Multi-channel calibration method

Abstract

The present application provides a multi-channel calibration method, comprising the following steps. A first reference module and a second reference module are respectively connected to two ends of a standard component. The cross-voltage of the standard component is measured by the first reference module, and the current flowing through the standard component is measured by the second reference module, thereby calculating a reference impedance value. The cross-voltage of the standard component is measured by the first reference module, and the current flowing through the standard component is measured by the first test module, thereby calculating a first impedance value. Based on the reference impedance value and the first impedance value, a first current correction coefficient is calculated. The cross-voltage of the standard component is measured by the first test module, and the current flowing through the standard component is measured by the second reference module, thereby calculating a second impedance value. Based on the reference impedance value and the second impedance value, a first voltage correction coefficient is calculated.

Description

Technical Field

[0001] The present application relates to a calibration method, and in particular to a multi-channel calibration method. Background Art

[0002] In response to the trend of DUTs having multiple pins and increasingly complex functions, test devices have gradually adopted a multi-channel measurement architecture with greater flexibility. For example, in order to support high parallel testing, the test device can adopt an any pin measurement architecture. In other words, no matter how the DUT is connected to the pins of the test device, the test device can obtain the voltage, current or other electrical parameters of the electronic component through different internal test modules (test channels). In this way, the flexible multi-channel measurement architecture can increase the user's operating convenience and improve the competitiveness of the product.

[0003] However, in a multi-channel measurement architecture, each test module may produce measurement errors due to deviations, aging, or environmental factors (such as temperature and humidity) of internal components. Therefore, the test device needs to calibrate the test module before it can measure more accurate and reliable data. In practice, under the aforementioned arbitrary pin measurement architecture, since the test device can arbitrarily select two test modules to use in combination, these test modules usually produce a large number of permutations and combinations, resulting in a very time-consuming calibration process. For example, if the test device has five test modules, since two of the five test modules can be arbitrarily selected for use, there will be 5P2, a total of 20 test module permutations and combinations. Traditionally, since each test module permutation and combination needs to be calibrated, once the total number of test modules is greater, the time spent on calibration will increase significantly. Therefore, the industry needs a new multi-channel calibration method to reduce the calibration time of test modules under the arbitrary pin measurement architecture. Summary of the invention

[0004] The technical problem to be solved by the present application is to provide a multi-channel calibration method, which can be used to calibrate multiple test modules to reduce the calibration time of the test modules under the measurement architecture of any pin.

[0005] The present application proposes a multi-channel calibration method, comprising the following steps. A first reference module and a second reference module are respectively connected to two ends of a standard component. The cross-voltage of the standard component is measured by the first reference module, and the current flowing through the standard component is measured by the second reference module, so as to calculate a reference impedance value associated with the standard component. The second reference module is replaced by the first test module, and the cross-voltage of the standard component is measured by the first reference module, and the current flowing through the standard component is measured by the first test module, so as to calculate a first impedance value associated with the standard component. Based on the reference impedance value and the first impedance value, a first current correction coefficient associated with the first test module is calculated. The first reference module is replaced by the first test module, and the cross-voltage of the standard component is measured by the first test module, and the current flowing through the standard component is measured by the second reference module, so as to calculate a second impedance value associated with the standard component. Based on the reference impedance value and the second impedance value, a first voltage correction coefficient associated with the first test module is calculated.

[0006] In some embodiments, the first voltage correction coefficient and the first current correction coefficient may be stored in the first test module. The multi-channel correction method may calculate the reference correction coefficient based on the reference impedance value and the standard impedance value associated with the standard component. In addition, the multi-channel correction method may further include the following steps. The first test module and the second test module are respectively connected to the two ends of the component to be tested. The cross-voltage of the component to be tested is measured by the first test module, and the current flowing through the component to be tested is measured by the second test module, and the first impedance value to be measured associated with the component to be tested is calculated accordingly. According to the first impedance value to be measured, the first voltage correction coefficient, the second current correction coefficient and the reference correction coefficient, the real impedance value associated with the component to be tested is calculated. And, the second test module and the second reference module are respectively connected to the two ends of the standard component. The cross-voltage of the standard component is measured by the second test module, and the current flowing through the standard component is measured by the second reference module, and the third impedance value associated with the standard component is calculated accordingly. According to the reference impedance value and the third impedance value, the second current correction coefficient associated with the second test module is calculated.

