Blind hole bubble elimination equipment and elimination method

Abstract

The present invention discloses a blind hole bubble elimination device and elimination method; wherein, the blind hole bubble elimination device of the present invention comprises a first liquid storage container and a negative pressure defoaming device, the first liquid storage container is used to store liquid medicine; the negative pressure defoaming device comprises a negative pressure generator and a plurality of suction pieces, the suction pieces are arranged in the first liquid storage container and are located on one side or two opposite sides of the plate immersion path, the suction pieces are connected to the negative pressure generator, and a liquid suction port is arranged on the side of the suction piece facing the plate immersion path. The blind hole bubble elimination method of the present invention comprises the following steps: immersing the plate into liquid medicine and absorbing the liquid medicine on the surface of the plate below the liquid surface of the liquid medicine, so that negative pressure is generated on the surface of the plate. The blind hole bubble elimination device and elimination method of the present invention can achieve defoaming of the blind hole and improve the wetting effect of the blind hole, thereby improving the quality of electroplating.

Description

Technical Field

[0001] The invention relates to the technical field of PCB processing, and in particular to a blind hole bubble elimination device and a method thereof. Background Art

[0002] With the development of communication technology, the density of PCB design is getting higher and higher. In addition to the increasing number of PCB layers, the line width and spacing are getting smaller and smaller, and the through-hole diameter is also getting smaller and smaller. The diameter of the via hole is reduced from the original 0.3mm to 0.1mm; in order to ensure the integrity of high-speed signal transmission and solve the crosstalk problem caused by the via hole, back drilling technology is widely used in high-speed products, but because the back drilling hole occupies a certain space and the existence of the back drilling STUB, the application of deep micro blind vias is increasing. Especially in high-end routers, servers and other products, more and more applications are being used. However, due to the difficulty of wetting deep micro blind vias and the problem of bubbles, the electroplating layer at the bottom of the blind hole is abnormal, which seriously affects the reliability and electrical performance of the product. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a blind hole bubble elimination device and elimination method, which can achieve the defoaming of the blind hole and improve the wetting effect of the blind hole, thereby improving the electroplating quality.

[0004] According to an embodiment of the first aspect of the present invention, a blind hole bubble elimination device includes a first liquid storage container and a negative pressure defoaming device; the first liquid storage container is used to store the medicine solution; the negative pressure defoaming device includes a negative pressure generator and a plurality of suction pieces, the suction pieces are arranged in the first liquid storage container and are located on one side or two opposite sides of the plate immersion path, the suction pieces are connected to the negative pressure generator, and a suction port is arranged on the side of the suction piece facing the plate immersion path.

[0005] The blind hole bubble elimination device according to the embodiment of the present invention has at least the following beneficial effects: since the suction piece is arranged in the first liquid storage container, sufficient liquid medicine can be injected into the first liquid storage container so that the liquid medicine overflows the suction piece, and the plate can be immersed in the liquid medicine of the first liquid storage container along the plate immersion path; since the suction piece is arranged on one side of the plate immersion path, and the suction port of the suction piece is arranged toward the plate immersion path, in the process of the plate immersing the liquid medicine gradually along the plate immersion path with the surface provided with the blind hole facing the suction piece, the suction piece will absorb the liquid medicine around the surface of the plate to form a liquid medicine corresponding to the suction piece on the surface of the plate. Negative pressure is generated around the position, so that when the blind hole on the plate passes through the position corresponding to the suction piece, the pressure inside the blind hole is greater than the pressure outside the blind hole, so that the bubbles in the blind hole can run out of the blind hole and enter the suction piece and the negative pressure generator along with the absorbed liquid. When the blind hole leaves the position corresponding to the suction piece, since the bubbles have run out of the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, so that the liquid can quickly reach the inside of the blind hole for infiltration; therefore, the blind hole bubble elimination equipment of this embodiment can perform negative pressure defoaming treatment on the plate through the suction piece, which is beneficial to improving the electroplating quality of the plate.

