Linear motion platform

Abstract

The application provides a linear motion platform, which comprises a lower cover plate, a support frame, an upper cover plate, a sliding block, a motor stator and a motor rotor, the lower cover plate is arranged opposite to the upper cover plate, one side of the upper cover plate is connected with the lower cover plate through the support frame, the motor stator is arranged on the other side of the upper cover plate, the sliding block is arranged in the motor stator, and one end of the sliding block is connected with the motor rotor, the motor rotor drives the sliding block to move linearly, and the side away from the motor rotor of the sliding block is provided with a lateral air float, and the surface opposite to the lower cover plate of the sliding block is provided with a vertical air float. The linear motion platform has high rigidity, small friction force, no friction particles and improved acceleration in the motion process.

Description

Technical Field

[0001] This invention relates to the field of precision mechanical motion design technology, and in particular to a linear motion platform. Background Technology

[0002] Existing precision motion stages typically employ a combination of linear motors and guide rails. However, due to mechanical limitations, the guide rails can only achieve micron-level repeatability and suffer from drawbacks such as the need for lubrication and friction. Furthermore, friction between the guide rail and the slider generates particles, which, especially for high-precision semiconductor testing equipment, requires additional extraction devices to address this issue, increasing costs and reducing system reliability. Because the guide rails require lubrication, frequent maintenance is necessary. To improve productivity, the motion stage needs higher acceleration; increasing the stage's acceleration to 20 m / s² would be a significant improvement. 2 At even higher speeds, using guide rails places higher demands on the installation and manufacturing of the guide rails, and the lateral forces will be greater, resulting in greater friction and making it easy for inaccurate movement to occur.

[0003] Therefore, it is necessary to provide a novel linear motion platform to solve the aforementioned problems existing in the prior art. Summary of the Invention

[0004] The purpose of this invention is to provide a linear motion platform with high rigidity and improved acceleration during motion.

[0005] To achieve the above objectives, the linear motion platform of the present invention includes a lower cover plate, a support frame, an upper cover plate, a slider, a motor stator, and a motor mover. The lower cover plate and the upper cover plate are disposed opposite to each other. One side of the upper cover plate is connected to the lower cover plate through the support frame. The motor stator is disposed on the other side of the upper cover plate. The slider passes through the motor stator, and one side of the slider is connected to the motor mover. The motor mover drives the slider to perform linear motion. A lateral air float is provided on the side of the slider away from the motor mover, and a vertical air float is provided on the surface of the slider opposite to the lower cover plate.

[0006] The beneficial effects of the linear motion platform described in this invention are as follows: Since the slider connects to the motor mover after passing through the center of the motor stator on one side, the motor mover carries the slider in a linear motion along the motor stator under the action of magnetic force. At the same time, the slider is supported vertically and laterally by vertical and lateral air flotation, ensuring that the entire slider will not come into contact with the support frame and the lower cover plate during the movement. Combined with the magnetic force of the slider at the center of the motor stator, the friction of the slider during the movement is effectively reduced. Not only is lubrication not required, but friction particles are also not generated. Meanwhile, the support frame is connected to the upper cover plate and the lower cover plate respectively, which enhances the rigidity of the entire motion platform and improves its stability.

[0007] Optionally, a vertical preload magnet is provided on the side of the slider near the lower cover plate, the vertical preload magnet being used to preload the vertical air float, and a lateral preload magnet is provided on the side of the slider near the support frame, the lateral preload magnet being used to preload the lateral air float, and the side of the slider away from the motor mover is the side near the support frame.

[0008] Optionally, the motor stator includes a first magnet and a second magnet disposed opposite to each other, a partition groove is provided between the first magnet and the second magnet, the slider passes through the partition groove and is suspended in the partition groove by the vertical air buoyancy.

[0009] Optionally, the first magnet and the second magnet are the same size, and the slider is positioned at the middle position between the first magnet and the second magnet.

[0010] Optionally, the vertical air flotation includes a primary vertical air flotation and a secondary vertical air flotation, wherein the primary and secondary vertical air flotations form a supporting plane to support the slider. The beneficial effect is that the motor stator formed by the first and second magnets is located on the side of the lower cover plate. Since the center of gravity of the motor stator is located between the first and second magnets, no additional torque is generated when the motor rotor moves, ensuring the stability of the entire platform at high accelerations.

[0011] Optionally, the number of primary vertical air floats is at least two, the number of secondary vertical air floats is at least one, and the vertical preload magnet includes a first vertical preload magnet and a second vertical preload magnet disposed on the slider. The first vertical preload magnet is disposed between adjacent primary vertical air floats, and the second vertical preload magnet is disposed on both sides of the secondary vertical air float. The primary vertical air floats are arranged along the moving direction of the motor mover.