[0007] In some embodiments, the multi-channel calibration method may further include the following steps. The first test module and the second test module are respectively connected to the two ends of the component to be tested. The second test module measures the cross-voltage of the component to be tested, and the first test module measures the current flowing through the component to be tested, thereby calculating the second impedance value to be measured associated with the component to be tested. According to the second impedance value to be measured, the first current correction coefficient, the second voltage correction coefficient and the reference correction coefficient, the real impedance value associated with the component to be tested is calculated. And, the second reference module and the second test module are respectively connected to the two ends of the standard component. The second reference module measures the cross-voltage of the standard component, and the second test module measures the current flowing through the standard component, thereby calculating the fourth impedance value associated with the standard component. According to the reference impedance value and the fourth impedance value, the second voltage correction coefficient associated with the second test module is calculated.

[0008] In summary, the multi-channel calibration method provided by the present application can be used to calibrate multiple test modules. In particular, the present application first uses two of the test modules as reference modules, and then measures the errors of other test modules relative to the reference modules, thereby reducing the calibration time of the test modules under the measurement architecture of any pin.

[0009] The details of other effects and embodiments of the present application are described below with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0011] Figure 1 is a circuit diagram of a testing device according to an embodiment of the present application;

[0012] Figure 2A is based on Figure 1 A circuit diagram of a test module for circuit correction;

[0013] Figure 2B is based on Figure 1 A circuit diagram of another test module for circuit correction;

[0014] Figure 3 is a circuit diagram of using two test modules to measure a component under test according to an embodiment of the present application;

[0015] Figure 4 4 is a flowchart of a multi-channel calibration method according to an embodiment of the present application.

[0016] Explanation of symbols

[0017] 10: First reference module 100: Voltage sensing unit 102: Current sensing unit

[0018] 104: Measurement circuit 106: Power supply 12: Second reference module

[0019] 120: voltage sensing unit 122: current sensing unit 124: measurement circuit

[0020] 126: Power supply 20: Standard component 200: First end

[0021] 202: second end 30: first test module 32: second test module

[0022] 40: component under test 400: first end 402: second end

[0023] S51~S55: Step Flow DETAILED DESCRIPTION

[0024] The positional relationships described in the following embodiments include: up, down, left and right. Unless otherwise specified, they are all based on the directions in which the components are drawn in the drawings.

[0025] See also Figure 1 , Figure 1 is a circuit diagram of a testing device according to an embodiment of the present application. Figure 1 As shown, the multi-channel calibration method of the present application can be applied to a test device having multiple test modules (or test channels), and the test device can be a measurement architecture using any pins, and any two test modules can be the same. First, the present embodiment will first select two test modules from the multiple test modules, and define one of the test modules as the first reference module 10, and the other test module as the second reference module 12. For example, the first reference module 10 and the second reference module 12 can be arranged in the first and second test modules respectively, of course, the present embodiment is not limited to this. In addition, the first reference module 10 and the second reference module 12 will be respectively connected to the two ends of a standard component 20, for example, the first reference module 10 is connected to the first end 200 of the standard component 20, and the second reference module 12 is connected to the second end 202 of the standard component 20.

[0026] The first reference module 10 and the second reference module 12 can be used to measure the component characteristics such as voltage, current and impedance of the same standard component 20. The present embodiment does not particularly limit the hardware components corresponding to the first reference module 10 and the second reference module 12. For example, the first reference module 10 and the second reference module 12 can be two independent test cards, and the first reference module 10 and the second reference module 12 can be set in the same test device (not shown). Alternatively, the first reference module 10 and the second reference module 12 can each be an independent device, respectively electrically connected to the same standard component 20. In addition, the present embodiment does not limit the type of standard component 20. As long as the standard component 20 needs to use the first reference module 10 and the second reference module 12 to measure the component characteristics such as voltage, current and impedance, they all belong to the category of the standard component 20 referred to in the present embodiment. The internal components of the first reference module 10 and the second reference module 12 are described below.