[0006] According to some embodiments of the present invention, a blind hole bubble elimination device

[0007] It also includes a plate surface spraying device, which includes an injection member and a second pump body. The injection member is arranged in the first liquid storage container and is located on one side or two opposite sides of the plate immersion path. The injection member is connected to the liquid outlet of the second pump body, and the injection member is provided with an injection port on the side facing the plate immersion path. The injection member is arranged below the suction member.

[0008] According to some embodiments of the present invention, the blind hole bubble elimination device also includes a vibration device, which is disposed in the first liquid storage container and below the injection member, and is used to vibrate the plate entering the first liquid storage container.

[0009] According to some embodiments of the present invention, two groups of suction members and two groups of injection members are provided, and the two groups of suction members and the two groups of injection members are arranged at intervals to form a plate immersion path between the two groups of suction members and the two groups of injection members.

[0010] According to some embodiments of the present invention, the blind hole bubble elimination device also includes a third liquid storage container, the liquid inlet of the second pump body is connected to the third liquid storage container, and the third liquid storage container is in communication with the first liquid storage container.

[0011] According to some embodiments of the present invention, the injection component is a nozzle, which includes a second tube body and a nozzle portion, the nozzle portion is arranged on the peripheral side surface of the second tube body, and the injection port is arranged in the nozzle portion, and the second tube body is connected to the second pump body through a second pipeline.

[0012] According to some embodiments of the present invention, the blind hole bubble elimination device also includes a second liquid storage container, the negative pressure generator includes a first pump body and a filter device, the suction piece is connected to the liquid suction port of the first pump body, the liquid inlet of the filter device is connected to the liquid outlet of the first pump body, the liquid outlet of the filter device is connected to the second liquid storage container, and the filter device is used to filter the medicine to separate the air in the medicine, and the second liquid storage container is connected to the first liquid storage container.

[0013] According to some embodiments of the present invention, the suction member is a suction knife, which includes a first tube body portion and a suction nozzle portion, the suction nozzle portion is arranged on the peripheral side surface of the first tube body portion, and the liquid suction port is arranged at the suction nozzle portion, and the first tube body portion is connected to the first pump body through a first pipeline.

[0014] A method for eliminating bubbles in a blind hole according to a second aspect of the present invention comprises the following steps:

[0015] The plate is immersed in the liquid medicine and the liquid medicine on the surface of the plate is absorbed below the liquid medicine level to generate negative pressure on the surface of the plate.

[0016] The blind hole bubble elimination method according to the second aspect of the present invention has at least the following beneficial effects:

[0017] By immersing the plate in the chemical solution and absorbing the chemical solution on the surface of the plate below the liquid surface, negative pressure can be generated on the surface of the plate, and the pressure inside the blind hole can be greater than the pressure outside the blind hole, so that the bubbles in the blind hole can run out of the blind hole. After absorbing the chemical solution, since the bubbles have run out of the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, so that the chemical solution can quickly reach the inside of the blind hole to achieve infiltration, thereby achieving the effect of eliminating bubbles in the blind hole and improving the wetting effect of the blind hole, which is beneficial to improving the electroplating quality of the plate.

[0018] According to some embodiments of the present invention, immersing a plate in a liquid medicine and absorbing the liquid medicine on the surface of the plate below the liquid medicine surface includes the following steps: gradually immersing the plate in the liquid medicine, and during the immersion process, allowing the surface of the plate provided with blind holes to gradually pass through the area below the liquid medicine surface where the liquid medicine is absorbed.

[0019] According to some embodiments of the present invention, the method for eliminating bubbles in blind holes further includes the following steps: spraying the liquid medicine onto the surface of the plate where the blind holes are arranged, below the area where the liquid medicine is absorbed.