[0012] Optionally, the line connecting the center point of the first-stage vertical air float and the center point of the first vertical preload magnet is parallel to the direction of movement of the slider, and the line connecting the center point of the second-stage vertical air float and the center point of the second vertical preload magnet is parallel to the direction of movement of the slider.

[0013] Optionally, the number of lateral air floats is at least two, and the lateral preload magnets are disposed between adjacent lateral air floats.

[0014] Optionally, the surface of the upper cover plate is also provided with a grating ruler, and a reading head corresponding to the grating ruler is installed on the slider to locate the movement of the slider. The beneficial effect is that the movement process of the motor mover is accurately detected by the grating ruler, thereby effectively improving the motion positioning accuracy of the entire linear platform.

[0015] Optionally, the slider includes a main slide plate and a connecting frame. The main slide plate is connected to the connecting frame on the side near the support frame. The vertical air float and the vertical preload magnet are both installed on the side of the main slide plate near the lower cover plate. The number of connecting frames is the same as the number of lateral air floats. The lateral air floats are installed on the side of the connecting frame near the support frame.

[0016] Optionally, the connecting frame is detachably connected to the main slide plate.

[0017] Optionally, a cooling plate is provided on the side of the first magnet near the support frame or on the side of the second magnet near the support frame. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the linear motion platform according to an embodiment of the present invention;

[0019] Figure 2 Embodiments of the present invention Figure 1 A schematic diagram of the structure of the lower cover plate in the linear motion platform;

[0020] Figure 3 This is a schematic diagram of the slider of the linear motion platform according to an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the structure of the upper cover plate of the linear motion platform according to an embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0023] To address the problems existing in the prior art, embodiments of the present invention provide a linear motion platform, with reference to... Figure 1 The device includes a lower cover plate 10, a support frame 11, an upper cover plate 12, a slider 13, a motor stator 14, and a motor mover 15. The lower cover plate 10 and the upper cover plate 12 are arranged opposite to each other. One side of the upper cover plate 12 is connected to the lower cover plate 10 through the support frame 11. The motor stator 14 is arranged on the other side of the upper cover plate 12. The slider 13 passes through the motor stator 14, and one side of the slider 13 is connected to the motor mover 15. The motor mover 15 drives the slider 13 to move linearly. A lateral air float 23 is provided on the side of the slider 13 away from the motor mover 15, and a vertical air float 21 is provided on the surface of the slider 13 opposite to the lower cover plate 10.

[0024] In this embodiment, since one side of the lower cover plate 10 and one side of the upper cover plate 12 are connected together by the support frame 11, the rigidity of the entire linear motion platform is ensured, and a horizontal lateral force is provided to support the slider 13 during movement. Because one side of the slider 13 passes through the motor stator 14 and is suspended above the lower cover plate 10 under magnetic force, the slider 13 is driven by the magnetic force of the motor mover 15 and the motor stator 14 to move linearly along the motor stator 14. The linear motor composed of the motor mover 15 and the motor stator 14 directly drives the slider 13, effectively improving the feed accuracy of the worktable, shortening the response time, and meeting the requirements for high response.

[0025] refer to Figure 2 The slider 13 is provided with a vertical preload magnet 22 on the side near the lower cover plate 10. The vertical preload magnet 22 is used to preload the vertical air float 21. The slider 13 is provided with a lateral preload magnet 24 on the side near the support frame 11. The lateral preload magnet 24 is used to preload the lateral air float 23. The side of the slider 13 away from the motor mover 15 is the side near the support frame 11.

[0026] It should be noted that in this solution, vertical refers to the direction perpendicular to the plane where the lower cover plate 10 is located, while lateral refers to the direction perpendicular to the plane where the support frame 11 is located.

[0027] In this embodiment, the slider 13 is supported by a vertical air float 21 on the surface of the slider 13 relative to the lower cover plate 10 and a lateral air float 23 on the surface of the slider 13 relative to the support frame 11. This allows the slider 13 to suspend on the surface of the lower cover plate 10. During the movement of the slider 13, there is virtually no frictional resistance between it and the lower cover plate 10 and the upper cover plate 12. Only a small driving force from the motor mover 15 and the motor stator 14 is needed to provide a large acceleration to the slider 13, thus meeting the requirements for high acceleration. On the other hand, since there is no friction between the slider 13 and the lower cover plate 10 and the upper cover plate 12, lubrication is not required, and no particles are generated due to friction, effectively avoiding the disadvantages of friction caused by conventional guide rails.

[0028] In some embodiments, the motor stator 14 includes a first magnet 141 and a second magnet 142 disposed opposite to each other, a partition groove 143 is provided between the first magnet 141 and the second magnet 142, the slider 13 passes through the partition groove 143 and is suspended in the partition groove 143 by the vertical air float 21.