[0027] The first reference module 10 may include a voltage sensing unit 100, a current sensing unit 102, and a measuring circuit 104. The voltage sensing unit 100 and the current sensing unit 102 may be electrically connected to the first end 200 of the standard component 20, and the measuring circuit 104 may be electrically connected to the voltage sensing unit 100 and the current sensing unit 102. Figure 1 In the example of FIG. 1 , the first reference module 10 includes a power source 106, and the power source 106 is also electrically connected to the first end 200 of the standard component 20, but in practice the power source 106 is not a necessary component. For example, the power source 106 can also be disposed outside the first reference module 10, such as an external power supply. In other words, as long as the power source 106 can supply power to the standard component 20 from the first end 200, it meets the scope of the power source 106 of this embodiment.

[0028] Similarly, the second reference module 12 may include a voltage sensing unit 120, a current sensing unit 122, and a measuring circuit 124. The voltage sensing unit 120 and the current sensing unit 122 may be electrically connected to the second end 202 of the standard component 20, and the measuring circuit 124 may be electrically connected to the voltage sensing unit 120 and the current sensing unit 122. Like the power supply 106, the power supply 126 may also be disposed outside the second reference module 12, for example, it may also be an external power supply. For the sake of convenience, this embodiment assumes that the first reference module 10 and the second reference module 12 include the power supply 106 and the power supply 126. In addition, although Figure 1 Two signal input / output terminals are used as an example, and are not intended to limit the number of signal input / output terminals of the standard component 20. In practice, the standard component 20 may also include more signal input / output terminals, and the first terminal 200 and the second terminal 202 may be only two of the signal input / output terminals.

[0029] In a practical example, the power supply 106 of the first reference module 10 can supply power to the first terminal 200 of the standard component 20, the first reference module 10 measures the cross voltage of the standard component 20, and the second reference module 12 measures the current of the standard component 20. In detail, the voltage sensing unit 100 in the first reference module 10 can be used to measure the cross voltage of the standard component 20, and transmit the data corresponding to the cross voltage of the standard component 20 to the measuring circuit 104, and the measuring circuit 104 converts and obtains the first voltage value. In addition, the current sensing unit 122 in the second reference module 12 is used to measure the current flowing through the standard component 20, and transmit the data corresponding to the current flowing through the standard component 20 to the measuring circuit 124, and the measuring circuit 124 converts and obtains the first current value. In an example, the common ground terminal (not shown) of the first reference module 10 and the second reference module 12 can be connected together, so that the voltage sensing unit 100 can obtain the cross voltage of the standard component 20 through the first terminal 200 and the common ground terminal. Furthermore, the current sensing unit 122 can measure the current flowing through the standard component 20 by means of resistor series connection or current coupling. Since there are many means for measuring current, this embodiment is not particularly limited.

[0030] In order to simplify the test conditions, the power supply 106 and the power supply 126 can be set to work at different times, that is, the power supply 126 can be turned off when the power supply 106 is working. 12 , the first current value converted by the measuring circuit 124 is expressed as I 12 , then the reference impedance value Z of the standard component 20 12 It can be expressed as the following formula (1):

[0031] Z 12 =V 12 / I 12 (1)

[0032] In one example, the reference impedance value Z 12 It can be calculated by a processor of the test device or an external computer, and this embodiment is not limited here. In addition, since the first voltage value V 12 is obtained through the measuring circuit 104, and also includes the error of the measuring circuit 104 itself, so that the first voltage value V 12 It is not the actual cross voltage of the standard component 20. Similarly, the first current value I 12 Since the first current value I is obtained through the measuring circuit 124, it also includes the error of the measuring circuit 124 itself. 12 It is not the current actually flowing through the standard component 20. However, this embodiment does not care about the first voltage value V 12 and the first current value I12 In addition, since the standard component 20 is a calibrated component, the standard component 20 should have a known impedance value, which is referred to as the standard impedance value Z of the standard component 20 in this embodiment. std That is to say, due to the temperature difference, humidity difference, aging degree difference, internal component error, etc. between different circuits, the reference impedance value Z 12 In fact, it is very likely not equal to the standard impedance value Z of the standard component 20 std Here, the reference impedance value Z 12 And the standard impedance value Z std The relationship between can be expressed by the following formula (2):

[0033] Z std =Z 12 ×K 12 (2)

[0034] Where K 12 That is, the reference impedance value Z obtained when the voltage is measured by the first reference module 10 and the current is measured by the second reference module 12. 12 And the standard impedance value Z std A person with ordinary knowledge in the art can understand that if the first reference module 10 is used to measure current and the second reference module 12 is used to measure voltage, the obtained reference impedance value may be different from the reference impedance value Z. 12 , so the reference correction factor may also be different from the reference correction factor K 12 .