[0020] According to some embodiments of the present invention, the method for eliminating bubbles in blind holes further includes the following steps: vibrating the plate immersed in the chemical solution.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0023] Figure 1 It is a schematic diagram of the overall structure of a blind hole bubble elimination device according to an embodiment of the first aspect of the present invention;

[0024] Figure 2 for Figure 1 A side view of the suction member shown in;

[0025] Figure 3 for Figure 1 A front view of the suction member shown in;

[0026] Figure 4 for Figure 1 A side view of the injection member shown in ;

[0027] Figure 5 for Figure 1 A front view of the injection member shown in;

[0028] Figure 6 This is a flow chart of a method for eliminating bubbles in blind holes according to an embodiment of the second aspect of the present invention. Description of the drawings:

[0030] Plate 100; a first liquid storage container 210, a second liquid storage container 220, and a third liquid storage container 230; a first pump body 310, a first main pipe 320, a first branch pipe 330, a suction member 340, a first tube body portion 341, a suction nozzle portion 342, a liquid suction port 343, and a filtering device 350; a second pump body 410, a second main pipe 420, a second branch pipe 430, an injection member 450, a second tube body portion 451, a nozzle portion 452, and an injection hole 453; a vibration device 500. DETAILED DESCRIPTION

[0031] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0032] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, left, right, front, back, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0033] In the description of the present invention, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0034] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0035] The following is the attached Figure 1 To Attachment Figure 5 , describing the blind hole bubble elimination device of the first aspect embodiment of the present invention.

[0036] Reference Figures 1 to 5 The blind hole bubble elimination device of this embodiment includes a first liquid storage container 210 and a negative pressure defoaming device.

[0037] The first liquid storage container 210 is used to store liquid medicine. The negative pressure defoaming device includes a negative pressure generator and a plurality of suction members 340. The suction members 340 are arranged in the first liquid storage container 210, so that when enough liquid medicine is injected into the first liquid storage container 210, the liquid medicine can cover the suction members 340.

[0038] Furthermore, the suction member 340 can be selectively arranged on one side or two opposite sides of the plate immersion path according to actual conditions. For example, when only one side of the plate 100 is provided with a blind hole, the suction member 340 can be arranged on one side of the plate immersion path; and when blind holes are provided on both opposite side surfaces of the plate 100, the suction member 340 can be correspondingly arranged on the opposite sides of the plate immersion path.

[0039] The suction member 340 is connected to the negative pressure generator, and a suction port 343 is provided on the side of the suction member 340 facing the plate immersion path, so that when the negative pressure generator is working, the suction port 343 can generate negative pressure to absorb the liquid in the plate immersion path.

[0040] When performing the defoaming operation, the plate 100 can be immersed in the liquid medicine along the plate immersion path in a manner that the surface provided with the blind hole faces the suction piece 340. The suction piece 340 will absorb the liquid medicine around the surface of the plate 100 to generate negative pressure around the position on the surface of the plate 100 corresponding to the suction piece 340, so that when the blind hole on the plate 100 passes the position corresponding to the suction piece 340, the pressure inside the blind hole is greater than the pressure outside the blind hole, so that the bubbles in the blind hole can run out of the blind hole and enter the suction piece 340 and the negative pressure generator along with the absorbed liquid medicine. When the blind hole leaves the position corresponding to the suction piece 340, since the bubbles have run out of the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, so that the liquid medicine can quickly reach the inside of the blind hole for infiltration. Therefore, the present embodiment can perform negative pressure defoaming treatment on the plate 100 through the suction piece 340, which is beneficial to improving the electroplating quality of the plate.

[0041] It is understandable that the plate 100 needs to be pre-treated before electroplating, such as degreasing and acid dipping. The problems of insufficient wetting and bubble in the deep micro blind holes in the plate 100 mainly occur in the pre-treatment processes such as degreasing and acid dipping. Therefore, the chemical solution can be specifically configured according to the different selective pre-treatment steps required.

[0042] It can be understood that the plate immersion path is the path for the plate 100 to enter the medicine solution. In the present embodiment, the plate immersion path is set as a vertical path from top to bottom. Of course, in some other embodiments, the plate immersion path can also be set as an inclined path from top to bottom.

[0043] Furthermore, in order to enable the plate 100 to enter the medicine liquid along the set plate immersion path, in some of the embodiments, a specific limiting structure can be set in the first liquid storage container 210 to limit the plate 100. For example, a slot parallel to the plate immersion path can be set in the first liquid storage container 210, and then the edge of the plate 100 is slid and engaged in the slot, so that the plate 100 slides along the slot; or, in some other embodiments, the plate 100 can be limited by an existing structure set in the first liquid storage container 210. For example, the plate 100 can be limited by relatively arranged suction members 340 in the first liquid storage container 210, and the plate immersion path is formed between structures such as the suction member 340; or, in other embodiments, the plate 100 is connected to the driving end of a driving element such as a cylinder by a clamp, and then the plate 100 is driven by the driving element such as the cylinder to accurately enter the medicine liquid along the set plate immersion path. It should be understood that, in order to simplify the structure, the second implementation method mentioned above is selected in this embodiment to limit the movement of the plate 100 along the plate immersion path, and it will be described in detail below.

