing angle compensation, θ is the detection angle value, X is the external electrostatic voltage signal value after sampling processing, A n , B n and C are the coefficients of the monomial quadratic polynomial, and n is a natural number.

4. The angle compensation method for electrostatic voltage detection according to claim 1, characterized in that The process of non-vertical detection of the electrostatic sensor is as follows: reading the detection distance set by the detection distance dial switch of the electrostatic sensor, and receiving the detection angle signal sent by the angle sensor; the electrostatic sensor receives the electric field signal generated by the static charge on the surface of the measured object, and processes and samples it; Then analyze and operate the sampling data to obtain the sampled and processed external electrostatic voltage signal value X, and call the algorithm formula for detecting the output electrostatic voltage value with angle compensation corresponding to the read detection distance set value, and then bring the read detection angle value θ into the algorithm formula for detecting the output electrostatic voltage value with angle compensation, and finally obtain the electrostatic detection value with angle compensation.

5. An electrostatic detection device operating in accordance with the angle compensation method of claim 1, characterized by The working process of the electrostatic detection device includes the following steps: 1) turn on the power supply of the electrostatic detection device, initialize the detection program, and the electrostatic detection device starts normal work; 2) according to the site conditions, set the detection distance dial switch to the corresponding code, and set the detection distance of the electrostatic sensor; 3) the detection program starts to read the detection distance setting information; 4) the detection program reads the angle signal value sent by the angle detection device; or read the detection angle setting information; 5) The sampling program will sample the electrostatic signal output by the signal amplification, detection, shaping circuit module, and after removing the maximum and minimum values of the sampled multiple data, perform mean value processing, and finally output the mean value processed sampling data, i.e. X value, to the subsequent calculation program; 6) The subsequent calculation program is divided into multiple sub-programs, and each detection distance corresponds to a calculation sub-program; when calculating, the X value obtained under each detection distance and the read detection angle θ value are brought into the corresponding calculation sub-program, and the final electrostatic detection value is calculated; 7) If the calculated electrostatic detection value is greater than the maximum electrostatic range under this detection distance, the maximum electrostatic range under this detection distance is taken as the electrostatic detection value, and an alarm output is given to notify the management personnel to adjust the electrostatic sensor detection distance setting to a larger detection distance; 8) If the calculated electrostatic detection value does not exceed the maximum electrostatic range under this detection distance, the electrostatic detection value obtained by the calculation program is saved.

6. The electrostatic detection device of claim 5, wherein When the detection program reads an external electrostatic detection value output request, the detection program sends the saved electrostatic detection value to the receiving or display device.

7. The electrostatic detection device of claim 5, wherein When there is no electrostatic detection request, the detection program controls the single-chip microcomputer to enter a sleep state, and after receiving an electrostatic detection request, the single-chip microcomputer is awakened from the sleep state.

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