[0035] Next, the multi-channel calibration method of this embodiment will calibrate all the test modules one by one. It is worth noting that all the test modules are calibrated in sequence rather than at the same time. Figure 1 and Figure 2A , Figure 2A Is based on Figure 1 A circuit diagram of a circuit for calibrating a test module. As shown in the figure, the aforementioned second reference module 12 is first replaced by the first test module 30, that is, the first reference module 10 is connected to the first end 200 of the standard component 20, and the first test module 30 is connected to the second end 202 of the standard component 20. The first test module 30 can be a test module arranged in m. As mentioned above, since each test module can be the same, the internal components of the first test module 30 are not repeated in this embodiment. When calibrating the first test module 30, the cross voltage of the standard component 20 can be measured by the first reference module 10, and the current flowing through the standard component 20 can be measured by the first test module 30. As mentioned above, in this embodiment, the voltage value measured by the first reference module 10 is represented as V 1m, the current value measured by the first test module 30 is represented as I 1m , an impedance value (first impedance value) Z of the standard component 20 can be calculated 1m It can be expressed as the following formula (3):

[0036] Z 1m =V 1m / I 1m (3)

[0037] Furthermore, since the voltage value V measured by the first reference module 10 1m and voltage value V 12 The first current correction coefficient K associated with the first test module 30 can be further derived from the above formula (1) and formula (3). Im , as shown in the following equations (4), (5) and (6):

[0038] Z 12 ×I 12 =V 12 =V 1m =Z 1m ×I 1m (4)

[0039] I 12 =I 1m ×K Im (5)

[0040] K Im =Z 1m / Z 12 (6)

[0041] The first current correction coefficient K Im That is, the error between the first test module 30 and the second reference module 12 when measuring current. In other words, if the current measured by the first test module 30 is corrected by the first current correction coefficient K Im After calibration, it should be equal to the current measured by the second reference module 12. And as can be seen from the above formula (6), the first current calibration coefficient K Im The reference impedance value Z can be obtained 12 and the first impedance value Z 1m Calculate it.

[0042] Similarly, in this embodiment, the aforementioned first reference module 10 is replaced by a first test module 30, that is, the first test module 30 is connected to the first end 200 of the standard component 20, and the second reference module 12 is connected to the second end 202 of the standard component 20. Then, when calibrating the first test module 30, the voltage across the standard component 20 can be measured by the first test module 30, and the current flowing through the standard component 20 can be measured by the second reference module 12. In this embodiment, the voltage value measured by the first test module 30 is represented as V m2 , the current value measured by the second reference module 12 is expressed as I m2 , then another impedance value (second impedance value) Z of the standard component 20 can be calculated m2 It can be expressed as the following formula (7):

[0043] Z m2 =V m2 / I m2 (7)

[0044] Furthermore, due to the current value I m2 and current value I 12 are all measured by the second reference module 12. In this embodiment, the first voltage correction coefficient K associated with the first test module 30 can be further derived from the above formula (1) and formula (7). Vm , as shown in the following equations (8), (9) and (10):

[0045] V 12 / Z 12 =I 12 =I m2 =V m2 / Z m2 (8)

[0046] V 12 =V m2 ×K Vm (9)

[0047] K Vm =Z 12 / Z m2 (10)

[0048] The first voltage correction coefficient K Vm That is, the error between the first test module 30 and the first reference module 10 when measuring voltage. In other words, if the voltage measured by the first test module 30 is corrected by the first voltage correction coefficient K Vm After calibration, it should be equal to the voltage measured by the first reference module 10. And as can be seen from the above formula (10), the first voltage calibration coefficient K Vm The reference impedance value Z can be obtained 12and the second impedance value Z m2 Calculate it.