[0044] Reference Figure 1 It can be understood that the blind hole bubble elimination equipment also includes a plate surface spraying device, which includes an injection member 450 and a second pump body 410, the injection member 450 is connected to the liquid outlet of the second pump body 410, and the injection member 450 is provided with a spray port, so that the injection member 450 can spray the liquid pumped by the second pump body 410 through the spray port; the injection member 450 is arranged in the first liquid storage container 210 and is located below the suction member 340; according to the arrangement of the blind holes on the plate 100, similar to the suction member 340, the injection member 450 can be selectively arranged on one side or two opposite sides of the plate immersion path, and the spray port is arranged on the side of the injection member 450 facing the plate immersion path, so that the liquid sprayed out through the spray port can be sprayed to The plate 100 is immersed in the liquid medicine along the plate immersion path; since there may be bubbles in the liquid medicine, after the negative pressure defoaming treatment of the suction member 340, some bubbles may flow into the blind hole together with the liquid medicine, or there may be some bubbles remaining in the blind hole that have not been completely eliminated after the negative pressure defoaming treatment. After the negative pressure defoaming treatment, the wettability in the blind hole increases, and the volume and tension of the bubbles decrease. The liquid medicine is sprayed onto the surface of the plate 100 through the injection member 450, which will generate strong turbulence on the plate surface of the plate 100 and inside and outside the blind hole, so that the liquid medicine can be quickly exchanged inside and outside the blind hole, easily driving out bubbles, and further improving the wettability of the inside of the blind hole, especially the bottom, so that the electroplating solution can easily enter the bottom of the blind hole during the next step of electroplating.

[0045] Reference Figure 1 It can be understood that the blind hole bubble elimination device also includes a vibration device 500, which is arranged in the first liquid storage container 210, the vibration device 500 is located below the injection member 450, and is arranged at the end of the plate immersion path, so that the plate 100 immersed in the liquid will eventually reach the vibration device 500, and the vibration device 500 is used to vibrate the plate 100 entering the first liquid storage container 210, so as to make the bubbles overflow from the deep micro blind hole through vibration. Therefore, in this embodiment, by sequentially arranged the suction member 340, the injection member 450 and the vibration device 500 along the plate immersion path, the plate 100 immersed in the liquid along the plate immersion path can realize triple defoaming of negative pressure, high pressure injection and vibration in sequence, thereby greatly improving the defoaming and wetting effect of the deep micro blind hole.

[0046] Reference Figure 1It can be understood that, in the present embodiment, two groups of suction members 340 and injection members 450 are provided, each group of suction members 340 includes a plurality of suction members 340 vertically arranged in the up-down direction, each group of injection members 450 includes a plurality of injection members 450 vertically arranged in the up-down direction, and the two groups of suction members 340 and the two groups of injection members 450 are spaced apart to form a plate immersion path between the two groups of suction members 340 and the two groups of injection members 450, so that when the plate 100 is immersed in the liquid medicine along the plate immersion path, the suction members 340 or the injection members 450 located on both sides of the plate 100 can be used to limit the position of the plate 100, so that the plate 100 can be gradually immersed in the liquid medicine along the plate immersion path.