[0029] Specifically, a partition groove 143 is provided between the first magnet 141 and the second magnet 142 so that after the slider 13 passes through the motor stator 14, it can move linearly along the partition groove 143 under the drive of the motor mover 15. Furthermore, the vertical air buoy 21 at the bottom of the slider 13 provides an upward force perpendicular to the plane of the slider 13. This force cancels out the weight of the slider 13, ensuring that the slider 13 can stably suspend above the lower cover plate 10, without contacting the lower cover plate 10 or the first magnet 141 and the second magnet 142, effectively reducing friction.

[0030] In some embodiments, the first magnet 141 and the second magnet 142 are the same size, and the slider 13 is located in the middle of the first magnet 141 and the second magnet 142. Since the slider 13 is the entire motion device and is located at the center of the entire motor stator 14, when the motor mover 15 and the motor stator 14 generate an acceleration force due to magnetic action, the slider 13 will not easily deviate, thereby effectively ensuring the stability of the entire slider 13 during the motion process.

[0031] In some embodiments, the vertical air flotation 21 includes a primary vertical air flotation 211 and a secondary vertical air flotation 212, wherein the primary vertical air flotation 211 and the secondary vertical air flotation 212 form a support plane to support the slider 13.

[0032] In order to provide a vertically upward force to the slider 13, the vertical air flotation 21 is formed by the first-stage vertical air flotation 211 and the second-stage vertical air flotation 212 to form a support plane, so as to provide a vertically upward force through the support plane, thereby supporting and suspending the slider 13.

[0033] In some other embodiments, the primary vertical air flotation 211 and the secondary vertical air flotation 212 are two parallel strip structures to effectively support the slider 13.

[0034] In other embodiments, reference is made to Figure 3 The number of primary vertical air floats 211 is at least two, the number of secondary vertical air floats 212 is at least one, and the vertical preload magnet 22 includes a first vertical preload magnet 221 and a second vertical preload magnet 222 disposed on the slider. The first vertical preload magnet 221 is disposed between adjacent primary vertical air floats 211, and the second vertical preload magnet 222 is disposed on both sides of the secondary vertical air float 212. The primary vertical air floats 211 are arranged along the moving direction of the motor mover 15.

[0035] Specifically, there are two primary vertical air floats 211, arranged along the direction of movement of the motor mover 15, with a first vertical preload magnet 221 positioned between adjacent primary vertical air floats 211. There is one secondary vertical air float 212, with second vertical preload magnets 222 positioned on either side of the secondary vertical air float 212 facing the direction of movement of the slider 13. Thus, during the movement of the slider 13 supported by the primary vertical air floats 211, the first vertical preload magnet 221 preloads the movement of the primary vertical air floats 211; and during the movement of the slider 13 supported by the secondary vertical air floats 212, the second vertical preload magnet 222 preloads the movement of the secondary vertical air floats 212, ensuring the accuracy of the slider 13's movement. Furthermore, the two primary vertical air floats 211 and one secondary vertical air float 212 form a triangular support plane, ensuring the stability of the slider 13 during movement.

[0036] In some embodiments, the line connecting the center point of the first-stage vertical air buoy 211 and the center point of the first vertical preload magnet 221 is parallel to the direction of movement of the slider 13, and the line connecting the center point of the second-stage vertical air buoy 212 and the center point of the second vertical preload magnet 222 is parallel to the direction of movement of the slider 13. This makes the preloading process of the first and second vertical preload magnets 221 more accurate, thereby improving the accuracy and stability of the slider 13's movement.

[0037] In some embodiments, continue to refer to Figure 4 The number of lateral air floats 23 is at least two, and the lateral preload magnets 24 are disposed between adjacent lateral air floats 23. Similar to the principle of vertical air floats 21, the lateral air floats 23 and lateral preload magnets 24 disposed on the opposite sides of the slider 13 and the support frame 11 provide air buoyancy support and preload for the movement of the slider 13's side, ensuring that the side of the slider 13 does not directly contact the support frame 11.

[0038] In some embodiments, a grating ruler 16 is further provided on the surface of the upper cover plate 12, and a reading head (not shown in the figure) corresponding to the grating ruler 16 is installed on the slider 13 to locate the movement of the slider 13 and improve the accuracy of positioning. Since the grating ruler 16 is installed on the surface of the upper cover plate 12, the movement process of the motor mover 15 is detected by the cooperation of the grating ruler 16 and the reading head, thereby achieving precise positioning and improving the accuracy of the movement process of the slider 13.