[0049] In order to illustrate that after the multi-channel calibration method of the present application, all test modules can correctly measure the unknown impedance value of the component under test. This embodiment demonstrates the calibration of a group of test modules, please refer to Figure 2A and Figure 2B , Figure 2B Is based on Figure 1 The circuit diagram of another test module is shown in FIG. As shown in the figure, the second reference module 12 is replaced with the second test module 32, that is, the first reference module 10 is connected to the first end 200 of the standard component 20, and the second test module 32 is connected to the second end 202 of the standard component 20. The second test module 32 can be arranged in n test modules. At this time, the same as the correction of the first test module 30, the second current correction coefficient K can also be calculated in this embodiment. In Similarly, the second current correction coefficient K In It means that if the current measured by the second test module 32 is corrected by the second current correction coefficient K In After calibration, it should be equal to the current measured by the second reference module 12 .

[0050] Next, the first reference module 10 is replaced by the second test module 32, that is, the second test module 32 is connected to the first end 200 of the standard component 20, and the second reference module 12 is connected to the second end 202 of the standard component 20. Next, the same as the calibration of the first test module 30, the second voltage calibration coefficient K can also be calculated in this embodiment. Vn Similarly, the second voltage correction coefficient K Vn It means that if the voltage measured by the second test module 32 is corrected by the second voltage correction coefficient K Vn After calibration, it should be equal to the voltage measured by the first reference module 10. It can be expressed as the following equations (11) and (12):

[0051] I 12 =I 1n ×K In (11)

[0052] V 12 =V n2 ×K Vn (12)

[0053] The derivation process of equation (11) and equation (12) is similar to the description of equation (5) and equation (9), and will not be described in detail in this embodiment. It is worth mentioning that the first test module 30 can store its own first current correction coefficient K Im and the first voltage correction coefficient K VmThe second test module 32 can store its own second current correction coefficient K In and the second voltage correction coefficient K Vn In addition, after the first test module 30 and the second test module 32 are calibrated, the first test module 30 and the second test module 32 can be used to measure the component under test with unknown impedance value.

[0054] See also Figure 3 , Figure 3 FIG. 1 is a circuit diagram of using two test modules to measure a component under test according to an embodiment of the present application. Figure 3 As shown, there may be two ways for the first test module 30 and the second test module 32 to connect to the component under test 40, one of which is that the first test module 30 is connected to the first end 400 of the component under test 40, and the second test module 32 is connected to the second end 402 of the component under test 40. The other is that the second test module 32 is connected to the first end 400 of the component under test 40, and the first test module 30 is connected to the second end 402 of the component under test 40. This embodiment is first described by taking the first test module 30 connecting to the first end 400 of the component under test 40, and the second test module 32 connecting to the second end 402 of the component under test 40 as an example.

[0055] First, the first test module 30 measures the voltage across the DUT 40, and the second test module 32 measures the current flowing through the DUT 40. In this embodiment, the voltage value measured by the first test module 30 is represented as V mn , the current value measured by the second test module 32 is represented as I mn , an impedance value (first impedance value to be measured) Z of the component to be measured 40 can be calculated. mn It can be expressed as the following formula (13):

[0056] Z mn =V mn / I mn (13)

[0057] Since the first impedance value Z mn The error value between the first test module 30 and the second test module 32 is not necessarily the true impedance value of the component under test 40. Therefore, in order to obtain the true impedance value of the component under test 40, the voltage value V measured by the first test module 30 is first converted to mn The first voltage correction coefficient K Vm Next, the current value I measured by the second test module 32 is calibrated. mn The second voltage correction coefficient K In Based on this, it is assumed that the actual impedance value of the component under test 40 is Z dut , then the real impedance value Z dutIt can be expressed as the following formula (14):

[0058] Z dut =(V mn ×K Vm ) / (I mn ×K In )×K 12 (14)

[0059] The above voltage value V mn and the first voltage correction coefficient K Vm The product of the current value I mn and the second voltage correction coefficient K In The product of is the current of the component under test 40 measured by the second test module 32, which is converted into the current value that the second reference module 12 should read. In addition, the above formula (14) also has a reference correction coefficient K 12 This is because the measurement results of the first reference module 10 and the second reference module 12 and the actual impedance value Z dut As in equation (2), the measured impedance values ​​of the first reference module 10 and the second reference module 12 can be obtained by using the reference correction coefficient K 12 The calibration eliminates the measurement errors of the first reference module 10 and the second reference module 12.