[0047] Reference Figure 1 It can be understood that the blind hole bubble elimination device also includes a second liquid storage container 220, the negative pressure generator includes a first pump body 310 and a filter device 350, the suction member 340 is connected to the suction port 343 of the first pump body 310, the liquid inlet of the filter device 350 is connected to the liquid outlet of the first pump body 310, the liquid outlet of the filter device 350 is connected to the second liquid storage container 220, and the filter device 350 is used to filter the liquid to separate the air in the liquid, and the second liquid storage container 220 is connected to the first storage The first liquid storage container 210 and the second liquid storage container 220 are also used to store the medicine liquid; the medicine liquid and bubbles sucked by the suction member 340 will enter the filter device 350, the filter device 350 will filter out the bubbles in the medicine liquid, and discharge the filtered medicine liquid into the second liquid storage container 220 through the liquid outlet, and the second liquid storage container 220 is connected to the first liquid storage container 210, so that the medicine liquid in the second liquid storage container 220 can flow back to the first liquid storage container 210 to realize the circulation of the medicine liquid.

[0048] Reference Figure 2 and Figure 3 It can be understood that in order to better suck the medicine liquid on the surface of the plate 100, the suction piece 340 is a suction knife, which includes a first tube body portion 341 and a suction nozzle portion 342. The suction nozzle portion 342 is arranged on the peripheral side of the first tube body portion 341, and the suction port 343 is arranged at the suction nozzle portion 342. The first tube body portion 341 is connected to the first pump body 310 through a first pipeline, so that the adsorption force generated when the first pump body 310 is working will cause a negative pressure to be generated in the first tube body portion 341, and the medicine liquid can be sucked into the suction piece 340 from the suction port 343.

[0049] Reference Figure 2 and Figure 3It can be understood that the suction nozzle 342 is arranged to extend along the axial direction of the first tube body 341, and the cross-sectional profile of the suction nozzle 342 is trapezoidal, and the width of the suction nozzle 342 is smaller on the side closer to the plate immersion path, so that the negative pressure adsorption force generated by the suction port 343 can be more concentrated, thereby enhancing the negative pressure defoaming effect. It can be understood that the width of the suction port 343 should not be too large, and the width of the suction port 343 is selected to be between 0.5mm and 5mm, and the width of the opening of the suction nozzle 342 connected to one end of the first tube body 341 is greater than the width of the suction port 343, and the width of the opening of the suction nozzle 342 connected to one end of the first tube body 341 can be selected to be 5-20 times the width of the suction port 343; specifically, in this embodiment, the width of the suction port 343 is set to 2mm, and the width of the opening of the suction nozzle 342 connected to one end of the first tube body 341 is set to 20mm, and the inner diameter of the first tube body is set to 100mm.

[0050] Reference Figure 1 It can be understood that the first pipeline includes a first main pipe 320 and a plurality of first branch pipes 330, wherein the first main pipe 320 is connected to the liquid outlet of the first pump body 310, and the first branch pipes 330 are connected to the first main pipe 320 at one end, and are connected to the first pipe body 341 at the other end. In addition, in this embodiment, specifically, the blind hole bubble elimination device can be provided with two sets of first pipelines, the first pump body 310, the filter device 350 and a set of second liquid storage container 220, and each set of suction pieces 340 is respectively configured with a set of first pipelines, the first pump body 310, the filter device 350 and the second liquid storage container 220, that is, each set of suction pieces 340 can work independently, so that for the plate 100 with blind holes on both sides of the opposite surfaces, the two sets of suction pieces 340 can work simultaneously to achieve negative pressure defoaming, and for the plate 100 with blind holes on only one side, only one set of suction pieces 340 can be started to perform negative pressure defoaming.

[0051] Of course, it should be understood that in some other embodiments, the blind hole bubble elimination device can also be configured with a set of first pipelines, a first pump body 310, a filter device 350 and a second liquid storage container 220 to simultaneously connect two sets of suction members 340.

[0052] Alternatively, in some other embodiments, the blind hole bubble elimination device may also be provided with two sets of first pipelines, first pump bodies 310 and filter devices 350, and a set of second liquid storage container 220, so that each group of suction pieces 340 is configured with a set of first pipelines, first pump bodies 310 and filter devices 350, and the liquid outlets of the two filter devices 350 are connected to the same second liquid storage container 220; and, in the case where multiple blind hole bubble elimination devices are provided in the production line, the multiple blind hole bubble elimination devices can also share the same second liquid storage container 220.