[0039] In some embodiments, the slider 13 includes a main slide plate 131 and a connecting frame 132. The main slide plate 131 is connected to the connecting frame 132 on the side near the support frame 11. The vertical air float 21 and the vertical preload magnet 22 are both installed on the side of the main slide plate 131 near the lower cover plate 10. The number of connecting frames 132 is the same as the number of lateral air floats 23, and the lateral air floats 23 are installed on the side of the connecting frame 132 near the support frame 11. By providing an installation position for the lateral air floats 23 through the connecting frame 132, the size of the main slide plate 131 can be reduced.

[0040] In some embodiments, the connecting frame 132 is detachably connected to the main slide plate 131, facilitating quick assembly and disassembly between the connecting frame 132 and the main slide plate 131. Specifically, the connecting frame 132 and the main slide plate 131 are connected by bolts.

[0041] In some embodiments, a cooling plate 17 is provided on the side of the first magnet 141 near the support frame 11 or on the side of the second magnet 142 near the support frame 11. When heat is generated between the motor rotor 15 and the motor stator 14 due to magnetic force, the cooling plate 17 on the first magnet 141 or the second magnet 142 cools the entire motor stator 14, thus protecting the motor stator 14.

[0042] On the other hand, the motor mover 15 is provided with a cooling channel (not shown in the figure), which can ensure that the heat of the coil inside the motor mover 15 can be better discharged, so as to ensure that the motor mover 14 will not overheat after working for a long time and play a protective role for the motor mover 14.

[0043] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A linear motion platform, characterized in that, The device includes a lower cover plate, a support frame, an upper cover plate, a slider, a motor stator, and a motor mover. The lower cover plate and the upper cover plate are arranged opposite to each other. One side of the upper cover plate is connected to the lower cover plate through the support frame. The motor stator is arranged on the other side of the upper cover plate. The slider passes through the motor stator, and one side of the slider is connected to the motor mover. The motor mover drives the slider to move in a straight line. A lateral air float is provided on the side of the slider away from the motor mover, and a vertical air float is provided on the surface of the slider opposite to the lower cover plate. The slider includes a main slide plate and a connecting frame. The main slide plate is connected to the connecting frame on the side opposite to the support frame. The vertical air float is installed on the side of the main slide plate near the lower cover plate, and the lateral air float is installed on the side of the connecting frame near the support frame. The vertical air flotation includes two primary vertical air flotations and one secondary vertical air flotation, which form a triangular support plane. A vertical preload magnet is provided on the side of the slider near the lower cover plate. The vertical preload magnet is used to preload the vertical air float. A lateral preload magnet is provided on the side of the slider near the support frame. The lateral preload magnet is used to preload the lateral air float.

2. The linear motion platform according to claim 1, characterized in that, The side of the slider away from the motor actuator is the side closer to the support frame.

3. The linear motion platform according to claim 1, characterized in that, The motor stator includes a first magnet and a second magnet arranged opposite to each other, with a partition groove between the first magnet and the second magnet. The slider passes through the partition groove and is suspended in the partition groove by the vertical air buoyancy.

4. The linear motion platform according to claim 3, characterized in that, The first magnet and the second magnet are the same size, and the slider is positioned in the middle of the first magnet and the second magnet.

5. The linear motion platform according to claim 2, characterized in that, The vertical preload magnet includes a first vertical preload magnet and a second vertical preload magnet disposed on the slider. The first vertical preload magnet is disposed between adjacent first-stage vertical air floats, and the second vertical preload magnet is disposed on both sides of the second-stage vertical air floats. The first-stage vertical air floats are arranged along the moving direction of the motor mover.

6. The linear motion platform according to claim 5, characterized in that, The line connecting the center point of the first-stage vertical air float and the center point of the first vertical preload magnet is parallel to the direction of movement of the slider, and the line connecting the center point of the second-stage vertical air float and the center point of the second vertical preload magnet is parallel to the direction of movement of the slider.

7. The linear motion platform according to any one of claims 2 to 6, characterized in that, The number of lateral air floats is at least two, and the lateral preload magnets are arranged between adjacent lateral air floats.

8. The linear motion platform according to claim 1, characterized in that, The surface of the upper cover plate is also provided with a grating ruler, and a reading head corresponding to the grating ruler is installed on the slider to position the movement of the slider.

9. The linear motion platform according to claim 7, characterized in that, The vertical preload magnet is installed on the side of the main slide plate near the lower cover plate, and the number of the connecting frames is the same as the number of the lateral air floats.

10. The linear motion platform according to claim 9, characterized in that, The connecting frame is detachably connected to the main slide plate.

11. The linear motion platform according to claim 3, characterized in that, A cooling plate is provided on the side of the first magnet near the support frame or on the side of the second magnet near the support frame.

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