[0060] Similarly, the second test module 32 can also be connected to the first terminal 400 of the component under test 40, and the first test module 30 can be connected to the second terminal 402 of the component under test 40. In this example, the second test module 32 measures the voltage across the component under test 40, and the first test module 30 measures the current flowing through the component under test 40. In this embodiment, the voltage value measured by the second test module 32 is represented as V nm , the current value measured by the first test module 30 is represented as I nm , an impedance value (second impedance value to be measured) Z of the component to be measured 40 can be calculated nm It can be expressed as the following formula (15):

[0061] Z nm =V nm / I nm (15)

[0062] As before, since the second impedance value Z nmIt also includes the error value between the first test module 30 and the second test module 32, which is not necessarily the true impedance value of the component under test 40. Therefore, in order to obtain the true impedance value of the component under test 40, this embodiment also converts the voltage value V measured by the second test module 32 into nm The second voltage correction coefficient K Vn Next, the current value I measured by the first test module 30 is calibrated. nm The first voltage correction coefficient K Im Based on this, it is assumed that the actual impedance value of the component under test 40 is also Z dut , then the real impedance value Z dut It can be expressed as the following formula (16):

[0063] Z dut =(V nm ×K Vn ) / (I nm ×K Im )×K 12 (16)

[0064] The above voltage value V nm and the second voltage correction coefficient K Vn The product of the current value I nm and the first voltage correction coefficient K Im The product of means that the current of the component under test 40 measured by the first test module 30 is converted into the current value that the second reference module 12 should read. It is worth noting that in this example, even if the first test module 30 and the second test module 32 are connected in reverse, as long as different voltage correction coefficients and voltage correction coefficients are selected, they can still be converted into the voltage value that the first reference module 10 should read and the current value that the second reference module 12 should read. Therefore, the above formula (16) will be multiplied by the same reference correction coefficient K 12 , eliminating the measurement errors of the first reference module 10 and the second reference module 12 themselves.

[0065] For example, suppose the test device has 100 test modules (test channels). Since two of the 100 test modules can be selected to measure the DUT, a person with ordinary knowledge in the art can understand that all test module combinations need to be pre-calibrated. 100P2 has a total of 9900 possibilities, which means that theoretically 9900 calibrations need to be completed. It is known that it will be quite time-consuming to calibrate all the permutations and combinations of the test modules. On the contrary, the present application first selects two test modules as the first reference module and the second reference module. The first reference module and the second reference module only need to measure the standard component once to obtain the reference correction coefficient. Next, the present application will calibrate the remaining 98 test modules one by one. Since each test module needs to replace the first reference module once and the second reference module once, there should be 196 combinations. From the above, it can be seen that, plus the initial measurement of the standard component by the first reference module and the second reference module, the present embodiment only needs to complete 197 calibrations without exhausting all the permutations and combinations. Different from the traditional multi-channel calibration method, the multi-channel calibration method of the present application is obviously more time-saving and simple.

[0066] To illustrate the multi-channel calibration method of this application, please refer to Figures 1 to 4 , Figure 4 1 is a flowchart of the steps of the multi-channel calibration method according to an embodiment of the present application. As shown in the figure, in step S50, the first reference module 10 and the second reference module 12 are respectively connected to the two ends of the standard component 20. In step S51, the first reference module 10 measures the voltage across the standard component 20, and the second reference module 12 measures the current flowing through the standard component 20, and the reference impedance value Z associated with the standard component 20 is calculated accordingly. 12 In step S52, the second reference module 12 is replaced by the first test module 30, the first reference module 10 measures the voltage across the standard component 20, and the first test module 30 measures the current flowing through the standard component 20, and the first impedance value Z associated with the standard component 20 is calculated accordingly. 1m In step S53, according to the reference impedance value Z 12 With the first impedance value Z 1m , calculate the first current correction coefficient K associated with the first test module 30 Im , as shown in the above formula (6). In step S54, the first reference module 10 is replaced by the first test module 30, the first test module 30 measures the voltage across the standard component 20, and the second reference module 12 measures the current flowing through the standard component 20, and the second impedance value Z associated with the standard component 20 is calculated accordingly. m2 . Based on the reference impedance value Z 12 and the second impedance value Z m2 , calculate the first voltage correction coefficient K associated with the first test module 30 Vm , as shown in the above formula (10). The remaining details of the multi-channel calibration method described in this embodiment have been described in the previous embodiment, so they will not be repeated here.