[0053] Reference Figure 1 It can be understood that the blind hole bubble elimination device also includes a third liquid storage container 230, the liquid inlet of the second pump body 410 is connected to the third liquid storage container 230, the third liquid storage container 230 is communicated with the first liquid storage container 210, and the third liquid storage container 230 is also used to store liquid medicine, so that the second pump body 410 can draw liquid medicine from the third liquid storage container 230 and spray it onto the plate 100 immersed in the liquid medicine through the injection member 450, and the third liquid storage container 230 is communicated with the first liquid storage container 210, so that the liquid medicine in the first liquid storage container 210 can flow back to the third liquid storage container 230, so that the liquid medicine can circulate between the first liquid storage container 210 and the third liquid storage container 230.

[0054] Reference Figure 4 and Figure 5 It can be understood that in order to better spray the liquid medicine on the plate 100, the injection component 450 is a nozzle, which includes a second tube body portion 451 and a nozzle portion 452. The nozzle portion 452 is arranged on the peripheral side of the second tube body portion 451, and the injection port is arranged at the nozzle portion 452. The second tube body portion 451 is connected to the second pump body 410 through the second pipeline, so that the liquid medicine pumped by the second pump body 410 can be pumped to the second tube body portion 451 through the second pipeline, and sprayed out through the injection port of the nozzle portion 452; specifically, the injection port is a plurality of small injection holes 453 distributed in a rectangular array, so that the water flow sprayed from the injection port can more easily enter the blind hole to drive out bubbles. It can be understood that the aperture of the injection hole 453 can be selected to be set between 0.1-1mm, and the interval between the injection holes 453 can be selected to be set between 1-10mm; in the present embodiment, specifically, the inner diameter of the second tube body portion 451 is set to 100mm, the width of the nozzle portion 452 is set to 20mm, the diameter of the injection hole 453 is set to 0.5mm, and the interval between the injection holes 453 is set to 5mm; the length of the nozzle portion 452 can be set to match the width of the plate 100, thereby ensuring that the surface of the plate 100 can be sprayed with liquid medicine over the entire width, thereby improving the overall effect of high-pressure spray defoaming.

[0055] Reference Figure 1It can be understood that the second pipeline includes a second main pipe 420 and a plurality of second branch pipes 430, wherein the second main pipe 420 is connected to the liquid outlet of the second pump body 410, and one end of the second branch pipe 430 is connected to the second main pipe 420, and the other end is connected to the second pipe body 451 in a one-to-one correspondence. In addition, in this embodiment, specifically, the blind hole bubble elimination device can be provided with two sets of second pipelines, the second pump body 410 and the third liquid storage container 230, and each set of injection components 450 is respectively configured with a set of second pipelines, the second pump body 410 and the third liquid storage container 230, that is, each set of injection components 450 can work independently, so that for the plate 100 with blind holes on both sides of the opposite surfaces, the two sets of injection components 450 can work simultaneously to achieve high-pressure injection defoaming, and for the plate 100 with blind holes on only one side, only one set of injection components 450 can be started to perform high-pressure injection defoaming.

[0056] Of course, it should be understood that in some other embodiments, the blind hole bubble elimination device can also be configured with a set of second pipelines, a second pump body 410 and a third liquid storage container 230 to simultaneously connect two sets of injection components 450.

[0057] Alternatively, in some other embodiments, the blind hole bubble elimination device may also be provided with two sets of second pipelines and second pump bodies 410, and one set of third liquid storage container 230, so that each group of injection parts 450 is respectively provided with one set of second pipelines and second pump bodies 410, and the liquid inlets of the two second pump bodies 410 are connected to the same third liquid storage container 230. Furthermore, when multiple blind hole bubble elimination devices are provided in the production line, the multiple blind hole bubble elimination devices may also share the same third liquid storage container 230.

[0058] It is understandable that the first liquid storage container 210, the second liquid storage container 220 and the third liquid storage container 230 can be selected to be containers such as a tank or a cylinder. And it should be understood that when the volume is large enough, the second liquid storage container 220 and the third liquid storage container 230 can be set as the same container, and even the first liquid storage container 210, the second liquid storage container 220 and the third liquid storage container 230 can be set as the same container.

[0059] The following is the attached Figure 6 A method for eliminating bubbles in blind holes according to an embodiment of the second aspect of the present invention is described.