[0067] In summary, the multi-channel calibration method provided by the present application can be used to calibrate multiple test modules. In particular, the present application first uses two of the test modules as reference modules, and then measures the errors of other test modules relative to the reference modules, thereby reducing the calibration time of the test modules under the measurement architecture of any pin.

[0068] The embodiments and / or implementation methods described above are only used to illustrate the preferred embodiments and / or implementation methods for realizing the technology of the present application, and are not intended to limit the implementation methods of the technology of the present application in any form. Any technical personnel in this field may make slight changes or modifications to other equivalent embodiments without departing from the scope of the technical means disclosed in the content of the present application, but they should still be regarded as technologies or embodiments that are essentially the same as the present application.

Claims

1. A multi-channel calibration method, characterized in that: Include: Respectively connecting a first reference module and a second reference module to two ends of a standard component; A first reference module measures the voltage across the standard component, and a second reference module measures the current flowing through the standard component, thereby calculating a reference impedance value associated with the standard component; The second reference module is replaced by a first test module, the first reference module measures the voltage across the standard component, and the first test module measures the current flowing through the standard component, thereby calculating a first impedance value associated with the standard component; Calculating a first current correction coefficient associated with the first test module according to the reference impedance value and the first impedance value; The first reference module is replaced by the first test module, the first test module measures the voltage across the standard component, and the second reference module measures the current flowing through the standard component, thereby calculating a second impedance value associated with the standard component; as well as A first voltage correction coefficient associated with the first test module is calculated according to the reference impedance value and the second impedance value.

2. The multi-channel correction method according to claim 1, characterized in that: The first voltage correction coefficient and the first current correction coefficient are stored in the first testing module.

3. The multi-channel correction method according to claim 2, characterized in that: Also includes: A reference calibration coefficient is calculated according to the reference impedance value and a standard impedance value associated with the standard component.

4. The multi-channel correction method according to claim 3, characterized in that: Also includes: Respectively connecting the first test module and a second test module to two ends of a component to be tested; The first test module measures the voltage across the component under test, and the second test module measures the current flowing through the component under test, thereby calculating a first impedance value associated with the component under test; as well as A real impedance value associated with the component under test is calculated according to the first impedance value to be measured, the first voltage correction coefficient, a second current correction coefficient and the reference correction coefficient.

5. The multi-channel correction method according to claim 4, characterized in that: Also includes: Respectively connecting the second test module and the second reference module to two ends of the standard component; The second test module measures the voltage across the standard component, and the second reference module measures the current flowing through the standard component, thereby calculating a third impedance value associated with the standard component; The second current correction coefficient associated with the second test module is calculated according to the reference impedance value and the third impedance value.

6. The multi-channel correction method according to claim 3, characterized in that: Also includes: Respectively connecting the first test module and a second test module to two ends of a component to be tested; The second test module measures the voltage across the component under test, and the first test module measures the current flowing through the component under test, thereby calculating a second impedance value associated with the component under test; as well as A real impedance value associated with the component under test is calculated according to the second impedance value to be measured, the first current correction coefficient, a second voltage correction coefficient and the reference correction coefficient.

7. The multi-channel correction method according to claim 6, characterized in that: Also includes: Respectively connecting the second reference module and the second test module to two ends of the standard component; The second reference module measures the voltage across the standard component, and the second test module measures the current flowing through the standard component, thereby calculating a fourth impedance value associated with the standard component; The second voltage correction coefficient associated with the second test module is calculated according to the reference impedance value and the fourth impedance value.

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