[0060] Reference Figure 6 The blind hole bubble elimination method of this embodiment includes the following steps:

[0061] S100 , immersing the plate 100 in a liquid medicine and absorbing the liquid medicine on the surface of the plate 100 below the liquid surface of the liquid medicine, so as to generate a negative pressure on the surface of the plate 100 .

[0062] It should be noted that by immersing the board 100 in the chemical solution and absorbing the chemical solution on the surface of the board 100 below the liquid surface of the chemical solution, a negative pressure can be generated on the surface of the board 100, and the pressure inside the blind hole can be greater than the pressure outside the blind hole, so that the bubbles in the blind hole can run out of the blind hole. After absorbing the chemical solution, since the bubbles have run out of the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, so that the chemical solution can quickly reach the inside of the blind hole to achieve infiltration, thereby achieving the effect of eliminating the bubbles in the blind hole and improving the wetting effect of the blind hole, which is beneficial to improving the electroplating quality of the board 100.

[0063] It is understandable that in order to absorb the liquid medicine on the surface of the plate 100 below the liquid medicine surface, the negative pressure defoaming device mentioned in the first embodiment can be selected, and the absorption of the liquid medicine on the surface of the plate 100 can be completed by the absorption member 340. It should be understood that in some other embodiments, other devices can also be selected to absorb the liquid medicine on the surface of the plate 100 below the liquid medicine surface, as long as negative pressure can be generated on the surface of the plate 100.

[0064] It should be understood that the above step S100 may include the following steps:

[0065] The plate 100 is gradually immersed in the liquid medicine, and during the immersion process, the surface of the plate 100 provided with the blind holes gradually passes through the area below the liquid medicine surface where the liquid medicine is absorbed.

[0066] It should be noted that the plate 100 can be immersed in the medicine along a preset plate immersion path, and the plate immersion path is configured to pass through the area below the liquid surface where the medicine is absorbed, so that in the process of the plate 100 being immersed in the medicine, the surface of the plate 100 provided with blind holes gradually passes through the area where the medicine is absorbed, so that in the process of the plate 100 being immersed in the medicine, negative pressure defoaming of the plate 100 from bottom to top is achieved.

[0067] It can be understood that when the negative pressure defoaming device mentioned in the above-mentioned first aspect embodiment is adopted, the area where the medicine liquid below the liquid surface is absorbed is the area opposite to the absorption member 340 in the plate immersion path, so that when the position of the absorption member 340 is passed from the bottom of the plate 100 to the top of the plate 100 in sequence, the overall negative pressure defoaming of the plate 100 from bottom to top can be achieved.

[0068] Reference Figure 6 It can be understood that the blind hole bubble elimination method of this embodiment can also include the following steps:

[0069] S200 , spraying the liquid medicine onto the surface of the plate 100 provided with the blind holes below the area where the liquid medicine is absorbed.

[0070] It should be noted that, by spraying the liquid medicine onto the surface of the plate 100 where the blind holes are provided below the area where the liquid medicine is absorbed, the portion of the plate 100 that has undergone negative pressure defoaming can be defoamed again by high-pressure spraying, thereby further eliminating the bubbles in the blind holes and improving the wetting effect of the blind holes.

[0071] It is understandable that the plate surface spraying device mentioned in the above-mentioned first aspect embodiment can be selected to implement the above-mentioned step S200, and the medical liquid can be sprayed onto the plate 100 through the injection member 450; of course, it should be understood that in some other embodiments, other devices can also be selected to complete the spraying of the medical liquid on the surface of the plate 100, as long as the sprayed water flow can enter the deep micro blind holes below the liquid surface to drive away the bubbles.

[0072] Reference Figure 6 It can be understood that the blind hole bubble elimination method of this embodiment can also include the following steps:

[0073] S300 , vibrating the plate 100 immersed in the chemical solution.

[0074] It should be noted that after the plate 100 has undergone the negative pressure defoaming of step S100 and the high pressure jet defoaming of step S200 in sequence, the bubbles still remaining in the blind holes of the plate 100 can be urged to escape from the blind holes by vibrating the plate 100 immersed in the liquid medicine.

[0075] It is understandable that the vibration device 500 mentioned in the first embodiment can be selected to implement the above step S300. Specifically, the vibration device 500 can be a mechanical vibration device driven by an eccentric motor, etc., or an ultrasonic generator that can emit ultrasonic waves to vibrate the plate 100.

[0076] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A blind hole bubble elimination device, characterized in that: include: A first liquid storage container, used for storing liquid medicine; A negative pressure defoaming device, comprising a negative pressure generator and a plurality of suction pieces, wherein the suction pieces are arranged in the first liquid storage container and located on one side or two opposite sides of the plate immersion path, the suction pieces are used to be immersed in the liquid medicine, the suction pieces are connected to the negative pressure generator, and a suction port is arranged on one side of the suction piece facing the plate immersion path, so as to absorb the liquid medicine on the surface of the plate below the liquid surface of the liquid medicine; The plate surface spraying device comprises a spraying member and a second pump body, wherein the spraying member is arranged in the first liquid storage container and is located on one side or two opposite sides of the plate immersion path, the spraying member is connected to the liquid outlet of the second pump body, and a spraying port is arranged on the side of the spraying member facing the plate immersion path, and the spraying member is arranged below the suction member; in, The suction members and the injection members are both provided in two groups, and the two groups of suction members and the two groups of injection members are arranged at intervals to form the plate immersion path between the two groups of suction members and the two groups of injection members.

2. A blind hole bubble elimination device according to claim 1, characterized in that: The invention also comprises a vibration device, which is arranged in the first liquid storage container and located below the injection member, and is used for vibrating the plate member entering the first liquid storage container.

3. A blind hole bubble elimination device according to claim 1, characterized in that: A third liquid storage container is also included. The liquid inlet of the second pump body is connected to the third liquid storage container, and the third liquid storage container is in communication with the first liquid storage container.

4. A blind hole bubble elimination device according to claim 1, characterized in that: The injection component is a nozzle, which includes a second tube body and a nozzle part. The nozzle part is arranged on the peripheral side of the second tube body, and the injection port is arranged in the nozzle part. The second tube body is connected to the liquid inlet of the second pump body through a second pipeline.

5. A blind hole bubble elimination device according to any one of claims 1 to 4, characterized in that: It also includes a second liquid storage container, the negative pressure generator includes a first pump body and a filter device, the suction piece is connected to the liquid suction port of the first pump body, the liquid inlet of the filter device is connected to the liquid outlet of the first pump body, the liquid outlet of the filter device is connected to the second liquid storage container, and the filter device is used to filter the medicine to separate the air in the medicine, and the second liquid storage container is connected to the first liquid storage container.

6. A blind hole bubble elimination device according to claim 5, characterized in that: The suction member is a suction knife, which includes a first tube body and a suction nozzle. The suction nozzle is arranged on the peripheral side of the first tube body, and the liquid suction port is arranged at the suction nozzle. The first tube body is connected to the first pump body through a first pipeline.

7. A method for eliminating bubbles in a blind hole, applied to the blind hole bubble elimination device according to any one of claims 1 to 6, characterized in that: The following steps are included: The plate is immersed in the liquid medicine along the plate immersion path, and the liquid medicine on the surface of the plate is absorbed below the liquid surface of the liquid medicine by the absorption member, so that negative pressure is generated on the surface of the plate.

8. A method for eliminating bubbles in blind holes according to claim 7, characterized in that: The step of immersing the plate into the liquid medicine along the plate immersion path and absorbing the liquid medicine on the surface of the plate below the liquid medicine surface by the absorbing member comprises the following steps: The plate is gradually immersed in the liquid medicine, and during the immersion process, the surface of the plate with the blind holes gradually passes through the area below the liquid medicine surface where the liquid medicine is absorbed.

9. A method for eliminating bubbles in blind holes according to claim 8, characterized in that: The following steps are also included: Below the area where the chemical liquid is absorbed, the chemical liquid is sprayed onto the surface of the plate where the blind holes are arranged.

10. A method for eliminating bubbles in blind holes according to claim 7 or 8, characterized in that: The following steps are also included: The plate immersed in the liquid medicine is vibrated.

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